WO2024053381A1 - 光学センサ - Google Patents

光学センサ Download PDF

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Publication number
WO2024053381A1
WO2024053381A1 PCT/JP2023/030017 JP2023030017W WO2024053381A1 WO 2024053381 A1 WO2024053381 A1 WO 2024053381A1 JP 2023030017 W JP2023030017 W JP 2023030017W WO 2024053381 A1 WO2024053381 A1 WO 2024053381A1
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WO
WIPO (PCT)
Prior art keywords
light
light emitting
receiving element
light receiving
reflector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2023/030017
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English (en)
French (fr)
Japanese (ja)
Inventor
博 渡邊
浩一 井上
貴敏 加藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to DE112023002956.3T priority Critical patent/DE112023002956T5/de
Priority to JP2024545542A priority patent/JP7666752B2/ja
Publication of WO2024053381A1 publication Critical patent/WO2024053381A1/ja
Priority to US19/018,450 priority patent/US20250146894A1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements
    • G01S7/4814—Constructional features, e.g. arrangements of optical elements of transmitters alone
    • G01S7/4815—Constructional features, e.g. arrangements of optical elements of transmitters alone using multiple transmitters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/24—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/04—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring tension in flexible members, e.g. ropes, cables, wires, threads, belts or bands
    • G01L5/10—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring tension in flexible members, e.g. ropes, cables, wires, threads, belts or bands using electrical means
    • G01L5/105—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring tension in flexible members, e.g. ropes, cables, wires, threads, belts or bands using electrical means using electro-optical means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
    • G01L5/166—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using photoelectric means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/46—Indirect determination of position data
    • G01S17/48—Active triangulation systems, i.e. using the transmission and reflection of electromagnetic waves other than radio waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/4808—Evaluating distance, position or velocity data
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements
    • G01S7/4811—Constructional features, e.g. arrangements of optical elements common to transmitter and receiver

Definitions

  • the present invention relates to an optical sensor.
  • Patent Document 1 An optical sensor for measuring force distribution that optically detects force or deformation is known (Patent Document 1).
  • the optical sensor disclosed in US Pat. No. 5,300,302 includes a deformable opto-mechanical layer with one or more light emitting sources, a light receiving detector responsive to light emitted from the light emitting sources, and an optical cavity.
  • the optical response characteristics of the optical cavity change in accordance with the deformation of the opto-mechanical layer, and this change is detected as a change in the amount of light received by the photodetector.
  • An object of the invention is to provide an optical sensor that is less sensitive to changes in ambient temperature.
  • two light emitting elements whose temperature dependence of the luminous intensity of output light exhibits the same tendency
  • a light receiving element a reflector disposed so that the light output from the light emitting element is diffusely reflected and a portion of the reflected light is incident on the light receiving element
  • an elastic support member that supports the reflector with respect to the two light emitting elements and the light receiving element and changes the relative position of the reflector with respect to the light emitting element and the light receiving element by being deformed by an external force
  • a processing unit that calculates a physical quantity that depends on the amount of deformation of the elastic support member based on a ratio of two amounts of light received by the light receiving element when the two light emitting elements are caused to emit light separately
  • the relative positions of the two light emitting elements and the light receiving element are fixed, and the distance from one of the light emitting elements to the light receiving element is different from the distance from the other light emitting element to the light receiving element.
  • An optical sensor is provided.
  • a light emitting element two light-receiving elements whose sensitivity tends to have the same temperature dependence; a reflector arranged to reflect the light output from the light emitting element and to cause a portion of the reflected light to enter the two light receiving elements; an elastic support member that supports the reflector with respect to the light emitting element and the light receiving element and changes the relative position of the reflector with respect to the light emitting element and the light receiving element by being deformed by external force; a processing unit that calculates a physical quantity that depends on the amount of deformation of the elastic support member based on a ratio of the amount of light received when the light output from the light emitting element and reflected by the reflector is received by the two light receiving elements; Equipped with The relative positions of the light emitting element and the two light receiving elements are fixed, and the distance from one of the light receiving elements to the light emitting element is different from the distance from the other light receiving element to the light emitting element.
  • An optical sensor is provided.
  • FIG. 1A is a perspective view of an optical sensor according to a first embodiment
  • FIG. 1B is a cross-sectional view of an optical sensor according to a first embodiment
  • FIG. 1C is a diagram showing a light emitting element
  • FIG. 3 is a diagram showing the positional relationship of light receiving elements.
  • FIG. 2 is a block diagram of the processing section of the optical sensor according to the first embodiment.
  • FIG. 3 is a schematic diagram showing the positional relationship between a light emitting element, a light receiving element, and a reflector.
  • FIG. 4A is a graph showing the simulation results of the relationship between the displacement amount of distance x and the amount of received light L 1 , L 2 , and FIG.
