WO2023283869A1 - 半导体发光元件和发光装置 - Google Patents
半导体发光元件和发光装置 Download PDFInfo
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- WO2023283869A1 WO2023283869A1 PCT/CN2021/106427 CN2021106427W WO2023283869A1 WO 2023283869 A1 WO2023283869 A1 WO 2023283869A1 CN 2021106427 W CN2021106427 W CN 2021106427W WO 2023283869 A1 WO2023283869 A1 WO 2023283869A1
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- layer
- semiconductor
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- semiconductor layer
- emitting element
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 136
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims abstract description 27
- 239000001257 hydrogen Substances 0.000 claims abstract description 27
- 229910052739 hydrogen Inorganic materials 0.000 claims abstract description 27
- 239000012535 impurity Substances 0.000 claims abstract description 17
- 239000010410 layer Substances 0.000 description 161
- 239000000758 substrate Substances 0.000 description 15
- 230000004888 barrier function Effects 0.000 description 13
- OUCSEDFVYPBLLF-KAYWLYCHSA-N 5-(4-fluorophenyl)-1-[2-[(2r,4r)-4-hydroxy-6-oxooxan-2-yl]ethyl]-n,4-diphenyl-2-propan-2-ylpyrrole-3-carboxamide Chemical compound C=1C=CC=CC=1C1=C(C=2C=CC(F)=CC=2)N(CC[C@H]2OC(=O)C[C@H](O)C2)C(C(C)C)=C1C(=O)NC1=CC=CC=C1 OUCSEDFVYPBLLF-KAYWLYCHSA-N 0.000 description 10
- 239000000463 material Substances 0.000 description 9
- 238000010586 diagram Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 229910002704 AlGaN Inorganic materials 0.000 description 5
- 229910002601 GaN Inorganic materials 0.000 description 5
- 230000000903 blocking effect Effects 0.000 description 5
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 4
- 229910052581 Si3N4 Inorganic materials 0.000 description 4
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 150000002500 ions Chemical class 0.000 description 4
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 4
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 3
- 238000000605 extraction Methods 0.000 description 3
- 229910052738 indium Inorganic materials 0.000 description 3
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 3
- 239000011810 insulating material Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 description 3
- 238000001451 molecular beam epitaxy Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 229910052594 sapphire Inorganic materials 0.000 description 3
- 239000010980 sapphire Substances 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 239000002356 single layer Chemical group 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 2
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 229910052733 gallium Inorganic materials 0.000 description 2
- 229910021389 graphene Inorganic materials 0.000 description 2
- 238000002248 hydride vapour-phase epitaxy Methods 0.000 description 2
- 238000004943 liquid phase epitaxy Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000005240 physical vapour deposition Methods 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 239000011241 protective layer Substances 0.000 description 2
- 230000006798 recombination Effects 0.000 description 2
- 238000005215 recombination Methods 0.000 description 2
- 229910010271 silicon carbide Inorganic materials 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- SKRWFPLZQAAQSU-UHFFFAOYSA-N stibanylidynetin;hydrate Chemical compound O.[Sn].[Sb] SKRWFPLZQAAQSU-UHFFFAOYSA-N 0.000 description 2
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 2
- 229910001887 tin oxide Inorganic materials 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical class [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 1
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- GPXJNWSHGFTCBW-UHFFFAOYSA-N Indium phosphide Chemical compound [In]#P GPXJNWSHGFTCBW-UHFFFAOYSA-N 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 238000000231 atomic layer deposition Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- HZXMRANICFIONG-UHFFFAOYSA-N gallium phosphide Chemical compound [Ga]#P HZXMRANICFIONG-UHFFFAOYSA-N 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 238000004020 luminiscence type Methods 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 239000011777 magnesium Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 229910052703 rhodium Inorganic materials 0.000 description 1
- 239000010948 rhodium Substances 0.000 description 1
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 238000004627 transmission electron microscopy Methods 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- OWOMRZKBDFBMHP-UHFFFAOYSA-N zinc antimony(3+) oxygen(2-) Chemical compound [O--].[Zn++].[Sb+3] OWOMRZKBDFBMHP-UHFFFAOYSA-N 0.000 description 1
- YVTHLONGBIQYBO-UHFFFAOYSA-N zinc indium(3+) oxygen(2-) Chemical compound [O--].[Zn++].[In+3] YVTHLONGBIQYBO-UHFFFAOYSA-N 0.000 description 1
