WO2024022327A1

WO2024022327A1 - Specialty gas safety control method and apparatus, circuit, and semiconductor process device

Info

Publication number: WO2024022327A1
Application number: PCT/CN2023/109090
Authority: WO
Inventors: 刘畅; 荣延栋; 胡云龙; 刘旭
Original assignee: 北京北方华创微电子装备有限公司
Priority date: 2022-07-29
Filing date: 2023-07-25
Publication date: 2024-02-01
Also published as: CN115354312A; CN115354312B; CN117305819A

Abstract

Embodiments of the present invention provide a specialty gas safety control method and apparatus, a control circuit, a semiconductor process device, and a computer readable storage medium. The method comprises: acquiring the pressure value of a chamber; when the pressure value is greater than a preset pressure threshold and when a second gas valve and a third gas valve need to be opened, controlling a first circuit to be disconnected and a second circuit and a third circuit to be connected, so that a first gas valve is closed, and the second gas valve and the third gas valve are opened; and when the first gas valve needs to be opened, controlling the first circuit to be connected and the second circuit and the third circuit to be disconnected, so that the first gas valve is opened, and the second gas valve and the third gas valve are closed. The present solution avoids the risk of software control failure, prevents hardware damage and personnel injury due to the generation of byproducts caused by a chemical reaction between specialty gases, eradicates potential safety hazards, and protects the system and personnel safety.

Description

Special gas safety control methods, devices, circuits and semiconductor process equipment

Technical field

The invention relates to the field of semiconductor technology, and in particular to a special gas safety control method, device, control circuit and semiconductor process equipment, as well as a computer-readable storage medium.

Background technique

Chemical Vapor Deposition (CVD) technology is a method that can plate substances on the surface of a substrate in the form of an atomic film. With the development of microelectronics and deep submicron chip technology, the size of devices and materials continues to be reduced, and the aspect ratio in devices continues to increase. The advantages of CVD in filling are becoming more and more obvious. This process is increasingly favored by semiconductors. Industry favor.

A characteristic of the CVD process is that a variety of process gases enter the chamber. When the chamber environment is ready, the process gas enters the chamber at the same time and adheres to the wafer, reacting on the wafer surface to generate the required film. At the same time, a vacuum pump is required to continuously remove by-products and remaining reactants. CVD process gases will contain a variety of special gases. Special gases refer to flammable, explosive, toxic, and corrosive gases, such as H ₂ , WF ₆ , 5% B ₂ H ₆ /95% N ₂ , NF ₃ , SiH ₄ .

In the existing technology, a software program controls the interlocking between valves according to the interlocking conditions of special gas valves. However, the software has the risk of failure and poses safety risks.

Contents of the invention

In view of the above problems, embodiments of the present invention are proposed to provide a special gas safety control method, device, semiconductor process equipment, and computer-readable storage medium that overcome the above problems or at least partially solve the above problems.

In order to solve the above problems, embodiments of the present invention disclose a special gas safety control method, which is applied to semiconductor process equipment. The semiconductor process equipment includes: a process chamber and a control circuit; The control circuit includes a first circuit for controlling the on-off of the valve corresponding to the first gas, a second circuit for controlling the on-off of the valve corresponding to the second gas, and a third circuit for controlling the on-off of the valve corresponding to the third gas, The methods include:

Obtain the pressure value of the process chamber;

When the pressure value is greater than the preset pressure threshold, when the second gas corresponding valve and the third gas corresponding valve need to be opened, the first circuit is controlled to be disconnected, and the second circuit is controlled to be opened. Connect with the third circuit to close the first gas corresponding valve and open the second gas corresponding valve and the third gas corresponding valve;

When it is necessary to open the first gas corresponding valve, the first circuit is controlled to be turned on, and the second circuit and the third circuit are controlled to be turned off, so that the first gas corresponding valve is opened and the The second gas corresponding valve and the third gas corresponding valve are closed.

Optionally, also includes:

When the pressure value is less than or equal to the preset pressure threshold, the first circuit, the second circuit and the third circuit are controlled to be turned on so that the first gas corresponds to the valve, the The second gas corresponding valve and the third gas corresponding valve are opened.

Optionally, the control circuit further includes: a first relay, a second relay and a third relay, and the method further includes:

When the pressure value is greater than the preset pressure threshold, the second relay is controlled to be turned on and the third relay to be turned off through the first relay, so that the second relay controls the third relay. On and off of a circuit, the second circuit and the third circuit;

When the pressure value is less than or equal to the preset pressure threshold, the first relay is used to control the second relay to turn off and the third relay to turn on, so that the third relay controls all The first circuit, the second circuit and the third circuit are switched on and off.

Optionally, the first relay includes a first pair of normally closed contacts and a first pair of normally open contacts; when the pressure value is greater than the preset pressure threshold, the first relay control station The second relay is turned on and the third relay is turned off, so that the second relay controls the on/off of the first circuit, the second circuit and the third circuit, including:

When the pressure value is greater than the preset pressure threshold, the first pair of normally open contacts is controlled by the first relay to remain in an open state, so as to control the third relay to open, and through the The first relay controls the first pair of normally closed contacts to remain in a closed state to control the second relay to turn on, so that the second relay controls the first circuit, the second circuit and the The third circuit is switched on and off.

Optionally, the second relay includes a second pair of normally closed contacts, a second pair of normally open contacts and a third pair of normally open contacts; in the case where the pressure value is greater than the preset pressure threshold, When it is necessary to open the second gas corresponding valve and the third gas corresponding valve, the first circuit is controlled to be disconnected, and the second circuit and the third circuit are controlled to be connected, so that the third circuit is connected. A gas corresponding valve is closed, the second gas corresponding valve and the third gas corresponding valve are opened, including:

The second pair of normally closed contacts is controlled to open through the second relay, the first circuit is controlled to open, and the second pair of normally open contacts and the third pair of normally open contacts are controlled through the second relay. When the normally open contact is closed, the second circuit and the third circuit are respectively controlled to be connected, so that the first gas corresponding valve is closed, the second gas corresponding valve and the third gas corresponding valve are opened. .

Optionally, when the first gas corresponding valve needs to be opened, the first circuit is controlled to be turned on, and the second circuit and the third circuit are controlled to be turned off, so that the first gas The corresponding valve is opened, the second gas corresponding valve and the third gas corresponding valve are closed, including:

The second pair of normally closed contacts is controlled to remain closed through the second relay, the first circuit is controlled to be turned on, and the second pair of normally open contacts and the third pair of normally open contacts are controlled through the second relay. Three pairs of normally open contacts remain in a disconnected state and control the disconnection of the second circuit and the third circuit respectively, so that the first gas corresponding valve opens, the second gas corresponding valve and the third gas corresponding valve open. The gas corresponding valve is closed.

Optionally, in the case where the pressure value is less than or equal to the preset pressure threshold, the The second relay is controlled to be turned off and the third relay is turned on through the first relay, so that the third relay controls the passage of the first circuit, the second circuit and the third circuit. Breaks include:

When the pressure value is less than or equal to the preset pressure threshold, the first pair of normally closed contacts is controlled to open through the first relay, the second relay is controlled to open, and the first pair of normally closed contacts is controlled to open through the third relay. A relay controls the first pair of normally open contacts to close and controls the third relay to turn on, so that the third relay controls the conduction of the first circuit, the second circuit and the third circuit. Break.

Optionally, the third relay includes a fourth pair of normally open contacts, a fifth pair of normally open contacts and a sixth pair of normally open contacts; when the pressure value is less than or equal to the preset pressure threshold In the case of , the first circuit, the second circuit and the third circuit are controlled to be connected so that the first gas corresponding valve, the second gas corresponding valve and the third gas corresponding valve Open, including:

The third relay controls the fourth pair of normally open contacts, the fifth pair of normally open contacts and the sixth pair of normally open contacts to close, and controls the first circuit and the second circuit and the third circuit to open the first gas corresponding valve, the second gas corresponding valve and the third gas corresponding valve.

