WO2024070496A1 - セラミックス多孔体及びガス配管 - Google Patents

セラミックス多孔体及びガス配管 Download PDF

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Publication number
WO2024070496A1
WO2024070496A1 PCT/JP2023/032052 JP2023032052W WO2024070496A1 WO 2024070496 A1 WO2024070496 A1 WO 2024070496A1 JP 2023032052 W JP2023032052 W JP 2023032052W WO 2024070496 A1 WO2024070496 A1 WO 2024070496A1
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WIPO (PCT)
Prior art keywords
porous body
ceramic porous
less
ceramic
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2023/032052
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English (en)
French (fr)
Japanese (ja)
Inventor
常夫 古宮山
浩臣 松葉
裕樹 臼杵
欣哉 各務
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NGK Insulators Ltd
NGK Adrec Co Ltd
Original Assignee
NGK Insulators Ltd
NGK Adrec Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Insulators Ltd, NGK Adrec Co Ltd filed Critical NGK Insulators Ltd
Priority to JP2024523247A priority Critical patent/JPWO2024070496A1/ja
Priority to TW112137011A priority patent/TW202428543A/zh
Publication of WO2024070496A1 publication Critical patent/WO2024070496A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/10Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on aluminium oxide
    • C04B35/111Fine ceramics
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B38/00Porous mortars, concrete, artificial stone or ceramic ware; Preparation thereof
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01NGAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR MACHINES OR ENGINES IN GENERAL; GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR INTERNAL-COMBUSTION ENGINES
    • F01N13/00Exhaust or silencing apparatus characterised by constructional features
    • F01N13/14Exhaust or silencing apparatus characterised by constructional features having thermal insulation
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16LPIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L9/00Rigid pipes
    • F16L9/14Compound tubes, i.e. made of materials not wholly covered by any one of the preceding groups
    • F16L9/153Compound tubes, i.e. made of materials not wholly covered by any one of the preceding groups comprising only layers of metal and concrete with or without reinforcement

