WO2025245779A1 - 掩膜组件及其制作方法 - Google Patents

掩膜组件及其制作方法

Info

Publication number
WO2025245779A1
WO2025245779A1 PCT/CN2024/096313 CN2024096313W WO2025245779A1 WO 2025245779 A1 WO2025245779 A1 WO 2025245779A1 CN 2024096313 W CN2024096313 W CN 2024096313W WO 2025245779 A1 WO2025245779 A1 WO 2025245779A1
Authority
WO
WIPO (PCT)
Prior art keywords
mask
connecting portion
mask assembly
connecting element
interval
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
PCT/CN2024/096313
Other languages
English (en)
French (fr)
Other versions
WO2025245779A9 (zh
Inventor
张微
王欣欣
谷泉泳
李华桃
王世龙
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BOE Technology Group Co Ltd
Chengdu BOE Optoelectronics Technology Co Ltd
Beijing BOE Technology Development Co Ltd
Original Assignee
BOE Technology Group Co Ltd
Chengdu BOE Optoelectronics Technology Co Ltd
Beijing BOE Technology Development Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BOE Technology Group Co Ltd, Chengdu BOE Optoelectronics Technology Co Ltd, Beijing BOE Technology Development Co Ltd filed Critical BOE Technology Group Co Ltd
Priority to PCT/CN2024/096313 priority Critical patent/WO2025245779A1/zh
Priority to CN202480001059.4A priority patent/CN121443767A/zh
Publication of WO2025245779A1 publication Critical patent/WO2025245779A1/zh
Publication of WO2025245779A9 publication Critical patent/WO2025245779A9/zh
Pending legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04—Coating on selected surface areas, e.g. using masks

Definitions

  • At least one embodiment of this disclosure relates to a mask assembly and a method for manufacturing the same.
  • OLED displays are the next generation of displays following liquid crystal displays (LCDs), offering advantages such as a wide color gamut, fast response time, and foldability.
  • LCDs liquid crystal displays
  • advantages such as a wide color gamut, fast response time, and foldability.
  • the shipment volume of display panels can be effectively increased, thereby promoting improvements in performance such as higher resolution, wider color gamut, and faster response times, resulting in a better visual experience.
  • At least one embodiment of this disclosure provides a mask assembly and a method for manufacturing it.
  • At least one embodiment of this disclosure provides a mask assembly including a plurality of mask sheets and at least one connecting element.
  • Each mask sheet includes a plurality of openings and a partition surrounding the openings.
  • the at least one connecting element is configured to connect at least two of the plurality of mask sheets.
  • the plurality of mask sheets includes adjacent first and second mask sheets.
  • the partition of the first mask sheet includes a first connecting portion, and the partition of the second mask sheet includes a second connecting portion.
  • the first connecting portion is located outside the plurality of openings of the first mask sheet, and the second connecting portion is located outside the plurality of openings of the second mask sheet.
  • the first connecting portion and the second connecting portion are close to each other, and there is a gap between at least a portion of the surfaces of the first connecting portion and the second connecting portion facing each other. At least a portion of the first connecting portion and at least a portion of the second connecting portion are located on the same side of the connecting element and are respectively connected to the connecting element.
  • the mask assembly also includes a filling element located in at least a portion of the gap.
  • the first connecting portion includes a first surface facing the gap
  • the second connecting portion includes a second surface facing the gap. At least one of the first surface and the second surface has a slope angle of less than 90 degrees relative to the connecting element.
  • a mask assembly is provided, wherein at least one of the first surface and the second surface has a slope angle of no more than 80 degrees relative to the connecting element.
  • a mask assembly is provided, wherein at least one of the first surface and the second surface has a slope angle of 10 to 40 degrees relative to the connecting element.
  • a mask assembly wherein at least one of the first surface and the second surface is intersected by a plane with an arc-shaped cross-section, the plane being parallel to the thickness direction of the connecting element and parallel to the arrangement direction of the first mask sheet and the second mask sheet.
  • a mask assembly is provided in which the surfaces of the first connecting portion and the second connecting portion facing each other are in contact with the filling element.
  • a mask assembly wherein the material of the filling element comprises one of the same material as the mask sheet and an optical adhesive.
  • a mask assembly wherein the filling element and the first connecting portion have a first thickness difference, the first thickness difference being 1/5 to 1/2 of the maximum thickness of the first connecting portion, and the filling element and the second connecting portion have a second thickness difference, the second thickness difference being 1/5 to 1/2 of the maximum thickness of the second connecting portion.
  • a mask assembly is provided according to at least one embodiment of the present disclosure, wherein at least one of the first thickness difference and the second thickness difference is 10 to 50 micrometers.
  • a mask assembly in which, in the arrangement direction of the first connecting portion and the second connecting portion, the size of the portion of the first connecting portion overlapping the connecting element in its thickness direction is not less than 1/4 of the maximum size of the first connecting portion; and/or, the size of the portion of the second connecting portion overlapping the connecting element in its thickness direction is not less than 1/4 of the maximum size of the second connecting portion.
  • a mask assembly is provided according to at least one embodiment of the present disclosure, the mask assembly further comprising: a protective film layer located on the plurality of mask sheets and overlapping with the at least one connecting element.
  • a mask assembly is provided, wherein the first connecting portion and the second connecting portion are both located on the same side of the connecting element.
  • a mask assembly is provided according to at least one embodiment of the present disclosure, wherein the first connecting portion includes a first body portion and a first end portion, the first end portion being closer to the spacing than the first body portion, and the first end portion being recessed relative to the first body portion in the thickness direction of the first connecting portion such that the first connecting portion has a first recess, and the second connecting portion includes a second main body portion.
  • the second connection has a body portion and a second end portion, the second end portion being closer to the gap than the second body portion.
  • the second end portion is recessed relative to the second body portion, such that the second connection portion has a second recess, a first portion of the connecting element being located in the first recess, and a second portion of the connecting element being located in the second recess.
  • a mask assembly is provided, wherein the thickness of the first body portion and the thickness of the second body portion are both greater than the thickness of the connecting element, and the surface of the connecting element away from the interval is flush with the surface of at least one of the first body portion and the second body portion.
  • a mask assembly wherein at least two of the plurality of mask sheets are connected to form a mask assembly by at least one of the connecting elements, the mask assembly is an integral structure, the mask assembly further includes a mask frame, the mask frame includes a mask border, the mask assembly is located on the mask border, and at least a portion of the edges of the mask assembly are connected to the mask border.
  • a mask assembly is provided, the mask frame further comprising an auxiliary structure that overlaps with the area enclosed by the mask frame and is connected to the mask frame, the at least one connecting element comprising at least one auxiliary connecting element, at least a portion of the auxiliary connecting element being located on the auxiliary structure.
  • a method for manufacturing a mask assembly includes: connecting at least two masks from a plurality of masks using at least one connecting element, wherein each mask includes a plurality of openings and a partition surrounding the openings, the plurality of masks includes adjacent first masks and second masks, the partition of the first mask includes a first connecting portion, the partition of the second mask includes a second connecting portion, the first connecting portion is located outside the plurality of openings of the first mask, the second connecting portion is located outside the plurality of openings of the second mask, the first connecting portion and the second connecting portion are close to each other and the first connecting portion...
  • a gap exists between at least a portion of the surfaces of the first and second connecting portions facing each other; at least a portion of the first and second connecting portions are located on the same side of the connecting element and are respectively connected to the connecting element; and a filling element is formed in at least a portion of the gap; or, at least one of a portion of the end of the first connecting portion near the gap and a portion of the end of the second connecting portion near the gap is melted such that at least one of the first surface of the first connecting portion facing the gap and the second surface of the second connecting portion facing the gap has a slope angle of less than 90 degrees relative to the connecting element.
  • forming a filler element in at least a portion of the interval includes: forming a filler material in the interval; and melting the filler material by means of a laser or an electron beam to form the filler element.
  • the material of the filling element is the same as the material of the mask sheet.
  • forming a filler element in at least a portion of the interval includes: filling the interval with optical adhesive; and curing the optical adhesive to form the filler element.
  • the first connecting portion includes a first corner portion near the interval
  • the second connecting portion includes a second corner portion near the interval
  • melting at least one of a portion of the end of the first connecting portion near the interval and a portion of the end of the second connecting portion near the interval includes melting at least one of the first corner portion of the first connecting portion and the second corner portion of the second connecting portion by means of a laser or an electron beam.
  • a method for manufacturing a mask assembly according to at least one embodiment of the present disclosure further includes: forming a protective film layer on the plurality of mask sheets, wherein the protective film layer overlaps with the at least one connecting element.
  • Figure 1 is a partial structural schematic diagram of a mask assembly provided in at least one embodiment of this disclosure.
  • Figure 2 is a partial cross-sectional schematic diagram of a mask assembly provided in an embodiment of the present disclosure.
  • Figure 3 is a partial cross-sectional schematic diagram of another mask assembly provided in an embodiment of this disclosure.
  • Figure 4 is a partial cross-sectional schematic diagram of another mask assembly provided in an embodiment of the present disclosure.
  • Figure 5 is a schematic diagram of a mask assembly with a protective film layer provided in an embodiment of this disclosure.
  • Figure 6 is a partial structural schematic diagram of another mask assembly provided in an embodiment of the present disclosure.
  • Figure 7 is a structural schematic diagram of another mask assembly provided in at least one embodiment of the present disclosure.
  • Figure 8 is a structural schematic diagram of another mask assembly provided in at least one embodiment of the present disclosure.
  • Figure 9 is a schematic diagram of the structure of a mask frame provided in at least one embodiment of the present disclosure.
  • Figure 10 is a schematic diagram of a mask assembly provided in at least one embodiment of the present disclosure when it is disposed on the mask frame shown in Figure 9.
  • Figure 11 is a schematic diagram of another mask frame structure provided in at least one embodiment of the present disclosure.
  • Figure 12 is a schematic diagram of a mask assembly provided in at least one embodiment of the present disclosure when it is disposed on the mask frame shown in Figure 11.
  • Figures 13 and 14 are schematic diagrams illustrating the fabrication process of a mask assembly according to at least one embodiment of this disclosure.
  • Figure 15 is a schematic diagram of the structure of the mask assembly shown in Figure 3 after the protective film layer has been formed.
  • Backplane mask typically refers to the mask used in OLED devices.
  • the OLED panel includes pixel circuitry and driving circuitry; the pixel circuitry controls the OLED device's light emission.
  • the BP mask plays a crucial role in panel manufacturing, ensuring the proper functioning of the pixel circuitry by precisely controlling the layout and connections of the circuitry, thereby achieving high-quality image display.
  • the inventors of this application discovered that as the size of OLED display panels continues to increase, the corresponding mask (e.g., a metal mask) also becomes larger, easily leading to significant mask sagging during use. Furthermore, when using a method of splicing multiple masks, gaps exist between the spliced masks, potentially compromising the flatness and thickness uniformity of the film layers on the masks. When photomasks are spliced together, gaps of varying sizes can cause the film layer on the photomask to thin to different degrees at different locations, or even lead to localized breakage of the film layer, thus preventing complete coverage of the photomask. For example, when the film layer on the photomask serves as a protective layer, localized breakage can compromise the surface properties of the photomask, affecting its lifespan.
  • a metal mask e.g., a metal mask
  • At least one embodiment of this disclosure provides a mask assembly including a plurality of mask sheets and at least one connecting element.
