WO2024207206A1 - 一种气体传感器 - Google Patents

一种气体传感器 Download PDF

Info

Publication number
WO2024207206A1
WO2024207206A1 PCT/CN2023/086222 CN2023086222W WO2024207206A1 WO 2024207206 A1 WO2024207206 A1 WO 2024207206A1 CN 2023086222 W CN2023086222 W CN 2023086222W WO 2024207206 A1 WO2024207206 A1 WO 2024207206A1
Authority
WO
WIPO (PCT)
Prior art keywords
cavity
side wall
cover plate
gas sensor
flexible membrane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/CN2023/086222
Other languages
English (en)
French (fr)
Inventor
张金宇
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AAC Technologies Holdings Shenzhen Co Ltd
Original Assignee
AAC Acoustic Technologies Shenzhen Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by AAC Acoustic Technologies Shenzhen Co Ltd filed Critical AAC Acoustic Technologies Shenzhen Co Ltd
Priority to PCT/CN2023/086222 priority Critical patent/WO2024207206A1/zh
Priority to US18/399,718 priority patent/US20240337588A1/en
Publication of WO2024207206A1 publication Critical patent/WO2024207206A1/zh
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
    • G01N2021/1704—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids in gases

Definitions

  • the invention belongs to the technical field of sensors, and in particular relates to a gas sensor.
  • a gas sensor is a converter that converts the volume fraction of a certain gas into a corresponding electrical signal.
  • Existing gas sensors usually include a shell, a damping net, a substrate, an infrared transmitter, and an acoustic sensor.
  • the external gas passes through the damping net by diffusion and is balanced with the internal gas concentration.
  • the infrared transmitter emits infrared light of a specific wavelength at a certain sound wave frequency (for example, 30Hz).
  • the infrared light of this wavelength is strongly absorbed by the gas to be measured and converted into heat, generating an alternating pressure signal in the internal cavity, which is received by the acoustic sensor and converted into an electrical signal; the higher the concentration of the gas to be measured in the gas, the stronger the low-frequency signal generated, and the signal strength output by the acoustic sensor can be used to calculate the concentration of the gas to be measured.
  • the acoustic sensor and infrared transmitter are located in the same cavity.
  • the modulated infrared signal generates electrical interference to the acoustic sensor, resulting in measurement errors.
  • the electrical signal intensity stimulated by the infrared signal is low, which will lead to insufficient sensitivity of the gas sensor.
  • the external sound signal will form strong noise interference to the gas sensor of this structure, resulting in inaccurate detection results of the gas sensor.
  • the object of the present invention is to provide a gas sensor that can solve the technical problem of insufficient sensitivity of gas sensors in related technologies.
  • a gas sensor comprises a shell having a receiving cavity and an acoustic sensor and an infrared emitter placed in the receiving cavity, the shell comprising a cover plate, a substrate spaced apart from the cover plate, and a side wall located between the cover plate and the substrate, the shell is provided with a vent hole connecting the outside and the receiving cavity, the gas sensor further comprises a flexible membrane connected to the side wall, the flexible membrane divides the receiving cavity into a first cavity and a second cavity, the first cavity is formed by the flexible membrane, the side wall and the cover plate, the second cavity is formed by the flexible membrane, the side wall and the substrate, the infrared emitter is located in the first cavity, the acoustic sensor is located in the second cavity, the flexible membrane, the first cavity and the second cavity constitute a resonant system, the natural frequency of the resonant system is the same as the modulation frequency of the infrared emitter, and the vent hole is connected to the first cavity.
  • the side wall comprises a first side wall connected to the cover plate and a second side wall connected to the base plate, and the flexible film is sandwiched between the first side wall and the second side wall.
  • the infrared emitter is fixed to the cover plate.
  • the acoustic sensor is fixed to the substrate.
  • the volume of the first cavity is greater than the volume of the second cavity.
  • the vent hole is located on the cover plate.
  • the flexible film includes an upper surface located in the first cavity, and the upper surface of the flexible film includes an aluminum reflective layer or a silver reflective layer.
  • the beneficial effects of the present invention are as follows: the infrared transmitter and the acoustic sensor are arranged in different cavities, which can avoid the occurrence of interference signals; in addition, the modulation frequency of the infrared transmitter is 40Hz-60Hz, and the frequency of environmental noise is much higher than this frequency, which is isolated by the flexible membrane and will not cause interference; the modulation frequency of the infrared transmitter is the same as the resonance frequency of the flexible membrane, and the flexible membrane is in a resonant state, which can increase the sound signal by 20dB and significantly improve the sensitivity of the product; the acoustic sensor is located in a closed second cavity, which can prevent particles from entering the second cavity and causing the acoustic sensor to fail.
