WO2023248403A1 - Capteur optique et système de capteur optique - Google Patents

Capteur optique et système de capteur optique Download PDF

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Publication number
WO2023248403A1
WO2023248403A1 PCT/JP2022/025000 JP2022025000W WO2023248403A1 WO 2023248403 A1 WO2023248403 A1 WO 2023248403A1 JP 2022025000 W JP2022025000 W JP 2022025000W WO 2023248403 A1 WO2023248403 A1 WO 2023248403A1
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WO
WIPO (PCT)
Prior art keywords
wavelength
light
wavelength filter
optical sensor
waveguide
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PCT/JP2022/025000
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English (en)
Japanese (ja)
Inventor
仁深 尾野
彰裕 藤江
俊行 安藤
Original Assignee
三菱電機株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by 三菱電機株式会社 filed Critical 三菱電機株式会社
Priority to JP2022568503A priority Critical patent/JPWO2023248403A1/ja
Priority to PCT/JP2022/025000 priority patent/WO2023248403A1/fr
Publication of WO2023248403A1 publication Critical patent/WO2023248403A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light

Definitions

  • the present disclosure relates to optical sensors and optical sensor systems.
  • FIG. 3 is a configuration diagram showing an optical sensor system according to a third embodiment.
  • FIG. 3 is an explanatory diagram showing the transmission characteristics of wavelength filters 12-1, 12-2, and 12-3.
  • FIG. 3 is an explanatory diagram showing the respective transmission characteristics of wavelength filters 12-1, 12-2, and 12-3 whose center wavelengths of transmission bands are shifted.
  • FIG. 3 is an explanatory diagram showing the relationship between the physical quantity of observation object 1 and the intensity of light transmitted through each of wavelength filters 12-1, 12-2, and 12-3.
  • FIG. 7 is a configuration diagram showing an optical sensor system according to a fourth embodiment.
  • FIG. 7 is an explanatory diagram showing the transmission characteristics of wavelength filters 12-4 to 12-7.
  • FIG. 7 is an explanatory diagram showing the respective transmission characteristics of wavelength filters 12-4 to 12-7 whose center wavelengths of transmission bands are shifted.
  • 3 is an explanatory diagram showing the relationship between the physical quantity of observation object 1 and the intensity of light transmitted through each of wavelength filters 12-4 to 12-7.
  • FIG. FIG. 7 is a configuration diagram
  • FIG. 1 is a configuration diagram showing an optical sensor system according to a first embodiment.
  • FIG. 2 is a configuration diagram showing the wavelength filter 12 of the optical sensor 2 according to the first embodiment.
  • the optical sensor system shown in FIG. 1 includes an optical sensor 2 and a terminal device 3.
  • the optical sensor 2 measures a physical quantity of the observation target 1 and transmits a signal indicating the measurement result of the physical quantity to the terminal device 3.
  • the physical quantity of the observation object 1 includes, for example, the temperature of the observation object 1 or the pressure of the observation object 1.
  • the observation target 1 may be, for example, a human, an animal other than a human, or an object other than an animal.
  • the optical sensor 2 can measure the human body temperature or the human pulse.
  • the terminal device 3 is realized by, for example, a smartphone or a tablet terminal.
  • the terminal device 3 receives radio waves transmitted from the optical sensor 2.
  • the terminal device 3 analyzes the frequency f of the received radio signal and identifies the physical quantity of the observation target 1 from the frequency f.
  • the wavelength filter 12 is realized by, for example, a ring resonator.
  • the wavelength filter 12 includes a first waveguide 12a, a second waveguide 12b, and a ring waveguide 12c.
  • the wavelength filter 12 has a transmittance ⁇ that transmits the light output from the light source 11, which changes depending on the physical quantity of the observation target 1.
  • the light that has passed through the wavelength filter 12 reaches the photoelectric converter 13.
  • the photoelectric converter 13 is realized by, for example, a PD (Photo Diode).
  • the photoelectric converter 13 operates by receiving power from the power supply section 16 .
