WO2023210883A1 - Capteur tactile utilisant une propagation de champ électrique par frottement, et procédé de détection tactile l'utilisant - Google Patents

Capteur tactile utilisant une propagation de champ électrique par frottement, et procédé de détection tactile l'utilisant Download PDF

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Publication number
WO2023210883A1
WO2023210883A1 PCT/KR2022/014787 KR2022014787W WO2023210883A1 WO 2023210883 A1 WO2023210883 A1 WO 2023210883A1 KR 2022014787 W KR2022014787 W KR 2022014787W WO 2023210883 A1 WO2023210883 A1 WO 2023210883A1
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WIPO (PCT)
Prior art keywords
electrodes
electrode
tactile sensor
field propagation
electric field
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PCT/KR2022/014787
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English (en)
Korean (ko)
Inventor
최원준
서병석
차영선
Original Assignee
고려대학교 산학협력단
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Priority claimed from KR1020220123946A external-priority patent/KR20230153222A/ko
Application filed by 고려대학교 산학협력단 filed Critical 고려대학교 산학협력단
Publication of WO2023210883A1 publication Critical patent/WO2023210883A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
    • G01L5/164—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using variations in inductance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/22—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring the force applied to control members, e.g. control members of vehicles, triggers
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F1/00—Details not covered by groups G06F3/00 - G06F13/00 and G06F21/00
    • G06F1/16—Constructional details or arrangements
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/04—Friction generators

