WO2025055739A1 - Laser power monitoring apparatus and high-power laser device - Google Patents

Abstract

The embodiments of the present application relate to the technical field of optics. Disclosed are a laser power monitoring apparatus and a high-power laser device. The laser power monitoring apparatus comprises: a housing, and a laser shaping assembly, a laser filtering assembly and a photoelectric monitoring assembly, which are sequentially arranged in the housing in an optical path direction, wherein the laser shaping assembly is used for receiving incident lasers, shaping the incident lasers and then outputting the incident lasers to the laser filtering assembly; the laser filtering assembly is used for allowing a first predetermined proportion of incident lasers to pass through, and for outputting same to the photoelectric monitoring assembly; and the photoelectric monitoring assembly is used for monitoring the power of the incident lasers inputted to the photoelectric monitoring assembly, and the power of the first preset proportion of incident lasers is within a power linear monitoring interval of the photoelectric monitoring assembly. By means of the method, the present application solves the problem of the power monitoring upper limits of existing laser power monitoring apparatuses being low.

Description

Laser power monitoring device and high power laser Technical Field

The embodiments of the present application relate to the field of optical technology, and specifically to a laser power monitoring device and a high-power laser.

Background Art

At present, with the development of technology, people will use lasers in more and more fields. However, the power of lasers required in different fields is often different. For example, the average power of femtosecond lasers commonly used to treat myopia generally ranges from 10W to 300W, while the laser power in laser cutting machines used for cutting may reach 10,000W. Therefore, in practical applications, people need to monitor the power of lasers accurately and instantly to ensure that the power intensity of lasers can meet the needs of the operation.

In practical applications, people often use photosensitive devices to measure the power of lasers, and determine the laser power by using the signals or currents of different amplitudes output by the photosensitive devices according to the light intensity. However, existing laser power monitoring methods are mainly used for power monitoring of low-power lasers, and the light intensity that many photosensitive devices respond to is often extremely limited. In some fields that require the application of high-power lasers, existing laser power monitoring methods are difficult to guarantee a linear output that is easy to confirm the power amplitude. When the laser power reaches or exceeds the saturation value of the signal or current that the photosensitive device can output, people cannot accurately obtain the laser power, which affects many scenes that use lasers for production and operations.

Summary of the invention

In view of the above problems, the embodiments of the present application provide a laser power monitoring device and a high-power laser, which are used to solve the problem of low power monitoring upper limit of existing laser power monitoring devices.

According to one aspect of an embodiment of the present application, a laser power monitoring device is provided, comprising: a housing and a laser shaping component, a laser filtering component and an optical component sequentially arranged in the housing along an optical path direction. An electrical monitoring component; a laser shaping component is used to receive the incident laser and output the incident laser to the laser filtering component after shaping the incident laser; the laser filtering component is used to allow a first predetermined proportion of the incident laser to pass through and output it to the photoelectric monitoring component; the photoelectric monitoring component is used to monitor the power of the incident laser input thereto, and the power of the first predetermined proportion of the incident laser is within the power linear monitoring range of the photoelectric monitoring component.

In an optional manner, the laser filtering assembly includes at least two splitter components, which are arranged along the optical path direction, each splitter component is used to allow a second predetermined proportion of incident laser light to pass through, and the product of all second predetermined proportions is equal to the first predetermined proportion.

In an optional manner, the second predetermined ratio is less than or equal to 1%.

In an optional manner, the laser filtering assembly further includes at least one lens, the light-splitting component includes a filter coating, and the filter coating is applied to at least one end face of the lens.

In an optional embodiment, the lens is a wedge-shaped lens.

In an optional manner, the laser power monitoring device further includes a focusing lens, which is disposed between the laser filtering component and the photoelectric monitoring component, and is used to focus the incident laser passing through the laser filtering component onto the photoelectric monitoring component.

In an optional embodiment, the laser power monitoring device also includes a transistor container, which is encapsulated on the periphery of the photoelectric monitoring component, and a focusing lens is installed on the transistor container. The transistor container is tilted to change the focus of the focusing lens so that the incident laser passing through the laser filtering component is focused on the center of the photoelectric monitoring component.

In an optional manner, the laser shaping component includes a dual-fiber pigtail and a collimating lens, wherein the collimating lens is arranged between the dual-fiber pigtail and the laser filtering component; the dual-fiber pigtail is used to receive the incident laser and output it to the collimating lens, and the collimating lens is used to collimate the incident laser and then output it to the laser filtering component; the laser filtering component is also used to reflect a third predetermined proportion of the incident laser to form an outgoing laser, and output the outgoing laser in reverse to the collimating lens, and the sum of the third predetermined proportion and the first predetermined proportion is 1; the collimating lens is used to reversely focus the outgoing laser and then output it to the dual-fiber pigtail, and the dual-fiber pigtail is used to output the outgoing laser in reverse.

In an optional manner, the two facing surfaces between the dual-fiber pigtail and the collimating lens are both inclined surfaces and are parallel to each other.

