WO2023176561A1 - Dispositif de déviation optique et dispositif de mesure de distance - Google Patents

Dispositif de déviation optique et dispositif de mesure de distance Download PDF

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Publication number
WO2023176561A1
WO2023176561A1 PCT/JP2023/008408 JP2023008408W WO2023176561A1 WO 2023176561 A1 WO2023176561 A1 WO 2023176561A1 JP 2023008408 W JP2023008408 W JP 2023008408W WO 2023176561 A1 WO2023176561 A1 WO 2023176561A1
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WO
WIPO (PCT)
Prior art keywords
deflection device
mirror
optical deflection
section
mass
Prior art date
Application number
PCT/JP2023/008408
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English (en)
Japanese (ja)
Inventor
浩希 岡田
Original Assignee
京セラ株式会社
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Filing date
Publication date
Application filed by 京セラ株式会社 filed Critical 京セラ株式会社
Publication of WO2023176561A1 publication Critical patent/WO2023176561A1/fr

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C3/00—Measuring distances in line of sight; Optical rangefinders
    • G01C3/02—Details
    • G01C3/06—Use of electric means to obtain final indication
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems

Definitions

  • the present disclosure relates to a light deflection device and a distance measuring device.
  • Patent Document 1 discloses a configuration in which a plurality of MEMS mirrors are arranged in a matrix on a base, and each MEMS mirror is supported so as to protrude from the base.
  • Patent Document 2 discloses an optical deflector in which a plurality of mirrors that deflect laser light are swung by a piezoelectric actuator, and each mirror is supported by a support so as to protrude from a support base.
  • An optical deflection device includes: a mirror portion that swings around a predetermined movable axis and has a reflective surface that reflects light; A support part having a first part and a second part with the movable shaft in between, and supporting the mirror part with the first part.
  • a distance measuring device includes: A light deflection device according to the embodiment described above, A light emitting part that outputs electromagnetic waves, a light receiving section into which at least a part of the reflected wave, which is the electromagnetic wave output from the light emitting section and deflected by the optical deflection device reflected by an object, is incident; Equipped with The distance measuring device measures the distance to the object based on the output of electromagnetic waves from the light emitting section and the incidence of the reflected wave on the light receiving section.
  • FIG. 1 is a diagram showing a schematic configuration of a light deflection device according to a first embodiment.
  • FIG. 3 is a front view (top view) of a mirror section and a drive section of the optical deflection device according to the first embodiment.
  • FIG. 2 is a front view (top view) centered on the mirror portion of the optical deflection device according to the first embodiment.
  • 3 is a bottom surface of the optical deflection device according to the first embodiment, with the mirror portion in the center.
  • FIG. 3 is a diagram showing a schematic configuration of an optical deflection device according to a second embodiment. It is a figure showing the schematic structure of the optical deflection device concerning a 3rd embodiment.
  • FIG. 1 is a block diagram showing a functional configuration of a distance measuring device according to an embodiment.
  • FIG. 2 is a diagram showing a schematic configuration of an optical deflection device as a comparative example with respect to the optical deflection device according to one embodiment.
  • the optical deflection device as described above would be advantageous if its detection accuracy could be maintained at a high level for a long period of time. To this end, it is desired to improve the durability of the optical deflection device as described above.
  • An object of the present disclosure is to provide a light deflection device that can improve durability, and a distance measuring device equipped with such a light deflection device. According to one embodiment, it is possible to provide a light deflection device that can improve durability and a distance measuring device including such a light deflection device.
  • a light deflection device according to an embodiment of the present disclosure will be described with reference to the drawings. First, a light deflection device will be described as a comparative example for explaining the light deflection device according to the embodiment of the present disclosure.
  • FIG. 8 is a diagram showing the configuration of a conventional general optical deflection device as a comparative example for explaining the optical deflection device according to the embodiment of the present disclosure.
  • the optical deflection device 1' includes a mirror section 10' and a support section 20'.
  • the optical deflection device 1' may include a conventional general MEMS mirror.
  • the mirror section 10' includes, for example, a mirror 12' that reflects electromagnetic waves such as light.
  • the mirror 12' reflects electromagnetic waves such as light that includes a component in the negative direction of the Z-axis in a direction that includes a component in the positive direction of the Z-axis.
  • the Z axis is an axis perpendicular to the surface of the undriven mirror 12'.
  • the support portion 20' has a first end 21' and a second end 22'.
  • a mirror portion 10' may be provided at the first end 21'.
  • the second end 22' may be the opposite end of the first end 21'.
