WO2023149305A1 - Dispositif de génération de plasma, dispositif de purification d'air, etc. - Google Patents

Dispositif de génération de plasma, dispositif de purification d'air, etc. Download PDF

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Publication number
WO2023149305A1
WO2023149305A1 PCT/JP2023/002262 JP2023002262W WO2023149305A1 WO 2023149305 A1 WO2023149305 A1 WO 2023149305A1 JP 2023002262 W JP2023002262 W JP 2023002262W WO 2023149305 A1 WO2023149305 A1 WO 2023149305A1
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Prior art keywords
electrode
gas
metal film
glass layer
layer
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PCT/JP2023/002262
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English (en)
Japanese (ja)
Inventor
佑二 林
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インパクトワールド株式会社
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    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
    • A61L9/00—Disinfection, sterilisation or deodorisation of air
    • A61L9/16—Disinfection, sterilisation or deodorisation of air using physical phenomena
    • A61L9/18—Radiation
    • A61L9/20—Ultra-violet radiation
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
    • A61L9/00—Disinfection, sterilisation or deodorisation of air
    • A61L9/16—Disinfection, sterilisation or deodorisation of air using physical phenomena
    • A61L9/22—Ionisation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma

Definitions

  • the present invention relates to a plasma generator and a gas purifying device that purifies indoor air and other gases by using the same.
  • Patent Literature 1 a technology that fuses plasma and catalyst (PACT), that is, a technology that synergistically utilizes the action of plasma and the action of catalyst to purify gas (patent Literature 1), and since then, research has been conducted on this technique (for example, Patent Literature 2, Patent Literature 3, etc.).
  • This technology generates plasma at room temperature and atmospheric pressure to generate ozone and other radicals, and activates a catalyst to oxidatively decompose harmful substances contained in the gas or to reductively decompose them. , to efficiently purify the gas (Patent Document 2).
  • Patent Document 2 this technology makes both effects of plasma excitation and catalytic activity coexist spatio-temporally.
  • Non-Patent Document 1 a Non-Patent Document 1
  • virus infection routes such as contact infection, droplet infection, and droplet nuclear infection (so-called “air infection”).
  • SARS-CoV-2 (hereafter simply referred to as the “novel coronavirus”) has been reported to have the possibility of contact infection and droplet infection, and the possibility of droplet nuclear infection has also been pointed out.
  • viruses including the new coronavirus among the droplet infections, deny the possibility of those via minute droplets floating in the air (so-called “aerosol infection” or “micro droplet infection”) Unless possible, it is required to reduce the amount of virus floating in the indoor air as much as possible.
  • some of the new coronaviruses that have mutated can establish infection with a smaller amount of virus than conventional strains. It has been reported that, in part, mutations, even when humoral immunity is induced by infecting conventional ones or by vaccination with mRNA vaccines directed against conventional ones. While it has been pointed out that the humoral immunity may not be sufficiently effective for some of those who have been affected, the possibility of further mutations cannot be denied in the future.
  • Plasma generally emits visible light and other electromagnetic waves, and air contains nitrogen, so air plasma contains nitrogen plasma.
  • Nitrogen plasma emits visible rays (electromagnetic waves with a wavelength in the range of 400 to 800 nm) and ultraviolet rays (electromagnetic waves with a wavelength in the range of 1 to 400 nm). Among them, near-ultraviolet rays (electromagnetic waves with a wavelength in the range of 200 to 400 nm), particularly those with a wavelength in the range of 300 to 380 nm, are emitted.
  • the UV reflectance of aluminum oxide is not sufficient, and the UV reflectance further decreases as the surface made of aluminum oxide changes color as it continues to be exposed to UV rays. be.
  • parts other than dielectrics such as housings, are also made of stainless steel (paragraph [0023]), and their UV reflectance is considered to be even lower than that of aluminum oxide. It's becoming
  • an object of the present invention is to generate plasma by dielectric barrier discharge and to efficiently utilize ultraviolet rays and other electromagnetic waves emitted by the plasma.
  • the present invention has the following configurations as means for solving the problems.
  • a first electrode [1] a first electrode; a second electrode spaced apart from the first electrode; a first glass layer disposed between the first electrode and the second electrode and spaced apart from the second electrode; A first metal film layer disposed between the first electrode and the first glass layer, in contact with the first electrode immediately or via a conductive adhesive layer, and immediately with the first glass layer or contact via a conductive adhesive layer.
  • a first electrode-side conductive adhesive layer arranged between the first electrode and the first metal film layer, and a first glass arranged between the first glass layer and the first metal film layer
  • a third electrode-side conductive adhesive layer disposed between the third electrode and the second metal film layer, and a second glass disposed between the second glass layer and the second metal film layer
  • the second metal film layer comprises a third electrode-side metal film in contact with the third electrode via the third electrode-side conductive adhesive layer, the second glass layer, and the second glass layer-side conductive adhesive layer. and the second glass layer side metal film contacting via the plasma generator according to the above [5].
  • first electrode and the third electrode are each made of plate-like copper
  • the second electrode is made of rod-shaped, male-threaded or helical titanium, or is made of rod-shaped metal, and is made of a linear metal or its oxide that acts as a catalyst and is helical is wrapped around wherein the first glass layer and the second glass layer are each made of plate-shaped quartz glass or borosilicate glass,
  • the first metal film layer and the second metal film layer are each made of aluminum or silver foil, or each made of evaporated aluminum or silver film above [4] to [6]
  • the plasma generator according to any one of 1.
  • a fourth electrode arranged with a space between each of the first glass layer, the second electrode, and the second glass layer, wherein the second electrode is positioned between the first glass layer and the fourth electrode; It is arranged without sandwiching and is arranged without sandwiching the second electrode between the third glass layer,
  • the fourth electrode is made of rod-shaped, male-threaded or helical titanium, or made of rod-shaped metal, and a linear metal or its oxide that acts as a catalyst is helical
  • the plasma generator according to any one of [4] to [7] above.
  • a gas purifier comprising: a flow path through which a gas to be purified flows.
  • [11] Equipped with a first filter consisting of a catalyst that decomposes ozone and a carrier that holds it,
  • the first filter is arranged downstream of the second electrode in the channel, is arranged between the first electrode and the third electrode, is in contact with the first electrode, and is in contact with the first electrode.
  • a third filter made of ferric oxide and a carrier that holds it, The gas purification device according to any one of [9] to [13] above, wherein the third filter is arranged downstream of the second electrode in the channel.
  • the gas purification device according to any one of [9] to [14] above; and another gas purification device according to any one of [9] to [14] above,
  • the first electrode of the gas purification device and the third electrode of the other gas purification device are electrically connected, or the second electrode of the gas purification device and the second electrode of the other gas purification device are electrically connected.
  • a gas purifying device having a structure in which the gas purifying device and the other gas purifying device are coupled vertically or horizontally by being electrically connected to a second electrode.
  • a gas activating device comprising the plasma generating device according to any one of [1] to [8] above; and a flow path through which the gas to be activated flows; a blower for blowing air toward the gas activation device.
  • a first electrode a second electrode spaced apart from the first electrode; a third electrode spaced apart from the second electrode, wherein the second electrode is placed between the first electrode and the second electrode; a first glass layer disposed between the first electrode and the second electrode and spaced apart from the second electrode; a second glass layer disposed between the second electrode and the third electrode and spaced apart from the second electrode;
  • the first electrode and the first glass layer are in contact with each other immediately or via a conductive adhesive layer to form a first reflecting mirror that reflects ultraviolet rays
  • the plasma generator wherein the third electrode and the second glass layer are in contact with each other immediately or via a conductive adhesive layer to form a second reflecting mirror that reflects ultraviolet rays.
  • the present invention has the effect of generating plasma by dielectric barrier discharge and efficiently utilizing ultraviolet rays and other electromagnetic waves generated by the plasma.
  • FIG. 3A is an operation diagram (a) of the plasma generator according to the first embodiment of the present invention, and (b) is an operation diagram (b) of the plasma generator according to the comparative example.
  • BRIEF DESCRIPTION OF THE DRAWINGS It is the side view (a) of the plasma generator which concerns on 1st embodiment of this invention, and the operation
  • 1 is a perspective view of a plasma generator according to a first embodiment of the present invention; FIG.
  • FIG. 1 is a perspective partial cross-sectional view of a plasma generator according to a first embodiment of the present invention
  • FIG. FIG. 3A is an operation diagram (a) of the plasma generator according to the first embodiment of the present invention, and (b) is an operation diagram (b) of the plasma generator according to the comparative example.
  • 1 is an action diagram of a plasma generator according to a first embodiment of the present invention
  • BRIEF DESCRIPTION OF THE DRAWINGS It is the front view (a) of the gas purification apparatus which concerns on 1st embodiment of this invention, and the elements on larger scale (b) of the same apparatus. BRIEF DESCRIPTION OF THE DRAWINGS It is the rear view (a) of the gas purification apparatus which concerns on 1st embodiment of this invention, and the elements on larger scale (b) of the same apparatus. BRIEF DESCRIPTION OF THE DRAWINGS It is sectional drawing (a) of the gas purification apparatus which concerns on 1st embodiment of this invention, and operation
  • FIG. 1 is a perspective view of a gas purification device according to a first embodiment of the present invention
  • FIG. 1 is a perspective view of a gas purification device according to a first embodiment of the present invention
  • FIG. BRIEF DESCRIPTION OF THE DRAWINGS It is perspective sectional drawing of the gas purification apparatus which concerns on 1st embodiment of this invention.
  • FIG. 1 is an exploded perspective view of a gas purification device according to a first embodiment of the present invention
  • FIG. It is the disassembled front view (a) of the gas purification apparatus which concerns on 1st embodiment of this invention, and the disassembled sectional drawing (b) and the same (c) of the same apparatus.
  • FIG. It is an exploded plan view (a), the same (b), the same (c) and the same (d) of the gas purifier which concerns on 1st embodiment of this invention.
  • FIG. 4 is an action diagram of the gas purifier according to the second embodiment of the present invention. It is a perspective view of the gas purifier which concerns on 2nd embodiment of this invention. It is a perspective partial sectional view of the gas purifier which concerns on 2nd embodiment of this invention. It is a perspective partial sectional view of the gas purifier which concerns on 2nd embodiment of this invention. It is a perspective view of the self-propelled gas purifier which concerns on 3rd embodiment of this invention using the gas purifier which concerns on 2nd embodiment of this invention. It is a perspective partial sectional view of the self-propelled gas purifying apparatus based on 3rd embodiment of this invention using the gas purifying apparatus based on 2nd embodiment of this invention.
  • FIG. 11 is an exploded perspective view of a fifth embodiment of a solids purification device utilizing a fourth embodiment of the gas activation device of the present invention
  • FIG. 11 is an exploded perspective view of a fifth embodiment of a solids purification device utilizing a fourth embodiment of the gas activation device of the present invention
  • FIG. 10 is a perspective view of a combination of a solids purification device and closed vessel according to a fifth embodiment of the present invention utilizing a gas activation device according to a fourth embodiment of the present invention
  • FIG. 11 is a functional diagram of a combination of a solid purifying device according to a fifth embodiment of the present invention and a closed vessel utilizing a gas activation device according to the fourth embodiment of the present invention
  • It is the perspective sectional view (a) of the air conditioning purification apparatus based on 6th embodiment of this invention using the gas purification apparatus based on 1st embodiment of this invention, and the partial enlarged view (b) of the same air conditioning purification apparatus. .
  • the perspective view (a) of the gas purifying device according to the first embodiment of the present invention using the plasma generator according to the eighth embodiment of the present invention, the perspective cross-sectional view (b) of the same gas purifying device, and the cross section of the same device It is a figure (c). It is operation drawing (a) and the same (b) of the plasma generator which concerns on 1st embodiment of this invention. They are partial enlarged views (a), (b), (c), (d) and (e) of other aspects of the plasma generator according to the first embodiment of the present invention. They are partial enlarged views (a), (b), (c), (d) and (e) of other aspects of the plasma generator according to the first embodiment of the present invention.
  • FIG. 1 to FIG. The details of these are as follows. 1 to 24 (excluding FIG. 8(c)) and FIGS. 41 to 43 are drawings showing the first embodiment of the present invention, and FIGS. 25 to 30 are the second embodiment of the present invention. 31 and 32 are drawings showing the third embodiment of the present invention, and FIGS. 33 to 38 are drawings showing the fourth and fifth embodiments of the present invention.
  • FIG. 39 is a drawing showing a sixth embodiment of the present invention
  • FIG. 8(c) is a drawing showing a seventh embodiment of the present invention
  • FIG. 40 is a drawing showing an eighth embodiment of the present invention. is.
  • FIG. 1 is a front view (a) showing the front of the plasma generator according to the first embodiment of the present invention, a partial enlarged view (b) showing an enlarged portion surrounded by a broken line in (a), It consists of
  • FIG. 2 consists of an operation diagram (a) showing the operation of the plasma generator according to the first embodiment of the present invention and an operation diagram (b) showing the operation of the plasma generator according to the comparative example. .
  • FIG. 3 is a side view (a) showing the side surface of the plasma generator according to the first embodiment of the present invention, an action diagram (b) showing the action of the plasma generator according to the first embodiment of the present invention, It consists of
  • FIG. 4 is a perspective view (a) showing the front, top, and right side of the plasma generator according to the first embodiment of the present invention.
  • the cutting line for FIG. 5, which is a perspective partial cross-sectional view, is shown as line aa by a dashed line.
  • FIG. 5 is a perspective partial cross-sectional view showing the front, top, and right side of the plasma generator according to the first embodiment of the present invention, partially cut along line aa in FIG.
  • omitted lines indicating portions omitted in FIGS. 6 and 7 are indicated by wavy dashed lines.
  • FIG. 6 consists of an operation diagram (a) showing the operation of the plasma generator according to the first embodiment of the present invention and an operation diagram (b) showing the operation of the plasma generator according to the comparative example. .
  • FIG. 7 is an operation diagram showing the operation of the plasma generator according to the first embodiment of the present invention, which has a pair of opposing reflecting mirrors.
  • FIG. 8 is a combination (a) of a perspective view (a1) and a perspective cross-sectional view (a2) showing another aspect of the plasma generator according to the first embodiment of the present invention, and a perspective view ( It consists of a combination (b) of b1) and a perspective cross-sectional view (b2) and a combination (c) of a perspective view (c1) and a perspective cross-sectional view (c2) of the plasma generator according to the seventh embodiment of the present invention.
  • . (a) is a perspective view (a1) showing a plasma generator according to the first embodiment of the present invention, which includes an annular first electrode and a rod-shaped second electrode; and a perspective cross-sectional view (a2) taken along line bb.
  • FIG. 1 is a perspective view (b1) showing a plasma generator according to the first embodiment of the present invention comprising a plate-shaped first electrode and a rod-shaped second electrode, and (b1) showing the device in the middle of (b1) and a perspective cross-sectional view (b2) taken along the line cc of FIG.
  • (c) is a perspective view (c1) showing a plasma generation device according to a seventh embodiment of the present invention, and a perspective cross-sectional view showing the device cut along the dd line in (c1) ( and c2).
  • FIG. 9 shows drawings (a), (b), (c), (d) and the (e).
  • (a) is a front view showing a rod-shaped second electrode.
  • (b) is a front view showing a spiral second electrode.
  • (c) is a front view showing a combination of a rod-shaped second electrode and a spiral catalyst layer.
  • (d) is a front view showing a combination of a rod-shaped second electrode and an annular catalyst layer, and is also a partial cross-sectional view showing a cross section of a part thereof.
  • (e) is a partially enlarged front view showing a combination of the male screw-shaped second electrode and the catalyst layer arranged in the groove part thereof, while omitting the other part; It is also a partial cross-sectional view showing a cross-section of a part thereof.
  • FIG. 10 is a front view (a) showing the front of the gas purifier according to the first embodiment of the present invention, a partial enlarged view (b) showing an enlarged portion surrounded by a broken line in (a), It consists of In this figure, the cutting line for the cross-sectional view of FIG. 12 and the perspective cross-sectional view of FIG. The same applies to FIGS. 11, 15 and 16 below.
  • FIG. 11 is a rear view (a) showing the back of the gas purifier according to the first embodiment of the present invention, a partial enlarged view (b) showing an enlarged portion surrounded by a broken line in (a), It consists of
  • FIG. 12 is a cross-sectional view (a) showing the gas purification device according to the first embodiment of the present invention cut along the line ee in FIG. It consists of FIG.
  • the direction in which the gas to be purified (including the case where it is applied mutatis mutandis by reading "the gas to be activated" in the gas activation device according to the third embodiment of the present invention) flows is indicated by a black arrow.
  • the direction of heat transfer is indicated by a dashed line with a white arrow. The same applies to FIGS. 21, 22 and 41 below.
  • FIG. 13 shows a gas purifier according to the first embodiment of the present invention, which is provided with two second electrodes, cut along a cutting line corresponding to line ee in FIG. 10(a).
  • FIG. 14 is a gas purifying device according to the first embodiment of the present invention, which is provided with a first filter and a second filter, cut along a cutting line corresponding to line ee in FIG. 10(a). and a gas purifier according to the first embodiment of the present invention, which includes a first filter and a third filter, along a cutting line corresponding to the ee line in FIG. 10 (a) and a cross-sectional view (b) taken along the line.
  • FIG. 15 is a perspective view showing the front, top, and right side of the gas purification device according to the first embodiment of the present invention.
  • the cutting line for FIG. 17, which is a perspective cross-sectional view is shown as the ff line by the dashed-dotted line.
  • FIG. 16 the direction in which the second electrode extends is indicated by a dashed line with a white arrow.
  • FIGS. 16, 17 and 40(b) the cutting line for FIG. 17, which is a perspective cross-sectional view
  • FIG. 16 is a perspective view showing the back, left side and top of the gas purification device according to the first embodiment of the present invention.
  • FIG. 17 shows the gas purifier according to the first embodiment of the present invention cut along the ee line in FIGS. 15 and 16 and further cut along the ff line in FIGS. It is a perspective sectional view showing the front, the top, and the right side of what was done.
  • FIG. 18 is a perspective view (a) showing the front, plane, and right side of the first filter related to the gas purifier etc. according to the first embodiment of the present invention, and the part surrounded by the broken line in (a) It consists of a partial enlarged view (b) showing an enlarged view and a partial enlarged view (c) showing an enlarged portion surrounded by a broken line in (b).
  • FIG. 19 is a perspective view showing the front, top, and right side of the disassembled gas purification device according to the first embodiment of the present invention. It should be noted that dashed-dotted lines in the drawings indicate correspondence relationships between elements or portions in the arrangement, except for the case of cutting lines. The same applies to FIGS. 20 to 22 below.
  • the Greek letters ⁇ , ⁇ , ⁇ , and ⁇ in the figure also indicate correspondence between elements or portions in the arrangement.
  • FIG. 20 shows a front view (a) showing the front of the disassembled gas purification device according to the first embodiment of the present invention, and a view of the same device cut along the line gg in (a). It consists of a cross-sectional view (b) and a cross-sectional view (c) showing the device cut along line hh in (a).
  • FIG. 21 is a bottom view showing the bottom of the disassembled gas purifying device according to the first embodiment of the present invention, showing a portion (a) showing the first electrode and a portion (b) showing the first metal film layer. ), a portion (c) representing the first glass layer, and a portion (d) representing the second electrode, the first spacer, the second spacer and the first filter. Note that (a), (b) and (c) are also transparent views.
  • FIG. 22 is a bottom view showing the bottom of the disassembled gas purifier according to the first embodiment of the present invention, showing the second electrode, the first spacer, the second spacer, and the first filter (a). , a portion (b) representing the second glass layer, a portion (c) representing the second metal film layer, and a portion (d) representing the third electrode. Note that (b), (c) and (d) are also transparent views.
  • FIG. 23 is a perspective view (a) showing the front, top, and right side of a plurality of gas purifiers according to the first embodiment of the present invention in the process of being combined with each other, and a portion surrounded by a broken line in (a). and a perspective view (c) showing the front, plane and right side of a combination of a plurality of gas purifiers according to the first embodiment of the present invention. is.
  • FIG. 24 is a front view (a) showing the front of a combination of a plurality of gas purifiers according to the first embodiment of the present invention, and a partially enlarged view showing an enlarged portion surrounded by a broken line in (a). It is a diagram (b) emphasizing the connecting means, and a partial enlarged view showing an enlarged portion surrounded by a broken line in (a), partially transparent and emphasizing the second electrode. It consists of thing (c).
  • FIG. 25 is a rear view showing the rear side of the gas purification device according to the second embodiment of the present invention.
  • the cutting line for the sectional view of FIG. 26 is indicated by a one-dot chain line as line i-i1, and the cutting line for the perspective partial sectional views of FIGS. Shown as a line.
  • the direction in which the second electrode rotates is indicated by a dashed line with a white arrow.
  • FIGS. 28 and 29 below the same applies to FIGS. 28 and 29 below.
  • FIG. 26 is a cross-sectional view showing the gas purifying device according to the second embodiment of the present invention cut along line i-i1 in FIG.
  • FIG. 27 is an operation diagram showing the operation of the gas purification device according to the second embodiment of the present invention.
