WO2023151217A1 - Polymer film polarization method - Google Patents

Polymer film polarization method Download PDF

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WO2023151217A1
WO2023151217A1 PCT/CN2022/100860 CN2022100860W WO2023151217A1 WO 2023151217 A1 WO2023151217 A1 WO 2023151217A1 CN 2022100860 W CN2022100860 W CN 2022100860W WO 2023151217 A1 WO2023151217 A1 WO 2023151217A1
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polymer film
template
polarized
polarizing
micro
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胡志军
何宝胜
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苏州大学
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/01Manufacture or treatment
    • H10N30/04Treatments to modify a piezoelectric or electrostrictive property, e.g. polarisation characteristics, vibration characteristics or mode tuning
    • H10N30/045Treatments to modify a piezoelectric or electrostrictive property, e.g. polarisation characteristics, vibration characteristics or mode tuning by polarising
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00Nanotechnology for materials or surface science, e.g. nanocomposites
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/80Constructional details
    • H10N30/85Piezoelectric or electrostrictive active materials
    • H10N30/857Macromolecular compositions

Abstract

The present invention belongs to the technical field of films, and relates to a polymer film polarization method. The method comprises the following steps: placing a template on a surface of a polymer film to be polarized, the side surface of the template attached to the surface of said polymer film being provided with a micro-nano structure array; heating said polymer film to a viscous state, and under the action of pressure, squeezing part of said polymer film in the viscous state into micro-nano structures on the surface of the template; and performing cooling to cure said polymer film, and peeling off the template, so that a polarization process is completed. According to the polymer film polarization method provided by the present invention, an electric field does not need to be applied during the polarization process, so that the polymer film and a circuit layer will not directly bear a high-voltage electric field. Therefore, the polymer film or an electronic device can be effectively prevented from being broken down, the production qualification rate of polarized films is effectively improved, and large-scale production can be achieved.

Description

一种聚合物薄膜极化的方法A method for polarizing polymer thin films 技术领域technical field
本发明属于薄膜技术领域,涉及一种聚合物薄膜极化的方法,具体来说是一种无需电场极化聚合物膜的方法。The invention belongs to the technical field of thin films, and relates to a method for polarizing a polymer film, in particular to a method for polarizing a polymer film without an electric field.
背景技术Background technique
压电材料是一类具有特殊介电性能的晶体材料,它们在外力的作用而产生变形时,材料会因为电荷中心的位移而产生表面束缚电荷。这种将机械能转换为电能的过程通常被称为正压电效应。反之,对压电材料施加电场时,材料会因电荷中心的位移而产生形变。这种将电能转换为机械能的过程通常被称为逆压电效应。利用压电材料的正压电效应和逆压电效应可以制备压电式传感器、换能器、驱动器等器件,在力学、声学、医学、宇航和航海领域等领域应用广泛。Piezoelectric materials are a class of crystalline materials with special dielectric properties. When they are deformed by an external force, the material will generate surface bound charges due to the displacement of the charge center. This process of converting mechanical energy into electrical energy is often referred to as the direct piezoelectric effect. Conversely, when an electric field is applied to a piezoelectric material, the material deforms due to the displacement of the center of charge. This process of converting electrical energy into mechanical energy is commonly known as the inverse piezoelectric effect. Piezoelectric sensors, transducers, drivers and other devices can be prepared by using the direct piezoelectric effect and inverse piezoelectric effect of piezoelectric materials, which are widely used in the fields of mechanics, acoustics, medicine, aerospace and navigation.