  • FIG1 is a perspective view of a gas sensor of the present invention
  • FIG2 is an exploded view of a gas sensor of the present invention
  • Fig. 3 is a cross-sectional view taken along the line A-A in Fig. 1 .
  • a gas sensor 100 includes a housing 10 having a receiving cavity 101, and an acoustic sensor 30 and an infrared transmitter 20 disposed in the receiving cavity 101.
  • the housing 10 includes a cover plate 11, a substrate 12 spaced apart from the cover plate 11, and a side wall 13 located between the cover plate 11 and the substrate 12.
  • the infrared transmitter 20 emits light into the receiving cavity 101.
  • the emitted light may be infrared light, and in particular pulsed light, such as pulsed infrared light.
  • the acoustic sensor 30 may include a microphone, in particular a MEMS microphone, which may detect an acoustic signal caused by the emitted light according to the photoacoustic principle.
  • the gas sensor 100 further includes a flexible membrane 40 connected to the side wall 13 and disposed in the receiving cavity 101, the flexible membrane 40 divides the receiving cavity into a first cavity 102 and a second cavity 103, the first cavity 102 is formed by the flexible membrane 40, the side wall 13 and the cover plate 11, the second cavity 103 is formed by the flexible membrane 40, the side wall 13 and the substrate 12, the infrared emitter 20 is located in the first cavity 102, and the acoustic sensor 30 is located in the second cavity 103.
  • the flexible membrane 40, the first cavity 102 and the second cavity 103 constitute a resonant system, and the natural frequency of the resonant system is the same as the modulation frequency of the infrared emitter 20.
  • the housing 10 is provided with a vent 110 connecting the outside and the receiving cavity 101, and in this embodiment, the vent 110 is connected to the first cavity 102.
  • the side wall 13 includes a first side wall 131 connected to the cover plate 11 and a second side wall 132 connected to the substrate 12, and the flexible film 40 is sandwiched between the first side wall 131 and the second side wall 132, that is, the flexible film 40, the first side wall 131 and the cover plate 11 together enclose the first cavity 102, and the flexible film 40, the second side wall 132 and the substrate 12 together enclose the second cavity 103.
  • the side wall 13 adopts a split design, which facilitates the fixed installation of the flexible film 40.
  • the volume of the first cavity 102 is larger than the volume of the second cavity 103.
  • the side wall can also be provided with a groove for accommodating and fixing the flexible film, as long as the flexible film can be fixed.
  • the infrared emitter 20 emits infrared light of a specific wavelength at a certain sound wave frequency (for example, 30 Hz).
  • the infrared light of this wavelength is strongly absorbed by the gas to be measured and converted into heat, generating an alternating pressure signal in the first receiving chamber 102, driving the flexible membrane 40 to resonate, and forming a strong acoustic resonance signal in the second receiving chamber 103, which is converted into an electrical signal.
  • the acoustic sensor 30 outputs the signal strength, thereby calculating the concentration of the gas to be measured.
  • the infrared emitter 20 and the acoustic sensor 30 are arranged in different cavities, the occurrence of interference signals can be avoided; in addition, the modulation frequency of the infrared emitter 20 is 40Hz-60Hz, and the frequency of environmental noise is much higher than this frequency, which is isolated by the flexible membrane 40 and will not cause interference; the modulation frequency of the infrared emitter 20 is the same as the resonance frequency of the flexible membrane 40, and the flexible membrane 40 is in a resonant state, which can increase the sound signal by 20dB and significantly improve the sensitivity of the product; the acoustic sensor 30 is located in the closed second cavity 103, which can prevent particles from entering the second cavity 103 and causing the acoustic sensor to fail.
  • the flexible membrane 40 includes an upper surface 41 located in the first cavity 101 .
  • the upper surface 41 is opposite to the cover plate 11 .
  • the upper surface 41 of the flexible membrane 40 may be electroplated with an aluminum or silver reflective layer to improve the infrared signal utilization efficiency while reducing light interference to the acoustic sensor 30 .
  • the infrared sensor 20 is fixed on the cover plate 11
  • the acoustic sensor 30 is fixed on the base plate 12
  • the vent hole 110 is located on the cover plate 11 .