According to another aspect of the embodiments of the present application, a high-power laser is provided, including a laser power monitoring device as described in any one of the above embodiments, the laser power monitoring device is used to monitor the laser emission The power of the laser emitted by the device.

The embodiment of the present application sets a laser shaping component and a laser filtering component in the laser power monitoring device, so that the transmission of the incident laser in the laser power monitoring device is more flexible, and the laser power monitoring device can adapt to a variety of lasers with different incident states. At the same time, the laser filtering component can attenuate excessive laser intensity, so that the power of the laser finally output to the photoelectric monitoring component does not exceed the power linear monitoring range of the photoelectric monitoring component. In this way, when the power of the incident laser is too high, the laser power monitoring device provided by the embodiment of the present application can still obtain effective power monitoring results. It only needs to extrapolate the power monitoring results according to the filtering ratio of the laser filtering component to obtain the power data of the original high-power incident laser, thereby improving the applicability of the laser power monitoring device, so that the laser power monitoring device provided by the embodiment of the present application can effectively monitor the power of higher-power lasers.

The above description is only an overview of the technical solution of the present application. In order to more clearly understand the technical means of the present application, it can be implemented in accordance with the contents of the specification. In order to make the above and other purposes, features and advantages of the present application more obvious and easy to understand, the specific implementation methods of the present application are listed below.

BRIEF DESCRIPTION OF THE DRAWINGS

Various other advantages and benefits will become apparent to those of ordinary skill in the art by reading the detailed description of the preferred embodiments below. The accompanying drawings are only for the purpose of illustrating the preferred embodiments and are not to be considered as limiting the present application. Also, the same reference symbols are used throughout the accompanying drawings to represent the same components. In the accompanying drawings:

FIG1 is a diagram showing the relationship between the output of a photoelectric monitoring assembly and laser power in the prior art;

FIG2 is a schematic diagram of the structure of a laser power monitoring device provided in an embodiment of the present application;

FIG3a is a side view schematic diagram of the structure of a laser power monitoring device provided in an embodiment of the present application;

FIG3 b is a schematic diagram of a top view of the structure of a laser power monitoring device provided in an embodiment of the present application;

FIG3c is a side view schematic diagram of the structure of a laser power monitoring device provided in an embodiment of the present application;

FIG. 4 is a schematic diagram of the structure of a laser filter assembly of a laser power monitoring device provided in an embodiment of the present application.

The reference numerals in the specific implementation manner are as follows:

100. Laser power monitoring device;

110. Shell;

120. Laser shaping component; 121. Dual optical fiber pigtail; 122. Collimating lens;

130. laser filter assembly; 131. light splitting component; 132. lens;

140. Photoelectric monitoring components;

150. Focusing lens;

160. Transistor container.

DETAILED DESCRIPTION

The following embodiments of the technical solution of the present application will be described in detail in conjunction with the accompanying drawings. The following embodiments are only used to more clearly illustrate the technical solution of the present application, and are therefore only used as examples, and cannot be used to limit the scope of protection of the present application.

Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by technicians in the technical field to which this application belongs; the terms used herein are only for the purpose of describing specific embodiments and are not intended to limit this application; the terms "including" and "having" in the specification and claims of this application and the above-mentioned figure descriptions and any variations thereof are intended to cover non-exclusive inclusions.

In the description of the embodiments of the present application, the technical terms "first", "second", etc. are only used to distinguish different objects, and cannot be understood as indicating or implying relative importance or implicitly indicating the number, specific order or primary and secondary relationship of the indicated technical features. In the description of the embodiments of the present application, the meaning of "multiple" is more than two, unless otherwise clearly and specifically defined.

Reference to "embodiments" herein means that a particular feature, structure, or characteristic described in conjunction with the embodiments may be included in at least one embodiment of the present application. The appearance of the phrase in various locations in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment that is mutually exclusive with other embodiments. It is explicitly and implicitly understood by those skilled in the art that the embodiments described herein may be combined with other embodiments.

In the description of the embodiments of the present application, the term "and/or" is only a description of the association relationship of the associated objects, indicating that there may be three relationships, for example, A and/or B, which can mean: there is A, and at the same time There are three situations: A and B exist, and B exists. In addition, the character "/" in this article generally indicates that the previous and next related objects are in an "or" relationship.

In the description of the embodiments of the present application, the term "multiple" refers to more than two (including two). Similarly, "multiple groups" refers to more than two groups (including two groups), and "multiple pieces" refers to more than two pieces (including two pieces).

In the description of the embodiments of the present application, the technical terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings. They are only for the convenience of describing the embodiments of the present application and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the embodiments of the present application.

In the description of the embodiments of the present application, unless otherwise clearly specified and limited, technical terms such as "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, and it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the embodiments of the present application can be understood according to the specific circumstances.

With the advancement of modern science and technology, lasers are widely used in many fields, such as laser radar in the field of autonomous driving, laser cutting and laser etching in industrial production, etc. However, in different application scenarios, the power of the laser required is often different. If the laser power is set incorrectly, it may cause serious production accidents. Therefore, people often set a power monitoring device on the laser transmitter to monitor the laser power in real time, so as to better set and adjust the laser transmitter.