Definitions

  • Patent Document 1 discloses a gas pipe through which high-pressure gas (blow-by gas) passes.
  • Patent Document 1 lists rubber, synthetic resin, and metal as materials for the gas pipe.
  • gas piping is generally made of rubber, synthetic resin, metal, etc.
  • these materials are weak against deformation due to heat, and when the gas piping is used in a high-temperature environment, it is necessary to provide an insulating material on the outside of the gas piping to prevent deformation of the gas piping due to heat.
  • gas piping used in a high-temperature environment may be used to supply gas such as Ar gas to a high-temperature vacuum space. In this case, when a voltage is applied in the vacuum space, electrons are accelerated and discharge may occur.
  • the present specification aims to provide a ceramic porous body for realizing a gas piping in which the occurrence of discharge is suppressed.
  • the first technology disclosed in this specification is a ceramic porous body used in gas piping, in which the outer tube is filled with a ceramic porous body.
  • This ceramic porous body may have a porosity of 20% or more and 60% or less.
  • the second technology disclosed in this specification is a ceramic porous body according to the first technology, and may have a porosity of 30% or more and 45% or less.
  • the third technology disclosed in this specification is a ceramic porous body according to the second technology, and the porosity may be 30% or more and 40% or less.
  • the fourth technology disclosed in this specification is a ceramic porous body according to any one of the first to third technologies, in which the average particle size of the aggregate constituting the ceramic porous body may be 80 ⁇ m or more and 600 ⁇ m or less.
  • a fifth technology disclosed in this specification is a ceramic porous body according to any one of the first to third technologies, which may contain 5 to 20 mass % of SiO 2 and 80 to 95 mass % of Al 2 O 3 .
  • the sixth technology disclosed in this specification is the ceramic porous body of the fourth technology, which may contain 5 to 20 mass % of SiO 2 and 80 to 95 mass % of Al 2 O 3 .
  • the seventh technology disclosed in this specification is a ceramic porous body according to any one of the first to sixth technologies, in which the average particle size of the aggregate constituting the ceramic porous body may be 80 ⁇ m or more and 600 ⁇ m or less.
  • the eighth technology disclosed in this specification is the ceramic porous body of the seventh technology, in which the average particle size of the aggregate may be 100 ⁇ m or more and 500 ⁇ m or less.
  • a ninth technique disclosed in the present specification is a ceramic porous body according to any one of the first to eighth techniques, in which the amount of air permeation per minute when gas is passed through a gas pipe having an outer tube filled with the ceramic porous body is 420 ml/ cm2 or more and 1680 ml/ cm2 or less.
  • a tenth technology disclosed in this specification is the ceramic porous body of the ninth technology, in which the air permeability per minute may be 420 ml/ cm2 or more and 1050 ml/ cm2 or less.
  • the eleventh technology disclosed in this specification is a ceramic porous body according to any one of the first to tenth technologies, in which the main aggregate material constituting the ceramic porous body may be alumina, silica, silicon carbide, mullite, zirconia, or cordierite.
  • a twelfth technology disclosed in this specification is the ceramic porous body of the eleventh technology, wherein the ceramic porous body may contain at least one compound selected from Fe 2 O 3 , TiO 2 , CaO, MgO, and Na 2 O as a trace component.
  • the thirteenth technology disclosed in this specification is the ceramic porous body of the twelfth technology, in which the trace components may be contained in the following proportions: Fe 2 O 3 : 0.01-5%, CaO: 0.1-5%, MgO: 0.1-5%, and Na 2 O: 0.5-4%.
  • the 14th technology disclosed in this specification is a ceramic porous body according to the 11th to 13th technologies, in which the aggregate may be bonded with a glass bond.
  • the fifteenth technology disclosed in this specification is a gas pipe.
  • the ceramic porous body of the first to fourteenth technologies may be filled inside the outer tube.
  • the 16th technology disclosed in this specification is the gas piping of the 15th technology, in which the outer tube may be made of ceramics.
  • the 17th technology disclosed in this specification is a gas pipe according to the 15th or 16th technology, in which the porosity of the outer tube may be 5% or less.
  • 1 shows an SEM photograph of a radial cross section of a gas pipe in which an outer pipe is filled with a ceramic porous body.
  • 1 shows an SEM photograph of a longitudinal cross section of a gas pipe in which an outer pipe is filled with a ceramic porous body.
  • 1 shows an SEM photograph of a ceramic porous body.
  • the results of Experimental Example 1 are shown.
  • the results of Experimental Example 2 are shown.
  • the results of Experimental Example 3 are shown below.
  • the ceramic porous body disclosed in this specification is used as a material to fill a gas pipe. That is, the gas pipe includes an outer tube and a ceramic porous body filled in the outer tube.
  • the gas pipe is used, for example, to supply a gas such as Ar gas to a high-temperature vacuum space.
  • the gas to be supplied may be He, Ne, Kr, etc., in addition to Ar.
  • the material of the outer tube may be ceramics, metal, glass, resin, etc. If the outer tube is made of ceramics, there is an advantage that the outer tube and the ceramic porous body (particles constituting the ceramic porous body) can be integrated (sintered) by firing. If the outer tube (inner wall of the outer tube) and the ceramic porous body are sintered, damage to the ceramic porous body due to the pressure of the gas moving in the gas pipe can be suppressed.
