WO2024055352A1 - 运输装置 - Google Patents

运输装置 Download PDF

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Publication number
WO2024055352A1
WO2024055352A1 PCT/CN2022/120853 CN2022120853W WO2024055352A1 WO 2024055352 A1 WO2024055352 A1 WO 2024055352A1 CN 2022120853 W CN2022120853 W CN 2022120853W WO 2024055352 A1 WO2024055352 A1 WO 2024055352A1
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WO
WIPO (PCT)
Prior art keywords
connecting plate
plate
shielding plate
transportation device
along
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/CN2022/120853
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English (en)
French (fr)
Inventor
蒋孝恩
张宁娜
张琳
张兰
陈定操
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TSMC China Co Ltd
Taiwan Semiconductor Manufacturing Co TSMC Ltd
Original Assignee
TSMC China Co Ltd
Taiwan Semiconductor Manufacturing Co TSMC Ltd
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Filing date
Publication date
Application filed by TSMC China Co Ltd, Taiwan Semiconductor Manufacturing Co TSMC Ltd filed Critical TSMC China Co Ltd
Publication of WO2024055352A1 publication Critical patent/WO2024055352A1/zh
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations

Definitions

  • the present application relates to the field of semiconductor technology, and in particular to a transportation device.
  • wafers can be transported by transport devices. Suspended particles are easily generated due to friction between various parts of the transport device in motion. Since the wafer is a silicon wafer used to make silicon semiconductor circuits, it needs to go through multiple processes in a relatively clean environment to finally form a semiconductor product.
  • the International Organization for Standardization (ISO International Organization for Standardization) has formulated standards for the cleanliness level of airborne particles in clean rooms or clean areas.
  • the existing transport devices do not clean the suspended particles generated during movement, so it is difficult for the transport devices to meet this standard.
  • the transportation device provided by the embodiment of the present application can reduce suspended particles generated during transportation and improve the cleanliness level of the environment where the transportation device is located.
  • Embodiments of the present application provide a transportation device, which is used to connect to an air suction pump.
  • the transportation device includes: a base, the base includes a plurality of through holes, and the through holes are used to communicate with the air inlet of the air suction pump;
  • the sliding component is provided on the base.
  • the sliding component includes a guide rail and a sliding seat.
  • the guide rail extends along the first direction.
  • the sliding seat and the guide rail are movably connected.
  • a plurality of through holes are provided along the guide rail.
  • the sliding assembly further includes a dust-proof piece, the dust-proof piece extends along the first direction, the dust-proof piece covers the guide rail at least along the second direction, and the slide base includes interconnected connectors and slide blocks, The slider moves along the guide rail, and the connecting piece and the dustproof piece are enclosed to form a receiving space for accommodating the slider.
  • the first direction and the second direction are arranged to intersect.
  • the dust-proof part includes a first shielding plate and a second shielding plate that are connected to each other.
  • the first shielding plate and the slider are spaced apart along the third direction.
  • the connecting piece includes a first connecting plate.
  • the connecting plate is connected to the slider.
  • the first connecting plate and the second shielding plate are arranged on opposite sides of the slider.
  • the third direction, the first direction and the second direction are arranged to intersect each other.
  • the connecting piece is at least partially inserted between the dust-proof piece and the guide rail and connected with the slider.
  • the dust-proof part includes a first shielding plate and a second shielding plate that are connected to each other.
  • the first shielding plate and the slider are spaced apart along the third direction
  • the connecting piece includes a first connecting plate that is connected to each other. and a second connecting plate.
  • the second connecting plate is connected to the slider and is spaced apart from the first shielding plate along the third direction.
  • the first connecting plate and the second shielding plate are arranged on opposite sides of the slider.
  • the third direction, the first direction and the second direction are arranged to intersect each other.
  • the number of sliding assemblies is two
  • the transportation device further includes a cover plate, and the cover plate connects two first connecting plates.
  • the dust-proof member includes a first shielding plate, a second shielding plate and a third shielding plate.
  • the second shielding plate and the third shielding plate are respectively vertically connected to the first shielding plate
  • the connecting member includes a third shielding plate.
  • the first connecting plate is connected to the slider.
  • the fourth connecting plate and the first connecting plate are vertically connected to the third connecting plate respectively.
  • the fourth connecting plate The first shielding plate and the third connecting plate are arranged opposite to the first connecting plate, and along the third direction, the first shielding plate and the third connecting plate are arranged opposite to each other at least partially, and the third shielding plate is arranged between the first connecting plate and the fourth connecting plate.
  • the dust-proof member includes a first shielding plate, a second shielding plate and a third shielding plate.
  • the second shielding plate and the third shielding plate are respectively vertically connected to the first shielding plate
  • the connecting member includes a third shielding plate.
  • the second connecting plate is connected to the slider and the first connecting plate respectively and is spaced apart from the first shielding plate along the third direction.
  • the fourth connecting plate The board and the first connecting plate are respectively vertically connected to the third connecting plate.
  • the fourth connecting plate and the first connecting plate are arranged oppositely.
  • the first shielding plate and the third connecting plate are at least partially arranged oppositely.
  • the third shielding plate is provided between the first connecting plate and the fourth connecting plate.
  • the number of sliding assemblies is two
  • the transport device further includes a cover plate, and the cover plate connects two fourth connecting plates.
  • the transportation device further includes a driving member, which is connected to the cover plate and used to drive the sliding seat to move in the first direction.
