WO2024063203A1

WO2024063203A1 - Device for sensing position of structure and mems scanner package comprising same

Info

Publication number: WO2024063203A1
Application number: PCT/KR2022/018596
Authority: WO
Inventors: 조경우; 김명섭; 이동윤; 최진홍; 박국현
Original assignee: 주식회사 위멤스
Priority date: 2022-09-19
Filing date: 2022-11-23
Publication date: 2024-03-28
Also published as: EP4372448A1

Abstract

The present invention relates to a MEMS scanner package comprising: a MEMS scanner element (110) including a mirror (111); a first circuit board (120) on which the MEMS scanner element (110) is mounted; a light source (130) disposed at a predetermined distance at the rear of the mirror (111) of the MEMS scanner element (110) and emitting light toward the back surface of the mirror (111); a lens (131), located between the light source (130) and the mirror (111), through which the light emitted from the light source (130) passes; a position sensor (140) that receives light that passes through the lens (131) and is then reflected from the back surface of the mirror (111) and returned; and a second circuit board (121) on which the light source (130) and the position sensor (140) are mounted and which are electrically connected to the light source (130) and the position sensor (140), wherein the center of the lens (131) is spaced apart from a light-emitting center of the light source (130) in a direction toward the position sensor (140), such that the light passing through the lens (131) is disposed at an inclined incidence angle at the center of the back surface of the mirror (111), and wherein the position sensor (140) is one two-dimensional position sensor or multiple one-dimensional position sensors, and in the case of one-axis scanning, the long axis of the position sensor is arranged perpendicular to the rotation axis of the mirror (111).

Description

Structure position sensing device and MEMS scanner package including the same

The present invention relates to a device for sensing the rotation angle or vertical position of a structure in real time and a MEMS scanner package including the same.

MEMS Scanner is a laser beam steering device used in LiDAR (Light Detection And Ranging), which is used to measure targets such as surrounding terrain, objects, and obstacles, and projection displays using lasers. These MEMS scanners have advantages such as small size, thinness, low power consumption, and low price compared to other mechanical scanners, so their use is increasing in various sensing and display fields.

For lidar sensors and projection displays that use MEMS scanners, it is necessary to implement a system that receives rotation angle (or vertical position) information of the MEMS scanning mirror in real time for accurate and stable operation. In the case of a resonant scanner, the resonant frequency may vary depending on changes in ambient temperature, so a sensor that can measure the driving angle of the mirror in real time is needed to monitor and control this. However, because the size of the MEMS scanning mirror is small and it is generally driven at high speed, it is difficult to sense the exact rotation angle.

As a method to solve this problem, as disclosed in US Patent Publication US10324283B2 (Prior Art Document 1), a method of sensing the rotation angle by detecting the change in capacitance of the comb structure included in the MEMS driver was attempted. It is becoming. Figure 1 shows the trajectory of the laser beam as the MEMS mirror rotates, and Figure 2 shows a conventional device that senses the rotation angle by detecting changes in capacitance of the comb structure included in the driver. However, although the electrostatic drive method has the advantage of miniaturization, it is difficult to detect slight changes in capacitance due to interference from the drive signal. In addition, there is a problem that it is difficult to obtain the actual waveform in the time domain, and the signal processing circuit is complicated in extracting the magnitude and phase of the mirror rotation.

Another method is to use a piezoresistive element whose resistance changes depending on the deformation of the spring. This method has a simple structure and circuit, but has the disadvantage of requiring an additional impurity doping process and having poor temperature stability.

Another method, as disclosed in Prior Art Document 2 published at the SPIE conference in 2017, is an optical sensing method that can directly obtain the rotation angle position of the mirror as a waveform by incident a laser beam on the front or back of the MEMS scanning mirror. A device applied in a laboratory environment is presented. Figure 3 shows a conventional method of detecting a change in the position of reflected light by incident a laser beam on the center of the front or back of the MEMS scanning mirror. The laser and a position sensitive detector (PSD) are used to determine transmission/reception efficiency. And to increase measurement accuracy, it has an inclination angle at a long distance, and if this inclination angle is not present, distortion may occur in the detection signal. However, this method has problems in that the device size is large and heavy, and when sensing a wide angle, a large-area position sensor is required, which increases the price. In addition, when the light source and position sensor are mounted directly on the circuit board for miniaturization, they must be placed on the same plane, so it is impossible to incident light at an inclined angle at the center of the back of the scanning mirror unless a separate optical system is used. There is a downside.

