WO2023231500A1 - 容值快速转换真空电容器 - Google Patents

容值快速转换真空电容器 Download PDF

Info

Publication number
WO2023231500A1
WO2023231500A1 PCT/CN2023/080984 CN2023080984W WO2023231500A1 WO 2023231500 A1 WO2023231500 A1 WO 2023231500A1 CN 2023080984 W CN2023080984 W CN 2023080984W WO 2023231500 A1 WO2023231500 A1 WO 2023231500A1
Authority
WO
WIPO (PCT)
Prior art keywords
electrode group
vacuum capacitor
capacitance
housing
vacuum
Prior art date
Application number
PCT/CN2023/080984
Other languages
English (en)
French (fr)
Inventor
赖萍南
王舒舒
曹明
覃奀垚
胡滨
何塞伊格纳西奥•弗里亚斯
Original Assignee
昆山国力电子科技股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 昆山国力电子科技股份有限公司 filed Critical 昆山国力电子科技股份有限公司
Publication of WO2023231500A1 publication Critical patent/WO2023231500A1/zh

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01GCAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G5/00Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
    • H01G5/04Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of effective area of electrode
    • H01G5/14Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of effective area of electrode due to longitudinal movement of electrodes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01GCAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G5/00Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
    • H01G5/01Details
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E40/00Technologies for an efficient electrical power generation, transmission or distribution
    • Y02E40/30Reactive power compensation

