WO2024050878A1 - 离子源灯丝结构、离子源装置及离子注入设备 - Google Patents

离子源灯丝结构、离子源装置及离子注入设备 Download PDF

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Publication number
WO2024050878A1
WO2024050878A1 PCT/CN2022/120908 CN2022120908W WO2024050878A1 WO 2024050878 A1 WO2024050878 A1 WO 2024050878A1 CN 2022120908 W CN2022120908 W CN 2022120908W WO 2024050878 A1 WO2024050878 A1 WO 2024050878A1
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Prior art keywords
ion source
filament
main body
section
elastic
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Ceased
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PCT/CN2022/120908
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English (en)
French (fr)
Inventor
杜建民
邵卫
邵浩
宋文博
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TSMC China Co Ltd
Taiwan Semiconductor Manufacturing Co TSMC Ltd
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TSMC China Co Ltd
Taiwan Semiconductor Manufacturing Co TSMC Ltd
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Publication of WO2024050878A1 publication Critical patent/WO2024050878A1/zh
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/08—Ion sources; Ion guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation

Definitions

  • the present application relates to the field of semiconductor preparation technology, and in particular to an ion source filament structure, an ion source device and an ion implantation equipment.
  • Ion implantation equipment is an important manufacturing process equipment used to perform ion doping during the manufacturing process of integrated circuits. It includes an ion source device that converts gaseous materials or solid materials into ion beams.
  • the ion source device includes a power supply, a chamber and an ion source filament structure, wherein the ion source filament structure includes a filament and a feed connecting rod. One end of the feed connecting rod is connected to the power supply, and the other end is connected to the filament.
  • the high-energy current generated by the power supply flows into the filament through the feed connecting rod.
  • the filament is energized and heated to generate hot electrons, which react with gaseous materials or solid materials in the chamber of the ion source device to generate ions.
  • connection part between the feed connecting rod and the filament in the existing ion source filament structure is a claw-type socket, and the filament is inserted into the claw-type socket.
  • the claw socket of the feed connecting rod is prone to plastic deformation, which will lead to a reduction in the contact area between the filament and the claw socket of the feed connecting rod, causing the resistance at the contact point between the filament and the claw socket to increase.
  • this application provides an ion source filament structure, an ion source device and an ion implantation equipment, which can improve the heating phenomenon at the contact point between the filament and the feed connecting rod in the ion source filament structure.
  • inventions of the present application provide an ion source filament structure.
  • the ion source filament structure includes a filament, a feed connecting rod and a clamping component.
  • the filament includes a body and mounting terminals.
  • the filament includes a body and mounting terminals.
  • the feed connecting rod includes a main body and a connecting part provided with a mounting hole.
  • the connecting part is provided at one end of the main body along its own length direction, and the other end of the main body along its own length direction is connected to the power supply.
  • the clamping component is arranged in the mounting hole.
  • the clamping component is a sleeve-shaped structure.
  • the clamping component includes an elastic structural section and a fixed section.
  • the fixed section is arranged at both ends of the elastic structural section along its length direction.
  • the elastic structural section has a radial direction. The amount of deformation, the elastic structure segment is plug-in connected with the installation terminal and provides clamping force to the installation terminal.
  • the inner diameter of the elastic structure section has a gradually decreasing trend.
  • the elastic structure segment includes a plurality of spring wires, and the plurality of spring wires are circumferentially and spaced apart to form a sleeve-like structure.
  • the fixed segment and the elastic structural segment are integrally formed structures.
  • a boss is provided on a side of the mounting hole close to the main body, the size and shape of the boss match the size and shape of the fixing section, and the fixing section is inserted into the boss.
  • a chamfer structure is provided at the intersection between the end surface on the side of the connecting portion away from the main body and the circumferential inner surface of the connecting portion.
  • the connecting portion is detachably connected to the main body portion.
  • an end of the connecting portion close to the main body is provided with a heat insulating structure, and the heat insulating structure is located between the connecting portion and the main body.
  • inventions of the present application provide an ion source device.
  • the ion source device includes the ion source filament structure provided in any embodiment of the first aspect.
  • an embodiment of the present application provides an ion implantation device.
  • the ion implantation device includes the ion source device provided in the embodiment of the second aspect.
  • the ion source filament structure, ion source device and ion injection equipment provided by this application are provided with a clamping component with an elastic structural segment in the feed connecting rod in the ion source filament structure.
  • the elastic structural segment has a radial deformation amount, and the filament After being plugged into the elastic structure, the elastic structure segment can provide clamping force to the filament.
  • the elastic structure has elastic deformation, so when the temperature is high, the elastic structure is not prone to permanent deformation, so that the contact area between the elastic structure and the ion source filament is more stable, and the resistance at the contact between the elastic structure and the filament is not easy to change, and thus It can improve the heating phenomenon caused by excessive resistance at the contact point between the filament and the feed connecting rod in the ion source filament structure, and improve the safety and reliability of the ion source device.
  • Figure 1 is a schematic structural diagram of an ion source filament structure provided by some embodiments of the present application.
  • Figure 2 is a schematic structural diagram of a feed connecting rod of an ion source filament structure provided by some embodiments of the present application;
  • Figure 3 is a schematic structural diagram of a clamping component of an ion source filament structure provided by some embodiments of the present application.
  • a first feature “above” or “below” a second feature may mean that the first and second features are in direct contact, or the first and second features may be in direct contact. Indirect contact through intermediaries.
  • the terms “above”, “above” and “above” the first feature is above the second feature may mean that the first feature is directly above or diagonally above the second feature, or simply means that the first feature is higher in level than the second feature.
  • "Below”, “below” and “beneath” the first feature to the second feature may mean that the first feature is directly below or diagonally below the second feature, or simply means that the first feature has a smaller horizontal height than the second feature.
