YU283373A - Aluminium-tantal layers for thin-film connections as well as for discrete resistors and capacitors - Google Patents

Aluminium-tantal layers for thin-film connections as well as for discrete resistors and capacitors

Info

Publication number
YU283373A
YU283373A YU02833/73A YU283373A YU283373A YU 283373 A YU283373 A YU 283373A YU 02833/73 A YU02833/73 A YU 02833/73A YU 283373 A YU283373 A YU 283373A YU 283373 A YU283373 A YU 283373A
Authority
YU
Yugoslavia
Prior art keywords
tantal
capacitors
aluminium
layers
thin
Prior art date
Application number
YU02833/73A
Other languages
English (en)
Inventor
Manfred Roschy
Alois Schauer
Original Assignee
Siemens Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19722253490 external-priority patent/DE2253490C3/de
Application filed by Siemens Ag filed Critical Siemens Ag
Publication of YU283373A publication Critical patent/YU283373A/xx

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01CRESISTORS
    • H01C7/00Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
    • H01C7/006Thin film resistors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N97/00Electric solid-state thin-film or thick-film devices, not otherwise provided for
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/31504Composite [nonstructural laminate]
    • Y10T428/31678Of metal

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)
  • Non-Adjustable Resistors (AREA)
  • Physical Vapour Deposition (AREA)
  • Semiconductor Integrated Circuits (AREA)
YU02833/73A 1972-10-31 1973-10-31 Aluminium-tantal layers for thin-film connections as well as for discrete resistors and capacitors YU283373A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19722253490 DE2253490C3 (de) 1972-10-31 Aluminium-Tantal-Schichten für Dünnschichtschaltungen sowie diskrete Widerstände und Kondensatoren

Publications (1)

Publication Number Publication Date
YU283373A true YU283373A (en) 1982-06-30

Family

ID=5860570

Family Applications (1)

Application Number Title Priority Date Filing Date
YU02833/73A YU283373A (en) 1972-10-31 1973-10-31 Aluminium-tantal layers for thin-film connections as well as for discrete resistors and capacitors

Country Status (15)

Country Link
US (1) US3955039A (US07655688-20100202-C00010.png)
JP (1) JPS5815933B2 (US07655688-20100202-C00010.png)
AT (1) AT341630B (US07655688-20100202-C00010.png)
BE (1) BE806831A (US07655688-20100202-C00010.png)
CH (1) CH559410A5 (US07655688-20100202-C00010.png)
FR (1) FR2204850B1 (US07655688-20100202-C00010.png)
GB (1) GB1398254A (US07655688-20100202-C00010.png)
IN (1) IN142001B (US07655688-20100202-C00010.png)
IT (1) IT998990B (US07655688-20100202-C00010.png)
LU (1) LU67831A1 (US07655688-20100202-C00010.png)
NL (1) NL183111C (US07655688-20100202-C00010.png)
NO (1) NO136126C (US07655688-20100202-C00010.png)
SE (1) SE392360B (US07655688-20100202-C00010.png)
SU (1) SU518166A3 (US07655688-20100202-C00010.png)
YU (1) YU283373A (US07655688-20100202-C00010.png)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2546675C3 (de) * 1975-10-17 1979-08-02 Siemens Ag, 1000 Berlin Und 8000 Muenchen Verfahren zum Herstellen einer Dünnschichtschaltung
DE2703636C3 (de) * 1977-01-28 1985-10-10 Siemens AG, 1000 Berlin und 8000 München Regenerierfähiger elektrischer Kondensator und Verfahren zu seiner Herstellung
DE2719988C2 (de) * 1977-05-04 1983-01-05 Siemens AG, 1000 Berlin und 8000 München Amorphe, Tantal enthaltende mindestens bis 300 Grad C temperaturstabile Metallschicht und Verfahren zu ihrer Herstellung
JPS6045008A (ja) * 1983-08-22 1985-03-11 松下電器産業株式会社 薄膜コンデンサの製造方法
US4671110A (en) * 1984-12-06 1987-06-09 Kock Michiel D De Level sensing device
DE3867120D1 (de) * 1987-04-28 1992-02-06 Yoshida Kogyo Kk Amorphe alluminiumlegierungen.
FR2642891B1 (fr) * 1989-02-03 1993-12-24 Marchal Equip Automobiles Resistance shunt
EP0428730B1 (en) * 1989-02-28 1995-07-12 Canon Kabushiki Kaisha Ink jet head having heat-generating resistor constituted of non-monocrystalline substance containing iridium, tantalum and aluminum, and ink jet device equipped with said head
US5500301A (en) 1991-03-07 1996-03-19 Kabushiki Kaisha Kobe Seiko Sho A1 alloy films and melting A1 alloy sputtering targets for depositing A1 alloy films
EP0564998B1 (en) * 1992-04-07 1998-11-04 Koji Hashimoto Amorphous alloys resistant against hot corrosion
US6348113B1 (en) 1998-11-25 2002-02-19 Cabot Corporation High purity tantalum, products containing the same, and methods of making the same
US6140909A (en) * 1999-03-23 2000-10-31 Industrial Technology Research Institute Heat-generating resistor and use thereof
US6692586B2 (en) 2001-05-23 2004-02-17 Rolls-Royce Corporation High temperature melting braze materials for bonding niobium based alloys

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3013193A (en) * 1960-01-11 1961-12-12 Battelle Development Corp Compound semiconductor devices
US3627577A (en) * 1968-05-22 1971-12-14 Bell Telephone Labor Inc Thin film resistors
US3737343A (en) * 1971-04-19 1973-06-05 Bell Telephone Labor Inc Technique for the preparation of ion implanted tantalum-aluminum alloy

Also Published As

Publication number Publication date
BE806831A (fr) 1974-02-15
NL183111C (nl) 1988-07-18
SE392360B (sv) 1977-03-21
FR2204850A1 (US07655688-20100202-C00010.png) 1974-05-24
SU518166A3 (ru) 1976-06-15
FR2204850B1 (US07655688-20100202-C00010.png) 1978-06-23
DE2253490A1 (de) 1974-07-11
JPS5815933B2 (ja) 1983-03-28
AU6079473A (en) 1975-03-27
IN142001B (US07655688-20100202-C00010.png) 1977-05-14
NO136126C (no) 1977-07-20
ATA889673A (de) 1977-06-15
NO136126B (US07655688-20100202-C00010.png) 1977-04-12
LU67831A1 (US07655688-20100202-C00010.png) 1973-08-28
GB1398254A (en) 1975-06-18
AT341630B (de) 1978-02-27
DE2253490B2 (de) 1975-10-30
US3955039A (en) 1976-05-04
JPS4977174A (US07655688-20100202-C00010.png) 1974-07-25
NL7311843A (US07655688-20100202-C00010.png) 1974-05-02
CH559410A5 (US07655688-20100202-C00010.png) 1975-02-28
IT998990B (it) 1976-02-20

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