WO2023272617A1 - Cavity ring down electro-optical system and incident light path adjustment method - Google Patents

Cavity ring down electro-optical system and incident light path adjustment method Download PDF

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Publication number
WO2023272617A1
WO2023272617A1 PCT/CN2021/103721 CN2021103721W WO2023272617A1 WO 2023272617 A1 WO2023272617 A1 WO 2023272617A1 CN 2021103721 W CN2021103721 W CN 2021103721W WO 2023272617 A1 WO2023272617 A1 WO 2023272617A1
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Prior art keywords
cavity
optical
resonant cavity
ring
optical resonant
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PCT/CN2021/103721
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French (fr)
Chinese (zh)
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陈波
杨志泉
陈从干
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徐州旭海光电科技有限公司
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Priority to PCT/CN2021/103721 priority Critical patent/WO2023272617A1/en
Priority to CN202180001785.2A priority patent/CN113646621A/en
Publication of WO2023272617A1 publication Critical patent/WO2023272617A1/en

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/39Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • G01J3/0205Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0208Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • G01J3/0205Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/021Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using plane or convex mirrors, parallel phase plates, or particular reflectors
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J3/42Absorption spectrometry; Double beam spectrometry; Flicker spectrometry; Reflection spectrometry
    • G01J3/433Modulation spectrometry; Derivative spectrometry
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J3/42Absorption spectrometry; Double beam spectrometry; Flicker spectrometry; Reflection spectrometry
    • G01J2003/423Spectral arrangements using lasers, e.g. tunable

