WO2023138177A1 - Cover plates, manufacturing method therefor and electronic device - Google Patents

Cover plates, manufacturing method therefor and electronic device Download PDF

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Publication number
WO2023138177A1
WO2023138177A1 PCT/CN2022/130898 CN2022130898W WO2023138177A1 WO 2023138177 A1 WO2023138177 A1 WO 2023138177A1 CN 2022130898 W CN2022130898 W CN 2022130898W WO 2023138177 A1 WO2023138177 A1 WO 2023138177A1
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WO
WIPO (PCT)
Prior art keywords
diamond
cover plate
layer
sub
protective layer
Prior art date
Application number
PCT/CN2022/130898
Other languages
French (fr)
Chinese (zh)
Inventor
陈江
Original Assignee
Oppo广东移动通信有限公司
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Filing date
Publication date
Application filed by Oppo广东移动通信有限公司 filed Critical Oppo广东移动通信有限公司
Publication of WO2023138177A1 publication Critical patent/WO2023138177A1/en

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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/14Protective coatings, e.g. hard coatings
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/18Coatings for keeping optical surfaces clean, e.g. hydrophobic or photo-catalytic films
    • GPHYSICS
    • G09EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09FDISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
    • G09F9/00Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements
    • G09F9/30Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K5/00Casings, cabinets or drawers for electric apparatus
    • H05K5/02Details
    • H05K5/03Covers

Definitions

  • the present application relates to the field of electronics, in particular to a cover plate, its preparation method and electronic equipment.
  • the anti-water, anti-oil and anti-fingerprint effect of the cover plate of electronic equipment directly affects the user experience, especially when the cover plate is used as a screen cover plate, it also affects the display effect of the screen.
  • the current anti-fingerprint layer of the cover usually uses an organic coating, however, the organic coating has poor wear resistance, and after a period of use, the anti-fingerprint effect is significantly reduced or even disappears.
  • the embodiment of the first aspect of the present application provides a cover plate, which includes:
  • a protective layer is arranged on the surface of the cover body, the protective layer is a diamond-like film layer, and the range of the water contact angle ⁇ 1 of the protective layer is 120° ⁇ 1 ⁇ 130°.
  • the embodiment of the second aspect of the present application provides a cover plate, which includes:
  • a protective layer the protective layer is arranged on the surface of the cover body, the protective layer is a diamond-like film layer, the protective layer has a plurality of protrusion structures, the plurality of protrusion structures are located on the surface of the protective layer away from the cover body, and each of the protrusion structures has a plurality of sub-protrusions located on the surface of the protrusion structure.
  • the embodiment of the third aspect of the present application provides a method for preparing a cover plate, which includes:
  • a protective layer is formed on the surface of the cover body, wherein the protective layer is a diamond-like film layer, and the range of the water contact angle ⁇ 1 of the protective layer is 120° ⁇ 1 ⁇ 130°.
  • the embodiment of the fourth aspect of the present application provides an electronic device, which includes:
  • the cover plate described in the embodiment of the present application is arranged on one side of the display assembly, and
  • a circuit board assembly is electrically connected to the display assembly, and is used to control the display assembly to display.
  • FIG. 1 is a schematic structural view of a cover plate according to an embodiment of the present application.
  • FIG. 2 is a schematic cross-sectional structural view of the cover plate along the direction A-A in FIG. 1 according to an embodiment of the present application.
  • FIG. 3 is an enlarged view of the dashed box I in FIG. 2 .
  • FIG. 4 is a microscope topography view of the surface of the protective layer of the cover plate away from the cover plate body according to an embodiment of the present application.
  • Fig. 5 is a schematic structural diagram of a protective layer according to an embodiment of the present application.
  • Fig. 6 is a schematic structural diagram of a cover plate according to another embodiment of the present application.
  • FIG. 7 is a schematic flowchart of a method for preparing a cover plate according to an embodiment of the present application.
  • Fig. 8 is a schematic flowchart of a method for preparing a cover plate according to another embodiment of the present application.
  • FIG. 9 is a schematic structural diagram corresponding to S302 and S303 in the method for manufacturing a cover plate according to an embodiment of the present application.
  • FIG. 10 is a schematic structural diagram corresponding to S304 and S305 in the method for manufacturing a cover plate according to an embodiment of the present application.
  • FIG. 11 is a schematic flowchart of a method for preparing a cover plate according to another embodiment of the present application.
  • Fig. 12 is a schematic flowchart of a method for preparing a cover plate according to another embodiment of the present application.
  • Fig. 13 is a microscope image of the surface topography of the protective layer of Example 1 of the present application.
  • FIG. 14 is an enlarged view of the block in FIG. 13 .
  • FIG. 15 is a graph showing the visible-ultraviolet light transmittance curves of the cover plates of Example 1 and Comparative Example 1.
  • FIG. 15 is a graph showing the visible-ultraviolet light transmittance curves of the cover plates of Example 1 and Comparative Example 1.
  • FIG. 16 is a graph of infrared light transmittance curves of the cover plates of Example 1 and Comparative Example 1.
  • FIG. 16 is a graph of infrared light transmittance curves of the cover plates of Example 1 and Comparative Example 1.
  • Fig. 17 is the microscopic topography of the cover plate of Example 1 before and after sandblasting, wherein (a) is the microscopic topography of the cover plate before sandblasting, and (b) is the microscopic topography of the cover plate after sandblasting.
  • Fig. 18 is the microscope topography of the cover plate of Comparative Example 1 before and after sandblasting, wherein (a) is the microscope topography of the cover plate before sandblasting, and (b) is the microscope topography of the cover plate after sandblasting.
  • FIG. 19 is a schematic structural diagram of an electronic device according to an embodiment of the present application.
  • FIG. 20 is a schematic diagram of a partial exploded structure of an electronic device according to an embodiment of the present application.
  • FIG. 21 is a circuit block diagram of an electronic device according to an embodiment of the present application.
  • Fig. 22 is a circuit block diagram of an electronic device according to yet another embodiment of the present application.
  • a cover plate which includes:
  • a protective layer is arranged on the surface of the cover body, the protective layer is a diamond-like film layer, and the range of the water contact angle ⁇ 1 of the protective layer is 120° ⁇ 1 ⁇ 130°.
  • the protection layer has a plurality of protrusion structures located on the surface of the protection layer away from the cover body, and each of the protrusion structures has a plurality of sub-protrusions located on the surface of the protrusion structure.
  • the protection layer includes a plurality of first crystal nuclei, a first deposition layer, a plurality of second crystal nuclei and a second deposition layer, the plurality of first crystal nuclei are arranged at intervals on the surface of the cover plate body, the first deposition layer covers the surface of the plurality of first crystal nuclei, the plurality of second crystal nuclei are arranged on the surface of the first deposition layer away from the first crystal nuclei, and the second deposition layer covers the surfaces of the plurality of second crystal nuclei, wherein the first crystal nuclei and the first deposition layer form a first protective sub-layer, and the first protective sub-layer is a first diamond-like sub-film layer, and the second crystal nuclei and The second deposited layer constitutes a second protective sublayer, and the second protective sublayer is a second diamond-like sublayer.
  • the first crystal nucleus is a first diamond nucleus
  • the second crystal nucleus is a second diamond nucleus
  • the first deposited layer is a diamond-like film layer
  • the second deposited layer is a diamond-like film layer
  • the range of the thickness h1 of the protective layer is 5 ⁇ m ⁇ h1 ⁇ 10 ⁇ m; the range of the maximum distance d1 of the area surrounded by the orthographic projection of the raised structure on the surface of the protective layer is 3 ⁇ m ⁇ d1 ⁇ 7 ⁇ m; the range of the distance d2 between the two furthest points on the sub-protrusions is 40nm ⁇ d2 ⁇ 2 ⁇ m.
  • the visible light transmittance of the cover plate is greater than or equal to 80%
  • the infrared light transmittance of the cover plate is greater than or equal to 80%
  • the ultraviolet light transmittance of the cover plate is greater than or equal to 80%.
  • the cover body includes at least one of glass, ceramic or sapphire.
  • cover plate which includes:
  • a protective layer the protective layer is arranged on the surface of the cover body, the protective layer is a diamond-like film layer, the protective layer has a plurality of protrusion structures, the plurality of protrusion structures are located on the surface of the protective layer away from the cover body, and each of the protrusion structures has a plurality of sub-protrusions located on the surface of the protrusion structure.
  • the protective layer includes a plurality of first crystal nuclei, a first deposition layer, a plurality of second crystal nuclei and a second deposition layer, the plurality of first crystal nuclei are arranged at intervals on the surface of the cover plate body, the first deposition layer covers the surface of the plurality of first crystal nuclei, the plurality of second crystal nuclei are arranged on the surface of the first deposition layer away from the first crystal nuclei, and the second deposition layer covers the surface of the plurality of second crystal nuclei, wherein the first crystal nuclei and the first deposition layer form a first protective sub-layer, and the first protective sub-layer is a first diamond-like sub-film layer, and the second crystal nuclei The core and the second deposition layer form a second protection sublayer, and the second protection sublayer is a second diamond-like sublayer.
  • the range of the thickness h1 of the protective layer is 5 ⁇ m ⁇ h1 ⁇ 10 ⁇ m; the range of the maximum distance d1 of the area surrounded by the orthographic projection of the raised structure on the surface of the protective layer is 3 ⁇ m ⁇ d1 ⁇ 7 ⁇ m; the range of the distance d2 between the two furthest points on the sub-protrusions is 40nm ⁇ d2 ⁇ 2 ⁇ m.
  • the visible light transmittance of the cover plate is greater than or equal to 80%
  • the infrared light transmittance of the cover plate is greater than or equal to 80%
  • the ultraviolet light transmittance of the cover plate is greater than or equal to 80%.
  • the cover body includes at least one of glass, ceramic or sapphire.
  • the present application provides a method for preparing a cover plate, which includes:
  • a protective layer is formed on the surface of the cover body, wherein the protective layer is a diamond-like film layer, and the range of the water contact angle ⁇ 1 of the protective layer is 120° ⁇ 1 ⁇ 130°.
  • a protective layer on the surface of the cover body includes:
  • the second diamond nucleation liquid carry out the second electrostatic deposition, to form a second crystal nucleus on the surface of the first diamond-like sub-film layer, the second crystal nucleus is the second diamond crystal nucleus;
  • the protective layer includes the first diamond-like sub-film layer and the second diamond-like sub-film layer
  • the diamond-like film layer includes the first diamond-like sub-film layer and the second diamond-like sub-film layer.
  • the electrodeposition of the cover plate body in the first diamond nucleation solution is performed to form a first crystal nucleus on the surface of the cover plate body, including:
  • the first electrostatic deposition is performed under the range of the first voltage U1 of 15V ⁇ U1 ⁇ 25V, and the time range of the first electrostatic deposition is 2min to 4min, so as to form a first crystal nucleus on the surface of the cover body.
  • the second electrostatic deposition is carried out under the second voltage U2 in the range of 6V ⁇ U2 ⁇ 10V, and the time range of the second electrostatic deposition is in the range of 60s to 90s, so as to form the second crystal nuclei on the surface of the first DLC sub-film layer.
  • the method also includes:
  • the oxidation treatment is carried out in an oxidation solution, wherein the oxidation solution is an aqueous solution including hydrogen peroxide and ammonia water.
  • the deposition of diamond-like carbon on the surface of the first crystal nucleus to obtain the first diamond-like carbon sub-film layer includes:
  • the methane is the first flow rate
  • the hydrogen is the second flow rate
  • the temperature of the reaction gas is the first temperature
  • the temperature of the cover body is the second temperature
  • the hot wire chemical vapor deposition method is used under the first pressure to deposit diamond-like carbon on the surface of the first crystal nucleus for the first time to obtain the first diamond-like sub-film layer
  • the first flow rate is 30SCCM to 50SCCM
  • the second flow rate is 650SCCM to 750SCCM
  • the first temperature is 2450°C to 2650°C
  • the second temperature is 750°C to 850°C
  • the first pressure is 1.8KPa to 2.2KPa
  • the first time is 50min to 80min.
  • said depositing diamond-like carbon on the surface of the second crystal nucleus, to obtain the second diamond-like carbon sub-film layer includes:
  • the methane is the third flow rate
  • the hydrogen is the fourth flow rate
  • the temperature of the reaction gas is the third temperature
  • the temperature of the cover plate body is the fourth temperature
  • the hot wire chemical vapor deposition method is used under the second pressure.
  • the diamond-like carbon is deposited on the surface of the second crystal nucleus for a second time to obtain a second diamond-like sub-film layer, wherein the third flow rate is 30SCCM to 50SCCM, the fourth flow rate is 650SCCM to 750SCCM, and the third temperature is 2450°C to 2650°C, the fourth temperature is 750°C to 850°C, the second pressure is 1.8KPa to 2.2KPa, and the second time is 50min to 80min.
  • the present application provides an electronic device, which includes:
  • the cover plate is arranged on one side of the display assembly;
  • the cover plate includes a cover plate body and a protective layer, the protective layer is arranged on the surface of the cover plate body, and the protective layer is a diamond-like film layer;
  • the protective layer satisfies at least one of the following conditions: the water contact angle ⁇ 1 of the protective layer is in the range of 120° ⁇ 1 ⁇ 130°; Multiple sub-protrusions of the surface; and
  • a circuit board assembly is electrically connected to the display assembly, and is used to control the display assembly to display.
  • the cover plate of the electronic device according to the fourth aspect of the present application may be the cover plate described in any one of the first aspect and the second aspect of the present application.
  • Covers of electronic devices such as mobile phones, such as front or rear covers, can be deposited with an anti-fingerprint layer on the surface of the cover in order to avoid leaving watermarks, fingerprints, stains, etc. during use.
  • the anti-fingerprint layer can be formed by a coating composed of active silane groups and fluorine-modified organic groups.
  • the silane groups in the coating can be well bonded to the glass, and the fluorocarbon groups have low surface tension.
  • the anti-fingerprint layer can be used to form better waterproof, oil-proof, and fingerprint-proof effects.
  • the anti-fingerprint layer has poor abrasion resistance. After a period of use (for example, 3 to 6 months), the anti-fingerprint effect of the cover plate is significantly reduced or even disappears, which greatly reduces the experience of consumers.
  • the embodiment of the present application provides a cover plate 100 which has a long-term anti-fingerprint effect.
  • the cover plate 100 of the embodiment of the present application can be applied to but not limited to mobile phones, tablet computers, notebook computers, desktop computers, smart bracelets, smart watches, e-readers, game consoles and other electronic devices 600 (as shown in Figure 19 and Figure 20 ).
  • the cover plate 100 in the embodiment of the present application may have a 2D structure, a 2.5D structure, a 3D structure, and the like.
  • the cover plate 100 of the present application may be a front cover (such as a protective cover of a display screen), a middle frame, a rear cover (battery cover), a decoration, etc. of the electronic device 600 .
  • the cover plate 100 is described in detail by taking the front cover of a mobile phone as an example, which should not be construed as a limitation to the cover plate 100 of the embodiment of the present application.
  • the embodiment of the present application provides a cover 100 , which includes a cover body 10 and a protective layer 30 .
  • the protective layer 30 is disposed on the surface of the cover body 10
  • the protective layer 30 is a diamond-like film layer
  • the water contact angle ⁇ 1 of the protective layer 30 is in the range of 120° ⁇ 1 ⁇ 130°.
  • Diamond Like Carbon refers to an amorphous carbon film containing a diamond-like structure. Diamond-like carbon film is a metastable material formed in the form of sp3 and sp2 bonds.
  • the protective layer 30 is arranged on the surface of the cover body 10. It can be that the protective layer 30 is arranged on one surface or multiple surfaces of the cover body 10, and it can also be a partial surface or the entire surface of the protective layer 30 arranged on one surface of the cover body 10. In the illustrations of the application, the protective layer 30 is arranged on one surface of the cover body 10 as an example for illustration, and should not be understood as limiting the embodiment of the application.
  • the water contact angle ⁇ 1 of the protective layer 30 may be, but not limited to, 120°, 121°, 122°, 123°, 124°, 125°, 126°, 127°, 128°, 129°, 130°, etc.
  • Water contact angle refers to the contact angle of water on the surface of the solid film layer, for example, the contact angle of water droplets on the surface of the protective layer 30 .
  • the cover plate 100 of the embodiment of the present application adopts 0000# steel wool with a load of 1Kg to rub the surface of the protective layer 10 back and forth.
  • the cover plate 100 will not be scratched after more than 200,000 times of friction.
  • the cover plate 100 of the embodiment of the present application includes a protective layer 30, which is a diamond-like film layer, and the water contact angle ⁇ 1 of the protective layer 30 is in the range of 120° ⁇ 1 ⁇ 130°.
  • the water contact angle ⁇ 1 of the protective layer 30 is in the range of 120° ⁇ 1 ⁇ 130°, the protective layer 30 has a relatively high water contact angle, and thus has low hysteresis, thus making the cover 100 have good waterproof, antifouling and antifingerprint properties.
  • the diamond-like film layer has high hardness, good wear resistance, and is not easy to wear, so that after a long period of use, the cover plate 100 still has good self-cleaning, waterproof, anti-fouling and anti-fingerprint properties, and the self-cleaning, waterproof, anti-fouling and anti-fingerprint properties can be maintained for a longer period of time.
  • Hysteresis refers to the resistance of the surface to the rolling of droplets. The resistance is large and the hysteresis is high, and the resistance is small and the hysteresis is low.
  • the visible light transmittance of the cover 100 is greater than or equal to 80%; further, the visible light transmittance of the cover 100 is greater than or equal to 85%; further, the visible light transmittance of the cover 100 is greater than or equal to 90%.
  • the visible light transmittance of the cover plate 100 may be, but not limited to, 80%, 82%, 85%, 88%, 90%, 93%, 95%, 97%, 98%, 99% and so on. The higher the visible light transmittance of the cover plate 100, when applied to the protective cover of the display screen of the electronic device 600, the display screen can have a better display effect; when applied to the back cover and the cover plate 100 is provided with textures or patterns, the cover plate 100 can have clearer textures or patterns.
  • the infrared light transmittance of the cover plate 100 is greater than or equal to 80%; further, the infrared light transmittance of the cover plate 100 is greater than or equal to 85%; further, the infrared light transmittance of the cover plate 100 is greater than or equal to 90%.
  • the infrared light transmittance of the cover plate 100 may be, but not limited to, 80%, 82%, 85%, 88%, 90%, 93%, 95%, 97%, 98%, 99% and so on.
  • the cover plate 100 when applied to the protective cover of the display screen of the electronic device 600, it can better transmit infrared rays, so that the sensor under the cover plate 100, such as a fingerprint sensor, can better receive infrared rays, thereby achieving better detection effect.
  • the UV transmittance of the cover 100 is greater than or equal to 80%; further, the UV transmittance of the cover 100 is greater than or equal to 85%; further, the UV transmittance of the cover 100 is greater than or equal to 90%.
  • the UV light transmittance of the cover plate 100 may be, but not limited to, 80%, 82%, 85%, 88%, 90%, 93%, 95%, 97%, 98%, 99% and so on. The higher the ultraviolet light transmittance of the cover 100 , when applied to the electronic device 600 , it can better transmit ultraviolet light, so that the ultraviolet light sensor under the cover 100 of the electronic device 600 can better sense ultraviolet light and perform more accurate detection.
  • the material of the cover body 10 may be, but not limited to, at least one of glass, ceramic, or sapphire.
  • the ceramic may be, but not limited to, a silica-based ceramic.
  • the cover plate body 10 When the cover plate 100 is used as the front cover of the electronic device 600, the cover plate body 10 is light-transmissive. The higher the light transmittance of the cover plate body 10 is, the better the display effect of the electronic device 600 is. , 93%, 95%, 97%, 98%, 99%, etc.
  • the cover plate body 10 When the cover plate 100 is used as the back cover of the electronic device 600 , the cover plate body 10 may be transparent, opaque or semi-transparent.
  • the thickness of the cover body 10 is 0.3mm to 1mm; specifically, the thickness of the cover body 10 can be but not limited to 0.3mm, 0.4mm, 0.5mm, 0.6mm, 0.7mm, 0.8mm, 0.9mm, 1mm and so on.
  • the cover body 10 is too thin, it cannot play a supporting and protective role well, and the mechanical strength cannot well meet the requirements of the cover 100 of the electronic device 600.
  • the cover body 10 is too thick, the weight of the electronic device 600 will be increased, affecting the feel of the electronic device 600, and the user experience is not good.
  • the protection layer 30 has a plurality of protrusion structures 31, the plurality of protrusion structures 31 are located on the surface of the protection layer 30 away from the cover body 10, and each of the protrusion structures 31 has a plurality of sub-protrusions 311 located on the surface of the protrusion structure 31.
  • the protective layer 30 has a plurality of raised structures 31 on the surface, and each raised structure 31 has a plurality of sub-protrusions 311 on the surface, which makes the surface of the protective layer 30 form a lotus leaf bionic structure, so that the protective layer 30 has better hydrophobicity, has a higher water contact angle, and can better self-cleaning, waterproof, antifouling and anti-fingerprint performance.
  • the range of the maximum distance d1 of the area surrounded by the orthographic projection of the raised structure 31 on the surface of the protective layer 30 is 3 ⁇ m ⁇ d1 ⁇ 7 ⁇ m; specifically, d1 can be but not limited to 3 ⁇ m, 3.5 ⁇ m, 4 ⁇ m, 4.5 ⁇ m, 5 ⁇ m, 5.5 ⁇ m, 6 ⁇ m, 6.5 ⁇ m, 7 ⁇ m, etc.
  • the transmittance of the protective layer 30 will be reduced, which is not conducive to the application of the cover plate 100 to the display screen protection cover (ie, the front cover) of the electronic device 600, and the size of the raised structure 31 is too large, which will increase the roughness of the surface of the cover plate 100 and affect the feel of the cover plate 100.
  • the size of the protruding structure 31 is too small, the manufacturing process of the cover plate 100 becomes more difficult and the cost increases.
  • the distance d2 between the two farthest points on the sub-protrusion 311 is in the range of 40nm ⁇ d2 ⁇ 2 ⁇ m; in other words, the size of the sub-protrusion 311 is in the range of 40nm ⁇ d2 ⁇ 2 ⁇ m; specifically, d2 can be but not limited to 40nm, 50nm, 80nm, 100nm, 300nm, 500nm, 800nm, 1 ⁇ m, 1.5 ⁇ m, 2 ⁇ m, etc. .
  • the size of the sub-protrusions 311 is less than 40nm, the preparation difficulty of the protective layer 30 is increased, and it may even be difficult to realize in the process; when the size of the sub-protrusions 311 is greater than 2 ⁇ m, when the droplet falls on the surface of the protective layer 30, the contact area between the droplet and the surface of the protective layer 30 increases, thereby reducing the hydrophobicity of the surface of the protective layer 30 and increasing the hydrophilicity, thereby affecting the self-cleaning, waterproof, anti-oil and anti-fingerprint performance of the cover plate 100.
  • the thickness h1 of the protective layer 30 ranges from 5 ⁇ m ⁇ h1 ⁇ 10 ⁇ m; specifically, h1 may be, but not limited to, 5 ⁇ m, 5.5 ⁇ m, 6 ⁇ m, 6.5 ⁇ m, 7 ⁇ m, 7.5 ⁇ m, 8 ⁇ m, 8.5 ⁇ m, 9 ⁇ m, 9.5 ⁇ m, 10 ⁇ m, etc.
