WO2023153017A1 - 振動装置および撮像装置 - Google Patents

振動装置および撮像装置 Download PDF

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Publication number
WO2023153017A1
WO2023153017A1 PCT/JP2022/037211 JP2022037211W WO2023153017A1 WO 2023153017 A1 WO2023153017 A1 WO 2023153017A1 JP 2022037211 W JP2022037211 W JP 2022037211W WO 2023153017 A1 WO2023153017 A1 WO 2023153017A1
Authority
WO
WIPO (PCT)
Prior art keywords
vibrating
translucent
translucent body
metal
metal body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2022/037211
Other languages
English (en)
French (fr)
Japanese (ja)
Inventor
宣匡 北森
友基 石井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to CN202280091042.3A priority Critical patent/CN118679424A/zh
Priority to JP2023580070A priority patent/JP7666662B2/ja
Publication of WO2023153017A1 publication Critical patent/WO2023153017A1/ja
Priority to US18/760,868 priority patent/US20240351076A1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/0006—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 with means to keep optical surfaces clean, e.g. by preventing or removing dirt, stains, contamination, condensation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/02—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by distortion, beating, or vibration of the surface to be cleaned
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B15/00—Special procedures for taking photographs; Apparatus therefor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B17/00—Details of cameras or camera bodies; Accessories therefor
    • G03B17/02—Bodies
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B17/00—Details of cameras or camera bodies; Accessories therefor
    • G03B17/02—Bodies
    • G03B17/08—Waterproof bodies or housings
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B17/00—Details of cameras or camera bodies; Accessories therefor
    • G03B17/56—Accessories
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/50—Constructional details
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/50—Constructional details
    • H04N23/52—Elements optimising image sensor operation, e.g. for electromagnetic interference [EMI] protection or temperature control by heat transfer or cooling elements

Definitions

  • the present disclosure relates to a vibrating device and an imaging device.
  • a device that removes liquid droplets and the like that adhere to the translucent body that covers the imaging device.
  • Patent Literature 1 discloses a liquid droplet removal device that includes a drip-proof seal that prevents liquid droplets from entering the interior of the device.
  • an object of the present disclosure is to provide a vibrating device and an imaging device capable of suppressing infiltration of liquid droplets into the device and suppressing vibration damping.
  • a vibrating device includes: a translucent body; a vibrating body that supports the translucent body; a piezoelectric element arranged on the vibrating body to vibrate the vibrating body; a first metal body arranged in a compressed state between the translucent body and a member supporting the translucent body and having a Young's modulus smaller than that of the translucent body and the member supporting the translucent body; Prepare.
  • the imaging device according to the present disclosure is a vibration device according to the present disclosure; an imaging device arranged inside the vibrating device; Prepare.
  • the vibrating device According to the vibrating device according to the present disclosure, it is possible to suppress the infiltration of liquid droplets into the device and suppress vibration damping.
  • the imaging device it is possible to suppress the infiltration of liquid droplets into the device and to suppress vibration damping.
  • FIG. 1 is a perspective view of a vibrating device according to Embodiment 1 2 is an exploded perspective view showing each component of the vibrating device of FIG. 1;
  • FIG. 2 is a cross-sectional view showing an imaging device provided with the vibrating device of FIG. 1;
  • Sectional drawing which shows the example of a changed completely type of the vibration apparatus which concerns on Embodiment 1 Partial cross-sectional view showing a vibrating device according to Embodiment 2 Partial cross-sectional view showing a modified example of the vibrating device according to Embodiment 2 Partial cross-sectional view showing a modified example of the vibrating device according to Embodiment 2 Partial cross-sectional view showing a modified example of the vibrating device according to Embodiment 2 Partial cross-sectional view showing a modified example of the vibrating device according to Embodiment 2 Partial cross-sectional view showing a modified example of the vibrating device according to Embodiment 2 Partial cross-sectional view showing a modified example of the vibrating device according to Embodiment 2 Partial cross-sectional view showing a modified example of the vibr
  • Cameras used outdoors such as in-vehicle cameras, surveillance cameras, and cameras mounted on drones, are provided with a cover formed of glass, transparent plastic, or the like so as to cover the lens because it is exposed to the elements. If foreign matter such as mud or oil adheres to the cover, the foreign matter may appear in the image captured by the camera, blocking the field of view of the camera and making it impossible to obtain a clear image.
  • the drip-proof cover is flexurally vibrated to reduce the droplets adhering to the drip-proof cover.
  • a removal device is being considered.
  • the flange portion of the drip-proof cover and the piezoelectric body are fixed by adhesion, and a drip-proof seal formed in an annular shape over the entire circumference of the outer peripheral edge of the flange portion is in close contact. are arranged in a mating manner.
  • the drip-proof seal is made of a rubber material and has vibration-absorbing properties, so vibration loss occurs due to the drip-proof seal when transmitting the vibration of the piezoelectric body to the drip-proof cover. There is a problem.
  • the inventor found the configuration of the vibrating device and imaging device according to the present disclosure.
  • the vibration device of the first aspect of the present disclosure includes: a translucent body; a vibrating body that supports the translucent body; a piezoelectric element arranged on the vibrating body to vibrate the vibrating body; a first metal body arranged in a compressed state between the translucent body and a member supporting the translucent body and having a Young's modulus smaller than that of the translucent body and the member supporting the translucent body; Prepare.
  • the member supporting the translucent body includes the vibrating body;
  • the first metal body may be arranged between the translucent body and the vibrating body.
  • the translucent body has a first surface and a second surface opposite to the first surface
  • the vibrating body has a cylindrical main body, and a supporting part provided at one end of the main body and having a supporting surface for supporting the second surface of the translucent body
  • the first metal body may be arranged between the second surface of the translucent body and the supporting surface of the supporting part.
  • the translucent body has a first surface, a second surface opposite to the first surface, and a third surface connecting the first surface and the second surface
  • the vibrating body has a cylindrical main body, a support provided at one end of the main body, and ribs projecting from the support in a direction in which the translucent body is arranged, the rib has a rib inner peripheral surface facing the third surface of the translucent body;
  • the first metal body may be arranged between the third surface of the translucent body and the rib inner circumferential surface of the rib.
  • the vibrating device of the fifth aspect of the present disclosure may further include a pressing member attached to the vibrating body and pressing the translucent body toward the vibrating body.
  • the member that supports the translucent body includes the holding member,
  • the first metal body may be arranged between the translucent body and the pressing member.
  • the translucent body has a first surface and a second surface opposite to the first surface
  • the vibrating body has a cylindrical main body, and a supporting part provided at one end of the main body and having a supporting surface for supporting the second surface of the translucent body
  • the pressing member has a pressing surface that supports the first surface of the translucent body
  • the first metal body may be arranged between the first surface of the translucent body and the pressing surface of the pressing member.