In current technology, laser power detection devices are designed for the telecommunications industry, which uses low-power (less than 100mW) and continuous wave (CW) lasers, whose output laser power is low, so reliable detection can be obtained. However, for high peak power (greater than or equal to 1kW) lasers and pulse wave (PW) (especially pulse width less than 3ns) laser detection, such as the pulse wave of flight time lidar used in autonomous driving and 3D mapping, Lasers have very high peak powers, generally reaching levels ranging from a few kilowatts to more than ten kilowatts. Currently, there is no available power monitoring and detection technology for the high-power narrow pulse lasers that can accurately and linearly detect the output power of the lasers used in these application fields.

Common photoelectric monitoring components used to detect laser power often receive laser irradiation and output currents of different amplitudes according to the strength of the laser irradiation. People determine the current laser power information through the linear relationship between current and laser power, thereby realizing real-time monitoring of laser power. However, the existing photoelectric monitoring components often have a saturation value when outputting current, usually between 1 and 10 mA, that is, when the laser power continues to increase after reaching a certain threshold, the current output of the photoelectric monitoring component will not continue to increase with the increase of the laser power. Please refer to Figure 1, which is a graph of the relationship between the output of the photoelectric monitoring component and the laser power in the prior art. In Figure 1, (A) refers to the current output of the photoelectric monitoring component, and (W) refers to the power of the laser. According to the relationship between the laser power and the current output of the photoelectric monitoring component using a photodiode shown in Figure 1, it can be seen that before the laser power reaches a certain intensity, there is a relatively obvious linear relationship between the current output and the laser power. The technician can calculate the current actual laser power based on the current output. When the laser power reaches a certain intensity, the current output and the laser power are no longer in a linear relationship. At this time, people cannot determine the accurate laser power based on the current output of the photoelectric monitoring component. In some fields that require the use of higher power lasers for production operations, it is difficult to achieve accurate laser power monitoring, which brings inconvenience to people using high-power lasers for production operations.

In order to solve the above technical problems, the present application proposes a laser power monitoring device, which attenuates the laser to be measured so that only a certain proportion of the laser can reach the photoelectric monitoring component, thereby avoiding the laser power to be measured being too high and exceeding the monitoring range of the photoelectric monitoring component. The upper limit of the laser power that can be monitored by the laser power monitoring device can be increased, thereby improving applicability.

Please refer to Figure 2, which is a schematic diagram of the structure of the laser power monitoring device 100 provided in the embodiment of the present application. In the legend of the embodiment of the present application, the arrow indicates the irradiation direction of the laser. As shown in Figure 2, on the one hand, the embodiment of the present application provides a laser power monitoring device 100, including: a housing 110 and a laser shaping component 120, a laser filtering component 130 and a photoelectric monitoring component 140 sequentially arranged in the housing 110 along the optical path direction; the laser shaping component 120 is used to receive the incident laser and output the incident laser to the laser filtering component 130 after shaping the incident laser; the laser filtering component 130 is used to allow a first predetermined proportion of the incident laser to pass through and output it to the photoelectric monitoring component 140; the photoelectric monitoring component 140 is used to monitor the power of the incident laser input thereto, and the power of the first predetermined proportion of the incident laser It is within the power linear monitoring interval of the photoelectric monitoring component 140 .

The laser shaping component 120 is used to receive the incident laser and shape the incident laser before outputting it to the laser filtering component 130. The laser shaping component 120 can be any optical component used to adjust the properties of light, such as a lens, etc. The purpose is to shape the incident laser to a certain extent so that the incident laser can be better output to the laser filtering component 130. For example, when the divergence angle of the incident laser is large, the laser shaping component 120 compresses the incident laser at an angle so that the incident laser can be fully irradiated and output to the laser filtering component 130, and no light energy is wasted due to diffusion irradiation on the inner wall of the housing 110.

The laser filter assembly 130 is used to filter the incident laser so that a first predetermined proportion of the incident laser can pass through. In order to filter the incident laser, the laser filter assembly 130 may be, for example, a shielding member that can partially block the light, or a light-transmitting member provided with a coating that can limit the passage of part of the light on the optical path of the incident laser, or may be a filter for light filtering, etc. The embodiment of the present application does not specifically limit the specific implementation of the laser filter assembly 130. It should be noted that in order to facilitate the parameter setting of the laser power monitoring device 100 and the calculation of the laser power, the penetration rate of the incident laser provided by the laser filter assembly 130 should be more accurately controlled or preset, that is, the value of the first predetermined proportion should be able to be set accordingly by adjusting the specification parameters of the laser filter assembly 130.

The photoelectric monitoring component 140 refers to a component that can obtain the corresponding laser power value within its power linear monitoring range after receiving the incident laser. It can be, for example, a monitoring component including a photodiode. The photodiode outputs different levels of current according to the intensity of the incident laser, and then obtains the accurate laser power based on the current and radiation calibration (for example, comparing the calibration parameters obtained by the ISO 17025 certified Gigahertz-Optik calibration laboratory).