  • the driving member includes a motor, an intermeshing main gear and a rack.
  • the rack is disposed between two guide rails, and the driving motor is used to drive the main gear to move along the rack.
  • the driving member further includes a driven gear meshed with the rack, and the driven gear is connected to the cover plate.
  • the transportation device provided by the embodiment of the present application is used to connect to the air pump.
  • the transportation device includes: a base and a sliding assembly.
  • the base includes a plurality of through holes, and the through holes are used to communicate with the air inlet of the air pump;
  • the sliding assembly is located on the base, and the sliding assembly includes a guide rail and a sliding seat.
  • the guide rail extends along the first direction, and the sliding seat and the guide rail can For mobile connection, multiple through holes are provided along the guide rail.
  • the sliding seat in the sliding assembly can reduce suspended particles from falling into the guide rail.
  • the through hole is used to communicate with the air inlet of the air pump. The suspended particles generated when the transportation device moves can be sucked into the through hole by the air pump. to improve the cleanliness of the transport device.
  • Figure 1 is a schematic diagram of a transportation device provided by an embodiment of the present application.
  • Figure 2 is a partial enlarged view of part A in Figure 1;
  • Figure 3 is a schematic cross-sectional structural diagram of a sliding assembly provided by an embodiment of the present application.
  • Figure 4 is a schematic cross-sectional structural diagram of another sliding assembly provided by an embodiment of the present application.
  • Figure 5 is a schematic cross-sectional structural diagram of another sliding assembly provided by an embodiment of the present application.
  • Figure 6 is a schematic cross-sectional structural diagram of another sliding assembly provided by an embodiment of the present application.
  • Transport device 100.
  • X first direction
  • Y second direction
  • Z third direction
  • the transportation device 100 is used to connect to an air pump.
  • the transportation device 100 includes: a base 1 and a sliding assembly 2.
  • the base 1 includes a plurality of A through hole 11 is used to communicate with the air inlet of the air pump; the sliding assembly 2 is provided on the base 1.
  • the sliding assembly 2 includes a guide rail 21 and a sliding seat 22.
  • the guide rail 21 extends along the first direction X , the sliding seat 22 is movably connected to the guide rail 21, and a plurality of through holes 11 are provided along the guide rail 21.
  • the transport device 100 can be used to transport and transfer wafers, and a picking or unloading device can be installed on the sliding assembly 2 .
  • the material picking or unloading device can be a manipulator, and the manipulator can suck or grab materials that need to be transferred, such as wafers.
  • the sliding component 2 drives the manipulator to move along the first direction X.
  • the base 1 can be placed on the ground or on a processing table.
  • the sliding seat 22 can slide along the guide rail 21 to change the relative position of the sliding seat 22 and the guide rail 21 .
  • the sliding assembly 2 is provided on the base 1.
  • the sliding assembly 2 includes a sliding base 22 and a guide rail 21 extending along the first direction X.
  • a plurality of through holes 11 are provided along the guide rail 21. It is provided that the through hole 11 can be connected with the air inlet of the air pump, so the suspended particles generated when the transport device 100 is moving can be sucked away by the air pump to the through hole 11, thereby improving the cleanliness of the transport device 100 .
  • the sliding assembly 2 further includes a dust-proof member 23 extending along the first direction X.
  • the dust-proof member 23 shields the guide rail 21 at least along the second direction Y.
  • the connecting piece 221 and the sliding block 222 are connected.
  • the sliding block 222 moves along the guide rail 21.
  • the connecting piece 221 and the dustproof piece 23 are enclosed to form a receiving space for accommodating the sliding block 222.
  • the first direction X and the second direction Y are arranged to intersect. .
  • the connecting piece 221 with the slider 222 also moves along the guide rail 21 .
  • the dust-proof member 23 extending along the first direction X can cover the guide rail 21 in the second direction Y.
  • the first direction X and the second direction Y can be perpendicular to each other.
  • the first direction Y may be the width direction of the guide rail 21 .
  • Part of the dust-proof part 23 can be disposed at an end of the slider 222 away from the guide rail 21 .
  • Part of the dust-proof part 23 can be spaced apart from the slider 222 along the second direction Y and fixedly connected to the base 1 . In this way, the dust-proof part 23 can be reduced in size.
  • the connecting piece 221 and the dustproof piece 23 enclose a receiving space for accommodating the slider 222. This can reduce the sputtering of suspended particles generated by the mutual movement between the sliding block 222 and the guide rail 21 to the outside of the receiving space. At the same time, the connecting piece 221 and the dust-proof member 23 can also reduce the blocking of suspended particles from entering the containing space.
  • Figure 3 is a sliding assembly 2 provided by this application.
  • the dustproof member 23 includes a first shielding plate 231 and a second shielding plate 232 that are connected to each other.
  • the first shielding plate 231 and the slider 222 are spaced apart along the third direction Z.
  • the connecting member 221 includes a first shielding plate 231 and a second shielding plate 232. Connecting plate 221a, the first connecting plate 221a is connected to the slider 222, along the second direction Y, the first connecting plate 221a and the second shielding plate 232 are provided on opposite sides of the slider 222, the third direction Z, the first direction X and the second direction Y are set to intersect each other.
  • the first direction X and the second direction Y may be horizontal directions
  • the first direction X may be the length direction of the guide rail 21
  • the second direction Y may be the width direction of the guide rail 21
  • the third direction Z can be vertical.
