Classifications

• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • B23B—TURNING; BORING
  • B23B27/00—Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
  • B23B27/14—Cutting tools of which the bits or tips or cutting inserts are of special material
  • B23B27/148—Composition of the cutting inserts
• • C—CHEMISTRY; METALLURGY
  • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
  • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
  • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
  • C23C14/0021—Reactive sputtering or evaporation
• • C—CHEMISTRY; METALLURGY
  • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
  • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
  • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
  • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
  • C23C14/0664—Carbonitrides
• • C—CHEMISTRY; METALLURGY
  • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
  • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
  • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
  • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
  • C23C14/24—Vacuum evaporation
  • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
  • C23C14/325—Electric arc evaporation
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • B23B—TURNING; BORING
  • B23B2228/00—Properties of materials of tools or workpieces, materials of tools or workpieces applied in a specific manner
  • B23B2228/10—Coatings
  • B23B2228/105—Coatings with specified thickness
• • C—CHEMISTRY; METALLURGY
  • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
  • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
  • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
  • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
  • C23C14/0641—Nitrides

Definitions

• This disclosure relates to cutting tools.
• FIG. 1 is a schematic enlarged cross-sectional view of an example of a cutting tool according to a first embodiment.
• FIG. 2 is a schematic enlarged cross-sectional view of an example of the cutting tool according to the first embodiment.
• FIG. 3 is a schematic enlarged cross-sectional view of an example of the cutting tool according to the first embodiment.
• FIG. 4 is a schematic enlarged cross-sectional view of an example of the cutting tool according to the first embodiment.
• FIG. 5 is a perspective view illustrating an embodiment of a cutting tool.
• FIG. 6 is a schematic cross-sectional view of the cathodic arc ion plating apparatus used in the examples.
• FIG. 7 is a schematic top view of the cathodic arc ion plating apparatus shown in FIG.
• a cutting tool includes a substrate and a coating provided on the substrate, the coating comprises a first layer; the first layer is made of Al a Ti b Cr (1-ab-cd) Si c Ag d N;
• the a, b, c, and d are 0.50 ⁇ a ⁇ 0.75, 0.10 ⁇ b ⁇ 0.25, 0.005 ⁇ c ⁇ 0.20, 0.005 ⁇ d ⁇ 0.10, and
• This disclosure makes it possible to provide cutting tools that have a long tool life, particularly when continuously machining nickel-based alloys.
• c and d may satisfy the relationship c/d ⁇ 1. This further improves tool life.
• the thickness of the first layer may be 0.5 ⁇ m or more and 10 ⁇ m or less. This further improves tool life.
• the coating further includes a second layer provided between the substrate and the first layer,
• the second layer may be made of a first compound containing at least one element selected from a first group consisting of Group 4 elements, Group 5 elements, Group 6 elements, aluminum, and silicon of the periodic table, or containing at least one element selected from the first group and at least one element selected from a second group consisting of carbon, nitrogen, oxygen, and boron.
• the coating further includes a third layer provided on the side of the first layer opposite to the substrate,
• the third layer may be made of at least one element selected from a first group consisting of Group 4 elements, Group 5 elements, Group 6 elements, aluminum, and silicon of the periodic table, or a second compound containing at least one element selected from the first group and at least one element selected from a second group consisting of carbon, nitrogen, oxygen, and boron.
• the thickness of the coating may be 0.5 ⁇ m or more and 12 ⁇ m or less. This further improves tool life.
• the substrate may be made of cemented carbide, cermet, cubic boron nitride sintered body, diamond sintered body, high-speed steel, or ceramics. This further improves the tool life.
• a ⁇ B means greater than or equal to A and less than or equal to B. If no unit is specified for A and only a unit is specified for B, the units for A and B are the same.
• a cutting tool 1 As shown in FIGS. 1 to 4 , a cutting tool 1 according to one embodiment of the present disclosure (hereinafter also referred to as “Embodiment 1”) includes: A cutting tool 1 comprising a substrate 2 and a coating 3 provided on the substrate 2, The coating 3 includes a first layer 13, The first layer 13 is made of Al a Ti b Cr (1-ab-cd) Si c Ag d N, a, b, c and d are 0.50 ⁇ a ⁇ 0.75, 0.10 ⁇ b ⁇ 0.25, 0.005 ⁇ c ⁇ 0.20, 0.005 ⁇ d ⁇ 0.10, and The cutting tool 1 satisfies a+b+c+d ⁇ 1.