  • a movable axis P' on which the mirror portion 10' swings is located near the second end 22'. That is, the mirror portion 10' can swing about the movable axis P' as a rotation axis.
  • the movable shaft P' may be a torsion bar and may be connected to the second end 22'. In FIG. 8, the swinging of the mirror portion 10' in the directions of arrows S1 and S2 is shown by a two-dot chain line.
  • the optical deflection device 1' shown in FIG. 8 may further include a drive section 70', a first frame 71', a housing 80', a lid 90', and the like.
  • the drive section 70' is connected to the movable shaft P' and drives the mirror section 10'.
  • the mirror section 10' is driven by the drive section 70' to swing about the movable axis P' as a rotation axis.
  • the driving section 70' may drive the mirror section 10' using, for example, a disposed piezoelectric element. Any method such as an electrostatic method or an electromagnetic method may be adopted as a method for driving the mirror section 10'.
  • the first frame 71' may be a frame-shaped member that surrounds at least a portion of the drive section 70'.
  • the first frame 71' may be fixed to the housing 80'.
  • the first frame 71' may be a member interposed between the drive section 70' and the housing 80'. Even if the first frame 71' is fixed to the housing 80', the mirror section 10' can be swung by driving the driving section 70'.
  • the drive unit 70' is piezoelectric, even if the first frame 71' is fixed to the housing 80' so as not to move, the drive unit 70' may be deformed such as at least partially bent. This allows the mirror section 10' to be moved.
  • the housing 80' may protect the mirror part 10' by surrounding at least a portion of the mirror part 10'. That is, the mirror portion 10' can be protected from impacts from outside the optical deflection device 1' by the housing 80'.
  • the first frame 71' may be fixed inside the housing 80', for example.
  • the lid 90' may protect the mirror 12' by surrounding at least a portion of the mirror 12'.
  • the lid 90' is made of a material that transmits the light that is deflected by the mirror 12' and output from the optical deflection device 1'.
  • the lid 90' may transmit light that is incident on the mirror 12' from outside the optical deflection device 1'.
  • the optical deflection device 1' can deflect and output electromagnetic waves such as light emitted from any light source. Further, by swinging the mirror section 10' by an arbitrary drive section such as the drive section 70', the optical deflection device 1' can deflect the electromagnetic waves to be output.
  • the mirror portion 10' can swing about the movable axis P' as a rotation axis.
  • the center of gravity Q' of the system constituted by the mirror section 10' and the support section 20' does not coincide with the movable axis P'.
  • the center of gravity Q' of the system constituted by the mirror part 10' and the support part 20' is moved in the positive direction of the Z-axis with respect to the movable axis P'. It shifts.
  • the movable shaft P' has an elongated rod-like shape, extends from the second end 22' of the support section 20' in the positive direction and the negative direction of the Y-axis, and is connected to the drive section 70'. Therefore, if an unnecessarily large load is applied to the movable shaft P', it may cause various inconveniences, such as malfunction or breakage of the movable shaft P' interposed between the support section 20 and the drive section 70, for example. With the optical deflection device having such a configuration, it becomes difficult to maintain detection accuracy at a high level for a long period of time, which may make it difficult to maintain the durability of the optical deflection device.
  • the center of rotation of the mirror part is eccentric, which affects the distribution of stress on the mirror part. Bias may occur. Then, if the mirror swing angle (deflection angle) is increased, the risk of deterioration of torsion bars and the like increases, which may cause problems such as, for example, not being able to achieve a desired mirror deflection angle.
  • the durability of the optical deflection device is improved by reducing the eccentricity of the center of rotation of the mirror portion.
  • FIGS. 1 to 4 are diagrams showing configuration examples of the optical deflection device according to the first embodiment.
  • the optical deflection device 1 shown in FIG. 1 may have a structure including the same parts as the optical deflection device 1' shown in FIG. 8 as a whole. Regarding the optical deflection device 1 according to the first embodiment, descriptions of contents that are the same or similar to those of the optical deflection device 1' shown in FIG. 8 may be simplified or omitted as appropriate.
  • FIG. 1 is a cross-sectional view of the optical deflection device 1 viewed from the side (from a viewpoint in the positive direction of the Y-axis).
  • FIG. 2 is a diagram of the configuration including the mirror section 10, the drive section 70, and the first frame 71 in the optical deflection device 1, viewed from above (from a viewpoint in the negative direction of the Z-axis).
  • FIG. 3 is a diagram showing a partially enlarged configuration of FIG. 2.
  • FIG. FIG. 3 is a diagram of the mirror unit 10, the first torsion bar 41, and the second torsion bar 42 viewed from above (from a viewpoint in the negative direction of the Z-axis).
  • FIG. 4 is a diagram of the mirror section 10, the support section 20, the first torsion bar 41, and the second torsion bar 42 viewed from below (from a viewpoint in the Z-axis positive direction).