  • Ion implantation equipment is an important manufacturing process equipment used to perform ion doping during the manufacturing process of integrated circuits. It includes an ion source device that converts gaseous materials or solid materials into ion beams.
  • the ion source device includes a power supply, a chamber and an ion source filament structure, wherein the ion source filament structure includes a filament and a feed connecting rod. One end of the feed connecting rod is connected to the power supply, and the other end is connected to the filament.
  • the high-energy current generated by the power supply flows into the filament through the feed connecting rod.
  • the filament is energized and heated to generate hot electrons, which react with gaseous materials or solid materials in the chamber of the ion source device to generate ions.
  • connection part between the feed connecting rod and the filament in the existing ion source filament structure is a claw-type socket, and the filament is inserted into the claw-type socket.
  • the claw socket of the feed connecting rod is prone to plastic deformation, which will lead to a reduction in the contact area between the filament and the claw socket of the feed connecting rod, causing the resistance at the contact point between the filament and the claw socket to increase. This results in severe heating, which can easily cause other components in the ion source device (such as power supply cables) to be damaged by heat.
  • a clamping component with an elastic structure can be provided in the feed connecting rod in the ion source filament structure.
  • the elastic structure has a radial deformation amount. After the filament is inserted into the elastic structure, the elastic structure section can Provides clamping force to the filament.
  • the elastic structure has elastic deformation, so that the contact area between the elastic structure and the ion source filament is relatively stable and is not easily affected by temperature. Furthermore, the resistance at the contact point between the elastic structure and the filament is not easy to increase, which can improve the relationship between the filament and the filament in the ion source filament structure.
  • the heating phenomenon caused by excessive resistance at the contact point of the feed connecting rod improves the safety and reliability of the ion source device.
  • embodiments of the present application provide an ion source filament structure, an ion source device and an ion implantation equipment, which can improve the heating phenomenon at the contact point between the filament and the feed connecting rod in the ion source filament structure.
  • the following first introduces the structure of the ion source filament provided by the embodiment of the present application.
  • Figure 1 is a schematic structural diagram of an ion source filament structure provided by some embodiments of the present application.
  • Figure 2 is a schematic structural diagram of a feed connecting rod of an ion source filament structure provided by some embodiments of the present application.
  • Figure 3 is A schematic structural diagram of a clamping component of an ion source filament structure provided in some embodiments of the present application.
  • the ion source filament 10 structure includes a filament 10 , a feed connecting rod 20 and a clamping component 30 .
  • the filament 10 includes a body 11 and mounting terminals 12 .
  • the feed connecting rod 20 includes a main body 21 and a connecting part 22 provided with a mounting hole 221.
  • the connecting part 22 is provided at one end of the main body 21 along its length direction, and the other end of the main body 21 along its length direction is connected to the power source. .
  • the clamping part 30 is arranged in the mounting hole 221.
  • the clamping part 30 has a sleeve-like structure.
  • the clamping part 30 includes an elastic structural section 31 and a fixed section 32.
  • the fixed section 32 is arranged on both sides of the elastic structural section 31 along its length direction. At the end, the elastic structural section 31 has a radial deformation amount.
  • the elastic structural section 31 is plug-connected to the installation terminal 12 and provides a clamping force to the installation terminal 12 .
  • the material of the filament 10 can be tungsten, and the shape of the filament 10 can be but is not limited to a spiral structure, a U-shaped structure or a wavy linear structure, etc., so as to make the filament 10 more uniform during the heating process. This application does not specify the details of the filament 10. The shape is limited and can be selected according to the actual situation.
  • the main body 11 of the filament 10 is connected to the feed connecting rod 20 through the mounting terminal 12, which may be a rod-shaped structure.
  • the feed connecting rod 20 is used to connect the filament 10 and the external power supply cable.
  • the main body 21 of the feed connecting rod 20 is provided with a connecting portion 22 along one end in its length direction, and the connecting portion 22 is used to connect to the filament 10 .
  • the other end of the main body portion 21 of the feed connecting rod 20 along its length direction is connected to the power source through a power supply cable.
  • the feed connecting rod 20 can use a smooth rod, and a joint is welded on one end of the main body 21 of the feeding connecting rod 20 and the power supply to connect the power supply cable; it is also possible to connect the main body 21 of the feeding connecting rod 20 and One end of the power connection is processed with a threaded structure, and a nut is used to connect the power supply cable.
  • the feed connecting rod 20 needs to pass directly into the vacuum environment in the ion source device chamber and maintain vacuum sealing and electrical insulation from other components.
  • the connecting part 22 is provided with a mounting hole 221, and the clamping component 30 is disposed in the mounting hole 221.
  • the clamping component 30 has a sleeve-shaped structure, and the shape and size of the mounting hole 221 matches the clamping component 30 so that the clamping component 30 can fit into the mounting hole 221 .
  • the connection method between the clamping component 30 and the connecting part 22 may be, but is not limited to, plugging, welding or bonding.
  • the elastic structural section 31 of the clamping component 30 has a radial deformation amount.
  • the installation terminal 12 of the filament 10 is plugged into the elastic structural section 31.
  • the elastic structural section 31 can provide a clamping force to the installation terminal 12 so that the installation terminal of the filament 10 can 12 is firmly connected to the connecting portion 22 of the feed connecting rod 20 .
  • the fixed sections 32 of the clamping component 30 are provided at both ends of the elastic structural section 31 along its length direction. On the one hand, the structural firmness of the elastic structural section 31 can be improved; on the other hand, the clamping component 30 can pass through the fixed sections 32 By connecting with the connecting portion 22 , the influence of the inner wall of the mounting hole 221 on the radial deformation of the elastic structural section 31 can be reduced.
  • a clamping assembly with an elastic structural section 31 is provided in the feed connecting rod 20 in the structure of the ion source filament 10.