  • the direction in which ultraviolet rays travel is indicated by a dashed line with a white arrow.
  • FIG. 28 is a perspective view showing the back, left side and top of the gas purification device according to the second embodiment of the present invention.
  • FIG. 29 is a perspective partial cross-sectional view showing the back, left side and top of the gas purifier according to the second embodiment of the present invention cut along line i-i2 in FIGS. 25 and 28.
  • FIG. 29 is a perspective partial cross-sectional view showing the back, left side and top of the gas purifier according to the second embodiment of the present invention cut along line i-i2 in FIGS. 25 and 28.
  • FIG. 30 is a perspective partial cross-sectional view showing the front, left side and top of the gas purifier according to the second embodiment of the present invention cut along line i-i2 in FIGS. 25 and 28.
  • FIG. 30 is a perspective partial cross-sectional view showing the front, left side and top of the gas purifier according to the second embodiment of the present invention cut along line i-i2 in FIGS. 25 and 28.
  • Fig. 31 is a perspective view showing the front, right side and bottom of a self-propelled gas purifier according to the third embodiment of the present invention using the gas purifier according to the second embodiment of the present invention.
  • the cutting line for FIG. 32 which is a perspective partial cross-sectional view, is shown as the jj line by the dashed-dotted line.
  • FIG. 32 is a front view of the self-propelled gas purifying device according to the third embodiment of the present invention using the gas purifying device according to the second embodiment of the present invention, cut along the jj line in FIG. , a perspective partial cross-sectional view showing the right side and the bottom.
  • FIG. 33 shows a front view (a) showing the front of a solid purification device according to a fifth embodiment of the present invention using a gas activation device according to the fourth embodiment of the present invention, and a rear view of the same solid purification device. It consists of a rear view (b) shown.
  • FIG. 34 is a perspective view (a) showing the back, bottom and left side of a solid purifier according to the fifth embodiment of the present invention using the gas activator according to the fourth embodiment of the present invention, and and a perspective view (b) showing the front, top, and right side of the purifier.
  • FIG. 35 is a perspective view showing the front, top and right side of an exploded solid purification device according to a fifth embodiment of the present invention that utilizes the gas activation device according to the fourth embodiment of the present invention.
  • FIG. 36 is a perspective view showing the back, right side and bottom of an exploded solid purification device according to the fifth embodiment of the present invention that utilizes the gas activation device according to the fourth embodiment of the present invention.
  • FIG. 37 is a front, right side and bottom perspective view of a combination of a solids purification device and a closed vessel according to a fifth embodiment of the present invention utilizing a gas activation device according to the fourth embodiment of the present invention; .
  • a part of the sealed container is shown through to show the state of the inside of the sealed container.
  • FIG. 38 the opening and closing of the door of the sealed container is indicated by a dashed line with a white arrow.
  • FIG. 38 is an operation diagram showing the operation of the combination of the solid purifier and closed container according to the fifth embodiment of the present invention using the gas activation apparatus according to the fourth embodiment of the present invention.
  • FIG. 39 shows the front, right side and right side of the air conditioning purification device according to the sixth embodiment of the present invention using the gas purification device according to the first embodiment of the present invention cut along a plane perpendicular to the horizontal plane. It consists of a perspective cross-sectional view (a) showing the bottom surface and a partially enlarged view (b) showing an enlarged portion surrounded by a broken line in (a).
  • FIG. 40 is a front and plan view of a gas purifier according to the first embodiment of the present invention, which uses the plasma generator according to the eighth embodiment of the present invention instead of the plasma generator according to the first embodiment of the present invention.
  • the cutting line for the perspective cross-sectional view (b) and the cross-sectional view (c) is indicated by a dashed dotted line as a kk line, and the same gas purification device
  • FIG. 41 is a working diagram (a) showing the action of the plasma generator according to the first embodiment of the present invention in a more preferred mode, and shows the action of the same device for comparison with the more preferred mode.
  • Operation diagram (b) and. (a) shows that the more preferable aspect of the plasma generator according to the first embodiment of the present invention changes from a state (a1) to another state (a2) by receiving heat.
  • (b) shows that the object to be compared with the more preferred embodiment of the same device changes from a state (b1) to another state (b2) by receiving heat.
  • broken lines indicate correspondence between layers between (a1) and (a2) and between (b1) and (b2).
  • FIG. 42 is a partially enlarged view (a), (b), (c) and ( d) and (e).
  • (a) is a combination of an enlarged part (a1) and another enlarged part (a2), and (b) to (e) are also according to this example.
  • FIG. 43 is a partial enlarged view (a), (b), (c) and ( d) and (e).
  • (a) is a combination of an enlarged part (a1) and another enlarged part (a2), and (b) to (e) are also according to this example.
  • the gas purifier 1 is for obtaining a purified gas by putting indoor air or other gas G to be purified into the inside, purifying it, and then letting it out. That is, the gas purification device 1 has a gas purification function.
  • gas G to be purified may include not only the gas itself to be purified, but also the gas that has actually been purified and the gas in the state between these. shall be This also applies to the drawings.
  • Gases to be purified include, for example, indoor air, exhaled air from infectious patients in oxygen masks or respirators, refrigerant gas from air conditioners, and exhaust gas from internal combustion engines.
  • the "indoors” referred to in this specification include the indoors of houses, hospitals, schools, shops, offices, factories, warehouses and other buildings fixed on the land, as well as automobiles, trolleybuses, streetcars, and railway vehicles. , vessels, craft and other equipment occupied by persons.
  • automobile as used herein includes, for example, buses, taxis, other commercial vehicles, and private automobiles
  • aircraft as used herein includes, for example, airplanes, rotorcraft, gliders, and airships.
  • the term "railway vehicle” used herein includes monorails, automatic guide rail passenger transport systems, and linear motor cars.
  • the gas purifier 1 is generally flat, and preferably has a size that can be placed on a person's palm, such as a harmonica. However, the gas purification device 1 may be cylindrical as a whole.
  • the size of the gas purifying device 1 is as follows.
  • the width of the gas purification device 1 is preferably 40-160 mm, more preferably 60-140 mm, and even more preferably 80-120 mm.
  • the height of the gas purification device 1 is preferably 4-16 mm, more preferably 6-14 mm, and even more preferably 8-12 mm.
  • the depth of the gas purification device 1 is preferably 20-80 mm, more preferably 30-70 mm, and even more preferably 40-60 mm.
  • the weight of the gas purification device 1 is preferably 5-35 g, more preferably 10-30 g, and even more preferably 15-25 g.
  • the gas purifying device 1 is small and lightweight, it can be easily attached to an air conditioner that adjusts the air in the room while circulating it, either before or after the installation. and have an air purification function. Furthermore, it can be attached to a self-propelled device to expand its functionality. However, the gas purifying device 1 and a blower for blowing air along the flow path can be combined to form a gas purifying device having both the gas purifying function and the blowing function.
  • the gas purifier 1 includes at least a plasma generator 10 and a flow path 20.
  • the gas purifier 1 preferably further includes, for example, a filter 30 , but may not include the filter 30 .
  • the plasma generator 10 is for forming a part of the gas purifier 1 as a device for generating plasma P. As shown in FIG.
  • the plasma generator 10 consists of a combination of an electrode 11, a glass layer 12 and a metal film layer 13. That is, the plasma generator 10 includes, for example, a pair of electrodes E consisting of one electrode 11 and another electrode 11 paired therewith, a glass layer 12 and a metal film layer 13 .
  • the plasma generator 10 comprises a first pair of electrodes E1, a second pair of electrodes E2, a pair of glass layers 12, 12, and a pair of metal film layers 13, 13. is preferred.
  • the electrode 11 is made of an electric conductor, is arranged with a distance therebetween, and forms a pair of electrodes E together with another electrode 11 forming a pair therewith.
  • a pair of electrodes E discharges when a predetermined voltage is applied, generating plasma P in the space S between them.
  • the electrode 11 is preferably made of, for example, a metal, but may also be made of stainless steel (SUS) or other alloys.
  • SUS stainless steel
  • one electrode 11 and the other electrode 11 paired therewith are filled with an insulating gas (hereinafter simply referred to as "gas") in a space S between them.
  • gas an insulating gas
  • original gas it is sometimes called the "original gas”.
  • the plasma P is generated by ionizing atoms or molecules forming the gas, or by ionizing the molecules forming the gas through dissociation or simultaneously with the dissociation.
  • the plasma P includes atoms dissociated from the molecules constituting the gas that remain neutral without being ionized. It also includes anions generated by colliding with atoms or molecules that remain neutral without ionization among the atoms or molecules that make up , atoms or molecules excited by the same collision, etc.
  • the plasma P is preferably generated under atmospheric pressure, and more preferably under normal temperature. However, the plasma P may be generated under reduced pressure or under high temperature.
  • plasma P When plasma P is generated, in the process of recombination of ionized electrons with ionized atoms or molecules or the process of excited electrons transitioning to a lower energy level, in addition to emitting electromagnetic waves, gases other than the original gas are emitted. , and phenomena such as the generation of new active substances (hereinafter sometimes referred to as "new gases") are observed.
  • the electromagnetic waves emitted by the plasma P include, for example, ultraviolet rays UV in the following cases.
  • the air is a gas containing nitrogen (N 2 ) .
  • the ultraviolet ray UV emitted by the original gas is the wavelength of near ultraviolet rays is in the range of 300 to 380 nm and the peak wavelength is around 337 nm. Also, this is true regardless of the presence of other gases such as oxygen (O 2 ).
  • the term "ultraviolet rays" in particular, it may be referred to as near-ultraviolet rays.
  • the advantage of using near-ultraviolet rays among ultraviolet rays will be described in the section on the action of the plasma generator 10 and the section on the action of the gas purifier 1, respectively.
  • the source gas is a noble gas such as helium (He), neon (Ne), argon (Ar), krypton (Kr) or xenon (Xe), or any of these Ultraviolet rays are generated even if it contains Furthermore, even when the original gas contains a halogen gas, i.e. one of fluorine ( F2 ), chlorine ( Cl2 ) or bromine ( Br2 ), and a noble gas, the ultraviolet UV Occur.
  • a noble gas such as helium (He), neon (Ne), argon (Ar), krypton (Kr) or xenon (Xe)
  • a new gas is generated, for example, in the following cases.
  • atoms dissociated from the original gas molecules combine with the original gas molecules.
  • oxygen atoms (O) and oxygen molecules (O 2 ) combine to form ozone (O 3 ) is produced.
  • Atoms (Ar) among the atoms of the original gas, those in the excited state and those in the ground state are combined.
  • Atoms (Ar) combine to form argon excimers (Ar 2 ).
  • the original gas is a gas containing one gas and another gas, the atoms of the one gas in an excited state and the atoms dissociated from the molecules of the other gas are bonded.
  • an argon atom (Ar) and a fluorine atom (F) combine to form an argon fluoride exciplex (ArF).
  • the nitrogen plasma in the air emits ultraviolet rays UV
  • the oxygen (O 2 ) in the air emits ozone. Phenomena such as generation of (O 3 ) are observed.
  • various active oxygens such as oxygen atoms, superoxide anions which are negative ions of oxygen, and singlet oxygen which is excited oxygen molecules are generated.
  • the discharge between the pair of electrodes E is a dielectric barrier discharge performed through a dielectric.
  • dielectric barrier discharge the plasma P can be generated stably, and consumption of the electrode 11 can be suppressed.
  • the dielectric barrier discharge is preferably by AC voltage.
  • the waveform indicated by the AC voltage is preferably a sine wave among sine waves, rectangular waves and triangular waves.
  • the amplitude of the AC voltage that is, the maximum value of the voltage, is preferably 6-10 KV.
  • the frequency indicated by the AC voltage is preferably 5 to 25 KHz.
  • a power supply for applying the AC voltage as described above to the pair of electrodes E for example, a power supply manufactured by Logy Electronics Co., Ltd. (model name: LHV-05AC, LHV-10AC, LHV-12AC, LHV-13AC) is used. can do. Furthermore, a transformer for converting the voltage obtained from the power supply into a predetermined voltage can also be used together.
  • the AC voltage for dielectric layer barrier discharge may be obtained by converting a DC voltage obtained from a DC power source.
  • a power source for adding to E for example, a power source manufactured by Logy Electronics Co., Ltd. (type names: LHV-05DC, LHV-09K-12) can be used.
  • the electrode 11 preferably further includes the third electrode 11c.
  • the electrode 11 may include a fourth electrode 11d, a fifth electrode (not shown), a sixth electrode (not shown), a seventh electrode (not shown), and so on.
  • the pair of electrodes E is, for example, composed of a first electrode 11a and a second electrode 11b, or composed of a second electrode 11b and a third electrode 11c.
  • the first pair of electrodes E1 is composed of the first electrode 11a and the second electrode 11b
  • the third electrode 11c and the second electrode 11b are composed of the third electrode 11c and the second electrode 11b.
  • Two pairs of electrodes E2 are configured.
  • the first electrode 11a is for forming the first pair of electrodes E1 together with the second electrode 11b.
  • the first electrode 11a is preferably made of a metal with high thermal conductivity, such as aluminum (Al), copper (Cu), silver (Ag), tungsten (W), or gold (Au). It is more preferably made of any one, and among these, it is even more preferably made of aluminum, copper or silver.
  • a metal with high thermal conductivity such as aluminum (Al), copper (Cu), silver (Ag), tungsten (W), or gold (Au). It is more preferably made of any one, and among these, it is even more preferably made of aluminum, copper or silver.
  • the first electrode 11a may be made of an alloy containing one selected from the above metals as a main component, or may be made of stainless steel (SUS).
  • the shape of the first electrode 11a is as follows. 1(a), 3(a), 4, 5, 8(a), 8(b), 20, 21(a), etc. refer.
  • the first electrode 11a consists of a solid solid body having a pair of flat surfaces on its front and back sides, or a pair of curved surfaces on its front and back sides or on its inside. It consists of what it has on the outside.
  • the first electrode 11a is preferably plate-shaped or annular, more preferably plate-shaped.
  • the planar figure of the plate-shaped object consisting of a circle, polygon, or other closed curve that does not intersect with itself is arranged parallel to the direction intersecting with the planar figure. preferably consists of a solid solid or a similar solid that can be obtained by moving the It is more preferable that it consists of a solid solid body obtained by moving or a solid body similar thereto.
  • the first electrode 11a is ring-shaped
  • a rectangular plane figure among the ring-shaped ones is on the same plane as the plane figure, parallel to one side of the rectangle
  • the plane figure is a solid solid or a similar solid obtained by rotating about a straight line that does not intersect the plane figure
  • the plane figure is a rectangle having long and short sides. From solid or similar solids obtained by rotating 360 degrees around a straight line that is on the same plane as the plane figure, parallel to the long side of the rectangle, and does not intersect the plane figure It is more preferable to be
  • FIG. 8A is referred to as an example of such an annular first electrode 11a.
  • the thickness of the first electrode 11a is preferably 0.2-0.8 mm, more preferably 0.3-0.7 mm, and even more preferably 0.4-0.6 mm.
  • the dimensions of the first electrode 11a other than the thickness are as follows.
  • the width of the first electrode 11a is preferably 34-136 mm, more preferably 51-119 mm, and even more preferably 68-102 mm.
  • the depth of the first electrode 11a is preferably 20-80 mm, more preferably 30-70 mm, and even more preferably 40-60 mm.
  • FIG. 1(a), FIG. 3(a), etc. will be referred to as an example for explanation.
  • the first electrode 11a is arranged with a distance from the second electrode 11b.
  • a first glass layer 12a and a first metal film layer 13a are respectively arranged between the first electrode 11a and the second electrode 11b.
  • the surface of the first electrode 11a facing the second electrode 11b is in contact with the first metal film layer 13a immediately or via the first electrode-side conductive adhesive layer 14a1. From the viewpoint of facilitating electrical connection from the outside of the gas purifier 1, at least part or all of the surface of the first electrode 11a on the side opposite to the side facing the second electrode 11b is Exposure is preferred.
  • an object immediately touches another object means a relationship in which at least a part of an object and at least a part of another object are arranged without a distance between them.
  • An object is arranged with respect to another object so that For example, in the case of ⁇ an object immediately touches another object,'' it is prohibited that there is a distance between a part other than at least a part of the object and a part other than at least a part of the other object. can't Also, in a similar case, it is not prohibited that the other object does not have a part corresponding to a part other than at least a part of the certain object. same as below.
  • the surface of the first electrode 11a facing the second electrode 11b has a first portion 11a1 that is in contact with the first metal film layer 13a, and a second portion 11a2 that is in contact with the first filter 30a. and more preferably a third portion 11a3, which is an exposed portion located between the first portion 11a1 and the second portion 11a2.
  • the surface of the first electrode 11a facing the second electrode 11b is the fourth portion which is the portion in contact with the first spacer 40a.
  • a fifth portion 11a5, which is a portion in contact with 11a4 and the second spacer 40b, may be further provided.
  • the fourth portion 11a4 and the fifth portion 11a5 are preferably arranged with the first portion 11a1, the second portion 11a2, and the third portion 11a3 interposed therebetween, and the width direction of the first electrode 11a It is more preferable to be arranged at both ends of.
  • the second electrode 11b together with the first electrode 11a, constitutes the first pair of electrodes E1 of the electrodes 11, and is used when the plasma generator 10 includes the third electrode 11c. In addition, it is also for forming the second pair of electrodes E2 together with the third electrode 11c.
  • the second electrode 11b is preferably made of a metal that acts as a catalyst as it is or when its surface is oxidized (hereinafter sometimes simply referred to as "catalyst metal").
  • catalyst metal More preferred are those that are activated as catalysts upon exposure to ultraviolet rays or heat.
  • the catalyst metal an element belonging to Groups 3 to 11 in the periodic table and belonging to Period 4 to Period 6 in the periodic table (hereinafter referred to as "specific transition metal") is preferable, and titanium (Ti), manganese (Mn), iron (Fe), cobalt (Co), nickel (Ni), copper (Cu), rutheum (Ru), rhodium (Rh), palladium (Pd), tungsten (W) or platinum (Pt) is more preferred, and titanium is particularly preferred.
  • the surface of the second electrode 11b is oxidized to become a surface made of titanium oxide (TiO 2 ), and the second electrode 11b receives ultraviolet rays and photocatalysts. It will also work as
  • the second electrode 11b may be made of an alloy whose main component is one selected from the specific transition metals described above.
  • FIGS. 1A, 3A, 8A, 8B, 9, etc. will be referred to as examples for explanation.
  • the second electrode 11b is rod-shaped, male-thread-shaped, or spiral-shaped, and among these, the male-thread-shaped one is preferable.
  • 9(a), 8(a), 8(b), etc. as an example of a rod-shaped second electrode 11b, and an example of a male screw-shaped second electrode 11b is shown in FIG. ), FIG. 3(a), etc., and FIG. 9(b) as an example of a spiral shape.
  • the second electrode 11b when the second electrode 11b has a male screw shape, the shape in which grooves and protrusions are alternately formed can increase the amount of plasma emission and reduce the pressure loss.
  • the second electrode 11b can be screwed to the first spacer 40a and the second spacer 40b, which facilitates assembly, replacement, maintenance, and the like.
  • the second electrode 11b has a male screw shape
  • a metal or its oxide acting as a catalyst is added to the groove between the screw threads. It is also preferred to form a layer of the catalyst by vapor deposition or coating.
  • the second electrode 11b is composed of a male-threaded electrode body 11b1 and a catalyst layer 11b2 disposed between the threads.
  • FIG. 9E is referred to as an example of such a second electrode 11b.
  • the metal or its oxide that acts as a catalyst is preferably activated by ultraviolet rays or heat, and can be selected, for example, from specific transition metals or oxides thereof.
  • a specific transition metal acts as a catalyst, it adsorbs after dissociating the target molecular bond (hereinafter sometimes referred to as “dissociative adsorption type case”) and adsorbs without dissociating the target molecular bond.
  • dissociative adsorption type case There is a case (hereinafter sometimes referred to as "case of non-dissociative adsorption type”) and a.
  • transition metals those belonging to the 4th period and falling under any of Groups 3 to 8, namely scandium (Sc), titanium (Ti), vanadium (V), chromium (Cr), manganese (Mn), iron (Fe), those belonging to period 5 and belonging to groups 3 to 7, i.e.
  • Y yttrium
  • Zr zirconium
  • Nb niobium
  • Mo molybdenum
  • Tc technetium
  • La lanthanum
  • Hf hafnium
  • Ta tantalum
  • W tungsten
  • transition metals those belonging to the 4th period and belonging to any of the 9th to 10th groups, that is, cobalt (Co), nickel (Ni), belonging to the 5th period, from the 8th group Those belonging to any of Groups 11 to 11, i.e., ruthenium (Ru), rhodium (Rh), palladium (Rd), belonging to Period 6 and belonging to any of Groups 7 to 11 That is, rhenium (Re), osmium (Os), iridium (Ir), and platinum (Pt) tend to exhibit non-dissociative adsorption type cases in acting as catalysts.
  • the second electrode 11b is made of platinum and the gas to be decomposed is carbon dioxide gas (CO 2 ) will be described as follows.