  • the translucent body has a first surface, a second surface opposite to the first surface, and a third surface connecting the first surface and the second surface
  • the pressing member has a pressing surface that supports the first surface of the translucent body and an inner surface that faces the third surface of the translucent body
  • the first metal body may be arranged between the third surface of the translucent body and the inner side surface of the pressing member.
  • the first metal body may have an inclined surface on the side on which the third surface of the translucent body is arranged.
  • the vibrating device further includes a second metal body arranged in a compressed state between the vibrating body and the pressing member and having a Young's modulus smaller than that of the vibrating body and the pressing member.
  • an adhesive member is arranged between the translucent body and a member supporting the translucent body except for the portion where the first metal body is arranged.
  • the member supporting the translucent body includes a protrusion between the bonding member and the first metal body, which separates the bonding member and the first metal body. At least one of the portion or the recess may be provided.
  • the adhesive member may be an epoxy resin.
  • the first metal body may be a metal film provided on a portion of the vibrating body that supports the translucent body.
  • An imaging device includes the vibrating device according to any one of the first to fourteenth aspects of the present disclosure, and includes an imaging device arranged inside the vibrating device.
  • FIG. 1 is a perspective view of a vibration device according to a first embodiment
  • FIG. 2 is an exploded perspective view showing each component of the vibrating device of FIG. 1.
  • FIG. 3A is a cross-sectional view of the vibration device of FIG. 1;
  • FIG. 3B is a partial cross-sectional view enlarging the region R1 in FIG. 3A.
  • FIG. 4 is a cross-sectional view showing an imaging device including the vibrating device of FIG.
  • the vibrating device 2 includes a translucent body 10, a vibrating body 20, a metal body 30 and a piezoelectric element 40.
  • the vibrating device 2 transmits the vibration of the piezoelectric element 40 arranged on the vibrating body 20 to the translucent body 10 by the vibrating body 20 to vibrate the translucent body 10 .
  • This is a device that removes attached water droplets.
  • a metal body 30 is arranged in a compressed state to suppress intrusion of liquid droplets into the vibrating device 2 and to prevent the vibrating body from Vibration transmitted from 20 to transparent body 10 is suppressed from being absorbed.
  • the member that supports the translucent body 10 is the vibrating body 20 .
  • a conductor (not shown) for applying a potential to the piezoelectric element 40 is arranged in the vibrating device 2 .
  • the vibration device 2 is used, for example, in an imaging device.
  • the imaging device 1 includes a vibrating device 2 and an imaging section 3 .
  • the imaging unit 3 is arranged inside the vibrating device 2 .
  • the imaging unit 3 incorporates, for example, an optical element, an imaging element, sensor parts, and the like, and includes a case part that accommodates them.
  • the imaging unit 3 takes an image of an object to be imaged outside the vibration device 2 through the translucent body 10 of the vibration device 2 .
  • the translucent body 10 is a cover for preventing foreign matter from adhering to the lens of the imaging unit 3 when the imaging unit 3 is arranged inside the vibrating device 2, as shown in FIG.
  • the translucent body 10 has translucency through which energy rays or light having a wavelength detected by the imaging unit 3 is transmitted.
  • the translucent body 10 may be a lens having light condensing properties.
  • the translucent body 10 has a first surface 10a, a second surface 10b opposite to the first surface 10a, and a third surface connecting the first surface 10a and the second surface 10b. and a surface 10c.
  • the first surface 10a is, for example, a surface that is convexly curved from the inside of the translucent body 10 toward the outside. In this embodiment, the first surface 10a is rounded.
  • the second surface 10b has, for example, a flat outer peripheral portion that is continuous with the third surface 10c, and a central portion that is convexly curved from the outside to the inside of the translucent body 10 .
  • the second surface 10b is a concavely curved surface that is recessed in the thickness direction Z of the translucent body 10 .
  • the third surface 10c may be a plane extending in the thickness direction Z of the translucent body 10, or may be a surface having steps.
  • the translucent body 10 has a dome shape. Specifically, the translucent body 10 is formed in a circular shape when viewed from the thickness direction Z. As shown in FIG. 2,
  • the first surface 10a, the second surface 10b, and the third surface 10c of the translucent body 10 may be coated with an AR coating, a water-repellent coating, or an impact-resistant coating, if necessary.
  • the translucent body 10 is supported by the vibrating body 20.
  • the second surface 10b and the third surface 10c of the translucent body 10 are supported by the vibrating body 20.
  • the second surface 10b and the third surface 10c of the translucent body 10 are supported by the vibrating body 20.
  • the translucent body 10 for example, glass such as soda glass, borosilicate glass, aluminosilicate glass, or quartz glass, translucent plastic, translucent ceramics, synthetic resin, or the like can be used. .
  • the strength of the translucent body 10 can be increased by forming the translucent body 10 from, for example, tempered glass whose strength is improved by chemical strengthening or the like.
  • the vibrating body 20 is a member that supports the translucent body 10. As shown in FIG. The vibrating body 20 is arranged with the translucent body 10 on the side of the second surface 10b of the translucent body 10 .
  • the vibrating body 20 includes a tubular main body 21, a support 22 provided at one end 21a of the main body 21, and ribs 23 protruding from the support 22 in the direction in which the translucent body 10 is arranged. Furthermore, the vibrating body 20 includes a fixing portion 25 to which the body portion 21 is fixed.
  • the body portion 21 has one end 21a on the side where the translucent body 10 is arranged, and the other end 21b positioned opposite to the one end 21a.
  • the support portion 22 is a plate-like member provided at one end 21a of the main body portion 21. As shown in FIG. The support portion 22 is arranged continuously with one end 21 a of the body portion 21 . That is, the support portion 22 is formed integrally with the main body portion 21 .
  • the support portion 22 has, for example, an annular shape along one end 21a of the main body portion 21 when viewed in the thickness direction Z. As shown in FIG.
  • the support portion 22 has, for example, an annular shape when viewed from the thickness direction Z.
  • the support portion 22 is a flange protruding inward and outward of the main body portion 21 when viewed in the thickness direction Z. As shown in FIG. Note that the flange may protrude outward from the main body 21 without protruding inward, or may protrude inward from the main body 21 without protruding outward.
  • the support portion 22 has a support surface 22a that supports the second surface 10b of the translucent body 10.
  • the support surface 22a is, for example, a plane.
  • the ribs 23 protrude from the supporting portion 22 to the side on which the translucent body 10 is arranged.
  • the ribs 23 are arranged along the thickness direction Z.
  • the rib 23 has an annular shape along the third surface 10c of the translucent body 10 when viewed in the thickness direction Z.
  • the rib 23 has, for example, an annular shape when viewed from the thickness direction Z.
