WO2024069952A1 - 光導波路素子及びそれを用いた光変調デバイス並びに光送信装置 - Google Patents

光導波路素子及びそれを用いた光変調デバイス並びに光送信装置 Download PDF

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Publication number
WO2024069952A1
WO2024069952A1 PCT/JP2022/036752 JP2022036752W WO2024069952A1 WO 2024069952 A1 WO2024069952 A1 WO 2024069952A1 JP 2022036752 W JP2022036752 W JP 2022036752W WO 2024069952 A1 WO2024069952 A1 WO 2024069952A1
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Prior art keywords
optical waveguide
optical
substrate
electrode
modulation device
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Ceased
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PCT/JP2022/036752
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English (en)
French (fr)
Japanese (ja)
Inventor
宏佑 岡橋
優 片岡
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Sumitomo Osaka Cement Co Ltd
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Sumitomo Osaka Cement Co Ltd
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Priority to CN202280016599.0A priority Critical patent/CN118119878A/zh
Priority to PCT/JP2022/036752 priority patent/WO2024069952A1/ja
Priority to JP2022563962A priority patent/JPWO2024069952A1/ja
Priority to US18/564,548 priority patent/US20250231434A1/en
Publication of WO2024069952A1 publication Critical patent/WO2024069952A1/ja
Anticipated expiration legal-status Critical
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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
    • G02F1/035—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect in an optical waveguide structure
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
    • G02F1/0305—Constructional arrangements
    • G02F1/0316—Electrodes
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
    • G02F1/035—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect in an optical waveguide structure
    • G02F1/0356—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect in an optical waveguide structure controlled by a high-frequency electromagnetic wave component in an electric waveguide structure
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2202/00—Materials and properties
    • G02F2202/20—LiNbO3, LiTaO3

