WO2024096405A1 - Système d'analyse automatique de diffraction par rayons x et son procédé de commande - Google Patents

Système d'analyse automatique de diffraction par rayons x et son procédé de commande Download PDF

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Publication number
WO2024096405A1
WO2024096405A1 PCT/KR2023/016388 KR2023016388W WO2024096405A1 WO 2024096405 A1 WO2024096405 A1 WO 2024096405A1 KR 2023016388 W KR2023016388 W KR 2023016388W WO 2024096405 A1 WO2024096405 A1 WO 2024096405A1
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WO
WIPO (PCT)
Prior art keywords
xrd
sample
analysis system
analyzer
unit
Prior art date
Application number
PCT/KR2023/016388
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English (en)
Korean (ko)
Inventor
윤민혜
천동현
임근배
김광영
윤하나
임강훈
이고운
Original Assignee
한국에너지기술연구원
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Publication of WO2024096405A1 publication Critical patent/WO2024096405A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • G01N23/20008—Constructional details of analysers, e.g. characterised by X-ray source, detector or optical system; Accessories therefor; Preparing specimens therefor
    • G01N23/20025—Sample holders or supports therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J11/00—Manipulators not otherwise provided for
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J11/00—Manipulators not otherwise provided for
    • B25J11/008—Manipulators for service tasks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J13/00—Controls for manipulators
    • B25J13/08—Controls for manipulators by means of sensing devices, e.g. viewing or touching devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/046—Revolute coordinate type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/16—Programme controls
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/16—Programme controls
    • B25J9/1694—Programme controls characterised by use of sensors other than normal servo-feedback from position, speed or acceleration sensors, perception control, multi-sensor controlled systems, sensor fusion
    • B25J9/1697—Vision controlled systems
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • G01N23/207—Diffractometry using detectors, e.g. using a probe in a central position and one or more displaceable detectors in circumferential positions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/05—Investigating materials by wave or particle radiation by diffraction, scatter or reflection
    • G01N2223/056—Investigating materials by wave or particle radiation by diffraction, scatter or reflection diffraction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/10—Different kinds of radiation or particles
    • G01N2223/101—Different kinds of radiation or particles electromagnetic radiation
    • G01N2223/1016—X-ray
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/30—Accessories, mechanical or electrical features
    • G01N2223/307—Accessories, mechanical or electrical features cuvettes-sample holders
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/30—Accessories, mechanical or electrical features
    • G01N2223/33—Accessories, mechanical or electrical features scanning, i.e. relative motion for measurement of successive object-parts
    • G01N2223/3307—Accessories, mechanical or electrical features scanning, i.e. relative motion for measurement of successive object-parts source and detector fixed; object moves