(Patent Document 1) US Patent Publication US10324283B2 (2019.06.18)

(Non-patent Document 1) Closed-Loop Control of Gimbal-less MEMS Mirrors for Increased Bandwidth in LiDAR Applications, Presented at SPIE Conference on Laser Radar Technology and Applications XXII, Anaheim, CA April 12 ^th , 2017

The present invention was developed to solve the problems of the prior art described above, and is a miniaturization device that includes a device that can directly measure the driving angle and phase from the real-time waveform of the rotation angle of the scanning mirror in the MEMS scanner. The purpose is to provide a MEMS scanner package.

Additionally, the purpose of the present invention is to provide a miniaturized MEMS scanner package that is free from interference due to driving signals.

Additionally, the purpose of the present invention is to provide a MEMS scanner capable of stable and accurate operation by configuring feedback control using real-time rotation angle information of the MEMS scanning mirror.

A position sensing device for a structure according to the present invention for solving the above problems includes: an object to be measured; a light source disposed at a predetermined interval behind the object to be measured and emitting light toward the rear of the object to be measured; a lens located between the light source and the object to be measured through which light emitted from the light source passes; and a detector that receives light that passes through the lens and is then reflected from the back of the object to be measured and returned, wherein the center of the lens may be arranged to be spaced apart in the horizontal direction from the light emitting center of the light source.

Additionally, the chief ray of light passing through the lens may pass through one part of the lens that is a certain distance away from the center of the lens. Here, the light emitted from the light source is incident on the central portion of the back of the object to be measured, and at this time, the angle of incidence is an inclined angle rather than a vertical one.

Additionally, the light source and the sensor may be arranged at a predetermined distance apart from each other in a direction parallel to the rotation axis of the mirror on a horizontal plane. Here, the separation distance between the light source and the sensor may be within a range of 10 to 90% of the effective radius of the lens from the center of the lens.

Additionally, the light source may be a vertical cavity surface emitting laser (VCSEL) or an LED.

Additionally, the lens may be a convex lens that is convex upward or downward, a biconvex lens that is convex upward or downward, or a part thereof. The lens may be a cylindrical convex lens or a portion thereof.

In addition, the beam emitted from the light source passes through a convex lens away from the center of the object to be measured and is then reflected at the central portion of the back of the object to be measured at an inclined angle, and can then directly reach the detector without passing through the lens. there is.

On the other hand, when using the entire convex lens rather than a part, the chief ray of light that passes through one part of the lens and then is reflected from the back of the object to be measured and returns may pass through the other side of the lens.

In addition, when the lens is a concave lens in the form of a sphere or cylinder, the beam emitted from the light source may pass through the concave lens toward the side close to the center of the object to be measured and then be incident on the central portion of the back of the object to be measured at an inclined angle. there is.

Additionally, the detector is a one-dimensional or two-dimensional position detector whose output varies depending on the position at which light enters, and a photo detector can also be used.

Additionally, the sensor may include one two-dimensional position sensor or at least two one-dimensional sensors.

Additionally, the two one-dimensional sensors may be arranged perpendicular to each other, or both the two one-dimensional sensors may be arranged vertically or horizontally.

In addition, when the mirror rotates along one axis, the long axis of the one-dimensional position sensor is arranged in a direction perpendicular to the rotation axis of the mirror, so that as the object to be measured rotates, the path of light emitted from the light source follows the long axis of the position sensor. can be changed.

In addition, the separation direction of the light source and the sensor may be arranged perpendicular to the rotation axis direction of the mirror, and in this case, the long axis direction of the one-dimensional position sensor is arranged perpendicular to the rotation axis of the mirror, which is the object to be measured, as above.

In addition, in order to obtain a more linear voltage signal from the position sensor for the change in position of the object to be measured according to the rotation of the object to be measured, the angle of incidence can be compensated with arctan (x/h), where x is the position sensor. Above is the travel distance of the laser beam, and h is the height difference between the back of the mirror and the position detector.

