ZA744165B - Electron beam pattern generator - Google Patents

Electron beam pattern generator

Info

Publication number
ZA744165B
ZA744165B ZA00744165A ZA744165A ZA744165B ZA 744165 B ZA744165 B ZA 744165B ZA 00744165 A ZA00744165 A ZA 00744165A ZA 744165 A ZA744165 A ZA 744165A ZA 744165 B ZA744165 B ZA 744165B
Authority
ZA
South Africa
Prior art keywords
electron beam
beam pattern
pattern generator
generator
electron
Prior art date
Application number
ZA00744165A
Other languages
English (en)
Inventor
W Livesay
Original Assignee
Radiant Energy Systems
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US448283A external-priority patent/US3922546A/en
Application filed by Radiant Energy Systems filed Critical Radiant Energy Systems
Publication of ZA744165B publication Critical patent/ZA744165B/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/302—Controlling tubes by external information, e.g. programme control

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
ZA00744165A 1974-03-05 1974-06-28 Electron beam pattern generator ZA744165B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US448283A US3922546A (en) 1972-04-14 1974-03-05 Electron beam pattern generator

Publications (1)

Publication Number Publication Date
ZA744165B true ZA744165B (en) 1975-07-30

Family

ID=23779689

Family Applications (1)

Application Number Title Priority Date Filing Date
ZA00744165A ZA744165B (en) 1974-03-05 1974-06-28 Electron beam pattern generator

Country Status (7)

Country Link
JP (1) JPS50120095A (cs)
DE (1) DE2431496A1 (cs)
FR (1) FR2263600A1 (cs)
IT (1) IT1015575B (cs)
NL (1) NL7408820A (cs)
SE (1) SE7408231L (cs)
ZA (1) ZA744165B (cs)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4084095A (en) * 1977-02-14 1978-04-11 Burroughs Corporation Electron beam column generator for the fabrication of semiconductor devices

Also Published As

Publication number Publication date
DE2431496A1 (de) 1975-09-11
FR2263600B3 (cs) 1977-05-06
SE7408231L (cs) 1975-09-08
NL7408820A (nl) 1975-09-09
JPS50120095A (cs) 1975-09-19
FR2263600A1 (en) 1975-10-03
IT1015575B (it) 1977-05-20

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