Definitions

  • the present invention relates to a tactile sensor using friction electric field propagation and a tactile sensing method using the same.
  • Representative tactile sensor technologies include capacitive tactile sensors and resistive tactile sensors.
  • Capacitive tactile sensors and resistance-type tactile sensors require electrode patterns with micro- to nano-scale microstructures for precise contact position sensing.
  • capacitive tactile sensors have object specificity, there is a problem in that they only detect contact materials that are compatible with conductive materials (for example, if you are wearing gloves, they may not be able to detect even if you touch them with your finger). Resistive tactile sensors have the problem of severe mechanical aging due to high contact pressure.
  • triboelectric-based tactile sensors have been proposed as other tactile sensor technologies.
  • One object of the present invention is to provide a tactile sensor using friction electric field propagation and a touch sensing method using the same.
  • a tactile sensor using triboelectric field propagation includes a substrate; 1-1 to 1-n electrodes formed on the substrate and spaced apart from each other (where n is a natural number of 2 or more); and a dielectric layer formed to cover the 1-1 to 1-n electrodes, wherein the frictional electric field propagation generated when an object touches or slides on the dielectric layer is measured at a pair of adjacent electrodes. It is characterized by detecting the contact position or sliding motion of an object using the voltage ratio (V ratio ).
  • the distance between the 1-1th electrode to the 1-nth electrode may be 27 to 33 mm.
  • the 2-1 to 2-m electrodes are formed on the substrate, are formed at different angles from the 1-1 to 1-n electrodes, and are spaced apart from each other.
  • m may be characterized as further including a natural number of 2 or more).
  • the dielectric layer is polyamide (nylon 6,6), poly(vinyl alcohol) (PVA), poly(vinyl acetate) (PVAc), poly(methyl methacrylate) (PMMA), and poly(ethylene terephthalate (Mylar). , polyacrylonitrile (PAN), poly(bisphenol A carbonate) (PC), poly(vinylidene chloride), polystyrene (PS), polyethylene (PE), polypropylene (PP), poly(vinyl chloride) (PVC), polytetrafluoroethylene (PTFE) , polyester, polydimethylsiloxane (PDMS), and polyurethane.
  • PAN polyacrylonitrile
  • PC poly(bisphenol A carbonate)
  • PS poly(vinylidene chloride)
  • PS polystyrene
  • PE polyethylene
  • PP polypropylene
  • PVC poly(vinyl chloride)
  • PTFE polytetrafluoroethylene
  • polyester polydimethylsilox
  • a voltmeter may be connected to each of the 1-1 to 1-n electrodes.
  • a tactile sensing method includes a substrate; 1-1 to 1-n electrodes formed on the substrate and spaced apart from each other (where n is a natural number of 2 or more); and a dielectric layer formed to cover the 1-1 to 1-n electrodes, wherein a pair of adjacent electrodes are connected by friction electric field propagation generated when an object touches or slides on the dielectric layer. It is characterized by detecting the position where the object touches or the sliding motion using the ratio of the voltage (V ratio ) measured at the electrode.
  • a tactile sensor using triboelectric field propagation and a touch sensing method using the same detect triboelectricity at adjacent electrodes when triboelectricity is generated due to touching or sliding of an object between a plurality of electrodes arranged to face each other. By detecting the touched or slid position using the ratio of one voltage, it is possible to detect a precise touch or slid position without a microstructured electrode pattern.
  • the tactile sensor using friction electric field propagation and the touch sensing method using the same can detect a precise contact position or sliding position regardless of the type of contact material. there is.
  • Figure 1 is a schematic diagram of a tactile sensor using friction electric field propagation according to an embodiment of the present invention.
  • Figure 2 is a schematic perspective view of a test device with electrodes installed on one side of the dielectric layer, and schematically shows the propagation of triboelectricity generated by friction charging when an object is brought into contact at one location, and Figure 3 shows the test of Figure 2.
  • This is a schematic cross-sectional view of the device, illustrating the process of dipole energy transfer within the dielectric according to the various contact positions of the object.
  • Figure 4 shows the open-circuit voltage (OCV) measurement results measured at the electrode when an object is contacted at positions 3 mm, 9 mm, 15 mm, 21 mm, and 27 mm away from the electrode of the test device.
  • OCV open-circuit voltage
  • Figure 5 is a graph showing the OCV measurement results according to the position where the object was contacted based on the electrode of the test device.
  • Figure 6 is a schematic diagram for explaining the operating principle of a tactile sensor using triboelectric field propagation according to an embodiment of the present invention
  • Figure 7 shows the ratio of the OCV value measured at each electrode in the tactile sensor of Figure 6 and the voltage of the electrodes. This is the result of measuring .
  • Figure 8 shows the measurement results of V ratio according to the spacing between electrodes.
  • Figure 9 shows the results of evaluating design factors considering detection resolution and panel area to determine optimal design dimensions.
  • Figure 10 shows the results of evaluating the position detection resolution of a tactile sensor using triboelectric field propagation according to an embodiment of the present invention with an electrode spacing of 30 mm.
  • Figure 11 shows the V ratio measurement results according to the contact speed and position of the object.
  • Figure 12 shows the V ratio measurement results when an object is contacted at a vertical speed of 50 cm/s and the object types are cellulose, nylon, and silicon.
  • Figure 13 shows the results of measuring the change over time in the OCV value measured upon contact with an object.
  • Figure 14 is a schematic diagram of dipole energy transfer in a dielectric layer induced by sliding motion.
  • Figure 15 shows OCV measurements when sliding at a speed of 11.5 cm/s at initial positions of 0, 6, 15, and 24 mm
  • Figure 16 shows V ratio measurements at various initial positions and sliding distances.
  • Figure 17 is a touch pad manufactured using a tactile sensor using friction electric field propagation according to an embodiment of the present invention.