The MEMS scanner package according to the present invention includes a MEMS scanner element including a mirror; A first circuit board on which the MEMS scanner element is mounted; a light source disposed at a predetermined distance behind the mirror of the MEMS scanner element and emitting light toward the rear of the mirror; a lens located between the light source and the mirror through which light emitted from the light source passes; a detector that receives light that passes through the lens and is then reflected from the back of the mirror and returned; and a second circuit board on which the light source and the sensor are mounted, and are electrically connected to the light source and the sensor, respectively, and the center of the lens may be arranged to be horizontally spaced from the light emitting center of the light source. . Here, a spacer disposed between the light source and the lens to maintain a constant distance between the light source and the lens may be further included.

Another embodiment of the position sensing device of a structure according to the present invention includes: an object to be measured; a light source disposed at a predetermined interval behind the object to be measured and emitting light toward the rear of the object to be measured; a detector that receives light emitted from the light source and reflected from the back of the object to be measured and returned; and an integrated support having a first surface supporting the light source and a second surface supporting the sensor, wherein the first surface and the second surface are inclined at a predetermined angle to face each other, and from the light source. The emitted light may be incident on the rear of the object to be measured at an inclined angle rather than perpendicular.

Here, supports bent at a certain angle are disposed on the light source and the sensor so that light is emitted and incident vertically, respectively, and a flexible circuit board electrically connected to the light source and the sensor may be further included.

Another embodiment of the MEMS scanner package including the position sensing device of the structure according to the present invention includes a MEMS scanner element including a mirror; A circuit board on which the MEMS scanner element is mounted; a light source disposed at a predetermined distance behind the mirror of the MEMS scanner element and emitting light toward the rear of the mirror; a detector that receives light emitted from the light source and reflected from the back of the mirror and returned; An integrated support having a first surface supporting the light source and a second surface supporting the sensor, wherein the first surface and the second surface are inclined at a predetermined angle to face each other, and radiates from the light source. The light may be incident on the rear surface of the mirror at an inclined angle rather than perpendicular to the mirror.

The present invention configured as described above has the effect of accurately and stably sensing real-time rotation angle information of the MEMS scanning mirror without interference from the driving signal.

In addition, the MEMS scanner of the MEMS scanner package according to the present invention can configure feedback control using rotation angle information obtained as a real-time waveform according to the mirror position, which has the effect of enabling stable and accurate operation.

In addition, since the MEMS scanner package according to the present invention can be miniaturized and produced at low cost, not only is it easy to design a system using it, but it can also be applied to various fields.

Figure 1 shows the structure and rotational operation state of a MEMS mirror, and Figure 2 shows a comb-shaped electrode structure included in a conventional MEMS driver to sense the rotation angle of the mirror.

Figure 3 shows a conventional device that detects a change in the position of reflected light by incident a laser beam on the front or back of a MEMS scanning mirror;

4 and 5 are side and front views of a MEMS scanner package including a position sensing device for a structure according to a first embodiment of the present invention;

6 and 7 are side and front views showing the arrangement of the light source and lens in the MEMS scanner package according to the first embodiment of the present invention;

Figures 8 to 10 are a plan view, front view, and side view showing the path of the laser beam according to the rotation of the scanning mirror in the position sensing device of the structure of Figures 4 and 5;

11 and 12 are graphs showing the results of optical numerical analysis according to the rotation of the scanning mirror of the MEMS scanner package according to the first embodiment of the present invention;

Figure 13 is a diagram showing the structure of a downwardly convex lens in the MEMS scanner package according to the second embodiment of the present invention;

Figure 14 is a diagram showing the structure of a convex lens having both sides convex in the MEMS scanner package according to the third embodiment of the present invention;

Figure 15 is a diagram showing a structure using only the left part of the convex lens in the MEMS scanner package according to the fourth embodiment of the present invention;

16 and 17 are side and front views of a MEMS scanner package including a support in the position sensing device for a structure according to a fifth embodiment of the present invention;

FIGS. 18 to 20 are a plan view, front view, and side view showing the path of the laser beam according to the rotation of the scanning mirror in the MEMS scanner package of FIGS. 16 and 17;

21 and 22 are side and front views showing a step structure in a MEMS scanner package according to a sixth embodiment of the present invention;

23 and 24 are side and front views showing a MEMS scanner package according to a seventh embodiment of the present invention;

25 and 26 are side and front views showing a MEMS scanner package according to an eighth embodiment of the present invention;

27 and 28 are side and front views of a MEMS scanner package according to a ninth embodiment of the present invention.