Definitions

  • the invention relates to the technical field of capacitors, and in particular to a vacuum capacitor with rapid capacitance conversion.
  • a vacuum capacitor is a capacitor with ceramic as an insulating shell, vacuum as the medium, and high-conductivity oxygen-free copper material as the electrode. Compared with other capacitors, it has the characteristics of high voltage resistance, large carrying current, low high-frequency loss, and self-healing after instantaneous overload. It is especially suitable for high-frequency and high-voltage applications.
  • Vacuum capacitors are widely used in broadcast transmission, medical nuclear magnetic resonance, high-frequency heating, semiconductor etching plasma cleaning and other equipment. Vacuum capacitors form a resonant circuit with high-frequency inductors in these high-frequency equipment to complete high-frequency impedance matching and achieve radio frequency power. stable transmission.
  • Traditional variable ceramic vacuum capacitors generally use a thread system to adjust the capacitance range.
  • the movable electrode group 21 of the traditional variable ceramic vacuum capacitor is connected to the rotating screw 23, and the rotating screw 23 is connected to the control motor 24.
  • the control motor 24 drives the rotating screw 23 to rotate, and the movable electrode group 21 follows The clockwise or counterclockwise rotation of the rotating screw 23 moves up and down, the coupling length between the movable electrode group 21 and the static electrode group 22 changes, the coupling area between the two groups of electrodes changes, and the capacitance of the capacitor changes accordingly.
  • the capacitance of the variable capacitor can be adjusted.
  • the mechanical life and adjustment speed of the variable capacitor are limited by the thread specification and the material and surface condition of the rotating parts. Due to the influence of the pressure difference between the inside and outside of the vacuum capacitor on the rotating screw 23, the torque of the rotating screw 23 is usually large. is less than 0.1Nm, and under the condition that the torque of the control motor 24 is certain, the rotation speed of the rotating screw 23 cannot be increased, so the capacity adjustment speed of the capacitor is also limited.
  • the adjustment speed of traditional variable ceramic vacuum capacitors is generally 600rpm. Usually the adjustment time of variable ceramic vacuum capacitors from the maximum capacity position to the minimum capacity position (maximum working stroke) is 3 to 6 seconds.
  • the present invention provides a vacuum capacitor with rapid capacitance conversion, which can effectively shorten the capacitance adjustment time of the vacuum capacitor and increase the capacitance adjustment speed.
  • a vacuum capacitor with rapid capacitance conversion which includes: a shell, a first electrode group and a second electrode group; a vacuum chamber is configured inside the shell; The first electrode group and the second electrode group are coupled to each other and housed in the vacuum chamber; an electromagnetic driving mechanism is installed on the outside of one end of the housing, and the electromagnetic driving mechanism can drive the first electrode.
  • the group is displaced relative to the second electrode group, causing the vacuum capacitor to switch between two capacitance states.
  • a magnetic conductive plate is fixedly connected to the first electrode group.
  • the electromagnetic driving mechanism When the electromagnetic driving mechanism is energized, it can generate suction force on the magnetic conductive plate and drive the magnetic conductive plate to drive the first electrode.
  • the group moves in a direction away from the second electrode group.
  • the electromagnetic driving mechanism includes an iron core and a coil winding arranged around the outside of the iron core.
  • the iron core and the magnetic conductive plate Set oppositely, the magnetic field generated when the coil winding is energized magnetizes the iron core, causing the magnetic conductive plate to attract to the iron core.
  • the first electrode group includes a first mover plate and a first electrode fixed on one side of the first mover plate, and a tie rod is fixed on the other side of the first mover plate. ;
  • the magnetic conductive plate is arranged on the outside of the housing, and is fixedly connected to the first electrode group through the pull rod.
  • a limited stop is provided at one end of the pull rod that penetrates and is exposed in the housing.
  • a first bellows is sealingly connected between the other side of the first mover plate and the inner wall of the housing, and the first bellows is sleeved on the outside of the pull rod.
  • the second electrode group is fixedly connected to the inner wall of the housing.
  • an adjustment mechanism is installed on the outside of the other end of the housing, the second electrode group is movably arranged in the vacuum chamber and connected to the adjustment mechanism, and the adjustment mechanism is used to The position of the second electrode group in the vacuum chamber is adjusted to change the coupling area between the second electrode group and the first electrode group.
  • the second electrode group includes a second mover disk and a second electrode fixed on one side of the second mover disk, and a screw is provided on the other side of the second mover disk.
  • the adjustment mechanism includes an adjustment nut, and the adjustment nut is threaded on one end of the screw that penetrates and is exposed on the housing.
  • the other side of the second mover plate is connected to the A second bellows is sealingly connected between the inner walls of the housing, and the second bellows is sleeved on the outside of the screw.