• the cutting tool of embodiment 1 has a long tool life, especially when continuously machining nickel-based alloys. The reason for this is presumed to be as follows.
• Aluminum (Al) contained in the first layer improves the high-temperature hardness of the first layer.
• the above a is 0.50 or more, the high-temperature hardness and heat resistance of the first layer are improved.
• the above a is 0.75 or less, the formation of hexagonal crystals is suppressed, and a decrease in the high-temperature hardness of the first layer is suppressed.
• the titanium (Ti) contained in the first layer improves the high-temperature strength of the first layer.
• the above b is 0.10 or more, the effect of improving high-temperature strength can be fully obtained.
• the above b is 0.25 or less, the aluminum content of the first layer can be sufficiently ensured, thereby improving the high-temperature hardness of the first layer.
• chromium (Cr) and aluminum in the first layer improves the heat resistance and high-temperature oxidation resistance of the first layer.
• Silicon (Si) contained in the first layer improves the oxidation resistance and heat resistance of the first layer.
• the above c is 0.005 or more, the oxidation resistance of the first layer is improved.
• the crystal grains of the first layer are refined, improving the hardness of the first layer.
• the above c is 0.20 or less, the decrease in toughness of the first layer is suppressed, and the occurrence of chipping is suppressed.
• the silver (Ag) contained in the first layer forms an oxide film on the surface of the first layer, improving the lubricity of the coating.
• Silver also has low solubility in nickel and chromium (if the nickel-based alloy is a nickel-chromium alloy), which are components of nickel-based alloys. Therefore, the first layer containing silver is less likely to adhere to the workpiece material, which is made of a nickel-based alloy, during cutting.
• silver does not form nitrides, so it tends to disrupt the crystal lattice of the nitride coating, reducing the hardness of the coating.
• the hardness of the first layer can be improved. This is a finding made by the inventors after extensive research.
• the first layer of embodiment 1 has excellent high-temperature hardness and heat resistance due to aluminum, excellent high-temperature strength due to titanium, excellent oxidation resistance and heat resistance due to chromium and silicon, excellent lubricity and adhesion resistance due to silver, and high hardness due to the addition of silver and silicon, allowing for a long tool life even when continuously machining nickel-based alloys, which tend to have high cutting edge temperatures during cutting.
• a cutting tool 1 includes a substrate 2 and a coating 3 provided on the substrate 2.
• the coating 3 may cover the entire surface of the substrate 2. It is also within the scope of this embodiment if a portion of the substrate 2 is not covered by the coating 3 or if the coating 3 has a partially different configuration.
• the coating 3 may cover at least a portion of the substrate 2 that is involved in cutting.
• the portion of the substrate 2 that is involved in cutting refers to a region of the substrate 2 that is surrounded by a cutting edge ridge and an imaginary surface that is, depending on the size and shape of the substrate 2, a distance from the cutting edge ridge toward the substrate 2 along a perpendicular to a tangent to the cutting edge ridge, of, for example, 5 mm, 3 mm, 2 mm, 1 mm, or 0.5 mm.
• the cutting tool 1 of this embodiment can be suitably used as a cutting tool 1 for drills, end mills, indexable cutting tips for drills, indexable cutting tips for end mills, indexable cutting tips for milling, indexable cutting tips for turning, metal saws, gear cutting tools, reamers, taps, and the like.
• FIG. 5 is a perspective view illustrating one embodiment of a cutting tool.
• Cutting tool 1 is used as an indexable cutting tip.
• Cutting tool 1 has a rake face 21, a flank face 22, and a cutting edge ridge 23 where rake face 21 and flank face 22 intersect.
• the substrate may be made of cemented carbide (WC-based cemented carbide, cemented carbide containing WC and Co, cemented carbide obtained by adding carbonitrides of Ti, Ta, Nb, etc. to WC and Co, etc.), cermet (mainly composed of TiC, TiN, TiCN, etc.), high-speed steel, ceramics (titanium carbide, silicon carbide, silicon nitride, aluminum nitride, aluminum oxide, etc.), cubic boron nitride sintered body, or diamond sintered body.
