WO2024062088A1 - Système de fermeture pour une soupape à vide - Google Patents

Système de fermeture pour une soupape à vide Download PDF

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Publication number
WO2024062088A1
WO2024062088A1 PCT/EP2023/076191 EP2023076191W WO2024062088A1 WO 2024062088 A1 WO2024062088 A1 WO 2024062088A1 EP 2023076191 W EP2023076191 W EP 2023076191W WO 2024062088 A1 WO2024062088 A1 WO 2024062088A1
Authority
WO
WIPO (PCT)
Prior art keywords
connection side
closure plate
support
closure
holding element
Prior art date
Application number
PCT/EP2023/076191
Other languages
German (de)
English (en)
Inventor
Peter Zvokelj
Martin NETZER
Original Assignee
Vat Holding Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vat Holding Ag filed Critical Vat Holding Ag
Publication of WO2024062088A1 publication Critical patent/WO2024062088A1/fr

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/0272—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor permitting easy assembly or disassembly

Definitions

  • the invention relates to a closure arrangement for a vacuum valve, which closure arrangement has a support element and a removable closure plate as well as a connection system for attaching the closure plate to the support element.
  • valves are intended to make a flow, in particular of a fluid, adjustable. With a valve, the flow can be permitted or completely shut off over a maximum valve opening cross section.
  • certain types of valves offer the possibility of regulating a flow rate per unit of time, i.e. they provide controllability of a fluid flow.
  • Vacuum valves are a specific type of valve. These are known in various embodiments from the prior art for regulating a volume or mass flow and/or for essentially gas-tight closing of a flow path that leads through an opening formed in a valve housing and are used in particular in vacuum chamber systems in the area of IC, semiconductor or substrate production, which must take place in a protected atmosphere, if possible without the presence of contaminating particles, is used.
  • Such vacuum chamber systems comprise in particular at least one evacuatable vacuum chamber intended to accommodate semiconductor elements or substrates to be processed or produced, which has at least one vacuum chamber opening through which the semiconductor elements or other substrates can be introduced into and out of the the vacuum chamber, as well as at least one vacuum pump for evacuating the vacuum chamber.
  • the highly sensitive semiconductor or liquid crystal elements sequentially pass through several process vacuum chambers, in which the parts located within the process vacuum chambers are each processed using a processing device. Both during the processing process within the process vacuum chambers and during transport from chamber to chamber, the highly sensitive semiconductor elements or substrates must always be in a protected atmosphere - especially in an airless environment.
  • peripheral valves are used to open and close a gas supply or outlet and, on the other hand, transfer valves are used to open and close the transfer openings of the vacuum chambers for moving the parts in and out.
  • vacuum valves through which semiconductor parts pass are called vacuum transfer valves, due to their predominantly rectangular shape
  • Opening cross-section also referred to as a rectangular valve and, due to its usual mode of operation, also as a slide valve, rectangular slide valve or transfer slide valve.
  • Peripheral valves are used in particular to control or regulate the gas flow between a vacuum chamber and a vacuum pump or another vacuum chamber.
  • peripheral valves for example within a pipe system between a process vacuum chamber or a transfer chamber and a vacuum pump, the atmosphere or another process vacuum chamber.
  • the opening cross section of such valves also called pump valves, is usually smaller than that of a vacuum transfer valve. Since, depending on the area of application, peripheral valves are used not only to completely open and close an opening, but also to control or regulate a flow by continuously adjusting the opening cross-section between a completely open position and a gas-tight closed position, they are also referred to as control valves.
  • a possible peripheral valve for controlling or regulating the gas flow is the pendulum valve.
  • a generally round valve plate is rotatably pivoted via a generally also round opening from a position releasing the opening into an intermediate position covering the opening.
  • the valve plate like the opening, is usually rectangular and in this first step is moved linearly from a position releasing the opening into one intermediate position covering the opening. In this intermediate position, the valve plate of the pendulum or slide valve is in a spaced position opposite the valve seat surrounding the opening.
  • a second step the distance between the valve plate and the valve seat is reduced so that the valve plate and the Valve seats are pressed evenly together and the opening is essentially sealed gas-tight.
  • This second movement preferably takes place essentially in a direction perpendicular to the valve seat.