Definitions

  • the present invention relates to an XRD analysis system and a control method thereof. More specifically, the present invention relates to an It relates to an analysis system and its control method.
  • the X-ray Diffraction (XRD) test analyzer detects the diffraction pattern and intensity obtained by irradiating X-rays generated from an , it enables qualitative and quantitative analysis of materials through intensity.
  • XRD analysis is applied to steel samples and powder samples, and test methods include general composition analysis, retained austenite, residual stress, and pole figure analysis.
  • Patent Document 1 Korean Patent Publication No. 10-2019-0076747
  • the present invention was developed to solve the above problems.
  • An XRD analysis system and its control capable of automatically performing XRD analysis on a plurality of sample products in order through a transfer robot capable of supplying and discharging the sample products into the XRD analyzer.
  • the purpose is to provide a method.
  • another object of the present invention is to perform XRD analysis by moving to the exact location of the target sample through the mapping sensor of the loading unit and the vision unit of the transfer robot, performing gripping, and loading or unloading it into the seating part of the XRD analyzer.
  • the XRD analysis system of the present invention for solving the above problem includes an a loading unit arranged to be spaced apart from the XRD analyzer and having a plurality of storage portions to store the sample to be analyzed and the analyzed sample; It is arranged to be spaced apart from the XRD analyzer and the loading unit, and grips a desired sample product among a plurality of sample products loaded on the loading unit and loads it into the seating portion of the XRD analyzer or analyzes it on the seating portion of the XRD analyzer.
  • a transfer robot that grips the finished sample and stores it in the loading unit; And controlling the XRD analyzer, the loading unit, and the transfer robot based on analysis schedule information for a plurality of sample products to sequentially perform XRD analysis on a plurality of sample products, and storing the analysis data received from the XRD analyzer. It is configured to include a control unit that does.
  • an opening and closing door that can be opened and closed is formed on the front side, one side of the opening and closing door is connected to an opening and closing driving unit, and the opening and closing door is opened or closed according to the operation of the opening and closing driving unit controlled by the control unit. It is characterized by being
  • the opening and closing door includes a left opening and closing door that is opened and closed by moving to the left, and a right opening and closing door located on the right side of the left opening and closing door, and one side of the left opening and closing door is connected to the opening and closing driving unit to open and close the opening and closing door.
  • the left opening/closing door is opened or closed according to the driving of the driving unit.
  • a door holder is connected to one side of the right door to lock the movement of the right door, and the door holder locks the right door when the left door is opened according to the control of the control unit. It is characterized in that it is driven to do so.
  • At least one push button is formed on one side of the The operation of the opening/closing driver and the door holder is controlled.
  • the transfer robot includes a plurality of links and a plurality of joints that connect them to allow the plurality of links to rotate, and at one end of the transfer robot, a device for gripping or releasing the sample product is provided.
  • a gripper is installed, and the control unit controls driving of the plurality of joints and the gripper.
  • the transfer robot is provided with a vision unit that is positioned away from the gripper and generates shooting information by taking photos in a set direction, and the control unit selects the sample product targeted by the gripper based on the shooting information. Characterized in that the position of the gripper is controlled for ripping.
  • the gripper includes fingers that grip the sample product, and the fingers are formed at one to four locations depending on the shape of the sample product, and each finger is formed in an angular type, a parallel type, and a vacuum type. It is characterized in that it is driven by one of the following.
  • the transfer robot is installed with a reader that recognizes identification information formed on one side of the sample product, and the control unit uses the identification information recognized by the reader before the gripper grips the target sample product. It is characterized by determining whether the sample product is the target sample product and performing gripping if it matches.
  • the loading unit includes a cylindrical table, a plurality of stations spaced apart from each other along the circumference of the table, and a rotation drive unit that rotates the table in a horizontal direction, and the station includes a sample product in a vertical direction. It is characterized in that a plurality of storage parts for storing are formed spaced apart from each other.
  • the station is characterized in that contamination prevention stands are installed between the upper and lower adjacent storage units to prevent samples stored in the upper storage unit from flowing into the sample products stored in the lower storage unit. do.
  • a mapping sensor is installed on the table to recognize whether the station is in the correct position, and a sensing target recognized by the mapping sensor is formed in each of the plurality of stations at a set position.
  • control unit controls the rotation drive unit based on the position information of a plurality of sample products stored in the loading unit to position the station where the desired sample product is located at the front setting position, and positions the station where the desired sample product is located at the front setting position. It is characterized by determining whether the station is located at the set position based on sensing information.
  • the control method using the XRD analysis system of the present invention includes the steps of controlling the transfer robot to grip the sample products stored in the loading unit based on analysis schedule information for a plurality of sample products; Controlling the transfer robot to open a door installed in the XRD analyzer; Placing the sample product on the seating portion of the XRD analyzer; Closing the gate door; Generating analysis data through the XRD analyzer; And a step of gripping and recovering the analyzed sample and storing it in receiving water.
