Classifications

• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
  • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
  • B05C1/00—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating
  • B05C1/04—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length
  • B05C1/06—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length by rubbing contact, e.g. by brushes, by pads
• • H—ELECTRICITY
  • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
  • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
  • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
  • H10P72/04—Apparatus for manufacture or treatment
  • H10P72/0448—Apparatus for applying a liquid, a resin, an ink or the like
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
  • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
  • B05C1/00—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating
  • B05C1/04—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length
  • B05C1/08—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length using a roller or other rotating member which contacts the work along a generating line
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
  • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
  • B05C1/00—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating
  • B05C1/04—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length
  • B05C1/08—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length using a roller or other rotating member which contacts the work along a generating line
  • B05C1/0804—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length using a roller or other rotating member which contacts the work along a generating line the material being applied without contact with the roller
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
  • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
  • B05C1/00—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating
  • B05C1/04—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length
  • B05C1/08—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length using a roller or other rotating member which contacts the work along a generating line
  • B05C1/0813—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length using a roller or other rotating member which contacts the work along a generating line characterised by means for supplying liquid or other fluent material to the roller
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
  • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
  • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
  • B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
  • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
  • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
  • B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
  • B05C11/1002—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
  • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
  • B05D1/00—Processes for applying liquids or other fluent materials
  • B05D1/26—Processes for applying liquids or other fluent materials performed by applying the liquid or other fluent material from an outlet device in contact with, or almost in contact with, the surface
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
  • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
  • B05D1/00—Processes for applying liquids or other fluent materials
  • B05D1/28—Processes for applying liquids or other fluent materials performed by transfer from the surfaces of elements carrying the liquid or other fluent material, e.g. brushes, pads, rollers
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
  • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
  • B05D1/00—Processes for applying liquids or other fluent materials
  • B05D1/40—Distributing applied liquids or other fluent materials by members moving relatively to surface
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
  • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
  • B05D7/00—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials
  • B05D7/02—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials to macromolecular substances, e.g. rubber
  • B05D7/04—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials to macromolecular substances, e.g. rubber to surfaces of films or sheets
• • H—ELECTRICITY
  • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
  • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
  • H10K30/00—Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation
  • H10K30/50—Photovoltaic [PV] devices
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
  • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
  • B05C3/00—Apparatus in which the work is brought into contact with a bulk quantity of liquid or other fluent material
  • B05C3/18—Apparatus in which the work is brought into contact with a bulk quantity of liquid or other fluent material only one side of the work coming into contact with the liquid or other fluent material
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
  • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
  • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
  • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
  • B05C5/027—Coating heads with several outlets, e.g. aligned transversally to the moving direction of a web to be coated
  • B05C5/0275—Coating heads with several outlets, e.g. aligned transversally to the moving direction of a web to be coated flow controlled, e.g. by a valve

