WO2023147199A1 - Actionnement photothermique de vibrations pour mesures par vibromètres doppler à laser - Google Patents

Actionnement photothermique de vibrations pour mesures par vibromètres doppler à laser Download PDF

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Publication number
WO2023147199A1
WO2023147199A1 PCT/US2023/012053 US2023012053W WO2023147199A1 WO 2023147199 A1 WO2023147199 A1 WO 2023147199A1 US 2023012053 W US2023012053 W US 2023012053W WO 2023147199 A1 WO2023147199 A1 WO 2023147199A1
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WO
WIPO (PCT)
Prior art keywords
laser beam
sample
drive
drive laser
ldv
Prior art date
Application number
PCT/US2023/012053
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English (en)
Inventor
William Alexander OSBORN
Original Assignee
Government Of The United States Of America, As Represented By The Secretary Of Commerce
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Government Of The United States Of America, As Represented By The Secretary Of Commerce filed Critical Government Of The United States Of America, As Represented By The Secretary Of Commerce
Publication of WO2023147199A1 publication Critical patent/WO2023147199A1/fr

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H9/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/022—Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/24—Probes
    • G01N29/2418—Probes using optoacoustic interaction with the material, e.g. laser radiation, photoacoustics

Definitions

  • LDVs Laser Doppler Vibrometers
  • MEMS Micro Electro Mechanical Systems
  • Photothermal actuation uses pulsed light to drive vibrations without contact with the sample, enabling easier, faster, and more accurate vibrational measurements of samples, including measurements of MEMS.
  • an apparatus for measuring a vibration spectra of a sample comprising: a microscope-based Laser Doppler Vibrometer (LDV) configured to emit a signal laser beam and to receive a reflected laser beam; a drive laser source configured to emit a drive laser beam; a control system configured to control a frequency of emission of the drive laser beam; and a beam combination setup in optical communication with the LDV, the drive laser source, and the sample; wherein the beam combination setup further comprises: a dichroic mirror configured to preference the transmission of the signal laser beam from the LDV to the sample and the reflected laser beam from the sample to the LDV, and to preference the reflection of the drive laser beam from the drive laser source to the sample; and an edge filter positioned between the dichroic mirror and the LDV; and wherein the wavelengths of the signal laser beam and the drive laser beam are selected to allow for the drive laser beam to be spectrally separated from the signal laser beam such that the modulation of the reflected laser beam returned through the dichroic mirror and the edge
  • LDV Laser Doppler
  • a process for measuring a vibration spectra of a sample comprising: producing, by a Laser Doppler Vibrometer (LDV), a signal laser beam; subjecting a sample to the signal laser beam by transmitting the signal laser beam through, first, an edge filter, and second, a dichroic mirror; producing, by a drive laser source, a drive laser beam; controlling the drive laser beam to be emitted at a chosen frequency; subjecting the sample to the drive laser beam by reflecting the drive laser beam with the dichroic mirror; vibrating the sample at a sample vibration frequency; producing a reflected laser beam from the signal laser beam which was reflected from the sample; and receiving, by the LDV, the reflected laser beam by transmitting the reflected laser beam through, first, the dichroic mirror, and second, the edge filter.
  • LDV Laser Doppler Vibrometer
  • FIG. 1 shows a laser doppler vibrometer configured to measure photothermal actuated vibrations of a sample using a drive laser source and a beam combination setup, according to some embodiments.
  • FIG. 2 shows the laser doppler vibrometer of FIG. 1 with an exploded view of the beam combination setup, according to some embodiments.
  • FIG. 3 shows a laser doppler vibrometer configured to measure photothermal actuated vibrations of a sample using a drive laser source and a beam combination setup, wherein the drive laser beam is transmitted through a collimator and beam steerer to allow for precise targeting of the drive laser beam on the sample, according to some embodiments.
  • FIG. 4 shows a laser doppler vibrometer configured to measure photothermal actuated vibrations of a sample using a light emitting diode and a beam combination setup, according to some embodiments.
  • photothermal actuation in which a sufficiently powerful drive light source such as a drive laser beam or driving light emitting diode, is capable of providing the necessary vibration for measurements made by Laser Doppler Vibrometry without requiring physical contact with the sample.
  • Laser doppler vibrometer 200 performs laser doppler vibrometry.
  • laser doppler vibrometer 200 can be any laser doppler vibrometry system configured to emit a signal laser beam 204 and receive a reflected laser beam 205. Both signal laser beam 204 and reflected laser beam 205 are transmitted through beam combination setup 201 to sample 203.