  • the seal can e.g. B. either via a sealing ring arranged on the closure side of the valve plate, which is pressed onto the valve seat surrounding the opening, or via a sealing ring on the valve seat, against which the closure side of the valve disc is pressed. Due to the closing process, which takes place in two steps, the sealing ring between the valve plate and the valve seat is hardly subjected to shear forces that would destroy the sealing ring, since the movement of the valve plate in the second step takes place essentially in a straight line perpendicular to the valve seat.
  • a suitable material for sealing rings and seals in vacuum valves is, for example, fluororubber, also called FKM, in particular the fluoroelastomer known under the trade name "Viton”, as well as perfluoroelastomer, FFKM for short.
  • valves provide for a contact pressure control of the valve plate that is regulated depending on the pressure difference between the two sides of the valve plate.
  • a contact pressure control of the valve plate that is regulated depending on the pressure difference between the two sides of the valve plate.
  • an even distribution of force along the entire circumference of the sealing ring cannot always be guaranteed.
  • the aim is to decouple the sealing ring from supporting forces that result from the pressure applied to the valve.
  • valve components can typically occur due to wear of the sealing material or sealing surfaces as well as structural changes to the valve components, e.g. B. Drive unit or valve rod, due to environmental influences (temperature, humidity, shocks, etc.).
  • a valve closure In order to avoid any leaks that may arise or to keep the quality of the seal at a consistently high level, a valve closure is typically replaced at certain intervals. renewed. Such a maintenance interval is usually measured by the number of opening and closing cycles to be expected in a certain period of time or by a number and Characteristics of occurring influences (e.g. process gases). Maintenance is typically carried out as a precautionary measure in order to be able to largely rule out the occurrence of a leak in advance.
  • a replacement of the entire valve closure, i.e. H . of the entire valve plate, is typically disadvantageously associated with considerable effort.
  • the vacuum system must be at least partially ventilated regularly so that replacement can take place.
  • the valve plate is separated from the drive and a new plate is inserted. After the exchange, the previously ventilated part must be evacuated and flushed.
  • the invention is therefore based on the object of providing an improved vacuum valve, in particular a valve closure, which reduces or avoids the disadvantages mentioned above.
  • the basic idea of the present invention is to design a valve closure in several parts, whereby a closure plate can be attached to a support structure (support element) in a modular and detachable manner.
  • the closure plate preferably has the sealing sealing material. Maintenance can be carried out simply by replacing just the closure plate, with the carrier element included can remain connected to a drive unit of the vacuum valve.
  • connection of the closure plate to the carrier element can be realized in particular by a clamp connection, with one of the two components, i.e. H .
  • Closure plate or carrier element has a support and the other component has a holding element as a counterpart.
  • closure plate and the carrier element can preferably be designed in such a way that they can be connected to one another by pushing them together and by or during this pushing together the support interacts with the holding element. This allows a clamping force to be generated which presses or presses the closure plate onto the carrier element. pulls.
  • the support and/or the holding element can in particular have an undercut profile to generate the clamping force, the undercut profile in particular having a surface which is inclined relative to a connecting side or sealing surface.
  • the invention therefore relates to a vacuum valve for regulating a volume or mass flow and/or for closing and opening a valve opening.
  • the vacuum valve has a valve seat which has the valve opening defining an opening axis and a first sealing surface surrounding the valve opening.
  • the vacuum valve has a closure arrangement for regulating the volume or mass flow and/or for essentially gas-tight closing of the valve opening with a second sealing surface corresponding to the first Sealing surface and via a drive unit coupled to the closure arrangement, which is set up to provide a movement of the closure arrangement in such a way that the closure arrangement moves from an open position, in which the closure arrangement at least partially releases the valve opening, into a closed position in which a sealing contact is made
  • the first sealing surface and the second sealing surface have a sealing material in between and the valve opening is thereby closed in a gas-tight manner and can be adjusted back.
  • the closure arrangement has a carrier element with a first connection side and a closure plate with a second connection side, the first and second connection sides being designed to connect the carrier element to the closure plate.
  • the closure arrangement also has a support and a holding element, with the first connection side having the support and the second connection side having the holding element, or the first connection side having the holding element and the second connection side having the support.
  • the closure plate is brought together with the carrier element and the support and the holding element are designed to correspond in such a way that the interaction of the support with the holding element in this combined state generates a clamping force which is directed orthogonally to an extension of at least one of the connecting sides.