Definitions

  • the application belongs to the technical field of cavity ring down (CRD), and in particular relates to a cavity ring down photoelectric system and an incident light path adjustment method thereof.
  • Cavity ring down technology is mainly used in high reflectivity detection of mirrors, trace gas detection and other fields. Different from other detection technologies, cavity ring-down technology calculates the optical loss of the optical resonator by detecting the ring-down time of the light wave in the optical resonator, and then calculates the reflectivity of the mirror or the absorptivity of the gas.
  • One of the purposes of the embodiments of the present application is to provide a cavity ring-down optoelectronic system and its incident light path adjustment method to solve the defects of the existing cavity ring-down optoelectronic system in terms of transverse mode matching and photodetector reception.
  • There is a high-order transverse mode and the optical detector receives the high-order transverse mode as well as the fundamental transverse mode, which will interfere with the optical ring-down signal and reduce the sensitivity of the system.
  • the first aspect of the embodiments of the present application provides a cavity ring-down optoelectronic system, including:
  • An optical resonant cavity the detection beam is attenuated into an outgoing beam after being reflected back and forth by the optical resonant cavity;
  • a first light detector configured to receive the outgoing light beam and convert it into a first electrical signal
  • a photoelectric control module connected to the laser and the first photodetector, configured to adjust the working parameters of the laser so that the wavelength of the probe beam matches the longitudinal mode of the optical resonant cavity, according to the
  • the first electrical signal obtains the light intensity of the outgoing light beam, and when the light intensity of the outgoing light beam is greater than a preset threshold, adjust the working parameters of the laser so that the wavelength of the detection light beam is the same as the longitudinal direction of the optical resonant cavity. mode mismatch to turn off the probe beam;
  • a data processing module connected to the first photodetector, configured to obtain the ring-down time of the probe beam in the optical resonant cavity according to the first electrical signal;
  • the optical resonant cavity is a flat concave cavity composed of a plane reflector and a concave reflector;
  • the cavity ring-down optoelectronic system further includes an output optical fiber connected to the first photodetector, the output optical fiber is a single-mode optical fiber whose fundamental mode matches the fundamental transverse mode of the outgoing light beam, and the outgoing optical fiber The light beam is transmitted to the first photodetector after being filtered by the output optical fiber to filter high-order transverse modes.
  • the second aspect of the embodiments of the present application provides a cavity ring-down optoelectronic system, including:
  • An optical resonant cavity the detection beam is attenuated into an outgoing beam after being reflected back and forth by the optical resonant cavity;
  • a first light detector configured to receive the outgoing light beam and convert it into a first electrical signal
  • the piezoelectric ceramic actuator is arranged on the outer cavity wall of the optical resonant cavity;
  • a photoelectric control module connected with the optical switch, the piezoelectric ceramic actuator and the first photodetector, used to control the piezoelectric ceramic actuator to adjust the cavity length of the optical resonant cavity, so that The wavelength of the detection beam matches the longitudinal mode of the optical resonant cavity, the light intensity of the outgoing light beam is obtained according to the first electrical signal, and when the light intensity of the outgoing light beam is greater than a preset threshold, the control The optical switch changes the transmission direction of the detection beam or reduces the light intensity of the detection beam to turn off the detection beam;
  • a data processing module connected to the first photodetector, configured to obtain the ring-down time of the probe beam in the optical resonant cavity according to the first electrical signal;
  • the optical resonant cavity is a flat concave cavity composed of a plane reflector and a concave reflector;
  • the cavity ring-down optoelectronic system further includes an output optical fiber connected to the first photodetector, the output optical fiber is a single-mode optical fiber whose fundamental mode matches the fundamental transverse mode of the outgoing light beam, and the outgoing optical fiber The light beam is transmitted to the first photodetector after being filtered by the output optical fiber to filter high-order transverse modes.
  • the third aspect implemented in the present application provides a method for adjusting the incident light path, which is implemented based on the cavity ring-down optoelectronic system provided in the first aspect or the second aspect of the embodiments of the present application.
  • the method includes:
  • the probe beam is transmitted to the optical resonant cavity through a circulator, and the circulator is connected to the laser;
  • the second photodetector is connected to the circulator and the photoelectric control module;
  • the photoelectric control module Obtain the light intensity of the reflected light beam through the photoelectric control module according to the second electrical signal, so as to monitor the coupling degree of the detection beam and the fundamental transverse mode of the optical resonator until the coupling degree is greater than the coupling degree Up to a threshold value, the light intensity of the reflected light beam is positively correlated with the coupling degree.
  • the laser outputs the detection beam
  • the optical resonant cavity reflects the detection beam back and forth and attenuates it into an outgoing beam
  • the first photodetector receives the outgoing beam and converts it into a first electrical signal
  • the photoelectric control module adjusts the working parameters of the laser so that the wavelength of the probe beam matches the longitudinal mode of the optical resonator, obtains the light intensity of the outgoing beam according to the first electrical signal, and adjusts when the light intensity of the outgoing beam is greater than a preset threshold
  • the working parameters of the laser are such that the wavelength of the probe beam does not match the longitudinal mode of the optical resonator to turn off the probe beam, and the data processing module obtains the ring-down time of the probe beam in the optical resonator according to the first electrical signal; wherein, the optical The resonant cavity is the fundamental transverse mode beam waist located in the flat concave cavity of the plane mirror
  • the laser outputs the detection beam
  • the optical resonant cavity reflects the detection beam back and forth and attenuates it into an outgoing beam
  • the first photodetector receives the outgoing beam and converts it into a first electrical signal
  • the photoelectric control module controls the piezoelectric ceramic actuator to adjust the cavity length of the optical resonant cavity, so that the wavelength of the detection beam matches the longitudinal mode of the optical resonant cavity, and the light intensity of the outgoing beam is obtained according to the first electrical signal.
  • the optical switch When the light intensity is greater than the preset threshold, control the optical switch to change the transmission direction of the detection beam or reduce the light intensity of the detection beam to turn off the detection beam, and the data processing module obtains the ringdown of the detection beam in the optical resonant cavity according to the first electrical signal time; wherein, the optical resonant cavity is a flat concave cavity where the beam waist of the fundamental transverse mode is located in a plane mirror; or, the cavity ring-down optoelectronic system also includes a single-mode output fiber whose fundamental mode matches the fundamental transverse mode of the outgoing beam, which can effectively Higher-order transverse modes are suppressed to improve system sensitivity.
  • the probe beam in the process of adjusting the beam waist position and incident angle of the probe beam, is transmitted to the optical resonator through a circulator, and the circulator is connected to the laser; through the first The second light detector converts the reflected light beam reflected by the plane reflector into a second electrical signal, and the second light detector is connected with the circulator and the photoelectric control module; the light intensity of the reflected light beam is obtained by the photoelectric control module according to the second electric signal, so as to Monitor the coupling degree of the probe beam and the fundamental transverse mode of the optical resonator until the coupling degree is greater than the threshold value of the coupling degree. coupling.
  • FIG. 1 is a first structural schematic diagram of a cavity ring-down optoelectronic system provided by an embodiment of the present application
  • Fig. 2 is a second structural schematic diagram of the cavity ring-down optoelectronic system provided by the embodiment of the present application;
  • Fig. 3 is a third structural schematic diagram of the cavity ring-down optoelectronic system provided by the embodiment of the present application.
  • Fig. 4 is a schematic diagram of the fourth structure of the cavity ring-down optoelectronic system provided by the embodiment of the present application;
  • FIG. 5 is a schematic diagram of a fifth structure of the cavity ring-down optoelectronic system provided by the embodiment of the present application.
  • Fig. 6 is a schematic diagram of the sixth structure of the cavity ring-down optoelectronic system provided by the embodiment of the present application;
  • Fig. 7 is a schematic diagram of the seventh structure of the cavity ring-down optoelectronic system provided by the embodiment of the present application;
  • Fig. 8 is a schematic diagram of the eighth structure of the cavity ring-down optoelectronic system provided by the embodiment of the present application.
  • FIG. 9 is a schematic diagram of the ninth structure of the cavity ring-down optoelectronic system provided by the embodiment of the present application.
  • Fig. 10 is a schematic diagram of a tenth structure of the cavity ring-down optoelectronic system provided by the embodiment of the present application.
  • the first cavity ring-down optoelectronic system 100 provided in the embodiment of the present application includes:
  • An optical resonant cavity 2 the detection beam is reflected back and forth by the optical resonant cavity 2 and attenuated into an outgoing beam;
  • the first light detector 3 is used to receive the outgoing light beam and convert it into a first electrical signal
  • the photoelectric control module 4 connected to the laser 1 and the first photodetector 3 is used to adjust the working parameters of the laser 1, so that the wavelength of the detection beam matches the longitudinal mode of the optical resonator 2, and obtains the outgoing beam according to the first electrical signal
  • the working parameters of the laser 1 are adjusted so that the wavelength of the detection beam does not match the longitudinal mode of the optical resonator 2, so as to turn off the detection beam;
  • the data processing module 5 connected to the first photodetector 3 is used to obtain the ring down time of the probe beam in the optical resonant cavity 2 according to the first electrical signal.
  • Fig. 1 exemplarily shows that the optical resonant cavity 2 is a flat concave cavity composed of a plane reflector and a concave reflector;
  • Fig. 2 exemplarily shows that the optical resonant cavity 2 is a confocal cavity composed of two concave mirrors, and the fundamental transverse mode beam waist of the confocal cavity is located between the two concave mirrors; the cavity ring-down optoelectronic system 100 is also It includes an output optical fiber 6 connected to the first photodetector 3, the output optical fiber 6 is a single-mode optical fiber whose fundamental mode matches the fundamental transverse mode of the outgoing beam, and the outgoing beam is transmitted to the first light detector 3;
  • Fig. 3 exemplarily shows that the optical resonant cavity 2 is a flat concave cavity composed of a plane reflector and a concave reflector, and the fundamental transverse mode beam waist of the flat concave cavity is located at the plane reflector; the cavity ring-down optoelectronic system 100 also includes and
  • the output optical fiber 6 connected to the first photodetector 3 is a single-mode optical fiber whose fundamental mode matches the fundamental transverse mode of the outgoing beam, and the outgoing beam is transmitted to the first optical detector after the high-order transverse mode is filtered by the output optical fiber.
  • Device 3 exemplarily shows that the optical resonant cavity 2 is a flat concave cavity composed of a plane reflector and a concave reflector, and the fundamental transverse mode beam waist of the flat concave cavity is located at the plane reflector; the cavity ring-down optoelectronic system 100 also includes and
  • the output optical fiber 6 connected to the first photodetector 3 is a single-
  • the optical resonant cavity can be a flat-concave cavity composed of a plane reflector and a concave reflector, or the cavity ring-down optoelectronic system can also include an output optical fiber connected to the first photodetector, and the output optical fiber is a fundamental mode and A single-mode optical fiber whose fundamental transverse mode of the outgoing light beam matches, and the outgoing light beam is transmitted to the first photodetector after the high-order transverse mode is filtered by the output optical fiber.
  • the optical resonant cavity is a flat concave cavity and the cavity ring-down optoelectronic system also includes the output optical fiber. These two conditions can exist at the same time.
  • the optical resonator can be an open cavity or a closed cavity.
  • the optical resonant cavity When the optical resonant cavity is an open cavity, it can be used to detect the absorption rate of the gas (for example, the atmosphere) in any space where it is located; when the optical resonant cavity is a closed cavity, it can be used to detect the gas filling the closed cavity
  • the absorption rate of any gas (for example, trace gas) in the body needs to make the absorption peak wavelength of the gas in the optical cavity within the central wavelength range of the probe beam; no matter whether the optical cavity is airtight, it can be used to detect its
  • the reflectivity of the inner wall that is, the reflectivity of the plane mirror or concave mirror used to form the optical resonant cavity
  • the absorption peak wavelength of the gas in the optical resonant cavity not within the central wavelength range of the probe beam; when the optical When the resonant cavity is airtight and vacuum, since there is no gas interference, it can be used to accurately detect the reflectivity of
  • the optical resonant cavity is a flat concave cavity composed of a plane reflector and a concave reflector
  • the distance from the plane reflector to the concave reflector is 1/2 of the radius of curvature of the concave reflector
  • the distance of the flat concave cavity The fundamental transverse mode beam waist is located on the flat mirror.
  • the cavity ring-down optoelectronic system has three structures as shown in Figure 1 to Figure 3, and its effects are as follows:
  • the optical resonant cavity is a flat concave cavity and does not include an output fiber composed of a single-mode fiber.
  • the optical resonant cavity is a double concave cavity and includes an output fiber composed of a single-mode fiber.
  • a single-mode fiber whose fundamental mode matches the fundamental transverse mode of the outgoing beam, it can effectively filtering out the high-order transverse modes in the outgoing light beam, so that the high-order transverse modes in the outgoing light beam finally received by the first photodetector approach to 0;
  • the optical resonant cavity is a flat concave cavity and includes an output fiber composed of a single-mode fiber.
  • the single-mode fiber whose fundamental transverse mode of the outgoing beam matches can realize the superposition of the two effects of reducing the excitation of the high-order transverse mode and filtering the high-order transverse mode in the outgoing beam, so that it is finally received by the first photodetector
  • the higher-order transverse modes in the outgoing beam of tend to zero.
  • the modulation type of the laser can be current modulation type or voltage modulation type.
  • the laser can be any type of tunable laser, for example, Fabry-Perot laser, Distributed Feedback semiconductor laser, Distributed Bragg reflector laser, vertical cavity surface Tunable semiconductor lasers such as vertical-cavity surface-emitting lasers and external cavity tuned semiconductor lasers.
  • the operating parameters of the laser can be operating temperature, bias current or bias voltage.
  • the wavelength of the probe beam output by the laser can be adjusted by changing the working temperature, bias current or bias voltage of the laser chip of the laser.
  • the first photodetector may be a photoelectric conversion device such as a photodiode or a photomultiplier tube.
  • the photoelectric control module and the data processing module can be a central processing unit (Central Processing Unit, CPU), or other general-purpose processors, digital signal processors (Digital Signal Processor, DSP), application-specific integrated circuits (Application Specific Integrated Circuit, ASIC), off-the-shelf programmable gate array (Field-Programmable Gate Array, FPGA) or other programmable logic devices, discrete gate or transistor logic devices, discrete hardware components, etc.
  • a general purpose processor may be a microprocessor or any conventional processor or the like.
  • the working principle of the photoelectric control module and the data processing module is:
  • the photoelectric control module adjusts the working parameters of the laser to change the wavelength of the detection beam, so that the wavelength of the detection beam matches the longitudinal mode of the optical resonator and can be received by the first photodetector;
  • the photoelectric control module acquires the light intensity of the outgoing beam according to the first electrical signal.
  • the light intensity of the outgoing light beam is greater than the preset threshold, it indicates that the wavelength of the outgoing light beam matches the longitudinal mode of the optical resonator to a high degree.
  • the laser is adjusted working parameters to change the wavelength of the detection beam, so that the wavelength of the detection beam does not match the longitudinal mode of the optical resonator and cannot be received by the first photodetector, so as to realize the indirect shutdown of the detection beam and trigger the first photodetector at the same time fast sampling;
  • the data processing module can obtain the ring-down time of the detection beam in the optical resonant cavity according to the first electrical signal obtained by fast sampling by the first photodetector.
  • an embodiment of the present application also provides a kind of optical cavity ring-down optoelectronic system 100 when the optical resonant cavity 2 is a flat-concave cavity composed of a plane reflector and a concave reflector.
  • the structure for implementing the incident light path adjustment method the structure also includes a circulator 7 connected to the laser 1 and a second photodetector 8 connected to the circulator 7 and the photoelectric control module 4 on the basis of the cavity ring-down optoelectronic system 100,
  • Incident light path adjustment methods include:
  • the probe beam is transmitted to the optical resonant cavity 2 through the circulator 7;
  • FIG. 4 exemplarily shows a structure implemented on the basis of the cavity ring-down optoelectronic system 100 shown in FIG. 3 for implementing a method for adjusting an incident light path.
  • the detection beam reflected by the plane mirror (that is, the reflected beam) can be reversely transmitted to the second photodetector by setting a circulator,
  • the reflected light beam is received by the second photodetector and converted into a second electrical signal, so that the photoelectric control module can obtain the light intensity of the reflected light beam according to the second electric signal, and then monitor the relationship between the detection light beam and the optical resonant cavity according to the light intensity of the reflected light beam
  • the coupling degree of the fundamental transverse mode when the coupling degree does not reach the coupling degree threshold, repeatedly adjust the beam waist position and incident angle of the probe beam until the coupling degree is greater than the coupling degree threshold, and finally realize the fundamental of the probe beam and the optical resonator.
  • the beam waist of the fundamental transverse mode of the probe beam is located on the plane mirror and parallel to the normal of the plane mirror, it is reflected back to the second beam through the optical circulator.
  • the light beam of the photodetector has the strongest light intensity.
  • the coupling degree threshold should be set to a value corresponding to the strongest light intensity of the reflected light beam obtained by the photoelectric control module according to the actual situation.
  • the second photodetector may be a photoelectric conversion device such as a photodiode or a photomultiplier tube, that is, the implementation manner of the first photodetector may be the same.
  • the cavity ring-down optoelectronic system further includes:
  • the incident light shaping unit is arranged on the optical path between the laser and the optical resonant cavity, and the detection beam is spatially modulated by the incident light shaping unit and then transmitted to the optical resonant cavity;
  • the outgoing light shaping unit is arranged on the optical path between the optical resonant cavity and the first photodetector, and the outgoing light beam is spatially modulated by the outgoing light shaping unit and then transmitted to the first photodetector or the output optical fiber.
  • the cavity ring down optoelectronic system can include an incident light shaping unit, so that the detection beam can be better coupled to the optical resonant cavity; it can also include an outgoing light shaping unit, so that the outgoing light beam can be better coupled to the first photodetector or output fiber.
  • the incident light shaping unit includes:
  • An optical isolator 9 connected to the laser 1 is used to isolate the reverse beam whose propagation direction is opposite to that of the detection beam;
  • Input optical fiber 10 connected with optical isolator 9;
  • a collimating lens 11, the detection beam is transmitted to the optical resonant cavity 2 through the optical isolator 9, the input optical fiber 10 and the collimating lens 11 in sequence;
  • the outgoing light shaping unit includes a first focusing lens 12 , and the outgoing light beam is focused by the first focusing lens 12 and transmitted to the first light detector 3 .
  • Figure 5 exemplarily shows on the basis of Figure 3 that an optical isolator 9, an input fiber 10 and a collimating lens 11 are arranged between the laser 1 and the optical resonator 2, and the first focusing lens 12 is arranged between the optical resonator 2 and the output between 6 fibers.
  • the second cavity ring-down optoelectronic system 200 provided by the embodiment of the present application includes:
  • An optical resonant cavity 2 the detection beam is reflected back and forth by the optical resonant cavity 2 and attenuated into an outgoing beam;
  • the first light detector 3 is used to receive the outgoing light beam and convert it into a first electrical signal
  • the piezoelectric ceramic actuator 14 is arranged on the outer cavity wall of the optical resonant cavity;
  • the photoelectric control module 4 connected with the optical switch 13, the piezoelectric ceramic actuator 14 and the first photodetector 3 is used to control the piezoelectric ceramic actuator 14 to adjust the cavity length of the optical resonant cavity, so that the wavelength of the detection beam and The longitudinal modes of the optical resonant cavity are matched, and the light intensity of the outgoing beam is obtained according to the first electrical signal.
  • the optical switch 13 is controlled to change the transmission direction of the detection beam or reduce the light intensity of the detection light beam. , to turn off the detection beam;
  • the data processing module 5 connected to the first photodetector 3 is used to obtain the ring down time of the probe beam in the optical resonant cavity 2 according to the first electrical signal.
  • Figure 6 exemplarily shows that the optical resonant cavity 2 is a flat concave cavity composed of a plane reflector and a concave reflector;
  • Fig. 7 exemplarily shows that the optical resonant cavity 2 is a confocal cavity composed of two concave mirrors, and the fundamental transverse mode beam waist of the confocal cavity is located between the two concave mirrors; the cavity ring-down optoelectronic system 100 is also It includes an output optical fiber 6 connected to the first photodetector 3, the output optical fiber 6 is a single-mode optical fiber whose fundamental mode matches the fundamental transverse mode of the outgoing beam, and the outgoing beam is transmitted to the first light detector 3;
  • Figure 8 exemplarily shows that the optical resonant cavity 2 is a flat concave cavity composed of a plane reflector and a concave reflector, and the fundamental transverse mode beam waist of the flat concave cavity is located at the plane reflector; the cavity ring-down optoelectronic system 100 also includes a
  • the output optical fiber 6 connected to the first photodetector 3 is a single-mode optical fiber whose fundamental mode matches the fundamental transverse mode of the outgoing beam, and the outgoing beam is transmitted to the first optical detector after the high-order transverse mode is filtered by the output optical fiber.
  • Device 3 exemplarily shows that the optical resonant cavity 2 is a flat concave cavity composed of a plane reflector and a concave reflector, and the fundamental transverse mode beam waist of the flat concave cavity is located at the plane reflector; the cavity ring-down optoelectronic system 100 also includes a
  • the output optical fiber 6 connected to the first photodetector 3 is a single-
  • the optical switch can be an acousto-optic switch (AOM) or an electro-optic switch (EOM).
  • AOM acousto-optic switch
  • EOM electro-optic switch
  • the piezoelectric ceramic actuator can be arranged on any outer cavity wall of the optical resonant cavity in the direction of the optical path, that is, the outer wall of the reflector or the concave reflector.
  • the piezoelectric ceramic actuator can move under the control of the photoelectric control module, thereby driving any cavity wall of the optical resonant cavity to move in the direction of the optical path, so as to realize the adjustment of the cavity length of the optical resonant cavity, and then by adjusting the cavity length, To change the matching degree between the wavelength of the probe beam and the longitudinal mode of the optical cavity.
  • the optical resonant cavity is a flat concave cavity composed of a plane reflector and a concave reflector
  • the distance from the plane reflector to the concave reflector is 1/2 of the radius of curvature of the concave reflector
  • the distance of the flat concave cavity The fundamental transverse mode beam waist is located on the flat mirror.
  • the working principle of the photoelectric control module and the data processing module is:
  • the photoelectric control module analyzes the wavelength and light intensity of the outgoing beam according to the first electrical signal, and controls the piezoelectric ceramic actuator to adjust the cavity length of the optical resonant cavity according to the wavelength of the outgoing beam, so as to change the wavelength of the detection beam, so that the wavelength of the detection beam is consistent with the optical
  • the longitudinal modes of the resonant cavity are matched and can be received by the first photodetector;
  • the acousto-optic modulator is controlled to change the transmission direction of the detection beam so that the detection beam cannot be transmitted. to the optical resonant cavity, or control the electro-optic modulator to change the light intensity of the detection beam, so that the light intensity is reduced and cannot be received by the first photodetector, so as to directly turn off the detection beam and trigger the first photodetector to quickly sample ;
  • the data processing module can obtain the ring-down time of the detection beam in the optical resonant cavity according to the first electrical signal obtained by fast sampling by the first photodetector.
  • an embodiment of the present application also provides an optical resonant cavity 2 which is a flat-concave cavity composed of a plane reflector and a concave reflector, on the basis of the cavity ring-down optoelectronic system 200
  • the structure for implementing the incident light path adjustment method the structure also includes a circulator 7 connected to the laser 1 and a second photodetector 8 connected to the circulator 7 and the photoelectric control module 4 on the basis of the cavity ring-down optoelectronic system 100,
  • a circulator 7 connected to the laser 1
  • a second photodetector 8 connected to the circulator 7 and the photoelectric control module 4 on the basis of the cavity ring-down optoelectronic system 100
  • FIG. 9 exemplarily shows a structure implemented on the basis of the cavity ring-down optoelectronic system 200 shown in FIG. 8 for implementing a method for adjusting an incident light path.
  • the cavity ring-down optoelectronic system further includes:
  • the incident light shaping unit is arranged on the optical path between the optical switch and the optical resonant cavity, and the detection beam passes through the optical switch to the incident light shaping unit for spatial light modulation and then is transmitted to the optical resonant cavity;
  • the outgoing light shaping unit is arranged on the optical path between the optical resonant cavity and the first photodetector, and the outgoing light beam is spatially modulated by the outgoing light shaping unit and then transmitted to the first photodetector.
  • the incident light shaping unit includes:
  • An optical isolator 9 connected to the laser 1 is used to isolate the reverse beam whose propagation direction is opposite to that of the detection beam;
  • An input optical fiber 10 connected to an optical switch 13;
  • a collimating lens 11, the detection beam is transmitted to the optical resonant cavity 2 through the optical isolator 9, the optical switch 13, the input optical fiber 10 and the collimating lens 11 in sequence;
  • the outgoing light shaping unit includes a first focusing lens 12 , and the outgoing light beam is focused by the first focusing lens 12 and transmitted to the first light detector 3 .
  • Figure 10 schematically shows that the optical isolator 9, the input fiber 10 and the collimating lens 11 are arranged between the laser 1 and the optical resonant cavity 2 on the basis of Figure 8, and the first focusing lens 12 is arranged between the optical resonant cavity 2 and the output between 6 fibers.
  • the cavity ring down optoelectronic system may include but not limited to the above components.
  • the illustration is only an example of the cavity ring-down optoelectronic system, and does not constitute a limitation to the cavity ring-down optoelectronic system, and may include more or less components than those shown in the figure, or combine certain components, Or different components, for example, may also include storage, input and output devices, network access devices, and the like.
  • the memory may be an internal storage unit of the cavity ring-down optoelectronic system in some embodiments, for example, a hard disk or memory of the cavity ring-down optoelectronic system, specifically, the memory of the optoelectronic control module or the data processing module.
  • the memory may also be an external storage device of the cavity ring-down optoelectronic system, for example, a plug-in hard disk equipped on the cavity ring-down optoelectronic system, a smart memory card (Smart Media Card, SMC), a secure digital (Secure Digital, SD) card, flash memory card (Flash Card), etc.
  • the memory may also include both an internal storage unit of the cavity ring-down optoelectronic system and an external storage device.
  • the memory is used to store operating systems, application programs, boot loaders (BootLoader), data, and other programs, such as program codes of computer programs.
  • the memory can also be used to temporarily store data that has been output or will be output.
  • the photoelectric control module and the data processing module can be integrated into one processing unit, or each unit can exist separately physically.
  • the specific names of the photoelectric control module and the data processing module are only for the convenience of distinguishing each other, and are not used to limit the scope of protection of this application.
  • the embodiment of the present application also provides an application method of the above-mentioned cavity ring-down optoelectronic system, including the following steps:
  • the absorptivity of the gas is obtained based on the ring-down time obtained when there is no gas in the optical resonant cavity and the ring-down time obtained when there is gas in the optical resonant cavity.
  • the relationship between the light intensity of the outgoing light beam and the ring-down time is as follows:
  • I is the light intensity of the outgoing beam acquired at the moment when the outgoing light beam is stopped to be converted into the first electrical signal
  • I 0 is the initial light intensity of the outgoing light beam
  • t is from the moment when the detection beam is turned off to the time when the outgoing light beam is stopped.
  • is the ring-down time.
  • the initial light intensity of the outgoing light beam is the light intensity of the outgoing light beam acquired according to the first electrical signal when the light intensity of the outgoing light beam is greater than a preset threshold.
  • the relationship between the ring-down time and the parameters of the optical resonant cavity is as follows:
  • L is the cavity length of the optical resonant cavity
  • C is the speed of light
  • R 1 and R 2 are the reflectivity of the two inner walls of the optical resonant cavity
  • is the optical path of the probe beam in the optical resonant cavity equal to the single cavity length
  • the optical loss for example, diffraction loss
  • is the absorption rate of the gas in the optical resonator to the probe beam when the optical path of the probe beam in the optical resonator is equal to the single cavity length .
  • the third relation when there is no gas in the optical cavity, the third relation can be simplified to the following relation:
  • ⁇ 1 is the ring-down time obtained according to relational formula 1 when there is no gas in the optical resonant cavity.
  • ⁇ 2 is the ring-down time obtained according to the relational formula 1 when there is gas in the optical resonant cavity.
  • the application method based on the cavity ring-down optoelectronic system provided in the embodiment of the present application can realize fast and accurate measurement of the reflectivity of the inner wall of the optical cavity according to the ring-down time obtained when there is no gas in the optical cavity; It is also possible to realize fast and accurate measurement of the absorption rate of the gas based on the ring-down time obtained when there is no gas in the optical resonant cavity and the ring-down time obtained when there is gas in the optical resonant cavity.
  • the embodiment of the present application also provides a computer-readable storage medium.
  • the computer-readable storage medium stores a computer program.
  • the steps in the above application method embodiments can be realized.
  • An embodiment of the present application provides a computer program product.
  • the computer program product runs on the cavity ring-down optoelectronic system
  • the cavity ring-down optoelectronic system can implement the steps in the above application method embodiments.
  • a computer readable medium may at least include: any entity or system capable of carrying computer program codes to a data processing module, a recording medium, a computer memory, a read-only memory (ROM, Read-Only Memory), Random Access Memory (RAM, Random Access Memory), electrical carrier signal, telecommunication signal, and software distribution medium.
  • ROM Read-only memory
  • RAM Random Access Memory
  • electrical carrier signal telecommunication signal
  • software distribution medium Such as U disk, mobile hard disk, magnetic disk or optical disk, etc.
  • the disclosed system and method can be implemented in other ways.
  • the device embodiments described above are only illustrative.
  • the division of units is only a logical function division. In actual implementation, there may be other division methods.
  • multiple units or components can be combined or integrated. , or some features can be ignored, or not implemented.