  • alumina Al 2 O 3
  • silica SiO 2
  • silicon carbide SiC
  • mullite Al 6 O 13 Si 2
  • zirconia ZrO 2
  • cordierite 2MgO.2Al 2 O 3.5SiO 2
  • the "main aggregate” means the material (particle) that has the highest ratio in the mass of the ceramic porous body.
  • the ceramic porous body may have aggregates other than the main aggregate.
  • the above-mentioned alumina, silica, silicon carbide, mullite, zirconia, cordierite, etc. can be used.
  • the mass ratio of the main aggregate to the mass of the ceramic porous body may be 50 wt % or more. If the mass ratio of the main aggregate is 50 wt % or more, the strength of the ceramic porous body is sufficiently maintained, and the ceramic porous body can be suppressed from being broken.
  • the mass ratio of the main aggregate to the mass of the ceramic porous body may be 60 wt% or more, 70 wt% or more, or 80 wt% or more.
  • the mass ratio of the main aggregate to the mass of the ceramic porous body may be 95 wt% or less. If the mass ratio of the main aggregate is 95 wt% or less, there is sufficient room to add aggregate other than the main aggregate as a raw material for the ceramic porous body.
  • the mass ratio of the main aggregate to the mass of the ceramic porous body may be 90 wt% or less, or 85 wt% or less.
  • the ceramic porous body may contain at least one material selected from Fe 2 O 3 , TiO 2 , CaO, MgO, and Na 2 O as a trace component.
  • the trace component means a material whose proportion in the mass of the ceramic porous body is 5 wt% or less. By containing these trace components, the characteristics (heat resistance, strength, etc.) of the ceramic porous body can be adjusted according to the purpose.
  • the chemical composition of the ceramic porous body may be SiO 2 : 5-20%, Al 2 O 3 : 80-95%, Fe 2 O 3 : 0.01-5%, CaO: 0.1-5%, MgO: 0.1-5%, Na 2 O: 0.5-4%.
  • the aggregate may be bonded with a glass bond.
  • the glass bond may be the above-mentioned SiO 2 vitrified during firing.
  • the glass bond may also contain Al 2 O 3.
  • the mass ratio of SiO 2 to the mass of the glass bond may be 70 to 96 wt %, and the mass ratio of Al 2 O 3 may be 4 to 18 wt %.
  • the glass bond may contain the above-mentioned minor components. By containing minor components other than SiO 2 and Al 2 O 3 in the glass bond, the strength of the glass bond, the temperature at the time of vitrification, etc. can be adjusted .
  • the mass ratio of the glass bond to the mass of the ceramic porous body may be 5 wt % or more and 20 wt % or less.
  • the above gas piping can adjust the porosity of the outer tube (porous ceramic body) by adjusting the particle size of the ceramic particles that make up the porous ceramic body.
  • the porosity of the porous ceramic body may be 30% or more and 45% or less. If the porosity of the porous ceramic body is 30% or more, a gas flow path can be reliably secured in the outer tube.
  • the porosity of the porous ceramic body is 45% or less, for example, when a gas such as Ar gas is supplied to a high-temperature vacuum space, even if a voltage is applied to the vacuum space, a sufficient electron acceleration distance is secured in the outer tube, the acceleration of electrons is suppressed, and the occurrence of discharge can be suppressed.
  • the porosity of the porous ceramic body may be 35% or more, or may be 40% or more.
  • the porosity of the porous ceramic body may be 40% or less, or may be 35% or less.
  • the porosity of the outer tube may be smaller than that of the porous ceramic body, for example, 5% or less.
  • the amount of air per minute when gas is passed through the gas pipe may be 420 ml/cm 2 or more and 1680 ml/cm 2 or less. If the amount of air per minute is 420 ml/cm 2 or more, a sufficient gas flow path can be secured in the outer tube. If the amount of air per minute is 1680 ml/cm 2 or less, the electron acceleration distance is sufficiently suppressed, and the occurrence of discharge can be suppressed. Even if the porosity of the ceramic porous body is constant (for example, porosity of 30% or more and 45% or less), the amount of air permeation changes by adjusting the gas pressure.
  • the amount of air permeation per minute is 1680 ml/cm 2 or less.
  • the air permeability per minute may be 600 ml/ cm2 or more, 800 ml/ cm2 or more, or 1050 ml/ cm2 or more.
  • the air permeability per minute may be 1050 ml/ cm2 or less, 800 ml/ cm2 or less, or 600 ml/ cm2 or less.
  • the average particle diameter of the ceramic particles (aggregate) constituting the ceramic porous body may be 80 ⁇ m or more and 600 ⁇ m or less. If the average particle diameter of the ceramic particles is 80 ⁇ m or more, gaps are secured between the particles, and a gas flow path can be reliably secured. In addition, if the average particle diameter of the ceramic particles is 80 ⁇ m or more, the manufacturing yield (firing yield) of the gas pipe can be improved. If the average particle diameter of the ceramic particles is 600 ⁇ m or less, the contact area between the ceramic particles and the inner wall of the outer tube increases, and the two can be stably bonded.
  • the average particle diameter of the ceramic particles is 600 ⁇ m or less, the moldability of the gas pipe (the ability to fill the ceramic porous body into the outer tube) can be improved.
  • the average particle diameter of the ceramic particles may be 100 ⁇ m or more, 150 ⁇ m or more, 200 ⁇ m or more, 300 ⁇ m or more, 400 ⁇ m or more, or 500 ⁇ m or more.
  • the average particle size of the ceramic particles may be 500 ⁇ m or less, 400 ⁇ m or less, 300 ⁇ m or less, 200 ⁇ m or less, 150 ⁇ m or less, or 100 ⁇ m or less.
  • the average distance between the ceramic particles (average pore size) may be 10 ⁇ m or more and 200 ⁇ m or less.