  • the photoelectric converter 13 converts light into an electrical signal, and the voltage V of the electrical signal, which is the output signal, changes depending on the intensity of the light that has passed through the wavelength filter 12.
  • Photoelectric converter 13 outputs an electrical signal to voltage controlled oscillator 14 .
  • the light source controller 17 outputs to the light source 11 a control signal for setting the wavelength of light output from the light source 11 to ⁇ a.
  • the light source 11 operates by receiving power from the power source 16, and outputs light with a wavelength ⁇ a to the wavelength filter 12 in accordance with a control signal output from the light source controller 17.
  • the wavelength filter 12 has a light transmission range as shown in FIG.
  • FIG. 3 is an explanatory diagram showing the transmission characteristics of the wavelength filter 12.
  • the horizontal axis is the wavelength of light
  • the vertical axis is the transmittance ⁇ of light in the wavelength filter 12.
  • the center wavelength of the transmission band in the wavelength filter 12 is designed to match the wavelength ⁇ a of the light output from the light source 11.
  • the light transmission range in the wavelength filter 12 is a range from wavelength ⁇ a L to wavelength ⁇ a H.
  • the transmittance ⁇ of the light having the wavelength ⁇ a in the wavelength filter 12 decreases.
  • the intensity of light output from the wavelength filter 12 to the photoelectric converter 13 decreases. Note that the light output from the wavelength filter 12 to the photoelectric converter 13 is not light scattered by the observation object 1, but is light that has passed through the wavelength filter 12, and the intensity of the transmitted light is determined by the physical quantity of the observation object 1. It changes depending on the situation.
  • thermal expansion of the ring waveguide 12c or thermal contraction of the ring waveguide 12c occurs due to a change in the temperature, which is a physical quantity of the observation target 1.
  • the ring waveguide 12c may be deformed as the pressure, which is a physical quantity of the observation target 1, changes.
  • the photoelectric converter 13 operates by receiving power from the power supply section 16 .
  • the photoelectric converter 13 receives the light that has passed through the wavelength filter 12, it converts the light that has passed through the wavelength filter 12 into an electrical signal having a voltage V corresponding to the intensity of the light.
  • Photoelectric converter 13 outputs an electrical signal having voltage V to voltage controlled oscillator 14 .
  • FIG. 5A is an explanatory diagram showing the relationship between the physical quantity of the observation target 1 and the intensity of light transmitted through the wavelength filter 12.
  • the horizontal axis represents the physical quantity of the observation target 1
  • the vertical axis represents the intensity of light transmitted through the wavelength filter 12.
  • the physical quantity of the observation target 1 is, for example, temperature or pressure.
  • the antenna 15 radiates radio waves related to the RF signal output from the voltage controlled oscillator 14 into space. Radio waves radiated into space from the antenna 15 are received by the terminal device 3.
  • FIG. 6 is a configuration diagram showing the wavelength filter 12 of the optical sensor 2 according to the second embodiment.
  • the same reference numerals as those in FIG. 2 indicate the same or corresponding parts, so the explanation will be omitted.
  • the light source 18 time-divisionally outputs light with a wavelength ⁇ a, light with a wavelength ⁇ b, and light with a wavelength ⁇ c as lights with a plurality of different wavelengths.
  • the optical sensor 2 includes, for example, four wavelength filters, the light source 18 will output light of four different wavelengths in a time-division manner.
  • the optical sensor 2 includes, for example, five wavelength filters, the light source 18 outputs light of five different wavelengths in a time-division manner.
  • the intensity of the light with the wavelength ⁇ a, the intensity of the light with the wavelength ⁇ b, and the intensity of the light with the wavelength ⁇ c output from the light source 18 are the same.
  • the transmission characteristics of the wavelength filters 12-1, 12-2, 12-3 change, the intensity of the light output from the light source 18 to each of the wavelength filters 12-1, 12-2, 12-3 will change. It does not change.