When the incident laser is output to the laser power monitoring device 100, the laser shaping component 120 first shapes the incident laser so that the incident laser can be better transmitted in the laser power monitoring device 100. The laser filtering component 130 is used to allow a first predetermined proportion of the incident laser to pass through and output to the photoelectric monitoring component 140, in order to attenuate the intensity of the incident laser. When the incident laser power is too large, the laser intensity is high and easily exceeds the power linear monitoring interval of the photoelectric monitoring component 140, so that the photoelectric monitoring component 140 cannot accurately monitor the power of the incident laser. In practical applications, those skilled in the art understand that after the photoelectric monitoring component 140 obtains the power monitoring result, The power monitoring result is calculated according to the ratio of the laser light attenuated by the laser filter assembly 130, so that the power monitoring result can correctly reflect the power of the original incident laser light.

It should be noted that after the photoelectric monitoring component 140 obtains the monitoring result, the monitoring result should be extrapolated according to the first predetermined ratio of the incident laser by the laser filter component 130, so as to correctly obtain the power of the original incident laser. For high-power, short-pulse lasers, the first predetermined ratio can be set to 0.01%. The power result measured by the photoelectric monitoring component 140 is 0.5 watts. The compensation coefficient is calculated according to the first predetermined ratio: 1/0.01%=10000. The power result obtained by the photoelectric monitoring component 140 is multiplied by the compensation coefficient: 0.5×10000=5000 watts, that is, the power of the original incident laser is 5000 watts. Those skilled in the art should be able to calculate the extrapolation coefficient according to the first predetermined ratio of the laser filter component 130 and the power result obtained by the photoelectric monitoring component 140, and finally calculate the power of the original incident laser. The embodiment of the present application does not specifically limit the specific compensation coefficient and subsequent power calculation method.

By providing a laser shaping component 120 and a laser filtering component 130 in the laser power monitoring device 100, the transmission of the incident laser in the laser power monitoring device 100 is made more flexible, and the laser power monitoring device 100 can adapt to a variety of lasers with different incident states. At the same time, the laser filtering component 130 can attenuate excessive laser intensity, so that the power of the laser finally output to the photoelectric monitoring component 140 does not exceed the power linear monitoring interval of the photoelectric monitoring component 140. In this way, when the power of the incident laser is too high, the laser power monitoring device 100 provided in the embodiment of the present application can still obtain an effective power monitoring result. It only needs to extrapolate the power monitoring result according to the filtering ratio of the laser filtering component 130 to obtain the power data of the original high-power incident laser, thereby improving the applicability of the laser power monitoring device 100, so that the laser power monitoring device 100 provided in the embodiment of the present application can effectively monitor the power of higher-power lasers.

Please refer to Figures 3a and 3b. Figure 3a is a schematic diagram of the side view structure of the laser power monitoring device 100 provided in an embodiment of the present application, and Figure 3b is a schematic diagram of the top view structure of the laser power monitoring device 100 provided in an embodiment of the present application. In order to fully improve the laser filtering capability and ensure the accuracy and reliability of power detection, according to some embodiments of the present application, as shown in Figure 3, the laser filtering component 130 includes at least two splitting components 131, and the at least two splitting components 131 are arranged along the optical path direction, and each splitting component 131 is used to allow a second predetermined ratio of incident laser light to pass through, and all second predetermined ratios The product of the examples is equal to the first predetermined ratio.

In the embodiment of the present application, the spectroscopic component 131 can be, for example, a filter membrane coated on the laser filter component 130 that can limit the light penetration to a certain proportion, or it can be a special lens that has been processed so that only part of the light can penetrate. The purpose is to reflect or absorb a certain proportion of the incident laser, so that only a first predetermined proportion of the incident laser can pass through the laser filter component 130 to reach the photoelectric monitoring component 140.

In practical applications, the second predetermined ratio can be a different numerical ratio. For example, the laser filtering component 130 includes two spectroscopic components 131, one of which can allow 1% of the second predetermined ratio of incident laser light to pass through, and the other spectroscopic component 131 can allow 0.5% of the second predetermined ratio of incident laser light to pass through. After the incident laser light passes through the two spectroscopic components 131 arranged along the optical path, the proportion of the incident laser light that can finally reach the photoelectric monitoring component 140 accounts for the original incident laser light: 1%×0.5%=0.005%, that is, only 0.005% of the incident laser light can finally reach the photoelectric monitoring component 140 for monitoring, and the first predetermined ratio is 0.005%. In another case, the second predetermined ratio is the same numerical ratio. For example, the laser filtering component 130 includes three splitting components 131, each splitting component 131 can allow 1% of the incident laser to pass through. After the incident laser passes through the three splitting components 131 arranged along the optical path, the proportion of the incident laser that can finally reach the photoelectric monitoring component 140 to the original incident laser is: 1%×1%×1%= ^10-6 , that is, only ^10-6 of the incident laser can finally reach the photoelectric monitoring component 140 for monitoring, and the first predetermined ratio is ^10-6 .