  • the elastic structural section 31 has a radial deformation amount, and the filament 10 is inserted into the elastic structural section 31.
  • the elastic structure section 31 can provide clamping force to the filament 10 .
  • the elastic structure section 31 has elastic deformation, so that the contact area between the elastic structure section 31 and the ion source filament 10 is relatively stable and is not easily affected by temperature.
  • the resistance at the contact point between the elastic structure section 31 and the filament 10 is not easy to change, so that it can In the structure of the ion source filament 10, the heating phenomenon caused by excessive resistance at the contact point between the filament 10 and the feed connecting rod 20 is improved, thereby improving the safety and reliability of the ion source device.
  • the inner diameter of the elastic structure section 31 has a gradually decreasing trend.
  • the inner diameter of the elastic structure section 31 gradually decreases, so that the two ends of the elastic structure section 31 along its length direction have larger inner diameters, and the elastic structure section 31 has a larger inner diameter.
  • the middle part has a smaller inner diameter.
  • the two ends of the elastic structure section 31 along its length direction have larger inner diameters, which can make it easier for the installation terminal 12 of the filament 10 to be inserted into the clamping component 30; the middle part of the elastic structure section 31 has a smaller inner diameter, which can A greater clamping force is provided for the installation terminal 12 of the filament 10, thereby further improving the connection firmness between the filament 10 and the feed connecting rod 20.
  • the installation terminal 12 of the filament 10 can be inserted into the clamping component more easily. 30; On the other hand, a greater clamping force can be provided for the installation terminal 12 of the filament 10, thereby further improving the connection firmness between the filament 10 and the feed connecting rod 20.
  • the elastic structure section 31 includes a plurality of spring wires distributed along the circumference and at intervals to form a sleeve-like structure.
  • the material of the spring wire may be, but is not limited to, one or more of carbon steel, iron, copper and titanium.
  • a plurality of spring wires are distributed along the circumference to form a sleeve-like structure, and both ends of the spring wires along their length direction are fixedly connected to the fixed section 32 .
  • a plurality of spring wires are distributed at intervals along the circumference of the sleeve-shaped structure, so that gaps are formed between the spring wires, which can improve the heat dissipation performance of the elastic structural section 31 and thereby reduce excessive heat from the filament 10 passing through the clamping component 30 Conducted to the connecting portion 22 of the feed connecting rod 20 .
  • the elastic structural section 31 is arranged in the form of multiple spring wires distributed along the circumference and at intervals, which can not only provide sufficient pre-tightening force for the filament 10, but also improve the heat dissipation performance of the clamping component 30, further reducing the The temperature at the contact point between the filament 10 and the feed connecting rod 20 in the ion source filament 10 structure can be further improved, thereby further improving the safety and reliability of the ion source device.
  • the fixed section 32 and the elastic structural section 31 are an integrally formed structure.
  • the clamping component 30 is made through an integral molding manufacturing process, so that the fixed section 32 and the elastic structural section 31 form an integrated structure.
  • the fixed section 32 and the elastic structural section 31 form an integrated structure.
  • additional connection processes such as welding or bonding, which simplifies the manufacturing process of the clamping component 30 .
  • the integrated structure of the fixed section 32 and the elastic structural section 31 has a higher connection firmness, and thus can The overall structural strength of the clamping component 30 is improved.
  • the manufacturing process of the clamping component 30 can be simplified, and the overall structural strength of the clamping component 30 can be improved.
  • a boss 222 is provided on a side of the mounting hole 221 close to the main body 21 .
  • the boss 222 has a size and shape that matches the size and shape of the fixing section 32 , and the fixing section 32 is inserted into the boss 222 .
  • the size and shape of the boss 222 matches the size and shape of the fixing section 32.
  • the fixing section 32 of the clamping component 30 can be an annular structure, and the boss 222 can be a cylindrical structure.
  • the outer diameter of the boss 222 It matches the inner diameter of the fixing section 32 so that the fixing section 32 can be inserted into the boss 222 .
  • the fixed section 32 of the clamping component 30 can also be a square ring structure, and the corresponding boss 222 can be a square columnar structure.
  • This application does not limit the specific shapes of the fixed section 32 and the boss 222. They can be based on The selection is based on the actual situation, and for the sake of brevity, it will not be repeated here.
  • the boss 222 can play a positioning role to facilitate the assembly of the clamping component 30 and the mounting hole 221.
  • the fixed section 32 is plugged into the boss 222, and there is a larger contact area between the circumferential inner surface of the fixed section 32 and the circumferential outer surface of the boss 222, which is beneficial to improving the connection between the clamping component 30 and the power feed.
  • the connection method between the circumferential inner surface of the fixed section 32 and the circumferential outer surface of the boss 222 may be, but is not limited to, welding or bonding.
  • a chamfer structure 223 is provided at the intersection between the end surface of the connecting portion 22 on the side away from the main body portion 21 and the circumferential inner surface of the connecting portion 22 .
  • the chamfer structure 223 has an inclined surface, and the inclined surface of the chamfer structure 223 has a guiding effect.
  • the inclined surface of the chamfer structure 223 can guide the clamping component 30 to accurately enter the inside of the mounting hole 221; on the other hand, the mounting terminal 12 of the filament 10 During the insertion process with the clamping component 30 , the inclined surface of the chamfer structure 223 can guide the installation terminal 12 of the filament 10 to be accurately inserted into the clamping component 30 .
  • the connecting portion 22 is detachably connected to the main body portion 21 .
  • the feed connecting rod 20 is connected to the filament 10 through the connecting part 22.
  • the filament 10 will have an extremely high temperature after being energized.
  • the mounting terminal 12 of the filament 10 is partially located in the mounting hole 221 of the connecting part 22. Therefore, the temperature of the filament 10 will be conducted As for the connecting part 22, there is a risk of overheating damage if the connecting part 22 is exposed to a high temperature environment for a long time.