Abstract

A cavity ring down electro-optical system (100, 200) and an incident light path adjustment method. The cavity ring down electro-optical system (100, 200) outputs a detection beam by means of a laser (1). The detection beam is attenuated to an emergent beam after same has been reflected back and forth by an optical resonant cavity (2). A first light detector (3) receives the emergent beam and converts same into a first electrical signal. An electro-optical control module (4) adjusts an operating parameter of the laser (1), so as to match the wavelength of the detection beam with a longitudinal mode of the optical resonant cavity (2); acquires the light intensity of the emergent beam according to the first electrical signal; and adjusts, when the light intensity of the emergent beam is greater than a preset threshold value, the operation parameter of the laser (1), so as to turn off the detection beam. A data processing module (5) acquires, according to the first electrical signal, a ring down time of the detection beam in the optical resonant cavity (2). The optical resonant cavity (2) is a plano-concave cavity, a fundamental transverse mode beam waist of which is located on a plane mirror; or the cavity ring down electro-optical system (100, 200) further comprises a single-mode output optical fiber (6) having a fundamental mode which matches a fundamental transverse mode of the emergent beam. A higher-order transverse mode can be effectively suppressed, so as to improve the system sensitivity.

Description

一种腔衰荡光电系统及其入射光路调节方法A cavity ring-down photoelectric system and its incident light path adjustment method 技术领域technical field
本申请属于腔衰荡(Cavity Ring Down,CRD)技术领域,尤其涉及一种腔衰荡光电系统及其入射光路调节方法。The application belongs to the technical field of cavity ring down (CRD), and in particular relates to a cavity ring down photoelectric system and an incident light path adjustment method thereof.
背景技术Background technique
腔衰荡技术主要应用于反射镜的高反射率检测、痕量气体检测等领域。有别于其它检测技术,腔衰荡技术是通过检测光波在光学谐振腔内的衰荡时间,来推算出光学谐振腔的光学损耗,进而推算出反射镜的反射率或气体的吸收率。Cavity ring down technology is mainly used in high reflectivity detection of mirrors, trace gas detection and other fields. Different from other detection technologies, cavity ring-down technology calculates the optical loss of the optical resonator by detecting the ring-down time of the light wave in the optical resonator, and then calculates the reflectivity of the mirror or the absorptivity of the gas.
技术问题technical problem
本申请实施例的目的之一在于:提供了一种腔衰荡光电系统及其入射光路调节方法,以解决现有的腔衰荡光电系统在横模匹配和光探测器接收方面存在缺陷,谐振腔存在高阶横模,光探测器在接收了基横模的同时还接收了高阶横模,会对光衰荡信号产生干扰,降低系统的灵敏度的问题。One of the purposes of the embodiments of the present application is to provide a cavity ring-down optoelectronic system and its incident light path adjustment method to solve the defects of the existing cavity ring-down optoelectronic system in terms of transverse mode matching and photodetector reception. There is a high-order transverse mode, and the optical detector receives the high-order transverse mode as well as the fundamental transverse mode, which will interfere with the optical ring-down signal and reduce the sensitivity of the system.
技术解决方案technical solution
为了解决上述技术问题,本申请实施例采用的技术方案是:In order to solve the above technical problems, the technical solution adopted in the embodiment of the present application is:
本申请实施例的第一方面提供一种腔衰荡光电系统,包括:The first aspect of the embodiments of the present application provides a cavity ring-down optoelectronic system, including:
激光器,用于输出探测光束;a laser for outputting a detection beam;
光学谐振腔,所述探测光束经所述光学谐振腔来回反射后衰减为出射光束;An optical resonant cavity, the detection beam is attenuated into an outgoing beam after being reflected back and forth by the optical resonant cavity;
第一光探测器,用于接收所述出射光束并转换为第一电信号;a first light detector, configured to receive the outgoing light beam and convert it into a first electrical signal;
与所述激光器和所述第一光探测器连接的光电控制模块,用于调节所述激光器的工作参数,使所述探测光束的波长与所述光学谐振腔的纵模相匹配,根据所述第一电信号获取所述出射光束的光强度,在所述出射光束的光强度大于预设阈值时,调节所述激光器的工作参数,使所述探测光束的波长与所述光学谐振腔的纵模不匹配,以关断所述探测光束;a photoelectric control module connected to the laser and the first photodetector, configured to adjust the working parameters of the laser so that the wavelength of the probe beam matches the longitudinal mode of the optical resonant cavity, according to the The first electrical signal obtains the light intensity of the outgoing light beam, and when the light intensity of the outgoing light beam is greater than a preset threshold, adjust the working parameters of the laser so that the wavelength of the detection light beam is the same as the longitudinal direction of the optical resonant cavity. mode mismatch to turn off the probe beam;
与所述第一光探测器连接的数据处理模块,用于根据所述第一电信号获取所述探测光束在所述光学谐振腔内的衰荡时间;A data processing module connected to the first photodetector, configured to obtain the ring-down time of the probe beam in the optical resonant cavity according to the first electrical signal;
其中,所述光学谐振腔为由平面反射镜和凹面反射镜构成的平凹腔;Wherein, the optical resonant cavity is a flat concave cavity composed of a plane reflector and a concave reflector;
或者,所述腔衰荡光电系统还包括与所述第一光探测器连接的输出光纤,所述输出光纤为基模与所述出射光束的基横模相匹配的单模光纤,所述出射光束经所述输出光纤滤除高阶横模后传输至所述第一光探测器。Alternatively, the cavity ring-down optoelectronic system further includes an output optical fiber connected to the first photodetector, the output optical fiber is a single-mode optical fiber whose fundamental mode matches the fundamental transverse mode of the outgoing light beam, and the outgoing optical fiber The light beam is transmitted to the first photodetector after being filtered by the output optical fiber to filter high-order transverse modes.
本申请实施例的第二方面提供一种腔衰荡光电系统,包括:The second aspect of the embodiments of the present application provides a cavity ring-down optoelectronic system, including:
激光器,用于输出探测光束;a laser for outputting a detection beam;
光开关;light switch;
光学谐振腔,所述探测光束经所述光学谐振腔来回反射后衰减为出射光束;An optical resonant cavity, the detection beam is attenuated into an outgoing beam after being reflected back and forth by the optical resonant cavity;
第一光探测器,用于接收所述出射光束并转换为第一电信号;a first light detector, configured to receive the outgoing light beam and convert it into a first electrical signal;
压电陶瓷致动器,设置于所述光学谐振腔的外腔壁;The piezoelectric ceramic actuator is arranged on the outer cavity wall of the optical resonant cavity;
与所述光开关、所述压电陶瓷致动器和所述第一光探测器连接的光电控制模块,用于控制所述压电陶瓷致动器调节所述光学谐振腔的腔长,使所述探测光束的波长与所述光学谐振腔的纵模相匹配,根据所述第一电信号获取所述出射光束的光强度,在所述出射光束的光强度大于预设阈值时,控制所述光开关改变所述探测光束的传输方向或降低所述探测光束的光强度,以关断所述探测光束;A photoelectric control module connected with the optical switch, the piezoelectric ceramic actuator and the first photodetector, used to control the piezoelectric ceramic actuator to adjust the cavity length of the optical resonant cavity, so that The wavelength of the detection beam matches the longitudinal mode of the optical resonant cavity, the light intensity of the outgoing light beam is obtained according to the first electrical signal, and when the light intensity of the outgoing light beam is greater than a preset threshold, the control The optical switch changes the transmission direction of the detection beam or reduces the light intensity of the detection beam to turn off the detection beam;
与所述第一光探测器连接的数据处理模块,用于根据所述第一电信号获取所述探测光束在所述光学谐振腔内的衰荡时间;A data processing module connected to the first photodetector, configured to obtain the ring-down time of the probe beam in the optical resonant cavity according to the first electrical signal;
其中,所述光学谐振腔为由平面反射镜和凹面反射镜构成的平凹腔;Wherein, the optical resonant cavity is a flat concave cavity composed of a plane reflector and a concave reflector;
或者,所述腔衰荡光电系统还包括与所述第一光探测器连接的输出光纤,所述输出光纤为基模与所述出射光束的基横模相匹配的单模光纤,所述出射光束经所述输出光纤滤除高阶横模后传输至所述第一光探测器。Alternatively, the cavity ring-down optoelectronic system further includes an output optical fiber connected to the first photodetector, the output optical fiber is a single-mode optical fiber whose fundamental mode matches the fundamental transverse mode of the outgoing light beam, and the outgoing optical fiber The light beam is transmitted to the first photodetector after being filtered by the output optical fiber to filter high-order transverse modes.
本申请实施了的第三方面提供一种入射光路调节方法,基于本申请实施例的第一方面或第二方面提供的腔衰荡光电系统实现,所述方法包括:The third aspect implemented in the present application provides a method for adjusting the incident light path, which is implemented based on the cavity ring-down optoelectronic system provided in the first aspect or the second aspect of the embodiments of the present application. The method includes:
在调节所述探测光束的束腰位置和入射角度的过程中,通过环形器将所述探测光束传输至所述光学谐振腔,所述环形器与所述激光器连接;During the process of adjusting the beam waist position and incident angle of the probe beam, the probe beam is transmitted to the optical resonant cavity through a circulator, and the circulator is connected to the laser;
通过第二光探测器将所述平面反射镜反射的反射光束转换为第二电信号,所述第二光探测器与所述环形器和所述光电控制模块连接;converting the reflected light beam reflected by the plane reflector into a second electrical signal through a second photodetector, the second photodetector is connected to the circulator and the photoelectric control module;
通过所述光电控制模块根据所述第二电信号获取所述反射光束的光强度,以监控所述探测光束与所述光学谐振腔的基横模的耦合程度,直到所述耦合程度大于耦合程度阈值时为止,所述反射光束的光强度与所述耦合程度正相关。Obtain the light intensity of the reflected light beam through the photoelectric control module according to the second electrical signal, so as to monitor the coupling degree of the detection beam and the fundamental transverse mode of the optical resonator until the coupling degree is greater than the coupling degree Up to a threshold value, the light intensity of the reflected light beam is positively correlated with the coupling degree.
有益效果Beneficial effect
本申请实施例的第一方面提供的腔衰荡光电系统,通过激光器输出探测光束,光学谐振腔来回反射探测光束后衰减为出射光束,第一光探测器接收出射光束并转换为第一电信号,光电控制模块调节激光器的工作参数,使探测光束的波长与光学谐振腔的纵模相匹配,根据第一电信号获取出射光束的光强度,在出射光束的光强度大于预设阈值时,调节激光器的工作参数,使探测光束的波长与光学谐振腔的纵模不匹配,以关断探测光束,数据处理模块根据第一电信号获取探测光束在光学谐振腔内的衰荡时间;其中,光学谐振腔为基横模束腰位于平面反射镜的平凹腔;或者,腔衰荡光电系统还包括基模与出射光束的基横模相匹配的单模输出光纤,能够有效抑制高阶横模,以提高系统灵敏度。In the cavity ring-down optoelectronic system provided in the first aspect of the embodiment of the present application, the laser outputs the detection beam, the optical resonant cavity reflects the detection beam back and forth and attenuates it into an outgoing beam, and the first photodetector receives the outgoing beam and converts it into a first electrical signal , the photoelectric control module adjusts the working parameters of the laser so that the wavelength of the probe beam matches the longitudinal mode of the optical resonator, obtains the light intensity of the outgoing beam according to the first electrical signal, and adjusts when the light intensity of the outgoing beam is greater than a preset threshold The working parameters of the laser are such that the wavelength of the probe beam does not match the longitudinal mode of the optical resonator to turn off the probe beam, and the data processing module obtains the ring-down time of the probe beam in the optical resonator according to the first electrical signal; wherein, the optical The resonant cavity is the fundamental transverse mode beam waist located in the flat concave cavity of the plane mirror; or, the cavity ring-down optoelectronic system also includes a single-mode output fiber whose fundamental mode matches the fundamental transverse mode of the outgoing beam, which can effectively suppress high-order transverse modes , to improve system sensitivity.
本申请实施例的第二方面提供的腔衰荡光电系统,通过激光器输出探测光束,光学谐振腔来回反射探测光束后衰减为出射光束,第一光探测器接收出射光束并转换为第一电信号,光电控制模块控制压电陶瓷致动器调节光学谐振腔的腔长,使探测光束的波长与光学谐振腔的纵模相匹配,根据第一电信号获取出射光束的光强度,在出射光束的光强度大于预设阈值时,控制光开关改变探测光束的传输方向或降低探测光束的光强度,以关断探测光束,数据处理模块根据第一电信号获取探测光束在光学谐振腔内的衰荡时间;其中,光学谐振腔为基横模束腰位于平面反射镜的平凹腔;或者,腔衰荡光电系统还包括基模与出射光束的基横模相匹配的单模输出光纤,能够有效抑制高阶横模,以提高系统灵敏度。In the cavity ring-down optoelectronic system provided by the second aspect of the embodiment of the present application, the laser outputs the detection beam, the optical resonant cavity reflects the detection beam back and forth and attenuates it into an outgoing beam, and the first photodetector receives the outgoing beam and converts it into a first electrical signal , the photoelectric control module controls the piezoelectric ceramic actuator to adjust the cavity length of the optical resonant cavity, so that the wavelength of the detection beam matches the longitudinal mode of the optical resonant cavity, and the light intensity of the outgoing beam is obtained according to the first electrical signal. When the light intensity is greater than the preset threshold, control the optical switch to change the transmission direction of the detection beam or reduce the light intensity of the detection beam to turn off the detection beam, and the data processing module obtains the ringdown of the detection beam in the optical resonant cavity according to the first electrical signal time; wherein, the optical resonant cavity is a flat concave cavity where the beam waist of the fundamental transverse mode is located in a plane mirror; or, the cavity ring-down optoelectronic system also includes a single-mode output fiber whose fundamental mode matches the fundamental transverse mode of the outgoing beam, which can effectively Higher-order transverse modes are suppressed to improve system sensitivity.
本申请实施例的第三方面提供的入射光路调节方法,在调节探测光束的束腰位置和入射角度的过程中,通过环形器将探测光束传输至光学谐振腔,环形器与激光器连接;通过第二光探测器将平面反射镜反射的反射光束转换为第二电信号,第二光探测器与环形器和光电控制模块连接;通过光电控制模块根据第二电信号获取反射光束的光强度,以监控探测光束与光学谐振腔的基横模的耦合程度,直到耦合程度大于耦合程度阈值时为止,反射光束的光强度与耦合程度正相关,能够实现探测光束与光学谐振腔的基横模的高效耦合。In the incident light path adjustment method provided by the third aspect of the embodiment of the present application, in the process of adjusting the beam waist position and incident angle of the probe beam, the probe beam is transmitted to the optical resonator through a circulator, and the circulator is connected to the laser; through the first The second light detector converts the reflected light beam reflected by the plane reflector into a second electrical signal, and the second light detector is connected with the circulator and the photoelectric control module; the light intensity of the reflected light beam is obtained by the photoelectric control module according to the second electric signal, so as to Monitor the coupling degree of the probe beam and the fundamental transverse mode of the optical resonator until the coupling degree is greater than the threshold value of the coupling degree. coupling.
附图说明Description of drawings
为了更清楚地说明本申请实施例中的技术方案,下面将对实施例或现有技术描述中所需要使用的附图作简单地介绍,显而易见地,下面描述中的附图仅仅是本申请的一些实施例,对于本领域普通技术人员来讲,在不付出创造性劳动的前提下,还可以根据这些附图获得其他的附图。In order to more clearly illustrate the technical solutions in the embodiments of the present application, the accompanying drawings that need to be used in the descriptions of the embodiments or the prior art will be briefly introduced below. Obviously, the accompanying drawings in the following description are only for the present application For some embodiments, those of ordinary skill in the art can also obtain other drawings based on these drawings without any creative effort.