  • the first direction X, the second direction Y and the third direction Z may be perpendicular to each other.
  • the first shielding plate 231 and the second shielding plate 232 are vertically connected to each other and extend along the first direction X.
  • the length of the first shielding plate 231 and the second shielding plate 232 extending along the first direction The extending lengths are equal, or, in order to better improve the shielding effect of the dustproof member 23 on the guide rail 21 and the slider 222 , the length of the first shielding plate 231 and the second shielding plate 232 extending along the first direction X can be greater than that of the guide rail 21 The length extending along the first direction X.
  • the first connecting plate 221a is connected to the slider 222 and can move along the guide rail 21 together.
  • a gap can be provided between the first shielding plate 231 and the first connecting plate 221a, so that there is no gap between the first shielding plate 231 and the first connecting plate 221a. contact to avoid friction.
  • the connecting piece 221 is at least partially inserted between the dust-proof piece 23 and the sliding block 222 and connected with the sliding block 222 .
  • the slider 222 is disposed on the guide rail 21.
  • the dustproof member 23 can be disposed around the periphery of the slider 222. In order to make the slider 222 and the connecting piece 221 move together in the first direction
  • FIG 4 is another sliding component 2 provided by this application.
  • the dustproof member 23 includes a first shielding plate 231 and a second shielding plate 232 that are connected to each other.
  • the first shielding plate 231 and the slider 222 are spaced apart along the third direction Z.
  • the connecting member 221 includes a first connecting plate 221a that is connected to each other. and the second connecting plate 221b.
  • the second connecting plate 221b is connected to the slider 222 and is spaced apart from the first shielding plate 231 along the third direction Z.
  • the first connecting plate 221a and the second shielding plate 232 Located on opposite sides of the slider 222 , the third direction Z, the first direction X and the second direction Y are arranged to intersect each other.
  • the first shielding plate 231 and the slider 222 are spaced apart along the third direction Z, and the width of the first shielding plate 231 along the second direction Y may be greater than the width of the slider 222 along the second direction Y. , so that the first shielding plate 231 has a better shielding effect on the slider 222. In this way, the connector 221 needs to be provided with a second connecting plate 221b to connect with the slider 222. Similarly, in order to reduce the impact of the first shielding plate 231 when moving, The generated suspended particles may cause a gap to exist between the first shielding plate 231 and the first connecting plate 221a.
  • the second connecting plate 221b can be connected to an end of the slider 222 away from the guide rail 21, or the second connecting plate 221b can include a receiving hole through which the slider 222 can pass. The receiving hole is connected to the second connecting plate 221b.
  • the number of sliding assemblies 2 is two, and the transport device 100 further includes a cover plate 3 that connects two first connecting plates 221a.
  • the number of sliding assemblies 2 is two
  • the number of second shielding plates 232 and the first connecting plate 221a is also two respectively
  • the two second shielding plates 232 can be arranged along the second direction.
  • Y is set relative.
  • the cover plate 3 connecting the two first connecting plates 221a can improve the stability of movement of the two sliders 222 and the two first connecting plates 221a.
  • Figure 5 is another sliding component 2 provided by this application.
  • the dust-proof member 23 includes a first shielding plate 231, a second shielding plate 232 and a third shielding plate 233.
  • the second shielding plate 232 and the third shielding plate 233 are vertically connected to the first shielding plate 231 respectively.
  • the connecting piece 221 includes a first shielding plate 231 and a third shielding plate 233.
  • the connecting plate 221a, the third connecting plate 221c and the fourth connecting plate 221d, the first connecting plate 221a is connected to the slider 222, the fourth connecting plate 221d and the first connecting plate 221a are vertically connected to the third connecting plate 221c respectively, along the In the second direction Y, the fourth connecting plate 221d and the first connecting plate 221a are arranged oppositely.
  • the first shielding plate 231 and the third connecting plate 221c are at least partially arranged oppositely, and the third shielding plate 233 is provided on the first connecting plate. between the plate 221a and the fourth connecting plate 221d.
  • the fourth connecting plate 221d and the first connecting plate 221a are vertically connected to the third connecting plate 221c respectively, and the first connecting plate 221a, the third connecting plate 221c and the fourth connecting plate 221d are enclosed to form There is a space for accommodating the third shielding plate 233. There are gaps between the third shielding plate 233 and the first connecting plate 221a, the third connecting plate 221c and the fourth connecting plate 221d, thereby preventing the third shielding plate 233 from contacting the connecting piece 221. Produce suspended particles.
  • the first connecting plate 221a is connected to the slider 222 and is spaced apart from the first shielding plate 231 along the third direction Z.
  • the dust-proof member 23 includes a first shielding plate 231, a second shielding plate 232 and a third shielding plate 233.
  • the second shielding plate 232 and the third shielding plate 233 are vertically connected to the first shielding plate 231 respectively.
  • the connecting piece 221 includes a first shielding plate 231 and a third shielding plate 233.
  • the second connecting plate 221b is connected to the slider 222 and the first connecting plate 221a respectively, and is connected with the first shielding plate 231 along the third connecting plate 221a.
  • the fourth connecting plate 221d and the first connecting plate 221a are arranged at intervals in the direction Z.
  • the fourth connecting plate 221d and the first connecting plate 221a are respectively vertically connected to the third connecting plate 221c.
  • the fourth connecting plate 221d and the first connecting plate 221a are arranged opposite to each other along the third direction.