  • Figures 19 and 20 show the results of tracking the mixed motion of contact and sliding.
  • Figure 21 shows the results when polygonal stimuli such as (a) triangle, (b) square, and (c) star shape are applied.
  • Figure 22 is a schematic flow chart of a method of manufacturing a tactile sensor using friction electric field propagation according to an embodiment of the present invention.
  • a tactile sensor In order for a tactile sensor to be commercially viable, it must have high resolution and fast response time, and must be easy to integrate into applications such as displays or electronic skin.
  • the tactile sensor using triboelectric field propagation has high resolution and fast response time, and its structure is also very simple.
  • a tactile sensor using friction electric field propagation can detect a precise contact position or sliding position regardless of the type of contact material.
  • Figure 1 is a schematic diagram of a tactile sensor using friction electric field propagation according to an embodiment of the present invention.
  • the tactile sensor 100 using triboelectric field propagation is formed on the substrate 10 and the 1-1 electrode to the 1-1-th electrode formed on the substrate 10 and spaced apart from each other. It includes a first electrode 21 composed of n electrodes (where n is a natural number of 2 or more), and a dielectric layer 30 formed on the first electrode 21 and through which an object touches or slides.
  • the 1-1th electrode to the 1-nth electrode (where n is a natural number of 2 or more) may be collectively referred to as the first electrode 21.
  • the tactile sensor 100 using triboelectric field propagation may further include a 2-1 electrode to a 2-m electrode (where m is a natural number of 2 or more) spaced apart from each other.
  • the 2-1st to 2-m electrodes (where m is a natural number of 2 or more) may be collectively referred to as the second electrode 22.
  • the first electrode 21 and/or the second electrode 22 may be formed to be long in one direction and may be in the form of a wire or line.
  • the 1-1 to 1-n electrodes (where n is a natural number of 2 or more) may be formed parallel to each other, and the 2-1 to 2-m electrodes (where m is a natural number of 2 or more) may also be formed. They can be formed parallel to each other.
  • Parallel does not mean parallel to the extent that they do not meet each other when extending an infinite straight line, but rather means that they are formed side by side to the extent that they do not meet each other within the device.
  • the contact position or sliding position can be detected by the adjacent first electrode 21, and the second Even if the -1 to 2-m electrodes (where m is a natural number of 2 or more) are not parallel to each other, the contact position or sliding position can be detected by the adjacent second electrode 22.
  • the first electrode 21 and the second electrode 22 may be formed in different directions, for example, at right angles.
  • the first electrode 21 can be said to be a row electrode
  • the second electrode 22 can be said to be a column electrode.
  • the first electrode 21 and/or the second electrode 22 are made of highly conductive metal such as gold, silver, or copper, carbon material such as carbon nanotube, or conductive polymer. can be formed.
  • a voltmeter is connected to each of the first electrode 21 and the second electrode 22 to measure the voltage change.
  • a voltmeter may be connected to the 1-1st electrode to the 1-nth electrode (where n is a natural number of 2 or more) and the 2-1th electrode to the 2-m electrode (where m is a natural number of 2 or more).
  • the first electrode 21 and the second electrode 22 may be formed on the substrate 10.
  • the substrate 10 includes a PCB, and its materials include polyamide (nylon 6,6), poly(vinyl alcohol) (PVA), poly(vinyl acetate) (PVAc), and poly(methyl methacrylate) (PMMA). , poly(ethylene terephthalate (Mylar), polyacrylonitrile (PAN), poly(bisphenol A carbonate) (PC), poly(vinylidene chloride), polystyrene (PS), polyethylene (PE), polypropylene (PP), poly(vinyl chloride) Any one selected from the group consisting of (PVC), polytetrafluoroethylene (PTFE), polyester, polydimethylsiloxane (PDMS), and polyurethane can be used.
  • PVC poly(vinyl alcohol)
  • PVAc poly(vinyl acetate)
  • PMMA poly(methyl methacrylate)
  • PMMA poly(ethylene terephthalate
  • Mylar polyacrylonitrile
  • PC poly(bisphenol A carbonate)
  • the material of the substrate within the scope of the present invention is not limited to the above-mentioned materials, and known materials can be used.
  • the dielectric layer 30 is formed on the first electrode 21 and the second electrode 22.
  • the dielectric layer 30 is made of polyamide (nylon 6,6), poly(vinyl alcohol) (PVA), poly(vinyl acetate) (PVAc), poly(methyl methacrylate) (PMMA), poly(ethylene terephthalate (Mylar), polyacrylonitrile ( PAN), poly(bisphenol A carbonate) (PC), poly(vinylidene chloride), polystyrene (PS), polyethylene (PE), polypropylene (PP), poly(vinyl chloride) (PVC), polytetrafluoroethylene (PTFE), polyester, Any one selected from the group consisting of polydimethylsiloxane (PDMS) and polyurethane can be used.
  • PVA poly(vinyl alcohol)
  • PVAc poly(vinyl acetate)
  • PMMA poly(methyl methacrylate)
  • Mylar polyacrylonitrile
  • PC poly(bisphenol A carbonate)
  • PS poly(vinylidene chloride), polystyrene (PS)
  • An object such as a human hand or a pencil touches or slides on one surface of the dielectric layer 30.
  • Figure 2 is a schematic perspective view of a test device with electrodes installed on one side of the dielectric layer, and schematically shows the propagation of triboelectricity generated by friction charging when an object is brought into contact at one location, and Figure 3 shows the test of Figure 2.
  • This is a schematic cross-sectional view of the device, illustrating the process of dipole energy transfer within the dielectric according to the various contact positions of the object.
  • the position of the contact point where the object touches the dielectric layer can be inversely derived.
  • Figure 4 shows the open-circuit voltage (OCV) measurement results measured at the electrode when an object is contacted at positions 3 mm, 9 mm, 15 mm, 21 mm, and 27 mm away from the electrode of the test device.
  • OCV open-circuit voltage
  • the measured OCV value varies depending on the distance from the electrode.
  • Figure 5 is a graph showing the OCV measurement results according to the position where the object was contacted based on the electrode of the test device.