- TYHJXGDMRRJCRY-UHFFFAOYSA-N zinc indium(3+) oxygen(2-) tin(4+) Chemical compound [O-2].[Zn+2].[Sn+4].[In+3] TYHJXGDMRRJCRY-UHFFFAOYSA-N 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/025—Physical imperfections, e.g. particular concentration or distribution of impurities
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/005—Processes
- H01L33/0062—Processes for devices with an active region comprising only III-V compounds
- H01L33/0066—Processes for devices with an active region comprising only III-V compounds with a substrate not being a III-V compound
- H01L33/007—Processes for devices with an active region comprising only III-V compounds with a substrate not being a III-V compound comprising nitride compounds
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/04—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction
- H01L33/06—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction within the light emitting region, e.g. quantum confinement structure or tunnel barrier
Definitions
- the invention belongs to the field of semiconductors, in particular to a semiconductor light-emitting element and a light-emitting device including the light-emitting element.
- LED Light Emitting Diode
- An object of the present invention is to provide a semiconductor light-emitting element with high luminous efficiency and a light-emitting device including the light-emitting element.
- the semiconductor light-emitting element includes a semiconductor stack
- the semiconductor stack includes: a first semiconductor layer with n-type doping; a second semiconductor layer located on the first semiconductor layer with p type doping, the second semiconductor layer includes a third surface close to the first semiconductor layer and a fourth surface away from the first semiconductor layer; an active layer located between the first semiconductor layer and the second semiconductor layer, The active layer includes a first surface close to the first semiconductor layer and a second surface close to the second semiconductor layer; it is characterized in that: the semiconductor stack further includes hydrogen impurities, and the concentration of the hydrogen impurities includes at least the concentration close to the active layer and a second peak far away from the active layer, the second peak being larger than the first peak.
- the distance between the first peak and the second surface is between 3nm and 55nm
- the distance between the first peak and the second peak is between 50nm and 150nm
- the distance between the second peak and the second The distance between surfaces is less than 150 nm.
- the first peak is between 5E19 cm -3 and 1E20cm -3
- the second peak is greater than 1E20cm -3 .
- the hydrogen impurity concentration has a first low value between the first peak and the first surface, a second low value between the first peak and the second peak, and the first low value is smaller than the first low value.
- Two low values The distance between the second low value and the first peak is greater than the distance between the second low value and the second peak, and the distance between the second low value and the first peak is greater than the distance between the first peak and the second surface distance.
- the second low value is less than 1E19 cm ⁇ 3
- the first low value is less than 5E18 cm ⁇ 3 .
- the present invention also provides a light-emitting device, which includes the above-mentioned semiconductor light-emitting element.
- the semiconductor light-emitting element designed in the invention can improve the luminous efficiency of the light-emitting element and reduce the voltage.
- FIG. 1 is a schematic diagram of a cross-sectional structure of a semiconductor light emitting device according to an embodiment of the present invention.
- FIG. 2 is an enlarged diagram showing the relationship between concentration or ion intensity of elements in a partial range of the semiconductor element in FIG. 1 and depth.
- Fig. 3 is a schematic cross-sectional structure diagram of a semiconductor light emitting element in another embodiment of the present invention.
- composition of each layer contained in the semiconductor device of the present invention and the dopant can be analyzed by any suitable means, such as secondary ion mass spectrometer (secondary ion mass spectrometer) mass spectrometer, SIMS).
- secondary ion mass spectrometer secondary ion mass spectrometer
- SIMS secondary ion mass spectrometer
- each layer included in the semiconductor element of the present invention can be analyzed by any suitable means, such as transmission electron microscope (transmission electron microscopy, TEM) or transmission electron microscope (scanning electron microscope, SEM), used to match, for example, the depth position of each layer on the SIMS map.