  • the rib 23 has a rib inner circumferential surface 23a facing the third surface 10c of the translucent body 10 .
  • the translucent body 10 is supported by the supporting portions 22 and the ribs 23 as shown in FIG. 3B.
  • the support surface 22 a of the support portion 22 supports the second surface 10 b of the transparent body 10
  • the rib inner circumferential surface 23 a of the rib 23 supports the third surface 10 c of the transparent body 10 .
  • the vibrating body 20 vibrates the translucent body 10 by receiving the vibration of the piezoelectric element 40, which will be described later.
  • the vibrating body 20 As the material of the vibrating body 20, ceramic, stainless steel, aluminum, iron, titanium, or metal such as duralumin can be used. In order to reduce the loss of vibration transmitted from the piezoelectric element 40 to the translucent body 10, it is desirable that the vibrating body 20 be made of a highly rigid material.
  • the metal body 30 is arranged in a compressed state between the translucent body 10 and a member supporting the translucent body 10 .
  • metal body 30 is arranged between translucent body 10 and vibrating body 20 . That is, the member supporting the translucent body 10 indicates the vibrating body 20 .
  • the metal body 30 is arranged while being compressed by the translucent body 10 and the vibrating body 20 .
  • the metal body 30 is arranged, for example, in a compressed state between the rib inner peripheral surface 23a of the rib 23 and the third surface 10c of the translucent body 10 .
  • the compressed state includes, for example, a state sandwiched between the translucent body 10 and the vibrating body 20 .
  • the compressed state means a state in which the metal body 30 is pressed between the translucent body 10 and the ribs 23 of the vibrating body 20 and deformed and crushed. Thereby, the metal body 30 is in close contact with the third surface 10c of the translucent body 10 and the rib inner peripheral surface 23a of the rib 23 . Thereby, the gap between the third surface 10c of the translucent body 10 and the rib inner peripheral surface 23a of the rib 23 is sealed.
  • the metal body 30 is an annular member when viewed from the thickness direction Z. As shown in FIG. 2, the metal body 30 is arranged along the entire circumference of the rib inner peripheral surface 23a and the entire circumference of the third surface 10c. The metal body 30 is, for example, an annular member when viewed from the thickness direction Z. As shown in FIG.
  • the distance between the inner circumference and the outer circumference of the metal body 30, that is, the thickness of the metal body 30 is, for example, 5 ⁇ m or more and 2 mm or less. Preferably, it is 10 ⁇ m or more and 1 mm or less.
  • the metal body 30 has a Young's modulus smaller than the Young's modulus of the transparent body 10 and the Young's modulus of the vibrating body 20 .
  • the Young's modulus of the metal body 30 is, for example, 30 MPa or more and 170 MPa or less. Moreover, the Young's modulus of the metal body 30 is preferably 50 MPa or more and 150 MPa or less.
  • the material of the metal body 30 is, for example, copper (Young's modulus 123 MPa).
  • piezoelectric element 40 is fixed to vibrating body 20 .
  • the piezoelectric element 40 is adhered and fixed to the vibrating body 20 with an adhesive, for example.
  • the piezoelectric element 40 vibrates, for example, when a voltage is applied.
  • the piezoelectric element 40 is arranged apart from the support portion 22 of the vibrating body 20, but the piezoelectric element 40 may be arranged on the support portion 22. Specifically, the piezoelectric element 40 may be arranged, for example, on the surface 22b of the support portion 22 opposite to the support surface 22a.
  • the piezoelectric element 40 has an annular plate-like shape when viewed from the thickness direction Z.
  • the shape of the piezoelectric element 40 is not limited to an annular plate shape, and may be any shape that allows the vibrating body 20 to vibrate.
  • Materials for forming the piezoelectric element 40 include, for example, barium titanate (BaTiO 3 ), lead titanate/zirconate (PZT: PbTiO 3 .PbZrO 3 ), lead titanate (PbTiO 3 ), lead metaniobate (PbNb 2 ) . O 6 ), bismuth titanate (Bi 4 Ti 3 O 12 ), (K, Na)NbO 3 , or other suitable piezoelectric ceramics, or LiTaO 3 , LiNbO 3 , or other suitable piezoelectric single crystals.
  • a conductor is arranged on the piezoelectric element 40 in order to apply a voltage to the piezoelectric element 40 .
  • the conductor is arranged by vapor deposition on the surface of the piezoelectric element 40, for example.
  • a conductor material for example, a highly conductive metal such as stainless steel, silver, or copper can be used.
  • the conductor may be wiring formed on a flexible printed circuit board (FPC).
  • the FPC may be a polyimide substrate with copper foil wiring formed thereon. When the conductor is FPC, the conductor has flexibility, so voltage can be applied to the piezoelectric element 40 without impeding vibration.
  • the metal body 30 having a Young's modulus smaller than that of the transparent body 10 and the Young's modulus of the vibrating body 20 that supports the transparent body 10 is connected to the transparent body 10. It is compressed between the vibrating body 20 and arranged.
  • the metal body 30 can be arranged to seal between the transparent body 10 and the vibrating body 20 without damaging the transparent body 10 and the vibrating body 20 , so that droplets do not flow into the vibrating device 2 . Intrusion is suppressed.
  • the vibrating device 2 having the configuration as described above can reduce the vibration of the translucent body 10 through the vibrating body 20 as compared with the case where a drip-proof seal such as silicon is arranged between the translucent body and the vibrating body. Absorption of the vibration transmitted to the metal body 30 can be suppressed. As a result, vibration damping can be suppressed.
  • the translucent body 10 and the supporting member are prevented from being deformed or damaged, and the durability of the vibrating device 2 can be improved.
  • the metal body 30 may be arranged in a compressed state between the support surface 22a of the support portion 22 and the second surface 10b of the transparent body 10, as shown in FIG. 5A.
  • the metal body 30 is located between the rib inner peripheral surface 23a of the rib 23 and the third surface 10c of the transparent body 10, and between the support surface 22a of the support portion 22 and the third surface 10c of the transparent body 10. It may be arranged in a compressed state between the two surfaces 10b.
  • the portion arranged between the rib inner peripheral surface 23a and the third surface 10c and the portion arranged between the support surface 22a and the second surface 10b may be continuous. However, it may be composed of a separate member.
  • the metal body 30 may be a metal film provided on a portion that supports the translucent body. That is, the metal body 30 may be a metal film provided between the rib inner peripheral surface 23a of the rib 23 of the vibrating body 20 and the third surface 10c of the translucent body 10 .
  • the metal film is provided, for example, by sputtering on the portion that supports the translucent body 10 .
  • the metal body 30 is located between the support surface 22a of the support portion 22 and the second surface 10b of the transparent body 10, and the rib inner peripheral surface of the rib 23.