  • Each mask sheet includes a plurality of openings and a partition surrounding the openings.
  • the at least one connecting element is configured to connect at least two of the plurality of mask sheets.
  • the plurality of mask sheets include adjacent first and second mask sheets.
  • the partition of the first mask sheet includes a first connecting portion, and the partition of the second mask sheet includes a second connecting portion.
  • the first connecting portion is located outside the plurality of openings of the first mask sheet, and the second connecting portion is located outside the plurality of openings of the second mask sheet.
  • the first connecting portion and the second connecting portion are close to each other, and there is a gap between at least a portion of the surfaces of the first connecting portion and the second connecting portion facing each other. At least a portion of the first connecting portion and at least a portion of the second connecting portion are both located on the same side of the connecting element and are respectively connected to the connecting element.
  • the mask assembly also includes a filling element located in at least a portion of the gap.
  • the first connecting portion includes a first surface facing the gap
  • the second connecting portion includes a second surface facing the gap. At least one of the first surface and the second surface has a slope angle of less than 90 degrees relative to the connecting element.
  • adjacent first and second mask sheets are connected by a connecting element, thereby providing support at the connection point to reduce sagging.
  • a connecting element in at least a portion of the interval between the first and second connecting portions, or by making at least one of the first surface of the first connecting portion and the second surface of the second connecting portion have a slope angle of less than 90 degrees relative to the connecting element, it is beneficial to ensure that the film layer disposed on the mask sheet has uniform thickness, good flatness, and is less prone to local breakage.
  • Figure 1 is a partial structural schematic diagram of a mask assembly provided in at least one embodiment of the present disclosure
  • Figure 2 is a partial cross-sectional schematic diagram of a mask assembly provided in an embodiment of the present disclosure, for example, Figure 2 can be a cross-sectional schematic diagram of the mask assembly in Figure 7 along line A-A’
  • Figure 3 is a partial cross-sectional schematic diagram of another mask assembly provided in an embodiment of the present disclosure, for example, Figure 2 can be a cross-sectional schematic diagram of the mask assembly in Figure 1 along line B-B’.
  • the mask assembly 123 includes multiple mask sheets 100.
  • Each mask sheet 100 includes multiple...
  • Each mask 100 has an opening 101 and a partition 102 surrounding each opening 101.
  • a portion of the partition 102 is located between two adjacent openings 101.
  • a portion of the partition 102 is located outside the plurality of openings 101 of the mask 100.
  • a display panel includes a display area and a peripheral area surrounding the display area.
  • the display area includes a plurality of sub-pixels arranged in an array, such as red sub-pixels emitting red light, green sub-pixels emitting green light, and blue sub-pixels emitting blue light, etc.
  • the display area is configured to display an image.
  • each opening of the mask 100 corresponds to a main display area, but the embodiments of this disclosure do not limit the specific size of each opening.
  • each opening 101 of the mask 100 can serve as a mask opening for forming an encapsulation layer in the display panel.
  • the encapsulation layer may include inorganic materials such as silicon nitride and silicon oxide, and the embodiments of this disclosure do not limit this.
  • each opening 101 of the mask 100 can also serve as a mask opening for forming a common layer in the display panel, such as a hole transport layer, an electron transport layer, or other whole-layer film.
  • the mask assembly 123 further includes at least one connecting element 200.
  • the connecting element 200 is configured to connect at least two of the plurality of mask sheets 100.
  • the mask assembly may include multiple rows and columns of mask sheets, each column and each row of mask sheets including multiple mask sheets 100.
  • two adjacent rows of mask sheets can be connected by a connecting element 200, and two adjacent columns of mask sheets can also be connected by a connecting element 200.
  • the embodiments of this disclosure do not limit the size of the connecting element 200.
  • the multiple masks 100 in the mask assembly 123 include adjacent first mask 110 and second mask 120.
  • the partition 102 of the first mask 110 includes a first connecting portion 1021, and the first connecting portion 1021 is located outside the plurality of openings 101 of the first mask 110.
  • the first connecting portion 1021 can be a portion of the partition 102 located on one side of the plurality of openings 101.
  • the partition 102 of the second mask 120 includes a second connecting portion 1022, and the second connecting portion 1022 is located outside the plurality of openings 101 of the second mask 120.
  • the second connecting portion 1022 can be a portion of the partition 102 located on one side of the plurality of openings 101.
  • the first connecting portion 1021 and the second connecting portion 1022 are close to each other. At least a portion of the first connecting portion 1021 and at least a portion of the second connecting portion 1022 are located on the same side of the connecting element 200 and are respectively connected to the connecting element 200. For example, as shown in Figure 2, in the Z direction, at least a portion of the first connecting portion 1021 and at least a portion of the second connecting portion 1022 are located on one side of the connecting element 200. For example, at least a portion of the first connecting portion 1021 and at least a portion of the second connecting portion 1022 overlap the connecting element 200.
  • At least a portion of the surface of the first connecting portion 1021 and at least a portion of the surface of the second connecting portion 1022 face each other and are spaced 300 apart.
  • the first connecting portion 1021... Part 1021 may be spaced apart from the second connecting part 1022, such that the gap 300 is located between the first connecting part 1021 and the second connecting part 1022.
  • a portion of the first connecting part 1021 may be close to and spaced apart from a portion of the second connecting part 1022; at the same time, another portion of the first connecting part 1021 and another portion of the second connecting part 1022 may be in contact with each other.
  • FIG4 in the following embodiments.
  • the embodiments of this disclosure do not limit the position of the gap 300 between at least a portion of the surface of the first connecting part 1021 and at least a portion of the surface of the second connecting part 1022.
  • the mask assembly further includes a filling element 400 located in at least a portion of the gap 300 between the first connecting portion 1021 and the second connecting portion 1022.
  • the filling element 400 may completely fill the gap 300, or the filling element 400 may be located in a portion of the gap 300; the embodiments of this disclosure are not limited in this regard.
  • the filling element 400 can provide support for the film layer (e.g., the protective film layer 500 in the following embodiments) disposed on the first mask sheet 110 and the second mask sheet 120, so that the thickness of the film layer is more uniform at the gap 300, reducing the risk of local thinning or breakage.
  • adjacent first and second mask sheets are connected by connecting elements, thereby providing support at the connection point to reduce sagging.
  • By providing filling elements in at least a portion of the interval between the first and second connecting portions it is beneficial to ensure that the film layer disposed on the mask sheet has uniform thickness, good flatness, and is less prone to local breakage.
  • the first connecting portion 1021 includes a first surface 104 facing the gap 300
  • the second connecting portion 1022 includes a second surface 106 facing the gap 300.
  • the slope angle of the first surface 104 relative to the connecting element 200 is ⁇ 1, and ⁇ 1 is less than 90 degrees.
  • the slope angle of the second surface 106 relative to the connecting element 200 is ⁇ 2, and ⁇ 2 is also less than 90 degrees.
  • the first surface 104 is a curved surface, and the angle between the cross-section of the first surface 104 and the surface of the connecting element 200 facing the first mask 110 is less than 90 degrees.
  • the distance between the cross-section and the connecting element 200 in the Z direction is half the dimension of the first mask 110 in the Z direction.
  • the step difference between the film layer located on the first and second mask sheets and the connecting element at the interval can be reduced, so that the thickness of the film layer at the interval is more uniform, preventing thinning or breakage.
  • the film layer disposed on the mask sheet serves as a protective film layer, it is beneficial to ensure the mask sheet's... The surface properties are not damaged, which helps to extend the service life of the mask.
  • At least one of the first surface 104 of the first mask 110 and the second surface 106 of the second mask 120 has a slope angle relative to the connecting element 200 of no more than 80 degrees.
  • it can be at least one of 10-60 degrees, 20-50 degrees, 30-70 degrees, and 40-65 degrees.
  • the specific angles of the above slope angles are not listed in this disclosure embodiment.
  • the slope angles can also be other angles within the range of 10-89 degrees.
  • This setting helps to reduce the step difference between the surfaces of the first mask 110 and the second mask 120 away from the connecting element 200 and the connecting element 200, so that the film layer disposed on the first mask 110 and the second mask 120 transitions smoothly at the connecting element 200, which helps to ensure the uniformity of the film layer thickness and reduces the risk of local breakage.
  • At least one of the first surface 104 of the first mask 110 and the second surface 106 of the second mask 120 has a slope angle of 10 to 40 degrees relative to the connecting element 200.
  • it can be at least one of 10 to 30 degrees, 15 to 20 degrees, 25 to 30 degrees, and 35 to 40 degrees.
  • the specific angles of the above slope angles are not listed one by one in the embodiments of this disclosure.
  • the slope angles can also be other angles within the range of 10 to 39 degrees. Therefore, the step difference between the surfaces of the first mask 110 and the second mask 120 away from the connecting element 200 and the connecting element 200 can be further reduced, thereby reducing the risk of local breakage of the film layer disposed on the first mask 110 and the second mask 120.
  • At least one of the first surface 104 of the first mask 110 and the second surface 106 of the second mask 120 can be a curved surface, so that the cross-section of it by a plane is arc-shaped.
  • both the first surface 104 of the first mask 110 and the second surface 106 of the second mask 120 are curved surfaces, and the curvatures of the first surface 104 and the second surface 106 can be the same or different, which is not limited in the embodiments of this disclosure.
  • the aforementioned plane is parallel to the thickness direction of the connecting element 200 and parallel to the arrangement direction of the first mask 110 and the second mask 120.
  • the thickness direction of the connecting element 200 can be the Z direction, and the arrangement direction of the first mask 110 and the second mask 120 can be the X direction.
  • the first surface 104 and the second surface 106 can be a curved surface, and the other portion can be an inclined surface, and the slope angles of the curved surface and the inclined surface relative to the connecting element 200 can be the same or different, which is not limited in the embodiments of this disclosure.
  • This configuration ensures that the film layers on the first and second masks have uniform thickness at the intervals, allowing for a smooth transition between the first surface and the connecting element, as well as between the second surface and the connecting element, thereby helping to guarantee the uniformity of the film layer thickness. sex.
  • Figure 4 is a partial cross-sectional schematic diagram of another mask assembly provided in an embodiment of the present disclosure.
  • the edge of the first connecting portion 1021 of the first mask 110 contacts the edge of the second connecting portion 1022 of the second mask 120, and a gap 300 is formed between a portion of the first surface 104 and a portion of the second surface 106 of the first connecting portion 1021.
  • the gap 300 gradually increases in size in the X direction.
  • a filling element may be provided in the gap 300 shown in FIG4, which helps to further ensure uniform thickness and good flatness of the film layer disposed on the mask.
  • the embodiments of this disclosure are not limited thereto; for example, the gap 300 shown in FIG4 may not contain a filling element 400.
  • the mask assembly includes a first connecting portion 1021 and a second connecting portion 1022 of the filling element 400, both of which face each other and are in contact with the filling element 400.
  • the portion of the film layer located on the first connecting portion 1021 can smoothly transition to the portion of the filling element 400 located on the side away from the connecting element 200
  • the portion of the film layer located on the second connecting portion 1022 can also smoothly transition to the portion of the filling element 400 located on the side away from the connecting element 200. This makes the thickness of the film layer uniform and less prone to local breakage.
  • the contact area between the filling element 400 and the first mask 110 may be the same as or different from the contact area between the filling element 400 and the second mask 120.