- transmission electron microscope transmission electron microscopy, TEM
- SEM scanning electron microscope
- peak value refers to the maximum value of the intersection point of two segments with slopes of opposite signs to each other; The minimum value of intersection points of line segments.
- FIG. 1 is a schematic cross-sectional structure diagram of a semiconductor light emitting element according to an embodiment of the present invention.
- FIG. 2 shows an enlarged diagram of the relationship between the concentration or ion intensity of elements and the depth of a partial range of the semiconductor element in FIG. 1 .
- the semiconductor light emitting element comprises a semiconductor stack 20, which comprises a first semiconductor layer 21, an active layer 22 and a second semiconductor layer 23, wherein the active layer 22 is located between the first semiconductor layer 21 and the second semiconductor layer 23 .
- the first semiconductor layer 21 has n-type doping for providing electrons; the second semiconductor layer 23 has p-type doping for providing holes; electrons and holes emit light through recombination radiation in the active layer 22 .
- the second semiconductor layer 23 has two opposite surfaces, including a third surface S3 close to the first semiconductor layer 21 and a fourth surface S4 far away from the first semiconductor layer 21 .
- the active layer 22 has two opposite surfaces, including a first surface S1 close to the first semiconductor layer 21 and a second surface S2 close to the second semiconductor layer 23 .
- the second surface S2 and the third surface S3 overlapped; however when other semiconductor layers were inserted between the second semiconductor layer 23 and the active layer 22, the second surface S2 S2 and the third surface S3 are different.
- the second surface S2 is in direct contact with the third surface S3, and both overlap.
- the semiconductor stack 20 further includes hydrogen impurities H, which are located between the first surface S1 and the fourth surface S4, and further, the signal of the hydrogen impurities H is from the signal near the second surface S2 Several pairs of quantum wells/quantum barriers began to appear. At this time, one or more material layers on the active layer 22 all contain hydrogen impurity H, for example, the signal of hydrogen impurity H can be detected in the second semiconductor layer 23 .
- the light-emitting element has hydrogen impurity H and group III element I, and the concentration of hydrogen impurity H presents a waveform in the SIMS detection spectrum.
- the group III element I is indium. Except for group III elements, other elements in the semiconductor light emitting device are not shown in FIG. 2 , such as nitrogen, gallium, aluminum and silicon.
- the waveform of the hydrogen impurity H includes at least a first peak V1 close to the active layer 22 and a second peak V2 far away from the active layer 22, specifically, the first peak V1 is close to the second surface S2 of the active layer 22, and the second peak V V2 is away from the second surface S2 of the active layer 22 .
- the second peak value V2 is greater than the first peak value V1, specifically, the hydrogen concentration corresponding to the second peak value V2 is greater than the hydrogen concentration corresponding to the first peak value V1.
- the hydrogen impurity H reaches the first peak value V1 at a position close to the second surface S2, and a higher concentration of the hydrogen impurity H can cause the second semiconductor layer 23 to generate a larger number of holes at this position, and promote the flow of holes to the active layer 22. moves, so that the concentration of holes recombined with electrons in the active layer 22 increases, and the luminous efficiency is improved.
- the hydrogen impurity H reaches the second peak V2 at a position away from the second surface S2, and the second peak V2 is greater than the first peak V1.
- the hydrogen impurity H reaches the second peak at a position close to the fourth surface S4 V2, a higher concentration of hydrogen impurity H can make the second semiconductor layer 23 reach a lower resistance value at this position, reduce the contact resistance between the second semiconductor layer 23 and subsequent material layers, and reduce the starting voltage of the light-emitting element, thereby
- the design purpose of providing a high-brightness, low-voltage light-emitting element can be achieved.