  • the metal body 30 may be a metal film provided on the support surface 22a and the rib inner circumferential surface 23a.
  • the metal body 30 and the vibrating body 20 can be prepared as one member, so the material cost and assembly processing cost can be reduced, and the manufacturing cost can be suppressed. Also, with such a configuration, it is possible to improve the adhesion between the member supporting the translucent body 10 and the metal body 30 . As a result, vibration damping can be suppressed.
  • the metal body 30 is arranged between the rib inner circumferential surface 23a of the rib 23 and the third surface 10c of the translucent body 10, while the support surface 22a of the support portion 22 and the translucent body 30 are arranged between the rib inner peripheral surface 23a and the translucent body 10.
  • the second surface 10b of the body 10 does not have to be arranged between the second surface 10b of the body 10 and the second surface 10b. Since the translucent body 10 is supported by the ribs 23 via the metal bodies 30 , the second surface 10 b of the translucent body 10 does not have to be supported by the support surface 22 a of the support portion 22 . That is, the second surface 10b of the translucent body 10 and the supporting surface 22a of the supporting portion 22 may be separated from each other.
  • an adhesive member 70 may be arranged between the translucent body 10 and the vibrating body 20 except for the portion where the metal body 30 is arranged. Specifically, the metal body 30 is arranged between the rib inner peripheral surface 23a of the rib 23 and the third surface 10c of the transparent body 10, and the support surface 22a of the support portion 22 and the second surface of the transparent body 10 are arranged. 10b, an adhesive member 70 may be arranged.
  • the adhesive member 70 is, for example, epoxy resin, acrylic resin, or the like.
  • the adhesive member 70 By arranging the adhesive member 70 in this manner, the adhesion between the translucent body 10 and the vibrating body 120 is improved. As a result, the vibration transmissibility from the vibrating body 20 to the translucent body 10 is improved, and the vibration efficiency of the vibrating device can be improved.
  • the adhesive member 70 As described above, it is possible to suppress vibration damping, suppress penetration of liquid droplets into the vibrating device, and further prevent the translucent body 10 from separating from the vibrating body 20. .
  • the metal body 30 may be provided with an inclined surface 30a on the inner peripheral side. This makes it easier to fit the translucent body 10 into the ribs 23 of the vibrating body 20 .
  • the vibrating device 102 according to the second embodiment is attached to the vibrating body 120 and further includes a pressing member 50 that presses the translucent body 10 toward the vibrating body 120. It is different from the vibrating device 2 according to 1. Further, the vibrating device 102 according to the second embodiment differs from the vibrating device 2 according to the first embodiment in that the vibrating body 120 does not have ribs.
  • the vibrating body 120 includes a body portion 121 and a support portion 122 protruding inward from the body portion 121, as shown in FIG.
  • the body part 121 has a cylindrical shape.
  • the body portion 121 has one end 121a on the side where the translucent body 10 is arranged, and an outer surface 121d.
  • a first threaded portion 24 is provided on the outer surface 121d.
  • the first threaded portion 24 is connected to a second threaded portion 53 of the pressing member 50, which will be described later.
  • the first threaded portion 24 is, for example, a female thread.
  • the support part 122 is a plate-like member that extends continuously from one end 121a of the main body part 121 and protrudes inward from the one end 121a of the main body part 121 .
  • the support portion 122 is, for example, a flange, like the support portion 122 of the vibrating body 120 in the first embodiment.
  • the support portion 122 has, for example, an annular shape when viewed from the thickness direction Z. As shown in FIG.
  • the support portion 122 has a support surface 122a on the side on which the translucent body 10 is arranged.
  • the pressing member 50 is a member that supports the translucent body 10 .
  • the pressing member 50 presses and supports the translucent body 10 from the first surface 10 a side of the translucent body 10 toward the vibrating body 120 .
  • the pressing member 50 includes a cylindrical side wall 52 and a pressing portion 51 projecting inside the side wall 52 .
  • the sidewall 52 surrounds the third surface 10c of the translucent body 10.
  • the side wall 52 has an inner side surface 52a facing the third surface 10c of the translucent body 10 .
  • the side wall 52 has an annular shape along the third surface 10c when viewed from the thickness direction Z. As shown in FIG.
  • the side wall 52 has, for example, an annular shape when viewed from the thickness direction Z. As shown in FIG.
  • the side wall 52 is fixed to the vibrating body 120 . Specifically, the inner side surface 52 a of the side wall 52 is fixed to the outer surface 121 d of the vibrating body 120 .
  • a second threaded portion 53 is provided on the inner side surface 52a.
  • the second threaded portion 53 connects with the first threaded portion 24 formed on the vibrating body 120 . That is, the pressing member 50 is fixed to the vibrating body 120 by the connection of the first threaded portion 24 and the second threaded portion 53 .
  • the second threaded portion 53 is, for example, a male thread, and the second threaded portion 53 is screwed with the first threaded portion 24, which is a female thread.
  • the pressing portion 51 extends from the side wall 52 to the inside of the side wall 52 .
  • the pressing portion 51 is located on the side of the first surface 10 a of the transparent body 10 and has a pressing surface 51 a that presses the first surface 10 a of the transparent body 10 .
  • the pressing portion 51 has, for example, an annular shape that matches the shape of the first surface 10a of the translucent body 10 when viewed from the thickness direction Z. As shown in FIG.
  • the pressing portion 51 has, for example, an annular shape when viewed from the thickness direction Z. As shown in FIG.
  • the material of the pressing member 50 ceramic, stainless steel, aluminum, iron, titanium, or metal such as duralumin can be used.
  • the surface of the pressing member 50 may be subjected to oxidation treatment or alumite treatment in the same manner as the vibrating body 120 .
  • the metal body 30 is arranged in a compressed state between the supporting surface 122a of the supporting portion 122 and the second surface 10b of the translucent body 10 .
  • the compressed state includes, for example, a state sandwiched between the translucent body 10 and a member supporting the translucent body 10, that is, the vibrating body 120.
  • the compressed state includes a state in which the second surface 10b of the translucent body 10 and the supporting surface 122a of the supporting portion 122 are in close contact with each other.
  • the metal body 30 is formed by the support surface 122 a of the support portion 122 and the second surface 10 b of the translucent body 10 . is compressed between
  • the vibrating device 102 configured as described above can support the translucent body 10 with the pressing member 50 and the vibrating body 120 .
  • the metal body 30 can be maintained in a compressed state, and damping of vibration transmitted from the vibrating body 120 to the translucent body 10 via the metal body 30 can be suppressed.
  • the vibrating device 102 having the configuration as described above is arranged in a state where the metal body 30 is compressed between the translucent body 10 and the vibrating body 120 by the pressing member 50 and the vibrating body 120 .
