WO2024041353A1 - 一种旋转阴极端头 - Google Patents

一种旋转阴极端头 Download PDF

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Publication number
WO2024041353A1
WO2024041353A1 PCT/CN2023/111356 CN2023111356W WO2024041353A1 WO 2024041353 A1 WO2024041353 A1 WO 2024041353A1 CN 2023111356 W CN2023111356 W CN 2023111356W WO 2024041353 A1 WO2024041353 A1 WO 2024041353A1
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WO
WIPO (PCT)
Prior art keywords
target
shaft
drive shaft
connecting shaft
central support
Prior art date
Application number
PCT/CN2023/111356
Other languages
English (en)
French (fr)
Inventor
游锦山
Original Assignee
中科纳微真空科技(合肥)有限公司
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Filing date
Publication date
Application filed by 中科纳微真空科技(合肥)有限公司 filed Critical 中科纳微真空科技(合肥)有限公司
Publication of WO2024041353A1 publication Critical patent/WO2024041353A1/zh

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target

Definitions

  • the present application relates to the technical field of vacuum coating equipment, and in particular to a rotating cathode tip.
  • the working characteristic of magnetron sputtering rotating large-area vacuum coating equipment is that the target is in a rotating state during the working process, so the target utilization rate is high and the number of clean arcs on the target surface is small. Since the target is in a rotating state, the vacuum coating equipment must have the functions of dynamic transmission of electric power, cooling water dynamic sealing and vacuum dynamic sealing.
  • rotating magnetron sputtering cathodes are generally used in vacuum coating equipment to achieve dynamic transmission of electric power, dynamic sealing of cooling water and vacuum Therefore, the rotating magnetron sputtering cathode has become a core component of vacuum coating equipment.
  • carbon brushes are used to achieve dynamic rotational transmission of electric power, that is, the carbon brushes are in electrical contact with the electric ring on the drive shaft that drives the target to rotate, thereby realizing the target to communicate with the outside through the carbon brushes.
  • the power supply is electrically connected.
  • the characteristics of carbon brushes are complex structures, small electrical contact areas, and inability to transmit It will transmit a larger current, and the toner produced by wear will damage the dynamic seal and insulation of the terminal.
  • this application proposes a rotating cathode tip to solve the problem of small transmission current of the electric power dynamic transmission component in the existing rotating magnetron sputtering cathode.
  • This application proposes a rotating cathode tip, which includes a tip shell.
  • a conductive drive shaft is installed in the tip shell for rotation through a bearing.
  • One end of the drive shaft penetrates from the tip shell and is fixedly connected to a conductive target. material mounting flange;
  • the end shell is fixedly connected with a conductive central support, and the central support has an integral connecting shaft.
  • One end of the connecting shaft coaxially runs through the drive shaft and the target mounting flange, and is connected to a magnetic rod;
  • the central support is electrically connected to the electrical contacts.
  • the central support and the electrical contacts are connected through a conductive tape.
  • the electrical contacts are in contact with the drive shaft, and the contact surface is tapered. Form and surface.
  • a conductive strip is connected between the central support and the electrical contacts.
  • the connecting shaft is also equipped with a spring between the electrical contact and the central support, and the spring provides force to keep the electrical contact in close contact with the drive shaft.
  • the connecting shaft is provided with pin holes along its radial direction, and the pin holes are fitted with limit pins. Both ends of the limit pins pass through the pin holes; the electric contacts are provided with guide grooves along their axial direction, and the electric contacts are connected to the connecting shaft through the guide grooves.
  • the limit pin can be slidably fitted.
  • the end of the electrical contact is a tapered surface, and a tapered hole is formed inside the drive shaft.
  • the electrical contact is located in the drive shaft, and the tapered surface of the end of the electrical contact is in contact with the cone of the tapered hole in the drive shaft. Shaped inner hole wall contact.
  • the terminal shell is conductive, and a conductive plate is fixedly connected to the terminal shell.
  • An insulating plate and a power connection block are fixedly connected to the conductive plate.
  • a terminal base is fixedly connected to the insulating plate, and the power connection block penetrates the insulating plate and the terminal base. seat.
  • a belt is wound around the shaft body of the drive shaft.
  • the belt passes through the end housing and is connected to the external motor through a pulley.
  • the rotating cathode terminal also includes a workbench, the terminal base is fixedly connected to the workbench, and the belt and the power connection block penetrate the workbench.
  • a vacuum rotary dynamic seal is installed between the end of the drive shaft that penetrates the outside of the terminal housing and the terminal housing.
  • a first target locking clamp is installed on the outer edge of the target mounting flange.
  • the rotating cathode tip is also used for the head mounted on one end of the target.
  • the drive shaft is provided with a first water channel connected to the circumferential gap.
  • the target The material mounting flange is provided with a through hole that communicates with the first water channel; the head is provided with a second water channel, the connecting shaft is a hollow shaft, the circumferential surface of the central support is provided with an orifice that communicates with the inside of the connecting shaft, and another water channel.
  • the joint is connected with the orifice; a cooling water dynamic seal is installed between the end of the drive shaft located inside the terminal housing and the inner wall of the terminal housing.
  • a second target locking clamp is installed on the outer edge of the head.
  • the rotating cathode end also includes a support end, and the sealing head is rotatably installed on the support end.
  • This application proposes a rotating cathode end, which is used to rotate a target with a magnetic rod inside and electrically connect to an external power supply. It includes a drive shaft for connecting the target to drive the target to rotate.
  • the drive shaft is conductive. material, and also includes electrical contacts for realizing electrical connection, said electrical contacts, drive One of the two shafts is formed with a tapered hole and the other is formed with a tapered surface. The electrical contact and the drive shaft maintain electrical contact through the tapered surface and the tapered hole, and the electrical contact does not rotate with the drive shaft.
  • the external power supply is electrically connected to the target through the electrical contacts and the drive shaft.
  • the end of the electrical contact is shaped into a tapered surface, and the inside of the driving shaft is hollow and formed with a tapered hole.
  • the electrical contact is located in the driving shaft, and the tapered surface of the electrical contact is in line with the cone of the driving shaft.
  • the hole walls of the shaped hole portion maintain electrical contact.
  • the electric contacts and the driving shaft are both made of conductive metal materials, and the hardness of the driving shaft material is greater than the hardness of the electric contact material.