  • the filling element 400 may contact only one of the first mask 110 and the second mask 120, and the filling element 400 may have a small gap with the other of the first mask 110 and the second mask 120, and this gap may have little effect on the thickness of the film layer disposed on the first mask 110 and the second mask 120.
  • the shapes of the filling elements 400 disposed in multiple intervals of multiple rows of mask sheets in the mask assembly may be different, thereby adapting to intervals of different sizes.
  • the embodiments of this disclosure do not limit the shape of the filling element 400.
  • the first connecting portion 1021 and the second connecting portion 1022 are both located on the same side of the connecting element 200, and a portion of the first connecting portion 1021 and a portion of the second connecting portion 1022 overlap the connecting element 200 and are both connected to the connecting element 200.
  • the material of the filling element 400 can be the same as the material of the mask 100, for example, a polymer film material such as polyethylene, polypropylene, or polyvinyl chloride can be used.
  • the material of the filling element 400 may include optical adhesive.
  • the filling material 400 may be formed by curing optical adhesive, thereby better adapting to gaps of different sizes.
  • the filling element 400 can contact the first connecting portion 1021 and the second connecting portion 1022 on both sides of each gap 300, thereby better ensuring the uniformity of the film thickness on the first mask 110 and the second mask 120.
  • the maximum thickness of the first connecting portion 1021 is L1
  • the maximum thickness of the second connecting portion 1022 is L2
  • the maximum thickness of the filling element 400 is L0.
  • is 1/5 to 1/2 of L1.
  • the maximum thickness L0 of the filling element 400 can be greater than or less than L1, and
  • the maximum thickness of the filling element 400 may be greater than or less than the maximum thickness of the second connecting portion 1022, and
  • the embodiments of this disclosure do not limit this.
  • is 10 to 50 micrometers, such as 10 to 20 micrometers, 20 to 30 micrometers, 30 to 40 micrometers or 40 to 50 micrometers.
  • the embodiments of this disclosure do not limit this.
  • the step difference between the first connecting portion and the filling element and the step difference between the second connecting portion and the filling element can be small. This helps to ensure that the film layer on the first mask and the second mask has a small thickness change at the filling element, thereby reducing the risk of local breakage of the film layer.
  • H1 is not less than 1/4 of the maximum dimension of the first connecting portion 1021 in the X direction; for example, H1 can be 1/3, 1/2, or 3/4 of the maximum dimension of the first connecting portion 1021.
  • H2 is not less than 1/4 of the maximum dimension of the second connecting portion 1022; for example, H2 can be 1/3, 1/2, or 3/4 of the maximum dimension of the second connecting portion 1022.
  • This configuration ensures the reliability of the connection between the connecting element and the first and second connecting parts, thereby facilitating the enhancement of the connection between the first and second masks through the connecting element. Support force.
  • the openings of the first mask and the second mask do not overlap with the connecting element, thereby reducing the influence of the connecting element on the opening area of the first mask and the opening area of the second mask.
  • Figure 5 is a schematic diagram of a mask assembly with a protective film layer provided in an embodiment of this disclosure.
  • the mask assembly may include a protective film layer 500, which is located on multiple mask sheets.
  • a portion of the protective film layer 500 is located on the first connecting portion 1021 of the first mask sheet 110 and the second connecting portion 120 of the second mask sheet 120.
  • the protective film layer 500 may cover the surfaces of the first connecting portion 1021 and the second connecting portion 1022 and overlap with the connecting element 200.
  • the protective film layer 500 may be the film layer located on the first mask sheet 110 and the second mask sheet 120 as described in the above embodiments.
  • the protective film layer 500 may include, but is not limited to, aluminum oxide.
  • the protective film layer 500 may be fabricated by processes such as chemical vapor deposition (CVD) to ensure that the protective film layer 500 has good density and uniform thickness.
  • CVD chemical vapor deposition
  • the mask assembly may not include the protective film layer 500, but may directly form other film layers.
  • the embodiments of this disclosure do not limit this.
  • Figure 6 is a partial structural schematic diagram of another mask assembly provided in an embodiment of the present disclosure.
  • the first connecting portion 1021 includes a first main body portion 1101 and a first end portion 1102.
  • the first end portion 1102 is closer to the first main body portion 1101 by a distance of 300, and in the thickness direction of the first connecting portion 1021, the first end portion 1102 is recessed relative to the first main body portion 1101, so that the first connecting portion 1021 has a first recess 0110.
  • the size of the first end portion 1102 is smaller than the size of the first main body portion 1101, so that the first recess 0110 can serve as a receiving cavity for the first connecting portion 1021.
  • the second connecting portion 1022 includes a second main body portion 1201 and a second end portion 1202.
  • the second end portion 1202 is closer to the second main body portion 1201 at a distance of 300, and in the thickness direction of the second connecting portion 1022, the second end portion 1202 is recessed relative to the second main body portion 1201, so that the second connecting portion 1022 has a second recess 0120.
  • the size of the second end portion 1202 is smaller than the size of the second main body portion 1201, so that the second recess 0120 can serve as a receiving cavity for the second connecting portion 1022.
  • the first portion 210 of the connecting element 200 is located in the first recess 0110, and the second portion 220 of the connecting element 200 is located in the second recess 0120.
  • This design helps to reduce the overall size of the mask assembly in the Z direction (as shown in Figure 6), which is beneficial for a thinner and lighter design. At the same time, it can also enhance the connection between the first and second connecting parts and the connecting elements, so that the connecting elements can provide support for the first and second mask sheets.
  • the thickness of the first main body portion 1101 and the thickness of the second main body portion 1201 may both be greater than the thickness of the connecting element 200, and the surface of the connecting element 200 away from the interval 300 is flush with at least one of the surfaces of the first main body portion 1101 and the second main body portion 1201.
  • the connecting element 200 includes a first portion 210 near the first main body portion 1101 and a second portion 220 near the second main body portion 1201.
  • the connecting element 200 also includes a central portion located between the first portion 210 and the second portion 220, which overlaps with the filling element 400.
  • the first portion 210 of the connecting element 200 can be embedded in the first recess 0110
  • the second portion 220 of the connecting element 200 can be embedded in the second recess 0120.
  • the surface of the connecting element 200 away from the interval 300 is flush with the surfaces of the first main body portion 1101 and the second main body portion 1201. This facilitates good connection between the surface of the connecting element 200 away from the interval 300 and at least one of the surfaces of the first main body portion 1101 and the second main body portion 1201, resulting in a flatter overall structure of the mask assembly.
  • Figure 7 is a structural schematic diagram of another mask assembly provided in at least one embodiment of the present disclosure
  • Figure 8 is a structural schematic diagram of another mask assembly provided in at least one embodiment of the present disclosure.
  • At least two masks 100 of a plurality of masks 100 are connected by at least one connecting element 200 to form a mask assembly 212, and the mask assembly 212 is a monolithic structure.
  • the plurality of masks 100 may be arranged in an array.
  • every two adjacent masks 100 are connected by the connecting element 200.
  • the dimensions of two adjacent masks in the X direction may be the same or different.
  • in the Y direction every two adjacent masks 100 are connected by the connecting element 200.
  • the dimensions of two adjacent masks in the Y direction may be the same or different.
  • two adjacent columns of masks 100 may be connected by the same connecting element 200.
  • two adjacent rows of masks 100 may be connected by the same connecting element 200.
  • they can be connected using the same connecting element 200, thereby simplifying the structure of the connecting element.
  • some of the masks 100 in the multiple masks 100 can also be set independently, that is, the masks in this portion of the masks 100 are not connected to adjacent masks through connecting elements.
  • the embodiments of this disclosure do not limit the connection form of the multiple masks 100 in the mask assembly, and can be flexibly set according to different design requirements.
  • Figure 9 is a schematic diagram of a mask frame provided in at least one embodiment of the present disclosure
  • Figure 10 is a schematic diagram of a mask assembly provided in at least one embodiment of the present disclosure disposed on the mask frame shown in Figure 9.
  • the mask assembly further includes a mask frame 600, which includes a mask border 160.
  • the mask border 160 surrounds an opening region.
  • the opening area of the opening region surrounded by the mask border 160 is larger than the opening area of each opening in the mask sheet.
  • the mask sheet assembly 212 is located on the mask border 160, and at least a portion of the edge of the mask sheet assembly 212 is connected to the mask border 160.
  • the mask frame 600 includes an inner contour 601 and an outer contour 602, and the mask border 160 may be the portion enclosed by the inner contour 601 and the outer contour 602.
  • the mask frame 600 may be made of a metallic material.
  • a portion of the edge of the mask sheet assembly 212 may overlap and be connected to the mask border 160, for example, by welding, but not limited thereto.
  • the embodiments of this disclosure do not limit the connection method between the mask sheet assembly 212 and the mask border 160.
  • Figure 11 is a schematic diagram of another mask frame structure provided by at least one embodiment of the present disclosure
  • Figure 12 is a schematic diagram of a mask assembly provided by at least one embodiment of the present disclosure disposed on the mask frame shown in Figure 11.
  • FIG11 illustrates another mask frame 600 provided by at least one embodiment of the present disclosure.
  • the mask frame 600 includes a mask border 160 and an auxiliary structure 165.
  • the auxiliary structure 165 overlaps with an opening region enclosed by the mask border 160 and is connected to the mask border 160.
  • the auxiliary structure 165 divides an opening region enclosed by the mask border 160 into multiple opening sub-regions.
  • the multiple opening sub-regions may correspond one-to-one with multiple mask sheets in a mask assembly.
  • the auxiliary structure 165 may be an integral structure with the mask border 160.
  • the auxiliary structure 165 may be a separate structure connected to the mask border 160.
  • the embodiments of the present disclosure do not limit the form of the auxiliary structure.
  • At least one connecting element 200 in the mask assembly includes at least one auxiliary connecting element 260, at least a portion of which is located in the auxiliary junction.
  • the mask assembly may include multiple connecting elements 200, which may or may not be disposed on the auxiliary structure 165.
  • Connecting elements 200 disposed on the auxiliary structure 165 may serve as auxiliary connecting elements 260.
  • the connecting elements 200 other than the auxiliary connecting elements 260 may be structurally similar to the auxiliary connecting elements 260.
  • the number of auxiliary structures 165 may not exceed the number of connecting elements 260.
  • the size of the auxiliary structure 165 may be larger than the size of the auxiliary connecting elements 260, thereby providing stable support for the auxiliary connecting elements 260 and effectively reducing the sag of the mask assembly 212.
  • FIG. 13 and 14 are schematic diagrams illustrating the manufacturing process of a mask assembly according to at least one embodiment of this disclosure. The method for manufacturing a mask assembly will be described below with reference to Figures 1-2, 4-5, and 13-14.
  • each mask sheet 100 includes a plurality of openings 101 and a partition 102 surrounding each opening 101.
  • the aforementioned at least two mask sheets 100 include an adjacent first mask sheet 110 and a second mask sheet 120.
  • the partition 102 of the first mask sheet 110 includes a first connecting portion 1021
  • the partition 102 of the second mask sheet 120 includes a second connecting portion 1022.
  • the first connecting portion 1021 is located outside the plurality of openings 101 of the first mask sheet 110
  • the second connecting portion 1022 is located outside the plurality of openings 101 of the second mask sheet 120.
  • the first connecting portion 1021 and the second connecting portion 1022 are close to each other and have a spacing of 300. At least a portion of the first connecting portion 1021 and at least a portion of the second connecting portion 1022 are located on the same side of the connecting element 200 and are respectively connected to the connecting element 200. For example, a portion of the first connecting portion 1021 can be welded to the connecting element 200, and a portion of the second connecting portion 1022 can also be welded to the connecting element 200, thereby forming a mask assembly.