  • the space between the translucent body 10 and the vibrating body 120 is sealed, and droplets are prevented from entering the vibrating device 102 .
  • the translucent body 10 is prevented from peeling off or falling off from the vibrating body 120, and the durability of the vibrating device 102 can be improved.
  • the pressing member 50 presses the translucent body 10 by screwing the second threaded portion 53 with the first threaded portion 24 of the vibrating body 120, but FIG. 7A , the pressing member 150 may be, for example, a leaf spring.
  • the pressing member 150 is a leaf spring composed of a pressing portion 151 and a side wall 152, and the pressing portion 151 may press the first surface 10a of the translucent body 10 by the restoring force of the leaf spring.
  • the transparent body 10 is pressed by the restoring force of the leaf spring, and the metal body 30 is compressed.
  • the side wall 152 of the pressing member 150 presses the outer surface 121 d of the body portion 121 of the vibrating body 120 due to the restoring force of the plate spring, and the pressing member 150 is fixed to the vibrating body 120 .
  • the pressing member 150 can be easily fixed to the vibrating body 120, and the translucent body 10 can be prevented from being peeled off or detached from the vibrating body 120. As a result, vibration damping can be suppressed.
  • the adhesive member is arranged between the translucent body 10 and the member supporting the translucent body 10 except for the portion where the metal body 30 is arranged.
  • an adhesive member 70 may be arranged between the pressing surface 151a of the pressing member 150 and the first surface 10a of the translucent body 10 .
  • the adhesive member 70 is arranged, for example, over the entire circumference of the first surface 10a of the translucent body 10 .
  • the adhesive member 70 By arranging the adhesive member 70 in this manner, the adhesion between the translucent body 10 and the vibrating body 120 is improved. As a result, the vibration transmissibility from the vibrating body 120 to the transparent body 10 is improved, and the vibration efficiency of the vibrating device 102 can be improved.
  • the adhesive member 70 as described above, it is possible to suppress vibration damping, suppress penetration of droplets into the vibrating device 102, and further prevent the translucent body 10 from separating from the vibrating body 120. can be prevented.
  • an adhesive member 70 may be arranged between the inner surface 152a of the side wall 152 of the pressing member 150 and the third surface 10c of the translucent body 10. As shown in FIG. The adhesive member 70 is arranged, for example, over the entire circumference of the third surface 10c of the translucent body 10 .
  • the translucent body 10 may have a flat plate shape in which the first surface 10a and the second surface 10b are flat.
  • the translucent body 10 has, for example, a disk shape when viewed from the thickness direction Z. As shown in FIG. 7C, the translucent body 10 may have a flat plate shape in which the first surface 10a and the second surface 10b are flat.
  • the translucent body 10 has, for example, a disk shape when viewed from the thickness direction Z. As shown in FIG.
  • the adhesive member 70 By arranging the adhesive member 70 in this manner, the adhesion between the translucent body 10 and the vibrating body 120 is improved. As a result, the vibration transmissibility from the vibrating body 120 to the translucent body 10 is improved, and the vibration efficiency of the vibrating device can be improved.
  • the adhesive member 70 as described above, it is possible to suppress vibration damping, suppress penetration of droplets into the vibrating device 102, and further prevent the translucent body 10 from separating from the vibrating body 120. can be prevented.
  • the member supporting the translucent body 10 is provided with at least one of the convex portion 81 and the concave portion 80 separating the adhesive member 70 and the metal body 30 between the adhesive member 70 and the metal body 30 .
  • the recess 80 is provided on the support surface 122a of the support portion 122.
  • the concave portion 80 is provided, for example, in an annular shape.
  • the concave portion 80 is provided, for example, in an annular shape according to the shape of the translucent body 10 .
  • the metal body 30 is arranged inside the recess 80 on the support surface 122a.
  • the adhesive member 70 when the adhesive member 70 is arranged with a wider application range due to the wettability and the pressure of the pressing member 150 , the adhesive member 70 is prevented from flowing into the concave portion 80 and coming into contact with the metal body 30 . be. That is, the adhesive member 70 is prevented from flowing between the metal body 30 and the translucent body 10 and/or between the metal body 30 and the vibrating body 120 . As a result, the metal body 30 maintains the liquid droplet penetration suppression function and the vibration absorption suppression function, thereby suppressing the penetration of liquid droplets into the device and suppressing the vibration damping. Moreover, the vibration efficiency of the vibration device 102 can be maintained.
  • the convex portion 81 may be provided on the support surface 122a of the support portion 122. As shown in FIG. The convex portion 81 is provided, for example, in an annular shape. The convex portion 81 is provided, for example, in an annular shape according to the shape of the translucent body 10 .
  • the convex portion 81 is arranged at a position not overlapping the translucent body 10 when viewed from the thickness direction Z.
  • the convex portion 81 is arranged along the third surface 10c of the translucent body 10, for example.
  • the metal body 30 is arranged inside the projection 81 on the support surface 122a.
  • Both the concave portion 80 and the convex portion 81 may be provided on the support surface 122a.
  • the adhesive member 70 when the adhesive member 70 is arranged to extend beyond the application range due to the wettability or the pressure of the pressing member 150 , the adhesive member 70 is blocked by the protrusions 81 and is prevented from coming into contact with the metal body 30 . Suppressed. That is, the adhesive member 70 is prevented from flowing between the metal body 30 and the transparent body 10 and/or between the metal body 30 and the vibrating body 120 . As a result, the metal body 30 maintains the liquid droplet penetration suppression function and the vibration absorption suppression function, thereby suppressing the penetration of liquid droplets into the device and suppressing the vibration damping.
  • the convex portion 81 may be provided on the pressing member 150 as shown in FIG. 7F.
  • the convex portion 81 may be provided on the pressing surface 151 a of the pressing portion 151 of the pressing member 150 .
  • the convex portion 81 is arranged at a position not overlapping the translucent body 10 when viewed from the thickness direction Z.
  • the convex portion 81 is, for example, annularly provided along the third surface 10c of the translucent body 10 .
  • the adhesive member 70 is applied to, for example, a portion of the pressing surface 151a that is closer to the one end 150a than the convex portion 81 is arranged.
  • the adhesive member 70 when the adhesive member 70 is arranged to extend beyond the application range due to the wettability or the pressure of the pressing member 150 , the adhesive member 70 is blocked by the protrusions 81 and is prevented from coming into contact with the metal body 30 . Suppressed. That is, the adhesive member 70 is prevented from flowing between the metal body 30 and the transparent body 10 and/or between the metal body 30 and the vibrating body 120 . As a result, the metal body 30 maintains the liquid droplet penetration suppression function and the vibration absorption suppression function, thereby suppressing the penetration of liquid droplets into the device and suppressing the vibration damping.