极化是压电材料与器件制备过程中的一个重要环节,主要目的是将压电材料中杂乱取向的偶极沿特定方向取向,从而使其展现出较强的压电性能。极化过程通常是将压电材料或器件置于电场之中,当电场的强度超过一定阈值时,原本杂乱取向的偶极沿电场方向取向。根据施加电场方式的不同,目前的电场极化方式主要分为两种。一种是非接触型,即通过电晕极化的方式将导电载流子注入到压电材料的表面,当表面集聚的载流子形成的电场高于一定的阈值时,压电材料中的偶极沿电场方向取向。当电场去除后,一部分表面电荷消失,取向的偶极形成表面的极化强度。另外一种是接触型,即将电场直接施加于压电材料或器件的两侧电极,当施加的电场强度高于一定的阈值时,压电材料中的偶极沿电场方向取向。当电场去除后,压电材料中取向的偶极形成表面的极化强度。Polarization is an important link in the preparation process of piezoelectric materials and devices. The main purpose is to orient the random dipoles in piezoelectric materials in a specific direction, so that they can exhibit strong piezoelectric properties. In the polarization process, the piezoelectric material or device is usually placed in an electric field. When the strength of the electric field exceeds a certain threshold, the dipoles that were originally oriented in disorder are oriented along the direction of the electric field. According to the different ways of applying the electric field, the current electric field polarization methods are mainly divided into two types. One is the non-contact type, that is, the conductive carriers are injected into the surface of the piezoelectric material by means of corona polarization. When the electric field formed by the accumulated carriers on the surface is higher than a certain threshold, the coupler in the piezoelectric material The poles are oriented in the direction of the electric field. When the electric field is removed, part of the surface charge disappears, and the aligned dipoles form the polarization of the surface. The other is the contact type, that is, the electric field is directly applied to the electrodes on both sides of the piezoelectric material or device. When the applied electric field strength is higher than a certain threshold, the dipole in the piezoelectric material is oriented along the direction of the electric field. When the electric field is removed, the oriented dipoles in the piezoelectric material form the polarization of the surface.
利用高压电场极化压电材料与器件的过程会产生高能量消耗,并且存在安 全隐患。更重要的是,高压电场可能将压电材料和器件击穿,尤其是压电器件中含有晶体管等电路层时,导致整个材料和电子器件的损毁,所以生产合格率较低,无法实现压电材料与器件的大规模生产。The process of using high-voltage electric fields to polarize piezoelectric materials and devices results in high energy consumption and potential safety hazards. More importantly, high-voltage electric fields may break down piezoelectric materials and devices, especially when piezoelectric devices contain circuit layers such as transistors, resulting in damage to the entire material and electronic devices, so the production pass rate is low, and piezoelectric devices cannot be realized. Mass production of materials and devices.
发明内容Contents of the invention
为解决上述问题,尤其是聚合物压电材料薄膜电场极化合格率低和生产效率低的技术问题,本发明提供了一种无需电场的极化压电聚合物薄膜的方法。In order to solve the above problems, especially the technical problems of low electric field polarization yield and low production efficiency of polymer piezoelectric material films, the present invention provides a method for polarizing piezoelectric polymer films without electric field.
按照本发明的技术方案,所述聚合物薄膜极化的方法,包括以下步骤,According to the technical solution of the present invention, the method for polarizing the polymer film comprises the following steps,
S1:将模板置于待极化聚合物薄膜的表面,所述模板贴合极化聚合物薄膜表面的一侧表面具有微纳米结构阵列;S1: The template is placed on the surface of the polymer film to be polarized, and the surface of the template attached to the surface of the polarized polymer film has a micro-nano structure array;
S2:将所述待极化聚合物薄膜加热至粘流态,在压力作用下,使部分粘流态的待极化聚合物薄膜挤入模板表面的微纳米结构中;S2: heating the polymer film to be polarized to a viscous fluid state, and extruding a part of the polymer film to be polarized in a viscous fluid state into the micro-nano structure on the surface of the template under pressure;
S3:冷却使所述待极化聚合物薄膜固化,剥离模板,完成极化过程。S3: cooling to solidify the polymer film to be polarized, peeling off the template, and completing the polarization process.