  • the holding element protrudes from the respective connection side and has a curved boundary line for interaction with the support.
  • the sealing material can be provided in particular on the first or second sealing surface.
  • the sealing material can be present as an O-ring in a groove in the closure plate or can be vulcanized onto the closure plate.
  • the support can in particular be designed as a groove, in particular a dovetail groove.
  • the support can in particular provide a support line or support surface.
  • the support is in particular shaped in such a way that it enables the clamping force to be generated.
  • the support can be shaped in such a way that a precise relative positioning of the closure plate and the carrier element can be provided by means of the support line or support surface provided.
  • the closure plate and the carrier element each extend in particular mainly in one extension direction.
  • the direction of extension corresponds to the direction of the greatest spatial extent of the respective component. This extent can also be referred to as the respective width of the closure plate or the carrier element.
  • the respective component has a height that is typically smaller than the width.
  • connection system of the closure arrangement can in particular be designed such that the closure plate and the carrier element are brought together by being pushed together in a direction orthogonal to the direction of extension.
  • the pushing together takes place here in particular along a direction that defines the direction.
  • the support and the holding element come into effective contact.
  • the interaction of the holding element and the support in this way ensures, on the one hand, that the closure plate is held on the carrier element and, on the other hand, that a contact pressure is generated which presses the closure plate onto the carrier element.
  • the closure plate In this collapsed state, the closure plate can be fixed to the carrier element. Fixing can be done by applying force in the direction of pushing together, e.g. B. by screwing.
  • the application of force can cause the support and the holding element to be pressed together.
  • the two elements, support and holding element are preferably designed in such a way that the extent of the clamping force acting orthogonally to the connecting sides can be varied depending on the applied force. In other words: the greater the force for fixing the closure plate to the carrier element, the greater the clamping force can be.
  • the vacuum valve, the curved boundary line can have a radius of curvature r, with a width b of the first or second connection side corresponding to at least twenty times the radius of curvature r. It can apply accordingly ⁇ 20.
  • the boundary line defines in particular at least part of the edge of the holding element.
  • the boundary line can also define the area of the holding element (i.e. at least partially enclose this area) which develops the clamping effect together with the support.
  • the holding element can have a round head shape or mushroom head shape at its end protruding from the respective connection side.
  • the shape of the holding element can be provided by a body which, as the distance from the respective connection side increases, has an increasingly larger extent orthogonal to the distance normal over an area.
  • the cross section of the round-head-shaped body can have the shape of a trapezoid, in particular an isosceles trapezoid.
  • the boundary line can in particular be given by a circumference of the protruding body at its greatest extent orthogonal to the distance normal.
  • the round-head-shaped holding element provides one
  • the boundary line may form an ellipse, a circle or a semicircle.
  • the boundary line can describe a polygon.
  • the first or second connection side can have a receptacle, in particular a recess or bore with an internal thread, for fastening the holding element.
  • a receptacle in particular a recess or bore with an internal thread, for fastening the holding element.
  • the holding element can be quickly and easily inserted on this connection side or, for example, replaced if it is damaged.
  • the holding element can have a shape that corresponds to the shape and extent of the receptacle.
  • the holding element can be firmly connected to the respective connection side.
  • the support can have a curved support line for interaction with the holding element, wherein the support line has a radius of curvature r, wherein a width b of the first or the second connection side corresponds to at least fifteen times the radius of curvature r.
  • the support line forms an ellipse, a circle or a semicircle.
  • the support line can be designed to correspond to the boundary line of the holding element.
  • the course and/or the dimensioning can at least essentially correspond to that of the boundary line.
  • clamping of the closure plate to the carrier element can be optimized so that the clamping force has a desired extent (size) at defined positions of the closure plate.
  • the closure plate can have a fastening element projecting from its connecting side for releasably connecting the closure plate to the carrier plate.
  • the fastening element can be designed to be cantilevered with respect to the connection side and have a recess, in particular a hole, piercing through the fastening element for the passage of a fastening means, in particular a screw.
  • the fastening element can have a stop aligned parallel to the direction of extension of the closure plate and the carrier element can have a centering surface corresponding to the stop, with interaction of the stop and the centering surface providing an alignment of the closure plate relative to the carrier element.