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Food Science & Technology (AREA)
  • Medicinal Chemistry (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

本发明提供了一种气体传感器，其包括具有收容腔的壳体以及置于所述收容腔中的声传感器和红外发射器，所述壳体包括盖板、与所述盖板间隔设置的基板以及位于所述盖板和所述基板之间的侧壁，所述壳体设有连通外部和所述收容腔的通气孔，所述气体传感器还包括与所述侧壁连接的柔性膜，所述柔性膜将所述收容腔分隔成第一腔体和第二腔体，所述红外发射器位于所述第一腔体中，所述声传感器位于所述第二腔体中，所述柔性膜、第一腔体以及第二腔体构成谐振系统，所述谐振系统的固有频率与所述红外发射器的调制频率相同，所述通气孔与所述第一腔体连通。与相关技术相比，本发明提供的气体传感器可以提高其灵敏度。

Description

一种气体传感器
【 技术领域】
本发明属于传感器技术领域，尤其涉及一种气体传感器。
【 背景技术】
气体传感器是一种将某种气体体积分数转化成对应电信号的转换器。现有的气体传感器通常包括外壳、阻尼网、基板、红外发射器以及声传感器，外界气体通过扩散作用穿过阻尼网，与内部气体浓度平衡。传感器工作时，红外发射器以某个声波频率（例如30Hz）发出特定波长的红外光，该波长红外光被待测气体强烈吸收，转化成热量，在内部腔体中产生交变压强信号，被声传感器接收，转化为电信号；气体中待测气体浓度越高，产生的低频信号越强，由声传感器输出的信号强度，由此可计算出待测气体浓度。
相关技术中的声传感器和红外发射器位于同一腔体中，调制的红外信号对声传感器产生电干扰，导致测量出现误差；红外信号激发的电信号强度较低，会导致气体传感器的灵敏度不足，另外，外界声音信号会对此种结构的气体传感器形成较强的噪声干扰，导致气体传感器的检测结果不精准。
因此，有必要提供一种气体传感器，用于解决上述问题。
【 发明内容】
本发明的目的在于提供一种气体传感器，能够解决相关技术中的气体传感器灵敏度不足的技术问题。
本发明的技术方案如下：一种气体传感器，其包括具有收容腔的壳体以及置于所述收容腔中的声传感器和红外发射器，所述壳体包括盖板、与所述盖板间隔设置的基板以及位于所述盖板和所述基板之间的侧壁，所述壳体设有连通外部和所述收容腔的通气孔，所述气体传感器还包括与所述侧壁连接的柔性膜，所述柔性膜将所述收容腔分隔成第一腔体和第二腔体，所述第一腔体由所述柔性膜、侧壁以及盖板共同围合形成，所述第二腔体由所述柔性膜、侧壁以及基板共同围合形成，所述红外发射器位于所述第一腔体中，所述声传感器位于所述第二腔体中，所述柔性膜、第一腔体以及第二腔体构成谐振系统，所述谐振系统的固有频率与所述红外发射器的调制频率相同，所述通气孔与所述第一腔体连通。
优选的，所述侧壁包括与所述盖板连接的第一侧壁和与所述基板连接的第二侧壁，所述柔性膜夹设于所述第一侧壁和第二侧壁之间。
优选的，所述红外发射器固定于所述盖板。
优选的，所述声传感器固定于所述基板。
优选的，所述第一腔体的体积大于所述第二腔体的体积。
优选的，所述通气孔位于所述盖板。
优选的，所述柔性膜包括位于所述第一腔体的上表面，所述柔性膜的上表面包括铝反射层或银反射层。
本发明的有益效果在于：红外发射器和声传感器布置在不同腔体内，可避免干扰信号的发生；另外，红外发射器的调制频率在40Hz-60Hz，环境噪声的频率远高于此频率，被柔性膜隔绝，不会造成干扰；红外发射器的调制频率与柔性膜的共振频率相同，柔性膜处于共振状态，可使声音信号提升20dB，显著提高产品的灵敏度；声传感器位于密闭的第二腔体中，可避免颗粒物进入第二腔体造成声传感器失效。
【 附图说明】         
图1为本发明的气体传感器的立体图；
图2为本发明的气体传感器的分解图；
图3为图1中A-A向的剖视图。
【 具体实施方式】   
下面结合附图和实施方式对本发明作进一步说明。
请参阅图1至图3，在本实施例中，一种气体传感器100，其包括具有收容腔101的壳体10以及置于所述收容腔101中的声传感器30和红外发射器20，所述壳体10包括盖板11、与所述盖板11间隔设置的基板12以及位于所述盖板11和所述基板12之间的侧壁13。其中，所述红外发射器20向收容腔101中发射光，所发射的光可以是红外光，并且尤其是脉冲光，例如脉冲红外光。声传感器30可以包括麦克风，尤其是MEMS麦克风，该MEMS麦克风可根据光声原理来检测由所发射的光引起的声信号。
在本实施方式中，所述气体传感器100还包括与所述侧壁13连接的并置于所述收容腔101中的柔性膜40，所述柔性膜40将所述收容腔分隔成第一腔体102和第二腔体103，所述第一腔体102由所述柔性膜40、侧壁13以及盖板11共同围合形成，所述第二腔体103由所述柔性膜40、侧壁13以及基板12共同围合形成，所述红外发射器20位于所述第一腔体102中，所述声传感器30位于所述第二腔体103中。所述柔性膜40、第一腔体102以及第二腔体103构成谐振系统，所述谐振系统的固有频率与所述红外发射器20的调制频率相同。所述壳体10设有连通外部和所述收容腔101的通气孔110，在本实施方式中，所述通气孔110与所述第一腔体102连通。
具体的，所述侧壁13包括与所述盖板11连接的第一侧壁131和与所述基板12连接的第二侧壁132，所述柔性膜40夹设在第一侧壁131和第二侧壁132之间，即，柔性膜40、第一侧壁131以及盖板11共同围合形成所述第一腔体102，柔性膜40、第二侧壁132以及基板12共同围合形成所述第二腔体103。侧壁13采用分体设计，方便了柔性膜40的固定安装。另外，所述第一腔体102的体积大于所述第二腔体103的体积。在其它实施方式中，侧壁也可设置收容固定柔性膜的凹槽，只要可以固定柔性膜即可。
外界气体通过通气孔110进入第一收容腔102，红外发射器20以某个声波频率（例如30Hz）发出特定波长的红外光，该波长红外光被待测气体强烈吸收，转化成热量，在第一收容腔102中产生交变压强信号，驱动柔性膜40发生共振，在第二收容腔103中形成强烈的声学共振信号，由此转化为电信号，由声传感器30输出信号强度，由此可计算出待测气体浓度。
在本实施方式中，由于红外发射器20和声传感器30布置在不同腔体内，可避免干扰信号的发生；另外，红外发射器20的调制频率在40Hz-60Hz，环境噪声的频率远高于此频率，被柔性膜40隔绝，不会造成干扰；红外发射器20的调制频率与柔性膜40的共振频率相同，柔性膜40处于共振状态，可使声音信号提升20dB，显著提高产品的灵敏度；声传感器30位于密闭的第二腔体103中，可避免颗粒物进入第二腔体103造成声传感器失效。
柔性膜40包括位于第一腔体101的上表面41，上表面41与盖板11相对，柔性膜40的上表面41可电镀铝或者银反射层，提升红外信号利用效率的同时，降低声传感器30受到的光干扰。
另外，红外传感器20固定在盖板11，声传感器30固定在基板12，通气孔110位于所述盖板11。
以上所述的仅是本发明的实施方式，在此应当指出，对于本领域的普通技术人员来说，在不脱离本发明创造构思的前提下，还可以做出改进，但这些均属于本发明的保护范围。