  • the optical deflection device 1 includes a mirror section 10. As shown in FIGS. 1 and 4, the optical deflection device 1 includes a support section 20. As shown in FIGS. 1 to 4, the optical deflection device 1 according to the first embodiment includes a mirror section 10. As shown in FIGS. 1 and 4, the optical deflection device 1 includes a support section 20. As shown in FIGS.
  • the mirror unit 10 may include, for example, a mirror 12 that reflects electromagnetic waves such as light.
  • the mirror 12 reflects electromagnetic waves such as light that includes a component in the negative direction of the Z-axis in a direction that includes a component in the positive direction of the Z-axis.
  • the mirror section 10 reflects electromagnetic waves such as light, for example.
  • the mirror 12 may be any mirror that reflects electromagnetic waves such as light, such as a conventional general MEMS mirror. At least a portion of the reflective surface of the mirror 12 may be flat.
  • the mirror portion 10 may be formed of any material that can withstand use as a MEMS mirror, for example.
  • the shape of the mirror section 10 is not particularly limited, and may be any shape.
  • the mirror section 10 may have, for example, a square shape, a rectangular shape, a parallelogram shape, a polygonal shape, or a circular (disc) shape when viewed in the Z-axis direction.
  • the mirror 12 may be formed of any material that can withstand use as a MEMS mirror, for example.
  • the shape of the mirror 12 is not particularly limited, and may be any shape.
  • the mirror 12 may have a square shape, a rectangular shape, a parallelogram shape, a polygonal shape, or a circular (disc) shape when viewed in the Z-axis direction.
  • the support portion 20 has a first end 21 and a second end 22.
  • the end of the support part 20 facing the Z-axis positive direction is conveniently referred to as a first end 21, and the end of the support part 20 facing the Z-axis negative direction is conveniently referred to as a second end 22.
  • the support portion 20 may include a first portion 20A and a second portion 20B.
  • the support portion 20 may include a first portion 20A and a second portion 20B with the movable axis P interposed therebetween.
  • the first portion 20A includes the first end 21 and may be a portion on the positive side of the Z-axis from the position of the movable axis P.
  • the second portion 20B includes the second end 22 and may be a portion on the negative side of the Z-axis from the position of the movable axis P.
  • the first portion 20A may support the mirror portion 10.
  • the first end 21 and the mirror section 10 may be connected.
  • the second end 22 may be an end on the opposite side of the first end 21 with the movable axis P interposed therebetween.
  • the support part 20 may be formed of any material that can withstand supporting the mirror part 10, such as a MEMS mirror, for example.
  • the support portion 20 is not limited to the shape shown in FIG. 1, but may have various shapes.
  • the support portion 20 may have any shape, such as a cylinder or a prism.
  • a movable axis P on which the mirror portion 10 swings is located between the first end 21 and the second end 22.
  • the movable shaft includes a first torsion bar 41 extending in the positive direction of the Y-axis and a second torsion bar 42 extending in the negative direction of the Y-axis.
  • the mirror section 10 can swing about the movable axis P as a rotation axis.
  • the support section 20 supports the mirror section 10 so as to be swingable around a predetermined movable axis P.
  • the movable axis P may be an axis parallel to the Y axis.
  • the support portion 20 may extend in a direction perpendicular to the reflective surface of the mirror 12.
  • the movable axis P may extend in a direction parallel to the reflective surface of the mirror 12.
  • the optical deflection device 1 may further include a drive unit 70, a first frame 71, a housing 80, a lid 90, and the like. These members may be similar to the drive unit 70', first frame 71', housing 80', lid 90', etc. of the optical deflection device 1' described in FIG. 8.
  • the housing 80 may have a box-like shape, for example, and may include a wall portion surrounding the first frame 71 and a bottom portion connected to the wall portion and facing the lid 90.
  • the first torsion bar 41 and the second torsion bar 42 are connected to the support section 20 that supports the mirror section 10.
  • the drive section 70 includes a rectangular second frame 72 formed to surround the support section 20, and a connection connecting the second frame 72 and the first frame 71. 73.
  • the connecting portion 73 may have a bent shape that is folded back multiple times.
  • the first torsion bar 41 and the second torsion bar 42 are connected to a second frame 72 of the drive unit 70.
  • the first torsion bar 41 and the second torsion bar 42 are connected to opposing sides of the second frame 72 of the drive unit 70, respectively.
  • the mirror section 10 is connected to the first end 21 of the support section 20 and thereby connected to the drive section 70 via the first torsion bar 41 and the second torsion bar 42 .
  • the drive section 70 includes a piezoelectric element in the connection section 73.
  • the first torsion bar 41 and the second torsion bar 42 swingably support the support section 20.
  • the support section 20 supports the mirror section 10 at the first end 21 .
  • the connecting portion 73 is deflected by the piezoelectric element, the mirror portion 10 swings.
  • the first frame 71 may be fixed to the housing 80.
  • the first portion 20A and the second portion 20B each have a predetermined mass.
  • the light deflection device 1 can bring the center of gravity Q1 closer to the movable axis P when the mirror section 10 swings due to the mass of the second portion 20B.
