WO2023236817A1 - Ray detector and ray detection device - Google Patents

Ray detector and ray detection device Download PDF

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Publication number
WO2023236817A1
WO2023236817A1 PCT/CN2023/097206 CN2023097206W WO2023236817A1 WO 2023236817 A1 WO2023236817 A1 WO 2023236817A1 CN 2023097206 W CN2023097206 W CN 2023097206W WO 2023236817 A1 WO2023236817 A1 WO 2023236817A1
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Prior art keywords
layer
photoelectric conversion
circuit
electrode
radiation
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PCT/CN2023/097206
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French (fr)
Chinese (zh)
Inventor
夏亮
周军丹
孙阔
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京东方科技集团股份有限公司
成都京东方光电科技有限公司
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Publication of WO2023236817A1 publication Critical patent/WO2023236817A1/en

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144Devices controlled by radiation
    • H01L27/146Imager structures
    • H01L27/14601Structural or functional details thereof
    • H01L27/1463Pixel isolation structures
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144Devices controlled by radiation
    • H01L27/146Imager structures
    • H01L27/14601Structural or functional details thereof
    • H01L27/1462Coatings
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144Devices controlled by radiation
    • H01L27/146Imager structures
    • H01L27/14601Structural or functional details thereof
    • H01L27/14634Assemblies, i.e. Hybrid structures
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144Devices controlled by radiation
    • H01L27/146Imager structures
    • H01L27/14601Structural or functional details thereof
    • H01L27/14636Interconnect structures

Definitions

  • This application generally relates to the field of radiation detection technology, and specifically relates to a radiation detector and radiation detection equipment.
  • digital imaging system (Digital Radiography, DR) does not require film and film machine, and can directly display the captured images on the monitor. Therefore, the digital imaging system has fast imaging speed, Convenient operation and high imaging resolution are significant advantages.
  • the core technology of DR is a ray detector (such as an X-ray detector). How to improve the detection accuracy of the ray detector plays a decisive role in imaging quality.
  • This application aims to provide a radiation detector and radiation detection equipment to improve detection accuracy.
  • the application provides a radiation detector, including a stacked first circuit layer, a first electrode layer, a photoelectric conversion layer and a second electrode layer;
  • the photoelectric conversion layer includes a plurality of photoelectric conversion devices arranged in an array, the output pole of the photoelectric conversion device is electrically connected to the first electrode layer, and the input pole of the photoelectric conversion device is electrically connected to the second electrode layer. connect;
  • the first circuit layer includes a data line, a gate line, a first switching element and a constant voltage output unit.
  • the first switching element corresponds to the photoelectric conversion device one-to-one, and the first pole of the first switching element The voltage output end of the constant voltage output unit and the output pole of the photoelectric conversion device are electrically connected.
  • the second pole of the first switching element is electrically connected to the data line.
  • the control pole of the first switching element electrically connected to the gate line;
  • the constant voltage output unit is configured to input a preset constant voltage to the output pole of the photoelectric conversion device through the voltage output end before or after the photoelectric conversion device senses the ray.
  • the constant voltage output unit includes a capacitor, a first pole of the capacitor is the voltage output terminal, and a second pole of the capacitor is used to connect a constant voltage source.
  • a reset unit is further included, the reset end of the reset unit is connected to the data line, and is used to perform the reset of the sensing signal of the photoelectric conversion device after the sensing signal of the photoelectric conversion device is read through the data line. data line to reset.
  • the reset unit includes a second switching element, a first pole of the second switching element is connected to the data line, and a second pole of the second switching element is connected to a reset signal,
  • the control pole of the second switching element is connected to the reset control signal, and the first pole of the second switching element is connected to the reset terminal.
  • a radiation shielding layer is provided between the first circuit layer and the first electrode layer.
  • the first electrode layer includes a first electrode pattern and a first light-transmitting area surrounded by the first electrode pattern
  • the photoelectric conversion layer further includes a layer adjacent to the photoelectric conversion device. a second light-transmitting area between them, the second electrode layer including a second electrode pattern and a third light-transmitting area surrounded by the second electrode pattern;
  • the first light-transmitting area, the second light-transmitting area and the third light-transmitting area at least partially overlap.
  • the data lines and the gate lines are intersected, and the intersecting data lines and gate lines define multiple regions, each region having a photoelectric conversion device.
  • this application provides a radiation detection device, including the above-mentioned radiation detector, a radiation light source and a display unit;
  • the light-emitting surface of the ray light source faces the light-receiving surface of the ray detector
  • the display unit includes a display panel, and the display panel is disposed on a side of the radiation detector away from the light-receiving surface.
  • the display unit includes a stacked second circuit layer, a third electrode layer, a pixel layer and a fourth electrode layer;
  • each of the first circuit pattern areas includes the gate line, the data line, the first switching element, the second switching element and a capacitor.
  • the display unit includes a stacked second circuit layer, a third electrode layer, a pixel layer and a fourth electrode layer;
  • the second electrode layer and the fourth electrode layer have an integrated structure
  • Figure 2 is a schematic circuit diagram of a radiation detector provided by some embodiments of the present application.
  • Figure 3 is a schematic diagram of the layered structure of a radiation detector provided by some embodiments of the present application.
  • Figure 4 is a schematic circuit diagram of a photoelectric conversion device in a radiation detector provided by some embodiments of the present application.
  • Figure 5 is a schematic diagram of the layered structure of a radiation detector provided by some embodiments of the present application.
  • Figure 6 is a schematic structural diagram of a radiation detection device provided by some embodiments of the present application.
  • Figure 9 is a schematic structural diagram of a radiation detection device provided by some embodiments of the present application.
  • X-rays are electromagnetic waves with short wavelength (0.01-10nm) and strong penetrating power. They are widely used in medical imaging, non-destructive testing, materials research and other fields.
  • Perovskite materials have sensitive electrical voltammetry properties to X-rays, and photoelectric converters prepared from them
  • the device can image the detected object under low-dose X-ray irradiation. Therefore, photoelectric conversion devices prepared from perovskite materials are gradually used in X-ray imaging technology to sense objects passing through. Then the X-ray intensity is used to obtain the detection image.
  • Its working principle is that different materials and substances absorb X-rays differently. For example, in medical imaging, because different tissues of the human body absorb X-rays differently, the X-rays that pass through the human body and reach the X-ray detector The radiation intensity is also different, and the induced potential generated by the X-ray detector is also different. According to the induced potential, a grayscale image of the internal tissue of the human body can be obtained.
  • the inventor of the present application noticed that after the induced potential is read and/or interference between circuits will cause the basic voltage of the output pole of the photoelectric conversion device to change, for example, but not limited to, the output pole of the photoelectric conversion device
  • the theoretical state or design value of the basic voltage is 1V. Due to the reading of the induced potential and/or interference between circuits, the basic voltage of the output pole of the photoelectric conversion device becomes 0.97V. If the photoelectric conversion device receives the potential generated by X-rays is 0.35V, then the voltage read from the output pole of the photoelectric conversion device is 1.32V. Since the basic voltage has changed by 0.03V, it is no longer the theoretical state or design value of 1V.
  • the ray detector is, for example, but not limited to, an X-ray detector, including a stacked first circuit layer 22 and a first electrode layer. 26. Photoelectric conversion layer 27 and second electrode layer 28;
  • the first circuit layer 22 includes a data line DL, a gate line GL, a first switching element T1 and a constant voltage output unit 2.
  • the first switching element T1 corresponds to the photoelectric conversion device 1 one-to-one, and the first switching element T1 corresponds to the photoelectric conversion device 1.
  • the first pole of a switching element T1 is electrically connected to the voltage output terminal of the constant voltage output unit 2 and the output pole of the photoelectric conversion device 1, and the second pole of the first switching element T1 is electrically connected to the data line DL. Electrically connected, the control electrode of the first switching element T1 is electrically connected to the gate line GL;
  • the data line DL and the gate line GL are arranged to intersect.
  • the gate line GL extends along the first direction x
  • the data line DL extends along the second direction y
  • the first direction x may be the row direction
  • the second direction y may be the column direction.
  • the intersecting data lines DL and gate lines GL define a plurality of areas, each area having a photoelectric conversion device 1 .
  • Each switching element in this article can be a transistor.
  • Each transistor can be a thin film transistor, a field effect transistor, or other devices with the same characteristics. It can be an N-type transistor or a P-type transistor.
  • This article uses an N-type thin film transistor as an example. Make an introduction. In order to distinguish the two poles of the transistor except the control pole, one pole is called the first pole and the other pole is called the second pole.
  • the control electrode is a gate electrode, the first electrode can be a drain electrode, and the second electrode can be a source electrode; or the control electrode is a gate electrode, the first electrode can be a source electrode, and the second electrode can be a drain electrode.
  • the constant voltage output unit 2 is used to input a preset constant voltage to the output pole of the photoelectric conversion device 1 through the voltage output end before the photoelectric conversion device 1 senses rays or after sensing the rays.
  • a constant voltage output unit 2 is provided, and the constant voltage output unit 2 inputs a preset constant voltage to the output pole of the photoelectric conversion device 1 before or after the photoelectric conversion device 1 senses the ray, so as to maintain Before the photoelectric conversion device 1 senses rays or after sensing the rays, the voltage of the output pole of the photoelectric conversion device 1 is constant, overcoming the influence on the basic voltage of the output pole caused by the previous sensing and/or other parts of the circuit.
  • the constant voltage output unit 2 includes a capacitor C, the first pole of the capacitor C is the voltage output end, and the second pole of the capacitor is used for Connect the constant voltage source, which can be driver IC5.
  • the constant voltage source is, for example but not limited to, a bias voltage Bisa.
  • a reset unit is also included, the reset end of the reset unit is connected to the data line DL, and is used to read the sensing signal of the photoelectric conversion device 1 through the data line DL. , to reset the data line DL.
  • the first electrode layer 26 includes a first electrode pattern and a first light-transmitting area 262 surrounded by the first electrode pattern, and the photoelectric conversion layer 27 also Including a second light-transmitting area 272 between adjacent photoelectric conversion devices 1, the second electrode layer 28 includes a second electrode pattern and a third light-transmitting area 282 surrounded by the second electrode pattern;
  • the first light-transmitting area 262, the second light-transmitting area 272, and the third light-transmitting area 282 at least partially overlap.
  • the radiation detector of the present invention is illustrated below with several specific examples.
  • the substrate 21 can be a flexible substrate, such as polyethylene terephthalate (PET) film, polyimide (PI) film, etc.; or it can be a rigid substrate, such as a glass substrate.
  • PET polyethylene terephthalate
  • PI polyimide
  • a second planarization layer 25 is formed on the radiation shielding layer 24, and a first electrode layer 26 is formed on the second planarization layer 25.
  • the first electrode layer 26 serves as an anode layer, and the anode layer has a plurality of patterned electric shocks,
  • the source of the N-type thin film transistor and the photoelectric conversion device 1 described below are connected in a one-to-one manner.
  • the gate driver IC3 scans line by line through the gate line GL. After the photoelectric conversion device 1 receives the X-rays, it generates an induced potential, which increases the source voltage of the N-type thin film transistor.
  • the gate When the voltage V GB to the source is greater than the threshold voltage V th , the N-type thin film transistor is turned on, and the reading IC4 reads the potential output by the drain of the N-type thin film transistor through the corresponding data line DL.
  • Each photoelectric conversion device 1 can be positioned according to the gate line GL and the data line DL, and the detection signal corresponding to each photoelectric conversion device 1 can be stored in the form of coordinates.
  • Each data line DL is also connected to a second switching element T2 serving as a reset unit.
  • the first pole of the second switching element T2 is connected to the data line DL
  • the second pole of the second switching element T2 is used to receive the reset signal
  • the reset signal can be a voltage signal
  • the control pole of the second switching element T2 is used to receive the reset signal. Receive reset control signal.
  • the second switching element T2 is turned on through the reset control signal to input the reset signal to the data line DL to eliminate the residual charge on the data line DL to ensure the accuracy of the next inspection. sex.
  • the ray detector is an X-ray detector, including a stacked substrate 21 , a first circuit layer 22 , a first electrode layer 26 , a photoelectric conversion layer 27 , a second electrode layer 28 , and an encapsulation layer 29 ;
  • the substrate 21 is a clean polyimide (CPI) film
  • the first circuit layer 22 is a transparent circuit layer, and its circuit principle can be the same as the above example 1-1 ;
  • the first electrode layer 26 includes a first electrode pattern and a first light-transmitting area 262 surrounded by the first electrode pattern;
  • the photoelectric conversion layer 27 also includes a photoelectric conversion device 1, and a second light-transmitting area between adjacent photoelectric conversion devices 1 Area 272;
  • the second electrode layer 28 includes a second electrode pattern and a third light-transmitting area 282 surrounded by the second electrode pattern; in the orthographic projection of the radiation detector 33, the first light-transmitting area 262 and the second light-transmitting
  • the present application provides a radiation detection device, including the above-mentioned radiation detector 33 , a radiation light source 32 and a display unit 31 ;
  • the ray light source 32 is used to emit X-rays, for example.