  • Drive laser source 202 produces drive laser beam 206, which is emitted at a chosen frequency and which travels through beam combination setup 201 to sample 203, where the interaction between drive laser beam 206 and sample 203 causes sample 203 to vibrate.
  • laser doppler vibrometer 200 targeted vibration measurements of sample 203 are calculated by standard means.
  • signal laser beam 204 is first transmitted through edge filter 207, then dichroic mirror 208, before contacting sample 203.
  • reflected laser beam 205 is transmitted from sample 203 through dichroic mirror 208, then through edge filter 207 before being received by laser doppler vibrometer 200.
  • drive laser beam 206 enters beam combination setup 201 and is reflected by dichroic mirror 208 towards sample 203.
  • drive laser beam 206 is passed first through collimator 209 and then interacts with beam steerer 210, allowing the precise targeting of drive laser beam 206 on sample 203, whereas use without collimator 209 and beam steerer 210 can allow for wide field actuation over the entire visible area of the sample.
  • a sufficiently powerful light emitting diode 211 emits drive light beam 212, which enters beam combination setup 201 and is reflected by dichroic mirror 208 towards sample 203.
  • the wavelengths of the signal laser beam and the drive laser beam are selected to allow for the drive laser beam to be spectrally separated from the signal laser beam such that the modulation of the reflected laser beam returned through the dichroic mirror and the edge filter to the LDV is detectable.
  • the edge filter is a long-pass filter.
  • signal laser beam 204 is red and drive laser beam 206 or drive light beam 212 is blue.
  • the edge filter is a short-pass filter.
  • signal laser beam 204 is blue and drive laser beam 206 or drive light beam 212 is red.
  • drive laser source 202 or light emitting diode 211 is controlled to periodically emit drive laser beam 206 or drive light beam 212.
  • the control is electronic allowing for precise selection of the frequency of the emitted light.
  • the control is analog.
  • the control allows for periodic emission of a continuous light source with a triggerable output.
  • light emission is triggered by acoustic optical modulation.
  • drive laser source 202 is a pulsed laser.
  • drive laser beam 206 is transmitted to sample 203 directly without passing through beam combination setup 201 or being reflected by dichroic mirror 208.
  • the measurements made by laser doppler vibrometer 200 include mode shape mapping of MEMS devices.
  • the measurements made by laser doppler vibrometer 200 are used for the calibration of accelerometers at high accuracy.
  • the invention as contemplated and disclosed herein has numerous beneficial uses, including allowing for the easier, faster, and more accurate vibrational measurements of samples in which traditional actuation techniques are inappropriate or have significant drawbacks, including specifically the measurement of Micro Electrical Mechanical Systems (MEMS).
  • MEMS Micro Electrical Mechanical Systems
  • shaker table actuation while relatively simple and low cost, is imprecise for the measurement of MEMS.
  • MEMS devices typically have resonant/operational frequencies that are well above the first resonance of a shaker table assembly, the base actuation of the device under test is substantially more complicated than the single sine wave function the generator is producing.
  • the present invention including beam combination setup 201 and sample 203 overcomes these limitations and technical deficiencies of conventional devices and conventional processes by allowing for precise, efficient measurements of devices such as MEMS to be made without requiring expensive design or re-design of the MEMS device or time-inefficiencies involved with the use of a probe station.
  • Drive laser source 202 was a continuous blue laser which was frequency controlled by digitally modulation such that drive laser beam 206 was periodically entirely on or off.
  • Edge filter 207 was a long-pass filter, and dichroic mirror 208 was selected to prefer transmission of red light and reflection of blue light.
  • Laser doppler vibrometer 200 was configured to emit red light. This system was assembled such that signal laser beam 204 and drive laser beam 206 were optically coaxial. Beam combination setup 201 was effectively an attachment to the microscope side of the objective lens of laser doppler vibrometer 200.
  • a combination thereof refers to a combination comprising at least one of the named constituents, components, compounds, or elements, optionally together with one or more of the same class of constituents, components, compounds, or elements.
  • first current could be termed a second current
  • second current could be termed a first current
  • the first current and the second current are both currents, but they are not the same condition unless explicitly stated as such.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Optics & Photonics (AREA)
  • Acoustics & Sound (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)