  • the optical deflection device 1 can reduce the amount of deviation of the center of gravity Q1 from the movable axis P compared to the center of gravity Q' when the second portion 20B is not provided.
  • the optical deflection device 1 can reduce the load applied to the movable axis P when the mirror section 10 swings.
  • the optical deflection device 1 can alleviate various inconvenient factors, such as malfunction or damage in at least one of the support section 20, the first torsion bar 41, the second torsion bar 42, and the drive section 70, for example.
  • the light deflection device 1 can maintain detection accuracy at a high level for a long period of time by improving the durability of the light deflection device.
  • the optical deflection device 1 can prevent the first torsion bar 41 and/or the second torsion bar 42 interposed between the support section 20 and the drive section 70 can reduce the risk of deterioration.
  • the center of gravity Q1 may be closer to the movable axis P than the center of gravity Q'.
  • the mass of the second portion 20B may be the same as the mass of the first portion 20A.
  • the mass of the second portion 20B may be greater than the mass of the first portion 20A.
  • the mass of the second portion 20B may be smaller than the mass of the mirror portion 10 and the first portion 20A.
  • the mass of the second portion 20B may be the same as the mass of the mirror portion 10 and the first portion 20A.
  • the predetermined movable axis P may be an intangible virtual axis.
  • the predetermined movable axis P may be a physical entity such as the first torsion bar 41 and the second torsion bar 42, for example.
  • FIGS. 1 and 2 an example is shown in which the drive section 70 that drives the mirror section 10 is of a piezoelectric type.
  • the mirror unit 10 may be driven by any method such as piezoelectric, electrostatic, or electromagnetic.
  • the mirror portion may swing only about the Y-axis direction as the rotation axis, or may further swing about the X-axis direction as the rotation axis.
  • the optical deflection device 1 is shown as having only one mirror section 10 for the purpose of simplifying the explanation. However, the optical deflection device 1 may include two or more mirror parts 10 and two or more support parts 20. The optical deflection device 1 may include a mirror array including a plurality of mirror parts 10 and a support part 20.
  • FIG. 5 is a diagram illustrating a configuration example of an optical deflection device according to the second embodiment.
  • the optical deflection device 2 shown in FIG. 5 may have a configuration including the same parts as the optical deflection device 1 and/or the optical deflection device 1'.
  • explanations of contents that are the same or similar to those of the optical deflection device 1 and/or the optical deflection device 1' may be simplified or omitted as appropriate.
  • the optical deflection device 2 may include a weight portion 30 having a predetermined mass in the second portion 20B of the optical deflection device 1.
  • the light deflection device 2 may have a weight portion 30 having a predetermined mass supported by the second portion 20B of the light deflection device 1.
  • the weight portion 30 may be made of any material having a predetermined mass.
  • the weight portion 30 may have the same mass as the mirror portion 10, for example.
  • the mass of the weight portion 30 may be approximated to the mass of the mirror portion 10, for example.
  • the weight portion 30 may be spherical or hemispherical.
  • the weight portion 30 may have a shape including a cone or a pyramid with the apex facing away from the first end.
  • the weight part 30 has a spherical shape or a shape including a cone or a pyramid, even if the weight part 30 and the bottom of the casing 80 are close to each other and face each other, the weight part 30 will not move when the mirror part 10 swings. Contact with the bottom of the housing 80 is less likely to occur.
  • the optical deflection device 2 can bring the center of gravity of the system composed of the mirror section 10, the support section 20, and the weight section 30 closer to the movable axis P when the mirror section 10 swings.
  • the optical deflection device 2 can bring the center of gravity Q2 of the system constituted by the mirror section 10, the support section 20, and the weight section 30 closer to the movable axis P.
  • the second portion 20B can be made shorter than the first portion 20A.
  • the optical deflection device 2 can reduce the load applied to the movable axis P when the mirror section 10 swings.
  • the optical deflection device 2 can further alleviate various inconvenient factors, such as malfunctions or damage to the drive unit 70, for example.
  • the light deflection device 2 can further improve the durability of the light deflection device and maintain detection accuracy at a high level for a longer period of time.
  • the center of gravity Q2 may be closer to the predetermined movable axis P than the center of gravity Q'.
  • the center of gravity Q2 may be closer to the predetermined movable axis P than the center of gravity Q1.
  • the mass of the weight portion 30 may be, for example, between 50% and 100% of the mass of the mirror portion 10.
  • the mass of the weight portion 30 may be within a predetermined difference from the mass of the mirror portion 10 so as to be close to the mass of the mirror portion 10 to some extent.
  • the mass of the weight portion 30 may be equal to the mass of the mirror portion 10.
  • the mass of the weight portion 30 may be approximately equal to the mass of the mirror portion 10.
  • the mass of the support section 20 including the weight section 30 may be between 50% and 100% of the mass of the support section 20 including the mirror section 10.