  • the display unit 31 is, for example, but not limited to, a liquid crystal display (Liquid Crystal Display; LCD) display unit 31, an organic light-emitting diode (Organic Light-Emitting Diode; OLED) display unit 31, or a quantum dot light-emitting diode (Quantum Dot Light Emitting Diodes; QLED). Display unit 31.
  • LCD Liquid Crystal Display
  • OLED Organic Light-Emitting Diode
  • QLED Quantum Dot Light Emitting Diodes
  • the object to be detected is located between the light-emitting surface 36 of the ray light source 32 and the light-receiving surface of the ray detector 33. Between the surfaces 35, the rays emitted by the ray source 32 are emitted from the light-emitting surface 36, pass through the object to be detected, and then enter the light-receiving surface 35 of the ray detector 33.
  • Each photoelectric conversion device 1 of the ray detector 33 responds to the intensity of the sensed rays. (i.e., radiation dose), generating induced voltages representing different grayscales to obtain detection images.
  • the display unit 31 is used to display the detection image obtained by each photoelectric conversion device 1 of the radiation detector 33 in response to the radiation dose.
  • the display unit 31 in order to observe the obtained detection image while detecting, includes a display panel, and the display panel is disposed on the radiation detector 33 away from the light-receiving surface 35 side.
  • the radiation detector 33 and the display unit 31 can be integrated together, that is, The radiation detector 33 and the display unit 31 may be arranged on at least part of the same layer.
  • the display unit 31 includes a stacked second circuit layer 52, a third electrode layer 41, a pixel layer 42 and a fourth electrode layer 43;
  • the second circuit layer 52 and the first circuit layer 22 are arranged in the same layer. That is, the second circuit layer 52 and the first circuit layer 22 are prepared in the same layer using the same manufacturing process and using the same material.
  • the first circuit layer 22 includes a first circuit pattern area 221
  • the second circuit layer 52 includes a second circuit pattern area 222.
  • the first circuit pattern area 221 and the second circuit pattern area 222 are alternately arranged,
  • the first circuit pattern area 221 corresponds to the photoelectric conversion device 1 one-to-one
  • the second circuit pattern area 222 corresponds to the pixels of the pixel layer 42 one-to-one
  • the number of the second circuit pattern area 222 The number is greater than or equal to the first circuit pattern area 221 to ensure that the sensing signal of each photoelectric conversion device 1 is displayed by at least one pixel.
  • Each first circuit pattern area 221 corresponds to a photoelectric conversion device 1 and is used to control the output of the detection signal of the photoelectric conversion device 1 and the reset of the data line DL.
  • Each first circuit pattern area 221 includes the above-mentioned gate lines GL, data Line DL, first switching element T1, second switching element T2 and capacitor; each second circuit pattern area 222 corresponds to a pixel 421 to control the display of the pixel 421.
  • the second circuit pattern area 222 can be an existing pixel circuit. Any one of them, for example but not limited to 7T1C, 6T1C, 6T2C, 5T1C, 4T1C and other pixel circuits, where T is a thin film transistor and C is a pixel capacitance.
  • the display unit 31 includes a stacked arrangement The second circuit layer 52, the third electrode layer 41, the pixel layer 42 and the fourth electrode layer 43;
  • the second circuit layer 52 is arranged on the same layer as the first circuit layer 22, the first circuit layer 22 includes a first circuit pattern area 221, and the second circuit layer 52 includes a second circuit pattern area 222, so The first circuit pattern area 221 and the second circuit pattern area 222 are alternately arranged.
  • the first circuit pattern area 221 corresponds to the photoelectric conversion device 1 one-to-one.
  • the second circuit pattern area 222 corresponds to the pixel.
  • the pixels 421 of the layer 42 correspond one to one, and the number of the second circuit pattern areas 222 is greater than or equal to the number of the first circuit pattern areas 221, so that the gray scale corresponding to the voltage induced by each photoelectric conversion device 1 , displayed by at least one pixel 421;
  • the first electrode layer 26 and the third electrode layer 41 are arranged in the same layer to form an anode layer 261.
  • the first electrode layer 26 includes a first electrode pattern region 2612, and the third electrode layer 41 includes a third electrode layer 2612. Electrode pattern area 2611, the first electrode pattern area 2612 and the second electrode pattern area 2611 are alternately arranged;
  • the second electrode layer 28 and the fourth electrode layer 43 have an integrated structure, for example, they are electrodes 281 on the same surface;
  • a radiation shielding layer 24 is provided on the side of the second circuit layer 52 away from the third electrode layer 41.
  • the radiation shielding layer 24 includes a shielding pattern 241 and a radiation-transmitting area between the shielding patterns 241;
  • the second circuit pattern area 222 is directly opposite to the shielding pattern 241, and the second circuit pattern area 222 is located within the shielding pattern 241, and the photoelectric conversion device 1 is directly opposite to the radiation transmission area.
  • the rays can be irradiated to the photoelectric conversion device 1 and the rays can be prevented from adversely affecting the thin film transistors provided in the second circuit pattern area 222 .
  • the display panel includes a pixel layer 42 , and the pixel layer 42 includes a plurality of pixels 421 arranged at intervals and radiation-transmitting areas 422 between adjacent pixels 421 ;
  • the photoelectric conversion device 1 is located in the radiation transmission area 422 .
  • the radiation detection device of the present invention is illustrated below with several specific examples.
  • the ray detection equipment includes a ray detector 33, a ray light source 32 and and display unit 31;
  • the ray light source 32 is used to emit X-rays, for example.
  • the display unit 31 is, for example, an OLED display unit 31 or QLED (Quantum Dot Light Emitting Diodes).
  • the first circuit layer 22 includes a data line DL, a gate line GL, a first switching element T1 and a constant voltage output unit 2.
  • the first switching element T1 corresponds to the photoelectric conversion device 1 one-to-one to control the signal of each photoelectric conversion device 1. output.
  • the data line DL and the gate line GL are intersected.
  • the gate line GL extends along the first direction x
  • the data line DL extends along the second direction y.
  • the first direction x may be the row direction
  • the second direction y may be the column direction.
  • the intersecting data lines DL and gate lines GL define a plurality of areas, each area having a photoelectric conversion device 1 .
  • the first switching element T1 adopts an N-type thin film transistor.
  • the N-type thin film transistor has a first electrode, a source electrode, a second electrode, a drain electrode, and a control electrode, a gate electrode.
  • the source of the N-type thin film transistor is connected to the first electrode of the following capacitor C, the drain is connected to the data line DL, the gate is connected to the gate line GL, and the gate line GL is connected to the gate drive (Gate Driven on Array; GOA) circuit of the array substrate Or gate drive integrated circuit (Integrated Circuit; IC)3.
  • the photoelectric conversion layer 27 includes a plurality of photoelectric conversion devices 1 arranged in an array, forming a pixel-level arrangement structure.
  • the output electrode of the photoelectric conversion device 1 is electrically connected to the first electrode layer 26, and the input electrode of the photoelectric conversion device 1 is electrically connected to the second electrode layer 28; the second electrode layer 28 serves as a cathode and can be connected to the above-mentioned bias voltage,
  • the photoelectric conversion device 1 is made of, for example but not limited to, perovskite materials.
  • the encapsulation layer 29 may be a film encapsulation layer
  • the cover plate 30 may be a glass cover plate 30 or the like.
  • the first circuit pattern area 221 and the second circuit pattern area 222 are alternately arranged,
  • the first circuit pattern area 221 corresponds to the photoelectric conversion device 1 one-to-one
  • the second circuit pattern area 222 corresponds to the pixels 421 of the pixel layer 42 one-to-one
  • the second circuit pattern area 222 has a one-to-one correspondence.
  • the number is greater than or equal to the number of the first circuit pattern areas 221 .
  • the integrated structure of the radiation detector 33 and the display unit 31 includes a stacked substrate 21 (herein referred to as the first substrate), a second electrode layer 28, a photoelectric conversion layer 27, a first electrode layer 26, a first Planarization layer 23, radiation shielding layer 24, second substrate 40, circuit layer 220, second planarization layer 25.
  • Both the substrate 21 and the second substrate 40 can be PI films.
  • the photoelectric conversion layer 27 includes a plurality of photoelectric conversion devices 1 prepared from perovskite materials.
  • the third electrode layer 41 serves as the anode of the pixel layer 42
  • the fourth electrode layer 43 serves as the cathode of the pixel layer 42 .
  • the encapsulation layer 29 is a thin film encapsulation layer.
  • the main difference between this example and Example 2-1 is that the radiation detector 33 and the display unit 31 are integrated together, wherein the second circuit layer 52 of the display unit 31 and the third circuit layer of the radiation detector 33 A circuit layer 22 is arranged on the same layer.
  • the same layer structure of the second circuit layer 52 and the first circuit layer 22 is called a circuit layer 220.
  • the first electrode layer 26 of the radiation detector 33 and the third electrode layer 41 of the display unit 31 The pixel layer 42 of the display unit 31 and the photoelectric conversion layer 27 of the radiation detector 33 are arranged on the same layer, and the second electrode layer 28 of the radiation detector 33 and the fourth electrode layer 43 of the display unit 31 are arranged on the same layer.
  • the integrated structure of the radiation detector 33 and the display unit 31 includes a stacked substrate 21 (herein referred to as the first substrate), a radiation shielding layer 24, a first planarization layer 23, a second substrate 40, and a circuit layer. 220.
  • the radiation shielding layer 24 includes shielding patterns 241 and radiation transmission areas between the shielding patterns 241 .
  • the circuit layer 220 is a common layer of the second circuit layer 52 and the first circuit layer 22 and includes a first circuit pattern area 221 of the first circuit layer 22 and a second circuit pattern area 222 of the second circuit layer 52.
  • a circuit pattern area 221 and the second circuit pattern area 222 are alternately arranged, the first circuit pattern area 221 corresponds to the photoelectric conversion device 1 one-to-one, and the second circuit pattern area 222 corresponds to the pixel layer 42
  • the pixels 421 correspond one to one, and the number of the second circuit pattern areas 222 is greater than or equal to
  • the number of the first circuit pattern areas 221 is such that the gray scale corresponding to the voltage induced by each photoelectric conversion device 1 is displayed by at least one pixel 421;
  • the device layer 50 is a common layer of the pixel layer 42 and the photoelectric conversion layer 27, and includes the pixels 421 of the pixel layer 42 and the photoelectric conversion device 1 of the photoelectric conversion layer 27.
  • the second circuit pattern area 222 is directly opposite to the shielding pattern 241, and the second circuit pattern area 222 is located within the shielding pattern 241, and the photoelectric conversion device 1 is directly opposite to the radiation transmission area.
  • the radiation detector 33 is disposed on the packaging layer 29 of the display unit 31 .
  • the first substrate includes a stacked second substrate 40, a second circuit layer 44, a third electrode layer 41, a pixel layer 42, a fourth electrode layer 43, an encapsulation layer 29, and a substrate 21 (herein referred to as the first substrate) , the first circuit layer 22, the first electrode layer 26, the photoelectric conversion layer 27, and the second electrode layer 28.
  • the photoelectric conversion layer 27 includes photoelectric conversion devices 1 arranged at intervals;
  • first and second are used for descriptive purposes only and cannot be understood as indicating or implying relative importance or implicitly indicating the quantity of indicated technical features. Therefore, the characteristics defined as “first” and “second” may explicitly or implicitly include a or more of this feature. In the description of the present invention, unless otherwise stated, the meaning of "plurality" is two or more.

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Abstract

The present application discloses a ray detector and a ray detection device. The ray detector comprises a first circuit layer, a first electrode layer, a photoelectric conversion layer, and a second electrode layer; the first circuit layer comprises data lines, gate lines, first switch elements, and constant voltage output units; the first switch elements and photoelectric conversion devices are in one-to-one correspondence; first electrodes of the first switch elements are electrically connected to voltage output ends of the constant voltage output units and output electrodes of the photoelectric conversion devices; second electrodes of the first switch elements are electrically connected to the data lines; control electrodes of the first switch elements are electrically connected to the gate lines; the constant voltage output units are used for inputting preset constant voltages to the output electrodes of the photoelectric conversion devices by means of the voltage output ends before or after the photoelectric conversion devices sense a ray. According to the solution, the detection accuracy of the ray detector can be improved.

Description

射线探测器及射线探测设备Ray detectors and radiation detection equipment
相关申请的交叉引用Cross-references to related applications
本公开要求在2022年6月8日提交中国专利局、申请号为202210643199.4、名称为“射线探测器及射线探测设备”的中国专利申请的优先权,其全部内容通过引用结合在本公开中。This disclosure claims priority to the Chinese patent application with application number 202210643199.4 and titled "Ray Detector and Ray Detection Equipment" filed with the China Patent Office on June 8, 2022, the entire content of which is incorporated by reference into this disclosure.
技术领域Technical field
本申请一般涉及射线探测技术领域,具体涉及一种射线探测器及射线探测设备。This application generally relates to the field of radiation detection technology, and specifically relates to a radiation detector and radiation detection equipment.