  • a filling element 400 is formed in at least a portion of the interval 300.
  • a filling material 0400 is formed in the interval 300.
  • the filling material 0400 can be made of the same material as the first mask 110 or the second mask 120, for example, it can be a polymer film material such as polyethylene, polypropylene, or polyvinyl chloride. The embodiments of this disclosure do not limit this.
  • the dimension of the filling material 0400 in the X direction is smaller than the dimension of the interval 300 in the X direction, and the dimension of the filling material 0400 in the Z direction is greater than or equal to the dimension of the interval 300 in the Z direction.
  • the filling material 0400 in the X direction is similar to that in the first mask 110 and the second mask 120.
  • One of them has gaps, which facilitates the formation of filler material 0400 in the gap 300 and satisfies the filling range of the gap 300.
  • the size of the filler material 0400 located in different gaps 300 can be different.
  • the volume of the filler material 0400 can be larger.
  • at least one of the size of the filler material 0400 in the X direction and the size in the Z direction can be increased to ensure sufficient filling capacity of the gap 300.
  • the filler material 0400 is processed by a laser or electron beam to melt it, thereby forming a filler element 400 filled in the spacer 300.
  • the filler material 0400 can contact at least one of the opposing surfaces of the first connecting portion 110 and the second connecting portion 120 to ensure the uniformity of the film thickness subsequently formed on the first connecting portion 110 and the second connecting portion 120.
  • the filler material 0400 formed in at least a portion of the interval 300 can be an optical adhesive, and further, by curing the optical adhesive, a filler element 400 can be formed.
  • the optical adhesive can be a UV-curable adhesive, but is not limited thereto.
  • the filler element 400 can be in contact with at least one of the first connecting portion 1021 and the second connecting portion 1022 on both sides of the intervals with different sizes, thereby better ensuring the uniformity of the film thickness formed on the first mask 110 and the second mask 120.
  • a protective film layer 500 is formed on multiple masks (such as the first mask 110 and the second mask 120).
  • the protective film layer 500 is formed on the side of the filler element 400 away from the connecting element 200 and overlaps with the connecting element 200.
  • the protective film layer 500 can be formed by a chemical vapor deposition (CVD) process to achieve good density and uniform thickness.
  • the protective film layer 500 may include aluminum oxide, thereby reducing the erosion of the first mask 110 and the second mask 120 by water, oxygen, etc., thereby improving the service life of the first mask 110 and the second mask 120.
  • FIG. 15 is a schematic diagram of the structure after a protective film layer has been formed in the mask assembly shown in Figure 3. The method for fabricating another mask assembly will be described below with reference to Figures 1, 3, 13 and 15.
  • each mask sheet 100 includes a plurality of openings 101 and a partition 102 surrounding the openings 101.
  • the at least two mask sheets 100 include adjacent first mask sheet 110 and second mask sheet 120.
  • the partition 102 of the first mask sheet 110 includes a first connecting portion 1021
  • the partition 102 of the second mask sheet 120 includes a second connecting portion 1022.
  • 1021 is located outside the plurality of openings 101 of the first mask 110
  • the second connecting portion 1022 is located outside the plurality of openings 101 of the second mask 120.
  • the first connecting portion 1021 and the second connecting portion 1022 are close to each other and spaced 300 apart. At least a portion of the first connecting portion 1021 and at least a portion of the second connecting portion 1022 are located on the same side of the connecting element 200 and are respectively connected to the connecting element 200. For example, a portion of the first connecting portion 1021 can be welded to the connecting element 200, and a portion of the second connecting portion 1022 can also be welded to the connecting element 200, thereby forming a mask assembly.
  • At least one of a portion of the end of the first connecting portion 1021 near the interval 300 and a portion of the end of the second connecting portion 1022 near the interval 300 is melted, such that at least one of the first surface 104 of the first connecting portion 1021 facing the interval 300 and the second surface 106 of the second connecting portion 1022 facing the interval 300 has a slope angle of less than 90 degrees relative to the connecting element 200.
  • a portion of the end of the first connecting portion 1021 near the interval 300 is melted, such that the first surface 104 is curved.
  • a portion of the end of the second connecting portion 1022 near the interval 300 is melted, such that the second surface 106 is an inclined surface relative to the connecting element 200, but the embodiments of this disclosure do not limit the shape of the first surface 104 and the second surface 106.
  • the size of the gap in the alignment direction of the first and second connecting portions can be reduced, which helps to ensure the uniformity of the film thickness formed on the first and second mask sheets.
  • the first connecting portion 1021 includes a first corner portion 1031 near the interval 300