  • the exact alignment can thereby be provided in particular in the direction of the extension direction, in particular in such a way that the closure plate and the carrier element lie one above the other in a desired position and/or, for example, the position of the circumference of the closure plate corresponds to the position of the circumference of the carrier element.
  • the fastening element firmly connected to the closure plate advantageously simplifies the merging and joining (connecting) of the closure plate and the carrier element, since the position of the fastening element can be fixed in a defined manner and a fastening counterpart can be arranged and shaped to suit the carrier element.
  • the carrier element can have a first guide element which extends orthogonally to the direction of extension of the carrier element, the first guide element having a rectangular groove and the rectangular groove providing an undercut.
  • the closure plate can have a second guide element, wherein the second guide element has an undercut, in particular a dovetail-shaped undercut, for connection to the rectangular groove.
  • the second guide element can be provided by the holding element.
  • Such a guide offers an advantageous assembly aid when assembling the closure plate and support element.
  • the plate can be pushed onto the carrier using the guide, with the guide already providing relative positioning of the components.
  • the closure arrangement can have at least two, in particular four, holding elements, with the second connection side having the at least two holding elements.
  • Holding elements can achieve a simplified and easier alignment of the closure plate relative to the carrier element.
  • the holding elements are shaped as round heads (round head tenons) or mushroom heads, this can provide a simple, precise and at the same time robust joining and clamping connection.
  • the vacuum valve may comprise a separating device for separating a process atmosphere region from an external atmosphere region.
  • the process atmosphere area is to be understood in particular as an area that can be defined by a process chamber. In this area, a process atmosphere, in particular a vacuum, can be created for processing substrates. Components intended for this area must e.g. B. in terms of material resistance and increased requirements.
  • the external atmosphere area is to be understood in particular as an area in which normal atmospheric conditions exist, e.g. B. Room air.
  • the drive unit can be assigned here at least partially, in particular completely, to the outside atmosphere region and the valve closure in particular to the process atmosphere region.
  • the separating device of the valve can be formed, for example, by a bellows.
  • the bellows can e.g. B. be provided within the valve housing or the drive unit.
  • a known from the prior art and for example in the U. S. Patent 6, 772, 989 has the valve described a valve body with two connections, a valve seat arranged in a flow path connecting the two connections in the flow space and an opening opposite the valve seat.
  • a piston of a pneumatic cylinder system is arranged in a valve cover that closes the opening and, via a valve rod, drives a valve plate that opens and closes the valve seat.
  • the valve cover is attached to the opening in a gas-tight manner using a bellows plate.
  • the two ends of a bellows that surrounds the valve rod are attached in a gas-tight manner to the inner edge surface of the bellows plate and to the valve disk.
  • the valve plate On the surface facing the valve seat, the valve plate has an annular retaining groove in which a sealing ring is arranged.
  • a valve housing is e.g. B.
  • the bellows which can be expanded and compressed along its longitudinal axis within the area of the adjustment path of the plate, seals the flow space from the valve rod and the drive in an airtight manner.
  • bellows There are two main types of bellows used.
  • the membrane bellows on the other hand the corrugated bellows, the latter of which is distinguished from the membrane bellows in that it has no welded seams and can be cleaned more easily, but has a lower maximum stroke.
  • the invention also relates to a closure arrangement for a vacuum valve for regulating a volume or mass flow and/or for closing and opening a valve opening.
  • the closure arrangement has a coupling designed for coupling to a drive unit of the vacuum valve and via a second sealing surface which corresponds to a first sealing surface of a valve seat of the vacuum valve.
  • the closure arrangement also has a carrier element with a first connection side and a closure plate with a second connection side, the first and second connection sides being designed to connect the carrier element to the closure plate.
  • a support and a holding element are provided, with the first connection side having the support and the second connection side having the holding element or the first connection side having the holding element and the second connection side having the support.
  • the closure plate is brought together with the carrier element and the support and the holding element are designed to correspond in such a way that a clamping force is generated by the interaction of the support with the holding element in this brought together state, which clamping force is directed orthogonally to an extension of at least one of the connecting sides.
  • the holding element protrudes from the respective connecting side and has a curved boundary line for interaction with the support.
