WO2024101607A1 - Substrate loading device - Google Patents

Substrate loading device Download PDF

Info

Publication number
WO2024101607A1
WO2024101607A1 PCT/KR2023/012251 KR2023012251W WO2024101607A1 WO 2024101607 A1 WO2024101607 A1 WO 2024101607A1 KR 2023012251 W KR2023012251 W KR 2023012251W WO 2024101607 A1 WO2024101607 A1 WO 2024101607A1
Authority
WO
WIPO (PCT)
Prior art keywords
paddle
block
loading device
substrate loading
boat
Prior art date
Application number
PCT/KR2023/012251
Other languages
French (fr)
Korean (ko)
Inventor
박미성
이재용
Original Assignee
주식회사 한화
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 주식회사 한화 filed Critical 주식회사 한화
Publication of WO2024101607A1 publication Critical patent/WO2024101607A1/en

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742—Mechanical parts of transfer devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67754—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber horizontal transfer of a batch of workpieces

Definitions

  • Embodiments of the present invention relate to substrate loading devices.
  • Solar cells are produced through a texturing process, diffusion process, oxide film removal process, barrier coating process, electrode printing process, and P-N junction separation process.
  • a plurality of substrates are placed into a high-temperature diffusion furnace through a substrate loading device and source gas is introduced to induce P-N bonding on the substrates.
  • the substrate loading device may be damaged by the high temperature heat emitted when the door of the diffusion furnace is opened, and the substrate loading device may not operate normally.
  • the problem to be solved by the present invention is to provide a substrate loading device that includes a structure that prevents the driving unit that operates the substrate loading device from being damaged by high temperature heat emitted when the door of the diffusion furnace is opened.
  • a substrate loading device includes a boat on which a plurality of substrates are placed; a paddle carrying said boat; a driving unit that loads or unloads the paddle into the diffusion furnace; and a block portion disposed between the boat and the driving unit and spaced apart from the paddle in a direction different from the extension direction of the paddle, wherein the shape of the plate portion of the block portion is 0.5 to 2 times that of the opening of the diffusion path. has an area of
  • the block portion may be formed to correspond to the shape of the opening of the diffusion path.
  • the block portion includes a paddle coupling portion coupled to the paddle; And it may include a block support portion coupled to the block support portion.
  • the block support part coupling part may be formed to protrude more than a preset length (G).
  • the upper end of the block may be inclined in the direction in which the diffusion path is located.
  • the driving unit and the paddle may be moved by riding on the second transport unit.
  • the longitudinal direction of the second transfer unit may be parallel to the moving direction of the driving unit and the paddle.
  • the length of the second transfer unit may be shorter than the length of the paddle.
  • the block portion may be formed of at least one of graphite, ceramic, SIC, and SUS.
  • the block portion may be disposed outside the diffusion furnace and spaced apart from the door that shields the diffusion passage.
  • the substrate loading device can prevent damage to the part connected to the driving part and the paddle by blocking high temperature heat emitted from the diffusion furnace through the block part.
  • FIG. 1 is a perspective view showing a substrate loading device according to an embodiment of the present invention.
  • Figure 2 is a perspective view of a substrate loading device according to an embodiment of the present invention, viewed from a different side than Figure 1.
  • Figure 3 is a diagram showing how only the paddle comes out after transporting the boat inside the diffusion furnace.
  • Figure 4 is a diagram showing the first transfer unit of the substrate loading device according to an embodiment of the present invention being moved by the driving unit.
  • Figure 5 is an enlarged view of the block portion of the substrate loading device according to an embodiment of the present invention.
  • Figure 6 is a diagram showing a block portion according to an embodiment of the present invention.
  • Figure 6(a) is a front view of the block part
  • Figure 6(b) is a perspective view of the block part.
  • Figure 7 is a diagram showing a block portion according to another embodiment of the present invention.
  • Figure 6(a) is a front view of the block part
  • Figure 6(b) is a perspective view of the block part.
  • FIG. 8 is a view viewed in direction A of FIG. 5, and is a view of the block portion according to an embodiment of the present invention viewed from the side.
  • FIG. 8(a) is a diagram showing a block portion according to an embodiment of the present invention
  • FIG. 8(b) is a diagram showing a block portion according to another embodiment of the present invention.
  • Figure 9 is a view showing a portion of a paddle according to another embodiment of the present invention inserted into the interior of a diffusion furnace.
  • Figure 10 is a diagram showing a substrate loading device including a second transfer unit according to another embodiment of the present invention.
  • first and second are used not in a limiting sense but for the purpose of distinguishing one component from another component.
  • a specific process sequence may be performed differently from the described sequence.
  • two processes described in succession may be performed substantially at the same time, or may be performed in an order opposite to that in which they are described.
  • FIG. 1 is a perspective view showing a substrate loading device according to an embodiment of the present invention.
  • Figure 2 is a perspective view of a substrate loading device according to an embodiment of the present invention, viewed from a different side than Figure 1.
  • Figure 3 is a diagram showing how only the paddle comes out after transporting the boat inside the diffusion furnace.
  • Figure 4 is a diagram showing the first transfer unit of the substrate loading device according to an embodiment of the present invention being moved by the driving unit.
  • the substrate loading device 1 includes a boat 110 on which a plurality of substrates are seated, a paddle 120 carrying the boat 110, and a spreading paddle.
  • a plurality of substrates may be mounted on the boat 110.
  • a groove into which a plurality of thin substrates can be inserted may be provided in the lower part of the internal space of the boat 110.
  • the substrates may be provided in a row on the boat 110.
  • a plurality of substrates may be transported into the diffusion path 10 through the paddle 120 while being seated inside the boat 110 .
  • the shape of the paddle 120 may be formed so that the diffusion path entry direction is the longitudinal direction.
  • the paddle 120 may have a plurality of pipe parts extending in parallel.
  • the driving unit 300 may be connected to the paddle 120.
  • the paddle 120 may be moved by the driving unit 300. Referring to FIG. 4 , the paddle 120 may be moved in the longitudinal direction of the paddle 120 together with the driving unit 300 .
  • the driving unit 300 may be connected to the second transfer unit 200.
  • the second transfer unit 200 is formed in a rail shape, and the drive unit 300 rides the second transfer unit 200 along the longitudinal direction of the rail-shaped second transfer unit 200, with the second transfer unit 200 as a reference. While moving, the paddle 120 coupled with the driving unit 300 can be moved inside the diffusion path 10. At this time, the longitudinal direction of the second transfer unit 200 may be formed parallel to the moving direction of the drive unit 300 and the paddle 120.
  • the driving unit 300 may be connected to the fixed frame 212 of the second transfer unit 200.
  • the second transfer unit 200 may include a connection block 260.
  • the connection block 260 may be connected to the fixed frame 212 by a connection member 214.
  • a lifting member 262 may be formed on the connection block 260.
  • the lifting member 262 may be combined with the connection block 260 and the driving unit 300.
  • the driving unit 300 may be lifted up and down with respect to the second transfer unit 200 through the lifting member 262 . Additionally, the first transfer unit 100 connected to the drive unit 300 may also be lifted up and down.
  • the second transfer unit 200 may be provided with a first driving means 261.
  • the first driving means 261 may include a motor.
  • the first transfer unit 100 is driven by the first driving means 261, and the paddle 120 can be moved into the diffusion path 10.
  • the rotation direction of the rotational force of the second motor 230 may be changed by the gear box 240.
  • the gear box 240 may be made of a bevel gear, etc., and the power transmission shaft 250 is connected to both sides of the gear box 240, so the rotational force of the second motor 230 is transmitted to both sides through the gear box 240. It is transmitted to the power transmission shaft 250, and the power transmission shaft 250 can be rotated.
  • connection block 260 may also be lifted and lowered at the same time.
  • the fixed frame 212 coupled to the driving unit 300 may also move up and down as the connection block 260 moves up and down.
  • the diffusion furnace 10 may include a door 11.
  • the pad 120 carrying the boat 110 can be moved into the diffusion furnace 10.
  • the pad 120 may load the boat 110 on which a plurality of substrates are seated into the diffusion path 10 and then exit the diffusion path 10 again. That is, the door 11 can shield the diffusion path 10.
  • it may include a block unit 130 disposed between the boat 110 and the driving unit 300.
  • the door 11 of the diffusion furnace 10 is opened.
  • the driving unit 300 may be damaged.
  • the connection portion between the drive unit 300 and the paddle 120 and the sensor unit (not shown) connected to the drive unit 300 may be damaged by high temperature heat.
  • the block unit 130 is disposed between the boat 110 and the driving unit 300, so that the high temperature heat coming from the diffusion furnace 10 in which the boat 110 is accommodated is transferred to the driving unit 300. Transmission can be blocked. Through this, the performance of the driving unit 300 can be maintained by protecting the driving unit 300 from the high temperature heat of the diffusion furnace 10, and through this, the boat 110 is loaded or unloaded into the diffusion furnace 10. reliability can be secured.
  • the block portion 130 may be formed of at least one of graphite, ceramic, SIC, and SUS. Preferably, it may be formed of a material with relatively low thermal conductivity among the above materials.
  • the door 11 when the process proceeds within the diffusion furnace 10, the door 11 can be maintained in a closed state. Additionally, the block portion 130 may be disposed on the outside of the door 11 facing the door 11 and may be spaced apart by a predetermined distance. Alternatively, when transporting the boat 110 within the diffusion furnace 10 or discharging the boat 110 placed within the diffusion furnace 10, the door 11 may be opened. Additionally, the block portion 130 faces the boat 110 and can block heat from the diffusion path 10.
  • FIGS. 5 and 6 the block portion of the substrate loading device according to an embodiment of the present invention will be described in more detail. Content not shown in FIGS. 5 and 6 may refer to FIGS. 1 to 4.
  • Figure 5 is an enlarged view of the block portion of the substrate loading device according to an embodiment of the present invention.
  • Figure 6 is a diagram showing a block portion according to an embodiment of the present invention.
  • Figure 6(a) is a front view of the block part, and
  • Figure 6(b) is a perspective view of the block part.
  • the block portion 130 may be formed in a thin plate shape.
  • the plate-shaped block portion 130 may be arranged so that the plate portion of the block portion 130 faces the direction in which the diffusion path 10 is located.
  • the block portion 130 may be formed in a shape corresponding to the shape of the opening O of the diffusion path 10. Since the opening O of the diffusion path 10 is formed in a circular shape, the shape of the block portion 130 may also be formed in a circular shape.
  • the plate shape of the block portion 130 may have an area of 0.5 to 2 times that of the opening O of the diffusion path 10. If the plate area of the block portion 130 is less than 0.5 times the opening O, it may become difficult for the block portion 130 to block high temperature heat coming from the diffusion furnace 10. Additionally, if the area of the plate part of the block part 130 is more than twice that of the opening O, interference with the second transfer part 200 and surrounding components may occur when installing the substrate loading device.
  • the block portion 130 may include a paddle coupling portion 130a coupled to the paddle 120 and a block support portion coupling portion 130b coupled to the block support portion 131.
  • the paddle coupling portion 130a may be formed in a continuous shape with a plurality of semicircular depressions to correspond to the plurality of cylindrical shapes of the paddle 120. Through this, the paddle coupling portion 130a can be fitted into the paddle 120 and fixed to the paddle 120.
  • the radius R2 of the paddle coupling portion 130a may be larger than the radius R1 of the pipe portion of one of the paddles 120.
  • the radius R2 of the paddle coupling portion 130a may be greater than the radius R1 of the pipe portion of one of the paddles 120 by more than 1 percent.
  • the paddle 120 and the block portion 130 may be spaced apart.
  • the paddle 120 and the block 130 may be spaced apart in a direction different from the direction in which the paddle 120 extends.
  • the pipe portion of one of the paddles 120 and the paddle coupling portion 130a may be spaced apart by a short distance d.
  • a coupling tolerance between the paddle 120 and the block portion 130 can be formed through the short distance d.
  • the short distance (d) may be 0.5 mm or less.
  • the block portion 130 As the block portion 130 is spaced apart by the distance d, it can move without friction with the paddle 120 and spreads into the gap (space) between the paddle 120 and the paddle coupling portion 130a.
  • the emission of heat from the furnace 10 can be controlled. Therefore, it is desirable that the distance d satisfies the above-mentioned range.
  • the block support part 131 protrudes from the driving part 300 in the direction in which the block part 130 is located, connects the driving part 300 and the block part 130, and connects the block part 130 to the driving part 300. ) can be fixed and supported.
  • the block support portion 131 may be coupled to the block portion 130 through the block support coupling portion 130b.
  • the block support coupling portion 130b may be formed of three thin pipes side by side.
  • a connecting member may be coupled to the inside of the pipe of the block support coupling portion 130b.
  • the block support portion 131 and the block support coupling portion 130b may be coupled through the connection member.
  • the connecting member may be a bolt.
  • the block support coupling portion 130b is formed of three pipes, but the number of pipes is not limited to this. Additionally, the block support coupling portion 130b is a component that connects the block support portion 131 and the block portion 130, and may be formed in various shapes.
  • the block support coupling portion 130b may be formed of pipes with a narrow cross-sectional area.
  • the temperature of the block 130 may increase under the influence of high-temperature heat coming from the diffusion furnace 10, and heat is conducted to the drive unit 300 through the block support part coupling part 130b and the block support part 131.
  • the block support portion coupling portion 130b is formed in the shape of a pipe with a hollow portion to minimize heat conduction through the solid, and the cross-sectional area of the pipe is also narrow and long to a size where thin connecting members such as bolts can be inserted. Heat transfer can be minimized.
  • FIG. 7 Content not shown in FIG. 7 may refer to FIGS. 1 to 5.
  • Figure 7 is a diagram showing a block portion according to another embodiment of the present invention.
  • Figure 6(a) is a front view of the block part
  • Figure 6(b) is a perspective view of the block part.
  • the block portion 130' may be formed in a square plate shape.
  • a square plate-shaped block portion 130' may be provided in a corresponding shape.
  • FIG. 8 Content not shown in FIG. 8 may refer to FIGS. 1 to 5.
  • FIG. 8 is a view viewed in direction A of FIG. 5, and is a view of the block portion according to an embodiment of the present invention viewed from the side.
  • FIG. 8(a) is a diagram showing a block portion according to an embodiment of the present invention
  • FIG. 8(b) is a diagram showing a block portion according to another embodiment of the present invention.
  • the block support portion coupling portion 130b may be formed to protrude from the block portion 130 by a set length (G) or more.
  • the protruding length of the block support coupling portion 130b is formed to be less than the set length (G)
  • the heat received by the block portion 130 is transmitted to the block support portion 131 through the block support coupling portion 130b structure.
  • the amount transmitted through the air to the block support part 131 and the driving part 300 can also be dramatically increased.
  • the block support part coupling part 130b may be formed to protrude beyond the set distance G.
  • the set distance (G) should be 10 mm or more, and a distance of at least 1 mm or more needs to be maintained.
  • the upper end of the block portion 130'' may be inclined in the direction in which the diffusion path 10 is located. High-temperature heat coming out of the diffusion furnace 10 can move upward through the air. Accordingly, the upper end of the block portion 130'' is inclined in the direction in which the diffusion furnace 10 is located, thereby effectively blocking high-temperature heat moving upward of the driving portion 300.
  • the block portion 130 may be inclined at a first angle ⁇ with respect to an imaginary straight line extending in a direction perpendicular to the direction in which the diffusion path 10 extends. At this time, the first angle ⁇ may be about 10 degrees or less.
  • the block part 130 is provided to be inclined within the range of the above-described first angle, heat moving upward of the driving part 300 can be effectively blocked.
  • first angle exceeds about 10 degrees, the set distance (G) between the block portion 130 and the block support portion 131 may increase, which may increase the overall size of the substrate loading device. You can. Therefore, it may be desirable that the inclination angle of the block portion 130 satisfies the above-mentioned range.
  • Figure 9 is a view showing a portion of a paddle according to another embodiment of the present invention inserted into the interior of a diffusion furnace. Content not shown in FIG. 9 may refer to FIGS. 1 to 5.
  • the diffusion process may be performed while the paddle 120 carrying the boat is disposed inside the diffusion furnace without exiting the diffusion furnace. Therefore, without the need for a separate structure to accommodate the boats inside the diffusion furnace, the diffusion process can be performed with the paddle that transports the boat from outside the diffusion furnace directly entering the diffusion furnace, simplifying the structure of the diffusion furnace. Since the paddle can be loaded and unloaded into the diffusion furnace along with the boat, process speed and process efficiency can be improved.
  • FIG. 10 a diagram showing a substrate loading device including a second transfer unit according to another embodiment of the present invention.
  • Figure 10 is a diagram showing a substrate loading device including a second transfer unit according to another embodiment of the present invention.
  • the substrate loading device includes a second transfer unit 200' having a length L2 shorter than the length L1 of the paddle 120 of the first transfer unit 100. may include.
  • the transfer distance of the boat 110 loaded on the first transfer unit 100 is also shortened, and the takt time (Takt) of the repeated diffusion process is shortened. It provides the effect of saving time) or power required for transportation.
  • connection of lines or the absence of connections between components shown in the drawings exemplify functional connections and/or physical or circuit connections, and in actual devices, various functional connections or physical connections may be replaced or added. It can be expressed as connections, or circuit connections. Additionally, if there is no specific mention such as “essential,” “important,” etc., it may not be a necessary component for the application of the present invention.