  • the first shielding plate 231 and the third connecting plate 221c are at least partially disposed opposite each other, and the third shielding plate 233 is provided between the first connecting plate 221a and the fourth connecting plate 221d.
  • the first connecting plate 221a and the second connecting plate 221b are inserted between the dustproof member 23 and the guide rail 21, the second connecting plate 221b is connected to the slider 222, and the second connecting plate 221b is connected to the first connecting plate 221b.
  • the shielding plates 231 are spaced apart along the third direction Z, and the second connecting plates 221b and the second shielding plates 232 are spaced apart along the second direction Y.
  • the first connecting plate 221a and the second connecting plate 221b are vertically connected,
  • the number of sliding assemblies 2 is two
  • the transport device 100 further includes a cover plate 3 , and the cover plate 3 connects two fourth connecting plates 221d.
  • the number of sliding assemblies 2 is two
  • the number of second shielding plates 232 and the fourth connecting plate 221d is also two respectively
  • the two second shielding plates 232 can be arranged along the second direction.
  • Y is set relative.
  • the cover plate 3 connecting the two fourth connecting plates 221d can improve the stability of the movement of the two sliders 222 and the two fourth connecting plates 221d.
  • the transport device 100 further includes a driving member 4 , which is connected to the cover 3 and used to drive the slide 22 to move along the first direction X.
  • the driving member 4 drives the cover 3 to move, the cover 3 is connected to the fourth connecting plate 221d, and the fourth connecting plate 221d is connected to the slider 222, so the driving member 4 can drive the slider 222 along the The guide rail 21 moves.
  • the driving member 4 includes a driving motor 41 , an intermeshing main gear 42 and a rack 43 .
  • the rack 43 is disposed between the two guide rails 21 .
  • the driving motor 41 is used to drive the main gear 42 along the direction of the main gear 42 .
  • the rack 43 moves.
  • the driving motor 41 drives the main gear 42 to rotate on the rack 43, thereby driving the cover 3 to move, and driving the connecting piece 221 and the slider 222 to move.
  • the rack 43 can be connected to the base 1 so that when the main gear 42 moves along the rack 43, it can prevent the main gear 42 from moving along the rack 43 and the rack 43 being forced to shift and deform.