Definitions

  • the present invention relates to an optical waveguide element and an optical modulation device and optical transmission device using the same, and in particular to an optical waveguide element having a substrate on which an optical waveguide is formed and a control electrode arranged on the substrate in close proximity to the optical waveguide, and an optical modulation device and optical transmission device using the same.
  • optical waveguide elements such as optical modulators that use substrates on which optical waveguides are formed are widely used.
  • an optical waveguide is formed on a substrate that has an electro-optic effect, such as lithium niobate (LN), and a control electrode that applies an electric field to the optical waveguide is formed on the substrate.
  • LN lithium niobate
  • control electrode 3 is configured in a two-stage structure, and by forming the first stage electrode 30 thin, it is possible to create the electrode with high precision even if the electrode spacing is narrow, and it is possible to reduce the driving voltage. Furthermore, by forming the second stage electrode 31 in an inverted trapezoidal shape and making it thick, it is possible to prevent degradation of high frequency characteristics.
  • reference numeral 1 denotes the substrate
  • reference numeral 2 denotes the optical waveguide
  • reference numeral 4 denotes the buffer layer.
  • Patent Document 2 discloses that the side of the control electrode 3 is inclined and the cross section is formed into a trapezoid shape. This configuration makes it possible to suppress the increase in drive voltage, improve high-frequency characteristics, and also suppress manufacturing costs.
  • the optical waveguides formed on the substrate have widths and heights of about 1 ⁇ m, and are convex optical waveguides (e.g., rib-type waveguides, ridge-type waveguides, and slot-type waveguides) that are composed of convex parts extending in a strip shape.
  • convex optical waveguides e.g., rib-type waveguides, ridge-type waveguides, and slot-type waveguides
  • Such fine convex waveguides have strong light confinement and can bend the optical waveguide with a small curvature, allowing the optical waveguide element to be formed compactly.
  • control electrodes for example, the spacing between signal electrodes and ground electrodes and the spacing between DC bias electrodes
  • the spacing between control electrodes has been reduced from the conventional several tens of ⁇ m to a few ⁇ m, making the electrode spacing extremely narrow. This makes it easier for the electrodes to absorb the light waves propagating through the optical waveguide, resulting in a problem of increased propagation loss of the light waves (light absorption loss).
  • the problem that the present invention aims to solve is to provide an optical waveguide element that solves the problems described above and suppresses optical absorption even when the electrode spacing is narrow. Furthermore, the present invention aims to provide an optical modulation device and an optical transmission device that use the optical waveguide element.
  • An optical waveguide element having a substrate on which an optical waveguide is formed and a control electrode disposed on the substrate adjacent to the optical waveguide, characterized in that the optical waveguide is a convex optical waveguide, and the shape of a side surface of the control electrode facing the optical waveguide is composed of an inclined surface having a predetermined angle with the substrate, and a curved surface continuing from the inclined surface and forming a curved depression.
  • the position where the inclined surface changes to the curved surface is located at a position lower than the height of the optical waveguide.
  • the thickness of the electrodes is 1 ⁇ m or less.
  • optical waveguide element described in any one of (1) to (3) above is housed in a housing and is an optical modulation device characterized by having an optical fiber that inputs or outputs light waves to the optical waveguide.
  • control electrode is a modulation electrode for modulating the light wave propagating through the optical waveguide
  • the housing includes an electronic circuit for amplifying the modulation signal input to the modulation electrode.
  • An optical transmission device comprising the optical modulation device described in (5) above, a light source that inputs an optical wave to the optical modulation device, and an electronic circuit that outputs a modulated signal to the optical modulation device.
  • the present invention provides an optical waveguide element having a substrate on which an optical waveguide is formed, and a control electrode arranged on the substrate adjacent to the optical waveguide, wherein the optical waveguide is a convex optical waveguide, and the shape of the side of the control electrode facing the optical waveguide is composed of an inclined surface having a predetermined angle with the substrate, and a curved surface continuing from the inclined surface and forming a curved recess. Therefore, the distance between the convex optical waveguide and the control electrode, in particular the distance between the two at the upper part of the control electrode, can be increased, making it possible to suppress light absorption by the control electrode. Furthermore, by using an optical waveguide element having such excellent characteristics, it is possible to provide an optical modulation device or an optical transmission device that achieves similar effects.
  • FIG. 1 is a cross-sectional view showing an example of a conventional optical waveguide element.
  • FIG. 11 is a cross-sectional view showing another example of a conventional optical waveguide element.
  • 1 is a cross-sectional view showing an example of an optical waveguide element of the present invention.
  • FIG. 13 is a diagram showing an example in which the entire side surface of the control electrode is formed with a curved line forming a curved recess.
  • 4A and 4B are diagrams illustrating the shape of a control electrode used in the optical waveguide element of the present invention.
  • 4A to 4C are diagrams illustrating a method for manufacturing the optical waveguide element shown in FIG. 3.
  • FIG. 7 is a diagram for explaining a state before lift-off is performed in the manufacturing method shown in FIG. 6 .
  • FIG. 11A and 11B are diagrams illustrating changes in optical absorption loss due to the shape of the side surface of a control electrode.
  • FIG. 1 is a diagram showing an example of an optical waveguide element used in HB-CDM.
  • 10A is a cross-sectional view of the modulation electrode RF in FIG. 9, and
  • FIG. 10B is a cross-sectional view of the DC bias electrode.
  • 1 is a diagram illustrating an example of an optical transmitting device according to the present invention.
  • FIG. 3 is a cross-sectional view showing an example of the optical waveguide element of the present invention.