  • the present invention provides a vacuum capacitor with rapid capacitance conversion. It adopts an electromagnetic driving mechanism to realize rapid adjustment and conversion of the capacitance of the vacuum capacitor.
  • the coil winding is controlled to magnetize the iron core to generate suction, and the driving conductor is
  • the magnetic plate drives the first electrode group to shift relative to the second electrode group, changing the mutual coupling area of the two groups of electrodes, realizing rapid capacitance conversion, making the capacitance conversion time of the vacuum capacitor reach within one hundred milliseconds, which meets the requirements of the vacuum capacitor.
  • Application equipment requires fast matching of impedance matchers;
  • the second electrode group is also set to be adjustable and an adjustment mechanism is used to adjust the position of the second electrode group, so that the first capacitance value and the second capacitance value of the vacuum capacitor can be changed, thereby achieving bidirectional capacitance.
  • the adjustment of the value makes the vacuum capacitor not limited to switching between two fixed capacitance states, meeting the user's needs and making it more convenient for the user.
  • Figure 1 is a cross-sectional view of an existing variable vacuum capacitor
  • Figure 2 is a cross-sectional view of Embodiment 1 of a vacuum capacitor with rapid capacitance switching of the present invention
  • Figure 3 is a cross-sectional view of a vacuum capacitor with rapid capacitance switching according to Embodiment 1 of the present invention after capacitance switching;
  • Figure 4 is a cross-sectional view of Embodiment 2 of a vacuum capacitor with rapid capacitance switching of the present invention
  • FIG. 5 is a cross-sectional view of a vacuum capacitor with rapid capacitance switching according to the second embodiment of the present invention after capacitance switching.
  • Shell 101. Vacuum chamber; 2. First electrode group; 201. First mover disc; 202. First electrode; 3. Second electrode group; 301. Second mover disc; 3011. Screw ; 302. Second electrode; 4. Magnetic plate; 5. Iron core; 6. Coil winding; 7. Pull rod; 701. Limit stop; 8. First bellows; 9. Adjusting nut; 10. Second Bellows; 11. Power supply; 12. Shielding shell; 21. Moving electrode group; 22. Static electrode group; 23. Rotating screw; 24. Control motor.
  • the present invention provides a vacuum capacitor with rapid capacitance switching, which includes: a housing 1, a first electrode group 2, a second electrode group 3 and an electromagnetic driving mechanism.
  • the shell 1 is composed of a porcelain tube, an end cover and a mounting plate.
  • the end cap is sealed and fixedly connected to the top of the porcelain tube by welding
  • the mounting plate is sealed and fixedly connected to the bottom of the porcelain tube by welding, so that the shell 1 has high insulation performance.
  • the dielectric has high voltage resistance and can ensure a high vacuum environment inside the capacitor.
  • a vacuum chamber 101 is arranged inside the housing 1 , and the first electrode group 2 and the second electrode group 3 are accommodated in the vacuum chamber 101 so as to be coupled to each other.
  • the first electrode group 2 is a moving electrode group, including a first mover plate 201 and a first electrode 202 .
  • the first electrode 202 is fixedly connected to the upper side of the first mover plate 201 .
  • the first electrode 202 is composed of several mutually nested electrode rings.
  • the second electrode group 3 is an electrostatic electrode group that is fixedly connected to the inner top wall of the end cover of the housing 1.
  • the second electrode group 3 is also composed of several mutually nested electrode rings.
  • the coupling part of the first electrode group 2 and the second electrode group 3 is a charge storage unit composed of two sets of electrode strips.
  • the electromagnetic driving mechanism is installed outside the bottom end of the mounting plate of the housing 1.
  • the electromagnetic driving mechanism can drive the first electrode group 2 to displace relative to the second electrode group 3, so that the vacuum capacitor moves between two capacitance states. switch.
  • a magnetic conductive plate 4 is fixedly connected to the first electrode group 2.
  • the electromagnetic driving mechanism When the electromagnetic driving mechanism is energized, it can generate an attraction force to the magnetic conductive plate 4, driving the magnetic conductive plate 4 to drive the first electrode group 2 toward the direction away from the second electrode group 3. direction movement.
  • a tie rod 7 is fixedly installed on the lower side of the first mover plate 201 , and the lower end of the tie rod 7 penetrates and is exposed outside the mounting plate of the housing 1 .
  • the magnetic conductive plate 4 is arranged below the housing 1 , and the magnetic conductive plate 4 is fixedly connected to the first electrode group 2 through the tie rod 7 .
  • the lower end of the pull rod 7 is provided with a screw hole along the axis
  • the top end of the magnetic conductive plate 4 is provided with studs along the axis.
  • the magnetic conductive plate 4 is fixedly connected in the screw hole through the stud.
  • annular limiting stop 701 is provided at the lower end of the tie rod 7 that penetrates and is exposed on the housing 1 .
  • the first electrode group 2 always has a tendency to move toward the second electrode group 3 under the force of the pressure difference between the inside and outside of the vacuum capacitor, so that the limiting stop 701 stops upward on the end surface of the housing 1 superior.

