WO2023142186A1 - 同时检测薄壁回转体内外壁面形与厚度分布的方法与装置 - Google Patents

同时检测薄壁回转体内外壁面形与厚度分布的方法与装置 Download PDF

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WO2023142186A1
WO2023142186A1 PCT/CN2022/076752 CN2022076752W WO2023142186A1 WO 2023142186 A1 WO2023142186 A1 WO 2023142186A1 CN 2022076752 W CN2022076752 W CN 2022076752W WO 2023142186 A1 WO2023142186 A1 WO 2023142186A1
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thin
wall
walled
walled shell
probe
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French (fr)
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居冰峰
张文浩
杜慧林
李畅
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Zhejiang University
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Zhejiang University
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B17/00—Measuring arrangements characterised by the use of infrasonic, sonic or ultrasonic vibrations
    • G01B17/06—Measuring arrangements characterised by the use of infrasonic, sonic or ultrasonic vibrations for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/0002—Arrangements for supporting, fixing or guiding the measuring instrument or the object to be measured
    • G01B5/0004—Supports
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2210/00—Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors
    • G01B2210/50—Using chromatic effects to achieve wavelength-dependent depth resolution

Definitions

  • the invention relates to the technical field of precision measurement, in particular to a method and a device for simultaneously detecting the surface shape and thickness distribution of the inner and outer walls of a thin-walled rotary body.
  • Thin-walled shells of revolution refer to shell-shaped rotationally symmetrical elements whose thickness is significantly smaller than their characteristic dimensions, such as conformal fairings and spherical fairings applied to aircraft such as missiles, and hemispherical gyro resonance used in inertial navigation of navigation equipment child and so on.
  • This type of device has become the core optical device in the field of next-generation aerospace equipment and inertial navigation due to its excellent aerodynamic performance and functional accuracy.
  • the shape, quality and thickness distribution uniformity of the inner and outer walls directly determine its operational performance.
  • Chinese patent CN110455246A discloses a scanning measurement method for the shape of the outer wall of conformal optical elements, but it does not solve the problem of detection of the shape and thickness of the inner wall.
  • the currently disclosed technical means are mainly aimed at the detection of specific types of thin-walled shell-like rotating bodies. How to realize the detection of thin-walled shell-like rotating bodies with high versatility, high efficiency and high precision is still a breakthrough that must be made at present. technical bottleneck.
  • the present invention aims at measuring the shape and thickness of the inner and outer walls of thin-walled rotating bodies such as conformal fairings and hemispherical gyro resonators, and provides a method and method for simultaneously detecting the shape and thickness distribution of the inner and outer walls of the thin-walled rotating body. device.
  • the invention drives the spectral confocal measuring head to scan the thin-walled shell-type rotary body through the linkage of two turntables and a linear motion axis, which can overcome the high aspect ratio, high-depth-width ratio and large
  • the problem of detection of complex features such as steepness combined with the multi-surface measurement capability of the spectral confocal probe, can realize the one-time scanning detection of the surface shape and thickness distribution of the inner and outer walls of the thin-walled shell through a single, single-side scan, with high Versatility, high measurement efficiency and high measurement accuracy.
  • the present invention adopts technical scheme as follows:
  • the device of the present invention comprises: a base (1), a spindle base (2), a workpiece spindle (3), a workpiece fixture (4), a thin-walled shell type rotary body (5), a thin-walled shell type rotary inner wall (6), Thin-walled shell type rotary outer wall (7), measuring beam (8), main probe bracket (9), spectral confocal probe (10), main probe turntable (11), compensation probe bracket (12), Compensation light beam (13), standard plane mirror (14), compensation measuring head (15), linear motion axis mover (16), linear motion axis stator (17), bottom turntable (18).
  • a spindle base (2) is installed on the left side of the base (1), the workpiece spindle (3) is installed on the right side above the spindle base (2), and a workpiece fixture (4) is installed on the right side of the workpiece spindle (3).
  • the right side of the workpiece holder (4) is equipped with a thin-walled shell type rotary body (5).
  • the thin-walled shell type rotary body (5) installed on the right side can be driven to rotate by the workpiece fixture (4).
  • the bottom turntable (18) is installed on the base (1) and is arranged on the right side of the main shaft base (2).
  • the upper surface of the bottom turntable (18) is equipped with a linear motion axis stator (17) along the radial direction, and the upper surface of the linear motion axis stator (17) is sequentially stacked and installed with the linear motion axis mover (16), the main measuring head turntable (11), the main The measuring head support (9); the spectral confocal measuring head (10) is installed on the main measuring head support (9).
  • a compensating probe bracket (12) is installed on the upper surface of the linear motion axis mover (16), and is located on the right side of the main probe turntable (11); there is a compensating probe (15) fixed on the compensating probe bracket (12) ), the compensation probe (15) emits a compensation beam (13) to irradiate the standard flat mirror (14) for position compensation.
  • the standard plane mirror (14) is installed on the upper surface of the linear motion axis stator (17) and is located on the right side of the linear motion axis mover (16).
  • main shaft base (2) is composed of an integrally formed semicircle and a cuboid.
  • the workpiece spindle (3) is coaxially connected with the workpiece fixture (4).
  • cross-section of the workpiece fixture (4) is I-shaped, and the two ends are respectively connected to the workpiece spindle (3) and the thin-walled shell-type rotary body (5).
  • the specific requirements of the spectral confocal measuring head (10) are: if the theoretical wall thickness of the measured thin-walled shell type gyrator (5) is known, then the spectral measuring range exceeding its theoretical wall thickness can be directly selected.
  • the confocal measuring head (10) is used for detection; if the wall thickness information of the thin-walled shell type of revolution (5) is unknown, the wall thickness can be estimated by using a simple standard measuring tool such as a vernier caliper, and then according to the estimated wall thickness information A spectral confocal probe (10) with a measurement range exceeding the estimated wall thickness is selected for detection.
  • the compensation measuring head (15) is a high-precision linear displacement sensor, and a high-precision linear distance measuring sensor such as a laser interference displacement sensor can be used to realize motion error compensation.