  • the thickness of the protective layer 30 is 5 ⁇ m to 10 ⁇ m, the protective layer 30 can be easily prepared, the production cost can be reduced, and the influence on the light transmittance of the prepared cover plate 100 is small.
  • the protective layer 30 includes a plurality of first crystal nuclei 32, a first deposition layer 34, a plurality of second crystal nuclei 36 and a second deposition layer 38, the plurality of first crystal nuclei 32 are arranged at intervals on the surface of the cover plate body, the first deposition layer 34 covers the surface of the plurality of first crystal nuclei 32, the plurality of second crystal nuclei 36 is arranged on the surface of the first deposition layer 34 away from the first crystal nuclei 32, and the second deposition layer 38 covers the surface of the plurality of second crystal nuclei 36, wherein , the first crystal nucleus 32 and the first deposition layer 34 form the first protective sublayer 30a, the first protective sublayer 30a is the first diamond-like sublayer, the second crystal nucleus 36 and the second deposition layer 38 form the second protective sublayer 30b, and the second protective sublayer 30b is the second diamond-like sublayer.
  • the double lamination structure of the crystal nucleus and the deposition layer is beneficial to the
  • the first crystal nucleus 32 may be, but not limited to, a first diamond nucleus
  • the second crystal nucleus 36 may be, but not limited to, a second diamond nucleus.
  • the first diamond nucleus and the second diamond nucleus can be the same or different.
  • the first deposition layer 34 may be, but not limited to, a diamond-like film layer
  • the second deposition layer 38 may be, but not limited to, a diamond-like film layer.
  • the cover plate 100 further includes a protective layer 50 , and the water contact angle ⁇ 2 of the protective layer 50 is in the range of 120° ⁇ 2 ⁇ 150°.
  • the protective layer 50 has a larger water contact angle, so that the cover 100 has better waterproof, anti-fouling and anti-fingerprint effects.
  • the water contact angle ⁇ 2 of the protective layer 50 may be, but not limited to, 121°, 122°, 123°, 124°, 125°, 126°, 127°, 128°, 129°, 130°, 133°, 135°, 138°, 140°, 145°, 150°, etc.
  • the protective layer 50 may be, but not limited to, at least one of perfluoropolyether, perfluoropolyether derivatives, perfluoropolysilane silicon fluoride, and the like.
  • the cover plate 100 of the embodiment of the present application can be prepared by the method described in the following examples of the present application. In addition, it can also be prepared by other methods.
  • the preparation method of the embodiment of the present application is only one or more of the preparation methods of the cover plate 100 of the present application, and should not be understood as a limitation on the cover plate 100 provided by the embodiment of the present application.
  • the embodiment of this application also provides a cover 100, which includes the cover plate 10; and the protective layer 30, which is set on the surface of the cover plate 10.
  • the protective layer 30 is a diamond -like film layer. From the surface of the cover body 10, each protruding structure 31 has multiple sub -bulging 311 on the surface of the raised structure 31.
  • a plurality of protruding structures 31 are densely arranged, and a plurality of sub-protrusions 311 are densely arranged on the surface of each protruding structure 31 .
  • the cover plate 100 of this embodiment includes a protective layer 30, the protective layer 30 is a diamond-like film layer, the protective layer 30 has a plurality of protrusion structures 31, and each of the raised structures 31 has a plurality of sub-protrusions 311, which makes the surface of the protective layer 30 form a lotus leaf bionic structure, thereby having a higher water contact angle and lower hysteresis, thereby enabling the cover plate 100 to have good waterproof, antifouling and anti-fingerprint properties.
  • the diamond-like film layer has high hardness, good wear resistance, and is not easy to wear, so that after a long period of use, the cover plate 100 still has good self-cleaning, waterproof, anti-fouling and anti-fingerprint properties, and the self-cleaning, waterproof, anti-fouling and anti-fingerprint properties can be maintained for a longer period of time.
  • the range of the water contact angle ⁇ 1 of the protective layer 3030 is 120° ⁇ 1 ⁇ 130°.
  • the protection layer 30 includes a plurality of first crystal nuclei 32, a first deposition layer 34, a plurality of second crystal nuclei 36, and a second deposition layer 38.
  • the plurality of first crystal nuclei 32 are arranged at intervals on the surface of the cover plate body 10.
  • the first deposition layer 34 covers the surfaces of the plurality of first crystal nuclei 32.
  • the plurality of second crystal nuclei 36 are arranged on the surface of the first deposition layer 34 away from the first crystal nuclei 32.
  • the second deposition layer 38 covers the surfaces of the plurality of second crystal nuclei 36, wherein the first crystal nuclei 32 and the first deposition layer 34 form the first protective sub-layer 30a, the first protective sub-layer 30a is the first diamond-like sub-film layer, the second crystal nucleus 36 and the second deposition layer 38 form the second protective sub-layer 30b, and the second protective sub-layer 30b is the second diamond-like sub-film layer.
  • the double lamination structure of the crystal nucleus and the deposition layer is beneficial to the formation of the raised structures 3131 and the sub-raised structures 31311 on the surface of the protective layer 3030, and can better form the lotus leaf bionic structure.
  • the thickness h1 of the protective layer 30 is in the range of 5 ⁇ m ⁇ h1 ⁇ 10 ⁇ m; the maximum distance d1 of the area surrounded by the orthographic projection of the raised structure 31 on the surface of the protective layer 30 is in the range of 3 ⁇ m ⁇ d1 ⁇ 7 ⁇ m; the distance d2 between the two furthest points on the sub-protrusions 311 is in the range of 40nm ⁇ d2 ⁇ 2 ⁇ m.
  • the visible light transmittance of the cover 100 is greater than or equal to 80%
  • the infrared transmittance of the cover 100 is greater than or equal to 80%
  • the ultraviolet transmittance of the cover 100 is greater than or equal to 80%.
  • the cover body 10 includes at least one of glass, ceramic or sapphire.
  • cover plate 100 the cover plate body 10, the protective layer 30, the first crystal nucleus 32, the first deposition layer 34, the plurality of second crystal nuclei 36, the second deposition layer 38, the protrusion structure 31 and the sub-protrusion 311 structure 31, please refer to the description of the corresponding part of the above embodiment, and will not repeat them here.
  • the embodiment of the present application also provides a method for preparing a cover plate 100, which includes:
  • cover body 10 For a detailed description of the cover body 10 , please refer to the description of the corresponding part of the above embodiment, and details are not repeated here.
  • protection layer 30 is a diamond-like film layer, and the range of the water contact angle ⁇ 1 of the protection layer 30 is 120° ⁇ 1 ⁇ 130°.
  • the surface of the cover body 10 can be electrostatically deposited with diamond nuclei dispersed on the surface of the cover body 10, and then a diamond-like film layer is deposited on the surface of the diamond nuclei by Hot Filament Chemical Vapor Deposition (HFCVD) to obtain the protective layer 30.
  • HFCVD Hot Filament Chemical Vapor Deposition
  • the cover plate 100 prepared by the preparation method of the embodiment of the present application includes a protective layer 30, the protective layer 30 is a diamond-like film layer, and the water contact angle ⁇ 1 of the protective layer 30 is in the range of 120° ⁇ 1 ⁇ 130°.
  • the water contact angle ⁇ 1 of the protective layer 30 is in the range of 120° ⁇ 1 ⁇ 130°, so that the cover 100 has good waterproof, antifouling and antifingerprint properties.
  • the diamond-like film layer has high hardness, good wear resistance, and is not easy to wear, so that after a long period of use, the cover plate 100 still has good self-cleaning, waterproof, anti-fouling and anti-fingerprint properties, and the self-cleaning, waterproof, anti-fouling and anti-fingerprint properties can be maintained for a longer period of time.
  • the embodiment of the present application also provides a preparation method of the cover plate 100, which includes:
  • cover body 10 For a detailed description of the cover body 10 , please refer to the description of the corresponding part of the above embodiment, and details are not repeated here.
  • the first electrostatic deposition of the cover body 10 in the first diamond nucleation solution is performed to form a first crystal nucleus 32 on the surface of the cover body 10, including:
  • the diamond in the first diamond nucleation liquid can be better prevented from settling, and the diamond in the first diamond nucleation liquid can be better dispersed, so that the finally obtained first crystal nuclei 32 can be more evenly dispersed on the surface of the cover body 10.
  • the numerical range a to b when it comes to the numerical range a to b, unless otherwise specified, it means that the endpoint value a is included, and the endpoint value b is included.
  • the first crystal nucleus 32 is a first diamond crystal nucleus.
  • the average particle size of the diamonds in the first diamond nucleation solution may be, but not limited to, 1 ⁇ m, 1.5 ⁇ m, 2 ⁇ m, 2.5 ⁇ m, 3 ⁇ m, 3.5 ⁇ m, 4 ⁇ m and the like.
  • the average particle size of the diamond is too large (eg, greater than 4 ⁇ m), it is difficult to form the lotus leaf bionic structure, which affects the hydrophobicity of the finally formed protective layer 30 surface.
  • the mass concentration of diamond in the first diamond nucleation solution can be a value between 0.02% and 0.06%, specifically, but not limited to 0.02%, 0.03%, 0.04%, 0.05%, 0.06%. If the concentration of the first diamond nucleation liquid is too low, the distribution of the finally formed first crystal nuclei 32 on the surface of the cover plate body 10 is likely to be insufficient; if the concentration of the first diamond nucleation liquid is too high, diamonds are likely to be locally enriched on the surface of the cover plate body 10, so that the first crystal nuclei 32 formed have different sizes, which affects the bionic structure of the lotus leaf on the surface of the finally prepared protective layer 30, thereby affecting the hydrophobicity of the protective layer 30.
  • the concentration of the first diamond in the first diamond nucleation liquid is 0.02% to 0.06%, sufficient first crystal nuclei 32 can be formed on the surface of the cover plate body 10, and the size of the first crystal nuclei 32 caused by diamond enrichment can be well avoided, so that the finally obtained protective layer 30 has a heterochromatic phenomenon.
  • the pH value of the first diamond nucleation liquid is any value between 4.5 and 5.5, specifically, it may be but not limited to 4.5, 5.0, 5.5 and so on.
  • the pH value of the first diamond nucleation liquid is in this range, the diamond in the first diamond nucleation liquid can be dispersed more stably and uniformly.
  • power is applied so that the diamond particles in the first diamond nucleation liquid are evenly deposited on the surface of the cover body 10 , so that the surface of the cover body 10 is dispersed with first crystal nuclei 32 one by one.
  • the first voltage U1 may be, but not limited to, 15V, 16V, 17V, 18V, 19V, 20V, 21V, 22V, 23V, 24V, 25V and so on.
  • the higher the voltage of the first voltage U1 the faster the deposition speed of the diamond particles; when the first voltage is too high (such as higher than 25V), it is easy to make the diamond particles too enriched, and the particle size of the first crystal nuclei 32 formed is not uniform, so that the finally obtained protective layer 30 has a heterochromatic phenomenon.
  • the deposition of diamond particles takes a long time, which affects the production efficiency, and it is easy to make the deposition of diamond particles insufficient, which affects the surface structure of the prepared protective layer 30, thereby affecting the self-cleaning, waterproof, oil-proof and anti-fingerprint performance of the cover plate 100.
  • the first voltage U1 is between 15V and 25V, the deposition rate of the diamond particles can be moderate, avoiding excessively slow deposition, which affects the production efficiency, and insufficient deposition of the diamond particles, which affects the surface structure of the protective layer 30.
  • Haikou can avoid excessive enrichment of the diamond particles, and the particle size of the first crystal nuclei 32 formed is not uniform, so that the finally obtained protective layer 30 has a different color phenomenon.
  • the time for the first electrostatic deposition may be, but not limited to, 2 min, 2.5 min, 3 min, 3.5 min, 4 min and so on.
  • the first electrostatic deposition time is too long (for example, higher than 4 minutes), it is easy to enrich the diamond particles too much, and the particle size of the formed first crystal nuclei 32 is not uniform, so that the finally obtained protective layer 30 has heterochromatic phenomenon.
  • the first electrostatic deposition time is too short (for example, less than 2 minutes), the deposition of diamond particles is not enough, which affects the surface structure of the prepared protective layer 30, thus affecting the self-cleaning, waterproof, anti-oil and anti-fingerprint performance of the cover plate 100.
  • the method before placing the cover body 10 in the first diamond nucleation solution for the first electrostatic deposition, the method further includes: cleaning the cover body 10 .
  • the cover body 10 is placed in at least one of cleaning solutions such as ketones, sodium carbonate, sodium phosphate, etc., and cleaned in an ultrasonic environment of 28KHZ to remove oil, dust, etc. on the surface of the cover body 10; then the cover body 10 is rinsed with deionized water above 80°C (such as 85°C, 90°C, etc.), and dried.
  • cleaning solutions such as ketones, sodium carbonate, sodium phosphate, etc.
  • the cover plate body 10 with the first crystal nucleus 32 obtained in S302 is placed on the sample stage of the HFCVD equipment, and methane and hydrogen are introduced as reaction gases.
  • the methane is the first flow rate
  • the hydrogen gas is the second flow rate
  • the temperature of the reaction gas is the first temperature
  • the temperature of the cover plate body 10 is the second temperature.
  • the hot wire chemical vapor deposition method is used to deposit diamond-like carbon on the surface of the first crystal nucleus 32 for a first time to obtain a first diamond-like sub-film.
  • the first flow rate is 30SCCM to 50SCCM
  • the second flow rate is 650SCCM to 750SCCM
  • the first temperature is 2450°C to 2650°C
  • the second temperature is 750°C to 850°C
  • the first pressure is 1.8KPa to 2.2KPa
  • the first time is 50min to 80min.
  • the hydrocarbon groups provide the precursors for the deposition of the diamond film and attach to the surface of the cover body 10 at a suitable temperature.
  • These groups react under the action of atomic hydrogen, nucleate and grow on the surface of the cover body 10 to form a diamond-like film. 2, the diamond-like carbon will be enriched with the first crystal nucleus 32 as the center, thereby forming approximately hemispherical protrusions on the surface of the diamond-like carbon film.
  • the inside of the sample stage carrying the cover plate body 10 is fed with cooling circulating water to cool down the temperature, and the reacted gas is pumped out from the gas outlet by a mechanical pump.
  • the first flow rate can be any value between 30 SCCM and 50 SCCM. Specifically, it may be, but not limited to, 30SCCM, 32SCCM, 35SCCM, 38SCCM, 40SCCM, 43SCCM, 47SCCM, 50SCCM, etc. If the first flow rate of methane is too small, the diamond-like carbon deposited on the surface of the cover body 10 is not enough, which reduces the uniformity of the formed first diamond-like carbon sub-film layer, and finally affects the surface structure of the prepared protective layer 30, thereby affecting the hydrophobicity of the protective layer 30. If the first flow rate of methane is too high, the reaction of methane will be incomplete, and the methane will eventually be discharged from the reaction system, which increases the manufacturing cost of the cover plate 100 . When the first flow rate is 30SCCM to 50SCCM, the formed first diamond-like sub-film layer can have better uniformity, and the waste caused by incomplete methane reaction and direct discharge can be avoided.
  • the second flow rate can be any value between 650SCCM and 750SCCM. Specifically, it may be, but not limited to, 650SCCM, 660SCCM, 670SCCM, 680SCCM, 690SCCM, 700SCCM, 710SCCM, 720SCCM, 730SCCM, 740SCCM, 750SCCM, etc.
  • the flow rate of the hydrogen gas is too low, which affects the deposition speed of the first diamond-like sub-film layer and reduces the production efficiency. If the flow rate of hydrogen is too fast, a large amount of hydrogen is directly discharged without participating in the reaction, which causes waste and increases the cost of raw materials.
  • the second flow rate is 650SCCM to 750SCCM, the first diamond-like sub-film layer can have a moderate deposition rate, and the waste caused by incomplete hydrogen reaction and direct discharge can be avoided.
  • the first temperature may be any value between 2450°C and 2650°C. Specifically, it may be, but not limited to, 2450°C, 2480°C, 2500°C, 2530°C, 2550°C, 2575°C, 2600°C, 2625°C, 2650°C, etc.
  • the temperature of the gas is too low to reach the activation temperature of methane, and methane and hydrogen cannot react to form a diamond-like structure.
  • the temperature of the gas is too high, which requires high equipment requirements and causes energy waste.
  • the first temperature is 2450° C. to 2650° C., methane can be fully activated to react with hydrogen to form a diamond-like structure, and energy waste can be avoided.
  • the second temperature may be, but not limited to, 750°C, 775°C, 800°C, 825°C, 850°C, and the like. If the second temperature is too low, the adhesion of the first diamond sub-film layer on the cover body 10 will be reduced; if the second temperature is too high, the cover body 10 will be easily deformed, which will affect the strength of the final cover 100 .
  • the cover body 10 such as glass can be properly softened, and the silicon dioxide on the glass surface can react with the carbon in the methane to form C-Si bonds and C-O bonds, thereby improving the adhesion of the first diamond-like sub-film layer on the surface of the cover body 10, and finally improving the adhesion of the protective layer 30 on the surface of the cover body 10, and can prevent the cover body 10 from being deformed and reduced in strength.
  • the first pressure may be, but not limited to, 1.8KPa, 1.85KPa, 1.9KPa, 1.95KPa, 2.0KPa, 2.05KPa, 2.1KPa, 2.15KPa, 2.2KPa, etc.
  • the greater the first pressure the more uniform the deposition of diamondoid.
  • the first pressure is too high, the requirements for equipment are relatively high, and there is a risk of explosion.
  • the first time may be, but not limited to, 50 min, 55 min, 60 min, 65 min, 70 min, 75 min, 80 min and so on. If the first time is too long, the first diamond-like sub-film layer formed is too thick, so that the thickness of the finally formed protective layer 30 is relatively large, which affects the light transmittance of the cover plate 100 . If the first time is too short, the formed first DLC sub-film layer is too thin, which will easily cause uneven distribution of DLC, and the finally obtained protective layer 30 will produce heterochromatic phenomenon.
  • the second diamond nucleation liquid carry out the second electrostatic deposition, to form the second crystal nucleus 36 on the surface of the first diamond-like sub-film layer, comprising:
  • diamond nucleation stock solution with a diamond average particle size ranging from 30nm to 1 ⁇ m and a mass concentration of 20%, dilute it with deionized water to configure a suspension colloid with a mass concentration of 0.02% to 0.06%, add 2-(methacryloyloxy)ethyltrimethylammonium chloride as a stabilizer, add oxalic acid, and adjust the pH value to obtain a second diamond nucleation solution with a pH value between 2.5 and 4;
  • the cover body 10 of the diamond-like sub-film layer is immersed in the second diamond nucleation solution, and soaked in a 28KHZ ultrasonic environment for 30 minutes.
  • the diamond in the second diamond nucleation liquid can be better prevented from settling, and the diamond in the second diamond nucleation liquid can be better dispersed, so that the second crystal nuclei 36 finally obtained can be more evenly dispersed on the surface of the first diamond-like sub-film layer.
  • adding a stabilizer can make the pH value of the second diamond nucleation liquid better stable between 2.5 and 4, so that diamond particles can be uniformly and stably dispersed in the second diamond nucleation liquid.
  • the second crystal nucleus 36 is a second diamond crystal nucleus.
  • the average particle size of the diamond in the second diamond nucleation solution can be, but not limited to, 30nm, 50nm, 80nm, 100nm, 150nm, 200nm, 300nm, 400nm, 500nm, 600nm, 700nm, 800nm, 900nm, 1 ⁇ m, etc.
  • the distribution density of the finally formed sub-protrusions 33 cannot be too high or too low. Therefore, the average particle size in the second diamond nucleation liquid is too large or too small to form a lotus leaf biomimetic structure.
  • the average particle size of diamond in the second diamond nucleation liquid is 30nm to 1 ⁇ m, the lotus leaf biomimetic structure can be formed well, so that the protective layer 30 has good hydrophobicity.
  • the mass concentration of diamond in the second diamond nucleation solution can be a value between 0.02% and 0.06%, specifically, but not limited to 0.02%, 0.03%, 0.04%, 0.05%, 0.06%. If the concentration of the second diamond nucleation liquid is too low, it is easy to cause insufficient distribution of the second crystal nucleus 36 formed on the surface of the first diamond-like sub-film layer; if the concentration of the second diamond nucleation liquid is too high, diamonds are easily locally enriched on the surface of the first diamond-like sub-film layer, so that the size of the second crystal nucleus 36 formed is different, which affects the lotus leaf bionic structure on the surface of the protective layer 30 that is finally prepared, thereby affecting the hydrophobicity of the protective layer 30.
  • the concentration of the second diamond in the second diamond nucleation liquid is 0.02% to 0.06%, sufficient second crystal nuclei 36 can be formed on the surface of the first diamond-like sub-film layer, and the size of the second crystal nuclei 36 caused by diamond enrichment can be well avoided.
  • the pH value of the second diamond nucleation liquid is any value between 2.5 and 4, specifically, it may be but not limited to 2.5, 3, 3.5, 4, etc.
  • the pH value of the second diamond nucleation liquid is within this range, the diamond in the second diamond nucleation liquid can be dispersed more stably and uniformly.
  • S3042 perform the second electrostatic deposition under the second voltage U2 in the range of 6V ⁇ U2 ⁇ 10V, and the time range of the second electrostatic deposition is in the range of 60s to 90s, so as to form the second crystal nuclei 36 on the surface of the first DLC sub-film layer.
  • electrification is performed so that the diamond particles in the second diamond nucleation liquid are evenly deposited on the surface of the first diamond-like sub-film layer, so that the surface of the first diamond-like sub-film layer is dispersed with second crystal nuclei 36 one by one.
  • the second voltage U2 may be but not limited to 6V, 6.5V, 7V, 7.5V, 8V, 8.5V, 9V, 9.5V, 10V and so on.
  • the second voltage is too low (such as lower than 6V)
  • the deposition of diamond particles takes a long time, which affects the production efficiency, and it is easy to make the deposition of diamond particles insufficient, which affects the surface structure of the prepared protective layer 30, thereby affecting the self-cleaning, waterproof, anti-oil and anti-fingerprint performance of the cover plate 100.
  • the time for the second electrostatic deposition may be, but not limited to, 60s, 65s, 70s, 75s, 80s, 85s, 90s and so on.
  • the second electrostatic deposition time is too long (for example higher than 90s)
  • the second electrostatic deposition time is too short (for example, less than 60s), the deposition of diamond particles is not enough, which affects the surface structure of the prepared protective layer 30, thereby affecting the self-cleaning, waterproof, oil-proof and anti-fingerprint properties of the cover plate 100.
  • the cover plate body with the first diamond-like sub-film layer obtained in S304 is set in the HFCVD equipment, and methane and hydrogen are fed as reaction gases.
  • the methane is the third flow rate
  • the hydrogen gas is the fourth flow rate
  • the temperature of the reaction gas is the third temperature
  • the temperature of the cover plate body 10 is the fourth temperature.
  • the hot-wire chemical vapor deposition method is used under the second pressure.
  • the diamond-like carbon is deposited on the surface of the second crystal nucleus 36 for a second time to obtain a second diamond-like sub-film layer, wherein,
  • the third flow rate is 30SCCM to 50SCCM
  • the fourth flow rate is 650SCCM to 750SCCM
  • the third temperature is 2450°C to 2650°C
  • the fourth temperature is 750°C to 850°C
  • the second pressure is 1.8KPa to 2.2KPa
  • the second time is 50min to 80min.