Claims (7)

  1. 一种气体传感器，其包括具有收容腔的壳体以及置于所述收容腔中的声传感器和红外发射器，所述壳体包括盖板、与所述盖板间隔设置的基板以及位于所述盖板和所述基板之间的侧壁，所述壳体设有连通外部和所述收容腔的通气孔，其特征在于，所述气体传感器还包括与所述侧壁连接的柔性膜，所述柔性膜将所述收容腔分隔成第一腔体和第二腔体，所述第一腔体由所述柔性膜、侧壁以及盖板共同围合形成，所述第二腔体由所述柔性膜、侧壁以及基板共同围合形成，所述红外发射器位于所述第一腔体中，所述声传感器位于所述第二腔体中，所述柔性膜、第一腔体以及第二腔体构成谐振系统，所述谐振系统的固有频率与所述红外发射器的调制频率相同，所述通气孔与所述第一腔体连通。
  2. 根据权利要求1所述的气体传感器，其特征在于，所述侧壁包括与所述盖板连接的第一侧壁和与所述基板连接的第二侧壁，所述柔性膜夹设于所述第一侧壁和第二侧壁之间。
  3. 根据权利要求1所述的气体传感器，其特征在于，所述红外发射器固定于所述盖板。
  4. 根据权利要求1所述的气体传感器，其特征在于，所述声传感器固定于所述基板。
  5. 根据权利要求1所述的气体传感器，其特征在于，所述第一腔体的体积大于所述第二腔体的体积。
  6. 根据权利要求1所述的气体传感器，其特征在于，所述通气孔位于所述盖板。
  7. 根据权利要求1所述的气体传感器，其特征在于，所述柔性膜包括位于所述第一腔体的上表面，所述柔性膜的上表面包括铝反射层或银反射层。
PCT/CN2023/086222 2023-04-04 2023-04-04 一种气体传感器 Ceased WO2024207206A1 (zh)