  • FIG. 4B is a graph showing the relationship between the amount of displacement of distance x and the amount of received light L 2 /L 1 and It is a graph showing the relationship between.
  • FIG. 5 is a cross-sectional view of an optical sensor according to a second embodiment.
  • FIG. 6 is a sectional view of an optical sensor according to a third embodiment.
  • FIG. 7A is a cross-sectional view of an optical sensor according to the fourth example
  • FIG. 7B is a diagram showing a planar positional relationship between a light emitting element and a sub-light emitting element of the optical sensor according to the fourth example.
  • FIG. 8 is a schematic diagram showing the positional relationship among the light emitting element, sub light emitting element, light receiving element, and reflector of the optical sensor according to the fourth example.
  • FIG. 9A is a diagram showing a planar positional relationship among a plurality of light emitting elements, a plurality of sub light emitting elements, and a light receiving element of an optical sensor according to a modification of the fourth embodiment
  • FIG. FIG. 7 is a diagram showing a planar positional relationship among a plurality of light emitting elements, a plurality of sub light emitting elements, and a light receiving element of an optical sensor according to another modification.
  • FIG. 10 is a sectional view of an optical sensor according to a fifth embodiment.
  • FIG. 11 is a schematic diagram showing the positional relationship among the light emitting element, the light receiving element, and the reflector of the optical sensor according to the fifth embodiment.
  • FIG. 12 is a sectional view of an optical sensor according to a sixth embodiment.
  • FIG. 13 is a block diagram of the processing section of the optical sensor according to the sixth embodiment.
  • FIG. 1A is a perspective view of an optical sensor according to a first embodiment.
  • the optical sensor according to the first embodiment includes a substrate 50 and an elastic support member 10.
  • An elastic support member 10 is attached to one surface of the substrate 50.
  • the elastic support member 10 has a cylindrical outer shape, for example, and a cavity is formed by the elastic support member 10 and the substrate 50.
  • the elastic support member 10 is made of an elastic material, such as black silicone rubber. When an external force in a direction perpendicular to the surface of the substrate 50 is applied to the elastic support member 10, the elastic support member 10 is elastically deformed and its height changes.
  • FIG. 1B is a cross-sectional view of the optical sensor according to the first embodiment.
  • An elastic support member 10 is attached to one surface of the substrate 50.
  • the elastic support member 10 includes a side wall portion 10A and a top plate portion 10B.
  • the side wall portion 10A has, for example, a cylindrical shape, one end thereof is fixed to the substrate 50, and the other end of the side wall portion 10A is closed by the top plate portion 10B. That is, the elastic support member 10 has a bottomed cylindrical shape that is open toward the substrate 50, and the bottomed cylindrical opening is closed by the substrate 50.
  • a hollow space 15 is formed by the substrate 50 and the elastic support member 10 .
  • Two light emitting elements 21 and 22 and one light receiving element 30 are arranged on the surface of the substrate 50 exposed to the space 15.
  • the surface on which the two light emitting elements 21 and 22 and the light receiving element 30 are arranged will be referred to as a first plane 51.
  • LEDs light emitting diodes
  • VCSEL vertical cavity surface emitting laser
  • a reflector 40 is attached to the top plate portion 10B at a position facing the light receiving element 30.
  • the elastic support member 10 When force is applied to the elastic support member 10 and the elastic support member 10 is deformed, the relative position of the reflector 40 with respect to the light emitting elements 21 and 22 and the light receiving element 30 changes. For example, the height from the first plane 51 to the reflector 40 changes.
  • the reflector 40 diffusely reflects most of the light output from the light emitting elements 21 and 22. That is, the intensity of the light outputted from the light emitting elements 21 and 22 and diffusely reflected by the reflector 40 is observed at substantially uniform intensity in all directions, regardless of the observation direction.
  • the inner surface of the elastic support member 10 is black and hardly reflects the light output from the light emitting elements 21 and 22.
  • the luminous intensity of the light emitted from the light emitting elements 21 and 22 is approximately equal over a wide range including the direction of the reflector 40.
  • the luminous intensity of the light output from the light emitting elements 21 and 22 and directed toward the reflector 40 is substantially uniform within the reflective surface. Further, even if the elastic support member 10 is deformed and the position of the reflector 40 changes within a certain range, the condition that the luminous intensity is substantially uniform within the reflecting surface is satisfied.
  • the light emitting elements 21 and 22 those having almost the same temperature dependence of luminous intensity are used.
  • the slopes of changes in luminous intensity with respect to temperature changes of the light emitting elements 21 and 22 are approximately equal.
  • the processing unit 60 controls the light emission of the light emitting elements 21 and 22.
  • the output signal of the light receiving element 30 is input to the processing section 60.
  • the configuration and functions of the processing unit 60 will be described later with reference to FIG. 2.