背景技术Background technique
数字成像系统(Digital Radiography,DR)相较于计算机X线摄影(Computed Radiography,CR)无需胶片和胶片机,可以直接将拍摄的图像显示于显示器中,因此,数字成像系统具备快的成像速度、便捷的操作以及高的成像分辨率等显著优点。DR的技术核心是射线探测器(例如为X射线探测器),如何提高射线探测器的探测精度,对成像质量起着决定性的作用。Compared with computed radiography (CR), digital imaging system (Digital Radiography, DR) does not require film and film machine, and can directly display the captured images on the monitor. Therefore, the digital imaging system has fast imaging speed, Convenient operation and high imaging resolution are significant advantages. The core technology of DR is a ray detector (such as an X-ray detector). How to improve the detection accuracy of the ray detector plays a decisive role in imaging quality.
发明内容Contents of the invention
本申请旨在提供一种射线探测器及射线探测设备,用以提高探测精度。This application aims to provide a radiation detector and radiation detection equipment to improve detection accuracy.
第一方面,本申请提供一种射线探测器,包括层叠设置的第一电路层、第一电极层、光电转换层以及第二电极层;In a first aspect, the application provides a radiation detector, including a stacked first circuit layer, a first electrode layer, a photoelectric conversion layer and a second electrode layer;
所述光电转换层包括阵列排布的多个光电转换器件,所述光电转换器件的输出极与所述第一电极层电连接,所述光电转换器件的输入极与所述第二电极层电连接;The photoelectric conversion layer includes a plurality of photoelectric conversion devices arranged in an array, the output pole of the photoelectric conversion device is electrically connected to the first electrode layer, and the input pole of the photoelectric conversion device is electrically connected to the second electrode layer. connect;
所述第一电路层包括数据线、栅线、第一开关元件和恒定电压输出单元,所述第一开关元件与所述光电转换器件一一对应,且所述第一开关元件的第一极与所述恒定电压输出单元的电压输出端以及所述光电转换器件的输出极电连接,所述第一开关元件的第二极与所述数据线电连接,所述第一开关元件的控制极与所述栅线电连接; The first circuit layer includes a data line, a gate line, a first switching element and a constant voltage output unit. The first switching element corresponds to the photoelectric conversion device one-to-one, and the first pole of the first switching element The voltage output end of the constant voltage output unit and the output pole of the photoelectric conversion device are electrically connected. The second pole of the first switching element is electrically connected to the data line. The control pole of the first switching element electrically connected to the gate line;
所述恒定电压输出单元用于在所述光电转换器件感测射线前或感测射线后,通过所述电压输出端向所述光电转换器件的输出极输入预设恒定电压。The constant voltage output unit is configured to input a preset constant voltage to the output pole of the photoelectric conversion device through the voltage output end before or after the photoelectric conversion device senses the ray.
在本申请的一些实施例中,所述恒定电压输出单元包括电容,所述电容的第一极为所述电压输出端,所述电容的第二极用于连接恒压源。In some embodiments of the present application, the constant voltage output unit includes a capacitor, a first pole of the capacitor is the voltage output terminal, and a second pole of the capacitor is used to connect a constant voltage source.
在本申请的一些实施例中,还包括复位单元,所述复位单元的复位端与所述数据线连接,用于在所述光电转换器件的感测信号经数据线被读取后,对所述数据线进行复位。In some embodiments of the present application, a reset unit is further included, the reset end of the reset unit is connected to the data line, and is used to perform the reset of the sensing signal of the photoelectric conversion device after the sensing signal of the photoelectric conversion device is read through the data line. data line to reset.
在本申请的一些实施例中,所述复位单元包括第二开关元件,所述第二开关元件的第一极与所述数据线连接,所述第二开关元件的第二极连接复位信号,所述第二开关元件的控制极连接复位控制信号,所述第二开关元件的第一极为所述复位端。In some embodiments of the present application, the reset unit includes a second switching element, a first pole of the second switching element is connected to the data line, and a second pole of the second switching element is connected to a reset signal, The control pole of the second switching element is connected to the reset control signal, and the first pole of the second switching element is connected to the reset terminal.
在本申请的一些实施例中,所述第一电路层与所述第一电极层之间设置有射线屏蔽层。In some embodiments of the present application, a radiation shielding layer is provided between the first circuit layer and the first electrode layer.
在本申请的一些实施例中,所述第一电极层包括第一电极图案以及所述第一电极图案围绕的第一透光区,所述光电转换层还包括相邻所述光电转换器件之间的第二透光区,所述第二电极层包括第二电极图案以及所述第二电极图案围绕的第三透光区;In some embodiments of the present application, the first electrode layer includes a first electrode pattern and a first light-transmitting area surrounded by the first electrode pattern, and the photoelectric conversion layer further includes a layer adjacent to the photoelectric conversion device. a second light-transmitting area between them, the second electrode layer including a second electrode pattern and a third light-transmitting area surrounded by the second electrode pattern;
在所述射线探测器的正投影中,所述第一透光区、所述第二透光区和所述第三透光区至少部分重合。In the orthographic projection of the radiation detector, the first light-transmitting area, the second light-transmitting area and the third light-transmitting area at least partially overlap.
在本申请的一些实施例中,所述数据线和所述栅线交叉设置,交叉设置的数据线和栅线界定出来多个区域,每个区域具有一个光电转换器件。In some embodiments of the present application, the data lines and the gate lines are intersected, and the intersecting data lines and gate lines define multiple regions, each region having a photoelectric conversion device.
第二方面,本申请提供一种射线探测设备,包括上述的射线探测器,还包括射线光源以及显示单元;In a second aspect, this application provides a radiation detection device, including the above-mentioned radiation detector, a radiation light source and a display unit;
所述射线光源的出光面正对所述射线探测器的受光面;The light-emitting surface of the ray light source faces the light-receiving surface of the ray detector;
所述显示单元用于显示,所述射线探测器的各光电转换器件响应于射线剂量所获得的探测图像。The display unit is used to display detection images obtained by each photoelectric conversion device of the radiation detector in response to radiation dose.
在本申请的一些实施例中,所述显示单元包括显示面板,所述显示面板设置于所述射线探测器背离所述受光面的一侧。In some embodiments of the present application, the display unit includes a display panel, and the display panel is disposed on a side of the radiation detector away from the light-receiving surface.
在本申请的一些实施例中,所述显示单元包括层叠设置的第二电路层、第三电极层、像素层以及第四电极层; In some embodiments of the present application, the display unit includes a stacked second circuit layer, a third electrode layer, a pixel layer and a fourth electrode layer;
所述第二电路层与所述第一电路层同层设置,所述第一电路层包括第一电路图案区,所述第二电路层包括第二电路图案区,所述第一电路图案区与所述第二电路图案区交替设置,所述第一电路图案区与所述光电转换器件一一对应,所述第二电路图案区与所述像素层的像素一一对应,且所述第二电路图案区的数量大于等于所述第一电路图案区的数量。The second circuit layer and the first circuit layer are arranged on the same layer. The first circuit layer includes a first circuit pattern area. The second circuit layer includes a second circuit pattern area. The first circuit pattern area Arranged alternately with the second circuit pattern areas, the first circuit pattern areas correspond to the photoelectric conversion device in a one-to-one correspondence, the second circuit pattern areas correspond to the pixels of the pixel layer in a one-to-one correspondence, and the The number of the second circuit pattern areas is greater than or equal to the number of the first circuit pattern areas.
在本申请的一些实施例中,每一个所述第一电路图案区包括所述栅线、所述数据线、所述第一开关元件、第二开关元件及电容。In some embodiments of the present application, each of the first circuit pattern areas includes the gate line, the data line, the first switching element, the second switching element and a capacitor.
在本申请的一些实施例中,所述显示单元包括层叠设置的第二电路层、第三电极层、像素层以及第四电极层;In some embodiments of the present application, the display unit includes a stacked second circuit layer, a third electrode layer, a pixel layer and a fourth electrode layer;
所述第二电路层与所述第一电路层同层设置,所述第一电路层包括第一电路图案区,所述第二电路层包括第二电路图案区,所述第一电路图案区与所述第二电路图案区交替设置,所述第一电路图案区与所述光电转换器件一一对应,所述第二电路图案区与所述像素层的像素一一对应,且所述第二电路图案区的数量大于等于所述第一电路图案区的数量;The second circuit layer and the first circuit layer are arranged on the same layer. The first circuit layer includes a first circuit pattern area. The second circuit layer includes a second circuit pattern area. The first circuit pattern area Arranged alternately with the second circuit pattern areas, the first circuit pattern areas correspond to the photoelectric conversion device in a one-to-one correspondence, the second circuit pattern areas correspond to the pixels of the pixel layer in a one-to-one correspondence, and the The number of the second circuit pattern areas is greater than or equal to the number of the first circuit pattern areas;
所述第一电极层与所述第三电极层同层设置,所述第一电极层包括第一电极图案区,所述第三电极层包括第三电极图案区,所述第一电极图案区与所述第二电极图案区交替设置;The first electrode layer and the third electrode layer are arranged in the same layer. The first electrode layer includes a first electrode pattern area. The third electrode layer includes a third electrode pattern area. The first electrode pattern area Arranged alternately with the second electrode pattern areas;
所述第二电极层与所述第四电极层为一体结构;The second electrode layer and the fourth electrode layer have an integrated structure;
所述第二电路层背离所述第三电极层的一侧,设置有射线屏蔽层,所述射线屏蔽层包括屏蔽图案以及屏蔽图案之间的射线透过区;A radiation shielding layer is provided on the side of the second circuit layer facing away from the third electrode layer. The radiation shielding layer includes a shielding pattern and a radiation transmission area between the shielding patterns;
在所述射线探测设备的正投影中,所述第二电路图案区与所述屏蔽图案正对,且所述第二电路图案区位于所述屏蔽图案内,所述光电转换器件与所述射线透过区正对。In the orthographic projection of the radiation detection device, the second circuit pattern area is directly opposite to the shielding pattern, and the second circuit pattern area is located within the shielding pattern, and the photoelectric conversion device is in contact with the ray Directly opposite the through area.
在本申请的一些实施例中,所述显示面板包括像素层,所述像素层包括间隔设置的多个像素以及相邻像素之间的射线透过区;In some embodiments of the present application, the display panel includes a pixel layer, and the pixel layer includes a plurality of pixels arranged at intervals and radiation-transmitting areas between adjacent pixels;
在所述射线探测设备的正投影中,所述光电转换器件位于所述射线透过区。In the orthographic projection of the radiation detection device, the photoelectric conversion device is located in the radiation transmission area.
上述说明仅是本公开技术方案的概述,为了能够更清楚了解本公开的技术手段,而可依照说明书的内容予以实施,并且为了让本公开的上述和其它目 的、特征和优点能够更明显易懂,以下特举本公开的具体实施方式。The above description is only an overview of the technical solution of the present disclosure. In order to have a clearer understanding of the technical means of the present disclosure, it can be implemented according to the content of the description, and in order to achieve the above and other purposes of the present disclosure. , features and advantages can be more clearly understood, and the specific implementation modes of the present disclosure are specifically listed below.
附图说明Description of the drawings
为了更清楚地说明本公开实施例或相关技术中的技术方案,下面将对实施例或相关技术描述中所需要使用的附图作一简单地介绍,显而易见地,下面描述中的附图是本公开的一些实施例,对于本领域普通技术人员来讲,在不付出创造性劳动的前提下,还可以根据这些附图获得其他的附图。In order to more clearly illustrate the technical solutions in the embodiments of the present disclosure or related technologies, a brief introduction will be made below to the drawings that need to be used in the description of the embodiments or related technologies. Obviously, the drawings in the following description are of the present invention. For some disclosed embodiments, those of ordinary skill in the art can also obtain other drawings based on these drawings without exerting creative efforts.
通过阅读参照以下附图所作的对非限制性实施例所作的详细描述,本申请的其它特征、目的和优点将会变得更明显:Other features, objects and advantages of the present application will become more apparent by reading the detailed description of the non-limiting embodiments with reference to the following drawings:
图1为本申请一些实施例提供的射线探测器中一个光电转换器件的电路示意图;Figure 1 is a schematic circuit diagram of a photoelectric conversion device in a radiation detector provided by some embodiments of the present application;
图2为本申请一些实施例提供的射线探测器的电路原理图;Figure 2 is a schematic circuit diagram of a radiation detector provided by some embodiments of the present application;
图3为本申请一些实施例提供的射线探测器的层状结构示意图;Figure 3 is a schematic diagram of the layered structure of a radiation detector provided by some embodiments of the present application;
图4为本申请一些实施例提供的射线探测器中一个光电转换器件的电路示意图;Figure 4 is a schematic circuit diagram of a photoelectric conversion device in a radiation detector provided by some embodiments of the present application;
图5为本申请一些实施例提供的射线探测器的层状结构示意图;Figure 5 is a schematic diagram of the layered structure of a radiation detector provided by some embodiments of the present application;
图6为本申请一些实施例提供的射线探测设备的结构示意图;Figure 6 is a schematic structural diagram of a radiation detection device provided by some embodiments of the present application;
图7为本申请一些实施例提供的射线探测设备的结构示意图;Figure 7 is a schematic structural diagram of a radiation detection device provided by some embodiments of the present application;
图8为本申请一些实施例提供的射线探测设备的结构示意图;Figure 8 is a schematic structural diagram of a radiation detection device provided by some embodiments of the present application;
图9为本申请一些实施例提供的射线探测设备的结构示意图。Figure 9 is a schematic structural diagram of a radiation detection device provided by some embodiments of the present application.
