WO2023226457A1 - Display panel, and light-emitting element and back plate for use in display panel - Google Patents
Display panel, and light-emitting element and back plate for use in display panel Download PDFInfo
- Publication number
- WO2023226457A1 WO2023226457A1 PCT/CN2023/072610 CN2023072610W WO2023226457A1 WO 2023226457 A1 WO2023226457 A1 WO 2023226457A1 CN 2023072610 W CN2023072610 W CN 2023072610W WO 2023226457 A1 WO2023226457 A1 WO 2023226457A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- layer
- bonding
- pure metal
- light
- emitting element
- Prior art date
Links
- 239000010410 layer Substances 0.000 claims abstract description 812
- 229910052751 metal Inorganic materials 0.000 claims abstract description 338
- 239000002184 metal Substances 0.000 claims abstract description 338
- 229910045601 alloy Inorganic materials 0.000 claims abstract description 70
- 239000000956 alloy Substances 0.000 claims abstract description 70
- 239000012790 adhesive layer Substances 0.000 claims abstract description 55
- 230000008018 melting Effects 0.000 claims abstract description 45
- 238000002844 melting Methods 0.000 claims abstract description 45
- 230000008439 repair process Effects 0.000 claims abstract description 34
- 238000003466 welding Methods 0.000 claims description 95
- 239000004065 semiconductor Substances 0.000 claims description 72
- 150000002739 metals Chemical class 0.000 claims description 18
- 239000000463 material Substances 0.000 claims description 12
- 238000003475 lamination Methods 0.000 claims 1
- 229910000679 solder Inorganic materials 0.000 abstract description 20
- 238000000034 method Methods 0.000 abstract description 17
- 238000012546 transfer Methods 0.000 abstract description 10
- 230000015572 biosynthetic process Effects 0.000 abstract description 3
- 238000007740 vapor deposition Methods 0.000 abstract 1
- 238000005476 soldering Methods 0.000 description 24
- 238000010586 diagram Methods 0.000 description 16
- 230000008569 process Effects 0.000 description 13
- 238000010438 heat treatment Methods 0.000 description 12
- 238000013461 design Methods 0.000 description 7
- 238000001704 evaporation Methods 0.000 description 6
- 239000000758 substrate Substances 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 230000008020 evaporation Effects 0.000 description 4
- 239000011241 protective layer Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000000155 melt Substances 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 230000005496 eutectics Effects 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 230000005012 migration Effects 0.000 description 1
- 238000013508 migration Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000001568 sexual effect Effects 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/15—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components having potential barriers, specially adapted for light emission
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/36—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes
- H01L33/40—Materials therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
- H01L33/62—Arrangements for conducting electric current to or from the semiconductor body, e.g. lead-frames, wire-bonds or solder balls
Definitions
- the present application relates to the technical field of semiconductor devices and devices, and in particular to a display panel, a light-emitting element and a backplane used for the display panel.
- LED has attracted special attention in the lighting and display fields due to its high luminous efficiency, long service life, safety, reliability, environmental protection and energy saving.
- LED When LED is used for display, a huge amount of LED chips need to be transferred.
- the number of transferred LED chips is in the millions or even tens of millions.
- repairable technology after bonding is one of them. key.
- the current metal bonding process deposits a low melting point solder alloy and then heats the solder thermally to form a metallurgically bonded connection point after bonding.
- the gap between LED chips is very small, less than 100 ⁇ m. After primary bonding, if transfer failure or chip failure is found, secondary repair bonding is required. During the sexual bonding process, the newly transferred LED chip (used for repair) needs to be repaired metal bonded.
- the same solder is deposited on the pads for primary bonding and repair bonding in the backplane, or the same solder is deposited on the LED chips (primary bonding chips and repair chips) used on the same backplane. solder.
- the newly transferred LED chip needs to be bonded.
- the bonding temperature will cause the bonding points of the once-bonded LED chip to be remelted or partially melted, resulting in the LED chip being damaged. Mass migration or bonding point damage. If effective repair cannot be carried out, it is very difficult to achieve mass production yield (99.9999%).
- this application provides a display panel, a light-emitting element and a backplane used for the display panel.
- a first bonding layer and a second bonding layer are respectively formed on the first bonding pad of the backplane and the second bonding pad for repair.
- the first bonding layer and the second bonding layer include multiple pure metal layers.
- the bonding temperature of the first bonding layer is higher than the bonding temperature of the second bonding layer. This ensures that during the bonding process of the repair LED chips after the primary bonding is completed, heating the second bonding layer will not affect the bonded LEDs, and the LED batch offset will not occur, thus ensuring that the LED Chip transfer yield.
- a backplane for bonding light-emitting elements is provided.
- a first bonding pad and a second bonding pad for bonding light-emitting elements are provided on the surface of the backplate.
- the second bonding pad is used for bonding light-emitting elements.
- the pad is used as a repair pad, wherein the first pad includes a first adhesive layer and a first bonding layer, the second pad includes a second adhesive layer and a second bonding layer, and the Both the first bonding layer and the second bonding layer are multi-layer structures, the multi-layer structure includes multiple pure metal layers, and the bonding temperature of the first bonding layer is higher than that of the second bonding layer. The bonding temperature of the layer.
- first bonding layer and the second bonding layer have the same number of pure metal layers, or the first bonding layer and the second bonding layer have different numbers of pure metal layers. metal layer.
- the first bonding layer includes at least two pure metal layers formed of different metals
- the second bonding layer includes at least two pure metal layers formed of different metals
- both the first bonding layer and the second bonding layer include alternately stacked multiple pure metal layers formed of a first metal and a second metal, and the melting point of the first metal Higher than the melting point of the second metal.
- the thickness ratio of the pure metal layer formed by the first metal and the second metal is between 1:10 and 10:1.
- the pure metal layer formed by the first metal and the second metal has a first thickness ratio in the first bonding layer
- the pure metal layer formed by the first metal and the second metal A layer has a second thickness ratio in the second bonding layer, and the first thickness ratio is greater than the second thickness ratio
- the stacking order of the multiple pure metal layers in the first bonding layer and the second bonding layer is different.
- At least one pure metal layer among the plurality of pure metal layers in the second bonding layer is formed from a material different from any one of the plurality of pure metal layers in the first bonding layer. of forming materials.
- the orthogonal projected area of the first bonding layer on the surface of the back plate is 1.15 to 2.5 times the orthogonal projected area of the first bonding layer on the surface of the back plate; and/or , the orthogonal projected area of the second bonding layer on the surface of the back plate is 1.15 to 2.5 times the orthogonal projected area of the second bonding layer on the surface of the back plate.
- the first bonding pad further includes a first connection electrode located on a side of the first adhesive layer facing away from the first bonding layer; the first adhesive layer is on a side of the backplane.
- the orthographic projection area of the surface is 1.15 to 2.5 times the orthographic projection area of the first connection electrode on the surface of the backplane; and/or, the second pad layer further includes a surface located on the second adhesive layer
- the second connection electrode on the side facing away from the second bonding layer; the orthogonal projected area of the second adhesive layer on the surface of the back plate is the area of the second connection electrode on the surface of the back plate. 1.15 ⁇ 2.5 times the orthographic projection area.
- a display panel which includes: A backplane having a first bonding pad and a second bonding pad formed on the backboard, wherein the first bonding pad includes a first adhesive layer and a first alloy, and the second bonding pad includes a second adhesive layer and a second bonding layer, the second bonding layer is a multi-layer structure, the multi-layer structure includes multiple pure metal layers; and a light-emitting element fixed on the backplane, the light-emitting element includes a first A light-emitting element, the first light-emitting element is welded to the first bonding pad through the first alloy, and the temperature at which the first alloy starts to melt is higher than the bonding temperature of the second bonding layer.
- the light-emitting element further includes a repaired light-emitting element, and the repaired light-emitting element is welded to at least one of the second bonding pads through a second alloy.
- the light-emitting element includes: A semiconductor structure, the semiconductor structure including a first semiconductor layer with opposite conductivity types, a second semiconductor layer, and a light-emitting layer located between the first semiconductor layer and the second semiconductor layer;
- An electrode structure includes a first electrode and a second electrode, the first electrode is conductively connected to the first semiconductor layer, the second electrode is conductively connected to the second semiconductor layer, and the light-emitting element is connected through the electrode
- the structure is welded to the backing plate.
- the orthogonal projected area of the second bonding layer on the surface of the back plate is 1.15 to 2.5 times the orthogonal projected area of the second bonding layer on the surface of the back plate.
- a light-emitting element for a display panel is provided.
- the light-emitting element is divided into a first light-emitting element and a first light-emitting element used to replace the first light-emitting element that cannot light up normally in the display panel.
- the light-emitting element includes a semiconductor structure and an electrode structure formed on the surface of the semiconductor structure, the electrode structure of the first light-emitting element includes a first welding layer, the electrode structure of the repair light-emitting element includes a second Welding layer, the first welding layer and the second welding layer are both multi-layer structures, the multi-layer structure includes multiple pure metal layers, and the bonding temperature of the first welding layer is higher than that of the third welding layer. The bonding temperature of the two welding layers.
- a first bonding pad and a second bonding pad used as a repair pad are formed on the backplane of the present application.
- the first bonding pad includes a first adhesive layer and a first bonding layer
- the second bonding pad includes a second bonding layer.
- layer and the second bonding layer, the first bonding layer and the second bonding layer are all multi-layer structures.
- the multi-layer structure includes multiple pure metal layers.
- the content of the metal layer controls the bonding temperature of the first bonding layer and the second bonding layer, so that the bonding temperature of the first bonding layer is higher than the bonding temperature of the second bonding layer.
- the above-mentioned multiple pure metal layers are formed on the first and second bonding pads by evaporation, thereby ensuring the purity of each pure metal layer and facilitating the subsequent formation of alloys with different melting points.
- the first bonding layer melts to form a first alloy to fix the LED chip to the first pad of the backplane; at the same time, the second bonding layer on the second pad melts to form a second An alloy whose melting temperature of the second alloy is lower than the melting temperature of the first alloy. Therefore, when the second pad is heated to weld the repair LED chip, the first alloy on the first pad will not melt, ensuring the stability of the LED chip on the first pad and preventing batch deviation. This ensures the yield of LED chip batch transfer.
- the pure metal layers forming the first bonding layer and the second bonding layer may be alternately stacked pure metal layers formed of the same metals, and the stacking order of pure metals formed of the same metal may be the same or different. ; Or at least one layer of pure metal in the second bonding layer is made of a material different from the material of any pure metal layer in the first bonding layer. This increases the selection range of pure metals for forming the first bonding layer and the second bonding layer, and increases the design flexibility and adaptability of the pads.
- the light-emitting element in this application is divided into a first light-emitting element and a second light-emitting element for repair.
- the electrode structure of the first light-emitting element includes a first welding layer.
- the electrode structure of the repair light-emitting element includes a second welding layer.
- the first welding layer and the second soldering layer are all multi-layer structures, and the multi-layer structure has the same structural characteristics as the multi-layer structure of the first pad and the second pad on the backplane. Therefore, when using the light-emitting element of the present application, the same It can ensure that the first light-emitting element does not shift when welding and repairing the light-emitting element, thereby ensuring the transfer yield of the light-emitting element.
- the display panel of the present application uses the backplane of the present application, and the light-emitting elements have a good transfer yield. Therefore, the display panel has a high mass production yield.
- FIG. 1 shows a schematic structural diagram of a backplane for bonding light-emitting elements provided in Embodiment 1 of the present application.
- Figure 2 shows a schematic diagram of soldering LED chips on the backplane shown in Figure 1.
- Figure 3a shows a schematic structural diagram of a backplane used for bonding light-emitting elements in an optional embodiment of Embodiment 1 of the present application.
- Figure 3b shows a schematic structural diagram of a backplane used for bonding light-emitting elements in another optional embodiment of Embodiment 1 of the present application.
- Figure 3c shows a schematic structural diagram of a backplane used for bonding light-emitting elements in another optional embodiment of Embodiment 1 of the present application.
- Figure 3d shows a schematic structural diagram of a backplane used for bonding light-emitting elements in another optional embodiment of Embodiment 1 of the present application.
- Figure 3e shows a schematic structural diagram of a backplane used for bonding light-emitting elements in another optional embodiment of Embodiment 1 of the present application.
- Figure 4a shows a schematic structural diagram of a display panel provided for Embodiment 2 of the present application.
- Figure 4b shows a schematic structural diagram of a display panel in another optional embodiment of Embodiment 2 of the present application.
- FIG. 5 is a schematic structural diagram of the light-emitting element in the display panel shown in FIG. 4a.
- FIG. 6a shows a schematic structural diagram of the first light-emitting element of the light-emitting element provided in Embodiment 3 of the present application.
- Figure 6b shows a schematic structural diagram of the repaired light-emitting element of the light-emitting element provided in Embodiment 3 of the present application.
- FIG. 7 shows a schematic diagram of soldering the light-emitting element provided in Embodiment 3 on a backplane.
- FIG. 8 shows a schematic structural diagram of a light-emitting element repaired as an optional embodiment of Embodiment 3 of the present application.
- FIG. 9 shows a schematic structural diagram of a light-emitting element repaired as an optional embodiment of Embodiment 3 of the present application.
- FIG. 10 shows a schematic structural diagram of a display panel provided in Embodiment 4 of the present application.
- This embodiment provides a backplane for bonding light-emitting elements.
- the surface of the backplane 100 is provided with a first bonding pad 101 and a second bonding pad 102 for bonding light-emitting elements, wherein the first bonding pad 101 is used for welding the first transfer to the backplane.
- the first light-emitting element 2021 (see Figure 2) on 100 is the main light-emitting element; the second pad 102 is used as a repair pad for welding the repair light-emitting element 2022 (see Figure 2) that replaces the main light-emitting element that cannot work properly. ).
- the first bonding pad 101 includes a first adhesive layer 1011 and a first bonding layer 1012 , wherein the first bonding layer 1012 is a multi-layer structure.
- the second bonding pad 102 includes a second adhesive layer 1021 and a second bonding layer 1022, wherein the second bonding layer 1022 is also a multi-layer structure.
- the multi-layer structures of the first bonding layer 1012 and the second bonding layer 1022 are both multi-layer pure metal layers. For example, it can be two, three, four or even more pure metal layers.
- the number of pure metal layers can be flexibly set according to the design requirements of the first bonding pad 101 and the second bonding pad 102, and the first bonding
- the number of pure metal layers in layer 1012 and second bonding layer 1022 may be the same or different.
- the first bonding layer 1012 includes a first pure metal layer 1012-1 and a second pure metal layer 1012-2, the first pure metal layer 1012-1 and the second pure metal layer 1012-2 is a pure metal layer formed of different pure metals, and the melting point of the pure metal forming the first pure metal layer 1012-1 is higher than the melting point of the pure metal forming the second pure metal layer 1012-2.
- the first pure metal layer 1012-1 may be a Sn metal layer
- the second pure metal layer 1012-2 may be an In metal layer.
- the second bonding layer 1022 and the first bonding layer 1012 include the same number of pure metal layers, that is, they include a third pure metal layer 1022-1 and a fourth pure metal layer 1022-2.
- the third pure metal 1022-1 and the first pure metal layer 1012-1, the fourth pure metal layer 1022-2 and the second pure metal layer 1012-2 are respectively formed of the same pure metal.
- the metal layer for example, the above-mentioned third pure metal layer 1022-1 is also a Sn metal layer, and the fourth pure metal layer 1022-2 is also an In metal layer.
- the stacking sequence of pure metal layers formed of the same pure metal in the first bonding layer 1012 and the second bonding layer 1022 is the same, that is, the second pure metal layer 1012-2 shown in Figure 1 is located in the first pure metal layer 1012 Above -1, the fourth pure metal layer 1022-2 is located above the third pure metal layer 1022-1.
- the thickness ratio of the high melting point pure metal layer to the low melting point pure metal layer is between 1:10 ⁇ 10:1.
- the high melting point pure metal layer and the low melting point pure metal layer are There are first thickness ratios and second thickness ratios in the first bonding layer 1012 and the second bonding layer 1022 respectively, and the first thickness ratio is greater than the second thickness ratio, that is, the first thickness ratio in the first bonding layer 1012 is
- the first thickness ratio of a pure metal layer 1012-1 and the second pure metal layer 1012-2 is compared with the second thickness ratio of the third pure metal layer 1022-1 and the fourth pure metal layer 1022-2 in the second bonding layer 1022.
- the thickness ratios are not the same, and the first thickness ratio of the first pure metal layer 1012-1 and the second pure metal layer 1012-2 is greater than the second thickness ratio of the third pure metal layer 1022-1 and the fourth pure metal layer 1022-2. thickness ratio.
- the first thickness ratio is 10:1 and the second thickness ratio is 4:6; or the first thickness ratio is 4:6 and the second thickness ratio is 1:10; or the first thickness ratio is 8:1, and the second thickness ratio is 2:1; or, the first thickness ratio is 5:7, and the second thickness ratio is 3:8.
- the above-mentioned different thickness ratios also indicate that the contents of different pure metal layers in the first bonding layer 1012 and the second bonding layer 1022 are different.
- the first bonding layer 1012 and the second bonding layer 1022 are controlled to have different bonding temperatures, and the bonding temperature of the second bonding layer 1022 is lower than the bonding temperature of the first bonding layer 1012 .
- the first bonding layer 1012 and the second bonding layer 1022 have the above structural features, which cause the first bonding layer 1012 and the second bonding layer 1022 to have different bonding temperatures, and the second bonding layer 1012 has the above structural features.
- the bonding temperature of the bonding layer 1022 is lower than the bonding temperature of the first bonding layer 1012 .
- the first thickness ratio of the first pure metal layer 1012 - 1 and the second pure metal layer 1012 - 2 is 10:1.
- the second thickness ratio of the third pure metal layer 1022-1 and the fourth pure metal layer 1022-2 is 4:6.
- the first light-emitting element is welded first.
- Component 2021 the first bonding layer 1012 on the first pad 101 has a higher melting start temperature - 200°C.
- the first light-emitting component 2021 is transferred to the backplane 100 once and then hot-keyed. Combine and heat to about 260°C to ensure that the first bonding layer 1012 of the first bonding pad 101 is completely melted to form the first alloy 1013, thereby achieving sufficient thermal bonding of the first light-emitting element 2021.
- the melting temperature of the first alloy 1013 formed by heating the first bonding layer 1012 is approximately 200°C.
- the second bonding layer 1022 of the second bonding pad 102 has a lower starting melting temperature, during this heating process, the second bonding layer 1022 is also completely melted and the second alloy 1023 is formed.
- the second alloy 1023 formed by the second bonding layer 1022 has a lower melting temperature than the first alloy 1013.
- the second alloy The melting temperature of 1023 is approximately 125°C. Therefore, after the repaired light-emitting element 2022 is transferred to the back plate 100, thermal bonding is performed again. At this time, the back plate 100 is heated to about 150°C and lower than 200°C.
- the second alloy 1023 can be guaranteed to be completely melted, and The first alloy 1013 of the first bonding pad 101 will not melt, thereby ensuring that the first light-emitting element 2021 will not be displaced or detached, and at the same time, it can also ensure that the repaired light-emitting element 2022 is fully bonded to the backplane 100 .
- thermal bonding is performed, and the back plate 100 is heated by local heating, that is, only the first light-emitting element 2021 transferred with the first light-emitting element 2021 is heated.
- the bonding pad 101 heat the first bonding pad 101 to about 260°C to ensure that the first bonding layer 1012 of the first bonding pad 101 is completely melted to form the first alloy 1013, thereby achieving sufficient thermal bonding of the first light-emitting element 2021.
- the melting temperature of the first alloy 1013 formed by heating the first bonding layer 1012 is approximately 200°C.
- the second bonding pad 102 is not heated or is heated to a relatively small extent, and the second bonding layer 1022 of the second bonding pad 102 will not melt or soften or will not melt completely. Maintain the multi-layer pure metal layer structure or part of the multi-layer pure metal layer structure.
- thermal bonding is performed again, and local heating is also performed.
- the second pad 102 with the repaired light-emitting element 2022 is heated and transferred, and the backplane 100 is heated. to about 150°C and lower than 200°C.
- the second bonding layer 1022 can be guaranteed to be completely melted, but the first alloy 1013 of the first bonding pad 101 will not melt, thereby ensuring that the first light-emitting element 2021 will not appear. Risks such as displacement or falling off can be avoided, while ensuring that the repaired light-emitting element 2022 is fully bonded to the backplane 100 .
- a multi-layer pure metal layer of the first bonding layer 1012 and the second bonding layer 1022 is formed using an evaporation method.
- pure metal is used as the evaporation metal source.
- a pure metal layer is obtained above the junction layer 1011 or the second bonding layer 1021).
- Different pure metal layers can be obtained by selecting different evaporation metal sources and the thickness of each pure metal layer can be precisely controlled, thereby achieving the above structural requirements. of multiple layers of pure metal.
- the first bonding layer 1012 and the second bonding layer 1022 include the same number of pure metal layers formed of the same pure metal, and the pure metal layers formed of the same pure metal are The stacking order in the first bonding layer 1012 and the second bonding layer 1022 is different. As shown in Figure 3a, the third pure metal layer 1022-1 in the second bonding layer 1022 and the first pure metal layer 1012-1 in the first bonding layer 1012, the fourth pure metal layer 1022-1 in the second bonding layer 1022 The pure metal layer 1022-2 and the second pure metal layer 1012-2 in the first bonding layer 1012 are respectively pure metal layers formed of the same pure metal.
- the first pure metal layer 1012-1 and The third pure metal layer 1022-1 may be a Sn metal layer
- the second pure metal layer 1012-2 and the fourth pure metal layer 1022-2 may be an In metal layer.