  • the hydrocarbon groups provide the precursors for the deposition of the diamond film and adhere to the surface of the first diamond-like sub-film layer at an appropriate temperature.
  • the surface of the first diamond-like sub-film layer has the position of the second crystal nucleus 36, and the diamond-like carbon will be enriched with the second crystal nucleus 36 as the center, so that the surface of the second diamond-like carbon-like film layer finally obtained forms approximately hemispherical protrusions.
  • the inside of the sample stage carrying the cover plate body 10 is fed with cooling circulating water to cool down the temperature, and the reacted gas is pumped out from the gas outlet by a mechanical pump.
  • the third flow rate can be any value between 30 SCCM and 50 SCCM. Specifically, it may be, but not limited to, 30SCCM, 32SCCM, 35SCCM, 38SCCM, 40SCCM, 43SCCM, 47SCCM, 50SCCM, etc. If the third flow rate of methane is too small, the diamond-like carbon deposited on the surface of the cover body 10 is not enough, which reduces the uniformity of the formed second diamond-like carbon sub-film layer, and finally affects the surface structure of the prepared protective layer 30, thereby affecting the hydrophobicity of the protective layer 30. If the third flow rate of methane is too high, the reaction of methane will be incomplete, and the methane will eventually be discharged from the reaction system, which increases the manufacturing cost of the cover plate 100 . When the third flow rate is 30SCCM to 50SCCM, it can not only make the formed second diamond-like sub-film layer have better uniformity, but also avoid waste caused by incomplete methane reaction and direct discharge.
  • the fourth flow rate can be any value between 650SCCM and 750SCCM. Specifically, it may be, but not limited to, 650SCCM, 660SCCM, 670SCCM, 680SCCM, 690SCCM, 700SCCM, 710SCCM, 720SCCM, 730SCCM, 740SCCM, 750SCCM, etc.
  • the flow rate of hydrogen gas is too low, which will affect the deposition speed of the second diamond-like sub-film layer and reduce the production efficiency. If the flow rate of hydrogen is too fast, a large amount of hydrogen is directly discharged without participating in the reaction, which causes waste and increases the cost of raw materials.
  • the fourth flow rate is 650SCCM to 750SCCM, the second diamond-like sub-film layer can have a moderate deposition rate, and the waste caused by incomplete hydrogen reaction and direct discharge can be avoided.
  • the third temperature may be any value between 2450°C and 2650°C. Specifically, it may be, but not limited to, 2450°C, 2480°C, 2500°C, 2530°C, 2550°C, 2575°C, 2600°C, 2625°C, 2650°C, etc.
  • the temperature of the gas is too low to reach the activation temperature of methane, and methane and hydrogen cannot react to form a diamond-like structure.
  • the temperature of the gas is too high, which requires high equipment requirements and causes energy waste.
  • the third temperature is 2450° C. to 2650° C., methane can be fully activated to react with hydrogen to form a diamond-like structure, and energy waste can be avoided.
  • the fourth temperature may be, but not limited to, 750°C, 775°C, 800°C, 825°C, 850°C, and the like. If the fourth temperature is too low, the adhesion of the second diamond sub-film layer will be reduced; if the fourth temperature is too high, the cover body 10 will be easily deformed, which will affect the strength of the final cover 100 . When the fourth temperature is between 750°C and 850°C, the adhesion of the second diamond-like sub-film layer on the surface of the first diamond-like sub-film layer can be improved, and finally the adhesion of the protective layer 30 on the surface of the cover body 10 can be improved, and the cover body 10 can be prevented from being deformed and its strength reduced.
  • the second pressure may be, but not limited to, 1.8KPa, 1.85KPa, 1.9KPa, 1.95KPa, 2.0KPa, 2.05KPa, 2.1KPa, 2.15KPa, 2.2KPa, etc.
  • the greater the second pressure the more uniform the deposition of diamondoid.
  • the second pressure is too high, which requires high equipment and has the risk of explosion.
  • the second time may be, but not limited to, 50 min, 55 min, 60 min, 65 min, 70 min, 75 min, 80 min and so on. If the second time is too long, the first diamond-like sub-film layer formed is too thick, so that the thickness of the finally formed protective layer 30 is relatively large, which affects the light transmittance of the cover plate 100 . If the second time is too short, the formed first DLC sub-film layer is too thin, which may easily cause uneven distribution of DLC, and the finally obtained protective layer 30 will produce heterochromatic phenomenon.
  • the preparation method of this embodiment uses two times of electrostatic deposition and two times of hot wire chemical vapor deposition to form a protection layer 30 (that is, a diamond-like film layer) having a bionic structure similar to a lotus leaf with ups and downs on the surface of the cover body 10, so that the range of the water contact angle ⁇ 1 on the surface of the protection layer 30 is 120° ⁇ 1 ⁇ 130°, and has good hydrophobicity, so that the prepared cover plate 100 has good waterproof, antifouling and anti-fingerprint properties, and has high hardness and good wear resistance. , not easy to wear, after a long time of use, it still has good self-cleaning, waterproof, anti-fouling and anti-fingerprint and other properties.
  • the embodiment of the present application also provides a method for preparing a cover plate 100, which includes:
  • step S401 to step S403 please refer to the description of the corresponding part of the above embodiment, and details are not repeated here.
  • oxidation solution immerse in an oxidation solution at 70° C. to 90° C. for 7 minutes to 17 minutes, and perform oxidation treatment to remove impurities on the surface of the first diamond-like sub-film layer and form a passivation layer on the surface of the first diamond-like sub-film layer; wherein the oxidation solution is an aqueous solution including hydrogen peroxide and ammonia water.
  • a neutral cleaning solution such as ketone to clean for 10 to 20 minutes, and then dry.
  • the temperature of the oxidation solution may be, but not limited to, 70°C, 72°C, 75°C, 78°C, 80°C, 83°C, 85°C, 88°C, 90°C.
  • the oxidation treatment time may be, but not limited to, 7 min, 9 min, 11 min, 13 min, 15 min, 17 min and so on.
  • the oxidation solution includes 30wt% hydrogen peroxide aqueous solution, ammonia water and water in a volume ratio of (0.5 to 1.5):(0.5 to 1.5):(3 to 7).
  • the volume ratio of 30 wt % hydrogen peroxide aqueous solution, ammonia water and water is 1:1:5.
  • step S405 and step S406 please refer to the description of the corresponding part of the above embodiment, and details are not repeated here.
  • the embodiment of the present application also provides a method for preparing a cover plate 100, which includes:
  • step S501 and step S506 please refer to the description of the corresponding part of the above embodiment, and details are not repeated here.
  • the surface of the protective layer 30 is bombarded with plasma to remove the oxide layer on the surface of the protective layer 30, and the dyne value on the surface of the protective layer 30 is increased to more than 60Dyn (such as 60Dyn, 63Dyn, 65Dyn, etc.), so as to enhance the adhesion of the protective layer 30 on the protective layer 30.
  • cover the surface of the protective layer 30 with dry n-hexane add perfluorodecyltrichlorosilane (3mol/L), and react in a nitrogen atmosphere for 5h to 7h to form a layer of silicon fluoride (protective layer 50) on the surface of the protective layer 30.
  • remove the reaction solution in a nitrogen atmosphere wash it several times with hexane, and dry it in mild nitrogen to obtain a protective layer 50, wherein the protective layer includes silicon fluoride.
  • cover plate 100 of the embodiment of the present application will be further described below through specific examples.
  • the cover plate 100 of this embodiment is prepared through the following steps:
  • cover plate body 10 is a glass substrate
  • the glass substrate with the first diamond-like sub-film layer is ultrasonically vibrated for 30 minutes in a 28KHZ ultrasonic environment in the second diamond nucleation liquid, and the second electrostatic deposition is carried out for 80 s at a second voltage of 8V to form a second crystal nucleus 36 on the surface of the first diamond-like sub-film layer; wherein, in the second diamond nucleation liquid, the average particle diameter of the diamond particles is 200nm, the mass concentration of diamond is 0.05%, and the pH value is 3;
  • FIG. 13 is a micrograph of the surface topography of the protective layer 30 of this embodiment
  • FIG. 14 is an enlarged view of the box in FIG. 13
  • the thickness of the protection layer 30 is 5 ⁇ m
  • the d1 of the protrusion structure 31 is 3 ⁇ m to 5 ⁇ m
  • the d2 of the sub-protrusions 311 is in the range of 50 nm to 100 nm.
  • the water contact angle on the surface of the protective layer 30 measured by a water contact angle measuring instrument is 125°.
  • the cover body 10 of Example 1 is used as the cover 100 for comparison, wherein the cover body 10 is a glass substrate.
  • Abrasion resistance test For the surface with the protective layer 30 in Example 1 and the surface of the cover plate 100 in Comparative Example 1, 170# zircon sand was used. At a pressure of 170Kpa, the angle between the nozzle and the cover plate 100 was 45°, and the distance between the nozzle and the cover plate 100 was 5 cm. Sandblasting was carried out for 1 minute, and the surface morphology after sandblasting was observed with a microscope. The test results are shown in Figures 17 and 18.
  • the transmittance of the cover plate 100 of Example 1 in the range of visible light and ultraviolet light is slightly lower than that of the cover plate 100 of Comparative Example 1 in the range of visible light and ultraviolet light, but still has a relatively high transmittance, and the transmittance between 225nm and 800nm is above 80%.
  • the protective layer 30 of the present application will not affect the transmittance of the cover plate 100 in the visible-ultraviolet band, and will not affect the display effect of the display screen when applied to the protective cover of the display screen of electronic equipment.
  • the transmittance of the cover plate 100 of Example 1 in the infrared light band is slightly higher than that of the cover plate 100 of Comparative Example 1 in the infrared light band, and the transmittance between 1000nm and 3500nm is above 80%.
  • the protective layer 30 of the present application will not affect the transmittance of the cover plate 100 in the infrared band, and will not affect the detection accuracy of the infrared sensor under the protective cover when applied to electronic equipment.
  • FIG. 17 is the microscope topography of the cover plate 100 of the embodiment 1 before sandblasting
  • FIG. 17 (b) is the microscope topography of the cover plate 100 of the embodiment 1 after the sandblasting test.
  • FIG. 18 is a microscope topography of the cover plate 100 of Comparative Example 1 before sandblasting
  • FIG. 18 (b) is a microscope topography of the cover plate 100 of Comparative Example 1 after sandblasting. It can be seen from (b) in FIG. 17 and (b) in FIG. 18 that the cover plate 100 obtained in Example 1 has higher wear resistance than the cover plate body 10 (glass substrate). After a long period of use, it is not easy to be worn out, and loses various properties such as self-cleaning, waterproof, anti-fouling and anti-fingerprint.
  • the embodiment of the present application is also an electronic device 600
  • the electronic device 600 includes: a display component 610 , the cover plate 100 described in the embodiment of the present application, and a circuit board component 630 .
  • the display assembly 610 is used for displaying; the cover plate 100 is arranged on one side of the display assembly 610; the circuit board assembly 630, the circuit board assembly 630 is electrically connected with the display assembly 610, and is used to control the display assembly 610 to display.
  • the electronic device 600 in the embodiment of the present application may be, but not limited to, a mobile phone, a tablet computer, a notebook computer, a desktop computer, a smart bracelet, a smart watch, an e-reader, a game console and other electronic devices.
  • the display assembly 610 may be, but not limited to, one or more of a liquid crystal display assembly, a light emitting diode display assembly (LED display assembly), a micro light emitting diode display assembly (Micro LED display assembly), a submillimeter light emitting diode display assembly (Mini LED display assembly), an organic light emitting diode display assembly (OLED display assembly) and the like.
  • LED display assembly light emitting diode display assembly
  • Micro LED display assembly micro light emitting diode display assembly
  • Mini LED display assembly submillimeter light emitting diode display assembly
  • OLED display assembly organic light emitting diode display assembly
  • the cover plate 100 is used as a protective cover of the display assembly 610 . At this time, the cover plate 100 is disposed on the display surface of the display assembly 610 , and the circuit board assembly 630 is disposed on a side of the display assembly 610 away from the cover plate 100 .
  • cover plate 100 For a detailed description about the cover plate 100 , please refer to the description of the corresponding part of the above embodiment, and details are not repeated here.
  • the circuit board assembly 630 may include a processor 631 and a memory 633 .
  • the processor 631 is electrically connected to the display component 610 and the memory 633 respectively.
  • the processor 631 is used to control the display component 610 to display, and the memory 633 is used to store the program code required for the operation of the processor 631, the program code required for controlling the display component 610, the display content of the display component 610, and the like.
  • the processor 631 includes one or more general-purpose processors 631, wherein the general-purpose processor 631 may be any type of device capable of processing electronic instructions, including a central processing unit (Central Processing Unit, CPU), a microprocessor, a microcontroller, a main processor, a controller, and an ASIC or the like.
  • the processor 631 is used to execute various types of digitally stored instructions, such as software or firmware programs stored in the memory 633, which enable the computing device to provide a wide variety of services.
  • the memory 633 can include a volatile memory (Volatile Memory), such as a random access memory (Random Access Memory, RAM); the memory 633 can also include a non-volatile memory (Non-Volatile Memory, NVM), such as a read-only memory (Read-Only Memory, ROM), a flash memory (Flash Memory, FM), a hard disk (Hard Disk Drive, HDD) or a solid-state disk (Solid-State Drive, SSD).
  • NVM non-volatile Memory
  • ROM read-only memory
  • flash memory Flash Memory
  • HDD Hard Disk Drive
  • SSD solid-state disk
  • the memory 633 may also include a combination of the above-mentioned kinds of memories.
  • the electronic device 600 of the embodiment of the present application further includes a middle frame 620 , a casing 640 and a camera module 650 .
  • the casing 640 is disposed on a side of the display assembly 610 away from the cover 100 .
  • the middle frame 620 and the casing 640 form an accommodating space, and the accommodating space is used for accommodating the circuit board assembly 630 and the camera module 650 .
  • the camera module 650 is electrically connected to the processor 631 for taking pictures under the control of the processor 631 .
  • the housing 640 has a light-transmitting portion 641 through which the camera module 650 can take pictures. That is, the camera module 650 in this embodiment is a rear camera module 650 . It can be understood that, in other implementation manners, the light-transmitting portion 641 may be disposed on the display assembly 610 , that is, the camera module 650 is a front-facing camera module 650 . In the schematic diagram of this embodiment, the light-transmitting portion 641 is used as an opening for illustration. In other embodiments, the light-transmitting portion 641 may not be an opening, but a light-transmitting material, such as plastic or glass.
  • the electronic device 600 described in this embodiment is only a form of the electronic device to which the cover 100 is applied.
  • the cover 100 can also be used as the back cover (that is, the housing) of the electronic device, which should not be construed as a limitation to the electronic device 600 provided in this application, nor should it be understood as a limitation to the cover 100 provided in various embodiments of the present application.
  • references in this application to "an embodiment” and “an implementation” mean that a particular feature, structure, or characteristic described in connection with the embodiment can be included in at least one embodiment of the present application.
  • the appearances of a phrase in various places in the specification are not necessarily all referring to the same embodiment, nor are separate or alternative embodiments mutually exclusive of other embodiments. It is understood explicitly and implicitly by those skilled in the art that the embodiments described in this application can be combined with other embodiments.
  • the features, structures or characteristics described in the various embodiments of the present application can be combined arbitrarily to form another embodiment without departing from the spirit and scope of the technical solution of the present application if there is no contradiction between them.

Abstract

The present application provides cover plates, a manufacturing method therefor and an electronic device. A cover plate comprises a cover plate body; and a protective layer, which is arranged on a surface of the cover plate body and is a diamond-like film layer, the range of a water contact angle θ1 of the protective layer being 120°≤θ1≤130°. The protective layer of the cover plate in the present application exhibits good wear resistance, and various properties thereof, such as being self-cleaning, waterproof, anti-fouling and anti-fingerprint, can be maintained longer.

Description

盖板、其制备方法及电子设备Cover plate, its preparation method and electronic device 技术领域technical field
本申请涉及电子领域,具体涉及一种盖板、其制备方法及电子设备。The present application relates to the field of electronics, in particular to a cover plate, its preparation method and electronic equipment.
背景技术Background technique
电子设备的盖板抗水、抗油及防指纹效果,直接影响着用户的体验,特别是当盖板作为屏幕盖板时,还影响着屏幕的显示效果。当前的盖板的防指纹层通常采用有机涂层,然而,该有机涂层的耐磨性较差,经过一段时间使用后,防指纹效果显著降低,甚至消失。The anti-water, anti-oil and anti-fingerprint effect of the cover plate of electronic equipment directly affects the user experience, especially when the cover plate is used as a screen cover plate, it also affects the display effect of the screen. The current anti-fingerprint layer of the cover usually uses an organic coating, however, the organic coating has poor wear resistance, and after a period of use, the anti-fingerprint effect is significantly reduced or even disappears.
发明内容Contents of the invention
本申请第一方面实施例提供了一种盖板,其包括:The embodiment of the first aspect of the present application provides a cover plate, which includes:
盖板本体;以及the cover body; and
防护层,所述防护层设置于所述盖板本体的表面,所述防护层为类金刚石膜层,所述防护层的水接触角θ1的范围为120°≤θ1≤130°。A protective layer, the protective layer is arranged on the surface of the cover body, the protective layer is a diamond-like film layer, and the range of the water contact angle θ1 of the protective layer is 120°≤θ1≤130°.
本申请第二方面实施例提供了一种盖板其包括:The embodiment of the second aspect of the present application provides a cover plate, which includes:
盖板本体;以及the cover body; and
防护层,所述防护层设置于所述盖板本体的表面,所述防护层为类金刚石膜层,所述防护层具有多个凸起结构,所述多个凸起结构位于所述防护层远离所述盖板本体的表面,每个所述凸起结构具有位于所述凸起结构表面的多个子凸起。A protective layer, the protective layer is arranged on the surface of the cover body, the protective layer is a diamond-like film layer, the protective layer has a plurality of protrusion structures, the plurality of protrusion structures are located on the surface of the protective layer away from the cover body, and each of the protrusion structures has a plurality of sub-protrusions located on the surface of the protrusion structure.
本申请第三方面实施例提供了一种盖板的制备方法,其包括:The embodiment of the third aspect of the present application provides a method for preparing a cover plate, which includes:
提供盖板本体;以及Provide the cover body; and
在所述盖板本体的表面形成防护层,其中,所述防护层为类金刚石膜层,所述防护层的水接触角θ1的范围为120°≤θ1≤130°。A protective layer is formed on the surface of the cover body, wherein the protective layer is a diamond-like film layer, and the range of the water contact angle θ1 of the protective layer is 120°≤θ1≤130°.
本申请第四方面实施例提供一种电子设备,其包括:The embodiment of the fourth aspect of the present application provides an electronic device, which includes:
显示组件;display components;
本申请实施例所述的盖板,所述盖板设置于所述显示组件的一侧,以及The cover plate described in the embodiment of the present application, the cover plate is arranged on one side of the display assembly, and
电路板组件,所述电路板组件与所述显示组件电连接,用于控制所述显示组件进行显示。A circuit board assembly, the circuit board assembly is electrically connected to the display assembly, and is used to control the display assembly to display.
附图说明Description of drawings
为了更清楚地说明本申请实施例的技术方案,下面将对实施例中所需要使用的附图作简单地介绍,显而易见地,下面描述中的附图仅仅是本申请的一些实施例,对于本领域普通技术人员来讲,在不付出创造性劳动的前提下,还可以根据这些附图获得其他的附图。In order to more clearly illustrate the technical solutions of the embodiments of the present application, the accompanying drawings required in the embodiments will be briefly introduced below. Obviously, the accompanying drawings in the following description are only some embodiments of the present application. For those of ordinary skill in the art, other drawings can also be obtained based on these drawings without creative work.
图1是本申请一实施例的盖板的结构示意图。FIG. 1 is a schematic structural view of a cover plate according to an embodiment of the present application.
图2是本申请一实施例的盖板沿图1中A-A方向的剖视结构示意图。FIG. 2 is a schematic cross-sectional structural view of the cover plate along the direction A-A in FIG. 1 according to an embodiment of the present application.
图3是图2中虚线框I的放大图。FIG. 3 is an enlarged view of the dashed box I in FIG. 2 .
图4是本申请一实施例的盖板的防护层远离盖板本体的表面的显微镜形貌图。FIG. 4 is a microscope topography view of the surface of the protective layer of the cover plate away from the cover plate body according to an embodiment of the present application.
图5是本申请一实施例的防护层的结构示意图。Fig. 5 is a schematic structural diagram of a protective layer according to an embodiment of the present application.
图6是本申请又一实施例的盖板的结构示意图。Fig. 6 is a schematic structural diagram of a cover plate according to another embodiment of the present application.
图7是本申请一实施例的盖板的制备方法流程示意图。FIG. 7 is a schematic flowchart of a method for preparing a cover plate according to an embodiment of the present application.
图8是本申请又一实施例的盖板的制备方法流程示意图。Fig. 8 is a schematic flowchart of a method for preparing a cover plate according to another embodiment of the present application.
图9是本申请一实施例的盖板的制备方法中S302及S303对应的结构示意图。FIG. 9 is a schematic structural diagram corresponding to S302 and S303 in the method for manufacturing a cover plate according to an embodiment of the present application.
图10是本申请一实施例的盖板的制备方法中S304及S305对应的结构示意图。FIG. 10 is a schematic structural diagram corresponding to S304 and S305 in the method for manufacturing a cover plate according to an embodiment of the present application.
图11是本申请又一实施例的盖板的制备方法流程示意图。FIG. 11 is a schematic flowchart of a method for preparing a cover plate according to another embodiment of the present application.
图12是本申请又一实施例的盖板的制备方法流程示意图。Fig. 12 is a schematic flowchart of a method for preparing a cover plate according to another embodiment of the present application.
图13是本申请实施例1的防护层的表面形貌的显微镜图。Fig. 13 is a microscope image of the surface topography of the protective layer of Example 1 of the present application.
图14是图13中方框的放大图。FIG. 14 is an enlarged view of the block in FIG. 13 .
图15是实施例1及对比例1的盖板的可见-紫外光透过率曲线图。FIG. 15 is a graph showing the visible-ultraviolet light transmittance curves of the cover plates of Example 1 and Comparative Example 1. FIG.
图16是实施例1及对比例1的盖板的红外光透过率曲线图。FIG. 16 is a graph of infrared light transmittance curves of the cover plates of Example 1 and Comparative Example 1. FIG.
图17是实施例1的盖板在喷砂前后的显微镜形貌图,其中,(a)为盖板喷砂前的显微镜形貌图,(b)为盖板喷砂后的显微镜形貌图。Fig. 17 is the microscopic topography of the cover plate of Example 1 before and after sandblasting, wherein (a) is the microscopic topography of the cover plate before sandblasting, and (b) is the microscopic topography of the cover plate after sandblasting.
图18是对比例1的盖板在喷砂前后的显微镜形貌图,其中,(a)为盖板喷砂前的显微镜形貌图,(b)为盖板喷砂后的显微镜形貌图。Fig. 18 is the microscope topography of the cover plate of Comparative Example 1 before and after sandblasting, wherein (a) is the microscope topography of the cover plate before sandblasting, and (b) is the microscope topography of the cover plate after sandblasting.