  • the light transmission range Wa of the wavelength filter 12-1, the light transmission range Wb of the wavelength filter 12-2, and the light transmission range Wc of the wavelength filter 12-3 are different from each other. Similarly to the wavelength filter 12 shown in FIG. Change. The light that has passed through each of the wavelength filters 12-1, 12-2, and 12-3 reaches the photoelectric converter 13.
  • FIG. 8 is an explanatory diagram showing the transmission characteristics of the wavelength filters 12-1, 12-2, and 12-3.
  • the horizontal axis represents the wavelength of light
  • the vertical axis represents the transmittances ⁇ a, ⁇ b, and ⁇ c of the light in the wavelength filters 12-1, 12-2, and 12-3, respectively.
  • the light transmission range Wa in the wavelength filter 12-1 is in the range from wavelength ⁇ a L to wavelength ⁇ a H.
  • the light transmission range Wb in the wavelength filter 12-2 is a range from wavelength ⁇ b L to wavelength ⁇ b H.
  • the light transmission range Wc in the wavelength filter 12-3 is a range from wavelength ⁇ c L to wavelength ⁇ c H.
  • the wavelength filter 12-1 blocks the light and does not allow the light to pass through.
  • the light having the wavelength ⁇ a that has passed through the wavelength filter 12-1 reaches the photoelectric converter 13.
  • FIG. 9 is an explanatory diagram showing the transmission characteristics of wavelength filters 12-1, 12-2, and 12-3 whose center wavelengths of transmission bands are shifted.
  • the horizontal axis is the wavelength of light.
  • the vertical axis represents the transmittance of light ⁇ a, ⁇ b, and ⁇ c in the wavelength filters 12-1, 12-2, and 12-3, respectively.
  • the light transmission range Wa' of the wavelength filter 12-1, in which the center wavelength of the transmission range Wa is shifted, is in the range from wavelength ⁇ a L ' to wavelength ⁇ a H '.
  • the light transmission range Wb' of the wavelength filter 12-2 whose center wavelength has been shifted is in the range from wavelength ⁇ b L ' to wavelength ⁇ b H '.
  • the terminal device 3 identifies the physical quantity of the observation target 1 from the frequency f of the RF signal, which is a received radio signal, using a method similar to the method described in Embodiment 1. If the terminal device 3 acquires schedule information indicating the wavelength switching time by the light source 18 in advance, the wavelength filter transmitting light is the wavelength filter 12-1, the wavelength filter 12-2, or the wavelength filter 12-1, the wavelength filter 12-2, or It can be seen whether it is the filter 12-3. If the terminal device 3 knows whether the wavelength filter that transmits light is the wavelength filter 12-1, the wavelength filter 12-2, or the wavelength filter 12-3, it can determine whether the specified physical quantity is temperature. It can be determined whether the specified physical quantity is pressure or whether the specified physical quantity is electric potential.
  • Each of the wavelength filters 12-4, 12-5, 12-6, and 12-7 is realized by, for example, a ring resonator.
  • the optical sensor 2 shown in FIG. 11 is, for example, a sensor for measuring the physical quantity, ie, the temperature, or the physical quantity, pressure, of the observation target 1, each of the wavelength filters 12-4 to 12-7 is This wavelength filter is similar to the wavelength filter 12 shown in FIG.
  • the optical sensor 2 shown in FIG. 11 is, for example, a sensor for measuring the electric potential, which is a physical quantity of the observation target 1
  • each of the wavelength filters 12-4 to 12-7 is the same as the wavelength filter 12 shown in FIG. It is a similar wavelength filter.
  • the optical sensor 2 includes four wavelength filters 12-4 to 12-7.
  • the optical sensor 2 may include a plurality of wavelength filters, and is not limited to four wavelength filters 12-4 to 12-7.
  • the light transmission range Wd in the wavelength filter 12-7 is in the range from wavelength ⁇ d L to wavelength ⁇ d H.
  • the edge slope which is the rate of change in the transmittance ⁇ a with respect to a change in the wavelength of light
  • ESa the edge slope
  • the edge slope is ESb.
  • the edge gradient which is the rate of change in the transmittance ⁇ c with respect to a change in the wavelength of light
  • ESc the rate of change in the transmittance ⁇ c with respect to a change in the wavelength of light