Definitions

• Organic thin-film solar cells and organic/inorganic hybrid solar cells using organic semiconductors are expected to be low-cost solar cells because inexpensive coating methods can be used to form the active layer.
• it is necessary to uniformly coat the coating materials that form the organic active layer and other layers.
• the film thickness of each layer is about several nm to several hundreds of nm, and it is necessary to form such extremely thin layers with good uniformity over a large area.
• the meniscus coating method is known as one of the roll-to-roll (R2R) coating methods that can coat extremely thin layers over a large area at low cost.
• liquid is supplied from multiple nozzles to a coating bar head to obtain a single large-area coating film, which is simple and the structure of the equipment is also simple.
• it can be difficult to obtain a uniform film thickness, and a coating device that can form a more uniform coating film is desired.
• An embodiment of the present invention provides a coating device and coating method that can form a uniform coating film using a meniscus coating method and is also easy to maintain.
• a coating apparatus for supplying a coating liquid to a surface of a substrate and forming a coating film by a meniscus method, A coating bar; A substrate transport member that transports the substrate; a plurality of nozzles for supplying the coating fluid to a surface of the coating bar; a coating liquid supplying member for supplying the coating liquid to the nozzle; and a coating liquid supply amount adjusting member for adjusting the amount of coating liquid supplied to the nozzles is provided upstream of each of the nozzles.
• the coating apparatus according to claim 1 further comprising a coating bar position adjustment member for controlling the position of the coating bar.
• FIG. 1 is a schematic side view illustrating the coating apparatus according to the first embodiment.
• FIG. 2 is a schematic top view illustrating the coating apparatus according to the first embodiment.
• FIG. 3 is a flow chart illustrating a coating method according to the second embodiment.
• Fig. 1 is a schematic side view illustrating the coating apparatus according to the first embodiment.
• Fig. 2 is a schematic top view illustrating the coating apparatus according to the first embodiment.
• the coating device 100 has a nozzle position adjustment member 108, a coating bar 101, a mechanism 107 for detecting the distance to the nozzle 103, a coating liquid supply member 104, such as a liquid delivery pump, for supplying the coating liquid 110 stored in a liquid reservoir, and equipment transport members, such as transport rollers 102a and 102b, for transporting the substrate 102.
• a coating liquid supply amount adjustment member 105 such as an adjustment valve, is disposed upstream of each nozzle.
• the coating device in this embodiment is equipped with a plurality of nozzles 103.
• the total number of nozzles may be greater than the total number of liquid delivery pumps.
• the piping from one pump to each nozzle is branched, but it is preferable that the coating liquid piping is branched into two.
• the coating liquid supply amount adjusting member 105 is installed upstream of the nozzle 103 .
• the plurality of nozzles 103 can face the coating bar 101. As shown in FIG.
• the multiple nozzles 103 are aligned along a first direction.
• the first direction is, for example, the Y-axis direction.
• One direction perpendicular to the Y-axis direction is defined as the X-axis direction.
• the movement direction of the substrate can coincide with the X-axis.
• the direction perpendicular to the Y-axis direction and the X-axis direction is defined as the Z-axis direction.
• the coating bar 101 extends along, for example, the Y-axis direction.
• a meniscus 110M of the coating liquid 110 can be formed between the substrate 102 and the coating bar 101.
• a coating film 111 is formed on the substrate 102.
• the coating film 111 is solidified, for example by drying, to obtain the desired film (solid film). For example, by moving the substrate 102 along the moving direction, a coating film 111 with a large area can be formed on the substrate 102.
• the coating liquid 110 is applied to almost the entire surface of the substrate 102 by the coating bar, but when using conventional coating methods, the film thickness may not be uniform.
• a major cause of this is variation in the discharge amount between each nozzle 103.
• the amount of liquid supplied to each nozzle is roughly determined by the liquid supply pump, but varies depending on the number, length, and height of the pipes, and the diameter or clogging of the pipes or nozzles.
• a coating liquid supply amount adjustment member for example a valve 105 that adjusts the liquid amount, can adjust this, making it possible to reduce variation in the amount of coating liquid discharged between each nozzle. In particular, when the number of liquid supply pumps is less than the number of nozzles, this tends to reduce variation, which is preferable.
• the coating device according to the embodiment preferably further includes a coating bar position adjustment member 106 that controls the distance between the coating bar 101 and the substrate 102.
• a coating bar position adjustment member 106 that controls the distance between the coating bar 101 and the substrate 102.
• a gap ring, a micrometer, or the like can be used as this member.
• the number of the multiple nozzles 103 can be three or more. This allows a coating film 111 with a large area to be formed stably.
• the number of the multiple nozzles 103 is four. In an embodiment, the number may be any integer number equal to or greater than three.
• the nozzle can be a slot die or can be needle-shaped.
• the discharge amount of the coating liquid 110 can be controlled with high precision.
