WO2024032054A1 - Procédé et dispositif de superfinition laser de liaison à axes multiples - Google Patents
Procédé et dispositif de superfinition laser de liaison à axes multiples Download PDFInfo
- Publication number
- WO2024032054A1 WO2024032054A1 PCT/CN2023/092797 CN2023092797W WO2024032054A1 WO 2024032054 A1 WO2024032054 A1 WO 2024032054A1 CN 2023092797 W CN2023092797 W CN 2023092797W WO 2024032054 A1 WO2024032054 A1 WO 2024032054A1
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- WO
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- Prior art keywords
- laser
- processing
- texture
- target
- trajectory
- Prior art date
Links
- 238000000034 method Methods 0.000 title claims abstract description 73
- 238000012545 processing Methods 0.000 claims abstract description 247
- 239000000463 material Substances 0.000 claims abstract description 89
- 238000005498 polishing Methods 0.000 claims abstract description 81
- 238000013507 mapping Methods 0.000 claims abstract description 75
- 230000009466 transformation Effects 0.000 claims description 36
- 230000009977 dual effect Effects 0.000 claims description 24
- 230000007246 mechanism Effects 0.000 claims description 18
- 239000000919 ceramic Substances 0.000 claims description 16
- 238000010521 absorption reaction Methods 0.000 claims description 11
- 239000000284 extract Substances 0.000 claims description 11
- 238000004519 manufacturing process Methods 0.000 claims description 10
- 239000004065 semiconductor Substances 0.000 claims description 10
- 239000002210 silicon-based material Substances 0.000 claims description 10
- 239000000758 substrate Substances 0.000 claims description 10
- 230000000694 effects Effects 0.000 claims description 9
- 230000007547 defect Effects 0.000 claims description 8
- 229910052594 sapphire Inorganic materials 0.000 claims description 8
- 239000010980 sapphire Substances 0.000 claims description 8
- 239000005304 optical glass Substances 0.000 claims description 7
- 238000000844 transformation Methods 0.000 claims description 7
- 229910010293 ceramic material Inorganic materials 0.000 claims description 6
- 239000000696 magnetic material Substances 0.000 claims description 5
- 238000000605 extraction Methods 0.000 claims description 4
- 239000002086 nanomaterial Substances 0.000 claims description 4
- 238000005457 optimization Methods 0.000 claims description 4
- 238000009877 rendering Methods 0.000 claims description 4
- 150000001875 compounds Chemical class 0.000 claims description 3
- 230000002452 interceptive effect Effects 0.000 claims description 3
- 238000002844 melting Methods 0.000 claims description 3
- 230000008018 melting Effects 0.000 claims description 3
- 235000019587 texture Nutrition 0.000 description 216
- 238000005516 engineering process Methods 0.000 description 22
- 230000008569 process Effects 0.000 description 12
- 230000009286 beneficial effect Effects 0.000 description 9
- 238000010586 diagram Methods 0.000 description 9
- 238000005192 partition Methods 0.000 description 8
- 238000000227 grinding Methods 0.000 description 7
- 238000013461 design Methods 0.000 description 4
- 230000006870 function Effects 0.000 description 4
- 238000007517 polishing process Methods 0.000 description 4
- 230000004044 response Effects 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- 238000002161 passivation Methods 0.000 description 3
- 238000005482 strain hardening Methods 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 229910003460 diamond Inorganic materials 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 238000003672 processing method Methods 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 230000003746 surface roughness Effects 0.000 description 2
- 238000012876 topography Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 239000006061 abrasive grain Substances 0.000 description 1
- 230000003044 adaptive effect Effects 0.000 description 1
- 238000005524 ceramic coating Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000002860 competitive effect Effects 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007123 defense Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000002309 gasification Methods 0.000 description 1
- 230000014509 gene expression Effects 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000011068 loading method Methods 0.000 description 1