  • a recess 80 may be provided on the pressing surface 151a. Both the concave portion 80 and the convex portion 81 may be provided on the pressing surface 151a. Further, both the support surface 122a of the support portion 122 of the vibrating body 120 and the pressing surface 151a of the pressing portion 151 of the pressing member 150 may be provided with the concave portion 80 and/or the convex portion 81.
  • the metal body 30 is a metal film provided in the portion of the vibrating body 120 that supports the translucent body 10. There may be. The details are described in Modification 3 of Embodiment 1, so the description is omitted.
  • a vibrating device 202 differs from the second embodiment in that it includes a metal body 60 different from the metal body 30 between the pressing member 150 and the vibrating body 120 . It differs from the vibration device 102 .
  • the metal body 30 described in Embodiments 1 and 2 will be referred to as a first metal body 30, and another metal body different from the metal body 30 arranged between the pressing member and the vibrating body. 60 is called a second metal body 60 .
  • the second metal body 60 is arranged in a compressed state between the inner side surface 152a of the side wall 152 of the pressing member 150 and the outer surface 121d of the body portion 121 of the vibrating body 120 .
  • the compressed state includes, for example, a state sandwiched between the side wall 152 of the pressing member 150 and the vibrating body 120 .
  • the compressed state means a state in which the metal body 30 is pressed between the side wall 152 of the pressing member 150 and the vibrating body 120 and deformed and crushed. Thereby, the metal body 30 is in contact with the side wall 152 of the pressing member 150 and the vibrating body 120 without gaps.
  • the second metal body 60 has a tubular shape, and is annular when viewed from the thickness direction Z, for example.
  • the second metal body 60 has, for example, an annular shape when viewed from the thickness direction Z.
  • the distance between the inner circumference and the outer circumference of the second metal body 60, that is, the thickness of the second metal body 60 is, for example, 5 ⁇ m or more and 2 mm or less. Preferably, it is 10 ⁇ m or more and 1 mm or less.
  • the second metal body 60 is a metal body having a Young's modulus smaller than the Young's modulus of the pressing member 150 and smaller than the Young's modulus of the vibrating body 120 .
  • the Young's modulus of the second metal body 60 is, for example, 30 MPa or more and 170 MPa or less. Moreover, it is 50 MPa or more and 150 MPa or less, for example.
  • the material of the second metal body 60 is, for example, copper (Young's modulus 123 MPa).
  • the first metal body 30 and the second metal body 60 can prevent droplets from entering the vibrating body 120 .
  • the translucent body 10 is prevented from peeling off from the vibrating body 120 or falling off, and the durability of the vibrating device 202 can be improved.
  • the second metal body 60 can be arranged between the pressing member 150 and the vibrating body 120 regardless of the connection form between the pressing member 150 and the vibrating body 120 . That is, even if the pressing member 150 and the vibrating body 120 are connected by the screw mechanism as described above, or are connected by the restoring force of the plate spring of the pressing member 150, the second metal body 60 is connected to the pressing member 150. and the vibrating body 120 .
  • vibrating body 220 may include body portion 221, support portion 222, and rib 223 as described in Embodiment 1. good.
  • the body part 221 has a cylindrical shape.
  • the body portion 221 has one end 221a on the side where the translucent body 10 is arranged.
  • the support portion 222 is a plate-shaped member that is continuous with one end 221a of the main body portion 221 and protrudes inward from the one end 221a of the main body portion 221 .
  • the support portion 222 is, for example, a flange, like the support portion 22 of the vibrating body 20 in the first embodiment.
  • the support portion 222 has, for example, an annular shape when viewed from the thickness direction Z. As shown in FIG.
  • the support portion 222 has a support surface 222a on the side on which the translucent body 10 is arranged.
  • the ribs 223 protrude from the supporting portion 222 to the side on which the translucent body 10 is arranged.
  • the ribs 223 are arranged along the thickness direction Z.
  • the rib 223 has an annular shape along the third surface 10c of the translucent body 10 when viewed in the thickness direction Z.
  • the rib 223 has an annular shape when viewed from the thickness direction Z, for example.
  • the rib 223 has a rib inner peripheral surface 223a facing the third surface 10c of the translucent body 10 and a rib outer peripheral surface 223b located opposite to the rib inner peripheral surface 223a.
  • the second metal body 60 is arranged, for example, between the rib 23 of the vibrating body 220 and the pressing member 150, as shown in FIG. Specifically, the second metal body 60 is arranged between the rib outer peripheral surface 223 b of the rib 23 of the vibrating body 220 and the inner surface 152 a of the side wall 152 of the pressing member 150 .
  • the translucent body 10 is fixed by two members, the pressing member 150 and the vibrating body 220 . This can prevent the translucent body 10 from separating from the vibrating body 220 . As a result, damping of vibration can be suppressed.
  • Embodiment 4 A vibration device according to Embodiment 4 of the present disclosure will be described. Note that in the fourth embodiment, differences from the second embodiment will be mainly described. In the fourth embodiment, the same reference numerals are assigned to the same or equivalent configurations as in the second embodiment. Further, in the fourth embodiment, the description overlapping with that in the second embodiment is omitted.
  • a vibrating device 302 according to the fourth embodiment differs from the second embodiment in that the first metal body 30 is compressed between the holding member 150 and the translucent body 10 as shown in FIG. It differs from the vibrating device 102 concerned.
  • FIG. 10 shows a vibrating device in which the holding member is a plate spring, the holding member may have the first screw portion 24 described in the second embodiment. In this case, the vibrating body also has a second threaded portion 53 .
  • the first metal body 30 is arranged, for example, compressed between the pressing surface 151 a of the pressing member 150 and the first surface 10 a of the translucent body 10 .
  • the vibrating device 302 according to the fourth embodiment also includes the bonding member 70, the convex portion 81 separating the bonding member 70 and the first metal body 30, and the second metal body 60. may be
  • the adhesive member 70 is arranged between the translucent body 10 and a member supporting the translucent body 10 except for the portion where the first metal body 30 is arranged.
  • the members that support the translucent body 10 are the vibrating body 120 and the pressing member 150 .
  • the adhesive member 70 is arranged between the second surface 10b of the transparent body 10 and the support surface 122a of the support portion 122, and between the third surface 10c of the transparent body 10 and the side wall 152 of the pressing member 150.
  • the convex portion 81 is provided on the pressing surface 151a of the pressing portion 151 of the pressing member 150, for example.
  • the details of the convex portion 81 have been described in Modification 6 of Embodiment 2, so the description thereof is omitted.
  • the convex portion 81 may be provided on the support surface 122 a of the support portion 122 of the vibrating body 120 .
  • the second metal body 60 is arranged in a compressed state between the vibrating body 120 and the pressing member 150 . Since the details of the second metal body 60 have been described in the third embodiment, the description thereof is omitted.