图19是本申请实施例的电子设备的结构示意图。FIG. 19 is a schematic structural diagram of an electronic device according to an embodiment of the present application.
图20是本申请实施例的电子设备的部分爆炸结构示意图。FIG. 20 is a schematic diagram of a partial exploded structure of an electronic device according to an embodiment of the present application.
图21是本申请一实施例的电子设备的电路框图。FIG. 21 is a circuit block diagram of an electronic device according to an embodiment of the present application.
图22是本申请又一实施例的电子设备的电路框图。Fig. 22 is a circuit block diagram of an electronic device according to yet another embodiment of the present application.
附图标记说明:Explanation of reference signs:
100-盖板,10-盖板本体,30-防护层,30a-第一防护子层,30b-第二防护子层,31-凸起结构,311-子凸起,32-第一晶核,34-第一沉积层,36-第二晶核,38-第二沉积层,50-保护层,600-电子设备,610-显示组件,420-中框,630-电路板组件,631-处理器,633-存储器,640-壳体,641-透光部,650-摄像头模组。100-cover, 10-cover body, 30-protection layer, 30a-first protection sublayer, 30b-second protection sublayer, 31-protrusion structure, 311-sub-protrusion, 32-first crystal nucleus, 34-first deposition layer, 36-second crystal nucleus, 38-second deposition layer, 50-protection layer, 600-electronic equipment, 610-display component, 420-middle frame, 630-circuit board component, 631-processor , 633-memory, 640-housing, 641-translucent part, 650-camera module.
具体实施方式Detailed ways
第一方面,本申请提供一种盖板,其包括:In a first aspect, the present application provides a cover plate, which includes:
盖板本体;以及the cover body; and
防护层,所述防护层设置于所述盖板本体的表面,所述防护层为类金刚石膜层,所述防护层的水接触角θ1的范围为120°≤θ1≤130°。A protective layer, the protective layer is arranged on the surface of the cover body, the protective layer is a diamond-like film layer, and the range of the water contact angle θ1 of the protective layer is 120°≤θ1≤130°.
其中,所述防护层具有多个凸起结构,所述多个凸起结构位于所述防护层远离所述盖板本体的表面,每个所述凸起结构具有位于所述凸起结构表面的多个子凸起。Wherein, the protection layer has a plurality of protrusion structures located on the surface of the protection layer away from the cover body, and each of the protrusion structures has a plurality of sub-protrusions located on the surface of the protrusion structure.
其中,所述防护层包括多个第一晶核、第一沉积层、多个第二晶核及第二沉积层,所述多个第一晶核间隔设置于所述盖板本体的表面,所述第一沉积层覆盖于所述多个第一晶核的表面,所述多个第二晶核设置于所述第一沉积层远离所述第一晶核的表面,所述第二沉积层覆盖于所述多个第二晶核的表面,其中,所述第一晶核与所述第一沉积层组成第一防护子层,所述第一防护子层为第一类金刚石子膜层,所述第二晶核与所述第二沉积层组成第二防护子层,所述第二防护子层为第二类金刚石子膜层。Wherein, the protection layer includes a plurality of first crystal nuclei, a first deposition layer, a plurality of second crystal nuclei and a second deposition layer, the plurality of first crystal nuclei are arranged at intervals on the surface of the cover plate body, the first deposition layer covers the surface of the plurality of first crystal nuclei, the plurality of second crystal nuclei are arranged on the surface of the first deposition layer away from the first crystal nuclei, and the second deposition layer covers the surfaces of the plurality of second crystal nuclei, wherein the first crystal nuclei and the first deposition layer form a first protective sub-layer, and the first protective sub-layer is a first diamond-like sub-film layer, and the second crystal nuclei and The second deposited layer constitutes a second protective sublayer, and the second protective sublayer is a second diamond-like sublayer.
其中,所述第一晶核为第一金刚石晶核,所述第二晶核为第二金刚石晶核;所述第一沉积层为类金刚石膜层,所述第二沉积层为类金刚石膜层。Wherein, the first crystal nucleus is a first diamond nucleus, and the second crystal nucleus is a second diamond nucleus; the first deposited layer is a diamond-like film layer, and the second deposited layer is a diamond-like film layer.
其中,所述防护层的厚度h1的范围为5μm≤h1≤10μm;所述凸起结构在所述防护层的表面的正投影所围区域的最大距离d1的范围为3μm≤d1≤7μm;所述子凸起上相距最远的两点之间的距离d2的范围为40nm≤d2≤2μm。Wherein, the range of the thickness h1 of the protective layer is 5 μm≤h1≤10 μm; the range of the maximum distance d1 of the area surrounded by the orthographic projection of the raised structure on the surface of the protective layer is 3 μm≤d1≤7 μm; the range of the distance d2 between the two furthest points on the sub-protrusions is 40nm≤d2≤2 μm.
其中,所述盖板的可见光透过率大于或等于80%,所述盖板的红外光透过率大于或等于80%,所述盖板的紫外光透过率大于或等于80%。Wherein, the visible light transmittance of the cover plate is greater than or equal to 80%, the infrared light transmittance of the cover plate is greater than or equal to 80%, and the ultraviolet light transmittance of the cover plate is greater than or equal to 80%.
其中,所述盖板本体包括玻璃、陶瓷或蓝宝石中的至少一种。Wherein, the cover body includes at least one of glass, ceramic or sapphire.
第二方面,本申请提供一种盖板,其包括:In a second aspect, the present application provides a cover plate, which includes:
盖板本体;以及the cover body; and
防护层,所述防护层设置于所述盖板本体的表面,所述防护层为类金刚石膜层,所述防护层具有多个凸起结构,所述多个凸起结构位于所述防护层远离所述盖板本体的表面,每个所述凸起结构具有位于所述凸起结构表面的多个子凸起。A protective layer, the protective layer is arranged on the surface of the cover body, the protective layer is a diamond-like film layer, the protective layer has a plurality of protrusion structures, the plurality of protrusion structures are located on the surface of the protective layer away from the cover body, and each of the protrusion structures has a plurality of sub-protrusions located on the surface of the protrusion structure.
其中,所述防护层包括多个第一晶核、第一沉积层、多个第二晶核及第二沉积层,所述多个第一晶核间隔设置于所述盖板本体的表面,所述第一沉积层覆盖于所述多个第一晶核的表面,所述多个第二晶核设置于所述第一沉积层远离所述第一晶核的表面,所述第二沉积层覆盖于所述多个第二晶核的表 面,其中,所述第一晶核与所述第一沉积层组成第一防护子层,所述第一防护子层为第一类金刚石子膜层,所述第二晶核与所述第二沉积层组成第二防护子层,所述第二防护子层为第二类金刚石子膜层。Wherein, the protective layer includes a plurality of first crystal nuclei, a first deposition layer, a plurality of second crystal nuclei and a second deposition layer, the plurality of first crystal nuclei are arranged at intervals on the surface of the cover plate body, the first deposition layer covers the surface of the plurality of first crystal nuclei, the plurality of second crystal nuclei are arranged on the surface of the first deposition layer away from the first crystal nuclei, and the second deposition layer covers the surface of the plurality of second crystal nuclei, wherein the first crystal nuclei and the first deposition layer form a first protective sub-layer, and the first protective sub-layer is a first diamond-like sub-film layer, and the second crystal nuclei The core and the second deposition layer form a second protection sublayer, and the second protection sublayer is a second diamond-like sublayer.
其中,所述防护层的厚度h1的范围为5μm≤h1≤10μm;所述凸起结构在所述防护层的表面的正投影所围区域的最大距离d1的范围为3μm≤d1≤7μm;所述子凸起上相距最远的两点之间的距离d2的范围为40nm≤d2≤2μm。Wherein, the range of the thickness h1 of the protective layer is 5 μm≤h1≤10 μm; the range of the maximum distance d1 of the area surrounded by the orthographic projection of the raised structure on the surface of the protective layer is 3 μm≤d1≤7 μm; the range of the distance d2 between the two furthest points on the sub-protrusions is 40nm≤d2≤2 μm.
其中,所述盖板的可见光透过率大于或等于80%,所述盖板的红外光透过率大于或等于80%,所述盖板的紫外光透过率大于或等于80%。Wherein, the visible light transmittance of the cover plate is greater than or equal to 80%, the infrared light transmittance of the cover plate is greater than or equal to 80%, and the ultraviolet light transmittance of the cover plate is greater than or equal to 80%.
其中,所述盖板本体包括玻璃、陶瓷或蓝宝石中的至少一种。Wherein, the cover body includes at least one of glass, ceramic or sapphire.
第三方面,本申请提供一种盖板的制备方法,其包括:In a third aspect, the present application provides a method for preparing a cover plate, which includes:
提供盖板本体;以及Provide the cover body; and
在所述盖板本体的表面形成防护层,其中,所述防护层为类金刚石膜层,所述防护层的水接触角θ1的范围为120°≤θ1≤130°。A protective layer is formed on the surface of the cover body, wherein the protective layer is a diamond-like film layer, and the range of the water contact angle θ1 of the protective layer is 120°≤θ1≤130°.
其中,所述在所述盖板本体的表面形成防护层,包括:Wherein, the formation of a protective layer on the surface of the cover body includes:
将所述盖板本体于第一金刚石形核液中,进行第一静电沉积,以在所述盖板本体表面形成第一晶核,所述第一晶核为第一金刚石晶核;Carrying out the first electrostatic deposition of the cover plate body in the first diamond nucleation liquid to form a first crystal nucleus on the surface of the cover plate body, the first crystal nucleus being the first diamond crystal nucleus;
在所述第一晶核表面沉积类金刚石,以得到第一类金刚石子膜层;Depositing diamond-like carbon on the surface of the first crystal nucleus to obtain a first diamond-like carbon sub-film layer;
于第二金刚石形核液中,进行第二静电沉积,以在第一类金刚石子膜层的表面形成第二晶核,所述第二晶核为第二金刚石晶核;以及In the second diamond nucleation liquid, carry out the second electrostatic deposition, to form a second crystal nucleus on the surface of the first diamond-like sub-film layer, the second crystal nucleus is the second diamond crystal nucleus; and
在第二晶核表面沉积类金刚石,以得到第二类金刚石子膜层,其中,所述防护层包括所述第一类金刚石子膜层及所述第二类金刚石子膜层,所述类金刚石膜层包括所述第一类金刚石子膜层及所述第二类金刚石子膜层。Deposit diamond-like carbon on the surface of the second crystal nucleus to obtain a second diamond-like sub-film layer, wherein the protective layer includes the first diamond-like sub-film layer and the second diamond-like sub-film layer, and the diamond-like film layer includes the first diamond-like sub-film layer and the second diamond-like sub-film layer.
其中,所述将所述盖板本体于第一金刚石形核液中,进行电沉积,以在所述盖板本体表面形成第一晶核,包括:Wherein, the electrodeposition of the cover plate body in the first diamond nucleation solution is performed to form a first crystal nucleus on the surface of the cover plate body, including:
将盖板本体置于金刚石平均粒径的范围为1μm至4μm、金刚石质量浓度的范围为0.02%至0.06%、PH值为4.5至5.5的第一金刚石形核液中,进行超声波;以及Place the cover plate body in the first diamond nucleation liquid with an average diamond particle size ranging from 1 μm to 4 μm, a diamond mass concentration ranging from 0.02% to 0.06%, and a pH value of 4.5 to 5.5, and perform ultrasonic waves; and
于第一电压U1的范围为15V≤U1≤25V下进行第一静电沉积,第一静电沉积的时间范围为2min至4min,以在所述盖板本体表面形成第一晶核。The first electrostatic deposition is performed under the range of the first voltage U1 of 15V≤U1≤25V, and the time range of the first electrostatic deposition is 2min to 4min, so as to form a first crystal nucleus on the surface of the cover body.
其中,于第二金刚石形核液中,进行第二静电沉积,以在第一类金刚石子膜层的表面形成第二晶核,包括:Wherein, in the second diamond nucleation liquid, carry out the second electrostatic deposition, to form the second crystal nucleus on the surface of the first diamond-like sub-film layer, comprising:
于金刚石平均粒径的范围为30nm至1μm、金刚石质量浓度的范围为0.02%至0.06%、PH值为3至4的第二金刚石形核液中,进行超声波;以及Ultrasound is carried out in the second diamond nucleation liquid whose average diamond particle size ranges from 30nm to 1 μm, the diamond mass concentration ranges from 0.02% to 0.06%, and the pH value is 3 to 4; and
于第二电压U2的范围为6V≤U2≤10V下进行第二静电沉积,第二静电沉积的时间范围为60s至90s,以在第一类金刚石子膜层的表面形成第二晶核。The second electrostatic deposition is carried out under the second voltage U2 in the range of 6V≤U2≤10V, and the time range of the second electrostatic deposition is in the range of 60s to 90s, so as to form the second crystal nuclei on the surface of the first DLC sub-film layer.
其中,所述在所述第一晶核表面沉积类金刚石,以得到第一类金刚石子膜层之后,所述于第二金刚石形核液中,进行第二静电沉积,以在第一类金刚石子膜层的表面形成第二晶核之前,所述方法还包括:Wherein, after the diamond-like carbon is deposited on the surface of the first crystal nucleus to obtain the first diamond-like sub-film layer, the second electrostatic deposition is carried out in the second diamond nucleation liquid, so that before the second crystal nucleus is formed on the surface of the first diamond-like sub-film layer, the method also includes:
于氧化溶液中进行氧化处理,其中,所述氧化溶液为包括双氧水及氨水的水溶液。The oxidation treatment is carried out in an oxidation solution, wherein the oxidation solution is an aqueous solution including hydrogen peroxide and ammonia water.
其中,所述在所述第一晶核表面沉积类金刚石,以得到第一类金刚石子膜层,包括:Wherein, the deposition of diamond-like carbon on the surface of the first crystal nucleus to obtain the first diamond-like carbon sub-film layer includes:
采用甲烷及氢气作为反应气体,在所述甲烷为第一流速,所述氢气为第二流速,所述反应气体的温度为第一温度,所述盖板本体的温度为第二温度,于第一压力下采用热丝化学气相沉积方法,在所述第一晶核表面沉积类金刚石,沉积第一时间,以得到第一类金刚石子膜层,其中,所述第一流速为30SCCM至50SCCM,所述第二流速为650SCCM至750SCCM,所述第一温度为2450℃至2650℃,所述第二温度为750℃至850℃,第一压力为1.8KPa至2.2KPa,第一时间为50min至80min。Using methane and hydrogen as the reaction gas, the methane is the first flow rate, the hydrogen is the second flow rate, the temperature of the reaction gas is the first temperature, the temperature of the cover body is the second temperature, and the hot wire chemical vapor deposition method is used under the first pressure to deposit diamond-like carbon on the surface of the first crystal nucleus for the first time to obtain the first diamond-like sub-film layer, wherein the first flow rate is 30SCCM to 50SCCM, the second flow rate is 650SCCM to 750SCCM, and the first temperature is 2450°C to 2650°C, the second temperature is 750°C to 850°C, the first pressure is 1.8KPa to 2.2KPa, and the first time is 50min to 80min.
其中,所述在第二晶核表面沉积类金刚石,以得到第二类金刚石子膜层,包括:Wherein, said depositing diamond-like carbon on the surface of the second crystal nucleus, to obtain the second diamond-like carbon sub-film layer, includes:
采用甲烷及氢气作为反应气体,在所述甲烷为第三流速,所述氢气为第四流速,所述反应气体的 温度为第三温度,所述盖板本体的温度为第四温度,于第二压力下采用热丝化学气相沉积方法,在所述第二晶核表面沉积类金刚石,沉积第二时间,以得到第二类金刚石子膜层,其中,所述第三流速为30SCCM至50SCCM,所述第四流速为650SCCM至750SCCM,所述第三温度为2450℃至2650℃,所述第四温度为750℃至850℃,第二压力为1.8KPa至2.2KPa,第二时间为50min至80min。Using methane and hydrogen as the reaction gas, the methane is the third flow rate, the hydrogen is the fourth flow rate, the temperature of the reaction gas is the third temperature, the temperature of the cover plate body is the fourth temperature, and the hot wire chemical vapor deposition method is used under the second pressure. The diamond-like carbon is deposited on the surface of the second crystal nucleus for a second time to obtain a second diamond-like sub-film layer, wherein the third flow rate is 30SCCM to 50SCCM, the fourth flow rate is 650SCCM to 750SCCM, and the third temperature is 2450°C to 2650°C, the fourth temperature is 750°C to 850°C, the second pressure is 1.8KPa to 2.2KPa, and the second time is 50min to 80min.
第四方面,本申请提供一种电子设备,其包括:In a fourth aspect, the present application provides an electronic device, which includes:
显示组件;display components;
盖板,所述盖板设置于所述显示组件的一侧;盖板包括盖板本体以及防护层,所述防护层设置于所述盖板本体的表面,所述防护层为类金刚石膜层;所述防护层满足以下条件中的至少一个:所述防护层的水接触角θ1的范围为120°≤θ1≤130°;或者,所述防护层具有多个凸起结构,所述多个凸起结构位于所述防护层远离所述盖板本体的表面,每个所述凸起结构具有位于所述凸起结构表面的多个子凸起;以及Cover plate, the cover plate is arranged on one side of the display assembly; the cover plate includes a cover plate body and a protective layer, the protective layer is arranged on the surface of the cover plate body, and the protective layer is a diamond-like film layer; the protective layer satisfies at least one of the following conditions: the water contact angle θ1 of the protective layer is in the range of 120°≤θ1≤130°; Multiple sub-protrusions of the surface; and
电路板组件,所述电路板组件与所述显示组件电连接,用于控制所述显示组件进行显示。A circuit board assembly, the circuit board assembly is electrically connected to the display assembly, and is used to control the display assembly to display.
本申请第四方面的电子设备的盖板可以为本申请第一方面、第二方面任一项所述的盖板。The cover plate of the electronic device according to the fourth aspect of the present application may be the cover plate described in any one of the first aspect and the second aspect of the present application.
为了使本技术领域的人员更好地理解本申请方案,下面将结合本申请实施例中的附图,对本申请实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例仅仅是本申请一部分实施例,而不是全部的实施例。基于本申请中的实施例,本领域普通技术人员在没有作出创造性劳动前提下所获得的所有其他实施例,都属于本申请保护的范围。In order to enable those skilled in the art to better understand the solution of the present application, the technical solution in the embodiment of the application will be clearly and completely described below in conjunction with the accompanying drawings in the embodiment of the application. Obviously, the described embodiment is only a part of the embodiment of the application, not all of the embodiments. Based on the embodiments in this application, all other embodiments obtained by persons of ordinary skill in the art without creative efforts fall within the protection scope of this application.
本申请的说明书和权利要求书及上述附图中的术语“第一”、“第二”等是用于区别不同对象,而不是用于描述特定顺序。此外,术语“包括”和“具有”以及它们任何变形,意图在于覆盖不排他的包含。例如包含了一系列步骤或单元的过程、方法、系统、产品或设备没有限定于已列出的步骤或单元,而是可选地还包括没有列出的步骤或单元,或可选地还包括对于这些过程、方法、产品或设备固有的其他步骤或单元。The terms "first", "second" and the like in the description and claims of the present application and the above drawings are used to distinguish different objects, rather than to describe a specific order. Furthermore, the terms "include" and "have", as well as any variations thereof, are intended to cover a non-exclusive inclusion. For example, a process, method, system, product or device comprising a series of steps or units is not limited to the listed steps or units, but optionally also includes unlisted steps or units, or optionally also includes other steps or units inherent to these processes, methods, products or devices.
电子设备例如手机等的盖板如前盖或后盖,为了避免使用时留下水印、指纹、污渍等,可以在盖板的表面蒸镀一层防指纹层。防指纹层可以采用具有活性硅烷基团及氟改性有机基团组合而成的涂料形成,该涂料中的硅烷基团能和玻璃很好的咬合,氟炭基团具有较低的表面张力,可以行使形成的防指纹层具有较好的防水、防油污、防指纹等效果。然而,该防指纹层的耐磨性较差,经过一段时间(例如3个月至6个月)的使用后,盖板的防指纹效果显著降低,甚至消失,这大大降低了消费者的体验。Covers of electronic devices such as mobile phones, such as front or rear covers, can be deposited with an anti-fingerprint layer on the surface of the cover in order to avoid leaving watermarks, fingerprints, stains, etc. during use. The anti-fingerprint layer can be formed by a coating composed of active silane groups and fluorine-modified organic groups. The silane groups in the coating can be well bonded to the glass, and the fluorocarbon groups have low surface tension. The anti-fingerprint layer can be used to form better waterproof, oil-proof, and fingerprint-proof effects. However, the anti-fingerprint layer has poor abrasion resistance. After a period of use (for example, 3 to 6 months), the anti-fingerprint effect of the cover plate is significantly reduced or even disappears, which greatly reduces the experience of consumers.
基于此,本申请实施例提供一种盖板100,其具有长时间的防指纹效果。本申请实施例盖板100可以应用于但不限于应用于手机、平板电脑、笔记本电脑、台式电脑、智能手环、智能手表、电子阅读器、游戏机等电子设备600(如图19及图20所示)。本申请实施例的盖板100可以为2D结构、2.5D结构、3D结构等。本申请的盖板100可以为电子设备600的前盖(如显示屏的保护盖)、中框、后盖(电池盖)、装饰件等。在本申请的下列实施例中,盖板100以手机的前盖为例进行详细说明,不应理解为对本申请实施例盖板100的限定。Based on this, the embodiment of the present application provides a cover plate 100 which has a long-term anti-fingerprint effect. The cover plate 100 of the embodiment of the present application can be applied to but not limited to mobile phones, tablet computers, notebook computers, desktop computers, smart bracelets, smart watches, e-readers, game consoles and other electronic devices 600 (as shown in Figure 19 and Figure 20 ). The cover plate 100 in the embodiment of the present application may have a 2D structure, a 2.5D structure, a 3D structure, and the like. The cover plate 100 of the present application may be a front cover (such as a protective cover of a display screen), a middle frame, a rear cover (battery cover), a decoration, etc. of the electronic device 600 . In the following embodiments of the present application, the cover plate 100 is described in detail by taking the front cover of a mobile phone as an example, which should not be construed as a limitation to the cover plate 100 of the embodiment of the present application.
下面将结合附图,对本申请实施例中的技术方案进行描述。The technical solutions in the embodiments of the present application will be described below with reference to the accompanying drawings.
需要说明的是,为便于说明,在本申请的实施例中,相同的附图标记表示相同的部件,并且为了简洁,在不同实施例中,省略对相同部件的详细说明。It should be noted that, for ease of description, in the embodiments of the present application, the same reference numerals represent the same components, and for the sake of brevity, in different embodiments, detailed descriptions of the same components are omitted.
请参见图1及图2,本申请实施例提供一种盖板100,其包括盖板本体10以及防护层30。所述防护层30设置于所述盖板本体10的表面,所述防护层30为类金刚石膜层,所述防护层30的水接触角θ1的范围为120°≤θ1≤130°。Referring to FIG. 1 and FIG. 2 , the embodiment of the present application provides a cover 100 , which includes a cover body 10 and a protective layer 30 . The protective layer 30 is disposed on the surface of the cover body 10 , the protective layer 30 is a diamond-like film layer, and the water contact angle θ1 of the protective layer 30 is in the range of 120°≤θ1≤130°.