  • the rotating cathode tip also includes a conductive tip shell.
  • the drive shaft is rotatably installed in the tip shell. One end of the drive shaft passes through the tip shell and is fixedly connected to one end of the target material. The other end of the target material is equipped with an end shell. Sealing part, the end sealing part rotates relatively with the other end of the target, or the end sealing part rotates with the target;
  • a conductive central support is also fixed in the end shell, and a connecting shaft is fixedly connected to the center of the central support.
  • the connecting shaft penetrates the drive shaft and the end of the connecting shaft is fixedly connected to one end of the magnetic rod inside the target; so
  • the electric contact is non-rotatably mounted on the connecting shaft, and the electric contact is electrically connected to the central support.
  • the external power supply is electrically connected to the target through the end shell, the central support, the electric contact, the drive shaft and the target.
  • the electrical contacts are electrically connected to the central support through a number of conductive charges.
  • the connecting shaft between the central support and the electric contact is equipped with a spring, and the spring provides force to keep the conical surface of the electric contact in electrical contact with the hole wall of the tapered hole of the drive shaft.
  • the connecting shaft is a hollow shaft, and a hole is provided on the side of the central support to communicate with the inside of the connecting shaft; there is a circumferential gap between the outer wall of the connecting shaft and the inner wall of the driving shaft, and a first water level is provided in the shaft wall of the driving shaft.
  • a second water channel is provided in the end sealing part, and one end of the second water channel is connected to the target Inside, the other end of the second water channel is connected to the inside of the hollow magnetic rod, and the inside of the magnetic rod is also connected to the inside of the connecting shaft; a pair of water joints are installed on the end shell, and one end of one of the water joints is connected to the connecting shaft and the driving shaft. There is a circumferential gap between them, and another water joint is connected to the side opening of the central support.
  • a vacuum rotating dynamic seal is fixed at one end of the annular gap, and a cooling water dynamic seal is fixed at the other end of the annular gap.
  • the cooling water dynamic seal and the vacuum rotating dynamic seal are connected to the opposite end.
  • the annular gap between the head housing and the drive shaft forms a seal.
  • a belt is wound around the drive shaft, and the belt passes through the end housing and is connected to the external pulley.
  • the drive shaft and the electric contact are in contact and matched through a cone surface, and both are made of conductive metal materials.
  • the pre-tightening force of the spring is used to make the cone surfaces of the electric contact and the drive shaft's tapered hole close to each other.
  • Contact the electric contact is used as the input of electric power, and the drive shaft and the target are connected to perform rotational motion synchronously. Since the electrical contact area of the conical surface is much larger than that of the flat surface, it can transmit a larger current, so it can achieve dynamic rotation of the target and high-power power supply.
  • the taper has good guiding properties and the contact surface will not be worn away. The friction surface between the two is in the flowing cooling water, and the heat generated will be taken away by the cooling water in time.
  • the electrical contacts are made of wear-resistant metal, such as copper, which has less wear than carbon brushes and a longer service life.
  • the drive shaft and its tapered hole are made of metal with higher hardness.
  • the cooling water can flow through the circumferential gap between the drive shaft and the electrical contacts to the joint rotating surface between the drive shaft and the electrical contacts, and the material generated by the wear will also be taken away by the cooling water. No pollution.
  • the dynamic transmission of electric power, the dynamic sealing of cooling water and the dynamic sealing of vacuum are all integrated on the end shell.
  • An end sealing part can be fixed on the other end of the target, and the end sealing part comes with the target. Rotate, so that the target material forms a cantilever rotation structure; or the other end of the target material is mounted on the end sealing part for relative rotation, and the end sealing part is fixed, so that the target material can also form a rotation structure. No matter which rotation structure is used, cooling water, sealing, driving and electrical connections only need to be carried out at the end shell, which simplifies the overall structure.
  • the advantages of this application are that the transmitted power is greater and the structure is more reliable.
  • Figure 1 is a schematic structural diagram of a rotating cathode end according to an embodiment of the present application.
  • FIG. 2 is a schematic structural diagram of a rotating cathode end according to another embodiment of the present application.
  • Figure 3 is an assembly structural diagram of the central support and electrical contacts of the present application.
  • Figure 4 is a partial schematic diagram of a rotating cathode end of the present application.
  • a rotating cathode end according to an embodiment of the present application is used to rotate the hollow target 26 and to electrically connect the target 26 to an external power source when the target 26 rotates.
  • a magnetic rod 25 is provided inside the target 26.
  • the magnetic rod 25 is hollow inside and is used to provide the magnetic force required during magnetron sputtering.
  • this embodiment is integrally fixed on the bottom of the workbench 11 (the workbench 11 may also be called a cover or a door panel), specifically including a conductive terminal shell 17 .
  • the terminal housing 17 is a cylinder with an axis arranged horizontally in the left and right directions, and the left and right ends of the terminal housing 17 are barrel mouths.
  • a conductive plate 15 is fixed on the top of the terminal shell 17 by mounting screws.
  • An insulating plate 14 is fixed on the conductive plate 15.
  • a terminal base 13 is fixed on the insulating plate 14. The terminal base 13 is fixed by connecting screws. at the bottom of the workbench 11.
  • the conductive plate 15 is electrically connected and fixed with a power connection block 9.
  • the power connection block 9 passes through the insulating plate 14, the terminal base 13, and the workbench 11 in sequence and is electrically connected to an external power source.
  • Two water connectors 10 are also fixed on the terminal shell 17. The upper ends of the two water connectors 10 pass through the conductive plate 15, the insulating plate 14, the terminal base 13 and the workbench 11 in sequence and are connected to the external water source.
  • Two bearings 19 distributed on the left and right are coaxially installed inside the end housing 17. Specifically, the outer rings of the bearings 19 are fixed on the inner wall of the end housing 17.
  • a drive shaft 20 is installed in the end housing 17 for coaxial rotation through a bearing 19, and the drive shaft 20 is electrically conductive. Specifically, part of the shaft body of the drive shaft 20 is fixed on the inner rings of the two bearings 19 .
  • the left end of the gap is fixed with a cooling water dynamic seal 18 that is sleeved outside the drive shaft 20.
  • the right end of the gap is fixed with a vacuum rotating seal 21 that is sleeved with the drive shaft 20.
  • the cooling water dynamic seal 18 and the vacuum rotating dynamic seal 21 form a seal on the gap between the end housing 17 and the drive shaft 20 .