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)

Abstract

本发明公开了一种容值快速转换真空电容器,包括:壳体、第一电极组和第二电极组,所述壳体的内部配置有真空腔室,所述第一电极组与所述第二电极组相互耦合地容置在所述真空腔室内,所述壳体的一端外侧安装有电磁驱动机构,所述电磁驱动机构能够驱动所述第一电极组相对所述第二电极组发生位移,使所述真空电容器在两个容值状态之间进行切换。本发明容值快速转换真空电容器采用电磁驱动机构来实现真空电容器容值的快速调节和转换,使得真空电容器的容值转换时间达到一百毫秒以内,满足了真空电容器的应用设备对阻抗匹配器快速匹配的需求,用户使用更加方便。

Description

容值快速转换真空电容器 技术领域
本发明涉及电容器技术领域,特别涉及一种容值快速转换真空电容器。
背景技术
真空电容器是一种以陶瓷为绝缘外壳,以真空为介质,采用高导无氧铜材料为电极的电容器。与其他电容器相比,它具有耐压高、承载电流大、高频损耗低、瞬时过载后可自愈等特点,特别适合高频高压应用领域。真空电容器广泛应用于广播发射、医疗核磁共振、高频加热、半导体刻蚀等离子清洗等设备中,真空电容器在这些高频设备中与高频电感组成谐振电路,完成高频阻抗匹配,实现射频功率的稳定传输。
传统的可变陶瓷真空电容器,一般都是采用螺纹系统来调节容值范围。如图1所示,传统可变陶瓷真空电容器的动电极组21与转动螺杆23连接,转动螺杆23与控制电机24连接,通过控制电机24带动转动螺杆23做旋转运动,动电极组21随着转动螺杆23的顺时针或逆时针旋转作上下移动,动电极组21与静电极组22之间的耦合长度发生改变,两组电极之间的耦合面积发生改变,电容器的容值随之变化,从而实现可变电容器容值的调节。
受到螺纹规格和转动零件材料及其表面状态的影响,可变电容器的机械寿命和调节速度均收到限制。由于真空电容器内外压强差对转动螺杆23的影响,转动螺杆23的扭矩通常都大 于0.1N.m,在控制电机24扭矩一定的条件下,转动螺杆23的转动速度无法提升,因此电容器的容量调节速度也受到限制。传统可变陶瓷真空电容器的调节速度一般为600rpm,通常可变陶瓷真空电容器从最大容量位置到最小容量位置(最大工作行程)的调节时间为3至6秒。
随着真空可变电容器的应用设备对阻抗匹配器的匹配速度和匹配精度地不断提升,用户要求可变陶瓷真空电容器的容值调节速度越来越快,最大工作行程的调节时间越来越短。因此,有必要对现有技术予以改良以克服现有技术中的缺陷。
发明内容
为了解决上述技术问题,本发明提供一种容值快速转换真空电容器,能够有效实现缩短真空电容器的容值调节时间,提升容值调节速度。
本发明为了解决其技术问题所采用的技术方案是:一种容值快速转换真空电容器,包括:壳体、第一电极组和第二电极组,所述壳体的内部配置有真空腔室,所述第一电极组与所述第二电极组相互耦合地容置在所述真空腔室内;所述壳体的一端外侧安装有电磁驱动机构,所述电磁驱动机构能够驱动所述第一电极组相对所述第二电极组发生位移,使所述真空电容器在两个容值状态之间进行切换。
作为本发明的进一步改进,所述第一电极组上固定连接有导磁板,所述电磁驱动机构通电时能够对所述导磁板产生吸力,驱使所述导磁板带动所述第一电极组朝向背离所述第二电极组的方向移动。
作为本发明的进一步改进,所述电磁驱动机构包括铁芯和环绕布置在所述铁芯外侧的线圈绕组,所述铁芯与所述导磁板 相对设置,所述线圈绕组通电时产生的磁场将所述铁芯磁化,使所述导磁板吸合在所述铁芯上。
作为本发明的进一步改进,所述第一电极组包括第一动子盘和固定在所述第一动子盘一侧的第一电极,所述第一动子盘的另一侧固定有拉杆;所述导磁板设置在所述壳体的外侧,其通过所述拉杆与所述第一电极组固定连接。
作为本发明的进一步改进,所述拉杆贯穿且露出于所述壳体的一端设置有限位挡台,当所述电磁驱动机构断电时,所述第一电极组在所述真空电容器内外压强差的作用力下始终具有朝向所述第二电极组运动的趋势,使得所述限位挡台止挡在所述壳体的端面上。
作为本发明的进一步改进,所述第一动子盘的另一侧与所述壳体的内壁之间密封连接有第一波纹管,且所述第一波纹管套装在所述拉杆的外侧。
作为本发明的进一步改进,所述第二电极组固定连接在所述壳体的内壁上。