类金刚石膜(Diamond Like Carbon,DLC)指含有类似金刚石结构的非晶碳膜。类金刚石薄膜是一种以sp3和sp2键的形式结合生成的亚稳态材料。Diamond Like Carbon (DLC) refers to an amorphous carbon film containing a diamond-like structure. Diamond-like carbon film is a metastable material formed in the form of sp3 and sp2 bonds.
所述防护层30设置于所述盖板本体10的表面,可以为防护层30设置于盖板本体10的一个表面或多个表面,还可以为防护层30设置于盖板本体10的一个表面上的部分表面或整个表面,在本申请的图示中以防护层30设置于盖板本体10的一个表面为例进行示意,不应理解为对本申请实施例的限定。The protective layer 30 is arranged on the surface of the cover body 10. It can be that the protective layer 30 is arranged on one surface or multiple surfaces of the cover body 10, and it can also be a partial surface or the entire surface of the protective layer 30 arranged on one surface of the cover body 10. In the illustrations of the application, the protective layer 30 is arranged on one surface of the cover body 10 as an example for illustration, and should not be understood as limiting the embodiment of the application.
所述防护层30的水接触角θ1可以为但不限于为120°、121°、122°、123°、124°、125°、 126°、127°、128°、129°、130°等。防护层30的水接触角θ1越大,制得的盖板100具有越好的自清洁、防水、防污及防指纹效果。The water contact angle θ1 of the protective layer 30 may be, but not limited to, 120°, 121°, 122°, 123°, 124°, 125°, 126°, 127°, 128°, 129°, 130°, etc. The larger the water contact angle θ1 of the protective layer 30 is, the better the self-cleaning, waterproof, anti-fouling and anti-fingerprint effects of the prepared cover plate 100 are.
“水接触角”指水在固体膜层表面的接触角,例如,水滴在防护层30表面的接触角。"Water contact angle" refers to the contact angle of water on the surface of the solid film layer, for example, the contact angle of water droplets on the surface of the protective layer 30 .
本申请实施例的盖板100采用0000#钢丝绒,1Kg负重,来回摩擦防护层10的表面,盖板100,经20万次以上的摩擦,也不会被刮花。The cover plate 100 of the embodiment of the present application adopts 0000# steel wool with a load of 1Kg to rub the surface of the protective layer 10 back and forth. The cover plate 100 will not be scratched after more than 200,000 times of friction.
本申请实施例的盖板100包括防护层30,所述防护层30为类金刚石膜层,所述防护层30的水接触角θ1的范围为120°≤θ1≤130°。所述防护层30的水接触角θ1的范围为120°≤θ1≤130°,防护层30具有较高的水接触角,从而具有较低的迟滞性,由此,使得盖板100具有良好的防水、防污及防指纹性能。类金刚石膜层具有较高的硬度及良好的耐磨性、不易磨损,从而使得盖板100经过长时间的使用,仍具有良好的自清洁、防水、防污及防指纹等各项性能,自清洁、防水、防污及防指纹等各项性能可以保持的更持久。The cover plate 100 of the embodiment of the present application includes a protective layer 30, which is a diamond-like film layer, and the water contact angle θ1 of the protective layer 30 is in the range of 120°≤θ1≤130°. The water contact angle θ1 of the protective layer 30 is in the range of 120°≤θ1≤130°, the protective layer 30 has a relatively high water contact angle, and thus has low hysteresis, thus making the cover 100 have good waterproof, antifouling and antifingerprint properties. The diamond-like film layer has high hardness, good wear resistance, and is not easy to wear, so that after a long period of use, the cover plate 100 still has good self-cleaning, waterproof, anti-fouling and anti-fingerprint properties, and the self-cleaning, waterproof, anti-fouling and anti-fingerprint properties can be maintained for a longer period of time.
“迟滞性”指表面对液滴滚动的阻碍性能,阻碍性能大迟滞性高,阻碍性能小,迟滞性低。"Hysteresis" refers to the resistance of the surface to the rolling of droplets. The resistance is large and the hysteresis is high, and the resistance is small and the hysteresis is low.
可选地,所述盖板100的可见光透过率大于或等于80%;进一步地,盖板100的可见光透过率大于或等于85%;更进一步地,盖板100的可见光透过率大于或等于90%。具体地,盖板100的可见光透过率可以为但不限于为80%、82%、85%、88%、90%、93%、95%、97%、98%、99%等。盖板100的可见光透过率越高,应用于电子设备600显示屏保护盖时,可以使得显示屏具有更好的显示效果,应用于后盖且盖板100上设有纹理或图案时,可以使盖板100具有更清晰的纹理或图案。Optionally, the visible light transmittance of the cover 100 is greater than or equal to 80%; further, the visible light transmittance of the cover 100 is greater than or equal to 85%; further, the visible light transmittance of the cover 100 is greater than or equal to 90%. Specifically, the visible light transmittance of the cover plate 100 may be, but not limited to, 80%, 82%, 85%, 88%, 90%, 93%, 95%, 97%, 98%, 99% and so on. The higher the visible light transmittance of the cover plate 100, when applied to the protective cover of the display screen of the electronic device 600, the display screen can have a better display effect; when applied to the back cover and the cover plate 100 is provided with textures or patterns, the cover plate 100 can have clearer textures or patterns.
可选地,所述盖板100的红外光透过率大于或等于80%;进一步地,盖板100的红外光透过率大于或等于85%;更进一步地,盖板100的红外光透过率大于或等于90%。具体地,盖板100的红外光透过率可以为但不限于为80%、82%、85%、88%、90%、93%、95%、97%、98%、99%等。盖板100的红外光透过率越高,应用于电子设备600显示屏保护盖时,可以更好的透过红外线,从而使盖板100下方的传感器例如指纹传感器可以更好的接收到红外线,从而实现更好的检测效果。Optionally, the infrared light transmittance of the cover plate 100 is greater than or equal to 80%; further, the infrared light transmittance of the cover plate 100 is greater than or equal to 85%; further, the infrared light transmittance of the cover plate 100 is greater than or equal to 90%. Specifically, the infrared light transmittance of the cover plate 100 may be, but not limited to, 80%, 82%, 85%, 88%, 90%, 93%, 95%, 97%, 98%, 99% and so on. The higher the infrared light transmittance of the cover plate 100, when applied to the protective cover of the display screen of the electronic device 600, it can better transmit infrared rays, so that the sensor under the cover plate 100, such as a fingerprint sensor, can better receive infrared rays, thereby achieving better detection effect.
可选地,所述盖板100的紫外光透过率大于或等于80%;进一步地,盖板100的紫外光透过率大于或等于85%;更进一步地,盖板100的紫外光透过率大于或等于90%。具体地,盖板100的紫外光透过率可以为但不限于为80%、82%、85%、88%、90%、93%、95%、97%、98%、99%等。盖板100的紫外光透过率越高,应用于电子设备600时,可以更好的透过紫外线,从而使得电子设备600盖板100下方的紫外光传感器可以更好的感应到紫外光,进行更精准的检测。Optionally, the UV transmittance of the cover 100 is greater than or equal to 80%; further, the UV transmittance of the cover 100 is greater than or equal to 85%; further, the UV transmittance of the cover 100 is greater than or equal to 90%. Specifically, the UV light transmittance of the cover plate 100 may be, but not limited to, 80%, 82%, 85%, 88%, 90%, 93%, 95%, 97%, 98%, 99% and so on. The higher the ultraviolet light transmittance of the cover 100 , when applied to the electronic device 600 , it can better transmit ultraviolet light, so that the ultraviolet light sensor under the cover 100 of the electronic device 600 can better sense ultraviolet light and perform more accurate detection.
在一些实施例中,盖板本体10的材质可以为但不限于为玻璃、陶瓷或蓝宝石等中的至少一种。可选地,陶瓷可以为但不限于为二氧化硅体系的陶瓷。In some embodiments, the material of the cover body 10 may be, but not limited to, at least one of glass, ceramic, or sapphire. Optionally, the ceramic may be, but not limited to, a silica-based ceramic.
当盖板100作为电子设备600的前盖时,盖板本体10是透光的,盖板本体10的透光率越高越好,透光率越高,电子设备600的显示效果越好;盖板本体10的透光率可以大于或等于85%,进一步地,盖板本体10的透光率可以大于或等于90%;具体地,盖板本体10的透光率可以为但不限于为85%、88%、90%、93%、95%、97%、98%、99%等。当盖板100作为电子设备600的后盖时,盖板本体10可以是透光的、不透光的或半透光的。When the cover plate 100 is used as the front cover of the electronic device 600, the cover plate body 10 is light-transmissive. The higher the light transmittance of the cover plate body 10 is, the better the display effect of the electronic device 600 is. , 93%, 95%, 97%, 98%, 99%, etc. When the cover plate 100 is used as the back cover of the electronic device 600 , the cover plate body 10 may be transparent, opaque or semi-transparent.
可选地,盖板本体10的厚度为0.3mm至1mm;具体地,盖板本体10的厚度可以为但不限于为0.3mm、0.4mm、0.5mm、0.6mm、0.7mm、0.8mm、0.9mm、1mm等。当盖板本体10太薄时,不能很好的起到支撑和保护作用,且机械强度不能很好的满足电子设备600盖板100的要求,当盖板本体10的太厚时,则增加电子设备600的重量,影响电子设备600的手感,用户体验不好。Optionally, the thickness of the cover body 10 is 0.3mm to 1mm; specifically, the thickness of the cover body 10 can be but not limited to 0.3mm, 0.4mm, 0.5mm, 0.6mm, 0.7mm, 0.8mm, 0.9mm, 1mm and so on. When the cover body 10 is too thin, it cannot play a supporting and protective role well, and the mechanical strength cannot well meet the requirements of the cover 100 of the electronic device 600. When the cover body 10 is too thick, the weight of the electronic device 600 will be increased, affecting the feel of the electronic device 600, and the user experience is not good.
请参见图3及图4,在一些实施例中,所述防护层30具有多个凸起结构31,所述多个凸起结构31位于所述防护层30远离所述盖板本体10的表面,每个所述凸起结构31具有位于所述凸起结构31表面的多个子凸起311。防护层30具有位于表面多个凸起结构31,每个凸起结构31的具有位于表面具有多个子凸起311,这使得防护层30的表面形成了荷叶仿生结构,从而使得防护层30具有更好的疏水性,具有更高的水接触角,可以更好的自清洁、防水、防污及防指纹性能。3 and 4, in some embodiments, the protection layer 30 has a plurality of protrusion structures 31, the plurality of protrusion structures 31 are located on the surface of the protection layer 30 away from the cover body 10, and each of the protrusion structures 31 has a plurality of sub-protrusions 311 located on the surface of the protrusion structure 31. The protective layer 30 has a plurality of raised structures 31 on the surface, and each raised structure 31 has a plurality of sub-protrusions 311 on the surface, which makes the surface of the protective layer 30 form a lotus leaf bionic structure, so that the protective layer 30 has better hydrophobicity, has a higher water contact angle, and can better self-cleaning, waterproof, antifouling and anti-fingerprint performance.
可选地,所述凸起结构31在所述防护层30的表面的正投影所围区域的最大距离d1的范围为3μm≤d1≤7μm;具体地,d1可以为但不限于为3μm、3.5μm、4μm、4.5μm、5μm、5.5μm、6μm、 6.5μm、7μm等。当凸起结构31的尺寸太大时,则会降低防护层30的透过率,不利于盖板100应用于电子设备600的显示屏保护盖(即前盖),且凸起结构31的尺寸太大,使得盖板100表面的粗糙度增加,影响盖板100的手感。当凸起结构31的尺寸太小时,盖板100的制备工艺难度增加,成本增加。Optionally, the range of the maximum distance d1 of the area surrounded by the orthographic projection of the raised structure 31 on the surface of the protective layer 30 is 3 μm≤d1≤7 μm; specifically, d1 can be but not limited to 3 μm, 3.5 μm, 4 μm, 4.5 μm, 5 μm, 5.5 μm, 6 μm, 6.5 μm, 7 μm, etc. When the size of the raised structure 31 is too large, the transmittance of the protective layer 30 will be reduced, which is not conducive to the application of the cover plate 100 to the display screen protection cover (ie, the front cover) of the electronic device 600, and the size of the raised structure 31 is too large, which will increase the roughness of the surface of the cover plate 100 and affect the feel of the cover plate 100. When the size of the protruding structure 31 is too small, the manufacturing process of the cover plate 100 becomes more difficult and the cost increases.
可选地,所述子凸起311上相距最远的两点之间的距离d2的范围为40nm≤d2≤2μm;换言之,所述子凸起311的尺寸的范围为40nm≤d2≤2μm;具体地,d2可以为但不限于为40nm、50nm、80nm、100nm、300nm、500nm、800nm、1μm、1.5μm、2μm等。子凸起311的尺寸小于40nm时,提高防护层30的制备难度,甚至可能在工艺上难以实现;当子凸起311的尺寸大于2μm时,液滴滴落在防护层30的表面时,液滴与防护层30表面的接触面积增加,从而使得防护层30表面的疏水性能降低,亲水性增加,从而影响盖板100的自清洁、防水、防油污及防指纹性能。Optionally, the distance d2 between the two farthest points on the sub-protrusion 311 is in the range of 40nm≤d2≤2μm; in other words, the size of the sub-protrusion 311 is in the range of 40nm≤d2≤2μm; specifically, d2 can be but not limited to 40nm, 50nm, 80nm, 100nm, 300nm, 500nm, 800nm, 1μm, 1.5μm, 2μm, etc. . When the size of the sub-protrusions 311 is less than 40nm, the preparation difficulty of the protective layer 30 is increased, and it may even be difficult to realize in the process; when the size of the sub-protrusions 311 is greater than 2 μm, when the droplet falls on the surface of the protective layer 30, the contact area between the droplet and the surface of the protective layer 30 increases, thereby reducing the hydrophobicity of the surface of the protective layer 30 and increasing the hydrophilicity, thereby affecting the self-cleaning, waterproof, anti-oil and anti-fingerprint performance of the cover plate 100.
在一些实施例中,所述防护层30的厚度h1的范围为5μm≤h1≤10μm;具体地,h1可以为但不限于为5μm、5.5μm、6μm、6.5μm、7μm、7.5μm、8μm、8.5μm、9μm、9.5μm、10μm等。防护层30越薄越好,但是受限于材料及设备,当防护层30低于5μm时,会大大提高防护层30制备的难度及成本,当防护层30厚度大于10μm时,会使得盖板100的透光率降低,不利于应用于电子设备600的显示屏的保护盖。当防护层30的厚度为5μm至10μm时,既可以使防护层30容易制备,降低制备成本,对制得的盖板100的透光率的影响又很小。In some embodiments, the thickness h1 of the protective layer 30 ranges from 5 μm≤h1≤10 μm; specifically, h1 may be, but not limited to, 5 μm, 5.5 μm, 6 μm, 6.5 μm, 7 μm, 7.5 μm, 8 μm, 8.5 μm, 9 μm, 9.5 μm, 10 μm, etc. The thinner the protective layer 30 is, the better, but limited by materials and equipment, when the protective layer 30 is less than 5 μm, the difficulty and cost of preparing the protective layer 30 will be greatly increased, and when the thickness of the protective layer 30 is greater than 10 μm, the light transmittance of the cover plate 100 will be reduced, which is not conducive to the protective cover applied to the display screen of the electronic device 600. When the thickness of the protective layer 30 is 5 μm to 10 μm, the protective layer 30 can be easily prepared, the production cost can be reduced, and the influence on the light transmittance of the prepared cover plate 100 is small.
请参见图5,在一些实施例中,所述防护层30包括多个第一晶核32、第一沉积层34、多个第二晶核36及第二沉积层38,所述多个第一晶核32间隔设置于所述盖板本体的表面,所述第一沉积层34覆盖于所述多个第一晶核32的表面,所述多个第二晶核36设置于所述第一沉积层34远离所述第一晶核32的表面,所述第二沉积层38覆盖于所述多个第二晶核36的表面,其中,所述第一晶核32与所述第一沉积层34组成第一防护子层30a,所述第一防护子层30a为第一类金刚石子膜层,所述第二晶核36与所述第二沉积层38组成第二防护子层30b,所述第二防护子层30b为第二类金刚石子膜层。采用晶核与沉积层两次层叠结构,有利于防护层30表面凸起结构31与子凸起结构311的形成,可以更好的形成荷叶仿生结构。5, in some embodiments, the protective layer 30 includes a plurality of first crystal nuclei 32, a first deposition layer 34, a plurality of second crystal nuclei 36 and a second deposition layer 38, the plurality of first crystal nuclei 32 are arranged at intervals on the surface of the cover plate body, the first deposition layer 34 covers the surface of the plurality of first crystal nuclei 32, the plurality of second crystal nuclei 36 is arranged on the surface of the first deposition layer 34 away from the first crystal nuclei 32, and the second deposition layer 38 covers the surface of the plurality of second crystal nuclei 36, wherein , the first crystal nucleus 32 and the first deposition layer 34 form the first protective sublayer 30a, the first protective sublayer 30a is the first diamond-like sublayer, the second crystal nucleus 36 and the second deposition layer 38 form the second protective sublayer 30b, and the second protective sublayer 30b is the second diamond-like sublayer. The double lamination structure of the crystal nucleus and the deposition layer is beneficial to the formation of the raised structures 31 and the sub-raised structures 311 on the surface of the protective layer 30, and can better form the lotus leaf bionic structure.
可选地,所述第一晶核32可以为但不限于为第一金刚石晶核,所述第二晶核36可以为但不限于为第二金刚石晶核。第一金刚石晶核与第二金刚石晶核可以相同,也可以不同。Optionally, the first crystal nucleus 32 may be, but not limited to, a first diamond nucleus, and the second crystal nucleus 36 may be, but not limited to, a second diamond nucleus. The first diamond nucleus and the second diamond nucleus can be the same or different.
可选地,第一沉积层34可以为但不限于为类金刚石膜层,所述第二沉积层38可以为但不限于为类金刚石膜层。Optionally, the first deposition layer 34 may be, but not limited to, a diamond-like film layer, and the second deposition layer 38 may be, but not limited to, a diamond-like film layer.
请参见图6,所述盖板100还包括保护层50,所述保护层50的水接触角θ2的范围为120°≤θ2≤150°。保护层50具有更大的水接触角,从而使得盖板100具有更好的防水、防污、防指纹效果。Referring to FIG. 6 , the cover plate 100 further includes a protective layer 50 , and the water contact angle θ2 of the protective layer 50 is in the range of 120°≤θ2≤150°. The protective layer 50 has a larger water contact angle, so that the cover 100 has better waterproof, anti-fouling and anti-fingerprint effects.
具体地,所述保护层50的水接触角θ2可以为但不限于为121°、122°、123°、124°、125°、126°、127°、128°、129°、130°、133°、135°、138°、140°、145°、150°等。保护层50的水接触角θ2越大,制得的盖板100具有越好的自清洁、防水、防污及防指纹效果。Specifically, the water contact angle θ2 of the protective layer 50 may be, but not limited to, 121°, 122°, 123°, 124°, 125°, 126°, 127°, 128°, 129°, 130°, 133°, 135°, 138°, 140°, 145°, 150°, etc. The larger the water contact angle θ2 of the protective layer 50 is, the better the self-cleaning, waterproof, anti-fouling and anti-fingerprint effects of the prepared cover plate 100 are.
可选地,所述保护层50可以为但不限于为全氟聚醚、全氟聚醚衍生物、全氟聚硅烷硅氟化物等中的至少一种。Optionally, the protective layer 50 may be, but not limited to, at least one of perfluoropolyether, perfluoropolyether derivatives, perfluoropolysilane silicon fluoride, and the like.
本申请实施例的盖板100可以通过本申请下列实施例所述的方法进行制备,此外,还可以通过其它方法进行制备,本申请实施例的制备方法仅仅是本申请盖板100的其中一种或多种制备方法,不应理解为对本申请实施例提供的盖板100的限定。The cover plate 100 of the embodiment of the present application can be prepared by the method described in the following examples of the present application. In addition, it can also be prepared by other methods. The preparation method of the embodiment of the present application is only one or more of the preparation methods of the cover plate 100 of the present application, and should not be understood as a limitation on the cover plate 100 provided by the embodiment of the present application.
请再次参见图2,本申请实施例还提供一种盖板100,其包括盖板本体10;以及防护层30,所述防护层30设置于所述盖板本体10的表面,所述防护层30为类金刚石膜层,所述防护层30具有多个凸起结构31,所述多个凸起结构31位于所述防护层30远离所述盖板本体10的表面,每个所述凸起结构31具有位于所述凸起结构31表面的多个子凸起311。Please refer to Figure 2 again. The embodiment of this application also provides a cover 100, which includes the cover plate 10; and the protective layer 30, which is set on the surface of the cover plate 10. The protective layer 30 is a diamond -like film layer. From the surface of the cover body 10, each protruding structure 31 has multiple sub -bulging 311 on the surface of the raised structure 31.
可选地,多个凸起结构31密集排布,每个凸起结构31的表面密集排布有多个子凸起311。Optionally, a plurality of protruding structures 31 are densely arranged, and a plurality of sub-protrusions 311 are densely arranged on the surface of each protruding structure 31 .
本实施例的盖板100包括防护层30,防护层30为类金刚石膜层,所述防护层30具有多个凸起结构31,每个所述凸起结构31具有多个子凸起311,这使得防护层30的表面形成了荷叶仿生结构,从而具有较高的水接触角、较低的迟滞性,由此,使得盖板100具有良好的防水、防污及防指纹性能。类金 刚石膜层具有较高的硬度及良好的耐磨性、不易磨损,从而使得盖板100经过长时间的使用,仍具有良好的自清洁、防水、防污及防指纹等各项性能,自清洁、防水、防污及防指纹等各项性能可以保持的更持久。The cover plate 100 of this embodiment includes a protective layer 30, the protective layer 30 is a diamond-like film layer, the protective layer 30 has a plurality of protrusion structures 31, and each of the raised structures 31 has a plurality of sub-protrusions 311, which makes the surface of the protective layer 30 form a lotus leaf bionic structure, thereby having a higher water contact angle and lower hysteresis, thereby enabling the cover plate 100 to have good waterproof, antifouling and anti-fingerprint properties. The diamond-like film layer has high hardness, good wear resistance, and is not easy to wear, so that after a long period of use, the cover plate 100 still has good self-cleaning, waterproof, anti-fouling and anti-fingerprint properties, and the self-cleaning, waterproof, anti-fouling and anti-fingerprint properties can be maintained for a longer period of time.
可选地,所述防护层3030的水接触角θ1的范围为120°≤θ1≤130°。Optionally, the range of the water contact angle θ1 of the protective layer 3030 is 120°≤θ1≤130°.