  • the OCV value decreases from 9.07 mV to 1.41 mV as the contact position of the object relative to the electrode increases from 3 mm to 15 mm, and when the distance from the electrode is more than 30 mm, there is a significant change in OCV value. is not observed.
  • Equation 1 From the object contact position-OCV graph of FIG. 5, an empirical spinning calculation as shown in Equation 1 below can be derived.
  • V OCV and x mean the measured OCV value and the contact position of the object based on the electrode, respectively.
  • the tactile sensor 100 using triboelectric field propagation includes a plurality of electrodes 21 and 22, and a dielectric layer 30 formed on the electrodes 21 and 22. ), when an object touches or slides to generate triboelectricity, the ratio (V ratio ) of the voltage detected by a pair of adjacent electrodes is used.
  • the contact or sliding position of an object can be detected with high accuracy even if the distance between adjacent electrodes is widened up to 30 mm, and the type of object changes or the operation Even if the environment changes, the contact or sliding position of an object can be detected with high accuracy.
  • Figure 6 is a schematic diagram for explaining the operating principle of a tactile sensor using triboelectric field propagation according to an embodiment of the present invention
  • Figure 7 shows the ratio of the OCV value measured at each electrode in the tactile sensor of Figure 6 and the voltage of the electrodes. This is the result of measuring .
  • the location where the object touches is detected using the ratio of OCV (V ratio ) detected at the 1-1 electrode (Electrode 1) and the 1-2 electrode (Electrode 2).
  • Figure 8 shows the measurement results of V ratio according to the spacing between electrodes.
  • the V ratio has a similar graph shape regardless of the spacing between electrodes, and converges to 1 at the center.
  • Figure 9 shows the results of evaluating design factors considering detection resolution and panel area to determine optimal design dimensions.
  • the value of the detection resolution varies depending on the target standard.
  • the variation ratio of V ratio according to the contact distance is 99.31%
  • the variation ratio of V ratio according to the contact distance is 99.31%. This is only 2.36%.
  • the spacing between adjacent electrodes may be 27 to 33 mm, and most preferably 30 mm.
  • Performance evaluation was performed based on the electrode spacing of 30 mm, which was the best mode.
  • Figure 10 shows the results of evaluating the position detection resolution of a tactile sensor using triboelectric field propagation according to an embodiment of the present invention with an electrode spacing of 30 mm.
  • Figure 11 shows the V ratio measurement results according to the contact speed and position of the object.
  • the error is within 6.29% when the object is contacted at vertical speeds of 30, 50, and 70 cm/s, showing a similar level of error regardless of the contact speed.
  • Figure 12 shows the V ratio measurement results when an object is contacted at a vertical speed of 50 cm/s and the object types are cellulose, nylon, and silicon.
  • the measured OCV value varies depending on the type of material, but the V ratio can be confirmed to be constant.
  • the tactile sensor using triboelectric field propagation according to an embodiment of the present invention has strong sensing characteristics that do not depend on stimulation conditions such as stimulation dynamics and stimulation object material.
  • Figure 13 shows the results of measuring the change over time in the OCV value measured upon contact with an object.
  • the OCV value increased as the object approached the surface of the dielectric layer through the air gap capacitance, and decreased due to charging after contact.
  • the refresh time and agility of a tactile sensor using triboelectric field propagation according to an embodiment of the present invention are determined by OCV behavior after contact.
  • the maximum refresh time of the tactile sensor using friction electric field propagation according to an embodiment of the present invention was 34.72 Hz.
  • Figure 14 is a schematic diagram of dipole energy transfer in a dielectric layer induced by sliding motion.
  • dipole polarization is induced within the dielectric in the sliding direction.
  • This dipole polarization generates OCV signals at both electrodes with opposite signs (i.e., negative or positive signs compared to ground).
  • the direction and final position of the sliding motion can be detected based on the V ratio of the two electrodes and the sign of that value.
  • Figure 15 shows OCV measurements when sliding at a speed of 11.5 cm/s at initial positions of 0, 6, 15, and 24 mm
  • Figure 16 shows V ratio measurements at various initial positions and sliding distances.
  • Figure 17 is a touch pad manufactured using a tactile sensor using friction electric field propagation according to an embodiment of the present invention.
  • the alphabet from A to I was assigned to the virtual area.
  • Figure 18 shows the results of measuring OCV values generated at each electrode by finger touch stimulation in areas "A", "D", and "E".
  • Figures 19 and 20 show the results of tracking the mixed motion of contact and sliding.
  • Figure 21 shows the results when polygonal stimuli such as (a) triangle, (b) square, and (c) star shape are applied.
  • the touch pad manufactured using a tactile sensor using triboelectric field propagation smoothly senses even complex forms of contact.
  • Figure 22 is a schematic flow chart of a method of manufacturing a tactile sensor using friction electric field propagation according to an embodiment of the present invention.
  • a PET substrate (10 cm ⁇ 10 cm, thickness 50 ⁇ m) cleaned with ethanol and deionized water is covered with a stainless steel shadow mask with an electrode spacing of 30 mm.
  • Silver (4N purity) electrodes were formed through DC magnetron sputtering at 100 W for 1.5 hours and deposited on PET substrates for column electrodes in an argon atmosphere with a flow rate of 30 sccm and a pressure of 2.8 ⁇ 10 -3 Torr.
  • the row electrodes were deposited under identical conditions using aligned cellulose insulators to prevent electrical interference between the column and row electrodes.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Human Computer Interaction (AREA)
  • General Engineering & Computer Science (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)