  • the drive shaft 20 is located between the two bearings 19 and is wound with a belt 12.
  • the belt 12 passes through the terminal shell 17, the conductive plate 15, the insulating plate 14, the terminal base 13, the workbench 11 and the external motor in sequence.
  • the driving belt 12 is connected so that an external motor can drive the drive shaft 20 to rotate through the belt 12 .
  • the drive shaft 20 can also be driven through other methods that can be obtained by those skilled in the art without any creative effort.
  • the rotation of the drive shaft 20 can be controlled through an external motor linked to gear transmission.
  • the right end of the drive shaft 20 passes through the right barrel mouth of the end housing 17 and is fixedly connected to a target mounting flange 22.
  • a first target locking clamp 23 is mounted on the outer edge of the target mounting flange 22 for elastic rotation.
  • the target 26 is axially arranged horizontally along the left and right directions.
  • the target 26 is hollow inside and has openings at its left and right ends.
  • the target mounting flange 22 connected to the right end of the drive shaft 20 is installed in the left end opening of the target 26, blocking the opening, and clamping the outer edge of the left end opening of the target 26 through the first target locking clamp 23 to form fixed.
  • a tapered hole 20.1 is formed on the right side of the inside of the drive shaft 20.
  • the left side of the tapered hole 20.1 is a tapered inner hole.
  • a first water channel is formed on the right side wall of the drive shaft 20.
  • the left end of the first water channel is in contact with the tapered hole.
  • the driving shaft 20 on the left side of the hole portion 20.1 is internally connected, and the target mounting flange 22 is provided with a through hole that passes through the left and right sides.
  • the right end of the first water channel is connected with the left end opening 1.2 of the through hole of the target mounting flange 22, and the target mounting flange 22 is The right end opening 1.2 of the through hole of the flange 22 is connected to the left end opening of the target 26, so that the inside of the drive shaft 20 and the target 26 are connected through the first water channel and the through hole of the target mounting flange 22.
  • a support end 28 is fixed at the bottom of the workbench 11 corresponding to the right end opening of the target 26.
  • a head 30 is installed in the right end opening of the target 26, and the head 30 is rotatably installed on the support end 28.
  • a second target locking clamp 27 is installed on the outer edge of the head 30 for elastic rotation. The second target locking clamp 27 clamps the outer edge of the right end opening of the target 26 to form a fixation. At this time, the support end 28 and the head 30 are fixed. 30.
  • the second target locking clamp 27 forms an end sealing portion of the right end of the target 26, and the end sealing portion cooperates with the right end of the drive shaft 20 to jointly support the rotation of the target 26.
  • the interior of the head 30 is hollow to form a second water channel.
  • One end of the second water channel is connected to the inside of the target 26 , and the other end of the second water channel is located in the center of the head 30 to form a central through hole.
  • the magnetic rod 25 inside the target 26 is also axially arranged horizontally along the left and right directions, and the left and right ends of the magnetic rod 25 are both provided with openings.
  • the right end of the magnetic rod 25 is rotatably installed in the central through hole of the head 30, whereby The right end of the magnetic rod 25 is supported, and the magnetic rod 25 communicates with the second water channel in the head 30 through its right end opening, and can further communicate with the inside of the target 26 through the second water channel.
  • the difference is that the support end 28 is eliminated, and only a head 30 with a second water channel inside is plugged into the right end opening of the target 26, In this way, the target 26 can be supported and fixed only at the left end of the target 26 , thereby forming a cantilevered structure of the target 26 .
  • a conductive central support 1 is coaxially fixed in the left mouth of the end shell 17, and a connecting shaft 1.1 is coaxially formed in the center of the right side of the central support 1.
  • the connecting shaft 1.1 is hollow inside, the right end of the connecting shaft 1.1 is an opening, and the right end opening of the connecting shaft 1.1 coaxially penetrates the drive shaft 20 and its tapered hole 20.1 to the right, and then passes through the target mounting flange 22 and It is inserted into the left end opening of the magnetic rod 25, thereby not only forming support for the left end of the magnetic rod 25, but also the left end opening of the magnetic rod 25 is internally connected to the connecting shaft 1.1.
  • the side of the central support 1 is provided with an orifice 1.2.
  • One end of the orifice 1.2 is internally connected to the connecting shaft 1.1, and the other end is internally connected to the end shell 17, thereby passing through the hollow connecting shaft 1.1 and the orifice on the side of the central support 1.
  • the inside of the magnetic rod 25 can be connected with the inside of the end shell 17 at the corresponding position of the opening 1.2.
  • each conductive strip 3 passes through The fastening screw is fixed on the central support 1, and the other end is fixed on the electrical contact 2 through the fastening screw, and each conductive strip 3 has a certain amount of elastic deformation.
  • the outer ring of the connecting shaft 1.1 between the electric contact 2 and the central support 1 is covered with a spring 4. One end of the spring 4 contacts or is fixed on the surface of the central support 1, and the other end of the spring 4 contacts or is fixed on the left end of the electric contact 2.
  • the tapered surface at the right end of the electrical contact 2 matches the shape of the tapered inner hole wall of the tapered hole portion 20.1 in the drive shaft 20, and the tapered surface at the right end of the electrical contact 2 is maintained with the tapered inner hole wall of the tapered hole portion 20.1. electrical contact.
  • the elastic force of the spring 4 causes the tapered surface of the electrical contact 2 to be pressed against the inner wall of the tapered hole portion 20.1, so that they always maintain close electrical contact.
  • the electrical contact 2 is located on the drive shaft 20, which can save space and make the structure compact.
  • the electrical contact 2 and the drive shaft 20 are in contact through a tapered surface, the purpose of increasing the transmission current can be achieved.
  • the specific contact position between the electrical contact 2 and the drive shaft 20 can also be implemented in other embodiments.
  • the end of the electrical contact 2 can be in contact with the end of the drive shaft 20, one end of which is a protrusion.
  • the tapered surface, and the other end is a concave tapered hole, can also achieve the effect of contact through the tapered surface.
  • the connecting shaft 1.1 is provided with a pin hole 1.3 along its radial direction, and the connecting shaft 1.1 is fitted with a limiting pin 6 through the pin hole 1.3.
  • the limiting pin 6 Both ends penetrate the pin hole 1.3; the electric contact 2 is provided with a guide groove 7 along its axial direction.