  • the detachable connection method between the connecting part 22 and the main body part 21 may be, but is not limited to, threaded connection or snap connection.
  • connection mode between the connecting part 22 and the main body part 21 as a detachable connection
  • the connecting part 22 when the connecting part 22 is damaged and needs to be replaced, there is no need to disassemble the entire feed connecting rod 20 from the ion source device. It is only necessary to disassemble and replace the connecting part 22 . In this way, it can not only improve the replacement efficiency, but also reduce the cost.
  • a heat insulation structure 23 is provided at one end of the connection part 22 close to the main body part 21 , and the heat insulation structure 23 is located between the connection part 22 and the main body part 21 .
  • the main body 21 of the power feeding connecting rod 20 is provided with a connecting portion 22 along one end in its length direction, and the connecting portion 22 is used to connect with the filament 10 .
  • the other end of the main body portion 21 of the feed connecting rod 20 along its length direction is connected to the power source through a power supply cable.
  • the filament 10 will have an extremely high temperature after being energized, and the temperature will be transmitted from the connecting portion 22 to the main body 21 along the power feeding connecting rod 20.
  • the power supply cable connected to one end of the main body 21 will easily overheat and burn under high temperatures.
  • the heat insulation structure 23 may be made of, but is not limited to, polytetrafluoroethylene, polyphenylene sulfide, polyether ether ketone, polyphenylene, and other materials. This application does not limit the specific material of the heat insulation structure 23, and it can be selected according to the actual situation.
  • the heat insulation structure 23 may be, but is not limited to, a sheet structure or a film structure.
  • the heat insulation structure 23 is provided at one end of the connecting portion 22 close to the main body 21 and between the connecting portion 22 and the main body 21 of the feed connecting rod 20 .
  • the heat insulating structure 23 is used to isolate the main body 21 of the feeding connecting rod 20 from the main body 21 of the feeding connecting rod 20 . Heat conduction between the connecting parts 22.
  • the heat insulation structure 23 is located between the connection part 22 and the main body part 21 of the feed connecting rod 20, which can effectively reduce the power of the feed connecting rod.
  • the heat conduction between the main body part 21 and the connecting part 22 of 20 further reduces the risk of overheating and burning of the power supply cable at high temperatures, further improving the safety and reliability of the ion source device.
