WO2024034131A1 - Circuit de guide d'ondes optique et procédé de fabrication de circuit de guide d'ondes optique - Google Patents
Circuit de guide d'ondes optique et procédé de fabrication de circuit de guide d'ondes optique Download PDFInfo
- Publication number
- WO2024034131A1 WO2024034131A1 PCT/JP2022/030790 JP2022030790W WO2024034131A1 WO 2024034131 A1 WO2024034131 A1 WO 2024034131A1 JP 2022030790 W JP2022030790 W JP 2022030790W WO 2024034131 A1 WO2024034131 A1 WO 2024034131A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- optical waveguide
- core
- optical
- layer
- substrate
- Prior art date
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 248
- 238000000034 method Methods 0.000 title claims description 23
- 238000004519 manufacturing process Methods 0.000 title claims description 20
- 239000000758 substrate Substances 0.000 claims abstract description 47
- 239000000463 material Substances 0.000 claims abstract description 36
- 238000005253 cladding Methods 0.000 claims abstract description 19
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 41
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 38
- 239000000377 silicon dioxide Substances 0.000 claims description 14
- 230000001902 propagating effect Effects 0.000 claims description 8
- 238000010438 heat treatment Methods 0.000 claims description 7
- 239000011521 glass Substances 0.000 claims description 6
- 235000012239 silicon dioxide Nutrition 0.000 claims description 6
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims description 3
- 229910052681 coesite Inorganic materials 0.000 claims description 2
- 229910052906 cristobalite Inorganic materials 0.000 claims description 2
- 229910052682 stishovite Inorganic materials 0.000 claims description 2
- 229910052905 tridymite Inorganic materials 0.000 claims description 2
- 239000011162 core material Substances 0.000 description 138
- 229910052710 silicon Inorganic materials 0.000 description 67
- 239000010703 silicon Substances 0.000 description 67
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 66
- 238000005516 engineering process Methods 0.000 description 10
- 230000008878 coupling Effects 0.000 description 7
- 238000010168 coupling process Methods 0.000 description 7
- 238000005859 coupling reaction Methods 0.000 description 7
- 238000012545 processing Methods 0.000 description 6
- 229910052814 silicon oxide Inorganic materials 0.000 description 6
- 238000004891 communication Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 239000010453 quartz Substances 0.000 description 4
- 230000007704 transition Effects 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 3
- 238000000151 deposition Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000010354 integration Effects 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 230000002542 deteriorative effect Effects 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229910005793 GeO 2 Inorganic materials 0.000 description 1
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 230000000116 mitigating effect Effects 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 150000003376 silicon Chemical class 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
- G02B6/132—Integrated optical circuits characterised by the manufacturing method by deposition of thin films
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/30—Optical coupling means for use between fibre and thin-film device
Abstract
L'invention concerne un circuit de guide d'ondes optique (100) qui a deux types ou plus de guides d'ondes optiques (110, 120) formés sur un substrat (101), et comprend : une couche de gainage inférieure (102) formée sur le substrat (101) ; un cœur (103) du second guide d'ondes optique (120), ledit cœur étant formé sur la couche de gainage inférieure (102) ; un cœur (104) du premier guide d'ondes optique (110), ledit cœur étant formé sur le cœur (103) du second guide d'ondes optique (120) et étant formé d'un matériau ayant un indice de réfraction supérieur à celui du cœur (103) du second guide d'ondes optique (120) ; et une couche de gainage supérieure (105) qui est formée sur la couche de gainage inférieure (102) sous une forme entourant le cœur (103) du second guide d'ondes optique (120) et le cœur (104) du premier guide d'ondes optique (110), et est formée d'un matériau ayant un indice de réfraction inférieur à celui du cœur (103) du second guide d'ondes optique (120).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2022/030790 WO2024034131A1 (fr) | 2022-08-12 | 2022-08-12 | Circuit de guide d'ondes optique et procédé de fabrication de circuit de guide d'ondes optique |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2022/030790 WO2024034131A1 (fr) | 2022-08-12 | 2022-08-12 | Circuit de guide d'ondes optique et procédé de fabrication de circuit de guide d'ondes optique |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| WO2024034131A1 true WO2024034131A1 (fr) | 2024-02-15 |
Family
ID=89851351
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/JP2022/030790 WO2024034131A1 (fr) | 2022-08-12 | 2022-08-12 | Circuit de guide d'ondes optique et procédé de fabrication de circuit de guide d'ondes optique |
Country Status (1)
| Country | Link |
|---|---|
| WO (1) | WO2024034131A1 (fr) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20090003770A1 (en) * | 2007-06-29 | 2009-01-01 | Alcatel-Lucent | Vertical optical coupling structure |
| JP2014202997A (ja) * | 2013-04-08 | 2014-10-27 | 富士通株式会社 | スポットサイズ変換器、光導波路及びスポットサイズ変換器の製造方法 |
| WO2015011845A1 (fr) * | 2013-07-23 | 2015-01-29 | 独立行政法人産業技術総合研究所 | Dispositif de couplage intercouche d'ondes lumineuses |
| JP2016045440A (ja) * | 2014-08-26 | 2016-04-04 | 日本電信電話株式会社 | 光導波路の作製方法 |
| JP2016090711A (ja) * | 2014-10-31 | 2016-05-23 | 富士通株式会社 | 光導波路、スポットサイズ変換器及び光装置 |
| WO2020187777A1 (fr) * | 2019-03-15 | 2020-09-24 | Ligentec Sa | Convertisseur de taille de mode optique |
-
2022
- 2022-08-12 WO PCT/JP2022/030790 patent/WO2024034131A1/fr unknown
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20090003770A1 (en) * | 2007-06-29 | 2009-01-01 | Alcatel-Lucent | Vertical optical coupling structure |
| JP2014202997A (ja) * | 2013-04-08 | 2014-10-27 | 富士通株式会社 | スポットサイズ変換器、光導波路及びスポットサイズ変換器の製造方法 |
| WO2015011845A1 (fr) * | 2013-07-23 | 2015-01-29 | 独立行政法人産業技術総合研究所 | Dispositif de couplage intercouche d'ondes lumineuses |
| JP2016045440A (ja) * | 2014-08-26 | 2016-04-04 | 日本電信電話株式会社 | 光導波路の作製方法 |
| JP2016090711A (ja) * | 2014-10-31 | 2016-05-23 | 富士通株式会社 | 光導波路、スポットサイズ変換器及び光装置 |
| WO2020187777A1 (fr) * | 2019-03-15 | 2020-09-24 | Ligentec Sa | Convertisseur de taille de mode optique |
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