进一步的,所述模板的材质为热固性树脂例如酚醛树脂、环氧树脂、呋喃树脂、硅树脂等,无机氧化物例如硅化物、氮化物、氧化物等,陶瓷材料例如硅酸盐、氯酸盐、硼酸盐等,金属材料例如铝、铁、铜、合金等。Further, the material of the template is thermosetting resin such as phenolic resin, epoxy resin, furan resin, silicone resin, etc., inorganic oxide such as silicide, nitride, oxide, etc., ceramic material such as silicate, chlorate , borate, etc., metal materials such as aluminum, iron, copper, alloys, etc.
进一步的,所述压电聚合物膜的材质包括但不限于含氟树脂,例如偏氟乙烯的均聚物、偏氟乙烯与三氟乙烯的共聚物、偏氟乙烯与三氟氯乙烯的共聚物、偏氟乙烯与三氟乙烯的共聚物,偏氟乙烯与六氟丙烯的共聚物、偏氟乙烯与六氟环氧丙烷的共聚物、偏氟乙烯与六氟丙烯与四氟乙烯的共聚物,其他压电聚合物,例如聚乳酸、纤维素等。这些聚合物可以单独使用或使用混合物。Further, the materials of the piezoelectric polymer film include but are not limited to fluorine-containing resins, such as homopolymers of vinylidene fluoride, copolymers of vinylidene fluoride and trifluoroethylene, copolymers of vinylidene fluoride and chlorotrifluoroethylene Copolymers of vinylidene fluoride and trifluoroethylene, copolymers of vinylidene fluoride and hexafluoropropylene, copolymers of vinylidene fluoride and hexafluoropropylene oxide, copolymers of vinylidene fluoride, hexafluoropropylene and tetrafluoroethylene materials, other piezoelectric polymers, such as polylactic acid, cellulose, etc. These polymers may be used alone or in mixture.
进一步的,所述微纳米结构阵列中,微纳米结构的高度为1nm-1000μm,宽度为1nm-1000μm,对其周期不做要求(实施例中为方便制备,采用周期结构,周期为1nm-1000μm)。所述微纳米结构的形状不做具体要求,但优选棱锥、棱台、圆锥、圆台等三维结构和闪耀光栅、梯形光栅等二维结构Further, in the micro-nano structure array, the height of the micro-nano structure is 1nm-1000μm, the width is 1nm-1000μm, and there is no requirement for its period (in the embodiment, for the convenience of preparation, a periodic structure is adopted, and the period is 1nm-1000μm ). There are no specific requirements for the shape of the micro-nano structure, but three-dimensional structures such as pyramids, prisms, cones, and truncated cones and two-dimensional structures such as blazed gratings and trapezoidal gratings are preferred.
进一步的,所述步骤S2中,将所述待极化聚合物薄膜的温度升至熔点或玻璃化转变温度以上形成粘流态,具体温度视材料而定。Further, in the step S2, the temperature of the polymer film to be polarized is raised above the melting point or the glass transition temperature to form a viscous fluid state, and the specific temperature depends on the material.
进一步的,所述步骤S2中,压力作用的时间为1-10min。Further, in the step S2, the pressure is applied for 1-10 minutes.
进一步的,所述步骤S3中,冷却在维持步骤S2中压力的条件下进行。Further, in the step S3, the cooling is performed under the condition of maintaining the pressure in the step S2.
进一步的,所述压力以能够实现部分粘流态的待极化聚合物薄膜挤入模板表面的微纳米结构为宜,其大小可以为10-20MPa。Further, the pressure should preferably be capable of extruding the partially viscous polymer film to be polarized into the micro-nano structure on the surface of the template, and its size may be 10-20 MPa.
