WO2024050889A1

WO2024050889A1 - Positioning jig

Info

Publication number: WO2024050889A1
Application number: PCT/CN2022/121467
Authority: WO
Inventors: 周志晓; 齐枫; 李柏春
Original assignee: 台湾积体电路制造股份有限公司; 台积电(中国)有限公司
Priority date: 2022-09-07
Filing date: 2022-09-26
Publication date: 2024-03-14
Also published as: CN217912066U

Abstract

A positioning jig, which is used for assisting in mounting positioning pins on a chuck. The positioning jig comprises: a body (21), which comprises a first surface (211) and a second surface (212) arranged opposite each other in a first direction (X), a third surface (213) connected between the first surface (211) and the second surface (212), and positioning holes (22) penetrating the first surface (211) and extending in the first direction (X), wherein the positioning holes (22) are used for accommodating at least a portion of the positioning pins, and the plurality of positioning holes (22) are arranged at intervals along a circular track in a uniform manner; an avoidance portion (23), which is formed by means of part of the third surface (213) being recessed towards the interior of the body (21), wherein the avoidance portion (23) penetrates the first surface (211) and the second surface (212) in the first direction (X); and a supporting portion (24), which is connected to the second surface (212) and is configured to extend from the second surface (212) in the first direction (X), wherein the supporting portion (24) is used for supporting the body (21). The positioning jig reduces a difference in the mounting angle of the positioning pins when the positioning pins are mounted on the chuck, such that the mounting quality and mounting efficiency of the positioning pins are improved.

Description

Positioning fixture

Cross-references to related applications

This application claims priority to Chinese patent application 202222380724.6 titled "Positioning Fixture", which was submitted on September 7, 2022. The entire content of this application is incorporated herein by reference.

Technical field

The present application belongs to the field of semiconductor manufacturing technology, and particularly relates to a positioning fixture.

Background technique

In the semiconductor wafer manufacturing process, chucks are needed to grab the wafers for wafer cleaning and other tasks. The chuck includes a chuck body and positioning pins inserted into the chuck body. The chuck grasps the wafer by adjusting the distance between the positioning pins.

At present, when the chuck is used for the first time and when the chuck is inspected or repaired, it is necessary to manually install the positioning pins on the chuck and determine the installation status of the positioning pins. The randomness is large, and the quality of the positioning pin installation needs to be improved.

Contents of the invention

The embodiment of the present application provides a positioning fixture for assisting in the installation of positioning pins on the chuck, which can improve the installation quality of the positioning pins.

An embodiment of the present application provides a positioning jig for assisting in the installation of positioning pins on a chuck. The positioning jig includes: a body, including a first surface and a second surface oppositely arranged along a first direction, and a first surface connected to the first surface; The third surface between the surface and the second surface, and the positioning holes that penetrate the first surface and extend along the first direction, the positioning holes are used to accommodate at least part of the positioning pins, and the plurality of positioning holes are evenly spaced along the circular track; let The positioning part is formed by a portion of the third surface being recessed toward the body. In the first direction, the positioning part penetrates the first surface and the second surface; the supporting part is connected to the second surface and extends from the second surface along the first surface. Extending in one direction, the support portion is used to support the body.

According to an embodiment of the first aspect of the present application, the positioning hole is provided through the first surface and the second surface.

According to an embodiment of the first aspect of the present application, the body is provided with a first indication groove extending along the radial direction of the circular trajectory and recessed from the first surface in the first direction. Along the radial direction of the circular trajectory, the first indication groove The indication groove and the positioning hole are on a straight line, and the first indication groove is used to indicate the position of the positioning hole.

According to an embodiment of the first aspect of the present application, the body is further provided with a second indication groove extending along the first direction and recessed from the third surface toward the positioning hole, and the second indication groove is connected to the first indication groove.

According to the implementation of the first aspect of the present application, the two relief portions are symmetrically arranged along the center of the circular trajectory.

According to an embodiment of the first aspect of the present application, at least part of the connection surface between the relief portion and the body is an arc surface.

According to an embodiment of the first aspect of the present application, two or more support parts are arranged symmetrically about the center of the circular trajectory.

According to an embodiment of the first aspect of the present application, the support part includes: an extension part extending along a second direction where the second direction intersects the first direction; and a protruding part provided at both ends of the extension part in the second direction, The protruding portion protrudes from the extension portion toward the second surface, and the protruding portion is fixedly connected to the second surface.

According to an embodiment of the first aspect of the present application, a side surface of the extension portion facing away from the second surface is flat.