Optionally, the first gas is NF ₃ , the second gas is H ₂ , and the third gas is SiH ₄ .

An embodiment of the present invention also discloses a control circuit, which is applied to semiconductor process equipment. The control circuit includes: a first circuit for controlling the on-off of the valve corresponding to the first gas, and a first circuit for controlling the on-off of the valve corresponding to the second gas. The second circuit and the third circuit used to control the on-off of the corresponding valve of the third gas,

It also includes a first relay, a second relay and a third relay. When the pressure value is greater than the preset pressure threshold, the first relay is used to control the second relay to turn on and the third relay to turn on. The relay is turned off, so that the second relay controls the on-off of the first circuit, the second circuit and the third circuit; when the pressure value is less than or equal to the preset pressure threshold, In this case, the first relay is also used to control the second relay to turn off and the third relay to turn on, so that the third relay controls the first circuit, the second circuit and the The third circuit is switched on and off.

Optionally, the first relay includes a first pair of normally closed contacts and a first pair of normally open contacts; when the pressure value is greater than a preset pressure threshold, the first relay is used to control the The first pair of normally open contacts remains in the open state, controlling the third relay to open, and the first pair of normally closed contacts is controlled to remain in the closed state through the first relay, and the second relay is controlled to open , so that the second relay controls the on and off of the first circuit, the second circuit and the third circuit; and/or,

The second relay includes a second pair of normally closed contacts, a second pair of normally open contacts and a third pair of normally open contacts; the second relay is used to control the disconnection of the second pair of normally closed contacts, To control the opening of the first circuit, the second relay is also used to control the closing of the second pair of normally open contacts and the third pair of normally open contacts to respectively control the second circuit and the The third circuit is connected so that the first gas corresponding valve is closed, the second gas corresponding valve and the third gas corresponding valve are opened;; and/or,

The third relay includes a fourth pair of normally open contacts, a fifth pair of normally open contacts and a sixth pair of normally open contacts; the third relay is used to control the fourth pair of normally open contacts, the The fifth pair of normally open contacts and the sixth pair of normally open contacts are closed to control the first circuit, the second circuit and the third circuit to be connected so that the first gas corresponding valve , the second gas corresponding valve and the third gas corresponding valve are opened.

An embodiment of the present invention also discloses a semiconductor process equipment. The semiconductor process equipment includes: a process chamber and a control circuit; the control circuit includes a first circuit for controlling the on/off of the valve corresponding to the first gas; A second circuit for turning on and off the valve corresponding to the second gas and a third circuit for controlling the turning on and off of the valve corresponding to the third gas. The semiconductor process equipment also includes:

Controller, used to obtain the pressure value of the process chamber; when the pressure value is greater than the preset pressure In the case of a threshold value, when the second gas corresponding valve and the third gas corresponding valve need to be opened, the first circuit is controlled to be disconnected, and the second circuit and the third circuit are controlled to be connected, So that the first gas corresponding valve is closed, the second gas corresponding valve and the third gas corresponding valve are opened; when the first gas corresponding valve needs to be opened, the first circuit is controlled to be turned on, and The second circuit and the third circuit are controlled to be disconnected, so that the first gas corresponding valve is opened, and the second gas corresponding valve and the third gas corresponding valve are closed.

Optionally, the controller is also configured to control the first circuit, the second circuit and the third circuit to turn on when the pressure value is less than or equal to the preset pressure threshold. , so that the first gas corresponding valve, the second gas corresponding valve and the third gas corresponding valve are opened.

Optionally, the control circuit further includes: a first relay, a second relay and a third relay, and the controller is further configured to, when the pressure value is greater than the preset pressure threshold, use the The first relay controls the second relay to be turned on and the third relay to be turned off, so that the second relay controls the on/off of the first circuit, the second circuit and the third circuit; in When the pressure value is less than or equal to the preset pressure threshold, the first relay controls the second relay to turn off and the third relay to turn on, so that the third relay controls the The first circuit, the second circuit and the third circuit are connected and disconnected.

Optionally, the first relay includes a first pair of normally closed contacts and a first pair of normally open contacts; and the controller is configured to, when the pressure value is greater than a preset pressure threshold, use the The first relay controls the first pair of normally open contacts to maintain an open state, controls the third relay to open, and controls the first pair of normally closed contacts to maintain a closed state through the first relay, controlling all The second relay is turned on, so that the second relay controls the on/off of the first circuit, the second circuit and the third circuit.

Optionally, the second relay includes a second pair of normally closed contacts, a second pair of normally open contacts and a third pair of normally open contacts; the controller is configured to control the The second pair of normally closed contacts point is disconnected, the first circuit is controlled to be disconnected, and the second pair of normally open contacts and the third pair of normally open contacts are controlled to be closed through the second relay, respectively controlling the second circuit and The third circuit is turned on, so that the first gas corresponding valve is closed, the second gas corresponding valve and the third gas corresponding valve are opened.

Optionally, the controller is configured to control the second pair of normally closed contacts to maintain a closed state through the second relay, control the first circuit to be turned on, and control the second pair of normally closed contacts through the second relay. The second pair of normally open contacts and the third pair of normally open contacts remain disconnected, and control the disconnection of the second circuit and the third circuit respectively, so that the first gas corresponding valve opens, and the The second gas corresponding valve and the third gas corresponding valve are closed.

Optionally, the controller is configured to control the first pair of normally closed contacts to open through the first relay when the pressure value is less than or equal to the preset pressure threshold, and control the The second relay is turned off, and the first pair of normally open contacts are controlled to be closed by the first relay, and the third relay is controlled to be turned on, so that the third relay controls the first circuit, the The second circuit and the third circuit are connected and disconnected.

Optionally, the third relay includes a fourth pair of normally open contacts, a fifth pair of normally open contacts, and a sixth pair of normally open contacts; and the controller is configured to control the third relay through the third relay. The fourth pair of normally open contacts, the fifth pair of normally open contacts and the sixth pair of normally open contacts are closed to control the connection of the first circuit, the second circuit and the third circuit, So that the first gas corresponding valve, the second gas corresponding valve and the third gas corresponding valve are opened.

An embodiment of the present invention also discloses a special gas safety control device for controlling a control circuit in semiconductor process equipment. The special gas safety control device includes at least one processor and at least one memory, and the memory stores Have at least one program;

When the at least one program is executed by the at least one processor, the at least one The processor implements the above method disclosed in the embodiment of the present invention.

Embodiments of the present invention also disclose a computer-readable storage medium for use in semiconductor processing equipment, on which a computer program is stored. When the program is executed by a processor, the above method disclosed in the embodiment of the present invention is implemented.

Embodiments of the present invention include the following advantages:

In the embodiment of the present invention, the pressure value of the process chamber is obtained; when the pressure value is greater than the preset pressure threshold, when the second gas corresponding valve and the third gas corresponding valve need to be opened, the first circuit is controlled to be disconnected, Control the second circuit and the third circuit to be connected so that the first gas corresponding valve is closed, the second gas corresponding valve and the third gas corresponding valve are opened; when it is necessary to open the first gas corresponding valve, control the first circuit to be connected, and controlling the disconnection of the second circuit and the third circuit to open the first gas corresponding valve, and close the second gas corresponding valve and the third gas corresponding valve. Through the control of the above-mentioned first circuit, second circuit and third circuit, the valve interlock function can be realized, that is, the valve interlock is added to the circuit design, so that when the process chamber pressure reaches the preset threshold, the first gas corresponding valve and The valve corresponding to the second gas will not be opened at the same time, and the valve corresponding to the first gas and the valve corresponding to the third gas will not be opened at the same time, thereby avoiding the risk of software control failure and preventing chemical reactions between special gases from generating by-products, causing hardware failure. Damage and personal injury, eliminate safety hazards, and protect system and personnel safety.