  • the second connecting portion 1022 includes a second corner portion 1032 near the interval 300.
  • the first corner portion 1031 is a portion of the end of the first connecting portion 1021 near the interval 300
  • the second corner portion 1032 is a portion of the end of the second connecting portion 1022 near the interval 300.
  • Melting at least one of the portion of the end of the first connecting portion 1021 near the interval 300 and the portion of the end of the second connecting portion 1022 near the interval 300 may include melting at least one of the first corner portion 1031 of the first connecting portion 1021 and the second corner portion 1032 of the second connecting portion 1022 using a laser or an electron beam.
  • the first surface 104 can be a surface formed by melting the first corner 1031 with a laser or electron beam
  • the second surface 106 can be a surface formed by melting the second corner 1032 with a laser or electron beam.
  • the degree of melting of the first corner portion 1031 and the second corner portion 1032 may be different.
  • the volume of melting of the first corner portion 1031 and the second corner portion 1032 may be different, so that the first surface 104 and the second surface 106 have different shapes, and thus the slope angle of the first surface 104 relative to the connecting element 200 and the slope angle of the second surface 106 relative to the connecting element 200 may be different.
  • the embodiments of this disclosure do not limit the degree of melting of the first corner portion 1031 and the second corner portion 1032.
  • a protective film layer 500 can be formed on the first connecting portion 1021 and the second connecting portion 1022.
  • the protective film layer 500 is formed on the side of the filling element 400 away from the connecting element 200 and overlaps with the connecting element 200.
  • the protective film layer 500 can be formed by a chemical vapor deposition (CVD) process to achieve good density and uniform thickness.
  • the protective film layer 500 may include aluminum oxide, thereby reducing the erosion of the first connecting portion 1021 and the second connecting portion 1022 by water, oxygen, etc., thereby improving the service life of the first mask 110 and the second mask 120.

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Abstract

提供一种掩膜组件及其制作方法，掩膜组件包括多张掩膜片以及至少一个连接元件，各掩膜片包括围绕开口的分隔部，第一掩膜片的分隔部包括第一连接部，与第一掩膜片相邻的第二掩膜片的分隔部包括第二连接部，第一连接部的至少部分与第二连接部的至少部分具有间隔，第一连接部的至少部分和第二连接部的至少部分均位于连接元件的同一侧并与连接元件连接，掩膜组件包括位于间隔的至少部分中的填充元件；或者，第一连接部包括面对间隔的第一表面，第二连接部包括面对间隔的第二表面，第一表面和第二表面中的至少之一相对于连接元件的坡度角小于90度，该掩膜组件中，相邻的掩膜片之间的间隔处的段差较小，使得设置其上的膜层具有良好的厚度均一性。

Description

掩膜组件及其制作方法 技术领域
本公开至少一个实施例涉及一种掩膜组件及其制作方法。
背景技术
有机发光二极管(Organic Light-Emitting Diode,OLED)显示屏是继液晶显示器之后的新一代显示器，其具有显示色域广，响应速度快，可折叠等优点。随着显示屏的尺寸逐渐扩大，显示面板(Panel)的出货量能够得到有效提升，从而促进更高的分辨率、更广的色域、更快的响应速度等性能的提升，以带来更好的视觉体验。
发明内容
本公开的至少一个实施例提供一种掩膜组件以及制作方法。
本公开的至少一个实施例提供一种掩膜组件，包括多张掩膜片以及至少一个连接元件，各所述掩膜片包括多个开口，以及围绕所述开口的分隔部；至少一个连接元件被配置为对所述多张掩膜片中至少两张掩膜片进行连接；其中，所述多张掩膜片包括相邻的第一掩膜片和第二掩膜片，所述第一掩膜片的分隔部包括第一连接部，所述第二掩膜片的分隔部包括第二连接部，所述第一连接部位于所述第一掩膜片的多个开口的外侧，所述第二连接部位于所述第二掩膜片的多个开口的外侧，所述第一连接部与所述第二连接部彼此靠近，且所述第一连接部与所述第二连接部彼此面对的至少部分表面之间具有间隔，所述第一连接部的至少部分和所述第二连接部的至少部分均位于所述连接元件的同一侧，并分别与所述连接元件连接，所述掩膜组件还包括填充元件，所述填充元件位于所述间隔的至少部分中；或者，所述第一连接部包括面对所述间隔的第一表面，所述第二连接部包括面对所述间隔的第二表面，所述第一表面和所述第二表面中的至少之一相对于所述连接元件的坡度角小于90度。
例如，根据本公开的至少一个实施例提供一种掩膜组件，所述第一表面和所述第二表面中的至少之一相对于所述连接元件的所述坡度角不大于80度。
例如，根据本公开的至少一个实施例提供一种掩膜组件，所述第一表面和所述第二表面中的至少之一相对于所述连接元件的所述坡度角为10～40度。
例如，根据本公开的至少一个实施例提供一种掩膜组件，所述第一表面和所述第二表面中的至少之一被一平面所截的截线呈弧形，所述平面与所述连接元件的厚度方向平行，且所述平面与所述第一掩膜片和所述第二掩膜片的排列方向平行。
例如，根据本公开的至少一个实施例提供一种掩膜组件，所述第一连接部和所述第二连接部的彼此面对的表面均与所述填充元件接触。
例如，根据本公开的至少一个实施例提供一种掩膜组件，所述填充元件的材料包括与所述掩膜片相同的材料和光学胶之一。
例如，根据本公开的至少一个实施例提供一种掩膜组件，所述填充元件与所述第一连接部之间具有第一厚度差，所述第一厚度差为所述第一连接部的最大厚度的1/5～1/2，所述填充元件与所述第二连接部之间具有第二厚度差，所述第二厚度差为所述第二连接部的最大厚度的1/5～1/2。
例如，根据本公开的至少一个实施例提供一种掩膜组件，所述第一厚度差和所述第二厚度差中的至少之一为10～50微米。
例如，根据本公开的至少一个实施例提供一种掩膜组件，在所述第一连接部和所述第二连接部的排列方向上，所述第一连接部的在其厚度方向上与所述连接元件交叠的部分的尺寸不小于所述第一连接部的最大尺寸的1/4；和/或，所述第二连接部的在其厚度方向上所述连接元件交叠的部分的尺寸不小于所述第二连接部的最大尺寸的1/4。
例如，根据本公开的至少一个实施例提供一种掩膜组件，所述掩膜组件还包括：保护膜层，所述保护膜层位于所述多张掩膜片上，且与所述至少一个连接元件交叠。
例如，根据本公开的至少一个实施例提供一种掩膜组件，所述第一连接部和所述第二连接部均位于所述连接元件的所述同一侧。
例如，根据本公开的至少一个实施例提供一种掩膜组件，所述第一连接部包括第一主体部和第一端部，所述第一端部比所述第一主体部更靠近所述间隔，在所述第一连接部的厚度方向上，所述第一端部相对于所述第一主体部凹陷，以使得所述第一连接部具有第一凹部，所述第二连接部包括第二主 体部和第二端部，所述第二端部比所述第二主体部更靠近所述间隔，在所述第二连接部的厚度方向上，所述第二端部相对于所述第二主体部凹陷，以使得所述第二连接部具有第二凹部，所述连接元件的第一部分位于所述第一凹部中，所述连接元件的第二部分位于所述第二凹部中。
例如，根据本公开的至少一个实施例提供一种掩膜组件，所述第一主体部的厚度和所述第二主体部的厚度均大于所述连接元件的厚度，所述连接元件的远离所述间隔的表面与所述第一主体部和第二主体部中的至少之一的表面齐平。
例如，根据本公开的至少一个实施例提供一种掩膜组件，所述多张掩膜片中的至少两张掩膜片通过至少一个所述连接元件连接为掩膜片组件，所述掩膜片组件为一体式结构，所述掩膜组件还包括掩膜框，所述掩膜框包括掩膜边框，所述掩膜片组件位于所述掩膜边框上，且所述掩膜片组件的至少部分边缘与所述掩膜边框连接。
例如，根据本公开的至少一个实施例提供一种掩膜组件，所述掩膜框还包括辅助结构，所述辅助结构与所述掩膜边框所围设的区域交叠，且所述辅助结构与所述掩膜边框连接，所述至少一个连接元件包括至少一个辅助连接元件，所述辅助连接元件的至少部分位于所述辅助结构上。
本公开的至少一个实施例提供的掩膜组件的制作方法，包括：通过至少一个连接元件对多张掩膜片中至少两张掩膜片进行连接，其中，各所述掩膜片包括多个开口以及围绕所述开口的分隔部，所述多张掩膜片包括相邻的第一掩膜片和第二掩膜片，所述第一掩膜片的分隔部包括第一连接部，所述第二掩膜片的分隔部包括第二连接部，所述第一连接部位于所述第一掩膜片的多个开口的外侧，所述第二连接部位于所述第二掩膜片的多个开口的外侧，所述第一连接部与所述第二连接部彼此靠近且所述第一连接部与所述第二连接部彼此面对的至少部分表面之间具有间隔，所述第一连接部的至少部分和所述第二连接部的至少部分均位于所述连接元件的同一侧，并分别与所述连接元件连接；以及在所述间隔的至少部分中形成填充元件；或者，对所述第一连接部的靠近所述间隔的端部的一部分和所述第二连接部的靠近所述间隔的端部的一部分中的至少之一进行熔解，以使得所述第一连接部的面对所述间隔的第一表面和所述第二连接部的面对所述间隔的第二表面中的至少之一相对于所述连接元件的坡度角小于90度。
例如，根据本公开的至少一个实施例提供的掩膜组件的制作方法，所述在所述间隔的至少部分中形成填充元件，包括：在所述间隔中形成填充材料；以及通过激光或者电子束对所述填充材料进行熔解，以形成所述填充元件。
例如，根据本公开的至少一个实施例提供的掩膜组件的制作方法，所述填充元件的材料与所述掩膜片的材料相同。
例如，根据本公开的至少一个实施例提供的掩膜组件的制作方法，所述在所述间隔的至少部分中形成填充元件，包括：在所述间隔中填充光学胶；以及对所述光学胶进行固化，以形成所述填充元件。
例如，根据本公开的至少一个实施例提供的掩膜组件的制作方法，所述第一连接部包括靠近所述间隔的第一角部，所述第二连接部包括靠近所述间隔的第二角部，所述对所述第一连接部的靠近所述间隔的端部的一部分和所述第二连接部的靠近所述间隔的端部的一部分中的至少之一进行熔解，包括：通过激光或者电子束对所述第一连接部的所述第一角部和所述第二连接部的所述第二角部中的至少之一进行熔解。