  • ES-7 the rate of change in the transmittance ⁇ d with respect to a change in the wavelength of light.
  • the edge slope is ESd. In the example of FIG. 12, ESa ⁇ ESb ⁇ ESc ⁇ ESd.
  • the wavelength filter 12-4 transmits light having a wavelength ⁇ a when the light source 18 outputs the light.
  • the transmittance ⁇ a of the light having the wavelength ⁇ a in the wavelength filter 12-4 changes depending on the physical quantity of the observation target 1.
  • the wavelength filter 12-4 blocks the light and does not allow the light to pass through.
  • the light having the wavelength ⁇ a that has passed through the wavelength filter 12-4 reaches the photoelectric converter 13.
  • the light transmission range Wc' of the wavelength filter 12-6 whose center wavelength is shifted is in the range from wavelength ⁇ c L ' to wavelength ⁇ c H '.
  • the light transmission range Wd' of the wavelength filter 12-7 whose center wavelength is shifted is in the range from wavelength ⁇ d L ' to wavelength ⁇ d H '.
  • the wavelength band of the transmission range Wa' after the shift shown in FIG. 13 is wider than the wavelength band of the transmission range Wa shown in FIG. , in the low wavelength band. Furthermore, by shifting the center wavelength of the transmission band Wb in the wavelength filter 12-5 to the lower wavelength side, the wavelength band of the transmission band Wb' after the shift shown in FIG. 13 is changed to the wavelength band of the transmission band Wb shown in FIG. 12. It is a lower wavelength band. Furthermore, by shifting the center wavelength of the transmission range Wc in the wavelength filter 12-6 to the lower wavelength side, the wavelength band of the transmission range Wc' after the shift shown in FIG. 13 is changed to the wavelength band of the transmission range Wc shown in FIG.
  • the transmittance ⁇ a of the light having the wavelength ⁇ a in the wavelength filter 12-4 decreases.
  • the intensity of the light output from the wavelength filter 12-4 to the photoelectric converter 13 decreases.
  • the transmittance ⁇ b of the light having the wavelength ⁇ b in the wavelength filter 12-5 decreases.
  • the intensity of the light output from the wavelength filter 12-5 to the photoelectric converter 13 decreases.
  • the transmittance ⁇ c of the light having the wavelength ⁇ c in the wavelength filter 12-6 decreases.
  • the intensity of the light output from the wavelength filter 12-6 to the photoelectric converter 13 decreases.
  • the transmittance ⁇ d of the light having the wavelength ⁇ d in the wavelength filter 12-7 decreases.
  • the intensity of the light output from the wavelength filter 12-7 to the photoelectric converter 13 decreases.
  • the photoelectric converter 13 operates by receiving power from the power supply section 16 .
  • the photoelectric converter 13 When the photoelectric converter 13 is given the light with the wavelength ⁇ a that has passed through the wavelength filter 12-4, the photoelectric converter 13 converts the light with the wavelength ⁇ a that has passed through the wavelength filter 12-4 to a voltage Va corresponding to the intensity of the light. Convert it into an electrical signal.
  • Photoelectric converter 13 outputs an electrical signal having voltage Va to voltage controlled oscillator 14 .
  • the photoelectric converter 13 converts the light with the wavelength ⁇ b that has passed through the wavelength filter 12-5 into a voltage corresponding to the intensity of the light. Convert to an electrical signal having Vb.
  • Photoelectric converter 13 outputs an electrical signal having voltage Vb to voltage controlled oscillator 14 .
  • FIG. 14 is an explanatory diagram showing the relationship between the physical quantity of the observation object 1 and the intensity of light transmitted through each of the wavelength filters 12-4 to 12-7.
  • the horizontal axis represents the physical quantity of the observation object 1
  • the vertical axis represents the intensity of light that has passed through each of the wavelength filters 12-4 to 12-7.
  • FIG. 14 shows that as the physical quantity of observation target 1 increases, the transmittance of each light in the wavelength filters 12-4 to 12-7 decreases, and the light passes through any of the wavelength filters 12-4 to 12-7. This indicates that the intensity of the light that has been emitted is decreasing.