  • the present application also provides an ion source device, including the ion source filament 10 structure of the above solution.
  • the ion source device includes the ion source filament 10 structure provided in the embodiment of the present application.
  • the ion source filament 10 structure please refer to the description of the corresponding part of the ion source filament 10 structure described in the embodiment of the present application. For the sake of brevity, no further details will be given here.
  • the present application also provides an ion implantation device, including the ion source device of the above solution.
  • the ion implantation equipment includes the ion source device provided in the embodiment of the present application.
  • the ion source device provided in the embodiment of the present application.
  • the description of the corresponding parts of the ion source device and the structure of the ion source filament 10 described in the embodiment of the present application please refer to the description of the corresponding parts of the ion source device and the structure of the ion source filament 10 described in the embodiment of the present application. For the sake of brevity, no further details will be given here.

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

提供了一种离子源灯丝结构、离子源装置及离子注入设备。离子源灯丝结构包括灯丝（10）、馈电连接杆（20）和夹持部件（30）。灯丝（10）包括本体（11）和安装端子（12）。馈电连接杆（20）包括主体部（21）和设置有安装孔（221）的连接部（22），连接部（22）设置于主体部（21）沿自身长度方向上的一端，主体部（21）沿自身长度方向上的另一端与电源连接。夹持部件（30）设置于安装孔（221）内，夹持部件（30）为套筒状结构，夹持部件（30）包括弹性结构段（31）和固定段（32），固定段（32）设置于弹性结构段（31）沿自身长度方向上的两端，弹性结构段（31）具有径向形变量，弹性结构段（31）与安装端子（12）插接式连接并向安装端子（12）提供夹紧力。

Description

离子源灯丝结构、离子源装置及离子注入设备
相关申请的交叉引用
本申请要求享有于2022年09月05日提交的名称为“离子源灯丝结构、离子源装置及离子注入设备”的中国专利申请第202222352327.8号的优先权，该申请的全部内容通过引用并入本文中。
技术领域
本申请涉及半导体制备技术领域，特别涉及一种离子源灯丝结构、离子源装置及离子注入设备。
背景技术
离子注入设备是用来在集成电路的制造过程中执行离子掺入的重要制作工艺设备，其中包括了将气体材料或固体材料转换为离子束的离子源装置。离子源装置包括电源、腔室及离子源灯丝结构，其中，离子源灯丝结构包括灯丝及馈电连接杆。馈电连接杆一端连接电源，另一端连接灯丝，电源产生的高能电流通过馈电连接杆通入灯丝中。灯丝通电被加热后产生热电子，热电子与离子源装置的腔室内的气体材料或固体材料相互反应而产生离子。
目前现有的离子源灯丝结构中的馈电连接杆与灯丝的连接部位为爪式插口，灯丝插接于爪式插口中。在高温情况下，馈电连接杆的爪式插口易发生塑性形变，会导致出现灯丝与馈电连接杆的爪式插口接触面积减小的情况，使灯丝与爪式插口接触处的电阻变大而导致发热严重，容易使离子源装置中的其他器件(例如供电线缆)受热损坏。有鉴于此，亟需对离子源灯丝结构进行改进。
实用新型内容
鉴于上述问题，本申请提供了一种离子源灯丝结构、离子源装置及离子注入设备，能够改善离子源灯丝结构中灯丝与馈电连接杆接触处的发热现象。
第一方面，本申请实施例提供了一种离子源灯丝结构，离子源灯丝结构包括灯丝、馈电连接杆和夹持部件。灯丝包括本体和安装端子。灯丝包括本体和安装端子。馈电连接杆包括主体部和设置有安装孔的连接部，连接部设置于主体部沿自身长度方向上的一端，主体部沿自身长度方向上的另一端与电源连接。夹持部件设置于安装孔，夹持部件为套筒状结构，夹持部件包括弹性结构段和固定段，固定段设置于弹性结构段沿自身长度方向上的两端，弹性结构段具有径向形变量，弹性结构段与安装端子插接式连接并向安装端子提供夹紧力。
在第一方面的一些实施方式中，沿固定段至弹性结构段的方向上，弹性结构段的内径呈逐渐减小趋势。
在第一方面的一些实施方式中，弹性结构段包括多个弹簧丝，多个弹簧丝沿圆周且间隔分布以形成套筒状结构。
在第一方面的一些实施方式中，固定段与弹性结构段为一体成型结构。
在第一方面的一些实施方式中，安装孔靠近主体部的一侧设置有凸台，凸台的尺寸形状与固定段的尺寸形状相匹配，固定段插接于凸台。
在第一方面的一些实施方式中，连接部远离主体部一侧的端面与连接部周向内侧表面的交接处设置有倒角结构。
在第一方面的一些实施方式中，连接部可拆卸连接于主体部。
在第一方面的一些实施方式中，连接部靠近主体部的一端设置有隔热结构，隔热结构位于连接部与主体部之间。
第二方面，本申请实施例提供了一种离子源装置，离子源装置包括第一方面任一实施方式提供的离子源灯丝结构。
第三方面，本申请实施例提供了一种离子注入设备，离子注入设备包括第二方面实施方式提供的离子源装置。