- the distance d1 between the first peak V1 and the second surface S2 is between 3 nm ⁇ 55 nm. If the distance d1 between the first peak V1 and the second surface S2 is relatively large, such as greater than 55 nm, it cannot promote the efficient entry of holes in the second semiconductor layer 23 into the active layer 22, that is, it cannot effectively improve the density of holes and electrons. Recombination efficiency, ultimately unable to improve luminous efficiency.
- the distance d2 between the first peak V1 and the second peak V2 is between 50 nm ⁇ 150 nm, and the distance d between the second peak V2 and the second surface S2 is less than 150 nm.
- the second semiconductor layer 23 is thicker overall, which may cause light absorption of the material layer and reduce light extraction efficiency to a certain extent.
- the first peak V1 is between 5E19cm -3 and 1E20cm -3
- the second peak V2 is greater than 1E20cm -3
- the first peak value V1 and the second peak value V2 refer to the hydrogen concentration corresponding to the peak top of the hydrogen impurity waveform.
- the hydrogen impurity concentration has a first low value L1 between the first peak V1 and the first surface S1, and a second low value L2 between the first peak V1 and the second peak V2.
- the first low value L1 and the second low value L2 refer to the hydrogen concentration corresponding to the trough of the hydrogen impurity waveform, and the first low value L1 is smaller than the second low value L2.
- the distance d3 between the second low value L2 and the first peak value V1 is greater than the distance d4 between the second low value L2 and the second peak value V2, and the distance between the second low value L2 and the first peak value d3 is greater than the first peak value
- the second low value L2 is less than 1E19 cm -3
- the first low value L1 is less than 5E18 cm -3 .
- the above-mentioned light-emitting element has high light efficiency and low voltage performance.
- Fig. 3 shows a schematic cross-sectional structure diagram of a semiconductor light emitting element according to another embodiment of the present invention.
- the semiconductor light emitting element includes a light emitting diode.
- the LED includes a substrate 10 , a semiconductor stack 20 on the substrate 10 , and a first electrode 51 and a second electrode 52 electrically connected to the semiconductor stack 20 .
- the substrate 10 has a sufficient thickness for supporting the semiconductor stack 20 and other structures thereon.
- the substrate 10 can be made of conductive or insulating materials, such as gallium arsenide (GaAs), indium phosphide (InP ), silicon carbide (SiC), gallium phosphide (GaP), zinc oxide (ZnO), gallium nitride (GaN), aluminum nitride (AlN), germanium (Ge) or silicon (Si), etc.; insulating materials such as sapphire (Sapphire), silicon carbide (SiC), silicon nitride (SiN), glass and other transparent materials. In this embodiment, a transparent sapphire substrate is preferred.
- the semiconductor stack 20 can be formed on the substrate 10 by MOCVD growth.
- the substrate 10 is a bonding substrate rather than a growth substrate, and the semiconductor stack 20 is transferred to the substrate 10 by a transfer process. superior.
- it can also be patterned to form a series of concave-convex structures on its surface.
- the semiconductor stack 20 is the above-mentioned semiconductor stack.
- the semiconductor laminate of this embodiment includes a buffer layer 24, a first semiconductor layer 21, a stress release layer 25, an active layer 22, and a second semiconductor layer 23, and the first electrode 51 and the second electrode 52 are respectively connected to the first semiconductor layer 21. It is electrically connected with the second semiconductor layer 23 .
- the first semiconductor layer 21 and the second semiconductor layer 23 have opposite conductive forms.
- the first semiconductor layer 21 has n-type doping to provide electrons
- the second semiconductor layer has p-type doping to provide holes.
- the electrons and holes are active
- the luminescence is recombined in layer 22 .
- the n-type impurity is such as silicon
- the p-type impurity is such as magnesium, but the present invention does not limit the type of impurity.
- the buffer layer 24 is used to reduce the lattice mismatch between the substrate 10 and the first semiconductor layer 21, so the lattice constant of the buffer layer 24 is between the substrate 10 and the first semiconductor layer 21, and may be composed of AlpInqGa1-p-qN material, wherein 0 ⁇ p ⁇ 1, 0 ⁇ q ⁇ 1, specifically AlN layer, GaN layer, AlGaN layer, AlInGaN layer, InN layer and InGaN layer.
