WO2023273099A1 - Power semiconductor device - Google Patents

Power semiconductor device Download PDF

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Publication number
WO2023273099A1
WO2023273099A1 PCT/CN2021/130401 CN2021130401W WO2023273099A1 WO 2023273099 A1 WO2023273099 A1 WO 2023273099A1 CN 2021130401 W CN2021130401 W CN 2021130401W WO 2023273099 A1 WO2023273099 A1 WO 2023273099A1
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WO
WIPO (PCT)
Prior art keywords
semiconductor device
power semiconductor
voltage
pin
detection
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PCT/CN2021/130401
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French (fr)
Chinese (zh)
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WO2023273099A9 (en
Inventor
陈燕平
窦泽春
谢舜蒙
彭勇殿
朱武
张�荣
荣春晖
袁勇
陈明翊
谭一帆
Original Assignee
中车株洲电力机车研究所有限公司
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Priority to DE112021007093.2T priority Critical patent/DE112021007093T5/en
Publication of WO2023273099A1 publication Critical patent/WO2023273099A1/en
Publication of WO2023273099A9 publication Critical patent/WO2023273099A9/en

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L25/00Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
    • H01L25/18Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof the devices being of types provided for in two or more different subgroups of the same main group of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R19/00Arrangements for measuring currents or voltages or for indicating presence or sign thereof
    • G01R19/165Indicating that current or voltage is either above or below a predetermined value or within or outside a predetermined range of values
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26Testing of individual semiconductor devices
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26Testing of individual semiconductor devices
    • G01R31/2607Circuits therefor
    • G01R31/2608Circuits therefor for testing bipolar transistors
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/50Testing of electric apparatus, lines, cables or components for short-circuits, continuity, leakage current or incorrect line connections
    • G01R31/52Testing for short-circuits, leakage current or ground faults
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/48Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/49Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions wire-like arrangements or pins or rods
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02HEMERGENCY PROTECTIVE CIRCUIT ARRANGEMENTS
    • H02H3/00Emergency protective circuit arrangements for automatic disconnection directly responsive to an undesired change from normal electric working condition with or without subsequent reconnection ; integrated protection
    • H02H3/08Emergency protective circuit arrangements for automatic disconnection directly responsive to an undesired change from normal electric working condition with or without subsequent reconnection ; integrated protection responsive to excess current

Definitions

  • the invention relates to the technical field of power semiconductor devices, in particular to a power semiconductor device integrated with a detection diode.
  • FIG. 1 shows a schematic diagram of a fault detection circuit of a conventional power semiconductor device.
  • the drive circuit (not shown) of the power semiconductor device can first use the detection diode 112 to block the high voltage when the power semiconductor device is turned off, and When the device 12 is turned on, the detection circuit 11 uses the detection diode 112 to detect the terminal voltage of the power semiconductor device 12 , thereby realizing the short circuit detection of the power semiconductor device 12 .
  • the detection diode 112 needs to withstand the turn-off overvoltage and the bus voltage of the power semiconductor device 12 during the turn-off process and the turn-off state of the power semiconductor device 12 . Therefore, the selection and layout of the detection diode 112 is one of the keys to the design of the power semiconductor driving circuit.
  • the existing power semiconductor device 12 generally does not integrate the detection diode 112 , and the driving designer of the power semiconductor device 12 needs to select the type when designing the driving circuit.
  • the driver designer of the power semiconductor device 12 needs to consider factors such as the withstand voltage, electrical separation distance and creepage distance of the detection diode 112 to select the type and layout of the detection diode 112 , which is time-consuming and labor-intensive.
  • the withstand voltage of existing high-voltage diodes is generally between 1000V and 2000V, while the highest blocking voltage of commercial high-voltage power semiconductor devices 12 is generally 6500V, so it is necessary to select 4-7 or even more high-voltage diodes connected in series
  • the fault detection diode 112 used to form the power semiconductor device 12 has the disadvantages of complex device structure and bulky volume, which is not in line with the development direction of power semiconductor device packaging miniaturization and high power density.
  • the highest blocking voltage of the existing power semiconductor device 12 is generally 6500V, and the distance between the high-voltage power terminal 121 and the pins corresponding to the control terminal 120 and the low-voltage power terminal 122 has an electrical isolation requirement of 6500V and prevents Creepage design requirements.
  • the separation distance between the detection interfaces of the ground detection circuit 11 of the existing power semiconductor device 12 also has a 6500V electrical isolation requirement and an anti-creepage design requirement.
  • the present invention provides a power semiconductor device, which can avoid the trouble of driver designers in selecting types and laying out detection diodes, simplify the device structure of power semiconductor devices and their detection circuits, and overcome the problems of power semiconductor devices. Electrical isolation requirements and anti-creepage design requirements for devices and/or ground detection circuits to promote the development of power semiconductor devices in the direction of package miniaturization and high power density.
  • the above-mentioned power semiconductor device includes: at least one transistor element, wherein the transistor element includes a high-voltage power terminal, a low-voltage power terminal, and a control terminal, and the high-voltage power terminal extends out of the power semiconductor device the package of the power semiconductor device to form the high-voltage pin of the power semiconductor device, the low-voltage power terminal extends out of the package of the power semiconductor device to form the low-voltage pin of the power semiconductor device, and the control terminal extends out of the power semiconductor device
  • the distance from the detection pin to the low-voltage pin and/or the control pin may be smaller than the electrical gap and/or the blocking voltage of the corresponding transistor element creepage distance.
  • the low-voltage power terminal also extends out of the package of the power semiconductor device to form a potential reference pin of the power semiconductor device.
  • the distance from the detection pin to the potential reference pin may be smaller than the electrical clearance and/or creepage distance corresponding to the blocking voltage of the corresponding transistor element.
  • the detection diode unit includes a plurality of diode elements connected in series.
  • the sum of the reverse blocking voltages of the plurality of diode elements connected in series is greater than or equal to the blocking voltage of at least one transistor element corresponding to the detection diode unit.
  • the power semiconductor device includes a plurality of transistor elements connected in parallel, and a detection diode unit.
  • the high-voltage power terminals of the plurality of parallel-connected transistor elements respectively extend out of the package of the power semiconductor device to form a plurality of the high-voltage pins of the power semiconductor device.
  • the low-voltage power ends of the plurality of parallel-connected transistor elements respectively extend out of the package of the power semiconductor device to form a plurality of the low-voltage pins of the power semiconductor device.
  • the control terminals of the plurality of parallel-connected transistor elements uniformly extend out of the package of the power semiconductor device to form the control pin of the power semiconductor device.
  • the cathode of the detection diode unit is connected to the high voltage power end of the first transistor element.
  • the anode of the detection diode unit extends out of the package of the power semiconductor device to form the detection pin of the power semiconductor device.
  • the power semiconductor device includes a plurality of transistor elements connected in series, and a plurality of detection diode units.
  • the high-voltage power terminal of the first transistor element extends out of the package of the power semiconductor device to form a high-voltage pin of the power semiconductor device.
  • the low voltage power end of the first transistor element is connected to the high voltage power end of the second transistor element to form a bridge arm circuit.
  • the low-voltage power end of the second transistor element extends out of the package of the power semiconductor device to form a low-voltage pin of the power semiconductor device.
  • the control terminals of the first transistor element and the second transistor element respectively extend out of the package of the power semiconductor device to form a plurality of control pins of the power semiconductor device.
  • the cathode of the first detection diode unit is connected to the high voltage power terminal of the first transistor element.
  • the anode of the first detection diode unit extends out of the package of the power semiconductor device to form a first detection pin of the power semiconductor device.
  • the cathode of the second detection diode unit is connected to the high voltage power terminal of the second transistor element.
  • the anode of the second detection diode unit extends out of the package of the power semiconductor device to form a second detection pin of the power semiconductor device.
  • the power semiconductor device includes a plurality of bridge arm circuits.
  • the high-voltage power ends of the first transistor elements of each of the bridge arm circuits respectively extend out of the package of the power semiconductor device to form a plurality of the high-voltage pins of the power semiconductor device.
  • the low-voltage power terminals of the second transistor elements of each of the bridge arm circuits respectively extend out of the package of the power semiconductor device to form a plurality of the low-voltage pins of the power semiconductor device.
  • the control terminals of the first transistor elements of each of the bridge arm circuits uniformly extend out of the package of the power semiconductor device to form a first control pin of the power semiconductor device.
  • the second transistor elements of each of the bridge arm circuits uniformly extend out of the package of the power semiconductor device to form a second control pin of the power semiconductor device.
  • the cathode of the first detection diode unit is connected to the high-voltage power end of the first transistor element of each of the bridge arm circuits.
  • the cathode of the second detection diode unit is connected to the high voltage power end of the second transistor element of each of the bridge arm circuits.
  • the transistor element includes an IGBT, the high-voltage power terminal of the IGBT is its collector, the low-voltage power terminal of the IGBT is its emitter, and the control terminal of the IGBT is Its gate, the potential reference pin of the IGBT is its auxiliary emitter.
  • the transistor element includes a MOSFET, the high-voltage power terminal of the MOSFET is its drain, the low-voltage power terminal of the MOSFET is its source, and the MOSFET’s The control terminal is its gate, and the potential reference pin of the MOSFET is its auxiliary source.
  • FIG. 1 shows a schematic diagram of a fault detection circuit of a conventional power semiconductor device.
  • FIG. 2A shows a schematic diagram of a circuit package of a power semiconductor device provided according to some embodiments of the present invention.
  • FIG. 2B shows a schematic diagram of a package structure of a power semiconductor device provided according to some embodiments of the present invention.
  • Fig. 3 shows a schematic diagram of a detection circuit provided according to some embodiments of the present invention.
  • Fig. 4 shows a schematic diagram of a circuit package of a power semiconductor device provided according to some embodiments of the present invention.
  • FIG. 5 shows a schematic diagram of a circuit package of a power semiconductor device provided according to some embodiments of the present invention.
  • Fig. 6 shows a schematic diagram of a detection circuit provided according to some embodiments of the present invention.
  • FIG. 7 shows a schematic diagram of a circuit package of a power semiconductor device provided according to some embodiments of the present invention.
  • connection should be understood in a broad sense, for example, it can be a fixed connection or a detachable connection. Connected, or integrally connected; it can be mechanically connected or electrically connected; it can be directly connected or indirectly connected through an intermediary, and it can be the internal communication of two components. Those of ordinary skill in the art can understand the specific meanings of the above terms in the present invention in specific situations.
  • first”, “second”, “third”, etc. may be used herein to describe various components, regions, layers and/or sections, these components, regions, layers and/or sections It should not be limited by these terms, and these terms are only used to distinguish different components, regions, layers and/or sections. Thus, a first component, region, layer and/or section discussed below could be termed a second component, region, layer and/or section without departing from some embodiments of the present invention.
  • the existing power semiconductor device 12 generally does not integrate the detection diode 112 , and the driving designer of the power semiconductor device 12 needs to select the type when designing the driving circuit.
  • the driver designer of the power semiconductor device 12 needs to consider factors such as the withstand voltage, electrical separation distance and creepage distance of the detection diode 112 to select the type and layout of the detection diode 112 , which is time-consuming and labor-intensive.
  • the withstand voltage of existing high-voltage diodes is generally between 1000V and 2000V, while the highest blocking voltage of commercial high-voltage power semiconductor devices 12 is generally 6500V, so it is necessary to select 4-7 or even more high-voltage diodes connected in series
  • the fault detection diode 112 used to form the power semiconductor device 12 has the disadvantages of complex device structure and bulky volume, which is not in line with the development direction of power semiconductor device packaging miniaturization and high power density.
  • the highest blocking voltage of the existing power semiconductor device 12 is generally 6500V, and the distance between the high-voltage power terminal 121 and the pins corresponding to the control terminal 120 and the low-voltage power terminal 122 has an electrical isolation requirement of 6500V and prevents Creepage design requirements.
  • the separation distance between the detection interfaces of the ground detection circuit 11 of the existing power semiconductor device 12, and the separation distance between each detection interface and the ground also have an electrical isolation requirement of 6500V*n and an anti-creepage design requirement, wherein , n is the number of intervals between each detection interface and each detection interface to the ground.
  • the present invention provides a power semiconductor device, which can avoid the trouble of driver designer selection and layout detection diodes, simplify the device structure of the power semiconductor device, and overcome the electrical isolation of the power semiconductor device requirements and anti-creepage design requirements to promote the development of power semiconductor devices in the direction of package miniaturization and high power density.
  • FIG. 2A shows a schematic diagram of a circuit package of a power semiconductor device provided according to some embodiments of the present invention.
  • FIG. 2B shows a schematic diagram of a package structure of a power semiconductor device provided according to some embodiments of the present invention.
  • the power semiconductor device is a large current capacity insulated gate bipolar transistor (Insulated Gate Bipolar Transistor, IGBT) device, which includes a plurality of IGBT elements connected in parallel.
  • the power semiconductor device includes a plurality of transistor subunits 21 - 23 , wherein each transistor subunit 21 - 23 accommodates one IGBT element.
  • the IGBT elements accommodated in the transistor subunit 21 include a collector, an emitter and a gate. The collector is used to connect to the high-voltage bus as the high-voltage power terminal of the IGBT element.
  • the emitter is used to be grounded or connected to the collector of another low-level IGBT component as a low-voltage power terminal of the IGBT component.
  • the gate is used to connect to the driving circuit as a control terminal of the IGBT element.
  • the IGBT components accommodated in the transistor sub-units 22 and 23 also respectively include a collector, an emitter and a gate, and have the same function, which will not be repeated here. By connecting multiple IGBT elements in parallel, the IGBT device with large current capacity can carry current several times that of ordinary IGBT elements.
  • the collectors of the IGBT elements accommodated in the transistor subunits 21 - 23 respectively extend out of the package of the power semiconductor device to form a plurality of high voltage pins 205 , 207 , 209 of the power semiconductor device.
  • the emitters of the IGBT elements accommodated in the transistor sub-units 21 - 23 respectively extend out of the package of the power semiconductor device to form a plurality of low-voltage pins 204 , 206 , 208 of the power semiconductor device.
  • the control terminals of the IGBT elements accommodated in the transistor subunits 21-23 are connected to the transistor subunit 21 inside the power semiconductor device, and then uniformly extend out of the package of the power semiconductor device through the pin subunit 25 to form the control of the power semiconductor device. pin 202.
  • the power semiconductor device further includes a detection diode subunit 24 and a pin subunit 25 .
  • One or more diode elements are housed in the detection diode subunit 24 .
  • the cathode of the diode element is connected to the collector of the IGBT element of the transistor subunit 21 , and its anode extends out of the package of the power semiconductor device through the pin subunit 25 to form a detection pin 203 of the power semiconductor device.
  • the short-circuit detection current of the IGBT element is between 10uA and 100mA.
  • the current capacity of the diode element is generally selected to be 1-2A, leaving enough margin to fully meet the short-circuit detection requirements of the detection circuit for each transistor sub-unit 21-23 of the IGBT device with a large current capacity.
  • one or more diode elements connected in series may be accommodated in the detection diode subunit 24 .
  • the sum of the reverse blocking voltages of the plurality of diode elements connected in series should be greater than or equal to the highest blocking voltage (for example: 6500V) of the corresponding IGBT element in each transistor subunit 21-23, so as to satisfy the detection circuit for blocking the power semiconductor High voltage is required when the device is turned off, and the fault detection circuit and each detection pin 201-203 are protected from high voltage damage.
  • the pin subunit 25 is further connected to the emitters of the IGBT elements of the transistor subunits 21-23 in the transistor subunit 21, and the emitters of these IGBT elements are separated from the pin subunits.
  • 25 leads out from the package of the power semiconductor device to form the voltage reference pin 201 of the power semiconductor device.
  • the voltage reference pin 201 can be used as an auxiliary emitter of the IGBT element.
  • the detection circuit of the power semiconductor device can detect the short circuit of the power semiconductor device through the voltage reference pin 201 , the control pin 202 and the detection pin 203 of the pin subunit 25 .