- the third pure metal layer 1022-1 and the fourth pure metal layer 1022-2 in the second bonding layer 1022 are different from the first pure metal layer 1022-2 in the first bonding layer 1012.
- the stacking order of the metal layer 1012-1 and the second pure metal layer 1012-2 is different, that is, the second pure metal layer 1012-2 shown in Figure 3a is located above the first pure metal layer 1012-1, and the fourth pure metal layer 1022-2 is located below the third pure metal layer 1022-1.
- the stacking sequence of multiple pure metal layers can also meet the requirements of different bonding temperatures, while increasing the design flexibility of the pad.
- the multi-layer metal layers in the first bonding layer 1012 and the second bonding layer 1022 are respectively pure metal layers formed of the same metal. It can be understood that according to the eutectic theory of metals, the first bonding layer 1012 and the second bonding layer 1022 may include pure metal layers formed of different metals. For example, at least one pure metal layer in the second bonding layer 1022 is formed of a material and any layer of pure metal in the first bonding layer 1012 The layers are all made of different materials.
- the first bonding layer 1012 includes a Sn layer and a Zn layer
- the second bonding layer 1022 includes a Sn layer and an In layer
- the first bonding layer 1012 includes an Ag layer and a Zn layer
- the second bonding layer 1022 includes an Ag layer and a Zn layer.
- Layer 1022 includes a Bi layer and a Sn layer. It is only necessary that the bonding temperature of the first bonding layer 1012 is higher than the bonding temperature of the second bonding layer 1022 .
- the first bonding layer 1012 and the second bonding layer 1022 have different numbers of pure metal layers, and the first bonding layer 1012 and the second bonding layer 1022 have different numbers of pure metal layers.
- the pure metal layer may be multiple pure metal layers formed of the same pure metal, or may include multiple pure metal layers formed of different pure metals.
- the first bonding layer 1012 includes a first pure metal layer 1012-1 and a second pure metal layer 1012-2
- the second bonding layer 1022 includes a third pure metal layer 1022-1, a fourth pure metal layer 1022-1, and a fourth pure metal layer 1022-1.
- Metal layer 1022-2 and fifth pure metal layer 1022-3 are examples of metal layers.
- the first pure metal layer 1012-1 and the second pure metal layer 1012-2 may be Sn layers and Ag layers respectively, while the third pure metal layer 1022-1 and the fourth pure metal layer 1022- 2 and the fifth pure metal layer 1022-3 are Sn layer, In layer and Bi layer respectively.
- the pure metal layers in the first bonding layer 1012 and the second bonding layer 1022 can be selected from the combinations shown in Table 1 below, and the stacking sequence can be changed according to actual needs.
- the orthogonal projected areas of the first adhesive layer 1011 and the first bonding layer 1012 in the first bonding pad 101 on the surface of the backplane 100 are different, and the first adhesive layer 1011 is
- the orthogonal projected area of the surface of the back plate 100 is denoted as S1
- the orthogonal projected area of the first bonding layer 1012 on the surface of the back plate 100 is denoted as S2.
- S1>S2 more specifically, S1 is 1.15 ⁇ 2.5 times of S2. It is shown in FIG. 3 c that the width of the first adhesive layer 1011 is greater than the width of the first bonding layer 1012 .
- the orthographic projection of the first bonding layer 1012 on the surface of the back plate 100 falls within the orthographic projection of the first adhesive layer 1011 on the surface of the back plate 100 .
- the orthogonal projected areas of the second adhesive layer 1021 and the second bonding layer 1022 in the second bonding pad 102 on the surface of the back plate 100 are different, and the second adhesive layer 1021 is on the surface of the back plate 100
- the orthographic projection area of the second bonding layer 1022 on the surface of the back plate 100 is designated as S3 . Specifically, S3>S4. More specifically, S3 is 1.15 ⁇ 2.5 times that of S4. It is shown in FIG.
- the ratio of S1 to S2 and the ratio of S3 to S4 may be the same or different.
- S1 is 1.2 times that of S2, and S3 is 2.0 times that of S4, or S1 is 2.2 times that of S2, and S3 is 1.5 times that of S4.
- S1 is 1.2 times that of S2
- S3 is 2.0 times that of S4
- S1 is 2.2 times that of S2
- S3 is 1.5 times that of S4.
- the materials of the first bonding layer 1011 and the second bonding layer 1012 can be Cr, Ni, etc., and the first bonding layer 1011 is set to be larger than the first bonding layer 1012 (the second bonding layer 1021 is set to be larger than The second bonding layer 1022 is larger), which can provide a better welding effect and can reduce the problem of the first bonding layer 1012 (or the second bonding layer 1022) melting and overflowing to the surroundings during the welding process.
- the difference from Figure 3c is that the first adhesive layer 1011 also extends to the first bonding layer 1012 toward the side close to the first bonding layer 1012 side. It can also be understood that a groove structure is formed on the first bonding layer 1011, and the first bonding layer 1012 is disposed in the groove structure.
- the second adhesive layer 1021 also extends toward the side close to the second bonding layer 1022 to the side surface of the second bonding layer 1022 . It can also be understood that a groove structure is formed on the second adhesive layer 1021, and the second bonding layer 1022 is disposed in the groove structure.
- the depth of the groove formed by the first bonding layer 1011 may be less than or equal to the thickness of the nearest metal layer in contact with the multi-layer metal of the first bonding layer 1012 .
- the depth of the groove formed by the second bonding layer 1021 may be less than or equal to the thickness of the nearest metal layer in contact with the multi-layer metal of the second bonding layer 1022 .
- the depths of the grooves formed by the first adhesive layer 1011 and the second adhesive layer 1021 may be the same or different.
- the embodiment shown in FIG. 3d can further reduce the problem of the first bonding layer 1012 (or the second bonding layer 1022) melting and spilling to the surroundings during the bonding process.
- the first bonding pad 101 further includes a first connection electrode 1014 disposed on the side of the first adhesive layer 1011 facing away from the first bonding layer 1012
- the second bonding pad 102 further includes The second connection electrode 1024 is provided on the side of the second adhesive layer 1021 facing away from the second bonding layer 1022.
- the first connection electrode 1014 and the second connection electrode 1024 are respectively connected to the circuit inside the backplane 100 .
- the first adhesive layer 1011 can be used to block the first connection electrode 1014 and the first bonding layer 1012
- the second adhesive layer 1021 can be used to block the second connection electrode 1024 and the second bonding layer 1022 to act as a solder resist. Referring to FIG.
- the orthogonal projected area of the first adhesive layer 1011 on the surface of the back plate 100 is denoted as S1
- the orthogonal projected area of the first bonding layer 1012 on the surface of the back plate 100 is denoted as S2
- the second adhesive layer 1021 The orthogonal projected area of the second bonding layer 1022 on the surface of the back plate 100 is denoted as S3
- the orthogonal projected area of the second bonding layer 1022 on the surface of the back plate 100 is denoted as S4 .
- the orthographic projection area of the first connection electrode 1014 on the surface of the back plate 100 is denoted as S5
- the orthogonal projection area of the second connection electrode 1024 on the surface of the back plate 100 is denoted as S6.
- the ratio of S1 to S5 and the ratio of S3 to S6 may be the same or different.
- S1 is 1.8 times that of S5, S3 is 2.4 times that of S6, or S1 is 2.2 times that of S5, and S3 is 1.2 times that of S6.
- S2 and S5 may be equal or unequal, S2 may be greater than S5, or S2 may be less than S5, which is not limited in this embodiment.
- S4 and S6 may be equal or unequal, S4 may be greater than S6, or S4 may be less than S6, which is not limited in this embodiment.
- the first adhesive layer 1011 can extend toward the side near the first connection electrode 1014 to the side of the first connection electrode 1014
- the second adhesive layer 1021 can extend toward the side near the first connection electrode 1024 Extending to the side of the second connection electrode 1024.
- the first connection electrode 1014 and the second connection electrode 1024 can be better isolated, thereby achieving a better solder resist effect.
- the height of the first adhesive layer 1011 extending toward the first connection electrode 1014 may be less than the thickness of the first connection electrode 1014 , or may be equal to the thickness of the first connection electrode 1014 .
- the height of the second adhesive layer 1021 extending toward the second connection electrode 1024 may be less than the thickness of the second connection electrode 1014 or equal to the thickness of the second connection electrode 1024 . This embodiment is not limiting.
- the display panel 200 of this embodiment includes a backplane 201 and a light-emitting element 202 located above the backplane 201 .
- the backplane 201 includes a first bonding pad 101 and a second bonding pad 102 .
- the first bonding pad 101 includes a first adhesive layer 1011 (see FIG. 1 ) and a first alloy 1013 .
- the light-emitting element 202 includes a first light-emitting element 2021 fixed on the first bonding pad 101, and the first light-emitting element 2021 is welded to the first bonding pad 101 through the first alloy 1013.
- the first alloy 1013 formed by heating the first bonding layer 1012 of the first light-emitting element 2021 at the first bonding temperature is fixed to the first bonding pad 101 .
- the first bonding layer 1012 includes multiple layers of pure metal layers formed of metals with different melting points.
- the first bonding layer 1012 has the structure described in Embodiment 1. Structural characteristics of the first bonding layer 1012. When the back plate 201 is heated and the first light-emitting element 2021 is welded, the multiple pure metal layers of the first bonding layer 1012 are melted to form the first alloy 1013, and the first light-emitting element 2021 is fixed to the first pad 101 of the back plate 201. at.
- a uniform alloy solder is formed above the first adhesive layer 1011.
- the alloy solder melts to form the above-mentioned first alloy 1013, and the first light-emitting element 2021 is heated.
- the component 2021 is fixed to the first pad 101 of the backplane 201 .
- the second bonding pad 102 includes a second adhesive layer 1021 (see FIG. 1 ) and a second bonding layer 1022 , where the second bonding layer 1022 is a multi-layer structure, and the multi-layer structure is a multi-layer structure.
- Pure metal layer for example, 2 layers, 3 layers or even more layers of pure metal.
- the metal forming the above pure metal layer can be selected from the metals shown in Table 1 in Implementation 1.
- the second bonding layer 1022 formed of multiple pure metal layers has a lower melting temperature than the first alloy 1013.
- the orthogonal projected area S3 of the second adhesive layer 1021 on the surface of the back plate 100 and the orthogonal projected area of the second bonding layer 1022 on the surface of the back plate 100 are denoted S4
- the relationship can be S3>S4, more specifically, S3 is 1.15 ⁇ 2.5 times of S4. It can provide better welding effect, and can reduce the problem of the second bonding layer 1022 melting and overflowing to the periphery during the process of welding the repaired light-emitting element 2022 to the backplane 100 .
- the light-emitting element 202 of the display panel 200 may also include at least one repair light-emitting element 2022, which is used to replace the first light-emitting element 2021 on the back panel 201 that is damaged or cannot light normally. At least one repaired light emitting element 2022 is soldered to at least one second pad 102 via the second alloy 1023 .
- the second bonding layer 1022 has a lower melting temperature than the first alloy 1013, that is, the second welding temperature of the second bonding layer 1022 is lower than the temperature at which the first alloy 1013 starts to melt, therefore, at least After a repair light-emitting element 2022 is transferred to at least one second bonding pad 102, the at least one second bonding pad 102 is heated at a second bonding temperature until the multi-layer pure metal layer of the second bonding layer 1022 is completely melted. The second bonding layer 1022 forms a second alloy 1023. After stopping heating, the second alloy 1023 fixes the repaired light-emitting element 2022 to the second bonding pad 102.
- the second bonding pad 102 where the light-emitting element 2022 has not been transferred still retains the second bonding layer 1022 having a multi-layer structure. Therefore, the second bonding pad 102 on the backplane 201 of the display panel 200 has two forms: in one form, the second bonding pad 102 includes a second adhesive layer 1021 and a second bonding layer 1022 with a multi-layer structure. ; In another form, the second bonding pad 102 includes a second adhesive layer 1021 and a second alloy 1023.
- the first alloy 1013 will not soften or melt, so the first light-emitting element 2021 on the first pad 101 will not have the risk of shifting or falling off, and will not affect the first light-emitting element. 2021 stability, thereby ensuring the overall yield of the display panel 200.
- the second bonding pad 102 includes a second adhesive layer 1021 (see FIG. 1 ) and a second alloy 1023 .
- the second alloy 1023 is a uniform alloy formed above the second adhesive layer 1021 solder.
- the uniform alloy solder also has a lower melting temperature than the first alloy 1013. Therefore, when bonding to repair the light-emitting element 2022, the first alloy 1013 will not soften or melt, ensuring that the first alloy solder on the first pad 101 is bonded.
- the light-emitting element 2021 will not have the risk of shifting or falling off, and will not affect the stability of the first light-emitting element 2021, thereby ensuring the overall yield of the display panel 200.
- the second bonding layer 1022 of the above-mentioned multi-layer structure has a higher melting start temperature than the second alloy 1023 formed of a uniform alloy solder. Therefore, during the soldering process of the first light-emitting element 2021, it has better Thermal stability of the first light-emitting element 2021 will not be softened or melted due to thermal bonding, ensuring the integrity and stability of the second bonding pad 102.
- Figure 4b shows that the first bonding pad 101 also includes a first connection electrode 1014 disposed on the side of the first adhesive layer 1011 facing away from the first bonding layer 1012, and the second bonding pad 102 also It includes a second connection electrode 1024 disposed on the side of the second adhesive layer 1021 facing away from the second bonding layer 1022 .
- the orthographic projection area S1 of the first adhesive layer 1011 on the surface of the back plate 100 is greater than the orthographic projection area S5 of the first connection electrode 1014 on the surface of the back plate 100 , and the orthographic projection area S1 of the second adhesive layer 1021 on the surface of the back plate 100
- the area S3 is larger than the orthogonal projection area S6 of the second connection electrode 1024 on the surface of the back plate 100, please refer to the description of FIG. 3e in the first embodiment for details.
- the light-emitting element 202 is an LED chip.
- the LED chip includes a substrate 202-1, a first semiconductor layer 202-2 formed on the substrate 202-1, and a first semiconductor layer 202-2.
- the second semiconductor layer 202-4 of the opposite conductivity type of 202-2 and the active layer 202-3 located between the first semiconductor layer 202-2 and the second semiconductor layer 202-4, the active layer 202-3 is The light-emitting layer of the light-emitting element 202 also includes an insulating protective layer 202-5 formed on the surface of the light-emitting element 202.
- the first semiconductor layer 202-2 may be an N-type semiconductor layer
- the second semiconductor layer 202-4 may be a P-type semiconductor layer.
- the first semiconductor layer 202-2 is a P-type semiconductor layer and the second semiconductor layer 202-4 is an N-type semiconductor layer.
- the first semiconductor layer 202-2 may be an N-type GaN layer
- the active layer 202-3 may be a quantum well layer
- the second semiconductor layer 202-4 may be a P-type GaN layer.
- the first semiconductor layer 202-2 may be an N-type GaN layer, such as a Si-doped GaN layer
- the active layer 202-3 may be an InGaN/GaN multiple quantum well
- the second semiconductor layer 202-4 may be a p-type GaN layer. layer, such as a Mg-doped GaN layer.
- the LED chip of this embodiment further includes an electrode structure 202 - 6 , through which the light-emitting element 202 is fixed to the first pad 101 or the second pad 102 of the backplane 201 .
- the electrode structure 202-6 includes a first electrode 202-61 and a second electrode 202-62.
- the first electrode 202-61 is connected to the first semiconductor layer 202-2, and the second electrode 202-62 is connected to the second semiconductor layer 202-62. 4 connections.
- the first semiconductor layer 202-2 may be formed with a mesa, and metal materials, such as Au, Ag, Al, Cu, Zn, etc., are deposited on the mesa to form the above-mentioned first electrode 202-61. Similarly, Au, Ag, Al, Cu, etc. are deposited on the second semiconductor layer 202-4 to form the second electrode 202-62. It can be understood that structures such as a transparent conductive layer and a current blocking layer may also be formed above the second semiconductor layer 202-4.
- the light-emitting element includes a first light-emitting element 3011 used as a main light-emitting element of the display panel, and is used in repairing replacement display panels. Repair the light-emitting element 3012 of the first light-emitting element 3011 that cannot light up normally.
- the first light-emitting element 3011 and the repair light-emitting element 3012 are both LED chips.
- the LED chip includes a substrate 301-1, a first semiconductor layer 301-2 formed on the substrate 301-1, and a second semiconductor layer 301-2 having an opposite conductivity type.
- the semiconductor layer 301-4 and the active layer 301-3 located between the first semiconductor layer 301-2 and the second semiconductor layer 301-4.
- the active layer 301-3 is the light-emitting layer of the LED chip, and also includes forming Insulating protective layer 301-5 on the surface of the LED chip.
- the first semiconductor layer 301-2 may be an N-type semiconductor layer
- the second semiconductor layer 301-4 may be a P-type semiconductor layer.
- the first semiconductor layer 301-2 is a P-type semiconductor layer and the second semiconductor layer 301-4 is an N-type semiconductor layer.
- the first semiconductor layer 301-2 may be an N-type GaN layer
- the active layer 301-3 may be a quantum well layer
- the second semiconductor layer 301-4 may be a P-type GaN layer.
- the first semiconductor layer 301-2 may be an N-type GaN layer, such as a Si-doped GaN layer
- the active layer 301-3 may be an InGaN/GaN multiple quantum well
- the second semiconductor layer 301-4 may be a p-type GaN layer. layer, such as a Mg-doped GaN layer.
- the first light-emitting element 3011 and the repaired light-emitting element 3012 of this embodiment also include electrode structures 301-6.
- the first light-emitting element 3011 and the repaired light-emitting element 3012 are respectively fixed to the back through electrode junctions 301-6.
- Plate 302 see Figure 7).
- the electrode structure 301-6 of the first light-emitting element 3011 includes an ohmic contact layer 301-61 and a first welding layer 301-62.
- the ohmic contact layer 301-61 is formed on the first semiconductor layer 301-2 and the second welding layer respectively. Above the semiconductor layer 301-4, an ohmic contact is formed.
- First soldering layers 301-62 are formed above the ohmic contact layers 301-61 on the first semiconductor layer 301-2 and the second semiconductor layer 301-4 respectively, for soldering the LED chip to the backplane 302 (see Figure 7) pads and achieve electrical connection.
- the first welding layer 301-62 is a multi-layer structure.
- the multi-layer structure is a multi-layer pure metal layer.
- the first welding layer 301-62 includes sixth pure metal layer 301-621 and seventh pure metal layer 301-622, sixth pure metal layer 301-621 and seventh pure metal layer 301-622 Pure metal layers formed of different pure metals, and the melting point of the sixth pure metal layer 301-621 is higher than the melting point of the seventh pure metal layer 301-622.
- the sixth pure metal layer 301-621 may be a Sn metal layer
- the seventh pure metal layer 301-622 may be an In metal layer.
- the electrode structure 301-6 of the repaired light-emitting element 3012 includes an ohmic contact layer 301-61 and a second solder layer 3012-62.
- the ohmic contact layer 301-61 is formed on the first semiconductor layer 301-2 and the second semiconductor layer respectively. Above layer 301-4, an ohmic contact is formed.
- Second soldering layers 3012-62 are respectively formed above the ohmic contact layers 301-61 on the first semiconductor layer 301-2 and the second semiconductor layer 301-4 for soldering the repaired light-emitting element 3012 to the back plate 302 (see FIG. 7) on the repair pad and achieve electrical connection.
- the second welding layer 3012-62 is also a multi-layer structure.
- the multi-layer structure is a multi-layer pure metal layer.
- the second welding layer 3012-62 and the first welding layer 301-62 have the same number of pure metal layers.
- the second welding layer 3012-62 includes an eighth pure metal layer. 3012-621 and the ninth pure metal layer 3012-622.
- the eighth pure metal 3012-621, the sixth pure metal layer 301-621, the ninth pure metal layer 3012-622, and the seventh pure metal layer 301-622 are respectively made of the same pure metal.
- the eighth pure metal layers 3012-621 are also Sn metal layers, and the ninth pure metal layers 3012-622 can also be In metal layers.
- the stacking order of pure metal layers formed of the same metal in the second welding layer 3012-62 and the first welding layer 301-62 is the same. That is, as shown in Figures 6a and 7b, in the direction gradually away from the ohmic contact layer 301-61, the first soldering layer 301-62 is sequentially stacked with the sixth pure metal layer 301-621 and the seventh pure metal layer 301-622. , the second welding layer 3012-62 sequentially stacks the eighth pure metal layer 3012-621 and the ninth pure metal layer 3012-622.
- the thickness ratio of the high melting point pure metal layer to the low melting point pure metal layer is between 1:10 ⁇ 10:1.
- the high melting point pure metal layer and the low melting point pure metal layer are The first welding layer 301-62 and the second welding layer 3012-62 have a third thickness ratio and a fourth thickness ratio respectively, and the third thickness ratio is greater than the fourth thickness ratio, that is, the first welding layer 301-62
- the fourth thickness ratio is not the same, and the third thickness ratio of the sixth pure metal layer 301-621 and the seventh pure metal layer 301-622 is greater than that of the eighth pure metal layer 3012-621 and the ninth pure metal layer 3012-622.
- the third thickness ratio is 10:1, and the fourth thickness ratio is 4:6; or, the third thickness ratio is 4:6, and the fourth thickness ratio is 1:10; or, the third thickness ratio The thickness ratio is 8:1, and the fourth thickness ratio is 2:1; or the third thickness ratio is 5:7, and the fourth thickness ratio is 3:8.