  • the gas pipe has a solid structure from a macroscopic perspective, since the inside of the outer tube is filled with a porous ceramic body. Therefore, even if the outer tube is made of ceramic, it has the advantage that it is less likely to crack due to physical or thermal shock, compared to a hollow structure in which the inside of the outer tube is not filled with a porous ceramic body.
  • Figure 1 shows a radial cross section of the gas pipe 10
  • Figure 2 shows a longitudinal cross section of the gas pipe 10.
  • a ceramic porous body 5 is provided inside the outer pipe 2.
  • the ceramic porous body 5 is formed by filling the outer pipe 2 with a plurality of particles 4. It can be seen that there are voids 6 between the particles 4, 4. The voids 6 are provided and dispersed throughout the outer pipe 2.
  • the material of the outer tube 2 is alumina, the thickness is 10 mm, and the porosity is 5%.
  • the ceramic porous body 5 is formed by firing alumina coarse particles, alumina fine particles, and glass.
  • the average particle size of the particles 4 is 100 to 500 ⁇ m, and forms the aggregate of the ceramic porous body 5.
  • the porosity of the porous portion 5 is 30%.
  • the chemical composition of the ceramic porous body 5 is SiO 2 : 12%, Al 2 O 3 : 91%, Fe 2 O 3 : 0.08%, CaO: 0.29%, MgO: 0.30%, Na 2 O: 0.95%.
  • the gas pipe 10 was produced by forming an outer tube 2 by extrusion molding, and then forming a ceramic porous body 5 inside the outer tube 2. Specifically, a mixture of alumina and binder was first formed into a shape with an outer diameter of ⁇ 30 mm and an inner diameter of ⁇ 10 mm using an extrusion molding machine, and dried at 60°C. It was then fired in an air atmosphere at 1300-1600°C for 5 hours.
  • a mixture of alumina, silica, and binder was prepared and filled into the fired outer tube, and fired in an air atmosphere at 1100-1300°C for 4 hours.
  • the firing sintered the alumina particles to form a ceramic porous body 5, and also sintered the inner wall of the outer tube 2 and the ceramic porous body 5, resulting in a gas pipe 10 in which the outer tube 2 and the ceramic porous body 5 are integrated.
  • Figure 3 shows a cross-sectional view of a ceramic porous body 5. As shown in Figure 3, particles (alumina particles) 4 are bonded together with glass bonds 6. The glass bonds 6 are formed when silica is vitrified during firing.
  • Example 1 Alumina particles having an average particle size of 300 ⁇ m were used, and the blending amount and firing conditions were changed to produce a plurality of gas pipes 10 (samples 1 to 9) having different porosities of the ceramic porous body 5.
  • the gas pipes 10 thus obtained were subjected to measurement of the air permeability and an Ar gas flow test. The measurement of the air permeability was performed using a 30 mm gas pipe 10, and the Ar gas flow test was performed using a 100 mm gas pipe 10. The results are shown in FIG. 4.
  • the porosity was measured by the Archimedes method.
  • the amount of airflow was measured by passing Ar gas through the gas pipe 10 while increasing the flow rate, and measuring the gas flow rate per minute (ml/cm 2 /min) when the pressure loss reached 0.49 kPa.
  • Samples with an airflow rate of 400 (ml/cm 2 /min) or more were classified as "A”
  • samples with an airflow rate of 200 (ml/cm 2 /min) or more and less than 400 (ml/cm 2 /min) were classified as "B”
  • samples with an airflow rate of less than 200 (ml/cm 2 /min) were classified as "C”. If the amount of airflow is 200 (ml/cm 2 /min) or more, it can be evaluated that a sufficient gas flow path is secured as a gas pipe.
  • samples with a porosity of 30% or more obtained an amount of air permeation of 400 (ml/cm 2 /min) or more (evaluation "A"), and it was confirmed that a good amount of air permeation was obtained as a gas pipe.
  • samples with a porosity of 45% or less obtained the results of the Ar gas flow test as "A” or "B", and it was confirmed that the occurrence of discharge was suppressed.
  • samples with a porosity of 40% or less did not generate discharge and obtained good results.
  • the porosity of the gas pipe is 30% or more and 45% or less, a gas pipe with excellent air permeability and suppressed occurrence of discharge can be obtained.
  • Example 2 Alumina particles (aggregates) with different average particle sizes were prepared, and the blending amounts and firing conditions were changed to produce gas pipes 10 (samples 11 to 23) with a porosity of the ceramic porous body 5 of 35%. Samples 11 to 22 were evaluated for moldability and firing yield of the gas pipes 10. The results are shown in FIG.
  • samples with an average particle size of alumina particles of 600 ⁇ m or less had good moldability, and that the raw material of the ceramic porous body 5 could be reliably filled into the outer tube 2.
  • samples with an average particle size of alumina particles of 80 ⁇ m or more had a sintering yield result of "A" or "B”, and that the alumina particles were sufficiently bonded with glass bonds.
  • samples with an average particle size of alumina particles of 100 ⁇ m or more and 500 ⁇ m or less were confirmed to have particularly good sintering yields, with 80% or more of the alumina particles bonded with glass bonds.
  • gas piping can be stably manufactured if the average particle size of the alumina particles (aggregate) is 50 ⁇ m or more and 600 ⁇ m or less.
  • Example 3 Gas pipes 10 (samples 31 to 40) having different gas permeabilities were fabricated using alumina particles (aggregates) with different average particle sizes and a ceramic porous body 5 with a porosity of 30%. Samples 31 to 40 were subjected to an Ar gas flow test similar to that of Experimental Example 1. The results of the Ar gas flow test are shown in FIG. 6.