• the nozzle is needle-shaped, for example, even if there are a large number of nozzles, the tip of the nozzle can easily come into contact with the coating bar 101.
• High flexibility is obtained in the needle-shaped nozzle. Due to the high flexibility, for example, it is possible to suppress damage to the nozzle due to vibration of the coating bar 101.
• the length of the nozzle is, for example, 10 mm or more and 100 mm or less, and the inner diameter of the nozzle is, for example, 0.5 mm or more and 2 mm or less.
• the angle between the end face of the tip of the nozzle and the extension direction of the nozzle is, for example, about 90 degrees (for example, 75 degrees or more and 105 degrees or less). With such a shape, for example, it is possible to suppress the occurrence of scratches on the coating bar 101.
• a nozzle position adjustment member 108 that adjusts the position of each nozzle and a nozzle position detection member 107 that detects the distance between the application bar 101 and each nozzle 103 are provided, the variation in the position and distance between each nozzle tip and the application bar can be reduced, enabling uniform application.
• the position of each nozzle detected by a nozzle position detection member such as a camera is adjusted by a nozzle position adjustment member that physically adjusts the position of each nozzle.
• the coating bar may further include a member for detecting contact between each nozzle. Contact can be easily detected, for example, by measuring the electrical resistance between the nozzle and coating bar, and variation can be reduced by adjusting the coating conditions based on this. When the nozzle and coating bar are in contact, the coating liquid can be applied directly to the coating bar, making it less likely for the coating liquid to repel.
• a member for measuring the electrical resistance between each nozzle and the coating bar can be provided as a member for detecting contact between the coating bar and each nozzle. If each nozzle and coating bar are made of conductive stainless steel or the like and each nozzle is insulated, the electrical resistance between the coating bar and each nozzle can be measured and the electrical resistance will drop sharply the moment they come into contact. In addition, since the electrical resistance changes as the contact state changes, it becomes possible to monitor the contact state. For example, if the nozzle is pressed against the coating bar so strongly that it is curved too much, the coating bar will come into contact not only with the tip of the nozzle but also with its side, and the electrical resistance will be very small.
• the coating liquid will easily be ejected from the tip of the nozzle to places other than the coating bar, which will easily cause uneven coating.
• the optimal electrical resistance varies depending on the shape and material of the nozzle and coating bar, so it is desirable to measure it in advance.
• the wiring should have an opening and closing section so that each nozzle can be moved before coating to check contact with the coating bar. Also, if the electrical resistance is measured during coating, any abnormalities in the contact between the nozzle and coating bar can be detected.
• the electrical resistance measuring device can also be an external device separate from the coating device.
• the nozzles are removable. Nozzles are prone to clogging due to their small openings. In the coating device according to the embodiment, when such clogging occurs, the discharge amount of each nozzle can be adjusted using the coating liquid supply member and the coating liquid supply amount adjustment member, but if the clogging becomes significant or discharging becomes completely impossible, cleaning or replacement is necessary. In such cases, it is preferable that the nozzles are removable, as this makes maintenance easier.
• the coating device 100 may further include a drying member 112.
• the drying member 112 is capable of drying the coating liquid 111 applied to the substrate 102.
• the drying member 112 may include, for example, an air nozzle or a far-infrared lamp.
• the cross-sectional shape of the coating bar 101 is arbitrary.
• the cross-sectional shape is, for example, a circle, a flattened circle, or a polygon.
• a part of the cross-sectional shape that corresponds to the meniscus forming portion may be curved, and the other part may be straight.
• the cross-sectional shape of the surface of the coating bar 101 that faces the substrate 102 may be curved.
• the applicator bar can be positioned so that it does not rotate. By not having the applicator bar rotate like a roller, the stability of the meniscus is improved.
• the coating bar 101 includes, for example, at least one selected from the group consisting of stainless steel, aluminum, titanium, and glass. This allows for easy processing when preparing the coating bar 101.
• the surface of the coating bar 101 is a mirror surface.
• the surface of the coating bar 101 may include an uneven structure.
• the second embodiment relates to a coating method.
• coating is performed using, for example, the coating apparatus 100 (or a variation thereof) described in relation to the first embodiment.
• FIG. 3 is a flow chart illustrating the coating method (S30) according to the second embodiment.
• the coating method according to the embodiment is a coating method in which a meniscus of coating liquid is formed between a coating bar and a substrate, the substrate is transported, and the coating liquid is applied to the substrate surface.
• the coating liquid is then supplied to a plurality of nozzles, and the coating liquid is supplied from the plurality of nozzles to the surface of the coating bar and the substrate surface. At this time, the amount of coating liquid supplied to each of the plurality of nozzles is adjusted upstream of each nozzle.