29 to 31 are plan views showing the arrangement of position sensors for two-dimensional measurement in a MEMS scanner package according to the first embodiment of the present invention.

Hereinafter, embodiments of the present invention will be described in detail with reference to FIGS. 4 to 31.

Figures 4 and 5 show a side view and a front view of a MEMS scanner package including a position sensing device of a structure according to a first embodiment of the present invention, and Figures 6 and 7 show a MEMS scanner according to a first embodiment of the present invention. Side and front views showing the arrangement of the light source and lens in the package.

4 to 7, the position sensing device of the structure according to the first embodiment of the present invention includes a mirror 111 of the MEMS scanner element 110 and a mirror of the MEMS scanner element 110 as objects to be measured. A light source 130 is disposed at a predetermined distance behind the mirror 111 and emits light toward the rear of the mirror 111, and is located between the light source 130 and the mirror 111 to emit light to the light source 130. It includes a lens 131 through which the chief ray of light emitted from passes through, and a position sensor 140 that receives the light reflected from the back of the mirror 111 after passing through the lens 131 and returning.

The main ray of light passing through the lens 131 passes through one part of the lens 131 that is a certain distance away from the center of the lens 131. For example, when the chief ray of light emitted from the light source 130 passes through one half of the lens, the chief ray of light reflected from the back of the mirror 111 may pass through the other half of the lens.

In the position sensing device of the structure, the rotation angle of the mirror 111 of the MEMS scanner element 110, which is the object to be measured, is measured by the position detector 140. In Figure 5, the state in which the mirror 111 is rotated is indicated by a dotted line.

4 and 5, the MEMS scanner package according to the first embodiment of the present invention includes a position sensing device for the structure, a first circuit board 120 on which the MEMS scanner element 110 is mounted, The light source 130 and the position sensor 140 are mounted, and include a second circuit board 121 that is electrically connected to the light source 130 and the position sensor 140, respectively.

Additionally, a spacer 120 is disposed between the light source 130 and the lens 131 to maintain a constant distance between the light source 130 and the lens 131. The spacer 120 is disposed on the second circuit board 121, and the lens 131 is disposed on the spacer 120.

When the lens 131 is a convex lens, the center of the lens is arranged to be spaced apart from the light emitting center of the light source 130 in the direction toward the detector, so the light emitted from the light source 130 is tilted rather than vertical. It is incident on the back of the mirror 111 at a true angle. The separation distance between the center of the lens 131 and the light emitting center of the light source 130 may range from 10 to 90% of the effective radius of the lens from the center of the lens 131.

The light source 130 and the position sensor 140 are arranged side by side on the horizontal surface of the second circuit board 121 at a predetermined interval.

The light source 130 may be a laser beam. In this case, as the laser beam emitted from the light source 130 passes through the lens 131, the optical path of the chief ray is refracted in the horizontal direction, and at the same time, the laser beam is focused or parallel light is formed. do.

When the scanning mirror 111 rotates on one axis (y-axis in FIGS. 4 and 5) and the light source and the detector are arranged spaced apart in a direction parallel to the rotation axis of the mirror on a horizontal plane, a one-axis position sensor ( The long axis (x-axis) of 140) is arranged in a direction perpendicular to the rotation axis (y-axis) of the MEMS mirror 111.

That is, when the mirror 111 rotates around the y-axis, the position sensor 140 is disposed long in the direction of the long axis (x-axis) perpendicular to the rotation axis (y-axis) of the mirror 111 and the mirror ( As 111) rotates, the path of light emitted from the light source 130 changes along the long axis (x-axis) of the position detector 140.

When the mirror 111 rotates around the x-axis, the position sensor 140 is arranged long in the long axis (y-axis) direction perpendicular to the rotation axis (x-axis).

As the MEMS mirror 111 rotates, a voltage signal corresponding to the change in position is generated from the position detector 140, and through a process of converting the position information into an angle, a linear rotation angle can be finally derived.

As the light source 130, a vertical cavity surface light emitting laser (VCSEL) or LED may be used.

The lens 131 may be made of glass or plastic material and may have a spherical or aspherical shape.

The sensor is a position sensor whose output varies depending on the position at which light is incident, and can be used as a one-dimensional or two-dimensional position sensor.