为了更清楚地说明本申请实施例中的技术方案,下面将对实施例或现有技术描述中所需要使用的附图作简单地介绍,显而易见地,下面描述中的附图仅仅是本申请的一些实施例,对于本领域普通技术人员来讲,在不付出创造性劳动的前提下,还可以根据这些附图获得其他的附图。In order to more clearly illustrate the technical solutions in the embodiments of the present application, the accompanying drawings that need to be used in the descriptions of the embodiments or the prior art will be briefly introduced below. Obviously, the accompanying drawings in the following description are only for the present application For some embodiments, those of ordinary skill in the art can also obtain other drawings based on these drawings without any creative effort.
图1是本申请实施例提供的腔衰荡光电系统的第一种结构示意图;FIG. 1 is a first structural schematic diagram of a cavity ring-down optoelectronic system provided by an embodiment of the present application;
图2是本申请实施例提供的腔衰荡光电系统的第二种结构示意图;Fig. 2 is a second structural schematic diagram of the cavity ring-down optoelectronic system provided by the embodiment of the present application;
图3是本申请实施例提供的腔衰荡光电系统的第三种结构示意图;Fig. 3 is a third structural schematic diagram of the cavity ring-down optoelectronic system provided by the embodiment of the present application;
图4是本申请实施例提供的腔衰荡光电系统的第四种结构示意图;Fig. 4 is a schematic diagram of the fourth structure of the cavity ring-down optoelectronic system provided by the embodiment of the present application;
图5是本申请实施例提供的腔衰荡光电系统的第五种结构示意图;FIG. 5 is a schematic diagram of a fifth structure of the cavity ring-down optoelectronic system provided by the embodiment of the present application;
图6是本申请实施例提供的腔衰荡光电系统的第六种结构示意图;Fig. 6 is a schematic diagram of the sixth structure of the cavity ring-down optoelectronic system provided by the embodiment of the present application;
图7是本申请实施例提供的腔衰荡光电系统的第七种结构示意图;Fig. 7 is a schematic diagram of the seventh structure of the cavity ring-down optoelectronic system provided by the embodiment of the present application;
图8是本申请实施例提供的腔衰荡光电系统的第八种结构示意图;Fig. 8 is a schematic diagram of the eighth structure of the cavity ring-down optoelectronic system provided by the embodiment of the present application;
图9是本申请实施例提供的腔衰荡光电系统的第九种结构示意图;FIG. 9 is a schematic diagram of the ninth structure of the cavity ring-down optoelectronic system provided by the embodiment of the present application;
图10是本申请实施例提供的腔衰荡光电系统的第十种结构示意图。Fig. 10 is a schematic diagram of a tenth structure of the cavity ring-down optoelectronic system provided by the embodiment of the present application.
本发明的实施方式Embodiments of the present invention
为了使本技术领域的人员更好地理解本申请方案,下面将结合本申请实施例中的附图,对本申请实施例中的技术方案进行清楚地描述,显然,所描述的实施例是本申请一部分的实施例,而不是全部的实施例。基于本申请中的实施例,本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例,都应当属于本申请保护的范围。In order to enable those skilled in the art to better understand the solution of the application, the technical solution in the embodiment of the application will be clearly described below in conjunction with the drawings in the embodiment of the application. Obviously, the described embodiment is the Some examples, but not all examples. Based on the embodiments in this application, all other embodiments obtained by persons of ordinary skill in the art without creative efforts shall fall within the scope of protection of this application.
本申请的说明书和权利要求书及上述附图中的术语“包括”以及它们任何变形,意图在于覆盖不排他的包含。例如包含一系列步骤或单元的过程、方法或系统、产品或设备没有限定于已列出的步骤或单元,而是可选地还包括没有列出的步骤或单元,或可选地还包括对于这些过程、方法、产品或设备固有的其它步骤或单元。此外,术语“第一”、“第二”和“第三”等是用于区别不同对象,而非用于描述特定顺序。The terms "comprising" and any variations thereof in the specification and claims of the present application and the above drawings are intended to cover non-exclusive inclusion. For example, a process, method or system, product or device comprising a series of steps or units is not limited to the listed steps or units, but optionally also includes steps or units not listed, or optionally further includes Other steps or units inherent in these processes, methods, products or apparatus. In addition, the terms "first", "second", and "third", etc. are used to distinguish different objects, not to describe a specific order.
如图1、图2或图3所示,本申请实施例提供的第一种腔衰荡光电系统100,包括:As shown in Figure 1, Figure 2 or Figure 3, the first cavity ring-down optoelectronic system 100 provided in the embodiment of the present application includes:
激光器1,用于输出探测光束;Laser 1, for outputting a detection beam;
光学谐振腔2,探测光束经光学谐振腔2来回反射后衰减为出射光束;An optical resonant cavity 2, the detection beam is reflected back and forth by the optical resonant cavity 2 and attenuated into an outgoing beam;
第一光探测器3,用于接收出射光束并转换为第一电信号;The first light detector 3 is used to receive the outgoing light beam and convert it into a first electrical signal;
与激光器1和第一光探测器3连接的光电控制模块4,用于调节激光器1的工作参数,使探测光束的波长与光学谐振腔2的纵模相匹配,根据第一电信号获取出射光束的光强度,在出射光束的光强度大于预设阈值时,调节激光器1的工作参数,使探测光束的波长与光学谐振腔2的纵模不匹配,以关断探测光束;The photoelectric control module 4 connected to the laser 1 and the first photodetector 3 is used to adjust the working parameters of the laser 1, so that the wavelength of the detection beam matches the longitudinal mode of the optical resonator 2, and obtains the outgoing beam according to the first electrical signal When the light intensity of the outgoing beam is greater than the preset threshold, the working parameters of the laser 1 are adjusted so that the wavelength of the detection beam does not match the longitudinal mode of the optical resonator 2, so as to turn off the detection beam;
与第一光探测器3连接的数据处理模块5,用于根据第一电信号获取探测光束在光学谐振腔2内的衰荡时间。The data processing module 5 connected to the first photodetector 3 is used to obtain the ring down time of the probe beam in the optical resonant cavity 2 according to the first electrical signal.
图1中示例性的示出光学谐振腔2为由平面反射镜和凹面反射镜构成的平凹腔;Fig. 1 exemplarily shows that the optical resonant cavity 2 is a flat concave cavity composed of a plane reflector and a concave reflector;
图2中示例性的示出光学谐振腔2为由两个凹面反射镜构成的共焦腔,共焦腔的基横模束腰位于两个凹面反射镜之间;腔衰荡光电系统100还包括与第一光探测器3连接的输出光纤6,输出光纤6为基模与出射光束的基横模相匹配的单模光纤,出射光束经输出光纤滤除高阶横模后传输至第一光探测器3;Fig. 2 exemplarily shows that the optical resonant cavity 2 is a confocal cavity composed of two concave mirrors, and the fundamental transverse mode beam waist of the confocal cavity is located between the two concave mirrors; the cavity ring-down optoelectronic system 100 is also It includes an output optical fiber 6 connected to the first photodetector 3, the output optical fiber 6 is a single-mode optical fiber whose fundamental mode matches the fundamental transverse mode of the outgoing beam, and the outgoing beam is transmitted to the first light detector 3;
图3中示例性的示出光学谐振腔2为由平面反射镜和凹面反射镜构成的平凹腔,平凹腔的基横模束腰位于平面反射镜;腔衰荡光电系统100还包括与第一光探测器3连接的输出光纤6,输出光纤6为基模与出射光束的基横模相匹配的单模光纤,出射光束经输出光纤滤除高阶横模后传输至第一光探测器3。Fig. 3 exemplarily shows that the optical resonant cavity 2 is a flat concave cavity composed of a plane reflector and a concave reflector, and the fundamental transverse mode beam waist of the flat concave cavity is located at the plane reflector; the cavity ring-down optoelectronic system 100 also includes and The output optical fiber 6 connected to the first photodetector 3 is a single-mode optical fiber whose fundamental mode matches the fundamental transverse mode of the outgoing beam, and the outgoing beam is transmitted to the first optical detector after the high-order transverse mode is filtered by the output optical fiber. Device 3.
在应用中,光学谐振腔可以为由平面反射镜和凹面反射镜构成的平凹腔,或者,腔衰荡光电系统还可以包括与第一光探测器连接的输出光纤,输出光纤为基模与出射光束的基横模相匹配的单模光纤,出射光束经输出光纤滤除高阶横模后传输至第一光探测器。光学谐振腔为平凹腔和腔衰荡光电系统还包括输出光纤这两种情况可以同时存在。In the application, the optical resonant cavity can be a flat-concave cavity composed of a plane reflector and a concave reflector, or the cavity ring-down optoelectronic system can also include an output optical fiber connected to the first photodetector, and the output optical fiber is a fundamental mode and A single-mode optical fiber whose fundamental transverse mode of the outgoing light beam matches, and the outgoing light beam is transmitted to the first photodetector after the high-order transverse mode is filtered by the output optical fiber. The optical resonant cavity is a flat concave cavity and the cavity ring-down optoelectronic system also includes the output optical fiber. These two conditions can exist at the same time.
在应用中,光学谐振腔可以是开放式腔体或密闭腔体。当光学谐振腔是开放式腔体时,可以用于检测其所在的任意空间中的气体(例如,大气)的吸收率;当光学谐振腔是密闭腔体时,可以用于检测充入密闭腔体中的任意气体(例如,痕量气体)的吸收率,需要使光学谐振腔中的气体的吸收峰波长在探测光束的中心波长范围内;不论光学谐振腔是否密闭,都可以用于检测其内侧壁的反射率(也即用于构成光学谐振腔的平面反射镜或凹面反射镜的反射率),需要使光学谐振腔中的气体的吸收峰波长不在探测光束的中心波长范围内;当光学谐振腔密闭且为真空时,由于没有气体干扰,可以用于准确的检测其内侧壁的反射率。In applications, the optical resonator can be an open cavity or a closed cavity. When the optical resonant cavity is an open cavity, it can be used to detect the absorption rate of the gas (for example, the atmosphere) in any space where it is located; when the optical resonant cavity is a closed cavity, it can be used to detect the gas filling the closed cavity The absorption rate of any gas (for example, trace gas) in the body needs to make the absorption peak wavelength of the gas in the optical cavity within the central wavelength range of the probe beam; no matter whether the optical cavity is airtight, it can be used to detect its The reflectivity of the inner wall (that is, the reflectivity of the plane mirror or concave mirror used to form the optical resonant cavity) needs to make the absorption peak wavelength of the gas in the optical resonant cavity not within the central wavelength range of the probe beam; when the optical When the resonant cavity is airtight and vacuum, since there is no gas interference, it can be used to accurately detect the reflectivity of its inner wall.
在一个实施例中,当光学谐振腔为由平面反射镜和凹面反射镜构成的平凹腔时,平面反射镜到凹面反射镜的距离为凹面反射镜曲率半径的1/2,平凹腔的基横模束腰位于平面反射镜。In one embodiment, when the optical resonant cavity is a flat concave cavity composed of a plane reflector and a concave reflector, the distance from the plane reflector to the concave reflector is 1/2 of the radius of curvature of the concave reflector, and the distance of the flat concave cavity The fundamental transverse mode beam waist is located on the flat mirror.
在应用中,根据光学谐振腔的结构的不同,腔衰荡光电系统具有图1至图3所示的三种结构,其效果如下:In application, depending on the structure of the optical resonant cavity, the cavity ring-down optoelectronic system has three structures as shown in Figure 1 to Figure 3, and its effects are as follows:
在图1所示的第一种结构中,光学谐振腔为平凹腔且不包括由单模光纤构成的输出光纤,通过采用基横模束腰位于平面反射镜的平凹腔,利于出射光束与平凹腔的基横模相匹配,减少高阶横模的激发;In the first structure shown in Figure 1, the optical resonant cavity is a flat concave cavity and does not include an output fiber composed of a single-mode fiber. By adopting a flat concave cavity whose fundamental transverse mode beam waist is located in a plane mirror, it is beneficial to the output beam Matches the fundamental transverse mode of the flat concave cavity, reducing the excitation of high-order transverse modes;
在图2所示的第二种结构中,光学谐振腔为双凹腔且包括由单模光纤构成的输出光纤,通过采用基模与出射光束的基横模相匹配的单模光纤,可以有效滤除出射光束中的高阶横模,以使最终被第一光探测器接收的出射光束中的高阶横模趋近于0;In the second structure shown in Figure 2, the optical resonant cavity is a double concave cavity and includes an output fiber composed of a single-mode fiber. By using a single-mode fiber whose fundamental mode matches the fundamental transverse mode of the outgoing beam, it can effectively filtering out the high-order transverse modes in the outgoing light beam, so that the high-order transverse modes in the outgoing light beam finally received by the first photodetector approach to 0;
在图3所示的第三种结构中,光学谐振腔为平凹腔且包括由单模光纤构成的输出光纤,通过同时采用基横模束腰位于平面反射镜的平凹腔以及基模与出射光束的基横模相匹配的单模光纤,可以实现减少高阶横模的激发和滤除出射光束中的高阶横模这两种效果的叠加,以使最终被第一光探测器接收的出射光束中的高阶横模趋近于0。In the third structure shown in Figure 3, the optical resonant cavity is a flat concave cavity and includes an output fiber composed of a single-mode fiber. The single-mode fiber whose fundamental transverse mode of the outgoing beam matches can realize the superposition of the two effects of reducing the excitation of the high-order transverse mode and filtering the high-order transverse mode in the outgoing beam, so that it is finally received by the first photodetector The higher-order transverse modes in the outgoing beam of , tend to zero.
在应用中,激光器的调制类型可以是电流调制型或电压调制型。激光器可以是任意类型的可调谐激光器,例如,法布里-珀罗(Fabry-Perot)激光器、分布反馈式(Distributed Feedback)半导体激光器、分布布喇格反射(Distributed Bragg reflector)激光器、垂直腔表面发射(Vertical-cavity surface-emitting)激光器和外腔调谐半导体激光器等可调谐半导体激光器。激光器的工作参数可以是工作温度、偏置电流或偏置电压。可以通过改变激光器的激光芯片的工作温度、偏置电流或偏置电压,来调节激光器输出的探测光束的波长。In the application, the modulation type of the laser can be current modulation type or voltage modulation type. The laser can be any type of tunable laser, for example, Fabry-Perot laser, Distributed Feedback semiconductor laser, Distributed Bragg reflector laser, vertical cavity surface Tunable semiconductor lasers such as vertical-cavity surface-emitting lasers and external cavity tuned semiconductor lasers. The operating parameters of the laser can be operating temperature, bias current or bias voltage. The wavelength of the probe beam output by the laser can be adjusted by changing the working temperature, bias current or bias voltage of the laser chip of the laser.
在应用中,第一光探测器可以是光电二极管、光电倍增管等光电转换器件。In applications, the first photodetector may be a photoelectric conversion device such as a photodiode or a photomultiplier tube.
在应用中,光电控制模块和数据处理模块可以是中央处理单元(Central Processing Unit,CPU),还可以是其他通用处理器、数字信号处理器(Digital Signal Processor,DSP)、专用集成电路(Application Specific Integrated Circuit,ASIC)、现成可编程门阵列(Field-Programmable Gate Array,FPGA)或者其他可编程逻辑器件、分立门或者晶体管逻辑器件、分立硬件组件等。通用处理器可以是微处理器或者任何常规的处理器等。In the application, the photoelectric control module and the data processing module can be a central processing unit (Central Processing Unit, CPU), or other general-purpose processors, digital signal processors (Digital Signal Processor, DSP), application-specific integrated circuits (Application Specific Integrated Circuit, ASIC), off-the-shelf programmable gate array (Field-Programmable Gate Array, FPGA) or other programmable logic devices, discrete gate or transistor logic devices, discrete hardware components, etc. A general purpose processor may be a microprocessor or any conventional processor or the like.
在应用中,光电控制模块和数据处理模块的工作原理为:In the application, the working principle of the photoelectric control module and the data processing module is:
光电控制模块调节激光器的工作参数,以改变探测光束的波长,使探测光束的波长与光学谐振腔的纵模相匹配,可以被第一光探测器接收;The photoelectric control module adjusts the working parameters of the laser to change the wavelength of the detection beam, so that the wavelength of the detection beam matches the longitudinal mode of the optical resonator and can be received by the first photodetector;