在压力作用下,待极化聚合物薄膜发生非均匀形变,具体为:既会产生沿压力方向的形变,也会产生垂直于压力方向的形变。在聚合物薄膜固化后,聚合物薄膜表面的微纳米结构中会存在应变梯度,极化过程如图1所示。根据挠曲电效应,应变梯度的存在会产生极化强度,极化强度的大小与应变梯度的大小成正比例关系,如图2所示。Under the action of pressure, the polymer film to be polarized undergoes non-uniform deformation, specifically: deformation along the direction of pressure and deformation perpendicular to the direction of pressure will occur. After the polymer film is cured, there will be a strain gradient in the micro-nano structure on the surface of the polymer film, and the polarization process is shown in Figure 1. According to the flexoelectric effect, the existence of the strain gradient will produce polarization intensity, and the magnitude of the polarization intensity is proportional to the magnitude of the strain gradient, as shown in Figure 2.
本发明的技术方案相比现有技术具有以下优点:本发明所提供的聚合物薄膜极化方法,在极化的过程中无需施加电场,不会使聚合物薄膜和电路层直接承受高压电场,因此能够有效避免聚合物薄膜或电子器件被击穿,有效提高极化膜的生产合格率,可以实现大规模生产。Compared with the prior art, the technical solution of the present invention has the following advantages: the polymer film polarization method provided by the present invention does not need to apply an electric field during the polarization process, and does not directly withstand the high-voltage electric field on the polymer film and the circuit layer, Therefore, it can effectively prevent the polymer film or electronic device from being broken down, effectively improve the production pass rate of the polarized film, and realize large-scale production.
附图说明Description of drawings
图1为本发明聚合物薄膜极化的过程示意图。Fig. 1 is a schematic diagram of the polarization process of the polymer film of the present invention.
图2为本发明聚合物极化膜中的极化强度(左)与应变梯度关系(右)示意图。Fig. 2 is a schematic diagram of the relationship between polarization intensity (left) and strain gradient (right) in the polymer polarized film of the present invention.
图3为实施例1中PVDF极化膜的形貌示意图(A)及其剩余极化强度测量计算示意图(B)。3 is a schematic diagram (A) of the morphology of the PVDF polarized film in Example 1 and a schematic diagram (B) of the measurement and calculation of the remanent polarization.
图4为实施例2中P(VDF-HFP)极化膜的形貌示意图(A)及其剩余极化强度测量计算示意图(B)。4 is a schematic diagram (A) of the morphology of the P(VDF-HFP) polarized film in Example 2 and a schematic diagram (B) of the measurement and calculation of the remanent polarization.
图5为实施例3中P(VDF-TrFE)极化膜的形貌示意图(A)及其剩余极化强度测量计算示意图(B)。5 is a schematic diagram (A) of the morphology of the P(VDF-TrFE) polarized film in Example 3 and a schematic diagram (B) of the measurement and calculation of the remanent polarization.
具体实施方式Detailed ways
本发明利用材料在非均匀形变过程中产生的挠曲电效应对压电聚合物膜进行极化。具体包括:提供具有微纳米结构的模板,其包括相对的第一表面和第 二表面,第一表面为平整的表面,第二表面具有微纳米结构阵列;提供待极化聚合物薄膜,其包括相对的第三表面和第四表面;将具有微纳米结构的模板置于待极化聚合物薄膜上方,使模板的第二表面接触待极化聚合物薄膜的第三表面,将聚合物薄膜加热至粘流态,并在压力的作用下使模板的第二表面紧密接触聚合物薄膜的第三表面,将模板中第二表面的微纳米结构阵列复制到聚合物薄膜的第三表面。待聚合物薄膜冷却至玻璃态或结晶态后将模板和聚合物薄膜分离,完成极化过程。The invention utilizes the flexoelectric effect produced in the non-uniform deformation process to polarize the piezoelectric polymer film. Specifically include: providing a template with a micro-nano structure, which includes an opposite first surface and a second surface, the first surface is a flat surface, and the second surface has a micro-nano structure array; providing a polymer film to be polarized, which includes The opposite third surface and the fourth surface; the template with the micro-nano structure is placed above the polymer film to be polarized, the second surface of the template contacts the third surface of the polymer film to be polarized, and the polymer film is heated to a viscous flow state, and under the action of pressure, the second surface of the template is closely contacted with the third surface of the polymer film, and the micro-nano structure array on the second surface of the template is copied to the third surface of the polymer film. After the polymer film is cooled to a glassy or crystalline state, the template and the polymer film are separated to complete the polarization process.