- the buffer layer 24 may be formed by MOCVD or PVD.
- the stress release layer 25 is grown to release the stress generated during the growth process of the first semiconductor layer 21 , and can also adjust the size of the V-shaped pit to improve the luminance.
- the stress release layer 25 may be a superlattice structure, such as a superlattice structure formed by alternate lamination of InGaN and GaN, or a single layer structure.
- the active layer 22 is disposed between the first semiconductor layer 21 and the second semiconductor layer 23 and may include a homojunction, a heterojunction, a single quantum well, multiple quantum wells or other similar structures.
- the active layer 22 includes alternately stacked quantum well layers 221 and quantum barrier layers 222.
- the function of the quantum well layers 221 is to enable electrons and holes to recombine and emit light.
- the energy level of the quantum barrier layers 222 is greater than that of the well layers 221. energy level, the role of the quantum barrier layer 222 is to confine electrons and holes in the quantum well layer 221 to recombine and emit light.
- the active layer 22 on the side closest to the first semiconductor layer 21 can be a quantum well layer 221 or a quantum barrier layer 222, and the active layer 22 on the side closest to the second semiconductor layer 23 can be a quantum barrier layer 222 or a quantum well layer 221.
- the quantum barrier layer 222 can be an aluminum-containing or aluminum-free nitride layer with a higher energy level, such as AlGaN or GaN, and the quantum barrier layer 222 can be an n-type doped layer or a non-doped layer that does not substantially contain any impurities. Miscellaneous.
- the quantum well layer 221 is generally an indium-containing nitride layer with a lower energy level, such as InGaN.
- the thicknesses of all quantum barrier layers 222 are approximately the same, and the thicknesses of all quantum well layers 221 are approximately the same. In other embodiments, the thicknesses of quantum barrier layers 222 can vary, and the thickness of quantum well layers 221 can also be determined according The thickness of the quantum barrier layer 222 is adjusted accordingly to match.
- the last quantum barrier layer 222 can be an undoped layer, and can be a single-layer structure or a multi-layer structure, such as AlN, AlGaN or AlInGaN that can be an undoped single-layer structure, or u- GaN/u-AlGaN, u-InGaN/u-AlInGaN/u-AlGaN or u-GaN/AlN.
- the growth methods of the first semiconductor layer 21, the active layer 22 and the second semiconductor layer 23 include but are not limited to metal organic chemical vapor deposition (meta l-orga nicchemical va por deposition, MOCVD) , hydride vapor phase epitaxy (hyd rid e va por phase epitaxial, HVPE), liquid-phase crystal epitaxial growth (liquid-phase epitaxy, LPE), molecular beam epitaxy (molecular beam epitaxy, MBE), or ion plating, such as sputtering or evaporation.
- metal organic chemical vapor deposition metal organic chemical vapor deposition
- HVPE hydride vapor phase epitaxy
- liquid-phase crystal epitaxial growth liquid-phase epitaxy
- LPE liquid-phase epitaxy
- MBE molecular beam epitaxy
- ion plating such as sputtering or evaporation.
- the second semiconductor layer 23 extends toward the first semiconductor layer 21 to form a recess A
- the first electrode 51 is located on the surface of the recess A
- the second electrode 52 is located on the surface of the second semiconductor layer 23 .
- the first electrode 51 and the second electrode 52 are located on the same side of the substrate 10 .
- the first electrode 51 and the second electrode 52 may also be located on opposite sides of the substrate 10 .
- a transparent conductive layer 30 can also be included between the second electrode 52 and the second semiconductor layer 23, and the transparent conductive layer 30 can promote the lateral diffusion of the current injected by the second electrode 52 and transfer to the semiconductor layer, so that the first semiconductor layer 21 and the second semiconductor layer
- the second semiconductor layer 53 generates electrons and holes.
- the transparent conductive layer 30 covers the upper surface of the second semiconductor layer 23 .