光电控制模块根据第一电信号获取出射光束的光强度,在出射光束的光强度大于预设阈值时,表明出射光束的波长与光学谐振腔的纵模相匹配的程度较高,此时调节激光器的工作参数,以改变探测光束的波长,使探测光束的波长与光学谐振腔的纵模不匹配,无法被第一光探测器接收,从而实现间接关断探测光束,同时触发第一光探测器快速采样;The photoelectric control module acquires the light intensity of the outgoing beam according to the first electrical signal. When the light intensity of the outgoing light beam is greater than the preset threshold, it indicates that the wavelength of the outgoing light beam matches the longitudinal mode of the optical resonator to a high degree. At this time, the laser is adjusted working parameters to change the wavelength of the detection beam, so that the wavelength of the detection beam does not match the longitudinal mode of the optical resonator and cannot be received by the first photodetector, so as to realize the indirect shutdown of the detection beam and trigger the first photodetector at the same time fast sampling;
数据处理模块可以根据第一光探测器快速采样得到的第一电信号,获取探测光束在光学谐振腔内的衰荡时间。The data processing module can obtain the ring-down time of the detection beam in the optical resonant cavity according to the first electrical signal obtained by fast sampling by the first photodetector.
如图4所示,本申请的一个实施例还提供一种当光学谐振腔2为由平面反射镜和凹面反射镜构成的平凹腔时,在腔衰荡光电系统100的基础上实现的用于执行入射光路调节方法的结构,该结构在腔衰荡光电系统100的基础上还包括与激光器1连接的环形器7以及与环形器7和光电控制模块4连接的第二光探测器8,入射光路调节方法包括:As shown in Fig. 4, an embodiment of the present application also provides a kind of optical cavity ring-down optoelectronic system 100 when the optical resonant cavity 2 is a flat-concave cavity composed of a plane reflector and a concave reflector. The structure for implementing the incident light path adjustment method, the structure also includes a circulator 7 connected to the laser 1 and a second photodetector 8 connected to the circulator 7 and the photoelectric control module 4 on the basis of the cavity ring-down optoelectronic system 100, Incident light path adjustment methods include:
在调节探测光束的束腰位置和入射角度的过程中,通过环形器7将探测光束传输至光学谐振腔2;During the process of adjusting the beam waist position and incident angle of the probe beam, the probe beam is transmitted to the optical resonant cavity 2 through the circulator 7;
通过第二光探测器8将平面反射镜反射的反射光束转换为第二电信号;Convert the reflected light beam reflected by the plane reflector into a second electrical signal through the second photodetector 8;
通过光电控制模块4根据第二电信号获取反射光束的光强度,以监控探测光束与光学谐振腔2的基横模的耦合程度,直到耦合程度大于耦合程度阈值时为止,反射光束的光强度与耦合程度正相关。Obtain the light intensity of the reflected light beam through the photoelectric control module 4 according to the second electrical signal, to monitor the coupling degree of the probe light beam and the fundamental transverse mode of the optical resonant cavity 2, until the coupling degree is greater than the coupling degree threshold value, the light intensity of the reflected light beam and The degree of coupling is positively correlated.
图4示例性的示出在图3所示的腔衰荡光电系统100的基础上实现的用于执行入射光路调节方法的结构。FIG. 4 exemplarily shows a structure implemented on the basis of the cavity ring-down optoelectronic system 100 shown in FIG. 3 for implementing a method for adjusting an incident light path.
在应用中,在调节探测光束的束腰位置和入射角度的过程中,通过设置一个环形器可以将平面反射镜所反射的探测光束(也即反射光束)反向传输至第二光探测器,通过第二光探测器接收反射光束并转换为第二电信号,从而使得光电控制模块可以根据第二电信号获取反射光束的光强度,进而根据反射光束的光强度监控探测光束与光学谐振腔的基横模的耦合程度,在耦合程度未达到耦合程度阈值的情况下反复调节探测光束的束腰位置和入射角度,直到耦合程度大于耦合程度阈值时为止,最终实现探测光束与光学谐振腔的基横模的高效耦合。理论上,耦合程度越高,反射光束就越多、光强度越高,探测光束的基横模束腰位于平面反射镜上并与平面反射镜法线平行时,通过光环形器反射回第二光探测器的光束的光强度最强。耦合程度阈值应当根据实际情况设置为与光电控制模块获取的反射光束的最强光强度对应的值。In the application, in the process of adjusting the beam waist position and incident angle of the detection beam, the detection beam reflected by the plane mirror (that is, the reflected beam) can be reversely transmitted to the second photodetector by setting a circulator, The reflected light beam is received by the second photodetector and converted into a second electrical signal, so that the photoelectric control module can obtain the light intensity of the reflected light beam according to the second electric signal, and then monitor the relationship between the detection light beam and the optical resonant cavity according to the light intensity of the reflected light beam The coupling degree of the fundamental transverse mode, when the coupling degree does not reach the coupling degree threshold, repeatedly adjust the beam waist position and incident angle of the probe beam until the coupling degree is greater than the coupling degree threshold, and finally realize the fundamental of the probe beam and the optical resonator. Efficient coupling of transverse modes. Theoretically, the higher the coupling degree, the more reflected beams and the higher the light intensity. When the beam waist of the fundamental transverse mode of the probe beam is located on the plane mirror and parallel to the normal of the plane mirror, it is reflected back to the second beam through the optical circulator. The light beam of the photodetector has the strongest light intensity. The coupling degree threshold should be set to a value corresponding to the strongest light intensity of the reflected light beam obtained by the photoelectric control module according to the actual situation.
在应用中,第二光探测器可以是光电二极管、光电倍增管等光电转换器件,也即可以与第一光探测器的实现方式相同。In an application, the second photodetector may be a photoelectric conversion device such as a photodiode or a photomultiplier tube, that is, the implementation manner of the first photodetector may be the same.
在一个实施例中,基于图1至图3任一附图所对应的实施例,腔衰荡光电系统还包括:In one embodiment, based on the embodiment corresponding to any one of Figures 1 to 3, the cavity ring-down optoelectronic system further includes:
入射光整形单元,设置于激光器和光学谐振腔之间的光路,探测光束经入射光整形单元进行空间光调制后传输至光学谐振腔;The incident light shaping unit is arranged on the optical path between the laser and the optical resonant cavity, and the detection beam is spatially modulated by the incident light shaping unit and then transmitted to the optical resonant cavity;
或者,出射光整形单元,设置于光学谐振腔与第一光探测器之间的光路,出射光束经出射光整形单元进行空间光调制后传输至第一光探测器或输出光纤。Alternatively, the outgoing light shaping unit is arranged on the optical path between the optical resonant cavity and the first photodetector, and the outgoing light beam is spatially modulated by the outgoing light shaping unit and then transmitted to the first photodetector or the output optical fiber.
在应用中,腔衰荡光电系统可以包括入射光整形单元,以使得探测光束可以更好的耦合至光学谐振腔;也可以包括出射光整形单元,以使得出射光束可以更好的耦合至第一光探测器或输出光纤。In the application, the cavity ring down optoelectronic system can include an incident light shaping unit, so that the detection beam can be better coupled to the optical resonant cavity; it can also include an outgoing light shaping unit, so that the outgoing light beam can be better coupled to the first photodetector or output fiber.
如图5所示,在一个实施例中,入射光整形单元包括:As shown in Figure 5, in one embodiment, the incident light shaping unit includes:
与激光器1连接的光隔离器9,用于隔离传播方向与探测光束相反的反向光束;An optical isolator 9 connected to the laser 1 is used to isolate the reverse beam whose propagation direction is opposite to that of the detection beam;
与光隔离器9连接的输入光纤10;Input optical fiber 10 connected with optical isolator 9;
准直透镜11,探测光束依次经光隔离器9、输入光纤10和准直透镜11传输至光学谐振腔2;A collimating lens 11, the detection beam is transmitted to the optical resonant cavity 2 through the optical isolator 9, the input optical fiber 10 and the collimating lens 11 in sequence;
出射光整形单元包括第一聚焦透镜12,出射光束经第一聚焦透镜12聚焦后传输至第一光探测器3。The outgoing light shaping unit includes a first focusing lens 12 , and the outgoing light beam is focused by the first focusing lens 12 and transmitted to the first light detector 3 .
图5在图3的基础上示例性的示出光隔离器9、输入光纤10和准直透镜11设置于激光器1和光学谐振腔2之间,第一聚焦透镜12设置于光学谐振腔2和输出光纤6之间。Figure 5 exemplarily shows on the basis of Figure 3 that an optical isolator 9, an input fiber 10 and a collimating lens 11 are arranged between the laser 1 and the optical resonator 2, and the first focusing lens 12 is arranged between the optical resonator 2 and the output between 6 fibers.
如图6、图7或图8所示,本申请实施例提供的第二种腔衰荡光电系统200,包括:As shown in FIG. 6, FIG. 7 or FIG. 8, the second cavity ring-down optoelectronic system 200 provided by the embodiment of the present application includes:
激光器1,用于输出探测光束;Laser 1, for outputting a detection beam;
光开关13;Optical switch 13;
光学谐振腔2,探测光束经光学谐振腔2来回反射后衰减为出射光束;An optical resonant cavity 2, the detection beam is reflected back and forth by the optical resonant cavity 2 and attenuated into an outgoing beam;
第一光探测器3,用于接收出射光束并转换为第一电信号;The first light detector 3 is used to receive the outgoing light beam and convert it into a first electrical signal;
压电陶瓷致动器14,设置于光学谐振腔的外腔壁;The piezoelectric ceramic actuator 14 is arranged on the outer cavity wall of the optical resonant cavity;
与光开关13、压电陶瓷致动器14和第一光探测器3连接的光电控制模块4,用于控制压电陶瓷致动器14调节光学谐振腔的腔长,使探测光束的波长与光学谐振腔的纵模相匹配,根据第一电信号获取出射光束的光强度,在出射光束的光强度大于预设阈值时,控制光开关13改变探测光束的传输方向或降低探测光束的光强度,以关断探测光束;The photoelectric control module 4 connected with the optical switch 13, the piezoelectric ceramic actuator 14 and the first photodetector 3 is used to control the piezoelectric ceramic actuator 14 to adjust the cavity length of the optical resonant cavity, so that the wavelength of the detection beam and The longitudinal modes of the optical resonant cavity are matched, and the light intensity of the outgoing beam is obtained according to the first electrical signal. When the light intensity of the outgoing light beam is greater than a preset threshold, the optical switch 13 is controlled to change the transmission direction of the detection beam or reduce the light intensity of the detection light beam. , to turn off the detection beam;
与第一光探测器3连接的数据处理模块5,用于根据第一电信号获取探测光束在光学谐振腔2内的衰荡时间。The data processing module 5 connected to the first photodetector 3 is used to obtain the ring down time of the probe beam in the optical resonant cavity 2 according to the first electrical signal.
图6中示例性的示出光学谐振腔2为由平面反射镜和凹面反射镜构成的平凹腔;Figure 6 exemplarily shows that the optical resonant cavity 2 is a flat concave cavity composed of a plane reflector and a concave reflector;
图7中示例性的示出光学谐振腔2为由两个凹面反射镜构成的共焦腔,共焦腔的基横模束腰位于两个凹面反射镜之间;腔衰荡光电系统100还包括与第一光探测器3连接的输出光纤6,输出光纤6为基模与出射光束的基横模相匹配的单模光纤,出射光束经输出光纤滤除高阶横模后传输至第一光探测器3;Fig. 7 exemplarily shows that the optical resonant cavity 2 is a confocal cavity composed of two concave mirrors, and the fundamental transverse mode beam waist of the confocal cavity is located between the two concave mirrors; the cavity ring-down optoelectronic system 100 is also It includes an output optical fiber 6 connected to the first photodetector 3, the output optical fiber 6 is a single-mode optical fiber whose fundamental mode matches the fundamental transverse mode of the outgoing beam, and the outgoing beam is transmitted to the first light detector 3;
图8中示例性的示出光学谐振腔2为由平面反射镜和凹面反射镜构成的平凹腔,平凹腔的基横模束腰位于平面反射镜;腔衰荡光电系统100还包括与第一光探测器3连接的输出光纤6,输出光纤6为基模与出射光束的基横模相匹配的单模光纤,出射光束经输出光纤滤除高阶横模后传输至第一光探测器3。Figure 8 exemplarily shows that the optical resonant cavity 2 is a flat concave cavity composed of a plane reflector and a concave reflector, and the fundamental transverse mode beam waist of the flat concave cavity is located at the plane reflector; the cavity ring-down optoelectronic system 100 also includes a The output optical fiber 6 connected to the first photodetector 3 is a single-mode optical fiber whose fundamental mode matches the fundamental transverse mode of the outgoing beam, and the outgoing beam is transmitted to the first optical detector after the high-order transverse mode is filtered by the output optical fiber. Device 3.
在应用中,光开关可以是声光开关(AOM)或电光开关(EOM)。In application, the optical switch can be an acousto-optic switch (AOM) or an electro-optic switch (EOM).
在应用中,压电陶瓷致动器可以设置于光学谐振腔在光路方向上的任一外腔壁,也即反射镜或凹面反射镜的外壁。压电陶瓷致动器可以在光电控制模块的控制下运动,从而带动光学谐振腔在光路方向上的任一腔壁运动,以实现对光学谐振腔的腔长的调节,进而通过调节腔长,来改变探测光束的波长与光学谐振腔的纵模之间的匹配程度。In application, the piezoelectric ceramic actuator can be arranged on any outer cavity wall of the optical resonant cavity in the direction of the optical path, that is, the outer wall of the reflector or the concave reflector. The piezoelectric ceramic actuator can move under the control of the photoelectric control module, thereby driving any cavity wall of the optical resonant cavity to move in the direction of the optical path, so as to realize the adjustment of the cavity length of the optical resonant cavity, and then by adjusting the cavity length, To change the matching degree between the wavelength of the probe beam and the longitudinal mode of the optical cavity.
在一个实施例中,当光学谐振腔为由平面反射镜和凹面反射镜构成的平凹腔时,平面反射镜到凹面反射镜的距离为凹面反射镜曲率半径的1/2,平凹腔的基横模束腰位于平面反射镜。In one embodiment, when the optical resonant cavity is a flat concave cavity composed of a plane reflector and a concave reflector, the distance from the plane reflector to the concave reflector is 1/2 of the radius of curvature of the concave reflector, and the distance of the flat concave cavity The fundamental transverse mode beam waist is located on the flat mirror.
在应用中,光电控制模块和数据处理模块的工作原理为:In the application, the working principle of the photoelectric control module and the data processing module is:
光电控制模块根据第一电信号分析出射光束的波长和光强度,根据出射光束的波长控制压电陶瓷致动器调节光学谐振腔的腔长,以改变探测光束的波长,使探测光束的波长与光学谐振腔的纵模相匹配,可以被第一光探测器接收;The photoelectric control module analyzes the wavelength and light intensity of the outgoing beam according to the first electrical signal, and controls the piezoelectric ceramic actuator to adjust the cavity length of the optical resonant cavity according to the wavelength of the outgoing beam, so as to change the wavelength of the detection beam, so that the wavelength of the detection beam is consistent with the optical The longitudinal modes of the resonant cavity are matched and can be received by the first photodetector;
在出射光束的光强度大于预设阈值时,表明出射光束的波长与光学谐振腔的纵模相匹配的程度较高,此时控制声光调制器改变探测光束的传输方向,使探测光束无法传输至光学谐振腔,或者,控制电光调制器改变探测光束的光强度,使其光强度降低,无法被第一光探测器接收,从而实现直接关断探测光束,同时触发第一光探测器快速采样;When the light intensity of the outgoing beam is greater than the preset threshold, it indicates that the wavelength of the outgoing beam matches the longitudinal mode of the optical resonator to a high degree. At this time, the acousto-optic modulator is controlled to change the transmission direction of the detection beam so that the detection beam cannot be transmitted. to the optical resonant cavity, or control the electro-optic modulator to change the light intensity of the detection beam, so that the light intensity is reduced and cannot be received by the first photodetector, so as to directly turn off the detection beam and trigger the first photodetector to quickly sample ;
数据处理模块可以根据第一光探测器快速采样得到的第一电信号,获取探测光束在光学谐振腔内的衰荡时间。The data processing module can obtain the ring-down time of the detection beam in the optical resonant cavity according to the first electrical signal obtained by fast sampling by the first photodetector.
如图9所示,本申请的一个实施例还提供一种当光学谐振腔2为由平面反射镜和凹面反射镜构成的平凹腔时,在腔衰荡光电系统200的基础上实现的用于执行入射光路调节方法的结构,该结构在腔衰荡光电系统100的基础上还包括与激光器1连接的环形器7以及与环形器7和光电控制模块4连接的第二光探测器8,入射光路调节方法参见与图4对应的实施例,此处不再赘述。As shown in Fig. 9, an embodiment of the present application also provides an optical resonant cavity 2 which is a flat-concave cavity composed of a plane reflector and a concave reflector, on the basis of the cavity ring-down optoelectronic system 200 The structure for implementing the incident light path adjustment method, the structure also includes a circulator 7 connected to the laser 1 and a second photodetector 8 connected to the circulator 7 and the photoelectric control module 4 on the basis of the cavity ring-down optoelectronic system 100, For the method of adjusting the incident light path, refer to the embodiment corresponding to FIG. 4 , which will not be repeated here.