可选地,所述防护层30包括多个第一晶核32、第一沉积层34、多个第二晶核36及第二沉积层38,所述多个第一晶核32间隔设置于所述盖板本体10的表面,所述第一沉积层34覆盖于所述多个第一晶核32的表面,所述多个第二晶核36设置于所述第一沉积层34远离所述第一晶核32的表面,所述第二沉积层38覆盖于所述多个第二晶核36的表面,其中,所述第一晶核32与所述第一沉积层34组成第一防护子层30a,所述第一防护子层30a为第一类金刚石子膜层,所述第二晶核36与所述第二沉积层38组成第二防护子层30b,所述第二防护子层30b为第二类金刚石子膜层。采用晶核与沉积层两次层叠结构,有利于防护层3030表面凸起结构3131与子凸起311结构31311的形成,可以更好的形成荷叶仿生结构。Optionally, the protection layer 30 includes a plurality of first crystal nuclei 32, a first deposition layer 34, a plurality of second crystal nuclei 36, and a second deposition layer 38. The plurality of first crystal nuclei 32 are arranged at intervals on the surface of the cover plate body 10. The first deposition layer 34 covers the surfaces of the plurality of first crystal nuclei 32. The plurality of second crystal nuclei 36 are arranged on the surface of the first deposition layer 34 away from the first crystal nuclei 32. The second deposition layer 38 covers the surfaces of the plurality of second crystal nuclei 36, wherein the first crystal nuclei 32 and the first deposition layer 34 form the first protective sub-layer 30a, the first protective sub-layer 30a is the first diamond-like sub-film layer, the second crystal nucleus 36 and the second deposition layer 38 form the second protective sub-layer 30b, and the second protective sub-layer 30b is the second diamond-like sub-film layer. The double lamination structure of the crystal nucleus and the deposition layer is beneficial to the formation of the raised structures 3131 and the sub-raised structures 31311 on the surface of the protective layer 3030, and can better form the lotus leaf bionic structure.
在一些实施例中,所述防护层30的厚度h1的范围为5μm≤h1≤10μm;所述凸起结构31在所述防护层30的表面的正投影所围区域的最大距离d1的范围为3μm≤d1≤7μm;所述子凸起311上相距最远的两点之间的距离d2的范围为40nm≤d2≤2μm。In some embodiments, the thickness h1 of the protective layer 30 is in the range of 5 μm≤h1≤10 μm; the maximum distance d1 of the area surrounded by the orthographic projection of the raised structure 31 on the surface of the protective layer 30 is in the range of 3 μm≤d1≤7 μm; the distance d2 between the two furthest points on the sub-protrusions 311 is in the range of 40nm≤d2≤2 μm.
在一些实施例中,所述盖板100的可见光透过率大于或等于80%,所述盖板100的红外光透过率大于或等于80%,所述盖板100的紫外光透过率大于或等于80%。In some embodiments, the visible light transmittance of the cover 100 is greater than or equal to 80%, the infrared transmittance of the cover 100 is greater than or equal to 80%, and the ultraviolet transmittance of the cover 100 is greater than or equal to 80%.
在一些实施例中,所述盖板本体10包括玻璃、陶瓷或蓝宝石中的至少一种。In some embodiments, the cover body 10 includes at least one of glass, ceramic or sapphire.
关于盖板100、盖板本体10、防护层30、第一晶核32、第一沉积层34、多个第二晶核36、第二沉积层38、凸起结构31及子凸起311结构31的详细描述请参见上述实施例对应部分的描述,在此不赘述。For the detailed description of the cover plate 100, the cover plate body 10, the protective layer 30, the first crystal nucleus 32, the first deposition layer 34, the plurality of second crystal nuclei 36, the second deposition layer 38, the protrusion structure 31 and the sub-protrusion 311 structure 31, please refer to the description of the corresponding part of the above embodiment, and will not repeat them here.
请参见图7,本申请实施例还提供一种盖板100的制备方法,其包括:Please refer to FIG. 7 , the embodiment of the present application also provides a method for preparing a cover plate 100, which includes:
S201,提供盖板本体10;以及S201, providing the cover plate body 10; and
关于盖板本体10的详细描述请参见上述实施例对应部分的描述,在此不再赘述。For a detailed description of the cover body 10 , please refer to the description of the corresponding part of the above embodiment, and details are not repeated here.
S202,在所述盖板本体10的表面形成防护层30,其中,所述防护层30为类金刚石膜层,所述防护层30的水接触角θ1的范围为120°≤θ1≤130°。S202, forming a protection layer 30 on the surface of the cover body 10, wherein the protection layer 30 is a diamond-like film layer, and the range of the water contact angle θ1 of the protection layer 30 is 120°≤θ1≤130°.
可选地,可以盖板本体10的表面通过静电沉积分散于盖板本体10表面的金刚石晶核,再在金刚石晶核的表面采用热丝化学气相沉积法(Hot Filament Chemical Vapor Deposition,HFCVD)沉积类金刚石膜层,以得到防护层30。Alternatively, the surface of the cover body 10 can be electrostatically deposited with diamond nuclei dispersed on the surface of the cover body 10, and then a diamond-like film layer is deposited on the surface of the diamond nuclei by Hot Filament Chemical Vapor Deposition (HFCVD) to obtain the protective layer 30.
本申请实施例的制备方法制得的盖板100包括防护层30,所述防护层30为类金刚石膜层,所述防护层30的水接触角θ1的范围为120°≤θ1≤130°。所述防护层30的水接触角θ1的范围为120°≤θ1≤130°,从而使得盖板100具有良好的防水、防污及防指纹性能。类金刚石膜层具有较高的硬度及良好的耐磨性、不易磨损,从而使得盖板100经过长时间的使用,仍具有良好的自清洁、防水、防污及防指纹等各项性能,自清洁、防水、防污及防指纹等各项性能可以保持的更持久。The cover plate 100 prepared by the preparation method of the embodiment of the present application includes a protective layer 30, the protective layer 30 is a diamond-like film layer, and the water contact angle θ1 of the protective layer 30 is in the range of 120°≤θ1≤130°. The water contact angle θ1 of the protective layer 30 is in the range of 120°≤θ1≤130°, so that the cover 100 has good waterproof, antifouling and antifingerprint properties. The diamond-like film layer has high hardness, good wear resistance, and is not easy to wear, so that after a long period of use, the cover plate 100 still has good self-cleaning, waterproof, anti-fouling and anti-fingerprint properties, and the self-cleaning, waterproof, anti-fouling and anti-fingerprint properties can be maintained for a longer period of time.
请参见图8至图10,本申请实施例还提供一种盖板100的制备方法,其包括:Please refer to FIG. 8 to FIG. 10 , the embodiment of the present application also provides a preparation method of the cover plate 100, which includes:
S301,提供盖板本体10;S301, providing the cover body 10;
关于盖板本体10的详细描述请参见上述实施例对应部分的描述,在此不再赘述。For a detailed description of the cover body 10 , please refer to the description of the corresponding part of the above embodiment, and details are not repeated here.
S302,将所述盖板本体10于第一金刚石形核液中,进行第一静电沉积,以在所述盖板本体10表面形成第一晶核;S302, performing a first electrostatic deposition on the cover body 10 in a first diamond nucleation solution, so as to form a first crystal nucleus on the surface of the cover body 10;
可选地,所述将所述盖板本体10于第一金刚石形核液中,进行第一静电沉积,以在所述盖板本体10表面形成第一晶核32,包括:Optionally, the first electrostatic deposition of the cover body 10 in the first diamond nucleation solution is performed to form a first crystal nucleus 32 on the surface of the cover body 10, including:
S3021,将盖板本体10置于金刚石平均粒径的范围为1μm至4μm、金刚石质量浓度的范围为0.02%至0.06%、PH值为4.5至5.5的第一金刚石形核液中,进行超声波;以及S3021, placing the cover plate body 10 in the first diamond nucleation liquid with an average diamond particle diameter ranging from 1 μm to 4 μm, a diamond mass concentration ranging from 0.02% to 0.06%, and a pH value of 4.5 to 5.5, and performing ultrasonic waves; and
可选地,称取适量的金刚石平均粒径的范围为1μm至4μm,质量浓度为20%的金刚石形核原液,采用去离子水进行稀释,以配置成质量浓度的范围为0.02%至0.06%的悬浮液胶体,加入草酸,调节PH 值,以得到PH值为4.5至5.5之间的第一金刚石形核液;将盖板本体10浸入第一金刚石形核液中,于28KHZ超声波环境中,浸泡30min。通过超声波震荡,可以更好的防止第一金刚石形核液中的金刚石发生沉降,可以使得第一金刚石形核液中的金刚石可以更好的分散,从而使得最终得到的第一晶核32可以更均匀地分散于盖板本体10的表面。本申请实施例中,当涉及到数值范围a至b时,如未特别指明,均表示包括端点数值a,且包括端点数值b。可选地,第一晶核32为第一金刚石晶核。Optionally, take an appropriate amount of diamond nucleation stock solution with a diamond average particle size ranging from 1 μm to 4 μm and a mass concentration of 20%, dilute it with deionized water to configure a suspension colloid with a mass concentration ranging from 0.02% to 0.06%, add oxalic acid, and adjust the pH value to obtain the first diamond nucleation solution with a pH value between 4.5 and 5.5; immerse the cover plate body 10 in the first diamond nucleation solution, and ultrasonically environment, soak for 30min. Through ultrasonic vibration, the diamond in the first diamond nucleation liquid can be better prevented from settling, and the diamond in the first diamond nucleation liquid can be better dispersed, so that the finally obtained first crystal nuclei 32 can be more evenly dispersed on the surface of the cover body 10. In the embodiments of the present application, when it comes to the numerical range a to b, unless otherwise specified, it means that the endpoint value a is included, and the endpoint value b is included. Optionally, the first crystal nucleus 32 is a first diamond crystal nucleus.
可选地,第一金刚石形核液中的金刚石的平均粒径可以为但不限于为1μm、1.5μm、2μm、2.5μm、3μm、3.5μm、4μm等。第一金刚石形核液中金刚石的平均粒径越小越好,金刚石的平均粒径太大(如大于4μm)时,难以形成荷叶仿生结构,影响最终形成的防护层30表面的疏水性能。Optionally, the average particle size of the diamonds in the first diamond nucleation solution may be, but not limited to, 1 μm, 1.5 μm, 2 μm, 2.5 μm, 3 μm, 3.5 μm, 4 μm and the like. The smaller the average particle size of the diamond in the first diamond nucleation solution, the better. When the average particle size of the diamond is too large (eg, greater than 4 μm), it is difficult to form the lotus leaf bionic structure, which affects the hydrophobicity of the finally formed protective layer 30 surface.
可选地,第一金刚石形核液中金刚石的质量浓度可以为0.02%至0.06%之间的数值,具体地,可以为但不限于为0.02%、0.03%、0.04%、0.05%、0.06%。第一金刚石形核液的浓度太低,容易使得最终形成的第一晶核32在盖板本体10表面的分布不足;第一金刚石形核液的浓度太高,金刚石容易在盖板本体10表面局部富集,使得形成的第一晶核32的大小不一,影响最终制得的防护层30表面的荷叶仿生结构,从而影响防护层30的疏水性。当第一金刚石形核液中第一金刚石的浓度为0.02%至0.06%时,既可以使盖板本体10表面形成充足的第一晶核32,又可以很好的避免金刚石富集造成的第一晶核32尺寸大小不一,从而使最终得到的防护层30存在异色现象。Optionally, the mass concentration of diamond in the first diamond nucleation solution can be a value between 0.02% and 0.06%, specifically, but not limited to 0.02%, 0.03%, 0.04%, 0.05%, 0.06%. If the concentration of the first diamond nucleation liquid is too low, the distribution of the finally formed first crystal nuclei 32 on the surface of the cover plate body 10 is likely to be insufficient; if the concentration of the first diamond nucleation liquid is too high, diamonds are likely to be locally enriched on the surface of the cover plate body 10, so that the first crystal nuclei 32 formed have different sizes, which affects the bionic structure of the lotus leaf on the surface of the finally prepared protective layer 30, thereby affecting the hydrophobicity of the protective layer 30. When the concentration of the first diamond in the first diamond nucleation liquid is 0.02% to 0.06%, sufficient first crystal nuclei 32 can be formed on the surface of the cover plate body 10, and the size of the first crystal nuclei 32 caused by diamond enrichment can be well avoided, so that the finally obtained protective layer 30 has a heterochromatic phenomenon.
可选地,第一金刚石形核液的PH值4.5至5.5之间的任意数值,具体地,可以为但不限于为4.5、5.0、5.5等。当第一金刚石形核液的PH值处于这个范围时,可以使得第一金刚石形核液中金刚石可以更稳定、均匀地分散。Optionally, the pH value of the first diamond nucleation liquid is any value between 4.5 and 5.5, specifically, it may be but not limited to 4.5, 5.0, 5.5 and so on. When the pH value of the first diamond nucleation liquid is in this range, the diamond in the first diamond nucleation liquid can be dispersed more stably and uniformly.
S3022,于第一电压U1的范围为15V≤U1≤25V下进行第一静电沉积,第一静电沉积的时间范围为2min至4min,以在所述盖板本体10表面形成第一晶核32。S3022, performing the first electrostatic deposition under the range of the first voltage U1 of 15V≤U1≤25V, and the time range of the first electrostatic deposition is 2min to 4min, so as to form the first crystal nucleus 32 on the surface of the cover body 10.
可选地,进行通电,以使得第一金刚石形核液中的金刚石颗粒均匀地沉积于盖板本体10的表面,以使得盖板本体10的表面分散有一个个的第一晶核32。Optionally, power is applied so that the diamond particles in the first diamond nucleation liquid are evenly deposited on the surface of the cover body 10 , so that the surface of the cover body 10 is dispersed with first crystal nuclei 32 one by one.
可选地,第一电压U1可以为但不限于为15V、16V、17V、18V、19V、20V、21V、22V、23V、24V、25V等。第一电压U1的电压越高,金刚石颗粒沉积的速度越快;第一电压过高(如高于25V)时,容易使金刚石颗粒过于富集,形成的第一晶核32的粒径不均匀,从而使最终得到的防护层30存在异色现象。第一电压的压力过低(如低于15V)时,金刚石颗粒沉积需要较长的时间,影响生产效率,且容易使金刚石颗粒沉积不够,影响制得的防护层30的表面结构,从而影响盖板100的自清洁、防水、防油污及防指纹性能。当第一电压U1位15V至25V之间时,既可以使金刚石颗粒的沉积速度较为适中,避免沉积过慢,影响生产效率,且使金刚石颗粒沉积不够,影响制得的防护层30的表面结构,同时,海口可以避免金刚石颗粒过于富集,形成的第一晶核32的粒径不均匀,从而使最终得到的防护层30存在异色现象。Optionally, the first voltage U1 may be, but not limited to, 15V, 16V, 17V, 18V, 19V, 20V, 21V, 22V, 23V, 24V, 25V and so on. The higher the voltage of the first voltage U1, the faster the deposition speed of the diamond particles; when the first voltage is too high (such as higher than 25V), it is easy to make the diamond particles too enriched, and the particle size of the first crystal nuclei 32 formed is not uniform, so that the finally obtained protective layer 30 has a heterochromatic phenomenon. When the pressure of the first voltage is too low (such as lower than 15V), the deposition of diamond particles takes a long time, which affects the production efficiency, and it is easy to make the deposition of diamond particles insufficient, which affects the surface structure of the prepared protective layer 30, thereby affecting the self-cleaning, waterproof, oil-proof and anti-fingerprint performance of the cover plate 100. When the first voltage U1 is between 15V and 25V, the deposition rate of the diamond particles can be moderate, avoiding excessively slow deposition, which affects the production efficiency, and insufficient deposition of the diamond particles, which affects the surface structure of the protective layer 30. At the same time, Haikou can avoid excessive enrichment of the diamond particles, and the particle size of the first crystal nuclei 32 formed is not uniform, so that the finally obtained protective layer 30 has a different color phenomenon.
可选地,第一静电沉积的时间可以为但不限于为2min、2.5min、3min、3.5min、4min等。第一静电沉积时间过长(如高于4min)时,容易使金刚石颗粒过于富集,形成的第一晶核32的粒径不均匀,从而使最终得到的防护层30存在异色现象。第一静电沉积时间过短(如低于2min)时,金刚石颗粒沉积不够,影响制得的防护层30的表面结构,从而影响盖板100的自清洁、防水、防油污及防指纹性能。Optionally, the time for the first electrostatic deposition may be, but not limited to, 2 min, 2.5 min, 3 min, 3.5 min, 4 min and so on. When the first electrostatic deposition time is too long (for example, higher than 4 minutes), it is easy to enrich the diamond particles too much, and the particle size of the formed first crystal nuclei 32 is not uniform, so that the finally obtained protective layer 30 has heterochromatic phenomenon. When the first electrostatic deposition time is too short (for example, less than 2 minutes), the deposition of diamond particles is not enough, which affects the surface structure of the prepared protective layer 30, thus affecting the self-cleaning, waterproof, anti-oil and anti-fingerprint performance of the cover plate 100.
在一些实施例中,在将盖板本体10置于第一金刚石形核液中,进行第一静电沉积之前,所述方法还包括:将盖板本体10进行清洗。In some embodiments, before placing the cover body 10 in the first diamond nucleation solution for the first electrostatic deposition, the method further includes: cleaning the cover body 10 .
具体地,将盖板本体10置于清洗液例如酮类、碳酸钠、磷酸钠等中的至少一种中,于28KHZ的超声波环境中进行清洗,以去除盖板本体10表面的油污、灰尘等;接着用80℃以上(例如85℃、90℃等)的去离子水对盖板本体10进行漂洗,并烘干。Specifically, the cover body 10 is placed in at least one of cleaning solutions such as ketones, sodium carbonate, sodium phosphate, etc., and cleaned in an ultrasonic environment of 28KHZ to remove oil, dust, etc. on the surface of the cover body 10; then the cover body 10 is rinsed with deionized water above 80°C (such as 85°C, 90°C, etc.), and dried.
S303,在所述第一晶核32表面沉积类金刚石,以得到第一类金刚石子膜层;S303, depositing diamond-like carbon on the surface of the first crystal nucleus 32 to obtain a first diamond-like carbon sub-film layer;
可选地,将S302得到的具有第一晶核32的盖板本体10设置于HFCVD设备的样品台上,通入甲烷及氢气作为反应气体,在所述甲烷为第一流速,所述氢气为第二流速,所述反应气体的温度为第一温度,所述盖板本体10的温度为第二温度,于第一压力下采用热丝化学气相沉积方法,在所述第一晶核32表面沉积类金刚石,沉积第一时间,以得到第一类金刚石子膜层,其中,所述第一流速为30SCCM 至50SCCM,所述第二流速为650SCCM至750SCCM,所述第一温度为2450℃至2650℃,所述第二温度为750℃至850℃,第一压力为1.8KPa至2.2KPa,第一时间为50min至80min。Optionally, the cover plate body 10 with the first crystal nucleus 32 obtained in S302 is placed on the sample stage of the HFCVD equipment, and methane and hydrogen are introduced as reaction gases. The methane is the first flow rate, the hydrogen gas is the second flow rate, the temperature of the reaction gas is the first temperature, and the temperature of the cover plate body 10 is the second temperature. Under the first pressure, the hot wire chemical vapor deposition method is used to deposit diamond-like carbon on the surface of the first crystal nucleus 32 for a first time to obtain a first diamond-like sub-film. Layer, wherein, the first flow rate is 30SCCM to 50SCCM, the second flow rate is 650SCCM to 750SCCM, the first temperature is 2450°C to 2650°C, the second temperature is 750°C to 850°C, the first pressure is 1.8KPa to 2.2KPa, and the first time is 50min to 80min.
当氢气和甲烷通过喷环进入HFCVD设备的反应室,流经电加热高温状态的热丝时,在其表面和附近分解成原子态氢和多种碳氢基团,在热丝的高温作用下,碳氢基团提供了金刚石薄膜沉积的前驱物,附着在适当温度的盖板本体10的表面,这些基团在原子氢作用下发生反应,在盖板本体10表面成核、生长形成类金刚石薄膜,盖板本体10表面具有第一晶核32的位置,会以第一晶核32为中心富集类金刚石,从而在类金刚石薄膜的表面形成一个个近似半球形的凸起。可选地,承载盖板本体10的样品台内部通入冷却循环水起到冷却降温的作用,反应后的气体通过机械泵从出气口抽出。When hydrogen and methane enter the reaction chamber of the HFCVD equipment through the spray ring, and flow through the hot wire heated by electric heating, they decompose into atomic hydrogen and various hydrocarbon groups on the surface and nearby. Under the high temperature of the hot wire, the hydrocarbon groups provide the precursors for the deposition of the diamond film and attach to the surface of the cover body 10 at a suitable temperature. These groups react under the action of atomic hydrogen, nucleate and grow on the surface of the cover body 10 to form a diamond-like film. 2, the diamond-like carbon will be enriched with the first crystal nucleus 32 as the center, thereby forming approximately hemispherical protrusions on the surface of the diamond-like carbon film. Optionally, the inside of the sample stage carrying the cover plate body 10 is fed with cooling circulating water to cool down the temperature, and the reacted gas is pumped out from the gas outlet by a mechanical pump.
第一流速可以为30SCCM至50SCCM之间的任意数值。具体地,可以为但不限于为30SCCM、32SCCM、35SCCM、38SCCM、40SCCM、43SCCM、47SCCM、50SCCM等。甲烷的第一流速太小,盖板本体10表面沉积的类金刚石不够,降低形成的第一类金刚石子膜层的均一性,最终影响制得的防护层30的表面结构,从而影响防护层30的疏水性。甲烷的第一流速太高,则使得甲烷反应不完全,最终排出反应体系,提高盖板100的制备成本。当第一流速为30SCCM至50SCCM时,既可以使形成的第一类金刚石子膜层具有较好的均一性,又可以避免甲烷反应不完全直接排出造成浪费。The first flow rate can be any value between 30 SCCM and 50 SCCM. Specifically, it may be, but not limited to, 30SCCM, 32SCCM, 35SCCM, 38SCCM, 40SCCM, 43SCCM, 47SCCM, 50SCCM, etc. If the first flow rate of methane is too small, the diamond-like carbon deposited on the surface of the cover body 10 is not enough, which reduces the uniformity of the formed first diamond-like carbon sub-film layer, and finally affects the surface structure of the prepared protective layer 30, thereby affecting the hydrophobicity of the protective layer 30. If the first flow rate of methane is too high, the reaction of methane will be incomplete, and the methane will eventually be discharged from the reaction system, which increases the manufacturing cost of the cover plate 100 . When the first flow rate is 30SCCM to 50SCCM, the formed first diamond-like sub-film layer can have better uniformity, and the waste caused by incomplete methane reaction and direct discharge can be avoided.
第二流速可以为650SCCM至750SCCM之间的任意数值。具体地,可以为但不限于为650SCCM、660SCCM、670SCCM、680SCCM、690SCCM、700SCCM、710SCCM、720SCCM、730SCCM、740SCCM、750SCCM等。氢气的流速太低,影响第一类金刚石子膜层的沉积速度,降低生产效率。氢气流速太快,大量氢气未参与反应直接排出,造成浪费,提高原料成本。当第二流速为650SCCM至750SCCM时,既可以是第一类金刚石子膜层具有适中的沉积速度,又可以避免氢气反应不完全直接排出造成浪费。The second flow rate can be any value between 650SCCM and 750SCCM. Specifically, it may be, but not limited to, 650SCCM, 660SCCM, 670SCCM, 680SCCM, 690SCCM, 700SCCM, 710SCCM, 720SCCM, 730SCCM, 740SCCM, 750SCCM, etc. The flow rate of the hydrogen gas is too low, which affects the deposition speed of the first diamond-like sub-film layer and reduces the production efficiency. If the flow rate of hydrogen is too fast, a large amount of hydrogen is directly discharged without participating in the reaction, which causes waste and increases the cost of raw materials. When the second flow rate is 650SCCM to 750SCCM, the first diamond-like sub-film layer can have a moderate deposition rate, and the waste caused by incomplete hydrogen reaction and direct discharge can be avoided.