作为本发明的进一步改进,所述壳体的另一端外侧安装有调节机构,所述第二电极组可活动的设置在所述真空腔室内并与所述调节机构连接,所述调节机构用于调节所述第二电极组在所述真空腔室内的位置,以改变所述第二电极组与所述第一电极组之间的耦合面积。
作为本发明的进一步改进,所述第二电极组包括第二动子盘和固定在所述第二动子盘一侧的第二电极,所述第二动子盘的另一侧设置有螺杆;所述调节机构包括调节螺母,所述调节螺母螺纹套装在所述螺杆贯穿且露出于所述壳体的一端上。
作为本发明的进一步改进,所述第二动子盘的另一侧与所 述壳体的内壁之间密封连接有第二波纹管,且所述第二波纹管套装在所述螺杆的外侧。
本发明的有益效果是:
1、本发明提供一种容值快速转换真空电容器,采用电磁驱动机构来实现真空电容器容值的快速调节和转换,通过控制电源的通断,控制线圈绕组对铁芯进行磁化产生吸力,驱动导磁板带动第一电极组相对第二电极组发生位移,改变两组电极的相互耦合面积,实现容值的快速转换,使得真空电容器的容值转换时间达到一百毫秒以内,满足了真空电容器的应用设备对阻抗匹配器快速匹配的需求;
2、本申请通过将第二电极组同样设置为可调节,采用调节机构来调节第二电极组的位置,使得真空电容器的第一容值与第二容值是可以改变的,进而实现双向容值的调节,使真空电容器不仅仅局限于在两个固定的容值状态之间切换,满足用户使用需求,用户使用也更加方便。
附图说明
图1为现有可变真空电容器的剖视图;
图2为本发明容值快速转换真空电容器实施例一的剖视图;
图3为本发明容值快速转换真空电容器实施例一容值切换后的剖视图;
图4为本发明容值快速转换真空电容器实施例二的剖视图;
图5为本发明容值快速转换真空电容器实施例二容值切换后的的剖视图。
结合附图,作以下说明:
1、壳体;101、真空腔室;2、第一电极组;201、第一动
子盘;202、第一电极;3、第二电极组;301、第二动子盘;3011、螺杆;302、第二电极;4、导磁板;5、铁芯;6、线圈绕组;7、拉杆;701、限位挡台;8、第一波纹管;9、调节螺母;10、第二波纹管;11、电源;12、屏蔽外壳;21、动电极组;22、静电极组;23、转动螺杆;24、控制电机。
具体实施方式
以下结合附图,对本发明的一个较佳实施例作详细说明。
实施例一
参阅图2和图3,本发明提供一种容值快速转换真空电容器,包括:壳体1、第一电极组2、第二电极组3和电磁驱动机构。壳体1由瓷管、端盖及安装板构成,端盖采用焊接方式密封固定连接在瓷管的顶部,安装板采用焊接方式密封固定连接在瓷管的底部,使得壳体1具备高绝缘性能,介质耐压高,且能够确保电容器内高真空环境。
壳体1的内部配置有真空腔室101,第一电极组2与第二电极组3相互耦合地容置在真空腔室101内。具体的,第一电极组2为动电极组,包括第一动子盘201和第一电极202,第一电极202固定连接在第一动子盘201的上侧面。其中,第一电极202由若干相互嵌套的电极环构成。第二电极组3为静电极组,固定连接在壳体1的端盖内顶壁上,第二电极组3同样是由若干相互嵌套的电极环构成。第一电极组2与第二电极组3的偶合部分是由两组电极带组成的电荷储存单元。
参阅图2,电磁驱动机构安装在壳体1的安装板底端外侧,电磁驱动机构能够驱动第一电极组2相对第二电极组3发生位移,使真空电容器在两个容值状态之间进行切换。
具体的,第一电极组2上固定连接有导磁板4,电磁驱动机构通电时能够对导磁板4产生吸力,驱使导磁板4带动第一电极组2朝向背离第二电极组3的方向移动。第一动子盘201的下侧面固定安装有拉杆7,拉杆7的下端贯穿且露出在壳体1的安装板外侧。导磁板4设置在壳体1的下方,导磁板4通过拉杆7与第一电极组2固定连接。其中,拉杆7的下端沿轴线设置有螺孔,导磁板4的顶端沿轴线设置有螺柱,导磁板4通过螺柱固定连接在螺孔内。
为了确保壳体1内部的真空环境,在第一动子盘201的下侧面与壳体1的安装板内壁之间密封焊接有第一波纹管8,第一波纹管8套装在拉杆7的外侧。第一波纹管8采用不锈钢材质,能够跟随第一电极组2的上下运动进行弹性变形压缩或伸展,并具有较长的机械寿命。
此外,拉杆7贯穿且露出于壳体1的下端设置有环形的限位挡台701。当电磁驱动机构断电时,第一电极组2在真空电容器内外压强差的作用力下始终具有朝向第二电极组3运动的趋势,使得限位挡台701向上止挡在壳体1的端面上。
由于本实施例中运动配合部件位于真空腔室101外,因此可进行添加润滑油脂,以用来保证移动顺滑平稳。