  • the through hole 11 is provided between the two sliding assemblies 2, and the air pump can suck the suspended particles generated by the mutual rotation of the main gear 42 and the rack 43 in real time, thereby reducing the suspension between the two sliding assemblies 2. The number of particles thereby improves the cleanliness level of the transportation device 100 .
  • the driving member 4 further includes a driven gear 44 meshed with the rack 43 , and the driven gear 44 is connected to the cover plate 3 .
  • the driven gear 44 is connected to the cover plate 3 , and the driven gear 44 can be a backlash-eliminating gear. Eliminating the backlash gear can improve the transmission accuracy and reduce the space for the motor 41 to drive the main gear 42 to rotate forward and reverse. return stroke to reduce the transmission dead zone.
  • B corresponding to A means that B is associated with A, and B can be determined based on A. But it should also be understood that determining B based on A does not mean determining B only based on A. B can also be determined based on A and/or other information.

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  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

本申请实施例提供的运输装置用于与抽气泵连接，运输装置包括：基台和滑移组件。基台包括多个通孔，通孔用于与抽气泵的进气口连通；滑移组件设于基台，滑移组件包括导轨和滑座，导轨沿第一方向延伸，滑座与导轨可移动连接，多个通孔沿导轨设置。

Description

运输装置
相关申请的交叉引用
本申请要求享有于2022年9月14日提交的名称为“运输装置”的中国专利申请202222437650.5的优先权，该申请的全部内容通过引用并入本文中。
技术领域
本申请涉及半导体技术领域，尤其涉及一种运输装置。
背景技术
在半导体产品的制备过程中，可以通过运输装置转运晶圆。由于运输装置的各个部件在运动状态下相互摩擦容易产生悬浮粒子。由于晶圆是制作硅半导体电路所用的硅晶片，需要在洁净度较高的环境中经过多道工序最终形成半导体产品。
国际标准化组织(ISO International Organization for Standardization)制定了洁净室或洁净区空气悬浮粒子洁净等级标准，现有技术的运输装置没有对运动过程中产生的悬浮粒子进行清洁，所以运输装置难以满足该标准。
因此，亟需一种新的运输装置以解决上述技术问题。
发明内容
本申请实施例提供的运输装置可以减小运输过程中产生的悬浮粒子，提高运输装置所在环境的洁净等级。
本申请的实施例提供了一种运输装置，该运输装置用于与抽气泵连接，运输装置包括：基台，基台包括多个通孔，通孔用于与抽气泵的进气口连通；滑移组件，设于基台，滑移组件包括导轨和滑座，导轨沿 第一方向延伸，滑座与导轨可移动连接，多个通孔沿导轨设置。
根据本申请实施例的一个方面，滑移组件还包括防尘件，防尘件沿第一方向延伸，防尘件至少沿第二方向遮蔽导轨，滑座包括相互连接的连接件和滑块，滑块沿导轨移动，连接件与防尘件围合形成用于容纳滑块的收容空间，第一方向和第二方向相交设置。
根据本申请实施例的一个方面，防尘件包括相互连接的第一遮挡板和第二遮挡板，第一遮挡板与滑块沿第三方向间隔设置，连接件包括第一连接板，第一连接板与滑块连接，沿第二方向，第一连接板和第二遮挡板设于滑块的相对两侧，第三方向、第一方向和第二方向两两相交设置。
根据本申请实施例的一个方面，连接件至少部分插入防尘件和导轨之间并与滑块连接。
根据本申请实施例的一个方面，防尘件包括相互连接的第一遮挡板和第二遮挡板，第一遮挡板与滑块沿第三方向间隔设置，连接件包括相互连接的第一连接板和第二连接板，第二连接板与滑块连接，并与第一遮挡板沿第三方向间隔设置，沿第二方向，第一连接板和第二遮挡板设于滑块的相对两侧，第三方向、第一方向和第二方向两两相交设置。
根据本申请实施例的一个方面，滑移组件的数量为两个，运输装置还包括盖板，盖板连接两个第一连接板。
根据本申请实施例的一个方面，防尘件包括第一遮挡板、第二遮挡板和第三遮挡板，第二遮挡板和第三遮挡板分别与第一遮挡板垂直连接，连接件包括第一连接板、第三连接板和第四连接板，第一连接板与滑块连接，第四连接板和第一连接板分别与第三连接板垂直连接，沿第二方向，第四连接板和第一连接板相对设置，沿第三方向，第一遮挡板和第三连接板至少部分相对设置，第三遮挡板设于第一连接板和第四连接板之间。
