WO2023223541A1 - 誘電分光測定装置 - Google Patents

誘電分光測定装置 Download PDF

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Publication number
WO2023223541A1
WO2023223541A1 PCT/JP2022/020947 JP2022020947W WO2023223541A1 WO 2023223541 A1 WO2023223541 A1 WO 2023223541A1 JP 2022020947 W JP2022020947 W JP 2022020947W WO 2023223541 A1 WO2023223541 A1 WO 2023223541A1
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section
conductor
insulator
sample
dielectric
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PCT/JP2022/020947
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English (en)
French (fr)
Japanese (ja)
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卓郎 田島
昌人 中村
倫子 瀬山
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日本電信電話株式会社
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Priority to JP2024521513A priority Critical patent/JPWO2023223541A1/ja
Priority to PCT/JP2022/020947 priority patent/WO2023223541A1/ja
Publication of WO2023223541A1 publication Critical patent/WO2023223541A1/ja

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N22/00—Investigating or analysing materials by the use of microwaves or radio waves, i.e. electromagnetic waves with a wavelength of one millimetre or more

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  • the present invention relates to a dielectric spectrometry device used for non-invasive component concentration measurement in humans or animals.
  • a device using dielectric spectroscopy has been proposed as a non-invasive component concentration measuring device.
  • dielectric spectroscopy electromagnetic waves are irradiated into the skin, the electromagnetic waves are absorbed by utilizing the interaction between blood components to be measured (for example, glucose molecules) and water, and the amplitude and phase of the electromagnetic waves are observed.
  • blood components to be measured for example, glucose molecules
  • water water
  • amplitude and phase of the electromagnetic waves are observed.
  • glucose and electromagnetic waves is small, and there are limits to the intensity of electromagnetic waves that can be safely irradiated to living organisms, they have not been sufficiently effective in measuring blood sugar levels in living organisms.
  • FIG. 6 shows a configuration example of a component concentration measuring device using a coaxial probe disclosed in Patent Document 1.
  • the component concentration measuring device includes a coaxial probe 100 whose end on the sample side is open, an electronic calibration module 101, and a vector network analyzer (hereinafter referred to as VNA) 102.
  • VNA vector network analyzer
  • the concentration of the target component in a solution in which the background component and the target component are mixed is measured.
  • the configuration shown in FIG. 6 is a common configuration for measuring complex permittivity, and the open coaxial probe 100 is suitable for measuring liquids.
  • the VNA 102 calculates the complex dielectric constant from the reflected signal obtained by the coaxial probe 100 on the premise of an infinite boundary. Specifically, an electric field is applied to the sample from the coaxial probe 100.
  • the VNA 102 calculates the complex dielectric constant by measuring the reflection coefficient and phase of the reflected wave reflected by the sample in the frequency domain. This method is called frequency domain reflection method.
  • the method of applying a pulsed electric field to the sample and determining the complex dielectric constant from the time change in the waveform of the reflected wave reflected by the sample is also a method of applying a pulsed electric field to the sample and determining the complex dielectric constant from the time change in the waveform of the reflected wave reflected by the sample.
  • the transmission coefficient may be measured instead of the reflection coefficient.
  • the method of determining the complex dielectric constant from the time change of the waveform of a reflected wave is called a time-domain reflectometry or a time-domain transmission measurement.
  • the frequency of the applied electric field is swept to obtain the reflection coefficient and phase spectrum.
  • the complex dielectric constant can be calculated from the measured spectrum as follows.
  • ⁇ * is the dielectric constant of the sample
  • ⁇ * is a complex reflection coefficient, which is expressed by the following equation (2), where ⁇ i is the reflection coefficient obtained by measurement, and ⁇ i is the phase.
  • ⁇ i corresponds to the measurement result of the standard sample
  • ⁇ * is the measurement result of the sample.
  • standard sample A a state in which the coaxial probe 100 is installed in the air (open state)
  • standard sample B a state in which the coaxial probe 100 is shorted (shorted state)
  • standard sample C A certain standard solution sample is referred to as standard sample C.
  • the component concentration measuring device calculates the dielectric relaxation spectrum from the amplitude and phase of the signal corresponding to the frequency of the observed electromagnetic waves.
  • the complex permittivity is calculated by expressing the dielectric relaxation spectrum as a linear combination of relaxation curves based on the Cole-Cole equation.