- 238000013178 mathematical model Methods 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 235000019592 roughness Nutrition 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/352—Working by laser beam, e.g. welding, cutting or boring for surface treatment
- B23K26/3568—Modifying rugosity
- B23K26/3576—Diminishing rugosity, e.g. grinding; Polishing; Smoothing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/60—Preliminary treatment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
Abstract
La présente demande se rapporte au domaine technique du traitement de précision laser, et concerne un procédé et un dispositif de superfinition laser de liaison à axes multiples. Le procédé comprend les étapes consistant à : déterminer une première trajectoire laser et une seconde trajectoire laser selon une demande de traitement de traitement de micro-nano-texture ou de polissage de matériau dur et fragile ; et effectuer un traitement d'élimination couche par couche laser ultrarapide à double faisceau infrarouge et ultraviolet sur une surface incurvée cible à l'aide d'un premier laser se déplaçant le long de la première trajectoire laser et d'un second laser se déplaçant le long de la seconde trajectoire laser pour obtenir une pièce de matériau dur et fragile polie ou une pièce soumise au traitement de micro-nano-texture. Selon la présente demande, le traitement d'élimination couche par couche laser ultrarapide à double faisceau infrarouge et ultraviolet est compatible avec un polissage de précision laser et un traitement de micro-nano-texture pour un matériau à fragilité/dureté élevée ; au moyen d'un préchauffage laser infrarouge et d'un traitement grossier et d'un traitement à froid par laser ultraviolet, le problème dans l'état de la technique de précision de traitement insuffisante est résolu, et la superfinition est obtenue ; et en outre, la partie de traitement de texture résout une équation de Poisson au moyen d'un mappage de surface incurvée paramétré et d'un codage de champ de gradient, de telle sorte qu'un traitement de texture moins déformable et réglable peut être mis en œuvre.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210945988.3 | 2022-08-08 | ||
| CN202210945988.3A CN115609154A (zh) | 2022-08-08 | 2022-08-08 | 多轴联动激光超精加工方法与设备 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| WO2024032054A1 true WO2024032054A1 (fr) | 2024-02-15 |
Family
ID=84856362
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/CN2023/092797 WO2024032054A1 (fr) | 2022-08-08 | 2023-05-08 | Procédé et dispositif de superfinition laser de liaison à axes multiples |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN115609154A (fr) |
| WO (1) | WO2024032054A1 (fr) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115609154A (zh) * | 2022-08-08 | 2023-01-17 | 深圳信息职业技术学院 | 多轴联动激光超精加工方法与设备 |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1947917A (zh) * | 2006-10-30 | 2007-04-18 | 西安交通大学 | 飞秒激光真三维微纳加工中心 |
| CN101551904A (zh) * | 2009-05-19 | 2009-10-07 | 清华大学 | 基于混合梯度场和混合边界条件的图像合成方法和装置 |
| JP2018138873A (ja) * | 2017-02-24 | 2018-09-06 | 国立大学法人東北大学 | マッピング方法および測定装置 |
| CN109079323A (zh) * | 2018-09-03 | 2018-12-25 | 广东工业大学 | 铝合金非熔透激光焊强化的平台与方法 |
| CN111085780A (zh) * | 2019-12-30 | 2020-05-01 | 长沙理工大学 | 一种面向金属容器的激光焊接方法 |
| CN114473214A (zh) * | 2022-03-31 | 2022-05-13 | 深圳信息职业技术学院 | 陶瓷表面双激光束耦合抛光方法 |
| CN115609154A (zh) * | 2022-08-08 | 2023-01-17 | 深圳信息职业技术学院 | 多轴联动激光超精加工方法与设备 |
-
2022
- 2022-08-08 CN CN202210945988.3A patent/CN115609154A/zh active Pending
-
2023
- 2023-05-08 WO PCT/CN2023/092797 patent/WO2024032054A1/fr unknown
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1947917A (zh) * | 2006-10-30 | 2007-04-18 | 西安交通大学 | 飞秒激光真三维微纳加工中心 |
| CN101551904A (zh) * | 2009-05-19 | 2009-10-07 | 清华大学 | 基于混合梯度场和混合边界条件的图像合成方法和装置 |
| JP2018138873A (ja) * | 2017-02-24 | 2018-09-06 | 国立大学法人東北大学 | マッピング方法および測定装置 |
| CN109079323A (zh) * | 2018-09-03 | 2018-12-25 | 广东工业大学 | 铝合金非熔透激光焊强化的平台与方法 |
| CN111085780A (zh) * | 2019-12-30 | 2020-05-01 | 长沙理工大学 | 一种面向金属容器的激光焊接方法 |
| CN114473214A (zh) * | 2022-03-31 | 2022-05-13 | 深圳信息职业技术学院 | 陶瓷表面双激光束耦合抛光方法 |
| CN115609154A (zh) * | 2022-08-08 | 2023-01-17 | 深圳信息职业技术学院 | 多轴联动激光超精加工方法与设备 |
Also Published As
| Publication number | Publication date |
|---|---|
| CN115609154A (zh) | 2023-01-17 |
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