  • the driver designer of the power semiconductor device only needs to configure the signal processing circuit to realize the short circuit detection of the power semiconductor device , instead of selecting and laying out the diode device based on factors such as the withstand voltage, electrical separation distance and creepage distance of the detection diode, which can overcome the time-consuming and labor-intensive defects of the prior art.
  • the detection diode subunit 24 is further integrated in the package of the power semiconductor device, there is a voltage blocking effect on the collector terminals of the IGBT elements accommodated in each transistor subunit 21-23, and the detection pin 203
  • the potential V 203 will not rise to the kV level with the potentials of the high-voltage pins 205, 207, 209, but under normal working conditions, it is kept at about 5V and not more than 100V under the driving of the detection circuit. Therefore, there will be no potential difference above 100V between the detection pin 203 in FIG. 2B and the potential reference pin 201 , the control pin 202 , and the low voltage pins 204 , 206 , 208 . Therefore, when designing the package and pin arrangement of the power semiconductor device, it is not necessary to follow the limitations of the electrical clearance and creepage distance of the kV level in the prior art.
  • the detection pin 203 and the potential reference pin 201 and the control pin 202 can break through the limitation of the electrical clearance and/or creepage distance corresponding to the 6.5kV blocking voltage of the single-stage IGBT element, so that the electrical clearance and creepage distance can be determined according to the potential of the detection pin relative to the potential reference pin. Design to promote the development of power semiconductor devices in the direction of package miniaturization and high power density.
  • the distance between the detection pin 203 and each low voltage pin 204, 206, 208 can also be Break through the limitation of the electrical gap and/or creepage distance corresponding to the 6.5kV blocking voltage of single-stage IGBT components, so as to design the electrical gap and creepage distance according to the potential of the detection pin relative to the potential reference pin, so as to promote the development of power semiconductor devices
  • the development of packaging miniaturization and high power density the anti-creepage ladder shown in FIG. 2B is no longer needed between the detection pin 203 and each low-voltage pin 204, 206, 208.
  • the vertical dimension of the power semiconductor device is reduced to promote the power semiconductor device to The development of packaging miniaturization and high power density, on the other hand, reduces the difficulty of the packaging process of power semiconductor devices and reduces the packaging cost.
  • this paper also provides a detection circuit for detecting whether there is a short-circuit fault in the IGBT device with large current capacity shown in FIG. 2A and FIG. 2B .
  • FIG. 3 shows a schematic diagram of a detection circuit provided according to some embodiments of the present invention.
  • the detection circuit 31 of the IGBT device with large current capacity shown in FIG. 2A and FIG. 2B only includes one detection interface 311 .
  • the detection interface 311 is directly connected to the detection high-voltage pin 203 of the IGBT device with a large current capacity to detect whether there is a short-circuit fault in the IGBT elements accommodated in each transistor subunit 21-23 of the IGBT device with a large current capacity.
  • the detection process And the principle is basically the same as that of the prior art, and will not be repeated here.
  • the detection interface 311 of the detection circuit 31 is connected to the detection pin 203 of the IGBT device with a large current capacity to determine the short-circuit fault, and the detection pin 203 is connected to each transistor subunit 21-23.
  • the detection diode sub-unit 24 is integrated between the collectors of the IGBT components, and there is a voltage blocking effect on these collector terminals, and the detection interface 311 does not have the risk of bus high voltage or IGBT turn-off overvoltage. Therefore, the driver designer of the power semiconductor device does not need to configure an additional detection diode for the detection interface 311 of the detection circuit 31.
  • the detection circuit of the power semiconductor device can overcome the time-consuming and labor-intensive defects of the prior art, and on the other hand, it is beneficial to simplify the detection circuit of the power semiconductor device.
  • the structure of the device and its space volume are reduced, which is in line with the direction of miniaturization and high power density of the detection circuit.
  • the detection diode subunit 24 is further integrated in the package of the power semiconductor device, there is a voltage blocking effect on the collector terminals of the IGBT elements accommodated in each transistor subunit 21-23, and the potential on the detection pin 203 V 203 will not rise to the kV level with the potential V 209 of the high-voltage pins 205, 207, 209, but under normal working conditions, it is kept at about 5V and not more than 100V under the driving of the detection circuit. Therefore, the distance from the detection interface 311 of the detection circuit 31 in FIG.
  • the IGBT device with large current capacity including three transistor subunits 21-23 shown in FIG. 2A and FIG. It demonstrates the main idea of the present invention clearly and provides a specific solution for the public to implement, rather than limiting the protection scope of the present invention.
  • the above-mentioned power semiconductor device provided by the present invention may also be composed of a single silicon-based metal-oxide semiconductor field-effect transistor (Si-MOSFET), silicon carbide-based MOSFET (SiC-MOSFET), silicon Transistor devices such as silicon carbide-based IGBT (Si-IGBT) or silicon carbide-based IGBT (SiC-IGBT).
  • Si-MOSFET silicon-based metal-oxide semiconductor field-effect transistor
  • SiC-MOSFET silicon carbide-based MOSFET
  • Si-IGBT silicon carbide-based IGBT
  • SiC-IGBT silicon carbide-based IGBT
  • the single-transistor power semiconductor device may include a transistor subunit 41 , a detection diode subunit 42 and a pin subunit 43 .
  • a single transistor (eg, IGBT) element accommodated in the transistor subunit 41 includes a collector, an emitter, and a gate.
  • the collector is used to connect to the high-voltage bus as the high-voltage power terminal of the IGBT element.
  • the emitter is used for grounding or connecting the collector of the low-level IGBT component as the low-voltage power terminal of the IGBT component.
  • the collector of the IGBT element extends out of the package of the power semiconductor device to form a high voltage pin 405 of the power semiconductor device.
  • the emitter of the IGBT element extends out of the package of the power semiconductor device to form a low voltage pin 404 of the power semiconductor device.
  • the control terminal of the IGBT element extends out of the package of the power semiconductor device through the pin subunit 43 to form a control pin 402 of the power semiconductor device.
  • One or more diode elements are housed in the detection diode subunit 42 .
  • the cathode of the diode element is connected to the collector of the IGBT element of the transistor subunit 41 , and its anode extends out of the package of the power semiconductor device through the pin subunit 43 to form a detection pin 403 of the power semiconductor device.
  • the pin subunit 43 is also connected to the emitter of the IGBT element in the transistor subunit 41, and the emitter is drawn out from the pin subunit 43 to the package of the power semiconductor device to form a potential reference lead for the power semiconductor device.
  • the voltage reference pin 401 can serve as the auxiliary emitter of the IGBT element.
  • the detection circuit of the power semiconductor device can detect the short circuit of the power semiconductor device through the potential reference pin 401 , the control pin 402 and the detection pin 403 of the pin subunit 43 .
  • the driver designer of the power semiconductor device only needs to configure the signal processing circuit to realize the short circuit detection of the power semiconductor device, It is no longer necessary to select the type and layout of the diode device based on factors such as the withstand voltage, electrical separation distance and creepage distance of the detection diode, and can overcome the time-consuming and labor-intensive defects of the prior art.
  • the detection diode subunit 42 is further integrated in the package of the power semiconductor device, there is a voltage blocking effect on the collector terminal of the IGBT element accommodated in the transistor subunit 41, and the potential V 403 on the detection pin 403 It will not rise to the kV level with the potential of the high-voltage pin 405, but under normal working conditions, it will remain at about 5V and not exceed 100V under the driving of the detection circuit. Therefore, there will be no potential difference above 100V between the detection pin 403 in FIG. 4 and the potential reference pin 401 , the control pin 402 and the low voltage pin 404 .
  • the single-transistor power semiconductor device shown in FIG. 4 only involves the terminal voltage of one transistor element, and only needs to configure a detection interface to detect whether there is a short-circuit fault through its detection pin 403 .
  • technicians can select the fault detection circuit 31 shown in FIG. 3 and directly connect its detection interface 311 to the detection pin 403 of the single-transistor power semiconductor device to detect the single-transistor power semiconductor device.
  • the detection process and principle are basically the same as those of the prior art, and will not be repeated here.
  • the transistor sub-unit of the above-mentioned power semiconductor device provided by the first aspect of the present invention may further accommodate a plurality of transistor devices connected in series.
  • FIG. 5 shows a schematic diagram of a circuit package of a power semiconductor device provided according to some embodiments of the present invention.
  • the power semiconductor device may include a transistor subunit 51 , a detection diode subunit 52 and a pin subunit 53 .
  • the IGBT elements 511 and 512 respectively include a collector, an emitter and a gate.
  • the collector of the IGBT element 511 is used to connect to the high-voltage bus, as the high-voltage power terminal of the IGBT element 511 .
  • the emitter of the IGBT element 511 is connected to the collector of the low-level IGBT element 512 as a low-voltage power terminal of the IGBT element 511 .
  • the collector of the IGBT element 512 is connected to the emitter of the advanced IGBT element 511 as a high voltage power terminal of the IGBT element 512 .
  • the emitter of the IGBT element 512 is used for grounding as a low-voltage power terminal of the IGBT element 512 .
  • the collector of the IGBT element 511 extends out of the package of the power semiconductor device to form a high voltage pin 505 of the power semiconductor device.
  • the emitter of the IGBT element 512 extends out of the package of the power semiconductor device to form a low voltage pin 504 of the power semiconductor device.
  • the control terminal of the IGBT element 511 extends out of the package of the power semiconductor device through the pin subunit 53 to form an advanced control pin 5021 of the power semiconductor device.
  • the control terminal of the IGBT element 512 extends out of the package of the power semiconductor device through the pin subunit 53 to form a low-level control pin 5022 of the power semiconductor device.
  • the detection diode subunit 52 accommodates a plurality of detection diode units 521 , 522 .
  • the cathode of the detection diode unit 521 is connected to the collector of the corresponding IGBT element 511 in the transistor subunit 51 , and its anode extends out of the package of the power semiconductor device through the pin subunit 53 to form a detection pin 5031 of the power semiconductor device.
  • the cathode of the detection diode unit 522 is connected to the collector of the corresponding IGBT element 512 in the transistor subunit 51 , and its anode extends out of the package of the power semiconductor device through the pin subunit 53 to form a detection pin 5032 of the power semiconductor device.
  • the pin subunit 53 is also respectively connected to the emitters of the IGBT elements 511 and 512 in the transistor subunit 51, and these emitters are respectively led out from the pin subunit 53 to the package of the power semiconductor device to form the power semiconductor Potential reference pins 5011, 5012 of the device.
  • the voltage reference pins 5011, 5012 can serve as auxiliary emitters of the IGBT elements 511, 512, respectively.
  • the detection circuit of the power semiconductor device can detect the short circuit of the power semiconductor device through the potential reference pins 5011 , 5012 , the control pins 5021 , 5022 and the detection pins 5031 , 5032 of the pin subunit 53 .
  • the driver designer of the power semiconductor device only needs to configure the signal processing circuit to realize the short circuit detection of the power semiconductor device, It is no longer necessary to select the type and layout of the diode device based on factors such as the withstand voltage, electrical separation distance and creepage distance of the detection diode, and can overcome the time-consuming and labor-intensive defects of the prior art.
  • the detection diode subunit 52 is further integrated in the package of the power semiconductor device, there is a voltage blocking effect on the collector terminals of the IGBT elements 511 and 512 accommodated in the transistor subunit 51, and the detection pins 5031,
  • the potentials V 5031 and V 5032 on the 5032 will not rise to the kV level with the potential of the high-voltage pin 505, but under normal working conditions, they are kept at about 5V and not more than 100V under the driving of the detection circuit. Therefore, there will be no potential difference above 100V between the detection pins 5031 , 5032 , the potential reference pins 5011 , 5012 , the control pins 5021 , 5022 and the low voltage pin 504 in FIG. 5 .
  • this paper also provides a detection circuit for detecting whether there is a short-circuit fault in the half-bridge device shown in FIG. 5 .
  • FIG. 6 shows a schematic diagram of a detection circuit provided according to some embodiments of the present invention.
  • the detection circuit 61 of the half-bridge device shown in FIG. 5 includes two detection interfaces 611 , 612 .
  • the detection interface 611 is directly connected to the detection pin 5031 of the half-bridge device, so as to detect whether there is a short-circuit fault in the IGBT element 511 accommodated in the transistor subunit 51 of the half-bridge device.
  • the detection interface 612 is directly connected to the detection pin 5032 of the half-bridge device, so as to detect whether the IGBT element 512 accommodated in the transistor subunit 51 of the half-bridge device has a short-circuit fault.
  • the detection process and principle of the detection circuit 61 are basically the same as those of the prior art, and will not be repeated here.
  • the detection interfaces 611, 612 of the detection circuit 61 are connected to the detection pins 5031, 5032 of the half-bridge device to determine the short-circuit fault, and the detection pins 5031, 5032 are connected with the transistor subunit 51.
  • the detection diode sub-unit 52 is integrated between the collectors of each IGBT element 511, 512, and there is a voltage blocking effect on these collector terminals, and the detection interface 611, 612 does not have bus high voltage or IGBT turn-off overvoltage. risk. Therefore, the driver designer of the power semiconductor device does not need to configure additional detection diodes for the detection interfaces 611 and 612 of the detection circuit 61.
  • the device structure of the circuit and its space volume are reduced, which conforms to the direction of miniaturization and high power density of the detection circuit.
  • the detection diode subunit 52 is further integrated in the package of the power semiconductor device, there is a voltage blocking effect on the collector terminals of the IGBT elements 511 and 512 accommodated in the transistor subunit 51, and each detection pin 5031, The potentials V 5031 and V 5032 on the 5032 will not rise to the kV level with the potential of the high-voltage pin 505, but under normal working conditions, driven by the detection circuit, they remain at about 5V, not exceeding 100V. Therefore, the distance between the detection interfaces 611, 612 of the detection circuit 61 in FIG.
  • the power semiconductor device may include a plurality of transistor subunits 71 - 73 , a detection diode subunit 74 and a pin subunit 75 .
  • Two series-connected transistor (for example: IGBT) elements 711-712, 721-722, 731-732 accommodated in each transistor sub-unit 71-73 respectively form a bridge arm circuit, and these three bridge arm circuits are connected in parallel to form a single-phase bridge device.
  • Each of the IGBT elements 711 to 712, 721 to 722, and 731 to 732 includes a collector, an emitter, and a gate, respectively.
  • the collector electrodes of the IGBT elements 711 , 721 , 731 are used to connect to the high-voltage bus bar, so as to serve as the high-voltage power terminals of the respective IGBT elements 711 , 721 , 731 .
  • the emitters of the IGBT elements 711 , 721 , 731 are respectively connected to the collectors of the corresponding low-level IGBT elements 712 , 722 , 732 to serve as the low-voltage power terminals of the IGBT elements 711 , 721 , 731 .
  • the collectors of the IGBT elements 712 , 722 , 732 are respectively connected to the emitters of the corresponding advanced IGBT elements 711 , 721 , 731 to serve as high-voltage power terminals of the IGBT elements 712 , 722 , 732 .
  • the emitters of the IGBT elements 712 , 722 , 732 are grounded to serve as the low-voltage power terminals of the respective IGBT elements 712 , 722 , 732 .
  • the collectors of the IGBT elements 711, 721, 731 respectively extend out of the package of the power semiconductor device from the corresponding transistor sub-units 71-73 to form a plurality of high voltage pins 705, 707, 709 of the power semiconductor device.
  • the emitters of the IGBT elements 712 , 722 , 732 respectively extend out of the package of the power semiconductor device from the corresponding transistor subunits 71 - 73 to form a plurality of low voltage pins 704 , 706 , 708 of the power semiconductor device.
  • the control terminals of the IGBT elements 711, 721, and 731 in the transistor subunits 71-73 are connected inside the transistor subunit 71, and extend out of the package of the power semiconductor device through the pin subunit 75 to form an advanced control lead of the power semiconductor device.