Description of drawings

Figure 1 is a step flow chart of a special gas safety control method provided by an embodiment of the present invention;

Figure 2 is a schematic diagram of a special gas safety control provided by an embodiment of the present invention;

Figure 3 is a structural block diagram of a semiconductor process equipment provided by an embodiment of the present invention;

Figure 4 is a structural block diagram of the special gas safety control device provided in the embodiment of the present invention.

Detailed ways

In order to make the above objects, features and advantages of the present invention more apparent and understandable, the following is provided in conjunction with the accompanying drawings. and specific embodiments to further describe the present invention in detail.

The embodiment of the present invention takes the tungsten metal chemical vapor deposition process (CVD W process) as an example. The CVD W process is mainly used to deposit W metal thin films of the 28-14nm technology generation. Special gases in the process gases used by CVD W equipment can include: H ₂ , WF ₆ , 5% B ₂ H ₆ /95% N ₂ , NF ₃ and SiH ₄ . The MSDS (Material Safety Data Sheet) of each gas is as follows:

1.H ₂ :

Hazard overview: Hydrogen is stored in high-pressure cylinders and is a colorless, odorless, flammable compressed gas. When the hydrogen content in the air is >4%, a fire or explosion may occur at any time.

Molecular weight: 2.016.

Boiling point: (1 atmosphere) -423.0F (-252.8C).

Chemical stability: stable.

Incompatibilities: Oxidizing agents.

2.B ₂ H ₆ :

Hazard Overview: Colorless, highly toxic, extremely flammable gas sold mixed with argon, helium, hydrogen or nitrogen that has a sickly sweet smell. Causes death if inhaled or absorbed through skin.

Molecular weight: 27.67.

Boiling point: (1 atmosphere)-135.1F (-92.8C).

Chemical stability: unstable.

Incompatibilities: Oxidizing agents, aluminum, lithium, halides and metal oxides.

3.WF ₆ :

Hazard overview: Toxic, corrosive, non-flammable liquefied gas, which hydrolyzes into corrosive hydrofluoric acid when exposed to moisture. Causes severe chemical burns if inhaled or in contact with skin.

Molecular weight: 297.8.

Boiling point: (1 atmosphere) 62.7F (17.2C).

Chemical stability: stable.

Reactivity: Hydrolysis produces hydrofluoric acid and tungsten oxyfluoride.

4.NF ₃ :

Hazard Summary: Toxic, non-flammable compressed gas. It is an oxidizing agent that causes or promotes the burning of metallic and non-metallic substances.

Molecular weight: 71.0.

Boiling point: (1 atmosphere) -200.3F (-129.1C).

Chemical stability: stable.

Incompatibilities: Oils, greases, hydrocarbons.

5.SiH ₄ :

Hazard Summary: Silane is a colorless, air-reactive gas that can cause asphyxiation. This gas usually burns when in contact with air and emits thick white amorphous silica fumes.

Molecular weight: 32.12.

Boiling point: (1 atmosphere)-169.0F (-111.7C).

Chemical Stability: Spontaneous ignition, will ignite spontaneously when exposed to air.

Incompatibilities: Air, other oxidizing agents and moisture.

It can be seen that in CVD W machines, the design of gas safety is an important part.

Among the special gases used in CVD W machines, H ₂ and SiH ₄ are reducing, and NF ₃ is an oxidant. The chemical bond energy of NF ₃ is relatively weak and not stable enough. Under certain conditions, NF ₃ can chemically react with H ₂ reaction, the chemical equation is:

NF ₃ +3H ₂ =NH ₃ +6HF

NF ₃ can react chemically with SiH ₄ , and the chemical equation is:

8NF ₃ +3SiH ₄ =4N ₂ +3SiF ₄ +12HF

The reaction products SiF ₄ and NH ₃ will cause pollution to the chamber and pipelines. Moreover, one of the reactants, HF, is toxic and corrosive, which will cause hardware damage and safety hazards. Since the concentration of gas is proportional to the space pressure, when the chamber pressure is less than a certain value (such as 10Torr), the gas concentration is low and the gas molecules are inactive, making it difficult for chemical reactions to occur, and electrical interlocking is not required.

When the process chamber pressure reaches a certain value (such as greater than 10Torr), the above chemical reaction must be prevented from occurring. Prevent the NF ₃ corresponding valve and the H ₂ corresponding valve from opening at the same time, and prevent the NF ₃ corresponding valve and the SiH ₄ corresponding valve from opening at the same time.

In the existing technology, the switch of the special gas valve is controlled through software according to the preset interlock conditions. For example, when the chamber upper cover is closed, the pressure difference between the gas cabinet and the environment is greater than the alarm value, the chamber gas cabinet door is closed, etc. When one or more of them are not satisfied, the special gas valve is not allowed to open, which can prevent special gases from leaking into the air; when one or more of the coolant leakage alarms, chamber overtemperature sensor alarms, smoke sensor alarms, etc. are detected, When an abnormality occurs, closing the special gas valve can promptly prohibit the flow of special gas when an abnormal situation occurs to prevent more serious hazards.

Although the interlocking between valves is implemented by a software program in the current design, there is a risk of software failure, and this function needs to be added to the electrical design.

One of the core ideas of the embodiments of the present invention is to provide a new special gas valve control method, which controls the opening and closing of the special gas valve through a circuit, so that when the process chamber pressure is greater than the preset pressure threshold, the first gas corresponding valve and the third gas valve are connected to each other. The valves corresponding to the two gases will not be opened at the same time, and the valves corresponding to the first gas and the third gas will not be opened at the same time, thereby avoiding the risk of software control failure and preventing chemical reactions between special gases from generating by-products and causing damage to the hardware. and personnel injuries, eliminate safety hazards, and protect system and personnel safety.

Referring to Figure 1, there is shown a step flow chart of a special gas safety control method provided by an embodiment of the present invention, which is applied to semiconductor process equipment. The semiconductor process equipment includes: a process chamber and a control circuit; the control circuit includes: A first circuit for controlling the on-off of the valve corresponding to the first gas, a second circuit for controlling on-off of the valve corresponding to the second gas, and a third circuit for controlling the on-off of the valve corresponding to the third gas. The special gas safety control method can be Includes the following steps:

Step 101, obtain the pressure value of the process chamber;

Exemplarily, in the embodiment of the present invention, the control circuit may also include a controller (PLC, Programm Logic Controller) for acquiring the pressure value signal of the process chamber and providing the control signal to the control circuit. The circuit outputs a level signal.

In an embodiment of the present invention, the control circuit further includes: a first relay, a second relay and a third relay, and the special gas safety control method further includes: obtaining the pressure value of the process chamber, and when the pressure value is greater than the preset pressure In the case of a threshold value, the first relay is used to control the second relay to be turned on and the third relay to be turned off, so that the second relay controls the on/off of the first circuit, the second circuit and the third circuit; when the pressure value is less than or equal to the preset When a pressure threshold is set, the first relay is used to control the second relay to be turned off and the third relay to be turned on, so that the third relay controls the on/off of the first circuit, the second circuit and the third circuit.

As an example, in the embodiment of the present invention, the on/off of the second relay and the third relay can be controlled through the first relay; the first circuit, the second circuit and the third circuit can be controlled through the second relay and/or the third relay. The circuit is on and off.