第一温度可以为2450℃至2650℃之间的任意数值。具体地,可以为但不限于为2450℃、2480℃、2500℃、2530℃、2550℃、2575℃、2600℃、2625℃、2650℃等。气体的温度太低,未达到甲烷的激活温度,甲烷与氢气无法发生反应,形成类金刚石结构,气体的温度太高,对设备要求高,且造成能源浪费。当第一温度为2450℃至2650℃时,可以使得甲烷被充分激活,与氢气发生反应,形成类金刚石结构,又可以避免能源浪费。The first temperature may be any value between 2450°C and 2650°C. Specifically, it may be, but not limited to, 2450°C, 2480°C, 2500°C, 2530°C, 2550°C, 2575°C, 2600°C, 2625°C, 2650°C, etc. The temperature of the gas is too low to reach the activation temperature of methane, and methane and hydrogen cannot react to form a diamond-like structure. The temperature of the gas is too high, which requires high equipment requirements and causes energy waste. When the first temperature is 2450° C. to 2650° C., methane can be fully activated to react with hydrogen to form a diamond-like structure, and energy waste can be avoided.
第二温度可以为但不限于为750℃、775℃、800℃、825℃、850℃等。第二温度太低,会降低第一金刚石子膜层在盖板本体10上的附着性,第二温度太高,盖板本体10容易发生变形,影响最终制得的盖板100的强度。当第二温度为750℃至850℃之间时,盖板本体10例如玻璃可以发生适当的软化,玻璃表面的二氧化硅可以与甲烷中的碳发生反应,形成C-Si键及C-O键,从而提高第一类金刚石子膜层在盖板本体10表面的附着性,最终提高防护层30在盖板本体10表面的附着性,又可以防止盖板本体10变形,强度降低。The second temperature may be, but not limited to, 750°C, 775°C, 800°C, 825°C, 850°C, and the like. If the second temperature is too low, the adhesion of the first diamond sub-film layer on the cover body 10 will be reduced; if the second temperature is too high, the cover body 10 will be easily deformed, which will affect the strength of the final cover 100 . When the second temperature is between 750°C and 850°C, the cover body 10 such as glass can be properly softened, and the silicon dioxide on the glass surface can react with the carbon in the methane to form C-Si bonds and C-O bonds, thereby improving the adhesion of the first diamond-like sub-film layer on the surface of the cover body 10, and finally improving the adhesion of the protective layer 30 on the surface of the cover body 10, and can prevent the cover body 10 from being deformed and reduced in strength.
第一压力可以为但不限于为1.8KPa、1.85KPa、1.9KPa、1.95KPa、2.0KPa、2.05KPa、2.1KPa、2.15KPa、2.2KPa等。第一压力越大,类金刚石的沉积越均匀。但是,第一压力太大,对设备要求较高,且有爆炸的风险。由于甲烷和氢气密度差异较大,甲烷容易下沉,第一压力太小,容易使甲烷与氢气的分布不均匀,最后使得类金刚石在盖板本体10表面沉积不均匀,最终影响制得的防护层30的表面结构,从而影响防护层30的疏水性。The first pressure may be, but not limited to, 1.8KPa, 1.85KPa, 1.9KPa, 1.95KPa, 2.0KPa, 2.05KPa, 2.1KPa, 2.15KPa, 2.2KPa, etc. The greater the first pressure, the more uniform the deposition of diamondoid. However, the first pressure is too high, the requirements for equipment are relatively high, and there is a risk of explosion. Due to the large difference in the density of methane and hydrogen, methane is easy to sink, the first pressure is too small, it is easy to make the distribution of methane and hydrogen uneven, and finally make the deposition of diamondoid on the surface of the cover body 10 uneven, and finally affect the surface structure of the prepared protective layer 30, thereby affecting the hydrophobicity of the protective layer 30.
第一时间可以为但不限于为50min、55min、60min、65min、70min、75min、80min等。第一时间太长,形成的第一类金刚石子膜层太厚,使得最终形成的防护层30的厚度较大,影响盖板100的透光率。第一时间太短,形成的第一类金刚石子膜层太薄,容易造成类金刚石分布不均匀,最终得到的防护层30产生异色现象。The first time may be, but not limited to, 50 min, 55 min, 60 min, 65 min, 70 min, 75 min, 80 min and so on. If the first time is too long, the first diamond-like sub-film layer formed is too thick, so that the thickness of the finally formed protective layer 30 is relatively large, which affects the light transmittance of the cover plate 100 . If the first time is too short, the formed first DLC sub-film layer is too thin, which will easily cause uneven distribution of DLC, and the finally obtained protective layer 30 will produce heterochromatic phenomenon.
S304,于第二金刚石形核液中,进行第二静电沉积,以在第一类金刚石子膜层的表面形成第二晶核36;以及S304, performing a second electrostatic deposition in the second diamond nucleation solution to form a second crystal nucleus 36 on the surface of the first diamond-like sub-film layer; and
可选地,于第二金刚石形核液中,进行第二静电沉积,以在第一类金刚石子膜层的表面形成第二晶核36,包括:Optionally, in the second diamond nucleation liquid, carry out the second electrostatic deposition, to form the second crystal nucleus 36 on the surface of the first diamond-like sub-film layer, comprising:
S3041,于金刚石平均粒径的范围为30nm至1μm、金刚石质量浓度的范围为0.02%至0.06%、PH值为2.5至4的第二金刚石形核液中,进行超声波;以及S3041, performing ultrasonic waves in the second diamond nucleation liquid whose average diamond particle size ranges from 30nm to 1 μm, the diamond mass concentration ranges from 0.02% to 0.06%, and the pH value ranges from 2.5 to 4; and
可选地,称取适量的金刚石平均粒径的范围为30nm至1μm,质量浓度为20%的金刚石形核原液,采用去离子水进行稀释,以配置成质量浓度为0.02%至0.06%的悬浮液胶体,加入2-(甲基丙烯酰氧基)乙基三甲基氯化铵作为稳定剂,加入草酸,调节PH值,以得到PH值为2.5至4之间的第二金刚石形核液;将S303得到的具有第一类金刚石子膜层的盖板本体10浸入第二金刚石形核液中,于28KHZ超声波环境中,浸泡30min。通过超声波震荡,可以更好的防止第二金刚石形核液中的金刚石发生沉降,可以使得第二金刚石形核液中的金刚石可以更好的分散,从而使得最终得到的第二晶核36可以更均匀地分散于第一类金刚石子膜层的表面。配置第二金刚石形核液时,加入稳定剂,可以使得第二金刚石形核液的PH值可以更好的稳定在2.5至4之间,从而使得金刚石颗粒可以均匀、稳定的分散于第二金刚石形核液中。可选地,第二晶核36为第二金刚石晶核。Optionally, take an appropriate amount of diamond nucleation stock solution with a diamond average particle size ranging from 30nm to 1 μm and a mass concentration of 20%, dilute it with deionized water to configure a suspension colloid with a mass concentration of 0.02% to 0.06%, add 2-(methacryloyloxy)ethyltrimethylammonium chloride as a stabilizer, add oxalic acid, and adjust the pH value to obtain a second diamond nucleation solution with a pH value between 2.5 and 4; The cover body 10 of the diamond-like sub-film layer is immersed in the second diamond nucleation solution, and soaked in a 28KHZ ultrasonic environment for 30 minutes. By ultrasonic vibration, the diamond in the second diamond nucleation liquid can be better prevented from settling, and the diamond in the second diamond nucleation liquid can be better dispersed, so that the second crystal nuclei 36 finally obtained can be more evenly dispersed on the surface of the first diamond-like sub-film layer. When configuring the second diamond nucleation liquid, adding a stabilizer can make the pH value of the second diamond nucleation liquid better stable between 2.5 and 4, so that diamond particles can be uniformly and stably dispersed in the second diamond nucleation liquid. Optionally, the second crystal nucleus 36 is a second diamond crystal nucleus.
可选地,第二金刚石形核液中的金刚石的平均粒径可以为但不限于为30nm、50nm、80nm、100nm、150nm、200nm、300nm、400nm、500nm、600nm、700nm、800nm、900nm、1μm等。形成荷叶仿生结构,最后形成的子凸起33的分布密度不能太高,也不能太低,因此,第二金刚石形核液中平均粒径太大或太小均无法形成荷叶仿生结构,当第二金刚石形核液中的金刚石的平均粒径为30nm至1μm时,可以很好的形成荷叶仿生结构,从而使防护层30具有良好的疏水性。Optionally, the average particle size of the diamond in the second diamond nucleation solution can be, but not limited to, 30nm, 50nm, 80nm, 100nm, 150nm, 200nm, 300nm, 400nm, 500nm, 600nm, 700nm, 800nm, 900nm, 1 μm, etc. To form a lotus leaf biomimetic structure, the distribution density of the finally formed sub-protrusions 33 cannot be too high or too low. Therefore, the average particle size in the second diamond nucleation liquid is too large or too small to form a lotus leaf biomimetic structure. When the average particle size of diamond in the second diamond nucleation liquid is 30nm to 1 μm, the lotus leaf biomimetic structure can be formed well, so that the protective layer 30 has good hydrophobicity.
可选地,第二金刚石形核液中金刚石的质量浓度可以为0.02%至0.06%之间的数值,具体地,可以为但不限于为0.02%、0.03%、0.04%、0.05%、0.06%。第二金刚石形核液的浓度太低,容易使得最终形成的第二晶核36在第一类金刚石子膜层表面的分布不足;第二金刚石形核液的浓度太高,金刚石容易在第一类金刚石子膜层表面局部富集,使得形成的第二晶核36的大小不一,影响最终制得的防护层30表面的荷叶仿生结构,从而影响防护层30的疏水性。当第二金刚石形核液中第二金刚石的浓度为0.02%至0.06%时,既可以使第一类金刚石子膜层表面形成充足的第二晶核36,又可以很好的避免金刚石富集造成的第二晶核36尺寸大小不一。Optionally, the mass concentration of diamond in the second diamond nucleation solution can be a value between 0.02% and 0.06%, specifically, but not limited to 0.02%, 0.03%, 0.04%, 0.05%, 0.06%. If the concentration of the second diamond nucleation liquid is too low, it is easy to cause insufficient distribution of the second crystal nucleus 36 formed on the surface of the first diamond-like sub-film layer; if the concentration of the second diamond nucleation liquid is too high, diamonds are easily locally enriched on the surface of the first diamond-like sub-film layer, so that the size of the second crystal nucleus 36 formed is different, which affects the lotus leaf bionic structure on the surface of the protective layer 30 that is finally prepared, thereby affecting the hydrophobicity of the protective layer 30. When the concentration of the second diamond in the second diamond nucleation liquid is 0.02% to 0.06%, sufficient second crystal nuclei 36 can be formed on the surface of the first diamond-like sub-film layer, and the size of the second crystal nuclei 36 caused by diamond enrichment can be well avoided.
可选地,第二金刚石形核液的PH值2.5至4之间的任意数值,具体地,可以为但不限于为2.5、3、3.5、4等。当第二一金刚石形核液的PH值处于这个范围时,可以使得第二金刚石形核液中金刚石可以更稳定、均匀地分散。Optionally, the pH value of the second diamond nucleation liquid is any value between 2.5 and 4, specifically, it may be but not limited to 2.5, 3, 3.5, 4, etc. When the pH value of the second diamond nucleation liquid is within this range, the diamond in the second diamond nucleation liquid can be dispersed more stably and uniformly.
S3042,于第二电压U2的范围为6V≤U2≤10V下进行第二静电沉积,第二静电沉积的时间范围为60s至90s,以在第一类金刚石子膜层的表面形成第二晶核36。S3042, perform the second electrostatic deposition under the second voltage U2 in the range of 6V≤U2≤10V, and the time range of the second electrostatic deposition is in the range of 60s to 90s, so as to form the second crystal nuclei 36 on the surface of the first DLC sub-film layer.
可选地,进行通电,以使得第二金刚石形核液中的金刚石颗粒均匀地沉积于第一类金刚石子膜层的表面,以使得第一类金刚石子膜层的表面分散有一个个的第二晶核36。Optionally, electrification is performed so that the diamond particles in the second diamond nucleation liquid are evenly deposited on the surface of the first diamond-like sub-film layer, so that the surface of the first diamond-like sub-film layer is dispersed with second crystal nuclei 36 one by one.
可选地,第二电压U2可以为但不限于为6V、6.5V、7V、7.5V、8V、8.5V、9V、9.5V、10V等。第二电压U2的电压越高,金刚石颗粒沉积的速度越快;第二电压过高(如高于10V)时,容易使金刚石颗粒过于富集,形成的第二晶核36的粒径不均匀,从而使最终得到的防护层30存在异色现象。第二电压过低(如低于6V)时,金刚石颗粒沉积需要较长的时间,影响生产效率,且容易使金刚石颗粒沉积不够,影响制得的防护层30的表面结构,从而影响盖板100的自清洁、防水、防油污及防指纹性能。Optionally, the second voltage U2 may be but not limited to 6V, 6.5V, 7V, 7.5V, 8V, 8.5V, 9V, 9.5V, 10V and so on. The higher the voltage of the second voltage U2, the faster the deposition speed of the diamond particles; when the second voltage is too high (such as higher than 10V), it is easy to enrich the diamond particles too much, and the particle size of the second crystal nuclei 36 formed is uneven, so that the finally obtained protective layer 30 has a heterochromatic phenomenon. When the second voltage is too low (such as lower than 6V), the deposition of diamond particles takes a long time, which affects the production efficiency, and it is easy to make the deposition of diamond particles insufficient, which affects the surface structure of the prepared protective layer 30, thereby affecting the self-cleaning, waterproof, anti-oil and anti-fingerprint performance of the cover plate 100.
可选地,第二静电沉积的时间可以为但不限于为60s、65s、70s、75s、80s、85s、90s等。第二静电沉积时间过长(如高于90s)时,容易使金刚石颗粒过于富集,形成的第二晶核36的粒径不均匀,从而使最终得到的防护层30存在异色现象。第二静电沉积时间过短(如低于60s)时,金刚石颗粒沉积不够,影响制得的防护层30的表面结构,从而影响盖板100的自清洁、防水、防油污及防指纹性能。Optionally, the time for the second electrostatic deposition may be, but not limited to, 60s, 65s, 70s, 75s, 80s, 85s, 90s and so on. When the second electrostatic deposition time is too long (for example higher than 90s), it is easy to enrich the diamond particles too much, and the particle size of the formed second crystal nuclei 36 is not uniform, so that the finally obtained protective layer 30 has heterochromatic phenomenon. When the second electrostatic deposition time is too short (for example, less than 60s), the deposition of diamond particles is not enough, which affects the surface structure of the prepared protective layer 30, thereby affecting the self-cleaning, waterproof, oil-proof and anti-fingerprint properties of the cover plate 100.
S305,在第二晶核36表面沉积类金刚石,以得到第二类金刚石子膜层,其中,所述防护层30包括第一类金刚石子膜层及第二类金刚石子膜层,所述第一类金刚石子膜层及所述第二类金刚石子膜层。S305, deposit diamond-like carbon on the surface of the second crystal nucleus 36 to obtain a second diamond-like sub-film layer, wherein the protective layer 30 includes a first diamond-like sub-film layer and a second diamond-like sub-film layer, the first diamond-like sub-film layer and the second diamond-like sub-film layer.
可选地,将S304得到的具有第一类金刚石子膜层的盖板本体设置于HFCVD设备,通入甲烷及氢气作为反应气体,在所述甲烷为第三流速,所述氢气为第四流速,所述反应气体的温度为第三温度,所述盖板本体10的温度为第四温度,于第二压力下采用热丝化学气相沉积方法,在所述第二晶核36表面沉积类金刚石,沉积第二时间,以得到第二类金刚石子膜层,其中,所述第三流速为30SCCM至50SCCM,所述第四流速为650SCCM至750SCCM,所述第三温度为2450℃至2650℃,所述第四温度为750℃至850℃,第二压力为1.8KPa至2.2KPa,第二时间为50min至80min。Optionally, the cover plate body with the first diamond-like sub-film layer obtained in S304 is set in the HFCVD equipment, and methane and hydrogen are fed as reaction gases. The methane is the third flow rate, the hydrogen gas is the fourth flow rate, the temperature of the reaction gas is the third temperature, and the temperature of the cover plate body 10 is the fourth temperature. The hot-wire chemical vapor deposition method is used under the second pressure. The diamond-like carbon is deposited on the surface of the second crystal nucleus 36 for a second time to obtain a second diamond-like sub-film layer, wherein, The third flow rate is 30SCCM to 50SCCM, the fourth flow rate is 650SCCM to 750SCCM, the third temperature is 2450°C to 2650°C, the fourth temperature is 750°C to 850°C, the second pressure is 1.8KPa to 2.2KPa, and the second time is 50min to 80min.
当氢气和甲烷通过喷环进入HFCVD设备的反应室,流经电加热高温状态的热丝时,在其表面和附近分解成原子态氢和多种碳氢基团,在热丝的高温作用下,碳氢基团提供了金刚石薄膜沉积的前驱物,附着在适当温度的第一类金刚石子膜层的表面,这些基团在原子氢作用下发生反应,在第一类金刚石子膜层表面成核、生长形成第二类精钢石子膜层。第一类金刚石子膜层的表面具有第二晶核36的位置,会以第二晶核36为中心富集类金刚石,从而最终得到的第二类金刚石子膜层的表面形成一个个近似半球形的凸起。可选地,承载盖板本体10的样品台内部通入冷却循环水起到冷却降温的作用,反应后的气体通过机械泵从出气口抽出。When hydrogen and methane enter the reaction chamber of the HFCVD equipment through the spray ring and flow through the hot wire heated by electric heating, they decompose into atomic hydrogen and various hydrocarbon groups on the surface and nearby. Under the high temperature of the hot wire, the hydrocarbon groups provide the precursors for the deposition of the diamond film and adhere to the surface of the first diamond-like sub-film layer at an appropriate temperature. The surface of the first diamond-like sub-film layer has the position of the second crystal nucleus 36, and the diamond-like carbon will be enriched with the second crystal nucleus 36 as the center, so that the surface of the second diamond-like carbon-like film layer finally obtained forms approximately hemispherical protrusions. Optionally, the inside of the sample stage carrying the cover plate body 10 is fed with cooling circulating water to cool down the temperature, and the reacted gas is pumped out from the gas outlet by a mechanical pump.
第三流速可以为30SCCM至50SCCM之间的任意数值。具体地,可以为但不限于为30SCCM、32SCCM、35SCCM、38SCCM、40SCCM、43SCCM、47SCCM、50SCCM等。甲烷的第三流速太小,盖板本体10表面沉积的类金刚石不够,降低形成的第二类金刚石子膜层的均一性,最终影响制得的防护层30的表面结构,从而影响防护层30的疏水性。甲烷的第三流速太高,则使得甲烷反应不完全,最终排出反应体系,提高盖板100的制备成本。当第三流速为30SCCM至50SCCM时,既可以使形成的第二类金刚石子膜层具有较好的均一性,又可以避免甲烷反应不完全直接排出造成浪费。The third flow rate can be any value between 30 SCCM and 50 SCCM. Specifically, it may be, but not limited to, 30SCCM, 32SCCM, 35SCCM, 38SCCM, 40SCCM, 43SCCM, 47SCCM, 50SCCM, etc. If the third flow rate of methane is too small, the diamond-like carbon deposited on the surface of the cover body 10 is not enough, which reduces the uniformity of the formed second diamond-like carbon sub-film layer, and finally affects the surface structure of the prepared protective layer 30, thereby affecting the hydrophobicity of the protective layer 30. If the third flow rate of methane is too high, the reaction of methane will be incomplete, and the methane will eventually be discharged from the reaction system, which increases the manufacturing cost of the cover plate 100 . When the third flow rate is 30SCCM to 50SCCM, it can not only make the formed second diamond-like sub-film layer have better uniformity, but also avoid waste caused by incomplete methane reaction and direct discharge.
第四流速可以为650SCCM至750SCCM之间的任意数值。具体地,可以为但不限于为650SCCM、660SCCM、670SCCM、680SCCM、690SCCM、700SCCM、710SCCM、720SCCM、730SCCM、740SCCM、750SCCM等。氢气的流速太低,影响第二类金刚石子膜层的沉积速度,降低生产效率。氢气流速太快,大量氢气未参与反应直接排出,造成浪费,提高原料成本。当第四流速为650SCCM至750SCCM时,既可以是第二类金刚石子膜层具有适中的沉积速度,又可以避免氢气反应不完全直接排出造成浪费。The fourth flow rate can be any value between 650SCCM and 750SCCM. Specifically, it may be, but not limited to, 650SCCM, 660SCCM, 670SCCM, 680SCCM, 690SCCM, 700SCCM, 710SCCM, 720SCCM, 730SCCM, 740SCCM, 750SCCM, etc. The flow rate of hydrogen gas is too low, which will affect the deposition speed of the second diamond-like sub-film layer and reduce the production efficiency. If the flow rate of hydrogen is too fast, a large amount of hydrogen is directly discharged without participating in the reaction, which causes waste and increases the cost of raw materials. When the fourth flow rate is 650SCCM to 750SCCM, the second diamond-like sub-film layer can have a moderate deposition rate, and the waste caused by incomplete hydrogen reaction and direct discharge can be avoided.
第三温度可以为2450℃至2650℃之间的任意数值。具体地,可以为但不限于为2450℃、2480℃、2500℃、2530℃、2550℃、2575℃、2600℃、2625℃、2650℃等。气体的温度太低,未达到甲烷的激活温度,甲烷与氢气无法发生反应,形成类金刚石结构,气体的温度太高,对设备要求高,且造成能源浪费。当第三温度为2450℃至2650℃时,可以使得甲烷被充分激活,与氢气发生反应,形成类金刚石结构,又可以避免能源浪费。The third temperature may be any value between 2450°C and 2650°C. Specifically, it may be, but not limited to, 2450°C, 2480°C, 2500°C, 2530°C, 2550°C, 2575°C, 2600°C, 2625°C, 2650°C, etc. The temperature of the gas is too low to reach the activation temperature of methane, and methane and hydrogen cannot react to form a diamond-like structure. The temperature of the gas is too high, which requires high equipment requirements and causes energy waste. When the third temperature is 2450° C. to 2650° C., methane can be fully activated to react with hydrogen to form a diamond-like structure, and energy waste can be avoided.
第四温度可以为但不限于为750℃、775℃、800℃、825℃、850℃等。第四温度太低,会降低第二金刚石子膜层的附着性,第四温度太高,盖板本体10容易发生变形,影响最终制得的盖板100的强度。当第四温度为750℃至850℃之间时,可以使第二类金刚石子膜层在第一类金刚石子膜层表面的附着性,最终提高防护层30在盖板本体10表面的附着性,又可以防止盖板本体10变形,强度降低。The fourth temperature may be, but not limited to, 750°C, 775°C, 800°C, 825°C, 850°C, and the like. If the fourth temperature is too low, the adhesion of the second diamond sub-film layer will be reduced; if the fourth temperature is too high, the cover body 10 will be easily deformed, which will affect the strength of the final cover 100 . When the fourth temperature is between 750°C and 850°C, the adhesion of the second diamond-like sub-film layer on the surface of the first diamond-like sub-film layer can be improved, and finally the adhesion of the protective layer 30 on the surface of the cover body 10 can be improved, and the cover body 10 can be prevented from being deformed and its strength reduced.