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Combustion & Propulsion (AREA)
  • Manufacturing & Machinery (AREA)
  • Rigid Pipes And Flexible Pipes (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • Porous Artificial Stone Or Porous Ceramic Products (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
PCT/JP2023/032052 2022-09-29 2023-09-01 セラミックス多孔体及びガス配管 Ceased WO2024070496A1 (ja)

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08319582A (ja) * 1995-05-19 1996-12-03 Isuzu Ceramics Kenkyusho:Kk 金属表面の絶縁性セラミックス膜及びその形成方法
JP2004057028A (ja) * 2002-07-25 2004-02-26 Toshiba Ceramics Co Ltd 細胞培養用部材およびそれを用いた人工臓器
JP2012167543A (ja) * 2011-02-09 2012-09-06 Ibiden Co Ltd 構造体、及び、構造体の製造方法
JP2018525574A (ja) * 2015-05-19 2018-09-06 ビーエーエスエフ ソシエタス・ヨーロピアBasf Se 気密性、熱浸透性のある多層セラミックス複合チューブ
WO2022014613A1 (ja) * 2020-07-13 2022-01-20 日本碍子株式会社 排気管

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52109510A (en) * 1976-03-10 1977-09-13 Mitsui Mining & Smelting Co Ceramic sound absorption materials and use
JP6695712B2 (ja) * 2016-03-11 2020-05-20 日本特殊陶業株式会社 繊維強化多孔体
DE102017121452B9 (de) * 2017-09-15 2024-04-04 Refratechnik Holding Gmbh Verfahren zur Herstellung einer porösen Sintermagnesia, Versatz zur Herstellung eines grobkeramischen feuerfesten Erzeugnisses mit einer Körnung aus der Sintermagnesia, Verwendung des Versatzes zur Herstellung des Erzeugnisses sowie Verfahren zur Herstellung des Erzeugnisses

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08319582A (ja) * 1995-05-19 1996-12-03 Isuzu Ceramics Kenkyusho:Kk 金属表面の絶縁性セラミックス膜及びその形成方法
JP2004057028A (ja) * 2002-07-25 2004-02-26 Toshiba Ceramics Co Ltd 細胞培養用部材およびそれを用いた人工臓器
JP2012167543A (ja) * 2011-02-09 2012-09-06 Ibiden Co Ltd 構造体、及び、構造体の製造方法
JP2018525574A (ja) * 2015-05-19 2018-09-06 ビーエーエスエフ ソシエタス・ヨーロピアBasf Se 気密性、熱浸透性のある多層セラミックス複合チューブ
WO2022014613A1 (ja) * 2020-07-13 2022-01-20 日本碍子株式会社 排気管

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