Figures 8 to 10 are a top view, front view, and side view showing the path of the laser beam according to the rotation of the scanning mirror in the position sensing device of Figures 4 and 5. Here, θ_rotation represents the rotation angle of the mirror 111 with respect to the rotation axis (y-axis), θ_refraction represents the refraction angle of light by the lens 131, and Disp_rotation represents the displacement of the light spot according to the rotation angle on the detector.

The position sensor 140 can continuously measure the position of a one-dimensional or two-dimensional light spot on the detector surface.

Figures 11 and 12 are graphs showing the results of optical numerical analysis according to the rotation of the scanning mirror of the MEMS scanner package according to the first embodiment of the present invention. Figure 11 shows that the displacement in the direction of the long axis (x-axis) detected by the position sensor is 0 when the scanning mirror is not rotated, and Figure 12 shows the position sensor when the scanning mirror is rotated 10 degrees around the rotation axis (y-axis). An example is shown where the displacement in the long axis (x-axis) direction detected is approximately -0.8mm.

Figure 13 shows the structure of a lens in a MEMS scanner package according to a second embodiment of the present invention. The first embodiment of FIGS. 4 to 7 is an example in which the lens 131 is a convex lens that is convex upward. In the second embodiment of FIG. 13, the lens 131a is a convex lens that is convex downward and other components are the same as those of the first embodiment. Same as example.

Figure 14 shows the structure of a lens in a MEMS scanner package according to a third embodiment of the present invention. In this embodiment, the lens 131b is a biconvex lens that is convex upward and downward.

Figure 15 shows the structure of the lens in the MEMS scanner package according to the fourth embodiment of the present invention, and in this embodiment, the lens 131c is a part of a convex lens that is convex upward. Here, the lens 131c may be a cylindrical convex lens.

In addition, when the lens is a concave lens in the form of a hemisphere or cylinder, the beam emitted from the light source passes through the concave lens toward the side closer to the center of the object to be measured and then enters the central portion of the back of the object to be measured at an inclined angle. It could be.

Figures 16 and 17 show a side view and a front view of a MEMS scanner package including a position sensing device for a structure according to a fifth embodiment of the present invention.

16 and 17, the position sensing device of the structure according to the fifth embodiment of the present invention includes a mirror 211 of the MEMS scanner element 210 and a mirror of the MEMS scanner element 210 as objects to be measured. A light source 230 is disposed at a predetermined distance behind the mirror 211 and emits light to the rear of the mirror 211. Light radiated from the light source 230 is reflected from the rear of the mirror 211 and returns. It has a position sensor 240 that receives light, a first surface 241a supporting the light source 230, and a second surface 241b supporting the position sensor 240, and the first surface 241a and The second surface 241b includes supports 241 inclined at a certain angle to face each other. The support 241 may be integrally formed to include the first surface 241a and the second surface 241b.

In the position sensing device of the structure, the rotation angle of the mirror 211 of the MEMS scanner element 210, which is the object to be measured, is measured by the position detector 240.

16 and 17, the MEMS scanner package according to the fifth embodiment of the present invention includes a position sensing device for the structure, and further includes a circuit board 220 on which the MEMS scanner element 210 is mounted. Includes. An internal space 226 is formed in the circuit board 220, and the light source 230, the position sensor 240, and the support 241 of the position sensing device are installed in the internal space 226.

The light emitting surface of the light source 230 is not parallel to the rotation axis (y-axis) of the scanning mirror 211 and forms a certain angle, so that the light enters the mirror 211 at an angle and is then reflected to a position sensor located on the opposite side. It is received at (240).

A flexible circuit board 242 is bent at a certain angle and disposed between the light source 230 and the support 241 and between the position sensor 240 and the support 241. They are electrically connected to the light source 230 and the position sensor 240, respectively. The flexible circuit board 242 may be formed of polyimide film and copper wiring.

The mirror 211 rotates around the rotation axis (y-axis), and the position sensor 240 is disposed long along the long axis (x-axis) perpendicular to the rotation axis (y-axis) of the mirror 211. As 211 rotates, the path of light emitted from the light source 230 changes along the long axis (x-axis) of the position detector 240. This method also applies when the mirror rotates around the y-axis.

FIGS. 18 to 20 are plan, front, and side views showing the path of the laser beam according to the rotation of the scanning mirror in the position sensing device of the structure of FIGS. 16 and 17, and detailed descriptions thereof will be omitted.