• This amount of coating liquid supplied can be adjusted by a coating liquid supply member such as a pump, or a coating liquid supply amount adjustment member arranged upstream of the nozzle.
• the distance between the coating bar and each nozzle is detected, and the distance is adjusted as necessary (S32).
• the distance can be detected using a nozzle position detection member or the like.
• the distance can be adjusted using a coating bar position adjustment member or a nozzle position adjustment member.
• a solar cell can be formed by coating using the coating device 100.
• the number of pumps is four.
• a pipe connected to one pump is connected to four nozzles.
• the total number of nozzles is 16.
• the nozzles are attached to a single cantilever bar.
• An actuator for movement and wiring for measuring electrical resistance are attached to each nozzle.
• a liquid volume adjustment valve is attached to each nozzle.
• the wiring is connected to an electrical resistance meter.
• a nozzle position detection member, such as a camera, is attached to observe the positional relationship between the nozzle and the coating bar.
• the substrate 102 is a rolled PET film.
• the width of the PET film is, for example, 330 mm.
• a light-transmitting electrode having a width of 300 mm is formed on the PET film by a roll-to-roll compatible sputtering device.
• the sheet resistance of the electrode is, for example, 10 ⁇ / ⁇ .
• the electrode has, for example, a laminated structure of an ITO film/Ag alloy/ITO film.
• multiple electrodes are provided.
• the length of each of the multiple electrodes is, for example, about 10 mm.
• the distance between the multiple electrodes is, for example, 50 ⁇ m.
• the cross-sectional shape of the coating bar 101 is circular.
• the radius of the circle is 10 mm.
• the length of the coating bar 101 is 300 mm.
• the coating bar 101 includes, for example, stainless steel (e.g., SUS303).
• the nozzle includes a stainless steel locking base.
• the nozzle is 50 mm long.
• the piping for the coating liquid is a polytetrafluoroethylene tube.
• a liquid volume adjustment valve is installed between the tube and the nozzle. The valve and the tube are connected by a detachable joint. The tube is connected to a pump.
• the hole transport layer is formed by the coating liquid 110.
• the coating liquid 110 is an aqueous solution containing PEDOT and PSS.
• the relative positional relationship between the coating bar 101 and the substrate 102 is controlled by a gap ring or an actuator.
• the nozzles are placed in a horizontal position. In this state, the coating liquid 110 is supplied and the air in the nozzles is expelled. After that, the pump and the liquid volume control valve are adjusted so that the coating liquid comes out evenly from each nozzle.
• the coating liquid 110 is continuously supplied by a pump.
• the movement speed of the substrate 102 is, for example, 5 m/min.
• the drying member 112 blows heated dry air onto the applied coating liquid 110.
• a solidified coating film is obtained from the coating liquid 110.
• another coating liquid may be further coated.
• the other coating liquid includes, for example, a semiconductor material.
• the other coating liquid includes, for example, PTB7 ([poly ⁇ 4,8-bis[(2-ethylhexyl)oxy]benzo[1,2-b:4,5-b']dithiophene-2,6-diyl-1t-alt-3-fluoro-2-[(2-ethylhexyl)carbonyl]thieno[3,4-b]thiophene-4,6-diyl ⁇ ]) and PC70BM ([6,6]phenyl C71 butyric acid methyl ester).
• PTB7 is, for example, a p-type semiconductor.
• PC70BM is, for example, an n-type semiconductor.
• the other coating liquid further includes, for example, monochlorobenzene.
• the amount of PTB7 is 8 mg per 1 mL of monochlorobenzene.
• the amount of PC70BM is 12 mg per 1 mL of monochlorobenzene.
• Another coating liquid is a dispersion containing an organic semiconductor.
• the other coating liquid becomes, for example, a semiconductor film for a solar cell.
• the minimum gap distance between the coating bar 101 and the substrate 102 is 300 ⁇ m.
• the moving speed of the substrate 102 is, for example, 5 m/min. After application, drying is performed by the drying member 112.
• organic thin-film solar cells that use organic semiconductors, or organic/inorganic hybrid solar cells.
• organic semiconductors or organic/inorganic hybrid solar cells.
• the coating liquid 110 may be applied to the substrate 102 at a position where the substrate 102 is transported vertically. This, for example, applies the effect of gravity to the meniscus, making it easier to obtain a uniform film even at high speeds.
• a coating device and a coating method are provided that can form a uniform coating film.
• Coating device 101 Coating bar 102... Substrates 102a, 102b... Transporting mechanism 103... Nozzle 104... Pump 105... Coating liquid supply amount adjustment member 106... Coating bar position adjustment member 107... Nozzle distance detection member 108... Nozzle position adjustment member 109... Liquid reservoir 110... Coating liquid 111... Coating film 112... Drying member

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• Life Sciences & Earth Sciences (AREA)
• Engineering & Computer Science (AREA)
• Wood Science & Technology (AREA)
• Physics & Mathematics (AREA)
• Electromagnetism (AREA)
• Coating Apparatus (AREA)

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Citations (4)

• 2023
  • 2023-03-08 CN CN202380061904.2A patent/CN119768899A/zh active Pending
  • 2023-03-08 WO PCT/JP2023/008874 patent/WO2024185086A1/ja not_active Ceased
  • 2023-03-08 JP JP2025504999A patent/JPWO2024185086A1/ja active Pending
  • 2023-03-08 EP EP23925612.6A patent/EP4557351A1/en active Pending
• 2025
  • 2025-02-10 US US19/049,192 patent/US20250178015A1/en active Pending

Patent Citations (4)

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