  • the electric contact 2 can slide through the guide groove 7 and the limit pin 6 that penetrates from both ends of the pin hole 1.3, thereby passing through
  • the limiting pin 6 prevents the electric contact 2 from rotating on the connecting shaft 1.1, thereby preventing the electric contact 2 from rotating due to friction when the drive shaft 20 rotates.
  • the side wall of the electrical contact is provided with a penetrating pin hole, the inner wall of the pin hole is threaded, a limiting nail is screwed into the pin hole, and the nail cap of the limiting nail is connected to the pin hole.
  • the target 26 when the driving shaft 20 rotates, the target 26 is driven to rotate, while the connecting shaft 1.1, the electric contact 2, and the magnetic rod 25 remain stationary. During the rotation, the target 26 forms an electrical connection with the power connection block 9 through the drive shaft 20, the electric contact 2, the central support 1, the end housing 17, and the conductive plate 15, and then is electrically connected to the external power supply through the power connection block 9.
  • the cable of the power supply for the cathode is connected to the power connection block 9, and the current is statically transmitted through the power connection block 9, the conductive plate 15, the terminal shell 17, the central support 1, and the conductive belt 3.
  • the above components are in a static state during their working process.
  • the driving component drives the belt 12
  • the belt 12 drives the drive shaft 20 to rotate.
  • the conical surface of the drive shaft 20 cooperates with the conical surface of the electrical contact 2 to dynamically transmit electric power from the conical electrical contact 2 to the drive shaft 20 .
  • the drive shaft 20 is fixedly connected to the target mounting flange 22 , and the target mounting flange 22 is connected to the target 26 , thereby realizing dynamic rotational transmission of electric power to the target 26 .
  • the cone angle of the cone electrical contact 2 and the drive shaft 20 can be any angle according to the size of the space, so as to increase the electric power rotation contact area and guide and position the electrical contact 2 .
  • the lower end of one of the water joints 10 is connected to the circumferential gap through the interior of the terminal housing 17, and the lower end of the other water joint 10 is connected to the side hole of the central support 1 through the interior of the terminal housing 17.
  • Port 1.2 is connected, thus forming a water circulation.
  • the cooling water enters the circumferential gap between the connecting shaft 1.1 and the drive shaft 20 through one of the water joints 10 (shown as path A in Figure 3), and then enters the first end of the drive shaft 20 from the circumferential gap.