继续参阅图2,电磁驱动机构包括铁芯5、线圈绕组6和屏蔽外壳12。屏蔽外壳12固定安装在壳体1的安装板底部,且屏蔽外壳12与壳体1之间合围构成有容置腔,导磁板4可上下活动的置于该容置腔中。线圈绕组6容纳在屏蔽外壳12的内腔中,通过屏蔽外壳12对线圈绕组6起到屏蔽的作用,使得线圈绕组6不会受高频电流影响。铁芯5的截面呈T型,具有固定板以及与固定板一体的柱形吸附端,固定板用来固定 在屏蔽外壳12的底端,吸附端向上伸入屏蔽外壳12的内腔中,并与导磁板4相对设置。线圈绕组6环绕布置在铁芯5的吸附端外侧,线圈绕组6的两个接线端穿过固定板向外引出并与电源11电连接。
本实施例工作原理为:当线圈绕组6与电源11接通时,线圈绕组6产生磁场将铁芯5磁化,导磁板4受到吸力向下运动吸合在铁芯5上,通过拉杆7同步拉动第一电极组2向下移动,使得第一电极组2与第二电极组3之间的耦合长度变短,两组电极的耦合面积变小,电容器的容值变小,真空电容器处于第一容值状态(如图3所示)。当线圈绕组6与电源11断开时,铁芯5磁力消失,导磁板4在真空电容器内外压强差的作用力以及第一波纹管8的弹性作用力下向上运动,直至拉杆7的限位挡台701向上止挡在壳体1的端面上,通过拉杆7同步推动第一电极组2向上移动,第一电极组2与第二电极组3之间的耦合长度变长,两组电极的耦合面积变大,电容器的容值变大,真空电容器处于第二容值状态(如图2所示)。
需要说明的是,通过配置铁芯5与导磁板4之间的距离,可调节第一电极组2的移动距离,即真空电容器从最大容量位置到最小容量位置,从而调节电容器第一容值与第二容值的大小。
由此可见,本实施例采用电磁驱动机构来实现真空电容器容值的快速调节和转换,通过控制电源11的通断,控制线圈绕组6对铁芯5进行磁化产生吸力,驱动导磁板4带动第一电极组2相对第二电极组3发生位移,改变两组电极的相互耦合面积,实现容值的快速变化,使得真空电容器的容值转换时间达到一百毫秒以内,满足了可变电容器的应用设备匹配器快速 匹配的需求。
实施例二
参阅图4和图5,本实施例与实施例一的区别在于:本实施例中第二电极组3同样作为动电极组能够在真空腔室101内位移改变位置。壳体1的端盖顶端外侧安装有调节机构,第二电极组3可活动的设置在真空腔室101内并与调节机构连接,调节机构用于调节第二电极组3在真空腔室101内的位置,以改变第二电极组3与第一电极组2之间的耦合面积。
具体的,参阅图4,第二电极组3包括第二动子盘301和第二电极302,第二动子盘301布置在第一动子盘201的正上方,第二电极302固定连接在第二动子盘301的下侧面,并与第一电极202相耦合。第二动子盘301的上侧面沿轴线设置有螺杆3011,螺杆3011向上贯穿且露出于壳体1的端盖顶部。
同样的,为了确保壳体1内部的真空环境,在第二动子盘301的上侧面与壳体1的端盖内顶壁之间密封连接有第二波纹管10,第二波纹管10套装在螺杆3011的外侧。其中,第二波纹管10与第一波纹管8的构造相同,同样采用不锈钢材质,能够跟随第二电极组3的上下运动进行弹性变形压缩或伸展。
本实施例中,调节机构包括调节螺母9,调节螺母9设置在壳体1的端盖上端面,且螺纹套装在螺杆3011露出于壳体1的顶端上,通过转动调节螺母9,在与螺杆3011的配合使用下,可使得第二电极组3上下移动,改变与第一电极组2的耦合面积,从而改变电容器的容值大小。
由此可见,本实施例将第二电极组3同样设置为可调节,使真空电容器不仅仅局限于在两个固定的容值状态之间切换,通过调节机构来调节第二电极组3的位置,使得真空电容器的 第一容值与第二容值是可以改变的,进而实现真空电容器双向容值的调节,满足用户使用需求,用户使用也更加方便。
值得一提的是,虽然在本实施例中调节机构为采用调节螺母9以手动方式进行调节,但是第二电极组3如若采用如图1所示通过控制电机24以电动方式进行调节也是可以实现的,只是需要将第二电极组3与调节机构的结构构造为图1所示结构,具体不再详细赘述。
在以上的描述中阐述了很多具体细节以便于充分理解本发明。但是以上描述仅是本发明的较佳实施例而已,本发明能够以很多不同于在此描述的其它方式来实施,因此本发明不受上面公开的具体实施的限制。同时任何熟悉本领域技术人员在不脱离本发明技术方案范围情况下,都可利用上述揭示的方法和技术内容对本发明技术方案做出许多可能的变动和修饰,或修改为等同变化的等效实施例。凡是未脱离本发明技术方案的内容,依据本发明的技术实质对以上实施例所做的任何简单修改、等同变化及修饰,均仍属于本发明技术方案保护的范围内。