• cemented carbide WC-based cemented carbide, cemented carbide containing WC and Co, cemented carbide obtained by adding carbonitrides of Ti, Ta, Nb, etc. to WC and Co, etc.
• cermet mainly composed of TiC, TiN, TiCN, etc.
• high-speed steel ceramics (titanium carbide, silicon carbide, silicon nitride, aluminum nitride, aluminum oxide, etc.), cubic
• the substrate may be, in particular, a WC-based cemented carbide or cermet (particularly a TiCN-based cermet).
• WC-based cemented carbide or cermet has an excellent balance of hardness and strength, especially at high temperatures, and when used as a substrate for a cutting tool, it can contribute to extending the life of the cutting tool.
• the coating of the first embodiment includes a first layer. By covering the substrate, the coating improves various properties of the cutting tool, such as wear resistance and chipping resistance, thereby extending the life of the cutting tool.
• the coating may include other layers in addition to the first layer. As shown in FIGS. 2 to 4 , these other layers include a second layer 14 provided between the substrate 2 and the first layer 13, and a third layer 16 provided on the side of the first layer 13 opposite the substrate 2.
• the thickness of the coating may be 0.4 ⁇ m to 20 ⁇ m, 0.5 ⁇ m to 12 ⁇ m, 1 ⁇ m to 10 ⁇ m, or 2 ⁇ m to 8 ⁇ m. If the coating thickness is 0.5 ⁇ m or more, the life of the cutting tool can be extended. On the other hand, if the total thickness of the coating is 12 ⁇ m or less, chipping of the coating is less likely to occur in the early stages of cutting, and the life of the cutting tool can be extended.
• the thickness of the coating is measured by observing the cross section of the coating using a scanning electron microscope (SEM).
• SEM scanning electron microscope
• the specific measurement method is as follows: A cutting tool is cut in a direction normal to the main surface of the coating to prepare a cross section sample. The cross section sample is observed with the SEM. The observation magnification is 5000 to 10000 times, and the measurement field of view is 100 to 500 ⁇ m2 . In one field of view, the thickness width of the coating is measured at three points, and the average value of the thickness widths at the three points is calculated. This average value corresponds to the thickness of the coating.
• the thickness of each layer described below is also measured in the same manner unless otherwise specified.
• the crystalline structure of the coating may be cubic. When the crystalline structure of the coating is cubic, the hardness of the coating is improved.
• the crystalline structure of each layer in the coating (first layer, third layer, second layer, etc.) may also be cubic.
• the crystalline structure of the coating and each layer in the coating can be analyzed using an X-ray diffraction device known in the art.
• the hardness of the coating may be 30 GPa or more and 50 GPa or less, or 35 GPa or more and 45 GPa or less. This means that the coating has sufficient hardness.
• the hardness of the coating is measured by a nanoindenter method (measuring device: ENT-1100a manufactured by Elionix). Specifically, the method is performed in accordance with ISO 14577, with a measuring load of 10 mN (1 gf), and the hardness is measured at 10 locations on the surface of the coating, and the average value of the hardness values at the 10 locations is calculated. This average value corresponds to the hardness of the coating.
• the first layer is composed of Al a Ti b Cr (1-ab-cd) Si c Ag d N, where a, b, c, and d satisfy 0.50 ⁇ a ⁇ 0.75, 0.10 ⁇ b ⁇ 0.25, 0.005 ⁇ c ⁇ 0.20, 0.005 ⁇ d ⁇ 0.10, and a+b+c+d ⁇ 1.
• a may be 0.500 or greater and 0.750 or less, 0.550 or greater and 0.700 or less, or 0.600 or greater and 0.650 or less.
• b may be 0.100 or greater and 0.250 or less, 0.100 or greater and 0.200 or less, or 0.120 or greater and 0.180 or less.
• c may be 0.005 or greater and 0.200 or less, 0.010 or greater and 0.150 or less, or 0.050 or greater and 0.100 or less.
• d may be 0.005 or greater and 0.100 or less, 0.010 or greater and 0.090 or less, or 0.030 or greater and 0.080 or less.
• a+b+c+d is less than 1 and may be 0.950 or less, 0.910 or less, or 0.890 or less.
• c/d may be 1 or greater, may be greater than 1, may be 1 to 20, may be 1.2 to 10, may be 1.25 to 5, or may be 2 to 4.
• c/d is 1 or greater, the film hardness is improved, and the tool life is improved.