For example, the PLC can transmit a control signal to the first relay to control the corresponding contact point of the first relay to close or open, and then control the corresponding contact point of the second relay and the third relay to close or open. When the pressure value of the process chamber is greater than the preset pressure threshold, the first relay can be used to control the second relay to turn on and the third relay to turn off, so that the second relay controls the first circuit, the second circuit and the third circuit. On and off of the three circuits; when the pressure value is less than or equal to the preset pressure threshold, the first relay can be used to control the second relay to turn off and the third relay to turn on, so that the third relay controls the first circuit and the second circuit. circuit and the third circuit.

Step 102: When the pressure value is greater than the preset pressure threshold, when it is necessary to open the second gas corresponding valve and the third gas corresponding valve, control the first circuit to be disconnected, and control the second circuit and the third circuit to be connected, So that the first gas corresponding valve is closed, the second gas corresponding valve and the third gas corresponding valve are opened.

Exemplarily, the control circuit may include a first circuit, a second circuit, and a third circuit. Among them, the first circuit can control the on-off of the first gas valve, the second circuit can control the on-off of the second gas valve, and the third circuit can control the on-off of the third gas valve.

For example, if the pressure value of the process chamber is greater than the preset pressure threshold, it means that the concentration of special gases in the process chamber is high, and the special gases are prone to react with each other and cause pollution to the process chamber and pipelines. When it is necessary to open the second gas valve and the third gas valve, the first circuit can be controlled to be disconnected, and the second circuit and the third circuit can be controlled to be connected, so that the first gas valve is closed and the second gas valve is connected to the third gas valve. The gas valve opens.

In one embodiment of the present invention, the first relay includes a first pair of normally closed contacts and a first pair of normally open contacts; when the pressure value is greater than a preset pressure threshold, the first pair is controlled by the first relay The normally open contact remains open to control the third relay to open, and the first pair of normally closed contacts is controlled to remain closed through the first relay to control the second relay to open, so that the second relay controls the first circuit, the second circuit and the third circuit.

Illustratively, the first relay may include a first pair of normally closed contacts and a first pair of normally open contacts. When the pressure value of the process chamber is greater than the preset pressure threshold, the PLC can output a low-level signal to the first relay. The first relay receives the low-level signal and can control the first pair of normally open contacts to remain disconnected. So that the third relay is disconnected, and the first pair of normally closed contacts can be controlled to remain closed, so that the second relay is connected, and the second relay can control the first circuit, the second circuit and the third circuit in the connected state. The switching of three circuits.

For example, Figure 2 is a schematic diagram of a special gas safety control provided by an embodiment of the present invention. KA01 is the first relay, KA02 is the second relay, and KA03 is the third relay; the first relay KA01 includes a first pair of normal relays. The closed contacts 11 and 12 are used to control the on-off of the second relay KA02. The first relay KA01 also includes a first pair of normally open contacts 13 and 14, used to control the on-off of the third relay KA03. When the process chamber pressure value is greater than the preset pressure threshold (for example, 10Torr), the PLC outputs a low level to the 0 contact of the first relay KA01. At this time, the first pair of normally open contacts 13 and 13 of the first relay KA01 14 is open and the first pair of normally closed contacts 11 and 12 are closed, then the third relay KA03 is open and the second relay KA02 is connected. At this time, the second relay KA02 controls the first circuit, the second circuit and the third circuit. On and off.

In one embodiment of the present invention, the second relay includes a second pair of normally closed contacts, a second pair of normally open contacts and a third pair of normally open contacts; the second pair of normally closed contacts is controlled by the second relay Maintain the closed state, control the first circuit to be connected, and control the second pair of normally open contacts and the third pair of normally open contacts to maintain the disconnected state through the second relay, respectively control the second circuit and the third circuit to disconnect, so as to The first gas corresponding valve is closed, the second gas corresponding valve and the third gas corresponding valve are opened.

Illustratively, the second relay may include a second pair of normally closed contacts, a second pair of normally open contacts, and a third pair of normally open contacts. When the pressure value of the process chamber is greater than the preset pressure threshold, the first relay controls the second relay to turn on and the third relay to turn off. The second relay can maintain the closed state by controlling the second pair of normally closed contacts to control the third relay. One circuit is connected, and the second pair of normally open contacts and the third pair of normally open contacts are controlled to remain disconnected, and the second circuit and the third circuit are respectively controlled to be disconnected, so that the first gas valve is closed and the second gas valve is closed. valve and third gas valve open.

In an embodiment of the present invention, the first gas is NF ₃ , the second gas is H ₂ , and the third gas is SiH ₄ .

As an example, the first gas may be NF ₃ , the second gas may be H ₂ , and the third gas may be SiH ₄ .

For example, as shown in Figure 2 is a schematic diagram of a special gas safety control provided by an embodiment of the present invention. The second relay KA02 includes a second pair of normally closed contacts 21 and 22, which can be controlled by controlling the on-off of the first circuit. On and off of the NF3 valve; the second relay KA02 also includes a second pair of normally open contacts 23 and 24, which can control the on and off of the H2 valve by controlling the on and off of the second circuit; the second relay KA02 also includes a third pair of normally open contacts. The opening contacts 25 and 26 can control the opening and closing of the SiH4 valve by controlling the opening and closing of the third circuit. When the process chamber pressure is greater than 10Torr, the second relay KA02 controls the on and off of the first circuit, the second circuit and the third circuit. When the H ₂ and SiH ₄ valves need to be opened, the PLC's NF ₃ and The switching signal of H ₂ and SiH ₄ valve opening can output a high level signal. The second relay KA02 receives the high level signal and can control the second pair of normally open contacts 23, 24 and the third pair of normally open contacts of the second relay KA02. Contacts 25 and 26 are closed, and the second pair of normally closed contacts 21 and 22 are open. At this time, the control The circuit of the H2 valve and the SiH ₄ valve is connected, the circuit controlling the NF ₃ valve is disconnected, the _H2 valve and the SiH ₄ valve are allowed to open, and the NF ₃ valve is closed.

Step 103: When it is necessary to open the valve corresponding to the first gas, control the first circuit to be turned on, and control the second circuit and the third circuit to be turned off, so that the first gas corresponding valve is opened, the second gas corresponding valve and the third gas are connected. The corresponding valve is closed.

For example, when the pressure value of the process chamber is greater than the preset pressure threshold, when the first gas valve needs to be opened, the first circuit can be controlled to be turned on, and the second circuit and the third circuit can be controlled to be turned off, The first gas valve is opened, and the second gas valve and the third gas valve are closed, thereby realizing that the first gas and the second gas valve are not opened at the same time, and the first gas and the third gas valve are not opened at the same time.

In one embodiment of the present invention, the second pair of normally closed contacts is controlled to remain closed through the second relay, the first circuit is controlled to be turned on, and the second pair of normally open contacts and the third pair are controlled through the second relay. The normally open contact remains in a disconnected state and controls the disconnection of the second circuit and the third circuit respectively, so that the first gas corresponding valve is opened, the second gas corresponding valve and the third gas corresponding valve are closed.

For example, when the second relay is turned on, when the NF ₃ valve needs to be opened, the second relay can control the second pair of normally closed contacts to remain closed to make the first circuit turn on, and control the second Keep the normally open contact and the third pair of normally open contacts in a disconnected state to disconnect the second circuit and the third circuit respectively, thereby controlling the NF ₃ valve to open, the H ₂ valve and the SiH ₄ valve to close.

For example, when the second relay KA02 is turned on, when the NF3 valve needs to be opened, the switching signal of the PLC's NF ₃ and H ₂ and SiH ₄ valve openings can output a low-level signal, and the second relay KA02 receives the low-level signal. The signal can control the second pair of normally open contacts 23, 24 and the third pair of normally open contacts 25, 26 of the second relay KA02 to open, and the second pair of normally closed contacts 21, 22 to close. At this time, control H ₂ The circuit between the valve and the SiH ₄ valve is disconnected, the circuit controlling the NF ₃ valve is connected, the H ₂ valve and the SiH ₄ valve are closed, and the NF ₃ valve is allowed to open.