  • a calibration model is constructed by measuring the phase difference between the complex permittivity change and the component concentration in advance, and the component concentration is calibrated from the change in the measured dielectric relaxation spectrum. Note that it is also possible to calibrate the component concentration from the change in the reflection coefficient by measuring the correlation between the change in the reflection coefficient and the concentration of the component in advance.
  • the present invention was made to solve the above problems, and an object of the present invention is to provide a dielectric spectrometer that can reduce drift errors caused by coaxial probes.
  • the dielectric spectrometer of the present invention includes a sensor section and a calibration section configured to calibrate a reflection measuring device connected to the sensor section, and the sensor section is arranged on a side in contact with a target sample.
  • the antenna section has a coaxial line structure with an open end, the open section of the coaxial line structure has an open end on the side that contacts the air, and the center conductor and ground are electrically connected at the tip.
  • a short part of the coaxial line structure, a load part configured to terminate a signal line, the antenna part, the open part, the short part, and the load part are connected to the reflection measuring instrument.
  • a switch configured to selectively connect to the port of the switch is formed on the same substrate, and the calibration section controls the switch to connect the short section, the open section, and the load section in order.
  • the reflection measuring device is connected to a port of the reflection measuring device to perform reflection measurement, and the reflection measuring device is calibrated based on the results of the reflection measurement.
  • the antenna section, the short section, the open section, and the load section are integrated on the same substrate, it is possible to reduce the drift error caused by the coaxial probe. Further, according to the present invention, it becomes easy to calibrate the reflection measuring device at any time. As a result, in the present invention, it is possible to perform broadband data acquisition while reducing drift errors due to environmental changes and changes in the state of the sample over time.
  • FIG. 1 is a block diagram showing the configuration of a dielectric spectrometer according to an embodiment of the present invention.
  • FIG. 2 is a sectional view of a sensor section according to an embodiment of the present invention.
  • FIG. 3 is an exploded perspective view of the sensor section according to the embodiment of the present invention.
  • FIG. 4 is a sectional view showing another example of the sensor section according to the embodiment of the present invention.
  • FIG. 5 is a block diagram showing an example of the configuration of a computer that implements a reflection measuring device according to an embodiment of the present invention.
  • FIG. 6 is a block diagram showing an example of the configuration of a conventional component concentration measuring device.
  • FIG. 1 shows the configuration of a dielectric spectrometer according to this embodiment.
  • the dielectric spectrometer includes a sensor section 1 and a reflection measuring device 2.
  • a vector network analyzer VNA is used as the reflection measuring device.
  • the sensor section 1 includes a dielectric substrate 10, a coaxial probe 11, a switch 12, a load section 13, a switch 14, an RF connector 15, and control connectors 16 and 17.
  • FIG. 2 is a sectional view of the sensor section 1
  • FIG. 3 is an exploded perspective view of the sensor section 1.
  • the coaxial probe 11 , switches 12 and 14 , load section 13 , RF connector 15 , and control connectors 16 and 17 are mounted on a dielectric substrate 10 .
  • the coaxial probe 11 includes a plurality of coaxial probe sections.
  • the probe section includes at least one antenna section 110, an open section 111, and a short section 112.
  • RF radio frequency
  • the IC, antenna, and sensor are integrated into the same device.
  • a configuration in which devices are integrated on a dielectric substrate is known, and a multilayer wiring board is used to optimize the arrangement of signal lines and power lines and reduce the board area.
  • vias or through holes that penetrate the board are used as a structure for transmitting RF signals between layers of a multilayer wiring board.
  • Japanese Patent No. 6771372 discloses a multilayer wiring board in which conductor layers and insulator layers are alternately laminated, and a plurality of ground vias are formed around a high-frequency signal via that is formed vertically through the uppermost layer to the lowermost layer.
  • a quasi-coaxial line structure provided is disclosed. In this embodiment, this pseudo-coaxial line structure is adopted to form the antenna section 110, the open section 111, and the short section 112.
  • the antenna section 110 has a pseudo-coaxial line structure in which the end in contact with the sample (upper side in FIG. 2) is an open end. Specifically, in the antenna section 110, a land 1100 made of a conductor is formed on the upper surface of the uppermost insulating layer 22 of the multilayer wiring board 21, and a land 1100 made of a conductor is formed on the lower surface of the lowermost insulating layer 25. 1101 is formed. The land 1100 and the land 1101 are connected by a high frequency signal via 1102, which is a conductor that vertically penetrates each of the insulator layers 22 to 25 along the stacking direction of the conductor layers 26 to 30.