  • the water channel (shown as path B in Figure 3), then enters the interior of the target 26 from the through hole of the target mounting flange 22 (shown as path C in Figure 3), and then enters through the second water channel in the head 30 Inside the magnetic rod 25 (shown as path D in Figure 3), and then through the inside of the connecting shaft 1.1 into the side hole 1.2 of the central support 1 (shown as the path E in Figure 3), and finally through the side hole of the central support 1 Port 1.2 enters another water joint 10, and both water joints 10 are connected to an external cooling water source, thereby forming a cooling water circulation path.
  • any one of the two water connectors 10 can be used as The water inlet end and the other serve as the water outlet end. Therefore, when the two water joints 10 switch the water inlet end and the water outlet end, the circulation direction of the cooling water will be opposite to the direction of the above path (A ⁇ B ⁇ C ⁇ D ⁇ E) of.
  • the tapered surfaces of the electrical contact 2 and the drive shaft 20 are both in the flow path of the cooling water, so the heat and materials generated by wear can be taken away by the cooling water.
  • the cooling water dynamic seal 18 realizes the dynamic rotating water sealing function of the cooling water channel and the bearing 19 located on the atmospheric side; the vacuum rotating dynamic seal 21 realizes the dynamic rotating vacuum sealing of the bearing 19 located on the atmospheric side and the target 26 vacuum side. function.
  • the insulating plate 14 is made of high-voltage resistant insulating material, and realizes the insulating function between the terminal base 13 and the conductive plate 15 .

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
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  • Organic Chemistry (AREA)
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Abstract

本申请公开了一种旋转阴极端头，包括端头外壳，端头外壳中通过轴承转动安装有驱动轴，驱动轴的一端从端头外壳中穿出并且固定连接有靶材安装法兰；端头外壳固定连接有中央支撑，中央支撑具有一体成型的连接轴，连接轴的一端同轴贯穿驱动轴和靶材安装法兰；连接轴上同轴套装有电触头，中央支撑与电触头电连接，电触头与驱动轴相接触，并且接触面为锥形面。本申请的优点为传输的功率更大，结构更可靠。

Description

一种旋转阴极端头
交叉引用
本申请要求2022年8月26日提交的专利名称为“一种锥面传输功率的旋转阴极端头”的第202211032345.6号中国专利申请的优先权，其全部公开内容通过引用整体并入本文。
技术领域
本申请涉及真空镀膜设备技术领域，尤其涉及一种旋转阴极端头。
背景技术
磁控溅射旋转的大面积真空镀膜设备，其工作特点是在工作的过程中靶材处于旋转的状态，因此靶材利用率高，靶面干净打弧数量少。由于靶材处于旋转状态，因此要真空镀膜设备具备电功率的动态传输、冷却水动密封和真空动密封等功能。
近些年来，该行业的发展对实现高功率长期稳定运行的需求越来越强烈，故在真空镀膜设备中一般采用旋转磁控溅射阴极来实现电功率的动态传输、冷却水的动密封和真空动密封的部件，因此，旋转磁控溅射阴极已经成为真空镀膜设备的核心组件。
现有的旋转磁控溅射阴极中，采用碳刷实现电功率的动态旋转传输，即通过碳刷与驱动靶材转动的驱动轴上的电环电接触，由此实现靶材通过碳刷与外部电源电连接，碳刷的特点是结构复杂，电接触面积小，无法传 输更大的电流，并且磨损产生的碳粉会对端头的动密封和绝缘产生破坏。
申请内容
为解决背景技术中存在的技术问题，本申请提出一种旋转阴极端头，以解决现有技术旋转磁控溅射阴极中电功率动态传输部件存在的传输电流小的问题。
本申请提出的一种旋转阴极端头，包括端头外壳，端头外壳中通过轴承转动安装有可导电的驱动轴，驱动轴的一端从端头外壳中穿出并且固定连接有可导电的靶材安装法兰；
端头外壳固定连接有可导电的中央支撑，中央支撑具有一体成型的连接轴，连接轴的一端同轴贯穿驱动轴和靶材安装法兰，并且连接有磁棒；
连接轴上同轴套装有非转动的电触头，中央支撑与电触头电连接，中央支撑与电触头之间通过导电带连接，电触头与驱动轴相接触，并且接触面为锥形面。
中央支撑与电触头之间连接有导电带。
连接轴上还套装有位于电触头与中央支撑之间的弹簧，通过弹簧提供力使电触头与驱动轴保持紧密接触。
连接轴沿其径向设有销孔，销孔配合安装有限位销，限位销两端由销孔中穿出；电触头沿其轴向设有导向槽，电触头通过导向槽与限位销可滑动配合。
电触头的端部为锥形面，驱动轴内部成型有锥形孔部，电触头设于驱动轴内，并且电触头端部的锥形面与驱动轴内锥形孔部的锥形内孔壁接触。
端头外壳可导电，端头外壳上固定连接有导电板，导电板上固定连接有绝缘板和接电块，绝缘板上固定连接有端头基座，接电块贯穿绝缘板和端头基座。
驱动轴的轴身上绕设有皮带，皮带从端头外壳中穿出，并且通过皮带轮与外部电机传动连接。