  • Whether a specific transition metal exhibits a dissociative adsorption type or a non-dissociative adsorption type when acting as a catalyst depends on the state of the surface of the specific transition metal, the type and concentration of the gas to be decomposed, and the reaction. It may vary depending on the temperature to be used, the conditions for generating plasma, and the like. In any case, it is necessary and important to select the most suitable specific transition metal as a catalyst according to the purpose.
  • the second electrode 11b is made of a rod-shaped metal, and that a wire-shaped metal or its oxide acting as a catalyst is spirally wound. At this time, the second electrode 11b is composed of a rod-shaped electrode main body 11b1 and a spiral catalyst layer 11b2 disposed therearound.
  • FIG. 9C is referred to as an example of such a second electrode 11b.
  • the second electrode 11b may be made of a rod-shaped metal and covered with a ring-shaped metal or its oxide that acts as a catalyst. At this time, the second electrode 11b is composed of a rod-shaped electrode main body 11b1 and an annular catalyst layer 11b2 disposed therearound.
  • FIG. 9D is referred to as an example of such a second electrode 11b.
  • the diameter of the second electrode 11b is preferably 1-5 mm, more preferably 2-4 mm.
  • the length of the second electrode 11b is preferably 40-160 mm, more preferably 60-140 mm, and even more preferably 80-120 mm.
  • FIG. 1(a), FIG. 3(a), etc. will be referred to as an example for explanation.
  • the second electrode 11b is arranged with a distance from the first electrode 11a.
  • a first glass layer 12a and a first metal film layer 13a are respectively arranged between the second electrode 11b and the first electrode 11a.
  • the second electrode 11b is arranged with a space between it and the first glass layer 12a.
  • the relationship between the second electrode 11b and other elements is as follows.
  • the second electrode 11b is arranged with a distance from the third electrode 11c.
  • a second glass layer 12b and a second metal film layer 13b are respectively arranged between the second electrode 11b and the third electrode 11c.
  • the second electrode 11b is arranged with a space between it and the second glass layer 12b.
  • the third electrode 11c is for constituting the second pair of electrodes E2 together with the second electrode 11b.
  • the plasma generator 10 can generate a larger amount of plasma P by further including the second pair of electrodes E2 in addition to the first pair of electrodes E1.
  • the amount of virus that can be inactivated in 1 can be further increased.
  • the plasma generator 10 may not include the third electrode 11c.
  • FIGS. 8A and 8B will be referred to as an example of the plasma generator 10 without the third electrode 11c.
  • the third electrode 11c is preferably made of a metal with high thermal conductivity, such as aluminum (Al), copper (Cu), silver (Ag), tungsten (W), or gold (Au). It is more preferably made of any one, and among these, it is even more preferably made of aluminum, copper or silver.
  • a metal with high thermal conductivity such as aluminum (Al), copper (Cu), silver (Ag), tungsten (W), or gold (Au). It is more preferably made of any one, and among these, it is even more preferably made of aluminum, copper or silver.
  • the third electrode 11c may be made of an alloy containing one selected from the above metals as a main component, or may be made of stainless steel (SUS).
  • FIGS. 1A, 3A, 4, 5, 20, 22D, etc. will be referred to as examples for explanation.
  • the third electrode 11c is plate-shaped. At this time, it is preferable that the third electrode 11c is congruent with that of the first electrode 11a on the two widest surfaces among the six surfaces.
  • FIGS. 1A, 3A, 4, 5, 20, 22D and the like are referred to as examples of such a third electrode 11c.
  • the thickness of the third electrode 11c is preferably 0.2-0.8 mm, more preferably 0.3-0.7 mm, and even more preferably 0.4-0.6 mm.
  • the dimensions of the third electrode 11c other than the thickness are as follows.
  • the width of the third electrode 11c is preferably 34-136 mm, more preferably 51-119 mm, and even more preferably 68-102 mm.
  • the depth of the third electrode 11c is preferably 20-80 mm, more preferably 30-70 mm, and even more preferably 40-60 mm.
  • FIG. 1(a), FIG. 3(a), etc. will be referred to as an example for explanation.
  • the third electrode 11c is arranged with a distance from the second electrode 11b.
  • a second glass layer 12b and a second metal film layer 13b are respectively arranged between the third electrode 11c and the second electrode 11b.
  • the surface of the third electrode 11c facing the second electrode 11b is in contact with the second metal film layer 13b immediately or via the third electrode-side conductive adhesive layer 14a2.
  • the surface of the third electrode 11c on the side opposite to the side facing the second electrode 11b is preferably exposed from the viewpoint of facilitating electrical connection from the outside of the gas purifier 1. .
  • the surface of the third electrode 11c facing the second electrode 11b has a first portion 11c1 that is in contact with the second metal film layer 13b, and a second portion 11c2 that is in contact with the first filter 30a. and more preferably a third portion 11c3, which is an exposed portion located between the first portion 11c1 and the second portion 11c2.
  • the surface of the third electrode 11c facing the second electrode 11b is the fourth portion which is the portion in contact with the first spacer 40a.
  • a fifth portion 11c5, which is a portion in contact with 11c4 and the second spacer 40b, may be further provided.
  • the fourth portion 11c4 and the fifth portion 11c5 are arranged with the first portion 11c1, the second portion 11c2 and the third portion 11c3 sandwiched therebetween, and the width direction of the third electrode 11c It is more preferable to be arranged at both ends of.
  • the fourth electrode 11d is for forming a third pair of electrodes E3 together with the first electrode 11a among the electrodes 11, and is used when the plasma generator 10 includes the third electrode 11c. In addition, it is also for forming a fourth pair of electrodes E4 together with the third electrode 11c.
  • FIG. 13(a) is referred to as an example for explanation.
  • the fourth electrode 11d is arranged with a space between each of the first glass layer 12a, the second electrode 11b, and the second glass layer 12b, and sandwiches the second electrode 11b between itself and the first glass layer 12a. It is arranged without sandwiching the second electrode 11b between the second glass layer 12b and the second glass layer 12b.
  • the remainder of the fourth electrode 11d is the same as that of the second electrode 11b, so the explanation given for the second electrode 11b applies mutatis mutandis to the fourth electrode 11d.
  • a fifth electrode (not shown), a sixth electrode (not shown), a seventh electrode (not shown), etc. are the same as the fourth electrode 11d.
  • the amount of plasma P to be generated can be increased.
  • the glass layer 12 is disposed between the pair of electrodes E as a dielectric layer made of glass, which is a dielectric, and is arranged between one electrode 11 of the pair of electrodes E and the metal film layer 13 (the conductive adhesive layer 14).
  • the conductive adhesive layer 14 is in contact with the metal film layer 13 to perform dielectric barrier discharge, and the metal film layer 13 is used as a layer that transmits ultraviolet rays and other electromagnetic waves.
  • it is for constructing a reflecting mirror M that reflects ultraviolet rays and other electromagnetic waves.
  • the glass layer 12 prevents the metal film layer 13 from coming into contact with oxygen in the gas, and the surface of the metal film layer 13 is oxidized. By preventing this, the metal film layer 13 maintains its characteristics so that it can reflect ultraviolet rays and other electromagnetic waves for a long period of time.
  • the glass layer 12 is preferably made of glass having properties of transmitting ultraviolet rays, and more preferably made of glass having high ultraviolet transmittance, such as quartz glass or borosilicate glass. is even more preferred.
  • borosilicate glass is preferable next to quartz glass from the viewpoint of high ultraviolet transmittance and low coefficient of thermal expansion. Borosilicate glass is also preferable because it is excellent in mass productivity.
  • borosilicate glasses in addition to containing silicon dioxide (SiO 2 ) and boron oxide (B 2 O 3 ), those further containing sodium oxide (Na 2 O) and aluminum oxide (Al 2 O 3 ) are more preferable. .
  • the thickness of the glass layer 12 is preferably 0.4 to 1.6 mm, more preferably 0.6 to 1.4 mm, even more preferably 0.8 to 1.2 mm, particularly 1.0 mm is most preferred.
  • the glass layer 12 for example, a slide glass used for observation together with an optical microscope can be used.
  • the glass layer 12 made of a slide glass is excellent in terms of ultraviolet transmittance and coefficient of thermal expansion, and can be easily obtained from the market. To enable a stable supply at a low cost.
  • the glass layer 12 includes the first glass layer 12a and preferably the second glass layer 12b.
  • the first glass layer 12a is for constituting the first reflecting mirror M1 together with the first metal film layer 13a.
  • the shape of the first glass layer 12a is as follows. 1(a), 3(a), 4, 5, 8(a), 8(b), 20, 21(c), etc. refer.
  • the first glass layer 12a is selected to be plate-shaped or ring-shaped depending on the shape of the first electrode 11a.
  • 1(a), 3(a), 4, 5, 8(b), 20 and 21(c) are examples of the first glass layer 12a having a plate shape. etc., and FIG. 8(a) as an example of an annular shape.
  • the dimensions other than the thickness of the first glass layer 12a are as follows.
  • the width of the first glass layer 12a is preferably 32-128 mm, more preferably 48-112 mm, and even more preferably 64-96 mm.
  • the depth of the first glass layer 12a is preferably 10-40 mm, more preferably 15-35 mm, and even more preferably 20-30 mm.
  • FIG. 1(a), FIG. 3(a), etc. will be referred to as an example for explanation.
  • the first glass layer 12a is arranged between the first electrode 11a and the second electrode 11b.
  • the first glass layer 12a is arranged with a space between it and the second electrode 11b.
  • the surface of the first glass layer 12a facing the first electrode 11a is in contact with the first metal film layer 13a immediately or via the first glass layer side conductive adhesive layer 14b1.
  • a surface of the first glass layer 12a facing the second electrode 11b is exposed.
  • the distance between the first glass layer 12a and the second electrode 11b is preferably 0.3-0.9 mm, more preferably 0.4-0.8 mm, and more preferably 0.5-0. 0.7 mm is even more preferred, and 0.6 mm is most preferred.
  • Space S is a space in which plasma P is generated.
  • the first glass layer 12a preferably covers the entire surface of the first metal film layer 13a facing the second electrode 11b.
  • the surface of the first glass layer 12a facing the second electrode 11b has a first portion 12a1 which is an exposed portion, a second portion 12a2 which is a portion in contact with the first spacer 40a, and a second spacer 40a.
  • a third portion 12a3, which is a portion in contact with 40b, is preferably provided.
  • the second glass layer 12b is for constituting the second reflecting mirror M2 together with the second metal film layer 13b.
  • FIGS. 1A, 3A, 4, 5, 20, 22B, etc. will be referred to as examples for explanation.
  • the second glass layer 12b is plate-shaped. At this time, it is preferable that the second glass layer 12b is congruent with that of the first glass layer 12a on the two widest surfaces among the six surfaces.
  • FIGS. 1A, 3A, 4, 5, 20, 22B and the like are referred to as examples of such a second glass layer 12b.
  • the dimensions of the second glass layer 12b other than the thickness are as follows.
  • the width of the second glass layer 12b is preferably 32-128 mm, more preferably 48-112 mm, and even more preferably 64-96 mm.
  • the depth of the second glass layer 12b is preferably 10-40 mm, more preferably 15-35 mm, and even more preferably 20-30 mm.
  • FIG. 1(a), FIG. 3(a), etc. will be referred to as an example for explanation.
  • the second glass layer 12b is arranged between the third electrode 11c and the second electrode 11b.
  • the second glass layer 12b is arranged with a space between it and the second electrode 11b.
  • the surface of the second glass layer 12b facing the third electrode 11c is in contact with the second metal film layer 13b immediately or via the second glass layer side conductive adhesive layer 14b2.
  • the surface of the second glass layer 12b facing the second electrode 11b is exposed.
  • the distance between the second glass layer 12b and the second electrode 11b is preferably 0.3 to 0.9 mm, more preferably 0.4 to 0.8 mm, and more preferably 0.5 to 0.5 mm. 0.7 mm is even more preferred, and 0.6 mm is most preferred.
  • Space S is a space in which plasma P is generated.
  • the second glass layer 12b preferably covers the entire surface of the second metal film layer 13b facing the second electrode 11b.
  • the surface of the second glass layer 12b facing the second electrode 11b has a first portion 12b1 which is an exposed portion, a second portion 12b2 which is a portion in contact with the first spacer 40a, and a second spacer 40a.
  • a third portion 12b3, which is a portion in contact with 40b, is preferably provided.
  • the metal film layer 13 is arranged between one electrode 11 of the pair of electrodes E and the glass layer 12 as a layer made of a metal film, and is in contact with them directly or via the conductive adhesive layer 14. Thus, electric conduction is performed from one electrode 11 of the pair of electrodes E to the glass layer 12, and together with the glass layer 12, a reflecting mirror M that reflects ultraviolet rays and other electromagnetic waves is formed. be.
  • the metal film layer 13 is made of a metal that has the property of reflecting ultraviolet rays.
  • the metal film layer 13 may be made of a metal having properties of reflecting not only ultraviolet rays but also visible rays, infrared rays and other electromagnetic waves other than ultraviolet rays, and such a thing may be used. preferable.
  • the metal film layer 13 is preferably made of a metal having a high ultraviolet reflectance among metals having properties of reflecting ultraviolet rays, such as aluminum (Al), chromium (Cr), iron (Fe), and nickel. (Ni), rhodium (Rh), silver (Ag) or platinum (Pt), more preferably aluminum or silver, and aluminum is most preferred.
  • a metal having a high ultraviolet reflectance among metals having properties of reflecting ultraviolet rays such as aluminum (Al), chromium (Cr), iron (Fe), and nickel. (Ni), rhodium (Rh), silver (Ag) or platinum (Pt), more preferably aluminum or silver, and aluminum is most preferred.
  • Near-ultraviolet rays include ultraviolet A waves (UV-A. Ultraviolet rays with a wavelength in the range of 315 to 400 nm) and ultraviolet B waves (UV-B. Ultraviolet rays with a wavelength in the range of 280 to 315 nm). It is further classified into ultraviolet C waves (UV-C, which refers to ultraviolet rays with a wavelength of 200 to 280 nm).
  • UV-C ultraviolet C waves
  • the near-ultraviolet rays emitted by plasma of nitrogen (N 2 ) belong to the ultraviolet A wave assuming that the wavelength is in the range of 300 to 380 nm.
  • the peak wavelength of the near-ultraviolet rays emitted from the plasma is around 337 nm.
  • Silver exhibits high reflectance in a part of the range of ultraviolet A waves, particularly in a wavelength of 380 nm, and aluminum exhibits high reflectance over the entire range of ultraviolet A waves. .
  • the metal film layer 13 is made of aluminum. or more preferably silver, and most preferably aluminum.
  • the wavelength range including the wavelength has a high reflectance. can be selected to constitute the metal film layer 13, and it is preferable to do so.
  • the metal film layer 13 may be made of a foil of a metal having a property of reflecting ultraviolet rays, preferably a metal having a high ultraviolet reflectance. It may consist of a deposited film formed by depositing a metal on one electrode 11 of the pair of electrodes E or on the glass layer 12 . As the vapor deposition method, sputtering, ion plating, and other physical vapor deposition methods can be used in addition to the vacuum vapor deposition method.
  • the metal film layer 13 is an electrodeposited film formed by electrodepositing a metal having a property of reflecting ultraviolet rays, preferably a metal having a high ultraviolet reflectance, onto one of the electrodes 11 . may
  • the metal film layer 13 may be configured by adhering an aluminum or silver foil to one of the pair of electrodes E or the glass layer 12, for example. may be configured by vapor-depositing.
  • the metal film layer 13 is not limited to having a thickness of 0.2 mm or less, and is arranged between one electrode 11 of the pair of electrodes E and the glass layer 12 to contact both of them, preferably preferably has a necessary and sufficient thickness to adhere to both of them. That is, the metal film layer 13 is selected to have an appropriate thickness according to the distance between the electrode 11 of the pair of electrodes E and the glass layer 12 . At this time, the metal film layer 13 may consist of one metal film, or may consist of a combination of two or more metal films.
  • the metal film layer 13 is preferably in contact with both the electrode 11 of the pair of electrodes E and the glass layer 12, and more preferably in close contact with both of them. In this case, the metal film layer 13 can conduct electricity more efficiently from one electrode 11 of the pair of electrodes E to the glass layer 12 .
  • the metal film layer 13 may be in contact with one electrode 11 of the pair of electrodes E via the conductive adhesive layer 14, assuming that the metal film layer 13 is in close contact with one electrode 11 of the one electrode E. , the metal film layer 13 may be in contact with the glass layer 12 via the conductive adhesive layer 14 as a layer in close contact with the glass layer 12 .
  • the metal film layer 13 may be in contact with one electrode 11 of one electrode E via the conductive adhesive layer 14 and may be in immediate contact with the glass layer 12. While being in contact with one electrode 11 via the conductive adhesive layer 14 , the glass layer 12 and the conductive adhesive layer 14 may be in contact with each other.
  • the metal film layer 13 preferably includes the second metal film layer 13b.
  • the shape of the first metal film layer 13a is as follows. 1(a), 3(a), 4, 5, 8(a), 8(b), 20, 21(b), etc. refer.
  • the first metal film layer 13a is film-like and has a shape corresponding to the shape of the first electrode 11a. 1A, 3A, 4, 5, and 8B as examples of the shape of the first metal film layer 13a corresponding to the plate-like first electrode 11a. ), FIG. 20, FIG. 21(b), etc., and FIG. 8(a) as an example of a shape corresponding to the annular first electrode 11a.
  • FIG. 1(a), FIG. 3(a), etc. will be referred to as an example for explanation.
  • the first metal film layer 13a is arranged between the first electrode 11a and the first glass layer 12a, and is in contact with the first electrode 11a immediately or via the first electrode-side conductive adhesive layer 14a1. It comes into contact with the layer 12a immediately or via the first glass side conductive adhesive layer 14b1.
  • the first metal film layer 13a preferably covers part of the surface of the first electrode 11a facing the second electrode 11b. Moreover, it is preferable that the entire surface of the first metal film layer 13a facing the second electrode 11b or the third electrode 11c is covered with the first glass layer 12a.
  • the first metal film layer 13a may be a combination of two or more metal films, for example, a combination of the first electrode-side metal film 13a1 and the first glass layer-side metal film 13a2.
  • the first electrode-side metal film 13a1 is in contact with the first electrode 11a immediately or via the first electrode-side conductive adhesive layer 14a1, and the first glass layer-side metal film 13a2 is in contact with the first glass layer 12a immediately. Alternatively, they are in contact via the first glass layer side conductive adhesive layer 14b1.
  • the second metal film layer 13b is for forming the second reflecting mirror M2 together with the second glass layer 12b.
  • FIGS. 1A, 3A, 4, 5, 20, 22C, etc. will be referred to as examples for explanation.
  • the second metal film layer 13b is film-like and has a shape corresponding to the shape of the third electrode 11c.
  • FIGS. As an example of the second metal film layer 13b having a shape corresponding to the plate-like third electrode 11c, FIGS. ).
  • FIG. 1(a), FIG. 3(a), etc. will be referred to as an example for explanation.
  • the second metal film layer 13b is disposed between the third electrode 11c and the second glass layer 12b, and is in contact with the third electrode 11c immediately or via the third electrode-side conductive adhesive layer 14a2. It is in contact with the layer 12b immediately or via the second glass side conductive adhesive layer 14b2.
  • the second metal film layer 13b preferably covers part of the surface of the third electrode 11c facing the second electrode 11b. Moreover, it is preferable that the entire surface of the second metal film layer 13b facing the second electrode 11b or the first electrode 11a is covered with the second glass layer 12b.
  • the second metal film layer 13b may be a combination of two or more metal films, for example, a combination of the third electrode-side metal film 13b1 and the second glass layer-side metal film 13b2.
  • the third electrode side metal film 13b1 is in contact with the third electrode 11c immediately or via the third electrode side conductive adhesive layer 14a2, and the second glass layer side metal film 13b2 is in contact with the second glass layer 12b. Alternatively, they are in contact via the second glass layer side conductive adhesive layer 14b2.
  • the conductive adhesive layer 14 is disposed between one electrode 11 of the pair of electrodes E and the metal film layer 13 as a layer having conductivity in addition to adhesiveness. This is for increasing the electrical conductivity from one electrode 11 of the pair of electrodes E to the metal film layer 13 .
  • the conductive adhesive layer 14 is arranged between the glass layer 12 and the metal film layer 13 as a layer as described above. It is also for increasing electrical conductivity.
  • the conductive adhesive layer 14 is composed of an adhesive layer having viscoelasticity as an adhesive layer and a large number of conductive particles contained in the adhesive layer as an electrically conductive adhesive layer. is preferred.
  • the adhesive layer is preferably made of a polymeric compound having adhesiveness and transparency, for example, an acrylic acid-based copolymer. is more preferred.
  • Acrylic acid-based copolymers include, for example, ethyl acrylate, butyl acrylate, 2-ethylhexyl acrylate and other acrylic acid esters as main monomers, methyl acrylate or methyl methacrylate as comonomers, and acrylic acid or methacrylic acid.
  • the functional group-containing monomer is preferably copolymerized. In this case, instead of using acrylic acid ester as the main monomer, methacrylic acid ester may be used as the main monomer.