In one embodiment of the present invention, when the pressure value is less than or equal to the preset pressure threshold Under the control, the first circuit, the second circuit and the third circuit are controlled to be connected, so that the first gas corresponding valve, the second gas corresponding valve and the third gas corresponding valve are opened.

For example, if the pressure value of the process chamber is less than or equal to the preset pressure threshold, it means that the concentration of the special gas in the process chamber is low, and the gas molecules are inactive and are not prone to chemical reactions. There is no need for electrical interlocking. You can pass The first circuit, the second circuit and the third circuit are controlled to be connected to open the NF ₃ valve, H ₂ valve and SiH ₄ valve.

In one embodiment of the present invention, when the pressure value is less than or equal to the preset pressure threshold, the first pair of normally closed contacts is controlled to open through the first relay, the second relay is controlled to open, and the first pair of normally closed contacts is controlled through the first relay. The first pair of normally open contacts are controlled to be closed, and the third relay is controlled to be turned on, so that the third relay controls the opening and closing of the first circuit, the second circuit and the third circuit.

For example, when the pressure value of the process chamber is less than or equal to the preset pressure threshold, the PLC can output a high-level signal to the first relay, and the first relay receives the high-level signal and can control the first pair of normally closed The contacts open to disconnect the second relay, and the first pair of normally open contacts are controlled to close to connect the third relay, thereby controlling the third relay to control the conduction of the first circuit, the second circuit and the third circuit. Break.

For example, when the pressure value of the process chamber is less than or equal to 10Torr, the PLC can output a high-level signal to the first relay KA01. The first relay KA01 receives the high-level signal and can control the first pair of normally closed contacts 11 and 12 to open. , so that the second relay KA02 is turned off, and the first pair of normally open contacts 13 and 14 are controlled to close, so that the third relay KA03 is turned on, and the third relay KA03 controls the first circuit, the second circuit and the third circuit On and off.

In one embodiment of the present invention, the third relay controls the closing of the fourth pair of normally open contacts, the fifth pair of normally open contacts and the sixth pair of normally open contacts, and controls the first circuit, the second circuit and the third pair of normally open contacts. The three circuits are connected to open the first gas corresponding valve, the second gas corresponding valve and the third gas corresponding valve.

For example, when the third relay is turned on, the third relay can control the fourth pair of normally open contacts, the fifth pair of normally open contacts, and the sixth pair of normally open contacts to close, so that the first circuit, Second circuit It is connected to the third circuit to control the opening of the valve corresponding to NF ₃ , the valve corresponding to H ₂ and the valve corresponding to SiH ₄ .

For example, Figure 2 is a schematic diagram of a special gas safety control provided by an embodiment of the present invention.

The third relay KA03 includes a fourth pair of normally open contacts 31 and 32, which can control the on and off of the NF3 valve by controlling the on and off of the first circuit, and a fifth pair of normally open contacts 33 and 34, which can control the on and off of the second circuit. The on-off of the circuit is used to control the on-off of the H2 valve, including the sixth pair of normally open contacts 35 and 36. The on-off of the third circuit can be controlled to control the on-off of the SiH4 valve.

When the process chamber pressure is less than 10Torr, the PLC can output a high level signal to the 0 contact of the first relay KA01. At this time, the first pair of normally open contacts 13 and 14 of the first relay KA01 are closed, and the first pair of normally open contacts 13 and 14 of the first relay KA01 are closed. The first pair of normally closed contacts 11 and 12 are disconnected to ensure that the second relay KA02 will not get a high level, then the second relay KA02 is disconnected, and the 0 contact of the third relay KA03 gets a 24V high level signal. At this time The circuit is controlled by the third relay KA03. The fourth pair of normally open contacts 31, 32, the fifth pair of normally open contacts 33, 34 and the sixth pair of normally open contacts 35, 36 of the third relay KA03 are closed, then the H ₂ , NF ₃ and SiH ₄ valves are opened. The signal is turned on and the valve opens. At this time, when the chamber pressure is less than 10Torr, the H ₂ , NF ₃ and SiH ₄ valves are not electrically mutually exclusive.

In the embodiment of the present invention, the pressure value of the process chamber is obtained; when the pressure value is greater than the preset pressure threshold, when the second gas corresponding valve and the third gas corresponding valve need to be opened, the first circuit is controlled to be disconnected, Control the second circuit and the third circuit to be connected so that the first gas corresponding valve is closed, the second gas corresponding valve and the third gas corresponding valve are opened; when it is necessary to open the first gas corresponding valve, control the first circuit to be connected, and controlling the disconnection of the second circuit and the third circuit to open the first gas corresponding valve, and close the second gas corresponding valve and the third gas corresponding valve. Through the control of the above-mentioned first circuit, second circuit and third circuit, the valve interlock function can be realized, that is, the valve interlock is added to the circuit design, so that when the process chamber pressure reaches the preset threshold, the first gas corresponding valve and The valve corresponding to the second gas will not be opened at the same time, and the valve corresponding to the first gas and the valve corresponding to the third gas will not be opened at the same time, thus avoiding the risk of software control failure and preventing chemical occurrence between special gases. The reaction generates by-products, causing damage to hardware and injuries to personnel, eliminating potential safety hazards and protecting system and personnel safety.

It should be noted that for the sake of simple description, the method embodiments are expressed as a series of action combinations. However, those skilled in the art should know that the embodiments of the present invention are not limited by the described action sequence because According to embodiments of the present invention, certain steps may be performed in other orders or simultaneously. Secondly, those skilled in the art should also know that the embodiments described in the specification are preferred embodiments, and the actions involved are not necessarily necessary for the embodiments of the present invention.

A control circuit provided by an embodiment of the present invention is applied to semiconductor process equipment. The control circuit includes: a first circuit for controlling the on-off of the valve corresponding to the first gas, and a third circuit for controlling the on-off of the valve corresponding to the second gas. The second circuit and the third circuit for controlling the on-off of the third gas corresponding valve also include a first relay, a second relay and a third relay. When the pressure value is greater than the preset pressure threshold, the first relay is used For controlling the second relay to be turned on and the third relay to be turned off, so that the second relay controls the on/off of the first circuit, the second circuit and the third circuit; when the pressure value is less than or equal to the preset pressure threshold, the third relay One relay is also used to control the second relay to turn off and the third relay to turn on, so that the third relay controls the on/off of the first circuit, the second circuit and the third circuit.

For example, as shown in Figure 2, KA01 is the first relay, KA02 is the second relay, and KA03 is the third relay; the first relay KA01 includes a first pair of normally closed contacts 11 and 12, which are used to control the second relay KA02. On and off, the first relay KA01 also includes the first pair of normally open contacts 13 and 14, Used to control the on and off of the third relay KA03. When the process chamber pressure value is greater than the preset pressure threshold (for example, 10Torr), the PLC outputs a low level to the 0 contact of the first relay KA01. At this time, the first pair of normally open contacts 13 and 13 of the first relay KA01 14 is open and the first pair of normally closed contacts 11 and 12 are closed, then the third relay KA03 is open and the second relay KA02 is connected. At this time, the second relay KA02 controls the first circuit, the second circuit and the third circuit. On and off.