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Electromagnetism (AREA)
  • Robotics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

A substrate loading device according to an embodiment of the present invention comprises: a boat in which a plurality of substrates are seated; a paddle on which the boat is mounted; a drive unit which loads or unloads the paddle into or from a diffusion furnace; and a block unit which is disposed between the boat and the drive unit and spaced apart from the paddle in a different direction from the extension direction of the paddle, wherein the shape of a plate portion of the block unit has an area of a half to twice the area of an opening of the diffusion furnace.

Description

기판 로딩 장치substrate loading device
본 발명의 실시예들은 기판 로딩 장치에 관한 것이다.Embodiments of the present invention relate to substrate loading devices.
솔라셀은 텍스쳐링 공정, 확산 공정, 산화막 제거 공정, 방지막 코팅 공정, 전극 인쇄 공정, P-N 접합 분리 공정 등을 통해 생산된다. 제조 공정중 확산 공정에 있어서, 기판 로딩 장치를 통해 고온의 확산로 내에 복수의 기판을 투입하고 소스 가스를 투입하여 기판에 P-N 접합을 유도한다.Solar cells are produced through a texturing process, diffusion process, oxide film removal process, barrier coating process, electrode printing process, and P-N junction separation process. In the diffusion process during the manufacturing process, a plurality of substrates are placed into a high-temperature diffusion furnace through a substrate loading device and source gas is introduced to induce P-N bonding on the substrates.
다만 고온의 확산로 내에 복수의 기판을 투입하는 과정에서, 확산로의 도어를 열었을 때 나오는 고온의 열에 의해 기판 로딩 장치가 손상(Damage)을 입어 기판 로딩 장치의 구동이 정상적으로 실행되지 못할 수 있다.However, in the process of putting a plurality of substrates into a high-temperature diffusion furnace, the substrate loading device may be damaged by the high temperature heat emitted when the door of the diffusion furnace is opened, and the substrate loading device may not operate normally.
본 발명의 해결하고자 하는 과제는, 확산로의 도어를 열었을 때 나오는 고온의 열에 의해 기판 로딩 장치를 작동시키는 구동부가 손상되지 않도록 하는 구조를 포함하는 기판 로딩 장치를 제공하는 것이다.The problem to be solved by the present invention is to provide a substrate loading device that includes a structure that prevents the driving unit that operates the substrate loading device from being damaged by high temperature heat emitted when the door of the diffusion furnace is opened.
다만 이러한 과제는 예시적인 것으로, 본 발명의 해결하고자 하는 과제는 이에 한정되지 않는다.However, these problems are illustrative, and the problems to be solved by the present invention are not limited thereto.
본 발명의 일 실시예에 따른 기판 로딩 장치는, 복수의 기판이 안착되는 보트; 상기 보트를 실은 패들; 상기 패들을 확산로 내부로 로딩 또는 언로딩하는 구동부; 및 상기 보트와 상기 구동부 사이에 배치되며, 상기 패들과 상기 패들의 연장 방향과 다른 방향으로 이격된 블락(Block)부를 포함하고, 상기 블락부의 판부 형상은 상기 확산로의 개구부의 0.5배 내지 2배의 면적을 가진다.A substrate loading device according to an embodiment of the present invention includes a boat on which a plurality of substrates are placed; a paddle carrying said boat; a driving unit that loads or unloads the paddle into the diffusion furnace; and a block portion disposed between the boat and the driving unit and spaced apart from the paddle in a direction different from the extension direction of the paddle, wherein the shape of the plate portion of the block portion is 0.5 to 2 times that of the opening of the diffusion path. has an area of
상기 블락부는 확산로의 개구부의 형상과 대응되게 형성될 수 있다.The block portion may be formed to correspond to the shape of the opening of the diffusion path.
상기 블락부는, 상기 패들과 결합되는 패들 결합부; 및 상기 블락부 지지부와 결합되는 블락부 지지부 결합부를 포함할 수 있다.The block portion includes a paddle coupling portion coupled to the paddle; And it may include a block support portion coupled to the block support portion.
상기 블락부 지지부 결합부는 기 설정 길이(G) 이상 돌출 형성될 수 있다.The block support part coupling part may be formed to protrude more than a preset length (G).
상기 블락부의 상단부는 상기 확산로가 위치한 방향으로 기울어져 형성될 수 있다.The upper end of the block may be inclined in the direction in which the diffusion path is located.
상기 구동부 및 상기 패들은 제2 이송부를 타고 이동될 수 있다.The driving unit and the paddle may be moved by riding on the second transport unit.
상기 제2 이송부의 길이 방향은 상기 구동부 및 상기 패들의 이동 방향과 평행하게 형성될 수 있다.The longitudinal direction of the second transfer unit may be parallel to the moving direction of the driving unit and the paddle.
상기 제2 이송부의 길이는 상기 패들의 길이보다 더 짧을 수 있다.The length of the second transfer unit may be shorter than the length of the paddle.
상기 블락부는 그라파이트, 세라믹, SIC, SUS 중 적어도 어느 하나로 형성될 수 있다.The block portion may be formed of at least one of graphite, ceramic, SIC, and SUS.
상기 확산로의 확산 공정 시, 상기 블락부는 상기 확산로 외측에 배치되며 상기 확산로를 차폐하는 도어와 이격될 수 있다.During the diffusion process of the diffusion furnace, the block portion may be disposed outside the diffusion furnace and spaced apart from the door that shields the diffusion passage.
전술한 것 외의 다른 측면, 특징, 이점은 이하의 발명을 실시하기 위한 구체적인 내용, 청구범위 및 도면으로부터 명확해질 것이다.Other aspects, features and advantages other than those described above will become apparent from the detailed description, claims and drawings for carrying out the invention below.
본 발명의 실시예들에 따른 기판 로딩 장치는, 블락부를 통해 확산로로부터 방출되는 고온의 열을 막아 구동부 및 패들과 연결되는 부분의 손상을 방지할 수 있다.The substrate loading device according to embodiments of the present invention can prevent damage to the part connected to the driving part and the paddle by blocking high temperature heat emitted from the diffusion furnace through the block part.
본 발명의 효과들은 이상에서 언급한 효과들로 제한되지 않으며, 언급되지 않은 또 다른 효과들은 청구범위의 기재로부터 당업자에게 명확하게 이해될 수 있을 것이다.The effects of the present invention are not limited to the effects mentioned above, and other effects not mentioned will be clearly understood by those skilled in the art from the description of the claims.
도 1은 본 발명의 일 실시예에 따른 기판 로딩 장치를 나타낸 사시도이다.1 is a perspective view showing a substrate loading device according to an embodiment of the present invention.
도 2는 본 발명의 일 실시예에 따른 기판 로딩 장치를 도 1과 다른 측면에서 바라본 사시도이다.Figure 2 is a perspective view of a substrate loading device according to an embodiment of the present invention, viewed from a different side than Figure 1.
도 3은 보트를 확산로 내부에 수송한 후 패들만 밖으로 나오는 모습을 나타낸 도면이다.Figure 3 is a diagram showing how only the paddle comes out after transporting the boat inside the diffusion furnace.
도 4는 본 발명의 일 실시예에 따른 기판 로딩 장치의 제1 이송부가 구동부에 의해 이동되는 모습을 나타낸 도면이다.Figure 4 is a diagram showing the first transfer unit of the substrate loading device according to an embodiment of the present invention being moved by the driving unit.
도 5는 본 발명의 일 실시예에 따른 기판 로딩 장치의 블락부 부분을 확대한 도면이다.Figure 5 is an enlarged view of the block portion of the substrate loading device according to an embodiment of the present invention.
도 6은 본 발명의 일 실시예에 따른 블락부를 나타낸 도면이다. 도 6(a)는 블락부의 정면도, 도 6(b)는 블락부의 사시도이다.Figure 6 is a diagram showing a block portion according to an embodiment of the present invention. Figure 6(a) is a front view of the block part, and Figure 6(b) is a perspective view of the block part.
도 7은 본 발명의 다른 일 실시예에 따른 블락부를 나타낸 도면이다. 도 6(a)는 블락부의 정면도, 도 6(b)는 블락부의 사시도이다.Figure 7 is a diagram showing a block portion according to another embodiment of the present invention. Figure 6(a) is a front view of the block part, and Figure 6(b) is a perspective view of the block part.
도 8은 도 5의 A 방향을 바라본 도면으로, 본 발명의 일 실시예에 따른 블락부를 측면에서 바라본 도면이다. 도 8(a)는 본 발명의 일 실시예에 따른 블락부, 도 8(b)는 본 발명의 다른 일 실시예에 따른 블락부를 나타낸 도면이다.FIG. 8 is a view viewed in direction A of FIG. 5, and is a view of the block portion according to an embodiment of the present invention viewed from the side. FIG. 8(a) is a diagram showing a block portion according to an embodiment of the present invention, and FIG. 8(b) is a diagram showing a block portion according to another embodiment of the present invention.
도 9는 본 발명의 다른 일 실시예에 따른 패들의 일부가 확산로의 내부에 삽입된 모습을 나타낸 도면이다.Figure 9 is a view showing a portion of a paddle according to another embodiment of the present invention inserted into the interior of a diffusion furnace.
도 10은 본 발명의 다른 일 실시예에 따른 제2 이송부를 포함하는 기판 로딩 장치를 나타낸 도면이다.Figure 10 is a diagram showing a substrate loading device including a second transfer unit according to another embodiment of the present invention.