具体实施例Specific embodiments
下面结合附图和实施例对本申请作进一步的详细说明。可以理解的是,此处所描述的具体实施例仅用于解释相关发明,而非对该发明的限定。另外还需要说明的是,为了便于描述,附图中仅示出了与发明相关的部分。The present application will be further described in detail below in conjunction with the accompanying drawings and examples. It can be understood that the specific embodiments described here are only used to explain the relevant invention, but not to limit the invention. It should also be noted that, for convenience of description, only the parts related to the invention are shown in the drawings.
需要说明的是,在不冲突的情况下,本申请中的实施例及实施例中的特征可以相互组合。下面将参考附图并结合实施例来详细说明本申请。It should be noted that, as long as there is no conflict, the embodiments and features in the embodiments of this application can be combined with each other. The present application will be described in detail below with reference to the accompanying drawings and embodiments.
X射线是波长短(0.01-10nm)、穿透性强的电磁波,在医学影像、无损探伤、材料研究等领域具有广泛应用。X-rays are electromagnetic waves with short wavelength (0.01-10nm) and strong penetrating power. They are widely used in medical imaging, non-destructive testing, materials research and other fields.
钙钛矿材料对X射线有着灵敏的电学伏安特性,由其制备的光电转换器 件可以在低剂量X射线的照射下,即可对所检测物体进行成像,因此,由钙钛矿材料制备的光电转换器件逐渐应用于X射线成像技术中,用于感测穿过被检测物体之后的X射线强度,以获得检测图像。其工作原理是,不同的材料、物质对X射线的吸收量不同,例如,在医学影像中,由于人体的不同组织对X射线的吸收量不同,则穿过人体到达X射线探测器的X射线的辐射强度也便不同,X射线探测器所产生的感应电势也不同,根据感应电势可以获得人体内部组织的灰度影像图。Perovskite materials have sensitive electrical voltammetry properties to X-rays, and photoelectric converters prepared from them The device can image the detected object under low-dose X-ray irradiation. Therefore, photoelectric conversion devices prepared from perovskite materials are gradually used in X-ray imaging technology to sense objects passing through. Then the X-ray intensity is used to obtain the detection image. Its working principle is that different materials and substances absorb X-rays differently. For example, in medical imaging, because different tissues of the human body absorb X-rays differently, the X-rays that pass through the human body and reach the X-ray detector The radiation intensity is also different, and the induced potential generated by the X-ray detector is also different. According to the induced potential, a grayscale image of the internal tissue of the human body can be obtained.
但是,本申请的发明人注意到,在感应电势被读取后和/或电路之间的干扰,会造成光电转换器件输出极的基础电压发生改变,例如但不限于,光电转换器件输出极的基础电压的理论状态或设计值为1V,由于感应电势被读取和/或电路之间的干扰,光电转换器件输出极的基础电压变为了0.97V,若光电转换器件接收到X射线产生的电势为0.35V,则从光电转换器件输出极被读取的电压为1.32V,由于基础电压发了了0.03V的变化,已经不是理论状态或设计值1V了,但是,射线探测设备仍会按照1V的基础电压确定感应电势为0.32V,并以0.32V所对应的灰度进行成像,这就造成了测量误差,降低了测量精度。为解决此问题,本案发明人采用如下技术方案:However, the inventor of the present application noticed that after the induced potential is read and/or interference between circuits will cause the basic voltage of the output pole of the photoelectric conversion device to change, for example, but not limited to, the output pole of the photoelectric conversion device The theoretical state or design value of the basic voltage is 1V. Due to the reading of the induced potential and/or interference between circuits, the basic voltage of the output pole of the photoelectric conversion device becomes 0.97V. If the photoelectric conversion device receives the potential generated by X-rays is 0.35V, then the voltage read from the output pole of the photoelectric conversion device is 1.32V. Since the basic voltage has changed by 0.03V, it is no longer the theoretical state or design value of 1V. However, the radiation detection equipment will still follow the 1V The basic voltage determines that the induced potential is 0.32V, and imaging is performed at the grayscale corresponding to 0.32V, which causes measurement errors and reduces measurement accuracy. In order to solve this problem, the inventor of this case adopted the following technical solution:
至少参见图1-图3所示,本申请实施例示出的一种射线探测器,该射线探测器例如但不限于为X射线探测器,包括层叠设置的第一电路层22、第一电极层26、光电转换层27以及第二电极层28;Referring to at least FIGS. 1 to 3 , embodiments of the present application illustrate a ray detector. The ray detector is, for example, but not limited to, an X-ray detector, including a stacked first circuit layer 22 and a first electrode layer. 26. Photoelectric conversion layer 27 and second electrode layer 28;
所述光电转换层27包括阵列排布的多个光电转换器件1,这些光电转换器件1形成像素级的排列结构,可以根据检测精度的要求设置光电转换器件1的数量以及大小和间距等。所述光电转换器件1的输出极与所述第一电极层26电连接,所述光电转换器件1的输入极与所述第二电极层28电连接;光电转换器件1例如但不限于由钙钛矿材料制备。The photoelectric conversion layer 27 includes a plurality of photoelectric conversion devices 1 arranged in an array. These photoelectric conversion devices 1 form a pixel-level arrangement structure. The number, size and spacing of the photoelectric conversion devices 1 can be set according to the requirements of detection accuracy. The output electrode of the photoelectric conversion device 1 is electrically connected to the first electrode layer 26, and the input electrode of the photoelectric conversion device 1 is electrically connected to the second electrode layer 28; the photoelectric conversion device 1 is made of, for example, but not limited to, calcium Titanium material preparation.
所述第一电路层22包括数据线DL、栅线GL、第一开关元件T1和恒定电压输出单元2,所述第一开关元件T1与所述光电转换器件1一一对应,且所述第一开关元件T1的第一极与所述恒定电压输出单元2的电压输出端以及所述光电转换器件1的输出极电连接,所述第一开关元件T1的第二极与所述数据线DL电连接,所述第一开关元件T1的控制极与所述栅线GL电连接;The first circuit layer 22 includes a data line DL, a gate line GL, a first switching element T1 and a constant voltage output unit 2. The first switching element T1 corresponds to the photoelectric conversion device 1 one-to-one, and the first switching element T1 corresponds to the photoelectric conversion device 1. The first pole of a switching element T1 is electrically connected to the voltage output terminal of the constant voltage output unit 2 and the output pole of the photoelectric conversion device 1, and the second pole of the first switching element T1 is electrically connected to the data line DL. Electrically connected, the control electrode of the first switching element T1 is electrically connected to the gate line GL;
数据线DL和栅线GL交叉设置,例如,栅线GL沿第一方向x延伸,数 据线DL沿第二方向y延伸,第一方向x可以为行方向,第二方向y为列方向。交叉设置的数据线DL和栅线GL界定出来多个区域,每个区域具有一个光电转换器件1。The data line DL and the gate line GL are arranged to intersect. For example, the gate line GL extends along the first direction x, and the number The data line DL extends along the second direction y, the first direction x may be the row direction, and the second direction y may be the column direction. The intersecting data lines DL and gate lines GL define a plurality of areas, each area having a photoelectric conversion device 1 .
本文的各开关元件均可以为晶体管,各晶体管可以为薄膜晶体管或场效应管或其他特性相同的器件,其可以为N型晶体管,也可以为P型晶体管,本文以采用N型薄膜晶体管为例进行介绍。为区分晶体管除控制极之外的两极,将其中一极称为第一极,另一极称为第二极。其中,控制极为栅极,第一极可以为漏极,第二极可以为源极;或者,控制极为栅极,第一极可以为源极,第二极可以为漏极。Each switching element in this article can be a transistor. Each transistor can be a thin film transistor, a field effect transistor, or other devices with the same characteristics. It can be an N-type transistor or a P-type transistor. This article uses an N-type thin film transistor as an example. Make an introduction. In order to distinguish the two poles of the transistor except the control pole, one pole is called the first pole and the other pole is called the second pole. The control electrode is a gate electrode, the first electrode can be a drain electrode, and the second electrode can be a source electrode; or the control electrode is a gate electrode, the first electrode can be a source electrode, and the second electrode can be a drain electrode.
所述恒定电压输出单元2用于在所述光电转换器件1感测射线前或感测射线后,通过所述电压输出端向所述光电转换器件1的输出极输入预设恒定电压。The constant voltage output unit 2 is used to input a preset constant voltage to the output pole of the photoelectric conversion device 1 through the voltage output end before the photoelectric conversion device 1 senses rays or after sensing the rays.
在进行检测时,读取IC4可以逐行逐列的读取光电转换器件1的输出极也即节点A的信号(可以为电压信号),并以坐标的形式记录对应光电转换器件1的输出极的信号(该信号用于表征检测图像的灰度),以构成检测图像用于显示。During detection, the reading IC 4 can read the output pole of the photoelectric conversion device 1 row by row, that is, the signal of node A (which can be a voltage signal), and record the output pole of the corresponding photoelectric conversion device 1 in the form of coordinates. signal (this signal is used to characterize the grayscale of the detection image) to form the detection image for display.
上述方案,通过设置恒定电压输出单元2,并通过该恒定电压输出单元2在光电转换器件1感测射线前或感测射线后,向光电转换器件1的输出极输入预设恒定电压,以维持光电转换器件1感测射线前或感测射线后,光电转换器件1的输出极的电压是恒定的,克服了前次感测和/或电路中的其他部分,对输出极的基础电压造成的改变,这样在光电转换器件1感测到射线后,输出极上的电压增量则是由光电转换器件1根据感测到的射线的强度所产生的感应电势,而没有其他外在电压的影响,因此,提高了射线探测器的探测精度。In the above solution, a constant voltage output unit 2 is provided, and the constant voltage output unit 2 inputs a preset constant voltage to the output pole of the photoelectric conversion device 1 before or after the photoelectric conversion device 1 senses the ray, so as to maintain Before the photoelectric conversion device 1 senses rays or after sensing the rays, the voltage of the output pole of the photoelectric conversion device 1 is constant, overcoming the influence on the basic voltage of the output pole caused by the previous sensing and/or other parts of the circuit. Change, so that after the photoelectric conversion device 1 senses the ray, the voltage increment on the output pole is the induced potential generated by the photoelectric conversion device 1 according to the intensity of the sensed ray, without the influence of other external voltages , Therefore, the detection accuracy of the ray detector is improved.
在本申请的一些实施例中,另参见图4所示,所述恒定电压输出单元2包括电容C,所述电容C的第一极为所述电压输出端,所述电容的第二极用于连接恒压源,恒压源可以为驱动IC5。该恒压源例如但不限于为偏置电压Bisa。In some embodiments of the present application, see also Figure 4, the constant voltage output unit 2 includes a capacitor C, the first pole of the capacitor C is the voltage output end, and the second pole of the capacitor is used for Connect the constant voltage source, which can be driver IC5. The constant voltage source is, for example but not limited to, a bias voltage Bisa.
在本申请的一些实施例中,还包括复位单元,所述复位单元的复位端与所述数据线DL连接,用于在所述光电转换器件1的感测信号经数据线DL被读取后,对所述数据线DL进行复位。In some embodiments of the present application, a reset unit is also included, the reset end of the reset unit is connected to the data line DL, and is used to read the sensing signal of the photoelectric conversion device 1 through the data line DL. , to reset the data line DL.
在本申请的一些实施例中,所述复位单元包括第二开关元件T2,所述第 二开关元件T2的第一极与所述数据线DL连接,所述第二开关元件T2的第二极用于接收复位信号,所述第二开关元件T2的控制极用于接收复位控制信号,所述第二开关元件T2的第一极为所述复位端。在一些实施例中,所述第二开关元件T2的第二极连接用于输入复位信号的电路或电路元件,所述第二开关元件T2的控制极连接用于输入复位控制信号的电路或电路元件。In some embodiments of the present application, the reset unit includes a second switching element T2, and the third The first pole of the two switching elements T2 is connected to the data line DL, the second pole of the second switching element T2 is used to receive the reset signal, and the control pole of the second switching element T2 is used to receive the reset control signal. The first pole of the second switching element T2 is the reset terminal. In some embodiments, the second pole of the second switching element T2 is connected to a circuit or circuit element for inputting a reset signal, and the control pole of the second switching element T2 is connected to a circuit or circuit for inputting a reset control signal. element.
在本申请的一些实施例中,所述第一电路层22与所述第一电极层26之间设置有射线屏蔽层24,以防止X射线照射到对应的开关元件造成影响,射线屏蔽层24的材料例如但不限于为氧化铅等。In some embodiments of the present application, a radiation shielding layer 24 is provided between the first circuit layer 22 and the first electrode layer 26 to prevent X-rays from impacting the corresponding switching elements. The radiation shielding layer 24 The material is, for example but not limited to, lead oxide.