By setting at least two spectroscopic components 131, at least two spectroscopic components 131 are arranged along the optical path direction, each spectroscopic component 131 allows a second predetermined proportion of the incident laser to pass through, and the product of all second predetermined proportions is equal to the first predetermined proportion, so that the laser filtering component 130 can proportionally attenuate the incident laser, which is convenient for increasing the upper limit of the laser power that can be monitored by the photoelectric monitoring component 140. At the same time, by setting at least two spectroscopic components 131, multiple spectroscopic components 131 together allow only a first proportion of the incident laser to pass through, and multiple spectroscopic components 131 together proportionally attenuate the incident laser, so that the heat of the incident laser is not easily accumulated on the same spectroscopic component 131, thereby improving the thermal stability of the laser power monitoring device 100 of the embodiment of the present application.

In some cases, the laser power monitoring device 100 may need to monitor the power of a relatively high-power incident laser, such as a laser radar used for autonomous driving and three-dimensional mapping. The peak power of the pulsed laser used is relatively high, which may reach the level of kilowatts or more than ten kilowatts, and the power linear monitoring upper limit of the common photoelectric monitoring component 140 on the market is often much lower than the peak power of this type of laser. If the laser filtering component 130 can limit the proportion of laser passing through is too low, it may cause the power of the incident laser to be outside the power linear monitoring range of the photoelectric monitoring component 140. Therefore, according to some embodiments of the present application, the second predetermined proportion is less than or equal to 1%.

By setting the second predetermined ratio less than 1%, at least two spectroscopic components 131 in the laser filtering component 130 can achieve a relatively large filtering effect on the incident laser, that is, a filtering effect of at least 0.01% can be achieved, so that the power intensity of the laser finally output to the photoelectric monitoring component 140 is relatively low, which can increase the probability that the power of the laser received by the photoelectric monitoring component 140 is within the power linear monitoring interval of the photoelectric monitoring component 140. To obtain accurate power information of the original incident laser, it is only necessary to compensate the power value obtained by the photoelectric monitoring component 140 according to the product of multiple second predetermined ratios, thereby increasing the upper limit of the laser power that can be monitored by the laser power monitoring device 100 provided in the embodiment of the present application, and having advantages in monitoring scenarios for high-power lasers.

According to some embodiments of the present application, the light splitting component 131 includes a neutral density filter.

Among them, Neutral Density Filters refers to an optical attenuator that can be used to attenuate light. It can absorb light to achieve the purpose of attenuating light.

In some cases, in order to achieve very high attenuation linear scaling tap power monitoring, please refer to Figure 3c, which is a side view structural diagram of the laser power monitoring device 100 provided in an embodiment of the present application. Multiple neutral density filters can be set. For example, when the splitting component 131 includes six neutral density filters, if a neutral density filter with a tap rate of 1% is used, the incident laser passing through the splitting component 131 can obtain a high attenuation of ^10-12 .

Since the neutral density filter has a high attenuation amplitude for light, by adopting the neutral density filter, the spectroscopic component 131 provided in the embodiment of the present application can achieve a high light attenuation effect for the incident laser, so that the intensity of the incident laser output to the photoelectric monitoring component 140 is lower, thereby increasing the upper limit of the laser power that can be monitored by the laser power monitoring device 100 provided in the embodiment of the present application.

Please refer to FIG3c and FIG4, FIG4 is a schematic diagram of the structure of the laser filter assembly 130 of the laser power monitoring device 100 provided in an embodiment of the present application. According to some embodiments of the present application, as shown in FIG3c and FIG4, the laser filter assembly 130 further includes at least one lens 132, and the light splitting component 131 includes a filter The coating, the filter coating, is applied to at least one end surface of the lens 132 .

The filter coating may be, for example, a thin-film filter, which can control the proportion of incident laser light passing through the laser filter assembly 130 by changing the ratio between transmitted light and reflected light.

If both end faces of a lens 132 are coated with filter coatings, then in one embodiment, the filter coating on the first end face of the lens 132 reflects more than 99% of the incident laser light, less than 1% of the incident laser light passes through the filter coating on the first end face of the lens 132 and reaches the filter coating on the second end face of the lens 132, and the filter coating on the second end face then reflects more than 99% of the remaining incident laser light, less than 1% of the incident laser light passes through the filter coating on the second end face. After being processed by the filter coatings coated on the two end faces of the lens 132, the intensity of the incident laser light that finally passes through the lens 132 is less than 0.01% of the initial intensity of the incident laser light. If the reflectivity of the filter coatings coated on the two end faces of a lens 132 is both 99.9% and the transmittance is both 0.1%, then compared with the intensity of the original incident laser light, the intensity of the incident laser light that finally passes through the lens 132 is 0.0001% of the intensity of the original incident laser light.