下面结合附图和具体实施例对本发明作进一步说明,以使本领域的技术人员可以更好地理解本发明并能予以实施,但所举实施例不作为对本发明的限定。The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments, so that those skilled in the art can better understand the present invention and implement it, but the examples given are not intended to limit the present invention.
实施例1Example 1
本实例中提供一种制备聚偏氟乙烯(PVDF)极化膜的方法,具体包括以下步骤:Provide a kind of method for preparing polyvinylidene fluoride (PVDF) polarization film in this example, specifically comprise the following steps:
(1)将待极化聚偏氟乙烯(PVDF)薄膜放置在加热板上,温度设定为180℃;(1) Place the polyvinylidene fluoride (PVDF) film to be polarized on a heating plate, and set the temperature to 180°C;
(2)将带有闪耀光栅结构的聚二甲基硅氧烷(PDMS)模板置于PVDF薄膜的上方,模板的第二表面接触待PVDF薄膜的第三表面;(2) placing a polydimethylsiloxane (PDMS) template with a blazed grating structure above the PVDF film, the second surface of the template contacts the third surface of the PVDF film;
(3)对PDMS模板施加15MPa的压力,持续2min后冷却,保持压力的情况下冷却至室温(25±5℃);(3) Apply a pressure of 15 MPa to the PDMS template, continue cooling for 2 minutes, and cool to room temperature (25±5°C) while maintaining the pressure;
(4)将PDMS模板从PVDF薄膜剥离,完成PVDF薄膜的极化;(4) The PDMS template is peeled off from the PVDF film to complete the polarization of the PVDF film;
(5)经原子力显微镜测量,闪耀光栅结构的高度为2.0μm,周期为13μm,如图3(A)所示;(5) Measured by the atomic force microscope, the height of the blazed grating structure is 2.0 μm, and the period is 13 μm, as shown in Figure 3(A);
(6)压电系数的测量结果表明,其剩余极化强度Pr为26.7μC/cm 2,如图3(B)所示。 (6) The measurement results of the piezoelectric coefficient show that the remnant polarization Pr is 26.7 μC/cm 2 , as shown in Fig. 3(B).
实施例2Example 2
本实例中提供一种制备聚(偏氟乙烯-co-六氟丙烯)(P(VDF-HFP))极化膜的方法,具体包括以下步骤:Provide a kind of method for preparing poly(vinylidene fluoride-co-hexafluoropropylene) (P(VDF-HFP)) polarized film in this example, specifically comprise the following steps:
(1)将待极化P(VDF-HFP)薄膜放置在加热板上,温度设定为170℃;(1) Place the P(VDF-HFP) film to be polarized on a heating plate, and set the temperature to 170°C;
(2)将带有闪耀光栅结构的聚二甲基硅氧烷(PDMS)模板置于P(VDF-HFP)薄膜的上方,模板的第二表面接触P(VDF-HFP)薄膜的第三表面;(2) Place a polydimethylsiloxane (PDMS) template with a blazed grating structure on top of the P(VDF-HFP) film, and the second surface of the template contacts the third surface of the P(VDF-HFP) film ;
(3)对PDMS模板施加15MPa的压力,持续2min后冷却,保持压力的情况下冷却至室温;(3) Apply a pressure of 15 MPa to the PDMS template, cool after 2 minutes, and cool to room temperature while maintaining the pressure;
(4)将PDMS模板从P(VDF-HFP)薄膜剥离,完成P(VDF-HFP)薄膜的极化;(4) Peel off the PDMS template from the P(VDF-HFP) film to complete the polarization of the P(VDF-HFP) film;
(5)经原子力显微镜测量,闪耀光栅结构的高度为2.0μm,周期为13μm,如图4(A)所示;(5) Measured by the atomic force microscope, the height of the blazed grating structure is 2.0 μm, and the period is 13 μm, as shown in Figure 4(A);
(6)压电系数的测量结果表明,其剩余极化强度Pr为33.5μC/cm 2,如图4(B)所示。 (6) The measurement result of the piezoelectric coefficient shows that the remnant polarization Pr is 33.5 μC/cm 2 , as shown in Fig. 4(B).