  • the support element can have a third connection side opposite the first connection side and a further closure plate, the further closure plate being connected to the support element by means of the third connection side, with a further holding element of the closure plate or of the support element being connected to a further support of the closure plate or . of the carrier element interacts in a clamping manner.
  • At least one of the closure plates of the closure arrangement, in particular both, can be present according to one of the following embodiments according to the invention.
  • the invention further relates to a closure plate for a closure arrangement described above.
  • the closure plate has a second sealing surface which corresponds to a first sealing surface of a valve seat of a vacuum valve, the second sealing surface having a sealing material (seal).
  • the closure plate also has a second connection side, wherein the second connection side is designed for connection to a first or third connection side of a carrier element of the closure arrangement and is provided on the back of the closure plate relative to the sealing surface.
  • the connection side points in particular in an opposite direction relative to the sealing surface.
  • the closure plate has a holding element, wherein the holding element is designed such that when the closure plate is brought together with the carrier element, a clamping force is generated by the interaction of a support of the carrier element with the holding element, which is directed orthogonally to an extension of the second connection side.
  • the holding element protrudes from the second connection side and has a curved boundary line for interaction with the support.
  • the curved boundary line can have a radius of curvature r, with a width b of the second connection side corresponding to at least five ten times the radius of curvature r.
  • the second connection side can have a receptacle, in particular a recess or bore with an internal thread, for fastening the holding element.
  • the holding element can be firmly connected to the second connection side.
  • the holding element can have a round-head-shaped head at its end protruding from the second connection side.
  • the boundary line may form an ellipse, a circle or a semicircle.
  • the closure plate can have a fastening element projecting from the second connection side for releasably connecting the closure plate to a carrier element of the closure arrangement.
  • the fastening element can be designed to be cantilevered with respect to the second connection side and have a recess, in particular a hole, piercing through the fastening element for the passage of a fastening means, in particular a screw.
  • the fastening element can have a stop aligned parallel to the direction of extension of the closure plate and the support element can have a centering surface corresponding to the stop, with interaction of the stop and the centering surface providing an alignment of the closure plate relative to the support element.
  • Fig. la-c a first embodiment of a closure arrangement according to the invention with a carrier element and closure plate;
  • Fig. 2 a holding element according to the invention
  • FIG. 3a-b a further embodiment of a closure arrangement according to the invention with a carrier element and closure plate;
  • FIG. 4a-b a further embodiment of a closure arrangement according to the invention with a carrier element and closure plate;
  • FIG. 5a-b a further embodiment of a closure arrangement according to the invention with a carrier element and closure plate;
  • Fig. 6a-c an embodiment of a vacuum valve according to the invention.
  • Figures 1a-1c show an embodiment of the closure arrangement 10 according to the invention and the closure plate 30 according to the invention.
  • the figure la shows a closure arrangement 10 according to the invention with a carrier element 20 and a first closure plate 30 and a second closure plate 40.
  • the closure plate 30 is shown in a partial view in order to clarify the connection of the closure plate 30 with the carrier element 20 lying centrally between the closure plates 30, 40.
  • valve closure can provide a seal for two valve openings, in particular opposite ones.
  • valve closure can optionally be pressed against one of the openings.
  • Figure 1b shows a connecting side of the closure plate 30.
  • Figure 1c shows a sealing surface 32 of the closure plate 30, which is located on the rear side opposite the connecting side 31.
  • the sealing surface 32 has a circumferential seal and can thus provide a desired sealing effect.
  • the holding elements 33a-d are arranged on the connecting side 31 of the closure plate 30.
  • the holding elements 33a-d are arranged here along a line on the connection side 31.
  • the closure plate 30 also has four fastening elements 34a-d.
  • the carrier element 20 has a support 21 on its connecting side 24.
  • the holding elements 33a-d are arranged and shaped in such a way that they interact with the support 21 of the carrier element 20 in a mounted, assembled state (cf. Figure la).
  • the holding elements 33a-d lie on the support and cause the closure plate 30 to be clamped to the carrier element 20.
  • a corresponding clamping force acts orthogonally to an extension direction E of the assembled components, as well as orthogonally to a direction defining the height h of the closure plate 30.
  • the width b of the closure plate 30 is typically defined by the extension in the extension direction E.
  • the holding elements 33a-d are shaped as round heads in the embodiment shown.
  • Figure 2 shows a perspective view of the holding element 33a designed as a round head.