  • the optical waveguide element of the present invention has a substrate 1 on which an optical waveguide 10 is formed, and a control electrode 3 arranged on the substrate in the vicinity of the optical waveguide, wherein the optical waveguide 10 is a convex optical waveguide, and the shape of the side surface of the control electrode 3 facing the optical waveguide comprises an inclined surface 32 at a predetermined angle from the substrate, and a curved surface 33 continuing from the inclined surface and forming a curved recess.
  • the substrate 1 used in the optical waveguide element of the present invention can be a substrate having an electro-optic effect, specifically, a substrate such as lithium niobate (LN), lithium tantalate (LT), or PLZT (lead lanthanum zirconate titanate), or a base material in which these substrate materials are doped with MgO or the like can be used. It is also possible to form a film from these materials using a vapor phase growth method such as sputtering, deposition, or CVD. Furthermore, a semiconductor substrate can also be used.
  • a substrate such as lithium niobate (LN), lithium tantalate (LT), or PLZT (lead lanthanum zirconate titanate), or a base material in which these substrate materials are doped with MgO or the like can be used. It is also possible to form a film from these materials using a vapor phase growth method such as sputtering, deposition, or CVD. Furthermore, a semiconductor substrate can also
  • the optical waveguide 10 can be formed by etching the substrate 1 other than the optical waveguide, or by forming grooves on both sides of the optical waveguide, thereby using a convex optical waveguide in which the portion of the substrate corresponding to the optical waveguide is made convex. It is also possible to use a slot-type waveguide in which all portions other than the optical waveguide are removed by etching or other methods. Furthermore, in accordance with the convex optical waveguide, it is possible to increase the refractive index by diffusing Ti or the like onto the substrate surface by thermal diffusion or proton exchange.
  • the size of the convex optical waveguide is a minute convex optical waveguide with a width and height of about 1 ⁇ m in order to increase the confinement of light.
  • the thickness of the substrate (thin plate) 1 on which the optical waveguide 10 is formed is set to 10 ⁇ m or less, more preferably 5 ⁇ m or less, and even more preferably 1 ⁇ m or less, in order to achieve speed matching between the microwave and light waves of the modulated signal.
  • the height of the convex optical waveguide is set to 4 ⁇ m or less, more preferably 3 ⁇ m or less, and even more preferably 1 ⁇ m or less or 0.4 ⁇ m or less.
  • a reinforcing substrate (not shown) is bonded to the underside of the substrate 1.
  • the substrate 1 and the reinforcing substrate are bonded and fixed by direct bonding or via an adhesive layer such as resin.
  • an intermediate layer such as a metal oxide or metal may be included.
  • the reinforcing substrate to be directly bonded preferably has a lower refractive index than the optical waveguide or the substrate on which the optical waveguide is formed, but is not limited to this.
  • the reinforcing substrate is preferably a substrate containing an oxide layer such as quartz or glass, whose thermal expansion coefficient is close to that of the substrate 1.
  • the same LN substrate as the substrate 1 a composite substrate in which a silicon oxide layer is formed on a silicon substrate, abbreviated as SOI or LNOI, or a composite substrate in which a silicon oxide layer is formed on an LN substrate.
  • a control electrode 3 is formed on the substrate 1 in the vicinity of the optical waveguide 10.
  • the control electrodes include a modulation electrode that applies a modulation signal to the optical waveguide and a DC bias electrode that applies a DC bias voltage.
  • the control electrode is formed by forming a base electrode by a sputtering method, a vapor deposition method, or the like, and then forming a thick electrode by a plating method.
  • the shape of the side surface of the control electrode 3 facing the optical waveguide 10 is composed of an inclined surface 32 having a predetermined angle with the substrate, and a curved surface 33 continuing from the inclined surface 32 and forming a curved recess.
  • the entire side of the control electrode As a method for retracting the side of the control electrode from the optical waveguide, it is possible to form the entire side of the control electrode with a curved surface 34 that forms a curved depression, as shown in Figure 4.
  • the electrode closest to the optical waveguide (the electrode below the curved surface 34) is thin, making it difficult to effectively apply an electric field to the optical waveguide.
  • the thickness of the electrode below the curved surface 34 is extremely thin, which causes the problem of it easily peeling off from the substrate 1.
  • the lower part of the control electrode 3 is an inclined surface 32 having a predetermined angle ⁇ with the substrate 1.
  • the height Ay of the inclined surface 32 in FIG. 5 is 10 nm or more, and more preferably 100 nm or more.
  • the angle ⁇ is set to 30 degrees ⁇ 90 degrees.
  • the angle ⁇ is preferably 30 degrees or more.
  • the electrode is formed with an angle ⁇ exceeding 90 degrees, the electrode will approach the optical waveguide and light absorption will occur by the electrode, so the angle ⁇ is preferably 90 degrees or less.
  • the height h of the transition from the inclined surface 32 to the curved surface 33 is set lower than the height H of the optical waveguide 10.
  • the curved surface 33 of the present invention functions effectively when the inclined surface 32 extends higher than the height H of the optical waveguide and absorbs the light waves propagating from the optical waveguide 10, particularly the light waves on the upper side of the optical mode diameter.
  • the curved surface 33 of the present invention increases the distance between the optical waveguide 10 and the control electrode, suppressing the absorption of light waves.
  • the sum of Ay (height of the inclined surface) and By (height of the curved surface) in FIG. 5 be 200 nm or more.
  • the top of the curved surface 33 will be higher than the height H of the optical waveguide.
  • the thickness (Ay+By) of the control electrode 3 is preferably 1000 nm or less in order to ensure stable formation, taking into account manufacturing processes such as lift-off, which will be described later.
  • the length (Ax+Bx) of the control electrode 3 from the position close to the optical waveguide 10 to the top of the curved surface 33 is preferably set to 100 nm or more, more preferably 200 nm or more, in order to reduce loss due to electrode absorption.
  • Ax is the horizontal length of the inclined surface (left-right direction in the drawing), and Bx is the horizontal length of the curved surface.
  • curved surface forming a curved recess used in this invention means that the surface of curved surface 33 is recessed toward the electrode side from the two-dot chain line D connecting both ends of the curved surface, as shown in FIG. 5.