  • the transfer robot is controlled to grip the target sample product based on imaging information generated through a vision unit that generates imaging information.
  • control method of the XRD analysis system is. It is characterized in that it further includes the step of storing analysis data received from the XRD analyzer and performing statistical processing.
  • XRD analysis when analysis schedule information is transmitted to the control unit, XRD analysis can be automatically performed on a plurality of sample products.
  • mapping sensor of the loading unit and the vision unit of the transfer robot can move to the exact location of the target sample and perform gripping, which has the effect of increasing the accuracy of the system.
  • Figure 1 is a perspective view schematically showing an XRD analysis system according to an embodiment of the present invention.
  • Figure 2 is a plan view of Figure 1.
  • Figure 3 is a block diagram showing the internal configuration of an XRD analysis system according to an embodiment of the present invention.
  • Figure 4 is a diagram showing the opening and closing door of an XRD analyzer according to an embodiment of the present invention.
  • Figure 5 is an enlarged view of portion A of Figure 4.
  • Figure 6 is an enlarged view of part B of Figure 4.
  • Figure 7 is a diagram showing a loading unit according to an embodiment of the present invention.
  • Figure 8 is a diagram showing a mapping sensor of a loading unit according to an embodiment of the present invention.
  • Figure 9 is a diagram showing a transfer robot according to an embodiment of the present invention.
  • Figure 10 is a diagram showing a gripper and a vision unit of a transfer robot according to an embodiment of the present invention.
  • the application program executed in the present invention may be configured in "copy" units and may be recorded in a single physical memory in a readable, writable, and eraseable form, or may be distributed and recorded between two or more memories or recording media. there is.
  • Figure 1 is a perspective view schematically showing an XRD analysis system according to an embodiment of the present invention
  • Figure 2 is a plan view of Figure 1
  • Figure 3 shows the internal configuration of the This is a block diagram representing:
  • the An XRD analyzer 100 that generates analysis data
  • a loading unit 200 arranged to be spaced apart from the It is arranged to be spaced apart from the A transfer robot 300 and a plurality of devices that load the sample product (SP) onto the seating unit 110 or grip the analysis-completed sample product (SP) on the seating unit 110 of the XRD analyzer 100 and store it in the loading unit 200.
  • the XRD analyzer 100, loading unit 200, and transfer robot 300 are controlled to sequentially perform XRD analysis on a plurality of sample products (SP), and It includes a control unit 400 that stores analysis data received from the analyzer 100.
  • the XRD analyzer 100 is provided with a seating part 110 on which the sample product is seated, and an openable door 120 is formed on the front axis to restrict entry and exit of the sample product (SP).
  • the sample product refers to an object to be analyzed to perform It may be in a form that includes a storage means for storing samples or specimens.
  • XRD analysis is an analysis method that diffracts X-rays onto a target sample to graph internal information of the sample or specimen included in the sample. Radiation is emitted inside the XRD analyzer when XRD analysis is performed.
  • an open/close door 120 is provided, so that the open/close door 120 is maintained in a closed state during analysis, and the open/close door 120 is opened only when a sample product is taken in or out.
  • Such an opening/closing door 120 is composed of a left opening/closing door 121 and a right opening/closing door 122 that are opened and closed by sliding to the left and right, respectively, according to an embodiment of the present invention.
  • one side of the left opening/closing door 121 is connected to the opening/closing driving unit 130, and the left opening/closing door 121 slides to be opened or closed according to the driving of the opening/closing driving unit 130.
  • This opening/closing drive unit 130 can be configured in various ways as long as it allows the opening/closing door 120 to be slidable, and in one embodiment of the present invention, it is configured to open or close the opening/closing door 120 using a pneumatic or hydraulic cylinder. .
  • one side of the left opening/closing door 121 is composed of a handle portion, but of course, it can be connected to other parts of the left opening/closing door 121.
  • one side of the right opening/closing door 122 is connected to the door holder 140 and is configured to lock or unlock the movement of the right opening/closing door 122.
  • the door holder selectively locks the right opening/closing door 122. (140) is driven to lock the right opening/closing door 122 so that its position is fixed when the left opening/closing door 121 is opened.
  • the opening/closing driving unit 130 is connected to the left opening/closing door 121, and the door holder 140 is connected to the right opening/closing door 122.
  • this is only an example, and the opposite connection configuration is possible. am.
  • opening/closing drive unit 130 and the door holder 140 are driven under the control of the control unit 400.
  • the loading unit 200 is arranged to be spaced apart from the ) includes a cylindrical table 210, a plurality of stations 220 spaced apart from each other along the circumference of the table 210, and a rotation drive unit 230 that rotates the table 210 in the horizontal direction. do.
  • the station 220 has adjacent upper and lower neighbors to prevent the sample of the sample product (SP) stored in the upper storage unit 221 from flowing into the sample product (SP) stored in the lower storage unit 221.
  • a contamination prevention stand 222 is installed between the storage units 221, respectively.
  • the contamination prevention stand 222 is not installed on the upper side of the uppermost storage unit 221 and the lower side of the lowest storage unit 221.
  • the transfer robot 300 grips the desired sample product (SP) among the plurality of sample products (SP) loaded on the loading unit 200 and loads it into the seating part 110 of the XRD analyzer 100 or performs XRD analysis.
  • the seating portion 110 of the analyzer 100 is equipped to grip the analyzed sample product (SP) and store it in the loading unit 200.
  • the transfer robot 300 includes a plurality of links 310, It is configured to include a plurality of joints 320 that connect them to allow the plurality of links 310 to rotate.