  • FIG. 1C is a diagram showing the positional relationship between the light emitting elements 21 and 22 and the light receiving element 30 when the first plane 51 is viewed from above.
  • a cross-sectional view taken along the dashed-dotted line 1B-1B in FIG. 1C corresponds to FIG. 1B.
  • the reflector 40 is arranged on a straight line that passes through the light receiving element 30 and is perpendicular to the first plane 51. "Passing through the light receiving element 30" means passing through the geometric center of the light receiving surface of the light receiving element 30.
  • the distance from one light emitting element 21 to the light receiving element 30 is marked as a, and the distance from the other light emitting element 22 to the light receiving element 30 is marked as b.
  • the starting point of the distance is the geometric center of the light emitting area in plan view in the light emitting elements 21 and 22, and the geometric center of the light receiving surface in the light receiving element 30.
  • the geometric center of each light emitting region of the light emitting elements 21 and 22 will be referred to as a representative point of the light emitting elements 21 and 22, and the geometric center of the light receiving surface will be referred to as a representative point of the light receiving element 30.
  • the representative points of the light-emitting elements 21 and 22 and the representative point of the light-receiving element 30 are arranged on one straight line, and the light-receiving element 30 is arranged between the light-emitting element 21 and the light-emitting element 22. Further, the distance a and the distance b are different. That is, the representative points of the light emitting elements 21 and 22 are arranged at positions shifted from points symmetrical with respect to the representative point of the light receiving element 30.
  • FIG. 2 is a block diagram of the processing section 60 of the optical sensor according to the first embodiment.
  • Anodes of the two light emitting elements 21 and 22 are each connected to a power source 61, and cathodes are connected to a light emitting element driver 63 via a switch matrix 62.
  • the calculation unit 68 controls the light emitting element driver 63 and the switch matrix 62 via the interface unit 64. When one of the light emitting elements 21 and 22 is selected by the switch matrix 62, the selected light emitting element emits light.
  • the light receiving element 30 outputs a current according to the amount of light received. This current is input to a transimpedance amplifier 66 via a switch matrix 65. The current output from the light receiving element 30 is converted into a voltage signal by the transimpedance amplifier 66 and input to the AD converter 67. The voltage signal is converted into a digital signal by the AD converter 67 and input to the arithmetic unit 68 via the interface unit 64 .
  • the calculation unit 68 causes the two light emitting elements 21 and 22 to emit light at different timings, and calculates the amount of light received by the light receiving element 30 when one light emitting element 21 emits light, and the amount of light received by the light receiving element 30 when the other light emitting element 22 emits light. The amount of light received by the light receiving element 30 is acquired. The calculation unit 68 calculates the ratio of the two amounts of received light, and determines the amount of deformation of the elastic support member 10 based on the ratio of the amounts of received light.
  • FIG. 3 is a schematic diagram showing the positional relationship between the light emitting elements 21 and 22, the light receiving element 30, and the reflector 40.
  • the light emitting elements 21, 22 and the light receiving element 30 are shown by respective representative points.
  • the intersection of the straight line passing through the representative point of the light receiving element 30 and perpendicular to the first plane 51 and the reflective surface of the reflector 40 is referred to as the representative point of the reflector 40.
  • the reflector 40 is shown at its representative point.
  • representative points of the light emitting elements 21 and 22, the light receiving element 30, and the reflector 40 may be simply referred to as the light emitting elements 21 and 22, the light receiving element 30, and the reflector 40, respectively.
  • the distance from one light emitting element 21 to the light receiving element 30 is marked as a, and the distance from the other light emitting element 22 to the light receiving element 30 is marked as b.
  • the distance from the light receiving element 30 to the reflector 40 is marked as x.
  • the distance from one light emitting element 21 to the reflector 40 is marked as P a
  • the distance from the other light emitting element 22 to the reflector 40 is marked as P b
  • the luminous intensities of the light emitting elements 21 and 22 are denoted as G 1 and G 2 , respectively.
  • the reflectance of the reflector 40 is denoted as ⁇ .
  • the angle between the line segment connecting one light emitting element 21 and the reflector 40 and the line segment connecting the reflector 40 and the light receiving element 30 is denoted as ⁇ 1
  • the angle between the other light emitting element 22 and the reflector 40 is denoted as ⁇ 1.
  • the angle formed by the connecting line segment and the line segment connecting the reflector 40 and the light receiving element 30 is denoted as ⁇ 2 .
  • the distances P a and P b are expressed by the following formulas.
  • the ratio of the amount of received light L2 to the amount of received light L1 is expressed by the following formula.
  • the calculation unit 68 calculates the ratio L 2 /L 1 of the amount of received light, and determines the distance x from the calculated value of the ratio L 2 /L 1 of the amount of received light. Furthermore, the calculation unit 68 calculates the amount of deformation of the elastic support member 10 (FIG. 1B) in the x direction (direction perpendicular to the first plane 51) from the distance x. For example, the distance x when no load is applied to the elastic support member 10 is set as a reference value, and the amount of displacement of the distance x from the reference value can be defined as the amount of deformation of the elastic support member 10.