- the above-mentioned different thickness ratios also represent different contents of different pure metal layers in the first welding layer 301-62 or the second welding layer 3012-62.
- the first soldering layer 301-62 and the second soldering layer 3012-62 can be controlled to have different bonding temperatures, and the bonding temperature of the second soldering layer 301-62 is lower than that of the first soldering layer 301-62. combined temperature.
- the first soldering layer 301-62 of the first light-emitting element 3011 and the second soldering layer 3012-62 of the repaired light-emitting element 3012 have the above structural features, which make the first soldering layer 301-62 and the second soldering layer
- the layers 3012-62 have different bonding temperatures, and the second solder layer 3012-62 has a lower bonding temperature than the first solder layer 301-62.
- FIG. 7 when welding the light-emitting element on the back plate 302 , the first light-emitting element 3011 is first transferred to the first pad 3021 of the back plate 302 .
- the first welding layer 301-62 of the first light-emitting element 3011 has a relatively high melting start temperature - 200°C.
- the first light-emitting element 3011 is thermally bonded and heated to about 260°C to ensure that the first light-emitting element 3011
- the first welding layer 301-62 of 3011 is completely melted to form the third alloy 301-63, thereby achieving full thermal bonding of the first light-emitting element 3011.
- the melting temperature of the third alloy 301-63 formed by heating the first welding layer 301-62 is approximately 200°C.
- the repaired light-emitting element 3012 When welding the repaired light-emitting element 3012, the repaired light-emitting element 3012 is first heated. Since the second welding layer 3012-62 has a lower starting melting temperature, during the heating process, the second welding layer 3012-62 is also completely The fourth alloy 301-64 is melted and formed. In view of the above structural design of the second welding layer 3012-62 and the first welding layer 301-62, the fourth alloy 301-64 formed by the second welding layer 3012-62 is compared with The third alloy 301-63 formed in the first welding layer 301-62 has a lower melting temperature. In this embodiment, the melting temperature of the fourth alloy 301-64 is approximately 125°C.
- the repaired light-emitting element 3012 is transferred to the second repair pad 3022 of the backplane 302, and thermal bonding is performed again.
- the fourth alloy 301-64 is heated to 150°C. Around 200°C, it can ensure that the fourth alloy 301-64 is completely melted, while the third alloy 301-63 formed by the first welding layer 301-62 will not melt, thereby ensuring that the first light-emitting element 3011 will not There is no risk of displacement or falling off, and at the same time, it can ensure that the repaired light-emitting element 3012 is fully bonded to the backplane 302 .
- an evaporation method is used to form multiple pure metal layers of the first welding layer 301-62 and the second welding layer 3012-62.
- This method uses pure metal as the evaporation metal source, and in the ohmic contact layer 301-62 A pure metal layer is obtained above 61.
- different evaporated metal sources different pure metal layers can be obtained and the thickness of each pure metal layer can be precisely controlled, thereby obtaining multi-layer pure metal layers that meet the above structural requirements.
- the first welding layer 301-62 and the second welding layer 3012-62 include the same number of pure metal layers formed of the same pure metal, and the pure metal layers formed of the same pure metal The stacking order of the layers in the first solder layer 301-62 and the second solder layer 3012-62 is different. As shown in Figure 8, referring to Figure 6a at the same time, the eighth pure metal layer 3012-621 in the second welding layer 3012-62 and the sixth pure metal layer 301-621 of the first welding layer 301-62, the second welding layer The ninth pure metal layer 3012-622 in 3012-62 and the seventh pure metal layer 301-622 of the first welding layer 301-62 are respectively pure metal layers formed of the same pure metal.
- the sixth pure metal layer The pure metal layers 301-621 and the eighth pure metal layer 3012-621 may be Sn metal layers, and the seventh pure metal layer 301-622 and the ninth pure metal layer 3012-622 may be In metal layers.
- the eighth pure metal layer 3012-621 and the ninth pure metal layer 3012-622 in the second welding layer 3012-62 are different from those in the first welding layer 301-62.
- the stacking sequence of the sixth pure metal layer 301-621 and the seventh pure metal layer 301-622 is different, that is, as shown in Figures 6a and 9, in the direction gradually away from the ohmic contact layer 301-61, the first welding layer 301 -62 stacks the sixth pure metal layer 301-621 and the seventh pure metal layer 301-622 in sequence, and the second welding layer 3012-62 stacks the ninth pure metal layer 3012-622 and the eighth pure metal layer 3012 in sequence- 621.
- the stacking sequence of multiple pure metal layers can also meet the requirements of different bonding temperatures, while increasing the design flexibility of the electrode structure 301-6.
- the multi-layer metal layers in the first welding layer 301-62 and the second welding layer 3012-62 are respectively pure metal layers formed of the same metal. It can be understood that according to the eutectic theory of metals, the first welding layer The layers 301-62 and the second welding layer 3012-62 may include pure metal layers formed of different metals. For example, the formation material of at least one pure metal layer in the second welding layer 3012-62 is different from the material in the first welding layer 301-62. The materials forming any pure metal layer are different.
- the first soldering layer 301-62 includes a Sn layer and a Zn layer
- the second soldering layer 3012-62 includes a Sn layer and an In layer
- the first soldering layer 301- 62 includes an Ag layer and a Zn layer
- the second solder layer 3012-62 includes a Bi layer and a Sn layer. It is only necessary that the bonding temperature of the first soldering layers 301-62 and 301-62 is higher than the bonding temperature of the second soldering layers 3012-62 and 301-62.
- the first welding layer 301-62 and the second welding layer 3012-62 have different numbers of pure metal layers, and the first welding layer 301-62 and the second welding layer
- the pure metal layer of 3012-62 can be multiple layers of pure metal layers formed of the same pure metal or multiple layers of pure metal layers formed of different pure golds.
- the first welding layer 301-62 includes a sixth pure metal layer 301-621 and a seventh pure metal layer 301-622
- the second welding layer 3012-62 includes an eighth pure metal layer 3012-621
- the ninth pure metal layer 3012-622 and the tenth pure metal layer 3012-623 are examples of the first welding layer 301-62 and the second welding layer 3012-62.
- the sixth pure metal layer 301-621 and the seventh pure metal layer 301-622 may be Sn layer and Ag layer respectively, while the eighth pure metal layer 3012-621 and the ninth pure metal layer 3012- 622 and the tenth pure metal layers 3012-623 are Sn layer, In layer and Bi layer respectively.
- the pure metal layers in the first welding layer 301-62 and the second welding layer 3012-62 can also be selected from the combinations shown in Table 1 in Embodiment 1, and the stacking sequence can be changed according to actual needs.
- the first welding layer 301-62 may include three or more pure metal layers
- the second welding layer 3012-62 may also include three or more pure metal layers
- the first welding layer 301-62 may include three or more pure metal layers.
- the multiple pure metal layers of the welding layer 301-62 and the second welding layer 3012-62 can be combined arbitrarily under the condition that the bonding temperature is met.
- the display panel 400 of this embodiment includes a backplane 401 and a light-emitting element 402 located above the backplane 401 .
- the back plate 401 includes a first bonding pad 4011 and a second bonding pad 4012 formed on the back plate 401 .
- the light-emitting element 402 is the light-emitting element provided in Embodiment 3, that is, it includes the first light-emitting element 3011 fixed to the first pad 4011.
- the display panel 400 may further include at least one repair light emitting element 3012 fixed to at least one second pad 4012 .
- the first light-emitting element 3011 and the repaired light-emitting element 3012 are welded to the backplane 401 through the welding process described in Embodiment 3 shown in FIG. 7 .
- the first light-emitting element 3011 is at the first bonding temperature
- the third alloy 301-63 formed after being heated by the first soldering layer 301-62 is fixed to the first bonding pad 4011.
- the repair light-emitting element 3012 is at the second bonding temperature.
- the fourth alloy 301-64 formed after being heated by the second welding layer 3012-62 is fixed to the second bonding pad 4012.
- the third alloy 301-63 is formed by heating the first welding layer 301-62
- the fourth alloy 301-64 is formed by heating the second welding layer 3012-62
- the first welding layer 301-62 and the second soldering layer 3012-62 has the structural design described in Embodiment 3, therefore, the first bonding temperature is higher than the second bonding temperature. Therefore, the bonding process of repairing the light-emitting element 3012 will not affect the stability of the first light-emitting element 3011, thereby ensuring the overall yield of the display panel 400.
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Abstract
The present application provides a display panel, and a light-emitting element and a back plate for use in the display panel. A first pad and a second pad used as a repair pad are formed on the back plate; the first pad comprises a first adhesive layer and a first bonding layer; the second pad comprises a second adhesive layer and a second bonding layer; the first bonding layer and the second bonding layer are both have a multi-layer structure; the multi-layer structure comprises a plurality of pure metal layers, and the bonding temperature of the first bonding layer is higher than the bonding temperature of the second bonding layer. The plurality of pure metal layers are formed on the first pad and the second pad by means of a vapor deposition method, so that the purity of each pure metal layer is ensured, thus facilitating subsequent formation of alloys having different melting points. When the second pad is heated to solder LED chips for repair, a first alloy on the first pad does not melt, so that the stability of LED chips on the first pad is ensured, and batch deviation of the LED chips is prevented, thereby ensuring the yield of batch transfer of the LED chips.
Description
本申请涉及半导体器件及装置技术领域,特别涉及一种显示面板及用于该显示面板的发光元件和背板。The present application relates to the technical field of semiconductor devices and devices, and in particular to a display panel, a light-emitting element and a backplane used for the display panel.
LED以发光效率高、使用寿命长、安全可靠和环保节能的特点,在照明及显示领域尤其受到人们的关注。LED用作显示时,需要进行巨量LED芯片转移,转移的LED芯片数目在百万甚至千万级别,要实现量产级别的转移和键合良率99.9999%,键合后可修复技术是其中的关键。目前的金属键合工艺,通过沉积低熔点焊料合金,然后通过热的方式让焊料加热,键合后形成冶金结合的连接点。LED has attracted special attention in the lighting and display fields due to its high luminous efficiency, long service life, safety, reliability, environmental protection and energy saving. When LED is used for display, a huge amount of LED chips need to be transferred. The number of transferred LED chips is in the millions or even tens of millions. To achieve a mass production-level transfer and bonding yield of 99.9999%, repairable technology after bonding is one of them. key. The current metal bonding process deposits a low melting point solder alloy and then heats the solder thermally to form a metallurgically bonded connection point after bonding.
在Micro-LED显示背板中,LED芯片间的间隙非常小,在100 μm以下,一次键合后,如有发现转移不良或芯片不良,需要进行二次修复性键合,在进行二次修复性键合过程中,需要对新转移的LED芯片(用于修复)进行修复性金属键合。In the Micro-LED display backplane, the gap between LED chips is very small, less than 100 μm. After primary bonding, if transfer failure or chip failure is found, secondary repair bonding is required. During the sexual bonding process, the newly transferred LED chip (used for repair) needs to be repaired metal bonded.
现有的技术中,在背板中的一次键合和修复性键合用的焊盘上沉积同一种焊料,或者用于同一背板的LED芯片(一次键合芯片和修复用芯片)沉积同一种焊料。这样在修复性键合过程中,需要对新转移过来的LED芯片进行键合,该键合温度会使得已经键合好的一次键合LED芯片的键合点重新熔化或者部分熔化,从而导致LED芯片批量性偏移,或键合点损伤。如果不能进行有效的修复,要达到量产的良率(99.9999%)是非常困难的。In the existing technology, the same solder is deposited on the pads for primary bonding and repair bonding in the backplane, or the same solder is deposited on the LED chips (primary bonding chips and repair chips) used on the same backplane. solder. In this way, during the restorative bonding process, the newly transferred LED chip needs to be bonded. The bonding temperature will cause the bonding points of the once-bonded LED chip to be remelted or partially melted, resulting in the LED chip being damaged. Mass migration or bonding point damage. If effective repair cannot be carried out, it is very difficult to achieve mass production yield (99.9999%).
基于以上缺陷,有必要提供一种能够保证LED芯片转移良率的修复技术。Based on the above defects, it is necessary to provide a repair technology that can ensure the yield of LED chip transfer.
鉴于现有技术中显示面板中LED芯片转移及修复方面存在的缺陷,本申请提供一种显示面板及用于该显示面板的发光元件和背板。在背板的第一焊盘和用于修复的第二焊盘上分别形成第一键合层和第二键合层,该第一键合层和第二键合层包括多层纯金属层,并且第一键合层的键合温度高于第二键合层的键合温度。由此保证在完成一次键合后进行修复用LED芯片键合过程中,加热第二键合层不会对已经键合的LED产生影响,不会发生LED批量性偏移的情况,从而保证LED芯片的转移良率。In view of the shortcomings in the transfer and repair of LED chips in display panels in the prior art, this application provides a display panel, a light-emitting element and a backplane used for the display panel. A first bonding layer and a second bonding layer are respectively formed on the first bonding pad of the backplane and the second bonding pad for repair. The first bonding layer and the second bonding layer include multiple pure metal layers. , and the bonding temperature of the first bonding layer is higher than the bonding temperature of the second bonding layer. This ensures that during the bonding process of the repair LED chips after the primary bonding is completed, heating the second bonding layer will not affect the bonded LEDs, and the LED batch offset will not occur, thus ensuring that the LED Chip transfer yield.
根据本申请的一个实施例,提供一种用于键合发光元件的背板,所述背板的表面设置有用于键合发光元件的第一焊盘及第二焊盘,所述第二焊盘用作修复焊盘,其中,所述第一焊盘包括第一粘结层和第一键合层,所述第二焊盘包括第二粘结层和第二键合层,所述第一键合层和所述第二键合层均为多层结构,所述多层结构包括多层纯金属层,并且所述第一键合层的键合温度高于所述第二键合层的键合温度。According to an embodiment of the present application, a backplane for bonding light-emitting elements is provided. A first bonding pad and a second bonding pad for bonding light-emitting elements are provided on the surface of the backplate. The second bonding pad is used for bonding light-emitting elements. The pad is used as a repair pad, wherein the first pad includes a first adhesive layer and a first bonding layer, the second pad includes a second adhesive layer and a second bonding layer, and the Both the first bonding layer and the second bonding layer are multi-layer structures, the multi-layer structure includes multiple pure metal layers, and the bonding temperature of the first bonding layer is higher than that of the second bonding layer. The bonding temperature of the layer.
可选地,所述第一键合层和所述第二键合层具有相同层数的纯金属层,或者所述第一键合层和所述第二键合层具有不同层数的纯金属层。Optionally, the first bonding layer and the second bonding layer have the same number of pure metal layers, or the first bonding layer and the second bonding layer have different numbers of pure metal layers. metal layer.
可选地,所述第一键合层包括至少两层由不同金属形成的纯金属层,所述第二键合层包括至少两层由不同金属形成的纯金属层。Optionally, the first bonding layer includes at least two pure metal layers formed of different metals, and the second bonding layer includes at least two pure metal layers formed of different metals.
可选地,所述第一键合层和所述第二键合层均包括由第一金属和第二金属形成的交替叠置的多层纯金属层,并且,所述第一金属的熔点高于所述第二金属的熔点。Optionally, both the first bonding layer and the second bonding layer include alternately stacked multiple pure metal layers formed of a first metal and a second metal, and the melting point of the first metal Higher than the melting point of the second metal.
可选地,所述第一金属和所述第二金属形成的纯金属层的厚度比介于1:10~ 10:1。Optionally, the thickness ratio of the pure metal layer formed by the first metal and the second metal is between 1:10 and 10:1.
可选地,所述第一金属和所述第二金属形成的纯金属层在所述第一键合层中具有第一厚度比,所述第一金属和所述第二金属形成的纯金属层在所述第二键合层中具有第二厚度比,并且所述第一厚度比大于在所述第二厚度比。Optionally, the pure metal layer formed by the first metal and the second metal has a first thickness ratio in the first bonding layer, and the pure metal layer formed by the first metal and the second metal A layer has a second thickness ratio in the second bonding layer, and the first thickness ratio is greater than the second thickness ratio.
可选地,在所述第一键合层和所述第二键合层中的多层纯金属层的层叠顺序不同。Optionally, the stacking order of the multiple pure metal layers in the first bonding layer and the second bonding layer is different.
可选地,所述第二键合层的多层纯金属层中至少有一层纯金属层的形成材料不同于所述第一键合层中的多层纯金属层中任意一层纯金属层的形成材料。Optionally, at least one pure metal layer among the plurality of pure metal layers in the second bonding layer is formed from a material different from any one of the plurality of pure metal layers in the first bonding layer. of forming materials.
可选的,所述第一粘结层在所述背板的表面的正投影面积为所述第一键合层在所述背板的表面的正投影面积的1.15~2.5倍;和/或,所述第二粘结层在所述背板的表面的正投影面积为所述第二键合层在所述背板的表面的正投影面积的1.15~2.5倍。Optionally, the orthogonal projected area of the first bonding layer on the surface of the back plate is 1.15 to 2.5 times the orthogonal projected area of the first bonding layer on the surface of the back plate; and/or , the orthogonal projected area of the second bonding layer on the surface of the back plate is 1.15 to 2.5 times the orthogonal projected area of the second bonding layer on the surface of the back plate.
可选的,所述第一焊盘还包括位于所述第一粘结层背向所述第一键合层一侧的第一连接电极;所述第一粘结层在所述背板的表面的正投影面积为所述第一连接电极在所述背板的表面的正投影面积的1.15~2.5倍;和/或,所述第二焊盘层还包括位于所述第二粘结层背向所述第二键合层一侧的第二连接电极;所述第二粘结层在所述背板的表面的正投影面积为所述第二连接电极在所述背板的表面的正投影面积的1.15~2.5倍。Optionally, the first bonding pad further includes a first connection electrode located on a side of the first adhesive layer facing away from the first bonding layer; the first adhesive layer is on a side of the backplane. The orthographic projection area of the surface is 1.15 to 2.5 times the orthographic projection area of the first connection electrode on the surface of the backplane; and/or, the second pad layer further includes a surface located on the second adhesive layer The second connection electrode on the side facing away from the second bonding layer; the orthogonal projected area of the second adhesive layer on the surface of the back plate is the area of the second connection electrode on the surface of the back plate. 1.15~2.5 times the orthographic projection area.
根据本申请的另一实施例,提供一种显示面板,其包括:
背板,所述背板上形成有第一焊盘和第二焊盘,其中所述第一焊盘包括第一粘结层和第一合金,所述第二焊盘包括第二粘结层和第二键合层,所述第二键合层为多层结构,所述多层结构包括多层纯金属层;以及
固定在所述背板上的发光元件,所述发光元件包括第一发光元件,所述第一发光元件经所述第一合金焊接至所述第一焊盘,并且所述第一合金开始熔化的温度高于所述第二键合层的键合温度。 According to another embodiment of the present application, a display panel is provided, which includes:
A backplane having a first bonding pad and a second bonding pad formed on the backboard, wherein the first bonding pad includes a first adhesive layer and a first alloy, and the second bonding pad includes a second adhesive layer and a second bonding layer, the second bonding layer is a multi-layer structure, the multi-layer structure includes multiple pure metal layers; and a light-emitting element fixed on the backplane, the light-emitting element includes a first A light-emitting element, the first light-emitting element is welded to the first bonding pad through the first alloy, and the temperature at which the first alloy starts to melt is higher than the bonding temperature of the second bonding layer.
背板,所述背板上形成有第一焊盘和第二焊盘,其中所述第一焊盘包括第一粘结层和第一合金,所述第二焊盘包括第二粘结层和第二键合层,所述第二键合层为多层结构,所述多层结构包括多层纯金属层;以及
固定在所述背板上的发光元件,所述发光元件包括第一发光元件,所述第一发光元件经所述第一合金焊接至所述第一焊盘,并且所述第一合金开始熔化的温度高于所述第二键合层的键合温度。 According to another embodiment of the present application, a display panel is provided, which includes:
A backplane having a first bonding pad and a second bonding pad formed on the backboard, wherein the first bonding pad includes a first adhesive layer and a first alloy, and the second bonding pad includes a second adhesive layer and a second bonding layer, the second bonding layer is a multi-layer structure, the multi-layer structure includes multiple pure metal layers; and a light-emitting element fixed on the backplane, the light-emitting element includes a first A light-emitting element, the first light-emitting element is welded to the first bonding pad through the first alloy, and the temperature at which the first alloy starts to melt is higher than the bonding temperature of the second bonding layer.
可选地,所述发光元件还包括修复发光元件,所述修复发光元件经第二合金焊接在至少一个所述第二焊盘上。Optionally, the light-emitting element further includes a repaired light-emitting element, and the repaired light-emitting element is welded to at least one of the second bonding pads through a second alloy.
可选地,所述发光元件包括:
半导体结构,所述半导体结构包括导电类型相反的第一半导体层、第二半导体层以及位于所述第一半导体层和所述第二半导体层之间的发光层;
电极结构,包括第一电极和第二电极,所述第一电极与所述第一半导体层导电连接,所述第二电极与所述第二半导体层导电连接,所述发光元件经所述电极结构焊接至所述背板。 Optionally, the light-emitting element includes:
A semiconductor structure, the semiconductor structure including a first semiconductor layer with opposite conductivity types, a second semiconductor layer, and a light-emitting layer located between the first semiconductor layer and the second semiconductor layer;
An electrode structure includes a first electrode and a second electrode, the first electrode is conductively connected to the first semiconductor layer, the second electrode is conductively connected to the second semiconductor layer, and the light-emitting element is connected through the electrode The structure is welded to the backing plate.