  • a gripper 330 is installed at the end of the transfer robot 300 to grip or release the sample product (SP).
  • This gripper 330 can be formed in various ways depending on the shape of the sample product (SP). You can.
  • the gripper 330 is formed with fingers 331 provided at any one of one to four locations, and the operation methods of the fingers 331 may be configured in various ways, such as an angular method, a parallel method, and a vacuum method.
  • control unit 400 controls the operation of the plurality of joints 320 and the gripper 330 of the transfer robot 300 so that the transfer robot 300 grips the sample product (SP) stored in the loading unit 200.
  • SP sample product
  • the transfer robot 300 is installed with a vision unit 340 that is positioned away from the gripper 330 and generates shooting information by shooting in a set direction.
  • the shooting information of the vision unit 340 is provided by the control unit 400. is transmitted, and accordingly, the control unit 400 can control the position of the gripper 330 so that it grips the target sample product based on the shooting information.
  • control unit 400 controls the Search for and grip the corresponding sample product, and load it into the seating portion 110 of the XRD analyzer 100.
  • the transfer robot 300 is controlled to separate from the XRD analyzer 100, and the XRD analyzer 100 is turned on to perform XRD analysis.
  • the XRD analysis data is received from the (SP) is discharged and stored in the corresponding storage part 221 of the loading unit 200.
  • the next sample product (SP) to be analyzed is searched and the above-described process is repeated.
  • the analysis data is stored and as necessary. The analysis process is completed by performing statistical processing.
  • Figure 4 is a diagram showing the opening and closing door of the XRD analyzer according to an embodiment of the present invention
  • Figure 5 is an enlarged view of part A of Figure 4
  • Figure 6 is an enlarged view of part B of Figure 4.
  • the opening/closing door 120 of the present invention is composed of a left opening/closing door 121 and a right opening/closing door 122 according to one embodiment, and the left opening/closing door 121 is shown in Figure 5.
  • an open or closed state can be given by being connected to the opening/closing drive unit 130 and sliding together.
  • the right opening/closing door 122 is connected to the door holder 140 to lock the right opening/closing door 122 to maintain a stable open state when the left opening/closing door 121 is opened.
  • the locking and unlocking configuration of the door holder 140 allows a pressurizing body connected to the rod of a pneumatic or hydraulic cylinder to press one side of the right opening/closing door 122, that is, the handle portion, as shown in FIG. 6.
  • At least one push button is installed on one side of the Button 150 is formed.
  • a button pusher 160 is installed to press or release the push button 150 according to the control of the control unit 400, and the opening/closing drive unit 130 is installed according to the pressing or releasing of the push button 150 of the button pusher 160. ) and the driving of the door holder 140 may be controlled.
  • the opening/closing driver 130 operates to open the door 120 and lock the door holder 140, and when the push button 150 is in the released state, the opening/closing driver 130 operates.
  • the opening/closing door 120 of 130 can be operated to close and the door holder 140 to be unlocked.
  • a plurality of push buttons 150 may be formed so that the button pusher 160 selects a specific push button among the plurality of push buttons 150 according to a desired driving order and performs a corresponding driving process.
  • Figure 7 is a diagram showing a loading unit according to an embodiment of the present invention
  • Figure 8 is a diagram showing a mapping sensor of the loading unit according to an embodiment of the present invention.
  • the loading unit 200 includes a cylindrical table 210, a plurality of stations 220 spaced apart from each other along the periphery of the table 210, and a horizontal table 210. It is configured to include a rotation drive unit 230 that rotates in one direction.
  • At least one mapping sensor 240 is installed on the table 210 to recognize whether the station 220 is in the correct position, and each of the plurality of stations 240 has a sensing target recognized by the mapping sensor 240 at a set position. (211) is formed.
  • This sensing target 211 is formed to exactly face the mapping sensor 240 when the corresponding station 240 is located in the correct position, and when the mapping sensor 240 recognizes the sensing target 211, the corresponding station 240 ) can be confirmed to be located in the correct position.
  • control unit 400 controls the rotation drive unit 230 based on the position information of a plurality of sample products stored in the loading unit 200 so that the station 240 where the desired sample product is located is positioned at the front setting position. And, based on the sensing information received from the mapping sensor 240, it can be determined whether the station 240 is located at the set position.
  • the gripper 330 of the transfer robot 300 will search for the receiving part 221 of the target station 240 through up and down position control and perform gripping. , if it is determined that it is not positioned in the correct position, the rotation drive unit 230 will be controlled again to position it in the correct position.
  • FIG. 9 is a diagram showing a transfer robot according to an embodiment of the present invention
  • FIG. 10 is a diagram showing the gripper 330 and the vision unit 340 of the transfer robot according to an embodiment of the present invention.
  • the transfer robot 300 includes a plurality of links 310, a plurality of joints 320 that connect them to enable the plurality of links 310 to rotate, and a transfer robot 300. ) and is installed on the end side of the sample product (SP) to grip or release the gripper (330).
  • the transfer robot 300 is installed with a reader 350 that recognizes identification information formed on one side of the sample product (SP), which is not shown in the drawing.
  • This identification information is a QR code or This may include barcodes, etc.
  • control unit 400 controls the reader 350 to recognize identification information before the gripper 330 grips the target sample product (SP), and based on the recognized identification information, the sample product (SP) It will be determined whether this is the target sample product (SP), and if it matches, gripping will be performed.
  • Opening/closing driving unit 140 Door holder
  • sensing target 220 station
  • the present invention relates to an automatic there is.