在本申请的一些实施例中,如图5所示,所述第一电极层26包括第一电极图案以及所述第一电极图案围绕的第一透光区262,所述光电转换层27还包括相邻所述光电转换器件1之间的第二透光区272,所述第二电极层28包括第二电极图案以及所述第二电极图案围绕的第三透光区282;In some embodiments of the present application, as shown in FIG. 5 , the first electrode layer 26 includes a first electrode pattern and a first light-transmitting area 262 surrounded by the first electrode pattern, and the photoelectric conversion layer 27 also Including a second light-transmitting area 272 between adjacent photoelectric conversion devices 1, the second electrode layer 28 includes a second electrode pattern and a third light-transmitting area 282 surrounded by the second electrode pattern;
在所述射线探测器的正投影中,所述第一透光区262、所述第二透光区272和所述第三透光区282至少部分重合。In the orthographic projection of the radiation detector, the first light-transmitting area 262, the second light-transmitting area 272, and the third light-transmitting area 282 at least partially overlap.
下面以若干具体示例对该发明射线探测器予以示例性说明。The radiation detector of the present invention is illustrated below with several specific examples.
示例1-1Example 1-1
至少参见图1-图4所示,该射线探测器为X射线探测器,包括层叠设置的基底21、第一电路层22、第一平坦化层23、射线屏蔽层24、第二平坦化层25、第一电极层26、光电转换层27、第二电极层28、封装层29以及盖板30;At least as shown in FIGS. 1 to 4 , the ray detector is an X-ray detector, including a stacked substrate 21 , a first circuit layer 22 , a first planarization layer 23 , a ray shielding layer 24 , and a second planarization layer. 25. The first electrode layer 26, the photoelectric conversion layer 27, the second electrode layer 28, the packaging layer 29 and the cover plate 30;
基底21可以为柔性基底,如聚对苯二甲酸乙二醇酯(Polyethylene terephthalate;PET)薄膜、聚酰亚胺(Polyimide;PI)薄膜等;也可以是刚性基底,如玻璃基底等。The substrate 21 can be a flexible substrate, such as polyethylene terephthalate (PET) film, polyimide (PI) film, etc.; or it can be a rigid substrate, such as a glass substrate.
第一电路层22包括数据线DL、栅线GL、第一开关元件T1和恒定电压输出单元2,第一开关元件T1与光电转换器件1一一对应,来控制每个光电转换器件1信号的输出。The first circuit layer 22 includes a data line DL, a gate line GL, a first switching element T1 and a constant voltage output unit 2. The first switching element T1 corresponds to the photoelectric conversion device 1 one-to-one to control the signal of each photoelectric conversion device 1. output.
数据线DL和栅线GL交叉设置,例如,栅线GL沿第一方向x延伸,数据线DL沿第二方向y延伸,第一方向x可以为行方向,第二方向y为列方向。交叉设置的数据线DL和栅线GL界定出来多个区域,每个区域具有一个光电转换器件1。The data line DL and the gate line GL are intersected. For example, the gate line GL extends along the first direction x, and the data line DL extends along the second direction y. The first direction x may be the row direction, and the second direction y may be the column direction. The intersecting data lines DL and gate lines GL define a plurality of areas, each area having a photoelectric conversion device 1 .
第一开关元件T1采用N型薄膜晶体管,N型薄膜晶体管的第一极为源 极、第二极为漏极、控制极为栅极。N型薄膜晶体管的源极于下述电容的第一极连接,漏极连接数据线DL,栅极连接栅线GL,栅线GL连接阵列基板栅极驱动(Gate Driven on Array;GOA)电路或栅驱动集成电路(Integrated Circuit;IC)3。The first switching element T1 adopts an N-type thin film transistor, and the first electrode of the N-type thin film transistor is a source pole, the second pole is the drain, and the control pole is the gate. The source of the N-type thin film transistor is connected to the first electrode of the following capacitor, the drain is connected to the data line DL, the gate is connected to the gate line GL, and the gate line GL is connected to the gate drive (Gate Driven on Array; GOA) circuit of the array substrate or Gate drive integrated circuit (Integrated Circuit; IC) 3.
恒定电压输出单元2包括电容,所述电容的第一极为恒定电压输出单元2的电压输出端,与N型薄膜晶体管的源极连接,电容的第二极用于连接恒压源。该恒压源例如但不限于为偏置电压Bisa。The constant voltage output unit 2 includes a capacitor. The first pole of the capacitor is connected to the voltage output end of the constant voltage output unit 2 and the source of the N-type thin film transistor. The second pole of the capacitor is used to connect to a constant voltage source. The constant voltage source is, for example but not limited to, a bias voltage Bisa.
在第一电路层22上形成第一平坦化层23以便沉积射线屏蔽层24,射线屏蔽层24的材料例如但不限于为氧化铅等,射线屏蔽层24用以阻止X射线进入到第一电路层22,对上述N型薄膜晶体管造成不利影响。A first planarization layer 23 is formed on the first circuit layer 22 to deposit a radiation shielding layer 24. The material of the radiation shielding layer 24 is, for example, but not limited to, lead oxide. The radiation shielding layer 24 is used to prevent X-rays from entering the first circuit. Layer 22 adversely affects the above-mentioned N-type thin film transistor.
在射线屏蔽层24上形成第二平坦化层25,并在第二平坦化层25上形成第一电极层26,第一电极层26作为阳极层,该阳极层具有多个图案化的触电,以一对一的连接N型薄膜晶体管的源极和下述光电转换器件1。A second planarization layer 25 is formed on the radiation shielding layer 24, and a first electrode layer 26 is formed on the second planarization layer 25. The first electrode layer 26 serves as an anode layer, and the anode layer has a plurality of patterned electric shocks, The source of the N-type thin film transistor and the photoelectric conversion device 1 described below are connected in a one-to-one manner.
光电转换层27包括阵列排布的多个光电转换器件1,形成像素级的排列结构,可以根据检测精度的要求设置光电转换器件1的数量以及大小和间距等。光电转换器件1的输出极与所述第一电极层26电连接,光电转换器件1的输入极与第二电极层28电连接;第二电极层28作为阴极,可以连接至上述偏置电压,光电转换器件1例如但不限于由钙钛矿材料制备。The photoelectric conversion layer 27 includes a plurality of photoelectric conversion devices 1 arranged in an array to form a pixel-level arrangement structure. The number, size and spacing of the photoelectric conversion devices 1 can be set according to the requirements of detection accuracy. The output electrode of the photoelectric conversion device 1 is electrically connected to the first electrode layer 26, and the input electrode of the photoelectric conversion device 1 is electrically connected to the second electrode layer 28; the second electrode layer 28 serves as a cathode and can be connected to the above-mentioned bias voltage, The photoelectric conversion device 1 is made of, for example but not limited to, perovskite materials.
该射线探测器进行检测时,栅驱动IC3通过栅线GL进行逐行的扫描,光电转换器件1接收到X射线后,产生感应电势,使N型薄膜晶体管的源极电压升高,当栅极对源极的电压VGB大于阈值电压Vth时,N型薄膜晶体管导通,读取IC4通过对应的数据线DL读取N型薄膜晶体管的漏极输出的电位。根据栅线GL及数据线DL则可定位各光电转换器件1,并可以坐标的形式存储各光电转换器件1对应的检测信号。When the ray detector detects, the gate driver IC3 scans line by line through the gate line GL. After the photoelectric conversion device 1 receives the X-rays, it generates an induced potential, which increases the source voltage of the N-type thin film transistor. When the gate When the voltage V GB to the source is greater than the threshold voltage V th , the N-type thin film transistor is turned on, and the reading IC4 reads the potential output by the drain of the N-type thin film transistor through the corresponding data line DL. Each photoelectric conversion device 1 can be positioned according to the gate line GL and the data line DL, and the detection signal corresponding to each photoelectric conversion device 1 can be stored in the form of coordinates.
各条数据线DL上还分别连接有作为复位单元的第二开关元件T2。具体地,第二开关元件T2的第一极与数据线DL连接,第二开关元件T2的第二极用于接收复位信号,复位信号可以为电压信号,第二开关元件T2的控制极用于接收复位控制信号。在检测完成后,数据线DL上会残余一定的电荷,通过复位控制信号开启第二开关元件T2,以向数据线DL输入复位信号来消除数据线DL上的残余电荷,保证下次检查的准确性。与前述相似地,在一些实 施例中,所述第二开关元件T2的第二极连接用于输入复位信号的电路或电路元件,例如前述的数据线DL;所述第二开关元件T2的控制极连接用于输入复位控制信号的电路或电路元件。Each data line DL is also connected to a second switching element T2 serving as a reset unit. Specifically, the first pole of the second switching element T2 is connected to the data line DL, the second pole of the second switching element T2 is used to receive the reset signal, the reset signal can be a voltage signal, and the control pole of the second switching element T2 is used to receive the reset signal. Receive reset control signal. After the detection is completed, a certain amount of charge will remain on the data line DL. The second switching element T2 is turned on through the reset control signal to input the reset signal to the data line DL to eliminate the residual charge on the data line DL to ensure the accuracy of the next inspection. sex. Similar to the above, in some cases In the embodiment, the second pole of the second switching element T2 is connected to a circuit or circuit element for inputting the reset signal, such as the aforementioned data line DL; the control pole of the second switching element T2 is connected for inputting the reset control. Signal circuit or circuit element.
此外,在检测前或检测后,通过上述电容C维持光电转换器件1电压输出端也即节点B的基础电压稳定,即等于预设恒定电压。In addition, before or after detection, the capacitor C is used to maintain the basic voltage of the voltage output terminal of the photoelectric conversion device 1, that is, the node B, stable, that is, equal to the preset constant voltage.
封装层29可以为薄膜封装(thin film encapsulation;TFE)层,盖板30可以为玻璃盖板等。The encapsulation layer 29 may be a thin film encapsulation (TFE) layer, and the cover plate 30 may be a glass cover plate or the like.
示例1-2Example 1-2
至少参见图5所示,该射线探测器为X射线探测器,包括层叠设置的基底21、第一电路层22、第一电极层26、光电转换层27、第二电极层28、封装层29;其与上述示例1-1的主要区别在于基底21为清洁聚酰亚胺(Clean Polyimide;CPI)薄膜;第一电路层22为透明的电路层,其电路原理可以与上述示例1-1相同;第一电极层26包括第一电极图案以及第一电极图案围绕的第一透光区262;光电转换层27还包括光电转换器件1,以及相邻光电转换器件1之间的第二透光区272;第二电极层28包括第二电极图案以及第二电极图案围绕的第三透光区282;在射线探测器33的正投影中,第一透光区262、第二透光区272和第三透光区282至少部分重合,该示例中第一透光区262、第二透光区272和第三透光区282完全重合,其中用高透过率的平坦化材料填充。该示例中,基底21、第一电路层22及各透光区可以形成光通路,后续在设置显示装置的情况下,光通路可以对应于显示装置的像素421位置,以透过该射线探测器33进行显示。As shown at least in FIG. 5 , the ray detector is an X-ray detector, including a stacked substrate 21 , a first circuit layer 22 , a first electrode layer 26 , a photoelectric conversion layer 27 , a second electrode layer 28 , and an encapsulation layer 29 ; The main difference from the above example 1-1 is that the substrate 21 is a clean polyimide (CPI) film; the first circuit layer 22 is a transparent circuit layer, and its circuit principle can be the same as the above example 1-1 ; The first electrode layer 26 includes a first electrode pattern and a first light-transmitting area 262 surrounded by the first electrode pattern; the photoelectric conversion layer 27 also includes a photoelectric conversion device 1, and a second light-transmitting area between adjacent photoelectric conversion devices 1 Area 272; the second electrode layer 28 includes a second electrode pattern and a third light-transmitting area 282 surrounded by the second electrode pattern; in the orthographic projection of the radiation detector 33, the first light-transmitting area 262 and the second light-transmitting area 272 It at least partially overlaps with the third light-transmitting area 282. In this example, the first light-transmitting area 262, the second light-transmitting area 272, and the third light-transmitting area 282 completely overlap, and are filled with a high-transmittance planarizing material. In this example, the substrate 21, the first circuit layer 22 and each light-transmitting area can form a light path. When a display device is subsequently installed, the light path can correspond to the position of the pixel 421 of the display device to transmit the radiation detector. 33 is displayed.
第二方面,至少参见图6所示,本申请提供一种射线探测设备,包括上述的射线探测器33,还包括射线光源32以及显示单元31;In the second aspect, at least as shown in FIG. 6 , the present application provides a radiation detection device, including the above-mentioned radiation detector 33 , a radiation light source 32 and a display unit 31 ;
射线光源32例如用于发射X射线。The ray light source 32 is used to emit X-rays, for example.