It should be noted that when the laser filter assembly 130 includes a plurality of lenses 132, the filter coatings may also be multiple. For example, the laser filter assembly 130 includes two lenses 132, and the two end faces of each lens 132 for the incident laser to pass through are coated with filter coatings, so the laser filter assembly 130 includes a total of four layers of filter coatings. By coating the filter coating on at least one end face of the lens 132, the laser filter assembly 130 can adjust the penetration ratio of the laser more flexibly. It only needs to adjust the total penetration rate of all the filter coatings according to the specification parameters of each filter coating, so as to achieve precise control of the penetration ratio of the incident laser.

According to some embodiments of the present application, as shown in FIG. 4 , the lens 132 is a wedge-shaped lens.

Since the wedge surface of the wedge lens is tilted, the axis of the incident laser beam will be offset after passing through the lens 132. Those skilled in the art can reasonably adjust the corresponding optical components to ensure that the incident laser can eventually be received and monitored by the photoelectric monitoring component 140. For example, the collimating lens for shaping the light included in the laser shaping component 120 is set to an inclined angle to compensate for the axis of the incident laser, ensuring that the incident laser can be focused on the receiving area of the photoelectric monitoring component 140 after passing through the lens 132. When this method is adopted, the tilt angle of the collimating lens in the laser shaping component 120 can be, for example, 8°, and the tilt angle of the wedge surface of the wedge lens can be, for example, 0.29°. The application examples do not impose any special limitation on this.

At the same time, it should be noted that, in general, the size of the receiving area of the photoelectric monitoring component 140 for receiving light is often larger than the spot size of the laser beam in the application scenario targeted by the embodiment of the present application. Even when the laser beam in the application scenario targeted by the embodiment of the present application is transmitted through an optical fiber, the receiving area of the photoelectric monitoring component 140 is still larger than the cross-sectional area of the optical fiber core. For example, when the photoelectric monitoring component 140 is a photodiode, a photodiode with a bandwidth of 10 GHz for detecting a pulse laser with a pulse rise time of 100 ps has a sensor diameter of approximately 50 um. If the axis of the original unprocessed incident laser beam is vertically focused at the sensor center of the photodiode, the incident laser is processed by a collimating lens with an inclination angle of 8° and a wedge lens with a wedge surface inclination angle of 0.29°. The axis offset of the incident laser is 33 um, which is much lower than the sensor diameter of the photodiode. In this case, for the incident laser with a pulse rise time of 100 ps, its focused spot still falls within the sensor range of the photodiode, so the photodiode can still completely receive the processed incident laser, and will not affect the monitoring of the laser power.

Preferably, an anti-reflection coating (Anti-Reflection Coating) may also be applied on the two surfaces of the lens 132 through which the incident laser passes, so as to reduce unnecessary light reflection and improve stability.

When the incident laser passes through the lens 132, plasma may be formed between the two end faces of the lens 132 that are penetrated, and plasma is not a completely transparent medium. When the incident laser propagates in the plasma, the intensity of the incident laser will gradually weaken, which may have a significant impact on the accuracy of the photoelectric monitoring component 140 in monitoring the power of the incident laser. At the same time, due to the high reflective properties of the lens 132, interference may be formed between multiple optical surfaces, resulting in optical etching on the surface of the lens 132. Therefore, by adopting a wedge-shaped lens, the two end faces of the lens 132 that are penetrated by the incident laser form a small and appropriate angle, which can avoid the incident laser from forming plasma between the two end faces of the lens 132, thereby helping to improve the accuracy of the laser power monitoring device 100 provided in the embodiment of the present application, while avoiding the formation of optical etching, extending the service life of the lens 132, and improving stability.

Please refer to Figure 3a and Figure 3b again. According to some embodiments of the present application, as shown in Figure 3a and Figure 3b, the laser power monitoring device 100 also includes a focusing lens 150. The focusing lens 150 is arranged between the laser filtering component 130 and the photoelectric monitoring component 140. The focusing lens 150 is used to focus the incident laser passing through the laser filtering component 130 onto the photoelectric monitoring component 140.

The focusing lens 150 may be a gradient refractive index lens, for example, and its purpose is to focus the incident laser from the laser filter component 130 so that the incident laser is focused and output to the photoelectric monitoring component 140 .

After the incident laser is filtered and attenuated by the laser filter component 130, the light of the incident laser may be diffused to a certain extent. At this time, if it is directly output to the photoelectric monitoring component 140, part of the diffused light may not be able to enter the receiving part of the photoelectric monitoring component 140, and be reflected or absorbed by the housing 110 or other components, resulting in the photoelectric monitoring component being unable to monitor the complete incident laser processed by the laser filter component 130, which is likely to affect the laser power monitoring result and reduce the accuracy of laser power monitoring. By setting a focusing lens 150, the incident laser passing through the laser filter component 130 is focused to the photoelectric monitoring component 140, so that the photoelectric monitoring component 140 can receive the complete incident laser processed by the laser filter component 130, thereby ensuring the accuracy of laser power monitoring.

