WO2023213973A3 - Apparatus for introducing in-situ generated chlorine in wet-chemical cleaning basins, and method for producing in-situ generated chlorine gas, and use of the apparatus and use of the method - Google Patents

Apparatus for introducing in-situ generated chlorine in wet-chemical cleaning basins, and method for producing in-situ generated chlorine gas, and use of the apparatus and use of the method Download PDF

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Publication number
WO2023213973A3
WO2023213973A3 PCT/EP2023/061859 EP2023061859W WO2023213973A3 WO 2023213973 A3 WO2023213973 A3 WO 2023213973A3 EP 2023061859 W EP2023061859 W EP 2023061859W WO 2023213973 A3 WO2023213973 A3 WO 2023213973A3
Authority
WO
WIPO (PCT)
Prior art keywords
situ generated
generated chlorine
wet
introducing
producing
Prior art date
Application number
PCT/EP2023/061859
Other languages
German (de)
French (fr)
Other versions
WO2023213973A2 (en
Inventor
Martin Zimmer
Daniel Winter
Original Assignee
Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V. filed Critical Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V.
Publication of WO2023213973A2 publication Critical patent/WO2023213973A2/en
Publication of WO2023213973A3 publication Critical patent/WO2023213973A3/en

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Classifications

    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25BELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE PRODUCTION OF COMPOUNDS OR NON-METALS; APPARATUS THEREFOR
    • C25B1/00Electrolytic production of inorganic compounds or non-metals
    • C25B1/01Products
    • C25B1/24Halogens or compounds thereof
    • C25B1/26Chlorine; Compounds thereof
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25BELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE PRODUCTION OF COMPOUNDS OR NON-METALS; APPARATUS THEREFOR
    • C25B15/00Operating or servicing cells
    • C25B15/08Supplying or removing reactants or electrolytes; Regeneration of electrolytes
    • C25B15/081Supplying products to non-electrochemical reactors that are combined with the electrochemical cell, e.g. Sabatier reactor
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25BELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE PRODUCTION OF COMPOUNDS OR NON-METALS; APPARATUS THEREFOR
    • C25B15/00Operating or servicing cells
    • C25B15/08Supplying or removing reactants or electrolytes; Regeneration of electrolytes
    • C25B15/083Separating products
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25BELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE PRODUCTION OF COMPOUNDS OR NON-METALS; APPARATUS THEREFOR
    • C25B15/00Operating or servicing cells
    • C25B15/08Supplying or removing reactants or electrolytes; Regeneration of electrolytes
    • C25B15/087Recycling of electrolyte to electrochemical cell
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25BELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE PRODUCTION OF COMPOUNDS OR NON-METALS; APPARATUS THEREFOR
    • C25B9/00Cells or assemblies of cells; Constructional parts of cells; Assemblies of constructional parts, e.g. electrode-diaphragm assemblies; Process-related cell features
    • C25B9/17Cells comprising dimensionally-stable non-movable electrodes; Assemblies of constructional parts thereof
    • C25B9/19Cells comprising dimensionally-stable non-movable electrodes; Assemblies of constructional parts thereof with diaphragms
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02041Cleaning
    • H01L21/02043Cleaning before device manufacture, i.e. Begin-Of-Line process
    • H01L21/02052Wet cleaning only

Landscapes

  • Chemical & Material Sciences (AREA)
  • Metallurgy (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Sustainable Development (AREA)
  • Water Treatment By Electricity Or Magnetism (AREA)
  • Detergent Compositions (AREA)
  • Electrolytic Production Of Non-Metals, Compounds, Apparatuses Therefor (AREA)

Abstract

The present invention relates to an apparatus for introducing in-situ generated chlorine in wet-chemical cleaning basins, and to a method for producing in-situ generated chlorine gas. The apparatus and the method are characterized by an increased efficiency in terms of the use of the required chemicals.
PCT/EP2023/061859 2022-05-05 2023-05-04 Apparatus for introducing in-situ generated chlorine in wet-chemical cleaning basins, and method for producing in-situ generated chlorine gas, and use of the apparatus and use of the method WO2023213973A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102022111209.8A DE102022111209A1 (en) 2022-05-05 2022-05-05 Device for introducing in-situ-generated chlorine into wet-chemical cleaning tanks, and method for producing in-situ-generated chlorine gas
DE102022111209.8 2022-05-05

Publications (2)

Publication Number Publication Date
WO2023213973A2 WO2023213973A2 (en) 2023-11-09
WO2023213973A3 true WO2023213973A3 (en) 2024-02-15

Family

ID=86497829

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2023/061859 WO2023213973A2 (en) 2022-05-05 2023-05-04 Apparatus for introducing in-situ generated chlorine in wet-chemical cleaning basins, and method for producing in-situ generated chlorine gas, and use of the apparatus and use of the method

Country Status (2)

Country Link
DE (1) DE102022111209A1 (en)
WO (1) WO2023213973A2 (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102017110297A1 (en) * 2016-12-30 2018-07-05 RENA Technologies GmbH Method and device for treating an object surface by means of a treatment solution
DE102017223521A1 (en) * 2017-12-21 2019-06-27 Siemens Aktiengesellschaft Flow-through anion exchanger fillings for electrolyte gaps in the CO2 electrolysis for better spatial distribution of gas evolution
CN113913851A (en) * 2021-11-15 2022-01-11 昆明理工大学 Bipolar membrane electrolysis method for preparing carbon monoxide by electrolyzing carbon dioxide in organic electrolyte and simultaneously producing chlorine and metal hydroxide as byproducts

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9546427B2 (en) 2011-06-10 2017-01-17 Michael Lumetta System and method for generating a chlorine-containing compound
US10589224B2 (en) 2014-11-13 2020-03-17 Koninklijke Philips N.V. Gas capture apparatus and method

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102017110297A1 (en) * 2016-12-30 2018-07-05 RENA Technologies GmbH Method and device for treating an object surface by means of a treatment solution
DE102017223521A1 (en) * 2017-12-21 2019-06-27 Siemens Aktiengesellschaft Flow-through anion exchanger fillings for electrolyte gaps in the CO2 electrolysis for better spatial distribution of gas evolution
CN113913851A (en) * 2021-11-15 2022-01-11 昆明理工大学 Bipolar membrane electrolysis method for preparing carbon monoxide by electrolyzing carbon dioxide in organic electrolyte and simultaneously producing chlorine and metal hydroxide as byproducts

Also Published As

Publication number Publication date
DE102022111209A1 (en) 2023-11-09
WO2023213973A2 (en) 2023-11-09

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