• the first layer is made of Al a Ti b Cr (1-ab-cd) Si c Ag d N
• the first layer may contain inevitable impurities in addition to Al a Ti b Cr (1-ab-cd) Si c Ag d N, as long as the effects of the present disclosure are not impaired.
• inevitable impurities include oxygen and carbon.
• the total content of inevitable impurities in the first layer may be greater than 0 atomic % and less than 1 atomic %.
• “atomic %” means the ratio (%) of the number of atoms to the total number of atoms constituting the layer.
• the content of a, b, c, d, and inevitable impurities in the first layer is measured by elemental analysis of a cross-section of the coating using a transmission electron microscope (TEM).
• TEM transmission electron microscope
• the specific measurement method is as follows: A cutting tool is cut in a direction normal to the main surface of the coating to prepare a thin section sample containing the cross-section of the coating. An EDS (Energy Dispersive X-ray Spectroscopy) attached to the TEM is used to irradiate the thin section sample with an electron beam, measuring the energy and number of characteristic X-rays generated during the process and performing elemental analysis of the first layer. Five non-overlapping measurement areas are arbitrarily set within the first layer, and elemental analysis is performed at the five locations.
• EDS Electronic Dispersive X-ray Spectroscopy
• the average composition of the five locations is determined. This average composition corresponds to the composition of the first layer.
• the compositions of the second and third layers, described below, are also measured using a similar method. It has been confirmed that there is no variance in the measurement results even when measurement locations are arbitrarily selected.
• the first layer has a composition of Al a Ti b Cr (1-ab-cd) Si c Ag d N, where the ratio A N1 /A M1 of the number of N atoms A N1 to the total number A M1 of Al, Ti, Cr, Si, and Ag atoms is 0.8 or more and 1.2 or less.
• the ratio A N1 /A M1 can be measured by Rutherford backscattering (RBS) spectroscopy. It has been confirmed that the effects of the present disclosure are not impaired as long as the ratio A N1 /A M1 is within the above range.
• the thickness of the first layer may be 0.4 ⁇ m or more and 12 ⁇ m or less, 0.5 ⁇ m or more and 10 ⁇ m or less, 1 ⁇ m or more and 8 ⁇ m or less, or 2 ⁇ m or more and 5 ⁇ m or less.
• the thickness of the first layer is 0.5 ⁇ m or more, the wear resistance is excellent and the life of the cutting tool can be extended.
• the thickness of the first layer is 10 ⁇ m or less, chipping of the coating is unlikely to occur in the early stage of cutting, and the life of the cutting tool can be extended.
• the coating 3 may further include a second layer 14 provided between the substrate 2 and the first layer 13.
• the second layer 14 may be provided directly on the substrate.
• the second layer can be composed of at least one element selected from Group 1 consisting of Group 4 elements, Group 5 elements, Group 6 elements, aluminum (Al), and silicon (Si), or a first compound consisting of at least one element selected from Group 1 and at least one element selected from Group 2 consisting of carbon (C), nitrogen (N), oxygen (O), and boron (B).
• Group 4 elements include titanium (Ti), zirconium (Zr), and hafnium (Hf).
• Group 5 elements include vanadium (V), niobium (Nb), and tantalum (Ta).
• Group 6 elements include chromium (Cr), molybdenum (Mo), and tungsten (W).
• the second layer can improve adhesion between the substrate and the coating, thereby improving tool life.
• the second layer can contain unavoidable impurities in addition to at least one element selected from Group 1 or the first compound, as long as the effects of the present disclosure are not impaired.
• the second layer can be made of at least one element selected from Group 1A consisting of Cr, Al, Ti, and Si, or a first compound consisting of at least one element selected from Group 1A and at least one element selected from Group 2 consisting of carbon, nitrogen, oxygen, and boron.
• Examples of the first compound include TiWCN, TiN, TiAlN, TiAlON, Al2O3 , TiAlSiN , TiCrSiN, TiAlCrSiN, AlCrN, AlCrO, AlCrON, AlCrSiN, AlCrBN, TiZrN, TiAlMoN, TiAlNbN, TiSiN, AlCrTaN, AlVN, AlTiVN, TiB2 , TiCrHfN, CrSiWN, TiAlCN, TiSiCN, AlZrON, AlCrCN, AlHfN, CrSiBON, TiAlWN, AlCrMoCN, TiCN, TiCON, ZrN, and ZrCN.