该旋转阴极端头还包括工作台，端头基座固定连接在工作台上，皮带和接电块贯穿工作台。
驱动轴穿出端头外壳外部的一端与端头外壳之间安装有真空旋转动密封。
靶材安装法兰的外沿安装有第一靶材锁紧夹。
该旋转阴极端头还用于安装在靶材一端的封头。
端头外壳上固定连接有两个水接头，驱动轴与连接轴之间具有环向间隙，其中一个水接头与环向间隙连通，驱动轴上设有与环向间隙连通的第一水道，靶材安装法兰上设有与第一水道连通的通孔；封头中设有第二水道，连接轴为中空轴，中央支撑周向表面设有与连接轴内部连通的孔口，另一个水接头与孔口连通；驱动轴位于端头外壳内部的一端与端头外壳的内壁之间安装有冷却水动密封。
封头的外沿安装有第二靶材锁紧夹。
该旋转阴极端头还包括支撑端，封头可转动地安装在支撑端上。
本申请提出的一种旋转阴极端头，用于使内部有磁棒的靶材转动并与外部电源电连接，包括用于连接靶材以驱动靶材转动的驱动轴，所述驱动轴为导电材料制成，还包括用于实现电连接的电触头，所述电触头、驱动 轴两者之中一者成型有锥形孔部、另一者成型有锥面，电触头、驱动轴之间通过锥面与锥形孔部保持电接触，且电触头不随驱动轴转动，外部电源依次通过电触头、驱动轴与靶材电连接。
所述电触头的端部成型为锥面，所述驱动轴内部中空并成型有锥形孔部，所述电触头设于驱动轴内，且电触头其锥面与驱动轴的锥形孔部的孔壁保持电接触。
所述电触头、驱动轴均为导电金属材料制成，其中驱动轴材料硬度大于电触头材料硬度。
旋转阴极端头还包括可导电的端头外壳，所述驱动轴转动安装于端头外壳内，驱动轴一端穿出端头外壳并与所述靶材一端固定连接，靶材另一端安装有端封部，所述端封部与靶材另一端相对转动配合，或者端封部随靶材转动；
所述端头外壳中还固定有可导电的中央支撑，所述中央支撑中心固定连接有连接轴，所述连接轴贯穿驱动轴且连接轴轴端与靶材内部的磁棒一端固定连接；所述电触头非转动套装于连接轴上，且电触头与中央支撑电连接，外部电源依次通过端头外壳、中央支撑、电触头、驱动轴与靶材电连接。
所述电触头与中央支撑之间通过若干导电带电连接。
所述中央支撑、电触头之间的连接轴外套装有弹簧，通过弹簧提供力使电触头的锥面与驱动轴的锥形孔部孔壁保持电接触。
所述连接轴为中空轴，所述中央支撑侧面设有孔口与连接轴内部连通；连接轴外壁、驱动轴内壁之间有环向间隙，且驱动轴的轴壁中设有第一水 道，第一水道一端连通至连接轴、驱动轴之间环向间隙，第一水道另一端连通至靶材内部；所述端封部内设有第二水道，第二水道一端连通至靶材内部，第二水道另一端连通至空心的磁棒内部，磁棒内部还与连接轴内部连通；所述端头外壳上安装有一对水接头，其中一个水接头一端连通至连接轴、驱动轴之间环向间隙，另一个水接头连通至中央支撑侧面孔口。
所述端头外壳内壁、驱动轴之间有环形空隙，环形空隙内一端固定有真空旋转动密封，环形空隙内另一端固定有冷却水动密封，由冷却水动密封、真空旋转动密封对端头外壳、驱动轴之间环形空隙形成密封。
所述驱动轴上绕过有皮带，皮带从端头外壳穿出并连接于外部皮带轮。
本申请中，驱动轴、电触头之间通过锥面接触配合，并且均为导电金属材料制备而成，利用弹簧的预紧力，使得电触头、驱动轴锥形孔部的锥面紧密接触，将电触头作为电功率的输入，驱动轴和靶材连接同步做旋转运动。由于锥面的电接触面积比平面大很多，能够传输更大的电流，因此可实现靶材的动态旋转大功率供电。并且锥度的导向性好，接触面不会磨偏。二者的摩擦面处于流动的冷却水中，产生的热量会被冷却水及时的带走。
其中电触头采用耐磨的金属制备，如铜等，磨损量比碳刷小，电触头的寿命长，驱动轴及其锥形孔部采用硬度更高的金属制备。并且，本实用新型中冷却水通过驱动轴、电触头之间环向间隙能够流动至驱动轴、电触头之间结合旋转面处，由此磨损产生的材料也会被冷却水带走，无污染。
本申请中，电功率的动态传输、冷却水的动密封和真空动密封都集成在端头外壳上，靶材的另外一端可固定一个端封部，该端封部随靶材一起 转动，由此靶材形成悬臂转动结构；或者靶材的另一端相对转动安装于端封部，端封部固定不动，由此也可使靶材形成转动结构。无论哪种转动结构，只需在端头外壳处进行通入冷却水、密封、驱动和电连接即可，简化了整体结构。
与现有技术相比，本申请的优点为传输的功率更大，结构更可靠。
附图说明
图1为本申请中一实施例的旋转阴极端头的结构示意图。
图2为本申请中另一实施例的旋转阴极端头的结构示意图。
图3为本申请的中央支撑和电触头的装配结构图。
图4为本申请的一种旋转阴极端头的局部示意图。
具体实施方式
请参照图1-4所示，本申请实施例的一种旋转阴极端头，用于使中空的靶材26转动，以及在靶材26转动时使其与外部电源能够电连接。靶材26内部设置有磁棒25，该磁棒25内部中空，用于提供磁控溅射时所需磁力。
如图1所示，本实施例整体固定在工作台11的底部(工作台11也可以叫做盖板或门板)，具体包括可导电的端头外壳17。该端头外壳17为轴线为左右方向水平布置的筒状，并且端头外壳17的左、右端均为筒口。端头外壳17的顶部通过安装螺钉固定有导电板15，导电板15上固定有绝缘板14，绝缘板14上固定有端头基座13，端头基座13通过连接螺钉固定 于工作台11的底部。导电板15上电连接固定有接电块9，该接电块9依次上穿绝缘板14、端头基座13、工作台11后与外部电源电连接。端头外壳17上还固定有两个水接头10，两个水接头10的上端分别依次上穿导电板15、绝缘板14、端头基座13、工作台11后与外部水源连接。
端头外壳17的内部同轴安装有呈左、右分布的两个轴承19，具体地，轴承19的外圈固定在端头外壳17内壁。端头外壳17中通过轴承19同轴转动安装有驱动轴20，该驱动轴20可导电。具体地，驱动轴20的部分轴身固定在两个轴承19的内圈。驱动轴20与端头外壳17之间具有空隙，空隙的左端固定有套在驱动轴20外的冷却水动密封18，空隙的右端固定有套在驱动轴20外的真空旋转动密封21，由冷却水动密封18、真空旋转动密封21对端头外壳17与驱动轴20之间的空隙形成密封。驱动轴20位于两个轴承19之间的轴身上绕设有皮带12，皮带12依次上穿端头外壳17、导电板15、绝缘板14、端头基座13、工作台11后与外部电机驱动的皮带12轮连接，由此外部电机可通过皮带12驱动该驱动轴20转动。
值得一提的是，驱动轴20还可以是通过本领域技术人员不用付出创造性劳动即可得到的其他方式进行驱动的，例如，可以通过外部电机联动齿轮传动的方式来控制驱动轴20转动等。
驱动轴20的右端从端头外壳17右侧筒口穿出后固定连接有靶材安装法兰22，靶材安装法兰22的外沿弹性转动安装有第一靶材锁紧夹23。靶材26轴向沿左右方向水平布置，靶材26内部中空并且其左、右端均设有开口。驱动轴20右端连接的靶材安装法兰22安装于靶材26左端开口中，封堵所述开口，并通过第一靶材锁紧夹23夹紧靶材26左端开口外沿形成 固定。驱动轴20内部靠右位置成型有锥形孔部20.1，该锥形孔部20.1的左侧为锥形内孔，驱动轴20右侧轴壁成型有第一水道，第一水道左端与锥形孔部20.1左侧的驱动轴20内部连通，靶材安装法兰22中设有左右贯通的通孔，第一水道右端与靶材安装法兰22的通孔左端孔口1.2连通，靶材安装法兰22的通孔右端孔口1.2连通至靶材26的左端开口，由此通过第一水道、靶材安装法兰22的通孔使驱动轴20内部与靶材26内部连通。