본 발명은 다양한 변환을 가할 수 있고 여러 가지 실시예를 가질 수 있는 바, 특정 실시예들을 도면에 예시하고 발명의 설명에 상세하게 설명하고자 한다. 그러나, 이는 본 발명을 특정한 실시예로 한정하려는 것이 아니며, 본 발명의 사상 및 기술 범위에 포함되는 모든 변환, 균등물 내지 대체물을 포함하는 것으로 이해되어야 한다. 본 발명을 설명함에 있어서 다른 실시예에 도시되어 있다 하더라도, 동일한 구성요소에 대하여서는 동일한 식별부호를 사용한다.Since the present invention can be modified in various ways and can have various embodiments, specific embodiments will be illustrated in the drawings and described in detail in the description of the invention. However, this is not intended to limit the present invention to specific embodiments, and should be understood to include all transformations, equivalents, and substitutes included in the spirit and technical scope of the present invention. In describing the present invention, the same identification numbers are used for the same components even if they are shown in different embodiments.
이하, 첨부된 도면을 참조하여 본 발명의 실시예들을 상세히 설명하기로 하며, 도면을 참조하여 설명할 때 동일하거나 대응하는 구성 요소는 동일한 도면부호를 부여하고 이에 대한 중복되는 설명은 생략하기로 한다. Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. When describing with reference to the drawings, identical or corresponding components will be assigned the same reference numerals and redundant description thereof will be omitted. .
이하의 실시예에서, 제1, 제2 등의 용어는 한정적인 의미가 아니라 하나의 구성 요소를 다른 구성 요소와 구별하는 목적으로 사용되었다.In the following embodiments, terms such as first and second are used not in a limiting sense but for the purpose of distinguishing one component from another component.
이하의 실시예에서, 단수의 표현은 문맥상 명백하게 다르게 뜻하지 않는 한, 복수의 표현을 포함한다.In the following examples, singular terms include plural terms unless the context clearly dictates otherwise.
이하의 실시예에서, 포함하다 또는 가지다 등의 용어는 명세서상에 기재된 특징, 또는 구성요소가 존재함을 의미하는 것이고, 하나 이상의 다른 특징들 또는 구성요소가 부가될 가능성을 미리 배제하는 것은 아니다.In the following embodiments, terms such as include or have mean the presence of features or components described in the specification, and do not exclude in advance the possibility of adding one or more other features or components.
도면에서는 설명의 편의를 위하여 구성 요소들이 그 크기가 과장 또는 축소될 수 있다. 예컨대, 도면에서 나타난 각 구성의 크기 및 두께는 설명의 편의를 위해 임의로 나타냈으므로, 본 발명이 반드시 도시된 바에 한정되지 않는다.In the drawings, the sizes of components may be exaggerated or reduced for convenience of explanation. For example, the size and thickness of each component shown in the drawings are shown arbitrarily for convenience of explanation, so the present invention is not necessarily limited to what is shown.
어떤 실시예가 달리 구현 가능한 경우에 특정한 공정 순서는 설명되는 순서와 다르게 수행될 수도 있다. 예를 들어, 연속하여 설명되는 두 공정이 실질적으로 동시에 수행될 수도 있고, 설명되는 순서와 반대의 순서로 진행될 수 있다.In cases where an embodiment can be implemented differently, a specific process sequence may be performed differently from the described sequence. For example, two processes described in succession may be performed substantially at the same time, or may be performed in an order opposite to that in which they are described.
본 출원에서 사용한 용어는 단지 특정한 실시예를 설명하기 위해 사용된 것으로, 본 발명을 한정하려는 의도가 아니다. 본 출원에서, "포함하다" 또는 "가지다" 등의 용어는 명세서 상에 기재된 특징, 숫자, 단계, 동작, 구성요소, 부품 또는 이들을 조합한 것이 존재함을 지정하려는 것이지, 하나 또는 그 이상의 다른 특징들이나 숫자, 단계, 동작, 구성요소, 부품 또는 이들을 조합한 것들의 존재 또는 부가 가능성을 미리 배제하지 않는 것으로 이해되어야 한다.The terms used in this application are only used to describe specific embodiments and are not intended to limit the invention. In this application, terms such as “comprise” or “have” are intended to designate the presence of features, numbers, steps, operations, components, parts, or combinations thereof described in the specification, but are not intended to indicate the presence of one or more other features. It should be understood that this does not exclude in advance the possibility of the existence or addition of elements, numbers, steps, operations, components, parts, or combinations thereof.
이하, 도 1 내지 도 4를 참조하여, 본 발명의 일 실시예에 따른 기판 로딩 장치에 대해 설명한다.Hereinafter, with reference to FIGS. 1 to 4, a substrate loading device according to an embodiment of the present invention will be described.
도 1은 본 발명의 일 실시예에 따른 기판 로딩 장치를 나타낸 사시도이다. 도 2는 본 발명의 일 실시예에 따른 기판 로딩 장치를 도 1과 다른 측면에서 바라본 사시도이다. 도 3은 보트를 확산로 내부에 수송한 후 패들만 밖으로 나오는 모습을 나타낸 도면이다. 도 4는 본 발명의 일 실시예에 따른 기판 로딩 장치의 제1 이송부가 구동부에 의해 이동되는 모습을 나타낸 도면이다.1 is a perspective view showing a substrate loading device according to an embodiment of the present invention. Figure 2 is a perspective view of a substrate loading device according to an embodiment of the present invention, viewed from a different side than Figure 1. Figure 3 is a diagram showing how only the paddle comes out after transporting the boat inside the diffusion furnace. Figure 4 is a diagram showing the first transfer unit of the substrate loading device according to an embodiment of the present invention being moved by the driving unit.
도 1 내지 도 4를 참조하면, 본 발명의 일 실시예에 따른 기판 로딩 장치(1)는, 복수의 기판이 안착되는 보트(110), 보트(110)를 실은 패들(120), 패들을 확산로(10) 내부로 로딩 또는 언로딩하는 구동부(300) 및 보트(110)와 구동부(300) 사이에 배치되며, 패들(120)과 패들의 연장 방향과 다른 방향으로 이격된 블락부(130)를 포함하고, 블락부(130)의 판부 형상은 확산로(10)의 개구부의 0.5배 내지 2배의 면적을 가진다.1 to 4, the substrate loading device 1 according to an embodiment of the present invention includes a boat 110 on which a plurality of substrates are seated, a paddle 120 carrying the boat 110, and a spreading paddle. A driving unit 300 for loading or unloading into the furnace 10 and a block unit 130 disposed between the boat 110 and the driving unit 300 and spaced apart in a direction different from the extension direction of the paddle 120 and the paddle. It includes, and the plate shape of the block portion 130 has an area of 0.5 to 2 times the opening of the diffusion path 10.
보트(110)에는 복수의 기판이 안착될 수 있다. 보트(110)의 내부 공간의 하부에는 복수의 얇은 기판을 끼울 수 있는 홈이 마련될 수 있다. 기판은 보트(110)에 일렬로 구비될 수 있다. 이를 통해 확산로 내부에 들어갔을 때 기판의 열처리 공정시 공정 효율을 높일 수 있다.A plurality of substrates may be mounted on the boat 110. A groove into which a plurality of thin substrates can be inserted may be provided in the lower part of the internal space of the boat 110. The substrates may be provided in a row on the boat 110. Through this, process efficiency can be increased during the heat treatment process of the substrate when it enters the diffusion furnace.
복수의 기판은, 보트(110)의 내부에 안착된 상태로 패들(120)을 통해 확산로(10) 내부로 이송될 수 있다. 패들(120)의 형상은 확산로 진입 방향을 길이 방향으로 하여 형성될 수 있다. 패들(120)은 복수의 파이프부가 나란하게 연장 형성될 수 있다.A plurality of substrates may be transported into the diffusion path 10 through the paddle 120 while being seated inside the boat 110 . The shape of the paddle 120 may be formed so that the diffusion path entry direction is the longitudinal direction. The paddle 120 may have a plurality of pipe parts extending in parallel.
구동부(300)는 패들(120)과 연결될 수 있다. 패들(120)은 구동부(300)에 의해 이동될 수 있다. 도 4를 참조하면, 패들(120)은 구동부(300)와 함께 패들(120)의 길이 방향으로 이동될 수 있다.The driving unit 300 may be connected to the paddle 120. The paddle 120 may be moved by the driving unit 300. Referring to FIG. 4 , the paddle 120 may be moved in the longitudinal direction of the paddle 120 together with the driving unit 300 .
구동부(300)는 제2 이송부(200)와 연결될 수 있다. 제2 이송부(200)는 레일 형상으로 형성되고, 구동부(300)는 제2 이송부(200)를 기준으로, 레일 형상의 제2 이송부(200)의 길이 방향을 따라 제2 이송부(200)를 타고 이동하면서, 구동부(300)와 결합된 패들(120)을 확산로(10) 내부로 이동시킬 수 있다. 이때 제2 이송부(200)의 길이 방향은 구동부(300) 및 패들(120)의 이동 방향과 평행하게 형성될 수 있다.The driving unit 300 may be connected to the second transfer unit 200. The second transfer unit 200 is formed in a rail shape, and the drive unit 300 rides the second transfer unit 200 along the longitudinal direction of the rail-shaped second transfer unit 200, with the second transfer unit 200 as a reference. While moving, the paddle 120 coupled with the driving unit 300 can be moved inside the diffusion path 10. At this time, the longitudinal direction of the second transfer unit 200 may be formed parallel to the moving direction of the drive unit 300 and the paddle 120.
구동부(300)는 제2 이송부(200)의 고정 프레임(212)과 연결될 수 있다. 제2 이송부(200)는 연결 블록(260)을 포함할 수 있다. 연결 블록(260)은 연결 부재(214)에 의해 고정 프레임(212)과 연결될 수 있다. The driving unit 300 may be connected to the fixed frame 212 of the second transfer unit 200. The second transfer unit 200 may include a connection block 260. The connection block 260 may be connected to the fixed frame 212 by a connection member 214.
연결 블록(260)에는 승강 부재(262)가 형성될 수 있다. 승강 부재(262)는 연결 블록(260) 및 구동부(300)와 결합될 수 있다. 구동부(300)는 승강 부재(262)를 통해 제2 이송부(200)를 기준으로 상하 방향으로 승강될 수 있다. 또한 구동부(300)와 연결된 제1 이송부(100)도 상하 방향으로 승강될 수 있다.A lifting member 262 may be formed on the connection block 260. The lifting member 262 may be combined with the connection block 260 and the driving unit 300. The driving unit 300 may be lifted up and down with respect to the second transfer unit 200 through the lifting member 262 . Additionally, the first transfer unit 100 connected to the drive unit 300 may also be lifted up and down.