显示单元31例如但不限于为液晶显示器(Liquid Crystal Display;LCD)显示单元31、有机发光二极管(Organic Light-Emitting Diode;OLED)显示单元31或量子点发光二极管(Quantum Dot Light Emitting Diodes;QLED)显示单元31。The display unit 31 is, for example, but not limited to, a liquid crystal display (Liquid Crystal Display; LCD) display unit 31, an organic light-emitting diode (Organic Light-Emitting Diode; OLED) display unit 31, or a quantum dot light-emitting diode (Quantum Dot Light Emitting Diodes; QLED). Display unit 31.
所述射线光源32的出光面36正对所述射线探测器33的受光面35;The light-emitting surface 36 of the ray light source 32 faces the light-receiving surface 35 of the ray detector 33;
检测时,待检测物位于射线光源32的出光面36与射线探测器33的受光 面35之间,射线光源32发出的射线从出光面36出射,穿过待检测物后进入射线探测器33的受光面35,射线探测器33的各光电转换器件1根据感应到的射线的强度(也即射线剂量),产生表征不同灰度的感应电压,以获得探测图像。During detection, the object to be detected is located between the light-emitting surface 36 of the ray light source 32 and the light-receiving surface of the ray detector 33. Between the surfaces 35, the rays emitted by the ray source 32 are emitted from the light-emitting surface 36, pass through the object to be detected, and then enter the light-receiving surface 35 of the ray detector 33. Each photoelectric conversion device 1 of the ray detector 33 responds to the intensity of the sensed rays. (i.e., radiation dose), generating induced voltages representing different grayscales to obtain detection images.
所述显示单元31用于显示所述射线探测器33的各光电转换器件1响应于射线剂量所获得的探测图像。The display unit 31 is used to display the detection image obtained by each photoelectric conversion device 1 of the radiation detector 33 in response to the radiation dose.
在本申请的一些实施例中,为了可以在探测的同时观测到所获得的探测图像,所述显示单元31包括显示面板,所述显示面板设置于所述射线探测器33背离所述受光面35的一侧。In some embodiments of the present application, in order to observe the obtained detection image while detecting, the display unit 31 includes a display panel, and the display panel is disposed on the radiation detector 33 away from the light-receiving surface 35 side.
在本申请的一些实施例中,如图7所示,在某些实现方式中,为了提高便携性、降低加工成本以及提高制作效率,射线探测器33与显示单元31可以集成在一起,即,射线探测器33与显示单元31至少部分层可以同层设置。In some embodiments of the present application, as shown in FIG. 7 , in some implementations, in order to improve portability, reduce processing costs, and improve manufacturing efficiency, the radiation detector 33 and the display unit 31 can be integrated together, that is, The radiation detector 33 and the display unit 31 may be arranged on at least part of the same layer.
具体地:所述显示单元31包括层叠设置的第二电路层52、第三电极层41、像素层42以及第四电极层43;Specifically: the display unit 31 includes a stacked second circuit layer 52, a third electrode layer 41, a pixel layer 42 and a fourth electrode layer 43;
所述第二电路层52与所述第一电路层22同层设置,即,所述第二电路层52与所述第一电路层22由同一制备工艺,采用相同的材料同层制备。所述第一电路层22包括第一电路图案区221,所述第二电路层52包括第二电路图案区222,所述第一电路图案区221与所述第二电路图案区222交替设置,所述第一电路图案区221与所述光电转换器件1一一对应,所述第二电路图案区222与所述像素层42的像素一一对应,且所述第二电路图案区222的数量大于等于所述第一电路图案区221的数量,以确保每个光电转换器件1的感应信号至少由一个像素进行显示。The second circuit layer 52 and the first circuit layer 22 are arranged in the same layer. That is, the second circuit layer 52 and the first circuit layer 22 are prepared in the same layer using the same manufacturing process and using the same material. The first circuit layer 22 includes a first circuit pattern area 221, and the second circuit layer 52 includes a second circuit pattern area 222. The first circuit pattern area 221 and the second circuit pattern area 222 are alternately arranged, The first circuit pattern area 221 corresponds to the photoelectric conversion device 1 one-to-one, the second circuit pattern area 222 corresponds to the pixels of the pixel layer 42 one-to-one, and the number of the second circuit pattern area 222 The number is greater than or equal to the first circuit pattern area 221 to ensure that the sensing signal of each photoelectric conversion device 1 is displayed by at least one pixel.
每一个第一电路图案区221对应于一个光电转换器件1,用于控制光电转换器件1检测信号的输出以及数据线DL的复位,每一个第一电路图案区221包括上述的栅线GL、数据线DL、第一开关元件T1、第二开关元件T2及电容;每一个第二电路图案区222对应于一个像素421,以控制像素421显示,第二电路图案区222可以为现有的像素电路中的任一种,例如单不限于7T1C、6T1C、6T2C、5T1C、4T1C等像素电路,这里所说的T为薄膜晶体管,C为像素电容。Each first circuit pattern area 221 corresponds to a photoelectric conversion device 1 and is used to control the output of the detection signal of the photoelectric conversion device 1 and the reset of the data line DL. Each first circuit pattern area 221 includes the above-mentioned gate lines GL, data Line DL, first switching element T1, second switching element T2 and capacitor; each second circuit pattern area 222 corresponds to a pixel 421 to control the display of the pixel 421. The second circuit pattern area 222 can be an existing pixel circuit. Any one of them, for example but not limited to 7T1C, 6T1C, 6T2C, 5T1C, 4T1C and other pixel circuits, where T is a thin film transistor and C is a pixel capacitance.
在本申请的一些实施例中,如图8所示,所述显示单元31包括层叠设置 的第二电路层52、第三电极层41、像素层42以及第四电极层43;In some embodiments of the present application, as shown in Figure 8, the display unit 31 includes a stacked arrangement The second circuit layer 52, the third electrode layer 41, the pixel layer 42 and the fourth electrode layer 43;
所述第二电路层52与所述第一电路层22同层设置,所述第一电路层22包括第一电路图案区221,所述第二电路层52包括第二电路图案区222,所述第一电路图案区221与所述第二电路图案区222交替设置,所述第一电路图案区221与所述光电转换器件1一一对应,所述第二电路图案区222与所述像素层42的像素421一一对应,且所述第二电路图案区222的数量大于等于所述第一电路图案区221的数量,以使每个光电转换器件1感应产生的电压所对应的灰度,由至少一个像素421进行显示;The second circuit layer 52 is arranged on the same layer as the first circuit layer 22, the first circuit layer 22 includes a first circuit pattern area 221, and the second circuit layer 52 includes a second circuit pattern area 222, so The first circuit pattern area 221 and the second circuit pattern area 222 are alternately arranged. The first circuit pattern area 221 corresponds to the photoelectric conversion device 1 one-to-one. The second circuit pattern area 222 corresponds to the pixel. The pixels 421 of the layer 42 correspond one to one, and the number of the second circuit pattern areas 222 is greater than or equal to the number of the first circuit pattern areas 221, so that the gray scale corresponding to the voltage induced by each photoelectric conversion device 1 , displayed by at least one pixel 421;
所述第一电极层26与所述第三电极层41同层设置,形成为阳极层261,所述第一电极层26包括第一电极图案区2612,所述第三电极层41包括第三电极图案区2611,所述第一电极图案区2612与所述第二电极图案区2611交替设置;The first electrode layer 26 and the third electrode layer 41 are arranged in the same layer to form an anode layer 261. The first electrode layer 26 includes a first electrode pattern region 2612, and the third electrode layer 41 includes a third electrode layer 2612. Electrode pattern area 2611, the first electrode pattern area 2612 and the second electrode pattern area 2611 are alternately arranged;
所述第二电极层28与所述第四电极层43为一体结构,例如为同一面电极281;The second electrode layer 28 and the fourth electrode layer 43 have an integrated structure, for example, they are electrodes 281 on the same surface;
所述第二电路层52背离所述第三电极层41的一侧,设置有射线屏蔽层24,所述射线屏蔽层24包括屏蔽图案241以及屏蔽图案241之间的射线透过区;A radiation shielding layer 24 is provided on the side of the second circuit layer 52 away from the third electrode layer 41. The radiation shielding layer 24 includes a shielding pattern 241 and a radiation-transmitting area between the shielding patterns 241;
在所述射线探测设备的正投影中,所述第二电路图案区222与所述屏蔽图案241正对,且所述第二电路图案区222位于所述屏蔽图案241内,所述光电转换器件1与所述射线透过区正对。采用此种结构,既能使射线照射到光电转换器件1,又能避免射线对第二电路图案区222内设置的薄膜晶体管造成不利影响。In the orthographic projection of the radiation detection device, the second circuit pattern area 222 is directly opposite to the shielding pattern 241, and the second circuit pattern area 222 is located within the shielding pattern 241, and the photoelectric conversion device 1 is directly opposite to the radiation transmission area. By adopting this structure, the rays can be irradiated to the photoelectric conversion device 1 and the rays can be prevented from adversely affecting the thin film transistors provided in the second circuit pattern area 222 .
在本申请的一些实施例中,如图9所示,所述显示面板包括像素层42,所述像素层42包括间隔设置的多个像素421以及相邻像素421之间的射线透过区422;In some embodiments of the present application, as shown in FIG. 9 , the display panel includes a pixel layer 42 , and the pixel layer 42 includes a plurality of pixels 421 arranged at intervals and radiation-transmitting areas 422 between adjacent pixels 421 ;
在所述射线探测设备的正投影中,所述光电转换器件1位于所述射线透过区422。In the orthographic projection of the radiation detection device, the photoelectric conversion device 1 is located in the radiation transmission area 422 .
下面以若干具体示例对该发明射线探测设备予以示例性说明。The radiation detection device of the present invention is illustrated below with several specific examples.
示例2-1Example 2-1
至少参见图6所示,该射线探测设备包括射线探测器33、射线光源32以 及显示单元31;As shown at least in Figure 6, the ray detection equipment includes a ray detector 33, a ray light source 32 and and display unit 31;
射线光源32例如用于发射X射线。The ray light source 32 is used to emit X-rays, for example.
显示单元31例如为OLED显示单元31或QLED(Quantum Dot Light Emitting Diodes)。The display unit 31 is, for example, an OLED display unit 31 or QLED (Quantum Dot Light Emitting Diodes).
所述射线光源32的出光面36正对所述射线探测器33的受光面35;The light-emitting surface 36 of the ray light source 32 faces the light-receiving surface 35 of the ray detector 33;
所述显示单元31用于显示,所述射线探测器33的各光电转换器件1响应于射线剂量获得的探测图像。The display unit 31 is used to display the detection image obtained by each photoelectric conversion device 1 of the radiation detector 33 in response to the radiation dose.
其中,射线探测器33包括层叠设置的基底21、第一电路层22、第一平坦化层23、射线屏蔽层24、第二平坦化层25、第一电极层26、光电转换层27、第二电极层28、封装层29以及盖板30。Among them, the radiation detector 33 includes a stacked substrate 21, a first circuit layer 22, a first planarization layer 23, a radiation shielding layer 24, a second planarization layer 25, a first electrode layer 26, a photoelectric conversion layer 27, a Two electrode layers 28, encapsulation layer 29 and cover plate 30.
基底21可以为PI薄膜。The substrate 21 may be a PI film.
第一电路层22包括数据线DL、栅线GL、第一开关元件T1和恒定电压输出单元2,第一开关元件T1与光电转换器件1一一对应,来控制每个光电转换器件1信号的输出。The first circuit layer 22 includes a data line DL, a gate line GL, a first switching element T1 and a constant voltage output unit 2. The first switching element T1 corresponds to the photoelectric conversion device 1 one-to-one to control the signal of each photoelectric conversion device 1. output.
数据线DL和栅线GL交叉设置,例如,栅线GL沿第一方向x延伸,数据线DL沿第二方向y延伸,第一方向x可以为行方向,第二方向y为列方向。交叉设置的数据线DL和栅线GL界定出来多个区域,每个区域具有一个光电转换器件1。The data line DL and the gate line GL are intersected. For example, the gate line GL extends along the first direction x, and the data line DL extends along the second direction y. The first direction x may be the row direction, and the second direction y may be the column direction. The intersecting data lines DL and gate lines GL define a plurality of areas, each area having a photoelectric conversion device 1 .
第一开关元件T1采用N型薄膜晶体管,N型薄膜晶体管的第一极为源极、第二极为漏极、控制极为栅极。N型薄膜晶体管的源极于下述电容C的第一极连接,漏极连接数据线DL,栅极连接栅线GL,栅线GL连接阵列基板栅极驱动(Gate Driven on Array;GOA)电路或栅驱动集成电路(Integrated Circuit;IC)3。The first switching element T1 adopts an N-type thin film transistor. The N-type thin film transistor has a first electrode, a source electrode, a second electrode, a drain electrode, and a control electrode, a gate electrode. The source of the N-type thin film transistor is connected to the first electrode of the following capacitor C, the drain is connected to the data line DL, the gate is connected to the gate line GL, and the gate line GL is connected to the gate drive (Gate Driven on Array; GOA) circuit of the array substrate Or gate drive integrated circuit (Integrated Circuit; IC)3.