本申请提供的离子源灯丝结构、离子源装置及离子注入设备，通过在离子源灯丝结构中的馈电连接杆中设置具有弹性结构段的夹持组件，弹性 结构段具有径向形变量，灯丝插接于弹性结构后，弹性结构段能够向灯丝提供夹紧力。弹性结构具有弹性形变，所以在温度较高时，弹性结构不易发生永久性形变，以使弹性结构与离子源灯丝的接触面积较稳定，弹性结构与灯丝的接触处的电阻也不易发生变化，进而能够改善离子源灯丝结构中灯丝与馈电连接杆接触处因电阻过大而导致的发热现象，提高了离子源装置的安全性和可靠性。
上述说明仅是本申请技术方案的概述，为了能够更清楚了解本申请的技术手段，而可依照说明书的内容予以实施，并且为了让本申请的上述和其它目的、特征和优点能够更明显易懂，以下特举本申请的具体实施方式。
附图说明
通过阅读下文优选实施方式的详细描述，各种其他的优点和益处对于本领域普通技术人员将变得清楚明了。附图仅用于示出优选实施方式的目的，而并不认为是对本申请的限制。而且在整个附图中，用相同的参考符号表示相同的部件。在附图中：
图1为本申请一些实施例所提供的一种离子源灯丝结构的结构示意图；
图2为本申请一些实施例所提供的一种离子源灯丝结构的馈电连接杆的结构示意图；
图3为本申请一些实施例所提供的一种离子源灯丝结构的夹持部件的结构示意图。
具体实施方式中的附图标号如下：
10、灯丝；11、本体；12、安装端子；20、馈电连接杆；21、主体部；22、连接部；221、安装孔；222、凸台；223、倒角结构；23、隔热结构；30、夹持部件；31、弹性结构段；32、固定段。
具体实施方式
下面将结合附图对本申请技术方案的实施例进行详细的描述。以下实施例仅用于更加清楚地说明本申请的技术方案，因此只作为示例，而不能以此来限制本申请的保护范围。
需要注意的是，除非另有说明，本申请实施例使用的技术术语或者科学术语应当为本申请实施例所属领域技术人员所理解的通常意义。
在本申请实施例的描述中，技术术语“中心”、“纵向”、“横向”、“长度”、“宽度”、“厚度”、“上”、“下”、“前”、“后”、“左”、“右”、“竖直”、“水平”、“顶”、“底”“内”、“外”、“顺时针”、“逆时针”、“轴向”、“径向”、“周向”等指示的方位或位置关系为基于附图所示的方位或位置关系，仅是为了便于描述本申请实施例和简化描述，而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作，因此不能理解为对本申请实施例的限制。
此外，技术术语“第一”、“第二”等仅用于描述目的，而不能理解为指示或暗示相对重要性或者隐含指明所指示的技术特征的数量。在本申请实施例的描述中，“多个”的含义是两个以上，除非另有明确具体的限定。
在本申请实施例的描述中，除非另有明确的规定和限定，技术术语“安装”、“相连”、“连接”、“固定”等术语应做广义理解，例如，可以是固定连接，也可以是可拆卸连接，或成一体；也可以是机械连接，也可以是电连接；可以是直接相连，也可以通过中间媒介间接相连，可以是两个元件内部的连通或两个元件的相互作用关系。对于本领域的普通技术人员而言，可以根据具体情况理解上述术语在本申请实施例中的具体含义。
在本申请实施例的描述中，除非另有明确的规定和限定，第一特征在第二特征“上”或“下”可以是第一和第二特征直接接触，或第一和第二特征通过中间媒介间接接触。而且，第一特征在第二特征“之上”、“上方”和“上面”可是第一特征在第二特征正上方或斜上方，或仅仅表示第一特征水平高度高于第二特征。第一特征在第二特征“之下”、“下方”和“下面”可以是第一特征在第二特征正下方或斜下方，或仅仅表示第一特征水平高度小于第二特征。
离子注入设备是用来在集成电路的制造过程中执行离子掺入的重要制作工艺设备，其中包括了将气体材料或固体材料转换为离子束的离子源装 置。离子源装置包括电源、腔室及离子源灯丝结构，其中，离子源灯丝结构包括灯丝及馈电连接杆。馈电连接杆一端连接电源，另一端连接灯丝，电源产生的高能电流通过馈电连接杆通入灯丝中。灯丝通电被加热后产生热电子，热电子与离子源装置的腔室内的气体材料或固体材料相互反应而产生离子。
本申请的发明人注意到，目前现有的离子源灯丝结构中的馈电连接杆与灯丝的连接部位为爪式插口，灯丝插接于爪式插口中。在高温情况下，馈电连接杆的爪式插口易发生塑性形变，会导致出现灯丝与馈电连接杆的爪式插口接触面积减小的情况，使灯丝与爪式插口接触处的电阻变大而导致发热严重，容易使离子源装置中的其他器件(例如供电线缆)受热损坏。
本申请的发明人研究发现，可以在离子源灯丝结构中的馈电连接杆中设置具有弹性结构的夹持组件，弹性结构具有径向形变量，灯丝插接于弹性结构后，弹性结构段能够向灯丝提供夹紧力。弹性结构具有弹性形变，以使弹性结构与离子源灯丝的接触面积较稳定，不易受温度影响，进而弹性结构与灯丝的接触处的电阻也不易变大，进而能够改善离子源灯丝结构中灯丝与馈电连接杆接触处因电阻过大而导致的发热现象，提高了离子源装置的安全性和可靠性。
为了解决现有技术问题，本申请实施例提供了一种离子源灯丝结构、离子源装置及离子注入设备，能够改善离子源灯丝结构中灯丝与馈电连接杆接触处的发热现象。下面首先对本申请实施例所提供的离子源灯丝结构进行介绍。
图1为本申请一些实施例所提供的一种离子源灯丝结构的结构示意图，图2为本申请一些实施例所提供的一种离子源灯丝结构的馈电连接杆的结构示意图，图3为本申请一些实施例所提供的一种离子源灯丝结构的夹持部件的结构示意图。
如图1至图3所示，本申请实施例提供了一种离子源灯丝10结构，离子源灯丝10结构包括灯丝10、馈电连接杆20和夹持部件30。灯丝10包括本体11和安装端子12。馈电连接杆20包括主体部21和设置有安装孔221的连接部22，连接部22设置于主体部21沿自身长度方向上的一端， 主体部21沿自身长度方向上的另一端与电源连接。夹持部件30设置于安装孔221，夹持部件30为套筒状结构，夹持部件30包括弹性结构段31和固定段32，固定段32设置于弹性结构段31沿自身长度方向上的两端，弹性结构段31具有径向形变量，弹性结构段31与安装端子12插接式连接并向安装端子12提供夹紧力。
灯丝10的材质可以是钨，并且，灯丝10的形状可以是但不限于螺旋结构、U型结构或波浪线型结构等，以使灯丝10在加热过程中更加均匀，本申请不对灯丝10的具体形状进行限定，可根据实际情况进行选定。灯丝10本体11通过安装端子12与馈电连接杆20连接，安装端子12可以是杆状结构。
馈电连接杆20用于连接灯丝10与外部供电线缆。具体地，馈电连接杆20的主体部21沿自身长度方向上的一端设置有连接部22，连接部22用于与灯丝10连接。馈电连接杆20的主体部21沿自身长度方向上的另一端通过供电线缆与电源连接。可选地，馈电连接杆20可以使用光滑杆，在馈电连接杆20的主体部21与电源连接的一端焊接接头以连接供电线缆；也可以在馈电连接杆20的主体部21与电源连接的一端上加工螺纹结构，使用螺帽连接供电线缆。馈电连接杆20需要直通到离子源装置腔室内的真空环境中，并保持真空密封和与其他部件的电气绝缘。