For example, as shown in Figure 2 , taking the first gas as NF ₃ , the second gas as H ₂ , and the third gas as SiH ₄ as an example, the second relay KA02 includes a second pair of normally closed contacts 21 and 22 , the on-off of the NF ₃ valve can be controlled by controlling the on-off of the first circuit; the second relay KA02 also includes a second pair of normally open contacts 23, 24, which can control the on-off of the H2 valve by controlling the on-off of the second circuit. On and off; the second relay KA02 also includes a third pair of normally open contacts 25 and 26, which can control the on and off of the SiH ₄ valve by controlling the on and off of the third circuit. When the process chamber pressure is greater than 10Torr, the second relay KA02 controls the on and off of the first circuit, the second circuit and the third circuit. When the H ₂ and SiH ₄ valves need to be opened, the NF ₃ of the PLC and The switching signal of H ₂ and SiH ₄ valve opening can output a high level signal, and the second relay KA02 receives the high level signal and can control the second relay KA02 The second pair of normally open contacts 23, 24 and the third pair of normally open contacts 25, 26 are closed, and the second pair of normally closed contacts 21, 22 are disconnected. At this time, the circuits controlling the H ₂ valve and the SiH ₄ valve are connected. Pass, the circuit controlling the NF ₃ valve is disconnected, the H ₂ valve and SiH ₄ valve are allowed to open, and the NF ₃ valve is closed.

For example, when the third relay is turned on, the third relay can control the fourth pair of normally open contacts, the fifth pair of normally open contacts, and the sixth pair of normally open contacts to close, so that the first circuit, The second circuit and the third circuit are connected, thereby controlling the NF ₃ corresponding valve, the H ₂ corresponding valve and the SiH ₄ corresponding valve to open.

For example, as shown in Figure 2, the third relay KA03 includes a fourth pair of normally open contacts 31, 32, which can The on-off of the NF ₃ valve can be controlled by controlling the on-off of the first circuit, including the fifth pair of normally open contacts 33, 34, and the on-off of the _H2 valve can be controlled by controlling the on-off of the second circuit, including the fifth pair of normally open contacts 33 and 34. Six pairs of normally open contacts 35 and 36 can control the opening and closing of the SiH ₄ valve by controlling the opening and closing of the third circuit.

As for the device embodiment, since it is basically similar to the method embodiment, the description is relatively simple. For relevant details, please refer to the partial description of the method embodiment.

Referring to Figure 3, there is shown a structural block diagram of a semiconductor process equipment provided by an embodiment of the present invention. The above-mentioned semiconductor process equipment 301 includes: a process chamber and a control circuit; the above-mentioned control circuit includes a valve for controlling the first gas corresponding valve on and off. The first circuit, the second circuit for controlling the on-off of the valve corresponding to the second gas, and the third circuit for controlling the on-off of the valve corresponding to the third gas, the above-mentioned semiconductor process equipment also include:

The controller 3011 is used to obtain the pressure value of the above-mentioned process chamber; when the above-mentioned pressure value is greater than the preset pressure threshold, when it is necessary to open the above-mentioned second gas corresponding valve and the above-mentioned third gas corresponding valve, control the above-mentioned first gas corresponding valve. The circuit is disconnected, and the above-mentioned second circuit and the above-mentioned third circuit are controlled to be connected, so that the above-mentioned first gas corresponding valve is closed, the above-mentioned second gas corresponding valve and the above-mentioned third gas corresponding valve are opened; when it is necessary to open the above-mentioned first gas When corresponding to the valve, the above-mentioned first circuit is controlled to be connected, and the above-mentioned second circuit and the above-mentioned third circuit are controlled to be disconnected, so that the above-mentioned first gas corresponding valve is opened, the above-mentioned second gas corresponding valve and the above-mentioned third gas corresponding valve are closed. .

In an optional embodiment of the present invention, the above-mentioned controller is also used to control the above-mentioned first circuit, the above-mentioned second circuit and the above-mentioned third circuit to turn on when the pressure value is less than or equal to the preset pressure threshold. , so that the first gas corresponding valve, the second gas corresponding valve and the third gas corresponding valve are opened.

In an optional embodiment of the present invention, the above-mentioned circuit also includes: a first relay, a second relay and a third relay. The above-mentioned controller is also configured to, when the above-mentioned pressure value is greater than the preset pressure threshold, use the above-mentioned The first relay controls the above-mentioned second relay to be on and the above-mentioned third relay to be off, so that the above-mentioned second relay controls the on-off of the above-mentioned first circuit, the above-mentioned second circuit and the above-mentioned third circuit; when the above-mentioned pressure value is less than or equal to When the pressure threshold is preset, the first relay controls the second relay to turn off and the third relay to turn on, so that the third relay controls the first circuit, the second circuit and the third circuit. On and off.

In an optional embodiment of the present invention, the above-mentioned first relay includes a first pair of normally closed contacts and a first pair of normally open contacts; and the above-mentioned controller is used when the above-mentioned pressure value is greater than a preset pressure threshold. , controlling the first pair of normally open contacts to maintain an open state through the first relay, controlling the third relay to open, and controlling the first pair of normally closed contacts to maintain a closed state through the first relay, controlling the third The two relays are turned on, so that the second relay controls the on-off of the first circuit, the second circuit and the third circuit.

In an optional embodiment of the present invention, the above-mentioned second relay includes a second pair of normally closed contacts, a second pair of normally open contacts and a third pair of normally open contacts; the above-mentioned controller is configured to pass the above-mentioned second pair of normally open contacts. The relay controls the opening of the above-mentioned second pair of normally closed contacts, controls the opening of the above-mentioned first circuit, and controls the closing of the above-mentioned second pair of normally open contacts and the above-mentioned third pair of normally open contacts through the above-mentioned second relay, controlling the above-mentioned third pair of normally open contacts to close. The second circuit and the above-mentioned third circuit are connected, so that the above-mentioned first gas corresponding valve is closed, the above-mentioned second gas corresponding valve and the above-mentioned third gas corresponding valve are opened.

In an optional embodiment of the present invention, the above-mentioned controller is used to control the above-mentioned second pair of normally closed contacts to maintain a closed state through the above-mentioned second relay, control the above-mentioned first circuit to be turned on, and through the above-mentioned second relay The above-mentioned second relay controls the above-mentioned second pair of normally open contacts and the above-mentioned third pair of normally open contacts to remain disconnected, and controls the above-mentioned second circuit and the above-mentioned third circuit to disconnect, so that the above-mentioned first gas corresponding valve opens, The above-mentioned second gas corresponding valve and the above-mentioned third gas corresponding valve are closed.

In an optional embodiment of the present invention, the above-mentioned controller is used to control the above-mentioned first pair of normally closed contacts to open through the above-mentioned first relay when the above-mentioned pressure value is less than or equal to the preset pressure threshold, and controls the above-mentioned The second relay is turned off, and the first pair of normally open contacts are controlled to close through the first relay, and the third relay is controlled to be turned on, so that the third relay controls the first circuit, the second circuit and the third circuit. The switching of three circuits.

In an optional embodiment of the present invention, the above-mentioned third relay includes a fourth pair of normally open contacts, a fifth pair of normally open contacts and a sixth pair of normally open contacts; the above-mentioned controller is configured to pass the above-mentioned third pair of normally open contacts. The relay controls the fourth pair of normally open contacts, the above fifth pair of normally open contacts, and the above sixth pair of normally open contacts to close, and controls the above first circuit, the above second circuit, and the above third circuit to connect, so that the above The first gas corresponding valve, the second gas corresponding valve and the third gas corresponding valve are opened.

In an optional embodiment of the present invention, the first gas is NF3, the second gas is H2, and the third gas is SiH4.

Figure 4 is a structural block diagram of a special gas safety control device provided in an embodiment of the present invention. As shown in Figure 4, the special gas safety control device is used to control a control circuit in a semiconductor process equipment and includes: at least one Processor 101, memory 102, at least one I/O interface 103. At least one program is stored on the memory 102. When the at least one program is executed by the at least one processor 101, the at least one processor implements the steps in any of the methods in the above embodiments; at least one I/O interface 103 is connected Between the processor 101 and the memory 102, it is configured to realize information exchange between the processor and the memory.