图9示例性的示出在图8所示的腔衰荡光电系统200的基础上实现的用于执行入射光路调节方法的结构。FIG. 9 exemplarily shows a structure implemented on the basis of the cavity ring-down optoelectronic system 200 shown in FIG. 8 for implementing a method for adjusting an incident light path.
在一个实施例中,基于图6至图9任一附图所对应的实施例,腔衰荡光电系统还包括:In one embodiment, based on the embodiment corresponding to any one of Fig. 6 to Fig. 9, the cavity ring-down optoelectronic system further includes:
入射光整形单元,设置于光开关和光学谐振腔之间的光路,探测光束经光开关到入射光整形单元进行空间光调制后传输至光学谐振腔;The incident light shaping unit is arranged on the optical path between the optical switch and the optical resonant cavity, and the detection beam passes through the optical switch to the incident light shaping unit for spatial light modulation and then is transmitted to the optical resonant cavity;
或者,出射光整形单元,设置于光学谐振腔与第一光探测器之间的光路,出射光束经出射光整形单元进行空间光调制后传输至第一光探测器。Alternatively, the outgoing light shaping unit is arranged on the optical path between the optical resonant cavity and the first photodetector, and the outgoing light beam is spatially modulated by the outgoing light shaping unit and then transmitted to the first photodetector.
如图10所示,在一个实施例中,入射光整形单元包括:As shown in Figure 10, in one embodiment, the incident light shaping unit includes:
与激光器1连接的光隔离器9,用于隔离传播方向与探测光束相反的反向光束;An optical isolator 9 connected to the laser 1 is used to isolate the reverse beam whose propagation direction is opposite to that of the detection beam;
与光开关13连接的输入光纤10;An input optical fiber 10 connected to an optical switch 13;
准直透镜11,探测光束依次经光隔离器9、光开关13、输入光纤10和准直透镜11传输至光学谐振腔2;A collimating lens 11, the detection beam is transmitted to the optical resonant cavity 2 through the optical isolator 9, the optical switch 13, the input optical fiber 10 and the collimating lens 11 in sequence;
出射光整形单元包括第一聚焦透镜12,出射光束经第一聚焦透镜12聚焦后传输至第一光探测器3。The outgoing light shaping unit includes a first focusing lens 12 , and the outgoing light beam is focused by the first focusing lens 12 and transmitted to the first light detector 3 .
图10在图8的基础上示例性的示出光隔离器9、输入光纤10和准直透镜11设置于激光器1和光学谐振腔2之间,第一聚焦透镜12设置于光学谐振腔2和输出光纤6之间。Figure 10 schematically shows that the optical isolator 9, the input fiber 10 and the collimating lens 11 are arranged between the laser 1 and the optical resonant cavity 2 on the basis of Figure 8, and the first focusing lens 12 is arranged between the optical resonant cavity 2 and the output between 6 fibers.
在应用中,图6至图10中未详述的部件的实现方式、工作原理及效果参见图1至图5所对应的实施例,此处不再赘述。In application, for the implementation, working principles and effects of components not described in detail in FIGS. 6 to 10 , refer to the corresponding embodiments in FIGS. 1 to 5 , and details will not be repeated here.
在应用中,腔衰荡光电系统可包括但不仅限于上述部件。本领域技术人员可以理解,图示仅仅是腔衰荡光电系统的举例,并不构成对腔衰荡光电系统的限定,可以包括比图示更多或更少的部件,或者组合某些部件,或者不同的部件,例如还可以包括储存器、输入输出设备、网络接入设备等。In application, the cavity ring down optoelectronic system may include but not limited to the above components. Those skilled in the art can understand that the illustration is only an example of the cavity ring-down optoelectronic system, and does not constitute a limitation to the cavity ring-down optoelectronic system, and may include more or less components than those shown in the figure, or combine certain components, Or different components, for example, may also include storage, input and output devices, network access devices, and the like.
在应用中,存储器在一些实施例中可以是腔衰荡光电系统的内部存储单元,例如,腔衰荡光电系统的硬盘或内存,具体可是光电控制模块或数据处理模块的内存。存储器在另一些实施例中也可以是腔衰荡光电系统的外部存储设备,例如,腔衰荡光电系统上配备的插接式硬盘,智能存储卡(Smart Media Card,SMC),安全数字(Secure Digital,SD)卡,闪存卡(Flash Card)等。进一步地,存储器还可以既包括腔衰荡光电系统的内部存储单元也包括外部存储设备。存储器用于存储操作系统、应用程序、引导装载程序(BootLoader)、数据以及其他程序等,例如计算机程序的程序代码等。存储器还可以用于暂时地存储已经输出或者将要输出的数据。光电控制模块和数据处理模块可以集成在一个处理单元中,也可以是各个单元单独物理存在。另外,光电控制模块和数据处理模块的具体名称也只是为了便于相互区分,并不用于限制本申请的保护范围。In application, the memory may be an internal storage unit of the cavity ring-down optoelectronic system in some embodiments, for example, a hard disk or memory of the cavity ring-down optoelectronic system, specifically, the memory of the optoelectronic control module or the data processing module. In other embodiments, the memory may also be an external storage device of the cavity ring-down optoelectronic system, for example, a plug-in hard disk equipped on the cavity ring-down optoelectronic system, a smart memory card (Smart Media Card, SMC), a secure digital (Secure Digital, SD) card, flash memory card (Flash Card), etc. Further, the memory may also include both an internal storage unit of the cavity ring-down optoelectronic system and an external storage device. The memory is used to store operating systems, application programs, boot loaders (BootLoader), data, and other programs, such as program codes of computer programs. The memory can also be used to temporarily store data that has been output or will be output. The photoelectric control module and the data processing module can be integrated into one processing unit, or each unit can exist separately physically. In addition, the specific names of the photoelectric control module and the data processing module are only for the convenience of distinguishing each other, and are not used to limit the scope of protection of this application.
本申请实施例还提供一种上述腔衰荡光电系统的应用方法,包括如下步骤:The embodiment of the present application also provides an application method of the above-mentioned cavity ring-down optoelectronic system, including the following steps:
根据在光学谐振腔中无气体时获取的衰荡时间,获取光学谐振腔的内侧壁的反射率;Obtaining the reflectivity of the inner sidewall of the optical resonant cavity according to the ring-down time obtained when there is no gas in the optical resonant cavity;
或者,根据在光学谐振腔中无气体时获取的衰荡时间和在光学谐振腔中有气体时获取的衰荡时间,获取气体的吸收率。Alternatively, the absorptivity of the gas is obtained based on the ring-down time obtained when there is no gas in the optical resonant cavity and the ring-down time obtained when there is gas in the optical resonant cavity.
在一个实施例中,出射光束的光强度与衰荡时间之间的关系式如下:In one embodiment, the relationship between the light intensity of the outgoing light beam and the ring-down time is as follows:
I=I 0exp(-t/τ)(关系式一) I=I 0 exp(-t/τ) (Relationship 1)
其中,I为停止将出射光束转换为第一电信号的时刻获取的出射光束的光强度,I 0为出射光束的初始光强度,t为从关断探测光束的时刻开始至停止将出射光束转换为第一电信号时刻之间的测量时间,τ为衰荡时间。 Among them, I is the light intensity of the outgoing beam acquired at the moment when the outgoing light beam is stopped to be converted into the first electrical signal, I 0 is the initial light intensity of the outgoing light beam, and t is from the moment when the detection beam is turned off to the time when the outgoing light beam is stopped. is the measurement time between the moments of the first electric signal, and τ is the ring-down time.
在应用中,出射光束的初始光强度即为出射光束的光强度大于预设阈值时,根据第一电信号获取的出射光束的光强度。In application, the initial light intensity of the outgoing light beam is the light intensity of the outgoing light beam acquired according to the first electrical signal when the light intensity of the outgoing light beam is greater than a preset threshold.
在一个实施例中,衰荡时间与光学谐振腔的参数之间的关系式如下:In one embodiment, the relationship between the ring-down time and the parameters of the optical resonant cavity is as follows:
τ=2L/C[-ln(R 1 R 2)+2δ+2β] (关系式二) τ=2L/C[-ln(R 1 R 2 )+2δ+2β] (Relationship 2)
其中,L为光学谐振腔的腔长,C为光速,R 1和R 2为光学谐振腔的两个内侧壁的反射率,δ为探测光束在光学谐振腔内的光程等于单倍腔长时、光学谐振腔对探测光束造成的光学损耗(例如,衍射损耗),β为探测光束在光学谐振腔内的光程等于单倍腔长时、光学谐振腔内的气体对探测光束的吸收率。 Among them, L is the cavity length of the optical resonant cavity, C is the speed of light, R 1 and R 2 are the reflectivity of the two inner walls of the optical resonant cavity, δ is the optical path of the probe beam in the optical resonant cavity equal to the single cavity length , the optical loss (for example, diffraction loss) caused by the optical resonator to the probe beam, β is the absorption rate of the gas in the optical resonator to the probe beam when the optical path of the probe beam in the optical resonator is equal to the single cavity length .
在应用中,光学谐振腔的两个内侧壁的反射率可以看作是相等,也即R 1=R 2=R,因此,关系式二可以简化为如下关系式: In the application, the reflectivity of the two inner walls of the optical resonator can be regarded as equal, that is, R 1 =R 2 =R, therefore, the second relation can be simplified as the following relation:
τ=L/C(1- R+δ+β] (关系式三)。τ=L/C(1- R+δ+β] (Relationship 3).
基于关系式三,在光学谐振腔中无气体时,关系式三可以简化为如下关系式:Based on the third relation, when there is no gas in the optical cavity, the third relation can be simplified to the following relation:
τ 1=L/C(1- R+δ] (关系式四) τ 1 =L/C(1- R+δ] (Relationship 4)
其中,τ 1为光学谐振腔中无气体时,根据关系式一获取的衰荡时间。 Among them, τ1 is the ring-down time obtained according to relational formula 1 when there is no gas in the optical resonant cavity.
基于关系式四,在光学谐振腔中无气体且忽略光学谐振腔对探测光束造成的光学损耗的情况下,光学谐振腔的内侧壁的反射率与衰荡时间之间的关系式如下:Based on relation four, when there is no gas in the optical resonant cavity and the optical loss caused by the optical resonant cavity to the detection beam is ignored, the relationship between the reflectivity of the inner wall of the optical resonant cavity and the ring-down time is as follows:
R=L/(Cτ 1) (关系式五)。 R=L/(Cτ 1 ) (relational formula 5).
基于关系式四,在忽略光学谐振腔对探测光束造成的光学损耗的情况下,探测光束在光学谐振腔内的光程等于单倍腔长时,光学谐振腔内的气体对探测光束的吸收率与衰荡时间之间的关系式如下:Based on relation 4, in the case of ignoring the optical loss caused by the optical resonator to the probe beam, when the optical path of the probe beam in the optical resonator is equal to the single cavity length, the absorption rate of the gas in the optical resonator to the probe beam The relationship between and the ring down time is as follows:
β=L/[C(1/τ 2-1/τ 1)] (关系式六) β=L/[C(1/τ 2 -1/τ 1 )] (relationship six)
其中,τ 2为光学谐振腔中有气体时,根据关系式一获取的衰荡时间。 Among them, τ2 is the ring-down time obtained according to the relational formula 1 when there is gas in the optical resonant cavity.
本申请实施例提供的基于上述腔衰荡光电系统的应用方法,能够根据在光学谐振腔中无气体时获取的衰荡时间,实现对光学谐振腔的内侧壁的反射率的快速和精确测量;还能够根据在光学谐振腔中无气体时获取的衰荡时间和在光学谐振腔中有气体时获取的衰荡时间,实现对气体的吸收率的快速和精确测量。The application method based on the cavity ring-down optoelectronic system provided in the embodiment of the present application can realize fast and accurate measurement of the reflectivity of the inner wall of the optical cavity according to the ring-down time obtained when there is no gas in the optical cavity; It is also possible to realize fast and accurate measurement of the absorption rate of the gas based on the ring-down time obtained when there is no gas in the optical resonant cavity and the ring-down time obtained when there is gas in the optical resonant cavity.
需要说明的是,上述步骤的执行过程,由于与本申请的腔衰荡光电系统实施例基于同一构思,其具体功能及带来的技术效果,具体可参见腔衰荡光电系统实施例部分,此处不再赘述。It should be noted that, since the execution process of the above steps is based on the same concept as the embodiment of the cavity ring-down optoelectronic system of the present application, its specific functions and technical effects can be referred to in the part of the embodiment of the cavity ring-down optoelectronic system. I won't repeat them here.
本申请实施例还提供了一种计算机可读存储介质,计算机可读存储介质存储有计算机程序,计算机程序被数据处理模块执行时可实现上述应用方法实施例中的步骤。The embodiment of the present application also provides a computer-readable storage medium. The computer-readable storage medium stores a computer program. When the computer program is executed by the data processing module, the steps in the above application method embodiments can be realized.
本申请实施例提供了一种计算机程序产品,当计算机程序产品在腔衰荡光电系统上运行时,使得腔衰荡光电系统可实现上述应用方法实施例中的步骤。An embodiment of the present application provides a computer program product. When the computer program product runs on the cavity ring-down optoelectronic system, the cavity ring-down optoelectronic system can implement the steps in the above application method embodiments.
在应用中,计算机可读介质至少可以包括:能够将计算机程序代码携带到数据处理模块的任何实体或系统、记录介质、计算机存储器、只读存储器(ROM,Read-Only Memory)、随机存取存储器(RAM,Random Access Memory)、电载波信号、电信信号以及软件分发介质。例如U盘、移动硬盘、磁碟或者光盘等。In application, a computer readable medium may at least include: any entity or system capable of carrying computer program codes to a data processing module, a recording medium, a computer memory, a read-only memory (ROM, Read-Only Memory), Random Access Memory (RAM, Random Access Memory), electrical carrier signal, telecommunication signal, and software distribution medium. Such as U disk, mobile hard disk, magnetic disk or optical disk, etc.
在上述实施例中,对各个实施例的描述都各有侧重,某个实施例中没有详述或记载的部分,可以参见其它实施例的相关描述。In the above-mentioned embodiments, the descriptions of each embodiment have their own emphases, and for parts that are not detailed or recorded in a certain embodiment, refer to the relevant descriptions of other embodiments.
本领域普通技术人员可以意识到,结合本文中所公开的实施例描述的各示例的器件、单元及算法步骤,能够以电子硬件、或者计算机软件和电子硬件的结合来实现。这些功能究竟以硬件还是软件方式来执行,取决于技术方案的特定应用和设计约束条件。专业技术人员可以对每个特定的应用来使用不同方法来实现所描述的功能,但是这种实现不应认为超出本申请的范围。Those skilled in the art can appreciate that the devices, units and algorithm steps of the examples described in conjunction with the embodiments disclosed herein can be implemented by electronic hardware, or a combination of computer software and electronic hardware. Whether these functions are executed by hardware or software depends on the specific application and design constraints of the technical solution. Skilled artisans may use different methods to implement the described functions for each specific application, but such implementation should not be regarded as exceeding the scope of the present application.
在本申请所提供的实施例中,应该理解到,所揭露的系统和方法,可以通过其它的方式实现。例如,以上所描述的装实施例仅仅是示意性的,例如,单元的划分,仅仅为一种逻辑功能划分,实际实现时可以有另外的划分方式,例如多个单元或组件可以结合或者可以集成,或一些特征可以忽略,或不执行。In the embodiments provided in this application, it should be understood that the disclosed system and method can be implemented in other ways. For example, the device embodiments described above are only illustrative. For example, the division of units is only a logical function division. In actual implementation, there may be other division methods. For example, multiple units or components can be combined or integrated. , or some features can be ignored, or not implemented.
以上实施例仅用以说明本申请的技术方案,而非对其限制;尽管参照前述实施例对本申请进行了详细的说明,本领域的普通技术人员应当理解:其依然可以对前述各实施例所记载的技术方案进行修改,或者对其中部分技术特征进行等同替换;而这些修改或者替换,并不使相应技术方案的本质脱离本申请各实施例技术方案的精神和范围,均应包含在本申请的保护范围之内。The above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit them; although the present application has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that: it can still apply to the foregoing embodiments Modifications to the technical solutions recorded, or equivalent replacements for some of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of each embodiment of the application, and should be included in this application. within the scope of protection.