21 and 22 are side and front views showing a MEMS scanner package according to a sixth embodiment of the present invention, and in this embodiment, the position sensing device of the structure is surrounded within the internal space 226 of the circuit board 220. The step structure 221 is further formed to facilitate alignment of the position where the position sensing device is bonded. Additionally, the sixth embodiment of the present invention may have a circuit board 220 having a two-stage stepped structure in which, in addition to the step caused by the internal space 226, an additional step is formed by the step structure 221.

Figures 23 and 24 are side and front views showing a MEMS scanner package according to a seventh embodiment of the present invention. In this embodiment, an internal space 226 is formed in the circuit board 220a, and a hole 222 is formed and penetrates the internal space 226. The MEMS scanner element 210 is mounted on the circuit board 220a, and the light source 230, the position sensor 240, the flexible circuit board 242, and the support 241 supporting them are positioned in the hole 222. It is mounted to cover from the bottom.

Figures 25 and 26 are side and front views showing a MEMS scanner package according to an eighth embodiment of the present invention. In this embodiment, a light source 230, a position sensor 240, a flexible circuit board 242, and a support 241 supporting them are placed between the MEMS scanner element 210 and the flat circuit board 220b. 220b), and a spacer 224 is disposed between the MEMS scanner element 210 and the circuit board 220b. The support 241 may be integrally formed to include the first surface 241a and the second surface 241b, as described in the fifth embodiment of FIGS. 16 and 17 .

Figures 27 and 28 are side and front views showing a MEMS scanner package according to a ninth embodiment of the present invention. In this embodiment, an internal space is formed in the circuit board 220c, and the light source 230, the position sensor 240, the flexible circuit board 242, and the integrated support 241 for supporting them are mounted in the internal space. It is different from the 8th embodiment, and the remaining configuration is the same as the 8th embodiment.

Meanwhile, in 3D image sensors and displays using scanners, it is necessary to scan a laser beam in 2D. For this purpose, two 1-axis scanners can be used, or if miniaturization is required, one mirror can be scanned in 2 axes.

Mirrors that move on two axes typically have a slow axis with a low driving frequency and a fast axis with a high driving frequency. In order to precisely measure this two-dimensional driving angle, the waveform can be measured using a two-dimensional position detector (PSD) together with the lens. From this, the magnitude and phase of the driving angle can be extracted.

Alternatively, if one 1-dimensional position detector (PSD) is placed in the slow axis direction of the laser beam, the disadvantage is that the waveform cannot be seen. To compensate for this, as shown in FIG. 29, if two one-dimensional position sensors (341, 342) are arranged perpendicularly to each other, a fast axis waveform can be obtained from the vertical position sensor (341) and from the horizontal position sensor (342) You can obtain information about slow axis scan.

In addition, as shown in Figure 30, if two position sensors (343, 344) are arranged vertically in the fast axis direction, the fast axis waveform can be directly obtained from the two position sensors (343, 344), and the time difference Information about the slow axis can be extracted from the two outputs. As shown in FIG. 31, if both

position sensors

345 and 346 are arranged horizontally, information about the fast axis and slow axis can be obtained, but there is a disadvantage in that waveforms cannot be obtained.

The above description is merely an illustrative explanation of the technical idea of the present invention, and those skilled in the art will be able to make various modifications, changes, and substitutions without departing from the essential characteristics of the present invention. . Therefore, this embodiment is not intended to limit the technical idea of the present invention, but rather to explain it, and the scope of the technical idea of the present invention is not limited by this example. The scope of protection of the present invention should be interpreted in accordance with the claims below, and all technical ideas within the equivalent scope should be construed as being included in the scope of rights of the present invention.