  • the method for simultaneously detecting the surface shape and thickness distribution of the inner and outer walls of a thin-walled rotating body comprises:
  • Step 1 installing the thin-walled shell-type rotary body (5) to be tested on the workpiece fixture (4);
  • Step 2 Generate motion track sequence ( ⁇ , ⁇ , s) according to the contour equation of the thin-walled shell-like body of revolution (5), where ( ⁇ i , ⁇ i , s i ) represent the position of the i-th point in the motion track sequence ;
  • Step 3 start the workpiece spindle (3) to rotate, and drive the thin-walled shell type rotary body (5) to perform a rotary motion;
  • Step 4 Start the scanning movement of the spectral confocal probe (10), control the bottom turntable (18), the linear motion axis mover (16) and the main probe turntable (11) to drive the spectral confocal probe (10) along the
  • the motion track sequence ( ⁇ , ⁇ , s) generated in step 2 performs a scanning motion, and during the scanning process, the axis of the spectral confocal probe (10) always moves along the contour normal of the thin-walled shell of revolution (5), and Ensure that the inner wall (6) of the thin-walled shell and the outer wall (7) of the thin-walled shell are always within the measuring range of the spectral confocal probe (10);
  • Step 5 During the scanning process, record in real time the position of the i-th point motion axis ( ⁇ i , ⁇ i , s i ), the position d inner_i of the inner wall (6) of the thin-walled shell type of revolution, and the position of the thin-walled shell type of revolution body The position d outer_i of the outer wall (7), the thickness data d thickness_i and the motion error data ds i measured by the compensating probe (15);
  • Step 6 After the scanning is completed, store all the measurement data recorded during the scanning process, and correct the measured thickness data according to the refractive index of the thin-walled shell-type rotary body (5) to be measured;
  • Step 7 according to the position data of the motion axis, the measurement data of the spectral confocal probe (10) (including the position d inner_i of the inner wall (6) of the thin-walled shell type rotary, the position of the outer wall (7) of the thin-walled shell type rotary d outer_i , thickness data d thickness_i ) and the measurement data of the compensation probe (15), reconstruct the three-dimensional surface shape point cloud of the inner and outer walls of the thin-walled shell and the point cloud data of the three-dimensional thickness distribution, and complete the thin-walled shell (5) The internal and external wall shape measurement and thickness distribution measurement.
  • the thin-walled shell-like rotating body (5) has two surfaces, the thin-walled shell-like rotating inner wall (6) and the thin-walled shell-like rotating outer wall (7), and the spectral confocal measuring head (10) emits
  • the measuring beam (8) is irradiated on the surface of the thin-walled shell-type rotor (5), its measurement range can cover the thin-walled shell-type rotor inner wall (6) and the thin-walled shell-type rotor outer wall (7) at the same time, so as to realize Simultaneous detection of inner and outer walls.
  • the measuring device for the shape and thickness distribution of the inner and outer walls of the thin-walled shell-like body of revolution (5) uses a spectral confocal probe (10) to measure, when the spectral confocal probe (10) emits a measuring beam (8) to irradiate
  • a spectral confocal probe (10) to measure, when the spectral confocal probe (10) emits a measuring beam (8) to irradiate
  • both the inner wall of the thin-walled shell-type rotor (6) and the outer wall of the thin-walled shell-type rotor (7) will generate a reflection peak, and by analyzing the information of the two reflection peaks, it can be
  • the positions d inner and d outer of the inner wall (6) of the thin-walled shell and the outer wall (7) of the thin-walled shell are respectively extracted.
  • the spectral confocal probe (9) can also be replaced by laser displacement probes, ultrasonic probes and other probes that can detect multiple interfaces at the same time, so as to adapt to the detection of various transparent or opaque materials.
  • the material of the thin-walled shell-type rotary body (5) is opaque materials such as metal
  • the simultaneous detection of the shape and thickness distribution of its inner and outer walls can be realized by using an ultrasonic probe.
  • the compensation measuring head (15) installed on the upper surface of the linear motion axis mover (16) emits a compensation light beam (13) to irradiate the standard plane mirror (14) installed on the upper surface of the linear motion axis stator (17) for real-time Measure the position of the linear motion axis mover (16) relative to the linear motion axis stator (17), and compensate the motion error of the linear motion axis mover (16) according to the measurement data, so as to realize the spectral confocal measuring head (10) High-precision spatial positioning and compensation.
  • the method for measuring the surface shape and thickness distribution of the inner and outer walls of the thin-walled shell type rotary body, through the rotary motion of the bottom turntable (18), the linear motion of the linear motion axis mover (16) and the rotation of the main probe turntable (11) The movement constructs a profiling scanning trajectory imitating the contour of the measured thin-walled shell-type rotating body (5), and drives the spectral confocal probe (10) to scan along the contour normal direction of the thin-walled shell-like rotating body (5) movement to realize the scanning of the profile generatrix of the thin-walled shell-like body of revolution (5).
  • the profiling scanning trajectory imitating the outline of the measured thin-walled shell-like body of revolution (5) takes the center of the apex of the thin-walled shell-like body of revolution (5) as the coordinate origin, and sets the position of any i-th point of the thin-walled shell-like body
  • the position coordinates of the surface profile of the rotary body (5) relative to its own rotary axis with polar radius r i is z ri
  • the first order derivative is z' ri , where z ri represents the surface of the thin-walled shell class rotary body (5)
  • both z ri and z' ri are functions of ri , so for any polar radius r i , only ⁇ i , ⁇ i , and s i in the formula are unknown.
  • the method for detecting the surface shape and thickness distribution of the inner and outer walls of a thin-walled shell type of revolution can generate a motion along the contour normal of the measured thin-walled shell-like body of revolution (5) according to the contour equation of any thin-walled shell-like body of revolution (5) track.
  • the spectral The confocal measuring head (9) forms a profiling scanning trajectory in three-dimensional space with respect to the thin-walled shell-like rotating body (5), thereby collecting measurement information on the entire surface of the thin-walled shell-like rotating body (5).
  • the position of the inner wall (6) of the thin-walled shell and the outer wall (7) of the thin-walled shell and the position of the thin-walled shell on the scanning track can be recorded in real time.
  • Thickness so as to construct the thin-walled shell-shaped rotary body (5)
  • the point cloud of the inner and outer walls and the thickness point cloud in three-dimensional space so as to realize the one-time calculation of the inner and outer wall shape and thickness distribution of the thin-walled shell-like rotary body Scan detection.
  • the three-dimensional point cloud of the surface shape of the outer wall (7) of the thin-walled shell can be obtained according to the system space coordinate relationship
  • the coordinates are:
  • the three-dimensional point cloud coordinates of the surface shape of the inner wall (6) of the thin-walled shell are:
  • the thickness distribution of the thin-walled shell-like body of revolution (5) in three-dimensional space is:
  • t i is the thickness distribution on the three-dimensional space point cloud positions (xi , y i , zi ) on the surface of the thin-walled shell of revolution (5).
  • the spectral confocal measuring head (10) is driven by the bottom turntable (18), the main measuring head turntable (11) and the linear motion axis mover (16) to perform profiling along the surface of the thin-walled shell-type rotary body (5)
  • Scanning can realize the detection of the inner and outer wall shape and thickness distribution of the thin-walled shell-type rotary body (5) at one time, which can not only avoid the mechanical interference caused by the arrangement of the probe inside the thin-walled shell-type rotary body (5), but also ensure
  • the coordinate consistency of the inner and outer wall shape measurement data and thickness distribution data in three-dimensional space ensures the overall measurement accuracy, and can adapt to different types of thin-walled shells such as conformal fairings and hemispherical gyro resonators (5 ) detection, which provides a universal, high-efficiency and high-precision detection method for the manufacturing process of such high-end devices.