例如，根据本公开的至少一个实施例提供的掩膜组件的制作方法，该制作方法还包括：在所述多张掩膜片上形成保护膜层，其中，所述保护膜层与所述至少一个连接元件交叠。
附图说明
为了更清楚地说明本公开实施例的技术方案，下面将对实施例的附图作简单地介绍，显而易见地，下面描述中的附图仅仅涉及本公开的一些实施例，而非对本公开的限制。
图1为本公开至少一个实施例提供的掩膜组件的局部结构示意图。
图2为本公开的实施例提供的一种掩膜组件的局部截面示意图。
图3为本公开的实施例提供的另一种掩膜组件的局部截面示意图。
图4为本公开的实施例提供的又一种掩膜组件的局部截面示意图。
图5为本公开的实施例提供的设置有保护膜层的掩膜组件的示意图。
图6为本公开的实施例提供的又一种掩膜组件的局部结构示意图。
图7为本公开的至少一个实施例提供的又一种掩膜组件的结构示意图。
图8为本公开的至少一个实施例提供的又一种掩膜组件的结构示意图。
图9为本公开的至少一个实施例提供的一种掩膜框的结构示意图。
图10为本公开的至少一个实施例提供的一种掩膜片组件设置在图9所示的掩膜框上时的示意图。
图11为本公开的至少一个实施例提供的另一种掩膜框的结构示意图。
图12为本公开的至少一个实施例提供的一种掩膜片组件设置在图11所示的掩膜框上时的示意图。
图13～图14为本公开的至少一个实施例提供的一种掩膜组件的制作过程的结构示意图。
图15为图3所示出的掩膜组件中形成保护膜层后的结构示意图。
具体实施方式
为使本公开实施例的目的、技术方案和优点更加清楚，下面将结合本公开实施例的附图，对本公开实施例的技术方案进行清楚、完整地描述。显然，所描述的实施例是本公开的一部分实施例，而不是全部的实施例。基于所描述的本公开的实施例，本领域普通技术人员在无需创造性劳动的前提下所获得的所有其它实施例，都属于本公开保护的范围。
除非另外定义，本公开使用的技术术语或者科学术语应当为本公开所属领域内具有一般技能的人士所理解的通常意义。本公开中使用的“第一”、“第二”以及类似的词语并不表示任何顺序、数量或者重要性，而只是用来区分不同的组成部分。“包括”或者“包含”等类似的词语意指出现该词前面的元件或者物件涵盖出现在该词后面列举的元件或者物件及其等同，而不排除其他元件或者物件。
背板掩膜(Back Plane Mask，BP Mask)通常是指用于OLED器件的掩模。OLED器件的面板包括像素电路和驱动电路，像素电路用于控制OLED器件发光。BP Mask在面板制造过程中起着关键的作用，其通过精确地控制电路的布局和连接，可以确保像素电路能够正常工作，从而实现高质量的图像显示。
在研究中，本申请的发明人发现，随着OLED器件的显示面板的尺寸不断扩大，其对应的Mask(例如，金属Mask)的尺寸也相应地较大，从而容易使得Mask在使用过程中具有较大的下垂量。同时，当采用将多张掩膜片进行拼接的方案时，由于进行拼接的两张掩膜片之间存在间隙，从而可能导致设置在掩膜片上的膜层的平整性以及厚度均一性受到破坏，并且，当多张 掩膜片拼接时产生的间隙的尺寸不同时，则会导致设置在掩膜片上的膜层在不同位置处的厚度出现不同程度的减薄情况，甚至使得该膜层局部断裂，进而无法将掩膜片完全覆盖。例如，当设置在掩膜片上的膜层作为保护膜层时，如果该膜层出现局部断裂等情况，则难以保证掩膜片的表面特性不受到破坏，从而会影响掩膜片的使用寿命。
本公开的至少一个实施例提供一种掩膜组件，该掩膜组件包括多张掩膜片以及至少一个连接元件，各掩膜片包括多个开口，以及围绕开口的分隔部；至少一个连接元件被配置为对多张掩膜片中至少两张掩膜片进行连接；多张掩膜片包括相邻的第一掩膜片和第二掩膜片，第一掩膜片的分隔部包括第一连接部，第二掩膜片的分隔部包括第二连接部，第一连接部位于第一掩膜片的多个开口的外侧，第二连接部位于第二掩膜片的多个开口的外侧，第一连接部与第二连接部彼此靠近且所述第一连接部与所述第二连接部彼此面对的至少部分表面之间具有间隔，第一连接部的至少部分和第二连接部的至少部分均位于连接元件的同一侧，并分别与连接元件连接，掩膜组件还包括填充元件，填充元件位于间隔的至少部分中；或者，第一连接部包括面对间隔的第一表面，第二连接部包括面对间隔的第二表面，第一表面和第二表面中的至少之一相对于连接元件的坡度角小于90度。
本公开的至少一个实施例提供的掩膜组件中，相邻的第一掩膜片和第二掩膜片通过连接元件进行连接，从而可以在二者的连接处提供支撑力，以减小下垂量；此外，通过在第一连接部与第二连接部之间的至少部分间隔内设置填充元件，或者使得第一连接部的第一表面和第二连接部的第二表面中的至少之一相对于连接元件的坡度角小于90度，有利于使得设置在掩膜片上的膜层的厚度均一，平整性良好，不易发生局部断裂等情况。
下面结合附图对本公开实施例提供的掩膜组件及其制作方法进行更详细地描述，从而能够使得相应的技术方案更加清楚并易于理解。
图1为本公开至少一个实施例提供的掩膜组件的局部结构示意图；图2为本公开的实施例提供的一种掩膜组件的局部截面示意图，例如，图2可以为图7中的掩膜组件沿线A-A’所截的截面示意图；图3为本公开的实施例提供的另一种掩膜组件的局部截面示意图，例如，图2可以为图1中的掩膜组件沿线B-B’所截的截面示意图。
如图1所示，掩膜组件123包括多张掩膜片100。各掩膜片100包括多 个开口101，以及围绕各开口101的分隔部102。例如，相邻的两个开口101之间具有分隔部102的一部分。例如，分隔部102的一部分位于掩膜片100的多个开口101的外侧。例如，显示面板包括显示区、以及围绕显示区的周边区，显示区包括多个阵列排布的子像素，例如发红光的红色子像素、发绿光的绿色子像素以及发蓝光的蓝色子像素等，显示区被配置为进行图像显示。例如，掩膜片100的每个开口对应于一个主显示区，但本公开的实施例对于各个开口的具体尺寸不作限定。例如，掩模片100的每个开口101可以作为用于形成显示面板中封装层的掩模开口，上述封装膜层可以包括氮化硅、氧化硅等无机材料，本公开的实施例对此不作限定。例如，掩模片100的每个开口101也可以作为用于形成显示面板中的共通层，如空穴传输层、电子传输层等整层膜层的掩模开口。
如图1所示，掩膜组件123还包括至少一个连接元件200。连接元件200被配置为对多张掩膜片100中至少两张掩膜片100进行连接。例如，掩膜组件可以包括多行以及多列掩膜片，各列掩膜片和各行掩膜片均包括多张掩膜片100，例如，相邻两行掩膜片可以通过一个连接元件200进行连接，相邻两列掩膜片也可以通过一个连接元件200进行连接，本公开的实施例对于连接元件200的尺寸不作限定。
如图1所示，掩膜组件123中的多张掩膜片100包括相邻的第一掩膜片110和第二掩膜片120。第一掩膜片110的分隔部102包括第一连接部1021，且第一连接部1021位于第一掩膜片110的多个开口101的外侧。例如，第一连接部1021可以为分隔部102的位于多个开口101一侧的部分。第二掩膜片120的分隔部102包括第二连接部1022，且第二连接部1022位于第二掩膜片120的多个开口101的外侧。例如，第二连接部1022可以为分隔部102的位于多个开口101一侧的部分。
如图1所示，第一连接部1021与第二连接部1022彼此靠近，第一连接部1021的至少部分和第二连接部1022的至少部分均位于连接元件200的同一侧，并分别与连接元件200连接。例如，如图2所示，在Z方向上，第一连接部1021的至少部分和第二连接部1022的至少部分均位于连接元件200的一侧。例如，第一连接部1021的至少部分和第二连接部1022的至少部分均搭接在连接元件200上。第一连接部1021的至少部分表面与第二连接部1022的至少部分表面彼此相对，且二者之间具有间隔300。例如，第一连接 部1021可以与第二连接部1022间隔设置，从而，间隔300位于第一连接部1021与第二连接部1022之间。例如，第一连接部1021的一部分可以与第二连接部1022的一部分彼此靠近、且间隔设置；同时，第一连接部1021的另一部分与第二连接部1022的另一部分可以彼此接触，例如可以参见下述实施例中关于图4的相关描述，本公开的实施例对于第一连接部1021的至少部分表面与第二连接部1022的至少部分表面之间的间隔300的位置不作限定。
如图1和图2所示，在一些实施例中，掩膜组件还包括填充元件400，填充元件400位于第一连接部1021与第二连接部1022之间的间隔300的至少部分中。例如，填充元件400可以将间隔300完全填充，或者，填充元件400可以位于一部分间隔300中，本公开的实施例对此不作限定。从而，填充元件400可以为设置在第一掩膜片110和第二掩膜片120上的膜层(例如，下述实施例中的保护膜层500)提供支撑，以使得该膜层在间隔300处的厚度较为均一，减小其发生局部减薄或者断裂的风险。
本公开的至少一个实施例提供的掩膜组件中，相邻的第一掩膜片和第二掩膜片通过连接元件进行连接，从而可以在二者的连接处提供支撑力，以减小下垂量，通过在第一连接部与第二连接部之间的至少部分间隔内设置填充元件，有利于使得设置在掩膜片上的膜层的厚度均一，平整性良好，不易发生局部断裂等情况。
如图1和图3所示，在一些实施例中，第一连接部1021包括面对间隔300的第一表面104，第二连接部1022包括面对间隔300的第二表面106，第一表面104相对于连接元件200的坡度角为β1，且β1小于90度，第二表面106相对于连接元件200的坡度角为β2，且β2也小于90度。例如，第一表面104为曲面，且第一表面104的切面与连接元件200的面对第一掩膜片110的表面之间的夹角小于90度，该切面在Z方向上与连接元件200之间的距离为第一掩膜片110在Z方向上的尺寸的1/2。
本公开的至少一个实施例提供的掩膜组件中，通过使得第一连接部的第一表面和第二连接部的第二表面中的至少之一相对于连接元件的坡度角小于90度，可以减小位于第一掩膜片和第二掩膜片上的膜层在间隔处与连接元件之间的段差，以使得该膜层在间隔处的厚度较为均一，不至于减薄或者发生断裂，当设置在掩膜片上的膜层作为保护膜层时，有利于保证掩膜片的 表面特性不受到破坏，从而利于延长掩膜片的使用寿命。
在一些实施例中，如图3所示，第一掩膜片110的第一表面104和第二掩膜片120的第二表面106中的至少之一相对于连接元件200的坡度角不大于80度，例如，可以为10～60度、20～50度、30～70度、40～65度中的至少之一，本公开实施例不一一列举上述坡度角的具体角度，上述坡度角还可以为10～89度以内的其他角度。如此设置，有利于减小第一掩膜片110和第二掩膜片120远离连接元件200的表面与连接元件200之间的段差，使得设置在第一掩膜片110和第二掩膜片120上的膜层在连接元件200处进行平缓过渡，有利于保证该膜层的厚度均一性，并减小发生局部断裂的风险。
在一些实施例中，如图3所示，第一掩膜片110的第一表面104和第二掩膜片120的第二表面106中的至少之一相对于连接元件200的坡度角为10～40度，例如，可以为10～30度、15～20度、25～30度以及35～40度中的至少之一，本公开实施例不一一列举上述坡度角的具体角度，上述坡度角还可以为10～39度以内的其他角度。从而，可以进一步地减小第一掩膜片110和第二掩膜片120远离连接元件200的表面与连接元件200之间的段差，以减小设置在第一掩膜片110和第二掩膜片120上的膜层发生局部断裂的风险。
在一些实施例中，如图3所示，第一掩膜片110的第一表面104和第二掩膜片120的第二表面106中的至少之一可以为曲面，从而使其被一平面所截的截线呈弧形。例如，第一掩膜片110的第一表面104和第二掩膜片120的第二表面106均为曲面，且第一表面104和第二表面106的曲率可以相同，也可以不相同，本公开的实施例对此不作限定。上述平面与连接元件200的厚度方向平行，且该平面与第一掩膜片110和第二掩膜片120的排列方向平行。如图3所示，连接元件200的厚度方向可以为Z方向，第一掩膜片110和第二掩膜片120的排列方向可以为X方向。例如，第一表面104和第二表面106中的至少之一的一部分可以为曲面，另一部分可以为斜面，且该曲面和该斜面相对于连接元件200的坡度角可以相同或不相同，本公开的实施例对此不作限定。
如此设置，可以使得设置在第一掩膜片和第二掩膜片上的膜层在间隔处的厚度均一，能够在第一表面与连接元件之间进行平缓地过渡，以及在第二表面与连接元件之间进行平缓地过渡，从而有利于保证该膜层的厚度均一 性。
图4为本公开的实施例提供的又一种掩膜组件的局部截面示意图。
在一些实施例中，如图4所示，第一掩膜片110的第一连接部1021的边缘与第二掩膜片120的第二连接部1022的边缘接触，且第一连接部1021的第一表面104的一部分与第二表面106的一部分之间具有间隔300。在Z方向上，间隔300在X方向上的尺寸逐渐增大。例如，如图4所示出的间隔300中可以设置有填充元件，从而有利于进一步使得设置在掩膜片上的膜层的厚度均一，平整性良好。本公开的实施例不限于此，例如，图4所示的间隔300中也可以不设置填充元件400。
