WO2023232626A1 - Module et procédé de génération d'un signal de sortie hyperfréquence pulsé - Google Patents

Module et procédé de génération d'un signal de sortie hyperfréquence pulsé Download PDF

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Publication number
WO2023232626A1
WO2023232626A1 PCT/EP2023/064036 EP2023064036W WO2023232626A1 WO 2023232626 A1 WO2023232626 A1 WO 2023232626A1 EP 2023064036 W EP2023064036 W EP 2023064036W WO 2023232626 A1 WO2023232626 A1 WO 2023232626A1
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WO
WIPO (PCT)
Prior art keywords
signal
microwave
input
output
microwave signal
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Application number
PCT/EP2023/064036
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German (de)
English (en)
Inventor
Johannes SCHLUNDT
Original Assignee
TRUMPF Hüttinger GmbH + Co. KG
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Publication of WO2023232626A1 publication Critical patent/WO2023232626A1/fr

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32192—Microwave generated discharge
    • H01J37/32211—Means for coupling power to the plasma
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32192—Microwave generated discharge
    • H01J37/32201—Generating means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32192—Microwave generated discharge
    • H01J37/32311—Circuits specially adapted for controlling the microwave discharge

Definitions

  • the invention relates to a module for generating a pulsed microwave output signal and for driving a microwave solid-state power amplifier module, a microwave solid-state power amplifier and a microwave solid-state power generator.
  • the invention further includes a method for generating pulsed microwave signals of different amplitudes.
  • components such as: B. transistors formed on a semiconductor substrate.
  • different materials are deposited or etched onto different layers to produce the desired integrated circuit.
  • charge can accumulate on the surface of the substrate, which can negatively affect the plasma process.
  • high-frequency power can be supplied to the plasma process in a pulsed manner. This is just one example among many other examples of the need for pulsed plasma.
  • Non-equilibrium plasma or “non-thermal plasma” or “cold plasma” and all processes where such a plasma is used.
  • These plasma forms are characterized by the fact that the electrons can follow the field, while the ionized atomic nuclei cannot follow the rapid field changes. The plasma remains 'cold'.
  • One requirement is that the pulses are shorter in time than the time constant of the recombination of the ions with the electrons. This time constant depends on many influencing variables such as pressure, temperature or the type of element of the ionized atoms themselves.
  • the object of the present invention is to provide a module with which fast multi-stage pulsing with very short pulse durations is possible.
  • a module for generating a pulsed microwave output signal and for controlling a microwave solid-state power amplifier module with a.
  • An input element which has a microwave signal input and at least a first and a second microwave signal output, b.
  • An output element which has at least a first and a second microwave signal input and a microwave signal output, c.
  • a second signal path between the second microwave signal output of the input element and the second microwave signal input of the output element e.
  • An attenuator provided in the second signal path, wherein i.
  • the input element has a control signal input and is configured to connect its microwave signal input to its first or second microwave signal output depending on a pulse signal arriving at the control signal input and/or ii.
  • the output element has a control signal input and is configured to connect its first microwave signal input or its second microwave signal input to its microwave signal output depending on a pulse signal arriving at the control signal input.
  • An attenuator is to be understood as an electrical component that is able and set up to reduce an electrical signal by a predetermined value, for example to reduce a voltage, a current, and/or a power by a factor. It can be a resistor, a voltage divider, an active circuit or a single component. It can be a component that can be adjusted manually or via an electrical signal.
  • a microwave signal here means a signal with a frequency of 300 MHz to 20 GHz.
  • a microwave output signal here means a microwave signal at an output.
  • pulsed microwave signal here is meant a microwave signal that is pulsed.
  • the pulses can be very short. “Very short” here means pulses in the range from 10 ns to 500 ns.
  • the pulses can in particular be in the range from 10 ns to 40 ns, preferably in the range from 15 ns to 30 ns. The pulses are therefore shorter in time than most time constant of recombination of the ions with the electrons.
  • a pulse can have a rise time and/or fall time of ⁇ 10 ns. This means that the pulses have a sufficiently strong intensity that is necessary to generate the plasma.
  • the pulses can in particular be multi-stage, i.e. pulse between at least two power values, of which at least one value is not equal to zero, in particular both being not equal to zero. This will be described further below.
  • Pulsed microwave output signal here means a pulsed microwave signal at an output.
  • a microwave solid-state power amplifier module is an electronic amplifier that is suitable for amplifying a low-power microwave signal into a higher-power microwave signal. It has a solid state as a reinforcing element, in particular a semiconductor solid, for example a transistor.
  • the transistor can be, for example, a HEMT, a MOSFET or LDMOS transistor or a transistor based on GaN or SiC.