  • the position of curved surface 33 is retreated toward the electrode side from the one-dot chain line C, which is an extension of inclined surface 32.
  • FIG. 6 is a diagram for explaining the process of forming the control electrode.
  • Fig. 6(a) shows a state in which a resist film 5 is applied onto a substrate 1 on which an optical waveguide 10 is formed.
  • the resist film is exposed to UV, a laser, an electron beam, or the like, and is removed by development, and processed into a shape as shown in Fig. 6(b).
  • the resist film 5 is undercut in the vicinity of the contact portion between the resist film 5 and the substrate 1 (see dotted line frame E).
  • FIG. 6(c) a material that will become the electrode 3 is laminated on the surface of the substrate 1, including the resist film 5, by deposition, plating, sputtering, CVD, or the like.
  • the resist film 5 is lifted off to form the electrode structure shown in FIG. 6(d).
  • FIG. 6 shows an enlarged view of the vicinity of the convex optical waveguide 10.
  • Figure 7 is an enlarged view of the lower portion of the resist film 5 before lift-off.
  • an inclined surface 32 is formed at the undercut surface 51 of the resist film, and a recess (curved surface 33) is formed along the dotted line between the resist film 5 and the corner of the electrode 3.
  • the electrode gap GAP when the electrode gap GAP is 5 ⁇ m or more, there is almost no effect due to changes in the shape of the electrode side surface. However, as the electrode gap GAP becomes narrower, particularly when it is 4 ⁇ m or less, the effect of the shape of the electrode side surface becomes significant, and it can be seen that the electrode shape of the present invention effectively suppresses light absorption loss.
  • FIG. 9 is a plan view of a substrate 1 showing an example of an optical waveguide element used in HB-CDM and the like.
  • the optical waveguide 10 has two nested optical waveguides in which a plurality of Mach-Zehnder type optical waveguides are nested and arranged in parallel.
  • the width and height of the optical waveguide are extremely thin.
  • the thickness of the electrodes is also thin. For this reason, in the region where the modulation electrode is formed (symbol RF) and the region where the DC bias electrode is formed (symbol DC), it is possible to adopt a configuration using a resin material also called a "permanent resist" (PR) or an inorganic dielectric material as shown in FIG. 10.
  • PR permanent resist
  • the resin material it is possible to use materials such as polyamide resin, melamine resin, phenol resin, amino resin, and epoxy resin.
  • the inorganic dielectric material for example, SiO 2 , Al 2 O 3 , MgF, La 2 O 3 , ZnO, MgO, CaF 2 , and Y 2 O 3 can be used.
  • Figure 10(a) is an example of a cross-sectional view showing a modulation electrode in region RF.
  • the shape of the control electrode of the present invention described above is adopted below the signal electrode 3S and ground electrode 3G, and permanent resist PR is arranged to cover parts of these control electrodes and the optical waveguide 10.
  • the permanent resist suppresses scattering due to the roughness of the surface of the optical waveguide and prevents the electrodes from peeling off from the substrate.
  • the electrodes (3S, 3G) to cover parts of the permanent resist PR, it is possible not only to improve the high-frequency characteristics of the modulation electrode, but also to suppress peeling of the permanent resist.
  • the electrode since there is no need to place the top of the DC bias electrode (3D) in close proximity, the electrode is not positioned to cover the permanent resist PR.
  • the effect of the permanent resist on the optical waveguide 10 and the lower part of the electrode is as described above.
  • optical waveguide element of the present invention uses an example of HB-CDM, but the present invention is not limited to this and can also be applied to optical phase modulators, optical modulators with polarization synthesis function, optical waveguide elements integrating more or fewer Mach-Zehnder type optical waveguides, junction devices with optical waveguide elements made of other materials such as silicon, devices for sensor use, etc.
  • the optical waveguide element has an optical waveguide 10 formed on an optical waveguide substrate 1 and a control electrode (not shown) such as a modulation electrode that modulates the light wave propagating through the optical waveguide 10, and is housed in a housing CA.
  • an optical modulation device MD can be configured by providing an optical fiber (F) that inputs and outputs light waves to the optical waveguide.
  • the optical fiber F is optically coupled to the optical waveguide 10 in the optical waveguide element using an optical block with an optical lens, a lens barrel, a polarization multiplexer 6, or the like.
  • the optical fiber may be introduced into the housing through a through hole penetrating the side wall of the housing, and the optical fiber may be directly bonded to an optical component or substrate, or an optical fiber having a lens function at the end of the optical fiber may be optically coupled to the optical waveguide in the optical waveguide element.
  • a reinforcing member (not shown) may be overlapped and arranged along the end face of the optical waveguide substrate 1.
  • the optical transmitter OTA can be configured by connecting an electronic circuit (digital signal processor DSP) that outputs a modulation signal So that causes the optical modulation device MD to perform a modulation operation to the optical modulation device MD.
  • DSP digital signal processor
  • a driver circuit DRV is used to amplify the modulation signal.
  • the driver circuit DRV and digital signal processor DSP can be placed outside the housing CA, but they can also be placed inside the housing CA. In particular, by placing the driver circuit DRV inside the housing, it is possible to further reduce the propagation loss of the modulation signal from the driver circuit.
  • the input light L1 to the optical modulation device MD may be supplied from outside the optical transmission device OTA, but as shown in FIG. 11, a semiconductor laser (LD) can also be used as the light source.
  • LD semiconductor laser
  • the output light L2 modulated by the optical modulation device MD is output to the outside via an optical fiber F.
  • an optical waveguide element that suppresses light absorption even when the electrode spacing is narrow. Furthermore, it is possible to provide an optical modulation device and an optical transmission device that use this optical waveguide element.
  • Substrate (thin plate, film) on which the optical waveguide is formed 3 control electrode 10 optical waveguide 32 inclined surface 33 curved surface F optical fiber LD light source CA housing MD optical modulation device DRV driver circuit DSP digital signal processor OTA optical transmission device