连接部22设置有安装孔221，夹持部件30设置于安装孔221中。夹持部件30为套筒状结构，安装孔221的形状尺寸与夹持部件30相匹配，以使夹持部件30能够嵌合于安装孔221中。夹持部件30与连接部22的连接方式可以是但不局限于插接、焊接或粘接等。
夹持部件30的弹性结构段31具有径向形变量，灯丝10的安装端子12插接于弹性结构段31，弹性结构段31能够向安装端子12提供夹紧力，以使灯丝10的安装端子12牢固地连接于馈电连接杆20的连接部22。夹持部件30的固定段32设置于弹性结构段31沿自身长度方向上的两端，一方面，可以提高弹性结构段31的结构牢固度；另一方面，夹持部件30可以通过固定段32与连接部22进行连接，能够减小安装孔221内壁对弹性结构段31的径向形变的影响。
上述技术方案中，通过在离子源灯丝10结构中的馈电连接杆20中设置具有弹性结构段31的夹持组件，弹性结构段31具有径向形变量，灯丝10插接于弹性结构段31后，弹性结构段31能够向灯丝10提供夹紧力。弹性结构段31具有弹性形变，以使弹性结构段31与离子源灯丝10的接触面积较稳定，不易受温度影响，进而弹性结构段31与灯丝10的接触处的电阻也不易发生变化，进而能够改善离子源灯丝10结构中灯丝10与馈电连接杆20接触处因电阻过大而导致的发热现象，提高了离子源装置的安全性和可靠性。
在一些实施例中，沿固定段32至弹性结构段31的方向上，弹性结构段31的内径呈逐渐减小趋势。
具体地，沿固定段32至弹性结构段31的方向上，弹性结构段31的内径呈逐渐减小趋势，使得弹性结构段31沿自身长度方向上的两端具有较大的内径，弹性结构段31中间部位具有较小的内径。其中，弹性结构段31沿自身长度方向上的两端具有较大的内径，能够使得灯丝10的安装端子12较为容易地插入夹持部件30；弹性结构段31中间部位具有较小的内径，能够为灯丝10的安装端子12提供更大的夹紧力，进而能够进一步提高灯丝10与馈电连接杆20之间的连接牢固度。
上述技术方案中，通过将弹性结构段31的内径设置为沿固定段32至弹性结构段31的方向呈逐渐减小的趋势，一方面能够使得灯丝10的安装端子12较为容易地插入夹持部件30；另一方面，能够为灯丝10的安装端子12提供更大的夹紧力，进而能够进一步提高灯丝10与馈电连接杆20之间的连接牢固度。
在一些实施例中，弹性结构段31包括多个弹簧丝，多个弹簧丝沿圆周且间隔分布以形成套筒状结构。
具体地，弹簧丝的材质可以是但不限于碳钢、铁、铜及钛中的一种或多种。多个弹簧丝沿圆周分布以形成套筒状结构，弹簧丝沿自身长度方向上的两端固定连接于固定段32。进一步地，多个弹簧丝沿套筒状结构的周向间隔分布，使得弹簧丝之间形成缝隙，能够提升弹性结构段31的散热性能，进而减小灯丝10热量过多地通过夹持部件30传导至馈电连接杆20的 连接部22上。
上述技术方案中，将弹性结构段31设置为多个弹簧丝沿圆周且间隔分布的形式，能够在为灯丝10提供足够预紧力的同时，还能够提高夹持部件30的散热性能，进一步减少了离子源灯丝10结构中灯丝10与馈电连接杆20接触处的温度，进而能够进一步提高离子源装置的安全性和可靠性。
在一些实施例中，固定段32与弹性结构段31为一体成型结构。
夹持部件30通过一体成型制造工艺制成，使得固定段32与弹性结构段31之间呈一体式结构。一方面，无需通过额外的焊接或粘接等连接工艺将固定段32与弹性结构段31进行连接，简化了夹持部件30的制作工艺流程。同时，相比于通过焊接或粘接等连接工艺将固定段32与弹性结构段31进行连接，呈一体式结构的固定段32与弹性结构段31之间具有更高的连接牢固度，进而能够提升夹持部件30整体的结构强度。
通过将夹持部件30的固定段32与弹性结构段31一体成型，不仅能够简化夹持部件30的制作工艺流程，还能够提升夹持部件30整体的结构强度。
在一些实施例中，安装孔221靠近主体部21的一侧设置有凸台222，凸台222的尺寸形状与固定段32的尺寸形状相匹配，固定段32插接于凸台222。
凸台222的尺寸形状与固定段32的尺寸形状相匹配，示例性地，夹持部件30的固定段32可以是圆环状结构，凸台222可以是圆柱状结构，凸台222的外径与固定段32的内径相匹配，以使固定段32能够插接于凸台222。可以理解的是，夹持部件30的固定段32也可以是方环状结构，相应的凸台222可以是方形柱状结构，本申请不对固定段32与凸台222的具体形状进行限定，可根据实际情况进行选定，为了简洁，在此不再赘述。
一方面，在夹持部件30的装配过程中，凸台222可以起到定位作用，便于夹持部件30与安装孔221进行装配。另一方面，固定段32插接于凸台222，固定段32的周向内侧表面与凸台222的周向外侧表面之间具有较大的接触面积，有利于提高夹持部件30与馈电连接杆20的连接部22之间的连接牢固度。固定段32的周向内侧表面与凸台222的周向外侧表面之间 的连接方式可以是但不局限于焊接或粘接等。
上述技术方案中，通过在安装孔221靠近主体部21的一侧设置凸台222，不仅能够便于夹持部件30与安装孔221进行装配，还能够提高夹持部件30与馈电连接杆20的连接部22之间的连接牢固度，进一步提高了离子源装置的安全性和可靠性。
在一些实施例中，连接部22远离主体部21一侧的端面与连接部22周向内侧表面的交接处设置有倒角结构223。
具体地，倒角结构223具有倾斜面，倒角结构223的倾斜面具有引导作用。一方面，在夹持部件30与安装孔221的装配过程中，倒角结构223的倾斜面可以引导夹持部件30准确地进入到安装孔221的内部；另一方面，灯丝10的安装端子12与夹持部件30的插接过程中，倒角结构223的倾斜面可以引导灯丝10的安装端子12准确地插接于夹持部件30中。
上述技术方案中，通过在连接部22远离主体部21的一端设置倒角结构223，不仅能够使夹持部件30便于装配至安装孔221中，还能够使灯丝10的安装端子12便于插接至夹持部件30中。
在一些实施例中，连接部22可拆卸连接于主体部21。
馈电连接杆20通过连接部22与灯丝10连接，灯丝10通电后会具有极高的温度，灯丝10的安装端子12部分位于连接部22的安装孔221中，因此，灯丝10的温度会传导至连接部22，连接部22长时间处于高温环境中会存在的过热损坏的风险。
可选地，连接部22与主体部21的可拆卸连接方式可以是但不局限于螺纹连接或者卡扣连接等。
上述技术方案中，通过将连接部22与主体部21的连接方式设置为可拆卸连接，当连接部22发生损坏需要进行更换时，不需要将整个馈电连接杆20从离子源装置上拆卸，仅将连接部22拆卸进行更换即可。如此，不仅能够提高更换效率，还能够降低成本。