  • a high frequency signal via 1102 which is a conductor that vertically penetrates each of the insulator layers 22 to 25 along the stacking direction of the conductor layers 26 to 30.
  • a conductor layer 26 that serves as a ground conductor is formed in the same layer as the land 1100 and in a region outside the land 1100.
  • the land 1100 and the conductor layer 26 are separated by a conductor removal region 1103 having no conductor and having a circular shape in plan view.
  • a conductor layer 30 serving as a ground conductor is formed in the same layer as the land 1101 and in a region outside the land 1101.
  • the land 1101 and the conductor layer 30 are separated by a conductor removal region 1104 which is circular in plan view and has no conductor. Note that, in the present invention, the sensor section 1 is viewed from above (sample side) as a plan view.
  • the layer where the conductor layers 27 to 29 are formed has a conductor removal region 1105 which is circular in plan view and is a region filled with a dielectric material without a conductor.
  • High frequency signal via 1102 passes through the center of conductor removal regions 1103-1105.
  • each of the conductor layers 26 to 30 is electrically connected by a through via (through hole) 1106.
  • Insulator layers 22 to 25, high frequency signal vias 1102 that vertically penetrate the insulator layers 22 to 25, conductor layers 26 to 30 around the high frequency signal vias 1102, and through vias 1106 that connect the conductor layers 26 to 30. constitutes a pseudo-coaxial line.
  • the high frequency signal via 1102 and the conductor removed regions 1103 to 1105 have a circular shape, and the diameter of the high frequency signal via 1102, the diameter of the surrounding conductor removed regions 1103 to 1105, and the dielectric of the insulating layer
  • the impedance of the pseudo-coaxial line can be designed depending on the sample to be measured.
  • the open portion 111 has a pseudo-coaxial line structure in which the end on the side in contact with the air (upper side in FIG. 2) is an open end.
  • the uppermost conductor layer 26 and insulator layer 22 of the multilayer wiring board 21 are formed into a circular shape in plan view so that the lower insulator layer 23, conductor layer 27, and high-frequency signal via 1112 are exposed to the air.
  • An opening 1110 (recess) is formed as a removal area.
  • a land 1111 made of a conductor is formed on the lower surface of the lowermost insulator layer 25.
  • High-frequency signal vias 1112 which are conductors that perpendicularly penetrate the insulating layers 23-25 along the lamination direction of the conductive layers 26-30, are formed to be connected to the lands 1111. Note that the opening 1110 does not need to be circular in shape as long as the lower insulating layer 23, conductor layer 27, and high-frequency signal via 1112 are exposed to the air.
  • the land 1101 and the conductor layer 30 are separated by a conductor removal region 1113 which is circular in plan view and has no conductor.
  • the high-frequency signal via 1112 and the conductor layer 27 are separated by a conductor-removed region 1114 that has no conductor and is circular in plan view.
  • the layer where the conductor layers 28 and 29 are formed has a conductor removal region 1115 which is circular in plan view and is a region filled with an insulator (dielectric) without a conductor.
  • High frequency signal via 1112 passes through the center of conductor removal regions 1113-1115.
  • each of the conductor layers 27 to 30 is electrically connected by a through via 1116.
  • Insulator layers 23 to 25, high frequency signal vias 1112 that vertically penetrate the insulator layers 23 to 25, conductor layers 27 to 30 around the high frequency signal vias 1112, and through vias 1116 that connect the conductor layers 27 to 30. constitutes a pseudo-coaxial line.
  • the incident signal is substantially totally reflected in the same phase.
  • the opening 1110 may be provided with a shielding cap that prevents water, dust, and the like from entering from the outside.
  • the short section 112 has a pseudo-coaxial line structure in which the center conductor (high frequency signal via) and the ground are electrically connected at the tip.
  • a land 1120 made of a conductor is formed on the lower surface of the lowermost insulator layer 25.
  • the conductor layer 26 and the land 1120 are connected by a high frequency signal via 1121, which is a conductor that vertically penetrates the insulator layers 22 to 25 along the stacking direction of the conductor layers 26 to 30.
  • the land 1120 and the conductor layer 30 are separated by a conductor-removed region 1122 that has no conductor and is circular in plan view.
  • the layer where the conductor layers 27 to 29 are formed has a conductor removal region 1123 which is circular in plan view and is a region filled with an insulator (dielectric) without a conductor.
  • the high frequency signal via 1121 passes through the center of the conductor removal regions 1122 and 1123.