如图1所示，工作台11底部对应靶材26右端开口位置固定有支撑端28，靶材26的右端开口中封堵安装有封头30，该封头30转动安装于支撑端28上，并且该封头30外沿弹性转动安装有第二靶材锁紧夹27，通过第二靶材锁紧夹27夹紧靶材26右端开口外沿形成固定，此时由支撑端28、封头30、第二靶材锁紧夹27形成靶材26右端的的端封部，并且端封部与驱动轴20右端配合共同支撑靶材26的转动。
封头30内部中空形成第二水道，第二水道一端与靶材26内部连通，第二水道另一端设于封头30中心形成中心通孔。靶材26内部的磁棒25同样轴向沿左右方向水平布置，并且磁棒25的左、右端均设有开口，磁棒25右端可转动地安装于封头30的中心通孔中，由此形成对磁棒25右端的支撑，并且磁棒25通过其右端开口与封头30内的第二水道相互连通，进而通过第二水道能够与靶材26内部连通。
作为另一种可替代的实施方式，如图2所示，其区别在于取消了支撑端28，而仅在靶材26的右端开口中堵入一个在内部设有第二水道的封头30，由此可仅在靶材26的左端支撑固定靶材26，进而形成靶材26的悬臂式结构。
如图3所示，端头外壳17的左侧筒口内同轴固定有可导电的中央支撑1，中央支撑1的右侧面中心同轴成型有连接轴1.1。该连接轴1.1内部中空，连接轴1.1的右端为开口，并且连接轴1.1的右端开口向右同轴贯穿驱动轴20及其锥形孔部20.1内部后，再穿过靶材安装法兰22并插接于磁棒25左端开口中，由此不仅形成对磁棒25左端的支撑，并且磁棒25左端开口还与连接轴1.1内部连通。中央支撑1的侧面设有孔口1.2，该孔口1.2的一端与连接轴1.1内部连通，另一端与端头外壳17内部连通，由此通过中空的连接轴1.1和中央支撑1侧面的孔口1.2，可使磁棒25内部与孔口1.2相对应位置的端头外壳17内部连通。
连接轴1.1上同轴套装有电触头2，电触头2的右端设为锥形面，中央支撑1与电触头2之间设有多个导电带3，每个导电带3一端通过紧固螺钉固定于中央支撑1上，另一端通过紧固螺钉固定于电触头2上，并且每个导电带3均具备一定的弹性形变量。电触头2与中央支撑1之间的连接轴1.1外环套有弹簧4，弹簧4一端接触或固定于中央支撑1表面，弹簧4另一端接触或固定于电触头2左端。电触头2右端的锥形面与驱动轴20内锥形孔部20.1的锥形内孔壁形状匹配，并且电触头2右端的锥面与锥形孔部20.1的锥形内孔壁保持电接触。通过弹簧4的弹力使电触头2的锥面压紧于锥形孔部20.1的锥形孔内壁，以使它们始终保持紧密电接触。
作为优先技术方案，电触头2位于驱动轴20，这样能够利于节省空间，使结构紧凑。本领域技术人员可以理解的是，只要电触头2与驱动轴20之间通过锥形面相接触，即可实现使传输电流增大的目的。在具体实施例 中，电触头2与驱动轴20之间相接触的具体位置还可以采用其他实施方式，例如，可以将电触头2的端部与驱动轴20的端部相接触，其中一端是凸出的锥形面，而另一端是凹陷的锥形孔，同样可以实现通过锥形面相接触的效果。
参照图4，为了使连接轴1.1上的电触头2是非转动的，连接轴1.1沿其径向设有销孔1.3，连接轴1.1通过销孔1.3配合安装有限位销6，限位销6两端贯穿销孔1.3；电触头2沿其轴向设有导向槽7，电触头2通过导向槽7与由销孔1.3两端穿出的限位销6可滑动配合，由此通过限位销6可使电触头2无法在连接轴1.1上转动，从而避免电触头2在驱动轴20转动时会在摩擦力的作用下随之转动。
作为另一种可替代的实施方式，电触头的侧壁设有贯穿的销孔，销孔内壁有螺纹，销孔中螺旋销入有限位钉，并且限位钉的钉帽与销孔之间设有平垫。限位钉的钉头压紧接触连接轴外壁对应位置，由此通过限位钉可使电触头无法在连接轴上转动，进而避免电触头与驱动轴的锥形孔部相接触时在摩擦力作用下随之转动。
本申请实施例中，驱动轴20转动时，带动靶材26转动，而连接轴1.1、电触头2、磁棒25均保持不动。转动过程中，靶材26通过驱动轴20、电触头2、中央支撑1、端头外壳17、导电板15与接电块9形成电连接，进而通过接电块9与外部电源电连接。
因此，本实施例中，给阴极供电的电源的电缆线接在接电块9上，电流先后通过接电块9、导电板15、端头外壳17、中央支撑1、导电带3静态传输到电触头2上，以上部件工作过程均处于静止状态。工作的工程中， 驱动部件带动皮带12，皮带12带动驱动轴20转动，驱动轴20的锥形面和电触头2的锥形面配合，实现电功率从锥面电触头2动态旋转传输到驱动轴20上。驱动轴20和靶材安装法兰22固定连接，靶材安装法兰22和靶材26连接，从而实现电功率动态旋转传输到靶材26上。
本实施例中，锥面电触头2和驱动轴20的锥面角度，根据空间的大小，可以是任意角度，以实现增大电功率旋转接触面积和电触头2的导向定位功能。
在锥形孔部20.1左侧方向上，连接轴1.1外壁与驱动轴20内壁之间具有环向间隙。驱动轴20中第一水道左端具体与锥形孔部20.1左侧的环向间隙连通。
端头外壳17上的两个水接头10中，其中一个水接头10的下端通过端头外壳17内部与环向间隙连通，另一个水接头10下端通过端头外壳17内部与中央支撑1侧面孔口1.2连通，由此可形成水路循环。
本实施例中，冷却水经其中一个水接头10进入连接轴1.1与驱动轴20之间的环向间隙(如图3中路径A所示)，再从环向间隙进入驱动轴20的第一水道(如图3中路径B所示)，然后从靶材安装法兰22的通孔进入靶材26内部(如图3中路径C所示)，接着经封头30中的第二水道进入磁棒25内部(如图3中路径D所示)，再接着通过连接轴1.1内部进入中央支撑1的侧面孔口1.2(如图3中路径E所示)，最终由中央支撑1的侧面孔口1.2进入另一个水接头10，两个水接头10均与外部冷却水源连通，由此可形成冷却水的循环水路。
本领域技术人员可以理解的是，两个水接头10可以任选其中一个作为 进水端，另一个作为出水端，因此，两个水接头10切换进水端和出水端时，冷却水的循环方向将是与上述路径(A→B→C→D→E)的方向相反的。
本实施例中，电触头2和驱动轴20的锥形面都处于冷却水的流动路径中，因此可通过冷却水带走热量和磨损产生的材料。
本实施例中，冷却水动密封18实现冷却水通道和轴承19位于大气侧的动态旋转水密封的功能；真空旋转动密封21实现轴承19位于大气侧和靶材26真空侧的动态旋转真空密封的功能。绝缘板14由耐高压的绝缘材料制备，实现端头基座13和导电板15之间的绝缘功能。
以上所述，仅为本申请较佳的具体实施方式，但本申请的保护范围并不局限于此，任何熟悉本技术领域的技术人员在本申请揭露的技术范围内，根据本申请的技术方案及其申请构思加以等同替换或改变，都应涵盖在本申请的保护范围之内。

Claims (23)

  1. 一种旋转阴极端头，包括端头外壳(17)，端头外壳(17)中通过轴承(19)转动安装有驱动轴(20)，驱动轴(20)的一端从端头外壳(17)中穿出并且固定连接有靶材安装法兰(22)；