在一些实施例中，连接部22靠近主体部21的一端设置有隔热结构23，隔热结构23位于连接部22与主体部21之间。
馈电连接杆20的主体部21沿自身长度方向上的一端设置有连接部22， 连接部22用于与灯丝10连接。馈电连接杆20的主体部21沿自身长度方向上的另一端通过供电线缆与电源连接。灯丝10通电后会具有极高的温度，温度会由连接部22沿着馈电连接杆20传导至主体部21，连接于主体部21一端的供电线缆在高温下容易过热烧毁。
可选地，隔热结构23可以是但不局限于由聚四氟乙烯、聚苯硫醚、聚醚醚酮、聚苯酯等材质制成的。本申请不对隔热结构23具体地材质进行限定，可以根据实际情况进行选用。隔热结构23可以是但不局限于片状结构体或膜层结构体。隔热结构23设置于连接部22靠近主体部21的一端并位于馈电连接杆20的连接部22与主体部21之间，隔热结构23用于阻隔馈电连接杆20的主体部21与连接部22之间的热传导。
上述技术方案中，通过在连接部22靠近主体部21的一端设置隔热结构23，隔热结构23位于馈电连接杆20的连接部22与主体部21之间，能够有效降低馈电连接杆20的主体部21与连接部22之间的热传导，进而减小了供电线缆在高温下过热烧毁的风险，进一步提高了离子源装置的安全性和可靠性。
根据本申请的一些实施例，本申请还提供了一种离子源装置，包括以上方案的离子源灯丝10结构。
可以理解的是，离子源装置包括本申请实施例提供的离子源灯丝10结构，离子源灯丝10结构的具体细节可以参见上述本申请实施例描述的离子源灯丝10结构中的相应部分的描述，为了简洁，在此不再赘述。
根据本申请的一些实施例，本申请还提供了一种离子注入设备，包括以上方案的离子源装置。
可以理解的是，离子注入设备包括本申请实施例提供的离子源装置，离子源装置的具体细节可以参见上述本申请实施例描述的离子源装置及离子源灯丝10结构中的相应部分的描述，为了简洁，在此不再赘述。
需要说明的是，在不冲突的情况下，本申请中的实施例及实施例中的特征可以相互组合。
最后应说明的是：以上各实施例仅用以说明本申请的技术方案，而非对其限制；尽管参照前述各实施例对本申请进行了详细的说明，本领域的 普通技术人员应当理解：其依然可以对前述各实施例所记载的技术方案进行修改，或者对其中部分或者全部技术特征进行等同替换；而这些修改或者替换，并不使相应技术方案的本质脱离本申请各实施例技术方案的范围，其均应涵盖在本申请的权利要求和说明书的范围当中。尤其是，只要不存在结构冲突，各个实施例中所提到的各项技术特征均可以任意方式组合起来。本申请并不局限于文中公开的特定实施例，而是包括落入权利要求的范围内的所有技术方案。

Claims (10)

  1. 一种离子源灯丝结构，包括：
    灯丝，包括本体和安装端子；
    馈电连接杆，包括主体部和设置有安装孔的连接部，所述连接部设置于所述主体部沿自身长度方向上的一端，所述主体部沿自身长度方向上的另一端与电源连接；
    夹持部件，设置于所述安装孔，所述夹持部件为套筒状结构，所述夹持部件包括弹性结构段和固定段，所述固定段设置于所述弹性结构段沿自身长度方向上的两端，所述弹性结构段具有径向形变量，所述弹性结构段与所述安装端子插接式连接并向所述安装端子提供夹紧力。
  2. 根据权利要求1所述的离子源灯丝结构，其中，沿所述固定段至所述弹性结构段的方向上，所述弹性结构段的内径呈逐渐减小趋势。
  3. 根据权利要求1所述的离子源灯丝结构，其中，所述弹性结构段包括多个弹簧丝，所述多个弹簧丝沿圆周且间隔分布以形成所述套筒状结构。
  4. 根据权利要求1所述的离子源灯丝结构，其中，所述固定段与所述弹性结构段为一体成型结构。
  5. 根据权利要求1所述的离子源灯丝结构，其中，所述安装孔靠近所述主体部的一侧设置有凸台，所述凸台的尺寸形状与所述固定段的尺寸形状相匹配，所述固定段插接于所述凸台。
  6. 根据权利要求1所述的离子源灯丝结构，其中，所述连接部远离所述主体部一侧的端面与所述连接部周向内侧表面的交接处设置有倒角结构。
  7. 根据权利要求1所述的离子源灯丝结构，其中，所述连接部可拆卸连接于所述主体部。
  8. 根据权利要求1所述的离子源灯丝结构，其中，所述连接部靠近所述主体部的一端设置有隔热结构，所述隔热结构位于所述连接部与所述主体部之间。
  9. 一种离子源装置，包括如权利要求1-8任一项所述的离子源灯丝结构。
  10. 一种离子注入设备，包括如权利要求9所述的离子源装置。
PCT/CN2022/120908 2022-09-05 2022-09-23 离子源灯丝结构、离子源装置及离子注入设备 Ceased WO2024050878A1 (zh)

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6204508B1 (en) * 1998-08-07 2001-03-20 Axcelis Technologies, Inc. Toroidal filament for plasma generation
CN105355531A (zh) * 2015-10-30 2016-02-24 中国电子科技集团公司第四十八研究所 用于离子源的灯丝夹持装置
CN205211697U (zh) * 2015-12-23 2016-05-04 昆山国显光电有限公司 灯丝固定装置
CN208923421U (zh) * 2018-09-29 2019-05-31 东莞中探探针有限公司 冠簧连接器及其外径可调式冠簧
CN114156150A (zh) * 2021-11-12 2022-03-08 中国电子科技集团公司第十三研究所 考夫曼离子源装置及其控制方法

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6204508B1 (en) * 1998-08-07 2001-03-20 Axcelis Technologies, Inc. Toroidal filament for plasma generation
CN105355531A (zh) * 2015-10-30 2016-02-24 中国电子科技集团公司第四十八研究所 用于离子源的灯丝夹持装置
CN205211697U (zh) * 2015-12-23 2016-05-04 昆山国显光电有限公司 灯丝固定装置
CN208923421U (zh) * 2018-09-29 2019-05-31 东莞中探探针有限公司 冠簧连接器及其外径可调式冠簧
CN114156150A (zh) * 2021-11-12 2022-03-08 中国电子科技集团公司第十三研究所 考夫曼离子源装置及其控制方法

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