Claims (17)

  1. 一种腔衰荡光电系统,其特征在于,包括: A cavity ring-down optoelectronic system is characterized in that it comprises:
    激光器,用于输出探测光束;a laser for outputting a detection beam;
    光学谐振腔,所述探测光束经所述光学谐振腔来回反射后衰减为出射光束;An optical resonant cavity, the detection beam is attenuated into an outgoing beam after being reflected back and forth by the optical resonant cavity;
    第一光探测器,用于接收所述出射光束并转换为第一电信号;a first light detector, configured to receive the outgoing light beam and convert it into a first electrical signal;
    与所述激光器和所述第一光探测器连接的光电控制模块,用于调节所述激光器的工作参数,使所述探测光束的波长与所述光学谐振腔的纵模相匹配,根据所述第一电信号获取所述出射光束的光强度,在所述出射光束的光强度大于预设阈值时,调节所述激光器的工作参数,使所述探测光束的波长与所述光学谐振腔的纵模不匹配,以关断所述探测光束;a photoelectric control module connected to the laser and the first photodetector, configured to adjust the working parameters of the laser so that the wavelength of the probe beam matches the longitudinal mode of the optical resonant cavity, according to the The first electrical signal obtains the light intensity of the outgoing light beam, and when the light intensity of the outgoing light beam is greater than a preset threshold, adjust the working parameters of the laser so that the wavelength of the detection light beam is the same as the longitudinal direction of the optical resonant cavity. mode mismatch to turn off the probe beam;
    与所述第一光探测器连接的数据处理模块,用于根据所述第一电信号获取所述探测光束在所述光学谐振腔内的衰荡时间;A data processing module connected to the first photodetector, configured to obtain the ring-down time of the probe beam in the optical resonant cavity according to the first electrical signal;
    其中,所述光学谐振腔为由平面反射镜和凹面反射镜构成的平凹腔;Wherein, the optical resonant cavity is a flat concave cavity composed of a plane reflector and a concave reflector;
    或者,所述腔衰荡光电系统还包括与所述第一光探测器连接的输出光纤,所述输出光纤为基模与所述出射光束的基横模相匹配的单模光纤,所述出射光束经所述输出光纤滤除高阶横模后传输至所述第一光探测器。Alternatively, the cavity ring-down optoelectronic system further includes an output optical fiber connected to the first photodetector, the output optical fiber is a single-mode optical fiber whose fundamental mode matches the fundamental transverse mode of the outgoing light beam, and the outgoing optical fiber The light beam is transmitted to the first photodetector after being filtered by the output optical fiber to filter high-order transverse modes.
  2. 如权利要求1所述的腔衰荡光电系统,其特征在于,当所述光学谐振腔为由平面反射镜和凹面反射镜构成的平凹腔时,所述平面反射镜到凹面反射镜的距离为凹面反射镜曲率半径的1/2,所述平凹腔的基横模束腰位于所述平面反射镜。 The cavity ring-down optoelectronic system according to claim 1, wherein when the optical resonant cavity is a flat concave cavity composed of a plane reflector and a concave reflector, the distance from the plane reflector to the concave reflector is 1/2 of the radius of curvature of the concave reflector, and the beam waist of the fundamental transverse mode of the flat concave cavity is located in the plane reflector.
  3. 如权利要求1所述的腔衰荡光电系统,其特征在于,当所述输出光纤为基模与所述出射光束的基横模相匹配的单模光纤时,所述光学谐振腔为由两个凹面反射镜构成的共焦腔,所述共焦腔的基横模束腰位于所述两个凹面反射镜之间。 The cavity ring-down optoelectronic system according to claim 1, wherein when the output optical fiber is a single-mode optical fiber whose fundamental mode matches the fundamental transverse mode of the outgoing light beam, the optical resonant cavity is composed of two A confocal cavity composed of two concave mirrors, the beam waist of the fundamental transverse mode of the confocal cavity is located between the two concave mirrors.
  4. 如权利要求1至3任一项所述的腔衰荡光电系统,其特征在于,还包括: The cavity ring-down optoelectronic system according to any one of claims 1 to 3, further comprising:
    入射光整形单元,设置于所述激光器和所述光学谐振腔之间的光路,所述探测光束经所述入射光整形单元进行空间光调制后传输至所述光学谐振腔;The incident light shaping unit is arranged on the optical path between the laser and the optical resonant cavity, and the probe beam is spatially modulated by the incident light shaping unit and then transmitted to the optical resonant cavity;
    或者,出射光整形单元,设置于所述光学谐振腔与所述第一光探测器之间的光路,所述出射光束经所述出射光整形单元进行空间光调制后传输至所述第一光探测器。Alternatively, the outgoing light shaping unit is arranged on the optical path between the optical resonant cavity and the first photodetector, and the outgoing light beam is spatially light modulated by the outgoing light shaping unit and then transmitted to the first light beam detector.
  5. 如权利要求4所述的腔衰荡光电系统,其特征在于,所述入射光整形单元包括: The cavity ring-down optoelectronic system according to claim 4, wherein the incident light shaping unit comprises:
    与所述激光器连接的光隔离器,用于隔离传播方向与所述探测光束相反的反向光束;an optical isolator connected to the laser, for isolating a reverse beam whose propagation direction is opposite to that of the detection beam;
    与所述光隔离器连接的输入光纤;an input optical fiber connected to the optical isolator;
    准直透镜,所述探测光束依次经所述光隔离器、所述输入光纤和所述准直透镜传输至所述光学谐振腔;a collimating lens, the detection beam is sequentially transmitted to the optical resonant cavity through the optical isolator, the input optical fiber and the collimating lens;
    所述出射光整形单元包括第一聚焦透镜,所述出射光束经所述第一聚焦透镜聚焦后传输至所述第一光探测器。The outgoing light shaping unit includes a first focusing lens, and the outgoing light beam is focused by the first focusing lens and transmitted to the first light detector.
  6. 如权利要求1至3任一项所述的腔衰荡光电系统,其特征在于,所述数据处理模块还用于: The cavity ring-down optoelectronic system according to any one of claims 1 to 3, wherein the data processing module is also used for:
    根据在所述光学谐振腔中无气体时获取的衰荡时间,获取所述光学谐振腔的内侧壁的反射率;obtaining the reflectivity of the inner sidewall of the optical resonant cavity according to the ring-down time obtained when there is no gas in the optical resonant cavity;
    或者,根据在所述光学谐振腔中无气体时获取的衰荡时间和在所述光学谐振腔中有气体时获取的衰荡时间,获取所述气体的吸收率。Alternatively, the absorption rate of the gas is obtained according to the ring-down time obtained when there is no gas in the optical resonant cavity and the ring-down time obtained when there is gas in the optical resonant cavity.
  7. 如权利要求6所述的腔衰荡光电系统,其特征在于,所述反射率与所述衰荡时间之间的关系式如下: The cavity ring-down optoelectronic system according to claim 6, wherein the relational expression between the reflectivity and the ring-down time is as follows:
    R=L/(Cτ 1) R=L/(Cτ 1 )
    其中,R为所述光学谐振腔的内侧壁的反射率,L为所述光学谐振腔的腔长,C为光速,τ 1为在所述光学谐振腔中无气体时获取的衰荡时间。 Wherein, R is the reflectivity of the inner wall of the optical resonant cavity, L is the cavity length of the optical resonant cavity, C is the speed of light, and τ1 is the ring - down time obtained when there is no gas in the optical resonant cavity.
  8. 如权利要求6所述的腔衰荡光电系统,其特征在于,所述气体的吸收率与所述衰荡时间之间的关系式如下: The cavity ring-down optoelectronic system according to claim 6, wherein the relationship between the absorptivity of the gas and the ring-down time is as follows:
    β=L/[C(1/τ 2-1/τ 1)] β=L/[C(1/τ 2 -1/τ 1 )]
    其中,β为所述探测光束在所述光学谐振腔内的光程等于单倍腔长时、所述气体的吸收率,L为所述光学谐振腔的腔长,C为光速,τ 1为在所述光学谐振腔中无气体时获取的衰荡时间,τ 2为在所述光学谐振腔中有气体时获取的衰荡时间。 Wherein, β is the absorptivity of the gas when the optical path of the probe beam in the optical resonant cavity is equal to a single cavity length, L is the cavity length of the optical resonant cavity, C is the speed of light, and τ1 is The ring-down time obtained when there is no gas in the optical resonant cavity, τ2 is the ring - down time obtained when there is gas in the optical resonant cavity.
  9. 一种腔衰荡光电系统,其特征在于,包括: A cavity ring-down optoelectronic system is characterized in that it comprises:
    激光器,用于输出探测光束;a laser for outputting a detection beam;
    光开关;light switch;
    光学谐振腔,所述探测光束经所述光学谐振腔来回反射后衰减为出射光束;An optical resonant cavity, the detection beam is attenuated into an outgoing beam after being reflected back and forth by the optical resonant cavity;
    第一光探测器,用于接收所述出射光束并转换为第一电信号;a first light detector, configured to receive the outgoing light beam and convert it into a first electrical signal;
    压电陶瓷致动器,设置于所述光学谐振腔的外腔壁;The piezoelectric ceramic actuator is arranged on the outer cavity wall of the optical resonant cavity;
    与所述光开关、所述压电陶瓷致动器和所述第一光探测器连接的光电控制模块,用于控制所述压电陶瓷致动器调节所述光学谐振腔的腔长,使所述探测光束的波长与所述光学谐振腔的纵模相匹配,根据所述第一电信号获取所述出射光束的光强度,在所述出射光束的光强度大于预设阈值时,控制所述光开关改变所述探测光束的传输方向或降低所述探测光束的光强度,以关断所述探测光束;A photoelectric control module connected with the optical switch, the piezoelectric ceramic actuator and the first photodetector, used to control the piezoelectric ceramic actuator to adjust the cavity length of the optical resonant cavity, so that The wavelength of the detection beam matches the longitudinal mode of the optical resonant cavity, the light intensity of the outgoing light beam is obtained according to the first electrical signal, and when the light intensity of the outgoing light beam is greater than a preset threshold, the control The optical switch changes the transmission direction of the detection beam or reduces the light intensity of the detection beam to turn off the detection beam;
    与所述第一光探测器连接的数据处理模块,用于根据所述第一电信号获取所述探测光束在所述光学谐振腔内的衰荡时间;A data processing module connected to the first photodetector, configured to obtain the ring-down time of the probe beam in the optical resonant cavity according to the first electrical signal;
    其中,所述光学谐振腔为由平面反射镜和凹面反射镜构成的平凹腔;Wherein, the optical resonant cavity is a flat concave cavity composed of a plane reflector and a concave reflector;
    或者,所述腔衰荡光电系统还包括与所述第一光探测器连接的输出光纤,所述输出光纤为基模与所述出射光束的基横模相匹配的单模光纤,所述出射光束经所述输出光纤滤除高阶横模后传输至所述第一光探测器。Alternatively, the cavity ring-down optoelectronic system further includes an output optical fiber connected to the first photodetector, the output optical fiber is a single-mode optical fiber whose fundamental mode matches the fundamental transverse mode of the outgoing light beam, and the outgoing optical fiber The light beam is transmitted to the first photodetector after being filtered by the output optical fiber to filter high-order transverse modes.
  10. 如权利要求9所述的腔衰荡光电系统,其特征在于,当所述光学谐振腔为由平面反射镜和凹面反射镜构成的平凹腔时,所述平面反射镜到凹面反射镜的距离为凹面反射镜曲率半径的1/2,所述平凹腔的基横模束腰位于所述平面反射镜。 The cavity ring-down optoelectronic system according to claim 9, wherein when the optical resonant cavity is a flat concave cavity composed of a plane reflector and a concave reflector, the distance from the plane reflector to the concave reflector is 1/2 of the radius of curvature of the concave reflector, and the beam waist of the fundamental transverse mode of the flat concave cavity is located in the plane reflector.
  11. 如权利要求9所述的腔衰荡光电系统,其特征在于,当所述输出光纤为基模与所述出射光束的基横模相匹配的单模光纤时,所述光学谐振腔为由两个凹面反射镜构成的共焦腔,所述共焦腔的基横模束腰位于所述两个凹面反射镜之间。 The cavity ring-down optoelectronic system according to claim 9, wherein when the output optical fiber is a single-mode optical fiber whose fundamental mode matches the fundamental transverse mode of the outgoing light beam, the optical resonant cavity is composed of two A confocal cavity composed of two concave mirrors, the beam waist of the fundamental transverse mode of the confocal cavity is located between the two concave mirrors.
  12. 如权利要求9至11任一项所述的腔衰荡光电系统,其特征在于,还包括: The cavity ring-down optoelectronic system according to any one of claims 9 to 11, further comprising:
    入射光整形单元,设置于所述光开关和所述光学谐振腔之间的光路,所述探测光束经所述光开关到入射光整形单元进行空间光调制后传输至所述光学谐振腔;The incident light shaping unit is arranged on the optical path between the optical switch and the optical resonant cavity, and the probe beam is transmitted to the optical resonant cavity after being spatially modulated by the optical switch to the incident light shaping unit;
    出射光整形单元,设置于所述光学谐振腔与所述第一光探测器之间的光路,所述出射光束经所述出射光整形单元进行空间光调制后传输至所述第一光探测器。The outgoing light shaping unit is arranged on the optical path between the optical resonant cavity and the first photodetector, and the outgoing light beam is spatially modulated by the outgoing light shaping unit and then transmitted to the first photodetector .
  13. 如权利要求12所述的腔衰荡光电系统,其特征在于,所述入射光整形单元包括: The cavity ring-down optoelectronic system according to claim 12, wherein the incident light shaping unit comprises:
    与所述激光器连接的光隔离器,用于隔离传播方向与所述探测光束相反的反向光束;an optical isolator connected to the laser, for isolating a reverse beam whose propagation direction is opposite to that of the detection beam;
    与所述光开关连接的输入光纤;an input optical fiber connected to the optical switch;
    准直透镜,所述探测光束依次经所述光隔离器、所述光开关、所述输入光纤和所述准直透镜传输至所述光学谐振腔;a collimating lens, the detection beam is sequentially transmitted to the optical resonant cavity through the optical isolator, the optical switch, the input optical fiber and the collimating lens;
    所述出射光整形单元包括第一聚焦透镜,所述出射光束经所述第一聚焦透镜聚焦后传输至所述第一光探测器。The outgoing light shaping unit includes a first focusing lens, and the outgoing light beam is focused by the first focusing lens and transmitted to the first light detector.
  14. 如权利要求9至11任一项所述的腔衰荡光电系统,其特征在于,所述数据处理模块还用于: The cavity ring-down optoelectronic system according to any one of claims 9 to 11, wherein the data processing module is also used for:
    根据在所述光学谐振腔中无气体时获取的衰荡时间,获取所述光学谐振腔的内侧壁的反射率;obtaining the reflectivity of the inner sidewall of the optical resonant cavity according to the ring-down time obtained when there is no gas in the optical resonant cavity;
    或者,根据在所述光学谐振腔中无气体时获取的衰荡时间和在所述光学谐振腔中有气体时获取的衰荡时间,获取所述气体的吸收率。Alternatively, the absorption rate of the gas is obtained according to the ring-down time obtained when there is no gas in the optical resonant cavity and the ring-down time obtained when there is gas in the optical resonant cavity.
  15. 如权利要求14所述的腔衰荡光电系统,其特征在于,所述反射率与所述衰荡时间之间的关系式如下: The cavity ring-down optoelectronic system according to claim 14, wherein the relational expression between the reflectivity and the ring-down time is as follows:
    R=L/(Cτ 1) R=L/(Cτ 1 )
    其中,R为所述光学谐振腔的内侧壁的反射率,L为所述光学谐振腔的腔长,C为光速,τ 1为在所述光学谐振腔中无气体时获取的衰荡时间。 Wherein, R is the reflectivity of the inner wall of the optical resonant cavity, L is the cavity length of the optical resonant cavity, C is the speed of light, and τ1 is the ring - down time obtained when there is no gas in the optical resonant cavity.
  16. 如权利要求14所述的腔衰荡光电系统,其特征在于,所述气体的吸收率与所述衰荡时间之间的关系式如下: The cavity ring-down optoelectronic system according to claim 14, wherein the relationship between the absorptivity of the gas and the ring-down time is as follows:
    β=L/[C(1/τ 2-1/τ 1)] β=L/[C(1/τ 2 -1/τ 1 )]
    其中,β为所述探测光束在所述光学谐振腔内的光程等于单倍腔长时、所述气体的吸收率,L为所述光学谐振腔的腔长,C为光速,τ 1为在所述光学谐振腔中无气体时获取的衰荡时间,τ 2为在所述光学谐振腔中有气体时获取的衰荡时间。 Wherein, β is the absorptivity of the gas when the optical path of the probe beam in the optical resonant cavity is equal to a single cavity length, L is the cavity length of the optical resonant cavity, C is the speed of light, and τ1 is The ring-down time obtained when there is no gas in the optical resonant cavity, τ2 is the ring - down time obtained when there is gas in the optical resonant cavity.
  17. 一种入射光路调节方法,其特征在于,基于如权利要求2或10所述的腔衰荡光电系统实现,所述方法包括: A method for adjusting an incident optical path, characterized in that it is implemented based on the cavity ring-down optoelectronic system according to claim 2 or 10, the method comprising:
    在调节所述探测光束的束腰位置和入射角度的过程中,通过环形器将所述探测光束传输至所述光学谐振腔,所述环形器与所述激光器连接;During the process of adjusting the beam waist position and incident angle of the probe beam, the probe beam is transmitted to the optical resonant cavity through a circulator, and the circulator is connected to the laser;
    通过第二光探测器将所述平面反射镜反射的反射光束转换为第二电信号,所述第二光探测器与所述环形器和所述光电控制模块连接;converting the reflected light beam reflected by the plane reflector into a second electrical signal through a second photodetector, the second photodetector is connected to the circulator and the photoelectric control module;
    通过所述光电控制模块根据所述第二电信号获取所述反射光束的光强度,以监控所述探测光束与所述光学谐振腔的基横模的耦合程度,直到所述耦合程度大于耦合程度阈值时为止,所述反射光束的光强度与所述耦合程度正相关。Obtain the light intensity of the reflected light beam through the photoelectric control module according to the second electrical signal, so as to monitor the coupling degree of the detection beam and the fundamental transverse mode of the optical resonator until the coupling degree is greater than the coupling degree Up to a threshold value, the light intensity of the reflected light beam is positively correlated with the coupling degree.
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116448718A (en) * 2023-04-19 2023-07-18 河北子曰机械设备有限公司 Cavity ring-down tuning unit and cavity ring-down spectroscopy device
CN116660164A (en) * 2023-04-18 2023-08-29 西安电子科技大学 Ring down chamber and gas measurement system based on optical cement mode connection