  • the invention can solve the detection problem of the shape and thickness distribution of the inner and outer walls of the thin-walled shell-like revolving bodies used in new-generation aviation and navigation equipment such as conformal fairings and hemispherical gyro resonators.
  • Figure 1 is a measuring device that can simultaneously detect the surface shape and thickness distribution of the inner and outer walls of a thin-walled shell
  • Figure 2 is a top view of the measurement device for the shape and thickness distribution of the inner and outer walls of the thin-walled shell
  • Figure 3 is a schematic diagram of the scanning measurement principle for the surface shape and thickness distribution of the inner and outer walls of the thin-walled shell.
  • Figure 4 shows the principle of thickness measurement of thin-walled shells based on spectral confocal sensors
  • Figure 5 is a schematic diagram of a typical thin-walled shell type of revolution
  • Figure 6 shows the measurement process of the surface shape and thickness distribution of the inner and outer walls of the thin-walled shell
  • the present invention proposes a measuring device and method based on a sensor capable of measuring multiple surfaces such as a spectral confocal probe to realize the surface shape and thickness distribution of the inner and outer walls of a thin-walled shell.
  • the axis drives the spectral confocal probe to perform profiling scanning motion along the surface of the thin-walled shell, and the single-sided thickness measurement avoids the mechanical interference problem of the through-beam thickness measurement, and simultaneously collects the thin-walled shell during the scanning process.
  • the position and thickness information of the inner and outer walls in the body can ensure the consistency of the coordinates of the detection data in space, so as to realize the high-precision and rapid detection of the shape and thickness distribution of the inner and outer walls of the thin-walled shell.
  • the main shaft base (2) is installed on the left side of the base (1)
  • the workpiece main shaft (3) is installed on the right side above the main shaft base (2)
  • the workpiece fixture (4) is installed on its right side, and can
  • the thin-walled shell type rotary body (5) installed on the right side is driven by the workpiece fixture (4) to perform rotary motion.
  • a bottom turntable (18) is installed on the right side of the base (1), and a linear motion axis stator (17) is installed radially above the linear motion axis stator (17).
  • a compensation probe bracket (12) is installed outside the upper surface of the linear motion axis mover (16), and the compensation probe (15) fixed on it emits a compensation beam (13) to irradiate the upper surface of the linear motion axis stator (17)
  • the standard flat mirror (14) on the outside carries out position compensation.
  • the axis of the spectral confocal measuring head (10) is collinear with the measured thin-walled shell-type gyratory body (5) and the workpiece spindle (3), and scanning starts from this position , when the bottom turntable (18) drives the linear motion axis stator (17) and the fixed standard plane mirror (14) to rotate to position 2, the direction of the spectral confocal measuring head (10) is the same as the measured thin-walled shell type of revolution ( 5) Deviation occurs in the normal direction of the surface.
  • the rotation of the main measuring head (11) drives the spectral confocal measuring head (10) to swing to compensate the deflection angle of the spectral confocal measuring head (10), and the spectral confocal measuring head (10) can be adjusted.
  • the axis of the focal measuring head (10) is perpendicular to the surface of the thin-walled shell type of revolution (5) to be measured, and then the position of the spectral confocal measuring head (10) is adjusted by the movement of the linear motion axis mover (16) so that the thin-walled Both the inner wall (6) of the shell rotator and the outer wall (7) of the thin-walled shell rotator are located within the range of the measuring beam (8), that is, the position adjustment of the spectral confocal measuring head (10) at position 2 is realized.
  • the compensation probe (15) records the accurate displacement of the linear motion axis mover (16) relative to the standard plane mirror (14), so that the motion of the linear motion axis mover (16) can be compensated.
  • profiling scanning along the surface normal of the thin-walled shell-like body of revolution (5) can be realized.
  • the surface shape of the thin-walled shell type gyrator (5) is a spherical surface
  • it is only necessary to adjust the spherical shape to coincide with the axis of the bottom turntable (18) so that the spectral confocal measuring head (10) can be realized during the scanning process. It is always perpendicular to the spherical surface without moving the main measuring head turntable (11) and the linear motion axis mover (16).
  • the coordinate system is established with the apex center of the thin-walled shell-like body of revolution (5) as the coordinate origin.
  • the positive direction of the horizontal axis is downward, representing the thin-walled shell-like body of revolution (5) ) point on the surface and the polar diameter distance r i from the axis of rotation;
  • the positive direction of the vertical axis is to the right, representing the position coordinate z of the surface contour of the thin-walled shell-like body of revolution (5) relative to its own axis of rotation with the polar radius r i ri
  • the first-order derivative is z' ri , where z ri represents the height difference between a point on the surface of a thin-walled shell of revolution (5) and the origin of the coordinates; bottom turntable rotation angle ⁇ i , main probe turntable rotation angle ⁇ i (20) , linear motion axis mover displacement s i (21), the distance from the rotation center
  • both z ri and z′ ri are functions of ri , so for any polar radius r i , only ⁇ i , ⁇ i , and s i in the formula are unknown.
  • the turntable (18), the turntable of the main measuring head (11) and the mover (16) of the linear motion axis copy the scanning trajectory.
  • C is the vertex curvature of the quadratic aspheric profile
  • Combining the contour equation with formula (1) can generate the profiling scanning trajectory.
  • the spectral confocal sensor (10) moves to the position of any jth point in Fig. 3, the above formula (1) is always satisfied.
  • the light beams reflected by the two interfaces will form two signal peaks as shown on the right side of Figure 4 in the controller of the spectral confocal measuring head (10), in which the outer wall of the thin-walled shell (7) forms a
  • the intensity of the signal peak is I p1
  • the corresponding wavelength position is ⁇ p1
  • the intensity of the signal peak formed by the inner wall (6) of the thin-walled shell is I p2
  • the corresponding wavelength position is ⁇ p2 .
  • the material refractive index n of ) corrects the thickness, and the thickness can be calculated according to the following formula, so as to realize the accurate measurement of the position and thickness of the inner and outer walls of the thin-walled shell type of revolution (5).
  • the spectral confocal probe (10) can also be replaced by probes with other principles such as laser triangular displacement probes, laser interference probes, and ultrasonic probes, so as to adapt to the detection of various transparent or opaque materials.
  • probes with other principles such as laser triangular displacement probes, laser interference probes, and ultrasonic probes, so as to adapt to the detection of various transparent or opaque materials.
  • the material of the thin-walled shell-type rotary body (5) is opaque materials such as metal
  • the simultaneous detection of the shape and thickness distribution of its inner and outer walls can be realized by using an ultrasonic probe.