根据本申请实施例的一个方面，防尘件包括第一遮挡板、第二遮挡板和第三遮挡板，第二遮挡板和第三遮挡板分别与第一遮挡板垂直连接，连接件包括第一连接板、第二连接板、第三连接板和第四连接板， 第二连接板分别与滑块和第一连接板连接，并与第一遮挡板沿第三方向间隔设置，第四连接板和第一连接板分别与第三连接板垂直连接，沿第二方向，第四连接板和第一连接板相对设置，沿第三方向，第一遮挡板和第三连接板至少部分相对设置，第三遮挡板设于第一连接板和第四连接板之间。
根据本申请实施例的一个方面，滑移组件的数量为两个，运输装置还包括盖板，盖板连接两个第四连接板。
根据本申请实施例的一个方面，运输装置还包括驱动件，驱动件与盖板连接，并用于驱动滑座沿第一方向移动。
根据本申请实施例的一个方面，驱动件包括电机、相互啮合的主齿轮和齿条，齿条设于两个导轨之间，驱动电机用于驱动主齿轮沿齿条移动。
根据本申请实施例的一个方面，驱动件还包括与齿条啮合的从动齿轮，从动齿轮与盖板连接。
本申请实施例提供的运输装置用于与抽气泵连接，运输装置包括：基台和滑移组件。基台包括多个通孔，通孔用于与抽气泵的进气口连通；滑移组件设于基台，滑移组件包括导轨和滑座，导轨沿第一方向延伸，滑座与导轨可移动连接，多个通孔沿导轨设置。滑移组件中的滑座可减小悬浮粒子落入导轨内，通孔用于与抽气泵的进气口连通，运输装置在移动时产生的悬浮粒子，可以由抽气泵向通孔抽气吸走，从而可以提高运输装置的洁净度。
附图说明
为了更清楚地说明本申请实施例的技术方案，下面将对本申请实施例中所需要使用的附图作简单地介绍，显而易见地，下面所描述的附图仅仅是本申请的一些实施例，对于本领域普通技术人员来讲，在不付出创造性劳动的前提下，还可以根据这些附图获得其他的附图。
图1是本申请实施例提供的一种运输装置的示意图；
图2是图1中A部分的局部放大图；
图3是本申请实施例提供的一种滑移组件的剖面结构示意图；
图4是本申请实施例提供的另一种滑移组件的剖面结构示意图；
图5是本申请实施例提供的另一种滑移组件的剖面结构示意图；
图6是本申请实施例提供的另一种滑移组件的剖面结构示意图。
附图标记说明：
100、运输装置；
1、基台；11、通孔；2、滑移组件；21、导轨；
22、滑座；221、连接件；221a、第一连接板；221b、第二连接板；221c、第三连接板；221d、第四连接板；222、滑块；
23、防尘件；231、第一遮挡板；232、第二遮挡板；233、第三遮挡板；3、盖板；4、驱动件；41、电机；42、主齿轮；43、齿条；44、从动齿轮；
X、第一方向；Y、第二方向；Z、第三方向。
具体实施方式
下面将详细描述本申请的各个方面的特征和示例性实施例。在下面的详细描述中，提出了许多具体细节，以便提供对本申请的全面理解。但是，对于本领域技术人员来说很明显的是，本申请可以在不需要这些具体细节中的一些细节的情况下实施。下面对实施例的描述仅仅是为了通过示出本申请的示例来提供对本申请的更好的理解。在附图和下面的描述中，至少部分的公知结构和技术没有被示出，以便避免对本申请造成不必要的模糊；并且，为了清晰，可能夸大了部分结构的尺寸。此外，下文中所描述的特征、结构或特性可以以任何合适的方式结合在一个或更多实施例中。
在本申请的描述中，需要说明的是，除非另有说明，“多个”的含义是两个以上；术语“上”、“下”、“左”、“右”、“内”、“外”等指示的方位或位置关系仅是为了便于描述本申请和简化描述，而不是指示或暗示所指的组件或元件必须具有特定的方位、以特定的方位构造和操作，因此不能理解为对本申请的限制。此外，术语“第一”、“第二”等仅用于描述目的，而不能理解为指示或暗示相对重要性。
下述描述中出现的方位词均为图中示出的方向，并不是对本申请的实施例的具体结构进行限定。在本申请的描述中，还需要说明的是，除非另有明确的规定和限定，术语“安装”、“连接”应做广义理解，例如，可以是固定连接，也可以是可拆卸连接，或一体地连接；可以是直接相连，也可以间接相连。对于本领域的普通技术人员而言，可视具体情况理解上述术语在本申请中的具体含义。
请一并参阅图1和图2，本申请提供了一种运输装置100，该运输装置100用于与抽气泵连接，运输装置100包括：基台1和滑移组件2，基台1包括多个通孔11，通孔11用于与抽气泵的进气口连通；滑移组件2，设于基台1，滑移组件2包括导轨21和滑座22，导轨21沿第一方向X延伸，滑座22与导轨21可移动连接，多个通孔11沿导轨21设置。
该运输装置100可以用于运输、转运晶圆，可以在滑移组件2上安装取料或者放料装置。具体地，取料或者放料装置可以是机械手，机械手可以吸取或抓取需要转移的物料，比如晶圆。滑移组件2带动机械手沿第一方向X移动。基台1可以设置在地面或加工台上。滑座22可以沿导轨21滑动，以改变滑座22与导轨21的相对位置。
在本申请提供的运输装置100中，通过将滑移组件2设于基台1，设置滑移组件2包括滑座22和沿第一方向X延伸的导轨21，多个通孔11沿导轨21设置，通孔11可以与抽气泵的进气口连通，因此当运输装置100在移动时产生的悬浮粒子，可以由抽气泵向通孔11抽气吸走，从而可以提高运输装置100的洁净度。
在一些可选的实施例中，滑移组件2还包括防尘件23，防尘件23沿第一方向X延伸，防尘件23至少沿第二方向Y遮蔽导轨21，滑座22包括相互连接的连接件221和滑块222，滑块222沿导轨21移动，连接件221与防尘件23围合形成用于容纳滑块222的收容空间，第一方向X和第二方向Y相交设置。
在这些可选的实施例中，在滑块222沿导轨21移动的过程中，与滑块222连接件221也会沿着导轨21移动。沿第一方向X延伸的防尘件23可以在第二方向Y上遮蔽导轨21，第一方向X和第二方向Y可以相互垂直， 第一方向X可以是导轨21的长度方向，第二方向Y可以是导轨21的宽度方向。部分防尘件23可以设于滑块222远离导轨21的一端，部分防尘件23可以沿第二方向Y与滑块222间隔设置，并与基台1固定连接，如此防尘件23可以减小异物和杂质落入滑块222和导轨21。连接件221与防尘件23围合形成用于容纳滑块222的收容空间，如此可以减小滑块222和导轨21之间相互移动产生的悬浮粒子溅射至收容空间外，同时，连接件221与防尘件23也可以减小阻挡悬浮粒子进入收容空间内部。