  • FIG. 4A is a graph showing a simulation result of the relationship between the amount of displacement of the reflector 40 in the x direction and the amounts of received light L 1 and L 2 .
  • the x direction is the normal direction of the first plane 51.
  • the horizontal axis represents the amount of displacement in the x direction in units [mm], and the vertical axis represents the amount of received light in arbitrary units.
  • the amount of displacement in the x direction when no force is applied to the elastic support member 10 is set to zero.
  • a simulation was performed for a case where the top plate portion 10B (FIG. 1B) of the elastic support member 10 is displaced in a direction toward the substrate 50 (that is, when the amount of displacement in the x direction is negative).
  • Circle symbols and triangular symbols in the graph shown in FIG. 4A represent the amounts of light received L 1 and L 2 when the light emitting elements 21 and 22 emit light, respectively.
  • the amounts of received light L 1 and L 2 increase.
  • the distance a from the light emitting element 21 to the light receiving element 30 is shorter than the distance b from the light emitting element 22 to the light receiving element 30, the amount of received light L1 is greater than the amount of received light L2 .
  • FIG. 4B is a graph showing the relationship between the amount of displacement of the reflector 40 in the x direction and the ratio L 2 /L 1 of the amount of received light.
  • the horizontal axis represents the amount of displacement of the distance x in units of [mm], and the vertical axis represents the ratio L 2 /L 1 of the amount of received light.
  • the ratio L 2 /L 1 of the amount of received light decreases.
  • the ratio L 2 /L 1 of the amount of received light By conducting an evaluation experiment in advance to calculate the ratio L 2 /L 1 of the amount of received light by changing the amount of displacement in the x direction, the ratio L 2 /L 1 of the amount of displacement in the x direction and the amount of received light shown in FIG. 4B can be calculated. You can ask for a relationship. This relationship information is stored in the calculation unit 68 (FIG. 2). The calculation unit 68 calculates the displacement in the x direction based on pre-stored relationship information between the amount of displacement in the x direction and the ratio L 2 /L 1 of the amount of received light, and the calculated value of the ratio L 2 /L 1 of the amount of received light. The amount of displacement can be found.
  • the luminous intensities G 1 and G 2 of the two light emitting elements 21 and 22 are made equal, but they do not necessarily have to be made equal.
  • the relationship between the drive current and luminous intensity of the light emitting elements 21 and 22 is known in advance, it is not necessary to drive the light emitting elements 21 and 22 with the same drive current.
  • the luminous intensity at an actual drive current may be converted into the luminous intensity at a predetermined drive current.
  • the excellent effects of the first embodiment will be explained. If the temperature characteristics of the luminous intensities G 1 and G 2 of the light emitting elements 21 and 22 (the slope of the luminous intensity change with respect to temperature change) are the same, the luminous intensity ratio G 1 /G 2 of the light emitting elements 21 and 22 does not depend on the temperature. becomes constant. Therefore, the ratio L 2 /L 1 of the amount of received light shown in equation (3) does not depend on the temperature, but only on the distance x. In the first embodiment, since the amount of deformation of the elastic support member 10 is calculated based on the ratio L 2 /L 1 of the amount of received light, the elastic support member 10 is The amount of deformation can be measured with high precision.
  • the area of the reflective surface of the reflector 40 is too small, the intensity of the light that is diffusely reflected by the reflector 40 and enters the light receiving element 30 will decrease, making stable measurement difficult.
  • the area of the reflective surface of the reflector 40 is 0.5 times or more the area of the light receiving surface of the light receiving element 30.
  • the area of the reflector 40 becomes too large and the reflective surface of the reflector 40 is inclined with respect to the normal direction of the first plane 51, the amount of light received will be greatly affected by the inclination.
  • the area of the reflective surface of the reflector 40 be three times or less the area of the light-receiving surface of the light-receiving element 30.
  • the temperature characteristics of the luminous intensity of the two light emitting elements 21 and 22 are the same, that is, the slope of the luminous intensity change with respect to temperature change is the same, but the temperature of the luminous intensity of the two light emitting elements 21 and 22 is the same.
  • the characteristics do not necessarily have to be the same.
  • the two light emitting elements 21 and 22 may have a configuration in which the temperature characteristics of the luminous intensity exhibit the same tendency.
  • the two light emitting elements 21 and 22 may have a configuration in which the slopes of luminous intensity changes with respect to temperature changes are not the same, but are both positive or negative. In this case, an excellent effect can be obtained in that the measurement result of the amount of deformation of the elastic support member 10 is less susceptible to temperature changes than when one light emitting element is used.