半导体结构,所述半导体结构包括导电类型相反的第一半导体层、第二半导体层以及位于所述第一半导体层和所述第二半导体层之间的发光层;
电极结构,包括第一电极和第二电极,所述第一电极与所述第一半导体层导电连接,所述第二电极与所述第二半导体层导电连接,所述发光元件经所述电极结构焊接至所述背板。 Optionally, the light-emitting element includes:
A semiconductor structure, the semiconductor structure including a first semiconductor layer with opposite conductivity types, a second semiconductor layer, and a light-emitting layer located between the first semiconductor layer and the second semiconductor layer;
An electrode structure includes a first electrode and a second electrode, the first electrode is conductively connected to the first semiconductor layer, the second electrode is conductively connected to the second semiconductor layer, and the light-emitting element is connected through the electrode The structure is welded to the backing plate.
可选的,所述第二粘结层在所述背板的表面的正投影面积为所述第二键合层在所述背板的表面的正投影面积的1.15~2.5倍。Optionally, the orthogonal projected area of the second bonding layer on the surface of the back plate is 1.15 to 2.5 times the orthogonal projected area of the second bonding layer on the surface of the back plate.
根据本申请的再一实施例,提供一种用于显示面板的发光元件,所述发光元件分为第一发光元件和用于替换所述显示面板中无法正常点亮的所述第一发光元件的修复发光元件,所述发光元件包括半导体结构以及形成在所述半导体结构表面的电极结构,所述第一发光元件的电极结构包括第一焊接层,所述修复发光元件的电极结构包括第二焊接层,所述第一焊接层和所述第二焊接层均为多层结构,所述多层结构包括多层纯金属层,并且所述第一焊接层的键合温度高于所述第二焊接层的键合温度。According to yet another embodiment of the present application, a light-emitting element for a display panel is provided. The light-emitting element is divided into a first light-emitting element and a first light-emitting element used to replace the first light-emitting element that cannot light up normally in the display panel. Repair a light-emitting element, the light-emitting element includes a semiconductor structure and an electrode structure formed on the surface of the semiconductor structure, the electrode structure of the first light-emitting element includes a first welding layer, the electrode structure of the repair light-emitting element includes a second Welding layer, the first welding layer and the second welding layer are both multi-layer structures, the multi-layer structure includes multiple pure metal layers, and the bonding temperature of the first welding layer is higher than that of the third welding layer. The bonding temperature of the two welding layers.
如上所述,本申请的显示面板及用于该显示面板的发光元件和背板,具有以下有益效果:
本申请的背板上形成有第一焊盘和用作修复焊盘的第二焊盘,第一焊盘包括第一粘结层和第一键合层,第二焊盘包括第二粘结层和第二键合层,第一键合层和第二键合层均为多层结构,该多层结构包括多层纯金属层,通过控制多层纯金属层中高熔点金属层和低熔点金属层的含量(例如厚度比)来控制第一键合层和第二键合层的键合温度,使得第一键合层的键合温度高于第二键合层的键合温度。上述多层纯金属层采用蒸镀方法形成在第一焊盘和第二焊盘上,从而保证了每一纯金属层的纯度,便于后续形成不同熔点的合金。在第一键合温度下,第一键合层熔化形成第一合金将LED芯片固定至背板的第一焊盘;与此同时,第二焊盘上的第二键合层熔化形成第二合金,该第二合金的熔化温度低于第一合金的熔化温度。由此,当加热第二焊盘焊接修复用LED芯片时,第一焊盘上的第一合金不会发生熔化,保证了第一焊盘上LED芯片的稳定性,防止其出现批量偏移,从而能够保证LED芯片批量转移的良率。 As mentioned above, the display panel of the present application, the light-emitting element and the backplane used for the display panel have the following beneficial effects:
A first bonding pad and a second bonding pad used as a repair pad are formed on the backplane of the present application. The first bonding pad includes a first adhesive layer and a first bonding layer, and the second bonding pad includes a second bonding layer. layer and the second bonding layer, the first bonding layer and the second bonding layer are all multi-layer structures. The multi-layer structure includes multiple pure metal layers. By controlling the high melting point metal layer and the low melting point metal layer in the multi-layer pure metal layer The content of the metal layer (for example, the thickness ratio) controls the bonding temperature of the first bonding layer and the second bonding layer, so that the bonding temperature of the first bonding layer is higher than the bonding temperature of the second bonding layer. The above-mentioned multiple pure metal layers are formed on the first and second bonding pads by evaporation, thereby ensuring the purity of each pure metal layer and facilitating the subsequent formation of alloys with different melting points. At the first bonding temperature, the first bonding layer melts to form a first alloy to fix the LED chip to the first pad of the backplane; at the same time, the second bonding layer on the second pad melts to form a second An alloy whose melting temperature of the second alloy is lower than the melting temperature of the first alloy. Therefore, when the second pad is heated to weld the repair LED chip, the first alloy on the first pad will not melt, ensuring the stability of the LED chip on the first pad and preventing batch deviation. This ensures the yield of LED chip batch transfer.
本申请的背板上形成有第一焊盘和用作修复焊盘的第二焊盘,第一焊盘包括第一粘结层和第一键合层,第二焊盘包括第二粘结层和第二键合层,第一键合层和第二键合层均为多层结构,该多层结构包括多层纯金属层,通过控制多层纯金属层中高熔点金属层和低熔点金属层的含量(例如厚度比)来控制第一键合层和第二键合层的键合温度,使得第一键合层的键合温度高于第二键合层的键合温度。上述多层纯金属层采用蒸镀方法形成在第一焊盘和第二焊盘上,从而保证了每一纯金属层的纯度,便于后续形成不同熔点的合金。在第一键合温度下,第一键合层熔化形成第一合金将LED芯片固定至背板的第一焊盘;与此同时,第二焊盘上的第二键合层熔化形成第二合金,该第二合金的熔化温度低于第一合金的熔化温度。由此,当加热第二焊盘焊接修复用LED芯片时,第一焊盘上的第一合金不会发生熔化,保证了第一焊盘上LED芯片的稳定性,防止其出现批量偏移,从而能够保证LED芯片批量转移的良率。 As mentioned above, the display panel of the present application, the light-emitting element and the backplane used for the display panel have the following beneficial effects:
A first bonding pad and a second bonding pad used as a repair pad are formed on the backplane of the present application. The first bonding pad includes a first adhesive layer and a first bonding layer, and the second bonding pad includes a second bonding layer. layer and the second bonding layer, the first bonding layer and the second bonding layer are all multi-layer structures. The multi-layer structure includes multiple pure metal layers. By controlling the high melting point metal layer and the low melting point metal layer in the multi-layer pure metal layer The content of the metal layer (for example, the thickness ratio) controls the bonding temperature of the first bonding layer and the second bonding layer, so that the bonding temperature of the first bonding layer is higher than the bonding temperature of the second bonding layer. The above-mentioned multiple pure metal layers are formed on the first and second bonding pads by evaporation, thereby ensuring the purity of each pure metal layer and facilitating the subsequent formation of alloys with different melting points. At the first bonding temperature, the first bonding layer melts to form a first alloy to fix the LED chip to the first pad of the backplane; at the same time, the second bonding layer on the second pad melts to form a second An alloy whose melting temperature of the second alloy is lower than the melting temperature of the first alloy. Therefore, when the second pad is heated to weld the repair LED chip, the first alloy on the first pad will not melt, ensuring the stability of the LED chip on the first pad and preventing batch deviation. This ensures the yield of LED chip batch transfer.
形成上述第一键合层和第二键合层的纯金属层可以是相同的几种金属形成的交替叠置的纯金属层,并且相同金属形成的纯金属的叠置顺序可以相同也可以不同;或者第二键合层中至少有一层纯金属的形成材料不同于第一键合层中任意一层纯金属层的形成材料。由此增加了形成第一键合层和第二键合层的纯金属的选择范围,增加了焊盘的设计灵活性和适应性。The pure metal layers forming the first bonding layer and the second bonding layer may be alternately stacked pure metal layers formed of the same metals, and the stacking order of pure metals formed of the same metal may be the same or different. ; Or at least one layer of pure metal in the second bonding layer is made of a material different from the material of any pure metal layer in the first bonding layer. This increases the selection range of pure metals for forming the first bonding layer and the second bonding layer, and increases the design flexibility and adaptability of the pads.
本申请中的发光元件分为第一发光元件和修复用的第二发光元件,第一发光元件的电极结构包括第一焊接层,修复发光元件的电极结构包括第二焊接层,第一焊接层和第二焊接层均为多层结构,该多层结构与背板上第一焊盘和第二焊盘的多层结构具有相同的结构特征,由此,采用本申请的发光元件时,同样能够在焊接修复发光元件时保证第一发光元件不发生偏移,进而能够保证发光元件的转移良率。The light-emitting element in this application is divided into a first light-emitting element and a second light-emitting element for repair. The electrode structure of the first light-emitting element includes a first welding layer. The electrode structure of the repair light-emitting element includes a second welding layer. The first welding layer and the second soldering layer are all multi-layer structures, and the multi-layer structure has the same structural characteristics as the multi-layer structure of the first pad and the second pad on the backplane. Therefore, when using the light-emitting element of the present application, the same It can ensure that the first light-emitting element does not shift when welding and repairing the light-emitting element, thereby ensuring the transfer yield of the light-emitting element.
本申请的显示面板采用本申请的背板,发光元件具有良好的转移良率,因此,显示面板具有高的量产良率。The display panel of the present application uses the backplane of the present application, and the light-emitting elements have a good transfer yield. Therefore, the display panel has a high mass production yield.
图1显示为本申请实施例一提供的用于键合发光元件的背板的结构示意图。FIG. 1 shows a schematic structural diagram of a backplane for bonding light-emitting elements provided in Embodiment 1 of the present application.
图2显示为在图1所示的背板上焊接LED芯片的示意图。Figure 2 shows a schematic diagram of soldering LED chips on the backplane shown in Figure 1.
图3a显示为本申请实施例一的一可选实施例中用于键合发光元件的背板的结构示意图。Figure 3a shows a schematic structural diagram of a backplane used for bonding light-emitting elements in an optional embodiment of Embodiment 1 of the present application.
图3b显示为本申请实施例一的另一可选实施例中用于键合发光元件的背板的结构示意图。Figure 3b shows a schematic structural diagram of a backplane used for bonding light-emitting elements in another optional embodiment of Embodiment 1 of the present application.
图3c显示为本申请实施例一的另一可选实施例中用于键合发光元件的背板的结构示意图。Figure 3c shows a schematic structural diagram of a backplane used for bonding light-emitting elements in another optional embodiment of Embodiment 1 of the present application.
图3d显示为本申请实施例一的另一可选实施例中用于键合发光元件的背板的结构示意图。Figure 3d shows a schematic structural diagram of a backplane used for bonding light-emitting elements in another optional embodiment of Embodiment 1 of the present application.
图3e显示为本申请实施例一的另一可选实施例中用于键合发光元件的背板的结构示意图。Figure 3e shows a schematic structural diagram of a backplane used for bonding light-emitting elements in another optional embodiment of Embodiment 1 of the present application.
图4a显示为本申请实施例二提供的显示面板的结构示意图。Figure 4a shows a schematic structural diagram of a display panel provided for Embodiment 2 of the present application.
图4b显示为本申请实施例二的另一可选实施例中显示面板的结构示意图。Figure 4b shows a schematic structural diagram of a display panel in another optional embodiment of Embodiment 2 of the present application.
图5显示为图4a所示的显示面板中的发光元件的结构示意图。FIG. 5 is a schematic structural diagram of the light-emitting element in the display panel shown in FIG. 4a.
图6a显示本申请实施例三提供的发光元件的第一发光元件的结构示意图。FIG. 6a shows a schematic structural diagram of the first light-emitting element of the light-emitting element provided in Embodiment 3 of the present application.
图6b显示为本申请实施例三提供的发光元件的修复发光元件的结构示意图。Figure 6b shows a schematic structural diagram of the repaired light-emitting element of the light-emitting element provided in Embodiment 3 of the present application.
图7显示为在背板上焊接实施例三提供的发光元件的示意图。FIG. 7 shows a schematic diagram of soldering the light-emitting element provided in Embodiment 3 on a backplane.
图8显示为本申请实施例三的一可选实施例提供的发光元件的修复发光元件的结构示意图。FIG. 8 shows a schematic structural diagram of a light-emitting element repaired as an optional embodiment of Embodiment 3 of the present application.
图9显示为本申请实施例三的一可选实施例提供的发光元件的修复发光元件的结构示意图。FIG. 9 shows a schematic structural diagram of a light-emitting element repaired as an optional embodiment of Embodiment 3 of the present application.
图10显示为本申请实施例四提供的显示面板的结构示意图。FIG. 10 shows a schematic structural diagram of a display panel provided in Embodiment 4 of the present application.
元件标号说明
Component label description
100 | 背板 | 3011 | 第一发光元件 |
101 | 第一焊盘 | 3012 | 修复发光元件 |
1011 | 第一粘结层 | 301-1 | 衬底 |
1012 | 第一键合层 | 301-2 | 第一半导体层 |
1012-1 | 第一纯金属层 | 301-3 | 有源层 |
1012-2 | 第二纯金属层 | 301-4 | 第二半导体层 |
102 | 第二焊盘 | 301-5 | 绝缘保护层 |
1021 | 第二粘结层 | 301-6 | 电极结构 |
1022 | 第二键合层 | 301-61 | 欧姆接触层 |
1022-1 | 第三纯金属层 | 301-62 | 第一焊接层 |
1022-2 | 第四纯金属层 | 301-621 | 第六纯金属层 |
1022-3 | 第五纯金属层 | 301-622 | 第七纯金属层 |
1013 | 第一合金 | 3012-62 | 第二焊接层 |
1023 | 第二合金 | 3012-621 | 第八纯金属层 |
1014 | 第一连接电极 | 3012-622 | 第九纯金属层 |
1024 | 第二连接电极 | 3012-623 | 第十纯金属层 |
200 | 显示面板 | 301-63 | 第三合金 |
201 | 背板 | 301-64 | 第四合金 |
202 | 发光元件 | 302 | 背板 |
2021 | 第一发光元件 | 3021 | 第一焊盘 |
2022 | 修复发光元件 | 3022 | 第二焊盘 |
202-1 | 衬底 | 400 | 显示面板 |
202-2 | 第一半导体层 | 401 | 背板 |
202-3 | 有源层 | 4011 | 第一焊盘 |
202-4 | 第二半导体层 | 4012 | 第二焊盘 |
202-5 | 绝缘保护层 | 402 | 发光元件 |
202-6 | 电极结构 | ||
202-61 | 第一电极 | ||
202-62 | 第二电极 |
100 | backplane | 3011 | first light emitting element |
101 | first pad | 3012 | Repair light-emitting components |
1011 | first bonding layer | 301-1 | substrate |
1012 | first bonding layer | 301-2 | first semiconductor layer |
1012-1 | first pure metal layer | 301-3 | active layer |
1012-2 | Second pure metal layer | 301-4 | second semiconductor layer |
102 | Second pad | 301-5 | Insulating protective layer |
1021 | Second adhesive layer | 301-6 | Electrode structure |
1022 | Second bonding layer | 301-61 | Ohmic contact layer |
1022-1 | The third pure metal layer | 301-62 | first welding layer |
1022-2 | The fourth pure metal layer | 301-621 | The sixth pure metal layer |
1022-3 | The fifth pure metal layer | 301-622 | The seventh pure metal layer |
1013 | first alloy | 3012-62 | Second welding layer |
1023 | Second alloy | 3012-621 | The eighth pure metal layer |
1014 | first connection electrode | 3012-622 | Ninth pure metal layer |
1024 | second connecting electrode | 3012-623 | The tenth pure metal layer |
200 | display panel | 301-63 | Third alloy |
201 | backplane | 301-64 | Fourth alloy |
202 | Light emitting element | 302 | backplane |
2021 | first light emitting element | 3021 | first pad |
2022 | Repair light-emitting components | 3022 | Second pad |
202-1 | substrate | 400 | display panel |
202-2 | first semiconductor layer | 401 | backplane |
202-3 | active layer | 4011 | first pad |
202-4 | second semiconductor layer | 4012 | Second pad |
202-5 | Insulating protective layer | 402 | Light emitting element |
202-6 | Electrode structure | ||
202-61 | first electrode | ||
202-62 | second electrode |
在此处键入本发明的最佳实施方式描述段落。Type here the paragraph describing the best mode for carrying out the invention.
以下通过特定的具体实例说明本申请的实施方式,本领域技术人员可由本说明书所揭露的内容轻易地了解本申请的其他优点与功效。本申请还可以通过另外不同的具体实施方式加以实施或应用,本说明书中的各项细节也可以基于不同观点与应用,在没有背离本申请的精神下进行各种修饰或改变。The following describes the implementation of the present application through specific examples. Those skilled in the art can easily understand other advantages and effects of the present application from the content disclosed in this specification. This application can also be implemented or applied through other different specific embodiments. Various details in this specification can also be modified or changed in various ways based on different viewpoints and applications without departing from the spirit of this application.
本实施例提供一种用于键合发光元件的背板。如图1所示,该背板100的表面设置有用于键合发光元件的第一焊盘101及第二焊盘102,其中,该第一焊盘101用于焊接第一次转移至背板100上的第一发光元件2021(参见图2),即主发光元件;第二焊盘102用作修复焊盘,用于焊接替换无法正常工作的主发光元件的修复发光元件2022(参见图2)。同样参照图1,该第一焊盘101包括第一粘结层1011及第一键合层1012,其中第一键合层1012为多层结构。第二焊盘102包括第二粘结层1021及第二键合层1022,其中,第二键合层1022同样为多层结构。在可选实施例中,第一键合层1012和第二键合层1022的多层结构均为多层纯金属层。例如可以是两层、三层、四层甚至更多层纯金属层,纯金属层的层数可以根据第一焊盘101和第二焊盘102的设计要求灵活设定,并且第一键合层1012和第二键合层1022中纯金属层的层数可以相同也可以不同。This embodiment provides a backplane for bonding light-emitting elements. As shown in Figure 1, the surface of the backplane 100 is provided with a first bonding pad 101 and a second bonding pad 102 for bonding light-emitting elements, wherein the first bonding pad 101 is used for welding the first transfer to the backplane. The first light-emitting element 2021 (see Figure 2) on 100 is the main light-emitting element; the second pad 102 is used as a repair pad for welding the repair light-emitting element 2022 (see Figure 2) that replaces the main light-emitting element that cannot work properly. ). Referring also to FIG. 1 , the first bonding pad 101 includes a first adhesive layer 1011 and a first bonding layer 1012 , wherein the first bonding layer 1012 is a multi-layer structure. The second bonding pad 102 includes a second adhesive layer 1021 and a second bonding layer 1022, wherein the second bonding layer 1022 is also a multi-layer structure. In an optional embodiment, the multi-layer structures of the first bonding layer 1012 and the second bonding layer 1022 are both multi-layer pure metal layers. For example, it can be two, three, four or even more pure metal layers. The number of pure metal layers can be flexibly set according to the design requirements of the first bonding pad 101 and the second bonding pad 102, and the first bonding The number of pure metal layers in layer 1012 and second bonding layer 1022 may be the same or different.
参照图1,在可选实施例中,第一键合层1012包括第一纯金属层1012-1和第二纯金属层1012-2,第一纯金属层1012-1和第二纯金属层1012-2为不同的纯金属形成的纯金属层,并且形成上述第一纯金属层1012-1的纯金属的熔点高于形成第二纯金属层1012-2的纯金属的熔点。例如,第一纯金属层1012-1可以是Sn金属层,第二纯金属层1012-2可以是In金属层。第二键合层1022与第一键合层1012包括相同层数的纯金属层,即包括第三纯金属层1022-1及第四纯金属层1022-2。在本实施例中,上述第三纯金属1022-1和第一纯金属层1012-1、第四纯金属层1022-2和第二纯金属层1012-2分别为相同的纯金属形成的纯金属层,例如上述第三纯金属层1022-1同样是Sn金属层,第四纯金属层1022-2同样是In金属层。并且相同纯金属形成的纯金属层在第一键合层1012和第二键合层1022中的层叠顺序相同,即图1所示的第二纯金属层1012-2位于第一纯金属层1012-1的上方,第四纯金属层1022-2位于第三纯金属层1022-1的上方。Referring to Figure 1, in an optional embodiment, the first bonding layer 1012 includes a first pure metal layer 1012-1 and a second pure metal layer 1012-2, the first pure metal layer 1012-1 and the second pure metal layer 1012-2 is a pure metal layer formed of different pure metals, and the melting point of the pure metal forming the first pure metal layer 1012-1 is higher than the melting point of the pure metal forming the second pure metal layer 1012-2. For example, the first pure metal layer 1012-1 may be a Sn metal layer, and the second pure metal layer 1012-2 may be an In metal layer. The second bonding layer 1022 and the first bonding layer 1012 include the same number of pure metal layers, that is, they include a third pure metal layer 1022-1 and a fourth pure metal layer 1022-2. In this embodiment, the third pure metal 1022-1 and the first pure metal layer 1012-1, the fourth pure metal layer 1022-2 and the second pure metal layer 1012-2 are respectively formed of the same pure metal. The metal layer, for example, the above-mentioned third pure metal layer 1022-1 is also a Sn metal layer, and the fourth pure metal layer 1022-2 is also an In metal layer. And the stacking sequence of pure metal layers formed of the same pure metal in the first bonding layer 1012 and the second bonding layer 1022 is the same, that is, the second pure metal layer 1012-2 shown in Figure 1 is located in the first pure metal layer 1012 Above -1, the fourth pure metal layer 1022-2 is located above the third pure metal layer 1022-1.