恒定电压输出单元2包括电容C,所述电容C的第一极为恒定电压输出单元2的电压输出端,与N型薄膜晶体管的源极连接,电容的第二极用于连接恒压源。该恒压源例如但不限于为偏置电压。The constant voltage output unit 2 includes a capacitor C. The first pole of the capacitor C is the voltage output end of the constant voltage output unit 2 and is connected to the source of the N-type thin film transistor. The second pole of the capacitor C is used to connect to a constant voltage source. The constant voltage source is, for example but not limited to, a bias voltage.
在第一电路层22上形成第一平坦化层23以便沉积射线屏蔽层24,射线屏蔽层24的材料例如但不限于为氧化铅等,射线屏蔽层24用以阻止X射线进入到第一电路层22,对上述N型薄膜晶体管造成不利影响。A first planarization layer 23 is formed on the first circuit layer 22 to deposit a radiation shielding layer 24. The material of the radiation shielding layer 24 is, for example, but not limited to, lead oxide. The radiation shielding layer 24 is used to prevent X-rays from entering the first circuit. Layer 22 adversely affects the above-mentioned N-type thin film transistor.
在射线屏蔽层24上形成第二平坦化层25,并在第二平坦化层25上形成 第一电极层26,第一电极层26作为阳极层,该阳极层具有多个图案化的触电,以一对一的连接N型薄膜晶体管的源极和下述光电转换器件1。A second planarization layer 25 is formed on the ray shielding layer 24, and a second planarization layer 25 is formed on the second planarization layer 25. The first electrode layer 26 serves as an anode layer. The anode layer has a plurality of patterned contacts to connect the source of the N-type thin film transistor and the photoelectric conversion device 1 described below in a one-to-one manner.
光电转换层27包括阵列排布的多个光电转换器件1,形成像素级的排列结构。光电转换器件1的输出极与所述第一电极层26电连接,光电转换器件1的输入极与第二电极层28电连接;第二电极层28作为阴极,可以连接至上述偏置电压,光电转换器件1例如但不限于由钙钛矿材料制备。The photoelectric conversion layer 27 includes a plurality of photoelectric conversion devices 1 arranged in an array, forming a pixel-level arrangement structure. The output electrode of the photoelectric conversion device 1 is electrically connected to the first electrode layer 26, and the input electrode of the photoelectric conversion device 1 is electrically connected to the second electrode layer 28; the second electrode layer 28 serves as a cathode and can be connected to the above-mentioned bias voltage, The photoelectric conversion device 1 is made of, for example but not limited to, perovskite materials.
各条数据线DL上还分别连接有作为复位单元的第二开关元件T2。具体地,第二开关元件T2的第一极与数据线DL连接,第二开关元件T2的第二极用于接收复位信号,复位信号可以为电压信号,第二开关元件T2的控制极用于接收复位控制信号。在检测完成后,数据线DL上会残余一定的电荷,通过复位控制信号开启第二开关元件T2,以向数据线DL输入复位信号来消除数据线DL上的残余电荷,保证下次检查的准确性。与前述相似地,在一些实施例中,所述第二开关元件T2的第二极连接用于输入复位信号的电路或电路元件,例如前述的数据线DL;所述第二开关元件T2的控制极连接用于输入复位控制信号的电路或电路元件。Each data line DL is also connected to a second switching element T2 serving as a reset unit. Specifically, the first pole of the second switching element T2 is connected to the data line DL, the second pole of the second switching element T2 is used to receive the reset signal, the reset signal can be a voltage signal, and the control pole of the second switching element T2 is used to receive the reset signal. Receive reset control signal. After the detection is completed, a certain amount of charge will remain on the data line DL. The second switching element T2 is turned on through the reset control signal to input the reset signal to the data line DL to eliminate the residual charge on the data line DL to ensure the accuracy of the next inspection. sex. Similar to the above, in some embodiments, the second pole of the second switching element T2 is connected to a circuit or circuit element for inputting a reset signal, such as the aforementioned data line DL; the control of the second switching element T2 The pole is connected to a circuit or circuit element for inputting a reset control signal.
封装层29可以为薄膜封装层,盖板30可以为玻璃盖板30等。The encapsulation layer 29 may be a film encapsulation layer, and the cover plate 30 may be a glass cover plate 30 or the like.
示例2-2Example 2-2
至少参见图7所示,该示例与示例2-1的主要区别在于,射线探测器33与显示单元31集成在了一起,且显示单元31的第二电路层52与射线探测器33的第一电路层22同层设置,即,所述第二电路层52与所述第一电路层22由同一制备工艺,采用相同的材料同层制备,第二电路层52与第一电路层22的同层结构称之为电路层220。所述第一电路层22包括第一电路图案区221,所述第二电路层52包括第二电路图案区222,所述第一电路图案区221与所述第二电路图案区222交替设置,所述第一电路图案区221与所述光电转换器件1一一对应,所述第二电路图案区222与所述像素层42的像素421一一对应,且所述第二电路图案区222的数量大于等于所述第一电路图案区221的数量。Referring to at least FIG. 7 , the main difference between this example and Example 2-1 is that the radiation detector 33 and the display unit 31 are integrated together, and the second circuit layer 52 of the display unit 31 and the first layer of the radiation detector 33 The circuit layer 22 is arranged on the same layer, that is, the second circuit layer 52 and the first circuit layer 22 are prepared in the same layer using the same preparation process and the same material. The layer structure is called circuit layer 220. The first circuit layer 22 includes a first circuit pattern area 221, and the second circuit layer 52 includes a second circuit pattern area 222. The first circuit pattern area 221 and the second circuit pattern area 222 are alternately arranged, The first circuit pattern area 221 corresponds to the photoelectric conversion device 1 one-to-one, the second circuit pattern area 222 corresponds to the pixels 421 of the pixel layer 42 one-to-one, and the second circuit pattern area 222 has a one-to-one correspondence. The number is greater than or equal to the number of the first circuit pattern areas 221 .
具体地,射线探测器33与显示单元31的集成结构包括层叠设置的基底21(此处称之为第一基底)、第二电极层28、光电转换层27、第一电极层26、第一平坦化层23、射线屏蔽层24、第二基底40、电路层220、第二平坦化层 25、第三电极层41、像素层42、第四电极层43以及封装层29。Specifically, the integrated structure of the radiation detector 33 and the display unit 31 includes a stacked substrate 21 (herein referred to as the first substrate), a second electrode layer 28, a photoelectric conversion layer 27, a first electrode layer 26, a first Planarization layer 23, radiation shielding layer 24, second substrate 40, circuit layer 220, second planarization layer 25. The third electrode layer 41, the pixel layer 42, the fourth electrode layer 43 and the encapsulation layer 29.
基底21、第二基底40均可以为PI薄膜。Both the substrate 21 and the second substrate 40 can be PI films.
光电转换层27包括多个由钙钛矿材料制备的光电转换器件1。The photoelectric conversion layer 27 includes a plurality of photoelectric conversion devices 1 prepared from perovskite materials.
第二电极层28作为光电转换器件1的阴极,第一电极层26作为光电转换器件1的阳极。The second electrode layer 28 serves as the cathode of the photoelectric conversion device 1 , and the first electrode layer 26 serves as the anode of the photoelectric conversion device 1 .
电路层220为第二电路层52和第一电路层22的共同层,包括第一电路图案区221和第二电路图案区222。第一电路图案区221和第二电路图案区222的电路原理可参见上文介绍,这里不再赘述。The circuit layer 220 is a common layer of the second circuit layer 52 and the first circuit layer 22 , and includes a first circuit pattern area 221 and a second circuit pattern area 222 . The circuit principles of the first circuit pattern area 221 and the second circuit pattern area 222 can be referred to the above introduction, and will not be described again here.
第三电极层41作为像素层42的阳极,第四电极层43作为像素层42的阴极。The third electrode layer 41 serves as the anode of the pixel layer 42 , and the fourth electrode layer 43 serves as the cathode of the pixel layer 42 .
封装层29为薄膜封装层。The encapsulation layer 29 is a thin film encapsulation layer.
示例2-3Example 2-3
至少参见图8所示,该示例与示例2-1的主要区别在于,射线探测器33与显示单元31集成在了一起,其中,显示单元31的第二电路层52与射线探测器33的第一电路层22同层设置,第二电路层52与第一电路层22的同层结构称之为电路层220,射线探测器33的第一电极层26与显示单元31的第三电极层41同层设置,显示单元31的像素层42与射线探测器33的光电转换层27同层设置,射线探测器33的第二电极层28与显示单元31的第四电极层43同层设置。Referring to at least FIG. 8 , the main difference between this example and Example 2-1 is that the radiation detector 33 and the display unit 31 are integrated together, wherein the second circuit layer 52 of the display unit 31 and the third circuit layer of the radiation detector 33 A circuit layer 22 is arranged on the same layer. The same layer structure of the second circuit layer 52 and the first circuit layer 22 is called a circuit layer 220. The first electrode layer 26 of the radiation detector 33 and the third electrode layer 41 of the display unit 31 The pixel layer 42 of the display unit 31 and the photoelectric conversion layer 27 of the radiation detector 33 are arranged on the same layer, and the second electrode layer 28 of the radiation detector 33 and the fourth electrode layer 43 of the display unit 31 are arranged on the same layer.
具体地,射线探测器33与显示单元31的集成结构包括层叠设置的基底21(此处称之为第一基底)、射线屏蔽层24、第一平坦化层23、第二基底40、电路层220、第二平坦化层25、阳极层261、器件层、阴极层281以及封装层29。Specifically, the integrated structure of the radiation detector 33 and the display unit 31 includes a stacked substrate 21 (herein referred to as the first substrate), a radiation shielding layer 24, a first planarization layer 23, a second substrate 40, and a circuit layer. 220. The second planarization layer 25, the anode layer 261, the device layer, the cathode layer 281 and the packaging layer 29.
其中,射线屏蔽层24包括屏蔽图案241以及屏蔽图案241之间的射线透过区。The radiation shielding layer 24 includes shielding patterns 241 and radiation transmission areas between the shielding patterns 241 .
电路层220为第二电路层52和第一电路层22的共同层,包括第一电路层22的第一电路图案区221,以及第二电路层52的第二电路图案区222,所述第一电路图案区221与所述第二电路图案区222交替设置,所述第一电路图案区221与所述光电转换器件1一一对应,所述第二电路图案区222与所述像素层42的像素421一一对应,且所述第二电路图案区222的数量大于等 于所述第一电路图案区221的数量,以使每个光电转换器件1感应产生的电压所对应的灰度由至少一个像素421进行显示;The circuit layer 220 is a common layer of the second circuit layer 52 and the first circuit layer 22 and includes a first circuit pattern area 221 of the first circuit layer 22 and a second circuit pattern area 222 of the second circuit layer 52. A circuit pattern area 221 and the second circuit pattern area 222 are alternately arranged, the first circuit pattern area 221 corresponds to the photoelectric conversion device 1 one-to-one, and the second circuit pattern area 222 corresponds to the pixel layer 42 The pixels 421 correspond one to one, and the number of the second circuit pattern areas 222 is greater than or equal to The number of the first circuit pattern areas 221 is such that the gray scale corresponding to the voltage induced by each photoelectric conversion device 1 is displayed by at least one pixel 421;
阳极层261是第一电极层26与第三电极层41的共同层,包括第一电极层26的第一电极图案区2612,第三电极层41的第三电极图案区2611,所述第一电极图案区2612与所述第二电极图案区2611交替设置;The anode layer 261 is a common layer of the first electrode layer 26 and the third electrode layer 41, and includes a first electrode pattern area 2612 of the first electrode layer 26 and a third electrode pattern area 2611 of the third electrode layer 41. The first The electrode pattern areas 2612 and the second electrode pattern areas 2611 are arranged alternately;
器件层50是像素层42和光电转换层27的共同层,包括像素层42的像素421和光电转换层27的光电转换器件1。The device layer 50 is a common layer of the pixel layer 42 and the photoelectric conversion layer 27, and includes the pixels 421 of the pixel layer 42 and the photoelectric conversion device 1 of the photoelectric conversion layer 27.
阴极层281是上述第二电极层28与第四电极层43的共同层,其为一面电极;The cathode layer 281 is a common layer of the above-mentioned second electrode layer 28 and the fourth electrode layer 43, and is a one-sided electrode;
在所述射线探测设备的正投影中,所述第二电路图案区222与所述屏蔽图案241正对,且所述第二电路图案区222位于所述屏蔽图案241内,所述光电转换器件1与所述射线透过区正对。In the orthographic projection of the radiation detection device, the second circuit pattern area 222 is directly opposite to the shielding pattern 241, and the second circuit pattern area 222 is located within the shielding pattern 241, and the photoelectric conversion device 1 is directly opposite to the radiation transmission area.
示例2-4Example 2-4
至少参见图9所示,该示例中射线探测器33设置在显示单元31的封装层29上。Referring to at least FIG. 9 , in this example the radiation detector 33 is disposed on the packaging layer 29 of the display unit 31 .