  • the amount of deformation of the elastic support member 10 that is, the amount of displacement of the reflector 40 (FIG. 3) in the x direction was determined from the ratio L 2 /L 1 of the amount of received light.
  • the force applied to the top plate portion 10B (FIG. 1B) of the elastic support member 10 may be determined from the amount of displacement in the direction.
  • the calculation unit 68 (FIG. 2) stores relationship information representing the relationship between the amount of deformation of the elastic support member 10 and the magnitude of external force applied to the elastic support member 10. After calculating the amount of deformation of the elastic support member 10, the calculation unit 68 determines the magnitude of the external force applied to the elastic support member based on the calculated amount of deformation and related information.
  • the calculation unit 68 stores information on the relationship between the ratio L 2 /L 1 of the amount of received light and the magnitude of the external force applied to the elastic support member 10, and calculates the calculated value of the ratio L 2 /L 1 of the amount of received light.
  • the magnitude of the external force may be directly determined from . In this manner, the calculation unit 68 may obtain a physical quantity that depends on the amount of deformation of the elastic support member 10.
  • the top plate portion 10B of the elastic support member 10 may be configured to vibrate due to sound waves.
  • the reflector 40 is displaced in the x direction by the sound waves. This allows the optical sensor according to the first embodiment to function as a microphone.
  • two light emitting elements 21, 22 and one light receiving element 30 are arranged on the first plane 51 of the substrate 50, but the light emitting elements 21, 22 and one light receiving element 30 are supported. Therefore, it is not necessary to use the substrate 50 having the first plane 51 as one surface.
  • a fixing member that arranges and fixes the light emitting elements 21 and 22 and one light receiving element 30 on the virtual first plane 51 may be used.
  • the space 15 (FIG. 1B) surrounded by the substrate 50 and the elastic support member 10 is hollow, and within the space 15 there is a It may be filled with a flexible elastic material that is substantially transparent and deforms in response to external forces, such as transparent silicone rubber.
  • the representative points of the two light emitting elements 21 and 22 and the representative point of the light receiving element 30 are arranged on one straight line; It is not necessary to place it on a straight line. It is sufficient that the distance a from one light emitting element 21 to the light receiving element 30 is different from the distance b from the other light emitting element 22 to the light receiving element 30.
  • FIG. 5 is a cross-sectional view of the optical sensor according to the second embodiment.
  • the elastic support member 10 includes a side wall portion 10A and a top plate portion 10B made of an elastic material.
  • the side wall portion 10A and the top plate portion 10B are formed of a hard material, such as black resin or metal whose surface is painted black.
  • the side wall portion 10A has a double structure of a cylindrical outer wall and an inner wall. When the first plane 51 is viewed in plan, the space between the outer wall and the inner wall has a shape along the circumference.
  • An elastic member 10C such as a coil spring is loaded between the outer wall and the inner wall.
  • a convex portion 10D is provided on the top plate portion 10B to be inserted into the space between the outer wall and the inner wall of the side wall portion 10A.
  • the convex portion 10D has a shape along the circumference.
  • the top plate portion 10B is supported by the substrate 50 via the convex portion 10D and the elastic member 10C so as to be displaceable in the normal direction of the first plane 51.
  • the elastic member 10C When force is applied to the top plate portion 10B, the elastic member 10C is elastically deformed, thereby causing the top plate portion 10B and the reflector 40 attached to the top plate portion 10B to be displaced in the normal direction of the first plane 51.
  • the excellent effects of the second embodiment will be explained.
  • the second embodiment as in the first embodiment, since two light emitting elements 21 and 22 are arranged, the influence of temperature changes of the light emitting elements 21 and 22 is eliminated, and the amount of deformation of the elastic support member 10 is reduced. can be measured with high precision.
  • FIG. 6 is a cross-sectional view of an optical sensor according to the third embodiment.
  • an incident restriction structure 27 is further arranged.
  • the incidence limiting structure 27 includes a condenser lens 27B that condenses light incident on the light receiving element 30, and a support member 27A that supports the condenser lens 27B.
  • the condensing lens 27B condenses the light that has been diffusely reflected on a part of the reflective surface of the reflector 40 onto the light receiving surface of the light receiving element 30.
  • the light that has been diffusely reflected on other areas of the reflective surface of the reflector 40 is restricted by the incidence limiting structure 27 so that it does not enter the light receiving surface of the light receiving element 30 .
  • the region of the reflective surface of the reflector 40 that produces diffusely reflected light that is incident on the light receiving surface of the light receiving element 30 is limited to a part, the inclination of the reflective surface of the reflector 40 is limited. The impact can be reduced. Furthermore, even if the reflector 40 is displaced in a direction parallel to the first plane 51, if the region that produces diffusely reflected light incident on the light receiving surface of the light receiving element 30 is within the reflective surface after the displacement, The amount of light received by the light receiving element 30 hardly changes. Therefore, the displacement of the reflector 40 in the direction parallel to the first plane 51 can be absorbed, and the amount of deformation of the elastic support member 10 can be measured with high precision.