  • This terminology sets microwave technology apart from conventional non-solid-state amplifier types, e.g. tube and/or magnetron amplifiers, which are significantly less precise in terms of power and frequency and are subject to high levels of wear.
  • Such microwave solid-state power amplifiers are described, for example, in US 9,595,930 B2 or US 11,222,770 B2 as 'solid-state microwave power amplifier' or 'solid-state microwave power generator'.
  • the microwave signal arriving at the input element can be pulsed depending on the pulse signal.
  • the microwave signal can be transmitted to the output element with a first, for example undamped, amplitude via the first signal path.
  • the microwave signal with a different/second amplitude can be transmitted to the output element via the second signal path.
  • Switching between the at least two paths can be performed by the input and output elements, controlled by the pulse signal.
  • a pulse function can thus be implemented.
  • the at least two different path attenuations can create at least two amplitude levels.
  • the pulse signal can be generated, for example, by a microcontroller that has a high-resolution timer and thus enables the generation of very short pulses.
  • 'timer' here is meant a circuit component that generates a time signal, for example a time cycle with a predetermined Frequency, outputs.
  • the timer can be configured as a PWM timer, so that no software intervention is necessary to generate regular and/or periodic pulses.
  • the signal lines from a pulse signal generator to the input member and to the output member can have the same length.
  • Both the input member and the output member can be constructed in many different ways. They are designed to be able to switch the microwave signals from one signal path to the other signal path at the pulse frequency speed. They each preferably have two transistors, in particular two MOSFETs. The control signal input of the input element and/or the output element is preferably connected to at least one of these transistors at its control input, for example at the gate or at the base.
  • the input member and the output member can have the same design, in particular an identical one.
  • Both the input and the output element can be designed as a so-called “single-pole, double-throw (SPDT) switch”.
  • the input element and/or the output element can be designed as, in particular, a reflection-free high-frequency switching unit. It may be sufficient if the input element or the output element is designed as a high-frequency switching unit.
  • the other link can be designed, for example, as a signal switch.
  • signal switch here is meant a circuit component that is set up to connect a signal from an input connection to either a first or a second output connection or to establish a connection from an output connection to either a first or a second input connection.
  • the high-frequency switching unit can have additional connections, e.g.
  • the attenuation element can be adjustable, for example designed as an adjustable resistance.
  • the attenuator can be designed as an analog attenuator. However, there are particular advantages if it is designed as a digital attenuator.
  • An analog attenuator is understood to mean an attenuator that can be continuously adjusted in a range, preferably via an analog control signal.
  • a digital attenuator is understood to mean an attenuator that can be adjusted between several discrete attenuation values, preferably via a digital control.
  • the second signal path can have a second input element with a microwave signal input and a first and a second microwave signal output as well as a mode signal input and can be configured to connect its first microwave signal input to its first or second microwave signal output depending on a mode signal arriving at the mode signal input. The mode signal can therefore be used to select whether the pulsed microwave signal received by the first input element is routed to the first or second microwave signal output of the second input element.
  • the module can be set up so that the microwave signal is only pulsed at the output and not necessarily at the attenuator(s). This can be the case, for example, if there is only one divider at the input.
  • the second signal path can have a second output element with two microwave signal inputs and a microwave signal output as well as a mode signal input and can be configured to connect its first microwave signal input or its second microwave signal input to its microwave signal output depending on a mode signal arriving at the mode signal input.
  • the mode signal can therefore be used to select which of the microwave signal inputs is connected to the microwave signal output.
  • the attenuator can be arranged between one of the microwave signal outputs of the second input element and one of the microwave signal inputs of the second output element.
  • the second signal path has: a. A second input member having a microwave signal input and at least first and second microwave signal outputs, b. A second output element, which has at least a first and a second microwave signal input and a microwave signal output, c. A third signal path between the first microwave signal output of the second input element and the first microwave signal input of the second output element, i.e. A fourth signal path between the second microwave signal output of the second input element and the first microwave signal input of the second output element, e. Wherein the attenuator is provided in the third signal path, and where i.
  • the second input element has a mode signal input and is configured to connect its microwave signal input to its first or second microwave signal output depending on a mode signal arriving at the mode signal input and / or ii.