  • the conductive particles are preferably made of a metal having conductivity and a characteristic of reflecting ultraviolet rays, and are made of a metal having a high ultraviolet reflectance. is even more preferred.
  • the metal having a high ultraviolet reflectance is, for example, aluminum (Al), chromium (Cr), iron (Fe), nickel (Ni), rhodium (Rh), silver (Ag) or platinum (Pt). Either is preferred, aluminum or silver is even more preferred, and aluminum is most preferred.
  • the conductive adhesive layer 14 there are an electrode-side conductive adhesive layer 14a in contact with one electrode 11 of the pair of electrodes E and a glass layer-side conductive adhesive layer 14b in contact with the glass layer 12.
  • the conductive adhesive layer 14 is arranged between one metal film and the other metal film, and There is a conductive adhesive layer 14c between the metal films in contact.
  • Electrode-side conductive adhesive layer 14a there are a first electrode-side conductive adhesive layer 14a1 and a third electrode-side conductive adhesive layer 14a2.
  • the first electrode-side conductive adhesive layer 14a1 is one of the electrode-side conductive adhesive layers 14a that is in contact with the first electrode 11a.
  • the first electrode-side conductive adhesive layer 14a1 is arranged between the first electrode 11a and the first metal film layer 13a to adhere them together.
  • Electrode-side conductive adhesive layer 14a is in contact with the third electrode 11c.
  • the third electrode-side conductive adhesive layer 14a2 is arranged between the third electrode 11c and the second metal film layer 13b to adhere them together.
  • Glass layer side conductive adhesive layer 14b there are a first glass layer side conductive adhesive layer 14b1 and a second glass layer side conductive adhesive layer 14b2.
  • the first glass layer-side conductive adhesive layer 14b1 is one of the glass layer-side conductive adhesive layers 14b that is in contact with the first glass layer 12a.
  • the first glass layer side conductive adhesive layer 14b1 is arranged between the first glass layer 12a and the first metal film layer 13a to adhere them together.
  • the second glass layer-side conductive adhesive layer 14b2 is one of the glass layer-side conductive adhesive layers 14b that is in contact with the second glass layer 12b.
  • the second glass layer side conductive adhesive layer 14b2 is arranged between the second glass layer 12b and the second metal film layer 13b to adhere them together.
  • the first metal film interlayer conductive adhesive layer 14c1 is disposed between and in contact with the first electrode side metal film 13a1 and the first glass layer side metal film 13a2.
  • the first metal film interlayer conductive adhesive layer 14c1 is for adhering the first electrode side metal film 13a1 and the first glass layer side metal film 13a2.
  • the second metal film interlayer conductive adhesive layer 14c2 is disposed between and in contact with the third electrode side metal film 13b1 and the second glass layer side metal film 13b2.
  • the second metal film interlayer conductive adhesive layer 14c2 is for adhering the third electrode side metal film 13b1 and the second glass layer side metal film 13b2.
  • a conductive single-sided adhesive tape or a conductive double-sided adhesive tape can be used as a laminate in which the metal film layer 13 and the conductive adhesive layer 14 are laminated in advance.
  • a laminate consisting of the first metal film layer 13a and the first electrode side conductive adhesive layer 14a1, a laminate consisting of the second metal film layer 13b and the third electrode side conductive adhesive layer 14a2 the first metal A conductive single-sided adhesive tape is used as a laminate consisting of the film layer 13a and the first glass layer side conductive adhesive layer 14b1 or a laminate consisting of the second metal film layer 13b and the second glass layer side conductive adhesive layer 14b2.
  • the first metal A conductive single-sided adhesive tape is used as a laminate consisting of the film layer 13a and the first glass layer side conductive adhesive layer 14b1 or a laminate consisting of the second metal film layer 13b and the second glass layer side conductive adhesive layer 14b2.
  • a conductive double-sided adhesive tape can also be used as the laminate composed of 13b and the second glass layer side conductive adhesive layer 14b2.
  • a metal film layer 13 is arranged between one electrode 11 of the pair of electrodes E and the glass layer 12, and electrical conduction from one electrode 11 of the pair of electrodes E to the glass layer 12 is controlled by the metal film layer. 13, there are the following problems.
  • metal and glass have different coefficients of thermal expansion. The same applies to metals as long as they have different elements and other components.
  • FIG. 41B will be referred to regarding the possibility that a vacuum layer V or an air layer A may be formed between one electrode 11 of the pair of electrodes E and the metal film layer 13 .
  • the electrical conductivity of either vacuum or air is extremely low. Therefore, when the vacuum layer V or the air layer A is formed between one electrode 11 of the pair of electrodes E and the metal film layer 13, the plasma generator 10 may cause the conductive adhesive layer 14 to There is a possibility that the electric conductivity from one electrode 11 of the pair of electrodes E to the metal film layer 13 may decrease compared to when the metal film layer 13 is provided. Moreover, this also applies similarly between the glass layer 12 and the metal film layer 13 .
  • the plasma generator 10 stabilizes the plasma P compared to when the plasma generator 10 includes the conductive adhesive layer 14. It may not be possible to generate
  • the electrode-side conductive adhesive layer 14a is arranged between one electrode 11 of the pair of electrodes E and the metal film layer 13, thereby producing the following effects. .
  • the electrode-side conductive adhesive layer 14a has adhesiveness even when one of the pair of electrodes E, the electrode 11 and the metal film layer 13 are warped.
  • One electrode 11 and the metal film layer 13 of the pair of electrodes E are assumed to have viscoelasticity while being in close contact with each other. Therefore, it is also possible to change its own shape into a shape corresponding to these.
  • the electrode-side conductive adhesive layer 14a reduces the risk of forming a vacuum layer or an air layer between one electrode 11 of the pair of electrodes E and the metal film layer 13 .
  • the electrode-side conductive adhesive layer 14a is composed of an adhesive layer and conductive particles, and the conductive particles have higher electrical conductivity than vacuum or air.
  • Adhesive layers such as acrylic copolymers, also have higher electrical conductivity than vacuum or air.
  • the electrode-side conductive adhesive layer 14a reduces the possibility that a vacuum layer or an air layer is formed between one electrode 11 of the pair of electrodes E and the metal film layer 13.
  • the plasma generator 10 can stably generate the plasma P.
  • the glass layer-side conductive adhesive layer 14b also prevents the formation of a vacuum layer or an air layer between the glass layer 12 and the metal film layer 13 due to the same action as in the electrode-side conductive adhesive layer 14a. By reducing it, the plasma generator 10 can be made to generate the plasma P stably. The same applies to the metal film interlayer conductive adhesive layer 14c.
  • A1 First electrode 11a/first metal film layer 13a/first glass layer 12a.
  • A2) First electrode 11a/(evaporation)/first metal film layer 13a/first glass layer 12a.
  • A3 First electrode 11a/first metal film layer 13a/(evaporation)/first glass layer 12a.
  • (E1) First electrode 11a/first electrode side metal film 13a1/first glass layer side metal film 13a2/first glass layer 12a (see (d1) in FIG. 42(d)).
  • (E2) First electrode 11a/(evaporation)/first electrode side metal film 13a1/first glass layer side metal film 13a2/first glass layer 12a (see (d1) in FIG. 42(d)).
  • (E3) First electrode 11a/first electrode side metal film 13a1/first glass layer side metal film 13a2//(vapor deposition)/first glass layer 12a (see (d1) in FIG. 42(d)).
  • (B2) or (D) is preferable from the viewpoint of stably generating the plasma P by the plasma generator 10, and among these, from the viewpoint of long-term plasma generation stability , (B2) are more preferable, and from the viewpoint of short-term plasma generation stability, (D) is also more preferable, and it is even more preferable to select an appropriate one according to the purpose of using the plasma generator 10 .
  • (E5), (E7), (F5) or (F7) is also preferable, and among these, from the viewpoint of long-term plasma generation stability, (E5) or (F5) is more preferable. From the viewpoint of stable plasma generation, (E7) or (F7) is also more preferable, and it is even more preferable to select an appropriate one according to the purpose of using the plasma generator 10 .
  • (F3) or (F6) is also preferable from the viewpoint of generating the plasma P stably by the plasma generator 10 and also considering the viewpoint of being excellent in mass productivity.
  • first electrode 11a is replaced with the “third electrode 11c”
  • first metal film layer 13a is replaced with the “second metal film layer 13b”
  • first glass layer 12a is replaced with “second glass layer 12b”
  • first electrode side conductive adhesive layer 14a1 is replaced with “third electrode side conductive adhesive layer 14a2”
  • first glass layer side conductive "Electrical adhesive layer 14b1” is replaced with “second glass layer side conductive adhesive layer 14b2”
  • first electrode side metal film 13a1 is replaced with "third electrode side metal film 13b2” and "first electrode side metal film 13b2".
  • Glass layer side metal film 13a2 is changed to “second glass layer side metal film 13b2”
  • first metal film interlayer conductive adhesive layer 14c1 is changed to “second metal film interlayer conductive adhesive layer 14c2”.
  • the glass layer 12 and the metal film layer 13 together constitute a reflecting mirror M.
  • the reflecting mirror M is for reflecting the ultraviolet rays UV emitted by the plasma P and other electromagnetic waves. Moreover, the reflecting mirror M can also increase the amount of plasma P to be generated.
  • the glass layer 12 transmits ultraviolet rays, and the metal film layer 13 reflects the ultraviolet rays transmitted through the glass layer 12 .
  • the glass layer 12 protects the metal film layer 13 from factors that may reduce the UV reflectance of the metal film layer 13, such as oxidation damage.
  • the use of the metal film layer 13 in constructing the reflector M widens the range of selection of the first electrode 11a or the third electrode 11c. That is, since the reflecting mirror M can be configured from the glass layer 12 and the metal film layer 13, the first electrode 11a or the third electrode 11c can be formed from a viewpoint other than the UV reflectance, for example, the thermal conductivity. can be selected. For example, aluminum has excellent UV reflectance but poor thermal conductivity, while copper has excellent thermal conductivity but poor UV reflectance. When the reflecting mirror M is composed of the glass layer 12 and the first electrode 11a or the third electrode 11c, the first electrode 11a or the third electrode 11c should be selected so that both high ultraviolet reflectance and high thermal conductivity are achieved. It is not possible.
  • the metal film layer 13 provides a higher ultraviolet reflectance. Even if the third electrode 11c is selected, in the plasma generator 10, high ultraviolet reflectance and high thermal conductivity can coexist. More specifically, the above is as follows.
  • the glass layer 12 and the metal film layer 13 that constitute the reflecting mirror M for example, the following are preferable. That is, a combination of a glass layer 12 made of quartz glass and a metal film layer 13 made of aluminum, a combination of a glass layer 12 made of quartz glass and a metal film layer 13 made of silver, a combination of a glass layer 12 made of borosilicate glass and aluminum and the combination of the glass layer 12 made of borosilicate glass and the metal film layer 13 made of silver are preferable. Among these, the glass layer 12 made of borosilicate glass and the metal film made of aluminum A combination with layer 13 is more preferred.
  • the first electrode 11a or the third electrode 11c made of copper is preferable as the first electrode 11a or the third electrode 11c combined with the reflecting mirror M composed of the glass layer 12 and the metal film layer 13. .
  • the thermal conductivity of the first electrode 11a or the third electrode 11c can be increased while the UV reflectance of the reflecting mirror M is increased.
  • the plasma generator 10 preferably includes a first reflecting mirror M1 and a second reflecting mirror M2 as the reflecting mirrors M, which are arranged to face each other and form a paired mirror relationship. is more preferable. At this time, the ultraviolet rays are repeatedly reflected between the first reflecting mirror M1 and the second reflecting mirror M2.
  • the plasma generator 10 includes a first electrode 11a, a second electrode 11b, a first glass layer 12a, and a first metal film layer 13a, as well as a third electrode 11c, a second glass layer 12b, and a second metal film. layer 13b.
  • the plasma generator 10 is provided with a first pair of electrodes E1, a second pair of electrodes E2, a first reflecting mirror M1, and a second reflecting mirror M2.
  • the first reflecting mirror M1 and the second reflecting mirror M2 face each other.
  • FIGS. 1A, 3A, 12A and the like are referred to as examples of the first reflecting mirror M1 and the second reflecting mirror M2 having such a relationship.
  • the plasma generator 10 When a predetermined potential difference is applied between the first electrode 11a and the second electrode 11b, plasma P is generated in the space S between the first electrode 11a and the second electrode 11b. Further, in the case where the plasma generator 10 further includes a third electrode 11c, when a predetermined potential difference is applied between the third electrode 11c and the second electrode 11b, the third electrode 11c and the second electrode 11b Plasma P is generated in the space S between.
  • the potential of the first electrode 11a and the third electrode 11c are made equal, and the difference between the potential and the potential of the second electrode 11b is a predetermined value, the potential of the first electrode 11a and the potential of the second electrode 11b is The plasma P is generated in the space S between them, and the plasma P is also generated in the space S between the third electrode 11c and the second electrode 11b.
  • they may be grounded.
  • the generation of the plasma P in one or both of the space S between the first pair of electrodes E1 or the space S between the second pair of electrodes E2 will Refer to FIG. 12(b) and the like.
  • nitrogen gas (N 2 ) exists in the space S between the pair of electrodes E, nitrogen plasma is generated, and this nitrogen plasma emits ultraviolet rays UV.
  • the gas existing in the space S between the pair of electrodes E is a gas other than nitrogen, such as a noble gas, it is possible to generate ultraviolet rays UV in the same manner as when the gas is nitrogen. can.
  • the reflecting mirror M When the ultraviolet rays UV hit the reflecting mirror M, the reflecting mirror M reflects the ultraviolet rays UV without absorbing them.
  • FIG. 6(a) is referred to regarding the reflecting mirror M reflecting the ultraviolet rays UV.
  • the plasma generator 10, provided with the reflecting mirror M can repeatedly irradiate the gas existing in the space S between the pair of electrodes E and the suspended matter with the ultraviolet UV. .
  • the ultraviolet rays UV are reflected.
  • the ceramic layer C absorbs the ultraviolet rays UV and may not reflect the ultraviolet rays UV, or even if it does reflect the ultraviolet rays UV, the ultraviolet reflectance may not be sufficient.
  • FIG. 6B will be referred to regarding the ceramic layer C absorbing ultraviolet rays UV.
  • ultraviolet rays UV are emitted between the first reflecting mirror M1 and the second reflecting mirror M2. can be performed repeatedly. Referring now to FIG. 7 with respect to repeating the reflection of ultraviolet UV between the first reflector M1 and the second reflector M2.
  • the plasma generator 10 generates the plasma P by dielectric barrier discharge, reflects the ultraviolet rays UV emitted by the plasma P, and can efficiently use them.
  • the ultraviolet rays UV emitted by the original gas include near-ultraviolet rays.
  • the ultraviolet reflectance of the metal film layer 13 for near-ultraviolet rays is generally higher than the ultraviolet reflectance for ultraviolet rays other than near-ultraviolet rays. That is, the ultraviolet reflectance of the metal film layer 13 tends to decrease as the wavelength of ultraviolet rays becomes shorter, from ultraviolet A wave to ultraviolet B wave to ultraviolet C wave. Such a tendency is seen in general metals that have the property of reflecting ultraviolet rays. Even in the case of the material, the same phenomenon can be seen, albeit a gradual decrease compared to the case of the material made of silver.
  • the plasma generator 10 when nitrogen (N 2 ) or a gas containing nitrogen (N 2 ), such as air, is selected as the original gas, the plasma generator 10 generates near-ultraviolet rays among ultraviolet rays UV.
  • the generated near-ultraviolet rays are reflected by the metal film layer 13 with a high ultraviolet reflectance, thereby making it possible to use the ultraviolet rays UV more efficiently.
  • Plasma generated by dielectric barrier discharge between a pair of electrodes E is a process in which ionized electrons recombine with ionized atoms or molecules, or the number of excited electrons is lower. Electromagnetic waves are emitted in the process of transitioning to energy levels.
  • the electromagnetic wave emitted by the original plasma is reflected by the reflecting mirror M, collides with atoms or molecules constituting the gas existing around the original plasma, ionizes or excites them, and returns the original plasma. generate a new plasma around As a result, the amount of plasma P generated by the plasma generator 10 is the sum of the original plasma and the new plasma.
  • the dielectric layer disposed between the pair of electrodes E is not the glass layer 12 but the ceramic layer C as in the conventional plasma generator CEX.
  • the amount of plasma P to be generated can be increased.
  • FIG. 2 and FIG. 3(b) will be referred to regarding increasing the amount of plasma P generated by the reflecting mirror M.
  • FIG. 2 and FIG. 3(b) will be referred to regarding increasing the amount of plasma P generated by the reflecting mirror M.
  • the plasma generator 10 can generate the plasma P by dielectric barrier discharge, reflect the electromagnetic waves generated by the plasma P, and increase the amount of plasma P generated.
  • the plasma generator 10 includes ionized oxygen molecules, oxygen atoms dissociated from oxygen molecules, anions of oxygen molecules, excited oxygen molecules, and other active substances generated from oxygen (hereinafter, “active oxygen”). ) can also be generated in greater amounts.
  • the flow path 20 is a portion of the gas purifier 1 through which the indoor air or other gas G to be purified flows.
  • the plasma generator 10 is arranged in any part of the flow path 20 , and the gas G to be purified is purified while flowing through the flow path 20 .
  • the channel 20 is composed of at least an inlet 20a, an outlet 20b, and a path 20c.
  • the inlet 20a is an opening through which the gas G to be purified enters the inside of the gas purifier 1 .
  • the outlet 20b is an opening through which the gas G to be purified exits the gas purifier 1 .
  • the path 20c is a portion formed by a passage for the gas G to be purified to flow from the inlet 20a to the outlet 20b.
  • the gas G enters the gas purification device 1 from the inlet 20a, flows through the path 20c from the direction of the inlet 20a to the direction of the outlet 20b, and exits from the outlet 20b.
  • the inlet 20a and the outlet 20b are opened toward the room or connected to the room via conduits.
  • the mouth and nose of an infectious disease patient, refrigerant pipes of air conditioners, internal combustion engines and other sources of the gas The inlet 20a is connected through a conduit, and the outlet 20b is opened toward the inside of the room or opened to the outside through the conduit.
  • the portion of the path 20c that is on the inlet 20a side of the reference is referred to as "the upstream side of the flow path 20 (of the reference)", and is on the outlet 20b side of the reference.
  • the portion is referred to as "the downstream side of the flow path 20 (that which serves as a reference)”.
  • the inlet 20a side is the front side of the gas purification device 1
  • the outlet 20b side is the rear side of the gas purification device 1.
  • FIGS. 10, 11, 12(a), 15, 16, 17 and the like are referred to as examples of such a flow path 20.
  • FIG. 10 is referred to as examples of such a flow path 20.
  • the entrance 20a is preferably configured as being surrounded by the first glass layer 12a, the second glass layer 12b, the first spacer 40a and the second spacer 40b.
  • FIG. 10, FIG. 12(a), FIG. 15, etc. will be referred to as an example of such an inlet 20a.
  • the outlet 20b is preferably configured as being surrounded by the first electrode 11a, the third electrode 11c, the first spacer 40a and the second spacer 40b.
  • the path 20c includes a first portion 20c1 surrounded by the first glass layer 12a, the second glass layer 12b, the first spacers 40a and the second spacers 40b, the first electrode 11a, the third electrode 11c, the first spacer 40a and the second electrode 11c. and a second portion 20c2 surrounded by two spacers 40b. Further, it is more preferable that the first portion 20c1 is arranged upstream of the second portion 20c2 in the channel 20. As shown in FIG. Here, FIG. 12(a) and FIG. 17 are referred to as an example of such a path 20c.
  • the space S between the pair of electrodes E is constructed, and plasma P is generated in this space S.
  • the gas G to be purified is purified while passing through the space S and the portion subsequent to the space S in the path 20c.
  • the filter 30 is arranged in the second portion 20c2.
  • the extending direction of the second electrode 11b and the extending direction of the flow path 20 may be arranged so as to be parallel to each other. and more preferably arranged perpendicular to each other.
  • the extending direction of the second electrode 11b and the extending direction of the channel 20 are arranged so as to be parallel to each other. Since the length of the flow path 20 can be shortened without changing the volume of the space S between the pair of electrodes E, the pressure loss can be reduced and the gas to be purified can be reduced.
  • the amount of gas G that can be purified per unit time out of G can be increased. Furthermore, since the direction in which the second electrode 11b extends and the direction in which the flow path 20 extends are arranged so as to be perpendicular to each other, the pressure loss can be minimized. The amount of gas G that can be purified per unit can be increased most.
  • FIGS. 15, 16, 17 and the like are referred to as examples of the second electrode 11b and the channel 20 having such a relationship.
  • the acute angle among the angles formed by them is preferably 45° or more, more preferably 60° or more, and more preferably 75°. ° or more is even more preferred, and 90° is most preferred.
  • the "direction in which the flow path 20 extends” means that the flow path 20 extends while bending.
  • a tangent line at the intersection of a virtual curve extending along the direction and a virtual straight line extending along the direction in which the second electrode 11b extends is obtained, and the direction in which the tangent line extends is defined.