可选地,高熔点的纯金属层和低熔点的纯金属层的厚度比介于1:10~ 10:1,为了获得不同的焊接温度,高熔点的纯金属层和低熔点的纯金属层在第一键合层1012和第二键合层1022中分别具有第一厚度比和第二厚度比,并且该第一厚度比大于第二厚度比,即,第一键合层1012中的第一纯金属层1012-1和第二纯金属层1012-2的第一厚度比与第二键合层1022中的第三纯金属层1022-1和第四纯金属层1022-2的第二厚度比并不相同,并且第一纯金属层1012-1和第二纯金属层1012-2的第一厚度比大于第三纯金属层1022-1和第四纯金属层1022-2的第二厚度比。例如,可选地,第一厚度比为10:1,第二厚度比为4:6;或者,第一厚度比为4:6,第二厚度比为1:10;或者,第一厚度比为8:1,第二厚度比为2:1;或者,第一厚度比为5:7,第二厚度比为3:8。上述不同的厚度比值也即表征了不同纯金属层在第一键合层1012和第二键合层1022中的含量不同。由于不同金属具有不同的熔点,因此,通过控制上述厚度比值的不同,并且控制熔点较高的纯金属层在第一键合层1012中的含量大于在第二键合层1022中的含量,可以控制第一键合层1012和第二键合层1022具有不同的键合温度,并且使得第二键合层1022的键合温度低于第一键合层1012的键合温度。Optionally, the thickness ratio of the high melting point pure metal layer to the low melting point pure metal layer is between 1:10~10:1. In order to obtain different welding temperatures, the high melting point pure metal layer and the low melting point pure metal layer are There are first thickness ratios and second thickness ratios in the first bonding layer 1012 and the second bonding layer 1022 respectively, and the first thickness ratio is greater than the second thickness ratio, that is, the first thickness ratio in the first bonding layer 1012 is The first thickness ratio of a pure metal layer 1012-1 and the second pure metal layer 1012-2 is compared with the second thickness ratio of the third pure metal layer 1022-1 and the fourth pure metal layer 1022-2 in the second bonding layer 1022. The thickness ratios are not the same, and the first thickness ratio of the first pure metal layer 1012-1 and the second pure metal layer 1012-2 is greater than the second thickness ratio of the third pure metal layer 1022-1 and the fourth pure metal layer 1022-2. thickness ratio. For example, optionally, the first thickness ratio is 10:1 and the second thickness ratio is 4:6; or the first thickness ratio is 4:6 and the second thickness ratio is 1:10; or the first thickness ratio is 8:1, and the second thickness ratio is 2:1; or, the first thickness ratio is 5:7, and the second thickness ratio is 3:8. The above-mentioned different thickness ratios also indicate that the contents of different pure metal layers in the first bonding layer 1012 and the second bonding layer 1022 are different. Since different metals have different melting points, by controlling the difference in the thickness ratio and controlling the content of the pure metal layer with a higher melting point in the first bonding layer 1012 to be greater than the content in the second bonding layer 1022, it is possible to The first bonding layer 1012 and the second bonding layer 1022 are controlled to have different bonding temperatures, and the bonding temperature of the second bonding layer 1022 is lower than the bonding temperature of the first bonding layer 1012 .
如上所述,第一键合层1012和第二键合层1022具有上述结构特征,该结构特征使得第一键合层1012和第二键合层1022具有不同的键合温度,并且第二键合层1022的键合温度低于第一键合层1012的键合温度。如图2所示,以第一键合层1012中,第一纯金属层1012-1和第二纯金属层1012-2的第一厚度比为10:1,在第二键合层1022中,第三纯金属层1022-1和第四纯金属层1022-2的第二厚度比为4:6为例,在图1所示的背板100上焊接发光元件时,首先焊接第一发光元件2021,此时,第一焊盘101上的第一键合层1012具有较高的熔化开始温度——200℃,鉴于此,第一发光元件2021一次转移至背板100后,进行热键合,加热至260℃左右,保证第一焊盘101的第一键合层1012完全熔化形成第一合金1013,实现第一发光元件2021的充分热键合。第一键合层1012经加热形成的上述第一合金1013的熔化温度大约为200℃。由于第二焊盘102的第二键合层1022具有更低的开始熔化温度,因此在该加热过程中,第二键合层1022也完全熔化并且形成了第二合金1023,鉴于第二键合层1022和第一键合层1021的上述结构设计,第二键合层1022形成的该第二合金1023相比于第一合金1013具有更低的熔化温度,在本实施例中,第二合金1023的熔化温度大约为125℃。因此,在修复发光元件2022转移至背板100之后,再次进行热键合,此时将背板100加热至150℃左右,并且低于200℃,此时能够保证第二合金1023完全熔化,而第一焊盘101的第一合金1013则不会熔化,从而保证第一发光元件2021不会出现移位或者脱落等风险,同时还能保证修复发光元件2022充分键合至背板100。As mentioned above, the first bonding layer 1012 and the second bonding layer 1022 have the above structural features, which cause the first bonding layer 1012 and the second bonding layer 1022 to have different bonding temperatures, and the second bonding layer 1012 has the above structural features. The bonding temperature of the bonding layer 1022 is lower than the bonding temperature of the first bonding layer 1012 . As shown in FIG. 2 , in the first bonding layer 1012 , the first thickness ratio of the first pure metal layer 1012 - 1 and the second pure metal layer 1012 - 2 is 10:1. In the second bonding layer 1022 , the second thickness ratio of the third pure metal layer 1022-1 and the fourth pure metal layer 1022-2 is 4:6. For example, when welding the light-emitting element on the backplane 100 shown in Figure 1, the first light-emitting element is welded first. Component 2021. At this time, the first bonding layer 1012 on the first pad 101 has a higher melting start temperature - 200°C. In view of this, the first light-emitting component 2021 is transferred to the backplane 100 once and then hot-keyed. Combine and heat to about 260°C to ensure that the first bonding layer 1012 of the first bonding pad 101 is completely melted to form the first alloy 1013, thereby achieving sufficient thermal bonding of the first light-emitting element 2021. The melting temperature of the first alloy 1013 formed by heating the first bonding layer 1012 is approximately 200°C. Since the second bonding layer 1022 of the second bonding pad 102 has a lower starting melting temperature, during this heating process, the second bonding layer 1022 is also completely melted and the second alloy 1023 is formed. In view of the second bonding With the above structural design of the layer 1022 and the first bonding layer 1021, the second alloy 1023 formed by the second bonding layer 1022 has a lower melting temperature than the first alloy 1013. In this embodiment, the second alloy The melting temperature of 1023 is approximately 125°C. Therefore, after the repaired light-emitting element 2022 is transferred to the back plate 100, thermal bonding is performed again. At this time, the back plate 100 is heated to about 150°C and lower than 200°C. At this time, the second alloy 1023 can be guaranteed to be completely melted, and The first alloy 1013 of the first bonding pad 101 will not melt, thereby ensuring that the first light-emitting element 2021 will not be displaced or detached, and at the same time, it can also ensure that the repaired light-emitting element 2022 is fully bonded to the backplane 100 .
在可选实施例中,第一发光元件2021一次转移至背板100后,进行热键合,采用局部加热的方式对背板100进行加热,即仅加热转移有第一发光元件2021的第一焊盘101,将第一焊盘101加热至260℃左右,保证第一焊盘101的第一键合层1012完全熔化形成第一合金1013,实现第一发光元件2021的充分热键合。第一键合层1012经加热形成的上述第一合金1013的熔化温度大约为200℃。键合第一发光元件2021的过程中,第二焊盘102并未被加热或者受热程度比较小,第二焊盘102的第二键合层1022不会熔化或者软化或者不会完全熔化,仍保持多层纯金属层结构或部分多层纯金属层结构。需要键合修复发光元件2022时,修复发光元件2022转移至背板100之后,再次进行热键合,同样进行局部加热,加热转移有修复发光元件2022的第二焊盘102,将背板100加热至150℃左右,并且低于200℃,此时能够保证第二键合层1022完全熔化,而第一焊盘101的第一合金1013则不会熔化,从而保证第一发光元件2021不会出现移位或者脱落等风险,同时还能保证修复发光元件2022充分键合至背板100。In an optional embodiment, after the first light-emitting element 2021 is once transferred to the back plate 100, thermal bonding is performed, and the back plate 100 is heated by local heating, that is, only the first light-emitting element 2021 transferred with the first light-emitting element 2021 is heated. For the bonding pad 101, heat the first bonding pad 101 to about 260°C to ensure that the first bonding layer 1012 of the first bonding pad 101 is completely melted to form the first alloy 1013, thereby achieving sufficient thermal bonding of the first light-emitting element 2021. The melting temperature of the first alloy 1013 formed by heating the first bonding layer 1012 is approximately 200°C. During the process of bonding the first light-emitting element 2021, the second bonding pad 102 is not heated or is heated to a relatively small extent, and the second bonding layer 1022 of the second bonding pad 102 will not melt or soften or will not melt completely. Maintain the multi-layer pure metal layer structure or part of the multi-layer pure metal layer structure. When it is necessary to bond and repair the light-emitting element 2022, after the repaired light-emitting element 2022 is transferred to the backplane 100, thermal bonding is performed again, and local heating is also performed. The second pad 102 with the repaired light-emitting element 2022 is heated and transferred, and the backplane 100 is heated. to about 150°C and lower than 200°C. At this time, the second bonding layer 1022 can be guaranteed to be completely melted, but the first alloy 1013 of the first bonding pad 101 will not melt, thereby ensuring that the first light-emitting element 2021 will not appear. Risks such as displacement or falling off can be avoided, while ensuring that the repaired light-emitting element 2022 is fully bonded to the backplane 100 .
另外,本实施例中,采用蒸镀方法形成第一键合层1012和第二键合层1022的多层纯金属层,该方法以纯金属作为蒸镀金属源,在粘结层(第一粘结层1011或第二粘结层1021)上方得到纯金属层,通过选择不同的蒸镀金属源获得不同的纯金属层并且可以精确控制各纯金属层的厚度,由此可以获得符合上述结构要求的多层纯金属层。In addition, in this embodiment, a multi-layer pure metal layer of the first bonding layer 1012 and the second bonding layer 1022 is formed using an evaporation method. In this method, pure metal is used as the evaporation metal source. A pure metal layer is obtained above the junction layer 1011 or the second bonding layer 1021). Different pure metal layers can be obtained by selecting different evaporation metal sources and the thickness of each pure metal layer can be precisely controlled, thereby achieving the above structural requirements. of multiple layers of pure metal.
在本实施例的一可选实施例中,第一键合层1012和第二键合层1022包括由相同的纯金属形成的相同层数的纯金属层,相同纯金属形成的纯金属层在第一键合层1012和第二键合层1022中的层叠顺序不同。如图3a所示,第二键合层1022中的第三纯金属层1022-1与第一键合层1012中的第一纯金属层1012-1,第二键合层1022中的第四纯金属层1022-2与第一键合层1012中的第二纯金属层1012-2分别为相同的纯金属形成的纯金属层,例如上面所述的,第一纯金属层1012-1和第三纯金属层1022-1可以是Sn金属层,第二纯金属层1012-2和第四纯金属层1022-2可以是In金属层。但是在该可选实施例中,如图3a所示,第二键合层1022中第三纯金属层1022-1和第四纯金属层1022-2与第一键合层1012中第一纯金属层1012-1和第二纯金属层1012-2的层叠顺序不同,即图3a所示的第二纯金属层1012-2位于第一纯金属层1012-1的上方,第四纯金属层1022-2则位于第三纯金属层1022-1的下方。多层纯金属层的层叠顺序同样能够满足键合温度不同的要求,同时增加了焊盘的设计灵活性。In an optional embodiment of this embodiment, the first bonding layer 1012 and the second bonding layer 1022 include the same number of pure metal layers formed of the same pure metal, and the pure metal layers formed of the same pure metal are The stacking order in the first bonding layer 1012 and the second bonding layer 1022 is different. As shown in Figure 3a, the third pure metal layer 1022-1 in the second bonding layer 1022 and the first pure metal layer 1012-1 in the first bonding layer 1012, the fourth pure metal layer 1022-1 in the second bonding layer 1022 The pure metal layer 1022-2 and the second pure metal layer 1012-2 in the first bonding layer 1012 are respectively pure metal layers formed of the same pure metal. For example, as mentioned above, the first pure metal layer 1012-1 and The third pure metal layer 1022-1 may be a Sn metal layer, and the second pure metal layer 1012-2 and the fourth pure metal layer 1022-2 may be an In metal layer. However, in this optional embodiment, as shown in FIG. 3a, the third pure metal layer 1022-1 and the fourth pure metal layer 1022-2 in the second bonding layer 1022 are different from the first pure metal layer 1022-2 in the first bonding layer 1012. The stacking order of the metal layer 1012-1 and the second pure metal layer 1012-2 is different, that is, the second pure metal layer 1012-2 shown in Figure 3a is located above the first pure metal layer 1012-1, and the fourth pure metal layer 1022-2 is located below the third pure metal layer 1022-1. The stacking sequence of multiple pure metal layers can also meet the requirements of different bonding temperatures, while increasing the design flexibility of the pad.
如上所述,第一键合层1012和第二键合层1022中的多层金属层分别为相同金属形成的纯金属层,可以理解的是,根据金属的共晶理论,第一键合层1012和第二键合层1022可以包括不同金属形成的纯金属层,例如,第二键合层1022中至少有一层纯金属层的形成材料与第一键合层1012中的任意一层纯金属层的形成材料均不相同。可选地,第一键合层1012包括Sn层和Zn层,而第二键合层1022包括Sn层和In层,或者第一键合层1012包括Ag层和Zn层,而第二键合层1022包括Bi层和Sn层。只需满足第一键合层1012的键合温度高于第二键合层1022的键合温度即可。As mentioned above, the multi-layer metal layers in the first bonding layer 1012 and the second bonding layer 1022 are respectively pure metal layers formed of the same metal. It can be understood that according to the eutectic theory of metals, the first bonding layer 1012 and the second bonding layer 1022 may include pure metal layers formed of different metals. For example, at least one pure metal layer in the second bonding layer 1022 is formed of a material and any layer of pure metal in the first bonding layer 1012 The layers are all made of different materials. Alternatively, the first bonding layer 1012 includes a Sn layer and a Zn layer, and the second bonding layer 1022 includes a Sn layer and an In layer, or the first bonding layer 1012 includes an Ag layer and a Zn layer, and the second bonding layer 1022 includes an Ag layer and a Zn layer. Layer 1022 includes a Bi layer and a Sn layer. It is only necessary that the bonding temperature of the first bonding layer 1012 is higher than the bonding temperature of the second bonding layer 1022 .
在本实施例的另一可选实施例中,第一键合层1012与第二键合层1022具有不同层数的纯金属层,并且第一键合层1012和第二键合层1022的纯金属层可以是相同纯金属形成的多层纯金属层,也可以包括不同的纯金属形成的多层纯金属层。如图3b所示,第一键合层1012包括第一纯金属层1012-1和第二纯金属层1012-2,第二键合层1022包括第三纯金属层1022-1、第四纯金属层1022-2及第五纯金属层1022-3。在可选实施例中,第一纯金属层1012-1和第二纯金属层1012-2可以分别是Sn层和Ag层,而第三纯金属层1022-1、第四纯金属层1022-2及第五纯金属层1022-3分别是Sn层、In层及Bi层。In another optional embodiment of this embodiment, the first bonding layer 1012 and the second bonding layer 1022 have different numbers of pure metal layers, and the first bonding layer 1012 and the second bonding layer 1022 have different numbers of pure metal layers. The pure metal layer may be multiple pure metal layers formed of the same pure metal, or may include multiple pure metal layers formed of different pure metals. As shown in Figure 3b, the first bonding layer 1012 includes a first pure metal layer 1012-1 and a second pure metal layer 1012-2, and the second bonding layer 1022 includes a third pure metal layer 1022-1, a fourth pure metal layer 1022-1, and a fourth pure metal layer 1022-1. Metal layer 1022-2 and fifth pure metal layer 1022-3. In an optional embodiment, the first pure metal layer 1012-1 and the second pure metal layer 1012-2 may be Sn layers and Ag layers respectively, while the third pure metal layer 1022-1 and the fourth pure metal layer 1022- 2 and the fifth pure metal layer 1022-3 are Sn layer, In layer and Bi layer respectively.
本实施例中,第一键合层1012和第二键合层1022中的纯金属层可以选自如下表1所示的组合,并且层叠顺序可以根据实际需要进行变换。In this embodiment, the pure metal layers in the first bonding layer 1012 and the second bonding layer 1022 can be selected from the combinations shown in Table 1 below, and the stacking sequence can be changed according to actual needs.
表1 第一键合层和第二键合层的纯金属层组合
如上表1所示,仅仅示例性示出了第一键合层1012和第二键合层1022的可选的纯金属层组合,上述组合仅仅是示例性,虽然第一键合层1012仅示出了两种纯金属层的组合,可以理解的是第一键合层1012也可以包括三层或三层以上的纯金属层,同样地,第二键合层1022也可以包括三层以上的纯金属层,并且第一键合层1012和第二键合层1022的多层纯金属层可以在满足键合温度的条件下任意组合。 Table 1 Pure metal layer combinations of the first bonding layer and the second bonding layer
As shown in Table 1 above, optional pure metal layer combinations of the first bonding layer 1012 and the second bonding layer 1022 are only exemplary. The above combinations are only exemplary, although the first bonding layer 1012 is only In addition to the combination of two pure metal layers, it can be understood that the first bonding layer 1012 can also include three or more pure metal layers. Similarly, the second bonding layer 1022 can also include three or more layers. A pure metal layer, and the multiple pure metal layers of the first bonding layer 1012 and the second bonding layer 1022 can be arbitrarily combined under the condition that the bonding temperature is satisfied.
序号 | 第一键合层 | 第二键合层 |
1 | Sn+In | Sn+In |
2 | Sn+Bi | Sn+In |
3 | Sn+Bi | Sn+Bi+In |
4 | Sn+Ag | Sn+Bi |
5 | Sn+Zn | Sn+Zn +Bi |
如上表1所示,仅仅示例性示出了第一键合层1012和第二键合层1022的可选的纯金属层组合,上述组合仅仅是示例性,虽然第一键合层1012仅示出了两种纯金属层的组合,可以理解的是第一键合层1012也可以包括三层或三层以上的纯金属层,同样地,第二键合层1022也可以包括三层以上的纯金属层,并且第一键合层1012和第二键合层1022的多层纯金属层可以在满足键合温度的条件下任意组合。 Table 1 Pure metal layer combinations of the first bonding layer and the second bonding layer
serial number | first bonding layer | Second bonding layer |
1 | Sn+In | Sn+In |
2 | Sn+B | Sn+In |
3 | Sn+B | Sn+Bi+In |
4 | Sn+Ag | Sn+B |
5 | Sn+Zn | Sn+Zn+Bi |
As shown in Table 1 above, optional pure metal layer combinations of the first bonding layer 1012 and the second bonding layer 1022 are only exemplary. The above combinations are only exemplary, although the first bonding layer 1012 is only In addition to the combination of two pure metal layers, it can be understood that the first bonding layer 1012 can also include three or more pure metal layers. Similarly, the second bonding layer 1022 can also include three or more layers. A pure metal layer, and the multiple pure metal layers of the first bonding layer 1012 and the second bonding layer 1022 can be arbitrarily combined under the condition that the bonding temperature is satisfied.
在本实施例的一可选实施例中,第一焊盘101中第一粘结层1011和第一键合层1012在背板100的表面的正投影面积不同,第一粘结层1011在背板100的表面的正投影面积记为S1,第一键合层1012在背板100的表面的正投影面积记为S2。具体地S1>S2,更具体地,S1为S2的1.15~2.5倍。图3c中显示为第一粘结层1011的宽度大于第一键合层1012的宽度。可以理解的是,第一键合层1012在背板100的表面的正投影落入第一粘结层1011在背板100的表面的正投影内。在可选实施例中,第二焊盘102中第二粘结层1021和第二键合层1022在背板100的表面的正投影面积不同,第二粘结层1021在背板100的表面的正投影面积记为S3,第二键合层1022在背板100的表面的正投影面积记为S4。具体地,S3>S4。更具体地,S3为S4的1.15~2.5倍。图3c中显示为第二粘结层1021的宽度大于第二键合层1022的宽度。可以理解的是,第二键合层1022在背板100的表面的正投影落入第二粘结层1021在背板100的表面的正投影内。其中S1与S2的比值和S3与S4的比值可以相同或不同。例如S1为S2的1.2倍,S3为S4的2.0倍,或者S1为S2的2.2倍,S3为S4的1.5倍,以上仅为举例说明,不能作为限制本实施例的条件。其中第一粘结层1011和第二粘结层1012的材料可以为Cr、Ni等,将第一粘结层1011设置得比第一键合层1012大(第二粘结层1021设置得比第二键合层1022大),可以提供更好的焊接效果,并可以减少在焊接过程中第一键合层1012(或第二键合层1022)熔化外溢至周边的问题。In an optional embodiment of this embodiment, the orthogonal projected areas of the first adhesive layer 1011 and the first bonding layer 1012 in the first bonding pad 101 on the surface of the backplane 100 are different, and the first adhesive layer 1011 is The orthogonal projected area of the surface of the back plate 100 is denoted as S1, and the orthogonal projected area of the first bonding layer 1012 on the surface of the back plate 100 is denoted as S2. Specifically, S1>S2, more specifically, S1 is 1.15~2.5 times of S2. It is shown in FIG. 3 c that the width of the first adhesive layer 1011 is greater than the width of the first bonding layer 1012 . It can be understood that the orthographic projection of the first bonding layer 1012 on the surface of the back plate 100 falls within the orthographic projection of the first adhesive layer 1011 on the surface of the back plate 100 . In an optional embodiment, the orthogonal projected areas of the second adhesive layer 1021 and the second bonding layer 1022 in the second bonding pad 102 on the surface of the back plate 100 are different, and the second adhesive layer 1021 is on the surface of the back plate 100 The orthographic projection area of the second bonding layer 1022 on the surface of the back plate 100 is designated as S3 . Specifically, S3>S4. More specifically, S3 is 1.15~2.5 times that of S4. It is shown in FIG. 3 c that the width of the second adhesive layer 1021 is greater than the width of the second bonding layer 1022 . It can be understood that the orthographic projection of the second bonding layer 1022 on the surface of the back plate 100 falls within the orthographic projection of the second adhesive layer 1021 on the surface of the back plate 100 . The ratio of S1 to S2 and the ratio of S3 to S4 may be the same or different. For example, S1 is 1.2 times that of S2, and S3 is 2.0 times that of S4, or S1 is 2.2 times that of S2, and S3 is 1.5 times that of S4. The above are only examples and cannot be used as conditions to limit this embodiment. The materials of the first bonding layer 1011 and the second bonding layer 1012 can be Cr, Ni, etc., and the first bonding layer 1011 is set to be larger than the first bonding layer 1012 (the second bonding layer 1021 is set to be larger than The second bonding layer 1022 is larger), which can provide a better welding effect and can reduce the problem of the first bonding layer 1012 (or the second bonding layer 1022) melting and overflowing to the surroundings during the welding process.