实施例3Example 3
本实例中提供一种制备聚(偏氟乙烯-co-三氟乙烯)(P(VDF-TrFE))极化膜的方法,具体包括以下步骤:Provide a kind of method for preparing poly(vinylidene fluoride-co-trifluoroethylene) (P(VDF-TrFE)) polarized film in this example, specifically comprise the following steps:
(1)将待极化P(VDF-TrFE)薄膜放置在加热板上,温度设定为160℃;(1) Place the P(VDF-TrFE) film to be polarized on a heating plate, and set the temperature to 160°C;
(2)将带有闪耀光栅结构的聚二甲基硅氧烷(PDMS)模板置于P(VDF-TrFE)薄膜的上方,模板的第二表面接触待P(VDF-TrFE)薄膜的第三表面;(2) Place a polydimethylsiloxane (PDMS) template with a blazed grating structure on top of the P(VDF-TrFE) film, and the second surface of the template contacts the third surface of the P(VDF-TrFE) film to be prepared. surface;
(3)对PDMS模板施加15MPa的压力,持续2min后将加热板冷却,保持压力的情况下冷却至室温;(3) Apply a pressure of 15 MPa to the PDMS template, cool the heating plate after 2 minutes, and cool to room temperature while maintaining the pressure;
(4)将PDMS模板从P(VDF-TrFE)薄膜剥离,完成P(VDF-TrFE)薄膜的极化;(4) Peel off the PDMS template from the P(VDF-TrFE) film to complete the polarization of the P(VDF-TrFE) film;
(5)经原子力显微镜测量,闪耀光栅结构的高度为2.0μm,周期为13μm,如图5(A)所示;(5) Measured by the atomic force microscope, the height of the blazed grating structure is 2.0 μm, and the period is 13 μm, as shown in Figure 5(A);
(6)压电系数的测量结果表明,其剩余极化强度Pr为28.3μC/cm 2,如图5(B)所示。 (6) The measurement result of the piezoelectric coefficient shows that the remnant polarization Pr is 28.3 μC/cm 2 , as shown in Fig. 5(B).
实施例4Example 4
本实例中提供一种制备聚偏氟乙烯(PVDF)极化膜的方法,具体包括以下 步骤:Provide a kind of method for preparing polyvinylidene fluoride (PVDF) polarization film in this example, specifically comprise the following steps:
(1)将待极化聚偏氟乙烯(PVDF)薄膜放置在加热板上,温度设定为190℃;(1) Place the polyvinylidene fluoride (PVDF) film to be polarized on a heating plate, and set the temperature to 190°C;
(2)将带有闪耀光栅结构的聚二甲基硅氧烷(PDMS)模板置于PVDF薄膜的上方,模板的第二表面接触待PVDF薄膜的第三表面;(2) placing a polydimethylsiloxane (PDMS) template with a blazed grating structure above the PVDF film, the second surface of the template contacts the third surface of the PVDF film;
(3)对PDMS模板施加13MPa的压力,持续2min后冷却,保持压力的情况下冷却至室温;(3) Apply a pressure of 13 MPa to the PDMS template, cool after 2 minutes, and cool to room temperature while maintaining the pressure;
(4)将PDMS模板从PVDF薄膜剥离,完成PVDF薄膜的极化;(4) The PDMS template is peeled off from the PVDF film to complete the polarization of the PVDF film;
(5)经原子力显微镜测量,闪耀光栅结构的高度为200.0μm,周期为100μm。(5) Measured by the atomic force microscope, the height of the blazed grating structure is 200.0 μm, and the period is 100 μm.