In order to ensure the stability of the operation of the photoelectric monitoring component 140, according to some embodiments of the present application, as shown in Figures 3a and 3b, the laser power monitoring device 100 also includes a transistor container 160, which is encapsulated on the periphery of the photoelectric monitoring component 140, and the focusing lens 150 is installed on the transistor container 160. The transistor container 160 is tilted to change the focus of the focusing lens 150 so that the incident laser passing through the laser filtering component 130 is focused on the center of the photoelectric monitoring component 140.

It is understandable that the transistor container 160 can be used as a stabilizing member to embed the condenser lens 150, or to install it in any other fixed manner, with the purpose of limiting the installation position of the condenser lens 150 so that the condenser lens 150 tilts along with the transistor container 160 to change the direction of the focus of the condenser lens 150.

The transistor container 160 is used to package the photoelectric monitoring component 140 and the focusing lens 150. The packaging method can adopt a laser diode module (TO-CAN). For an incident laser with a shorter pulse, when the incident laser is processed by the laser shaping component 120 and the lens 132, if the axis of the incident laser is offset, in order to make the monitoring result more accurate and reliable, it is necessary to ensure that the spot of the incident laser on the photoelectric monitoring component 140 is focused on the center of the sensing area of the photoelectric monitoring component 140. At this time, the package of the laser diode module can be tilted at an angle so that the incident laser can be aligned with the center of the sensing area of the photoelectric monitoring component 140.

In one embodiment, referring to FIG. 3c, when the laser shaping component 120 includes a collimating lens tilted at 8°, the laser filtering component 120 includes three lenses 132, each of which is a wedge surface. When the wedge lens is tilted at an angle of 0.29°, the transistor container 160 is tilted at 3.85°, so that the incident laser beam can be more accurately aligned with the center of the sensing area of the photoelectric monitoring component 140, thereby achieving power monitoring of pulsed lasers with higher bandwidth.

It should be noted that when using laser diode module packaging, if power monitoring of relatively high-speed laser pulses is required, the photoelectric monitoring component 140 of the laser diode module packaging should be appropriately reduced in size to increase its working bandwidth and reduce the response time.

In actual applications, due to differences in assembly or production processes, different photoelectric monitoring components 140 may have different center positions for receiving incident lasers. If the incident laser cannot be accurately irradiated at the center position of the photoelectric monitoring component 140, the photoelectric monitoring component 140 will not be able to obtain accurate laser power data. Therefore, by setting an inclined transistor container 160, the focusing lens 150 installed on the transistor container 160 is tilted synchronously, and the focus of the focusing lens 150 is changed, so that the incident laser passing through the laser filtering component 130 can be focused by the focusing lens 150 and then be shot into the center of the photoelectric monitoring component 140, so that the photoelectric monitoring component 140 can measure the power of the incident laser more accurately, which can improve the accuracy of the laser power monitoring device 100 provided in the embodiment of the present application when performing laser power measurement, and has adaptability to pulse laser power monitoring with a higher bandwidth.

In order to improve the utilization rate of laser, according to some embodiments of the present application, as shown in Figure 3b, the laser shaping component 120 includes a dual-fiber pigtail 121 and a collimating lens 122, and the collimating lens 122 is arranged between the dual-fiber pigtail 121 and the laser filtering component 130; the dual-fiber pigtail 121 is used to receive the incident laser and output it to the collimating lens 122, and the collimating lens 122 is used to collimate the incident laser and then output it to the laser filtering component 130; the laser filtering component 130 is also used to reflect the incident laser of a third predetermined ratio to form an outgoing laser, and output the outgoing laser in reverse to the collimating lens 122, and the sum of the third predetermined ratio and the first predetermined ratio is 1; the collimating lens 122 is used to reversely focus the outgoing laser and output it to the dual-fiber pigtail 121, and the dual-fiber pigtail 121 is used to output the outgoing laser in reverse.

The dual-fiber pigtail 121 refers to a fiber pigtail having two fiber paths, and light can be transmitted through the guidance of the optical fibers in the dual-fiber pigtail 121 .

In the embodiment of the present application, the outgoing laser reflected by the laser filter assembly 130 can be outputted in reverse for use, that is, of the total incident laser with a magnitude of 1, a first predetermined proportion of the incident laser is outputted from the dual-fiber pigtail 121 through the collimating lens 122 and then through the laser filter assembly 130 to the photoelectric monitoring assembly 140 for laser power monitoring, while the remaining third predetermined proportion of the incident laser is outputted by the laser through The filter component 130 reflects to form an outgoing laser, which is output to the dual-fiber pigtail 121 through reverse focusing by the collimating lens 122. The dual-fiber pigtail 121 can output the outgoing laser in reverse for easy utilization. Through the above method, part of the incident laser that is not monitored in the laser power monitoring device 100 provided in the embodiment of the present application can be output in reverse for utilization, thereby improving the light utilization rate and avoiding the waste of light energy.

According to some embodiments of the present application, as shown in FIG. 3 a and FIG. 3 b , the two facing surfaces between the dual-fiber pigtail 121 and the collimating lens 122 are both inclined surfaces and are parallel to each other.