在本实施例的可选实施例中,参照图3d,与图3c的不同之处在于,第一粘结层1011还朝靠近第一键合层1012的一侧延伸至第一键合层1012的侧面。也可以理解为第一粘结层1011上形成凹槽结构,第一键合层1012设置在凹槽结构内。第二粘结层1021还朝靠近第二键合层1022的一侧延伸至第二键合层1022的侧面。也可以理解为第二粘结层1021上形成凹槽结构,第二键合层1022设置在凹槽结构内。其中第一粘结层1011形成的凹槽的深度可以小于等于第一键合层1012的多层金属中与之接触的最近一层金属层的厚度。第二粘结层1021形成的凹槽的深度可以小于等于第二键合层1022的多层金属中与之接触的最近一层金属层的厚度。第一粘结层1011和第二粘接层1021形成的凹槽的深度可以相同或不同。相比于图3c所示的实施例,图3d所示的实施例可以更进一步的减少接过程中第一键合层1012(或第二键合层1022)熔化外溢至周边的问题。In an optional embodiment of this embodiment, referring to Figure 3d, the difference from Figure 3c is that the first adhesive layer 1011 also extends to the first bonding layer 1012 toward the side close to the first bonding layer 1012 side. It can also be understood that a groove structure is formed on the first bonding layer 1011, and the first bonding layer 1012 is disposed in the groove structure. The second adhesive layer 1021 also extends toward the side close to the second bonding layer 1022 to the side surface of the second bonding layer 1022 . It can also be understood that a groove structure is formed on the second adhesive layer 1021, and the second bonding layer 1022 is disposed in the groove structure. The depth of the groove formed by the first bonding layer 1011 may be less than or equal to the thickness of the nearest metal layer in contact with the multi-layer metal of the first bonding layer 1012 . The depth of the groove formed by the second bonding layer 1021 may be less than or equal to the thickness of the nearest metal layer in contact with the multi-layer metal of the second bonding layer 1022 . The depths of the grooves formed by the first adhesive layer 1011 and the second adhesive layer 1021 may be the same or different. Compared with the embodiment shown in FIG. 3c, the embodiment shown in FIG. 3d can further reduce the problem of the first bonding layer 1012 (or the second bonding layer 1022) melting and spilling to the surroundings during the bonding process.
在本实施例的可选实施例中,第一焊盘101还包括设置在第一粘结层1011背向第一键合层1012一侧的第一连接电极1014,第二焊盘102还包括设置在第二粘接层1021背向第二键合层1022一侧的第二连接电极1024。第一连接电极1014和第二连接电极1024分别与背板100内部的电路连通。第一粘结层1011可用于阻隔第一连接电极1014和第一键合层1012,第二粘结层1021可用于阻隔第二连接电极1024和第二键合层1022,起到阻焊作用。参照图3e,第一粘结层1011在背板100的表面的正投影面积记为S1,第一键合层1012在背板100的表面的正投影面积记为S2,第二粘结层1021在背板100的表面的正投影面积记为S3,第二键合层1022在背板100的表面的正投影面积记为S4。将第一连接电极1014在背板100的表面的正投影面积记为S5,将第二连接电极1024在背板100的表面的正投影面积记为S6。在可选的实施例中,S1>S5,更具体地,S1为S5的1.15~2.5倍。在可选的实施例中,S3>S6,更具体地,S3为S6的1.15~2.5倍。S1与S5的比值和S3与S6的比值可以相同或不相同。例如S1为S5的1.8倍,S3为S6的2.4倍或者S1为S5的2.2倍,S3为S6的1.2倍。以上仅为举例说明,不能作为限制本实施例的条件。其中S2与S5可以相等或不相等,可以S2大于S5也可以是S2小于S5,本实施例并不限制。S4与S6可以相等或不相等,可以S4大于S6也可以是S4小于S6,本实施例并不限制。In an optional embodiment of this embodiment, the first bonding pad 101 further includes a first connection electrode 1014 disposed on the side of the first adhesive layer 1011 facing away from the first bonding layer 1012, and the second bonding pad 102 further includes The second connection electrode 1024 is provided on the side of the second adhesive layer 1021 facing away from the second bonding layer 1022. The first connection electrode 1014 and the second connection electrode 1024 are respectively connected to the circuit inside the backplane 100 . The first adhesive layer 1011 can be used to block the first connection electrode 1014 and the first bonding layer 1012, and the second adhesive layer 1021 can be used to block the second connection electrode 1024 and the second bonding layer 1022 to act as a solder resist. Referring to FIG. 3e , the orthogonal projected area of the first adhesive layer 1011 on the surface of the back plate 100 is denoted as S1 , the orthogonal projected area of the first bonding layer 1012 on the surface of the back plate 100 is denoted as S2 , and the second adhesive layer 1021 The orthogonal projected area of the second bonding layer 1022 on the surface of the back plate 100 is denoted as S3 , and the orthogonal projected area of the second bonding layer 1022 on the surface of the back plate 100 is denoted as S4 . The orthographic projection area of the first connection electrode 1014 on the surface of the back plate 100 is denoted as S5, and the orthogonal projection area of the second connection electrode 1024 on the surface of the back plate 100 is denoted as S6. In an optional embodiment, S1>S5, more specifically, S1 is 1.15~2.5 times of S5. In an optional embodiment, S3>S6, more specifically, S3 is 1.15~2.5 times of S6. The ratio of S1 to S5 and the ratio of S3 to S6 may be the same or different. For example, S1 is 1.8 times that of S5, S3 is 2.4 times that of S6, or S1 is 2.2 times that of S5, and S3 is 1.2 times that of S6. The above are only examples and cannot be used as conditions to limit this embodiment. S2 and S5 may be equal or unequal, S2 may be greater than S5, or S2 may be less than S5, which is not limited in this embodiment. S4 and S6 may be equal or unequal, S4 may be greater than S6, or S4 may be less than S6, which is not limited in this embodiment.
继续参照图3e,其中第一粘接层1011可以朝靠近第一连接电极1014的一侧延伸到第一连接电极1014的侧面,第二粘接层1021可以朝靠近第一连接电极1024的一侧延伸到第二连接电极1024的侧面。可以更好的将第一连接电极1014和第二连接电极1024隔离起来,起到更好的阻焊效果。其中第一粘接层1011朝第一连接电极1014延伸的高度可以小于第一连接电极1014的厚度,也可以等于第一连接电极1014的厚度。第二粘接层1021朝第二连接电极1024延伸的高度可以小于第二连接电极1014的厚度也可以等于第二连接电极1024的厚度。本实施例并不限制。Continuing to refer to FIG. 3e , the first adhesive layer 1011 can extend toward the side near the first connection electrode 1014 to the side of the first connection electrode 1014 , and the second adhesive layer 1021 can extend toward the side near the first connection electrode 1024 Extending to the side of the second connection electrode 1024. The first connection electrode 1014 and the second connection electrode 1024 can be better isolated, thereby achieving a better solder resist effect. The height of the first adhesive layer 1011 extending toward the first connection electrode 1014 may be less than the thickness of the first connection electrode 1014 , or may be equal to the thickness of the first connection electrode 1014 . The height of the second adhesive layer 1021 extending toward the second connection electrode 1024 may be less than the thickness of the second connection electrode 1014 or equal to the thickness of the second connection electrode 1024 . This embodiment is not limiting.
本实施例提供一种显示面板,如图4a所示,本实施例的显示面板200包括背板201以及位于背板201上方的发光元件202。如图4a所示,其中背板201包括第一焊盘101及第二焊盘102。第一焊盘101包括第一粘结层1011(可参见图1)和第一合金1013。发光元件202包括固定至第一焊盘101上的第一发光元件2021,该第一发光元件2021经第一合金1013焊接至该第一焊盘101。结合上面实施例一所述,第一发光元件2021在第一键合温度下,经第一键合层1012加热后形成的第一合金1013固定至第一焊盘101。在可选实施例中,第一键合层1012包括多层纯金属层,该多层纯金属层由具有不同熔点的金属形成,例如,该第一键合层1012具有实施例一所述的第一键合层1012的结构特征。在加热背板201焊接第一发光元件2021时,第一键合层1012的多层纯金属层熔化形成该第一合金1013,将第一发光元件2021固定至背板201的第一焊盘101处。在另一可选实施例中,在第一粘结层1011上方形成有均匀的合金焊料,加热背板201焊接第一发光元件2021时,合金焊料熔化形成上述第一合金1013,将第一发光元件2021固定至背板201的第一焊盘101处。This embodiment provides a display panel. As shown in FIG. 4a , the display panel 200 of this embodiment includes a backplane 201 and a light-emitting element 202 located above the backplane 201 . As shown in FIG. 4a , the backplane 201 includes a first bonding pad 101 and a second bonding pad 102 . The first bonding pad 101 includes a first adhesive layer 1011 (see FIG. 1 ) and a first alloy 1013 . The light-emitting element 202 includes a first light-emitting element 2021 fixed on the first bonding pad 101, and the first light-emitting element 2021 is welded to the first bonding pad 101 through the first alloy 1013. As described in the first embodiment above, the first alloy 1013 formed by heating the first bonding layer 1012 of the first light-emitting element 2021 at the first bonding temperature is fixed to the first bonding pad 101 . In an optional embodiment, the first bonding layer 1012 includes multiple layers of pure metal layers formed of metals with different melting points. For example, the first bonding layer 1012 has the structure described in Embodiment 1. Structural characteristics of the first bonding layer 1012. When the back plate 201 is heated and the first light-emitting element 2021 is welded, the multiple pure metal layers of the first bonding layer 1012 are melted to form the first alloy 1013, and the first light-emitting element 2021 is fixed to the first pad 101 of the back plate 201. at. In another optional embodiment, a uniform alloy solder is formed above the first adhesive layer 1011. When the back plate 201 is heated to weld the first light-emitting element 2021, the alloy solder melts to form the above-mentioned first alloy 1013, and the first light-emitting element 2021 is heated. The component 2021 is fixed to the first pad 101 of the backplane 201 .
本实施例中,第二焊盘102包括第二粘结层1021(可参见图1)及第二键合层1022,其中第二键合层1022为多层结构,该多层结构为多层纯金属层,例如2层、3层甚至更多层的纯金属层,形成上述纯金属层的金属可以选自实施一中表1所示的金属。并且多层纯金属层形成的上述第二键合层1022相比于第一合金1013具有更低的熔化温度。In this embodiment, the second bonding pad 102 includes a second adhesive layer 1021 (see FIG. 1 ) and a second bonding layer 1022 , where the second bonding layer 1022 is a multi-layer structure, and the multi-layer structure is a multi-layer structure. Pure metal layer, for example, 2 layers, 3 layers or even more layers of pure metal. The metal forming the above pure metal layer can be selected from the metals shown in Table 1 in Implementation 1. Moreover, the second bonding layer 1022 formed of multiple pure metal layers has a lower melting temperature than the first alloy 1013.
结合上面实施例一图3c、图3d中所示,第二粘结层1021在背板100的表面的正投影面积S3与第二键合层1022在背板100的表面的正投影面积记S4的关系可以为S3>S4,更具体地,S3为S4的1.15~2.5倍。可以提供更好的焊接效果,并可以减少将修复发光元件2022焊接至背板100上的过程中第二键合层1022熔化外溢至周边的问题。As shown in FIG. 3 c and FIG. 3 d in the first embodiment above, the orthogonal projected area S3 of the second adhesive layer 1021 on the surface of the back plate 100 and the orthogonal projected area of the second bonding layer 1022 on the surface of the back plate 100 are denoted S4 The relationship can be S3>S4, more specifically, S3 is 1.15~2.5 times of S4. It can provide better welding effect, and can reduce the problem of the second bonding layer 1022 melting and overflowing to the periphery during the process of welding the repaired light-emitting element 2022 to the backplane 100 .
同样参照图4a,该显示面板200的发光元件202还可以包括至少一个修复发光元件2022,该修复发光元件2022用于替换背板201上损坏或者无法正常点亮的第一发光元件2021。至少一个修复发光元件2022经第二合金1023焊接至至少一个第二焊盘102。如上所述,由于第二键合层1022具有比第一合金1013更低的熔化温度,即第二键合层1022的第二焊接温度低于第一合金1013开始熔化的温度,因此,将至少一个修复发光元件2022转移到至少一个第二焊盘102之后,在第二键合温度下加热上述至少一个第二焊盘102至第二键合层1022的多层纯金属层完全熔化,熔化后的第二键合层1022形成第二合金1023,停止加热后,第二合金1023将修复发光元件2022固定至第二焊盘102。在该过程中,未转移修复发光元件2022的第二焊盘102仍然保留具有多层结构的第二键合层1022。因此,显示面板200的背板201上的第二焊盘102存在两种形态:一种形态下,第二焊盘102包括第二粘结层1021和具有多层结构的第二键合层1022;另一种形态下,第二焊盘102包括第二粘结层1021和第二合金1023。在焊接修复发光元件2022的过程中,第一合金1013不会软化或者熔化,因此第一焊盘101上的第一发光元件2021不会出现移位或者脱落等风险,不会影响第一发光元件2021的稳定性,从而保证了显示面板200的整体良率。Referring also to FIG. 4a, the light-emitting element 202 of the display panel 200 may also include at least one repair light-emitting element 2022, which is used to replace the first light-emitting element 2021 on the back panel 201 that is damaged or cannot light normally. At least one repaired light emitting element 2022 is soldered to at least one second pad 102 via the second alloy 1023 . As mentioned above, since the second bonding layer 1022 has a lower melting temperature than the first alloy 1013, that is, the second welding temperature of the second bonding layer 1022 is lower than the temperature at which the first alloy 1013 starts to melt, therefore, at least After a repair light-emitting element 2022 is transferred to at least one second bonding pad 102, the at least one second bonding pad 102 is heated at a second bonding temperature until the multi-layer pure metal layer of the second bonding layer 1022 is completely melted. The second bonding layer 1022 forms a second alloy 1023. After stopping heating, the second alloy 1023 fixes the repaired light-emitting element 2022 to the second bonding pad 102. During this process, the second bonding pad 102 where the light-emitting element 2022 has not been transferred still retains the second bonding layer 1022 having a multi-layer structure. Therefore, the second bonding pad 102 on the backplane 201 of the display panel 200 has two forms: in one form, the second bonding pad 102 includes a second adhesive layer 1021 and a second bonding layer 1022 with a multi-layer structure. ; In another form, the second bonding pad 102 includes a second adhesive layer 1021 and a second alloy 1023. During the process of welding and repairing the light-emitting element 2022, the first alloy 1013 will not soften or melt, so the first light-emitting element 2021 on the first pad 101 will not have the risk of shifting or falling off, and will not affect the first light-emitting element. 2021 stability, thereby ensuring the overall yield of the display panel 200.
在可选实施例中,第二焊盘102包括第二粘结层1021(可参见图1)及第二合金1023,该第二合金1023为形成在第二粘结层1021上方的均匀的合金焊料。该均匀的合金焊料同样具有低于第一合金1013的熔化温度,因此在进行修复发光元件2022的键合时,第一合金1013同样不会软化或者熔化,保证第一焊盘101上的第一发光元件2021不会出现移位或者脱落等风险,不会影响第一发光元件2021的稳定性,从而保证了显示面板200的整体良率。In an optional embodiment, the second bonding pad 102 includes a second adhesive layer 1021 (see FIG. 1 ) and a second alloy 1023 . The second alloy 1023 is a uniform alloy formed above the second adhesive layer 1021 solder. The uniform alloy solder also has a lower melting temperature than the first alloy 1013. Therefore, when bonding to repair the light-emitting element 2022, the first alloy 1013 will not soften or melt, ensuring that the first alloy solder on the first pad 101 is bonded. The light-emitting element 2021 will not have the risk of shifting or falling off, and will not affect the stability of the first light-emitting element 2021, thereby ensuring the overall yield of the display panel 200.
上面所述的多层结构的第二键合层1022相对于均匀的合金焊料形成的第二合金1023具有更高的熔化开始温度,因此,在第一发光元件2021的焊接过程中,具有更好的热稳定性,不会因为第一发光元件2021的热键合而发生软化或者熔化,保证了第二焊盘102的完整性及稳定性。The second bonding layer 1022 of the above-mentioned multi-layer structure has a higher melting start temperature than the second alloy 1023 formed of a uniform alloy solder. Therefore, during the soldering process of the first light-emitting element 2021, it has better Thermal stability of the first light-emitting element 2021 will not be softened or melted due to thermal bonding, ensuring the integrity and stability of the second bonding pad 102.
结合上面实施例一所述,图4b展示为第一焊盘101还包括设置在第一粘结层1011背向第一键合层1012一侧的第一连接电极1014,第二焊盘102还包括设置在第二粘接层1021背向第二键合层1022一侧的第二连接电极1024。第一粘结层1011在背板100的表面的正投影面积S1大于第一连接电极1014在背板100的表面的正投影面积S5,第二粘结层1021在背板100的表面的正投影面积S3大于第二连接电极1024在背板100的表面的正投影面积S6的实施例,具体可参照前述实施例一中图3e的说明。In conjunction with the above embodiment 1, Figure 4b shows that the first bonding pad 101 also includes a first connection electrode 1014 disposed on the side of the first adhesive layer 1011 facing away from the first bonding layer 1012, and the second bonding pad 102 also It includes a second connection electrode 1024 disposed on the side of the second adhesive layer 1021 facing away from the second bonding layer 1022 . The orthographic projection area S1 of the first adhesive layer 1011 on the surface of the back plate 100 is greater than the orthographic projection area S5 of the first connection electrode 1014 on the surface of the back plate 100 , and the orthographic projection area S1 of the second adhesive layer 1021 on the surface of the back plate 100 In an embodiment in which the area S3 is larger than the orthogonal projection area S6 of the second connection electrode 1024 on the surface of the back plate 100, please refer to the description of FIG. 3e in the first embodiment for details.
如图5所示,本实施例中,发光元件202为LED芯片,该LED芯片包括衬底202-1,形成在衬底202-1上的第一半导体层202-2,与第一半导体层202-2的导电类型相反的第二半导体层202-4以及位于第一半导体层202-2和第二半导体层202-4之间的有源层202-3,该有源层202-3即为发光元件202的发光层,还包括形成在发光元件202表面的绝缘保护层202-5。上述第一半导体层202-2可以是N型半导体层,第二半导体层202-4为P型半导体层。当然,第一半导体层202-2为P型半导体层,第二半导体层202-4为N型半导体层也是可以的。在可选实施例中,上述第一半导体层202-2可以是N型GaN层,有源层202-3为量子阱层,第二半导体层202-4为P型GaN层。或者上述第一半导体层202-2可以是N型GaN层,例如Si掺杂的GaN层;有源层202-3可以是InGaN/GaN多量子阱,第二半导体层202-4为p型GaN层,例如Mg掺杂的GaN层。As shown in Figure 5, in this embodiment, the light-emitting element 202 is an LED chip. The LED chip includes a substrate 202-1, a first semiconductor layer 202-2 formed on the substrate 202-1, and a first semiconductor layer 202-2. The second semiconductor layer 202-4 of the opposite conductivity type of 202-2 and the active layer 202-3 located between the first semiconductor layer 202-2 and the second semiconductor layer 202-4, the active layer 202-3 is The light-emitting layer of the light-emitting element 202 also includes an insulating protective layer 202-5 formed on the surface of the light-emitting element 202. The first semiconductor layer 202-2 may be an N-type semiconductor layer, and the second semiconductor layer 202-4 may be a P-type semiconductor layer. Of course, it is also possible that the first semiconductor layer 202-2 is a P-type semiconductor layer and the second semiconductor layer 202-4 is an N-type semiconductor layer. In an optional embodiment, the first semiconductor layer 202-2 may be an N-type GaN layer, the active layer 202-3 may be a quantum well layer, and the second semiconductor layer 202-4 may be a P-type GaN layer. Alternatively, the first semiconductor layer 202-2 may be an N-type GaN layer, such as a Si-doped GaN layer; the active layer 202-3 may be an InGaN/GaN multiple quantum well, and the second semiconductor layer 202-4 may be a p-type GaN layer. layer, such as a Mg-doped GaN layer.