  • the remaining holding elements 33b-d are shaped analogously.
  • the round head shape provides an expansion that increases orthogonally to the distance as the distance from the closure plate 30 increases.
  • the holding element 33a (and also the remaining holding elements 33b-dj each) thus provides a holding surface 35a that runs obliquely to the surface of the connecting side. Due to the oblique course of the holding surface 35a, the closure plate 30 is pressed against the carrier element 20 when it is brought together with the carrier element 20 through the resulting interaction with the support 21. In particular, for this purpose, the closure plate 30 is pushed in the joining direction F relative to the carrier element 20 while there is contact with the carrier element 20.
  • the support 21 can provide an oblique support surface analogous to the round head, which enables a simple and precise connection of the two components. In the assembled state, the support surface and the holding surface 35a are in contact, in particular the support surface and the holding surface 35a touch each other flatly.
  • the support 21 can be designed as an edge or groove.
  • the support can extend over large parts of the width of the support element or can be made in several parts in the form of individual segments, in particular with the number, shape and size corresponding to the holding elements 33a-d.
  • the holding elements 33a-d have at their ends, d. H . in the areas that have the greatest distance from the connection side 31, each has a diameter d (double radius r), which is smaller in relation to the width b by at least a factor of 10, in particular a factor of 15 or 20.
  • the diameter decreases accordingly as the proximity to the surface of the closure plate 30 increases.
  • the fastening elements 34a-d are arranged cantilevered at the upper end of the closure plate 30. As shown in Figure la, the closure plate 30 can be attached to the carrier element 20 by means of these fastening elements 34a-d. In the embodiment shown, the closure plate 30 is screwed to the carrier element 20 by means of these fastening elements 34a-d.
  • the positioning of the fastening elements 34a-d also provides a limitation on the mobility of the closure plate 30 relative to the carrier element 20 during assembly (sliding together) (in the joining direction Fj and thus enables the definition of a relative alignment of the components. This means that assembly can be carried out easily and without much prior knowledge on the part of the user.
  • the fastening elements 34b and 34c each have respective lateral stops 36b and 36c.
  • the stops 36b and 36c point in opposite directions (parallel to the extension direction E).
  • the carrier element 20 has centering surfaces 22b and 22c which cooperate and correspond to the stops 36b and 36c.
  • the stops 34b-c contact the centering surfaces 22b-c, which are shaped in such a way that a distance between the two stop surfaces 34b-c essentially corresponds to a distance between the two centering surfaces 22b-c .
  • the horizontal alignment occurs accordingly (automatically) when the components are pushed together, thus providing simple and reliable assembly.
  • Figures 3a and 3b show a further embodiment of the closure arrangement 10 according to the invention and the closure plate 30 according to the invention.
  • the closure plate 30 here has guide elements 37a and 37b instead of the fastening elements 34a-d.
  • Guide elements 37a-bj each have an undercut, in particular dovetail-shaped, for connection with a groove.
  • the undercuts are provided opposite each other on the sides of the guide elements 37a-b.
  • the carrier element 20 accordingly has a corresponding guide element 23 extending orthogonally to the direction of extension E of the carrier element 20.
  • the guide element 23 of the carrier element 20 here has a rectangular groove on both sides and the rectangular grooves provide undercuts.
  • the closure plate 30 is fixed to the carrier element 20 here by separate fastening bodies which are fixed to the top of the carrier element 20, e.g. B. screwed on and press the locking plate 30 in the joining direction F. This ensures that the closure plate 30 is clamped to the carrier element 20 by means of the interaction of the holding elements 33a-d with the support 21 and that the closure plate 30 is held on the carrier element 20 by means of the guide elements.
  • Figures 4a and 4b show a further embodiment of the closure arrangement 10 according to the invention and the closure plate 30 according to the invention.
  • 3b has the closure plate 30 instead of the four Holding elements 33a-d only have two holding elements 33b and 33c. These two holding elements 33b and 33c are also present in a different positioning.
  • the two holding elements 33b and 33c are positioned in such a way that when the closure plate 30 is brought together with the carrier element 20, they act as guide elements on the closure plate side and engage in the grooves provided by the guide element 23 on the support element side. Furthermore, when the desired positioning relative to the carrier element 20 is reached in the joining direction F, the two holding elements 33b and 33c come into contact with the support 21 and thus bring about the clamping and the precise positioning.