• the thickness of the second layer there are no particular restrictions on the thickness of the second layer as long as it does not impair the effects of this embodiment, but it can be, for example, 0.1 ⁇ m or more and 2 ⁇ m or less.
• the coating 3 may further include a third layer 16 provided on the side of the first layer 13 opposite the substrate 2.
• the third layer 16 may be provided directly on the first layer 13.
• Another layer may be provided between the first layer 13 and the third layer 16.
• the third layer 16 may be the outermost layer.
• the third layer can be composed of at least one element selected from Group 1 consisting of Group 4 elements, Group 5 elements, Group 6 elements, aluminum (Al), and silicon (Si), or a second compound consisting of at least one element selected from Group 1 and at least one element selected from Group 2 consisting of carbon (C), nitrogen (N), oxygen (O), and boron (B).
• the third layer can reduce the friction coefficient of the coating and extend the life of the cutting tool. As long as the effects of the present disclosure are not impaired, the third layer can contain impurities in addition to at least one element selected from Group 1 or the second compound.
• the third layer can be made of at least one element selected from Group 1A consisting of Cr, Al, Ti, and Si, or a second compound made of at least one element selected from Group 1A and at least one element selected from Group 2 consisting of carbon, nitrogen, oxygen, and boron.
• Examples of the second compound include AlTiBN, TiAlN, TiAlON, Al2O3 , TiAlSiN , TiCrSiN, TiAlCrSiN, AlCrN, AlCrO, AlCrON, AlCrSiN, AlCrBN, TiZrN, TiAlMoN, TiAlNbN, TiSiN, AlCrTaN, AlVN, AlTiVN, TiB2 , TiCrHfN, CrSiWN, TiAlCN, TiSiCN, AlZrON, AlCrCN, AlHfN, CrSiBON, TiAlWN, AlCrMoCN, TiCN, TiCON, ZrN, and ZrCN.
• the thickness of the third layer may be 0.1 ⁇ m or more and 2 ⁇ m or less. If the thickness of the third layer is 0.1 ⁇ m or more, the lubrication effect of the third layer is more likely to be obtained. There is no particular upper limit to the thickness of the third layer, but if it exceeds 2 ⁇ m, it tends not to be possible to further improve the above-mentioned lubrication effect. Therefore, from a cost perspective, the thickness of the third layer may be 2 ⁇ m or less.
• the coating may include an intermediate layer disposed between the third layer and the first layer or between the first layer and the second layer.
• the intermediate layer include TiAlCeN, AlTiN, AlTiBN, AlTiSiN, AlTiYN, and AlTiLaN.
• the thickness of the intermediate layer may be 0.1 ⁇ m or more and 2 ⁇ m or less, 0.3 ⁇ m or more and 1.5 ⁇ m or less, or 0.4 ⁇ m or more and 1.0 ⁇ m or less.
• Embodiment 2 Method for manufacturing a cutting tool
• the manufacturing method includes a first step of preparing a substrate and a second step of forming a coating on the substrate.
• the second step includes a step of forming a first layer.
• a substrate is prepared.
• the substrate may be the substrate described in embodiment 1. Any substrate that is conventionally known may be prepared.
• a coating is formed on the substrate.
• the second step includes forming a first layer.
• the first layer is formed using a physical vapor deposition (PVD) method.
• PVD physical vapor deposition
• Forming a layer made of a highly crystalline compound is highly effective in improving the abrasion resistance of the coating, including the first layer.
• PVD physical vapor deposition
• cathode arc ion plating As a PVD method, at least one selected from the group consisting of cathode arc ion plating, balanced magnetron sputtering, unbalanced magnetron sputtering, and HiPIMS can be used.
• cathode arc ion plating which has a high ionization rate of the raw material elements, may be used.
• cathode arc ion plating it is possible to perform an ion bombardment treatment of the metal on the surface of the substrate before forming the first layer, thereby significantly improving adhesion between the substrate and the coating, including the first layer.
• the cathodic arc ion plating method can be performed, for example, by placing a substrate in the device and a target as a cathode, and then applying a high voltage to the target to create an arc discharge, which ionizes and vaporizes the atoms that make up the target, depositing the material on the substrate.