- the transparent conductive layer 23 may also cover the upper surface of the first semiconductor layer 21 at the bottom of the recess A at the same time, so as to further promote the spread of current.
- the material of the transparent conductive layer 30 is a transparent conductive material, for example, selected from indium tin oxide (ITO), tin oxide (TO), zinc oxide (ZnO), indium zinc oxide (IZO), indium gallium zinc oxide (IGZO), oxide One or a combination of at least two of indium tin zinc oxide (ITZO), antimony tin oxide (ATO), antimony zinc oxide (AZO), graphene (Graphene), and other suitable transparent conductive oxide materials.
- ITO indium tin oxide
- TO tin oxide
- ZnO zinc oxide
- IZO indium zinc oxide
- IGZO indium gallium zinc oxide
- oxide One or a combination of at least two of indium tin zinc oxide (ITZO), antimony tin oxide (ATO), antimony zinc oxide (AZO), graphene (Graphene), and other suitable transparent conductive oxide materials.
- the covering area of the upper surface of the second semiconductor layer 23 by the transparent conductive layer 30 is at least 80%, more preferably at least 90%.
- the transparent conductive layer 30 can be formed by a coating process, such as sputtering, or can be formed in different patterns by an etching process as required. Moreover, after coating, a high-temperature annealing treatment is performed to achieve good ohmic contact between the transparent conductive layer 30 and the second semiconductor layer 23 .
- a local current blocking layer 40 is also provided between the first electrode 51 and/or the second electrode 52 and the second semiconductor layer 23 respectively, and the current blocking layer 40 is formed of a transparent insulating material, such as silicon oxide, silicon carbide, silicon nitride, One or a combination of several aluminum oxides can have a Bragg structure.
- the current blocking layer 40 partially blocks current from the second electrode 52 and/or forms vertical current transmission between the first electrode 51 and the second semiconductor layer 23 .
- the shape of the current blocking layer 40 can be circular, circular or square, and can be one or more pieces, which can be selected and designed according to the requirements of current blocking.
- the main functions of the first electrode 51 and the second electrode 52 are to provide connection to an external power source and to inject current from the external power source to the light emitting element.
- the first electrode 51 and the second electrode 52 can include a plurality of metal layers stacked in sequence, and the materials of the plurality of metal layers can include an ohmic contact layer, a reflective layer, a barrier layer and a wiring layer in sequence, and the metal material is selected from chromium, tungsten, Aluminum, copper, platinum, gold, palladium, titanium, rhodium, other suitable materials, or combinations thereof.
- the first electrode 51 and the second electrode 52 can be formed by physical vapor deposition, chemical vapor deposition, atomic layer deposition, coating, sputtering or other suitable techniques.
- the first electrode 51 and/or the second electrode 52 includes a pad part and an extension part, and the extension part is conducive to the lateral expansion of the current, so that the current can be injected into all regions in the second semiconductor layer 23 as much as possible, and the luminous efficiency of the light emitting diode is improved. and luminous uniformity.
- the insulating protection layer 60 serves as the outermost layer of the light-emitting element and covers the light-emitting surface of the light-emitting element.
- the insulating protective layer 60 covers the outer periphery of the second electrode 52 and the surface of the transparent conductive layer 30. In other embodiments, it can also cover the inner sidewall of the depression around the first electrode 51 and the outer periphery of the light emitting element. side wall.
- the refractive index of the insulating protective layer 60 is lower than that of the transparent conductive layer 30 and the light-emitting element, which can promote the light emitted from the semiconductor active layer 22 to pass through the insulating transparent layer as much as possible after passing through the transparent conductive layer 30 or the peripheral sidewall of the light-emitting element.
- the reflection ratio of the optical layer 30 is reduced, thereby improving the light extraction efficiency.
- the insulating protection layer 60 can also perform moisture isolation and insulation protection for the side walls of the light-emitting element and the transparent conductive layer 30 around the electrodes.
- the material of the insulating protection layer 60 is selected from one or a combination of silicon oxide, silicon carbide, silicon nitride, and aluminum oxide, and may be a distributed Bragg structure.