在一些实施例中，如图2所示，掩膜组件包括填充元件400第一连接部1021和第二连接部1022的彼此面对的表面均与填充元件400接触，从而可以减小第一掩膜片110的远离连接元件200的表面与连接元件200之间的段差、以及第二掩膜片120的远离连接元件200的表面与连接元件200之间的段差。也就是说，上述膜层的位于第一连接部1021上的部分与位于填充元件400远离连接元件200的一侧的部分能够进行平缓的过渡，并且，该膜层的位于第二连接部1022上的部分与位于填充元件400远离连接元件200的一侧的部分也能够进行平缓的过渡，由此可以使得该膜层的厚度均一，不易发生局部断裂。
例如，如图2所示，填充元件400与第一掩膜片110的接触面积可以与填充元件400与第二掩膜片120的接触面积相同，或不相同。例如，填充元件400可以仅与第一掩膜片110和第二掩膜片120之一接触，填充元件400与第一掩膜片110和第二掩膜片120之另一具有较小的间隙，且该间隙对于设置在第一掩膜片110和第二掩膜片120上的膜层的厚度影响较小。例如，设置在掩膜组件的多列掩膜片的多个间隔中的填充元件400的形状可以不相同，从而可以适应于不同尺寸的间隔，本公开的实施例对于填充元件400的形状不作限定。
在一些实施例中，如图2所示，第一连接部1021和第二连接部1022均位于连接元件200的同一侧，第一连接部1021的一部分以及第二连接部1022的一部分均搭接在连接元件200上，且均与连接元件200连接。
在一些实施例中，如图2所示，填充元件400的材料可以与掩膜片100的材料相同，例如，可以采用聚乙烯、聚丙烯、聚氯乙烯等高分子薄膜材料。 例如，填充元件400的材料可以包括光学胶，例如，填充材料400可以为通过光学胶固化后形成的，从而，可以更好地适应于不同尺寸的间隔。例如，在具有不同尺寸的多个间隔中，填充元件400均能够与各间隔300两侧的第一连接部1021和第二连接部1022接触，从而更好地保证设置在第一掩膜片110和第二掩膜片120上的膜层的厚度均一性。
例如，如图2所示，第一连接部1021的最大厚度的值为L1，第二连接部1022的最大厚度的值为L2，填充元件400的最大厚度的值为L0。填充元件400与第一连接部1021之间具有第一厚度差，第一厚度差的值为|L1-L0|，且|L1-L0|为L1的1/5～1/2。例如，填充元件400的最大厚度的值L0可以大于或小于L1，且|L1-L0|可以为L1的1/5～1/4、1/4～1/3、或1/3～1/2，本公开的实施例对此不作限定。
例如，如图2所示，填充元件400与第二连接部1022之间具有第二厚度差，第二厚度差的值为|L2-L0|，且|L2-L0|为L2的1/5～1/2。例如，填充元件400的最大厚度可以大于或小于第二连接部1022的最大厚度，且|L2-L0|可以为L2的1/5～1/4、1/4～1/3、或1/3～1/2，本公开的实施例对此不作限定。
例如，如图2所示，第一厚度差的值|L1-L0|和第二厚度差的值|L2-L0|中的至少之一为10～50微米，如10～20微米、20～30微米、30～40微米或40～50微米、本公开的实施例对此不作限定。
通过将填充元件与第一连接部之间的第一厚度差以及填充元件与第二连接部之间的第二厚度差设定在上述范围之内，可以使得第一连接部与填充元件之间的段差以及第二连接部与填充元件之间的段差均较小，有利于保证位于第一掩膜片和第二掩膜片上的膜层在填充元件处具有较小的厚度变化，从而减小该膜层发生局部断裂的风险。
例如，如图2所示，在X方向上，第一连接部1021在其厚度方向上与连接元件200交叠的部分的尺寸为H1，第二连接部1022在其厚度方向上连接元件200交叠的部分的尺寸为H2。在一些实施例中，H1不小于第一连接部1021在X方向上的最大尺寸的1/4，例如，H1可以为第一连接部1021的最大尺寸的1/3、1/2或3/4。例如，H2不小于第二连接部1022的最大尺寸的1/4，例如，H2可以为第二连接部1022的最大尺寸的1/3、1/2或3/4。
如此设置，可以保证连接元件与第一连接部和第二连接部分别进行连接的可靠性，从而利于通过连接元件增强对于第一掩膜片与第二掩膜片之间的 支撑力。
在本公开的实施例中，在第一连接部和第二连接部的排列方向上，由于第一连接部在其厚度方向上与连接元件交叠的部分的尺寸小于第一连接部的最大尺寸，从而使得第一掩膜片的开口以及第二掩膜片的开口均与连接元件无交叠，以减小连接元件对于第一掩膜片的开口面积以及第二掩膜片的开口面积的影响。
图5为本公开的实施例提供的设置有保护膜层的掩膜组件的示意图。
在一些实施例中，如图5所示，掩膜组件可以包括保护膜层500，保护膜层500位于多张掩膜片上。例如，保护膜层500的一部分位于第一掩膜片110的第一连接部1021上以及第二掩膜片120的第二连接部120上。例如，保护膜层500可以覆盖在第一连接部1021和第二连接部1022表面，且与连接元件200交叠。例如，保护膜层500可以作为上述实施例中所述的位于第一掩膜片110和第二掩膜片120上的膜层。通过设置保护膜层500，可以减小水、氧气等物质对于第一连接部1021和第二连接部1022的侵蚀，从而提高第一掩膜片110和第二掩膜片120的使用寿命。
例如，如图5所示，保护膜层500可以包括氧化铝，但不限于此。例如，保护膜层500可以通过化学气相沉积(Chemical Vapor Deposition,CVD)等工艺制作，以使得保护膜层500的致密性良好，且具有均匀的厚度。
例如，根据不同的使用需求，掩膜组件也可以不包括保护膜层500，而是直接形成其他的膜层，本公开的实施例对此不作限定。
图6为本公开的实施例提供的又一种掩膜组件的局部结构示意图。
在一些实施例中，如图6所示，第一连接部1021包括第一主体部1101和第一端部1102。第一端部1102比第一主体部1101更靠近间隔300，且在第一连接部1021的厚度方向上，第一端部1102相对于第一主体部1101凹陷，以使得第一连接部1021具有第一凹部0110。例如，在Z方向上，第一端部1102的尺寸小于第一主体部1101的尺寸，以使得第一凹部0110可以作为第一连接部1021的容纳腔。
例如，如图6所示，类似于第一连接部1021的结构，第二连接部1022包括第二主体部1201和第二端部1202。第二端部1202比第二主体部1201更靠近间隔300，且在第二连接部1022的厚度方向上，第二端部1202相对于第二主体部1201凹陷，以使得第二连接部1022具有第二凹部0120。例如， 在Z方向上，第二端部1202的尺寸小于第二主体部1201的尺寸，以使得第二凹部0120可以作为第二连接部1022的容纳腔。例如，连接元件200的第一部分210位于第一凹部0110中，且连接元件200的第二部分220位于第二凹部0120中。
如此设置，有利于减小掩膜组件在Z方向(如图6所示)上的整体尺寸，有利于轻薄化设计；同时，还可以增强第一连接部和第二连接部分别与连接元件的连接牢固性，以利于连接元件为第一掩膜片和第二掩膜片提供支撑力。
在一些实施例中，如图6所示，第一主体部1101的厚度和第二主体部1201的厚度可以均大于连接元件200的厚度，且连接元件200的远离间隔300的表面与第一主体部1101和第二主体部1201中的至少之一的表面齐平。
例如，如图6所示，连接元件200包括靠近第一主体部1101的第一部分210，以及靠近第二主体部1201的第二部分220，连接元件200还包括位于第一部分210和第二部分220之间的中部，且该中部与填充元件400交叠。例如，连接元件200的第一部分210可以嵌入至第一凹部0110中，且连接元件200的第二部分220可以嵌入至第二凹部0120中，并且连接元件200的远离间隔300的表面与第一主体部1101和第二主体部1201的表面齐平。从而，有利于使得连接元件200的远离间隔300的表面与第一主体部1101和第二主体部1201中的至少之一的表面进行良好的衔接，以使得掩膜组件的整体结构更加平整。
图7为本公开的至少一个实施例提供的又一种掩膜组件的结构示意图；图8为本公开的至少一个实施例提供的又一种掩膜组件的结构示意图。
在一些实施例中，如图7和图8所示，多张掩膜片100中的至少两张掩膜片100通过至少一个连接元件200连接为掩膜片组件，且掩膜片组件212为一体式结构。例如，多张掩膜片100可以呈阵列分布。例如，如图7所示，在X方向上，每相邻的两张掩膜片100均通过连接元件200进行连接。例如，相邻的两张掩膜片在X方向上的尺寸可以是相同的，或者也可以是不同的。例如，如图8所示，在Y方向上，每相邻的两张掩膜片100通过连接元件200进行连接。例如，相邻的两张掩膜片在Y方向上的尺寸可以是相同的，或者也可以是不同的。例如，在X方向上，相邻的两列掩膜片100可以通过同一个连接元件200进行连接。例如，在Y方向上，相邻的两行掩膜片100 也可以通过同一个连接元件200进行连接，由此可以简化连接元件的结构。例如，多张掩膜片100中的部分掩膜片100也可以独立设置，也即该部分掩膜片100中的各掩膜片未通过连接元件与相邻的掩膜片进行连接，本公开的实施例对于掩膜组件中的多张掩膜片100的连接形式不作限定，具体可以根据不同的设计需求进行灵活设置。
图9为本公开的至少一个实施例提供的一种掩膜框的结构示意图；图10为本公开的至少一个实施例提供的一种掩膜片组件设置在图9所示的掩膜框上时的示意图。
例如，如图9所示，本公开的至少一个实施例提供的掩膜组件还包括掩膜框600，掩膜框600包括掩膜边框160。例如，掩模边框160围绕一个开口区域。例如，掩模边框160所围绕的开口区域的开口面积大于掩膜片中的每个开口的开口面积。例如，如图10所示，掩膜片组件212位于掩膜边框160上，且掩膜片组件212的至少部分边缘与掩膜边框160连接。例如，掩膜框600包括内轮廓601与外轮廓602，掩膜边框160可以为内轮廓601与外轮廓602所围设的部分。例如，掩膜框600可以采用金属材料。例如，掩膜片组件212的边缘的一部分可以搭接在掩膜边框160上，并与掩膜边框160连接，例如，焊接，但不限于此，本公开的实施例对于掩膜片组件212与掩膜边框160之间的连接方式不作限定。
图11为本公开的至少一个实施例提供的另一种掩膜框的结构示意图；图12为本公开的至少一个实施例提供的一种掩膜片组件设置在图11所示的掩膜框上时的示意图。
在一些实施例中，图11示出了本公开的至少一个实施例提供的另一种掩膜框600，该掩膜框600包括掩膜边框160以及辅助结构165，辅助结构165与掩膜边框160所围设的一个开口区域交叠，且辅助结构165与掩膜边框160连接。例如，辅助结构165将掩模边框160围绕的一个开口区域划分为多个开口子区域。多个开口子区域可以与掩膜组件中的多张掩膜片一一对应。例如，辅助结构165可以与掩膜边框160为一体式结构。例如，辅助结构165可以为独立的结构，且与掩膜边框160连接，本公开的实施例对于辅助结构的形式不作限定。
在一些实施例中，如图12所示，掩膜组件中的至少一个连接元件200包括至少一个辅助连接元件260，辅助连接元件260的至少部分位于辅助结 构165上。例如，掩膜组件可以包括多个连接元件200，各连接元件200可以设置在辅助结构165上或未设置在辅助结构165上，设置在辅助结构165上的连接元件200可以作为辅助连接元件260。例如，多个连接元件200中除辅助连接元件260之外的连接元件在结构上与辅助连接元件260基本没有差别。例如，辅助结构165的数量不大于连接元件260的数量。例如，在X方向上，辅助结构165的尺寸大于辅助连接元件260的尺寸，由此可以为辅助连接元件260提供稳定的支撑，从而有效地降低掩膜片组件212的下垂量。
本公开的至少一个实施例还提供了一种掩膜组件的制作方法。图13～图14为本公开的至少一个实施例提供的一种掩膜组件的制作过程的结构示意图。下面结合图1～图2、图4～图5、以及图13～图14对一种掩膜组件的制作方法进行说明。
例如，如图13所示，提供至少两张掩膜片100，并通过至少一个连接元件200对至少两张掩膜片100进行连接。参考图1，各掩膜片100包括多个开口101以及围绕各开口101的分隔部102。上述至少两张掩膜片100包括相邻的第一掩膜片110和第二掩膜片120，第一掩膜片110的分隔部102包括第一连接部1021，第二掩膜片120的分隔部102包括第二连接部1022，且第一连接部1021位于第一掩膜片110的多个开口101的外侧，第二连接部1022位于第二掩膜片120的多个开口101的外侧，关于第一掩膜片110和第二掩膜片120的结构请见上述实施例的相关说明，在此不作重复说明。
例如，如图13所示，第一连接部1021与第二连接部1022彼此靠近且具有间隔300，第一连接部1021的至少部分和第二连接部1022的至少部分均位于连接元件200的同一侧，并分别与连接元件200连接。例如，第一连接部1021的一部分可以与连接元件200焊接，第二连接部1022的一部分也可以与连接元件200焊接，从而可以形成掩膜片组件。
例如，参考图2和图14，在间隔300的至少部分中形成填充元件400。例如，如图14所示，在间隔300中形成填充材料0400，填充材料0400可以采用与第一掩膜片110或第二掩膜片120相同的材料，例如，可以采用聚乙烯、聚丙烯、聚氯乙烯等高分子薄膜材料，本公开的实施例对此不作限定。例如，填充材料0400在X方向上的尺寸小于间隔300在X方向上的尺寸，且填充材料0400在Z方向上的尺寸大于或等于间隔300在Z方向上的尺寸，例如，填充材料0400在X方向与第一掩膜片110和第二掩膜片120中的至 少之一具有间隙，从而可便于将填充材料0400形成在间隔300中，并满足对间隔300的填充范围。例如，位于不同的间隔300中的填充材料0400的尺寸可以不相同，例如，对于在X方向上尺寸较大的间隔300，可以使填充材料0400的体积较大，例如可以将填充材料0400的在X方向上的尺寸与在Z方向上的尺寸中的至少之一增大，以使得对间隔300具有足够的填充能力。