  • the adhesive member 70 By arranging the adhesive member 70 in this manner, the adhesion between the translucent body 10 and the vibrating body 120 is improved. As a result, the vibration transmissibility from the vibrating body 120 to the transparent body 10 is improved, and the vibration efficiency of the vibrating device 302 can be improved.
  • the adhesive member 70 as described above, it is possible to suppress vibration damping, suppress penetration of liquid droplets into the vibrating device 302, and prevent the translucent body 10 from separating from the vibrating body 120. can be prevented.
  • the adhesive member 70 when the adhesive member 70 is arranged to extend beyond the application range due to wettability or pressure from the pressing member 150 , the adhesive member 70 is blocked by the convex portion 81 and the first metal body 30 contact with is suppressed. That is, the adhesive member 70 is prevented from flowing between the first metal body 30 and the translucent body 10 and/or between the first metal body 30 and the vibrating body 120 . As a result, the liquid droplet penetration suppression function and the vibration absorption suppression function of the first metal body 30 are maintained, and the penetration of liquid droplets into the apparatus can be suppressed, and vibration damping can be suppressed.
  • the first metal body 30 and the second metal body 60 can prevent droplets from entering the vibrating body 120 .
  • the vibrating body may include the ribs 223 as described in the modified example of the third embodiment.
  • the details are described in the modified example of the third embodiment, so the description is omitted.
  • the translucent body 10 is fixed by two members, the pressing member 150 and the vibrating body 220 . This can prevent the translucent body 10 from separating from the vibrating body 220 . As a result, vibration damping can be suppressed.
  • Embodiment 5 A vibration device according to a fifth embodiment of the present disclosure will be described. In addition, in Embodiment 5, mainly different points from Embodiment 4 will be described. In the fifth embodiment, the same reference numerals are given to the same or equivalent configurations as in the fourth embodiment. Further, in the fifth embodiment, the description overlapping with that of the fourth embodiment is omitted.
  • the metal body 30 is arranged, for example, compressed between the inner side surface 152a of the side wall 152 of the pressing member 150 and the third surface 10c of the translucent body 10.
  • the metal body 30 having a thickness larger than the dimension in the thickness direction Z of the third surface 10c between the inner surface 152a of the side wall 152 and the third surface 10c of the translucent body 10, the metal The body 30 is compressed by the pressing member 150 and the translucent body 10 .
  • the translucent body 10 may have a flat plate shape in which the first surface 10a and the second surface 10b are flat.
  • the translucent body 10 has, for example, a disk shape when viewed from the thickness direction Z. As shown in FIG.
  • the vibrating device 402 configured in this way, it is possible to suppress the infiltration of liquid droplets into the vibrating device 402 and to suppress vibration damping.
  • the metal body 30 may have an inclined surface 31 on the side facing the third surface 10c.
  • the translucent body 10 contacts the inclined surface 31 and compresses the metal body 30 .
  • the compressed metal body 30 contacts the second surface 10b and the third surface 10c of the translucent body 10 . This makes it easier to bring the translucent body 10 and the metal body 30 into close contact with each other, making it easier to eliminate the gap between the translucent body 10 and the metal body 30 . As a result, it is possible to suppress the infiltration of liquid droplets into the vibrating device 502 and further suppress vibration damping.
  • Vibrating device 602 according to Embodiment 6 has, as shown in FIG. It is different from the vibrating device of the fourth embodiment in that Further, the vibrating device 602 according to the sixth embodiment differs from the vibrating device according to the fourth embodiment in that a convex portion 81 is provided to separate the metal body 30 and the adhesive member 70 from each other.
  • the adhesive member 70 is arranged between the translucent body 10 and a member supporting the translucent body 10 except for the portion where the metal body 30 is arranged.
  • the members that support the translucent body 10 are the vibrating body 120 and the pressing member 150 .
  • the adhesive member 70 is arranged between the supporting surface 122a of the supporting portion 122 of the vibrating body 120 and the second surface 10b of the translucent body 10 .
  • the details of the bonding member 70 have been described in the modification 2 of the second embodiment, so the description is omitted.
  • the convex portion 81 is provided on the support surface 122a of the support portion 122 of the vibrating body 120, for example.
  • the details of the convex portion 81 have been described in Modification 6 of Embodiment 2, so the description thereof is omitted.
  • the support surface 122a of the support portion 122 of the vibrating body 120 may be provided with a recess that separates the bonding member 70 and the first metal body 30 from each other.
  • the adhesive member 70 By arranging the adhesive member 70 as described above, the adhesion between the translucent body 10 and the vibrating body 120 is improved. As a result, the vibration transmissibility from the vibrating body 120 to the transparent body 10 is improved, and the vibration efficiency of the vibrating device 602 can be improved.
  • the adhesive member 70 when the adhesive member 70 is arranged wider than the application range due to the wettability or the pressure of the pressing member 150 , the adhesive member 70 is blocked by the convex portion 81 and comes into contact with the metal body 30 . is suppressed. That is, the adhesive member 70 is prevented from flowing between the first metal body 30 and the transparent body 10 and/or between the metal body 30 and the pressing member 150 . As a result, the liquid droplet penetration suppression function and the vibration absorption suppression function of the first metal body 30 are maintained, and the penetration of liquid droplets into the apparatus can be suppressed, and vibration damping can be suppressed.
  • the convex portion 81 may be provided on the pressing member 150 as shown in FIG. 15 .
  • the convex portion 81 may be provided on the pressing surface 151 a of the pressing portion 151 of the pressing member 150 .
  • the details are described in Modification 6 of Embodiment 2, so the description is omitted.
  • the adhesive member 70 when the adhesive member 70 is arranged to extend beyond the application range due to wettability or pressure from the pressing member 150 , the adhesive member 70 is blocked by the convex portion 81 and comes into contact with the first metal body 30 . is suppressed. That is, the adhesive member 70 is prevented from flowing between the metal body 30 and the transparent body 10 and/or between the metal body 30 and the pressing member 150 . As a result, the metal body 30 maintains the liquid droplet penetration suppression function and the vibration absorption suppression function, thereby suppressing the penetration of liquid droplets into the device and suppressing the vibration damping.
  • Embodiment 7 A vibration device according to Embodiment 7 of the present disclosure will be described. In addition, in Embodiment 7, mainly different points from Embodiment 2 will be described. In Embodiment 7, the same or equivalent configurations as those in Embodiment 2 are assigned the same reference numerals. Moreover, in Embodiment 7, the description overlapping with Embodiment 2 is omitted.
  • Vibrating device 702 according to Embodiment 7 has, as shown in FIG. It is different from the vibrating device 102 according to the second embodiment in that it is arranged in a compressed state.