同样参照图5,本实施例的LED芯片还包括电极结构202-6,发光元件202通过电极结构202-6固定至背板201的第一焊盘101或第二焊盘102。该电极结构202-6包括第一电极202-61及第二电极202-62,第一电极202-61与第一半导体层202-2连接,第二电极202-62与第二半导体层202-4连接。同样参照图5,第一半导体层202-2可以形成有台面,在台面上沉积金属材料,例如Au、Ag、Al、Cu、Zn等,形成上述第一电极202-61。同样地,在第二半导体层202-4上方沉积例如Au、Ag、Al、Cu等,形成第二电极202-62。可以理解的是,上述第二半导体层202-4的上方还可以形成有透明导电层以及电流阻挡层等结构。Referring also to FIG. 5 , the LED chip of this embodiment further includes an electrode structure 202 - 6 , through which the light-emitting element 202 is fixed to the first pad 101 or the second pad 102 of the backplane 201 . The electrode structure 202-6 includes a first electrode 202-61 and a second electrode 202-62. The first electrode 202-61 is connected to the first semiconductor layer 202-2, and the second electrode 202-62 is connected to the second semiconductor layer 202-62. 4 connections. Referring also to FIG. 5 , the first semiconductor layer 202-2 may be formed with a mesa, and metal materials, such as Au, Ag, Al, Cu, Zn, etc., are deposited on the mesa to form the above-mentioned first electrode 202-61. Similarly, Au, Ag, Al, Cu, etc. are deposited on the second semiconductor layer 202-4 to form the second electrode 202-62. It can be understood that structures such as a transparent conductive layer and a current blocking layer may also be formed above the second semiconductor layer 202-4.
本实施例提供一种用于显示面板的发光元件,参照图6a和图6b所示,该发光元件包括用作显示面板的主发光元件的第一发光元件3011,以及用于修复替代显示面板中无法正常点亮的第一发光元件3011的修复发光元件3012。This embodiment provides a light-emitting element for a display panel. Referring to Figures 6a and 6b, the light-emitting element includes a first light-emitting element 3011 used as a main light-emitting element of the display panel, and is used in repairing replacement display panels. Repair the light-emitting element 3012 of the first light-emitting element 3011 that cannot light up normally.
本实施例中,上述第一发光元件3011及修复发光元件3012均为LED芯片。同样参照图6a和图6b,该LED芯片包括衬底301-1,形成在衬底301-1上的第一半导体层301-2,与第一半导体层301-2的导电类型相反的第二半导体层301-4以及位于第一半导体层301-2和第二半导体层301-4之间的有源层301-3,该有源层301-3即为LED芯片的发光层,还包括形成在LED芯片表面的绝缘保护层301-5。上述第一半导体层301-2可以是N型半导体层,第二半导体层301-4为P型半导体层。当然,第一半导体层301-2为P型半导体层,第二半导体层301-4为N型半导体层也是可以的。在可选实施例中,上述第一半导体层301-2可以是N型GaN层,有源层301-3为量子阱层,第二半导体层301-4为P型GaN层。或者上述第一半导体层301-2可以是N型GaN层,例如Si掺杂的GaN层;有源层301-3可以是InGaN/GaN多量子阱,第二半导体层301-4为p型GaN层,例如Mg掺杂的GaN层。同样参照图6a和图6b,本实施例的第一发光元件3011及修复发光元件3012还包括电极结构301-6,第一发光元件3011及修复发光元件3012通过电极结301-6分别固定至背板302(参见图7)。In this embodiment, the first light-emitting element 3011 and the repair light-emitting element 3012 are both LED chips. 6a and 6b, the LED chip includes a substrate 301-1, a first semiconductor layer 301-2 formed on the substrate 301-1, and a second semiconductor layer 301-2 having an opposite conductivity type. The semiconductor layer 301-4 and the active layer 301-3 located between the first semiconductor layer 301-2 and the second semiconductor layer 301-4. The active layer 301-3 is the light-emitting layer of the LED chip, and also includes forming Insulating protective layer 301-5 on the surface of the LED chip. The first semiconductor layer 301-2 may be an N-type semiconductor layer, and the second semiconductor layer 301-4 may be a P-type semiconductor layer. Of course, it is also possible that the first semiconductor layer 301-2 is a P-type semiconductor layer and the second semiconductor layer 301-4 is an N-type semiconductor layer. In an optional embodiment, the first semiconductor layer 301-2 may be an N-type GaN layer, the active layer 301-3 may be a quantum well layer, and the second semiconductor layer 301-4 may be a P-type GaN layer. Alternatively, the first semiconductor layer 301-2 may be an N-type GaN layer, such as a Si-doped GaN layer; the active layer 301-3 may be an InGaN/GaN multiple quantum well, and the second semiconductor layer 301-4 may be a p-type GaN layer. layer, such as a Mg-doped GaN layer. Referring also to Figures 6a and 6b, the first light-emitting element 3011 and the repaired light-emitting element 3012 of this embodiment also include electrode structures 301-6. The first light-emitting element 3011 and the repaired light-emitting element 3012 are respectively fixed to the back through electrode junctions 301-6. Plate 302 (see Figure 7).
参照图6a,第一发光元件3011的电极结构301-6包括欧姆接触层301-61及第一焊接层301-62,欧姆接触层301-61分别形成在第一半导体层301-2及第二半导体层301-4上方,形成欧姆接触。第一焊接层301-62分别形成在第一半导体层301-2和第二半导体层301-4上的欧姆接触层301-61上方,用于将LED芯片焊接至背板302(参见图7)的焊盘,并实现电性连接。第一焊接层301-62为多层结构,优选地,该多层结构为多层纯金属层。如图6a所示例的,第一焊接层301-62包括第六纯金属层301-621和第七纯金属层301-622,第六纯金属层301-621和第七纯金属层301-622为不同的纯金属形成的纯金属层,并且形成上述第六纯金属层301-621的熔点高于第七纯金属层301-622的熔点。例如,第六纯金属层301-621可以是Sn金属层,第七纯金属层301-622可以是In金属层。Referring to Figure 6a, the electrode structure 301-6 of the first light-emitting element 3011 includes an ohmic contact layer 301-61 and a first welding layer 301-62. The ohmic contact layer 301-61 is formed on the first semiconductor layer 301-2 and the second welding layer respectively. Above the semiconductor layer 301-4, an ohmic contact is formed. First soldering layers 301-62 are formed above the ohmic contact layers 301-61 on the first semiconductor layer 301-2 and the second semiconductor layer 301-4 respectively, for soldering the LED chip to the backplane 302 (see Figure 7) pads and achieve electrical connection. The first welding layer 301-62 is a multi-layer structure. Preferably, the multi-layer structure is a multi-layer pure metal layer. As illustrated in Figure 6a, the first welding layer 301-62 includes sixth pure metal layer 301-621 and seventh pure metal layer 301-622, sixth pure metal layer 301-621 and seventh pure metal layer 301-622 Pure metal layers formed of different pure metals, and the melting point of the sixth pure metal layer 301-621 is higher than the melting point of the seventh pure metal layer 301-622. For example, the sixth pure metal layer 301-621 may be a Sn metal layer, and the seventh pure metal layer 301-622 may be an In metal layer.
参照图6b,修复发光元件3012的电极结构301-6包括欧姆接触层301-61及第二焊接层3012-62,欧姆接触层301-61分别形成在第一半导体层301-2及第二半导体层301-4上方,形成欧姆接触。第二焊接层3012-62分别形成在第一半导体层301-2和第二半导体层301-4上的欧姆接触层301-61上方,用于将修复发光元件3012焊接至背板302(参见图7)的修复用焊盘上,并实现电性连接。在本实施例中,第二焊接层3012-62同样为多层结构,优选地,该多层结构为多层纯金属层。如图6b所示例的,第二焊接层3012-62与第一焊接层301-62具有相同层数的纯金属层,如图6b所示,第二焊接层3012-62包括第八纯金属层3012-621和第九纯金属层3012-622。在本实施例中,第八纯金属3012-621和第六纯金属层301-621、第九纯金属层3012-622和第七纯金属层301-622分别为相同的纯金属形成的纯金属层,例如,在修复发光元件3012中,第八纯金属层3012-621同样是Sn金属层,第九纯金属层3012-622同样可以是In金属层。并且相同金属形成的纯金属层在第二焊接层3012-62和第一焊接层301-62中的层叠顺序相同。即,如图6a和7b所示,在逐渐远离欧姆接触层301-61的方向上,第一焊接层301-62依次叠置第六纯金属层301-621和第七纯金属层301-622,第二焊接层3012-62依次叠置第八纯金属层3012-621和第九纯金属层3012-622。Referring to Figure 6b, the electrode structure 301-6 of the repaired light-emitting element 3012 includes an ohmic contact layer 301-61 and a second solder layer 3012-62. The ohmic contact layer 301-61 is formed on the first semiconductor layer 301-2 and the second semiconductor layer respectively. Above layer 301-4, an ohmic contact is formed. Second soldering layers 3012-62 are respectively formed above the ohmic contact layers 301-61 on the first semiconductor layer 301-2 and the second semiconductor layer 301-4 for soldering the repaired light-emitting element 3012 to the back plate 302 (see FIG. 7) on the repair pad and achieve electrical connection. In this embodiment, the second welding layer 3012-62 is also a multi-layer structure. Preferably, the multi-layer structure is a multi-layer pure metal layer. As shown in Figure 6b, the second welding layer 3012-62 and the first welding layer 301-62 have the same number of pure metal layers. As shown in Figure 6b, the second welding layer 3012-62 includes an eighth pure metal layer. 3012-621 and the ninth pure metal layer 3012-622. In this embodiment, the eighth pure metal 3012-621, the sixth pure metal layer 301-621, the ninth pure metal layer 3012-622, and the seventh pure metal layer 301-622 are respectively made of the same pure metal. For example, in the repaired light-emitting element 3012, the eighth pure metal layers 3012-621 are also Sn metal layers, and the ninth pure metal layers 3012-622 can also be In metal layers. And the stacking order of pure metal layers formed of the same metal in the second welding layer 3012-62 and the first welding layer 301-62 is the same. That is, as shown in Figures 6a and 7b, in the direction gradually away from the ohmic contact layer 301-61, the first soldering layer 301-62 is sequentially stacked with the sixth pure metal layer 301-621 and the seventh pure metal layer 301-622. , the second welding layer 3012-62 sequentially stacks the eighth pure metal layer 3012-621 and the ninth pure metal layer 3012-622.
可选地,高熔点的纯金属层和低熔点的纯金属层的厚度比介于1:10~ 10:1,为了获得不同的焊接温度,高熔点的纯金属层和低熔点的纯金属层在第一焊接层301-62和第二焊接层3012-62中分别具有第三厚度比和第四厚度比,并且该第三厚度比大于第四厚度比,即,第一焊接层301-62的第六纯金属层301-621和第七纯金属层301-622的第三厚度比与第二焊接层3012-62中第八纯金属层3012-621和第九纯金属层3012-622的第四厚度比并不相同,并且第六纯金属层301-621和第七纯金属层301-622的第三厚度比大于第八纯金属层3012-621和第九纯金属层3012-622的第四厚度比。例如,可选地,第三厚度比为10:1,第四厚度比为4:6;或者,第三厚度比为4:6,第四厚度比为1:10;或者,第三厚度比为8:1,第四厚度比为2:1;或者,第三厚度比为5:7,第四厚度比为3:8。上述不同的厚度比值也即表征了不同纯金属层在第一焊接层301-62或第二焊接层3012-62中的含量不同,由于不同金属具有不同的熔点,因此,通过控制上述厚度比值的不同,可以控制第一焊接层301-62和第二焊接层3012-62具有不同的键合温度,并且使得第二焊接层301-62的键合温度低于第一焊接层301-62的键合温度。Optionally, the thickness ratio of the high melting point pure metal layer to the low melting point pure metal layer is between 1:10~10:1. In order to obtain different welding temperatures, the high melting point pure metal layer and the low melting point pure metal layer are The first welding layer 301-62 and the second welding layer 3012-62 have a third thickness ratio and a fourth thickness ratio respectively, and the third thickness ratio is greater than the fourth thickness ratio, that is, the first welding layer 301-62 The third thickness ratio of the sixth pure metal layer 301-621 and the seventh pure metal layer 301-622 to the eighth pure metal layer 3012-621 and the ninth pure metal layer 3012-622 in the second welding layer 3012-62 The fourth thickness ratio is not the same, and the third thickness ratio of the sixth pure metal layer 301-621 and the seventh pure metal layer 301-622 is greater than that of the eighth pure metal layer 3012-621 and the ninth pure metal layer 3012-622. Fourth thickness ratio. For example, optionally, the third thickness ratio is 10:1, and the fourth thickness ratio is 4:6; or, the third thickness ratio is 4:6, and the fourth thickness ratio is 1:10; or, the third thickness ratio The thickness ratio is 8:1, and the fourth thickness ratio is 2:1; or the third thickness ratio is 5:7, and the fourth thickness ratio is 3:8. The above-mentioned different thickness ratios also represent different contents of different pure metal layers in the first welding layer 301-62 or the second welding layer 3012-62. Since different metals have different melting points, therefore, by controlling the above-mentioned thickness ratios, Differently, the first soldering layer 301-62 and the second soldering layer 3012-62 can be controlled to have different bonding temperatures, and the bonding temperature of the second soldering layer 301-62 is lower than that of the first soldering layer 301-62. combined temperature.
如上所述,第一发光元件3011的第一焊接层301-62和修复发光元件3012的第二焊接层3012-62具有上述结构特征,该结构特征使得第一焊接层301-62和第二焊接层3012-62具有不同的键合温度,并且第二焊接层3012-62的键合温度低于第一焊接层301-62的键合温度。如图7所示,在背板302上焊接发光元件时,首先将第一发光元件3011转移至背板302的第一焊盘3021上。第一发光元件3011的第一焊接层301-62具有较高的熔化开始温度——200℃,鉴于此,对第一发光元件3011进行热键合,加热至260℃左右,保证第一发光元件3011的第一焊接层301-62完全熔化形成第三合金301-63,实现第一发光元件3011的充分热键合。第一焊接层301-62经加热形成的上述第三合金301-63的熔化温度大约为200℃。As mentioned above, the first soldering layer 301-62 of the first light-emitting element 3011 and the second soldering layer 3012-62 of the repaired light-emitting element 3012 have the above structural features, which make the first soldering layer 301-62 and the second soldering layer The layers 3012-62 have different bonding temperatures, and the second solder layer 3012-62 has a lower bonding temperature than the first solder layer 301-62. As shown in FIG. 7 , when welding the light-emitting element on the back plate 302 , the first light-emitting element 3011 is first transferred to the first pad 3021 of the back plate 302 . The first welding layer 301-62 of the first light-emitting element 3011 has a relatively high melting start temperature - 200°C. In view of this, the first light-emitting element 3011 is thermally bonded and heated to about 260°C to ensure that the first light-emitting element 3011 The first welding layer 301-62 of 3011 is completely melted to form the third alloy 301-63, thereby achieving full thermal bonding of the first light-emitting element 3011. The melting temperature of the third alloy 301-63 formed by heating the first welding layer 301-62 is approximately 200°C.
在进行修复发光元件3012焊接时,首先对修复发光元件3012进行加热,由于第二焊接层3012-62具有更低的开始熔化温度,因此在该加热过程中,第二焊接层3012-62也完全熔化并且形成了第四合金301-64,鉴于第二焊接层3012-62和第一焊接层301-62的上述结构设计,第二焊接层3012-62形成的该第四合金301-64相比于第一焊接层301-62形成的第三合金301-63具有更低的熔化温度。在本实施例中,第四合金301-64的熔化温度大约为125℃。形成上述第四合金301-64之后,将修复发光元件3012转移至背板302的修复用的第二焊盘3022上,再次进行热键合,此时将第四合金301-64加热至150℃左右,并且低于200℃,便能够保证第四合金301-64完全熔化,而第一焊接层301-62形成的第三合金301-63则不会熔化,从而保证第一发光元件3011不会出现移位或者脱落等风险,同时还能保证修复发光元件3012充分键合至背板302。When welding the repaired light-emitting element 3012, the repaired light-emitting element 3012 is first heated. Since the second welding layer 3012-62 has a lower starting melting temperature, during the heating process, the second welding layer 3012-62 is also completely The fourth alloy 301-64 is melted and formed. In view of the above structural design of the second welding layer 3012-62 and the first welding layer 301-62, the fourth alloy 301-64 formed by the second welding layer 3012-62 is compared with The third alloy 301-63 formed in the first welding layer 301-62 has a lower melting temperature. In this embodiment, the melting temperature of the fourth alloy 301-64 is approximately 125°C. After the above-mentioned fourth alloy 301-64 is formed, the repaired light-emitting element 3012 is transferred to the second repair pad 3022 of the backplane 302, and thermal bonding is performed again. At this time, the fourth alloy 301-64 is heated to 150°C. Around 200℃, it can ensure that the fourth alloy 301-64 is completely melted, while the third alloy 301-63 formed by the first welding layer 301-62 will not melt, thereby ensuring that the first light-emitting element 3011 will not There is no risk of displacement or falling off, and at the same time, it can ensure that the repaired light-emitting element 3012 is fully bonded to the backplane 302 .
另外,本实施例中,采用蒸镀方法形成第一焊接层301-62和第二焊接层3012-62的多层纯金属层,该方法以纯金属作为蒸镀金属源,在欧姆接触层301-61上方得到纯金属层,通过选择不同的蒸镀金属源获得不同的纯金属层并且可以精确控制各纯金属层的厚度,由此可以获得符合上述结构要求的多层纯金属层。In addition, in this embodiment, an evaporation method is used to form multiple pure metal layers of the first welding layer 301-62 and the second welding layer 3012-62. This method uses pure metal as the evaporation metal source, and in the ohmic contact layer 301-62 A pure metal layer is obtained above 61. By selecting different evaporated metal sources, different pure metal layers can be obtained and the thickness of each pure metal layer can be precisely controlled, thereby obtaining multi-layer pure metal layers that meet the above structural requirements.
在本实施例的一可选实施例中,第一焊接层301-62和第二焊接层3012-62包括由相同的纯金属形成的相同层数的纯金属层,相同纯金属形成的纯金属层在第一焊接层301-62和第二焊接层3012-62中的层叠顺序不同。如图8所示,同时参照图6a,第二焊接层3012-62中的第八纯金属层3012-621与第一焊接层301-62的第六纯金属层301-621、第二焊接层3012-62中的第九纯金属层3012-622与第一焊接层301-62的第七纯金属层301-622分别为相同的纯金属形成的纯金属层,例如上面所述的,第六纯金属层301-621和第八纯金属层3012-621可以是Sn金属层,第七纯金属层301-622和第九纯金属层3012-622可以是In金属层。但是在该可选实施例中,如图8所示,第二焊接层3012-62中第八纯金属层3012-621和第九纯金属层3012-622与第一焊接层301-62中的第六纯金属层301-621和第七纯金属层301-622的层叠顺序不同,即,如图6a和9所示,在逐渐远离欧姆接触层301-61的方向上,第一焊接层301-62依次叠置第六纯金属层301-621和第七纯金属层301-622,而第二焊接层3012-62依次叠置第九纯金属层3012-622和第八纯金属层3012-621。多层纯金属层的层叠顺序同样能够满足键合温度不同的要求,同时增加了电极结构301-6的设计灵活性。In an optional embodiment of this embodiment, the first welding layer 301-62 and the second welding layer 3012-62 include the same number of pure metal layers formed of the same pure metal, and the pure metal layers formed of the same pure metal The stacking order of the layers in the first solder layer 301-62 and the second solder layer 3012-62 is different. As shown in Figure 8, referring to Figure 6a at the same time, the eighth pure metal layer 3012-621 in the second welding layer 3012-62 and the sixth pure metal layer 301-621 of the first welding layer 301-62, the second welding layer The ninth pure metal layer 3012-622 in 3012-62 and the seventh pure metal layer 301-622 of the first welding layer 301-62 are respectively pure metal layers formed of the same pure metal. For example, as mentioned above, the sixth pure metal layer The pure metal layers 301-621 and the eighth pure metal layer 3012-621 may be Sn metal layers, and the seventh pure metal layer 301-622 and the ninth pure metal layer 3012-622 may be In metal layers. However, in this optional embodiment, as shown in Figure 8, the eighth pure metal layer 3012-621 and the ninth pure metal layer 3012-622 in the second welding layer 3012-62 are different from those in the first welding layer 301-62. The stacking sequence of the sixth pure metal layer 301-621 and the seventh pure metal layer 301-622 is different, that is, as shown in Figures 6a and 9, in the direction gradually away from the ohmic contact layer 301-61, the first welding layer 301 -62 stacks the sixth pure metal layer 301-621 and the seventh pure metal layer 301-622 in sequence, and the second welding layer 3012-62 stacks the ninth pure metal layer 3012-622 and the eighth pure metal layer 3012 in sequence- 621. The stacking sequence of multiple pure metal layers can also meet the requirements of different bonding temperatures, while increasing the design flexibility of the electrode structure 301-6.