  • the second output element has a mode signal input and is configured to connect its first microwave signal input or its second microwave signal input to its microwave signal output depending on a mode signal arriving at the mode signal input.
  • One of the microwave signal outputs of the second input element and one of the microwave signal inputs of the second output element can be connected to a terminating circuit. This allows reflections at the input and output elements to be prevented.
  • the terminating circuit can have a resistor and, if necessary, an additional capacitor in series. The capacitor serves to block direct current components.
  • the second input element and/or the second output element can be designed as a high-frequency switching unit. Multi-stage pulsing of a microwave signal can thus be achieved.
  • the scope of the invention also includes a microwave solid-state power amplifier (MW-SSPA) with a module according to the invention, with a microwave solid-state power amplifier module being connected downstream of the module.
  • MW-SSPA microwave solid-state power amplifier
  • a microwave solid-state power amplifier module is also called a microwave solid-state power amplifier module and abbreviated as MW-SSPA module.
  • a splitter may be provided between the module and the microwave solid-state power amplifier module. Following the splitter, several amplifier paths can be provided, each with at least one microwave solid-state power amplifier module, which are brought together again by a combiner at the power output.
  • the invention further includes a microwave solid state power generator.
  • a module according to the invention can be preceded by a microwave small signal generator, also called a synthesizer.
  • the term microwave small signal generator here refers to a microwave signal generator that can deliver an output power of less than or equal to 2 W.
  • a splitter can be provided between the microwave small signal generator and the module.
  • the signal generated by the microwave small signal generator can therefore be delivered to several modules.
  • the invention relates to a method for generating pulsed microwave signals of different amplitudes with the method steps: a. Generating a microwave signal, b. supplying the microwave signal to a module with a first and a second signal path of different attenuation, c. Generating a pulse signal, i.e. Transmitting the microwave signal via the first or second signal path depending on the pulse signal to an output of the module.
  • a mode signal can be generated and the microwave signal can be transmitted via the second signal path or passed into a terminating circuit depending on the mode signal.
  • the mode signal can therefore be used to select whether a pulsed high-frequency signal is transmitted and, if so, at what power level.
  • the pulse signal can be generated with a pulse length of a maximum of 1 ps, in particular in the range from 10 ns to 100 ns, preferably in the range from 15 ns to 50 ns, and in particular in the range of 30 ns.
  • the pulse signal can be generated with a rise time and/or fall time of the pulses of ⁇ 10 ns.
  • the pulse length of the pulse signal can be set with a step size of ⁇ 1 ns. This means that there are a variety of fine adjustment options for pulse width modulation.
  • Fig. 1 shows a first embodiment of a module
  • Fig. 3 shows a second embodiment of a module
  • FIG. 4 shows a first embodiment of a microwave solid-state power amplifier
  • FIG. 6 shows a second embodiment of a solid-state microwave power amplifier
  • FIG. 7 shows a first embodiment of a microwave solid-state power generator
  • FIG. 8 shows a second embodiment of a microwave solid-state power generator
  • Fig. 9 shows an amplifier arrangement.
  • FIG. 1 shows a module 10 for generating a pulsed microwave output signal and for driving a microwave solid-state power amplifier.
  • the module 10 has an input element S1 with a microwave signal input 12 and a first and a second microwave signal output 14, 16. Furthermore, the module 10 has an output element S2 with a first and a second microwave signal input 18, 20 and a microwave signal output 22.
  • a first signal path 24 is provided between the first microwave signal output 14 of the input element S1 and the first microwave signal input 18 of the output element S2.
  • a second signal path 26 is provided between the second microwave signal output 16 of the input element S1 and the second microwave signal output 18 of the output element S2.
  • An adjustable attenuator 28 is provided in the second signal path 26.
  • the input element S1 and the output element S2 each have a control signal input 30, 32.
  • the input element S1 is configured to connect its microwave signal input 12 to its first or second microwave signal output 14, 16 depending on a pulse signal arriving at the control signal input 30.
  • the output element S2 is configured to connect its first microwave signal input 18 or its second microwave signal input 20 to its microwave signal output 22 depending on the pulse signal arriving at the control signal input 32.
  • the input element is S1 and the output element is S2 each designed as a high-frequency switching unit.
  • the input element S1 or the output element S2 is designed as a divider.
  • a microwave signal which can come from a small microwave signal generator, is supplied to the first microwave signal input 12.
  • a pulsed microwave signal is output at the microwave signal output 22, the amplitude of the pulsed microwave signal depending on whether the microwave signal runs via the first signal path 24 or the second signal path 26.