110, 210: MEMS scanner element

111, 211: Mirror

120: first circuit board

121: second circuit board

220, 220a, 220b, 220c: Circuit board

221: Step structure

222: Hall

224: spacer

130, 230: light source

131, 131a, 131b, 131c: Lens

132: spacer

140, 240, 341, 342, 343, 344, 345, 346: Position sensor

241: support

241a: side 1

241b: Side 2

242: Flexible circuit board

226: Intrinsic space

Claims

object to be measured;

a light source disposed at a predetermined interval behind the object to be measured and emitting light toward the rear of the object to be measured;

a lens located between the light source and the object to be measured through which light emitted from the light source passes; and

A detector that receives light that passes through the lens and is reflected from the back of the object to be measured and returned,

The position sensing device of the structure, wherein the center of the lens is disposed to be spaced apart from the light emitting center of the light source.
According to paragraph 1,

The position sensing device of the structure, wherein the main ray of light passing through the lens passes through one portion spaced a certain distance away from the center of the lens.
According to paragraph 2,

A position sensing device for a structure in which the light emitted from the light source is incident on the back of the object to be measured at an inclined angle rather than vertically.
According to paragraph 2,

A position sensing device for a structure in which the light source and the sensor are arranged side by side at a predetermined distance on a horizontal plane.
According to paragraph 4,

The separation distance between the light source and the sensor is within a range of 10 to 90% of the effective radius of the lens from the center of the lens.
According to paragraph 1,

The light source is a vertical cavity surface light emitting laser (VCSEL) or an LED.
According to paragraph 1,

The lens is a position sensing device of a structure having a convex lens or a convex cylinder shape.
In paragraph 2

A position sensing device for a structure in which the chief ray of light that passes through one part of the lens and then is reflected from the back of the object to be measured and returns passes through the other part of the lens.
According to paragraph 1,

A position sensing device for a structure, wherein the sensor includes one two-dimensional position sensor or at least two one-dimensional sensors.
According to clause 9,

A position sensing device for a structure in which the two one-dimensional sensors are arranged perpendicularly to each other, or both the two one-dimensional sensors are arranged vertically or horizontally.
According to clause 9,

The object to be measured rotates around a rotation axis,

The long axis of the one-dimensional detector is arranged in a direction perpendicular to the rotation axis of the object to be measured, so that as the object to be measured rotates, the path of light emitted from the light source changes along the long axis of the detector.
MEMS scanner element including a mirror;

A first circuit board on which the MEMS scanner element is mounted;

a light source disposed at a predetermined distance behind the mirror of the MEMS scanner element and emitting light toward the rear of the mirror;

a lens located between the light source and the mirror through which light emitted from the light source passes;

a detector that receives light that passes through the lens and is then reflected from the back of the mirror and returned; and

A second circuit board on which the light source and the sensor are mounted, and which is electrically connected to the light source and the sensor, respectively,

A MEMS scanner package in which the center of the lens is arranged to be spaced apart from the luminous center of the light source.
According to clause 12,

A MEMS scanner package in which the main ray of light passing through the lens passes through one area spaced a certain distance away from the center of the lens.
According to clause 13,

A MEMS scanner package wherein the light source and the sensor are arranged side by side at a predetermined interval on the horizontal surface of the second circuit board.
According to clause 12,

A MEMS scanner package further comprising a spacer disposed between the light source and the lens to maintain a constant distance between the light source and the lens.
object to be measured;

a light source disposed at a predetermined interval behind the object to be measured and emitting light toward the rear of the object to be measured;

a detector that receives light emitted from the light source and reflected from the back of the object to be measured and returned; and

An integrated support having a first surface supporting the light source and a second surface supporting the sensor, wherein the first surface and the second surface are inclined at a predetermined angle to face each other,

A position sensing device for a structure in which the light emitted from the light source is incident on the rear surface of the object to be measured at an inclined angle rather than perpendicular to the object to be measured.
According to clause 16,

A position sensing device for a structure, further comprising a flexible circuit board electrically connected to the light source and the sensor, respectively.
According to clause 17,

The object to be measured rotates around a rotation axis,

The detector includes at least one one-dimensional detector, and the long axis of the one-dimensional detector is arranged in a direction perpendicular to the rotation axis of the object to be measured, so that as the object to be measured rotates, the path of light emitted from the light source is of the detector. A device for sensing the position of a structure that changes along the long axis.
MEMS scanner element including a mirror;

A circuit board on which the MEMS scanner element is mounted;

a light source disposed at a predetermined distance behind the mirror of the MEMS scanner element and emitting light toward the rear of the mirror;

a detector that receives light emitted from the light source and reflected from the back of the mirror and returned;

An integrated support having a first surface supporting the light source and a second surface supporting the position sensor, wherein the first surface and the second surface are inclined at a predetermined angle to face each other,

A MEMS scanner package in which light emitted from the light source is incident on the back of the mirror at an inclined angle rather than perpendicular to the mirror.