WO2023213973A3 - Apparatus for introducing in-situ generated chlorine in wet-chemical cleaning basins, and method for producing in-situ generated chlorine gas, and use of the apparatus and use of the method - Google Patents
Apparatus for introducing in-situ generated chlorine in wet-chemical cleaning basins, and method for producing in-situ generated chlorine gas, and use of the apparatus and use of the method Download PDFInfo
- Publication number
- WO2023213973A3 WO2023213973A3 PCT/EP2023/061859 EP2023061859W WO2023213973A3 WO 2023213973 A3 WO2023213973 A3 WO 2023213973A3 EP 2023061859 W EP2023061859 W EP 2023061859W WO 2023213973 A3 WO2023213973 A3 WO 2023213973A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- situ generated
- generated chlorine
- wet
- introducing
- producing
- Prior art date
Links
- 238000011065 in-situ storage Methods 0.000 title abstract 4
- 239000000126 substance Substances 0.000 title abstract 3
- KZBUYRJDOAKODT-UHFFFAOYSA-N Chlorine Chemical compound ClCl KZBUYRJDOAKODT-UHFFFAOYSA-N 0.000 title abstract 2
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 title abstract 2
- 229910052801 chlorine Inorganic materials 0.000 title abstract 2
- 239000000460 chlorine Substances 0.000 title abstract 2
- 238000004140 cleaning Methods 0.000 title abstract 2
- 238000004519 manufacturing process Methods 0.000 title abstract 2
- 238000000034 method Methods 0.000 title abstract 2
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25B—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE PRODUCTION OF COMPOUNDS OR NON-METALS; APPARATUS THEREFOR
- C25B1/00—Electrolytic production of inorganic compounds or non-metals
- C25B1/01—Products
- C25B1/24—Halogens or compounds thereof
- C25B1/26—Chlorine; Compounds thereof
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25B—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE PRODUCTION OF COMPOUNDS OR NON-METALS; APPARATUS THEREFOR
- C25B15/00—Operating or servicing cells
- C25B15/08—Supplying or removing reactants or electrolytes; Regeneration of electrolytes
- C25B15/081—Supplying products to non-electrochemical reactors that are combined with the electrochemical cell, e.g. Sabatier reactor
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25B—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE PRODUCTION OF COMPOUNDS OR NON-METALS; APPARATUS THEREFOR
- C25B15/00—Operating or servicing cells
- C25B15/08—Supplying or removing reactants or electrolytes; Regeneration of electrolytes
- C25B15/083—Separating products
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25B—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE PRODUCTION OF COMPOUNDS OR NON-METALS; APPARATUS THEREFOR
- C25B15/00—Operating or servicing cells
- C25B15/08—Supplying or removing reactants or electrolytes; Regeneration of electrolytes
- C25B15/087—Recycling of electrolyte to electrochemical cell
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25B—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE PRODUCTION OF COMPOUNDS OR NON-METALS; APPARATUS THEREFOR
- C25B9/00—Cells or assemblies of cells; Constructional parts of cells; Assemblies of constructional parts, e.g. electrode-diaphragm assemblies; Process-related cell features
- C25B9/17—Cells comprising dimensionally-stable non-movable electrodes; Assemblies of constructional parts thereof
- C25B9/19—Cells comprising dimensionally-stable non-movable electrodes; Assemblies of constructional parts thereof with diaphragms
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02043—Cleaning before device manufacture, i.e. Begin-Of-Line process
- H01L21/02052—Wet cleaning only
Landscapes
- Chemical & Material Sciences (AREA)
- Metallurgy (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Sustainable Development (AREA)
- Water Treatment By Electricity Or Magnetism (AREA)
- Detergent Compositions (AREA)
- Electrolytic Production Of Non-Metals, Compounds, Apparatuses Therefor (AREA)
Abstract
The present invention relates to an apparatus for introducing in-situ generated chlorine in wet-chemical cleaning basins, and to a method for producing in-situ generated chlorine gas. The apparatus and the method are characterized by an increased efficiency in terms of the use of the required chemicals.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102022111209.8A DE102022111209A1 (en) | 2022-05-05 | 2022-05-05 | Device for introducing in-situ-generated chlorine into wet-chemical cleaning tanks, and method for producing in-situ-generated chlorine gas |
DE102022111209.8 | 2022-05-05 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2023213973A2 WO2023213973A2 (en) | 2023-11-09 |
WO2023213973A3 true WO2023213973A3 (en) | 2024-02-15 |
Family
ID=86497829
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/EP2023/061859 WO2023213973A2 (en) | 2022-05-05 | 2023-05-04 | Apparatus for introducing in-situ generated chlorine in wet-chemical cleaning basins, and method for producing in-situ generated chlorine gas, and use of the apparatus and use of the method |
Country Status (2)
Country | Link |
---|---|
DE (1) | DE102022111209A1 (en) |
WO (1) | WO2023213973A2 (en) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102017110297A1 (en) * | 2016-12-30 | 2018-07-05 | RENA Technologies GmbH | Method and device for treating an object surface by means of a treatment solution |
DE102017223521A1 (en) * | 2017-12-21 | 2019-06-27 | Siemens Aktiengesellschaft | Flow-through anion exchanger fillings for electrolyte gaps in the CO2 electrolysis for better spatial distribution of gas evolution |
CN113913851A (en) * | 2021-11-15 | 2022-01-11 | 昆明理工大学 | Bipolar membrane electrolysis method for preparing carbon monoxide by electrolyzing carbon dioxide in organic electrolyte and simultaneously producing chlorine and metal hydroxide as byproducts |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9546427B2 (en) | 2011-06-10 | 2017-01-17 | Michael Lumetta | System and method for generating a chlorine-containing compound |
US10589224B2 (en) | 2014-11-13 | 2020-03-17 | Koninklijke Philips N.V. | Gas capture apparatus and method |
-
2022
- 2022-05-05 DE DE102022111209.8A patent/DE102022111209A1/en active Pending
-
2023
- 2023-05-04 WO PCT/EP2023/061859 patent/WO2023213973A2/en unknown
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102017110297A1 (en) * | 2016-12-30 | 2018-07-05 | RENA Technologies GmbH | Method and device for treating an object surface by means of a treatment solution |
DE102017223521A1 (en) * | 2017-12-21 | 2019-06-27 | Siemens Aktiengesellschaft | Flow-through anion exchanger fillings for electrolyte gaps in the CO2 electrolysis for better spatial distribution of gas evolution |
CN113913851A (en) * | 2021-11-15 | 2022-01-11 | 昆明理工大学 | Bipolar membrane electrolysis method for preparing carbon monoxide by electrolyzing carbon dioxide in organic electrolyte and simultaneously producing chlorine and metal hydroxide as byproducts |
Also Published As
Publication number | Publication date |
---|---|
DE102022111209A1 (en) | 2023-11-09 |
WO2023213973A2 (en) | 2023-11-09 |
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