  • the thin-walled shell type of revolution (5) includes various types of elements, Figure 5(a) is a conformal fairing with a large aspect ratio, Figure 5(b) is a spherical dome, Figure 5(c) shows the hemispherical gyro resonator used in inertial navigation.
  • Figure 5(a) is a conformal fairing with a large aspect ratio
  • Figure 5(b) is a spherical dome
  • Figure 5(c) shows the hemispherical gyro resonator used in inertial navigation.
  • These devices all have the similar characteristics of the thin-walled shell-type rotating inner wall (6) and the thin-walled shell-like rotating outer wall (7), and the thickness between the two walls is obviously smaller than the diameter of the thin-walled shell-like rotating body (5) , height and other characteristic dimensions.
  • Step 1 installing the thin-walled shell-type rotary body (5) to be tested on the workpiece fixture (4);
  • Step 2 Generate motion track sequence ( ⁇ , ⁇ , s) according to the contour equation of the thin-walled shell-like body of revolution (5), where ( ⁇ i , ⁇ i , s i ) represent the position of the i-th point in the motion track sequence ;
  • Step 3 start the workpiece spindle (3) to rotate, and drive the thin-walled shell type rotary body (5) to perform a rotary motion;
  • Step 4 Start the scanning movement of the spectral confocal probe (10), control the bottom turntable (18), the linear motion axis mover (16) and the main probe turntable (11) to drive the spectral confocal probe (10) along the
  • the motion track sequence ( ⁇ , ⁇ , s) generated in step 2 performs a scanning motion, and during the scanning process, the axis of the spectral confocal probe (10) always moves along the contour normal of the thin-walled shell of revolution (5), and Ensure that the inner wall (6) of the thin-walled shell and the outer wall (7) of the thin-walled shell are always within the measuring range of the spectral confocal probe (10);
  • Step 5 During the scanning process, record in real time the position of the i-th point motion axis ( ⁇ i , ⁇ i , s i ), the position d inner_i of the inner wall (6) of the thin-walled shell type of revolution, and the position of the thin-walled shell type of revolution body The position d outer_i of the outer wall (7), the thickness data d thickness_i and the position data ds i measured by the compensating probe (15);
  • Step 6 After the scanning is completed, store all the measurement data recorded during the scanning process, and correct the measured thickness data according to the refractive index of the thin-walled shell-type rotary body (5) to be measured;
  • Step 7 according to the position data of the motion axis, the measurement data of the spectral confocal probe (10) (including the position d inner_i of the inner wall (6) of the thin-walled shell type rotary, the position of the outer wall (7) of the thin-walled shell type rotary d outer_i , thickness data d thickness_i ) and the measurement data of the compensation probe (15), reconstruct the three-dimensional surface shape point cloud of the inner and outer walls of the thin-walled shell and the point cloud data of the three-dimensional thickness distribution, and complete the thin-walled shell (5) The internal and external wall shape measurement and thickness distribution measurement.