实施例5Example 5
本实例中提供一种制备聚偏氟乙烯(PVDF)极化膜的方法,具体包括以下步骤:Provide a kind of method for preparing polyvinylidene fluoride (PVDF) polarization film in this example, specifically comprise the following steps:
(1)将待极化聚偏氟乙烯(PVDF)薄膜放置在加热板上,温度设定为180℃;(1) Place the polyvinylidene fluoride (PVDF) film to be polarized on a heating plate, and set the temperature to 180°C;
(2)将带有圆台结构的聚二甲基硅氧烷(PDMS)模板置于PVDF薄膜的上方,模板的第二表面接触待PVDF薄膜的第三表面;(2) placing the polydimethylsiloxane (PDMS) template with the truncated cone structure above the PVDF film, the second surface of the template contacts the third surface of the PVDF film;
(3)对PDMS模板施加15MPa的压力,持续2min后冷却,保持压力的情况下冷却至室温;(3) Apply a pressure of 15 MPa to the PDMS template, cool after 2 minutes, and cool to room temperature while maintaining the pressure;
(4)将PDMS模板从PVDF薄膜剥离,完成PVDF薄膜的极化;(4) The PDMS template is peeled off from the PVDF film to complete the polarization of the PVDF film;
(5)经原子力显微镜测量,圆台结构的上表面宽度为1.3μm,下表面宽度为2.9μm,厚度为2.5μm,周期为50μm。(5) As measured by the atomic force microscope, the upper surface width of the frustoconical structure is 1.3 μm, the lower surface width is 2.9 μm, the thickness is 2.5 μm, and the period is 50 μm.
显然,上述实施例仅仅是为清楚地说明所作的举例,并非对实施方式的限定。对于所属领域的普通技术人员来说,在上述说明的基础上还可以做出其它不同形式变化或变动。这里无需也无法对所有的实施方式予以穷举。而由此所引申出的显而易见的变化或变动仍处于本发明创造的保护范围之中。Apparently, the above-mentioned embodiments are only examples for clear description, and are not intended to limit the implementation. For those of ordinary skill in the art, on the basis of the above description, other changes or changes in various forms can also be made. It is not necessary and impossible to exhaustively list all the implementation manners here. However, the obvious changes or changes derived therefrom are still within the scope of protection of the present invention.

Claims (10)

  1. 一种聚合物薄膜极化的方法,其特征在于,包括以下步骤,A method for polarizing a polymer film, characterized in that it comprises the following steps,
    S1:将模板置于待极化聚合物薄膜的表面,所述模板贴合极化聚合物薄膜表面的一侧表面具有微纳米结构阵列;S1: The template is placed on the surface of the polymer film to be polarized, and the surface of the template attached to the surface of the polarized polymer film has a micro-nano structure array;
    S2:将所述待极化聚合物薄膜加热至粘流态,在压力作用下,使部分粘流态的待极化聚合物薄膜挤入模板表面的微纳米结构中;S2: heating the polymer film to be polarized to a viscous fluid state, and extruding a part of the polymer film to be polarized in a viscous fluid state into the micro-nano structure on the surface of the template under pressure;
    S3:冷却使所述待极化聚合物薄膜固化,剥离模板,完成极化过程。S3: cooling to solidify the polymer film to be polarized, peeling off the template, and completing the polarization process.
  2. 如权利要求1所述的聚合物薄膜极化的方法,其特征在于,所述模板的材质为热固性树脂、无机氧化物、陶瓷或金属。The method for polarizing a polymer film according to claim 1, wherein the template is made of thermosetting resin, inorganic oxide, ceramic or metal.