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114563083B (en) * 2022-04-29 2022-07-19 华中科技大学 Resonant cavity system with adjustable resonant frequency and adjusting and controlling method thereof
CN114910445A (en) * 2022-07-01 2022-08-16 安徽合束环境科技有限公司 Trace gas detection system and method based on cavity ring-down

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5528040A (en) * 1994-11-07 1996-06-18 Trustees Of Princeton University Ring-down cavity spectroscopy cell using continuous wave excitation for trace species detection
CN101256112A (en) * 2008-04-12 2008-09-03 山西大学 Method for rapid accurate determination of superelevation reflectance ratio eyeglass
CN101409421A (en) * 2008-11-20 2009-04-15 北京交通大学 Single-mode operated large mold field area multi-mode optical fiber laser
CN102735643A (en) * 2012-06-12 2012-10-17 中国科学技术大学 Device and method for measuring water vapor content by using self-calibrating optical cavity ring-down spectroscopy
CN211234726U (en) * 2020-03-06 2020-08-11 江苏大学 Optical ring-down device with adjustable cavity length

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6466322B1 (en) * 1998-12-31 2002-10-15 The Board Of Trustees Of The Leland Stanford Junior University Swept continuous wave cavity ring-down spectroscopy
CN101261182B (en) * 2008-03-26 2010-06-23 中国科学院光电技术研究所 High reflectivity measurement method based on frequency selective optical feedback cavity ringdown spectroscopy
CN104819957A (en) * 2015-02-11 2015-08-05 中国科学院长春光学精密机械与物理研究所 CRDS principle-based gas concentration measurement system of continuously adjustable laser light source

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5528040A (en) * 1994-11-07 1996-06-18 Trustees Of Princeton University Ring-down cavity spectroscopy cell using continuous wave excitation for trace species detection
CN101256112A (en) * 2008-04-12 2008-09-03 山西大学 Method for rapid accurate determination of superelevation reflectance ratio eyeglass
CN101409421A (en) * 2008-11-20 2009-04-15 北京交通大学 Single-mode operated large mold field area multi-mode optical fiber laser
CN102735643A (en) * 2012-06-12 2012-10-17 中国科学技术大学 Device and method for measuring water vapor content by using self-calibrating optical cavity ring-down spectroscopy
CN211234726U (en) * 2020-03-06 2020-08-11 江苏大学 Optical ring-down device with adjustable cavity length

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116660164A (en) * 2023-04-18 2023-08-29 西安电子科技大学 Ring down chamber and gas measurement system based on optical cement mode connection
CN116448718A (en) * 2023-04-19 2023-07-18 河北子曰机械设备有限公司 Cavity ring-down tuning unit and cavity ring-down spectroscopy device
CN116448718B (en) * 2023-04-19 2023-12-05 河北子曰机械设备有限公司 Cavity ring-down tuning unit and cavity ring-down spectroscopy device

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