  • the control terminals of the IGBT elements 712, 722, and 732 in the transistor subunits 71-73 are connected inside the transistor subunit 71, and extend out of the package of the power semiconductor device through the pin subunit 75 to form the low-level control leads of the power semiconductor device.
  • the detection diode subunit 74 accommodates a plurality of detection diode units 721 , 722 .
  • the cathode of the detection diode unit 721 is connected to the collector of the corresponding IGBT element 711 in the transistor subunit 71 , and its anode extends out of the package of the power semiconductor device through the pin subunit 75 to form a detection pin 7031 of the power semiconductor device.
  • the cathode of the detection diode unit 722 is connected to the collector of the corresponding IGBT element 712 in the transistor subunit 71 , and its anode extends out of the package of the power semiconductor device through the pin subunit 75 to form a detection pin 7032 of the power semiconductor device.
  • the pin subunit 75 is also respectively connected to the emitters of the IGBT elements 711, 721, and 731 in the transistor subunits 71-73, and these emitters are drawn out from the pin subunit 75 to the package of the power semiconductor device to form The advanced potential reference pin 7011 of the power semiconductor device.
  • the voltage reference pin 7011 can serve as an auxiliary emitter of the IGBT elements 711 , 721 , 731 .
  • the pin subunit 75 is also respectively connected to the emitters of the IGBT elements 712, 722, and 732 in the transistor subunits 71-73, and these emitters are led out from the pin subunit 75 to the package of the power semiconductor device to form the power Low-level potential reference pin 7012 of the semiconductor device.
  • the voltage reference pin 7012 can serve as an auxiliary emitter for the IGBT elements 712 , 722 , 732 .
  • the detection circuit of the power semiconductor device can detect the short circuit of the power semiconductor device through the potential reference pins 7011, 7012, the control pins 7021, 7022 and the detection pins 7031, 7032 of the pin subunit 75.
  • the driver designer of the power semiconductor device only needs to configure the signal processing circuit to realize the short circuit detection of the power semiconductor device, It is no longer necessary to select the type and layout of the diode device based on factors such as the withstand voltage, electrical separation distance and creepage distance of the detection diode, and can overcome the time-consuming and labor-intensive defects of the prior art.
  • the detection diode sub-unit 74 is further integrated in the package of the power semiconductor device, there are The effect of voltage blocking, the potentials V 7031 and V 7032 on the detection pins 7031 and 7032 will not rise to the kV level with the potential of the high-voltage pin 709, but will remain at Around 5V, not more than 100V. Therefore, there will be no potential difference above 100V between the detection pins 7031 , 7032 and the potential reference pin 701 , the control pins 7021 , 7022 and the low voltage pins 704 , 706 , 708 in FIG. 7 .
  • the single-phase bridge device shown in FIG. 7 involves terminal voltages of two-stage transistor elements, and two detection interfaces need to be configured to detect whether there is a short circuit fault through its detection pins 7031 and 7032 .
  • technicians can select the fault detection circuit 61 shown in FIG. 6, and connect its detection interfaces 611 and 612 to the detection pins 7031 and 7032 of the single-phase bridge device respectively to detect the single-phase bridge device Whether the IGBT elements 711-712, 721-722, 731-732 accommodated in the transistor sub-units 71-73 have a short-circuit fault, the detection process and principle are basically the same as those of the prior art, and will not be repeated here.
  • the power semiconductor device provided by the present invention may also include a multi-phase bridge device with multiple bridge arm circuits, including but not limited to an H-bridge device and a three-phase bridge device.
  • a multi-phase bridge structure each bridge arm is independent, and each transistor device has its own independent detection diode unit.

Abstract

The present invention provides a power semiconductor device. The power semiconductor device comprises: at least one transistor element, wherein the transistor element comprises a high-voltage power end, a low-voltage power end, and a control end, the high-voltage power end extends out of a package of the power semiconductor device to form a high-voltage pin of the power semiconductor device, the low-voltage power end extends out of the package of the power semiconductor device to form a low-voltage pin of the power semiconductor device, and the control end extends out of the package of the power semiconductor device to form a control pin of the power semiconductor device; and at least one detection diode unit, wherein a cathode of the detection diode unit is connected to the high-voltage power end of the at least one transistor element, and an anode of the detection diode unit extends out of the package of the power semiconductor device to form a detection pin of the power semiconductor device.

Description

一种功率半导体器件A power semiconductor device 技术领域technical field
本发明涉及功率半导体器件的技术领域,尤其涉及一种集成了检测二极管的功率半导体器件。The invention relates to the technical field of power semiconductor devices, in particular to a power semiconductor device integrated with a detection diode.
背景技术Background technique
在功率半导体器件的应用中,会不可避免地因为器件老化、控制电路异常、散热异常、输出短路等原因导致电力电子装置进入异常状态,并导致功率半导体器件进入短路工况。为了保护电力电子装置并防止故障扩大,实际应用中需考虑功率半导体器件短路保护。In the application of power semiconductor devices, it is inevitable that due to device aging, abnormal control circuit, abnormal heat dissipation, output short circuit and other reasons, the power electronic device will enter an abnormal state, and the power semiconductor device will enter a short circuit condition. In order to protect power electronic devices and prevent fault expansion, short-circuit protection of power semiconductor devices needs to be considered in practical applications.
为了实现功率半导体器件短路保护,首先要进行功率半导体器件短路检测。常用的功率半导体器件短路检测方式为二极管退保和检测。请参考图1,图1示出了一种传统功率半导体器件的故障检测电路的示意图。In order to realize the short-circuit protection of the power semiconductor device, the short-circuit detection of the power semiconductor device must be carried out first. Commonly used short-circuit detection methods for power semiconductor devices are diode tripping and detection. Please refer to FIG. 1 , which shows a schematic diagram of a fault detection circuit of a conventional power semiconductor device.
如图1所示,在进行传统功率半导体器件12的短路保护时,功率半导体器件的驱动电路(未绘示)可以首先利用检测二极管112阻断功率半导体器件关断时的高压,并在功率半导体器件12开通时由检测电路11利用检测二极管112来检测功率半导体器件12的端电压,从而实现功率半导体器件12的短路检测。在该方案中,检测二极管112需要在功率半导体器件12关断过程中及关断状态下承受功率半导体器件12的关断过电压与母线电压。因此,检测二极管112的选型与布局是功率半导体驱动电路设计的关键之一。As shown in Figure 1, when carrying out the short-circuit protection of the traditional power semiconductor device 12, the drive circuit (not shown) of the power semiconductor device can first use the detection diode 112 to block the high voltage when the power semiconductor device is turned off, and When the device 12 is turned on, the detection circuit 11 uses the detection diode 112 to detect the terminal voltage of the power semiconductor device 12 , thereby realizing the short circuit detection of the power semiconductor device 12 . In this solution, the detection diode 112 needs to withstand the turn-off overvoltage and the bus voltage of the power semiconductor device 12 during the turn-off process and the turn-off state of the power semiconductor device 12 . Therefore, the selection and layout of the detection diode 112 is one of the keys to the design of the power semiconductor driving circuit.
然而,现有的功率半导体器件12普遍未集成检测二极管112,需要由功率半导体器件12的驱动设计人员在驱动电路设计时进行选型。功率半导体器件12的驱动设计人员需要考虑检测二极管112的耐压、电气间隔距离及爬电距离等因素来进行检测二极管112的选型与布局,存在费时费力的缺陷。However, the existing power semiconductor device 12 generally does not integrate the detection diode 112 , and the driving designer of the power semiconductor device 12 needs to select the type when designing the driving circuit. The driver designer of the power semiconductor device 12 needs to consider factors such as the withstand voltage, electrical separation distance and creepage distance of the detection diode 112 to select the type and layout of the detection diode 112 , which is time-consuming and labor-intensive.
进一步地,现有的高压二极管耐压一般在1000V~2000V之间,而商用的高压功率半导体器件12的最高阻断电压一般为6500V,因此需要选择4~7个,甚至更多串联的高压二极管来组成功率半导体器件12的故障检测二极管112,存在器件结构复杂、体积庞大的缺陷,不符合功率半导体器件封装小型化、高功率密度的方向发展。Furthermore, the withstand voltage of existing high-voltage diodes is generally between 1000V and 2000V, while the highest blocking voltage of commercial high-voltage power semiconductor devices 12 is generally 6500V, so it is necessary to select 4-7 or even more high-voltage diodes connected in series The fault detection diode 112 used to form the power semiconductor device 12 has the disadvantages of complex device structure and bulky volume, which is not in line with the development direction of power semiconductor device packaging miniaturization and high power density.
更进一步地,现有功率半导体器件12的最高阻断电压一般为6500V,其高压功率端121与其控制端120及低压功率端122对应的引脚之间的间隔距离存在6500V的电气隔离需求及防爬电设计需求。对应地,现有功率半导体器件12的接地检测电路11的各检测接口之间的间隔距离也存在6500V的电气隔离需求及防爬电设计需求。这些电气隔离需求及防爬电设计需求严重限制了功率半导体器件封装小型化、高功率密度的发展趋势,不利于功率半导体器件的进一步发展。Furthermore, the highest blocking voltage of the existing power semiconductor device 12 is generally 6500V, and the distance between the high-voltage power terminal 121 and the pins corresponding to the control terminal 120 and the low-voltage power terminal 122 has an electrical isolation requirement of 6500V and prevents Creepage design requirements. Correspondingly, the separation distance between the detection interfaces of the ground detection circuit 11 of the existing power semiconductor device 12 also has a 6500V electrical isolation requirement and an anti-creepage design requirement. These electrical isolation requirements and anti-creepage design requirements severely limit the development trend of power semiconductor device packaging miniaturization and high power density, which is not conducive to the further development of power semiconductor devices.
为了克服现有技术存在的上述缺陷,本领域亟需一种功率半导体器件的结构方案,用于避免驱动设计人员选型与布局检测二极管的麻烦、简化功率半导体器件的器件结构,并克服功率半导体器件的电气隔离需求及防爬电设计需求,以推进功率半导体器件向封装小型化及高功率密度方向的发展。In order to overcome the above-mentioned defects in the prior art, there is an urgent need in the art for a structural solution for power semiconductor devices, which is used to avoid the trouble of driving designers in selecting types and layout detection diodes, simplify the device structure of power semiconductor devices, and overcome power semiconductor devices. Electrical isolation requirements of devices and anti-creepage design requirements to promote the development of power semiconductor devices in the direction of package miniaturization and high power density.
发明内容Contents of the invention
以下给出一个或多个方面的简要概述以提供对这些方面的基本理解。此概述不是所有构想到的方面的详尽综览,并且既非旨在指认出所有方面的关键性或决定性要素亦非试图界定任何或所有方面的范围。其唯一的目的是要以简化形式给出一个或多个方面的一些概念以为稍后给出的更加详细的描述之前序。A brief summary of one or more aspects is presented below to provide a basic understanding of these aspects. This summary is not an exhaustive overview of all contemplated aspects and is intended to neither identify key or critical elements of all aspects nor attempt to delineate the scope of any or all aspects. Its sole purpose is to present some concepts of one or more aspects in a simplified form as a prelude to the more detailed description that is presented later.
为了克服现有技术存在的上述缺陷,本发明提供了一种功率半导体器件,能够避免驱动设计人员选型与布局检测二极管的麻烦、简化功率半导体器件及其检测电路的器件结构,并克服功率半导体器件和/或接地检测电路的电气隔离需求及防爬电设计需求,以推进功率半导体器件向封装小型化及高功率密度方向的发展。In order to overcome the above-mentioned defects in the prior art, the present invention provides a power semiconductor device, which can avoid the trouble of driver designers in selecting types and laying out detection diodes, simplify the device structure of power semiconductor devices and their detection circuits, and overcome the problems of power semiconductor devices. Electrical isolation requirements and anti-creepage design requirements for devices and/or ground detection circuits to promote the development of power semiconductor devices in the direction of package miniaturization and high power density.
具体来说,本发明提供的上述功率半导体器件,包括:至少一个晶体管元件,其中,所述晶体管元件包括高压功率端、低压功率端及控制端,所述高压功率端延伸出所述功率半导体器件的封装以构成所述功率半导体器件的高压引脚,所述低压功率端延伸出所述功率半导体器件的封装以构成所述功率半导体器件的低压引脚,所述控制端延伸出所述功率半导体器件的封装以构成所述功率半导体器件的控制引脚;以及至少一个检测二极管单元,其中,所述检测二极管单元的阴极连接所述至少一个晶体管元件的所述高压功率端,所述检测二极管单元的阳极延伸出所述功率半导体器件的封装以构成所述功率半导体器件的检测引脚。Specifically, the above-mentioned power semiconductor device provided by the present invention includes: at least one transistor element, wherein the transistor element includes a high-voltage power terminal, a low-voltage power terminal, and a control terminal, and the high-voltage power terminal extends out of the power semiconductor device the package of the power semiconductor device to form the high-voltage pin of the power semiconductor device, the low-voltage power terminal extends out of the package of the power semiconductor device to form the low-voltage pin of the power semiconductor device, and the control terminal extends out of the power semiconductor device The packaging of the device to form the control pin of the power semiconductor device; and at least one detection diode unit, wherein the cathode of the detection diode unit is connected to the high-voltage power terminal of the at least one transistor element, and the detection diode unit The anode of the anode extends out of the package of the power semiconductor device to form a detection pin of the power semiconductor device.
进一步地,在本发明的一些实施例中,所述检测引脚到所述低压引脚和/或所述控制引脚的距离可以小于对应晶体管元件的阻断电压所对应的电气间隙和/或爬电距离。Further, in some embodiments of the present invention, the distance from the detection pin to the low-voltage pin and/or the control pin may be smaller than the electrical gap and/or the blocking voltage of the corresponding transistor element creepage distance.
进一步地,在本发明的一些实施例中,所述低压功率端还延伸出所述功率半导体器件的封装以构成所述功率半导体器件的电位基准引脚。所述检测引脚到所述电位基准引脚的距离可以小于所述对应晶体管元件的阻断电压所对应的电气间隙和/或爬电距离。Further, in some embodiments of the present invention, the low-voltage power terminal also extends out of the package of the power semiconductor device to form a potential reference pin of the power semiconductor device. The distance from the detection pin to the potential reference pin may be smaller than the electrical clearance and/or creepage distance corresponding to the blocking voltage of the corresponding transistor element.
进一步地,在本发明的一些实施例中,所述检测二极管单元包括多个串联的二极管元件。所述多个串联的二极管元件的反向阻断电压之和大于或等于所述检测二极管单元对应的至少一个晶体管元件的阻断电压。Further, in some embodiments of the present invention, the detection diode unit includes a plurality of diode elements connected in series. The sum of the reverse blocking voltages of the plurality of diode elements connected in series is greater than or equal to the blocking voltage of at least one transistor element corresponding to the detection diode unit.
进一步地,在本发明的一些实施例中,所述功率半导体器件包括多个并联的晶体管元件,以及一个检测二极管单元。所述多个并联的晶体管元件的所述高压功率端分别延伸出所述功率半导体器件的封装,以构成所述功率半导体器件的多个所述高压引脚。所述多个并联的晶体管元件的所述低压功率端分别延伸出所述 功率半导体器件的封装,以构成所述功率半导体器件的多个所述低压引脚。所述多个并联的晶体管元件的所述控制端统一延伸出所述功率半导体器件的封装,以构成所述功率半导体器件的所述控制引脚。所述检测二极管单元的所述阴极连接第一晶体管元件的所述高压功率端。所述检测二极管单元的所述阳极延伸出所述功率半导体器件的封装以构成所述功率半导体器件的所述检测引脚。Further, in some embodiments of the present invention, the power semiconductor device includes a plurality of transistor elements connected in parallel, and a detection diode unit. The high-voltage power terminals of the plurality of parallel-connected transistor elements respectively extend out of the package of the power semiconductor device to form a plurality of the high-voltage pins of the power semiconductor device. The low-voltage power ends of the plurality of parallel-connected transistor elements respectively extend out of the package of the power semiconductor device to form a plurality of the low-voltage pins of the power semiconductor device. The control terminals of the plurality of parallel-connected transistor elements uniformly extend out of the package of the power semiconductor device to form the control pin of the power semiconductor device. The cathode of the detection diode unit is connected to the high voltage power end of the first transistor element. The anode of the detection diode unit extends out of the package of the power semiconductor device to form the detection pin of the power semiconductor device.