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Electromagnetism (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
  • Optical Integrated Circuits (AREA)
PCT/JP2022/036752 2022-09-30 2022-09-30 光導波路素子及びそれを用いた光変調デバイス並びに光送信装置 Ceased WO2024069952A1 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
CN202280016599.0A CN118119878A (zh) 2022-09-30 2022-09-30 光波导元件及使用了该光波导元件的光调制器件、以及光发送装置
PCT/JP2022/036752 WO2024069952A1 (ja) 2022-09-30 2022-09-30 光導波路素子及びそれを用いた光変調デバイス並びに光送信装置
JP2022563962A JPWO2024069952A1 (https=) 2022-09-30 2022-09-30
US18/564,548 US20250231434A1 (en) 2022-09-30 2022-09-30 Optical waveguide device, and optical modulation device and optical transmission apparatus using same

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PCT/JP2022/036752 WO2024069952A1 (ja) 2022-09-30 2022-09-30 光導波路素子及びそれを用いた光変調デバイス並びに光送信装置

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Citations (5)

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Publication number Priority date Publication date Assignee Title
US4807952A (en) * 1986-10-22 1989-02-28 The University Of British Columbia Voltage-induced optical waveguide modulator having reduced inter-electrode gap
JP2007272122A (ja) * 2006-03-31 2007-10-18 Sumitomo Osaka Cement Co Ltd 光制御素子
JP2011215294A (ja) * 2010-03-31 2011-10-27 Sumitomo Osaka Cement Co Ltd 光変調器
JP2015099385A (ja) * 2015-01-30 2015-05-28 住友大阪セメント株式会社 光変調器
JP2020134874A (ja) * 2019-02-25 2020-08-31 Tdk株式会社 光変調器

Family Cites Families (4)

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Publication number Priority date Publication date Assignee Title
US7426326B2 (en) * 2004-03-12 2008-09-16 The United States Of America As Represented By The Secretary Of The Navy Low loss bridge electrode with rounded corners for electro-optic modulators
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