然后，参考图2和图14，通过激光或者电子束对填充材料0400进行处理，以使得填充材料0400熔解，从而形成填充在间隔300中的填充元件400。例如，填充材料0400熔解后可以与第一连接部110和第二连接部120彼此相对的表面的至少之一接触，以利于保证后续形成在第一连接部110和第二连接部120上的膜层的厚度均一性。
例如，参考图2和图14，形成在间隔300的至少部分中的填充材料0400可以为光学胶，进而，通过对光学胶进行固化，可以形成填充元件400。例如，上述光学胶可以为紫外光固化胶，但不限于此。例如，通过采用固化胶，可以在具有不同尺寸的间隔中，使得填充元件400均能够与其两侧的第一连接部1021和第二连接部1022中的至少之一接触，从而更好地保证形成在第一掩膜片110和第二掩膜片120上的膜层的厚度均一性。
例如，参考图5，在多张掩膜片(如第一掩膜片110和第二掩膜片120)上形成保护膜层500。例如，保护膜层500形成在填充元件400的远离连接元件200的一侧，且与连接元件200交叠。例如，保护膜层500可以通过化学气相沉积(Chemical Vapor Deposition,CVD)的工艺形成，以使得保护膜层500的致密性良好，且具有均匀的厚度。例如，保护膜层500可以包括氧化铝，从而可以减小水、氧气等对于第一掩膜片110和第二掩膜片120的侵蚀，从而提高第一掩膜片110和第二掩膜片120的使用寿命。
本公开的至少一个实施例还提供了另一种掩膜组件的制作过程。图15为在图3所示出的掩膜组件中形成保护膜层后的结构示意图。下面结合图1、图3、图13和图15对另一种掩膜组件的制作方法进行说明。
如图13所示，提供至少两张掩膜片100，并通过至少一个连接元件200对至少两张掩膜片100进行连接。参考图1，各掩膜片100包括多个开口101以及围绕开口101的分隔部102。上述至少两张掩膜片100包括相邻的第一掩膜片110和第二掩膜片120，第一掩膜片110的分隔部102包括第一连接部1021，第二掩膜片120的分隔部102包括第二连接部1022，第一连接部 1021位于第一掩膜片110的多个开口101的外侧，第二连接部1022位于第二掩膜片120的多个开口101的外侧，关于第一掩膜片110和第二掩膜片120的结构请见上述实施例的相关说明，在此不作重复说明。
如图13所示，第一连接部1021与第二连接部1022彼此靠近且具有间隔300，第一连接部1021的至少部分和第二连接部1022的至少部分均位于连接元件200的同一侧，并分别与连接元件200连接。例如，第一连接部1021的一部分可以与连接元件200焊接，第二连接部1022的一部分也可以与连接元件200焊接，从而可以形成掩膜片组件。
参考图3，对第一连接部1021的靠近间隔300的端部的一部分和第二连接部1022的靠近间隔300的端部的一部分中的至少之一进行熔解，以使得第一连接部1021的面对间隔300的第一表面104和第二连接部1022的面对间隔300的第二表面106中的至少之一相对于连接元件200的坡度角小于90度。例如，参考图1和图3，第一连接部1021的靠近间隔300的端部的一部分被熔解，以使得第一表面104呈曲面。第二连接部1022的靠近间隔300的端部的一部分被熔解，以使得第二表面106为相对于连接元件200的斜面，但本公开的实施例对于第一表面104和第二表面106的形状不作限定。
通过对第一连接部的靠近间隔的端部的一部分和第二连接部的靠近间隔的端部的一部分中的至少之一进行熔解，可以减小上述间隔在第一连接部与第二连接部的排列方向上的尺寸，并利于保证形成在第一掩膜片和第二掩膜片上的膜层的厚度均一性。
例如，参考图13，第一连接部1021包括靠近间隔300的第一角部1031，第二连接部1022包括靠近间隔300的第二角部1032，例如，第一角部1031为第一连接部1021的靠近间隔300的端部的一部分，第二角部1032为第二连接部1022的靠近间隔300的端部的一部分。上述对第一连接部1021的靠近间隔300的端部的一部分和第二连接部1022的靠近间隔300的端部的一部分中的至少之一进行熔解，可以包括：通过激光或者电子束对第一连接部1021的第一角部1031和第二连接部1022的第二角部1032中的至少之一进行熔解。
例如，参考图3和图13，第一表面104可以为通过激光或者电子束对第一角部1031进行熔解后形成的表面，第二表面106可以为通过激光或者电子束对第二角部1032进行熔解后形成的表面。例如，通过激光或电子束对 第一角部1031和第二角部1032进行熔解的程度可以不相同。例如，第一角部1031和第二角部1032被熔解的体积可以不相同，以使得第一表面104和第二表面106具有不同的形状，进而使得第一表面104相对于连接元件200的坡度角和第二表面106相对于连接元件200的坡度角可以不相同，本公开的实施例对于第一角部1031和第二角部1032的熔解程度不作限定。
例如，参考图15，在形成第一表面104和第二表面106后，可以在第一连接部1021和第二连接部1022上形成保护膜层500。例如，保护膜层500形成在填充元件400的远离连接元件200的一侧，且与连接元件200交叠。例如，保护膜层500可以通过化学气相沉积(Chemical Vapor Deposition,CVD)的工艺形成，以使得保护膜层500的致密性良好，且具有均匀的厚度。例如，保护膜层500可以包括氧化铝，从而可以减小水、氧气等对于第一连接部1021和第二连接部1022的侵蚀，从而提高第一掩膜片110和第二掩膜片120的使用寿命。
有以下几点需要说明：
(1)本公开的实施例附图中，只涉及到与本公开实施例涉及到的结构，其他结构可参考通常设计。
(2)在不冲突的情况下，本公开的同一实施例及不同实施例中的特征可以相互组合。
以上所述仅是本公开的示范性实施方式，而非用于限制本公开的保护范围，本公开的保护范围由所附的权利要求确定。

Claims (21)

  1. 一种掩膜组件，包括：
    多张掩膜片，各所述掩膜片包括多个开口，以及围绕所述开口的分隔部；
    至少一个连接元件，被配置为对所述多张掩膜片中至少两张掩膜片进行连接；
    其中，所述多张掩膜片包括相邻的第一掩膜片和第二掩膜片，所述第一掩膜片的分隔部包括第一连接部，所述第二掩膜片的分隔部包括第二连接部，所述第一连接部位于所述第一掩膜片的多个开口的外侧，所述第二连接部位于所述第二掩膜片的多个开口的外侧，所述第一连接部与所述第二连接部彼此靠近，且所述第一连接部与所述第二连接部彼此面对的至少部分表面之间具有间隔，所述第一连接部的至少部分和所述第二连接部的至少部分均位于所述连接元件的同一侧，并分别与所述连接元件连接，
    所述掩膜组件还包括填充元件，所述填充元件位于所述间隔的至少部分中；或者，
    所述第一连接部包括面对所述间隔的第一表面，所述第二连接部包括面对所述间隔的第二表面，所述第一表面和所述第二表面中的至少之一相对于所述连接元件的坡度角小于90度。
  2. 根据权利要求1所述的掩膜组件，其中，所述第一表面和所述第二表面中的至少之一相对于所述连接元件的所述坡度角不大于80度。
  3. 根据权利要求1所述的掩膜组件，其中，所述第一表面和所述第二表面中的至少之一相对于所述连接元件的所述坡度角为10～40度。
  4. 根据权利要求1-3任一项所述的掩膜组件，其中，所述第一表面和所述第二表面中的至少之一被一平面所截的截线呈弧形，所述平面与所述连接元件的厚度方向平行，且所述平面与所述第一掩膜片和所述第二掩膜片的排列方向平行。
  5. 根据权利要求1所述的掩膜组件，其中，所述第一连接部和所述第二连接部的彼此面对的表面均与所述填充元件接触。
  6. 根据权利要求1或5所述的掩膜组件，其中，所述填充元件的材料包括与所述掩膜片相同的材料和光学胶之一。
  7. 根据权利要求1，5和6中任一项所述的掩膜组件，其中，所述填充 元件与所述第一连接部之间具有第一厚度差，所述第一厚度差为所述第一连接部的最大厚度的1/5～1/2，所述填充元件与所述第二连接部之间具有第二厚度差，所述第二厚度差为所述第二连接部的最大厚度的1/5～1/2。
  8. 根据权利要求7所述的掩膜组件，其中，所述第一厚度差和所述第二厚度差中的至少之一为10～50微米。
  9. 根据权利要求1-8任一项所述的掩膜组件，其中，在所述第一连接部和所述第二连接部的排列方向上，所述第一连接部的在其厚度方向上与所述连接元件交叠的部分的尺寸不小于所述第一连接部的最大尺寸的1/4；和/或，所述第二连接部的在其厚度方向上所述连接元件交叠的部分的尺寸不小于所述第二连接部的最大尺寸的1/4。
  10. 根据权利要求1-9任一项所述的掩膜组件，还包括：保护膜层，所述保护膜层位于所述多张掩膜片上，且与所述至少一个连接元件交叠。
  11. 根据权利要求1-10任一项所述的掩膜组件，其中，所述第一连接部和所述第二连接部均位于所述连接元件的所述同一侧。
  12. 根据权利要求1-11任一项所述的掩膜组件，其中，所述第一连接部包括第一主体部和第一端部，所述第一端部比所述第一主体部更靠近所述间隔，在所述第一连接部的厚度方向上，所述第一端部相对于所述第一主体部凹陷，以使得所述第一连接部具有第一凹部，
    所述第二连接部包括第二主体部和第二端部，所述第二端部比所述第二主体部更靠近所述间隔，在所述第二连接部的厚度方向上，所述第二端部相对于所述第二主体部凹陷，以使得所述第二连接部具有第二凹部，
    所述连接元件的第一部分位于所述第一凹部中，所述连接元件的第二部分位于所述第二凹部中。
  13. 根据权利要求12所述的掩膜组件，其中，所述第一主体部的厚度和所述第二主体部的厚度均大于所述连接元件的厚度，所述连接元件的远离所述间隔的表面与所述第一主体部和第二主体部中的至少之一的表面齐平。
  14. 根据权利要求1-13任一项所述的掩膜组件，其中，所述多张掩膜片中的至少两张掩膜片通过至少一个所述连接元件连接为掩膜片组件，所述掩膜片组件为一体式结构，
    所述掩膜组件还包括掩膜框，所述掩膜框包括掩膜边框，所述掩膜片组件位于所述掩膜边框上，且所述掩膜片组件的至少部分边缘与所述掩膜边框 连接。
  15. 根据权利要求14所述的掩膜组件，其中，所述掩膜框还包括辅助结构，所述辅助结构与所述掩膜边框所围设的区域交叠，且所述辅助结构与所述掩膜边框连接，
    所述至少一个连接元件包括至少一个辅助连接元件，所述辅助连接元件的至少部分位于所述辅助结构上。
  16. 一种掩膜组件的制作方法，包括：
    通过至少一个连接元件对多张掩膜片中至少两张掩膜片进行连接，其中，各所述掩膜片包括多个开口以及围绕所述开口的分隔部，所述多张掩膜片包括相邻的第一掩膜片和第二掩膜片，所述第一掩膜片的分隔部包括第一连接部，所述第二掩膜片的分隔部包括第二连接部，所述第一连接部位于所述第一掩膜片的多个开口的外侧，所述第二连接部位于所述第二掩膜片的多个开口的外侧，所述第一连接部与所述第二连接部彼此靠近且所述第一连接部与所述第二连接部彼此面对的至少部分表面之间具有间隔，所述第一连接部的至少部分和所述第二连接部的至少部分均位于所述连接元件的同一侧，并分别与所述连接元件连接；以及
    在所述间隔的至少部分中形成填充元件；或者，对所述第一连接部的靠近所述间隔的端部的一部分和所述第二连接部的靠近所述间隔的端部的一部分中的至少之一进行熔解，以使得所述第一连接部的面对所述间隔的第一表面和所述第二连接部的面对所述间隔的第二表面中的至少之一相对于所述连接元件的坡度角小于90度。
  17. 根据权利要求16所述的掩膜组件的制作方法，其中，所述在所述间隔的至少部分中形成填充元件，包括：
    在所述间隔中形成填充材料；以及
    通过激光或者电子束对所述填充材料进行熔解，以形成所述填充元件。
  18. 根据权利要求16或17所述的掩膜组件的制作方法，其中，所述填充元件的材料与所述掩膜片的材料相同。
  19. 根据权利要求16所述的掩膜组件的制作方法，其中，所述在所述间隔的至少部分中形成填充元件，包括：
    在所述间隔中填充光学胶；以及
    对所述光学胶进行固化，以形成所述填充元件。
  20. 根据权利要求16所述的掩膜组件的制作方法，其中，所述第一连接部包括靠近所述间隔的第一角部，所述第二连接部包括靠近所述间隔的第二角部，所述对所述第一连接部的靠近所述间隔的端部的一部分和所述第二连接部的靠近所述间隔的端部的一部分中的至少之一进行熔解，包括：
    通过激光或者电子束对所述第一连接部的所述第一角部和所述第二连接部的所述第二角部中的至少之一进行熔解。
  21. 根据权利要求16-20任一项所述的掩膜组件的制作方法，还包括：在所述多张掩膜片上形成保护膜层，其中，所述保护膜层与所述至少一个连接元件交叠。
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