具体地,包括层叠设置的第二基底40、第二电路层44、第三电极层41、像素层42、第四电极层43、封装层29、基底21(此处称之为第一基底)、第一电路层22、第一电极层26、光电转换层27、第二电极层28。Specifically, it includes a stacked second substrate 40, a second circuit layer 44, a third electrode layer 41, a pixel layer 42, a fourth electrode layer 43, an encapsulation layer 29, and a substrate 21 (herein referred to as the first substrate) , the first circuit layer 22, the first electrode layer 26, the photoelectric conversion layer 27, and the second electrode layer 28.
其中,像素层42包括间隔设置的多个像素421及相邻像素421之间的射线透过区422;The pixel layer 42 includes a plurality of pixels 421 arranged at intervals and radiation transmission areas 422 between adjacent pixels 421;
光电转换层27包括间隔设置的光电转换器件1;The photoelectric conversion layer 27 includes photoelectric conversion devices 1 arranged at intervals;
在射线探测设备的正投影中,光电转换器件1位于射线透过区422。In the orthographic projection of the radiation detection device, the photoelectric conversion device 1 is located in the radiation transmission area 422.
需要理解的是,上文如有涉及术语“中心”、“纵向”、“横向”、“上”、“下”、“前”、“后”、“左”、“右”、“竖直”、“水平”、“顶”、“底”、“内”、“外”等指示的方位或位置关系为基于附图所示的方位或位置关系,仅是为了便于描述本申请技术方案和简化描述,而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作,因此不能理解为对本申请技术方案的限制。此外,术语“第一”、“第二”仅用于描述目的,而不能理解为指示或暗示相对重要性或者隐含指明所指示的技术特征的数量。由此,限定有“第一”、“第二”的特征可以明示或者隐含地包括一个 或者更多个该特征。在本实用新型的描述中,除非另有说明,“多个”的含义是两个或两个以上。It should be understood that if the terms "center", "vertical", "horizontal", "upper", "lower", "front", "back", "left", "right" and "vertical" are involved in the above ", "horizontal", "top", "bottom", "inside", "outside", etc. indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the technical solutions of the present application and The simplified description does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the technical solution of the present application. In addition, the terms “first” and “second” are used for descriptive purposes only and cannot be understood as indicating or implying relative importance or implicitly indicating the quantity of indicated technical features. Therefore, the characteristics defined as "first" and "second" may explicitly or implicitly include a or more of this feature. In the description of the present invention, unless otherwise stated, the meaning of "plurality" is two or more.
以上描述仅为本申请的实施例以及对所运用技术原理的说明。本领域技术人员应当理解,本申请中所涉及的发明范围,并不限于上述技术特征的特定组合而成的技术方案,同时也应涵盖在不脱离发明构思的情况下,由上述技术特征或其等同特征进行任意组合而形成的其它技术方案。例如上述特征与本申请中公开的(但不限于)具有类似功能的技术特征进行互相替换而形成的技术方案。 The above description is only an illustration of the embodiments of the present application and the applied technical principles. Persons skilled in the art should understand that the scope of the invention involved in this application is not limited to technical solutions formed by a specific combination of the above technical features, but should also cover any combination of the above technical features or other technical solutions without departing from the concept of the invention. Other technical solutions formed by any combination of equivalent features. For example, a technical solution is formed by replacing the above features with technical features with similar functions disclosed in this application (but not limited to).

Claims (13)

  1. 一种射线探测器,其特征在于,包括层叠设置的第一电路层、第一电极层、光电转换层以及第二电极层;A radiation detector, characterized in that it includes a stacked first circuit layer, a first electrode layer, a photoelectric conversion layer and a second electrode layer;
    所述光电转换层包括阵列排布的多个光电转换器件,所述光电转换器件的输出极与所述第一电极层电连接,所述光电转换器件的输入极与所述第二电极层电连接;The photoelectric conversion layer includes a plurality of photoelectric conversion devices arranged in an array, the output pole of the photoelectric conversion device is electrically connected to the first electrode layer, and the input pole of the photoelectric conversion device is electrically connected to the second electrode layer. connect;
    所述第一电路层包括数据线、栅线、第一开关元件和恒定电压输出单元,所述第一开关元件与所述光电转换器件一一对应,且所述第一开关元件的第一极与所述恒定电压输出单元的电压输出端以及所述光电转换器件的输出极电连接,所述第一开关元件的第二极与所述数据线电连接,所述第一开关元件的控制极与所述栅线电连接;The first circuit layer includes a data line, a gate line, a first switching element and a constant voltage output unit. The first switching element corresponds to the photoelectric conversion device one-to-one, and the first pole of the first switching element The voltage output end of the constant voltage output unit and the output pole of the photoelectric conversion device are electrically connected. The second pole of the first switching element is electrically connected to the data line. The control pole of the first switching element electrically connected to the gate line;
    所述恒定电压输出单元用于在所述光电转换器件感测射线前或感测射线后,通过所述电压输出端向所述光电转换器件的输出极输入预设恒定电压。The constant voltage output unit is configured to input a preset constant voltage to the output pole of the photoelectric conversion device through the voltage output end before or after the photoelectric conversion device senses the ray.
  2. 根据权利要求1所述的射线探测器,其中,所述恒定电压输出单元包括电容,所述电容的第一极为所述电压输出端,所述电容的第二极用于连接恒压源。The radiation detector according to claim 1, wherein the constant voltage output unit includes a capacitor, a first pole of the capacitor is the voltage output terminal, and a second pole of the capacitor is used to connect a constant voltage source.
  3. 根据权利要求1或2所述的射线探测器,其中,所述射线探测器还包括复位单元,所述复位单元的复位端与所述数据线连接,用于在所述光电转换器件的感测信号经数据线被读取后,对所述数据线进行复位。The radiation detector according to claim 1 or 2, wherein the radiation detector further includes a reset unit, the reset end of the reset unit is connected to the data line, and is used for sensing of the photoelectric conversion device. After the signal is read through the data line, the data line is reset.
  4. 根据权利要求3所述的射线探测器,其中,所述复位单元包括第二开关元件,所述第二开关元件的第一极与所述数据线连接,所述第二开关元件的第二极用于接收复位信号,所述第二开关元件的控制极用于接收复位控制信号,所述第二开关元件的第一极为所述复位端。The radiation detector according to claim 3, wherein the reset unit includes a second switching element, a first pole of the second switching element is connected to the data line, and a second pole of the second switching element The control pole of the second switching element is used for receiving the reset signal. The first pole of the second switching element is the reset terminal.
  5. 根据权利要求1或2所述的射线探测器,其中,所述第一电路层与所述第一电极层之间设置有射线屏蔽层。The radiation detector according to claim 1 or 2, wherein a radiation shielding layer is provided between the first circuit layer and the first electrode layer.
  6. 根据权利要求1或2所述的射线探测器,其中,所述第一电极层包括第一电极图案以及所述第一电极图案围绕的第一透光区,所述光电转换 层还包括相邻所述光电转换器件之间的第二透光区,所述第二电极层包括第二电极图案以及所述第二电极图案围绕的第三透光区;The radiation detector according to claim 1 or 2, wherein the first electrode layer includes a first electrode pattern and a first light-transmitting area surrounded by the first electrode pattern, and the photoelectric conversion The layer further includes a second light-transmitting area between adjacent photoelectric conversion devices, the second electrode layer includes a second electrode pattern and a third light-transmitting area surrounded by the second electrode pattern;
    在所述射线探测器的正投影中,所述第一透光区、所述第二透光区和所述第三透光区至少部分重合。In the orthographic projection of the radiation detector, the first light-transmitting area, the second light-transmitting area and the third light-transmitting area at least partially overlap.
  7. 根据权利要求1所述的射线探测器,其中,所述数据线和所述栅线交叉设置,交叉设置的数据线和栅线界定出来多个区域,每个区域具有一个光电转换器件。The radiation detector according to claim 1, wherein the data lines and the grid lines are intersected, and the intersecting data lines and the grid lines define a plurality of areas, each area having a photoelectric conversion device.
  8. 一种射线探测设备,其特征在于,包括权利要求1-7任一项所述的射线探测器,还包括射线光源以及显示单元;A radiation detection device, characterized in that it includes the radiation detector according to any one of claims 1 to 7, and further includes a radiation light source and a display unit;
    所述射线光源的出光面正对所述射线探测器的受光面;The light-emitting surface of the ray light source faces the light-receiving surface of the ray detector;
    所述显示单元用于显示所述射线探测器的各光电转换器件响应于射线剂量所获得的探测图像。The display unit is used to display detection images obtained by each photoelectric conversion device of the radiation detector in response to radiation dose.
  9. 根据权利要求8所述的射线探测设备,其中,所述显示单元包括显示面板,所述显示面板设置于所述射线探测器背离所述受光面的一侧。The radiation detection device according to claim 8, wherein the display unit includes a display panel, and the display panel is disposed on a side of the radiation detector away from the light-receiving surface.
  10. 根据权利要求9所述的射线探测设备,其特征在于,所述显示单元包括层叠设置的第二电路层、第三电极层、像素层以及第四电极层;The radiation detection device according to claim 9, wherein the display unit includes a stacked second circuit layer, a third electrode layer, a pixel layer and a fourth electrode layer;
    所述第二电路层与所述第一电路层同层设置,所述第一电路层包括第一电路图案区,所述第二电路层包括第二电路图案区,所述第一电路图案区与所述第二电路图案区交替设置,所述第一电路图案区与所述光电转换器件一一对应,所述第二电路图案区与所述像素层的像素一一对应,且所述第二电路图案区的数量大于等于所述第一电路图案区的数量。The second circuit layer and the first circuit layer are arranged on the same layer. The first circuit layer includes a first circuit pattern area. The second circuit layer includes a second circuit pattern area. The first circuit pattern area Arranged alternately with the second circuit pattern areas, the first circuit pattern areas correspond to the photoelectric conversion device in a one-to-one correspondence, the second circuit pattern areas correspond to the pixels of the pixel layer in a one-to-one correspondence, and the The number of the second circuit pattern areas is greater than or equal to the number of the first circuit pattern areas.
  11. 根据权利要求10所述的射线探测设备,其特征在于,每一个所述第一电路图案区包括所述栅线、所述数据线、所述第一开关元件、第二开关元件及电容。The radiation detection device according to claim 10, wherein each of the first circuit pattern areas includes the gate line, the data line, the first switching element, the second switching element and a capacitor.
  12. 根据权利要求8所述的射线探测设备,其中,所述显示单元包括层叠设置的第二电路层、第三电极层、像素层以及第四电极层;The radiation detection device according to claim 8, wherein the display unit includes a stacked second circuit layer, a third electrode layer, a pixel layer and a fourth electrode layer;
    所述第二电路层与所述第一电路层同层设置,所述第一电路层包括第 一电路图案区,所述第二电路层包括第二电路图案区,所述第一电路图案区与所述第二电路图案区交替设置,所述第一电路图案区与所述光电转换器件一一对应,所述第二电路图案区与所述像素层的像素一一对应,且所述第二电路图案区的数量大于等于所述第一电路图案区的数量;The second circuit layer is arranged on the same layer as the first circuit layer, and the first circuit layer includes a a circuit pattern area, the second circuit layer includes a second circuit pattern area, the first circuit pattern area and the second circuit pattern area are alternately arranged, the first circuit pattern area and the photoelectric conversion device are There is a one-to-one correspondence between the second circuit pattern areas and the pixels of the pixel layer, and the number of the second circuit pattern areas is greater than or equal to the number of the first circuit pattern areas;
    所述第一电极层与所述第三电极层同层设置,所述第一电极层包括第一电极图案区,所述第三电极层包括第三电极图案区,所述第一电极图案区与所述第二电极图案区交替设置;The first electrode layer and the third electrode layer are arranged in the same layer. The first electrode layer includes a first electrode pattern area. The third electrode layer includes a third electrode pattern area. The first electrode pattern area Arranged alternately with the second electrode pattern areas;
    所述第二电极层与所述第四电极层为一体结构;The second electrode layer and the fourth electrode layer have an integrated structure;
    所述第二电路层背离所述第三电极层的一侧,设置有射线屏蔽层,所述射线屏蔽层包括屏蔽图案以及屏蔽图案之间的射线透过区;A radiation shielding layer is provided on the side of the second circuit layer facing away from the third electrode layer. The radiation shielding layer includes a shielding pattern and a radiation transmission area between the shielding patterns;
    在所述射线探测设备的正投影中,所述第二电路图案区与所述屏蔽图案正对,且所述第二电路图案区位于所述屏蔽图案内,所述光电转换器件与所述射线透过区正对。In the orthographic projection of the radiation detection device, the second circuit pattern area is directly opposite to the shielding pattern, and the second circuit pattern area is located within the shielding pattern, and the photoelectric conversion device is in contact with the ray Directly opposite the through area.
  13. 根据权利要求9所述的射线探测设备,其中,所述显示面板包括像素层,所述像素层包括间隔设置的多个像素以及相邻像素之间的射线透过区;The radiation detection device according to claim 9, wherein the display panel includes a pixel layer, the pixel layer includes a plurality of pixels arranged at intervals and radiation transmission areas between adjacent pixels;
    在所述射线探测设备的正投影中,所述光电转换器件位于所述射线透过区。 In the orthographic projection of the radiation detection device, the photoelectric conversion device is located in the radiation transmission area.
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