  • the mass of the support section 20 including the weight section 30 may be within a predetermined difference from the mass of the support section 20 including the mirror section 10 so that the mass of the support section 20 including the weight section 30 is somewhat close to the support section 20 including the mirror section 10 .
  • the mass of the support section 20 including the weight section 30 may be equal to the mass of the support section 20 including the mirror section 10.
  • the mass of the support section 20 including the weight section 30 may be approximately equal to the mass of the support section 20 including the mirror section 10.
  • the mass of the second portion 20B including the weight portion 30 may be, for example, between 50% and 100% of the mass of the mirror portion 10 and the first portion 20A.
  • the mass of the second portion 20B including the weight portion 30 is set to be within a predetermined difference from the mass of the mirror portion 10 and the first portion 20A, so that it is somewhat close to the mirror portion 10 and the first portion 20A. Good too.
  • the mass of the second portion 20B including the weight portion 30 may be equal to the mass of the mirror portion 10 and the first portion 20A.
  • the mass of the second portion 20B including the weight portion 30 may be approximately equal to the mass of the mirror portion 10 and the first portion 20A.
  • the moment of force by the weight part 30 around the predetermined movable axis P may be within a predetermined difference from the moment of force by the mirror part 10 around the predetermined movable axis P.
  • the moment of force exerted by the weight portion 30 around the predetermined movable axis P may be equal to the moment of force exerted by the mirror portion 10 around the predetermined movable axis P.
  • FIG. 6 is a diagram illustrating a configuration example of an optical deflection device according to a third embodiment.
  • the optical deflection device 3 shown in FIG. 6 may have a configuration including the same parts as the optical deflection device 2 shown in FIG. 5. Regarding the optical deflection device 3, explanations of contents that are the same or similar to those of the optical deflection device 2 may be simplified or omitted as appropriate.
  • the weight portion 31 may be formed by forming the weight portion 30 of the optical deflection device 2 into the same or similar shape to the mirror portion 10.
  • the weight portion 31 may be made of any material having a predetermined mass.
  • the mass of the weight portion 31 may be, for example, the same as the mass of the mirror portion 10, or may be approximated.
  • the shape of the weight portion 31 may be the same as or similar to the shape of the mirror portion 10.
  • the weight portion 31 may have a shape that is curved so that the outer edge portion approaches the mirror portion 10. Since the weight portion 31 has a warped shape, even if the weight portion 31 and the bottom of the housing 80 are close to each other and face each other, when the mirror portion 10 swings, the weight portion 31 and the bottom of the housing 80 Contact with the person is less likely to occur. Therefore, the optical deflection device 2 can be downsized.
  • the optical deflection device 3 can bring the center of gravity Q3 of the system composed of the mirror section 10, the support section 20, and the weight section 31 closer to the movable axis P when the mirror section 10 swings.
  • the optical deflection device 3 can reduce the load applied to the movable axis P when the mirror section 10 swings.
  • the optical deflection device 3 can further alleviate various inconvenient factors, such as malfunction or damage to the drive unit 70, for example.
  • the optical deflection device 3 can maintain detection accuracy at a high level for a longer period of time, and can further improve the durability of the optical deflection device.
  • the center of gravity Q3 may be closer to the predetermined movable axis P than the center of gravity Q'.
  • the center of gravity Q3 may be closer to the predetermined movable axis P than the center of gravity Q1.
  • the center of gravity Q3 may be closer to the movable axis P than the center of gravity Q2.
  • FIG. 7 is a block diagram showing the functional configuration of a distance measuring device including the optical deflection devices 1 to 3 according to the first to third embodiments. A distance measuring device according to an embodiment will be described below.
  • a distance measuring device 5 includes any one of the optical deflection devices 1 to 3 described above.
  • the distance measuring device 5 includes a light emitting section 51 and a light receiving section 52.
  • the distance measuring device 5 may include a control circuit 60.
  • the light emitting unit 51 outputs electromagnetic waves such as infrared beams, for example. At least a portion of the electromagnetic waves output by the light emitting section 51 is deflected by one of the optical deflectors 1 to 3. At least a portion of a reflected wave, which is an electromagnetic wave deflected by one of the optical deflectors 1 to 3 and reflected by an object 100, enters the light receiving unit 52.
  • the control circuit 60 may control the drive of the drive section 70 described above.
  • the distance measuring device 5 may measure the distance to the object 100 based on the output timing of the electromagnetic wave outputted by the light emitting section 51 and the incident timing at which the reflected wave is incident on the light receiving section 52.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Electromagnetism (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)