请参阅图3，图3是本申请提供的一种滑移组件2。在该滑移组件2中防尘件23包括相互连接的第一遮挡板231和第二遮挡板232，第一遮挡板231与滑块222沿第三方向Z间隔设置，连接件221包括第一连接板221a，第一连接板221a与滑块222连接，沿第二方向Y，第一连接板221a和第二遮挡板232设于滑块222的相对两侧，第三方向Z、第一方向X和第二方向Y两两相交设置。
在这些可选的实施例中，第一方向X和第二方向Y可以是水平方向，第一方向X可以是导轨21的长度方向，第二方向Y可以是导轨21的宽度方向，第三方向Z可以是竖直方向。第一方向X、第二方向Y和第三方向Z可以两两相互垂直。第一遮挡板231和第二遮挡板232相互垂直连接并沿第一方向X延伸，第一遮挡板231和第二遮挡板232沿第一方向X延伸的长度可以与导轨21沿第一方向X延伸的长度相等，或者，为了更好地提高防尘件23对导轨21和滑块222的遮挡效果，第一遮挡板231和第二遮挡板232沿第一方向X延伸的长度可以大于导轨21沿第一方向X延伸的长度。
第一连接板221a与滑块222连接，并可以一同沿导轨21移动。为了减小第一遮挡板231在移动时产生的悬浮粒子，可以使第一遮挡板231和第一连接板221a之间存在间隙，如此第一遮挡板231和第一连接板221a之间不会相接触，从而避免产生摩擦。
在一些可选的实施例中，连接件221至少部分插入防尘件23和滑块222之间并与滑块222连接。
在这些可选的实施例中，滑块222设于导轨21上，为了更好地对导 轨21防尘，提高洁净度，防尘件23可围设于滑块222的周边，为了使滑块222和连接件221共同沿第一方向X移动，部分连接件221插入防尘件23和导轨21之间并与滑块222连接。
请参阅图4，图4是本申请提供的另一种滑移组件2。该防尘件23包括相互连接的第一遮挡板231和第二遮挡板232，第一遮挡板231与滑块222沿第三方向Z间隔设置，连接件221包括相互连接的第一连接板221a和第二连接板221b，第二连接板221b与滑块222连接，并与第一遮挡板231沿第三方向Z间隔设置，沿第二方向Y，第一连接板221a和第二遮挡板232设于滑块222的相对两侧，第三方向Z、第一方向X和第二方向Y两两相交设置。
在这些可选的实施例中，第一遮挡板231与滑块222沿第三方向Z间隔设置，第一遮挡板231沿第二方向Y的宽度可以大于滑块222沿第二方向Y的宽度，从而使得第一遮挡板231对滑块222的遮挡效果更佳，如此，连接件221需要设置第二连接板221b与滑块222连接，同样的，为了减小第一遮挡板231在移动时产生的悬浮粒子，可以使第一遮挡板231和第一连接板221a之间存在间隙。
为了提高第二连接板221b与滑块222的连接强度，第二连接板221b可以与滑块222远离导轨21的一端连接，或者第二连接板221b可以包括一个容纳孔，滑块222可穿过容纳孔与第二连接板221b连接。
在一些可选的实施例中，滑移组件2的数量为两个，运输装置100还包括盖板3，盖板3连接两个第一连接板221a。
在这些可选的实施例中，滑移组件2的数量为两个，第二遮挡板232和第一连接板221a的数量也分别为两个，两个第二遮挡板232可以沿第二方向Y相对设置。连接两个第一连接板221a的盖板3可以提高两个滑块222和两个第一连接板221a移动的稳定性。
请参阅图5，图5是本申请提供的另一种滑移组件2。防尘件23包括第一遮挡板231、第二遮挡板232和第三遮挡板233，第二遮挡板232和第三遮挡板233分别与第一遮挡板231垂直连接，连接件221包括第一连接板221a、第三连接板221c和第四连接板221d，第一连接板221a与滑块 222连接，第四连接板221d和第一连接板221a分别与第三连接板221c垂直连接，沿第二方向Y，第四连接板221d和第一连接板221a相对设置，沿第三方向Z，第一遮挡板231和第三连接板221c至少部分相对设置，第三遮挡板233设于第一连接板221a和第四连接板221d之间。
在这些可选的实施例中，第四连接板221d和第一连接板221a分别与第三连接板221c垂直连接，第一连接板221a、第三连接板221c和第四连接板221d围合形成容纳第三遮挡板233的容纳空间，第三遮挡板233与第一连接板221a、第三连接板221c和第四连接板221d之间存在间隙，从而避免第三遮挡板233与连接件221接触产生悬浮粒子。第一连接板221a与滑块222连接并与第一遮挡板231沿第三方向Z间隔设置。
请参阅图6，图6是本申请提供的另一种滑移组件2。防尘件23包括第一遮挡板231、第二遮挡板232和第三遮挡板233，第二遮挡板232和第三遮挡板233分别与第一遮挡板231垂直连接，连接件221包括第一连接板221a、第二连接板221b、第三连接板221c和第四连接板221d，第二连接板221b分别与滑块222和第一连接板221a连接，并与第一遮挡板231沿第三方向Z间隔设置，第四连接板221d和第一连接板221a分别与第三连接板221c垂直连接，沿第二方向Y，第四连接板221d和第一连接板221a相对设置，沿第三方向Z，第一遮挡板231和第三连接板221c至少部分相对设置，第三遮挡板233设于第一连接板221a和第四连接板221d之间。
在这些可选的实施例中，第一连接板221a和第二连接板221b插入防尘件23和导轨21之间，第二连接板221b与滑块222连接，第二连接板221b与第一遮挡板231沿第三方向Z间隔设置，第二连接板221b与第二遮挡板232沿第二方向Y间隔设置。第一连接板221a和第二连接板221b垂直连接，
请结合参阅图2和图6，在一些可选的实施例中，滑移组件2的数量为两个，运输装置100还包括盖板3，盖板3连接两个第四连接板221d。
在这些可选的实施例中，滑移组件2的数量为两个，第二遮挡板232和第四连接板221d的数量也分别为两个，两个第二遮挡板232可以沿第二方向Y相对设置。连接两个第四连接板221d的盖板3可以提高两个滑 块222和两个第四连接板221d移动的稳定性。
在一些可选的实施例中，运输装置100还包括驱动件4，驱动件4与盖板3连接，并用于驱动滑座22沿第一方向X移动。