  • each of the conductor layers 26 to 30 is electrically connected by a through via 1124.
  • Insulator layers 22 to 25, high frequency signal vias 1121 vertically penetrating the insulator layers 22 to 25, conductor layers 26 to 30 around the high frequency signal vias 1121, and through vias 1124 connecting the conductor layers 26 to 30. constitutes a pseudo-coaxial line. In the short portion 112, the phase of the incident signal is inverted and almost totally reflected.
  • the coaxial probe 11 formed on the multilayer wiring board 21 as described above is mounted on the dielectric substrate 10.
  • signal lines 40 to 42 made of conductors, pads 43 to 45 made of conductors formed integrally with the signal lines 40 to 42, and a conductor layer 46 serving as a ground conductor are formed. ing.
  • the signal lines 40-42 and the conductor layer 46 are separated by conductor-removed regions 47-49 without conductors, respectively. Further, the pads 43 to 45 and the conductor layer 46 are separated by conductor removal regions 50 to 52, which are circular in plan view and have no conductor, respectively.
  • a conductor layer 53 serving as a ground conductor is formed on the lower surface of the dielectric substrate 10.
  • the solder 54 connects between the land 1101 and the pad 43, between the land 1111 and the pad 44, between the land 1120 and the pad 45, and between the conductor layer 30 and the conductor layer 46. In this way, the coaxial probe 11 is mounted on the dielectric substrate 10.
  • the solder 54 may have a ball shape.
  • the load section 13 formed on the dielectric substrate 10 is constituted by a resistor 132 formed between the signal line 130 and the ground conductor 131, and terminates the signal line 130.
  • switches 12 and 14, an RF connector 15, and control connectors 16 and 17 are mounted on the dielectric substrate 10.
  • a signal line 40 connected to the antenna section 110, a signal line 41 connected to the open section 111, and a signal line 42 connected to the short section 112 are each connected to a selection terminal of the switch 12. Thereby, any one of the antenna section 110, the open section 111, and the short section 112 can be selected by the switch 12.
  • the signal line 130 of the load section 13 is connected to one selection terminal of the switch 14.
  • the other selection terminal of switch 14 is connected to the input terminal of switch 12.
  • An input terminal of the switch 14 is connected to an RF connector 15.
  • a control terminal of the switch 12 is connected to a control connector 16, and a control terminal of the switch 14 is connected to a control connector 17.
  • This embodiment shows an example in which two switches are used, it is also possible to use one 1-input, 4-output switch to select the antenna section 110, open section 111, short section 112, and load section 13. may be configured.
  • the control connector may also include power lines that supply the switches 12 and 14.
  • the multilayer wiring board 21 and the dielectric substrate 10 may be the same board. In this case, there is no need to mount different types of boards using solder or the like.
  • a one-port VNA calibration method that uses an open standard, a short standard, and a load standard as calibration standards is known as SOL calibration.
  • SOL calibration three standards, an open standard, a short standard, and a load standard, are connected to the output port of the VNA and calibration data is measured. With this calibration data, it is possible to eliminate frequency response reflection tracking, directionality, and source match of the measurement system in reflection measurement using the output port to be calibrated (see Japanese Patent Laid-Open No. 2007-285890).
  • the calibration section 200 of the reflection measuring instrument 2 outputs control signals to the switches 12 and 14 via the control connectors 16 and 17. Thereby, the calibration section 200 switches the switches 12 and 14 so that any one of the short section 112, the open section 111, and the load section 13 is connected to the port of the reflection measuring device 2 via the RF connector 15.
  • the calibration section 200 sequentially connects the short section 112, the open section 111, and the load section 13 to the ports of the reflection measuring device 2, and performs reflection measurements on each of them.
  • the calibration unit 200 calculates a calibration coefficient (S parameter of the error circuit existing in the reflection measuring device 2) from the result of the reflection measurement. By calculating the calibration coefficient in this way, it becomes possible to calculate the reflection coefficient from which the measurement error of the reflection measuring device 2 has been removed.
  • a method of calculating a calibration coefficient using SOL calibration is a well-known technique.
  • the measurement section 201 of the VNA 2 switches the switches 12 and 14 so that the antenna section 110 is connected to the port of the VNA 2 via the RF connector 15.
  • the measurement unit 201 applies an electric field to the sample from the antenna unit 110 and calculates a reflection coefficient based on the amplitude and phase of the reflected voltage of the reflected wave reflected by the sample and the incident voltage measured by the VNA.