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Abstract

一种同时检测薄壁回转体内外壁面形与厚度分布的方法与装置，通过底部转台(18)、主测头转台(11)与直线运动轴动子(16)带动光谱共焦测头(10)沿着薄壁壳类回转体(5)的表面进行仿形扫描，可一次性实现薄壁壳类回转体(5)内外壁面形与厚度分布的检测，不仅可避免在薄壁壳类回转体(5)内部布置测头所造成的机械干涉，而且可保证内外壁面形测量数据以及厚度分布数据在三维空间内的坐标一致性，从而保障了整体测量精度，同时可适应如共形整流罩、半球陀螺谐振子等不同类型的薄壁壳类回转体(5)的检测，为这类高端器件的制造过程提供一种兼具通用性、高效率与高精度的检测手段。

Description

同时检测薄壁回转体内外壁面形与厚度分布的方法与装置 技术领域
本发明涉及精密测量技术领域，尤其涉及一种同时检测薄壁回转体内外壁面形与厚度分布的方法与装置。
背景技术
薄壁壳类回转体是指厚度明显小于其特征尺寸的壳状回转对称元件，如应用于如导弹等飞行器上的共形整流罩、球形整流罩以及应用于航海装备惯性导航中的半球陀螺谐振子等。这类器件因具备优异的空气动力学性能与功能精度等而成为新一代空天装备及惯性导航领域中的核心光学器件，其内外壁面形质量与厚度分布均匀性直接决定其使役性能。然而由于其高长径比、高深宽比、大陡度等复杂特征，现有光学检测手段如激光干涉仪等难以采集回光，而三坐标测量机、轮廓仪等因机械结构干涉也难以实现这类器件的内外壁面形与厚度分布有效检测，其中内壁面形与厚度分布的检测难题更加凸出。当前检测手段的匮乏直接制约了这类先进器件的制造水平，亟需开发具有高效率、高精度的薄壁壳类回转体元件内外壁面形及厚度分布检测方法。
目前，部分专利提出了针对薄壁壳类回转体的检测方法，如中国专利CN110455246A公开了一种针对共形光学元件外壁面形的扫描测量方法，但未解决内壁面形与厚度的检测问题。
综合而言，当前公开的技术手段主要针对特定类型的薄壁壳类回转体的检测，如何实现具有高通用性、高效率与高精度的薄壁壳类回转体检测，仍是当前必须突破的技术瓶颈。
发明内容
本发明针对如共形整流罩、半球陀螺谐振子等薄壁壳类回转体制造过程中的内外壁面形及厚度测量需求，提供一种同时检测薄壁回转体内外壁面形与厚度分布的方法与装置。本发明通过两个转台与一个直线运动轴的联动带动光谱共焦测头对薄壁壳类回转体进行仿形扫描，可克服薄壁壳类回转体的高长径比、高深宽比以及大陡度等复杂 特征的检测难题，结合光谱共焦测头的多表面测量能力可通过单次、单侧扫描实现薄壁壳类回转体内外壁面形与厚度分布的一次性扫描检测，兼具高通用性、高测量效率与高测量精度。
为达到上述目的，本发明采用技术方案如下：
本发明装置包括：基座(1)、主轴底座(2)、工件主轴(3)、工件夹具(4)、薄壁壳类回转体(5)、薄壁壳类回转体内壁(6)、薄壁壳类回转体外壁(7)、测量光束(8)、主测头支架(9)、光谱共焦测头(10)、主测头转台(11)、补偿测头支架(12)、补偿光束(13)、标准平面镜(14)、补偿测头(15)、直线运动轴动子(16)、直线运动轴定子(17)、底部转台(18)。
所述的基座(1)左侧安装有主轴底座(2)，工件主轴(3)安装于主轴底座(2)上方右侧，工件主轴(3)的右侧安装有工件夹具(4)，工件夹具(4)的右侧安装有薄壁壳类回转体(5)。通过工件夹具(4)能够带动右侧安装的薄壁壳类回转体(5)进行旋转运动。
底部转台(18)安装在基座(1)上且设置在主轴底座(2)的右侧。底部转台(18)上表面沿径向安装有直线运动轴定子(17)，直线运动轴定子(17)上表面依次堆叠安装直线运动轴动子(16)、主测头转台(11)、主测头支架(9)；光谱共焦测头(10)安装在主测头支架(9)上。有补偿测头支架(12)安装在直线运动轴动子(16)上表面，且位于主测头转台(11)的右侧；有补偿测头支架(12)上固定的补偿测头(15)，补偿测头(15)发射补偿光束(13)照射到标准平面镜(14)进行位置补偿。标准平面镜(14)安装在直线运动轴定子(17)上表面且位于直线运动轴动子(16)的右边。
进一步，所述的主轴底座(2)由一体成型的半圆和长方体组成。
进一步，所述的工件主轴(3)与工件夹具(4)同轴心连接。
进一步，所述的工件夹具(4)的截面为工字型，两端分别连接工件主轴(3)和薄壁壳类回转体(5)。
进一步的，所述的光谱共焦测头(10)的具体要求为：如已知被测薄壁壳类回转体(5)的理论壁厚，则可直接选用量程超过其理论 壁厚的光谱共焦测头(10)进行检测；如未知被测薄壁壳类回转体(5)的壁厚信息，则可使用游标卡尺等简易标准量具估测其壁厚，再根据估测的壁厚信息选用量程超出该估测壁厚的光谱共焦测头(10)进行检测。
进一步的，所述补偿测头(15)为高精度的直线位移传感器，可采用激光干涉位移传感器等高精度直线测距传感器以实现运动误差补偿。
所述的同时检测薄壁回转体内外壁面形与厚度分布的方法，其步骤包括：
步骤1、将待测的薄壁壳类回转体(5)安装于工件夹具(4)上；
步骤2、根据薄壁壳类回转体(5)的轮廓方程生成运动轨迹序列(α,β,s)，其中(α i,β i,s i)表示运动轨迹序列中第i个点的位置；
步骤3、启动工件主轴(3)旋转，带动薄壁壳类回转体(5)进行旋转运动；
步骤4、启动光谱共焦测头(10)的扫描运动，控制底部转台(18)、直线运动轴动子(16)与主测头转台(11)带动光谱共焦测头(10)沿着步骤2生成的运动轨迹序列(α,β,s)进行扫描运动，扫描过程中光谱共焦测头(10)的轴线始终沿薄壁壳类回转体(5)的轮廓法线进行运动，并且保证薄壁壳类回转体内壁(6)与薄壁壳类回转体外壁(7)均始终位于光谱共焦测头(10)的量程范围内；
步骤5、在扫描过程中，实时记录第i个点运动轴的位置(α i,β i,s i)、薄壁壳类回转体内壁(6)的位置d inner_i、薄壁壳类回转体外壁(7)的位置d outer_i、厚度数据d thickness_i以及补偿测头(15)测量得到的运动误差数据ds i；
步骤6、扫描完成后，存储扫描过程中记录的所有测量数据，并根据待测的薄壁壳类回转体(5)的折射率对测量得到的厚度数据进行修正；
步骤7、根据运动轴的位置数据、光谱共焦测头(10)的测量数据(包括薄壁壳类回转体内壁(6)的位置d inner_i、薄壁壳类回转体 外壁(7)的位置d outer_i、厚度数据d thickness_i)以及补偿测头(15)的测量数据，重建薄壁壳类回转体内外壁三维面形点云以及三维厚度分布点云数据，完成薄壁壳类回转体(5)的内外壁面形测量及厚度分布测量。