  • the plasma generator 10, which constitutes a part of the gas purifier 1 is provided with a reflector M to increase the amount of plasma P to be generated and increase the probability that the gas G to be purified comes into contact with the plasma P. It is also possible to purify this with increased probability, regardless of the increase in the amount of gas G to be purified.
  • the plasma generator CEX that does not include the reflecting mirror M is used. Even in this case, since the space S between the pair of electrodes E is arranged along the direction in which the flow path 20 extends, the probability that the gas G to be purified comes into contact with the plasma P can be increased. Although it can be done, the flow path 20 is also lengthened, resulting in a large pressure loss and a limited amount of the gas G to be purified.
  • the direction in which the second electrode 11b extends and the direction in which the flow path 20 extends are arranged so as to be perpendicular to each other. Together with this, the amount of gas G that can be purified can be increased.
  • the filter 30 is for reducing the concentration of a specific gas in the gas when the gas passes through it.
  • the filter 30 is made of mesh.
  • the term "net-like” as used herein means a skeleton in which two or more elements are finely and densely combined with gaps between them, and a passage for air to pass through the gaps. Among them, it refers to the one that has a surface that is a part that comes into contact with the air passing through the passage.
  • the "net-like” mentioned here includes fence-like, radial, grid-like, honeycomb-like, polka-dot-like, and other two or more elements combined according to a certain rule, as well as two or more elements being fixed. It includes those that are combined without complying with the rules of, for example, those in the form of non-woven fabrics. same as below.
  • the filter 30 preferably has a honeycomb shape among net-like ones.
  • the "honeycomb-shaped" referred to here includes, in addition to ring-shaped skeletons that have a regular hexagonal cross-section and are arranged without gaps, ring-shaped skeletons that are arranged without gaps. Polygons whose cross-sectional contours can be combined with each other or shapes similar thereto are combined with each other and arranged without gaps.
  • equilateral triangles or equilateral tetragons are preferable as polygons whose cross-sectional contours can be combined with each other, but right triangles or isosceles triangles (excluding equilateral triangles) Or it may be a trapezoid or parallelogram (including rectangles and rhombuses, but excluding regular quadrilaterals).
  • a so-called corrugated shape which is a sinusoidal curve instead of two sides of equal width, is included.
  • the filter 30 preferably consists of one on which a substance that decomposes a specific gas, either as a catalyst or by reacting with itself, is arranged.
  • the skeleton of the filter 30 itself may be made of a substance that acts as a catalyst or reacts with itself to decompose a specific gas.
  • the filter 30 is, for example, one consisting of a catalyst that decomposes a specific gas and a carrier that holds it, one that consists only of a catalyst that decomposes a specific gas, or a substance that reacts with and decomposes a specific gas and holds it.
  • a catalyst that decomposes a specific gas and a carrier that holds it one that consists only of a catalyst that decomposes a specific gas, or a substance that reacts with and decomposes a specific gas and holds it.
  • carriers those consisting only of substances that decompose by reacting with specific gases, and those consisting of a combination of catalysts that decompose specific gases and substances that react with specific gases and decomposing, and supports that hold them selected from
  • the filter 30 is arranged in any part of the channel 20 depending on the specific gas to be decomposed. At this time, it is preferable that the filter 30 be arranged so as to block the relevant portion of the channel 20 .
  • the filters 30 include, for example, a first filter 30a, a second filter 30b and a third filter 30c.
  • the first filter 30a reduces the concentration of ozone (O 3 ) in the gas when gas passes through it, thereby suppressing an increase in the concentration of ozone in the air in the room. be.
  • the gas purifier 1 can reduce the concentration of ozone in the indoor air by providing the first filter 30a, and can reduce the concentration of ozone in the indoor air by not including the first filter 30a. In addition to increasing the concentration of ozone in the air in the closed container, it is also possible to increase the ozone concentration.
  • the gas purifying device 1 when used as an air purifying device for purifying indoor air, it is preferable that the gas purifying device 1 include a first filter 30a.
  • FIGS. 10, 11, 12(a), 13(a), 14, 15, 16, 17 and the like will be referred to as examples of such a gas purifier 1.
  • the gas purifying device 1 is used as an air purifying device for purifying indoor air, when it is used in a room where there are no people, for example, at night, the first It is preferable not to include the filter 30a.
  • FIG. 13(b) is referred to as an example of such a gas purifier 1. As shown in FIG.
  • the first filter 30a preferably consists of a catalyst that decomposes ozone and a carrier that holds the same, and more preferably comprises a catalyst that decomposes ozone on the surface of a carrier having a honeycomb skeleton.
  • the first filter 30a is composed of a honeycomb-shaped skeleton 30a1 formed by finely and densely combining two or more regular hexagonal cylinders with gaps between them, and the gaps, for the air G to pass through. It has a passageway 30a2 and a surface 30a3 of the skeleton 30a1 which is a portion that comes into contact with the air G passing through the passageway 30a2, and a catalyst that decomposes ozone is held on the surface 30a3. is particularly preferred.
  • FIG. 17, FIG. 18, etc. are referred as an example of such a first filter 30a.
  • manganese oxide is preferable, among manganese oxides, Mn3O4 , Mn2O3 , MnO or MnO2 is more preferable, and Mn3O4 is most preferable.
  • the catalyst that decomposes ozone may be nickel oxide (NiO) or other metal oxides other than manganese oxide, or a combination of manganese oxide and other metal oxides other than manganese oxide.
  • a substance that decomposes ozone by reacting with itself may be arranged, and a catalyst that decomposes ozone and a catalyst that decomposes ozone by reacting with itself are combined.
  • a catalyst that decomposes ozone and a catalyst that decomposes ozone by reacting with itself may be combined.
  • Carbon is preferred, and activated carbon is more preferred, as the substance that decomposes ozone by reacting with itself.
  • the carrier that holds the catalyst that decomposes ozone is preferably made of an insulator, such as silica alumina fiber, silica fiber, alumina fiber, mullite fiber, glass fiber, rock wool fiber, carbon fiber and other inorganic fibers. It is more preferable to consist of
  • the carrier holding the catalyst that decomposes ozone may be made of metal, but when the first filter 30a is in contact with the electrode 11, this is not the case.
  • the thickness and width of the first filter 30a may be such that the portion of the flow path 20 where the first filter 30a is arranged can be blocked.
  • the width of the first filter 30a is preferably 30 to 120 mm, preferably 45 to 105 mm. more preferably 60 to 90 mm.
  • the depth of the first filter 30a is preferably 8-32 mm, more preferably 12-16 mm, and even more preferably 16-24 mm.
  • the first filter 30a for example, there is one in which activated carbon powder and manganese oxide are held on the surface of a carrier made of an inorganic fiber nonwoven fabric and having a honeycomb-like skeleton (Japanese Patent Application Laid-Open No. 2006-231324). ), and can be obtained through “Hanicle (registered trademark)-ZV” manufactured and sold by Nichias Corporation.
  • the first filter 30a is arranged downstream of the second electrode 11b in the channel 20.
  • FIG. 12(a), FIG. 13(a), FIG. 14, FIG. 17, etc. will be referred to as an example of such a first filter 30a.
  • the first filter 30a is preferably in contact with the first electrode 11a. Furthermore, it is more preferable that the first filter 30a is arranged between the first electrode 11a and the third electrode 11c. At this time, it is particularly preferable that the first filter 30a is in contact with the first electrode 11a and the third electrode 11c.
  • FIGS. 11, 12(a), 13(a), 14, 16, 17 and the like are referred to as examples of such a first filter 30a.
  • the ozone-containing gas passes through the first filter 30a and touches the surface where the ozone-decomposing catalyst is placed, the ozone ( O3 ) is converted to oxygen ( O2 ) and decomposed.
  • the concentration of ozone in the gas can be reduced.
  • the first filter 30a is preferably arranged in such a manner that it can be easily replaced.
  • the second filter 30b is for reducing the concentration of fluorine ( F2 ) or fluorine compounds in the gas when the gas passes through it.
  • fluorine compounds for example, specific Freons, that is, chlorofluorocarbons (CFCs), perfluorocarbons (PFCs), hydrochlorofluorocarbons (HCFCs), hydrofluorocarbons (HFCs), sulfur hexafluoride ( SF 6 ) and other CFC alternatives.
  • the plasma generator 10 and the gas purifier 1 equipped with the plasma generator 10 utilize not only the plasma P, but also ozone and ultraviolet rays UV generated along with the plasma P, and are capable of efficiently decomposing volatile organic compounds in the gas. Although it can be done, it tends to be difficult to efficiently decompose fluorine and fluorine compounds in gases.
  • the gas purification device 1 with the second filter 30b, the fluorine and fluorine compounds in the gas can be efficiently decomposed.
  • the second filter 30b is preferably composed of a catalyst that decomposes fluorine or a fluorine compound and a carrier that holds it.
  • Ca calcium
  • powdered calcium is more preferable.
  • the second filter 30b is arranged downstream of the second electrode 11b and upstream of the first filter 30a in the channel 20.
  • FIG. 14A is referred to as an example of such a second filter 30b.
  • the concentration of fluorine or fluorine compounds in the gas can be reduced.
  • the third filter 30c is for reducing the concentration of hydrogen sulfide (H 2 S) in the gas when the gas passes through it.
  • the plasma generator 10 and the gas purifying device 1 equipped with the plasma efficiently decompose volatile organic compounds in the gas by using the plasma P in combination with the ozone and ultraviolet rays UV generated along with the plasma P.
  • the second filter 30b is preferably composed of a catalyst that decomposes fluorine or a fluorine compound and a carrier that holds it.
  • the third filter 30c preferably consists of a material that reacts with itself to decompose hydrogen sulfide and a carrier that holds it.
  • Ferric oxide Fe 2 O 3
  • Ferric oxide is preferable as a substance that reacts with itself to decompose hydrogen sulfide.
  • the third filter 30c is arranged upstream of the second electrode 11b in the channel 20.
  • FIG. 14B is referred to as an example of such a third filter 30c.
  • the concentration of hydrogen sulfide in the gas can be reduced.
  • the amount of ozone generated is suppressed in order to control the concentration of ozone in indoor air to a low value. Viruses floating in passing air may not be sufficiently inactivated.
  • another object of the present invention is to further enhance the ability to decompose ozone in a filter for reducing the concentration of ozone in gas.
  • the present invention may be directed to further enhancing the ability to decompose specific gases in a filter for reducing the concentration of specific gases other than ozone.
  • the gas purification device 1 preferably has the following configuration.
  • the first electrode 11a and the first filter 30a are in contact with each other.
  • the first electrode 11a be arranged to cover the first filter 30a.
  • a second portion 11a2 is formed on the surface of the first electrode 11a facing the second electrode 11b.
  • the third portion 11a3 be configured adjacent to the second portion 11a2 on the surface of the first electrode 11a facing the second electrode 11b.
  • the third portion 11a3 as a portion that is exposed and comes into contact with gas, has a higher thermal conductivity than the first portion 11a1 that is covered with the first glass layer 12a through the first metal film layer 13a. .
  • the third electrode 11c and the first filter 30a are in contact with each other.
  • the third electrode 11c be arranged to cover the first filter 30a.
  • the second portion 11c2 is formed on the surface of the third electrode 11c facing the second electrode 11b.
  • the third portion 11c3 is configured so as to be adjacent to the second portion 11c2 on the surface of the third electrode 11c facing the second electrode 11b.
  • the third portion 11c3 is also exposed and exposed to gas, and has a higher thermal conductivity than the first portion 11c1 covered with the second glass layer 12b through the second metal film layer 13b. .
  • the energy transmitted to the pair of electrodes E the energy transmitted to the first electrode 11a is transmitted to the first filter 30a, and the temperature of the first filter 30a rises. Furthermore, the energy transmitted to the third electrode 11c is also transmitted to the first filter 30a, further increasing the temperature of the first filter 30a. Looking at the above in more detail, it is as follows.
  • the catalyst placed on the surface of the first filter 30a is heated and activated, further increasing its ability to decompose ozone.
  • the present invention has another effect of further enhancing the ability to decompose ozone in a filter for reducing the concentration of ozone in gas.
  • the spacer 40 supports the electrode 11 constituting the pair of electrodes E and the other electrode 11 and arranges them with a distance from each other. It is a member for arranging one of the electrodes 11 with a space therebetween. Furthermore, the spacer 40 preferably constitutes part of the flow path 20 as well.
  • the spacer 40 is made of an insulator, that is, a material whose electrical conductivity is lower than that of the glass forming the glass layer 14, and preferably made of epoxy resin, for example.
  • the spacer 40 can arrange the glass layer 12 in addition to the electrode 11 and the other electrode 11 constituting the pair of electrodes E as described above, the specific aspect thereof is not particularly limited. However, an appropriate one is arbitrarily selected according to the shape of the electrode 11 and the other electrode 11 constituting the pair of electrodes E and the mode of combination thereof.
  • the spacer 40 may be composed of a single member or may be composed of a pair of members. Moreover, the spacer 40 may be configured by a part of another member, for example, a part of the case. Furthermore, the spacer 40 may also serve as the connecting means 41 .
  • the spacer 40 includes a first spacer 40a and a second spacer 40b.
  • the first spacer 40a is arbitrarily selected from among the spacers 40 as suitable when the plasma generator 10 includes the first electrode 11a, the second electrode 11b, and the third electrode 11c.
  • the first spacer 40a is, for example, prism-shaped and has an upper surface, a left side surface, a lower surface, a right side front surface, and a rear surface.
  • the first spacer 40a preferably has a first electrode support surface 40a1 and a second electrode support hole 40a2, and further includes a third electrode support surface 40a3. At this time, the first spacer 40a has a vertically symmetrical structure. 10(a), 11(a), 15, 16, 17, 19, 20, 21(d) and 22 ( a), etc.
  • the first electrode support surface 40a1 is a flat surface, and consists of a surface that constitutes either the upper surface or the lower surface of the first spacer 40a.
  • the first electrode support surface 40a1 corresponds to the fourth portion 11a4 of the first electrode 11a.
  • FIGS. 19, 20, 21, etc. will be referred to as examples of such a correspondence relationship.
  • the second electrode support hole 40a2 is a through hole penetrating from the left side to the right side of the first spacer 40a.
  • the second electrode support hole 40a2 has a shape corresponding to the shape of the second electrode 11b.
  • the second electrode support hole 40a2 is screw-shaped.
  • FIGS. 17, 19, 20, 21(d), 22(a), etc. will be referred to as examples of such second electrode support holes 40a2.
  • the third electrode support surface 40a3 is a flat surface, and is a surface that constitutes the other of the top surface and the bottom surface of the first spacer 40a, which is opposite to the side on which the first electrode support surface 40a1 is located. be.
  • the third electrode support surface 40a3 corresponds to the fourth portion 11c4 of the third electrode 11c.
  • FIGS. 19, 20, 22, etc. will be referred to as examples of such a correspondence relationship.
  • the first spacer 40a may be provided with a first electrode support groove (not shown) consisting of grooves instead of the first electrode support surface 40a1, and a third electrode support surface 40a3 instead of the third electrode support surface 40a3. , a third electrode support groove (not shown) consisting of grooves.
  • the first electrode support groove is configured to allow insertion of the first electrode 11a
  • the third electrode support groove is configured to allow insertion of the third electrode 11c.
  • the first spacer 40a preferably further includes a first glass layer supporting surface 40a4 and a second glass layer supporting surface 40a5.
  • FIGS. 19, 20, 21(d), 22(a), etc. will be referred to as examples of such a first spacer 40a.
  • the first glass layer support surface 40a4 is a flat surface that forms a step with the first electrode support surface 40a1, and corresponds to the second portion 12a2 of the first glass layer 12a.
  • the second glass layer support surface 40a5 is a flat surface that forms a step with the third electrode support surface 40a3, and corresponds to the second portion 12b2 of the second glass layer 12b.
  • the second spacer 40b is arbitrarily selected from among the spacers 40 as suitable when the plasma generator 10 includes the first electrode 11a, the second electrode 11b and the third electrode 11c.
  • the second spacer 40b has, for example, a prism shape, and has an upper surface, a left side surface, a lower surface, a right side front surface, and a rear surface, and has a bilaterally symmetrical structure in relation to the first spacer 40a.
  • the second spacer 40b preferably has a first electrode support surface 40b1 and a second electrode support hole 40b2, and further includes a third electrode support surface 40b3. At this time, the second spacer 40b has a vertically symmetrical structure. 10(a), 11(a), 15, 16, 19, 20(a), 21(d), and 22 ( a), etc.
  • the first electrode supporting surface 40b1 is a flat surface, and consists of a surface that constitutes either the upper surface or the lower surface of the second spacer 40b.
  • the first electrode support surface 40b1 corresponds to the fifth portion 11a5 of the first electrode 11a.
  • FIG. 19, FIG. 20(a), FIG. 21, etc. will be referred to as examples of such a correspondence relationship.
  • the second electrode support hole 40b2 is a through hole penetrating from the left side to the right side of the second spacer 40b.
  • the second electrode support hole 40b2 has a shape corresponding to the shape of the second electrode 11b.
  • the second electrode support hole 40b2 is screw-shaped.
  • FIGS. 19, 20(a), 21(d), 22(a) and the like are referred to as examples of such second electrode support holes 40b2.
  • the third electrode support surface 40b3 is a flat surface, and is a surface that forms the other of the top surface and the bottom surface of the second spacer 40b, which is opposite to the side on which the first electrode support surface 40b1 is located. be.
  • the third electrode support surface 40b3 corresponds to the fifth portion 11c5 of the third electrode 11c.
  • FIGS. 19, 20(a), 22, etc. will be referred to as examples of such a correspondence relationship.
  • the second spacer 40b may be provided with a first electrode support groove (not shown) consisting of grooves instead of the first electrode support surface 40b1, and may be provided with a groove instead of the third electrode support surface 40b3.
  • a third electrode support groove (not shown) consisting of grooves.
  • the first electrode support groove is configured to allow insertion of the first electrode 11a
  • the third electrode support groove is configured to allow insertion of the third electrode 11c.
  • the second spacer 40b preferably further includes a first glass layer supporting surface 40b4 and a second glass layer supporting surface 40b5.
  • FIGS. 19, 20(a), 21(d), 22(a), etc. will be referred to as examples of such a second spacer 40b.
  • the first glass layer support surface 40b4 is a flat surface that forms a step with the first electrode support surface 40b1, and corresponds to the second portion 12a2 of the first glass layer 12a.
  • the second glass layer support surface 40b5 is a flat surface that forms a step with the third electrode support surface 40b3, and corresponds to the second portion 12b2 of the second glass layer 12b.
  • the first spacer 40a and the second spacer 40b constitute a pair of spacers 40a and 40b. At this time, the first spacer 40a and the second spacer 40b are arranged facing each other with a space between them. In addition, in a front view, the first spacer 40a is arranged on the left side, and the second spacer 40b is arranged on the right side.
  • a pair of spacers 40a and 40b support the first electrode 11a as follows.
  • FIGS. 19, 20, 21, etc. will be referred to as examples for explanation.
  • the first electrode supporting surface 40a1 of the first spacer 40a and the fourth portion 11a4 of the first electrode 11a are aligned and adhered.
  • a method for bonding with the spacer 40 for example, welding or welding may be used in addition to using an adhesive. same as below.
  • the first electrode supporting surface 40b1 of the second spacer 40b and the fifth portion 11a5 of the first electrode 11a are aligned and adhered.
  • a pair of spacers 40a and 40b support the second electrode 11b as follows.
  • FIGS. 19, 20, 21(d), 22(a), etc. will be referred to as examples for explanation.
  • one end of the second electrode 11b is inserted through the second electrode support hole 40b2 of the second spacer 40b, penetrates the second spacer 40b, and passes through the space between the first spacer 40a and the second spacer 40b. , is inserted from the second electrode supporting hole 40a2 of the first spacer 40a, and penetrates the first spacer 40a. At this time, the other end of the second electrode 11b should not pass through the second spacer 40b. As a result, one end of the second electrode 11b is exposed from the second electrode support hole 40a2 of the first spacer 40a, and the other end of the second electrode 11b is exposed from the second electrode support hole 40b2 of the second spacer 40b. Become.
  • a pair of spacers 40a and 40b support the third electrode 11c as follows.
  • FIGS. 19, 20, 22, etc. will be referred to as examples for explanation.
  • the third electrode supporting surface 40a3 of the first spacer 40a and the fourth portion 11c4 of the third electrode 11c are aligned and adhered.
  • the third electrode supporting surface 40a3 of the second spacer 40b and the other of the fifth portion 11c5 of the third electrode 11c are aligned and adhered.
  • the pair of spacers 40a and 40b can support the first electrode 11a, the second electrode 11b, and the third electrode 11c and arrange them in a predetermined relationship (hereinafter referred to as "electrode 11 arrangement").
  • the arrangement of the first glass layer 12a, the second glass layer 12b, the first metal film layer 13a, and the second metal film layer 13b follows the arrangement of the electrode 11, and preferably prior to this, for example, Do as follows.
  • FIGS. 19, 20, 21, 22, etc. will be referred to as examples for explanation.
  • a first laminate L1 is prepared in which a first metal film layer 13a is laminated in advance on one side of a first glass layer 12a, and a second metal film layer 13b is laminated in advance on one side of a second glass layer 12b.