Priority Applications (2)

Application Number Priority Date Filing Date Title
PCT/CN2023/086222 WO2024207206A1 (zh) 2023-04-04 2023-04-04 一种气体传感器
US18/399,718 US20240337588A1 (en) 2023-04-04 2023-12-29 Gas Sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/CN2023/086222 WO2024207206A1 (zh) 2023-04-04 2023-04-04 一种气体传感器

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US18/399,718 Continuation US20240337588A1 (en) 2023-04-04 2023-12-29 Gas Sensor

Publications (1)

Publication Number Publication Date
WO2024207206A1 true WO2024207206A1 (zh) 2024-10-10

Family

ID=92934682

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/CN2023/086222 Ceased WO2024207206A1 (zh) 2023-04-04 2023-04-04 一种气体传感器

Country Status (2)

Country Link
US (1) US20240337588A1 (zh)
WO (1) WO2024207206A1 (zh)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20150101395A1 (en) * 2013-10-14 2015-04-16 Infineon Technologies Ag Photoacoustic gas sensor device and a method for analyzing gas
US20170350868A1 (en) * 2016-06-03 2017-12-07 Infineon Technologies Ag Acoustic wave detector
WO2022000852A1 (zh) * 2020-06-30 2022-01-06 瑞声声学科技(深圳)有限公司 振动传感器
CN217688711U (zh) * 2022-04-28 2022-10-28 瑞声声学科技(深圳)有限公司 一种气体传感器

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5933245A (en) * 1996-12-31 1999-08-03 Honeywell Inc. Photoacoustic device and process for multi-gas sensing
US8695402B2 (en) * 2010-06-03 2014-04-15 Honeywell International Inc. Integrated IR source and acoustic detector for photoacoustic gas sensor
US10302554B2 (en) * 2016-06-03 2019-05-28 Ingineon Technologies Ag Acoustic wave detector
US10302599B2 (en) * 2016-10-27 2019-05-28 Infineon Technologies Ag Photoacoustic gas detector
EP3798607B1 (en) * 2019-08-09 2023-01-25 Sensirion AG Photoacoustic gas sensor devices

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20150101395A1 (en) * 2013-10-14 2015-04-16 Infineon Technologies Ag Photoacoustic gas sensor device and a method for analyzing gas
US20170350868A1 (en) * 2016-06-03 2017-12-07 Infineon Technologies Ag Acoustic wave detector
WO2022000852A1 (zh) * 2020-06-30 2022-01-06 瑞声声学科技(深圳)有限公司 振动传感器
CN217688711U (zh) * 2022-04-28 2022-10-28 瑞声声学科技(深圳)有限公司 一种气体传感器

Also Published As

Publication number Publication date
US20240337588A1 (en) 2024-10-10

Similar Documents

Publication Publication Date Title
CN212572961U (zh) 振动传感器及具有其的音频设备
US9489807B2 (en) Life safety device with compact circumferential acoustic resonator
CN110220584B (zh) 光学声敏元件以及包括其的光学声传感器
WO2022000794A1 (zh) 振动传感器
CN112816419B (zh) 一种谐振型气体传感器
CN215598551U (zh) 一种光学声传感器
CN113194393B (zh) 一种光学麦克风
CN117928712A (zh) 一种检测次声波的光学传感器及系统
WO2024207206A1 (zh) 一种气体传感器
CN219996879U (zh) 一种气体传感器
CN108696812B (zh) 光纤光栅麦克风
US20230349816A1 (en) Gas Sensor
WO2024138925A1 (zh) 一种气体传感器
CN217688711U (zh) 一种气体传感器
JP3639483B2 (ja) 音響電気変換装置
WO2024138922A1 (zh) 一种气体传感器
US12584851B2 (en) Gas sensor
US12385824B2 (en) Gas sensor
WO2022000853A1 (zh) 振动传感器
CN204559882U (zh) 一种mems麦克风的封装结构
CN224081058U (zh) 一种声源振动探测系统
JP3887535B2 (ja) 音響電気変換装置
CN114501271B (zh) 声传感器组件及其电路
CN120522097A (zh) 一种气体传感器及气体探测设备
CN202385275U (zh) 基于自混合干涉测量方法的实时语音信号拾取装置

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 23931279

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 23931279

Country of ref document: EP

Kind code of ref document: A1