- a light emitting device including the above light emitting element is provided.
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Abstract
Description
Claims (12)
- 半导体发光元件,包括半导体叠层,该半导体叠层包括:第一半导体层,具有n型掺杂;第二半导体层,位于所述第一半导体层上,具有p型掺杂,所述第二半导体层包括靠近第一半导体层的第三表面和远离第一半导体层的第四表面;有源层,位于所述第一半导体层和第二半导体层之间,所述有源层包括靠近第一半导体层的第一表面和靠近第二半导体层的第二表面;其特征在于: 该半导体叠层还包括氢杂质,该氢杂质的浓度至少包括靠近有源层的第一峰值和远离有源层的第二峰值,所述第二峰值大于第一峰值。
- 根据权利要求1所述的半导体发光元件,其特征在于:所述第一峰值与第二表面的距离介于3nm~55nm之间。
- 根据权利要求1所述的半导体发光元件,其特征在于:所述第一峰值和第二峰值之间的距离介于50nm~150nm之间。
- 根据权利要求1所述的半导体发光元件,其特征在于:所述第二峰值与第二表面之间的距离小于150nm。
- 根据权利要求1所述的半导体发光元件,其特征在于:所述第一峰值介于5E19cm -3~1E20cm -3之间。
- 根据权利要求1所述的半导体发光元件,其特征在于:所述第二峰值大于1E20cm -3。
- 根据权利要求1所述的半导体发光元件,其特征在于:所述氢杂质浓度在所述第一峰值和第一表面之间具有第一低值,在第一峰值和第二峰值之间具有第二低值,所述第一低值小于第二低值。
- 根据权利要求7所述的半导体发光元件,其特征在于:所述第二低值与第一峰值之间的距离大于第二低值与第二峰值之间的距离。
- 根据权利要求7所述的半导体发光元件,其特征在于:所述第二低值与第一峰值之间的距离大于第一峰值与第二表面的距离。
- 根据权利要求7所述的半导体发光元件,其特征在于:所述第二低值小于1E19cm -3。
- 根据权利要求7所述的半导体发光元件,其特征在于:所述第一低值小于5E18cm -3。
- 发光装置,其特征在于:包括权利要求1~11任意一项的半导体发光元件。
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US20040166599A1 (en) * | 2000-02-10 | 2004-08-26 | Sharp Kabushiki Kaisha | Semiconductor light emitting device and method for producing the same |
CN1941442A (zh) * | 2005-09-30 | 2007-04-04 | 日立电线株式会社 | 半导体发光元件 |
CN101069289A (zh) * | 2004-12-23 | 2007-11-07 | Lg伊诺特有限公司 | 氮化物半导体发光器件及其制造方法 |
CN108598224A (zh) * | 2018-05-31 | 2018-09-28 | 华灿光电(浙江)有限公司 | 一种发光二极管外延片的制作方法及其发光二极管外延片 |
CN111403565A (zh) * | 2020-03-27 | 2020-07-10 | 安徽三安光电有限公司 | 发光二极管及其制作方法 |
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- 2021-07-15 KR KR1020247001396A patent/KR20240019839A/ko unknown
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Patent Citations (5)
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US20040166599A1 (en) * | 2000-02-10 | 2004-08-26 | Sharp Kabushiki Kaisha | Semiconductor light emitting device and method for producing the same |
CN101069289A (zh) * | 2004-12-23 | 2007-11-07 | Lg伊诺特有限公司 | 氮化物半导体发光器件及其制造方法 |
CN1941442A (zh) * | 2005-09-30 | 2007-04-04 | 日立电线株式会社 | 半导体发光元件 |
CN108598224A (zh) * | 2018-05-31 | 2018-09-28 | 华灿光电(浙江)有限公司 | 一种发光二极管外延片的制作方法及其发光二极管外延片 |
CN111403565A (zh) * | 2020-03-27 | 2020-07-10 | 安徽三安光电有限公司 | 发光二极管及其制作方法 |
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