  • the complex dielectric constant may be calculated based on the temporal change in the waveform of the reflected wave.
  • the coaxial probe 11 may include a standard sample section 114 in addition to the short section 112, the open section 111, and the load section 13.
  • the switch 12 can select any one of the antenna section 110, the open section 111, the short section 112, and the standard sample section 114.
  • a conductor removal region 1140 having no conductor and having a circular shape in plan view is formed in the uppermost conductor layer 26 so that the insulator layer 22 is exposed.
  • a land 1141 made of a conductor is formed on the lower surface of the lowermost insulator layer 25.
  • a high frequency signal via 1142, which is a conductor, is formed to be connected to the land 1141, and is a conductor that vertically penetrates each of the insulating layers 23 to 25 along the stacking direction of the conductive layers 26 to 30.
  • the land 1141 and the conductor layer 30 are separated by a conductor removal region 1143 which has no conductor and is circular in plan view.
  • the layer where the conductor layers 27 to 29 are formed has a conductor removal region 1144 which is circular in plan view and is a region filled with an insulator (dielectric) without a conductor.
  • High frequency signal via 1142 passes through the center of conductor removal region 1144.
  • each conductor layer 27 to 30 is electrically connected by a through via 1145.
  • a pad 55 and a signal line (not shown) formed integrally with the pad 55 are formed on the upper surface of the dielectric substrate 10, in addition to the signal lines 40 to 42, the pads 43 to 45, and the conductor layer 46. Land 1141 and pad 55 are connected by solder 54 . A signal line formed integrally with the pad 55 is connected to a selection terminal of the switch 12. Thereby, any one of the antenna section 110, the open section 111, the short section 112, and the standard sample section 114 can be selected by the switch 12.
  • the complex permittivity of the sample is calculated from the reflection coefficients obtained from the antenna section 110, short section 112, open section 111, and standard sample section 114 and the permittivity of the dielectric substrate measured in advance. can do.
  • the standard sample section 114 may be provided with an opening similarly to the open section 111 and filled with a desired dielectric sample.
  • the dielectric sample may be, for example, a ceramic such as alumina, a liquid such as pure water, or a polymer such as polyimide.
  • the antenna section 110, the short section 112, the open section 111, and the load section 13 are integrated on the same substrate, it is possible to reduce the drift error caused by the coaxial probe. Since they are on the same substrate, the temperature difference between the antenna section 110, the short section 112, and the open section 111 is reduced, and the calibration accuracy can be improved. Further, in this embodiment, it becomes easy to calibrate the reflection measuring device 2 at any time. Calibration may be performed, for example, at regular intervals, or may be performed according to instructions from the user. As a result, in this embodiment, it is possible to perform broadband data acquisition while reducing drift errors due to environmental changes and changes in the state of the sample over time.
  • the RF connector 15 for connecting the sensor section 1 and the reflection measuring device 2 a high frequency connector suitable for the frequency used may be selected.
  • the microstrip line (signal line or control line) on the dielectric substrate 10 is made of a metal material with a conductor width of 100 to 300 ⁇ m and an interval of 50 ⁇ m, for example. Examples of metal materials include Au, Cu, and Al.
  • the multilayer wiring board 21 has, for example, a size of several cm x several cm square, and a thickness of 10 to 500 ⁇ m.
  • Materials for the insulator layers 22 to 25 include FR4 (Flame Retardant Type 4), Megtron6 (registered trademark), Teflon (registered trademark), LCP (Liquid Crystal Polymer), polyimide, and LTCC (Low Temperature Co- fired Ceramics), etc.
  • one antenna section 110 is formed in the coaxial probe 11, but a plurality of antenna sections 110 may be formed and each antenna section 110 may have a different shape. Thereby, the antenna section 110 to be used can be selected depending on the target sample.
  • the high frequency signal via 1102 has a size of, for example, ⁇ 0.1 to 0.5 mm.
  • the circular outer diameter of the antenna section 110 (the distance from the center of the high frequency signal via to the surrounding conductor layer) is 0.2 to 2.0 mm.
  • the land 1100 has a size of, for example, ⁇ 0.3 to 1.0 mm. Examples of the metal material include Au and Cu.
  • the calibration unit 200 and measurement unit 201 of the reflection measuring device 2 described in this embodiment can be realized by a computer equipped with a CPU (Central Processing Unit), a storage device, and an interface, and a program that controls these hardware resources. Can be done.