进一步的，所述薄壁壳类回转体(5)具备薄壁壳类回转体内壁(6)与薄壁壳类回转体外壁(7)两个表面，且光谱共焦测头(10)发出的测量光束(8)照射在薄壁壳类回转体(5)表面时，其测量量程可同时覆盖薄壁壳类回转体内壁(6)与薄壁壳类回转体外壁(7)，以实现内外壁的同时检测。
所述的薄壁壳类回转体(5)的内外壁面形与厚度分布的测量装置使用光谱共焦测头(10)进行测量，当光谱共焦测头(10)发射测量光束(8)照射到薄壁壳类回转体(5)表面时，薄壁壳类回转体内壁(6)与薄壁壳类回转体外壁(7)均会产生一个反射峰值，通过解析两个反射峰值的信息能够分别提取出薄壁壳类回转体内壁(6)与薄壁壳类回转体外壁(7)的位置d inner与d outer。根据薄壁壳类回转体(5)的材料折射率对薄壁壳类回转体内壁(6)与薄壁壳类回转体外壁(7)之间的位置差值进行修正，得到该测量位置处薄壁壳类回转体的厚度值d thickness，从而实现薄壁壳类回转体(5)指定点位的内壁、外壁以及厚度信息的同时准确检测。不失一般性，光谱共焦测头(9)也可使用激光位移测头、超声测头等可同时检测多个界面的测头代替，以适应各类透明或不透明材料的检测。例如，当薄壁壳类回转体(5)的材质为金属等不透明材料时，使用超声测头即可实现其内外壁面形及厚度分布的同时检测。
所述的安装于直线运动轴动子(16)上表面的补偿测头(15)发射补偿光束(13)照射到安装于直线运动轴定子(17)上表面的标准平面镜(14)，以实时测量直线运动轴动子(16)相对于直线运动轴定子(17)的位置，并根据测量数据对直线运动轴动子(16)的运动误差进行补偿，以实现光谱共焦测头(10)的高精度空间定位与补偿。
所述的薄壁壳类回转体内外壁面形与厚度分布的测量方法，通过 底部转台(18)的旋转运动、直线运动轴动子(16)的直线运动以及主测头转台(11)的旋转运动构建出仿照被测薄壁壳类回转体(5)轮廓的仿形扫描轨迹，并带动光谱共焦测头(10)沿着薄壁壳类回转体(5)的轮廓法线方向进行扫描运动，实现薄壁壳类回转体(5)轮廓母线的扫描。
所述的仿照被测薄壁壳类回转体(5)轮廓的仿形扫描轨迹以薄壁壳类回转体(5)顶点中心为坐标原点，对于任意第i个点的位置设薄壁壳类回转体(5)表面轮廓上相对于其自身回转轴线极径为r i的位置坐标为z ri，一阶导数为z' ri，其中z ri代表薄壁壳类回转体(5)表面上的点与坐标原点的高度差；则底部转台转角α i(19)、主测头转台转角β i(20)、直线运动轴动子位移s i(21)、底部转台(18)的旋转中心到坐标原点的距离l 0、主测头转台(11)到光谱共焦测头(10)量程原点的距离l 1之间满足下方关系式(1)。对于已知的薄壁壳类回转体(5)的轮廓方程，z ri与z' ri均为r i的函数，因此对于任意极径r i，式中仅α i、β i、s i为未知数。通过给定极径序列(r 1,r 2,r 3,…)，可解出运动轨迹序列(α i,β i,s i),i＝1,2,3,…，从而生成底部转台(18)、主测头转台(11)与直线运动轴动子(16)仿形扫描轨迹。
Figure PCTCN2022076752-appb-000001
所述的薄壁壳类回转体内外壁面形与厚度分布检测方法可根据任意薄壁壳类回转体(5)的轮廓方程生成沿被测薄壁壳类回转体(5)轮廓法线的运动轨迹。通过光谱共焦测头(10)沿被测薄壁壳类回转体(5)轮廓法线的扫描运动以及由工件主轴(3)带动进行的薄壁壳类回转体(5)转动，使光谱共焦测头(9)相对于薄壁壳类回转体(5)形成三维空间内的仿形扫描轨迹，从而采集薄壁壳类回转体(5)全表面的测量信息。在光谱共焦测头(10)扫描过程中，可实时记录扫描轨迹上的薄壁壳类回转体内壁(6)位置、薄壁壳类回转体外壁(7)位置及薄壁壳类回转体(5)厚度，从而构建出薄壁壳类回转体(5)在三维空间内的内、外壁点云以及厚度点云，以实现薄壁壳类回转体 的内外壁面形及厚度分布的一次性扫描检测。
所述的薄壁壳类回转体内外壁面形与厚度分布检测方法，在获取到底部转台(18)、主测头转台(11)与直线运动轴动子(16)的运动轨迹序列(α i,β i,s i)、工件主轴(3)的旋转角度θ i、光谱共焦测头(10)对于薄壁壳类回转体外壁(7)的测量数据d outer_i、光谱共焦测头(10)对于薄壁壳类回转体内壁(6)的测量数据d inner_i以及厚度测量数据d thickness_i后，根据系统空间坐标关系对可以得到薄壁壳类回转体外壁(7)的面形三维点云坐标为：
Figure PCTCN2022076752-appb-000002
薄壁壳类回转体内壁(6)的面形三维点云坐标为：
Figure PCTCN2022076752-appb-000003
薄壁壳类回转体(5)在三维空间内的厚度分布为:
Figure PCTCN2022076752-appb-000004
其中i＝1,2,3,…，t i即为在薄壁壳类回转体(5)表面三维空间点云位置(x i,y i,z i)上的厚度分布。
本发明的有益效果在于：
本发明通过底部转台(18)、主测头转台(11)与直线运动轴动子(16)带动光谱共焦测头(10)沿着薄壁壳类回转体(5)的表面进行仿形扫描，可一次性实现薄壁壳类回转体(5)内外壁面形与厚度分布的检测，不仅可避免在薄壁壳类回转体(5)内部布置测头所造成的机械干涉，而且可保证内外壁面形测量数据以及厚度分布数据在三维空间内的坐标一致性，从而保障了整体测量精度，同时可适应 如共形整流罩、半球陀螺谐振子等不同类型的薄壁壳类回转体(5)的检测，为这类高端器件的制造过程提供一种兼具通用性、高效率与高精度的检测手段。
本发明能够解决如共形整流罩以及半球陀螺谐振子等新一代航空、航海装备中应用的薄壁壳类回转体的内外壁面形与厚度分布的检测难题。
附图说明
图1为可同时检测薄壁壳类回转体内外壁面形与厚度分布的测量装置
图2为薄壁壳类回转体内外壁面形与厚度分布测量装置俯视图
图3为薄壁壳类回转体内外壁面形与厚度分布扫描测量原理示意图
图4为基于光谱共焦传感器的薄壁壳类回转体厚度测量原理
图5为典型薄壁壳类回转体示意
图6为薄壁壳类回转体内外壁面形及厚度分布测量流程
具体实施方式
下面结合附图对本发明做进一步详述。
本发明提出一种基于如光谱共焦测头等可以测量多个表面的传感器实现薄壁壳类回转体内外壁面形与厚度分布的测量装置与方法，该方法仅在外侧布置传感器，通过多个运动轴带动光谱共焦测头沿薄壁壳类回转体表面进行仿形扫描运动，通过单侧测厚避免了对射式测厚的机械干涉问题，同时在扫描过程中同步采集薄壁壳类回转体内外壁位置与厚度信息，可保证检测数据在空间中的坐标的一致性，从而实现薄壁壳类回转体内外壁面形及厚度分布的高精度、快速检测。
如图1所示，基座(1)左侧安装有主轴底座(2)，工件主轴(3)安装于主轴底座(2)上方右侧，其右侧安装有工件夹具(4)，并可通过工件夹具(4)带动右侧安装的薄壁壳类回转体(5)进行旋转运动。基座(1)右侧安装有底部转台(18)，上方沿径向安装直线运动轴定子(17)，直线运动轴定子(17)上表面依次堆叠安装直线运动 轴动子(16)、主测头转台(11)、主测头支架(9)、光谱共焦测头(10)。直线运动轴动子(16)上表面外侧安装有补偿测头支架(12)，其上固定的补偿测头(15)发射补偿光束(13)照射到安装于直线运动轴定子(17)上表面外侧的标准平面镜(14)进行位置补偿。