  • the light that enters the light receiving surface of the light receiving element 30 is limited by the condenser lens 27B, but other structures may be used as the incident limiting structure 27.
  • an optical filter also called a louver
  • a package that limits the viewing angle may be used.
  • FIG. 7A is a cross-sectional view of the optical sensor according to the fourth example.
  • the optical sensor according to the first embodiment includes two light emitting elements 21, 22.
  • the optical sensor according to the fourth embodiment includes two sub light emitting elements 21S and 22S in addition to the two light emitting elements 21 and 22.
  • One light emitting element 21 and one sub light emitting element 21S form a pair, and the other light emitting element 22 and the other sub light emitting element 22S form a pair.
  • the two sub light emitting elements 21S and 22S are also arranged on the first plane 51 similarly to the light emitting elements 21 and 22.
  • FIG. 7B is a diagram showing the planar positional relationship of the light emitting elements 21 and 22, the sub light emitting elements 21S and 22S, and the light receiving element 30 of the optical sensor according to the fourth embodiment.
  • the representative point of the light-emitting element 21 and the representative point of the sub-light emitting element 21S, which form a pair with each other, and the representative point of the light-emitting element 22 and the representative point of the sub-light emitting element 22S are symmetrical with respect to the representative point of the light-receiving element 30. It is located in That is, the distance from the sub light emitting element 21S to the light receiving element 30 is equal to the distance a from the light emitting element 21 to the light receiving element 30. Similarly, the distance from the sub light emitting element 22S to the light receiving element 30 is equal to the distance b from the light emitting element 22 to the light receiving element 30.
  • the representative points of the two light emitting elements 21 and 22 and the light receiving element 30 are arranged side by side on one straight line.
  • Two sub-light emitting elements 21S and 22S are also arranged on this straight line.
  • the light emitting element 21 and the sub-light emitting element 21S that form a pair are caused to emit light at the same time, and the amount of light received by the light receiving element 30 is measured. Thereafter, the light emitting element 22 and the sub light emitting element 22S that form a pair are caused to emit light simultaneously, and the amount of light received by the light receiving element 30 is measured.
  • FIG. 8 is a schematic diagram showing the positional relationship among the light emitting elements 21 and 22, the sub light emitting elements 21S and 22S, the light receiving element 30, and the reflector 40 of the optical sensor according to the fourth embodiment.
  • the light emitting elements 21 and 22, the sub light emitting elements 21S and 22S, the light receiving element 30, and the reflector 40 are shown by respective representative points.
  • the reflective surface of the reflector 40 is parallel to the first plane 51, but in the following explanation, the reflective surface of the reflector 40 is parallel to the first plane 51. A case in which it is inclined with respect to is explained.
  • the inclination angle of the reflective surface of the reflector 40 is denoted as ⁇ .
  • the reflective surface of the reflector 40 may be tilted due to the manufacturing process of the optical sensor, the application of a local load to the elastic support member 10, or the like.
  • the reflective surface of the reflector 40 is assumed to be inclined in the direction of a straight line passing through the representative points of the light emitting elements 21 and 22 and the light receiving element 30.
  • the representative points of the light emitting elements 21 and 22, the sub light emitting elements 21S and 22S, the light receiving element 30, and the reflector 40 will be simply referred to as the light emitting elements 21 and 22, the light receiving element 30, and the light receiving element 30, respectively. and a reflector 40 in some cases.
  • the meanings of distances a, b, x, P a , P b and angles ⁇ 1 and ⁇ 2 are the same as the meanings of these variables shown in FIG. 3 .
  • the luminous intensity of the sub light emitting element 21S is equal to the luminous intensity G1 of the light emitting element 21, and the luminous intensity of the sub light emitting element 22S is equal to the luminous intensity G2 of the light emitting element 22.
  • the amount of light received L1 when the light emitting element 21 and the sub light emitting element 21S emit light is described by the following formula.
  • the amount of light received L2 when the light emitting element 22 and the sub light emitting element 22S emit light is described by the following formula.
  • the ratio of the amount of received light L2 to the amount of received light L1 is expressed by the following formula. Also in the fourth embodiment, the ratio L 2 /L 1 of the amount of received light is expressed by the same equation as equation (3) of the first embodiment.
  • the fourth embodiment when measuring the amount of deformation of the elastic support member 10, an excellent effect can be obtained in that it is hardly affected by temperature changes of the light emitting elements 21 and 22. Furthermore, as shown in equation (6), the ratio of the amount of received light L 2 /L 1 does not depend on the inclination angle ⁇ of the reflective surface of the reflector 40. Therefore, even if the reflector 40 is inclined with respect to the first plane 51, the amount of deformation of the elastic support member 10 can be measured with high accuracy.