• the second step may include a surface treatment step such as surface grinding or shot blasting in addition to the step of forming the first layer.
• the second step may also include the step of forming other layers such as a second layer, a third layer, and an intermediate layer.
• the other layers may be formed by a conventionally known chemical vapor deposition method or physical vapor deposition method. From the viewpoint that the other layers can be formed continuously with the first layer in a single physical vapor deposition apparatus, the other layers may be formed by physical vapor deposition.
• FIG. 6 is a schematic cross-sectional view of the cathodic arc ion plating apparatus used in this example
• FIG. 7 is a schematic top view of the apparatus of FIG.
• cathodes 106 and 107 for the first layer which are alloy targets that serve as the metal raw material for coating 3, and a rotary substrate holder 104 for placing the substrate are installed within chamber 101.
• the compositions of cathodes 106 and 107 are adjusted to obtain the compositions listed in Table 1 below.
• a cathode for the second layer or a cathode for the third layer (not shown) is also installed in chamber 101.
• the compositions of the cathode for the second layer and the cathode for the third layer are adjusted to obtain the compositions listed in Table 2 below.
• An arc power supply 108 is attached to cathode 106, and an arc power supply 109 is attached to cathode 107.
• a bias power supply 110 is attached to substrate holder 104.
• a gas inlet for introducing gas 105 is provided in chamber 101, and a gas outlet 103 is provided to adjust the pressure inside chamber 101. The gas inside chamber 101 can be sucked out from gas outlet 103 using a vacuum pump.
• the substrate holder 104 was fitted with a substrate made of cemented carbide of grade JIS K20 and a tip of JIS CNMG120408 shape.
• the pressure inside chamber 101 was reduced using a vacuum pump, and the substrate was rotated while being heated to 500°C using a heater installed in the apparatus, and the chamber 101 was evacuated until the pressure inside chamber 101 reached 1.0 x 10-4 Pa.
• argon gas was introduced through the gas inlet to maintain the pressure inside chamber 101 at 2.0 Pa, and the voltage of bias power supply 110 was gradually increased to -1000 V, and the surface of the substrate was cleaned for 15 minutes. Thereafter, the argon gas was exhausted from chamber 101 to clean the substrate (argon bombardment treatment). In this manner, the substrate for each sample cutting tool was prepared.
• the second layer was formed on the substrate, and then the first layer was formed on top of the second layer.
• the second layer was formed using the following procedure.
• the substrate temperature was set to 550°C and the gas pressure inside the device was set to 4.0 Pa.
• a mixture of nitrogen gas and argon gas was introduced as the reactive gas.
• An arc current of 150 A was then supplied to the cathode electrode.
• the second layer was formed by generating metal ions and other substances from the arc evaporation source using the supplied arc current.
• a third layer was formed, it was formed on top of the first layer.
• the third layer was formed using the following procedure.
• the substrate temperature was set to 550°C and the gas pressure inside the device to 4.0 Pa.
• a mixture of nitrogen gas and argon gas was introduced as the reactive gas.
• An arc current of 150 A was then supplied to the cathode electrode. The supply of arc current generated metal ions and other substances from the arc evaporation source, forming the third layer.
• ⁇ Coating hardness> The hardness of the coating of each sample cutting tool was analyzed by the method described in embodiment 1. In samples 1 to 21, the hardness of the coating was 30 GPa or more and 50 GPa or less.
• ⁇ Cutting test> A continuous turning test was carried out under the cutting conditions for each sample, and the cutting distance until the wear width or chipping width of the cutting edge reached 200 ⁇ m was measured. The results are shown in Table 2. A long cutting distance indicates a long tool life.
• ⁇ Cutting conditions Work material: Inconel 718 Cutting speed Vc: 100m/min Feed rate f: 0.25 mm/rev Cutting depth: 2.0 mm - Cutting oil: Yes The above cutting conditions apply to continuous machining of nickel-based alloys.
• Cutting tools Samples 1 to 21 correspond to examples, while cutting tools Samples 1-1 to 1-11 correspond to comparative examples. It was confirmed that cutting tools Samples 1 to 21 have a longer tool life in continuous machining of nickel-based alloys than cutting tools Samples 1-1 to 1-11.

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• Organic Chemistry (AREA)
• Physical Vapour Deposition (AREA)
• Cutting Tools, Boring Holders, And Turrets (AREA)

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