The positioning jig in the embodiment of the present application is used to assist in installing the positioning pin on the chuck. The positioning jig includes a body. The body includes a first surface and a second surface oppositely arranged along a first direction. The positioning hole penetrates the first surface and extends along the first surface. Extending in the first direction, the positioning holes are used to accommodate at least part of the positioning pins. Multiple positioning holes are evenly spaced along the circular trajectory. The positioning holes evenly spaced along the fixed circular trajectory reduce the difference in the installation angle of each positioning pin and improve The installation quality and installation efficiency of positioning pins.

The positioning fixture provided by the embodiment of the present application also includes a relief portion formed by a portion of the third surface being recessed toward the body. The relief portion penetrates the first surface and the second surface. The setting of the relief portion allows the user to conveniently Picking and placing the chuck on the positioning fixture improves the practicality of the positioning fixture.

The positioning fixture provided by the embodiment of the present application further includes a support portion connected to the second surface and extending from the second surface along the first direction. The support portion can be used to support the body, and the support portion supports the positioning fixture in the first direction. The main body of the fixture makes it convenient for users to pick up and place the positioning fixture, thereby improving the practicality of the positioning fixture.

Description of the drawings

In order to explain the technical solutions of the embodiments of the present application more clearly, the drawings required to be used in the embodiments of the present application will be briefly introduced below. For those of ordinary skill in the art, without exerting creative efforts, they can also Additional drawings can be obtained from these drawings.

Figure 1 is an exploded view of a chuck in the prior art;

Figure 2 is a front view of the positioning pin in the prior art;

Figure 3 is a schematic structural diagram of a positioning fixture according to an embodiment of the present application;

Figure 4 is a top view of a positioning fixture according to an embodiment of the present application;

Figure 5 is a bottom view of a positioning fixture according to an embodiment of the present application;

Figure 6 is a side view of a positioning fixture according to an embodiment of the present application;

Figure 7 is a front view of the support part of the positioning fixture according to an embodiment of the present application.

Reference signs:

1 chuck; 10 chuck body; 11 positioning pin; 111 first section; 112 second section; 113 third section;

2 positioning fixture; 21 body; 211 first surface; 212 second surface; 213 third surface; 22 positioning hole; 23 relief portion; 24 support portion; 25 first indicator groove; 26 second indicator groove; 241 extension Department; 242 protruding part.

Detailed ways

Features and exemplary embodiments of various aspects of the present application will be described in detail below. In order to make the purpose, technical solutions and advantages of the present application clearer, the present application will be described in further detail below with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described here are only intended to explain the application, but not to limit the application. It will be apparent to one skilled in the art that the present application may be practiced without some of these specific details. The following description of embodiments is merely intended to provide a better understanding of the present application by illustrating examples thereof.

It should be noted that in this article, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply that these entities or operations are mutually exclusive. any such actual relationship or sequence exists between them. Furthermore, the terms "comprises," "comprises," or any other variation thereof are intended to cover a non-exclusive inclusion such that a process, method, article, or apparatus that includes a list of elements includes not only those elements, but also those not expressly listed other elements, or elements inherent to the process, method, article or equipment. Without further limitation, an element defined by the statement "comprising..." does not exclude the presence of additional identical elements in a process, method, article, or device that includes the stated element.

The applicant found that in the prior art, part of the process during the wafer preparation process requires the use of a chuck to grab the wafer to perform a series of operations. The chuck includes a chuck body and positioning pins inserted into the chuck body. The chuck grasps the wafer by adjusting the distance between the positioning pins. At present, when the chuck is used for the first time and when the chuck is inspected or repaired, it is necessary to manually install the positioning pins on the chuck and determine the installation status of the positioning pins. This is highly random, resulting in poor installation quality of the positioning pins and preventing the chuck from functioning properly. fetch operation.

In order to improve the installation quality of the positioning pins, the applicant found that the reason for the poor installation quality of the positioning pins was that the manual installation of the positioning pins was entirely based on feel and experience. The installation angle of the positioning pins was prone to deviations, resulting in poor gripping of the chuck.

In view of the above problems, the applicant provides a positioning jig for assisting in the installation of positioning pins on the chuck. The positioning jig includes a body, the body includes a first surface and a second surface oppositely arranged along a first direction, and a connection a third surface between the first surface and the second surface, and positioning holes that penetrate the first surface and extend along the first direction. The positioning holes are used to accommodate positioning pins, and the plurality of positioning holes are evenly spaced along a circular track, The evenly spaced positioning holes along the fixed circular trajectory reduce the difference in the installation angle of each positioning pin, effectively improving the installation quality and efficiency of the positioning pins.