  • FIG. 9A is a diagram showing a planar positional relationship among a plurality of light emitting elements 21 and 22, a plurality of sub light emitting elements 21S and 22S, and a light receiving element 30 of an optical sensor according to a modification of the fourth embodiment.
  • the respective representative points of the two light emitting elements 21 and 22, the two sub light emitting elements 21S and 22S, and the light receiving element 30 are arranged on one straight line.
  • the representative points of the light emitting elements 21, 22 and the light receiving element 30 do not have to be arranged on one straight line.
  • FIG. 9B shows a planar view of a plurality of light emitting elements 21, 22, 23, 24, a plurality of sub light emitting elements 21S, 22S, 23S, 24S, and a light receiving element 30 of an optical sensor according to another modification of the fourth embodiment. It is a figure showing a positional relationship.
  • the number of light emitting elements may be four. Note that the number of light emitting elements may be three, or five or more.
  • the light emitting element and the sub light emitting element may be arranged such that a plurality of straight lines passing through the representative points of the light emitting element and the sub light emitting element forming a pair intersect with each other at the representative point of the light receiving element 30. With this arrangement, even if the reflective surface of the reflector 40 (FIG. 7A) is tilted in various directions, the influence of the tilt can be reduced.
  • FIG. 10 is a cross-sectional view of an optical sensor according to the fifth embodiment.
  • the area of the reflective surface of the reflector 40 is approximately 0.5 to 3 times the area of the light receiving surface of the light receiving element 30.
  • the top plate portion 10B of the elastic support member 10 is composed of a reflector 40, and almost the entire surface of the top plate portion 10B facing the substrate 50 is a reflective surface. That is, when the first plane 51 is viewed in plan, the two light emitting elements 21 and 22 and the light receiving element 30 are arranged at positions included in the reflector 40.
  • the side wall portion 10A is formed of a black elastic member, such as black silicone rubber.
  • the light output from one of the light emitting elements 21 is diffusely reflected at an arbitrary point Q1 on the reflective surface of the reflector 40, and a part of the light is incident on the light receiving element 30.
  • the light output from the other light emitting element 22 is diffusely reflected at an arbitrary point Q2 on the reflective surface of the reflector 40, and a portion of the light is incident on the light receiving element 30.
  • the calculation unit 68 calculates the amount of deformation of the elastic support member 10 (the amount of displacement of the top plate portion 10B) from the change in the amount of received light.
  • FIG. 11 is a schematic diagram showing the positional relationship between the light emitting elements 21 and 22, the light receiving element 30, and the reflector 40.
  • the light emitting elements 21, 22 and the light receiving element 30 are shown by respective representative points.
  • the light is output from the light emitting element 21 and is diffusely reflected at an arbitrary point Q1 on the reflective surface of the reflector 40, and a part of it is incident on the light receiving element 30.
  • the distance from the light emitting element 21 to the point Q1 is marked as PLa
  • the distance from the point Q1 to the light receiving element 30 is marked as PDa .
  • the incident angle of light that enters point Q 1 from light emitting element 21 is marked as ⁇ L1
  • the reflection angle of light that is reflected at point Q 1 and enters light receiving element 30 is marked as ⁇ D1 .
  • the light is output from the light emitting element 22 and is diffusely reflected at an arbitrary point Q2 on the reflective surface of the reflector 40, and a part of it is incident on the light receiving element 30.
  • the distance from the light emitting element 22 to the point Q 2 is marked as P Lb
  • the distance from the point Q 2 to the light receiving element 30 is marked as P Db .
  • the incident angle of light that enters point Q 2 from light emitting element 22 is marked as ⁇ L2
  • the reflection angle of light that is reflected at point Q 2 and enters light receiving element 30 is marked as ⁇ D2 .
  • cos N represents the angular characteristic of the luminous intensity of the light emitting element 21.
  • cos N indicating the angular characteristic is just an example, and the angular characteristic does not necessarily have to be a cosine distribution, and the angular characteristic may be expressed by an arbitrary function.
  • the amount of light LQ1 reaching the light receiving element 30 from the point Q1 is expressed by the following formula.
  • cos M indicates the angular characteristic of the amount of light received by the light receiving element 30.
  • cos M indicating the angular characteristic is just an example, and the angular characteristic does not necessarily have to be a cosine distribution, and the angular characteristic may be expressed by an arbitrary function.
  • the amount of light LQ2 output from the light emitting element 22, reflected at point Q2 , and incident on the light receiving element 30 is expressed by the following equation.
  • the amount of light L 1 output from the light emitting element 21, diffusely reflected by the reflector 40, and received by the light receiving element 30 is output from the light emitting element 22, diffusely reflected by the reflector 40, and received by the light receiving element 30.
  • the amount of received light L2 is expressed by the following formula.