제2 이송부(200)는 제1 구동 수단(261)을 구비할 수 있다. 제1 구동 수단(261)은 모터를 포함할 수 있다. 제1 구동 수단(261)에 의해 제1 이송부(100)가 구동되며, 패들(120)이 확산로(10)의 내부로 이동될 수 있다.The second transfer unit 200 may be provided with a first driving means 261. The first driving means 261 may include a motor. The first transfer unit 100 is driven by the first driving means 261, and the paddle 120 can be moved into the diffusion path 10.
제2 모터(230)의 회전력은 기어 박스(240)에 의해 회전 방향이 전환될 수 있다. 기어 박스(240)는 베벨 기어 등으로 이루어질 수 있고, 기어 박스(240)의 양측으로 동력 전달축(250)이 연결되어 있으므로, 제2 모터(230)의 회전력은 기어 박스(240)를 통해 양측의 동력 전달축(250)으로 전달되며, 동력 전달축(250)은 회전될 수 있다.The rotation direction of the rotational force of the second motor 230 may be changed by the gear box 240. The gear box 240 may be made of a bevel gear, etc., and the power transmission shaft 250 is connected to both sides of the gear box 240, so the rotational force of the second motor 230 is transmitted to both sides through the gear box 240. It is transmitted to the power transmission shaft 250, and the power transmission shaft 250 can be rotated.
동력 전달축(250)의 회전력은 승강 부재(262)에 전달되고, 승강 부재(262)는 상하 방향으로 승강될 수 있다. 승강 부재(262)가 승강되면, 연결 블록(260)도 동시에 승강될 수 있다. 연결 블록(260)의 승강 동작에 따라 구동부(300)와 결합된 고정 프레임(212)도 상하로 동작할 수 있다.The rotational force of the power transmission shaft 250 is transmitted to the lifting member 262, and the lifting member 262 can be moved up and down. When the lifting member 262 is lifted and lowered, the connection block 260 may also be lifted and lowered at the same time. The fixed frame 212 coupled to the driving unit 300 may also move up and down as the connection block 260 moves up and down.
도 1 내지 도 3을 참조하면, 확산로(10)는 도어(11)를 포함할 수 있다. 도어(11)가 열리면, 보트(110)를 실은 패드(120)가 확산로(10) 내부로 이동될 수 있다. 패드(120)는 복수의 기판이 안착된 보트(110)를 확산로(10) 내부에 로딩시킨 후 다시 확산로(10) 바깥으로 빠져나올 수 있다. 즉, 도어(11)는 확산로(10)를 차폐할 수 있다.1 to 3, the diffusion furnace 10 may include a door 11. When the door 11 is opened, the pad 120 carrying the boat 110 can be moved into the diffusion furnace 10. The pad 120 may load the boat 110 on which a plurality of substrates are seated into the diffusion path 10 and then exit the diffusion path 10 again. That is, the door 11 can shield the diffusion path 10.
본 발명의 일 실시예에 따르면, 보트(110)와 구동부(300) 사이에 배치된 블락(Block)부(130)를 포함할 수 있다. 보트(110)를 확산로(10)의 내부로 이송시킬 때, 확산로(10)의 도어(11)를 열게 되는데, 도어(11)를 엶에 따라 확산로(10) 내부에서 나오는 고온의 열에 의해 구동부(300)가 손상될 수 있다. 특히, 구동부(300)와 패들(120)의 연결부, 구동부(300)와 연결된 센서부(미도시) 등이 고온의 열에 의해 손상될 우려가 있다.According to one embodiment of the present invention, it may include a block unit 130 disposed between the boat 110 and the driving unit 300. When transporting the boat 110 into the diffusion furnace 10, the door 11 of the diffusion furnace 10 is opened. As the door 11 is opened, the high temperature heat coming from the inside of the diffusion furnace 10 The driving unit 300 may be damaged. In particular, there is a risk that the connection portion between the drive unit 300 and the paddle 120 and the sensor unit (not shown) connected to the drive unit 300 may be damaged by high temperature heat.
이에 본 실시예에 따르면, 보트(110)와 구동부(300) 사이에 블락부(130)가 배치되어, 보트(110)가 수용되는 확산로(10)로부터 나오는 고온의 열이 구동부(300)로 전달되는 것을 차단시킬 수 있다. 이를 통해 구동부(300)를 확산로(10)의 고온의 열로부터 보호함으로써 구동부(300)의 성능을 유지할 수 있으며, 이를 통해 보트(110)가 확산로(10) 내부에 로딩 또는 언로딩 되는 공정의 신뢰성을 확보할 수 있다.Accordingly, according to this embodiment, the block unit 130 is disposed between the boat 110 and the driving unit 300, so that the high temperature heat coming from the diffusion furnace 10 in which the boat 110 is accommodated is transferred to the driving unit 300. Transmission can be blocked. Through this, the performance of the driving unit 300 can be maintained by protecting the driving unit 300 from the high temperature heat of the diffusion furnace 10, and through this, the boat 110 is loaded or unloaded into the diffusion furnace 10. reliability can be secured.
블락부(130)는 그라파이트, 세라믹, SIC, SUS 중 적어도 어느 하나로 형성될 수 있다. 바람직하게는 상기 소재 중 상대적으로 열전도율이 낮은 소재로 형성될 수 있다.The block portion 130 may be formed of at least one of graphite, ceramic, SIC, and SUS. Preferably, it may be formed of a material with relatively low thermal conductivity among the above materials.
즉, 본 실시예에 따르면, 확산로(10) 내에서 공정이 진행될 경우 도어(11) 닫힌 상태를 유지할 수 있다. 또한, 블락부(130)는 도어(11)의 외측에서 도어(11)와 마주하며 배치될 수 있고 소정의 간격 이격될 수 있다. 이와 다르게 확산로(10) 내에 보트(110)를 이송하거나, 확산로(10) 내에 배치된 보트(110)를 배출할 경우 도어(11)는 개방될 수 있다. 또한, 블락부(130)는 보트(110)와 마주하며 확산로(10)의 열을 차단할 수 있다.That is, according to this embodiment, when the process proceeds within the diffusion furnace 10, the door 11 can be maintained in a closed state. Additionally, the block portion 130 may be disposed on the outside of the door 11 facing the door 11 and may be spaced apart by a predetermined distance. Alternatively, when transporting the boat 110 within the diffusion furnace 10 or discharging the boat 110 placed within the diffusion furnace 10, the door 11 may be opened. Additionally, the block portion 130 faces the boat 110 and can block heat from the diffusion path 10.
이하, 도 5 및 도 6을 참조하여, 본 발명의 일 실시예에 따른 기판 로딩 장치의 블락부에 대해 보다 상세히 설명한다. 도 5 및 도 6에 도시되지 않은 내용은 도 1 내지 도 4를 참조할 수 있다.Hereinafter, with reference to FIGS. 5 and 6, the block portion of the substrate loading device according to an embodiment of the present invention will be described in more detail. Content not shown in FIGS. 5 and 6 may refer to FIGS. 1 to 4.
도 5는 본 발명의 일 실시예에 따른 기판 로딩 장치의 블락부 부분을 확대한 도면이다. 도 6은 본 발명의 일 실시예에 따른 블락부를 나타낸 도면이다. 도 6(a)는 블락부의 정면도, 도 6(b)는 블락부의 사시도이다.Figure 5 is an enlarged view of the block portion of the substrate loading device according to an embodiment of the present invention. Figure 6 is a diagram showing a block portion according to an embodiment of the present invention. Figure 6(a) is a front view of the block part, and Figure 6(b) is a perspective view of the block part.
본 실시예에 따르면, 블락부(130)는 얇은 판 형상으로 형성될 수 있다. 판 형상의 블락부(130)는, 블락부(130)의 판부가 확산로(10)가 위치한 방향을 향하도록 배치될 수 있다.According to this embodiment, the block portion 130 may be formed in a thin plate shape. The plate-shaped block portion 130 may be arranged so that the plate portion of the block portion 130 faces the direction in which the diffusion path 10 is located.
본 실시예에 따르면, 블락부(130)는 확산로(10)의 개구부(O)의 형상과 대응되는 형상으로 형성될 수 있다. 확산로(10)의 개구부(O)가 원형 형상으로 형성되어 있으므로, 블락부(130)의 형상 또한 원형 형상으로 형성될 수 있다.According to this embodiment, the block portion 130 may be formed in a shape corresponding to the shape of the opening O of the diffusion path 10. Since the opening O of the diffusion path 10 is formed in a circular shape, the shape of the block portion 130 may also be formed in a circular shape.
블락부(130)의 판부 형상은 확산로(10)의 개구부(O)의 0.5배 내지 2배의 면적을 가질 수 있다. 블락부(130)의 판부 면적이 개구부(O)의 0.5배 미만일 경우에는, 확산로(10)에서 나오는 고온의 열을 블락부(130)가 차단하기 어려워질 수 있다. 또한 블락부(130)의 판부 면적이 개구부(O)의 2배 초과일 경우에는, 기판 로딩 장치 설치시 제2 이송부(200) 및 주변 부품들과의 간섭이 생길 수 있다.The plate shape of the block portion 130 may have an area of 0.5 to 2 times that of the opening O of the diffusion path 10. If the plate area of the block portion 130 is less than 0.5 times the opening O, it may become difficult for the block portion 130 to block high temperature heat coming from the diffusion furnace 10. Additionally, if the area of the plate part of the block part 130 is more than twice that of the opening O, interference with the second transfer part 200 and surrounding components may occur when installing the substrate loading device.
블락부(130)는, 패들(120)과 결합되는 패들 결합부(130a) 및 블락부 지지부(131)와 결합되는 블락부 지지부 결합부(130b)를 포함할 수 있다.The block portion 130 may include a paddle coupling portion 130a coupled to the paddle 120 and a block support portion coupling portion 130b coupled to the block support portion 131.
패들 결합부(130a)는 패들(120)의 복수의 원통형 형상과 대응되도록, 반원형으로 함몰될 복수의 반원형 함몰부가 연속된 형상으로 형성될 수 있다. 이를 통해 패들 결합부(130a)는 패들(120)에 끼움 결합되어 패들(120)에 고정될 수 있다.The paddle coupling portion 130a may be formed in a continuous shape with a plurality of semicircular depressions to correspond to the plurality of cylindrical shapes of the paddle 120. Through this, the paddle coupling portion 130a can be fitted into the paddle 120 and fixed to the paddle 120.