Among them, the processor 101 is a device with data processing capabilities, including but not limited to a central processing unit processor (CPU), etc.; the memory 102 is a device with data storage capabilities, including but not limited to random access memory (RAM, more specifically such as SDRAM, DDR, etc.), read-only memory (ROM), power-erasable programmable memory, etc. Read-only memory (EEPROM), flash memory (FLASH); I/O interface (read-write interface) 103 is connected between the processor 101 and the memory 102, and can realize information interaction between the processor 101 and the memory 102, including but not limited to data Bus, etc.

In some embodiments, processor 101, memory 102, and I/O interface 103 are connected to each other and, in turn, to other components of the computing device via bus 104.

In some embodiments, the processor 101 includes an FPGA.

According to embodiments of the present disclosure, a computer-readable medium is also provided. The computer readable medium stores a computer program, wherein when the program is executed by the processor, the steps in any of the test wafer scheduling methods in the above embodiments are implemented.

In particular, according to embodiments of the present disclosure, the processes described above with reference to the flowcharts may be implemented as computer software programs. For example, embodiments of the present disclosure include a computer program product including a computer program carried on a machine-readable medium, the computer program containing program code for performing the method illustrated in the flowchart. In such embodiments, the computer program may be downloaded and installed from the network via the communications component, and/or installed from removable media. When the computer program is executed by a central processing unit (CPU), the above-described functions defined in the system of the present disclosure are performed.

It should be noted that the computer-readable medium shown in the present disclosure may be a computer-readable signal medium or a computer-readable storage medium, or any combination of the above two. The computer-readable storage medium may be, for example, but is not limited to, an electrical, magnetic, optical, electromagnetic, infrared, or semiconductor system, apparatus or device, or any combination thereof. More specific examples of computer readable storage media may include, but are not limited to: an electrical connection having one or more wires, a portable computer disk, a hard drive, random access memory (RAM), read only memory (ROM), removable Programmed read-only memory (EPROM or flash memory), fiber optics, portable compact disk read-only memory (CD-ROM), optical storage device, magnetic storage device, or any suitable combination of the above. In this disclosure, computer readable A storage medium may be any tangible medium that contains or stores a program for use by or in connection with an instruction execution system, apparatus, or device. In the present disclosure, a computer-readable signal medium may include a data signal propagated in baseband or as part of a carrier wave, carrying computer-readable program code therein. Such propagated data signals may take many forms, including but not limited to electromagnetic signals, optical signals, or any suitable combination of the above. A computer-readable signal medium may also be any computer-readable medium other than a computer-readable storage medium that can send, propagate, or transmit a program for use by or in connection with an instruction execution system, apparatus, or device . Program code embodied on a computer-readable medium may be transmitted using any suitable medium, including but not limited to: wireless, wire, optical cable, RF, etc., or any suitable combination of the foregoing.

The flowcharts and block diagrams in the figures illustrate the architecture, functionality, and operations of possible implementations of systems, methods, and computer program products according to various embodiments of the present disclosure. In this regard, each block in the flowchart or block diagrams may represent a module, segment, or portion of code that contains one or more components that implement the specified logical function(s). executable instructions. It should also be noted that, in some alternative implementations, the functions noted in the block may occur out of the order noted in the figures. For example, two blocks shown one after another may actually execute substantially in parallel, or they may sometimes execute in the reverse order, depending on the functionality involved. It will also be noted that each block of the block diagram and/or flowchart illustration, and combinations of blocks in the block diagram and/or flowchart illustration, can be implemented by special purpose hardware-based systems that perform the specified functions or operations. , or can be implemented using a combination of specialized hardware and computer instructions.

Each embodiment in this specification is described in a progressive manner. Each embodiment focuses on its differences from other embodiments. The same and similar parts between the various embodiments can be referred to each other.

It should be understood by those skilled in the art that embodiments of the present invention may be provided as methods, devices, or computer program products. Therefore, embodiments of the present invention may adopt completely hardware embodiments, completely In the form of a software embodiment, or an embodiment combining software and hardware aspects. Furthermore, embodiments of the invention may take the form of a computer program product embodied on one or more computer-usable storage media (including, but not limited to, disk storage, CD-ROM, optical storage, etc.) having computer-usable program code embodied therein.

Embodiments of the invention are described with reference to flowcharts and/or block diagrams of methods, terminal devices (systems), and computer program products according to embodiments of the invention. It will be understood that each process and/or block in the flowchart illustrations and/or block diagrams, and combinations of processes and/or blocks in the flowchart illustrations and/or block diagrams, can be implemented by computer program instructions. These computer program instructions may be provided to a processor of a general-purpose computer, special-purpose computer, embedded processor, or other programmable data processing terminal device to produce a machine such that the instructions are executed by the processor of the computer or other programmable data processing terminal device. Means are generated for implementing the functions specified in the process or processes of the flowchart diagrams and/or the block or blocks of the block diagrams.

These computer program instructions may also be stored in a computer-readable memory that causes a computer or other programmable data processing terminal equipment to operate in a particular manner, such that the instructions stored in the computer-readable memory produce an article of manufacture including the instruction means, the The instruction means implements the functions specified in a process or processes of the flowchart and/or a block or blocks of the block diagram.

These computer program instructions can also be loaded onto a computer or other programmable data processing terminal equipment, so that a series of operating steps are performed on the computer or other programmable terminal equipment to produce computer-implemented processing, thereby causing the computer or other programmable terminal equipment to perform a computer-implemented process. The instructions executed on provide steps for implementing the functions specified in a process or processes of the flow diagrams and/or a block or blocks of the block diagrams.

Although preferred embodiments of the embodiments of the present invention have been described, those skilled in the art will be able to make additional changes and modifications to these embodiments once the basic inventive concepts are apparent. Therefore, it is intended that the appended claims be construed to include the preferred embodiments and all changes and modifications that fall within the scope of embodiments of the invention.

Finally, it should be noted that in this article, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply that these entities or any such actual relationship or sequence between operations. Furthermore, the terms "comprises," "comprises," or any other variation thereof are intended to cover a non-exclusive inclusion such that a process, method, article, or end device that includes a list of elements includes not only those elements, but also elements not expressly listed or other elements inherent to such process, method, article or terminal equipment. Without further limitation, an element defined by the statement "comprises a..." does not exclude the presence of additional identical elements in the process, method, article, or terminal device that includes the element.

The above is a detailed introduction to a special gas safety control method and a semiconductor process equipment provided by the present invention. Specific examples are used in this article to illustrate the principles and implementation modes of the present invention. The description of the above embodiments is only for reference. To help understand the method and its core idea of the present invention; at the same time, for those of ordinary skill in the art, there will be changes in the specific implementation and application scope based on the idea of the present invention. In summary, the content of this specification does not It should be understood as a limitation of the invention.