如图2所示，在初始位置1处，光谱共焦测头(10)轴线与被测的薄壁壳类回转体(5)以及工件主轴(3)共线，并从该位置处开始扫描，当底部转台(18)带动直线运动轴定子(17)与其上固定的标准平面镜(14)旋转至位置2时，光谱共焦测头(10)的方向与被测薄壁壳类回转体(5)的表面法线方向出现偏差，此时通过主测头转台(11)旋转带动光谱共焦测头(10)进行摆动以补偿光谱共焦测头(10)的偏角，可调整光谱共焦测头(10)的轴线至与被测薄壁壳类回转体(5)表面垂直，再通过直线运动轴动子(16)的运动调整光谱共焦测头(10)的位置使薄壁壳类回转体内壁(6)与薄壁壳类回转体外壁(7)均位于测量光束(8)范围内，即实现位置2处的光谱共焦测头(10)的位置调节，此时通过补偿测头(15)记录下直线运动轴动子(16)相对于标准平面镜(14)的准确位移量，即可对直线运动轴动子(16)的运动进行补偿。在整个扫描过程中重复上述动作，即可实现沿薄壁壳类回转体(5)表面法线的仿形扫描。在薄壁壳类回转体(5)表面形状为球面的特例情况下，只需要将其球形与底部转台(18)的轴线调整重合，即可实现在扫描过程中光谱共焦测头(10)始终垂直于该球面，而无需运动主测头转台(11)与直线运动轴动子(16)。
如图3所示，以薄壁壳类回转体(5)顶点中心为坐标原点建立坐标系，对于任意第i个点的位置，横轴正方向向下，代表薄壁壳类回转体(5)表面上的点与其回转轴线的极径距离r i；纵轴正方向向右，代表薄壁壳类回转体(5)表面轮廓上相对于其自身回转轴线极径为r i的位置坐标z ri，一阶导数为z' ri，其中z ri代表薄壁壳类回转体(5)表面上的点与坐标原点的高度差；底部转台转角α i、主测头转台转角β i(20)、直线运动轴动子位移s i(21)、底部转台(18)旋转中心到 坐标原点的距离l 0、主测头转台(11)到光谱共焦测头(10)量程原点的距离l 1之间满足如下关系式：
Figure PCTCN2022076752-appb-000005
对于已知的薄壁壳类回转体(5)的轮廓方程，z ri与z′ ri均为r i的函数，因此对于任意极径r i，式中仅α i、β i、s i为未知数。通过给定极径序列(r 1,r 2,r 3,…)，可解出扫描点位序列(α i,β i,s i),i＝1,2,3,…，从而生成底部转台(18)、主测头转台(11)与直线运动轴动子(16)仿形扫描轨迹。
当给定薄壁壳类回转体(5)的轮廓方程后，便可根据公式(1)规划求解出光谱共焦测头(10)沿薄壁壳类回转体(5)表面法线的仿形扫描轨迹。
不失一般性，以二次非球轮廓为例，其标准方程为：
Figure PCTCN2022076752-appb-000006
其中C为二次非球轮廓的顶点曲率，k为二次非球轮廓的圆锥参数，当k＝0时，该轮廓为圆形轮廓；当k>-1且k≠0时，该轮廓为椭球轮廓；当k＝-1时，该轮廓为抛物线轮廓；当k<-1时，该轮廓为双曲线轮廓。结合该轮廓方程与式(1)即可生成仿形扫描轨迹。当光谱共焦传感器(10)运动到图3中的任意第j个点的位置时，亦始终满足上述公式(1)。
如图4所示，当光谱共焦测头(10)发出的测量光束(8)照射在薄壁壳类回转体(5)表面时，由于薄壁壳类回转体内壁(6)与薄壁回转体外壁(7)均存在一处空气-固体的界面，该两个界面均会产生反射。进一步的，两个界面反射的光束会在光谱共焦测头(10)配套的控制器中形成如图4右侧所示的两个信号峰值，其中薄壁壳类回 转体外壁(7)形成的信号峰值的强度为I p1，对应的波长位置为λ p1；薄壁壳类回转体内壁(6)形成的信号峰值的强度为I p2，对应的波长位置为λ p2。通过分别解析该两个峰值即可实现薄壁壳类回转体外壁(7)位置d outer与薄壁壳类回转体内壁(6)位置d inner的检测，考虑到薄壁壳类回转体(5)的材料折射率n对厚度进行修正，可以按照以下公式计算出厚度，实现薄壁壳类回转体(5)内外壁位置与厚度的准确测量。
Figure PCTCN2022076752-appb-000007
不失一般性，光谱共焦测头(10)也可采用激光三角位移测头、激光干涉测头、超声测头等其它原理的测头代替，以适应各类透明或不透明材料的检测。例如，当薄壁壳类回转体(5)的材质为金属等不透明材料时，使用超声测头即可实现其内外壁面形及厚度分布的同时检测。
如图5所示，薄壁壳类回转体(5)包括多种类型的元件，图5(a)为具备大长径比的共形整流罩，图5(b)为球形的球罩，图5(c)为惯性导航中应用的半球陀螺谐振子。这类器件均具备薄壁壳类回转体内壁(6)与薄壁壳类回转体外壁(7)的类似特征，且两个壁面间的厚度明显小于薄壁壳类回转体(5)的直径、高度等特征尺寸。
如图6所示，薄壁壳类回转体内外壁面形与厚度分布的测量流程如下：
步骤1、将待测的薄壁壳类回转体(5)安装于工件夹具(4)上；
步骤2、根据薄壁壳类回转体(5)的轮廓方程生成运动轨迹序列(α,β,s)，其中(α i,β i,s i)表示运动轨迹序列中第i个点的位置；
步骤3、启动工件主轴(3)旋转，带动薄壁壳类回转体(5)进行旋转运动；
步骤4、启动光谱共焦测头(10)的扫描运动，控制底部转台(18)、直线运动轴动子(16)与主测头转台(11)带动光谱共焦测头(10) 沿着步骤2生成的运动轨迹序列(α,β,s)进行扫描运动，扫描过程中光谱共焦测头(10)的轴线始终沿薄壁壳类回转体(5)的轮廓法线进行运动，并且保证薄壁壳类回转体内壁(6)与薄壁壳类回转体外壁(7)均始终位于光谱共焦测头(10)的量程范围内；
步骤5、在扫描过程中，实时记录第i个点运动轴的位置(α i,β i,s i)、薄壁壳类回转体内壁(6)的位置d inner_i、薄壁壳类回转体外壁(7)的位置d outer_i、厚度数据d thickness_i以及补偿测头(15)测量得到的位置数据ds i；
步骤6、扫描完成后，存储扫描过程中记录的所有测量数据，并根据待测的薄壁壳类回转体(5)的折射率对测量得到的厚度数据进行修正；
步骤7、根据运动轴的位置数据、光谱共焦测头(10)的测量数据(包括薄壁壳类回转体内壁(6)的位置d inner_i、薄壁壳类回转体外壁(7)的位置d outer_i、厚度数据d thickness_i)以及补偿测头(15)的测量数据，重建薄壁壳类回转体内外壁三维面形点云以及三维厚度分布点云数据，完成薄壁壳类回转体(5)的内外壁面形测量及厚度分布测量。
以上所述仅为本专利的较佳实施例，并不用以限制本专利，凡在本专利的精神和原则之内，所作的任何修改、等同替换、改进等，均应包含在本专利的保护范围之内。

Claims (10)

  1. 同时检测薄壁回转体内外壁面形与厚度分布的装置，其特征在于包括基座(1)、主轴底座(2)、工件主轴(3)、工件夹具(4)、薄壁壳类回转体(5)、薄壁壳类回转体内壁(6)、薄壁壳类回转体外壁(7)、测量光束(8)、主测头支架(9)、光谱共焦测头(10)、主测头转台(11)、补偿测头支架(12)、补偿光束(13)、标准平面镜(14)、补偿测头(15)、直线运动轴动子(16)、直线运动轴定子(17)、底部转台(18)；