도 6을 참조하면, 패들 결합부(130a)의 반경(R2)은, 패들(120) 중 하나의 파이프부의 반경(R1)보다 더 클 수 있다. 예를 들면, 패들 결합부(130a)의 반경(R2)은, 패들(120) 중 하나의 파이프부의 반경(R1)보다 1퍼센트 이상 더 클 수 있다. 또한 패들(120)과 블락부(130)는 이격될 수 있다. 자세하게, 패들(120)과 블록브(130)는 패들(120)의 연장 방향과 다른 방향으로 이격될 수 있다. 자세하게 패들(120)중 하나의 파이프부와 패들 결합부(130a) 사이는 짧은 거리(d)로 이격 형성될 수 있다. 상기 짧은 거리(d)를 통해 패들(120)과 블락부(130)의 결합 공차가 형성될 수 있다. 예를 들면 짧은 거리(d)는 0.5mm 이하일 수 있다. 상기 거리(d)만큼 이격됨에 따라 블락부(130)는 패들(120) 상에서 패들(120)과 마찰없이 움직일 수 있고, 패들(120)과 패들 결합부(130a) 사이의 틈(공간)으로 확산로(10)의 열이 방출되는 것을 제어할 수 있다. 따라서 상기 거리(d)는 상술한 범위를 만족하는 것이 바람직하다. Referring to FIG. 6, the radius R2 of the paddle coupling portion 130a may be larger than the radius R1 of the pipe portion of one of the paddles 120. For example, the radius R2 of the paddle coupling portion 130a may be greater than the radius R1 of the pipe portion of one of the paddles 120 by more than 1 percent. Additionally, the paddle 120 and the block portion 130 may be spaced apart. In detail, the paddle 120 and the block 130 may be spaced apart in a direction different from the direction in which the paddle 120 extends. In detail, the pipe portion of one of the paddles 120 and the paddle coupling portion 130a may be spaced apart by a short distance d. A coupling tolerance between the paddle 120 and the block portion 130 can be formed through the short distance d. For example, the short distance (d) may be 0.5 mm or less. As the block portion 130 is spaced apart by the distance d, it can move without friction with the paddle 120 and spreads into the gap (space) between the paddle 120 and the paddle coupling portion 130a. The emission of heat from the furnace 10 can be controlled. Therefore, it is desirable that the distance d satisfies the above-mentioned range.
블락부 지지부(131)는 구동부(300)로부터 블락부(130)가 위치한 방향으로 돌출 형성되고, 구동부(300)와 블락부(130)를 연결함과 동시에, 블락부(130)를 구동부(300)에 고정 및 지지할 수 있다. 블락부 지지부(131)는 블락부 지지부 결합부(130b)를 통해 블락부(130)와 결합될 수 있다.The block support part 131 protrudes from the driving part 300 in the direction in which the block part 130 is located, connects the driving part 300 and the block part 130, and connects the block part 130 to the driving part 300. ) can be fixed and supported. The block support portion 131 may be coupled to the block portion 130 through the block support coupling portion 130b.
본 실시예에 따르면, 블락부 지지부(131) 및 블락부(130)를 연결하는 블락부 지지부 결합부(130b)를 포함할 수 있다. 도 6을 참조하면, 블락부 지지부 결합부(130b)는 세 개의 얇은 파이프가 나란히 형성될 수 있다. 블락부 지지부 결합부(130b)의 파이프 내부에는 연결부재가 결합될 수 있다. 연결부재를 통해 블락부 지지부(131)와 블락부 지지부 결합부(130b)가 결합될 수 있다. 예를 들면, 연결 부재는 볼트일 수 있다. 본 실시예에 따르면 블락부 지지부 결합부(130b)의 파이프는 세 개로 형성되어 있으나, 파이프의 개수는 이에 한정되지 아니한다. 또한 블락부 지지부 결합부(130b)는 블락부 지지부(131)와 블락부(130)를 연결하는 구성으로서, 다양한 형상으로 형성될 수 있다.According to this embodiment, it may include a block support portion 130b connecting the block support portion 131 and the block portion 130. Referring to FIG. 6, the block support coupling portion 130b may be formed of three thin pipes side by side. A connecting member may be coupled to the inside of the pipe of the block support coupling portion 130b. The block support portion 131 and the block support coupling portion 130b may be coupled through the connection member. For example, the connecting member may be a bolt. According to this embodiment, the block support coupling portion 130b is formed of three pipes, but the number of pipes is not limited to this. Additionally, the block support coupling portion 130b is a component that connects the block support portion 131 and the block portion 130, and may be formed in various shapes.
본 실시예에 따르면, 블락부 지지부 결합부(130b)는 좁은 단면적을 가진 파이프들로 형성될 수 있다. 즉, 블락부(130)는 확산로(10)에서 나오는 고온의 열의 영향을 받아 온도가 높아질 수 있는데, 블락부 지지부 결합부(130b) 및 블락부 지지부(131)를 통해서 구동부(300)로 열전도가 일어날 우려가 있다. 이에 블락부 지지부 결합부(130b)는 중공부가 마련된 파이프 형상으로 형성되어 고체를 통한 열전도를 최소화하고, 파이프의 단면적도 볼트 등의 얇은 연결 부재가 삽입될 수 있는 크기로 좁고 길게 형성되어 고체를 통한 열전달을 최소화할 수 있다.According to this embodiment, the block support coupling portion 130b may be formed of pipes with a narrow cross-sectional area. In other words, the temperature of the block 130 may increase under the influence of high-temperature heat coming from the diffusion furnace 10, and heat is conducted to the drive unit 300 through the block support part coupling part 130b and the block support part 131. There is a risk that this will happen. Accordingly, the block support portion coupling portion 130b is formed in the shape of a pipe with a hollow portion to minimize heat conduction through the solid, and the cross-sectional area of the pipe is also narrow and long to a size where thin connecting members such as bolts can be inserted. Heat transfer can be minimized.
이하, 도 7을 참조하여 본 발명의 다른 일 실시예에 따른 블락부에 대해 설명한다. 도 7에 도시되지 않은 내용은 도 1 내지 도 5를 참조할 수 있다.Hereinafter, a block portion according to another embodiment of the present invention will be described with reference to FIG. 7. Content not shown in FIG. 7 may refer to FIGS. 1 to 5.
도 7은 본 발명의 다른 일 실시예에 따른 블락부를 나타낸 도면이다. 도 6(a)는 블락부의 정면도, 도 6(b)는 블락부의 사시도이다.Figure 7 is a diagram showing a block portion according to another embodiment of the present invention. Figure 6(a) is a front view of the block part, and Figure 6(b) is a perspective view of the block part.
도 7을 참조하면, 본 발명의 다른 일 실시예에 따른 블락부(130')는 사각 판 형상으로 형성될 수 있다. 예를 들면, 확산로의 개구부 형상이 사각 형상일 때, 그에 대응되는 형상으로 사각 판 형상의 블락부(130')가 마련될 수 있다.Referring to FIG. 7, the block portion 130' according to another embodiment of the present invention may be formed in a square plate shape. For example, when the opening of the diffusion path is square in shape, a square plate-shaped block portion 130' may be provided in a corresponding shape.
이하, 도 8을 참조하여 본 발명의 일 실시예 및 다른 일 실시예에 따른 블락부의 측면 구조에 대해 설명한다. 도 8에 도시되지 않은 내용은 도 1 내지 도 5를 참조할 수 있다.Hereinafter, the side structure of the block portion according to one embodiment and another embodiment of the present invention will be described with reference to FIG. 8. Content not shown in FIG. 8 may refer to FIGS. 1 to 5.
도 8은 도 5의 A 방향을 바라본 도면으로, 본 발명의 일 실시예에 따른 블락부를 측면에서 바라본 도면이다. 도 8(a)는 본 발명의 일 실시예에 따른 블락부, 도 8(b)는 본 발명의 다른 일 실시예에 따른 블락부를 나타낸 도면이다.FIG. 8 is a view viewed in direction A of FIG. 5, and is a view of the block portion according to an embodiment of the present invention viewed from the side. FIG. 8(a) is a diagram showing a block portion according to an embodiment of the present invention, and FIG. 8(b) is a diagram showing a block portion according to another embodiment of the present invention.
도 8(a)을 참조하면, 본 발명의 일 실시예에 따른 블락부 지지부 결합부(130b)는 블락부(130)로부터 설정 길이(G) 이상 돌출 형성될 수 있다. 블락부 지지부 결합부(130b)의 돌출 길이가 설정 길이(G) 미만으로 형성될 경우, 블락부(130)가 받은 열이 블락부 지지부 결합부(130b) 구조체를 통해 블락부 지지부(131)로 전달되는 양에 더하여, 공기를 통해 블락부 지지부(131) 및 구동부(300)로 전달되는 양도 획기적으로 증가할 수 있다. 이에 블락부(130)와 블락부 지지부(131) 간의 최소 설정 거리(G)를 유지하도록 블락부 지지부 결합부(130b)가 설정 거리(G) 이상으로 돌출 형성될 수 있다. 바람직하게는, 설정 거리(G)는 10mm 이상이 되어야 하며, 최소한 1mm 이상의 거리는 유지할 필요가 있다.Referring to FIG. 8(a), the block support portion coupling portion 130b according to an embodiment of the present invention may be formed to protrude from the block portion 130 by a set length (G) or more. When the protruding length of the block support coupling portion 130b is formed to be less than the set length (G), the heat received by the block portion 130 is transmitted to the block support portion 131 through the block support coupling portion 130b structure. In addition to the amount transmitted, the amount transmitted through the air to the block support part 131 and the driving part 300 can also be dramatically increased. Accordingly, in order to maintain the minimum set distance (G) between the block part 130 and the block support part 131, the block support part coupling part 130b may be formed to protrude beyond the set distance G. Preferably, the set distance (G) should be 10 mm or more, and a distance of at least 1 mm or more needs to be maintained.