  • the ⁇ symbol of the numerator on the right side of the first equation of equation (10) means that the sum is calculated over the entire reflective surface of the reflector 40 for the point Q1
  • the ⁇ symbol of the second equation is: This means calculating the sum over the entire reflective surface of the reflector 40 with respect to point Q2 .
  • the ratio L 2 /L 1 of the amount of received light is expressed by the following formula.
  • the excellent effects of the fifth embodiment will be explained.
  • the fifth embodiment as in the first embodiment, since two light emitting elements 21 and 22 are arranged, the influence of temperature changes of the light emitting elements 21 and 22 is eliminated, and the amount of deformation of the elastic support member 10 is reduced. can be measured with high precision.
  • FIG. 12 is a cross-sectional view of the optical sensor according to the sixth embodiment.
  • the first embodiment FIG. 1B
  • two light emitting elements 21 and 22 and one light receiving element 30 are arranged on a first plane 51.
  • the light emitting element 20 is arranged in the place where the light receiving element 30 is arranged in the first embodiment, and in the place where the two light emitting elements 21 and 22 are arranged, Light receiving elements 31 and 32 are arranged respectively.
  • the temperature dependence of the sensitivity of the two light receiving elements 31 and 32 is the same.
  • the slopes of the sensitivity changes of the two light receiving elements 31 and 32 with respect to temperature changes are the same.
  • the two light-receiving elements 31 and 32 may have the same tendency of sensitivity change with respect to temperature change.
  • the slopes of sensitivity changes with respect to temperature changes of the two light receiving elements 31 and 32 may both be positive or both negative. It is preferable to use products with the same model number as the two light receiving elements 31 and 32. Further, it is preferable to use the two light receiving elements 31 and 32 from the same lot, and more preferably to use the two light receiving elements manufactured from the same wafer.
  • FIG. 13 is a block diagram of the processing section 60 of the optical sensor according to the sixth embodiment.
  • the first embodiment FIG. 2
  • two light emitting elements 21 and 22 are connected to one switch matrix 62
  • one light receiving element 30 is connected to the other switch matrix 65.
  • one light emitting element 20 is connected to one switch matrix 62
  • two light receiving elements 31 and 32 are connected to the other switch matrix 65.
  • the calculation unit 68 calculates the ratio L 2 /L 1 of the amount L 2 of light received by the other light receiving element 32 to the amount L 1 of light received by one light receiving element 31 when the light emitting element 21 emits light. Then, the amount of deformation of the elastic support member 10 is calculated based on the calculation result.
  • the excellent effects of the sixth embodiment will be explained.
  • the ratio L 2 /L 1 of the amount of light received by the two light receiving elements 31 and 32 hardly changes. Therefore, the amount of deformation of the elastic support member 10 can be measured with high precision by eliminating the influence of temperature changes of the light emitting element 20.
  • the elastic support member 10 may include an elastic member such as a coil spring, as in the second embodiment shown in FIG. Further, a configuration similar to the third embodiment shown in FIGS. 7A and 7B may be adopted. That is, a sub-light receiving element that pairs with one of the light-receiving elements 31 and a sub-light-receiving element that pairs with the other light-receiving element 32 may be arranged. Furthermore, the number of light receiving elements may be three or more. Further, as in the fifth embodiment shown in FIG. 10, the entire top plate portion 10B may be composed of a reflector 40.

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  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
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  • Length Measuring Devices By Optical Means (AREA)
PCT/JP2023/030017 2022-09-07 2023-08-21 光学センサ Ceased WO2024053381A1 (ja)

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001169394A (ja) * 1999-12-03 2001-06-22 Kenwood Corp 光マイクロフォン素子及び光マイクロフォン装置
JP2001296310A (ja) * 2000-04-18 2001-10-26 Koji Ono 光センサおよびその製造方法
US20100155579A1 (en) * 2006-11-02 2010-06-24 Massachusetts Institute Of Technology Compliant tactile sensor
WO2021033455A1 (ja) * 2019-08-19 2021-02-25 株式会社村田製作所 力センサ、及びそれを含むセンサアレイ並びに把持装置

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
HUP1100633A2 (en) * 2011-11-17 2013-06-28 Pazmany Peter Katolikus Egyetem Device with optical feedback for measuring force and pressure

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001169394A (ja) * 1999-12-03 2001-06-22 Kenwood Corp 光マイクロフォン素子及び光マイクロフォン装置
JP2001296310A (ja) * 2000-04-18 2001-10-26 Koji Ono 光センサおよびその製造方法
US20100155579A1 (en) * 2006-11-02 2010-06-24 Massachusetts Institute Of Technology Compliant tactile sensor
WO2021033455A1 (ja) * 2019-08-19 2021-02-25 株式会社村田製作所 力センサ、及びそれを含むセンサアレイ並びに把持装置

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