  • Serial capacitors 33, 34, 35, 36, 37, 38 at the inputs and outputs of the input and/or output elements serve to separate direct current components, which can be coupled in in particular by the controlled input and/or output elements. These capacitors 33, 34, 35, 36, 37, 38 are necessary or optional depending on the switch used.
  • Figure 2 shows a pulse signal 40, which can be present at the control signal inputs 30, 32.
  • the pulse length of the pulses is typically a maximum of 1 ps, in particular in the range from 10 ns to 100 ns, preferably in the range from 15 ns to 50 ns, and in particular in the range from 30 ns.
  • the pulses have a rise time and/or fall time of ⁇ 10 ns.
  • the pulse length of the pulses of the pulse signal 40 can be set with a step size of ⁇ 1 ns.
  • a two-stage pulsed microwave signal 42 can be seen in FIG 40 corresponds.
  • the amplitude of the microwave signal 46 in the area 44 can be adjusted by the attenuator 28. It is conceivable to also provide an adjustable attenuator in the signal path 24. Then the amplitude of the microwave signal 42 can also be adjusted in the area 46.
  • the attenuators of the first and second signal paths 24, 26 preferably have different values or attenuation properties, so that a pulsed microwave signal can be generated which has different amplitudes.
  • FIG. 3 shows an embodiment of a module 10.1, with elements that correspond to those in Figure 1 having the same reference numbers.
  • the second signal path 26 has a second input element S3 and a second output element S4.
  • the second input element S3 has a microwave signal input 50 and a first and second microwave signal output 52, 54.
  • the second output element S4 has a first microwave signal input 56 and a second microwave signal input 58.
  • the second output element S4 has a microwave signal output 60.
  • the second input element S3 has a mode signal input 62 and the second output element S4 has a mode signal input 64.
  • the first microwave signal output 52 is connected to the first microwave signal input 56 of the second output element S4 via a third signal path 66, which is part of the second signal path 26 and which contains the attenuation element 28.
  • the second microwave signal output 54 is connected to a termination circuit 68.
  • the second microwave signal input 58 is connected to a termination circuit 70.
  • the terminating circuits 68, 70 each have a resistor 72, 74 and an optional capacitor 76, 78 in series therewith.
  • the second input element S3 is configured to connect the first microwave signal input 50 to the first microwave signal output 52 or the second microwave signal output 54 depending on a mode signal which is received at the mode signal input 62.
  • the second output element S4 is configured to connect the first microwave signal input 56 or the second microwave signal input 58 to the microwave signal output 60 depending on the mode signal arriving at the mode signal input 64.
  • the signal arriving at the microwave signal input 50 is transferred to the output element S2 via the third signal path 66 and the second output element 64 or fed into the terminating circuit 68.
  • FIG. 4 shows a microwave solid state power amplifier (Microwave Solid State Power Amplifier MW-SSPA) 100, which has a module 10, 10.1 according to Figures 1 or 3.
  • the module 10, 10.1 is followed by a splitter 102, which divides the pulsed microwave signal from the module 10, 10.1 into three amplifier paths 104, 106, 108 in the exemplary embodiment shown.
  • Each amplifier path 104, 106, 108 includes a solid state microwave power amplifier module 110, 112, 114.
  • the signals amplified in the amplifier paths 104, 106, 108 are combined again in a combiner 116, so that an amplified pulsed microwave signal is output at the output 118.
  • Figure 5 shows the use of a module 10, 10.1 to control an amplifier arrangement 120.
  • the amplifier arrangement 120 has a splitter 122, which outputs the output signal of the module
  • 10. 10.1 in the exemplary embodiment shown is divided into three amplifier paths for 124, 126, 128, each of the amplifier paths 124, 126, 128 having a microwave solid-state power amplifier module 130, 132, 134.
  • the signals from the amplifier paths 124, 126, 128 are combined in a combiner 136 so that an amplified pulsed microwave signal is output at the output 138.
  • Figure 6 shows an alternative embodiment of a microwave solid-state power amplifier
  • the amplifier paths 104, 106, 108 are arranged in the amplifier paths 104, 106, 108 and thus between the splitter 102 and the microwave solid-state power amplifier modules 110, 112, 114.
  • the signals from the amplifier paths 104, 106, 108 are in turn fed to the combiner 116, so that an amplified pulsed microwave signal is at the output 118 can be issued.
  • FIG. 7 shows a microwave solid state power generator (Microwave Solid State Power Generator, MW-SSPG) 200. This has the microwave solid state power amplifier 100, which is preceded by a microwave small signal generator 202.
  • MW-SSPG Microwave Solid State Power Generator
  • Figure 8 shows an alternative embodiment of a microwave solid-state power generator
  • microwave small signal generator 202 which has a microwave solid-state power amplifier 100.1, which is preceded by a microwave small signal generator 202.
  • the microwave small signal generator 202 is arranged directly on the splitter 102 or integrated into it.
  • a microwave small signal generator 202 including splitter 102 and modules 10, 10.1 connected to it can be connected upstream of an amplifier arrangement 300, which has microwave solid-state power amplifier modules 110, 112, 114 and a combiner 116.
  • a PWM module may be arranged and connected between the microwave small signal generator 202 and the microwave solid-state amplifier modules 110, 112, 114.