Claims (10)

  1. 一种容值快速转换真空电容器,包括:壳体(1)、第一电极组(2)和第二电极组(3),所述壳体(1)的内部配置有真空腔室(101),所述第一电极组(2)与所述第二电极组(3)相互耦合地容置在所述真空腔室(101)内,其特征在于,所述壳体(1)的一端外侧安装有电磁驱动机构,所述电磁驱动机构能够驱动所述第一电极组(2)相对所述第二电极组(3)发生位移,使所述真空电容器在两个容值状态之间进行切换。
  2. 根据权利要求1所述的容值快速转换真空电容器,其特征在于:所述第一电极组(2)上固定连接有导磁板(4),所述电磁驱动机构通电时能够对所述导磁板(4)产生吸力,驱使所述导磁板(4)带动所述第一电极组(2)朝向背离所述第二电极组(3)的方向移动。
  3. 根据权利要求2所述的容值快速转换真空电容器,其特征在于:所述电磁驱动机构包括铁芯(5)和环绕布置在所述铁芯(5)外侧的线圈绕组(6),所述铁芯(5)与所述导磁板(4)相对设置,所述线圈绕组(6)通电时产生的磁场将所述铁芯(5)磁化,使所述导磁板(4)吸合在所述铁芯(5)上。
  4. 根据权利要求2所述的容值快速转换真空电容器,其特征在于:所述第一电极组(2)包括第一动子盘(201)和固定在所述第一动子盘(201)一侧的第一电极(202),所述第一动子盘(201)的另一侧固定有拉杆(7);所述导磁板(4)设置在所述壳体(1)的外侧,其通过所述拉杆(7)与所述第一电极组(2)固定连接。
  5. 根据权利要求4所述的容值快速转换真空电容器,其特征在于:所述拉杆(7)贯穿且露出于所述壳体(1)的一端设置有限位挡台(701),当所述电磁驱动机构断电时,所述第一电极组(2)在所述真空电容器内外压强差的作用力下始终具有朝向所述第二电极组(3)运动的趋势,使得所述限位挡台(701)止挡在所述壳体(1)的端面上。
  6. 根据权利要求4所述的容值快速转换真空电容器,其特征在于:所述第一动子盘(201)的另一侧与所述壳体(1)的内壁之间密封连接有第一波纹管(8),且所述第一波纹管(8)套装在所述拉杆(7)的外侧。
  7. 根据权利要求1所述的容值快速转换真空电容器,其特征在于:所述第二电极组(3)固定连接在所述壳体(1)的内壁上。
  8. 根据权利要求1所述的容值快速转换真空电容器,其特征在于:所述壳体(1)的另一端外侧安装有调节机构,所述第二电极组(3)可活动的设置在所述真空腔室(101)内并与所述调节机构连接,所述调节机构用于调节所述第二电极组(3)在所述真空腔室(101)内的位置,以改变所述第二电极组(3)与所述第一电极组(2)之间的耦合面积。
  9. 根据权利要求8所述的容值快速转换真空电容器,其特征在于:所述第二电极组(3)包括第二动子盘(301)和固定在所述第二动子盘(301)一侧的第二电极(302),所述第二动子盘(301)的另一侧设置有螺杆(3011);所述调节机构包括调节螺母(9),所述调节螺母(9)螺纹套装在所述螺杆(3011)贯穿且露出于所述壳体(1)的一端上。
  10. 根据权利要求9所述的容值快速转换真空电容器,其 特征在于:所述第二动子盘(301)的另一侧与所述壳体(1)的内壁之间密封连接有第二波纹管(10),且所述第二波纹管(10)套装在所述螺杆(3011)的外侧。
PCT/CN2023/080984 2022-05-30 2023-03-13 容值快速转换真空电容器 WO2023231500A1 (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN202210601616.9A CN114974897A (zh) 2022-05-30 2022-05-30 容值快速转换真空电容器
CN202210601616.9 2022-05-30