Please refer to Figures 1 and 2. Figure 1 is an exploded view of the chuck 1 in the prior art, and Figure 2 is a front view of the positioning pin 11 of the chuck 1 in the prior art.

As shown in Figure 1, the chuck 1 includes a truncated cone-shaped chuck body 10, and a plurality of positioning pins 11 are installed on the chuck body 10. As shown in Figure 2, along the extension direction of the positioning pin 11, the positioning pin 11 is divided into a first section 111, a second section 112 and a third section 113, wherein the first section 111 matches the chuck body 10 The second section 112 of the gear is cylindrical and is inserted into the through hole 12 of the chuck body 10. The third section 113 is cylindrical and protrudes from the chuck body 10, and the axis of the third section 113 is in line with the third section. The axes of the two sections 112 do not coincide. In the initial state, the center of the third section 113 of each positioning pin 11 is on a straight line with the center of the second section 112 and the center of the chuck body 10, and the center of the third section 113 is between the center of the second section 112 and the chuck. Between the center of the circle of the body 10, the diameter of the circular grabbing space enclosed by each third section 113 is adjusted through the relative rotation of the gear of the first section 111 and the chuck body 10, so as to control the grabbing and releasing of the chuck 1 wafer.

During manual installation, the installation angle of the positioning pin 11 may easily deviate due to visual errors or other reasons. Deviation in the installation angle means that the center of the circle of the third section 113 of the positioning pin 11, the center of the circle of the second section 112 and the center of the chuck body 10 are not in a straight line, or the center of the circle of the second section 112 is located between the center of the circle of the third section 113 and the center of the circle of the chuck body 10. between the center of the chuck body 10. The consequence of the installation angle deviation is that the grasping space enclosed by each third section 113 cannot match the wafer well, resulting in poor grasping of the chuck 1 .

Please refer to Figures 3, 4, 5 and 6. Figure 3 is a schematic structural diagram of the positioning fixture 2 according to one embodiment of the present application. Figure 4 is a top view of the positioning fixture 2 according to one embodiment of the present application. Figure 5 is A bottom view of the positioning fixture 2 according to an embodiment of the present application. Figure 6 is a side view of the positioning fixture 2 according to an embodiment of the present application.

As shown in Figures 3 to 6, the positioning fixture 2 in the embodiment of the present application includes a body 21, a relief part 23 and a support part 24. The body 21 includes a first surface 211 and a second surface 211 oppositely arranged along the first direction X. surface 212, as well as a third surface 213 connected between the first surface 211 and the second surface 212, and a positioning hole 22 that penetrates the first surface 211 and extends along the first direction X. The positioning hole 22 is used to accommodate at least part of the positioning pins (not shown in the figure), and a plurality of positioning holes 22 are evenly spaced along a circular trajectory; the relief portion 23 is formed by a portion of the third surface 213 recessed toward the body 21, and in the first direction X, the relief portion 23 penetrates the first surface 211 and the second surface 212; the support portion 24 is connected to the second surface 212 and extends from the second surface 212 along the first direction X. The support portion 24 is used to support the body 21.

Please combine Figure 1 and Figure 2 together. The positioning fixture 2 in the embodiment of the present application is used to position the positioning pin 11 during the installation of the positioning pin 11 on the chuck 1, and is evenly spaced through a fixed circular trajectory. The positioning hole 22 defines the installation position of the third section 113 of the positioning pin 11. The fixed circular trajectory matches the circular grabbing space surrounded by the correctly installed third section 113, thereby limiting the positioning pin 11. The installation angle of the positioning pin 11 is improved to improve the installation angle deviation problem of the positioning pin 11.

The positioning fixture 2 in the embodiment of the present application includes a relief portion 23 formed by a portion of the third surface 213 recessed toward the body 21 . In the first direction X, the relief portion 23 penetrates the first surface 211 and the second On the surface 212, when picking up and placing the chuck on the positioning jig 2, the user can conveniently grab both sides of the chuck through the depression in the area of the relief portion 23.

Optionally, the body 21 is made of transparent material. The body made of transparent material facilitates timely detection of problems such as cracks in the positioning hole 22 . Optionally, the body 21 is made of acrylic.

Optionally, in the first direction X, the depth of the positioning hole 22 is greater than 5 mm, and the depth of the positioning hole 22 is less than 35 mm.