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Human Computer Interaction (AREA)
  • Sampling And Sample Adjustment (AREA)

Abstract

La présente invention concerne un système d'analyse de diffraction par rayons X automatique qui peut effectuer automatiquement une analyse de diffraction par rayons X sur plusieurs échantillons dans l'ordre en utilisant un robot de transfert pouvant fournir et charger un échantillon dans un analyseur de diffraction par rayons X, ainsi qu'un procédé de commande de ce système. Le système d'analyse de diffraction par rayons X automatique de la présente invention comprend le robot de transfert qui saisit un échantillon souhaité parmi la pluralité d'échantillons chargés dans une unité de chargement et charge l'échantillon saisi dans une unité de siège de l'analyseur de diffraction par rayons X, ou qui saisit un échantillon analysé sur l'unité de siège de l'analyseur de diffraction par rayons X et stocke l'échantillon saisi dans l'unité de chargement, le système d'analyse automatique de diffraction par rayons X commandant l'analyseur de diffraction par rayons X, l'unité de chargement et le robot de transfert sur la base des informations relatives au programme d'analyse de la pluralité d'échantillons de manière à effectuer séquentiellement l'analyse de diffraction par rayons X de la pluralité d'échantillons, et stocke les données d'analyse reçues de l'analyseur de diffraction par rayons X.
PCT/KR2023/016388 2022-10-31 2023-10-20 Système d'analyse automatique de diffraction par rayons x et son procédé de commande WO2024096405A1 (fr)

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KR10-2022-0142509 2022-10-31
KR1020220142509A KR20240061159A (ko) 2022-10-31 2022-10-31 Xrd 자동 분석 시스템 및 이의 제어 방법

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KR20180111606A (ko) * 2017-03-31 2018-10-11 스미또모 가가꾸 가부시키가이샤 로봇 아암 및 반송 시스템
KR20180127762A (ko) * 2017-05-22 2018-11-30 세메스 주식회사 기판 처리 장치 및 방법
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