  • closure plate 30 can be held on the carrier element 20 by the further guide elements 37a-b.
  • the closure plate 30 can be held on the carrier element 20 by the fastening bodies provided.
  • the fastening bodies can have a corresponding edge which engages in a counterpart on the closure plate 30.
  • Figures 5a and 5b show a further embodiment of the closure arrangement 10 according to the invention and the closure plate 30 according to the invention.
  • the closure plate 30 has two different holding elements 33e and 33f instead of the four round-head-shaped holding elements 33a-d.
  • the holding elements 33e and 33f are each formed here in one piece with a joining body 38a and 38b offset from the connecting side 31.
  • the holding elements 33e and 33f are on the in The underside of the joining bodies 38a and 38b facing the joining direction F is provided.
  • the joining bodies 38a and 38b also have the guide elements 37a-b on the sides for precisely guided pushing together with the carrier element 20.
  • the support 21 of the carrier element 20 can also have recesses in accordance with the arrangement and shape of the holding elements 33e and 33f, whereby in the pushed-together state the holding elements 33e and 33f are present in the recesses and, through this interaction, the closure plate 30 is centered relative to the carrier element 20 , in particular in the extension direction E, is provided.
  • the one-piece design shown provides a robust and compact variant for precise and easy mounting of the closure plate 30 on the carrier element 20.
  • FIGS 6a-6c show an embodiment of a vacuum valve 1 according to the invention, which is designed as a (two-sided) vacuum transfer valve 1, shown in different closing positions.
  • the vacuum valve 1 has a closure arrangement 10 according to the invention with two closure plates (valve disks) 30 and 40.
  • Each of the closure plates has a sealing surface 32a, 32b with a seal for gas-tight closure of the openings 2a, 2b.
  • the openings have a cross section corresponding to the closure plates and are formed in a valve wall.
  • the valve wall can be, for example, the wall of a vacuum process chamber.
  • the openings 2a, 2b are each provided with a valve seat 3a, 3b, which in turn also has a valve seat provides a sealing surface corresponding to the sealing surface of the closure plate.
  • the sealing surfaces 32a, 32b of the closure plates 30, 40 surround the respective closure plates and have the sealing material (seal). In a closed position S ( Figure 6c), the seal is pressed between the sealing surfaces.
  • the openings 2a, 2b connect a gas area M with the gas areas L and R.
  • valve seats 3a, 3b together with their sealing surface can alternatively be designed as valve components that are structurally firmly connected to the valve 1 and can be arranged, e.g. screwed, at a chamber opening.
  • the closure arrangement 10 can, as shown here, be arranged on an adjustment arm 5, which is here, for example, rod-shaped, and extends along a geometric adjustment axis V.
  • the adjusting arm 5 is mechanically coupled to a drive unit 7, by means of which the closure arrangement 10 in the first gas area M by adjusting the adjusting arm 5 by means of the drive unit 7 between an open position 0 (FIG. 6a) via an intermediate position Z (FIG. 6b).
  • Closing position S (Fig. 6c) is adjustable.
  • the closure arrangement 10 In the open position 0, the closure arrangement 10 is located outside a projection area of the openings 2a, 2b and completely exposes them, as shown in Figure 6a.
  • the Closure arrangement 10 By linearly adjusting the closure arrangement 10 in the axial direction in a plane parallel to or coaxial with the adjustment axis V and parallel to the valve wall, the Closure arrangement 10 can be adjusted from the open position 0 to the intermediate position Z by means of the drive unit 7.
  • the sealing surfaces 32a, 32b are located at a distance from the sealing surfaces of the valve seats surrounding the openings 2a, 2b.
  • the closure arrangement 10 can be adjusted from the intermediate position Z to the closed position S (FIG. 6c).
  • the closure plate 30 closes the opening 2a in a gas-tight manner and separates the gas area M from the gas area R in a gas-tight manner.
  • the vacuum valve is opened and closed by means of the drive unit 7, here by an L-shaped movement in two z. B. mutually perpendicular directions of the closure arrangement 10. It is understood that, analogous to closing the opening 2a with the closure plate 30, a gas-tight sealing of the opening 2b can be provided by means of the closure plate 40 by adjusting the closure arrangement 10 in the other direction along the axis A.