  • a second laminate L2 is prepared (hereinafter sometimes referred to as "preparation of laminate L").
  • the laminate L may be prepared by vapor-depositing the metal film layer 13 on the surface of the glass layer 12, with the glass layer side conductive adhesive layer 14b between the glass layer 12 and the metal film layer 13. You may perform by laminating
  • the surface of the first layered body L1 on which the first metal film layer 13a is located is aligned with the first portion 11a1 of the first electrode 11a, and these are brought into close contact.
  • the surface of the second layered body L2 on which the second metal film layer 13b is provided is aligned with the first portion 11c1 of the third electrode 11c, and they are brought into close contact with each other.
  • the electrode-side conductive adhesive layer 14a may or preferably be placed between them.
  • the pair of spacers 40a and 40b further includes a pair of first glass layer support surfaces 40a4 and 40b4 and a pair of second glass support surfaces 40a5 and 40b5, the first glass layer 12a and the second glass layer 12a and 40b5 are provided.
  • 12b, the first metal film layer 13a and the second metal film layer 13b are arranged, for example, as follows.
  • FIGS. 19, 20, 21, 22, etc. will be referred to as examples for explanation.
  • the surface of the first laminated body L1 on which the first glass layer 12a is located is aligned with the pair of first glass layer support surfaces 40a4 and 40b4, and these are adhered.
  • the surface of the second laminated body L2 on which the second glass layer 12b is provided is aligned with the pair of second glass supporting surfaces 40a5 and 40b5, and these are adhered.
  • Placement of the electrodes 11 is performed.
  • the surface of the first electrode 11a on the side facing the second electrode 11b is brought into close contact with the first metal film layer 13a, and the side of the third electrode 11c facing the second electrode 11b is attached. It is preferable that the surface on the surface and the second metal film layer 13b are in close contact with each other.
  • the pair of spacers 40a and 40b can facilitate the assembly and disassembly of the plasma generator 10, and can make it small and lightweight.
  • the laminated body L in addition to using one in which the metal film layer 13 is previously vapor-deposited on one side of the glass layer 12, one in which the conductive adhesive layer 14 is laminated in advance on one or both sides of the metal film layer 13 is used. That is, a conductive single-sided adhesive tape or a conductive double-sided adhesive tape may be adhered to one side of the glass layer 12 .
  • the electrodes 11 and other elements may be arranged without using the laminate L.
  • spacers 40a and 40b may be arranged between the pair of spacers 40a and 40b.
  • Other spacers are placed between the first electrode 11a and the third electrode 11c to support them, thereby increasing the distance between the first electrode 11a and the second electrode 11b and the distance between the third electrode 11c and the second electrode 11c.
  • the distance between the electrodes 11b can be made more uniform.
  • connection means 41 constitutes a part of the spacer 40 and is for connecting the gas purifying device 1 and another gas purifying device 1 .
  • the connecting means 41 can connect the gas purifying device 1 and another gas purifying device 1, the specific mode thereof is not particularly limited. It is preferable to include the ridge portion 41a and the groove portion 41b.
  • FIGS. 23 and 24 are referred to as an example of a pair of spacers 40, 40 having ridges 41a and grooves 41b.
  • the ridge portion 41a is arranged on the upper surface of each of the pair of spacers 40, 40, and the groove portion 41b is arranged on the bottom surface of each of the pair of spacers 40,40.
  • the ridge portion 41b of the other gas purification device 1 When the groove portion 41b of the other gas purification device 1 is inserted from the back side and slid in the front direction with respect to the ridge portion 41a of the gas purification device 1, or the groove portion 41b is inserted from the front direction and slid in the back direction, the ridge portion is formed. 41a and groove 41b are fitted to each other, and gas purifying device 1 and another gas purifying device 1 are connected. Reference is now made to FIG. 23 for such a connection method.
  • the gas purifying device 1 emits ultraviolet rays UV to the gas existing in the space S between the pair of electrodes E and the floating matter floating in the gas. can be repeatedly irradiated.
  • the gas G to be purified by the gas purifying device 1 passes through the space S between the pair of electrodes E and exists in the space S while passing through, accompanied by the floating matter.
  • the gas purifier 1 when the gas G to be purified contains viruses as suspended matter, the gas purifier 1 repeatedly irradiates the viruses floating in the gas G to be purified with ultraviolet rays UV. can be used to inactivate a greater amount of virus.
  • the plasma generator 10 provided in the gas purifying device 1 includes a first reflecting mirror M1 and a second reflecting mirror M2 as reflecting mirrors M, the first reflecting mirror M1 and the second reflecting mirror M2 , repeated reflections of the ultraviolet UV can be performed, thus inactivating even greater amounts of virus.
  • the gas purifier 1 generates the plasma P by dielectric barrier discharge, reflects the ultraviolet rays UV emitted by the plasma P, and removes a larger amount of viruses in the gas G to be purified. It can be deactivated.
  • the gas purifier 1 can increase the amount of plasma P to be generated by assuming that the plasma generator 10 provided therein is provided with a reflecting mirror M.
  • the object to be purified is a solid
  • the solid to be purified will remain between the pair of electrodes E. Therefore, by lengthening the time for which the plasma P is generated, the probability that the surface of the solid to be cleaned comes into contact with the plasma P can be increased.
  • the object to be purified is a gas
  • the gas G to be purified passes between the pair of electrodes E, so the time for generating the plasma P is lengthened.
  • the probability that the gas G to be purified comes into contact with the plasma P cannot be increased.
  • the gas purifier 1 generates the plasma P by dielectric barrier discharge, reflects the electromagnetic waves generated by the plasma P, increases the amount of the generated plasma P, and increases the amount of the gas G to be purified. By increasing the probability that the viruses inside come into contact with the plasma P, a greater amount of viruses in the gas G to be purified can be inactivated.
  • the gas purifying device 1 can increase the amount of ozone to be generated by assuming that the plasma generating device 10 provided therein has a reflecting mirror M.
  • ozone has the function of inactivating viruses due to its strong oxidizing power.
  • the gas purifier 1 generates the plasma P by dielectric barrier discharge, reflects the ultraviolet rays UV emitted by the plasma P, and emits the ultraviolet rays UV to the oxygen in the gas G to be purified. Assuming that irradiation can be repeated and the amount of ozone generated can be increased, a greater amount of viruses in the gas G to be purified can be inactivated.
  • the gas purifier 1 can increase the amount of active oxygen generated, and can thereby inactivate a larger amount of viruses in the gas G to be purified.
  • the gas purifying device 1 uses plasma P in combination with ultraviolet rays UV and ozone generated along with plasma P to eliminate viruses and other microorganisms other than viruses, such as bacteria and fungi. In addition to being able to be inactivated, it is also capable of decomposing nitrogen oxides (NOx), volatile organic compounds (VOCs) and other gases that adversely affect the human body. This is equally true for carbon dioxide (CO 2 ), odor-causing ammonia (NH 3 ), and other specific gases, which are sought to be reduced.
  • NOx nitrogen oxides
  • VOCs volatile organic compounds
  • CO 2 carbon dioxide
  • NH 3 odor-causing ammonia
  • the gas purifier 1 can also be used to decompose and purify a specific gas by generating air plasma under atmospheric pressure, and it is particularly useful to do so.
  • Air contains nitrogen (N 2 ) and oxygen (O 2 ), and electromagnetic waves emitted by nitrogen (N 2 ) plasma contain near-ultraviolet rays, which does not change even in the presence of oxygen (O 2 ).
  • the energy of the near-ultraviolet rays excites the gas to be purified, and easily cuts even the bonds between the atoms that make up the gas, especially the ⁇ bonds, which are considered to be difficult to cut. It is possible.
  • the gas purifier 1 when used as described above, it is possible to decompose and purify a wide variety of gases with relatively low energy. Furthermore, in a similar case, for example, when the second electrode 11b is composed of a material that acts as a catalyst, the gas purifier 1 allows the atmospheric pressure plasma excitation and the electrode surface catalytic activity to coexist spatio-temporally. As a result, the gas can be decomposed and purified even more efficiently.
  • the gas can be excited and decomposed as long as the resonance excitation relationship is established. can be done.
  • the second electrode 11b is made of a catalyst metal that is activated as a catalyst by receiving ultraviolet light or heat
  • the second electrode 11b is activated as a catalyst by the heat or light generated with the plasma P. Therefore, a synergistic effect of plasma excitation and catalytic activity can be obtained, and the inactivation of microorganisms and the decomposition of specific gases can be performed more efficiently.
  • the second electrode 11b is made of material that acts as a photocatalyst
  • the near-ultraviolet rays having a wavelength in the range of 300 to 380 nm among the electromagnetic waves emitted by the nitrogen plasma can also activate the photocatalyst. Therefore, the presence of the reflecting mirror M can further enhance the synergistic effect between plasma excitation and catalytic activity.
  • the gas purifier 1 can increase the efficiency of inactivation of microorganisms and decomposition of specific gases. It can also be made lighter.
  • the gas purifier 1 has a plasma generator 10 with a reflecting mirror M, and generates plasma P by dielectric barrier discharge, and reflects ultraviolet UV and other electromagnetic waves generated by the plasma P, For example, it has the following effects.
  • the gas purification device 1 is (1) Repeatedly irradiating the virus in the gas G to be purified with ultraviolet UV, (2) increasing the amount of generated plasma P to increase the probability that the virus in the gas G to be purified comes into contact with the plasma P; (3) By increasing the amount of generated ozone, As a result, a larger amount of viruses in the gas G to be purified can be inactivated.
  • the gas purifier 1 which includes the plasma generator 10, can generate the plasma P by the dielectric barrier discharge and efficiently utilize the ultraviolet UV and other electromagnetic waves generated by the plasma P. .
  • the gas purifier 1 can generate a larger amount of ozone
  • the filter for reducing the concentration of ozone in the gas does not have the ability to decompose the ozone.
  • the space S between the pair of electrodes E is filled with the air in the room. Inactivate the virus in the portion of the indoor air G that has passed through the space S between the pair of electrodes E, thereby inactivating the virus in the entire indoor air G. It will be something that can be done.
  • the gas purifier 1 can be used in combination with other gas purifiers 1.
  • two or more gas purifiers 1 can be connected vertically or horizontally. As a result, the amount of gas that can be purified can be increased compared to when the gas purifier 1 is used alone.
  • the gas purifiers 1, 1 having a structure in which the gas purifier 1 and another gas purifier 1 are vertically coupled via connecting means 41 provided respectively. At this time, it is more preferable that the first electrode 11a of the gas purifier 1 and the third electrode 11c of the other gas purifier 1 are electrically connected, and that they are in contact with each other.
  • the gas purifying devices 1, 1 having a structure in which the gas purifying device 1 and another gas purifying device 1 are horizontally coupled through the second electrodes 11b respectively provided. At this time, it is more preferable that the second electrode 11b of the gas purifier 1 and the second electrode 11b of the other gas purifier 1 are electrically connected, and the gas purifier 1 and the other gas purifier 1 are connected. A structure in which a single second electrode 11b is shared with each other is particularly preferred.
  • the gas purifying device 1 having a structure in which the gas purifiers 1, 1 having a vertically coupled structure and the other gas purifying devices 1, 1 having a vertically coupled structure are further horizontally coupled. , 1,1,1.
  • the gas purifying device 1 having a structure in which the gas purifiers 1, 1 having a horizontally coupled structure and the other gas purifying devices 1, 1 having a horizontally coupled structure are further vertically coupled. , 1,1,1.
  • the gas purifying devices 1, 1 having a vertically coupled structure and the gas purifying device 1 may further have a vertically coupled structure.
  • FIGS. 23 and 24 are referred to as an example of a combination of two or more gas purifiers 1.
  • FIG. 23 and 24 are referred to as an example of a combination of two or more gas purifiers 1.
  • the gas purifying device 101 is for obtaining a purified gas by putting indoor air or other gas G to be purified into the inside, purifying it, and then letting it out to the outside. , for the inflow and outflow of the gas G to be purified.
  • the gas purification device 101 irradiate ultraviolet rays UV toward the outside. That is, the gas purifying device 101 has a gas purifying function, an air blowing function, and preferably an ultraviolet irradiation function.
  • the gas purification device 101 is cylindrical as a whole.
  • the diameter of the gas purification device 101 is preferably 50-150 mm, more preferably 75-125 mm, and particularly preferably 100 mm.
  • the depth of the gas purification device 101 is preferably 170-200 mm, more preferably 180-190 mm, and particularly preferably 185 mm.
  • the gas purifier 101 includes at least a plasma generator 110 and a flow path 120 . In addition to these, the gas purification device 101 further includes a blower device 150 . However, the gas purification device 101 does not include the first filter 130a, nor does it include the second filter 130b.
  • the gas purification device 101 further includes a perforated mirror 160 .
  • the plasma generator 110 is a device for generating plasma P, and constitutes a part of the gas purification device 101 .
  • the plasma generator 110 consists of a combination of an electrode 111, a glass layer 112 and a metal film layer 113. That is, the plasma generator 110 includes, for example, a pair of electrodes E consisting of a first electrode 111a and a second electrode 111b, a first glass layer 112a, and a first metal film layer 113a.
  • the electrodes 111 include a first electrode 111a and a second electrode 111b.
  • a pair of electrodes E is composed of a first electrode 111a and a second electrode 111b.
  • the rest of the electrode 111 is the same as the "electrode 11", so the explanation given for the "electrode 11" ([gas purifier 1/plasma generator 10/electrode 11]) is referred to. ) shall apply mutatis mutandis, excluding the part relating to the “third electrode 11c”.
  • electrode 11 shall be read as “electrode 111” and “first electrode 11a” shall be read as “first electrode 111a”. .
  • first electrode 11a shall be read as “first electrode 111a”.
  • the first electrode 111a is for forming a pair of electrodes E together with the second electrode 111b.
  • the first electrode 111a is ring-shaped.
  • FIGS. 25, 26, 28, 29, 30 and the like are referred to as examples of the first electrode 111a.
  • the surface of the first electrode 111a on the side opposite to the side facing the second electrode 111b has a diameter of 1.5 mm from the viewpoint of facilitating electrical connection from the outside of the gas purifier 101. It is preferable that it protrudes in a plate shape in the direction and penetrates the case 140 to be exposed to the outside.
  • first electrode 11a [gas purifier 1/plasma generator 10/electrode 11/first electrode 11a], except for the portions related to the "first filter 30a", “first spacer 40a” or “second spacer 40b”).
  • FIGS. 25, 26, 28, 29, 30, etc. shall be referred to instead of the drawings referred to in the same description.
  • the second electrode 111b forms a pair of electrodes E together with the first electrode 111a, and also forms a part of the blower device 150. As shown in FIG.
  • FIGS. 25, 26, 28, 29, 30, etc. will be referred to as examples for explanation.
  • the second electrode 111b is wing-shaped. That is, the second electrode 111b is directly or indirectly connected to the rotating shaft, and has a shape capable of blowing air by revolving around the center line of the rotating shaft.
  • the second electrode 111b for example, extends radially from a joint 153a tightly fitted to a drive shaft 152 extending from the prime mover 151, and revolves around the center line of the drive shaft 152 to generate wind.
  • a joint 153a tightly fitted to a drive shaft 152 extending from the prime mover 151, and revolves around the center line of the drive shaft 152 to generate wind.
  • the thickness of the second electrode 111b is preferably 0.2-0.8 mm, more preferably 0.3-0.7 mm, and even more preferably 0.4-0.6 mm.
  • the length of the second electrode 111b (meaning the length extending in the radial direction) is preferably 10 to 30 mm, more preferably 15 to 25 mm.
  • the second electrode 111b has a catalyst layer disposed at its tip portion 111b1. Also, instead of the catalyst layer, a dielectric layer may be arranged. Furthermore, as the two or more second electrodes 111b, the second electrode 111b having the catalyst layer disposed on the tip portion 111b1 and the second electrode 111b having the dielectric layer disposed on the tip portion 111b1 may be combined. The thickness of the catalyst layer or dielectric layer disposed on the tip portion 111b of the second electrode 111b is preferably 20 ⁇ m or more.
  • FIGS. 25, 26, 28, 29, 30, etc. shall be referred to instead of the drawings referred to in the same description.
  • Glass layer 112 there is a first glass layer 112a.
  • the rest of the glass layer 112 is the same as the "glass layer 12", so the explanation of the "glass layer 12" ([gas purification device 1/plasma generator 10/glass layer 12]) ) shall apply mutatis mutandis.
  • a ring-shaped first glass layer 112a is selected according to the shape of the first electrode 111a.
  • first glass layer 112a Since the remainder of the first glass layer 112a is the same as the "first glass layer 12a", the explanation of the "first glass layer 12a” ([gas purifier 1/plasma generator 10/glass layer 12/first glass layer 12a], except for the portions related to the "first spacer 40a" or the "second spacer 40b").
  • first glass layer 12a [gas purifier 1/plasma generator 10/glass layer 12/first glass layer 12a]
  • FIGS. 25, 26, 28, 29, 30, etc. shall be referred to instead of the drawings referred to in the same description.
  • the rest of the metal film layer 113 is the same as the "metal film layer 13", so the explanation of the "metal film layer 13" ([gas purification device 1/plasma generator 10/metal film layer 13] ) shall apply mutatis mutandis.
  • Gas Purifier 101/Plasma Generator 110/Conductive Adhesive Layer 114 As the conductive adhesive layer 114, there are a first electrode side conductive adhesive layer 114a1 in contact with the first electrode 111a and a glass layer side conductive adhesive layer 114b1 in contact with the first glass layer 112a.
  • the conductive adhesive layer 114 is arranged between one metal film and the other metal film, There is a first metal film interlayer conductive adhesive layer 114c1 in contact with these.
  • the rest of the conductive adhesive layer 114 is the same as the "conductive adhesive layer 14", so the explanation of the "conductive adhesive layer 14" ([gas purifier 1/plasma generator 10/conductive Adhesive layer 14] to [gas purifier 1/plasma generator 10/conductive adhesive layer 14/function], provided that "third electrode side conductive adhesive layer 14a2", “second glass layer except for the portions related to the "side conductive adhesive layer 14b2” or “second metal film interlayer conductive adhesive layer 14c2").
  • plasma generator 110 As a mode of combination of the first electrode 111a, the first glass layer 112a, the first metal film layer 113a, and the conductive adhesive layer 114, for example, "plasma generator 10" Examples are the same as those mentioned above.
  • the combination of the first electrode 111a, the first glass layer 112a, the first metal film layer 113a, and the conductive adhesive layer 114 was described with respect to the "plasma generator 10" ([gas purification device 1/plasma Combination of Generator 10/Electrode 11, Glass Layer 12, Metal Film Layer 13, and Conductive Adhesive Layer 14]) applies mutatis mutandis.
  • the first glass layer 112a and the first metal film layer 113a constitute a reflecting mirror M together.
  • the reflecting mirror M is for reflecting the ultraviolet rays UV emitted by the plasma P. Furthermore, the reflecting mirror M can also increase the amount of plasma P to be generated.
  • the first glass layer 112a transmits ultraviolet rays, and the first metal film layer 113a reflects the ultraviolet rays transmitted through the first glass layer 112a. At this time, the first glass layer 112a protects the first metal film layer 113a from damage caused by factors that may reduce the UV reflectance of the first metal film layer 113a, such as plasma, UV light, and oxidation.
  • the first electrode 111a is made of a metal having a property of reflecting ultraviolet rays, and the first electrode 111a and the first glass layer 112a are separated from each other without the first metal film layer 113a interposed therebetween.
  • the reflecting mirror M can be composed of the first electrode 111a and the first metal film layer 113a instead of being composed of the first glass layer 112a and the first metal film layer 113a. can.
  • the first electrode 111a is ring-shaped, and accordingly the first glass layer 112a and the first metal film layer 113a are both ring-shaped.
  • the reflecting mirror M is also annular. For this reason, a pair of mirrors are formed between the portions of the inner surface of the reflecting mirror M that face each other, and the ultraviolet rays are repeatedly reflected between them or between them and the perforated mirror 160 . will be done.
  • FIGS. 25, 26, 27, 28, 29, 30 and the like will be referred to as examples of such a reflecting mirror M.
  • nitrogen gas (N 2 ) exists in the space S between the pair of electrodes E, nitrogen plasma is generated, and this nitrogen plasma emits ultraviolet rays UV.
  • the reflecting mirror M When the ultraviolet rays UV hit the reflecting mirror M, the reflecting mirror M reflects the ultraviolet rays UV without absorbing them.
  • FIG. 27 Here, reference is made to FIG. 27 regarding the reflecting mirror M reflecting ultraviolet rays UV.
  • the plasma generator 110 reflects the ultraviolet rays UV
  • the increase in the amount of the plasma P and the increase in the amount of ozone etc. are the same as in the case of the "plasma generator 10".
  • the description of the "plasma generator 10" (from [gas purifier 1/plasma generator 10/action] to [gas purifier 1/action/increasing the amount of ozone, etc.).
  • the third electrode 11c shall apply mutatis mutandis.
  • the flow path 120 is a portion through which the indoor air or other gas G to be purified flows in the gas purifier 101 .