도 8(b)를 참조하면, 본 발명의 다른 일 실시예에 따른 블락부(130'')의 상단부는 확산로(10)가 위치한 방향으로 기울어져 형성될 수 있다. 확산로(10) 밖으로 나온 고온의 열은 공기를 타고 상측 방향으로 이동될 수 있다. 이에 블락부(130'')의 상단부가 확산로(10)가 위치한 방향으로 기울어져 형성됨으로써 구동부(300)의 상측 방향으로 이동하는 고온의 열을 효과적으로 차단할 수 있다. 예를 들어, 블락부(130)는 확산로(10)의 연장방향과 수직인 방향으로 연장하는 가상의 직선에 대해 제1 각도(Θ)로 기울어질 수 있다. 이때, 제1 각도(Θ)는 약 10도 이하일 수 있다. 블락부(130)가 상술한 제1 각도의 범위 내에서 기울어지도록 제공됨에 따라 구동부(300)의 상측 방향으로 이동하는 열을 효과적으로 차단할 수 있다. 예를 들어, 복수의 확산로(10)가 수직 방향으로 이격되어 배치될 경우, 아래에 배치된 확산로(10)에서 방출된 고온의 열이 그 상부에 배치된 제1 이송부(100), 제2 이송부(200) 및 구동부 중 적어도 하나에 제공되는 것을 효과적으로 차단할 수 있다. 또한, 제1 각도가 약 10도를 초과할 경우, 블락부(130)와 블락부 지지부(131) 사이의 설정 거리(G)가 증가할 수 있고, 이로 인해 기판 로딩 장치의 전체적인 크기가 증가할 수 있다. 따라서, 블락부(130)의 경사각은 상술한 범위를 만족하는 것이 바람직할 수 있다.Referring to FIG. 8(b), the upper end of the block portion 130'' according to another embodiment of the present invention may be inclined in the direction in which the diffusion path 10 is located. High-temperature heat coming out of the diffusion furnace 10 can move upward through the air. Accordingly, the upper end of the block portion 130'' is inclined in the direction in which the diffusion furnace 10 is located, thereby effectively blocking high-temperature heat moving upward of the driving portion 300. For example, the block portion 130 may be inclined at a first angle Θ with respect to an imaginary straight line extending in a direction perpendicular to the direction in which the diffusion path 10 extends. At this time, the first angle Θ may be about 10 degrees or less. As the block part 130 is provided to be inclined within the range of the above-described first angle, heat moving upward of the driving part 300 can be effectively blocked. For example, when a plurality of diffusion furnaces 10 are arranged to be spaced apart in the vertical direction, high-temperature heat emitted from the diffusion furnaces 10 disposed below is transferred to the first transfer unit 100 disposed above, the second 2 It is possible to effectively block what is provided to at least one of the transfer unit 200 and the drive unit. In addition, when the first angle exceeds about 10 degrees, the set distance (G) between the block portion 130 and the block support portion 131 may increase, which may increase the overall size of the substrate loading device. You can. Therefore, it may be desirable that the inclination angle of the block portion 130 satisfies the above-mentioned range.
도 9는 본 발명의 다른 일 실시예에 따른 패들의 일부가 확산로의 내부에 삽입된 모습을 나타낸 도면이다. 도 9에 도시되지 않은 내용은 도 1 내지 도 5를 참조할 수 있다.Figure 9 is a view showing a portion of a paddle according to another embodiment of the present invention inserted into the interior of a diffusion furnace. Content not shown in FIG. 9 may refer to FIGS. 1 to 5.
도 9를 참조하면, 확산로(10)의 확산 공정시, 보트를 실은 패들(120)이 확산로를 빠져나오지 않고, 확산로 내부에 배치된 상태로 확산 공정이 진행될 수 있다. 따라서 확산로 내부에 보트들을 수용하는 별도의 구조가 필요 없이, 확산로 밖에서 보트를 이송하는 패들이 직접 확산로 내부로 들어간 상태에서 확산 공정이 수행될 수 있어 확산로의 구조를 보다 단순화시킬 수 있으며, 패들이 보트와 함께 확산로에 로딩 및 언로딩 되면 되므로 공정 속도, 및 공정 효율이 향상될 수 있다.Referring to FIG. 9 , during the diffusion process of the diffusion furnace 10, the diffusion process may be performed while the paddle 120 carrying the boat is disposed inside the diffusion furnace without exiting the diffusion furnace. Therefore, without the need for a separate structure to accommodate the boats inside the diffusion furnace, the diffusion process can be performed with the paddle that transports the boat from outside the diffusion furnace directly entering the diffusion furnace, simplifying the structure of the diffusion furnace. Since the paddle can be loaded and unloaded into the diffusion furnace along with the boat, process speed and process efficiency can be improved.
이하, 도 10을 참조하여 본 발명의 다른 일 실시예에 따른 제2 이송부를 포함하는 기판 로딩 장치를 나타낸 도면이다.Hereinafter, with reference to FIG. 10, a diagram showing a substrate loading device including a second transfer unit according to another embodiment of the present invention.
도 10은 본 발명의 다른 일 실시예에 따른 제2 이송부를 포함하는 기판 로딩 장치를 나타낸 도면이다.Figure 10 is a diagram showing a substrate loading device including a second transfer unit according to another embodiment of the present invention.
도 10을 참조하면, 본 발명의 일 실시예에 따른 기판 로딩 장치는, 제1 이송부(100)의 패들(120)의 길이(L1)보다 짧은 길이(L2)를 가진 제2 이송부(200')를 포함할 수 있다. Referring to FIG. 10, the substrate loading device according to an embodiment of the present invention includes a second transfer unit 200' having a length L2 shorter than the length L1 of the paddle 120 of the first transfer unit 100. may include.
이를 통해 구동부(300)의 이동 거리를 제2 이송부의 길이(L2)로 제한함으로써, 제1 이송부(100)에 실려진 보트(110)의 이송 거리도 단축되어 반복되는 확산 공정의 택타임(Takt time) 또는 이송에 소요되는 동력을 절감하는 효과를 제공한다.Through this, by limiting the movement distance of the drive unit 300 to the length (L2) of the second transfer unit, the transfer distance of the boat 110 loaded on the first transfer unit 100 is also shortened, and the takt time (Takt) of the repeated diffusion process is shortened. It provides the effect of saving time) or power required for transportation.
이와 같이 도면에 도시된 실시예를 참고로 본 발명을 설명하였으나, 이는 예시에 불과하다. 해당 기술 분야에서 통상의 지식을 갖는 자라면 실시예로부터 다양한 변형 및 균등한 다른 실시예가 가능하다는 점을 충분히 이해할 수 있다. 따라서 본 발명의 진정한 기술적 보호 범위는 첨부된 청구범위에 기초하여 정해져야 한다.Although the present invention has been described with reference to the embodiments shown in the drawings, these are merely examples. Those skilled in the art can fully understand that various modifications and equivalent other embodiments are possible from the embodiments. Therefore, the true technical protection scope of the present invention should be determined based on the attached claims.
실시예에서 설명하는 특정 기술 내용은 일 실시예들로서, 실시예의 기술 범위를 한정하는 것은 아니다. 발명의 설명을 간결하고 명확하게 기재하기 위해, 종래의 일반적인 기술과 구성에 대한 기재는 생략될 수 있다. 또한, 도면에 도시된 구성 요소들 간의 선들의 연결 또는 연결 부재는 기능적인 연결 및/또는 물리적 또는 회로적 연결들을 예시적으로 나타낸 것으로서, 실제 장치에서는 대체 가능하거나 추가의 다양한 기능적인 연결, 물리적인 연결, 또는 회로 연결들로 표현될 수 있다. 또한, "필수적인", "중요하게" 등과 같이 구체적인 언급이 없다면 본 발명의 적용을 위하여 반드시 필요한 구성 요소가 아닐 수 있다.The specific technical content described in the embodiment is an example and does not limit the technical scope of the embodiment. In order to describe the invention concisely and clearly, descriptions of conventional general techniques and configurations may be omitted. In addition, the connection of lines or the absence of connections between components shown in the drawings exemplify functional connections and/or physical or circuit connections, and in actual devices, various functional connections or physical connections may be replaced or added. It can be expressed as connections, or circuit connections. Additionally, if there is no specific mention such as “essential,” “important,” etc., it may not be a necessary component for the application of the present invention.
발명의 설명 및 청구범위에 기재된 "상기" 또는 이와 유사한 지시어는 특별히 한정하지 않는 한, 단수 및 복수 모두를 지칭할 수 있다. 또한, 실시 예에서 범위(range)를 기재한 경우 상기 범위에 속하는 개별적인 값을 적용한 발명을 포함하는 것으로서(이에 반하는 기재가 없다면), 발명의 설명에 상기 범위를 구성하는 각 개별적인 값을 기재한 것과 같다. 또한, 실시예에 따른 방법을 구성하는 단계들에 대하여 명백하게 순서를 기재하거나 반하는 기재가 없다면, 상기 단계들은 적당한 순서로 행해질 수 있다. 반드시 상기 단계들의 기재 순서에 따라 실시예들이 한정되는 것은 아니다. 실시예에서 모든 예들 또는 예시적인 용어(예들 들어, 등등)의 사용은 단순히 실시예를 상세히 설명하기 위한 것으로서 청구범위에 의해 한정되지 않는 이상, 상기 예들 또는 예시적인 용어로 인해 실시예의 범위가 한정되는 것은 아니다. 또한, 통상의 기술자는 다양한 수정, 조합 및 변경이 부가된 청구범위 또는 그 균등물의 범주 내에서 설계 조건 및 팩터에 따라 구성될 수 있음을 알 수 있다.“The” or similar designators used in the description and claims may refer to both the singular and the plural, unless otherwise specified. In addition, when a range is described in an example, the invention includes the application of individual values within the range (unless there is a statement to the contrary), and each individual value constituting the range is described in the description of the invention. same. Additionally, unless the order of the steps constituting the method according to the embodiment is clearly stated or there is no description to the contrary, the steps may be performed in an appropriate order. The embodiments are not necessarily limited by the order of description of the steps above. The use of any examples or illustrative terms (e.g., etc.) in the embodiments is merely to describe the embodiments in detail, and unless limited by the claims, the examples or illustrative terms do not limit the scope of the embodiments. That is not the case. Additionally, those skilled in the art will recognize that various modifications, combinations and changes may be made according to design conditions and factors within the scope of the appended claims or equivalents thereof.