进一步地,在本发明的一些实施例中,所述功率半导体器件包括多个串联的晶体管元件,以及多个所述检测二极管单元。第一晶体管元件的所述高压功率端延伸出所述功率半导体器件的封装,以构成所述功率半导体器件的高压引脚。所述第一晶体管元件的所述低压功率端连接第二晶体管元件的所述高压功率端,以构成桥臂电路。所述第二晶体管元件的所述低压功率端延伸出所述功率半导体器件的封装,以构成所述功率半导体器件的低压引脚。所述第一晶体管元件及所述第二晶体管元件的所述控制端分别延伸出所述功率半导体器件的封装,以构成所述功率半导体器件的多个所述控制引脚。第一检测二极管单元的所述阴极连接所述第一晶体管元件的所述高压功率端。所述第一检测二极管单元的所述阳极延伸出所述功率半导体器件的封装,以构成所述功率半导体器件的第一检测引脚。第二检测二极管单元的所述阴极连接所述第二晶体管元件的所述高压功率端。所述第二检测二极管单元的所述阳极延伸出所述功率半导体器件的封装,以构成所述功率半导体器件的第二检测引脚。Further, in some embodiments of the present invention, the power semiconductor device includes a plurality of transistor elements connected in series, and a plurality of detection diode units. The high-voltage power terminal of the first transistor element extends out of the package of the power semiconductor device to form a high-voltage pin of the power semiconductor device. The low voltage power end of the first transistor element is connected to the high voltage power end of the second transistor element to form a bridge arm circuit. The low-voltage power end of the second transistor element extends out of the package of the power semiconductor device to form a low-voltage pin of the power semiconductor device. The control terminals of the first transistor element and the second transistor element respectively extend out of the package of the power semiconductor device to form a plurality of control pins of the power semiconductor device. The cathode of the first detection diode unit is connected to the high voltage power terminal of the first transistor element. The anode of the first detection diode unit extends out of the package of the power semiconductor device to form a first detection pin of the power semiconductor device. The cathode of the second detection diode unit is connected to the high voltage power terminal of the second transistor element. The anode of the second detection diode unit extends out of the package of the power semiconductor device to form a second detection pin of the power semiconductor device.
进一步地,在本发明的一些实施例中,所述功率半导体器件包括多个所述桥臂电路。各所述桥臂电路的所述第一晶体管元件的所述高压功率端分别延伸出所述功率半导体器件的封装,以构成所述功率半导体器件的多个所述高压引脚。各所述桥臂电路的所述第二晶体管元件的所述低压功率端分别延伸出所述功率半导体器件的封装,以构成所述功率半导体器件的多个所述低压引脚。各所述桥臂电路的所述第一晶体管元件的所述控制端统一延伸出所述功率半导体器件的封装,以构成所述功率半导体器件的第一控制引脚。各所述桥臂电路的所述第二晶体管元件统一延伸出所述功率半导体器件的封装,以构成所述功率半导体器件的第二控制引脚。所述第一检测二极管单元的所述阴极连接各所述桥臂电路的所述第一晶体管元件的所述高压功率端。所述第二检测二极管单元的所述阴极连接各所述桥臂电路的所述第二晶体管元件的所述高压功率端。Further, in some embodiments of the present invention, the power semiconductor device includes a plurality of bridge arm circuits. The high-voltage power ends of the first transistor elements of each of the bridge arm circuits respectively extend out of the package of the power semiconductor device to form a plurality of the high-voltage pins of the power semiconductor device. The low-voltage power terminals of the second transistor elements of each of the bridge arm circuits respectively extend out of the package of the power semiconductor device to form a plurality of the low-voltage pins of the power semiconductor device. The control terminals of the first transistor elements of each of the bridge arm circuits uniformly extend out of the package of the power semiconductor device to form a first control pin of the power semiconductor device. The second transistor elements of each of the bridge arm circuits uniformly extend out of the package of the power semiconductor device to form a second control pin of the power semiconductor device. The cathode of the first detection diode unit is connected to the high-voltage power end of the first transistor element of each of the bridge arm circuits. The cathode of the second detection diode unit is connected to the high voltage power end of the second transistor element of each of the bridge arm circuits.
进一步地,在本发明的一些实施例中,所述晶体管元件包括IGBT,所述IGBT的高压功率端为其集电极,所述IGBT的低压功率端为其发射极,所述IGBT的控制端为其栅极,所述IGBT的电位基准引脚为其辅助发射极。更进一步地,在这些实施例或另一些实施例中,所述晶体管元件包括MOSFET,所述MOSFET的高压功率端为其漏极,所述MOSFET的低压功率端为其源极,所述MOSFET的控制端为其栅极,所述MOSFET的电位基准引脚为其辅助源极。Further, in some embodiments of the present invention, the transistor element includes an IGBT, the high-voltage power terminal of the IGBT is its collector, the low-voltage power terminal of the IGBT is its emitter, and the control terminal of the IGBT is Its gate, the potential reference pin of the IGBT is its auxiliary emitter. Furthermore, in these embodiments or some other embodiments, the transistor element includes a MOSFET, the high-voltage power terminal of the MOSFET is its drain, the low-voltage power terminal of the MOSFET is its source, and the MOSFET’s The control terminal is its gate, and the potential reference pin of the MOSFET is its auxiliary source.
附图说明Description of drawings
在结合以下附图阅读本公开的实施例的详细描述之后,能够更好地理解本发明的上述特征和优点。在附图中,各组件不一定是按比例绘制,并且具有类似的相关特性或特征的组件可能具有相同或相近的附图标记。The above-mentioned features and advantages of the present invention can be better understood after reading the detailed description of the embodiments of the present disclosure in conjunction with the following drawings. In the drawings, components are not necessarily drawn to scale, and components with similar related properties or characteristics may have the same or similar reference numerals.
图1示出了一种传统功率半导体器件的故障检测电路的示意图。FIG. 1 shows a schematic diagram of a fault detection circuit of a conventional power semiconductor device.
图2A示出了根据本发明的一些实施例提供的功率半导体器件的电路封装示意图。FIG. 2A shows a schematic diagram of a circuit package of a power semiconductor device provided according to some embodiments of the present invention.
图2B示出了根据本发明的一些实施例提供的功率半导体器件的封装结构示意图。FIG. 2B shows a schematic diagram of a package structure of a power semiconductor device provided according to some embodiments of the present invention.
图3示出了根据本发明的一些实施例提供的检测电路的示意图。Fig. 3 shows a schematic diagram of a detection circuit provided according to some embodiments of the present invention.
图4示出了根据本发明的一些实施例提供的功率半导体器件的电路封装示意图。Fig. 4 shows a schematic diagram of a circuit package of a power semiconductor device provided according to some embodiments of the present invention.
图5示出了根据本发明的一些实施例提供的功率半导体器件的电路封装示意图。FIG. 5 shows a schematic diagram of a circuit package of a power semiconductor device provided according to some embodiments of the present invention.
图6示出了根据本发明的一些实施例提供的检测电路的示意图。Fig. 6 shows a schematic diagram of a detection circuit provided according to some embodiments of the present invention.
图7示出了根据本发明的一些实施例提供的功率半导体器件的电路封装示意图。FIG. 7 shows a schematic diagram of a circuit package of a power semiconductor device provided according to some embodiments of the present invention.
具体实施方式detailed description
以下由特定的具体实施例说明本发明的实施方式,本领域技术人员可由本说明书所揭示的内容轻易地了解本发明的其他优点及功效。虽然本发明的描述将结合优选实施例一起介绍,但这并不代表此发明的特征仅限于该实施方式。恰恰相反,结合实施方式作发明介绍的目的是为了覆盖基于本发明的权利要求而有可能延伸出的其它选择或改造。为了提供对本发明的深度了解,以下描述中将包含许多具体的细节。本发明也可以不使用这些细节实施。此外,为了避免混乱或模糊本发明的重点,有些具体细节将在描述中被省略。The implementation of the present invention will be illustrated by specific specific examples below, and those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification. Although the description of the invention will be presented in conjunction with a preferred embodiment, it is not intended that the features of the invention be limited to that embodiment only. On the contrary, the purpose of introducing the invention in conjunction with the embodiments is to cover other options or modifications that may be extended based on the claims of the present invention. The following description contains numerous specific details in order to provide a thorough understanding of the present invention. The invention may also be practiced without these details. Also, some specific details will be omitted from the description in order to avoid obscuring or obscuring the gist of the present invention.
在本发明的描述中,需要说明的是,除非另有明确的规定和限定,术语“安装”、“相连”、“连接”应做广义理解,例如,可以是固定连接,也可以是可拆卸连接,或一体地连接;可以是机械连接,也可以是电连接;可以是直接相连,也可以通过中间媒介间接相连,可以是两个元件内部的连通。对于本领域的普通技术人员而言,可以具体情况理解上述术语在本发明中的具体含义。In the description of the present invention, it should be noted that unless otherwise specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection or a detachable connection. Connected, or integrally connected; it can be mechanically connected or electrically connected; it can be directly connected or indirectly connected through an intermediary, and it can be the internal communication of two components. Those of ordinary skill in the art can understand the specific meanings of the above terms in the present invention in specific situations.
另外,在以下的说明中所使用的“上”、“下”、“左”、“右”、“顶”、“底”、“水平”、“垂直”应被理解为该段以及相关附图中所绘示的方位。此相对性的用语仅是为了方便说明之用,其并不代表其所叙述的装置需以特定方位来制造或运作,因此不应理解为对本发明的限制。In addition, "up", "down", "left", "right", "top", "bottom", "horizontal", and "vertical" used in the following descriptions should be understood The orientation shown in the figure. The relative terms are used for convenience of description only, and do not imply that the device described therein must be manufactured or operated in a specific orientation, and thus should not be construed as limiting the present invention.
能理解的是,虽然在此可使用用语“第一”、“第二”、“第三”等来叙述 各种组件、区域、层和/或部分,这些组件、区域、层和/或部分不应被这些用语限定,且这些用语仅是用来区别不同的组件、区域、层和/或部分。因此,以下讨论的第一组件、区域、层和/或部分可在不偏离本发明一些实施例的情况下被称为第二组件、区域、层和/或部分。It can be understood that although the terms "first", "second", "third", etc. may be used herein to describe various components, regions, layers and/or sections, these components, regions, layers and/or sections It should not be limited by these terms, and these terms are only used to distinguish different components, regions, layers and/or sections. Thus, a first component, region, layer and/or section discussed below could be termed a second component, region, layer and/or section without departing from some embodiments of the present invention.
如上所述,现有的功率半导体器件12普遍未集成检测二极管112,需要由功率半导体器件12的驱动设计人员在驱动电路设计时进行选型。功率半导体器件12的驱动设计人员需要考虑检测二极管112的耐压、电气间隔距离及爬电距离等因素来进行检测二极管112的选型与布局,存在费时费力的缺陷。进一步地,现有的高压二极管耐压一般在1000V~2000V之间,而商用的高压功率半导体器件12的最高阻断电压一般为6500V,因此需要选择4~7个,甚至更多串联的高压二极管来组成功率半导体器件12的故障检测二极管112,存在器件结构复杂、体积庞大的缺陷,不符合功率半导体器件封装小型化、高功率密度的方向发展。更进一步地,现有功率半导体器件12的最高阻断电压一般为6500V,其高压功率端121与其控制端120及低压功率端122对应的引脚之间的间隔距离存在6500V的电气隔离需求及防爬电设计需求。对应地,现有功率半导体器件12的接地检测电路11的各检测接口之间的间隔距离,以及各检测接口到地的间隔距离也存在6500V*n的电气隔离需求及防爬电设计需求,其中,n为各检测接口之间及各检测接口到地的间隔级数。这些电气隔离需求及防爬电设计需求严重限制了功率半导体器件封装小型化、高功率密度的发展趋势,不利于功率半导体器件的进一步发展。As mentioned above, the existing power semiconductor device 12 generally does not integrate the detection diode 112 , and the driving designer of the power semiconductor device 12 needs to select the type when designing the driving circuit. The driver designer of the power semiconductor device 12 needs to consider factors such as the withstand voltage, electrical separation distance and creepage distance of the detection diode 112 to select the type and layout of the detection diode 112 , which is time-consuming and labor-intensive. Furthermore, the withstand voltage of existing high-voltage diodes is generally between 1000V and 2000V, while the highest blocking voltage of commercial high-voltage power semiconductor devices 12 is generally 6500V, so it is necessary to select 4-7 or even more high-voltage diodes connected in series The fault detection diode 112 used to form the power semiconductor device 12 has the disadvantages of complex device structure and bulky volume, which is not in line with the development direction of power semiconductor device packaging miniaturization and high power density. Furthermore, the highest blocking voltage of the existing power semiconductor device 12 is generally 6500V, and the distance between the high-voltage power terminal 121 and the pins corresponding to the control terminal 120 and the low-voltage power terminal 122 has an electrical isolation requirement of 6500V and prevents Creepage design requirements. Correspondingly, the separation distance between the detection interfaces of the ground detection circuit 11 of the existing power semiconductor device 12, and the separation distance between each detection interface and the ground also have an electrical isolation requirement of 6500V*n and an anti-creepage design requirement, wherein , n is the number of intervals between each detection interface and each detection interface to the ground. These electrical isolation requirements and anti-creepage design requirements severely limit the development trend of power semiconductor device packaging miniaturization and high power density, which is not conducive to the further development of power semiconductor devices.
为了克服现有技术存在的上述缺陷,本发明提供了一种功率半导体器件,能够避免驱动设计人员选型与布局检测二极管的麻烦、简化功率半导体器件的器件结构,并克服功率半导体器件的电气隔离需求及防爬电设计需求,以推进功率半导体器件向封装小型化及高功率密度方向的发展。In order to overcome the above-mentioned defects in the prior art, the present invention provides a power semiconductor device, which can avoid the trouble of driver designer selection and layout detection diodes, simplify the device structure of the power semiconductor device, and overcome the electrical isolation of the power semiconductor device requirements and anti-creepage design requirements to promote the development of power semiconductor devices in the direction of package miniaturization and high power density.
请结合参考图2A及图2B。图2A示出了根据本发明的一些实施例提供的功率半导体器件的电路封装示意图。图2B示出了根据本发明的一些实施例提供的功率半导体器件的封装结构示意图。Please refer to FIG. 2A and FIG. 2B together. FIG. 2A shows a schematic diagram of a circuit package of a power semiconductor device provided according to some embodiments of the present invention. FIG. 2B shows a schematic diagram of a package structure of a power semiconductor device provided according to some embodiments of the present invention.