  • a computer equipped with a CPU (Central Processing Unit), a storage device, and an interface, and a program that controls these hardware resources. Can be done.
  • An example of the configuration of this computer is shown in FIG.
  • the computer includes a CPU 300, a storage device 301, a communication device 303, a transmitter 302, a receiver 304, a directional coupler 305, a power source 306, a transformer 307, and a regulator 308.
  • the transmitter 302 and receiver 304 are connected to the sensor section 1 via a directional coupler 305.
  • the measurement sample is irradiated with microwave band electromagnetic waves generated by the transmitter 302 .
  • the signal reflected from the measurement sample is input from the sensor unit 1 to the receiver 304 via the directional coupler 305, converted into a digital signal, and then read by the CPU 300.
  • the CPU 300 sequentially reads reflected signals from the antenna section 110, the short section 112, the open section 111, and the load section 13 by outputting a control signal to the sensor section 1 and controlling the switches 12 and 14.
  • a program for implementing the dielectric spectroscopy measurement method of the present invention is stored in the storage device 301.
  • the CPU 300 executes the control and arithmetic processing described in this embodiment according to the program stored in the storage device 301.
  • the reflection coefficient and dielectric constant determined through the processing are transmitted to an external computer by a communication device 303 connected to the CPU 300.
  • a communication device 303 connected to the CPU 300.
  • the transmitter 302 for example, a frequency synthesizer using a phase locked circuit is used.
  • the receiver 304 for example, a double-balanced mixer is used.
  • a circulator may be used instead of the directional coupler 305.
  • a low IF (Intermediate Frequency) type transmitting/receiving configuration may be adopted by adding a transmitter with a slightly different transmission frequency.
  • a power supply 306 supplies power to each device.
  • the transformer 307 for example, a DC-DC converter is used.
  • Regulator 308 converts the input voltage from transformer 307 to a desired voltage.
  • the regulator 308 a linear regulator that operates even with a low potential difference between input and output is used.
  • the power source 306 a lithium ion battery or the like is used.
  • the present invention can be applied to a dielectric spectrometer using a coaxial probe.
  • SYMBOLS 1...Sensor part, 2...Reflection measuring device 10...Dielectric substrate, 11...Coaxial probe, 12, 14...Switch, 13...Load part, 15...RF connector, 16, 17...Control connector, 21...Multilayer wiring Substrate, 22 to 25... Insulator layer, 26 to 30, 46, 53... Conductor layer, 40 to 42, 130... Signal line, 43 to 45, 55... Pad, 1100, 1101, 1111, 1120, 1141... Land, 110... Antenna section, 111... Open section, 112... Short section, 114... Standard sample section, 200... Calibration section, 201... Measurement section, 1102, 1112, 1121, 1142... High frequency signal via, 1106, 1116, 1124, 1145 ...Through via, 1110...Opening.

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PCT/JP2022/020947 2022-05-20 2022-05-20 誘電分光測定装置 WO2023223541A1 (ja)

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JP2018096806A (ja) * 2016-12-13 2018-06-21 日本電信電話株式会社 誘電分光センサ及び誘電分光センサの作製方法
KR101929354B1 (ko) * 2017-12-20 2018-12-14 서울대학교산학협력단 유전율 측정 및 고열치료요법 겸용 구조를 갖는 어플리케이터

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004109128A (ja) * 2002-09-16 2004-04-08 Agilent Technol Inc 計測デバイスパスを較正すると共に較正した計測デバイスパスにおいて被検デバイスを計測するための方法及びシステム
JP2010535329A (ja) * 2007-08-03 2010-11-18 ローゼンベルガー ホーフフレクベンツテクニーク ゲーエムベーハー ウント ツェーオー カーゲー 非接触測定システム
JP2011004355A (ja) * 2009-06-22 2011-01-06 Sumitomo Metal Electronics Devices Inc コプレーナ線路と同軸線路の接続構造およびそれを備えた高周波用パッケージ
JP2015050680A (ja) * 2013-09-03 2015-03-16 日本電信電話株式会社 高周波伝送線路
JP2018096806A (ja) * 2016-12-13 2018-06-21 日本電信電話株式会社 誘電分光センサ及び誘電分光センサの作製方法
KR101929354B1 (ko) * 2017-12-20 2018-12-14 서울대학교산학협력단 유전율 측정 및 고열치료요법 겸용 구조를 갖는 어플리케이터

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