Optionally, in the first direction X, the thickness of the body 21 is greater than 7 mm, and the thickness of the body 21 is less than 40 mm.

Optionally, the support part 24 is made of metal, and the metal material improves the structural strength of the support part 24.

In the solution of the embodiment of the present application, the positioning jig 2 is used to assist in installing the positioning pins on the chuck. The positioning jig 2 includes a body 21, and the body 21 includes a first surface 211 and a second surface that are oppositely arranged along the first direction X. 212, the positioning holes 22 penetrate the first surface 211 and extend along the first direction The positioning holes 22 reduce the difference in installation angles of the positioning pins and improve the installation quality and efficiency of the positioning pins. The relief portion 23 is formed by a portion of the third surface 213 being recessed toward the inside of the body 21. The relief portion 23 penetrates the first surface 211 and the second surface 212. The setting of the relief portion 23 allows the user to conveniently position the fixture. 2, the practicability of the positioning fixture 2 is improved by picking up and placing the chuck. The support portion 24 is connected to the second surface 212 and extends from the second surface 212 along the first direction X. The support portion 24 can be used to support the body 21. The support portion 24 supports the body of the positioning fixture 2 in the first direction X. 21. It is convenient for the user to pick up and place the positioning fixture 2, which improves the practicality of the positioning fixture 2.

In some embodiments, as shown in FIGS. 3 to 6 , the positioning hole 22 is disposed through the first surface 211 and the second surface 212 .

In these embodiments, the positioning holes 22 provided throughout are easier to clean, and the production difficulty of the positioning holes 22 provided throughout is low and the production efficiency is high.

In some embodiments, as shown in FIGS. 3 to 6 , the body 21 is provided with a first indicating groove 25 that extends along the radial direction of the circular trajectory and is recessed by the first surface 211 along the first direction X. In the radial direction of the shape trajectory, the first indicating groove 25 and the positioning hole 22 are on a straight line, and the first indicating groove 25 is used to indicate the position of the positioning hole 22 .

Optionally, in the first direction X, the depth of the first indication groove 25 does not exceed the depth of the positioning hole 22 .

Optionally, the first indicating groove 25 is coated with a pigment that is different from the color of the body 21 to enhance the indicating effect of the first indicating groove 25 .

In these embodiments, when the chuck is placed on the body 21 of the positioning jig 2, the chuck will cover the position of the positioning hole 22, and by setting the first indicator groove 25 to show the position of the positioning hole 22, the user can The alignment operation of the chuck and the positioning hole 22 is completed conveniently, which improves the practicality of the positioning fixture 2 .

In some embodiments, as shown in FIGS. 3 to 6 , the body 21 is also provided with a second indicator groove 26 extending along the first direction X and recessed from the third surface 213 toward the positioning hole 22 . 26 is connected to the first indicating groove 25.

Optionally, the second indicating groove 26 cannot communicate with the positioning hole 22 .

Optionally, the second indicating groove 26 is coated with a pigment that is different from the color of the main body 21 , thereby enhancing the indicating effect of the second indicating groove 26 .

In these embodiments, the first indicating groove 25 and the second indicating groove 26 are connected and matched, which improves the indicating effect of the first indicating groove 25 and the second indicating groove 26 and allows the user to complete the operation of the chuck and the positioning hole 22 more conveniently. The alignment operation improves the practicality of the positioning fixture 2.

In some embodiments, as shown in Figures 3 to 6, the two relief portions 23 are symmetrically arranged along the center of the circular trajectory.

In these embodiments, the two symmetrically arranged clearance portions 23 facilitate the user to take and place the chuck with two hands, thereby improving the practicality of the positioning fixture 2 .

In some embodiments, as shown in FIGS. 3 to 6 , at least part of the connection surface between the relief portion 23 and the body 21 is an arc surface.

Optionally, the edges connecting the relief portion 23 and the body 21 are all rounded.

Optionally, the connection surfaces between the relief portion 23 and the body 21 are all arc surfaces.

In these embodiments, at least part of the connection surface between the relief portion 23 and the body 21 is a curved surface, which reduces the risk of the user being scratched during use and improves the safety of the positioning fixture 2 .

In some embodiments, as shown in FIGS. 5 and 6 , more than two supporting parts 24 are arranged symmetrically about the center of the circular trajectory.

In these embodiments, more than two supporting parts 24 are arranged symmetrically about the center of the circular trajectory, which improves the stability of the positioning fixture 2 .