Publications (1)

Publication Number Publication Date
WO2023231500A1 true WO2023231500A1 (zh) 2023-12-07

Family

ID=82958534

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/CN2023/080984 WO2023231500A1 (zh) 2022-05-30 2023-03-13 容值快速转换真空电容器

Country Status (2)

Country Link
CN (1) CN114974897A (zh)
WO (1) WO2023231500A1 (zh)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114974897A (zh) * 2022-05-30 2022-08-30 昆山国力电子科技股份有限公司 容值快速转换真空电容器

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060266739A1 (en) * 2005-05-30 2006-11-30 Meidensha Corporation Vacuum capacitor
CN103366959A (zh) * 2013-06-19 2013-10-23 昆山国力真空电器有限公司 带双向自定位结构的可变真空电容器
WO2016122174A1 (ko) * 2015-01-29 2016-08-04 주식회사 온조랩 선형 운동 가변 진공 축전기
CN113764188A (zh) * 2021-09-18 2021-12-07 上海华盈实科技有限公司 一种可改变电容容量的真空电容
CN114974897A (zh) * 2022-05-30 2022-08-30 昆山国力电子科技股份有限公司 容值快速转换真空电容器
CN218004630U (zh) * 2022-06-30 2022-12-09 昆山国力电子科技股份有限公司 可快速精准调节容值的真空电容器

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060266739A1 (en) * 2005-05-30 2006-11-30 Meidensha Corporation Vacuum capacitor
CN103366959A (zh) * 2013-06-19 2013-10-23 昆山国力真空电器有限公司 带双向自定位结构的可变真空电容器
WO2016122174A1 (ko) * 2015-01-29 2016-08-04 주식회사 온조랩 선형 운동 가변 진공 축전기
CN113764188A (zh) * 2021-09-18 2021-12-07 上海华盈实科技有限公司 一种可改变电容容量的真空电容
CN114974897A (zh) * 2022-05-30 2022-08-30 昆山国力电子科技股份有限公司 容值快速转换真空电容器
CN218004630U (zh) * 2022-06-30 2022-12-09 昆山国力电子科技股份有限公司 可快速精准调节容值的真空电容器

Also Published As

Publication number Publication date
CN114974897A (zh) 2022-08-30

Similar Documents

Publication Publication Date Title
WO2023231500A1 (zh) 容值快速转换真空电容器
KR101811412B1 (ko) 진공 가변 커패시터
JP2002208538A (ja) 液体可変コンデンサ
KR101811406B1 (ko) 가변 진공 커패시터
JP6150304B2 (ja) インピーダンスマッチング装置、線形運動モジュール、及びラジオ周波数電力供給装置
CN210156307U (zh) 智能真空断路器
KR101325041B1 (ko) 진공 콘덴서
CN218004630U (zh) 可快速精准调节容值的真空电容器
US4002957A (en) Trimmable fixed hermetically sealed capacitor
CN206976233U (zh) 一种充气柜用断路器
CN118173383A (zh) 双驱动可变电容器
CN110534375B (zh) 六氟化硫断路器及其电磁式操动机构
CN114695065A (zh) 半导体加工设备
KR101470779B1 (ko) 플라즈마 점화장치 및 플라즈마 점화방법
JP2003045640A (ja) 高周波解凍装置
CN219085824U (zh) 一种外置音圈马达伸缩驱动可变电容装置及射频源匹配器
JP3294307B2 (ja) 直線移動式高電圧切換スイッチ
CN210349688U (zh) 一种用于柔性直流特高压输电系统中的真空开关
CN213124280U (zh) 一种断路器
CN215377316U (zh) 一种固封式单弹簧机构真空断路器分合闸模块辅助装置
CN202178205U (zh) 一种三相共体的真空灭弧室
CN214588578U (zh) Pcb板载式真空交流接触器
CN213583625U (zh) 一种具有真空灭弧室的接触器
CN216648094U (zh) 一种大电流选线装置
CN112992564B (zh) 一种换相开关

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 23814698

Country of ref document: EP

Kind code of ref document: A1