    所述的基座(1)左侧安装有主轴底座(2)，工件主轴(3)安装于主轴底座(2)上方右侧，工件主轴(3)的右侧安装有工件夹具(4)，工件夹具(4)的右侧安装有薄壁壳类回转体(5)；通过工件夹具(4)能够带动右侧安装的薄壁壳类回转体(5)进行旋转运动；
    底部转台(18)安装在基座(1)上且设置在主轴底座(2)的右侧；底部转台(18)上表面沿径向安装有直线运动轴定子(17)，直线运动轴定子(17)上表面依次堆叠安装直线运动轴动子(16)、主测头转台(11)、主测头支架(9)；光谱共焦测头(10)安装在主测头支架(9)上；有补偿测头支架(12)安装在直线运动轴动子(16)上表面，且位于主测头转台(11)的右侧；有补偿测头支架(12)上固定的补偿测头(15)，补偿测头(15)发射补偿光束(13)照射到标准平面镜(14)进行位置补偿；标准平面镜(14)安装在直线运动轴定子(17)上表面且位于直线运动轴动子(16)的右边。
  2. 同时检测薄壁回转体内外壁面形与厚度分布的方法，其特征在于包括如下步骤：
    步骤1、将待测的薄壁壳类回转体(5)安装于工件夹具(4)上；
    步骤2、根据薄壁壳类回转体(5)的轮廓方程生成运动轨迹序列(α,β,s)，其中(α i,β i,s i)表示运动轨迹序列中第i个点的位置；
    步骤3、启动工件主轴(3)旋转，带动薄壁壳类回转体(5)进行旋转运动；
    步骤4、启动光谱共焦测头(10)的扫描运动，控制底部转台(18)、直线运动轴动子(16)与主测头转台(11)带动光谱共焦测头(10)沿着步骤2生成的运动轨迹序列(α,β,s)进行扫描运动，扫描过程中光谱共焦测 头(10)的轴线始终沿薄壁壳类回转体(5)的轮廓法线进行运动，并且保证薄壁壳类回转体内壁(6)与薄壁壳类回转体外壁(7)均始终位于光谱共焦测头(10)的量程范围内；
    步骤5、在扫描过程中，实时记录第i个点运动轴的位置(α i,β i,s i)、薄壁壳类回转体内壁(6)的位置d inner_i、薄壁壳类回转体外壁(7)的位置d outer_i、厚度数据d thickness_i以及补偿测头(15)测量得到的运动误差数据ds i；
    步骤6、扫描完成后，存储扫描过程中记录的所有测量数据，并根据待测的薄壁壳类回转体(5)的折射率对测量得到的厚度数据进行修正；
    步骤7、根据运动轴的位置数据、光谱共焦测头(10)的测量数据以及补偿测头(15)的测量数据，重建薄壁壳类回转体内外壁三维面形点云以及三维厚度分布点云数据，完成薄壁壳类回转体(5)的内外壁面形测量及厚度分布测量。
  3. 根据权利要求2所述的同时检测薄壁回转体内外壁面形与厚度分布的方法，其特征在于对薄壁壳类回转体(5)进行测量，当光谱共焦测头(10)发射测量光束(8)照射到薄壁壳类回转体(5)表面时，薄壁壳类回转体内壁(6)与薄壁壳类回转体外壁(7)均会产生一个反射峰值，解析两个反射峰值的信息分别提取出薄壁壳类回转体内壁(6)与薄壁壳类回转体外壁(7)的位置d inner与d outer。
  4. 根据权利要求3所述的同时检测薄壁回转体内外壁面形与厚度分布的方法，其特征在于根据薄壁壳类回转体(5)的材料折射率n对薄壁壳类回转体内壁(6)与薄壁壳类回转体外壁(7)之间的位置差值进行修正，得到该测量位置i处薄壁壳类回转体的厚度值d thickness_i：
    Figure PCTCN2022076752-appb-100001
  5. 根据权利要求4所述的同时检测薄壁回转体内外壁面形与厚度分布的方法，其特征在于安装于直线运动轴动子(16)上表面的补偿测头(15)发射补偿光束(13)照射到安装于直线运动轴定子(17)上表面的标准平面镜(14)，以实时测量直线运动轴动子(16)相对于直线运动轴定子(17) 的位置，并根据测量数据对直线运动轴动子(16)的运动误差进行补偿，以实现光谱共焦测头(10)的高精度空间定位与补偿。
  6. 根据权利要求4所述的同时检测薄壁回转体内外壁面形与厚度分布的方法，其特征在于通过底部转台(18)的旋转运动、直线运动轴动子(16)的直线运动以及主测头转台(11)的旋转运动构建出仿照被测薄壁壳类回转体(5)轮廓的仿形扫描轨迹，并带动光谱共焦测头(10)沿着薄壁壳类回转体(5)的轮廓法线方向进行扫描运动，实现薄壁壳类回转体(5)轮廓母线的扫描。
  7. 根据权利要求6所述的同时检测薄壁回转体内外壁面形与厚度分布的方法，其特征在于仿照被测薄壁壳类回转体(5)轮廓的仿形扫描轨迹以薄壁壳类回转体(5)顶点中心为坐标原点，对于任意第i个点的位置设薄壁壳类回转体(5)表面轮廓上相对于其自身回转轴线极径为r i的位置坐标为z ri，一阶导数为z' ri；底部转台转角α i(19)、主测头转台转角β i(20)、直线运动轴动子位移s i(21)、底部转台(18)的旋转中心到坐标原点的距离l 0、主测头转台(11)到光谱共焦测头(10)量程原点的距离l 1之间满足下方关系式(1)；通过给定极径序列(r 1,r 2,r 3,…)，可解出运动轨迹序列(α i,β i,s i),i＝1,2,3,…，从而生成底部转台(18)、主测头转台(11)与直线运动轴动子(16)仿形扫描轨迹；
    Figure PCTCN2022076752-appb-100002
    其中，根据已知薄壁壳类回转体(5)的轮廓方程，z ri与z' ri均为r i的函数，因此对于任意极径r i，式中仅α i、β i、s i为未知数。
  8. 根据权利要求6或7所述的同时检测薄壁回转体内外壁面形与厚度分布的方法，其特征在于获取到底部转台(18)、主测头转台(11)与直线运动轴动子(16)的运动轨迹序列(α i,β i,s i)、工件主轴(3)的旋转角度θ i、光谱共焦测头(10)对于薄壁壳类回转体外壁(7)的测量数据d outer_i、光谱共焦测头(10)对于薄壁壳类回转体内壁(6)的测量数据d inner_i以及厚度测量数据d thickness_i后，根据系统空间坐标关系对得到薄壁壳类回转体 外壁(7)的面形三维点云坐标为：
    Figure PCTCN2022076752-appb-100003
  9. 根据权利要求6或7所述的同时检测薄壁回转体内外壁面形与厚度分布的方法，其特征在于薄壁壳类回转体内壁(6)的面形三维点云坐标为：
    Figure PCTCN2022076752-appb-100004
  10. 根据权利要求6或7所述的同时检测薄壁回转体内外壁面形与厚度分布的方法，其特征在于薄壁壳类回转体(5)在三维空间内的厚度分布为:
    Figure PCTCN2022076752-appb-100005
    其中i＝1,2,3,…，t i即为在薄壁壳类回转体(5)表面三维空间点云位置(x i,y i,z i)上的厚度分布。
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