Please refer to FIG. 7 , which is a front view of the support part 24 of the positioning fixture according to an embodiment of the present application.

In some embodiments, as shown in Figures 6 and 7, the support part 24 includes an extension part 241 and a protruding part 242, the extension part 241 extends along the second direction Y, and the second direction Y intersects the first direction X, The protruding portions 242 are provided at both ends of the extending portion 241 in the second direction Y. The protruding portions 242 protrude from the extending portion 241 toward the second surface Y. The protruding portions 242 are fixedly connected to the second surface 212 .

Optionally, in the second direction Y, the extension distance of the extension part 241 is no less than 15 cm, so that the user can grasp the extension part 241 easily.

Optionally, in the first direction X, the extension distance of the protruding portion 242 is no less than 10 cm, so that the user can comfortably grasp the extending portion 241 .

Optionally, the protruding portion 242 is connected to a blind hole bolt provided on the second surface Y. The bolt connection improves the connection reliability of the support portion 24 and the body 21 .

Optionally, the protruding portion 242 and the extending portion 241 are made of the same material. Optionally, the protruding part 242 and the extending part 241 are integrally formed.

In these embodiments, the support part 24 includes an extension part 241 extending along the second direction Y, and a protrusion part 242 disposed at both ends of the extension part 241 in the second direction Y. The protruding portion 242 protrudes from the extension portion 241 toward the second surface 212. The protruding portion 242 is fixedly connected to the second surface 212. The supporting portion 24 can not only support the body 21 of the positioning jig 2, but also serve as a handle so that the user can pass through it. The way of holding the extension part 241 makes it convenient to take the positioning fixture 2, which improves the practicality of the positioning fixture 2.

In some embodiments, as shown in FIGS. 6 and 7 , a side surface of the extension portion 241 facing away from the second surface 212 is flat.

In these embodiments, the side surface of the extension portion 241 away from the second surface 212 is flat, and the flat surface improves the support stability of the support portion 24 .

The above are only specific implementation modes of the present application. Those skilled in the art can clearly understand that for the convenience and simplicity of description, the specific working processes of the above-described systems, modules and units can be referred to the foregoing method embodiments. The corresponding process will not be described again here. It should be understood that the protection scope of the present application is not limited thereto. Any person familiar with the technical field can easily think of various equivalent modifications or substitutions within the technical scope disclosed in the present application, and these modifications or substitutions should be covered. within the protection scope of this application.

Claims

A positioning fixture used to assist in the installation of positioning pins on the chuck. The positioning fixture includes:

The body includes a first surface and a second surface arranged oppositely along a first direction, a third surface connected between the first surface and the second surface, and a third surface penetrating the first surface and along the first surface. Positioning holes extending in the direction, the positioning holes are used to accommodate at least part of the positioning pins, and a plurality of the positioning holes are evenly spaced along a circular track;

A relief portion is formed by a portion of the third surface being recessed toward the inside of the body, and in the first direction, the relief portion penetrates the first surface and the second surface;

A support portion is connected to the second surface and extends from the second surface along the first direction. The support portion is used to support the body.
The positioning fixture according to claim 1, wherein the positioning hole is disposed through the first surface and the second surface.
The positioning fixture according to claim 1, wherein the body is provided with a first indication groove extending along the radial direction of the circular trajectory and recessed from the first surface along the first direction, Along the radial direction of the circular trajectory, the first indication groove and the positioning hole are on a straight line, and the first indication groove is used to indicate the position of the positioning hole.
The positioning fixture according to claim 3, wherein the body is further provided with a second indication groove extending along the first direction and recessed from the third surface toward the positioning hole, and the third indication groove is recessed from the third surface toward the positioning hole. The two indicating grooves are connected with the first indicating groove.
The positioning fixture according to any one of claims 1 to 4, wherein the two relief portions are symmetrically arranged along the center of the circular trajectory.
The positioning fixture according to any one of claims 1 to 5, wherein at least part of the connection surface between the relief portion and the body is an arc surface.
The positioning jig according to any one of claims 1 to 6, wherein two or more support parts are arranged symmetrically about the center of the circular trajectory.
The positioning fixture according to any one of claims 1 to 7, wherein the support part includes:

The extension portion extends along a second direction, and the second direction intersects with the first direction;

Protruding parts are provided at both ends of the extending part in the second direction, and the protruding parts protrude from the extending part toward the second surface, and the protruding parts and the third Two surface fixed connections.
The positioning fixture according to claim 8, wherein a side surface of the extension portion facing away from the second surface is flat.