Abstract

L'invention concerne un appareil et un procédé de mesure d'un spectre de vibration d'un échantillon au moyen d'un vibromètre Doppler à laser (LDV) sur microscope, l'actionnement photothermique utilisant une lumière pulsée pour déclencher des vibrations sans contact avec l'échantillon.
PCT/US2023/012053 2022-01-31 2023-01-31 Actionnement photothermique de vibrations pour mesures par vibromètres doppler à laser WO2023147199A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US202263305083P 2022-01-31 2022-01-31
US63/305,083 2022-01-31

Publications (1)

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WO2023147199A1 true WO2023147199A1 (fr) 2023-08-03

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1411341A1 (fr) * 2001-06-19 2004-04-21 Japan Science and Technology Corporation Ensemble d'elements en porte-a-faux, procede permettant de produire cet ensemble, et microscope-sonde a balayage, dispositif coulissant associe a un mecanisme de guidage et de rotation, capteur, interferometre laser homodyne, et interferometre laser doppler avec fonction d'excitation lumineuse de l'
JP5862997B2 (ja) * 2011-01-21 2016-02-16 一般財団法人生産技術研究奨励会 気液界面で共振するマイクロカンチレバーセンサ
US20160169937A1 (en) * 2014-03-12 2016-06-16 Oxford Instruments Asylum Research, Inc. Metrological Scanning Probe Microscope
EP3779431A1 (fr) * 2018-03-27 2021-02-17 National Institutes for Quantum and Radiological Science and Technology Dispositif de mesure, système de mesure, corps en mouvement et procédé de mesure

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1411341A1 (fr) * 2001-06-19 2004-04-21 Japan Science and Technology Corporation Ensemble d'elements en porte-a-faux, procede permettant de produire cet ensemble, et microscope-sonde a balayage, dispositif coulissant associe a un mecanisme de guidage et de rotation, capteur, interferometre laser homodyne, et interferometre laser doppler avec fonction d'excitation lumineuse de l'
JP5862997B2 (ja) * 2011-01-21 2016-02-16 一般財団法人生産技術研究奨励会 気液界面で共振するマイクロカンチレバーセンサ
US20160169937A1 (en) * 2014-03-12 2016-06-16 Oxford Instruments Asylum Research, Inc. Metrological Scanning Probe Microscope
EP3779431A1 (fr) * 2018-03-27 2021-02-17 National Institutes for Quantum and Radiological Science and Technology Dispositif de mesure, système de mesure, corps en mouvement et procédé de mesure

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
FU Y ET AL: "Standoff photoacoustic sensing of trace chemicals by laser Doppler vibrometer", PROCEEDINGS OF SPIE; [PROCEEDINGS OF SPIE ISSN 0277-786X VOLUME 10524], SPIE, US, vol. 9824, 12 May 2016 (2016-05-12), pages 98240O - 98240O, XP060068107, ISBN: 978-1-5106-1533-5, DOI: 10.1117/12.2222176 *
XIONG LIANGCAI ET AL: "New laser excitation method for modal analysis of microstructure", MECHANICAL SYSTEMS AND SIGNAL PROCESSING, vol. 50-51, 1 January 2015 (2015-01-01), AMSTERDAM, NL, pages 227 - 234, XP093039637, ISSN: 0888-3270, Retrieved from the Internet <URL:https://www.sciencedirect.com/science/article/pii/S0888327014001411/pdfft?md5=d2255354bd86ed0592bb900ec5e864d5&pid=1-s2.0-S0888327014001411-main.pdf> DOI: 10.1016/j.ymssp.2014.05.012 *

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