在这些可选的实施例中，驱动件4驱动盖板3移动，盖板3与第四连接板221d连接，第四连接板221d与滑块222连接，因此驱动件4可以带动滑块222沿导轨21移动。
在一些可选的实施例中，驱动件4包括驱动电机41、相互啮合的主齿轮42和齿条43，齿条43设于两个导轨21之间，驱动电机41用于驱动主齿轮42沿齿条43移动。
在这些可选的实施例中，驱动电机41驱动主齿轮42在齿条43上转动，从而驱动盖板3移动，并带动连接件221和滑块222移动。齿条43可以与基台1连接从而可以在主齿轮42沿齿条43移动时，防止主齿轮42沿齿条43移动的过程种，齿条43受力移位变形。可选的，通孔11设置在两个滑移组件2之间，抽气泵可以实时抽吸主齿轮42和齿条43相互转动产生的悬浮粒子，从而减小两个滑移组件2之间悬浮粒子的数量，进而提高运输装置100的洁净等级。
在一些可选的实施例中，驱动件4还包括与齿条43啮合的从动齿轮44，从动齿轮44与盖板3连接。
在这些可选的实施例中，从动齿轮44与盖板3连接，从动齿轮44可以是消除间隙齿轮，消除间隙齿轮可以提高传动精度，减小电机41驱动主齿轮42正反转的空回行程，减小传动死区。
需要说明的是，在不冲突的情况下，本申请中的实施例及实施例中的特征可以相互组合。
另外，本文中术语“和/或”，仅仅是一种描述关联对象的关联关系，表示可以存在三种关系，例如，A和/或B，可以表示：单独存在A，同时存在A和B，单独存在B这三种情况。另外，本文中字符“/”，一般表示前后关联对象是一种“或”的关系。
应理解，在本申请实施例中，“与A相应的B”表示B与A相关联，根据A可以确定B。但还应理解，根据A确定B并不意味着仅仅根据A确 定B，还可以根据A和/或其它信息确定B。
以上，仅为本申请的具体实施方式，但本申请的保护范围并不局限于此，任何熟悉本技术领域的技术人员在本申请揭露的技术范围内，可轻易想到各种等效的修改或替换，这些修改或替换都应涵盖在本申请的保护范围之内。因此，本申请的保护范围应以权利要求的保护范围为准。

Claims (12)

  1. 一种运输装置，该运输装置用于与抽气泵连接，所述运输装置包括：
    基台，所述基台包括多个通孔，所述通孔用于与所述抽气泵的进气口连通；
    滑移组件，设于所述基台，所述滑移组件包括导轨和滑座，所述导轨沿第一方向延伸，所述滑座与所述导轨可移动连接，所述多个通孔沿所述导轨设置。
  2. 根据权利要求1所述的运输装置，其中，所述滑移组件还包括防尘件，所述防尘件沿所述第一方向延伸，所述防尘件至少沿第二方向遮蔽所述导轨，所述滑座包括相互连接的连接件和滑块，所述滑块沿所述导轨移动，所述连接件与所述防尘件围合形成用于容纳所述滑块的收容空间，所述第一方向和所述第二方向相交设置。
  3. 根据权利要求2所述的运输装置，其中，所述防尘件包括相互连接的第一遮挡板和第二遮挡板，所述第一遮挡板与所述滑块沿第三方向间隔设置，
    所述连接件包括第一连接板，所述第一连接板与滑块连接，沿第二方向，所述第一连接板和所述第二遮挡板设于所述滑块的相对两侧，所述第三方向、所述第一方向和所述第二方向两两相交设置。
  4. 根据权利要求2所述的运输装置，其中，所述连接件至少部分插入所述防尘件和所述导轨之间并与所述滑块连接。
  5. 根据权利要求4所述的运输装置，其中，所述防尘件包括相互连接的第一遮挡板和第二遮挡板，所述第一遮挡板与所述滑块沿第三方向间隔设置，
    所述连接件包括相互连接的第一连接板和第二连接板，所述第二连接板与滑块连接，并与所述第一遮挡板沿所述第三方向间隔设置，沿第二方向，所述第一连接板和所述第二遮挡板设于所述滑块的相对两侧，所述第三方向、所述第一方向和所述第二方向两两相交设置。
  6. 根据权利要求4或5任一所述的运输装置，其中，所述滑移组件的数量为两个，所述运输装置还包括盖板，所述盖板连接两个所述第一连接板。
  7. 根据权利要求4所述的运输装置，其中，所述防尘件包括第一遮挡板、第二遮挡板和第三遮挡板，所述第二遮挡板和所述第三遮挡板分别与所述第一遮挡板垂直连接，
    所述连接件包括第一连接板、第三连接板和第四连接板，所述第一连接板与所述滑块连接，所述第四连接板和所述第一连接板分别与所述第三连接板垂直连接，
    沿所述第二方向，所述第四连接板和所述第一连接板相对设置，
    沿所述第三方向，所述第一遮挡板和所述第三连接板至少部分相对设置，所述第三遮挡板设于所述第一连接板和所述第四连接板之间。
  8. 根据权利要求4所述的运输装置，其中，所述防尘件包括第一遮挡板、第二遮挡板和第三遮挡板，所述第二遮挡板和所述第三遮挡板分别与所述第一遮挡板垂直连接，
    所述连接件包括第一连接板、第二连接板、第三连接板和第四连接板，所述第二连接板分别与所述滑块和所述第一连接板连接，并与所述第一遮挡板沿所述第三方向间隔设置，所述第四连接板和所述第一连接板分别与所述第三连接板垂直连接，
    沿所述第二方向，所述第四连接板和所述第一连接板相对设置，
    沿所述第三方向，所述第一遮挡板和所述第三连接板至少部分相对设置，所述第三遮挡板设于所述第一连接板和所述第四连接板之间。
  9. 根据权利要求7-8任一所述的运输装置，其中，所述滑移组件的数量为两个，所述运输装置还包括盖板，所述盖板连接两个所述第四连接板。
  10. 根据权利要求9所述的运输装置，其中，所述运输装置还包括驱动件，所述驱动件与所述盖板连接，并用于驱动所述滑座沿第一方向移动。
  11. 根据权利要求10所述的运输装置，其中，所述驱动件包括电机、相互啮合的主齿轮和齿条，所述齿条设于两个所述导轨之间，所述驱动电机用于驱动所述主齿轮沿所述齿条移动。
  12. 根据权利要求11所述的运输装置，其中，所述驱动件还包括与所述齿条啮合的从动齿轮，所述从动齿轮与所述盖板连接。
PCT/CN2022/120853 2022-09-14 2022-09-23 运输装置 Ceased WO2024055352A1 (zh)

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