如图2A所示,在本发明的一些实施例中,功率半导体器件是一种大电流容量的绝缘栅双极型晶体管(Insulated Gate Bipolar Transistor,IGBT)器件,其中包括多个并联的IGBT元件。该功率半导体器件包括多个晶体管子单元21~23,其中,每个晶体管子单元21~23中容纳一个IGBT元件。具体来说,晶体管子单元21中容纳的IGBT元件包括集电极、发射极及栅极。该集电极用于连接高压母线,以作为该IGBT元件的高压功率端。该发射极用于接地或连接另一低级IGBT元件的集电极,以作为该IGBT元件的低压功率端。该栅极用于连接驱动电路,以作为该IGBT元件的控制端。同样地,晶体管子单元22、23中容纳的IGBT元件也分别包括集电极、发射极及栅极,并具有相同的作用,在此不再赘述。通过 并联多个IGBT元件,该大电流容量的IGBT器件可以承载数倍于普通IGBT元件的电流。As shown in FIG. 2A , in some embodiments of the present invention, the power semiconductor device is a large current capacity insulated gate bipolar transistor (Insulated Gate Bipolar Transistor, IGBT) device, which includes a plurality of IGBT elements connected in parallel. The power semiconductor device includes a plurality of transistor subunits 21 - 23 , wherein each transistor subunit 21 - 23 accommodates one IGBT element. Specifically, the IGBT elements accommodated in the transistor subunit 21 include a collector, an emitter and a gate. The collector is used to connect to the high-voltage bus as the high-voltage power terminal of the IGBT element. The emitter is used to be grounded or connected to the collector of another low-level IGBT component as a low-voltage power terminal of the IGBT component. The gate is used to connect to the driving circuit as a control terminal of the IGBT element. Similarly, the IGBT components accommodated in the transistor sub-units 22 and 23 also respectively include a collector, an emitter and a gate, and have the same function, which will not be repeated here. By connecting multiple IGBT elements in parallel, the IGBT device with large current capacity can carry current several times that of ordinary IGBT elements.
如图2A及图2B所示,晶体管子单元21~23中容纳的IGBT元件的集电极分别延伸出功率半导体器件的封装,以构成该功率半导体器件的多个高压引脚205、207、209。晶体管子单元21~23中容纳的IGBT元件的发射极分别延伸出功率半导体器件的封装,以构成该功率半导体器件的多个低压引脚204、206、208。晶体管子单元21~23中容纳的IGBT元件的控制端在该功率半导体器件内部的晶体管子单元21相连,再统一通过引脚子单元25延伸出功率半导体器件的封装,以构成功率半导体器件的控制引脚202。As shown in FIG. 2A and FIG. 2B , the collectors of the IGBT elements accommodated in the transistor subunits 21 - 23 respectively extend out of the package of the power semiconductor device to form a plurality of high voltage pins 205 , 207 , 209 of the power semiconductor device. The emitters of the IGBT elements accommodated in the transistor sub-units 21 - 23 respectively extend out of the package of the power semiconductor device to form a plurality of low- voltage pins 204 , 206 , 208 of the power semiconductor device. The control terminals of the IGBT elements accommodated in the transistor subunits 21-23 are connected to the transistor subunit 21 inside the power semiconductor device, and then uniformly extend out of the package of the power semiconductor device through the pin subunit 25 to form the control of the power semiconductor device. pin 202.
进一步地,如图2A所示,该功率半导体器件还包括检测二极管子单元24及引脚子单元25。该检测二极管子单元24中容纳一个或多个二极管元件。该二极管元件的阴极连接晶体管子单元21的IGBT元件的集电极,而其阳极通过引脚子单元25延伸出功率半导体器件的封装,以构成功率半导体器件的检测引脚203。一般情况下,IGBT元件的短路检测电流在10uA~100mA之间。在一些实施例中,该二极管元件的电流容量一般选择1~2A,留下充足的裕量以充分满足检测电路对大电流容量的IGBT器件的各晶体管子单元21~23的短路检测需求。Further, as shown in FIG. 2A , the power semiconductor device further includes a detection diode subunit 24 and a pin subunit 25 . One or more diode elements are housed in the detection diode subunit 24 . The cathode of the diode element is connected to the collector of the IGBT element of the transistor subunit 21 , and its anode extends out of the package of the power semiconductor device through the pin subunit 25 to form a detection pin 203 of the power semiconductor device. Generally, the short-circuit detection current of the IGBT element is between 10uA and 100mA. In some embodiments, the current capacity of the diode element is generally selected to be 1-2A, leaving enough margin to fully meet the short-circuit detection requirements of the detection circuit for each transistor sub-unit 21-23 of the IGBT device with a large current capacity.
在一些实施例中,针对最高阻断电压为6500V的IGBT元件,检测二极管子单元24中可以容纳一个或多个串联的二极管元件。该多个串联的二极管元件的反向阻断电压之和应当大于或等于各晶体管子单元21~23中对应IGBT元件的最高阻断电压(例如:6500V),以满足检测电路对阻断功率半导体器件关断时高压的需求,并保护故障检测电路及各检测引脚201~203免遭高压损害。In some embodiments, for IGBT elements with a maximum blocking voltage of 6500V, one or more diode elements connected in series may be accommodated in the detection diode subunit 24 . The sum of the reverse blocking voltages of the plurality of diode elements connected in series should be greater than or equal to the highest blocking voltage (for example: 6500V) of the corresponding IGBT element in each transistor subunit 21-23, so as to satisfy the detection circuit for blocking the power semiconductor High voltage is required when the device is turned off, and the fault detection circuit and each detection pin 201-203 are protected from high voltage damage.
更进一步地,如图2A所示,上述引脚子单元25还在晶体管子单元21进一步连接各晶体管子单元21~23的IGBT元件的发射极,将这些IGBT元件的发射极从引脚子单元25引出功率半导体器件的封装,以构成该功率半导体器件的电压基准引脚201。该电压基准引脚201可以作为该IGBT元件的辅助发射极。功率半导体器件的检测电路可以通过引脚子单元25的电压基准引脚201、控制引脚202及检测引脚203对功率半导体器件进行短路检测。Furthermore, as shown in FIG. 2A, the pin subunit 25 is further connected to the emitters of the IGBT elements of the transistor subunits 21-23 in the transistor subunit 21, and the emitters of these IGBT elements are separated from the pin subunits. 25 leads out from the package of the power semiconductor device to form the voltage reference pin 201 of the power semiconductor device. The voltage reference pin 201 can be used as an auxiliary emitter of the IGBT element. The detection circuit of the power semiconductor device can detect the short circuit of the power semiconductor device through the voltage reference pin 201 , the control pin 202 and the detection pin 203 of the pin subunit 25 .
需要注意的是,通过将适当阻断电压及适当电流容量的二极管元件集成到功率半导体器件的封装中,功率半导体器件的驱动设计人员只需要配置信号处理电路即可实现对功率半导体器件的短路检测,而不再需要根据检测二极管的耐压、电气间隔距离及爬电距离等因素来进行二极管器件的选型与布局,能够克服现有技术费时费力的缺陷。It should be noted that by integrating diode elements with appropriate blocking voltage and appropriate current capacity into the package of the power semiconductor device, the driver designer of the power semiconductor device only needs to configure the signal processing circuit to realize the short circuit detection of the power semiconductor device , instead of selecting and laying out the diode device based on factors such as the withstand voltage, electrical separation distance and creepage distance of the detection diode, which can overcome the time-consuming and labor-intensive defects of the prior art.
进一步地,通过将一个或多个串联的二极管元件集成到功率半导体器件的封装内部,有利于实现该多个二极管器件的空间排布优化,有利于简化功率半导体器件的检测电路的器件结构并缩小其空间体积,符合功率半导体器件封装小型化、高功率密度的方向发展。Further, by integrating one or more diode elements in series into the package of the power semiconductor device, it is beneficial to realize the optimization of the spatial arrangement of the multiple diode devices, and it is beneficial to simplify the device structure of the detection circuit of the power semiconductor device and reduce the size of the device. Its space volume is in line with the development direction of power semiconductor device package miniaturization and high power density.
更进一步地,由于功率半导体器件的封装中进一步集成了检测二极管子单元24,对各晶体管子单元21~23中容纳的IGBT元件的集电极端存在电压阻断的效果,检测引脚203上的电位V 203不会随高压引脚205、207、209的电位而上升到kV量级,而在正常工况下在检测电路的驱动下保持在5V左右,不超过100V。因此,图2B中的检测引脚203与电位基准引脚201、控制引脚202,以及低压引脚204、206、208之间都不会存在100V以上的电位差。因此,在设计功率半导体器件的封装及引脚排布时,不必遵循现有技术中kV量级的电气间隙及爬电距离的限制。 Furthermore, since the detection diode subunit 24 is further integrated in the package of the power semiconductor device, there is a voltage blocking effect on the collector terminals of the IGBT elements accommodated in each transistor subunit 21-23, and the detection pin 203 The potential V 203 will not rise to the kV level with the potentials of the high- voltage pins 205, 207, 209, but under normal working conditions, it is kept at about 5V and not more than 100V under the driving of the detection circuit. Therefore, there will be no potential difference above 100V between the detection pin 203 in FIG. 2B and the potential reference pin 201 , the control pin 202 , and the low voltage pins 204 , 206 , 208 . Therefore, when designing the package and pin arrangement of the power semiconductor device, it is not necessary to follow the limitations of the electrical clearance and creepage distance of the kV level in the prior art.
例如,在一些优选的实施例中,由于检测引脚203与电位基准引脚201及控制引脚202之间不会存在100V以上的电位差,检测引脚203与电位基准引脚201及控制引脚202之间的间距,可以突破单级IGBT元件6.5kV阻断电压对应的电气间隙和/或爬电距离的限制,从而按照检测引脚相对电位基准引脚的电位进行电气间隙与爬电距离设计,以推进功率半导体器件向封装小型化及高功率密度方向的发展。For example, in some preferred embodiments, since there will not be a potential difference of more than 100V between the detection pin 203 and the potential reference pin 201 and the control pin 202, the detection pin 203 and the potential reference pin 201 and the control pin The distance between the pins 202 can break through the limitation of the electrical clearance and/or creepage distance corresponding to the 6.5kV blocking voltage of the single-stage IGBT element, so that the electrical clearance and creepage distance can be determined according to the potential of the detection pin relative to the potential reference pin. Design to promote the development of power semiconductor devices in the direction of package miniaturization and high power density.
又例如,检测引脚203与各低压引脚204、206、208之间都不会存在100V以上的电位差,检测引脚203与各低压引脚204、206、208之间的间距,也可以突破单级IGBT元件6.5kV阻断电压对应的电气间隙和/或爬电距离的限制,从而按照检测引脚相对电位基准引脚的电位进行电气间隙与爬电距离设计,以推进功率半导体器件向封装小型化及高功率密度方向的发展。进一步地,检测引脚203与各低压引脚204、206、208之间也不再需要图2B所示的防爬电阶梯,一方面减小功率半导体器件在纵向的尺寸以推进功率半导体器件向封装小型化及高功率密度方向的发展,另一方面降低功率半导体器件的封装工艺的难度并降低封装成本。For another example, there will be no potential difference above 100V between the detection pin 203 and each low voltage pin 204, 206, 208, and the distance between the detection pin 203 and each low voltage pin 204, 206, 208 can also be Break through the limitation of the electrical gap and/or creepage distance corresponding to the 6.5kV blocking voltage of single-stage IGBT components, so as to design the electrical gap and creepage distance according to the potential of the detection pin relative to the potential reference pin, so as to promote the development of power semiconductor devices The development of packaging miniaturization and high power density. Further, the anti-creepage ladder shown in FIG. 2B is no longer needed between the detection pin 203 and each low- voltage pin 204, 206, 208. On the one hand, the vertical dimension of the power semiconductor device is reduced to promote the power semiconductor device to The development of packaging miniaturization and high power density, on the other hand, reduces the difficulty of the packaging process of power semiconductor devices and reduces the packaging cost.
此外,本文还提供了一种检测电路,用于检测图2A及图2B所示的大电流容量的IGBT器件是否存在短路故障。请参考图3,图3示出了根据本发明的一些实施例提供的检测电路的示意图。In addition, this paper also provides a detection circuit for detecting whether there is a short-circuit fault in the IGBT device with large current capacity shown in FIG. 2A and FIG. 2B . Please refer to FIG. 3 , which shows a schematic diagram of a detection circuit provided according to some embodiments of the present invention.
如图3所示,在本发明的一些实施例中,图2A及图2B所示的大电流容量的IGBT器件的检测电路31只包括一个检测接口311。该检测接口311直接连接上述大电流容量的IGBT器件的检测高压引脚203,以检测该大电流容量的IGBT器件的各晶体管子单元21~23中容纳的IGBT元件是否存在短路故障,其检测流程及原理与现有技术基本相同,在此不做赘述。As shown in FIG. 3 , in some embodiments of the present invention, the detection circuit 31 of the IGBT device with large current capacity shown in FIG. 2A and FIG. 2B only includes one detection interface 311 . The detection interface 311 is directly connected to the detection high-voltage pin 203 of the IGBT device with a large current capacity to detect whether there is a short-circuit fault in the IGBT elements accommodated in each transistor subunit 21-23 of the IGBT device with a large current capacity. The detection process And the principle is basically the same as that of the prior art, and will not be repeated here.
需要注意的是,由于该检测电路31的检测接口311是通过连接上述大电流容量的IGBT器件的检测引脚203来判断短路故障,而该检测引脚203与各晶体管子单元21~23中容纳的IGBT元件的集电极之间集成了检测二极管子单元24,对这些集电极端存在电压阻断的效果,该检测接口311不存在出现母线高压或IGBT关断过电压的风险。因此,功率半导体器件的驱动设计人员不需要为检测电路31 的检测接口311配置额外的检测二极管,一方面能够克服现有技术费时费力的缺陷,另一方面有利于简化功率半导体器件的检测电路的器件结构并缩小其空间体积,符合检测电路小型化、高功率密度的方向发展。It should be noted that since the detection interface 311 of the detection circuit 31 is connected to the detection pin 203 of the IGBT device with a large current capacity to determine the short-circuit fault, and the detection pin 203 is connected to each transistor subunit 21-23. The detection diode sub-unit 24 is integrated between the collectors of the IGBT components, and there is a voltage blocking effect on these collector terminals, and the detection interface 311 does not have the risk of bus high voltage or IGBT turn-off overvoltage. Therefore, the driver designer of the power semiconductor device does not need to configure an additional detection diode for the detection interface 311 of the detection circuit 31. On the one hand, it can overcome the time-consuming and labor-intensive defects of the prior art, and on the other hand, it is beneficial to simplify the detection circuit of the power semiconductor device. The structure of the device and its space volume are reduced, which is in line with the direction of miniaturization and high power density of the detection circuit.
进一步地,由于功率半导体器件的封装中进一步集成了检测二极管子单元24,对各晶体管子单元21~23中容纳的IGBT元件的集电极端存在电压阻断的效果,检测引脚203上的电位V 203不会随高压引脚205、207、209的电位V 209而上升到kV量级,而在正常工况下在检测电路的驱动下保持在5V左右,不超过100V。因此,图3中检测电路31的检测接口311到上述大电流容量的IGBT器件的各对应晶体管子单元21~23的低压引脚204、206、208,和/或控制引脚202的距离,可以突破单级IGBT元件6.5kV阻断电压对应的电气间隙和/或爬电距离的限制,从而按照检测引脚相对电位基准引脚的电位进行电气间隙与爬电距离设计,以使驱动电路设计布局更加紧凑,并使得整个电力电子装置体积更小、功率密度更高。 Further, since the detection diode subunit 24 is further integrated in the package of the power semiconductor device, there is a voltage blocking effect on the collector terminals of the IGBT elements accommodated in each transistor subunit 21-23, and the potential on the detection pin 203 V 203 will not rise to the kV level with the potential V 209 of the high- voltage pins 205, 207, 209, but under normal working conditions, it is kept at about 5V and not more than 100V under the driving of the detection circuit. Therefore, the distance from the detection interface 311 of the detection circuit 31 in FIG. 3 to the low- voltage pins 204, 206, 208 and/or control pins 202 of the corresponding transistor subunits 21-23 of the above-mentioned IGBT device with large current capacity can be Break through the limitation of the electrical gap and/or creepage distance corresponding to the 6.5kV blocking voltage of the single-stage IGBT element, so as to design the electrical gap and creepage distance according to the potential of the detection pin relative to the potential reference pin, so that the drive circuit design layout It is more compact and makes the entire power electronic device smaller in size and higher in power density.
本领域的技术人员可以理解,图2A及图2B所示的包括三个晶体管子单元21~23的大电流容量的IGBT器件,只是本发明提供的一种非限制性的实施方式,旨在清楚地展示本发明的主要构思,并提供一种便于公众实施的具体方案,而非用于限制本发明的保护范围。Those skilled in the art can understand that the IGBT device with large current capacity including three transistor subunits 21-23 shown in FIG. 2A and FIG. It demonstrates the main idea of the present invention clearly and provides a specific solution for the public to implement, rather than limiting the protection scope of the present invention.