  • a transfer valve 1 as shown is typically provided for sealing a process volume (vacuum chamber) and for loading and unloading the volume. Frequent changes between the open position 0 and the closed position S are the rule in such use. This can cause increased signs of wear on the sealing surfaces 32a, 32b, the seals and the mechanically moving components occur.

Abstract

L'invention concerne une soupape à vide (1) comprenant un siège de soupape (3, 3b), un système de fermeture (10) et une unité d'entraînement (7) accouplée au système de fermeture (10), le système de fermeture (10) comprenant un élément porteur (20) ayant un premier côté de raccordement et une plaque de fermeture (30, 40) ayant un second côté de raccordement et les premier et second côtés de raccordement étant conçus pour raccorder l'élément porteur (20) à la plaque de fermeture (30, 40), avec un support et un élément de maintien, la plaque de fermeture (30, 40) étant raccordée à l'élément porteur (20) et le support et l'élément de maintien correspondant de telle sorte qu'en conséquence d'une interaction entre le support et l'élément de maintien à l'état assemblé, une force de serrage est générée qui est dirigée orthogonalement à une étendue d'au moins l'un des côtés de raccordement, et l'élément de maintien fait saillie à partir du côté de raccordement respectif et a une ligne de limite incurvée pour une interaction avec le support.
PCT/EP2023/076191 2022-09-23 2023-09-22 Système de fermeture pour une soupape à vide WO2024062088A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102022003517.0 2022-09-23
DE102022003517 2022-09-23

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WO2024062088A1 true WO2024062088A1 (fr) 2024-03-28

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Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6056266A (en) 1997-10-20 2000-05-02 Vat Holding Ag Device for closing an opening of a tank or a tubular conduit
US6089537A (en) 1999-06-23 2000-07-18 Mks Instruments, Inc. Pendulum valve assembly
US6416037B1 (en) 2001-01-11 2002-07-09 Vat Holding Ag Vacuum pipe
US6443426B1 (en) * 1999-07-07 2002-09-03 Arthur Brenes Slide lock for vacuum valve
US6629682B2 (en) 2001-01-11 2003-10-07 Vat Holding Ag Vacuum valve
US6772989B2 (en) 2001-09-18 2004-08-10 Smc Corporation Maintenance-easy two-port valve
US20080017823A1 (en) * 2006-07-18 2008-01-24 Litscher Bernhard Vacuum valve and closure disc which can be mounted on a connecting rod
US20110095218A1 (en) * 2009-10-27 2011-04-28 Vat Holding Ag Closing unit for a vacuum valve
US7959130B2 (en) * 2008-07-18 2011-06-14 Vat Holding Ag Vacuum valve and closure plate for a vacuum valve
US8678344B2 (en) * 2008-12-11 2014-03-25 Vat Holding Ag Mounting of a valve plate on a valve rod
US10253889B2 (en) * 2015-02-12 2019-04-09 Smc Corporation Gate valve

Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6056266A (en) 1997-10-20 2000-05-02 Vat Holding Ag Device for closing an opening of a tank or a tubular conduit
US6089537A (en) 1999-06-23 2000-07-18 Mks Instruments, Inc. Pendulum valve assembly
US6443426B1 (en) * 1999-07-07 2002-09-03 Arthur Brenes Slide lock for vacuum valve
US6416037B1 (en) 2001-01-11 2002-07-09 Vat Holding Ag Vacuum pipe
US6629682B2 (en) 2001-01-11 2003-10-07 Vat Holding Ag Vacuum valve
US6772989B2 (en) 2001-09-18 2004-08-10 Smc Corporation Maintenance-easy two-port valve
US20080017823A1 (en) * 2006-07-18 2008-01-24 Litscher Bernhard Vacuum valve and closure disc which can be mounted on a connecting rod
US7959130B2 (en) * 2008-07-18 2011-06-14 Vat Holding Ag Vacuum valve and closure plate for a vacuum valve
US8678344B2 (en) * 2008-12-11 2014-03-25 Vat Holding Ag Mounting of a valve plate on a valve rod
US20110095218A1 (en) * 2009-10-27 2011-04-28 Vat Holding Ag Closing unit for a vacuum valve
US10253889B2 (en) * 2015-02-12 2019-04-09 Smc Corporation Gate valve

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