如上所述,第一焊接层301-62和第二焊接层3012-62中的多层金属层分别为相同金属形成的纯金属层,可以理解的是,根据金属的共晶理论,第一焊接层301-62和第二焊接层3012-62可以包括不同金属形成的纯金属层,例如,第二焊接层3012-62至少一层纯金属层的形成材料与第一焊接层301-62中的任意一层纯金属层的形成材料均不相同,例如第一焊接层301-62包括Sn层和Zn层,而第二焊接层3012-62包括Sn层和In层,或者第一焊接层301-62包括Ag层和Zn层,而第二焊接层3012-62包括Bi层和Sn层。只需满足第一焊接层301-62和的键合温度高于第二焊接层3012-62和的键合温度即可。As mentioned above, the multi-layer metal layers in the first welding layer 301-62 and the second welding layer 3012-62 are respectively pure metal layers formed of the same metal. It can be understood that according to the eutectic theory of metals, the first welding layer The layers 301-62 and the second welding layer 3012-62 may include pure metal layers formed of different metals. For example, the formation material of at least one pure metal layer in the second welding layer 3012-62 is different from the material in the first welding layer 301-62. The materials forming any pure metal layer are different. For example, the first soldering layer 301-62 includes a Sn layer and a Zn layer, and the second soldering layer 3012-62 includes a Sn layer and an In layer, or the first soldering layer 301- 62 includes an Ag layer and a Zn layer, while the second solder layer 3012-62 includes a Bi layer and a Sn layer. It is only necessary that the bonding temperature of the first soldering layers 301-62 and 301-62 is higher than the bonding temperature of the second soldering layers 3012-62 and 301-62.
在本实施例的另一可选实施例中,第一焊接层301-62和第二焊接层3012-62具有不同层数的纯金属层,并且第一焊接层301-62和第二焊接层3012-62的纯金属层可以是相同纯金属形成的多层纯金属层也可以是不同的纯金形成的多层纯金属层。如图9所示,第一焊接层301-62包括第六纯金属层301-621和第七纯金属层301-622,第二焊接层3012-62包括第八纯金属层3012-621、第九纯金属层3012-622及第十纯金属层3012-623。在可选实施例中,第六纯金属层301-621和第七纯金属层301-622可以分别是Sn层和Ag层,而第八纯金属层3012-621、第九纯金属层3012-622及第十纯金属层3012-623分别是Sn层、In层及Bi层。In another optional embodiment of this embodiment, the first welding layer 301-62 and the second welding layer 3012-62 have different numbers of pure metal layers, and the first welding layer 301-62 and the second welding layer The pure metal layer of 3012-62 can be multiple layers of pure metal layers formed of the same pure metal or multiple layers of pure metal layers formed of different pure golds. As shown in Figure 9, the first welding layer 301-62 includes a sixth pure metal layer 301-621 and a seventh pure metal layer 301-622, and the second welding layer 3012-62 includes an eighth pure metal layer 3012-621, The ninth pure metal layer 3012-622 and the tenth pure metal layer 3012-623. In an optional embodiment, the sixth pure metal layer 301-621 and the seventh pure metal layer 301-622 may be Sn layer and Ag layer respectively, while the eighth pure metal layer 3012-621 and the ninth pure metal layer 3012- 622 and the tenth pure metal layers 3012-623 are Sn layer, In layer and Bi layer respectively.
本实施例中,第一焊接层301-62和第二焊接层3012-62中纯金属层同样可以选自实施例一中表1所示的组合,并且层叠顺序可以根据实际需要进行变换。并且,可以理解的是第一焊接层301-62可以包括三层或三层以上的纯金属层,同样地,第二焊接层3012-62也可以包括三层以上的纯金属层,并且第一焊接层301-62和第二焊接层3012-62的多层纯金属层可以在满足键合温度的条件下任意组合。In this embodiment, the pure metal layers in the first welding layer 301-62 and the second welding layer 3012-62 can also be selected from the combinations shown in Table 1 in Embodiment 1, and the stacking sequence can be changed according to actual needs. Moreover, it can be understood that the first welding layer 301-62 may include three or more pure metal layers, and similarly, the second welding layer 3012-62 may also include three or more pure metal layers, and the first welding layer 301-62 may include three or more pure metal layers. The multiple pure metal layers of the welding layer 301-62 and the second welding layer 3012-62 can be combined arbitrarily under the condition that the bonding temperature is met.
本实施例提供一种显示面板,如图10所示,本实施例的显示面板400包括背板401以及位于背板401上方的发光元件402。如图10所示,其中背板401包括形成在背板401上的第一焊盘4011以及第二焊盘4012。其中发光元件402为实施例三提供的发光元件,即,包括固定至第一焊盘4011上的第一发光元件3011。该显示面板400还可以包括固定至至少一个第二焊盘4012上的至少一个修复发光元件3012。本实施例中,第一发光元件3011及修复发光元件3012通过图7所示的实施例三描述的焊接过程焊接至背板401。第一发光元件3011在第一键合温度下,经第一焊接层301-62加热后形成的第三合金301-63固定至第一焊盘4011,修复发光元件3012在第二键合温度下,经第二焊接层3012-62加热后形成的第四合金301-64固定至第二焊盘4012。如上所述,第三合金301-63是由第一焊接层301-62加热形成的,第四合金301-64是由第二焊接层3012-62加热形成的,而第一焊接层301-62和第二焊接层3012-62具有实施例三所述的结构设计,因此,第一键合温度高于第二键合温度。由此,修复发光元件3012的键合过程不会影响第一发光元件3011的稳定性,从而保证了显示面板400的整体良率。This embodiment provides a display panel. As shown in FIG. 10 , the display panel 400 of this embodiment includes a backplane 401 and a light-emitting element 402 located above the backplane 401 . As shown in FIG. 10 , the back plate 401 includes a first bonding pad 4011 and a second bonding pad 4012 formed on the back plate 401 . The light-emitting element 402 is the light-emitting element provided in Embodiment 3, that is, it includes the first light-emitting element 3011 fixed to the first pad 4011. The display panel 400 may further include at least one repair light emitting element 3012 fixed to at least one second pad 4012 . In this embodiment, the first light-emitting element 3011 and the repaired light-emitting element 3012 are welded to the backplane 401 through the welding process described in Embodiment 3 shown in FIG. 7 . The first light-emitting element 3011 is at the first bonding temperature, and the third alloy 301-63 formed after being heated by the first soldering layer 301-62 is fixed to the first bonding pad 4011. The repair light-emitting element 3012 is at the second bonding temperature. , the fourth alloy 301-64 formed after being heated by the second welding layer 3012-62 is fixed to the second bonding pad 4012. As mentioned above, the third alloy 301-63 is formed by heating the first welding layer 301-62, the fourth alloy 301-64 is formed by heating the second welding layer 3012-62, and the first welding layer 301-62 and the second soldering layer 3012-62 has the structural design described in Embodiment 3, therefore, the first bonding temperature is higher than the second bonding temperature. Therefore, the bonding process of repairing the light-emitting element 3012 will not affect the stability of the first light-emitting element 3011, thereby ensuring the overall yield of the display panel 400.
上述实施例仅例示性说明本申请的原理及其功效,而非用于限制本申请。任何熟悉此技术的人士皆可在不违背本申请的精神及范畴下,对上述实施例进行修饰或改变。因此,举凡所属技术领域中具有通常知识者在未脱离本申请所揭示的精神与技术思想下所完成的一切等效修饰或改变,仍应由本申请的权利要求所涵盖。The above embodiments only illustrate the principles and effects of the present application, but are not used to limit the present application. Anyone familiar with this technology can modify or change the above embodiments without departing from the spirit and scope of the present application. Therefore, all equivalent modifications or changes made by those with ordinary knowledge in the technical field without departing from the spirit and technical ideas disclosed in this application shall still be covered by the claims of this application.
在此处键入工业实用性描述段落。Type the industrial usefulness description paragraph here.
在此处键入序列表自由内容描述段落。Type the sequence listing free content description paragraph here.
Claims (15)
- 一种用于键合发光元件的背板,所述背板的表面设置有用于键合发光元件的第一焊盘及第二焊盘,所述第二焊盘用作修复焊盘,其中,所述第一焊盘包括第一粘结层和第一键合层,所述第二焊盘包括第二粘结层和第二键合层,所述第一键合层和所述第二键合层均为多层结构,所述多层结构包括多层纯金属层,并且所述第一键合层的键合温度高于所述第二键合层的键合温度。A backplate for bonding light-emitting elements, the surface of the backplate is provided with a first pad and a second pad for bonding light-emitting elements, and the second pad is used as a repair pad, wherein, The first bonding pad includes a first adhesive layer and a first bonding layer, the second bonding pad includes a second adhesive layer and a second bonding layer, the first bonding layer and the second bonding layer The bonding layers are all multi-layer structures, the multi-layer structure includes multiple pure metal layers, and the bonding temperature of the first bonding layer is higher than the bonding temperature of the second bonding layer.
- 根据权利要求1所述的背板,其中,所述第一键合层和所述第二键合层具有相同层数的纯金属层,或者所述第一键合层和所述第二键合层具有不同层数的纯金属层。The backplane of claim 1, wherein the first bonding layer and the second bonding layer have the same number of pure metal layers, or the first bonding layer and the second bonding layer have the same number of pure metal layers. Laminations have varying numbers of pure metal layers.
- 根据权利要求1或2所述的背板,其中,所述第一键合层包括至少两层由不同金属形成的纯金属层,所述第二键合层包括至少两层由不同金属形成的纯金属层。The backplane of claim 1 or 2, wherein the first bonding layer includes at least two layers of pure metal layers formed of different metals, and the second bonding layer includes at least two layers of pure metal layers formed of different metals. Pure metal layer.
- 根据权利要求3所述的背板,其中,所述第一键合层和所述第二键合层均包括由第一金属和第二金属形成的交替叠置的多层纯金属层,并且,所述第一金属的熔点高于所述第二金属的熔点。The backplane of claim 3, wherein each of the first bonding layer and the second bonding layer includes alternately stacked multiple pure metal layers formed of a first metal and a second metal, and , the melting point of the first metal is higher than the melting point of the second metal.
- 根据权利要求4所述的背板,其中,所述第一金属和所述第二金属形成的纯金属层的厚度比介于1:10~ 10:1。The backplane of claim 4, wherein a thickness ratio of the pure metal layer formed by the first metal and the second metal is between 1:10 and 10:1.
- 根据权利要求5所述的背板,其中,所述第一金属和所述第二金属形成的纯金属层在所述第一键合层中具有第一厚度比,所述第一金属和所述第二金属形成的纯金属层在所述第二键合层中具有第二厚度比,并且所述第一厚度比大于所述第二厚度比。The backplane of claim 5, wherein the pure metal layer formed by the first metal and the second metal has a first thickness ratio in the first bonding layer, and the first metal and the second metal have a first thickness ratio in the first bonding layer. The pure metal layer formed of the second metal has a second thickness ratio in the second bonding layer, and the first thickness ratio is greater than the second thickness ratio.
- 根据权利要求4所述的背板,其中,在所述第一键合层和所述第二键合层中的多层纯金属层的层叠顺序不同。The backplane of claim 4, wherein the stacking order of the multiple pure metal layers in the first bonding layer and the second bonding layer is different.
- 根据权利要求3所述的背板,其中,所述第二键合层的多层纯金属层中至少有一层纯金属层的形成材料不同于所述第一键合层中的多层纯金属层中任意一层纯金属层的形成材料。The backplane of claim 3, wherein at least one of the plurality of pure metal layers in the second bonding layer is formed from a material different from the plurality of pure metal layers in the first bonding layer. The material forming any pure metal layer in the layer.
- 根据权利要求1所述的背板,其中,所述第一粘结层在所述背板的表面的正投影面积为所述第一键合层在所述背板的表面的正投影面积的1.15~2.5倍;和/或,所述第二粘结层在所述背板的表面的正投影面积为所述第二键合层在所述背板的表面的正投影面积的1.15~2.5倍。The backplane of claim 1 , wherein the orthogonal projected area of the first bonding layer on the surface of the backplane is 1 1.15~2.5 times; and/or, the orthogonal projected area of the second bonding layer on the surface of the back plate is 1.15~2.5 of the orthogonal projected area of the second bonding layer on the surface of the back plate. times.
- 根据权利要求1所述的背板,其中,所述第一焊盘还包括位于所述第一粘结层背向所述第一键合层一侧的第一连接电极;所述第一粘结层在所述背板的表面的正投影面积为所述第一连接电极在所述背板的表面的正投影面积的1.15~2.5倍;和/或,所述第二焊盘层还包括位于所述第二粘结层背向所述第二键合层一侧的第二连接电极;所述第二粘结层在所述背板的表面的正投影面积为所述第二连接电极在所述背板的表面的正投影面积的1.15~2.5倍。The backplane of claim 1, wherein the first bonding pad further includes a first connection electrode located on a side of the first adhesive layer facing away from the first bonding layer; The orthographic projection area of the junction layer on the surface of the backplane is 1.15 to 2.5 times the orthographic projection area of the first connection electrode on the surface of the backplane; and/or the second pad layer further includes A second connection electrode located on the side of the second adhesive layer facing away from the second bonding layer; the orthogonal projected area of the second adhesive layer on the surface of the back plate is the second connection electrode 1.15 to 2.5 times the orthographic projection area on the surface of the back plate.
- 一种显示面板,包括:A display panel including:背板,所述背板上形成有第一焊盘和第二焊盘,其中,所述第一焊盘包括第一粘结层和第一合金,所述第二焊盘包括第二粘结层和第二键合层,所述第二键合层为多层结构,所述多层结构包括多层纯金属层;以及A backplane, a first bonding pad and a second bonding pad are formed on the backplane, wherein the first bonding pad includes a first adhesive layer and a first alloy, and the second bonding pad includes a second bonding layer. layer and a second bonding layer, the second bonding layer is a multi-layer structure, the multi-layer structure includes multiple pure metal layers; and固定在所述背板上的发光元件,所述发光元件包括第一发光元件,所述第一发光元件经所述第一合金焊接至所述第一焊盘,并且所述第一合金开始熔化的温度高于所述第二键合层的键合温度。A light-emitting element fixed on the backplane, the light-emitting element includes a first light-emitting element, the first light-emitting element is welded to the first pad through the first alloy, and the first alloy begins to melt The temperature is higher than the bonding temperature of the second bonding layer.
- 根据权利要求11所示的显示面板,其中,所述发光元件还包括修复发光元件,所述修复发光元件经第二合金焊接在至少一个所述第二焊盘上。The display panel according to claim 11, wherein the light-emitting element further includes a repaired light-emitting element, and the repaired light-emitting element is welded to at least one of the second pads through a second alloy.
- 根据权利要求11所示的显示面板,其中,所述发光元件包括:The display panel according to claim 11, wherein the light-emitting element includes:半导体结构,所述半导体结构包括导电类型相反的第一半导体层、第二半导体层以及位于所述第一半导体层和所述第二半导体层之间的发光层;A semiconductor structure, the semiconductor structure including a first semiconductor layer with opposite conductivity types, a second semiconductor layer, and a light-emitting layer located between the first semiconductor layer and the second semiconductor layer;电极结构,包括第一电极和第二电极,所述第一电极与所述第一半导体层导电连接,所述第二电极与所述第二半导体层导电连接,所述发光元件经所述电极结构焊接至所述背板。An electrode structure includes a first electrode and a second electrode, the first electrode is conductively connected to the first semiconductor layer, the second electrode is conductively connected to the second semiconductor layer, and the light-emitting element is connected through the electrode The structure is welded to the backing plate.
- 根据权利要求11所述的显示面板,其中,所述第二粘结层在所述背板的表面的正投影面积为所述第二键合层在所述背板的表面的正投影面积的1.15~2.5倍。The display panel according to claim 11, wherein the orthogonal projected area of the second bonding layer on the surface of the back plate is 1 1.15~2.5 times.
- 一种用于显示面板的发光元件,所述发光元件分为第一发光元件和用于替换所述显示面板中无法正常点亮的所述第一发光元件的修复发光元件,所述发光元件包括半导体结构以及形成在所述半导体结构表面的电极结构,所述第一发光元件的电极结构包括第一焊接层,所述修复发光元件的电极结构包括第二焊接层,所述第一焊接层和所述第二焊接层均为多层结构,所述多层结构包括多层纯金属层,并且所述第一焊接层的键合温度高于所述第二焊接层的键合温度。A light-emitting element for a display panel. The light-emitting element is divided into a first light-emitting element and a repair light-emitting element used to replace the first light-emitting element that cannot light up normally in the display panel. The light-emitting element includes A semiconductor structure and an electrode structure formed on the surface of the semiconductor structure. The electrode structure of the first light-emitting element includes a first welding layer. The electrode structure of the repaired light-emitting element includes a second welding layer. The first welding layer and The second welding layer is a multi-layer structure, the multi-layer structure includes multiple pure metal layers, and the bonding temperature of the first welding layer is higher than the bonding temperature of the second welding layer.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US18/114,284 US20230387357A1 (en) | 2022-05-26 | 2023-02-27 | Display panel, and light-emitting elements and backplate for display panel |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202221308245.7 | 2022-05-26 | ||
CN202221308245.7U CN218123408U (en) | 2022-05-26 | 2022-05-26 | Display panel and light-emitting element and back plate used for same |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US18/114,284 Continuation US20230387357A1 (en) | 2022-05-26 | 2023-02-27 | Display panel, and light-emitting elements and backplate for display panel |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2023226457A1 true WO2023226457A1 (en) | 2023-11-30 |
Family
ID=84514612
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/CN2023/072610 WO2023226457A1 (en) | 2022-05-26 | 2023-01-17 | Display panel, and light-emitting element and back plate for use in display panel |
Country Status (2)
Country | Link |
---|---|
CN (1) | CN218123408U (en) |
WO (1) | WO2023226457A1 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN218123408U (en) * | 2022-05-26 | 2022-12-23 | 厦门市芯颖显示科技有限公司 | Display panel and light-emitting element and back plate used for same |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20170263811A1 (en) * | 2015-08-18 | 2017-09-14 | Goertek.Inc | Repairing method, manufacturing method, device and electronic apparatus of micro-led |
CN111509114A (en) * | 2019-01-30 | 2020-08-07 | 美科米尚技术有限公司 | Method for attaching micro-device to substrate |
US20210183828A1 (en) * | 2019-12-17 | 2021-06-17 | Seoul Viosys Co., Ltd. | Method of repairing light emitting device and display panel having repaired light emitting device |
CN114121868A (en) * | 2020-08-28 | 2022-03-01 | 京东方科技集团股份有限公司 | Substrate and manufacturing method thereof, display device and manufacturing method thereof |
CN218123408U (en) * | 2022-05-26 | 2022-12-23 | 厦门市芯颖显示科技有限公司 | Display panel and light-emitting element and back plate used for same |
-
2022
- 2022-05-26 CN CN202221308245.7U patent/CN218123408U/en active Active
-
2023
- 2023-01-17 WO PCT/CN2023/072610 patent/WO2023226457A1/en unknown
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20170263811A1 (en) * | 2015-08-18 | 2017-09-14 | Goertek.Inc | Repairing method, manufacturing method, device and electronic apparatus of micro-led |
CN111509114A (en) * | 2019-01-30 | 2020-08-07 | 美科米尚技术有限公司 | Method for attaching micro-device to substrate |
US20210183828A1 (en) * | 2019-12-17 | 2021-06-17 | Seoul Viosys Co., Ltd. | Method of repairing light emitting device and display panel having repaired light emitting device |
CN114121868A (en) * | 2020-08-28 | 2022-03-01 | 京东方科技集团股份有限公司 | Substrate and manufacturing method thereof, display device and manufacturing method thereof |
CN218123408U (en) * | 2022-05-26 | 2022-12-23 | 厦门市芯颖显示科技有限公司 | Display panel and light-emitting element and back plate used for same |
Also Published As
Publication number | Publication date |
---|---|
CN218123408U (en) | 2022-12-23 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN100487931C (en) | Semiconductor light emitting element, manufacturing method and mounting method of the same and light emitting device | |
WO2023226457A1 (en) | Display panel, and light-emitting element and back plate for use in display panel | |
CN102194971A (en) | Light-emitting device (LED) package structure and method for manufacturing the same | |
US20230395562A1 (en) | Method and structure for die bonding using energy beam | |
TWI548058B (en) | Led array encapsulation structure and manufacture method thereof | |
CN107431109B (en) | Lighting device cooling | |
CN111373554A (en) | Micro LED chip, display panel and welding method of Micro LED chip | |
CN101359704B (en) | Light element device and method for manufacturing same | |
JP2012227230A (en) | Semiconductor light emitting device | |
WO2018006819A1 (en) | Multi-layer ceramic printed circuit board and manufacturing method therefor | |
CN102664227A (en) | Semiconductor light emitting diode (LED) device and formation method thereof | |
US9006770B2 (en) | Light emitting diode carrier | |
CN102130107B (en) | Step array high-voltage light-emitting diode and preparation method thereof | |
CN101852345A (en) | Light-emitting diode (LED) light source module | |
CN107154450A (en) | A kind of multilayer bonding method for light emitting diode (LED) chip with vertical structure | |
CN101521251A (en) | Manufacturing method of light-emitting diode (LED) with vertical structure | |
CN221928083U (en) | Display panel and backboard | |
US8232119B2 (en) | Method for manufacturing heat dissipation bulk of semiconductor device | |
JP2006156975A (en) | Juncture, power module substrate and power module and manufacturing method of juncture | |
CN103000795A (en) | Packaging structure of semiconductor light-emitting element | |
US20230387357A1 (en) | Display panel, and light-emitting elements and backplate for display panel | |
CN103474553A (en) | High-power LED packaging film layer and preparing and packaging method thereof | |
CN209708967U (en) | A kind of LED light module | |
WO2023070551A1 (en) | Light-emitting device, light-emitting module and manufacturing method therefor | |
US8836119B2 (en) | Semiconductor device |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 23810533 Country of ref document: EP Kind code of ref document: A1 |