可选地,在另一些实施例中,本发明提供的上述功率半导体器件也可以由单个硅基金属-氧化物半导体场效应晶体管(Si-MOSFET)、碳化硅基MOSFET(SiC-MOSFET)、硅基IGBT(Si-IGBT)或碳化硅基IGBT(SiC-IGBT)等晶体管器件构成。请参考图4,图4示出了根据本发明的一些实施例提供的功率半导体器件的电路封装示意图。Optionally, in some other embodiments, the above-mentioned power semiconductor device provided by the present invention may also be composed of a single silicon-based metal-oxide semiconductor field-effect transistor (Si-MOSFET), silicon carbide-based MOSFET (SiC-MOSFET), silicon Transistor devices such as silicon carbide-based IGBT (Si-IGBT) or silicon carbide-based IGBT (SiC-IGBT). Please refer to FIG. 4 , which shows a schematic diagram of a circuit package of a power semiconductor device provided according to some embodiments of the present invention.
如图4所示,在这些实施例中,单晶体管的功率半导体器件可以包括一个晶体管子单元41、检测二极管子单元42及引脚子单元43。晶体管子单元41中容纳的单个晶体管(例如:IGBT)元件包括集电极、发射极及栅极。该集电极用于连接高压母线,以作为该IGBT元件的高压功率端。该发射极用于接地或连接低级IGBT元件的集电极,以作为该IGBT元件的低压功率端。As shown in FIG. 4 , in these embodiments, the single-transistor power semiconductor device may include a transistor subunit 41 , a detection diode subunit 42 and a pin subunit 43 . A single transistor (eg, IGBT) element accommodated in the transistor subunit 41 includes a collector, an emitter, and a gate. The collector is used to connect to the high-voltage bus as the high-voltage power terminal of the IGBT element. The emitter is used for grounding or connecting the collector of the low-level IGBT component as the low-voltage power terminal of the IGBT component.
进一步地,该IGBT元件的集电极延伸出功率半导体器件的封装,以构成该功率半导体器件的高压引脚405。该IGBT元件的发射极延伸出功率半导体器件的封装,以构成该功率半导体器件的低压引脚404。该IGBT元件的控制端通过引脚子单元43延伸出功率半导体器件的封装,以构成功率半导体器件的控制引脚402。该检测二极管子单元42中容纳一个或多个二极管元件。该二极管元件的阴极连接晶体管子单元41的IGBT元件的集电极,而其阳极通过引脚子单元43延伸出功率半导体器件的封装,以构成功率半导体器件的检测引脚403。Further, the collector of the IGBT element extends out of the package of the power semiconductor device to form a high voltage pin 405 of the power semiconductor device. The emitter of the IGBT element extends out of the package of the power semiconductor device to form a low voltage pin 404 of the power semiconductor device. The control terminal of the IGBT element extends out of the package of the power semiconductor device through the pin subunit 43 to form a control pin 402 of the power semiconductor device. One or more diode elements are housed in the detection diode subunit 42 . The cathode of the diode element is connected to the collector of the IGBT element of the transistor subunit 41 , and its anode extends out of the package of the power semiconductor device through the pin subunit 43 to form a detection pin 403 of the power semiconductor device.
更进一步地,该引脚子单元43还连接晶体管子单元41中IGBT元件的发射极,将该发射极从引脚子单元43引出功率半导体器件的封装,以构成该功率半导体器件的电位基准引脚401。该电压基准引脚401可以作为该IGBT元件的辅助发 射极。功率半导体器件的检测电路可以通过引脚子单元43的电位基准引脚401、控制引脚402及检测引脚403对功率半导体器件进行短路检测。Furthermore, the pin subunit 43 is also connected to the emitter of the IGBT element in the transistor subunit 41, and the emitter is drawn out from the pin subunit 43 to the package of the power semiconductor device to form a potential reference lead for the power semiconductor device. Foot 401. The voltage reference pin 401 can serve as the auxiliary emitter of the IGBT element. The detection circuit of the power semiconductor device can detect the short circuit of the power semiconductor device through the potential reference pin 401 , the control pin 402 and the detection pin 403 of the pin subunit 43 .
如上所述,通过将适当阻断电压及适当电流容量的二极管元件集成到功率半导体器件的封装中,功率半导体器件的驱动设计人员只需要配置信号处理电路即可实现对功率半导体器件的短路检测,而不再需要根据检测二极管的耐压、电气间隔距离及爬电距离等因素来进行二极管器件的选型与布局,能够克服现有技术费时费力的缺陷。As mentioned above, by integrating diode elements with appropriate blocking voltage and appropriate current capacity into the package of the power semiconductor device, the driver designer of the power semiconductor device only needs to configure the signal processing circuit to realize the short circuit detection of the power semiconductor device, It is no longer necessary to select the type and layout of the diode device based on factors such as the withstand voltage, electrical separation distance and creepage distance of the detection diode, and can overcome the time-consuming and labor-intensive defects of the prior art.
进一步地,通过将多个串联和/或并联的二极管器件集成到功率半导体器件的封装内部,有利于实现该多个二极管器件的空间排布优化,有利于简化功率半导体器件的检测电路的器件结构并缩小其空间体积,符合功率半导体器件封装小型化、高功率密度的方向发展。Furthermore, by integrating a plurality of series and/or parallel diode devices into the package of the power semiconductor device, it is beneficial to realize the optimization of the spatial arrangement of the plurality of diode devices, and to simplify the device structure of the detection circuit of the power semiconductor device And reduce its space volume, which is in line with the development direction of power semiconductor device package miniaturization and high power density.
更进一步地,由于功率半导体器件的封装中进一步集成了检测二极管子单元42,对晶体管子单元41中容纳的IGBT元件的集电极端存在电压阻断的效果,检测引脚403上的电位V 403不会随高压引脚405的电位而上升到kV量级,而在正常工况下在检测电路的驱动下保持在5V左右,不超过100V。因此,图4中的检测引脚403与电位基准引脚401、控制引脚402以及低压引脚404之间都不会存在100V以上的电位差。在设计功率半导体器件的封装及引脚排布时,不必遵循现有技术中kV量级的电气间隙及爬电距离的限制,可以突破单级IGBT元件6.5kV阻断电压对应的电气间隙和/或爬电距离的限制,从而按照检测引脚相对电位基准引脚的电位进行电气间隙与爬电距离设计,以推进功率半导体器件向封装小型化及高功率密度方向的发展。 Furthermore, since the detection diode subunit 42 is further integrated in the package of the power semiconductor device, there is a voltage blocking effect on the collector terminal of the IGBT element accommodated in the transistor subunit 41, and the potential V 403 on the detection pin 403 It will not rise to the kV level with the potential of the high-voltage pin 405, but under normal working conditions, it will remain at about 5V and not exceed 100V under the driving of the detection circuit. Therefore, there will be no potential difference above 100V between the detection pin 403 in FIG. 4 and the potential reference pin 401 , the control pin 402 and the low voltage pin 404 . When designing the package and pin arrangement of power semiconductor devices, it is not necessary to follow the kV-level electrical gap and creepage distance restrictions in the prior art, and can break through the electrical gap and/or the corresponding 6.5kV blocking voltage of single-stage IGBT components Or the limitation of creepage distance, so as to design the electrical gap and creepage distance according to the potential of the detection pin relative to the potential reference pin, so as to promote the development of power semiconductor devices in the direction of package miniaturization and high power density.
可以理解的是,图4所示的单晶体管的功率半导体器件只涉及一级晶体管元件的端电压,只需要配置一个检测接口通过其检测引脚403来检测其是否存在短路故障。在一些实施例中,技术人员可以选用图3所示的故障检测电路31,将其检测接口311直接连接到该单晶体管的功率半导体器件的检测引脚403,以检测该单晶体管的功率半导体器件的晶体管子单元41中容纳的IGBT元件是否存在短路故障,其检测流程及原理与现有技术基本相同,在此不做赘述。It can be understood that the single-transistor power semiconductor device shown in FIG. 4 only involves the terminal voltage of one transistor element, and only needs to configure a detection interface to detect whether there is a short-circuit fault through its detection pin 403 . In some embodiments, technicians can select the fault detection circuit 31 shown in FIG. 3 and directly connect its detection interface 311 to the detection pin 403 of the single-transistor power semiconductor device to detect the single-transistor power semiconductor device. Whether there is a short-circuit fault in the IGBT element accommodated in the transistor sub-unit 41, the detection process and principle are basically the same as those of the prior art, and will not be repeated here.
可选地,在另一些实施例中,本发明的第一方面提供的上述功率半导体器件的晶体管子单元中还可以容纳多个串联的晶体管器件。请参考图5,图5示出了根据本发明的一些实施例提供的功率半导体器件的电路封装示意图。Optionally, in some other embodiments, the transistor sub-unit of the above-mentioned power semiconductor device provided by the first aspect of the present invention may further accommodate a plurality of transistor devices connected in series. Please refer to FIG. 5 , which shows a schematic diagram of a circuit package of a power semiconductor device provided according to some embodiments of the present invention.
如图5所示,在本发明的一些实施例中,功率半导体器件可以包括一个晶体管子单元51、检测二极管子单元52及引脚子单元53。晶体管子单元51中容纳的两个串联的晶体管(例如:IGBT)元件511、512,以构成一个单相桥臂电路(即半桥电路)。IGBT元件511、512分别包括集电极、发射极及栅极。IGBT元件511的集电极用于连接高压母线,以作为该IGBT元件511的高压功率端。IGBT元件511的发射极连接低级IGBT元件512的集电极,以作为该IGBT元件511 的低压功率端。IGBT元件512的集电极连接高级IGBT元件511的发射极,以作为该IGBT元件512的高压功率端。IGBT元件512的发射极用于接地,以作为该IGBT元件512的低压功率端。As shown in FIG. 5 , in some embodiments of the present invention, the power semiconductor device may include a transistor subunit 51 , a detection diode subunit 52 and a pin subunit 53 . Two transistors (for example: IGBT) elements 511 and 512 connected in series in the transistor sub-unit 51 form a single-phase bridge arm circuit (ie, a half-bridge circuit). The IGBT elements 511 and 512 respectively include a collector, an emitter and a gate. The collector of the IGBT element 511 is used to connect to the high-voltage bus, as the high-voltage power terminal of the IGBT element 511 . The emitter of the IGBT element 511 is connected to the collector of the low-level IGBT element 512 as a low-voltage power terminal of the IGBT element 511 . The collector of the IGBT element 512 is connected to the emitter of the advanced IGBT element 511 as a high voltage power terminal of the IGBT element 512 . The emitter of the IGBT element 512 is used for grounding as a low-voltage power terminal of the IGBT element 512 .
进一步地,IGBT元件511的集电极延伸出功率半导体器件的封装,以构成该功率半导体器件的高压引脚505。IGBT元件512的发射极延伸出功率半导体器件的封装,以构成该功率半导体器件的低压引脚504。IGBT元件511的控制端通过引脚子单元53延伸出功率半导体器件的封装,以构成功率半导体器件的高级控制引脚5021。IGBT元件512的控制端通过引脚子单元53延伸出功率半导体器件的封装,以构成功率半导体器件的低级控制引脚5022。该检测二极管子单元52中容纳多个检测二极管单元521、522。检测二极管单元521的阴极连接晶体管子单元51中对应IGBT元件511的集电极,而其阳极通过引脚子单元53延伸出功率半导体器件的封装,以构成功率半导体器件的检测引脚5031。检测二极管单元522的阴极连接晶体管子单元51中对应IGBT元件512的集电极,而其阳极通过引脚子单元53延伸出功率半导体器件的封装,以构成功率半导体器件的检测引脚5032。Further, the collector of the IGBT element 511 extends out of the package of the power semiconductor device to form a high voltage pin 505 of the power semiconductor device. The emitter of the IGBT element 512 extends out of the package of the power semiconductor device to form a low voltage pin 504 of the power semiconductor device. The control terminal of the IGBT element 511 extends out of the package of the power semiconductor device through the pin subunit 53 to form an advanced control pin 5021 of the power semiconductor device. The control terminal of the IGBT element 512 extends out of the package of the power semiconductor device through the pin subunit 53 to form a low-level control pin 5022 of the power semiconductor device. The detection diode subunit 52 accommodates a plurality of detection diode units 521 , 522 . The cathode of the detection diode unit 521 is connected to the collector of the corresponding IGBT element 511 in the transistor subunit 51 , and its anode extends out of the package of the power semiconductor device through the pin subunit 53 to form a detection pin 5031 of the power semiconductor device. The cathode of the detection diode unit 522 is connected to the collector of the corresponding IGBT element 512 in the transistor subunit 51 , and its anode extends out of the package of the power semiconductor device through the pin subunit 53 to form a detection pin 5032 of the power semiconductor device.
更进一步地,引脚子单元53还分别连接晶体管子单元51中各IGBT元件511、512的发射极,将这些发射极分别从引脚子单元53引出功率半导体器件的封装,以构成该功率半导体器件的电位基准引脚5011、5012。该电压基准引脚5011、5012可以分别作为IGBT元件511、512的辅助发射极。功率半导体器件的检测电路可以通过引脚子单元53的电位基准引脚5011、5012、控制引脚5021、5022及检测引脚5031、5032对功率半导体器件进行短路检测。Furthermore, the pin subunit 53 is also respectively connected to the emitters of the IGBT elements 511 and 512 in the transistor subunit 51, and these emitters are respectively led out from the pin subunit 53 to the package of the power semiconductor device to form the power semiconductor Potential reference pins 5011, 5012 of the device. The voltage reference pins 5011, 5012 can serve as auxiliary emitters of the IGBT elements 511, 512, respectively. The detection circuit of the power semiconductor device can detect the short circuit of the power semiconductor device through the potential reference pins 5011 , 5012 , the control pins 5021 , 5022 and the detection pins 5031 , 5032 of the pin subunit 53 .
如上所述,通过将适当阻断电压及适当电流容量的二极管元件集成到功率半导体器件的封装中,功率半导体器件的驱动设计人员只需要配置信号处理电路即可实现对功率半导体器件的短路检测,而不再需要根据检测二极管的耐压、电气间隔距离及爬电距离等因素来进行二极管器件的选型与布局,能够克服现有技术费时费力的缺陷。As mentioned above, by integrating diode elements with appropriate blocking voltage and appropriate current capacity into the package of the power semiconductor device, the driver designer of the power semiconductor device only needs to configure the signal processing circuit to realize the short circuit detection of the power semiconductor device, It is no longer necessary to select the type and layout of the diode device based on factors such as the withstand voltage, electrical separation distance and creepage distance of the detection diode, and can overcome the time-consuming and labor-intensive defects of the prior art.
进一步地,通过将多个串联和/或并联的二极管器件集成到功率半导体器件的封装内部,有利于实现该多个二极管器件的空间排布优化,有利于简化功率半导体器件的检测电路的器件结构并缩小其空间体积,符合功率半导体器件封装小型化、高功率密度的方向发展。Furthermore, by integrating a plurality of series and/or parallel diode devices into the package of the power semiconductor device, it is beneficial to realize the optimization of the spatial arrangement of the plurality of diode devices, and to simplify the device structure of the detection circuit of the power semiconductor device And reduce its space volume, which is in line with the development direction of power semiconductor device package miniaturization and high power density.