  • the plasma generator 110 is arranged in any part of the flow path 120 , and the gas G to be purified is purified while flowing through the flow path 120 .
  • the channel 120 is composed of at least an inlet 120a, an outlet 120b, and a path 120c.
  • the inlet 120a is an opening through which the gas G to be purified enters the inside of the gas purifier 101 .
  • the outlet 120b is an opening through which the gas G to be purified exits the gas purifier 101 .
  • the path 120c is a passage for the gas G to be purified to flow from the inlet 120a to the outlet 120b.
  • the gas G to be purified enters from the inlet 120a in the gas purification device 101, flows through the path 120c from the direction of the inlet 120a to the direction of the outlet 120b, and exits from the outlet 120b.
  • the inlet 120a and the outlet 120b are opened toward the room or connected to the room via conduits.
  • the mouth and nose of an infectious disease patient, the refrigerant pipe of an air conditioner, the internal combustion engine, and other sources of the gas The inlet 120a is connected via a conduit, and the outlet 120b is opened indoors or opened outdoors via a conduit.
  • the portion of the path 120c that is on the inlet 120a side of the reference is referred to as the "upstream side of the flow path 120 (of the reference)", and is on the outlet 120b side of the reference.
  • the portion is referred to as "the downstream side of the flow path 120 (that which serves as a reference)”.
  • the inlet 120a side is the front side of the gas purification device 101
  • the outlet 120b side is the rear side of the gas purification device 101. As shown in FIG.
  • the specific mode of the channel 120 is not particularly limited as long as the gas G to be purified can flow as described above. It is preferably composed of Here, FIGS. 25, 26, 28, 29, 30, etc. will be referred to as examples of such a channel 120. FIG.
  • the inlet 120a is preferably a through-hole surrounded by the case 140 and arranged at one end of the side portions of the case 140 . More preferably, the inlets 120a are configured as a pair on the left and right.
  • FIGS. 26, 28, 29, 30 and the like are referred to as examples of such an inlet 120a.
  • the outlet 120b is preferably an opening surrounded by the case 140 and arranged on the other end side of the case 140 . 25, 26, 28, 29, 30, etc. will be referred to as examples of such an outlet 120b.
  • the path 120c is preferably composed of a first portion 120c1 surrounded by the first glass layer 112a and a second portion 120c2 surrounded by the inner surface of the case 140. Further, it is more preferable that the first portion 120c1 is arranged downstream of the second portion 120c2 in the channel 120. As shown in FIG. Here, FIG. 26, FIG. 29, FIG. 30, etc. will be referred to as an example of such a path 120c.
  • the first portion 120c1 a space S between the pair of electrodes E is formed between the second electrode 111b and the first glass layer 112a, and plasma P is generated in this space S.
  • the gas G to be purified is purified while passing through the space S and the portion subsequent to the space S in the path 120c.
  • the perforated mirror 160 is arranged in the second portion 120c2.
  • the third filter 130c is preferably arranged upstream of the perforated mirror 160 in the channel 120c.
  • the filter 130 is for reducing the concentration of a specific gas in the gas when the gas passes through it.
  • the gas purifying device 101 does not include the first filter 130a nor the second filter 130b. However, the gas purification device 101 may be provided with the third filter 130c.
  • the gas purifier 101 does not include the first filter 130a, it is possible to prevent the ozone-containing gas G from being discharged to the outside from the outlet 120b on the downstream side of the second electrode 111b in the channel 120. There are no obstacles.
  • the gas purification device 101 does not include the first filter 130a nor the second filter 130b, the ultraviolet rays UV exit at the downstream side of the second electrode 111b in the channel 120. There is nothing to prevent the external irradiation from 120b.
  • the gas purifier 101 can emit the ozone-containing gas G to the outside from the outlet 120b, and can irradiate the ultraviolet rays UV to the outside from the outlet 120b. Become.
  • the third filter 130c is arranged upstream of the second electrode 111b in the channel 120. Further, when the gas purifier 101 is provided with the perforated mirror 160 , the third filter 130 c is arranged upstream of the perforated mirror 160 in the channel 120 .
  • filter 30 The rest of the filters 130 (including the first filter 130a, the second filter 130b and the third filter 130c) are referred to as "filter 30" ("first filter 30a", “second filter 30b” and “third filter 30c"), so the description of the "filter 30” (from [gas purification device 1/filter 30] to [gas purification device 1/filter 30/relationship between electrode 11 and filter 30/ Means for Solving Problems Concerning Filter 30], except for the part relating to the “third electrode 11c”).
  • the case 140 accommodates each element that constitutes the gas purifier 101, arranges them in a predetermined relationship, and protects them.
  • the specific mode of the case 140 is not particularly limited as long as it satisfies the above requirements. selected.
  • the case 140 is preferably made of an insulator, or made of a metal that is strong and capable of electromagnetic shielding.
  • an insulator is interposed between the case 140 and the first electrode 111a.
  • the case 140 has an annular shape according to the shape of the first electrode 111a.
  • the case 140 preferably has a circular shape, and may have a cylindrical shape with one end closed and the other end open. More preferably, it may be open at both ends.
  • the case 140 has an inlet 120a at one end and an outlet 120b at the other end.
  • the inlet 120a is preferably configured as a through hole arranged at one end of the side portion of the case 140, and the outlet 120b is configured as an opening arranged at the other end of the case 140. is preferred.
  • FIGS. 25, 26, 28, 29, 30 and the like are referred to as examples of such a case 140.
  • the case 140 may be composed of a single member, or may be composed of two or more members.
  • the blower 150 blows air to let the gas G to be purified enter through the inlet 120a and exit through the outlet 120b, and includes the second electrode 111b as a part thereof.
  • the blower device 150 includes, for example, a prime mover 151, a drive shaft 152 extending axially from the prime mover 151, an impeller 153 tightly fitted to the drive shaft 152, and a mounting member 154 radially extending from the prime mover 151. It will be.
  • the impeller 153 includes a stem 153a and two or more second electrodes 111b.
  • the two or more second electrodes 111b are spaced apart from each other along the circumferential direction of the lobe 153a, and each extend along the radial direction of the lobe 153a.
  • the blower device 150 is attached to the case 140 via, for example, an attachment member 154 and arranged inside the case 140 .
  • the second electrode 111b which constitutes a part of the blower device 150 as a part of the impeller 153, is arranged with a distance from the first electrode 111a. That is, the mounting member 154 functions as a spacer by arranging the blower device 150 at a predetermined position.
  • FIGS. 25, 26, 28, 29, 30 and the like are referred to as examples of such a blower device 150.
  • the drive shaft 152 rotates around its center line.
  • the joint 153 a tightly fitted to it revolves around the center line of the drive shaft 152 together with the impeller 153 .
  • the second electrode 111b revolves around the center line of the drive shaft 152, and air flows from the inlet 120a toward the outlet 120b, and blowing starts.
  • the plasma P is generated by applying a predetermined voltage to the pair of electrodes E composed of the first electrode 111a and the second electrode 111b while moving the prime mover 151.
  • the gas G containing ozone can be sent as wind, and ultraviolet rays UV can be generated in the space S between the pair of electrodes E.
  • FIG. 27 will be referred to regarding the fact that the air blower 150 generates the gas G containing ozone and the ultraviolet rays UV.
  • the perforated mirror 160 reflects the ultraviolet rays UV generated in the space S between the pair of electrodes E, thereby efficiently irradiating the ultraviolet rays UV from the exit 120b toward the outside of the gas purifier 101. be.
  • the perforated mirror 160 is preferably made of an annular flat mirror. However, instead of the flat mirror, a convex mirror or a concave mirror may be used.
  • FIGS. 25, 26, 29, 30, etc. will be referred to as examples for explanation.
  • the perforated mirror 160 preferably has two or more ventilation holes 161 and further has a central hole 162 .
  • the ventilation hole 161 is a through hole penetrating the perforated mirror 160.
  • circular through holes are arranged at intervals along the circumferential direction of the perforated mirror 160. is preferred.
  • the specific aspect of the ventilation hole 161 is not particularly limited as long as it can pass air.
  • a central hole 162 is a hole passing through the center of the perforated mirror 160, and is for passing part or all of the air blower 150 therethrough.
  • the pair of electrodes E and the perforated mirror 160 are brought closer to each other to reduce the reflection of the ultraviolet rays UV. can be done efficiently. For example, by allowing the motor 151 to pass through the center hole 162, it is preferable that the perforated mirror 160 and the pair of electrodes E are brought close to each other and the rotation of the second electrode 111b is not hindered.
  • the perforated mirror 160 is arranged so that the mirror surface side faces the exit 120b side.
  • the perforated mirror 160 intersects the path 120c and is arranged upstream of the second electrode 111b in the flow path 120.
  • the perforated mirror 160 is preferably arranged closer to the inlet 120a than the first electrode 111a, and is particularly preferably close to the first electrode 111a. At this time, the perforated mirror 160 can reflect the ultraviolet rays UV more efficiently.
  • the gas purifying device 101 further includes a perforated mirror 160 in addition to the reflecting mirror M, so that it can efficiently irradiate ultraviolet rays UV from the exit 120b toward the outside.
  • the perforated mirror 160 intersects with the path 120c, it has the ventilation holes 161, so it does not interfere with the passage of air.
  • the gas purifier 101 has a plasma generator 110 with a reflecting mirror M, and generates plasma P by dielectric barrier discharge. For example, it has the following effects.
  • the gas purification device 101 (1) Repeatedly irradiating the virus in the gas G to be purified with ultraviolet UV, (2) increasing the amount of generated plasma P to increase the probability that the virus in the gas G to be purified comes into contact with the plasma P; (3) By increasing the amount of ozone or other activated gas it generates, As a result, a larger amount of viruses in the gas G to be purified can be inactivated.
  • the gas purifying device 101 is provided with a blower 150, which can discharge the generated gas G containing a larger amount of ozone to the outside of the gas purifying device 101, For example, it can inactivate viruses floating in the indoor air as well as viruses adhering to indoor floors, walls and other surfaces.
  • ultraviolet rays UV can be irradiated toward the outside of the gas purifying device 101, for example, It can also inactivate viruses attached to indoor floors, walls and other surfaces.
  • the gas purifier 101 emits ozone-containing gas G to the outside and irradiates ultraviolet rays UV, with reference to FIG. 27 and the like.
  • ozone-containing gas G and ultraviolet rays UV have an undesirable effect on the human body, when releasing or irradiating them indoors, avoid nights or other times when there are no people in the room. It is preferable to choose.
  • Another gas purifier 201 is for obtaining a purified gas by putting indoor air or other gas G to be purified inside, purifying it, and then letting it out to the outside. This is for taking in and out the gas G to be purified. That is, the other gas purifier 201 has a function of blowing air in addition to the function of purifying gas.
  • Another gas purifier 201 includes at least a plasma generator 210 and a flow path 220 .
  • another gas purification device 201 further includes a blower device 250 .
  • another gas purification device 201 further includes a first filter 230a.
  • another gas purifying device 201 may be provided with the second filter 230b, or may be provided with the third filter 230c.
  • the first filter 230a is preferably arranged between the first electrodes 211a and is in contact with the inner peripheral surface thereof.
  • the second filter 230b is preferably arranged between the first electrodes 211a and is in contact with the inner peripheral surface thereof.
  • the other gas purifying device 201 when comparing the other gas purifying device 201 and the gas purifying device 101, the other gas purifying device 201 has at least the first filter 230a, whereas the gas purifying device 101 has the first filter 130a. and does not include the second filter 130b, and the rest are common.
  • the explanation of the "gas purifier 101" shall apply mutatis mutandis.
  • the gas purification device 101/perforated mirror 160 “the gas purification device 101 is provided with the perforated mirror 160, so that it can irradiate ultraviolet rays UV from the outlet 120b toward the outside. ' can be read as 'the other gas purifying device 201 can repeat the reflection of ultraviolet rays UV inside it by providing the perforated mirror 260 '.
  • Another gas purifier 201 has a plasma generator 210 with a reflecting mirror M, and generates plasma P by dielectric barrier discharge, and reflects ultraviolet UV and other electromagnetic waves generated by the plasma P.
  • a plasma generator 210 with a reflecting mirror M, and generates plasma P by dielectric barrier discharge, and reflects ultraviolet UV and other electromagnetic waves generated by the plasma P.
  • the gas purification device 201 (1) Repeatedly irradiating the virus in the gas G to be purified with ultraviolet UV, (2) increasing the amount of generated plasma P to increase the probability that the virus in the gas G to be purified comes into contact with the plasma P; (3) By increasing the amount of ozone or other activated gas it generates, As a result, a larger amount of viruses in the gas G to be purified can be inactivated.
  • the other gas purifying device 201 further comprises a perforated mirror 260, the other gas purifying device 201 will repeat the reflection of the ultraviolet rays UV inside it to produce an even greater amount of of viruses can be inactivated.
  • the self-propelled gas purifying device 1001 puts indoor air or other gas G to be purified into the interior, purifies it, and then discharges it to the outside to obtain the purified gas. By blowing air by itself, it is possible to take in and out the gas G to be purified and to run by itself.
  • the self-propelled gas purification device 1001 includes, for example, a traveling means 1010 for traveling on the floor surface, a driving means (not shown) for driving the traveling means 1010, and a driving means. and automatic control means (not shown) for control, and more preferably, another gas purifying device 201 in addition to these.
  • the traveling means 1010 is arranged on the bottom surface of the self-propelled gas purifier 1001, and consists of, for example, two or more wheels. Further, the traveling means 1010 is preferably controlled by automatic control means.
  • the gas purifying device 101 also has a blowing function, and by attaching it to a device other than an air conditioner, it is possible to give the device a gas purifying function and a blowing function.
  • the gas purifier 101 it is preferable to attach the gas purifier 101 to a device 1000 that runs automatically (hereinafter simply referred to as a "self-propelled device") 1000, so that the self-propelled gas purifier 1001 further has a self-propelled function.
  • self-propelled devices include self-propelled robots and self-propelled vacuum cleaners.
  • the outlet 120b of the gas purification device 101 is preferably directed downward.
  • the self-propelled gas purifier 1001 blows the gas G containing ozone toward the floor from the outlet 120b and irradiates the floor with ultraviolet rays UV from the outlet 120b.
  • the specific aspect of the mounting position is not particularly limited, but for example, the outlet 220b of the other gas purifying device 201 is directed forward. is preferred.
  • FIGS. 31 and 32 are referred to as an example of the self-propelled gas purifier 1001 as described above.
  • the self-propelled gas purifier 1001 can inactivate viruses in the air or on the floor by discharging the ozone-containing gas G and ultraviolet rays UV while automatically traveling. Become. Moreover, this also applies to microorganisms other than viruses.
  • the gas activation device 301 is for obtaining an activated gas by putting the gas G to be activated inside, activating it, and then letting it out. That is, the gas activation device 301 has a gas activation function.
  • gas G to be activated includes not only the gas itself to be activated, but also the gas that is actually activated and the gas in the state between these. It is assumed that there is This also applies to the drawings.
  • Gases to be activated include, for example, air, oxygen (O 2 ), nitrogen (N 2 ), and hydrogen (H 2 ).
  • the air includes the air in the airtight container as well as the air in the room.
  • gases to be activated include noble gases and mixed gases of halogen gases and noble gases, but are not particularly limited to the above.
  • the activated gas examples include, when the gas to be activated contains oxygen (O 2 ), active oxygen in addition to ozone (O 3 ), and nitrogen (N 2 ). Excited molecules (N 2 ) or excited atoms (N) of nitrogen may be mentioned.
  • the activated gas is released to the outside of the gas activation device 301, and the activated gas and the gas to be purified are brought into contact with each other, thereby exciting and decomposing the gas to be purified, You can also purify it. That is, to excite a gas is to activate it, and possibly to purify it.
  • the voltage, frequency, and other conditions for generating plasma are optimized, thereby optimizing the discharge form of the generated plasma.
  • the second electrode 311b is composed of a material that acts as a catalyst, plasma excitation and electrode It is also necessary and important to coexist with the surface catalytic activity spatio-temporally, thereby rendering harmful substances contained in the gas to be purified as harmless as possible.
  • the gas activation device 301 constitutes the solid purification device 2001 by being arranged and used inside the sealed container 2000 or being arranged and used indoors.
  • the gas activation device 301 includes at least a plasma generator 310 and a flow path 320. However, gas activation device 301 does not include filter 330 .
  • the depth of the gas activation device 301 is preferably 10-40 mm, more preferably 15-35 mm, and even more preferably 20-30 mm.
  • the size (excluding the depth) and weight of the gas activation device 301 are the same as in the "gas purification device 1", so the explanation given for the "gas purification device 1" applies mutatis mutandis.
  • the plasma generator 310 is for forming a part of the gas activation device 301 as a device for generating plasma P. As shown in FIG.
  • the flow path 320 is a portion through which the gas G to be activated flows in the gas activation device 301 .
  • the plasma generator 310 is arranged in any part of the channel 320 , and the gas G to be activated is activated while flowing through the channel 320 .
  • the inlet 320a and the outlet 320b are opened toward the inside of the closed container, or the closed container is opened through a conduit. connect within.
  • the inlet 320a and the outlet 320b are opened toward the room or connected to the room via conduits.
  • the filter 330 is for reducing the concentration of a specific gas in the gas when the gas passes through it.
  • the gas activation device 301 does not include the filter 330 . That is, the gas activation device 301 does not include the first filter 330a, the second filter 330b, or the third filter 330c.
  • FIG. 13B will be applied and referred to.
  • the gas activation device 301 does not include the first filter 330a and other filters 330, the activated gas G such as ozone is discharged from the outlet 320b to the outside in the flow path 320 downstream of the second electrode 311b. There is nothing to prevent it from being emitted towards
  • the gas activation device 301 can release ozone or other activated gas G to the outside from the outlet 320b.
  • filter 30 The rest of the filters 330 (including the first filter 330a, the second filter 330b and the third filter 330c) are referred to as “filter 30" ("first filter 30a", “second filter 30b” and “third filter 30c"), so the description of the "filter 30” (from [gas purification device 1/filter 30] to [gas purification device 1/filter 30/third filter 30c] ) shall apply mutatis mutandis.
  • “gas purifier 1" is read as "gas activator 301".
  • the gas purifying device 301 is provided with a plasma generator 310 having a reflecting mirror M, and generates plasma P by dielectric barrier discharge. For example, it has the following effects.
  • the gas purifying device 301 repeatedly irradiates the gas G to be activated with ultraviolet rays UV or other electromagnetic waves, or increases the amount of the generated plasma P, thereby increasing the amount of the gas to be activated. By increasing the probability that G contacts the plasma P, the amount of activated gas generated can be increased.
  • the gas purifier 301 uses a larger amount of ozone (O 3 ) as well as a larger amount of active oxygen. can be generated.
  • the sealed container 2000 constitutes a premise for using the gas activation device 301 as the solid purification device 2001 by using the gas activation device 301 inside it. That is, the closed vessel 2000 does not always constitute the solid purification device 2001 . However, the solid purification device 2001 may be provided with the sealed container 2000 in advance.
  • the sealed container 2000 is sealed with the gas activator 301 and the solid O to be purified inside, and is filled with the activated gas G emitted by the gas activator 301. , to keep the activated gas G in contact with the surface of the solid O to be purified.
  • the closed container 2000 is preferably made of metal, and for example, lockers provided in indoor facilities can be used as they are.
  • the sealed container 2000 includes, for example, a sealed container main body 2000a, a hinge 2000b, and a door 2000c.
  • the door 2000c is connected to the sealed container main body 2000a via a hinge 2000b so as to be openable and closable.
  • a person who intends to use the sealed container 2000 opens the door 2000c, stores the solid O to be stored inside the sealed container main body 2000, and then closes the door 2000c to seal it.
  • FIGS. 37 and 38 are referred to as an example of the closed container 2000 as described above.
  • Solid purification device 2001 The solid purifier 2001 is arranged inside the closed container 2000 together with the solid O to be purified, and fills the inside of the closed container 2000 with the activated gas G to obtain the purified solid. That is, the solid purification device 2001 has a solid purification function.
  • Solids O to be purified include, for example, medical equipment, medical clothing, and other items used for providing medical care and equivalent actions (persons receiving the provision of medical care and equivalent actions (Including things to be handed out.) Including things to be used.), vegetables, fruits, and other perishable foods.
  • the solid purification device 2001 includes at least the gas activation device 301. That is, the gas activation device 301 is used inside the sealed container 2000 to configure the solid purification device 2001 .
  • the solid purifier 2001 may be constituted by a sealed container 2000 in which the gas activation device 301 is installed in advance.
  • the solid purifier 2001 preferably includes, for example, a blower 2010 in addition to the gas activation device 301, and also includes a box 2020, a power supply 2030, a control means 2040, a detection means 2050, and an installation means. 2060, and is preferably further provided.
  • FIGS. 33, 34, 35, 36 and the like are referred to as examples of the solid purification device 2001 as described above.
  • the solid purifier 2001 may include the gas purifier 101 as a gas activator instead of including the gas activator 301 and the blower 2010 . This is because the gas purifying device 101 does not include the filter 130 and thus can be used as a gas activating device.