  • the antenna 15 radiates radio waves related to the RF signal output from the voltage controlled oscillator 14 into space. Radio waves radiated into space from the antenna 15 are received by the terminal device 3.
  • the terminal device 3 stores the correspondence between the frequency f of the RF signal associated with each of the wavelength filters 12-4 to 12-7 and the physical quantity of the observation target 1.
  • the terminal device 3 identifies the physical quantity of the observation target 1 from the frequency f of the RF signal by referring to the correspondence between the frequency f of the RF signal related to the specified wavelength filter and the physical quantity of the observation target 1.
  • the terminal device 3 displays the specified physical quantity on the display of the terminal device 3, for example.
  • FIG. 15 is a configuration diagram showing an optical sensor system according to Embodiment 5.
  • the optical sensor system shown in FIG. 15 includes an optical sensor 2, a terminal device 3, an access point 4, and a server device 5.
  • the terminal device 3 identifies the physical quantity of the observation target 1 and transmits observation data indicating the physical quantity to the server device 5 via the access point 4.
  • the terminal device 3 transmits observation data to the server device 5 via the access point 4.
  • this is just an example, and the terminal device 3 may transmit observation data to the server device 5 without going through the access point 4.
  • the access point 4 is wirelessly connected to the terminal device 3 and connected to the server device 5 via a network.
  • Examples of the network include the Internet or a LAN (Local Area Network).
  • the access point 4 transfers the observation data transmitted from the terminal device 3 to the server device 5.
  • the server device 5 stores observation data transmitted from the terminal device 3.
  • the access point 4 and server device 5 are applied to the optical sensor system shown in FIG.
  • the access point 4 and server device 5 may be applied to the optical sensor system shown in FIG. 7 or the optical sensor system shown in FIG. 11.
  • the terminal device 3 specifies the physical quantity of the observation target 1 using the methods described in the first to fourth embodiments.
  • the terminal device 3 transmits observation data indicating the specified physical quantity to the server device 5 via the access point 4.
  • the server device 5 stores observation data transmitted from the terminal device 3.
  • the server device 5 can grasp trends in changes in physical quantities by storing observation data for a long period of time each time the observation data is transmitted from the terminal device 3. For example, if the physical quantity of the observation target 1 is pressure indicating the pulse of the subject, which is the observation target 1, the server device 5 can grasp the change tendency of the subject's pulse. If the physical quantity of the observation object 1 is pressure indicating the subject's pulse, for example, by fixing the optical sensor 2 to the subject's wrist or the like, the optical sensor 2 can measure the pressure indicating the pulse.
  • the terminal device 3 identifies the physical quantity of the observation target 1 from the received signal, and transmits observation data indicating the physical quantity.
  • the optical sensor system shown in FIG. 15 was configured to include a server device 5 that stores observation data transmitted from the terminal device 3. Therefore, like the optical sensor system shown in FIG. 1, the optical sensor system shown in FIG. 15 can measure the physical quantity of the observation object 1 without having a light receiving element that receives scattered light from the observation object 1. Further, the optical sensor system shown in FIG. 15 can grasp trends in changes in physical quantities of the observation target 1.
  • the present disclosure is suitable for optical sensors and optical sensor systems.
  • 1 Observation target 2 Optical sensor, 3 Terminal device, 4 Access point, 5 Server device, 11 Light source, 12 Wavelength filter, 12a First waveguide, 12b Second waveguide, 12c Ring waveguide, 12d Ring waveguide , 12e first electrode, 12f second electrode, 12-1, 12-2, 12-3, 12-4, 12-5, 12-6, 12-7 wavelength filter, 13 photoelectric converter, 14 voltage Controlled oscillator, 15 antenna, 16 power supply section, 17 light source controller, 18 light source, 19 light source controller.