更进一步地,由于功率半导体器件的封装中进一步集成了检测二极管子单元52,对晶体管子单元51中容纳的各IGBT元件511、512的集电极端存在电压阻断的效果,检测引脚5031、5032上的电位V 5031及V 5032不会随高压引脚505的电位而上升到kV量级,而在正常工况下在检测电路的驱动下保持在5V左右,不超过100V。因此,图5中的检测引脚5031、5032与电位基准引脚5011、5012、控制引脚5021、5022以及低压引脚504之间都不会存在100V以上的电位差。在设 计功率半导体器件的封装及引脚排布时,不必遵循现有技术中kV量级的电气间隙及爬电距离的限制,可以突破单级IGBT元件6.5kV的阻断电压对应的电气间隙和/或爬电距离的限制,从而按照检测引脚相对电位基准引脚的电位进行电气间隙与爬电距离设计,以推进功率半导体器件向封装小型化及高功率密度方向的发展。 Furthermore, since the detection diode subunit 52 is further integrated in the package of the power semiconductor device, there is a voltage blocking effect on the collector terminals of the IGBT elements 511 and 512 accommodated in the transistor subunit 51, and the detection pins 5031, The potentials V 5031 and V 5032 on the 5032 will not rise to the kV level with the potential of the high-voltage pin 505, but under normal working conditions, they are kept at about 5V and not more than 100V under the driving of the detection circuit. Therefore, there will be no potential difference above 100V between the detection pins 5031 , 5032 , the potential reference pins 5011 , 5012 , the control pins 5021 , 5022 and the low voltage pin 504 in FIG. 5 . When designing the packaging and pin arrangement of power semiconductor devices, it is not necessary to follow the limitations of kV-level electrical gaps and creepage distances in the prior art, and can break through the electrical gaps and creepage distances corresponding to the 6.5kV blocking voltage of single-stage IGBT components. / or the limitation of creepage distance, so as to design the electrical gap and creepage distance according to the potential of the detection pin relative to the potential reference pin, so as to promote the development of power semiconductor devices in the direction of package miniaturization and high power density.
对应地,本文还提供了一种检测电路,用于检测图5所示的半桥器件是否存在短路故障。请参考图6,图6示出了根据本发明的一些实施例提供的检测电路的示意图。Correspondingly, this paper also provides a detection circuit for detecting whether there is a short-circuit fault in the half-bridge device shown in FIG. 5 . Please refer to FIG. 6 , which shows a schematic diagram of a detection circuit provided according to some embodiments of the present invention.
如图6所示,在本发明的一些实施例中,图5所示的半桥器件的检测电路61包括两个检测接口611、612。检测接口611直接连接上述半桥器件的检测引脚5031,以检测该半桥器件的晶体管子单元51中容纳的IGBT元件511是否存在短路故障。检测接口612直接连接上述半桥器件的检测引脚5032,以检测该半桥器件的晶体管子单元51中容纳的IGBT元件512是否存在短路故障。检测电路61的检测流程及原理与现有技术基本相同,在此不做赘述。As shown in FIG. 6 , in some embodiments of the present invention, the detection circuit 61 of the half-bridge device shown in FIG. 5 includes two detection interfaces 611 , 612 . The detection interface 611 is directly connected to the detection pin 5031 of the half-bridge device, so as to detect whether there is a short-circuit fault in the IGBT element 511 accommodated in the transistor subunit 51 of the half-bridge device. The detection interface 612 is directly connected to the detection pin 5032 of the half-bridge device, so as to detect whether the IGBT element 512 accommodated in the transistor subunit 51 of the half-bridge device has a short-circuit fault. The detection process and principle of the detection circuit 61 are basically the same as those of the prior art, and will not be repeated here.
需要注意的是,由于该检测电路61的检测接口611、612是通过连接上述半桥器件的检测引脚5031、5032来判断短路故障,而该检测引脚5031、5032与晶体管子单元51中容纳的各IGBT元件511、512的集电极之间集成了检测二极管子单元52,对这些集电极端存在电压阻断的效果,该检测接口611、612不存在出现母线高压或IGBT关断过电压的风险。因此,功率半导体器件的驱动设计人员不需要为检测电路61的检测接口611、612配置额外的检测二极管,一方面能够克服现有技术费时费力的缺陷,另一方面有利于简化功率半导体器件的检测电路的器件结构并缩小其空间体积,符合检测电路小型化、高功率密度的方向发展。It should be noted that since the detection interfaces 611, 612 of the detection circuit 61 are connected to the detection pins 5031, 5032 of the half-bridge device to determine the short-circuit fault, and the detection pins 5031, 5032 are connected with the transistor subunit 51. The detection diode sub-unit 52 is integrated between the collectors of each IGBT element 511, 512, and there is a voltage blocking effect on these collector terminals, and the detection interface 611, 612 does not have bus high voltage or IGBT turn-off overvoltage. risk. Therefore, the driver designer of the power semiconductor device does not need to configure additional detection diodes for the detection interfaces 611 and 612 of the detection circuit 61. On the one hand, it can overcome the time-consuming and labor-intensive defects of the prior art, and on the other hand, it is beneficial to simplify the detection of power semiconductor devices. The device structure of the circuit and its space volume are reduced, which conforms to the direction of miniaturization and high power density of the detection circuit.
进一步地,由于功率半导体器件的封装中进一步集成了检测二极管子单元52,对晶体管子单元51中容纳的各IGBT元件511、512的集电极端存在电压阻断的效果,各检测引脚5031、5032上的电位V 5031、V 5032不会随高压引脚505的电位而上升到kV量级,而在正常工况下在检测电路的驱动下保持在5V左右,不超过100V。因此,图6中检测电路61的检测接口611、612到上述半桥器件的晶体管子单元21的低压引脚504和/或控制引脚5021、5022的距离,可以突破单级IGBT元件6.5kV的阻断电压对应的电气间隙和/或爬电距离的限制,从而按照检测引脚相对电位基准引脚的电位进行电气间隙与爬电距离设计,以使驱动电路设计布局更加紧凑,并使得整个电力电子装置体积更小、功率密度更高。更进一步地,图6中检测电路61的检测接口611、612之间的距离,也可以突破单级IGBT元件6.5kV阻断电压对应的电气间隙和/或爬电距离的限制,从而按照检测引脚相对电位基准引脚的电位进行电气间隙与爬电距离设计,以使驱动电路设计布局更加紧凑,并使得整个电力电子装置体积更小、功率密度更高。 Furthermore, since the detection diode subunit 52 is further integrated in the package of the power semiconductor device, there is a voltage blocking effect on the collector terminals of the IGBT elements 511 and 512 accommodated in the transistor subunit 51, and each detection pin 5031, The potentials V 5031 and V 5032 on the 5032 will not rise to the kV level with the potential of the high-voltage pin 505, but under normal working conditions, driven by the detection circuit, they remain at about 5V, not exceeding 100V. Therefore, the distance between the detection interfaces 611, 612 of the detection circuit 61 in FIG. 6 and the low-voltage pin 504 and/or control pins 5021, 5022 of the transistor subunit 21 of the above-mentioned half-bridge device can exceed the 6.5kV limit of the single-stage IGBT element. The restriction of the electrical gap and/or creepage distance corresponding to the blocking voltage, so that the electrical gap and creepage distance are designed according to the potential of the detection pin relative to the potential reference pin, so that the design layout of the drive circuit is more compact, and the entire power supply Electronic devices are smaller and more power dense. Furthermore, the distance between the detection interfaces 611 and 612 of the detection circuit 61 in FIG. The electrical clearance and creepage distance of the pin relative to the potential reference pin are designed to make the drive circuit design layout more compact, and make the entire power electronic device smaller in size and higher in power density.
请参考图7,图7示出了根据本发明的一些实施例提供的功率半导体器件的 电路封装示意图。如图7所示,在本发明的一些实施例中,该功率半导体器件可以包括多个晶体管子单元71~73、检测二极管子单元74及引脚子单元75。各晶体管子单元71~73中分别容纳的两个串联的晶体管(例如:IGBT)元件711~712、721~722、731~732,以分别构成一个桥臂电路,这三个桥臂电路并联形成一个单相桥器件。各IGBT元件711~712、721~722、731~732分别包括集电极、发射极及栅极。IGBT元件711、721、731的集电极用于连接高压母线,以作为各IGBT元件711、721、731的高压功率端。IGBT元件711、721、731的发射极分别连接对应的低级IGBT元件712、722、732的集电极,以作为各IGBT元件711、721、731的低压功率端。IGBT元件712、722、732的集电极分别连接对应的高级IGBT元件711、721、731的发射极,以作为各IGBT元件712、722、732的高压功率端。IGBT元件712、722、732的发射极用于接地,以作为各IGBT元件712、722、732的低压功率端。Please refer to FIG. 7, which shows a schematic diagram of a circuit package of a power semiconductor device provided according to some embodiments of the present invention. As shown in FIG. 7 , in some embodiments of the present invention, the power semiconductor device may include a plurality of transistor subunits 71 - 73 , a detection diode subunit 74 and a pin subunit 75 . Two series-connected transistor (for example: IGBT) elements 711-712, 721-722, 731-732 accommodated in each transistor sub-unit 71-73 respectively form a bridge arm circuit, and these three bridge arm circuits are connected in parallel to form a single-phase bridge device. Each of the IGBT elements 711 to 712, 721 to 722, and 731 to 732 includes a collector, an emitter, and a gate, respectively. The collector electrodes of the IGBT elements 711 , 721 , 731 are used to connect to the high-voltage bus bar, so as to serve as the high-voltage power terminals of the respective IGBT elements 711 , 721 , 731 . The emitters of the IGBT elements 711 , 721 , 731 are respectively connected to the collectors of the corresponding low- level IGBT elements 712 , 722 , 732 to serve as the low-voltage power terminals of the IGBT elements 711 , 721 , 731 . The collectors of the IGBT elements 712 , 722 , 732 are respectively connected to the emitters of the corresponding advanced IGBT elements 711 , 721 , 731 to serve as high-voltage power terminals of the IGBT elements 712 , 722 , 732 . The emitters of the IGBT elements 712 , 722 , 732 are grounded to serve as the low-voltage power terminals of the respective IGBT elements 712 , 722 , 732 .
进一步地,IGBT元件711、721、731的集电极分别从对应的晶体管子单元71~73延伸出功率半导体器件的封装,以构成该功率半导体器件的多个高压引脚705、707、709。IGBT元件712、722、732的发射极分别从对应的晶体管子单元71~73延伸出功率半导体器件的封装,以构成该功率半导体器件的多个低压引脚704、706、708。各晶体管子单元71~73中IGBT元件711、721、731的控制端在晶体管子单元71内部相连,并通过引脚子单元75延伸出功率半导体器件的封装,以构成功率半导体器件的高级控制引脚7021。各晶体管子单元71~73中IGBT元件712、722、732的控制端在晶体管子单元71内部相连,并通过引脚子单元75延伸出功率半导体器件的封装,以构成功率半导体器件的低级控制引脚7022。该检测二极管子单元74中容纳多个检测二极管单元721、722。检测二极管单元721的阴极连接晶体管子单元71中对应IGBT元件711的集电极,而其阳极通过引脚子单元75延伸出功率半导体器件的封装,以构成功率半导体器件的检测引脚7031。检测二极管单元722的阴极连接晶体管子单元71中对应IGBT元件712的集电极,而其阳极通过引脚子单元75延伸出功率半导体器件的封装,以构成功率半导体器件的检测引脚7032。Further, the collectors of the IGBT elements 711, 721, 731 respectively extend out of the package of the power semiconductor device from the corresponding transistor sub-units 71-73 to form a plurality of high voltage pins 705, 707, 709 of the power semiconductor device. The emitters of the IGBT elements 712 , 722 , 732 respectively extend out of the package of the power semiconductor device from the corresponding transistor subunits 71 - 73 to form a plurality of low voltage pins 704 , 706 , 708 of the power semiconductor device. The control terminals of the IGBT elements 711, 721, and 731 in the transistor subunits 71-73 are connected inside the transistor subunit 71, and extend out of the package of the power semiconductor device through the pin subunit 75 to form an advanced control lead of the power semiconductor device. Foot 7021. The control terminals of the IGBT elements 712, 722, and 732 in the transistor subunits 71-73 are connected inside the transistor subunit 71, and extend out of the package of the power semiconductor device through the pin subunit 75 to form the low-level control leads of the power semiconductor device. Foot 7022. The detection diode subunit 74 accommodates a plurality of detection diode units 721 , 722 . The cathode of the detection diode unit 721 is connected to the collector of the corresponding IGBT element 711 in the transistor subunit 71 , and its anode extends out of the package of the power semiconductor device through the pin subunit 75 to form a detection pin 7031 of the power semiconductor device. The cathode of the detection diode unit 722 is connected to the collector of the corresponding IGBT element 712 in the transistor subunit 71 , and its anode extends out of the package of the power semiconductor device through the pin subunit 75 to form a detection pin 7032 of the power semiconductor device.
更进一步地,引脚子单元75还分别连接各晶体管子单元71~73中IGBT元件711、721、731的发射极,将这些发射极从引脚子单元75引出功率半导体器件的封装,以构成该功率半导体器件的高级电位基准引脚7011。该电压基准引脚7011可以作为IGBT元件711、721、731的辅助发射极。此外,引脚子单元75还分别连接各晶体管子单元71~73中IGBT元件712、722、732的发射极,将这些发射极从引脚子单元75引出功率半导体器件的封装,以构成该功率半导体器件的低级电位基准引脚7012。该电压基准引脚7012可以作为IGBT元件712、722、732的辅助发射极。功率半导体器件的检测电路可以通过引脚子单元75的电位基准引脚7011、7012、控制引脚7021、7022及检测引脚7031、7032对功率半导体器件 进行短路检测。Furthermore, the pin subunit 75 is also respectively connected to the emitters of the IGBT elements 711, 721, and 731 in the transistor subunits 71-73, and these emitters are drawn out from the pin subunit 75 to the package of the power semiconductor device to form The advanced potential reference pin 7011 of the power semiconductor device. The voltage reference pin 7011 can serve as an auxiliary emitter of the IGBT elements 711 , 721 , 731 . In addition, the pin subunit 75 is also respectively connected to the emitters of the IGBT elements 712, 722, and 732 in the transistor subunits 71-73, and these emitters are led out from the pin subunit 75 to the package of the power semiconductor device to form the power Low-level potential reference pin 7012 of the semiconductor device. The voltage reference pin 7012 can serve as an auxiliary emitter for the IGBT elements 712 , 722 , 732 . The detection circuit of the power semiconductor device can detect the short circuit of the power semiconductor device through the potential reference pins 7011, 7012, the control pins 7021, 7022 and the detection pins 7031, 7032 of the pin subunit 75.
如上所述,通过将适当阻断电压及适当电流容量的二极管元件集成到功率半导体器件的封装中,功率半导体器件的驱动设计人员只需要配置信号处理电路即可实现对功率半导体器件的短路检测,而不再需要根据检测二极管的耐压、电气间隔距离及爬电距离等因素来进行二极管器件的选型与布局,能够克服现有技术费时费力的缺陷。As mentioned above, by integrating diode elements with appropriate blocking voltage and appropriate current capacity into the package of the power semiconductor device, the driver designer of the power semiconductor device only needs to configure the signal processing circuit to realize the short circuit detection of the power semiconductor device, It is no longer necessary to select the type and layout of the diode device based on factors such as the withstand voltage, electrical separation distance and creepage distance of the detection diode, and can overcome the time-consuming and labor-intensive defects of the prior art.
进一步地,通过将多个串联和/或并联的二极管器件集成到功率半导体器件的封装内部,有利于实现该多个二极管器件的空间排布优化,有利于简化功率半导体器件的检测电路的器件结构并缩小其空间体积,符合功率半导体器件封装小型化、高功率密度的方向发展。Furthermore, by integrating a plurality of series and/or parallel diode devices into the package of the power semiconductor device, it is beneficial to realize the optimization of the spatial arrangement of the plurality of diode devices, and to simplify the device structure of the detection circuit of the power semiconductor device And reduce its space volume, which is in line with the development direction of power semiconductor device package miniaturization and high power density.