  • the first metal body 30, which is compressed and arranged between the pressing member 150 and the transparent body 10, is arranged along the entire circumference of the transparent body 10, for example.
  • the second metal body 60 may be arranged in a compressed state between the vibrating body 120 and the pressing member 150 . Since the details of the second metal body 60 have been described in the third embodiment, the description thereof is omitted.
  • the first metal body 30 is compressed and arranged at two locations between the transparent body 10 and the pressing member 150 and between the transparent body 10 and the vibrating body 120 .
  • the vibrating body 120 may include the ribs 223 .
  • the details are described in the modified example of the third embodiment, so the description is omitted.
  • adhesive member 70 may be arranged between translucent body 10 and a member that supports translucent body 10 .
  • the details are described in Modification 3 of Embodiment 2, so the description is omitted.
  • the concave portion 80 and/or the convex portion 81 separating the adhesive member 70 and the first metal body 30 may be provided in the member supporting the translucent body 10. .
  • the details are described in Modification 4 to Modification 6 of Embodiment 2, so description thereof will be omitted.
  • Example 1 In Example 1, a simulation was performed to calculate the amount of displacement of the translucent body 10 in the vibration device according to Modification 4 of Embodiment 1.
  • FIG. The simulation was performed with Femtet (Murata Software Co., Ltd.).
  • the voltage applied to the piezoelectric element was 60 Vpp.
  • the space between the support surface of the support portion of the vibrating body and the second surface of the transparent body is also called an ⁇ layer
  • the space between the rib inner peripheral surface of the rib of the vibrating body and the third surface of the transparent body is called ⁇ Also called a layer.
  • the displacement amount is the amount of displacement between the phase 0° and the phase 180° in vibration in the thickness direction Z of the translucent body 10, as shown in FIGS. 17D and 17E.
  • the solid line indicates the state where the vibrating device does not vibrate
  • the dashed line indicates the state where the vibrating device vibrates.
  • the layer thickness of the ⁇ layer means the distance between the supporting surface of the supporting portion of the vibrating body and the second surface of the translucent body
  • the layer thickness of the ⁇ layer means the distance between the vibrating body and the second surface of the transparent body. It means the distance between the rib inner circumferential surface of the rib and the third surface of the translucent body.
  • Table 1 below shows the physical property values of the translucent body, the vibrating body, and the first metal body used in Example 1.
  • Example 1 the layer thickness of the ⁇ layer was set to 50 ⁇ m, and the layer thickness of the ⁇ layer was set to 50 ⁇ m.
  • Comparative Example 1 was the same as Example 1 except that a resin packing was arranged in the ⁇ layer.
  • the physical property values of the resin packing are shown in Table 2 below.
  • Example 1 and Comparative Example 1 are shown in FIG. 17A.
  • the displacement amount of Example 1 is set to 100
  • the displacement amount of Comparative Example 1 is indicated by the relative displacement amount of the displacement amount of the example.
  • Example 2 was the same as Example 1 except that the first metal member was arranged on the ⁇ layer and the adhesive member was arranged on the ⁇ layer.
  • the physical property values of the adhesive member are shown in Table 3 below.
  • Example 2 was the same as Example 2 except that air was placed in the ⁇ layer.
  • Example 2 and Comparative Example 2 are shown in FIG. 17B.
  • the amount of displacement of Comparative Example 2 is set to 100, and the amount of displacement of Example 2 is indicated by the amount of relative displacement of the amount of displacement of Example.
  • the amount of displacement of the translucent body increased by about 20% in the case of Example 2, in which the adhesive member was arranged in the ⁇ layer, compared to the case of Comparative Example 2, in which the ⁇ layer was an air layer. It was found that the vibration efficiency of the translucent body was increased. Therefore, it was found that the absorption of the vibration transmitted to the translucent body was suppressed more in the case of Example 2 than in the case of Comparative Example 2.
  • Example 3 was the same as Example 1 except that an adhesive member was arranged on the ⁇ layer.
  • the bonding member was the same as the bonding member of Example 2.
  • Comparative Example 3 Comparative Example 3 was the same as Example 3 except that an adhesive member was arranged on the ⁇ layer.
  • the bonding member was the same as the bonding member of Example 2.
  • Comparative Example 4 Comparative Example 4 was the same as Example 3 except that a resin packing was arranged in the ⁇ layer. The arrangement of the resin packing was the same as that of the resin packing of Comparative Example 1.
  • Comparative Example 5 was the same as Example 3 except that air was placed in the ⁇ layer.
  • Example 3 and Comparative Examples 3 to 5 are shown in FIG. 17C.
  • the displacement amount of Comparative Example 3 is set to 100, and the displacement amounts of Comparative Example 4, Comparative Example 5, and Example 3 are indicated by relative displacement amounts of the displacement amounts of the Examples.
  • the amount of displacement of the translucent body in Example 3, in which the first metal body is arranged in the ⁇ layer is about the same as in the case of Comparative Example 3, in which the adhesive member is arranged in the ⁇ layer. increased by 20%. Further, the amount of displacement of the translucent body increased in the case of Example 3 in which the first metal body was arranged in the ⁇ layer as compared with the case of Comparative Example 4 in which the resin packing was arranged in the ⁇ layer. Further, the amount of displacement of the translucent body increased in the case of Example 3 in which the first metal body was arranged in the ⁇ layer as compared with the case of Comparative Example 5 in which the ⁇ layer was an air layer.
  • the vibration device and imaging device of the present disclosure can be applied to a vehicle-mounted camera used outdoors, a surveillance camera, or an optical sensor such as LiDAR.
  • Imaging device 2 102, 202, 302, 402, 502, 602, 702 vibrating device 3 imaging unit 10 translucent body 10a first surface 10b second surface 10c third surface 20, 120, 220 vibrating bodies 21, 121, 221 body portions 21a, 121a, 221a one end 21b the other end 121d, 221d outer surfaces 22, 122, 222 support portions 22a, 122a, 222a support surface 22b surfaces 23, 223 ribs 23a, 223a rib inner peripheral surface 223b rib outer peripheral surface 24 1 screw part 25 fixing part 30 metal body, first metal body 30a inclined surface 31 inclined surface 40 piezoelectric element 50, 150 holding member 50a, 150a one end 50b, 150b other end 51, 151 pressing part 51a, 151a pressing surface 52, 152 Side walls 52a, 152a Inner surface 53 Second threaded portion 60 Second metal body 70 Adhesive member 80 Concave portion 81 Convex portion

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PCT/JP2022/037211 2022-02-10 2022-10-05 振動装置および撮像装置 Ceased WO2023153017A1 (ja)

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JP2023580070A JP7666662B2 (ja) 2022-02-10 2022-10-05 振動装置および撮像装置
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