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  • General Physics & Mathematics (AREA)
  • Arrangements For Transmission Of Measured Signals (AREA)

Abstract

L'invention concerne un capteur optique (2) configuré pour comporter une source lumineuse (11) qui délivre une lumière et un filtre (12) de longueur d'onde présentant une transmittance qui est liée à la transmission d'une lumière délivrée à partir de la source lumineuse (11) et qui varie en fonction d'une grandeur physique d'une cible (1) d'observation. Le capteur optique (2) comporte en outre un convertisseur photoélectrique (13) qui délivre un signal électrique dont la tension varie en fonction de l'intensité de la lumière transmise à travers le filtre (12) de longueur d'onde.
PCT/JP2022/025000 2022-06-23 2022-06-23 Capteur optique et système de capteur optique WO2023248403A1 (fr)

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JP2022568503A JPWO2023248403A1 (fr) 2022-06-23 2022-06-23
PCT/JP2022/025000 WO2023248403A1 (fr) 2022-06-23 2022-06-23 Capteur optique et système de capteur optique

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PCT/JP2022/025000 WO2023248403A1 (fr) 2022-06-23 2022-06-23 Capteur optique et système de capteur optique

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Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03118404A (ja) * 1989-09-29 1991-05-21 Yokogawa Electric Corp 光センサー
US20080095490A1 (en) * 2004-09-08 2008-04-24 The Regents Of The University Of Michigan High Frequency Ultrasound Detection Using Polymer Optical-Ring Resonator
US20110302694A1 (en) * 2008-04-03 2011-12-15 University Of Washington Clinical force sensing glove
JP2012093165A (ja) * 2010-10-26 2012-05-17 Konica Minolta Holdings Inc 微小物質検出センサおよびそれを有する微小物質検出装置
JP2015022092A (ja) * 2013-07-18 2015-02-02 富士通株式会社 光変調装置、光送信機及び光変調器の制御方法
JP2015524553A (ja) * 2012-06-29 2015-08-24 シーメンス エナジー インコーポレイテッド 高温環境に対する電子回路
US20160047677A1 (en) * 2013-03-28 2016-02-18 Fraunhofer-Gesellschaft zur Foerderung der Angewan dten Forschung e. V. Optical Sensor Arrangement and Method For Measuring an Observable
JP2019500065A (ja) * 2015-10-07 2019-01-10 ヴェリリー ライフ サイエンシズ エルエルシー 無線周波および光学リーダ走査アレイ
US20200174192A1 (en) * 2018-12-04 2020-06-04 Imec Vzw Method for manufacturing a waveguide for guiding an electro-magnetic wave

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03118404A (ja) * 1989-09-29 1991-05-21 Yokogawa Electric Corp 光センサー
US20080095490A1 (en) * 2004-09-08 2008-04-24 The Regents Of The University Of Michigan High Frequency Ultrasound Detection Using Polymer Optical-Ring Resonator
US20110302694A1 (en) * 2008-04-03 2011-12-15 University Of Washington Clinical force sensing glove
JP2012093165A (ja) * 2010-10-26 2012-05-17 Konica Minolta Holdings Inc 微小物質検出センサおよびそれを有する微小物質検出装置
JP2015524553A (ja) * 2012-06-29 2015-08-24 シーメンス エナジー インコーポレイテッド 高温環境に対する電子回路
US20160047677A1 (en) * 2013-03-28 2016-02-18 Fraunhofer-Gesellschaft zur Foerderung der Angewan dten Forschung e. V. Optical Sensor Arrangement and Method For Measuring an Observable
JP2015022092A (ja) * 2013-07-18 2015-02-02 富士通株式会社 光変調装置、光送信機及び光変調器の制御方法
JP2019500065A (ja) * 2015-10-07 2019-01-10 ヴェリリー ライフ サイエンシズ エルエルシー 無線周波および光学リーダ走査アレイ
US20200174192A1 (en) * 2018-12-04 2020-06-04 Imec Vzw Method for manufacturing a waveguide for guiding an electro-magnetic wave

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