Abstract

La présente invention concerne un capteur tactile utilisant une propagation de champ électrique par frottement, comprenant : un substrat ; (1-1)ième à (1-n)ième électrodes (n étant un nombre naturel d'au moins 2) formées sur le substrat et espacées les unes des autres ; et une couche diélectrique formée pour recouvrir les (1-1) ième à (1-n)ième électrodes, et utiliser un rapport (Vrapport) de tension mesuré au niveau d'une paire d'électrodes adjacentes au moyen de la propagation d'un champ électrique par frottement généré lorsqu'un objet entre en contact avec ou coulisse sur la couche diélectrique, détectant ainsi l'endroit où l'objet entre en contact ou effectue son coulissement.
PCT/KR2022/014787 2022-04-28 2022-09-30 Capteur tactile utilisant une propagation de champ électrique par frottement, et procédé de détection tactile l'utilisant WO2023210883A1 (fr)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
KR10-2022-0052848 2022-04-28
KR20220052848 2022-04-28
KR10-2022-0123946 2022-09-29
KR1020220123946A KR20230153222A (ko) 2022-04-28 2022-09-29 마찰 전기장 전파를 이용한 촉각 센서 및 이를 이용한 촉각 센싱 방법

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20120146943A1 (en) * 2009-09-03 2012-06-14 Koninklijke Philips Electronics N.V. Touch sensing output device
KR20140123895A (ko) * 2013-04-15 2014-10-23 삼성전자주식회사 촉각 제공 장치 및 방법
JP2017506395A (ja) * 2014-02-21 2017-03-02 タンヴァス, インコーポレイテッドTanvas, Inc. 同時検知及び作動を用いる触覚ディスプレイ
US20200218351A1 (en) * 2017-08-07 2020-07-09 Mitsubishi Electric Corporation Tactile presentation panel, tactile presentation touch panel, and tactile presentation touch display
KR20220050892A (ko) * 2019-07-17 2022-04-25 유이 라이프사이언시스 인코포레이티드 용량성 촉각 센서의 사용에 의해 조직 파라미터들을 측정하기 위한 시스템 및 방법

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20120146943A1 (en) * 2009-09-03 2012-06-14 Koninklijke Philips Electronics N.V. Touch sensing output device
KR20140123895A (ko) * 2013-04-15 2014-10-23 삼성전자주식회사 촉각 제공 장치 및 방법
JP2017506395A (ja) * 2014-02-21 2017-03-02 タンヴァス, インコーポレイテッドTanvas, Inc. 同時検知及び作動を用いる触覚ディスプレイ
US20200218351A1 (en) * 2017-08-07 2020-07-09 Mitsubishi Electric Corporation Tactile presentation panel, tactile presentation touch panel, and tactile presentation touch display
KR20220050892A (ko) * 2019-07-17 2022-04-25 유이 라이프사이언시스 인코포레이티드 용량성 촉각 센서의 사용에 의해 조직 파라미터들을 측정하기 위한 시스템 및 방법

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