  • the gas activating device 301 puts the gas G to be activated inside, activates it, and then lets it out to obtain the activated gas, which fills the inside of the sealed container 2000. is. That is, the gas activation device 301 has a gas activation function.
  • the number of gas activation devices 301 may be one, or two or more, for example, three gas activation devices 301, 301, and 301 may be used.
  • FIGS. 35, 36, etc. will be referred to as examples of the three gas activation devices 301, 301, 301 constituting the solid purification device 2001.
  • FIG. 35, 36, etc. will be referred to as examples of the three gas activation devices 301, 301, 301 constituting the solid purification device 2001.
  • the rest of the gas activating device 301 is the same as the "gas activating device 301". 301/operation]) is referred to.
  • the blower 2010 is for blowing air toward the gas activating device 301 so that the gas G to be activated is introduced from the inlet 320a of the gas activating device 301 and discharged from the outlet 320b. It is also for entering from the entrance 2020a of the box 2020 and leaving from the exit 2020b.
  • the blower device 2010 includes, for example, a motor, a drive shaft extending axially from the motor, an impeller tightly fitted to the drive shaft, a mounting member extending radially from the motor, and a frame connected to the mounting member. and consists of
  • the blower device 2010 is preferably arranged on the side of the inlet 320 a with respect to the gas activation device 301 . As a result, the activated gas G can be released to the outside of the gas activation device 301 before it loses its activity. However, the arrangement of the air blower 2010 on the side of the outlet 320b is not prevented.
  • blowers 2010 may be one, or two or more, for example, three blowers 2010, 2010, 2010.
  • 35, 36, etc. will be referred to as an example of the three blowers 2010, 2010, 2010 that are arranged on the inlet 320a side of the gas activation device 301 and constitute a part of the solid purification device 2001. .
  • Box 2020 is for enclosing gas activation device 301 and blower device 2010 therein so as to place them in proper relation to each other.
  • the box 2020 is preferably capable of containing, for example, a power source 2030, and more preferably capable of being provided with control means 2040, detection means 2050 and installation means 2060.
  • the box 2020 has at least a space large enough to accommodate the gas activation device 301 and the blower device 2010 therein, an inlet 2020a for entering the gas G to be activated, and an activated and an outlet 2020b for the gas G to exit. Also, the box 2020 preferably comprises a box body 2020c and a lid 2020d.
  • FIGS. 33, 34, 35, 36 and the like are referred to as examples of the box 2020 as described above.
  • the power supply 2030 is for applying voltage to the plasma generator 310 included in the gas activation device 301 .
  • the power source 2030 can apply voltages to the air blower 2010, the control means 2040, and the detection means 2050, respectively.
  • the power supply 2030 is placed inside the box 2020 and electrically connected to the gas activator 301 and other devices to which voltage is to be applied through electric wires (not shown). Reference is now made to FIGS. 35 and 36 as examples of such a power supply 2030.
  • FIG. 35 and 36 as examples of such a power supply 2030.
  • the power source 2030 is not particularly limited as long as it can apply a predetermined voltage to a gas activation device or other device to which a voltage is to be applied. It may consist of a storage battery that stores electricity and a transformer for converting the voltage obtained from this to a predetermined voltage, or a wire for connecting to another external power supply and the voltage obtained from this and a transformer for converting to a predetermined voltage.
  • the control means 2040 determines whether or not the power supply 2030 applies voltage to the plasma generator 310 provided in the gas activation device 301, and, for example, what level of voltage is applied when the voltage is applied. and other matters necessary for the solid purification device 2001 to achieve its purpose, are controlled according to the request of the person who intends to use the solid purification device 2001 or according to a predetermined place. It is for
  • the control means 2040 preferably comprises an operation means 2040a and a display means 2040b, as well as storage means (not shown) and calculation means (not shown).
  • the operating means 2040a determines whether or not the power source 2030 applies voltage to the plasma generator 310 provided in the gas activation device 301, and if voltage is to be applied, what level of voltage to apply. It is for a person who intends to use the solid purification device 2001 to operate it.
  • control means 2040 has a function of waiting for a predetermined period of time after determining to perform a predetermined process and starting the process, and a function of waiting a predetermined period of time after starting the predetermined process. It is preferable to further have a function of waiting for progress and ending the processing.
  • the display means 2040b is for displaying the result or state of the operation.
  • the display means 2040b is preferably capable of displaying information detected by the detection means 2050, and more preferably uses a liquid crystal display.
  • FIG. 33(a), FIG. 34(b), FIG. 35, etc. will be referred to as an example of the control means 2040 including the operation means 2040a and the display means 2040b.
  • operation means 2040a and the display means 2040b may use touch panels.
  • the detection means 2050 is for detecting the concentration of ozone or other specific gas, or detecting the presence or approach of a human inside or near the sealed container 2000 in which the gas activation device 301 is installed. be.
  • the detection means 2050 is preferably arranged on the surface of the box 2020, and is preferably arranged on the surface of the box 2020 on the bottom side.
  • FIGS. 33, 34(a), 35, 36 and the like are referred to as examples of such detection means 2050.
  • FIG. 33, 34(a), 35, 36 and the like are referred to as examples of such detection means 2050.
  • the power supply 2030 is directed to the gas activation device 301 through the control means 2040. Perform processing to stop applying voltage.
  • the detection means 2050 performs similar processing when it detects a person approaching the vicinity of the closed container 2000 when, for example, the closed container 2000 is unsealed.
  • the installation means 2060 is for installing the solid purification device 2001 inside the closed container 2000 by attaching the gas activation device 301 to the inner surface of the closed container 2000 .
  • the installation means 2060 may be arranged on the upper surface side of the box 2020, and the solid purification device 2001 may be placed on the wall surface of the closed container 2000. When installed, it may be placed on the side of the box 2020 .
  • the installation means 2060 is preferably made of a magnet.
  • the number of installation means 2060 may be one, but preferably two or more.
  • Solid purification device 2001/Method of use A method of using the solid purification device 2001 is as follows. Here, reference is made to FIGS. 37 and 38 as examples for explanation.
  • a person who intends to use the solid purification apparatus 2001 performs, for example, the following operations.
  • C Seal the closed container 2000 again.
  • the solid purification device 2001 performs the following processing.
  • the control means 2040 waits for a predetermined time to pass, and instructs the power source 2030 to apply a predetermined voltage to the plasma generator 310 of the gas activation device 301, and the blower 2010 Command the gas activation device 301 to blow air.
  • the gas activation device 301 and the blower device 2010, according to the command from the control means 2040, introduce the air G inside the sealed container 2000 from the inlet 320a, activate it, and then let it out from the outlet 320b. At this time, for example, oxygen (O 2 ) contained in the air G produces not only ozone (O 3 ) but also active oxygen.
  • the control means 2040 waits for another predetermined time to pass, and instructs the power source 2030 to stop applying a predetermined voltage to the plasma generator 310 of the gas activation device 301, and The blower 2010 is commanded to stop blowing the gas activation device 301, and the power source 2030 and the blower 2010 follow the command.
  • Ozone or other activated gas G filling the inside of the sealed container 2000 loses its activity over time.
  • the sealed container 2000 is unsealed, and the purified solid O is obtained from its interior.
  • Solid purification device 2001/action As described above, the solid purification apparatus 2001 generates plasma P by dielectric barrier discharge, reflects ultraviolet rays UV and other electromagnetic waves generated by plasma P, and generates a greater amount of activated gas G. and inactivate a greater amount of viruses adhering to the surface of the solid O to be purified.
  • the solid O to be purified is perishable food
  • the solid O to be purified is stored in the closed container 2000 and the solid purification device 2001 is continuously operated to hold the solid O to be purified. It is possible to inactivate the mold adhering to the surface of O, prevent it from multiplying, and keep the solid O to be purified while maintaining its freshness.
  • Air conditioning purification device 401 The air conditioning and purifying device 401 is for taking indoor air G inside, regulating it, purifying it, and then letting it out. That is, the air conditioning and purification device 401 has an air purification function in addition to the air conditioning function.
  • the air conditioning purification device 401 is, for example, as follows. Reference is now made to FIG. 39 as an illustrative example.
  • the air conditioning purification device 401 can be manufactured, for example, by attaching the gas purification device 1 to the indoor unit 400 of the air conditioning device.
  • the air conditioning device is a device for adjusting while circulating indoor air G, and for example, an indoor unit 400, an outdoor unit (not shown), and between the indoor unit 400 and the outdoor unit. and a refrigerant pipe (not shown) to be connected.
  • the indoor unit 400 is installed indoors, and generally includes a case 410, a flow path 420, a blower 430, a heat exchanger 440, and a drain pan 450.
  • the flow path 420 is a portion of the indoor unit 400 through which the indoor air G to be adjusted flows, and is composed of at least an inlet 420a, an outlet 420b, and a path 420c.
  • the inlet 420 a is normally arranged on the upper surface side of the case 410 and the outlet 420 b is arranged on the front side of the case 410 .
  • the indoor air G enters from the inlet 420a, flows through the path 420c from the direction of the inlet 420a to the direction of the outlet 420b, and exits from the outlet 420b.
  • the room air G to be adjusted is guided by the blower 430, and is cooled and otherwise adjusted in the process of passing near the heat exchanger 440 arranged between the paths 420. .
  • the indoor air G is cooled by the heat being absorbed by the refrigerant in the heat exchanger 440. At this time, the water vapor contained in the indoor air G is condensed and becomes a liquid, and the heat is exchanged. Dew condensation forms on the surface of the container 440 .
  • Drain pan 450 is arranged below heat exchanger 440 as a receiver for receiving this condensation.
  • An outlet 420 b is arranged below the drain pan 450 .
  • the gas purifier 1 has an inlet 20a arranged on the upstream side and an outlet 11b arranged on the downstream side. It is attached to the indoor unit 400 as follows.
  • the space in which the gas purification device 1 is arranged is preferably, for example, the vicinity of the entrance 420a of the indoor unit 400 or the vicinity of the exit 420b of the indoor unit 400. Proximity to exit 420b of machine 400 is more preferred.
  • the gas purification device 1 When arranging the gas purification device 1 near the outlet 420b of the indoor unit 400, the gas purification device 1 is preferably attached to the lower side of the drain pan 450, for example.
  • the gas purification device 1 is attached to the indoor unit 400 to constitute the air conditioning and purification device 401.
  • the gas purification device 1 includes a case 50, a power supply (not shown), a control means 60, and an attachment means (not shown). , is preferably further provided.
  • the case 50 can accommodate, in its interior, devices other than the case 50 among devices constituting the gas purification device 1, such as the plasma generator 10, the flow path 20, the filter 30, and the spacer 40.
  • the power supply can be accommodated and the control means 60 can be arranged on the surface thereof.
  • the power supply is for applying voltage to the plasma generator 10 provided in the gas purifier 1.
  • the power supply is preferably capable of applying voltage to the control means 60 as well.
  • the power supply is placed inside the case 50 and electrically connected to the plasma generator 10 and other devices to which voltage is to be applied through electric wires (not shown).
  • the power supply preferably consists of a wire for connecting to the power supply for the indoor unit 400 and a transformer for converting the voltage obtained from this to a predetermined voltage.
  • the control means 60 determines whether or not the power source applies voltage to the plasma generator 10 provided in the gas purifier 1, and, if voltage is to be applied, for example, what magnitude the voltage should be.
  • the gas purifying device 1, in the air conditioning purification device 401 in response to the request of the person who intends to use the air conditioning purification device 401, or in advance It is for controlling according to the prescribed place.
  • the control means 60 preferably comprises an operation means 60a and a display means 60b, as well as storage means (not shown) and calculation means (not shown).
  • the operation means 60a determines whether or not the power source applies voltage to the plasma generator 10 provided in the gas purifying device 1, and if voltage is applied, how large the voltage should be. , to be operated by a person who intends to use the air conditioning purification device 401 .
  • the display means 60b is for displaying the result or state of the operation, and more preferably uses a liquid crystal display, for example.
  • the operation means 60a and the display means 60b may use touch panels.
  • the installation means is for attaching the gas purification device 1 to the indoor unit 400 , and is preferably arranged on the upper surface of the gas purification device 1 , more preferably on the upper surface of the case 50 .
  • the air conditioning purification device 401 By applying voltage to the air conditioner and also to the gas purification device 1, the air conditioning purification device 401 starts to operate.
  • the air conditioning purification device 401 When the air conditioning purification device 401 starts to operate, it purifies the indoor air G while adjusting it. Looking at this in more detail, for example, it is as follows.
  • the indoor air G is guided by the blower 430, enters the interior of the indoor unit 400 from the inlet 420a of the air conditioner 400, and is cooled while passing near the heat exchanger 440 in the process of passing through the path 420c. , after adjustment such as heating, enters the interior of the gas purifier 1 from the inlet 20a of the gas purifier 1, and in the process of passing through the path 20c, while passing through the space S between the pair of electrodes E After the viruses and other microorganisms are inactivated, they exit from the outlet 20b of the gas purifier 1 to the outside of the gas purifier 1, and then exit from the outlet 420b of the indoor unit 400 to the outside of the indoor unit 400. , will reach the room again.
  • the air conditioning and purifying device 401 repeats the adjustment and purification as described above while circulating the indoor air G, thereby adjusting and purifying the indoor air G. is.
  • the plasma generator 10 In place of the pair of electrodes E composed of the first electrode 11a and the second electrode 11b, the plasma generator 10 includes a pair of electrodes E composed of a first plate-like electrode 11e and a second plate-like electrode 11f. (hereinafter referred to as "second plasma generator 10").
  • the second plasma generator 10 includes the first plate-like electrode 11e and the second plate-like electrode 11f arranged with a distance between the first plate-like electrode 11e and the first plate-like electrode 11e.
  • a first glass layer 12a arranged between the second plate-like electrode 11f and a
  • the second glass layer 12b which is spaced apart, is arranged between the first plate-like electrode 11e and the first glass layer 12a, and is in contact with the first plate-like electrode 11e and the first glass layer 12a.
  • a second metal film layer 13b disposed between the first metal film layer 13a, the second plate-like electrode 11f, and the second glass layer 12b, in contact with the second plate-like electrode 11f, and in contact with the second glass layer 12b.
  • the first plate-like electrode 11e and the second plate-like electrode 11f together constitute a pair of electrodes E, and between the first glass layer 12a and the second glass layer 12b A plasma P is generated in the space S of .
  • first plate-like electrode 11e is the same as the "first electrode 11a", so the explanation given for the "first electrode 11a” applies mutatis mutandis.
  • second plate-like electrode 11f is also the same as the "third electrode 11c", so the explanation given for the "third electrode 11c” applies mutatis mutandis.
  • the first glass layer 12a and the first metal film layer 13a constitute the first reflecting mirror M1
  • the second glass layer 12b and the second metal film layer 13b constitute the second mirror M1.
  • the configuration of the reflecting mirror M2 is the same as in the "plasma generator 10".
  • the second plasma generator 10 can be used as a substitute for the plasma generator 10 in the gas purification apparatus 1, and can also be used as a substitute for the plasma generator 310 in the gas activation apparatus 301. That is, the second plasma generator 10 is particularly useful when two or more gas purifiers 1 are used in combination, especially when they are vertically connected and used.
  • the plasma generator 10 has a first electrode 11a and a first glass layer 12a instead of the first reflecting mirror M1 made up of the first glass layer 12a and the first metal film layer 13a. and a third electrode 11c and a second glass layer 12b instead of the second reflecting mirror M2 made up of the second glass layer 12b and the second metal film layer 13b. It may be provided with a second reflecting mirror M2 (hereinafter referred to as "third plasma generator 10").
  • the third plasma generator 10 is arranged with a distance between the first electrode 11a and the second electrode 11b arranged with a distance between the first electrode 11a and the second electrode 11b.
  • the third electrode 11c is arranged between the first electrode 11a and the second electrode 11b, and the third electrode 11c is arranged between the first electrode 11a and the second electrode 11b.
  • a first glass layer 12a arranged with a space between the two electrodes 11b, and a glass layer 12a arranged between the second electrode 11b and the third electrode 11c and with a space between the second electrode 11b.
  • FIG. 40 is referred to as an example of the third plasma generator 10.
  • FIG. 40 is referred to as an example of the third plasma generator 10.
  • both the first electrode 11a and the third electrode 11c are made of a metal having a property of reflecting ultraviolet rays.
  • the first electrode 11a and the third electrode 11c may be made of a metal having characteristics of reflecting not only ultraviolet rays but also visible rays, infrared rays and other electromagnetic waves other than ultraviolet rays. It is preferable to be
  • the first electrode 11a and the third electrode 11c are preferably made of a metal having a high ultraviolet reflectance, among metals that reflect ultraviolet rays. It is more preferably made of any one of aluminum (Al), chromium (Cr), iron (Fe), nickel (Ni), rhodium (Rh), silver (Ag) or platinum (Pt), and aluminum or silver, and most preferably aluminum.
  • the first electrode 11a and the third electrode 11c may be film-like. That is, the first electrode 11a may be configured by adhering a metal foil, for example, an aluminum or silver foil to the first glass layer 12a via the conductive adhesive layer 14. For example, it may be constructed by vapor-depositing aluminum or silver.
  • the third electrode 11c may also be configured by adhering a metal foil, for example, an aluminum or silver foil to the second glass layer 12b via the conductive adhesive layer 14. For example, it may be constructed by vapor-depositing aluminum or silver.
  • the first electrode 11a and the first glass layer 12a together constitute the first reflecting mirror M1
  • the third electrode 11c and the second glass layer 12b together constitute the first mirror M1.
  • a two-reflecting mirror M2 is configured, and reflection of ultraviolet rays UV is repeatedly performed between the first reflecting mirror M1 and the second reflecting mirror M2.
  • the remainder of the third plasma generator 10 is the same as the "plasma generator 10", so the explanation given for the "plasma generator 10" applies mutatis mutandis.
  • the third plasma generator 10 can be used as a substitute for the plasma generator 10 in the gas purification apparatus 1, and can also be used as a substitute for the plasma generator 310 in the gas activation apparatus 301. That is, the third plasma generator 10 is particularly useful when high thermal conductivity is not required for the first electrode 11a and the third electrode 11c.
  • 1 gas purification device 10 plasma generator 11 electrode 11a first electrode 11a1 first portion (portion in contact with the first metal film layer) ... 11a2 Second part (part in contact with the first filter) ⁇ 11a3 Third part (exposed part) ⁇ 11a4 Fourth portion (portion in contact with the first spacer) ⁇ 11a5 Fifth portion (portion in contact with the second spacer) 11b Second electrode 11b1 Electrode main body 11b2 Catalyst layer 11c Third electrode 11c1 First portion (portion in contact with the first metal film layer) ...
  • Gas purification device 110 Plasma generator 111 Electrode 111a First electrode 111b Second electrode 111b1 Tip portion 112 Glass layer 112a First glass layer 113 Metal film layer 113a First metal film layer 120 Channel 120a Inlet 120b Outlet 120c Route 140 Case 150 Blower 151 Motor 152 Drive shaft 153 Impeller 153a Wheel 111b Second electrode 154 Mounting member 160 Perforated mirror 161 Ventilation hole 162 Center hole 201 Other gas purification device 220a Inlet 220b Outlet 230a First filter 1000 Self-propelled device 1001

Abstract

Le problème à résoudre par la présente invention est de fournir un dispositif de génération de plasma qui génère du plasma par décharge à barrière diélectrique et peut exploiter efficacement les ondes électromagnétiques, autres que les rayons ultraviolets, produites par le plasma, un dispositif de purification d'air dans lequel le dispositif de génération de plasma est utilisé, etc. La solution selon l'invention porte sur un dispositif de génération de plasma (10) comprenant : une première électrode (11a) ; une seconde électrode (11b) disposée de manière à être séparée de la première électrode (11a) par une distance donnée ; une première couche de verre (12a) disposée entre la première électrode (11a) et la seconde électrode (11b) de manière à être séparée de la seconde électrode (11b) par un espace ; et une première couche de film métallique (13a) disposée entre la première électrode (11a) et la première couche de verre (12a), la première couche de film métallique (13a) entrant en contact avec la première électrode (11a) soit directement, soit avec une couche adhésive électroconductrice interposée entre elles, et entrant en contact avec la première couche de verre (12a) soit directement, soit avec une couche adhésive électroconductrice interposée entre elles.
PCT/JP2023/002262 2022-02-01 2023-01-25 Dispositif de génération de plasma, dispositif de purification d'air, etc. WO2023149305A1 (fr)

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JP2022014265A JP2023112462A (ja) 2022-02-01 2022-02-01 プラズマ発生装置及び気体浄化装置等

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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018230689A1 (fr) * 2017-06-16 2018-12-20 積水化学工業株式会社 Outil de traitement médical, procédé d'utilisation d'un outil de traitement médical et procédé d'irradiation de gaz réactif
JP2020175258A (ja) * 2020-05-19 2020-10-29 裕 道脇 毒性対象減消装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018230689A1 (fr) * 2017-06-16 2018-12-20 積水化学工業株式会社 Outil de traitement médical, procédé d'utilisation d'un outil de traitement médical et procédé d'irradiation de gaz réactif
JP2020175258A (ja) * 2020-05-19 2020-10-29 裕 道脇 毒性対象減消装置

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