  3. 如权利要求1所述的聚合物薄膜极化的方法,其特征在于,所述模板的材质选自酚醛树脂、环氧树脂、呋喃树脂、硅树脂、硅化物、氮化物或氧化物、硅酸盐、氯酸盐、硼酸盐、铝、铁、铜或合金。The method for polarizing a polymer film according to claim 1, wherein the material of the template is selected from phenolic resin, epoxy resin, furan resin, silicone resin, silicide, nitride or oxide, silicic acid Salt, chlorate, borate, aluminum, iron, copper or alloys.
  4. 如权利要求1所述的聚合物薄膜极化的方法,其特征在于,所述待极化聚合物薄膜的材质选自含氟树脂、聚乳酸和纤维素中的一种或多种。The method for polarizing a polymer film according to claim 1, wherein the material of the polymer film to be polarized is selected from one or more of fluorine-containing resin, polylactic acid and cellulose.
  5. 如权利要求4所述的聚合物薄膜极化的方法,其特征在于,所述含氟树脂选自偏氟乙烯的均聚物、偏氟乙烯与三氟乙烯的共聚物、偏氟乙烯与三氟氯乙烯的共聚物、偏氟乙烯与三氟乙烯的共聚物、偏氟乙烯与六氟丙烯的共聚物、偏氟乙烯与六氟环氧丙烷的共聚物、偏氟乙烯与六氟丙烯与四氟乙烯的共聚物中的一种或多种。The method for polarizing a polymer film according to claim 4, wherein the fluorine-containing resin is selected from the group consisting of homopolymers of vinylidene fluoride, copolymers of vinylidene fluoride and trifluoroethylene, vinylidene fluoride and trifluoroethylene Copolymers of chlorofluoroethylene, copolymers of vinylidene fluoride and trifluoroethylene, copolymers of vinylidene fluoride and hexafluoropropylene, copolymers of vinylidene fluoride and hexafluoropropylene oxide, copolymers of vinylidene fluoride and hexafluoropropylene One or more of tetrafluoroethylene copolymers.
  6. 如权利要求1所述的聚合物薄膜极化的方法,其特征在于,所述微纳米结构阵列中,微纳米结构的形状为棱锥、棱台、圆锥、圆台、闪耀光栅或梯形光栅。The method for polarizing a polymer film according to claim 1, wherein, in the array of micro-nanostructures, the micro-nanostructures are shaped as pyramids, frustums, cones, frustums, blazed gratings or trapezoidal gratings.
  7. 如权利要求1或6所述的聚合物薄膜极化的方法,其特征在于,所述微纳米结构的高度为1nm-1000μm,宽度为1nm-1000μm。The method for polarizing a polymer film according to claim 1 or 6, characterized in that the height of the micro-nano structure is 1 nm-1000 μm, and the width is 1 nm-1000 μm.
  8. 如权利要求1所述的聚合物薄膜极化的方法,其特征在于,所述步骤S2 中,将所述待极化聚合物薄膜的温度升至熔点或玻璃化转变温度以上形成粘流态。The method for polarizing a polymer film according to claim 1, wherein in the step S2, the temperature of the polymer film to be polarized is raised above the melting point or glass transition temperature to form a viscous fluid state.
  9. 如权利要求1所述的聚合物薄膜极化的方法,其特征在于,所述步骤S3中,冷却在维持步骤S2中压力的条件下进行。The method for polarizing a polymer film according to claim 1, characterized in that, in the step S3, the cooling is carried out under the condition of maintaining the pressure in the step S2.
  10. 如权利要求1或9所述的聚合物薄膜极化的方法,其特征在于,所述压力的大小为10-20MPa。The method for polarizing a polymer film according to claim 1 or 9, wherein the pressure is 10-20 MPa.
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