Claims (10)

  1. 복수의 기판이 안착되는 보트;A boat on which a plurality of substrates are seated;
    상기 보트를 실은 패들;a paddle carrying said boat;
    상기 패들을 확산로 내부로 로딩 또는 언로딩하는 구동부; 및a driving unit that loads or unloads the paddle into the diffusion furnace; and
    상기 보트와 상기 구동부 사이에 배치되며, 상기 패들과 상기 패들의 연장 방향과 다른 방향으로 이격된 블락(Block)부를 포함하고,It is disposed between the boat and the driving unit, and includes the paddle and a block portion spaced apart in a direction different from the extension direction of the paddle,
    성가 블락부의 판부 형상은 상기 확산로의 개구부의 0.5배 내지 2배의 면적을 가지는 기판 로딩 장치.A substrate loading device in which the shape of the plate portion of the block portion has an area of 0.5 to 2 times that of the opening of the diffusion path.
  2. 제1 항에 있어서,According to claim 1,
    상기 블락부는 확산로의 개구부의 형상과 대응되게 형성되는 기판 로딩 장치.A substrate loading device wherein the block portion is formed to correspond to the shape of the opening of the diffusion path.
  3. 제1 항에 있어서,According to claim 1,
    상기 블락부는,The block part,
    상기 패들과 결합되는 패들 결합부; 및A paddle coupling part coupled to the paddle; and
    블락부 지지부와 결합되는 블락부 지지부 결합부를 포함하는 기판 로딩 장치.A substrate loading device including a block support portion coupled to a block support portion.
  4. 제3 항에 있어서,According to clause 3,
    상기 블락부 지지부 결합부는 기 설정 길이(G) 이상 돌출 형성된 기판 로딩 장치.A substrate loading device in which the block support part coupling part protrudes more than a preset length (G).
  5. 제1 항에 있어서,According to claim 1,
    상기 블락부의 상단부는 상기 확산로가 위치한 방향으로 기울어져 형성되는 기판 로딩 장치.A substrate loading device in which the upper end of the block portion is inclined in the direction in which the diffusion path is located.
  6. 제1 항에 있어서,According to claim 1,
    상기 구동부 및 상기 패들은 제2 이송부를 타고 이동되는 기판 로딩 장치.A substrate loading device in which the driving unit and the paddle are moved on a second transfer unit.
  7. 제6 항에 있어서,According to clause 6,
    상기 제2 이송부의 길이 방향은 상기 구동부 및 상기 패들의 이동 방향과 평행하게 형성되는 기판 로딩 장치.A substrate loading device wherein the longitudinal direction of the second transfer unit is formed parallel to the moving direction of the drive unit and the paddle.
  8. 제6 항에 있어서,According to clause 6,
    상기 제2 이송부의 길이는 상기 패들의 길이보다 더 짧은 기판 로딩 장치.A substrate loading device wherein the length of the second transfer unit is shorter than the length of the paddle.
  9. 제1 항에 있어서,According to claim 1,
    상기 블락부는 그라파이트, 세라믹, SIC, SUS 중 적어도 어느 하나로 형성된 기판 로딩 장치.The block portion is a substrate loading device formed of at least one of graphite, ceramic, SIC, and SUS.
  10. 제1 항에 있어서,According to claim 1,
    상기 확산로의 확산 공정 시, 상기 블락부는 상기 확산로 외측에 배치되며 상기 확산로를 차폐하는 도어와 이격되는 기판 로딩 장치.During the diffusion process of the diffusion path, the block portion is disposed outside the diffusion path and is spaced apart from a door that shields the diffusion path.
PCT/KR2023/012251 2022-11-09 2023-08-18 Substrate loading device WO2024101607A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2022-0148783 2022-11-09
KR1020220148783A KR20240067589A (en) 2022-11-09 2022-11-09 Substrate loading device