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Amplifiers (AREA)

Abstract

L'invention concerne un module (10, 10.1) de génération d'un signal de sortie hyperfréquence pulsé et de commande d'un module amplificateur de puissance tout-solide hyperfréquence (110, 112, 114, 124, 126, 128). Ledit module comprend : a. un élément d'entrée (S1), qui présente une entrée de signal hyperfréquence (12) et au moins une première et une seconde sortie de signal hyperfréquence (14, 16) ; b. un élément de sortie (S2), qui a au moins une première et une seconde entrée de signal hyperfréquence (18, 20) et une sortie de signal hyperfréquence (22) ; c. un premier trajet de signal (24) entre la première sortie de signal hyperfréquence (16) de l'élément d'entrée (S1) et la première entrée de signal hyperfréquence (20) de l'élément de sortie (S2) ; d. un second trajet de signal (26) entre la seconde sortie de signal hyperfréquence (16) de l'élément d'entrée (S1) et la seconde entrée de signal hyperfréquence (20) de l'élément de sortie (S2) ; e. un élément d'amortissement (18) disposé dans le second trajet de signal (26). Dans la présente invention : i. l'élément d'entrée (S1) présente une entrée de signal de commande (30) et est conçu pour connecter son entrée de signal hyperfréquence (12) à sa première ou seconde sortie de signal hyperfréquence (14, 16) en fonction d'un signal pulsé (40) arrivant à l'entrée de signal de commande (30), et/ou ii. l'élément de sortie (S2) présente une entrée de signal de commande (32) et est conçu pour connecter sa première entrée de signal hyperfréquence (18) ou sa seconde entrée de signal hyperfréquence (20) à sa sortie de signal hyperfréquence (22) en fonction d'un signal pulsé (40) arrivant à l'entrée de signal de commande (32).
PCT/EP2023/064036 2022-05-30 2023-05-25 Module et procédé de génération d'un signal de sortie hyperfréquence pulsé WO2023232626A1 (fr)

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DE102022113502.0A DE102022113502A1 (de) 2022-05-30 2022-05-30 Modul und Verfahren zur Erzeugung eines gepulsten Mikrowellenausgangssignals
DE102022113502.0 2022-05-30

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WO2023232626A1 true WO2023232626A1 (fr) 2023-12-07

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DE102022113621A1 (de) 2022-05-30 2023-11-30 TRUMPF Hüttinger GmbH + Co. KG Taktsignalgenerator zur Erzeugung eines Referenzsignals und eines Taktsignals, System mit einem solchen und Verfahren zum Synchronisieren mehrerer Teilnehmer eines Systems

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US5793253A (en) * 1995-04-28 1998-08-11 Unisys Corporation High power solid state microwave transmitter
US9595930B2 (en) 2015-06-05 2017-03-14 Mks Instruments, Inc. Solid state microwave generator and power amplifier
CN109787587A (zh) * 2018-12-27 2019-05-21 西北核技术研究所 一种灵巧型微波组合脉冲产生器
US20190341228A1 (en) * 2018-05-01 2019-11-07 Tokyo Electron Limited Microwave output device and plasma processing apparatus
US11222770B2 (en) 2017-03-16 2022-01-11 Mks Instruments, Inc. Microwave applicator with solid-state generator power source

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CN104852707B (zh) 2015-04-23 2017-11-10 中国电子科技集团公司第四十一研究所 微放电效应检测顶底电平可调的脉冲基带发生装置与方法
CN207124615U (zh) 2017-09-12 2018-03-20 成都华兴汇明科技有限公司 一种PXIe宽带脉冲调制器

Patent Citations (5)

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Publication number Priority date Publication date Assignee Title
US5793253A (en) * 1995-04-28 1998-08-11 Unisys Corporation High power solid state microwave transmitter
US9595930B2 (en) 2015-06-05 2017-03-14 Mks Instruments, Inc. Solid state microwave generator and power amplifier
US11222770B2 (en) 2017-03-16 2022-01-11 Mks Instruments, Inc. Microwave applicator with solid-state generator power source
US20190341228A1 (en) * 2018-05-01 2019-11-07 Tokyo Electron Limited Microwave output device and plasma processing apparatus
CN109787587A (zh) * 2018-12-27 2019-05-21 西北核技术研究所 一种灵巧型微波组合脉冲产生器

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