    端头外壳(17)固定连接有中央支撑(1)，中央支撑(1)具有一体成型的连接轴(1.1)，连接轴(1.1)的一端同轴贯穿驱动轴(20)和靶材安装法兰(22)；
    连接轴(1.1)上同轴套装有电触头(2)，中央支撑(1)与电触头(2)电连接，电触头(2)与驱动轴(20)相接触，并且接触面为锥形面。
  2. 根据权利要求1所述的旋转阴极端头，中央支撑(1)与电触头(2)之间连接有导电带(3)。
  3. 根据权利要求1所述的旋转阴极端头，连接轴(1.1)上套装有位于电触头(2)与中央支撑(1)之间的弹簧(4)，通过弹簧(4)提供力使电触头(2)与驱动轴(20)保持紧密接触。
  4. 根据权利要求3所述的旋转阴极端头，连接轴(1.1)沿其径向设有销孔(1.3)，销孔(1.3)配合安装有限位销(6)，限位销(6)两端由销孔(1.3)中穿出；电触头(2)沿其轴向设有导向槽(7)，电触头(2)通过导向槽(7)与限位销(6)可滑动配合。
  5. 根据权利要求1所述的旋转阴极端头，电触头(2)的端部为锥形面，驱动轴(20)内部成型有锥形孔部(20.1)，电触头(2)设于驱动轴(20)内，并且电触头(2)端部的锥形面与驱动轴(20)内锥形孔部(20.1) 的锥形内孔壁接触。
  6. 根据权利要求1所述的旋转阴极端头，端头外壳(17)可导电，端头外壳(17)上固定连接有导电板(15)，导电板(15)上固定连接有绝缘板(14)和接电块(9)，绝缘板(14)上固定连接有端头基座(13)，接电块(9)贯穿绝缘板(14)和端头基座(13)。
  7. 根据权利要求6所述的旋转阴极端头，驱动轴(20)的轴身上绕设有皮带(12)，皮带(12)从端头外壳(17)中穿出。
  8. 根据权利要求7所述的旋转阴极端头，还包括工作台(11)，端头基座(13)固定连接在工作台(11)上，皮带(12)和接电块(9)贯穿工作台(11)。
  9. 根据权利要求1所述的旋转阴极端头，驱动轴(20)穿出端头外壳(17)外部的一端与端头外壳(17)之间安装有真空旋转动密封(21)。
  10. 根据权利要求1所述的旋转阴极端头，靶材安装法兰(22)的外沿安装有第一靶材锁紧夹(23)。
  11. 根据权利要求1所述的旋转阴极端头，还包括用于安装在靶材(26)一端的封头(30)。
  12. 根据权利要求11所述的旋转阴极端头，端头外壳(17)上固定连接有两个水接头(10)，驱动轴(20)与连接轴(1.1)之间具有环向间隙，其中一个水接头(10)与环向间隙连通，驱动轴(20)上设有与环向间隙连通的第一水道，靶材安装法兰(22)上设有与第一水道连通的通孔；封头(30)中设有第二水道，连接轴(1.1)为中空轴，中央支撑(1)周向表面设有与连接轴(1.1)内部连通的孔口(1.2)，另一个水接头(10) 与孔口(1.2)连通；驱动轴(20)位于端头外壳(17)内部的一端与端头外壳(17)的内壁之间安装有冷却水动密封(18)。
  13. 根据权利要求11所述的旋转阴极端头，封头(30)的外沿安装有第二靶材锁紧夹(27)。
  14. 根据权利要求11所述的旋转阴极端头，还包括支撑端(28)，封头(30)可转动地安装在支撑端(28)上。
  15. 一种旋转阴极端头，用于使内部有磁棒(25)的靶材(26)转动并与外部电源电连接，包括用于连接靶材(26)以驱动靶材(26)转动的驱动轴(20)，所述驱动轴(20)为导电材料制成，还包括用于实现电连接的电触头(2)，所述电触头(2)、驱动轴(20)两者之中一者成型有锥形孔部(20.1)、另一者成型有锥面，电触头(2)、驱动轴(20)之间通过锥面与锥形孔部(20.1)保持电接触，且电触头(2)不随驱动轴(20)转动，外部电源依次通过电触头(2)、驱动轴(20)与靶材(26)电连接。
  16. 根据权利要求15所述的旋转阴极端头，所述电触头(2)的端部成型为锥面，所述驱动轴(20)内部中空并成型有锥形孔部(20.1)，所述电触头(2)设于驱动轴(20)内，且电触头(2)其锥面与驱动轴(20)的锥形孔部(20.1)的孔壁保持电接触。
  17. 根据权利要求15所述的旋转阴极端头，所述电触头(2)、驱动轴(20)均为导电金属材料制成，其中驱动轴(20)材料硬度大于电触头(2)材料硬度。
  18. 根据权利要求16所述的旋转阴极端头，还包括可导电的端头外壳(17)，所述驱动轴(20)转动安装于端头外壳(17)内，驱动轴(20) 一端穿出端头外壳(17)并与所述靶材(26)一端固定连接，靶材(26)另一端安装有端封部，所述端封部与靶材(26)另一端相对转动配合，或者端封部随靶材(26)转动；
    所述端头外壳(17)中还固定有可导电的中央支撑(1)，所述中央支撑(1)中心固定连接有连接轴(1.1)，所述连接轴(1.1)贯穿驱动轴(20)且连接轴(1.1)轴端与靶材(26)内部的磁棒(25)一端固定连接；所述电触头(2)非转动套装于连接轴(1.1)上，且电触头(2)与中央支撑(1)电连接，外部电源依次通过端头外壳(17)、中央支撑(1)、电触头(2)、驱动轴(20)与靶材(26)电连接。
  19. 根据权利要求18所述的旋转阴极端头，所述电触头(2)与中央支撑(1)之间通过若干导电带(3)电连接。
  20. 根据权利要求18所述的旋转阴极端头，所述中央支撑(1)、电触头(2)之间的连接轴(1.1)外套装有弹簧(4)，通过弹簧(4)提供力使电触头(2)的锥面与驱动轴(20)的锥形孔部(20.1)孔壁保持电接触。
  21. 根据权利要求18所述的旋转阴极端头，所述连接轴(1.1)为中空轴，所述中央支撑(1)侧面设有孔口(1.2)与连接轴(1.1)内部连通；连接轴(1.1)外壁、驱动轴(20)内壁之间有环向间隙，且驱动轴(20)的轴壁中设有第一水道，第一水道一端连通至连接轴(1.1)、驱动轴(20)之间环向间隙，第一水道另一端连通至靶材(26)内部；所述端封部内设有第二水道，第二水道一端连通至靶材(26)内部，第二水道另一端连通至空心的磁棒(25)内部，磁棒(25)内部还与连接轴(1.1)内部连通； 所述端头外壳(17)上安装有一对水接头(10)，其中一个水接头(10)一端连通至连接轴(1.1)、驱动轴(20)之间环向间隙，另一个水接头(10)连通至中央支撑(1)侧面孔口(1.2)。
  22. 根据权利要求18所述的旋转阴极端头，所述端头外壳(17)内壁、驱动轴(20)之间有环形空隙，环形空隙内一端固定有真空旋转动密封(21)，环形空隙内另一端固定有冷却水动密封(18)，由冷却水动密封(18)、真空旋转动密封(21)对端头外壳(17)、驱动轴(20)之间环形空隙形成密封。
  23. 根据权利要求18所述的旋转阴极端头，所述驱动轴(20)上绕过有皮带(12)，皮带(12)从端头外壳(17)穿出。
PCT/CN2023/111356 2022-08-26 2023-08-05 一种旋转阴极端头 WO2024041353A1 (zh)

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