Publications (1)

Publication Number Publication Date
WO2024101607A1 true WO2024101607A1 (en) 2024-05-16

Family

ID=91033195

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2023/012251 WO2024101607A1 (en) 2022-11-09 2023-08-18 Substrate loading device

Country Status (2)

Country Link
KR (1) KR20240067589A (en)
WO (1) WO2024101607A1 (en)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009064851A (en) * 2007-09-05 2009-03-26 Covalent Materials Corp Method of manufacturing diffused wafer
KR20090043812A (en) * 2007-10-30 2009-05-07 (주)피앤테크 Mini type diffusion furnace for semiconductor wafer
KR20110115668A (en) * 2010-04-16 2011-10-24 (주)리드엔지니어링 Heat treatment duplex loading apparatus for solar cell manufacture
KR20140145827A (en) * 2013-06-14 2014-12-24 주식회사 엔제닉 Heating device for wafer
EP3079166A1 (en) * 2015-04-09 2016-10-12 Tempress IP B.V. Wafer boat loader assembly, furnace system, use thereof and method for operating said assembly

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009064851A (en) * 2007-09-05 2009-03-26 Covalent Materials Corp Method of manufacturing diffused wafer
KR20090043812A (en) * 2007-10-30 2009-05-07 (주)피앤테크 Mini type diffusion furnace for semiconductor wafer
KR20110115668A (en) * 2010-04-16 2011-10-24 (주)리드엔지니어링 Heat treatment duplex loading apparatus for solar cell manufacture
KR20140145827A (en) * 2013-06-14 2014-12-24 주식회사 엔제닉 Heating device for wafer
EP3079166A1 (en) * 2015-04-09 2016-10-12 Tempress IP B.V. Wafer boat loader assembly, furnace system, use thereof and method for operating said assembly

Also Published As

Publication number Publication date
KR20240067589A (en) 2024-05-17

Similar Documents

Publication Publication Date Title
WO2012165781A9 (en) Battery cooling system and battery rack applied thereto
WO2014109466A1 (en) Exhaust system of wafer treatment device
WO2019066244A1 (en) Cooling jacket having nonuniform flow paths, for cooling battery cell surface, and battery module including same
WO2020166940A1 (en) Energy storage system having structure in which coolant can be fed into battery module
WO2016036039A1 (en) Purge module and load port comprising same
WO2020189965A1 (en) Battery module and battery pack comprising same
WO2009142446A2 (en) Vacuum processing system, buffer module used therein and tray transferring method of the vacuum processing system
WO2019078456A1 (en) Battery pack with function of preventing inflow of leaking coolant
WO2020171626A1 (en) Battery module and method of manufacturing same
WO2021201443A1 (en) Battery module including gas breaking structure
WO2024101607A1 (en) Substrate loading device
WO2020050534A1 (en) Hexagonal column-shaped battery cell, manufacturing method therefor, and battery module comprising same
WO2021085911A1 (en) Battery module, and battery rack and power storage device comprising battery module
WO2024147510A1 (en) Boat apparatus
WO2020231141A1 (en) Slot-die coating apparatus comprising air vent
WO2022211229A1 (en) Air intake device for switchboard
WO2022092803A1 (en) Belt conveyor device for conveying wafer storage container to be used in semiconductor manufacturing
WO2024085399A1 (en) Boat loading device and wafer processing system comprising same
WO2023243875A1 (en) Battery pack with improved fire safety
WO2023191411A1 (en) Apparatus for preventing drop of door
WO2018124368A1 (en) Battery pack
WO2016105047A1 (en) Apparatus for removing top dross of plating pot
WO2022265377A1 (en) Electrode coating slurry circulation system capable of circulating slurry when line stop occurs, and electrode coating slurry circulation method using same
WO2023172013A1 (en) Cell packaging device
WO2021210780A1 (en) Battery module and battery pack including same

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 23888874

Country of ref document: EP

Kind code of ref document: A1