Among them, the end face of the dual-fiber pigtail 121 can be coated with an anti-reflection coating (Anti-Reflection Coating) to reduce the reflectivity of the incident laser at the end face of the dual-fiber pigtail 121, reduce light loss, and make the laser power monitoring result more accurate.

By setting the two facing surfaces between the dual-fiber pigtail 121 and the collimating lens 122 as mutually parallel inclined surfaces, the back light reflection on the surface can be effectively reduced.

According to another aspect of the embodiments of the present application, a high-power laser is provided, including a laser transmitter and a laser power monitoring device 100 according to any one of the above embodiments, wherein the laser power monitoring device 100 is used to monitor the power of a laser emitted by the laser transmitter.

By adopting the laser power monitoring device 100 provided in the embodiment of the present application in a high-power laser, the high-power laser can attenuate excessive laser intensity when performing laser power monitoring, so that the power of the laser finally output to the photoelectric monitoring component 140 will not exceed the power linear monitoring interval of the photoelectric monitoring component 140. In this way, when the power of the incident laser generated by the high-power laser is too high, an effective power monitoring result can still be obtained. It is only necessary to extrapolate the power monitoring result according to the filtering ratio of the laser filtering component 130 to obtain the power data of the original high-power incident laser, so that the high-power laser provided in the embodiment of the present application does not need to be limited by the limitation of the power linear monitoring interval of the laser power monitoring device 100, thereby improving applicability.

Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit them. Although the present application has been described in detail with reference to the above embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the above embodiments, or replace some or all of the technical features therein with equivalents. These modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present application, and they should all be included in the scope of the claims and description of the present application. In particular, as long as there is no In case of structural conflicts, the various technical features mentioned in each embodiment can be combined in any manner. The present application is not limited to the specific embodiments disclosed herein, but includes all technical solutions falling within the scope of the claims.

Claims (10)

A laser power monitoring device, characterized in that it comprises: a housing and a laser shaping component, a laser filtering component and a photoelectric monitoring component sequentially arranged in the housing along the optical path direction; The laser shaping component is used to receive the incident laser and shape the incident laser before outputting it to the laser filtering component; The laser filter assembly is used to allow a first predetermined proportion of incident laser light to pass through and output to the photoelectric monitoring assembly; The photoelectric monitoring component is used to monitor the power of the incident laser input thereto, and the power of the first predetermined proportion of the incident laser is within the power linear monitoring interval of the photoelectric monitoring component. The laser power monitoring device as described in claim 1 is characterized in that the laser filtering assembly includes at least two splitting components, at least two of the splitting components are arranged along the optical path direction, each of the splitting components is used to allow a second predetermined proportion of incident laser light to pass through, and the product of all the second predetermined proportions is equal to the first predetermined proportion. The laser power monitoring device according to claim 2, characterized in that the second predetermined ratio is less than or equal to 1%. The laser power monitoring device according to claim 2 is characterized in that the laser filtering assembly further includes at least one lens, the light splitting component includes a filter coating, and the filter coating is applied to at least one end face of the lens. The laser power monitoring device according to claim 4, characterized in that the lens is a wedge-shaped lens. The laser power monitoring device as described in any one of claims 1 to 5 is characterized in that the laser power monitoring device also includes a focusing lens, which is arranged between the laser filtering component and the photoelectric monitoring component, and the focusing lens is used to focus the incident laser passing through the laser filtering component to the photoelectric monitoring component. The laser power monitoring device according to claim 6 is characterized in that the laser power monitoring device further comprises a transistor container, the transistor container is encapsulated on the periphery of the photoelectric monitoring component, the condensing lens is mounted on the transistor container, and the transistor container is tilted to change the focus of the condensing lens so that the incident laser passing through the laser filter component is focused on the The center of the photoelectric monitoring component. The laser power monitoring device according to any one of claims 1 to 5, characterized in that the laser shaping component comprises a dual-fiber pigtail and a collimating lens, and the collimating lens is arranged between the dual-fiber pigtail and the laser filtering component; the dual-fiber pigtail is used to receive the incident laser and output it to the collimating lens, and the collimating lens is used to collimate the incident laser and then output it to the laser filtering component; The laser filtering component is also used to reflect a third predetermined ratio of the incident laser to form an outgoing laser, and output the outgoing laser in reverse to the collimating lens, and the sum of the third predetermined ratio and the first predetermined ratio is 1; the collimating lens is used to reversely focus the outgoing laser and output it to the dual-fiber pigtail, and the dual-fiber pigtail is used to output the outgoing laser in reverse. The laser power monitoring device according to claim 8 is characterized in that the two facing surfaces between the dual-fiber pigtail and the collimating lens are both inclined surfaces and are parallel to each other. A high-power laser, characterized in that the high-power laser comprises: a laser transmitter and a laser power monitoring device as described in any one of claims 1 to 9, wherein the laser power monitoring device is used to monitor the power of the laser emitted by the laser transmitter.