更进一步地,由于功率半导体器件的封装中进一步集成了检测二极管子单元74,对各晶体管子单元71~72中容纳的各IGBT元件711~712、721~722、731~732的集电极端存在电压阻断的效果,检测引脚7031、7032上的电位V 7031及V 7032不会随高压引脚709的电位而上升到kV量级,而在正常工况下在检测电路的驱动下保持在5V左右,不超过100V。因此,图7中的检测引脚7031、7032与电位基准引脚701、控制引脚7021、7022以及低压引脚704、706、708之间都不会存在100V以上的电位差。在设计功率半导体器件的封装及引脚排布时,不必遵循现有技术中kV量级的电气间隙及爬电距离的限制,可以突破单级IGBT元件6.5kV的阻断电压对应的电气间隙和/或爬电距离的限制,从而按照检测引脚相对电位基准引脚的电位进行电气间隙与爬电距离设计,以推进功率半导体器件向封装小型化及高功率密度方向的发展。 Furthermore, since the detection diode sub-unit 74 is further integrated in the package of the power semiconductor device, there are The effect of voltage blocking, the potentials V 7031 and V 7032 on the detection pins 7031 and 7032 will not rise to the kV level with the potential of the high-voltage pin 709, but will remain at Around 5V, not more than 100V. Therefore, there will be no potential difference above 100V between the detection pins 7031 , 7032 and the potential reference pin 701 , the control pins 7021 , 7022 and the low voltage pins 704 , 706 , 708 in FIG. 7 . When designing the packaging and pin arrangement of power semiconductor devices, it is not necessary to follow the limitations of kV-level electrical gaps and creepage distances in the prior art, and can break through the electrical gaps and creepage distances corresponding to the 6.5kV blocking voltage of single-stage IGBT components. / or the limitation of creepage distance, so as to design the electrical gap and creepage distance according to the potential of the detection pin relative to the potential reference pin, so as to promote the development of power semiconductor devices in the direction of package miniaturization and high power density.
可以理解的是,图7所示的单相桥器件涉及两级晶体管元件的端电压,需要配置两个检测接口通过其检测引脚7031及7032来检测其是否存在短路故障。在一些实施例中,技术人员可以选用图6所示的故障检测电路61,将其检测接口611及612分别连接到该单相桥器件的检测引脚7031及7032,以检测该单相桥器件的各晶体管子单元71~73中容纳的各IGBT元件711~712、721~722、731~732是否存在短路故障,其检测流程及原理与现有技术基本相同,在此不做赘述。It can be understood that the single-phase bridge device shown in FIG. 7 involves terminal voltages of two-stage transistor elements, and two detection interfaces need to be configured to detect whether there is a short circuit fault through its detection pins 7031 and 7032 . In some embodiments, technicians can select the fault detection circuit 61 shown in FIG. 6, and connect its detection interfaces 611 and 612 to the detection pins 7031 and 7032 of the single-phase bridge device respectively to detect the single-phase bridge device Whether the IGBT elements 711-712, 721-722, 731-732 accommodated in the transistor sub-units 71-73 have a short-circuit fault, the detection process and principle are basically the same as those of the prior art, and will not be repeated here.
可选地,在另一些实施例中,本发明提供的上述功率半导体器件还可以包括具备多个桥臂电路的多相桥器件,包括但不限于H桥器件及三相桥器件。在这样的多相桥结构中,各个桥臂为独立关系,各个晶体管器件具有各自独立的检测二极管单元。Optionally, in some other embodiments, the power semiconductor device provided by the present invention may also include a multi-phase bridge device with multiple bridge arm circuits, including but not limited to an H-bridge device and a three-phase bridge device. In such a multi-phase bridge structure, each bridge arm is independent, and each transistor device has its own independent detection diode unit.
提供对本公开的先前描述是为使得本领域任何技术人员皆能够制作或使用本公开。对本公开的各种修改对本领域技术人员来说都将是显而易见的,且本文中所定义的普适原理可被应用到其他变体而不会脱离本公开的精神或范围。由此,本公开并非旨在被限定于本文中所描述的示例和设计,而是应被授予与本文中所公开的原理和新颖性特征相一致的最广范围。The previous description of the present disclosure is provided to enable any person skilled in the art to make or use the present disclosure. Various modifications to the present disclosure will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other variations without departing from the spirit or scope of the present disclosure. Thus, the disclosure is not intended to be limited to the examples and designs described herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims (8)

  1. 一种功率半导体器件,其特征在于,包括:A power semiconductor device, characterized in that it comprises:
    至少一个晶体管元件,其中,所述晶体管元件包括高压功率端、低压功率端及控制端,所述高压功率端延伸出所述功率半导体器件的封装以构成所述功率半导体器件的高压引脚,所述低压功率端延伸出所述功率半导体器件的封装以构成所述功率半导体器件的低压引脚,所述控制端延伸出所述功率半导体器件的封装以构成所述功率半导体器件的控制引脚;以及At least one transistor element, wherein the transistor element includes a high-voltage power terminal, a low-voltage power terminal, and a control terminal, and the high-voltage power terminal extends out of the package of the power semiconductor device to form a high-voltage pin of the power semiconductor device. The low-voltage power terminal extends out of the package of the power semiconductor device to form a low-voltage pin of the power semiconductor device, and the control terminal extends out of the package of the power semiconductor device to form a control pin of the power semiconductor device; as well as
    至少一个检测二极管单元,其中,所述检测二极管单元的阴极连接所述至少一个晶体管元件的所述高压功率端,所述检测二极管单元的阳极延伸出所述功率半导体器件的封装以构成所述功率半导体器件的检测引脚。At least one detection diode unit, wherein the cathode of the detection diode unit is connected to the high-voltage power terminal of the at least one transistor element, and the anode of the detection diode unit extends out of the package of the power semiconductor device to form the power A detection pin of a semiconductor device.
  2. 如权利要求1所述的功率半导体器件,其特征在于,所述检测引脚到所述低压引脚和/或所述控制引脚的距离小于对应晶体管元件的阻断电压所对应的电气间隙和/或爬电距离。The power semiconductor device according to claim 1, wherein the distance from the detection pin to the low-voltage pin and/or the control pin is smaller than the electrical gap corresponding to the blocking voltage of the corresponding transistor element and / or creepage distance.
  3. 如权利要求2所述的功率半导体器件,其特征在于,所述低压功率端还延伸出所述功率半导体器件的封装以构成所述功率半导体器件的电位基准引脚,其中,所述检测引脚到所述电位基准引脚的距离小于所述对应晶体管元件的阻断电压所对应的电气间隙和/或爬电距离。The power semiconductor device according to claim 2, wherein the low-voltage power terminal also extends out of the package of the power semiconductor device to form a potential reference pin of the power semiconductor device, wherein the detection pin The distance to the potential reference pin is smaller than the electrical clearance and/or creepage distance corresponding to the blocking voltage of the corresponding transistor element.
  4. 如权利要求1~3中任一项所述的功率半导体器件,其特征在于,所述检测二极管单元包括多个串联的二极管元件,所述多个串联的二极管元件的反向阻断电压之和大于或等于所述检测二极管单元对应的至少一个晶体管元件的阻断电压。The power semiconductor device according to any one of claims 1 to 3, wherein the detection diode unit comprises a plurality of diode elements connected in series, and the sum of the reverse blocking voltages of the plurality of diode elements connected in series greater than or equal to the blocking voltage of at least one transistor element corresponding to the detection diode unit.
  5. 如权利要求1~3中任一项所述的功率半导体器件,其特征在于,包括:The power semiconductor device according to any one of claims 1 to 3, characterized in that it comprises:
    多个并联的晶体管元件,其中,所述多个并联的晶体管元件的所述高压功率端分别延伸出所述功率半导体器件的封装以构成所述功率半导体器件的多个所述高压引脚,所述多个并联的晶体管元件的所述低压功率端分别延伸出所述功率半导体器件的封装以构成所述功率半导体器件的多个所述低压引脚,所述多个并联的晶体管元件的所述控制端统一延伸出所述功率半导体器件的封装以构成所述功率半导体器件的所述控制引脚;以及A plurality of parallel transistor elements, wherein the high voltage power terminals of the plurality of parallel transistor elements respectively extend out of the package of the power semiconductor device to form a plurality of the high voltage pins of the power semiconductor device, The low-voltage power ends of the plurality of parallel-connected transistor elements respectively extend out of the package of the power semiconductor device to form a plurality of the low-voltage pins of the power semiconductor device, and the plurality of parallel-connected transistor elements The control terminal uniformly extends out of the package of the power semiconductor device to form the control pin of the power semiconductor device; and
    一个所述检测二极管单元,所述检测二极管单元的所述阴极连接第一晶体管元件的所述高压功率端,所述检测二极管单元的所述阳极延伸出所述功率半导体器件的封装以构成所述功率半导体器件的所述检测引脚。One detection diode unit, the cathode of the detection diode unit is connected to the high-voltage power terminal of the first transistor element, and the anode of the detection diode unit extends out of the package of the power semiconductor device to form the The detection pin of the power semiconductor device.
  6. 如权利要求1~3中任一项所述的功率半导体器件,其特征在于,包括:The power semiconductor device according to any one of claims 1 to 3, characterized in that it comprises:
    多个串联的晶体管元件,其中,第一晶体管元件的所述高压功率端延伸出所述功率半导体器件的封装以构成所述功率半导体器件的高压引脚,所述第一晶体管元件的所述低压功率端连接第二晶体管元件的所述高压功率端以构成桥臂电路,所述第二晶体管元件的所述低压功率端延伸出所述功率半导体器件的封装以构成所述功率半导体器件的低压引脚,所述第一晶体管元件及所述第二晶体管元件的所述控制端分别延伸出所述功率半导体器件的封装以构成所述功率半导体器件的多个所述控制引脚;以及A plurality of transistor elements connected in series, wherein the high-voltage power terminal of the first transistor element extends out of the package of the power semiconductor device to form a high-voltage pin of the power semiconductor device, and the low-voltage terminal of the first transistor element The power end is connected to the high-voltage power end of the second transistor element to form a bridge arm circuit, and the low-voltage power end of the second transistor element extends out of the package of the power semiconductor device to form a low-voltage lead of the power semiconductor device. Pins, the control terminals of the first transistor element and the second transistor element respectively extend out of the package of the power semiconductor device to form a plurality of control pins of the power semiconductor device; and
    多个所述检测二极管单元,其中,第一检测二极管单元的所述阴极连接所述第一晶体管元件的所述高压功率端,所述第一检测二极管单元的所述阳极延伸出所述功率半导体器件的封装以构成所述功率半导体器件的第一检测引脚,第二检测二极管单元的所述阴极连接所述第二晶体管元件的所述高压功率端,所述第二检测二极管单元的所述阳极延伸出所述功率半导体器件的封装以构成所述功率半导体器件的第二检测引脚。A plurality of detection diode units, wherein the cathode of the first detection diode unit is connected to the high-voltage power terminal of the first transistor element, and the anode of the first detection diode unit extends out of the power semiconductor The device is packaged to form the first detection pin of the power semiconductor device, the cathode of the second detection diode unit is connected to the high-voltage power end of the second transistor element, and the second detection diode unit The anode extends out of the package of the power semiconductor device to form a second detection pin of the power semiconductor device.
  7. 如权利要求6所述的功率半导体器件,其特征在于,包括:The power semiconductor device of claim 6, comprising:
    多个所述桥臂电路,其中,各所述桥臂电路的所述第一晶体管元件的所述高压功率端分别延伸出所述功率半导体器件的封装以构成所述功率半导体器件的多个所述高压引脚,各所述桥臂电路的所述第二晶体管元件的所述低压功率端分别延伸出所述功率半导体器件的封装以构成所述功率半导体器件的多个所述低压引脚,各所述桥臂电路的所述第一晶体管元件的所述控制端统一延伸出所述功率半导体器件的封装以构成所述功率半导体器件的第一控制引脚,各所述桥臂电路的所述第二晶体管元件统一延伸出所述功率半导体器件的封装以构成所述功率半导体器件的第二控制引脚,A plurality of bridge arm circuits, wherein the high-voltage power terminals of the first transistor elements of each of the bridge arm circuits respectively extend out of the package of the power semiconductor device to form a plurality of the power semiconductor devices The high-voltage pins, the low-voltage power terminals of the second transistor elements of each of the bridge arm circuits respectively extend out of the package of the power semiconductor device to form a plurality of the low-voltage pins of the power semiconductor device, The control terminals of the first transistor elements of each of the bridge arm circuits uniformly extend out of the package of the power semiconductor device to form a first control pin of the power semiconductor device, and all of the bridge arm circuits The second transistor element uniformly extends out of the package of the power semiconductor device to form a second control pin of the power semiconductor device,
    所述第一检测二极管单元的所述阴极连接各所述桥臂电路的所述第一晶体管元件的所述高压功率端,所述第二检测二极管单元的所述阴极连接各所述桥臂电路的所述第二晶体管元件的所述高压功率端。The cathode of the first detection diode unit is connected to the high-voltage power end of the first transistor element of each of the bridge arm circuits, and the cathode of the second detection diode unit is connected to each of the bridge arm circuits The high voltage power terminal of the second transistor element.
  8. 如权利要求1~3中任一项所述的功率半导体器件,其特征在于,所述晶体管元件包括IGBT,所述IGBT的高压功率端为其集电极,所述IGBT的低压功率端为其发射极,所述IGBT的控制端为其栅极,所述IGBT的电位基准引脚为其辅助发射极,和/或The power semiconductor device according to any one of claims 1 to 3, wherein the transistor element comprises an IGBT, the high-voltage power terminal of the IGBT is its collector, and the low-voltage power terminal of the IGBT is its emitter pole, the control terminal of the IGBT is its gate, the potential reference pin of the IGBT is its auxiliary emitter, and/or
    所述晶体管元件包括MOSFET,所述MOSFET的高压功率端为其漏极,所述MOSFET的低压功率端为其源极,所述MOSFET的控制端为其栅极,所述MOSFET的电位基准引脚为其辅助源极。The transistor element includes a MOSFET, the high-voltage power terminal of the MOSFET is its drain, the low-voltage power terminal of the MOSFET is its source, the control terminal of the MOSFET is its gate, and the potential reference pin of the MOSFET is as its auxiliary source.
PCT/CN2021/130401 2021-06-29 2021-11-12 Power semiconductor device WO2023273099A1 (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116032101A (en) * 2023-02-27 2023-04-28 合肥惟新数控科技有限公司 Topology driving control structure of intelligent power module

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002208847A (en) * 2001-01-12 2002-07-26 Fuji Electric Co Ltd Gate drive circuit of power semiconductor device
CN101908788A (en) * 2009-06-05 2010-12-08 苏州能健电气有限公司 Variable frequency AC motor and driving system thereof for controlling paddles of aerogenerator
CN102361319A (en) * 2011-10-25 2012-02-22 杭州日鼎控制技术有限公司 IGBT (Insulated Gate Bipolar Translator) short circuit protection detection circuit based on driving chip
CN205123571U (en) * 2015-10-20 2016-03-30 长沙广义变流技术有限公司 Two -way chopper
CN210297240U (en) * 2019-06-25 2020-04-10 徐州中矿大传动与自动化有限公司 IGBT short-circuit fault rapid protection circuit

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002208847A (en) * 2001-01-12 2002-07-26 Fuji Electric Co Ltd Gate drive circuit of power semiconductor device
CN101908788A (en) * 2009-06-05 2010-12-08 苏州能健电气有限公司 Variable frequency AC motor and driving system thereof for controlling paddles of aerogenerator
CN102361319A (en) * 2011-10-25 2012-02-22 杭州日鼎控制技术有限公司 IGBT (Insulated Gate Bipolar Translator) short circuit protection detection circuit based on driving chip
CN205123571U (en) * 2015-10-20 2016-03-30 长沙广义变流技术有限公司 Two -way chopper
CN210297240U (en) * 2019-06-25 2020-04-10 徐州中矿大传动与自动化有限公司 IGBT short-circuit fault rapid protection circuit

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116032101A (en) * 2023-02-27 2023-04-28 合肥惟新数控科技有限公司 Topology driving control structure of intelligent power module

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