Claims

A special gas safety control method, characterized in that it is applied to semiconductor process equipment. The semiconductor process equipment includes: a process chamber and a control circuit; the control circuit includes a first valve for controlling the on-off of the corresponding valve of the first gas. circuit, a second circuit for controlling the on-off of the valve corresponding to the second gas, and a third circuit for controlling the on-off of the valve corresponding to the third gas. The method includes:

Obtain the pressure value of the process chamber;

When the pressure value is greater than the preset pressure threshold, when the second gas corresponding valve and the third gas corresponding valve need to be opened, the first circuit is controlled to be disconnected, and the second circuit is controlled to be opened. Connect with the third circuit to close the first gas corresponding valve and open the second gas corresponding valve and the third gas corresponding valve;

When it is necessary to open the first gas corresponding valve, the first circuit is controlled to be turned on, and the second circuit and the third circuit are controlled to be turned off, so that the first gas corresponding valve is opened and the The second gas corresponding valve and the third gas corresponding valve are closed.
The method according to claim 1, further comprising:

When the pressure value is less than or equal to the preset pressure threshold, the first circuit, the second circuit and the third circuit are controlled to be turned on so that the first gas corresponds to the valve, the The second gas corresponding valve and the third gas corresponding valve are opened.
The method according to claim 2, wherein the control circuit further includes: a first relay, a second relay and a third relay, and the method further includes:

When the pressure value is greater than the preset pressure threshold, the second relay is controlled to be turned on and the third relay to be turned off through the first relay, so that the second relay controls the third relay. On and off of a circuit, the second circuit and the third circuit;

When the pressure value is less than or equal to the preset pressure threshold, the first relay is used to control the second relay to turn off and the third relay to turn on, so that the third relay The controller controls the on/off of the first circuit, the second circuit and the third circuit.
The method of claim 3, wherein the first relay includes a first pair of normally closed contacts and a first pair of normally open contacts;

When the pressure value is greater than the preset pressure threshold, the first relay is used to control the second relay to be turned on and the third relay to be turned off, so that the second relay controls the third relay. The switching of a circuit, the second circuit and the third circuit includes:

When the pressure value is greater than the preset pressure threshold, the first pair of normally open contacts is controlled by the first relay to remain in an open state, so as to control the third relay to open, and through the The first relay controls the first pair of normally closed contacts to remain in a closed state to control the second relay to turn on, so that the second relay controls the first circuit, the second circuit and the The third circuit is switched on and off.
The method of claim 4, wherein the second relay includes a second pair of normally closed contacts, a second pair of normally open contacts, and a third pair of normally open contacts;

When the pressure value is greater than the preset pressure threshold, when the second gas corresponding valve and the third gas corresponding valve need to be opened, the first circuit is controlled to be disconnected, and the third gas corresponding valve is controlled to be opened. The second circuit and the third circuit are connected to close the first gas corresponding valve and open the second gas corresponding valve and the third gas corresponding valve, including:

The second pair of normally closed contacts is controlled to open through the second relay, the first circuit is controlled to open, and the second pair of normally open contacts and the third pair of normally open contacts are controlled through the second relay. When the normally open contact is closed, the second circuit and the third circuit are respectively controlled to be connected, so that the first gas corresponding valve is closed, the second gas corresponding valve and the third gas corresponding valve are opened. .
The method according to claim 5, characterized in that when the first gas corresponding valve needs to be opened, the first circuit is controlled to be turned on, and the second circuit and the third circuit are controlled to be turned off. open, so that the first gas corresponding valve opens, the second gas corresponding valve and The third gas corresponding valve is closed, including:

The second pair of normally closed contacts is controlled to remain closed through the second relay, the first circuit is controlled to be turned on, and the second pair of normally open contacts and the third pair of normally open contacts are controlled through the second relay. Three pairs of normally open contacts remain in a disconnected state, respectively controlling the disconnection of the second circuit and the third circuit, so that the first gas corresponding valve opens, the second gas corresponding valve and the third gas corresponding valve open. The gas corresponding valve is closed.
The method of claim 4, wherein when the pressure value is less than or equal to the preset pressure threshold, the first relay is used to control the second relay to open and the The third relay is turned on, so that the third relay controls the on-off of the first circuit, the second circuit and the third circuit, including:

When the pressure value is less than or equal to the preset pressure threshold, the first pair of normally closed contacts is controlled to open through the first relay, the second relay is controlled to open, and the first pair of normally closed contacts is controlled to open through the third relay. A relay controls the first pair of normally open contacts to close and controls the third relay to turn on, so that the third relay controls the conduction of the first circuit, the second circuit and the third circuit. Break.
The method of claim 7, wherein the third relay includes a fourth pair of normally open contacts, a fifth pair of normally open contacts, and a sixth pair of normally open contacts;

When the pressure value is less than or equal to the preset pressure threshold, the first circuit, the second circuit and the third circuit are controlled to be turned on so that the first gas corresponds to the valve , the second gas corresponding valve and the third gas corresponding valve are opened, including:

The third relay controls the fourth pair of normally open contacts, the fifth pair of normally open contacts and the sixth pair of normally open contacts to close, and controls the first circuit and the second circuit and the third circuit to open the first gas corresponding valve, the second gas corresponding valve and the third gas corresponding valve.
The method of claim 1, wherein the first gas is NF3 , the second gas is H2 , and the third gas is SiH4 .
A control circuit applied to semiconductor process equipment, characterized in that the control circuit includes: a first circuit for controlling the on-off of the valve corresponding to the first gas, and a second circuit for controlling the on-off of the valve corresponding to the second gas. circuit and a third circuit used to control the on-off of the third gas corresponding valve,

It also includes a first relay, a second relay and a third relay. When the pressure value is greater than the preset pressure threshold, the first relay is used to control the second relay to turn on and the third relay to turn on. The relay is turned off, so that the second relay controls the on-off of the first circuit, the second circuit and the third circuit; when the pressure value is less than or equal to the preset pressure threshold , the first relay is also used to control the second relay to turn off and the third relay to turn on, so that the third relay controls the first circuit, the second circuit and the third The circuit is on and off.
The control circuit according to claim 10, wherein the first relay includes a first pair of normally closed contacts and a first pair of normally open contacts; when the pressure value is greater than a preset pressure threshold, The first relay is used to control the first pair of normally open contacts to remain open, control the third relay to open, and control the first pair of normally closed contacts to remain closed through the first relay. state, controlling the second relay to be turned on, so that the second relay controls the on/off of the first circuit, the second circuit and the third circuit; and/or,

The second relay includes a second pair of normally closed contacts, a second pair of normally open contacts and a third pair of normally open contacts; the second relay is used to control the opening of the second pair of normally closed contacts, To control the opening of the first circuit, the second relay is also used to control the closing of the second pair of normally open contacts and the third pair of normally open contacts to respectively control the second circuit and the The third circuit is connected so that the first gas corresponding valve is closed, the second gas corresponding valve and the third gas corresponding valve are opened;; and/or,

The third relay includes a fourth pair of normally open contacts, a fifth pair of normally open contacts and a sixth pair of normally open contacts. point; the third relay is used to control the closing of the fourth pair of normally open contacts, the fifth pair of normally open contacts and the sixth pair of normally open contacts to control the first circuit, the The second circuit and the third circuit are connected to open the first gas corresponding valve, the second gas corresponding valve and the third gas corresponding valve.
A semiconductor process equipment, characterized in that the semiconductor process equipment includes: a process chamber and a control circuit; the control circuit includes a first circuit for controlling the on/off of a valve corresponding to the first gas, and a first circuit for controlling the second gas. A second circuit corresponding to the on-off valve and a third circuit for controlling the on-off corresponding valve of the third gas. The semiconductor process equipment also includes:

A controller, configured to obtain the pressure value of the process chamber; when the pressure value is greater than the preset pressure threshold, when it is necessary to open the second gas corresponding valve and the third gas corresponding valve, control The first circuit is disconnected, and the second circuit and the third circuit are controlled to be connected so that the first gas corresponding valve is closed, the second gas corresponding valve and the third gas corresponding valve are closed. Open; when it is necessary to open the first gas corresponding valve, control the first circuit to be turned on, and control the second circuit and the third circuit to be turned off, so that the first gas corresponding valve is opened, The second gas corresponding valve and the third gas corresponding valve are closed.
A special gas safety control device, characterized in that it is used to control a control circuit in a semiconductor process equipment. The special gas safety control device includes at least one processor and at least one memory, and at least one memory is stored in the memory. program;

When the at least one program is executed by the at least one processor, the at least one processor is caused to implement the method according to any one of claims 1-9.
A computer-readable storage medium for semiconductor processing equipment, on which a computer program is stored, characterized in that when the program is executed by a processor, the method according to any one of claims 1-9 is implemented.