Abstract

Le but de la présente divulgation est de fournir : un dispositif de déviation optique capable d'améliorer la durabilité ; et un dispositif de mesure de distance comprenant un tel dispositif de déviation optique.　Ce dispositif de déviation optique (1) comporte une partie miroir (10) et une partie support (20). La partie miroir (10) a une surface réfléchissante qui réfléchit la lumière. La partie miroir (10) oscille autour d'un arbre mobile prédéterminé (P). La partie support (20) a une première partie (20A) et une seconde partie (20B) avec l'arbre mobile entre celles-ci, et supporte la partie miroir (10) au moyen de la première partie (20A).
PCT/JP2023/008408 2022-03-18 2023-03-06 Dispositif de déviation optique et dispositif de mesure de distance WO2023176561A1 (fr)

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JP2022-044685 2022-03-18
JP2022044685 2022-03-18

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Citations (5)

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Publication number Priority date Publication date Assignee Title
JP2003075738A (ja) * 2001-08-31 2003-03-12 Hitachi Ltd 光スイッチ
US7414503B1 (en) * 2007-11-02 2008-08-19 Texas Instruments Incorporated Torsional hinged device with improved coupling between a magnet mounted to said device and an electrical coil
DE102013206531A1 (de) * 2013-04-12 2014-05-08 Carl Zeiss Smt Gmbh Vorrichtung zur Verlagerung eines Spiegelelements
JP2016110008A (ja) * 2014-12-10 2016-06-20 スタンレー電気株式会社 二軸光偏向器
JP2017010005A (ja) * 2015-06-22 2017-01-12 株式会社リコー 光偏向装置、画像形成装置、画像表示装置、物体装置、及び光偏向装置の調整方法

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003075738A (ja) * 2001-08-31 2003-03-12 Hitachi Ltd 光スイッチ
US7414503B1 (en) * 2007-11-02 2008-08-19 Texas Instruments Incorporated Torsional hinged device with improved coupling between a magnet mounted to said device and an electrical coil
DE102013206531A1 (de) * 2013-04-12 2014-05-08 Carl Zeiss Smt Gmbh Vorrichtung zur Verlagerung eines Spiegelelements
JP2016110008A (ja) * 2014-12-10 2016-06-20 スタンレー電気株式会社 二軸光偏向器
JP2017010005A (ja) * 2015-06-22 2017-01-12 株式会社リコー 光偏向装置、画像形成装置、画像表示装置、物体装置、及び光偏向装置の調整方法

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