第二压力可以为但不限于为1.8KPa、1.85KPa、1.9KPa、1.95KPa、2.0KPa、2.05KPa、2.1KPa、2.15KPa、2.2KPa等。第二压力越大,类金刚石的沉积越均匀。但是,第二压力太大,对设备要求较高,且有爆炸的风险。由于甲烷和氢气密度差异较大,甲烷容易下沉,第二压力太小,容易使甲烷与氢气的分布不均匀,最后使得类金刚石在盖板本体10表面沉积不均匀,最终影响制得的防护层30的表面结构,从而影响防护层30的疏水性。The second pressure may be, but not limited to, 1.8KPa, 1.85KPa, 1.9KPa, 1.95KPa, 2.0KPa, 2.05KPa, 2.1KPa, 2.15KPa, 2.2KPa, etc. The greater the second pressure, the more uniform the deposition of diamondoid. However, the second pressure is too high, which requires high equipment and has the risk of explosion. Due to the large difference in the density of methane and hydrogen, methane is easy to sink, and the second pressure is too small, which easily makes the distribution of methane and hydrogen uneven, and finally makes the deposition of diamondoid on the surface of the cover body 10 uneven, and finally affects the surface structure of the prepared protective layer 30, thereby affecting the hydrophobicity of the protective layer 30.
第二时间可以为但不限于为50min、55min、60min、65min、70min、75min、80min等。第二时间太长,形成的第一类金刚石子膜层太厚,使得最终形成的防护层30的厚度较大,影响盖板100的透光率。第二时间太短,形成的第一类金刚石子膜层太薄,容易造成类金刚石分布不均匀,最终得到的防护层30产生异色现象。The second time may be, but not limited to, 50 min, 55 min, 60 min, 65 min, 70 min, 75 min, 80 min and so on. If the second time is too long, the first diamond-like sub-film layer formed is too thick, so that the thickness of the finally formed protective layer 30 is relatively large, which affects the light transmittance of the cover plate 100 . If the second time is too short, the formed first DLC sub-film layer is too thin, which may easily cause uneven distribution of DLC, and the finally obtained protective layer 30 will produce heterochromatic phenomenon.
本实施例的制备方法通过两次静电沉积,两次热丝化学气相沉积,从而在盖板本体10表面形成具有高低起伏类似荷叶仿生结构的防护层30(即类金刚石膜层),从而使得防护层30的表面的水接触角θ1的范围为120°≤θ1≤130°,具有良好的疏水性,从而使得制得的盖板100具有良好的防水、防污及防指纹性能,且具有较高的硬度及良好的耐磨性、不易磨损,经过长时间的使用,仍具有良好的自清洁、防水、防污及防指纹等各项性能。The preparation method of this embodiment uses two times of electrostatic deposition and two times of hot wire chemical vapor deposition to form a protection layer 30 (that is, a diamond-like film layer) having a bionic structure similar to a lotus leaf with ups and downs on the surface of the cover body 10, so that the range of the water contact angle θ1 on the surface of the protection layer 30 is 120°≤θ1≤130°, and has good hydrophobicity, so that the prepared cover plate 100 has good waterproof, antifouling and anti-fingerprint properties, and has high hardness and good wear resistance. , not easy to wear, after a long time of use, it still has good self-cleaning, waterproof, anti-fouling and anti-fingerprint and other properties.
本实施例与上述实施例相同特征部分的详细描述请参见上述实施例,在此不再赘述。For a detailed description of the same features of this embodiment and the above embodiment, please refer to the above embodiment, and details are not repeated here.
请参见图11,本申请实施例还提供一种盖板100的制备方法,其包括:Please refer to FIG. 11 , the embodiment of the present application also provides a method for preparing a cover plate 100, which includes:
S401,提供盖板本体10;S401, providing the cover body 10;
S402,将所述盖板本体10于第一金刚石形核液中,进行第一静电沉积,以在所述盖板本体10表 面形成第一晶核32;S402, performing a first electrostatic deposition on the cover body 10 in the first diamond nucleation solution, so as to form a first crystal nucleus 32 on the surface of the cover body 10;
S403,在所述第一晶核32表面沉积类金刚石,以得到第一类金刚石子膜层;S403, depositing diamond-like carbon on the surface of the first crystal nucleus 32 to obtain a first diamond-like carbon sub-film layer;
关于步骤S401至步骤S403的详细描述请参见上述实施例对应部分的描述,在此不再赘述。For the detailed description of step S401 to step S403, please refer to the description of the corresponding part of the above embodiment, and details are not repeated here.
S404,于氧化溶液中进行氧化处理。S404, performing oxidation treatment in an oxidation solution.
可选地,于70℃至90℃的氧化溶液中,浸泡7min至17min,进行氧化处理,以去除第一类金刚石子膜层表面的杂质,并在第一类金刚石子膜层的表面形成钝化层;其中,所述氧化溶液为包括双氧水及氨水的水溶液。接着于28KHZ超声波环境中,采用中性清洗液如酮类进行清洗10min至20min,烘干。Optionally, immerse in an oxidation solution at 70° C. to 90° C. for 7 minutes to 17 minutes, and perform oxidation treatment to remove impurities on the surface of the first diamond-like sub-film layer and form a passivation layer on the surface of the first diamond-like sub-film layer; wherein the oxidation solution is an aqueous solution including hydrogen peroxide and ammonia water. Then, in a 28KHZ ultrasonic environment, use a neutral cleaning solution such as ketone to clean for 10 to 20 minutes, and then dry.
可选地,氧化溶液的温度可以为但不限于为70℃、72℃、75℃、78℃、80℃、83℃、85℃、88℃、90℃。氧化处理的时间可以为但不限于为7min、9min、11min、13min、15min、17min等。Optionally, the temperature of the oxidation solution may be, but not limited to, 70°C, 72°C, 75°C, 78°C, 80°C, 83°C, 85°C, 88°C, 90°C. The oxidation treatment time may be, but not limited to, 7 min, 9 min, 11 min, 13 min, 15 min, 17 min and so on.
可选地,所述氧化溶液包括体积比为(0.5至1.5):(0.5至1.5):(3至7)的30wt%的双氧水水溶液、氨水及水。在一具体实施例中,氧化溶液中,30wt%的双氧水水溶液、氨水及水的体积比为1:1:5。Optionally, the oxidation solution includes 30wt% hydrogen peroxide aqueous solution, ammonia water and water in a volume ratio of (0.5 to 1.5):(0.5 to 1.5):(3 to 7). In a specific embodiment, in the oxidation solution, the volume ratio of 30 wt % hydrogen peroxide aqueous solution, ammonia water and water is 1:1:5.
S405,于第二金刚石形核液中,进行第二静电沉积,以在第一类金刚石子膜层的表面形成第二晶核36;以及S405, performing a second electrostatic deposition in the second diamond nucleation solution to form a second crystal nucleus 36 on the surface of the first diamond-like sub-film layer; and
S406,在第二晶核36表面沉积类金刚石,以得到第二类金刚石子膜层,其中,所述防护层30包括第一类金刚石子膜层及第二类金刚石子膜层。S406, depositing diamond-like carbon on the surface of the second crystal nucleus 36 to obtain a second diamond-like sub-film layer, wherein the protection layer 30 includes a first diamond-like carbon sub-film layer and a second diamond-like carbon sub-film layer.
关于步骤S405及步骤S406的详细描述请参见上述实施例对应部分的描述,在此不再赘述。For the detailed description of step S405 and step S406, please refer to the description of the corresponding part of the above embodiment, and details are not repeated here.
本实施例与上述实施例相同特征部分的详细描述请参见上述实施例,在此不再赘述。For a detailed description of the same features of this embodiment and the above embodiment, please refer to the above embodiment, and details are not repeated here.
请参见图12,本申请实施例还提供一种盖板100的制备方法,其包括:Please refer to FIG. 12 , the embodiment of the present application also provides a method for preparing a cover plate 100, which includes:
S501,提供盖板本体10;S501, providing the cover body 10;
S502,将所述盖板本体10于第一金刚石形核液中,进行第一静电沉积,以在所述盖板本体10表面形成第一晶核32;S502, performing a first electrostatic deposition on the cover body 10 in a first diamond nucleation solution, so as to form a first crystal nucleus 32 on the surface of the cover body 10;
S503,在所述第一晶核32表面沉积类金刚石,以得到第一类金刚石子膜层;S503, depositing diamond-like carbon on the surface of the first crystal nucleus 32 to obtain a first diamond-like carbon sub-film layer;
S504,于氧化溶液中进行氧化处理。S504, performing oxidation treatment in an oxidation solution.
S505,于第二金刚石形核液中,进行第二静电沉积,以在第一类金刚石子膜层的表面形成第二晶核36;以及S505, performing a second electrostatic deposition in the second diamond nucleation solution to form a second crystal nucleus 36 on the surface of the first diamond-like sub-film layer; and
S506,在第二晶核36表面沉积类金刚石,以得到第二类金刚石子膜层,其中,所述防护层30包括第一类金刚石子膜层及第二类金刚石子膜层。S506, depositing diamond-like carbon on the surface of the second crystal nucleus 36 to obtain a second diamond-like sub-film layer, wherein the protection layer 30 includes a first diamond-like carbon sub-film layer and a second diamond-like carbon sub-film layer.
关于步骤S501及步骤S506的详细描述请参见上述实施例对应部分的描述,在此不再赘述。For the detailed description of step S501 and step S506, please refer to the description of the corresponding part of the above embodiment, and details are not repeated here.
S507,在所述防护层30远离所述盖板本体10的表面形成保护层50。S507, forming a protective layer 50 on the surface of the protective layer 30 away from the cover body 10 .
可选地,在防护层30的表面用等离子进行轰击,以去除防护层30表面的氧化层,并使防护层30表面的达因值提高至60Dyn以上(例如60Dyn、63Dyn、65Dyn等),以提升保护层30在防护层30上的附着力。接着,用干燥的正己烷覆盖防护层30表面,加入全氟癸基三氯硅烷(3mol/L),在氮气环境中反应5h至7h,以在防护层30的表面形成一层硅氟化物(保护层50),结束时在氮气氛围中去除反应溶液,用已烷进行冲洗几次,在温和的氮气进行干燥,得到保护层50,其中,保护层包括硅氟化物。Optionally, the surface of the protective layer 30 is bombarded with plasma to remove the oxide layer on the surface of the protective layer 30, and the dyne value on the surface of the protective layer 30 is increased to more than 60Dyn (such as 60Dyn, 63Dyn, 65Dyn, etc.), so as to enhance the adhesion of the protective layer 30 on the protective layer 30. Next, cover the surface of the protective layer 30 with dry n-hexane, add perfluorodecyltrichlorosilane (3mol/L), and react in a nitrogen atmosphere for 5h to 7h to form a layer of silicon fluoride (protective layer 50) on the surface of the protective layer 30. At the end, remove the reaction solution in a nitrogen atmosphere, wash it several times with hexane, and dry it in mild nitrogen to obtain a protective layer 50, wherein the protective layer includes silicon fluoride.
本实施例与上述实施例相同特征部分的详细描述请参见上述实施例,在此不再赘述。For a detailed description of the same features of this embodiment and the above embodiment, please refer to the above embodiment, and details are not repeated here.
以下通过具体实施例对本申请实施例的盖板100作进一步的说明。The cover plate 100 of the embodiment of the present application will be further described below through specific examples.
实施例1Example 1
本实施例的盖板100通过以下步骤进行制备:The cover plate 100 of this embodiment is prepared through the following steps:
1)提供盖板本体10,所述盖板本体10为玻璃基材;1) Provide a cover plate body 10, the cover plate body 10 is a glass substrate;
2)将所述玻璃基材于第一金刚石形核液中,于28KHZ超声波环境中超声波振动30min,于第一电压为20V下进行第一静电沉积3min,以在所述盖板本体10表面形成第一晶核32;其中,第一金刚石形核液中,金刚石颗粒的平均粒径为2.5μm,金刚石的质量浓度为0.05%,PH值为5;2) Put the glass base material in the first diamond nucleation solution, ultrasonically vibrate for 30 minutes in a 28KHZ ultrasonic environment, and carry out the first electrostatic deposition for 3 minutes at a first voltage of 20V to form a first crystal nucleus 32 on the surface of the cover body 10; wherein, in the first diamond nucleation solution, the average particle diameter of diamond particles is 2.5 μm, the mass concentration of diamond is 0.05%, and the pH value is 5;
3)将2)放入HFCVD设备,通入甲烷及氢气作为反应气体,甲烷流速为40SCCM,氢气流速为 700SCCM,第一压力为2.0Kpa,所述反应气体的温度为2500℃,所述玻璃基材的温度为800℃,反应1h,以在玻璃基材的表面形成第一类金刚石子膜层;3) 2) is put into HFCVD equipment, feed methane and hydrogen as reaction gas, methane flow rate is 40SCCM, hydrogen flow rate is 700SCCM, first pressure is 2.0Kpa, the temperature of described reaction gas is 2500 DEG C, the temperature of described glass substrate is 800 DEG C, reaction 1h, to form the first diamond-like carbon film layer on the surface of glass substrate;
4)将具有第一类金刚石子膜层的玻璃基材,于第二金刚石形核液中,于28KHZ超声波环境中超声波振动30min,于第二电压为8V下进行第二静电沉积80s,以在所述第一类金刚石子膜层表面形成第二晶核36;其中,第二金刚石形核液中,金刚石颗粒的平均粒径为200nm,金刚石的质量浓度为0.05%,PH值为3;4) The glass substrate with the first diamond-like sub-film layer is ultrasonically vibrated for 30 minutes in a 28KHZ ultrasonic environment in the second diamond nucleation liquid, and the second electrostatic deposition is carried out for 80 s at a second voltage of 8V to form a second crystal nucleus 36 on the surface of the first diamond-like sub-film layer; wherein, in the second diamond nucleation liquid, the average particle diameter of the diamond particles is 200nm, the mass concentration of diamond is 0.05%, and the pH value is 3;
5)将4)放入HFCVD设备,通入甲烷及氢气作为反应气体,甲烷流速为40SCCM,氢气流速为700SCCM,第二压力为2.0Kpa,所述反应气体的温度为2500℃,所述盖板本体10的温度为800℃,反应1h,以在第一类金刚石子膜层的表面形成第二类金刚石子膜层,以形成防护层30,防护层30包括第一类金刚石子膜层及第二类金刚石子膜层。5) Put 4) into HFCVD equipment, feed methane and hydrogen as reaction gases, the flow rate of methane is 40SCCM, the flow rate of hydrogen is 700SCCM, the second pressure is 2.0Kpa, the temperature of the reaction gas is 2500°C, the temperature of the cover plate body 10 is 800°C, and react for 1h to form a second diamond-like sub-film layer on the surface of the first diamond-like sub-film layer to form a protective layer 30, and the protective layer 30 includes the first diamond-like sub-film layer and the second diamond-like sub-film layer.
实施例得到的盖板100的防护层30表面的显微镜形貌图如图13及图14所示。其中,图13是本实施例的防护层30的表面形貌的显微镜图,图14是图13中方框的放大图。经显微镜测量得到,防护层30的厚度为5μm,凸起结构31的d1为3μm至5μm,子凸起311的d2的范围为50nm至100nm。采用水接触角测量仪测得防护层30表面的水接触角为125°。The microscope topography images of the surface of the protective layer 30 of the cover plate 100 obtained in the embodiment are shown in FIG. 13 and FIG. 14 . Wherein, FIG. 13 is a micrograph of the surface topography of the protective layer 30 of this embodiment, and FIG. 14 is an enlarged view of the box in FIG. 13 . According to microscope measurement, the thickness of the protection layer 30 is 5 μm, the d1 of the protrusion structure 31 is 3 μm to 5 μm, and the d2 of the sub-protrusions 311 is in the range of 50 nm to 100 nm. The water contact angle on the surface of the protective layer 30 measured by a water contact angle measuring instrument is 125°.
对比例1Comparative example 1
本对比例采用实施例1的盖板本体10作为盖板100进行对比,其中,盖板本体10为玻璃基材。In this comparative example, the cover body 10 of Example 1 is used as the cover 100 for comparison, wherein the cover body 10 is a glass substrate.
对实施例1及对比例2的盖板100进行如下性能测试:The following performance tests were carried out on the cover plate 100 of Example 1 and Comparative Example 2:
1)可见-紫外光透过率及红外光透过率测试,测试结构如图15及图16所示。1) Visible-ultraviolet light transmittance and infrared light transmittance test, the test structure is shown in Figure 15 and Figure 16.
2)耐磨性测试:对实施例1具有防护层30的表面及对比例1的盖板100的表面,采用170#锆砂,在压力170Kpa,喷嘴与盖板100的角度为45°,喷嘴与盖板100的距离为5cm,进行喷砂1min,采用显微镜观察喷砂后的表面形貌,测试结果如图17及图18所示。2) Abrasion resistance test: For the surface with the protective layer 30 in Example 1 and the surface of the cover plate 100 in Comparative Example 1, 170# zircon sand was used. At a pressure of 170Kpa, the angle between the nozzle and the cover plate 100 was 45°, and the distance between the nozzle and the cover plate 100 was 5 cm. Sandblasting was carried out for 1 minute, and the surface morphology after sandblasting was observed with a microscope. The test results are shown in Figures 17 and 18.
由图15可知,实施例1的盖板100在可见光、紫外光波段范围内的透过率相较于对比例1的盖板100在可见光、紫外光波段范围内的透过率略有降低,但仍具有较高的透过率,在225nm至800nm之间的透过率均在80%以上。这说明本申请的防护层30不会影响盖板100的在可见-紫外光波段的透过率,应用于电子设备的显示屏的保护盖时,不会对显示屏的显示效果产生影响。It can be seen from FIG. 15 that the transmittance of the cover plate 100 of Example 1 in the range of visible light and ultraviolet light is slightly lower than that of the cover plate 100 of Comparative Example 1 in the range of visible light and ultraviolet light, but still has a relatively high transmittance, and the transmittance between 225nm and 800nm is above 80%. This shows that the protective layer 30 of the present application will not affect the transmittance of the cover plate 100 in the visible-ultraviolet band, and will not affect the display effect of the display screen when applied to the protective cover of the display screen of electronic equipment.
由图16可知,实施例1的盖板100在红外光波段的透过率相较于对比例1的盖板100在红外光波段的透过率略有增加,在1000nm至3500nm之间的透过率均在80%以上。这说明本申请的防护层30不会影响盖板100的在红外波段的透过率,应用于电子设备时,不会对保护盖下红外传感器的检测精度产生影响。It can be seen from FIG. 16 that the transmittance of the cover plate 100 of Example 1 in the infrared light band is slightly higher than that of the cover plate 100 of Comparative Example 1 in the infrared light band, and the transmittance between 1000nm and 3500nm is above 80%. This shows that the protective layer 30 of the present application will not affect the transmittance of the cover plate 100 in the infrared band, and will not affect the detection accuracy of the infrared sensor under the protective cover when applied to electronic equipment.
请参见图17及图18,图17中(a)为实施例1的盖板100喷砂前的显微镜形貌图,图17中(b)为实施例1的盖板100喷砂测试后的显微镜形貌图。图18中(a)为对比例1的盖板100喷砂前的显微镜形貌图,图18中(b)为对比例1的盖板100喷砂测试后的显微镜形貌图。由图17中(b)及由图18中(b)可知,实施例1得到的盖板100相较于盖板本体10(玻璃基材)具有更高的耐磨性。经过长时间的使用,也不易被磨损,而失去自清洁、防水、防污及防指纹等各项性能。Please refer to FIG. 17 and FIG. 18 , (a) in FIG. 17 is the microscope topography of the cover plate 100 of the embodiment 1 before sandblasting, and FIG. 17 (b) is the microscope topography of the cover plate 100 of the embodiment 1 after the sandblasting test. (a) of FIG. 18 is a microscope topography of the cover plate 100 of Comparative Example 1 before sandblasting, and FIG. 18 (b) is a microscope topography of the cover plate 100 of Comparative Example 1 after sandblasting. It can be seen from (b) in FIG. 17 and (b) in FIG. 18 that the cover plate 100 obtained in Example 1 has higher wear resistance than the cover plate body 10 (glass substrate). After a long period of use, it is not easy to be worn out, and loses various properties such as self-cleaning, waterproof, anti-fouling and anti-fingerprint.
请参见图19至图21,本申请实施例还一种电子设备600,该电子设备600包括:显示组件610、本申请实施例所述的盖板100以及电路板组件630。所述显示组件610用于显示;所述盖板100设置于所述显示组件610的一侧;电路板组件630,所述电路板组件630与所述显示组件610电连接,用于控制所述显示组件610进行显示。Referring to FIG. 19 to FIG. 21 , the embodiment of the present application is also an electronic device 600 , the electronic device 600 includes: a display component 610 , the cover plate 100 described in the embodiment of the present application, and a circuit board component 630 . The display assembly 610 is used for displaying; the cover plate 100 is arranged on one side of the display assembly 610; the circuit board assembly 630, the circuit board assembly 630 is electrically connected with the display assembly 610, and is used to control the display assembly 610 to display.
本申请实施例的电子设备600可以为但不限于为手机、平板电脑、笔记本电脑、台式电脑、智能手环、智能手表、电子阅读器、游戏机等电子设备。The electronic device 600 in the embodiment of the present application may be, but not limited to, a mobile phone, a tablet computer, a notebook computer, a desktop computer, a smart bracelet, a smart watch, an e-reader, a game console and other electronic devices.
可选地,所述显示组件610可以为但不限于为液晶显示组件、发光二极管显示组件(LED显示组件)、微发光二极管显示组件(Micro LED显示组件)、次毫米发光二极管显示组件(Mini LED显示组件)、有机发光二极管显示组件(OLED显示组件)等中的一种或多种。Optionally, the display assembly 610 may be, but not limited to, one or more of a liquid crystal display assembly, a light emitting diode display assembly (LED display assembly), a micro light emitting diode display assembly (Micro LED display assembly), a submillimeter light emitting diode display assembly (Mini LED display assembly), an organic light emitting diode display assembly (OLED display assembly) and the like.
在一些实施例中,盖板100作为显示组件610的保护盖,此时,盖板100设置于显示组件610的显示面上,电路板组件630设置于显示组件610远离盖板100的一侧。In some embodiments, the cover plate 100 is used as a protective cover of the display assembly 610 . At this time, the cover plate 100 is disposed on the display surface of the display assembly 610 , and the circuit board assembly 630 is disposed on a side of the display assembly 610 away from the cover plate 100 .
可以为关于盖板100的详细描述,请参见上述实施例对应部分的描述,在此不再赘述。For a detailed description about the cover plate 100 , please refer to the description of the corresponding part of the above embodiment, and details are not repeated here.
请一并参见图21,可选地,电路板组件630可以包括处理器631及存储器633。所述处理器631分别与所述显示组件610及存储器633电连接。所述处理器631用于控制所述显示组件610进行显示,所述存储器633用于存储所述处理器631运行所需的程序代码,控制显示组件610所需的程序代码、显示组件610的显示内容等。Please also refer to FIG. 21 , optionally, the circuit board assembly 630 may include a processor 631 and a memory 633 . The processor 631 is electrically connected to the display component 610 and the memory 633 respectively. The processor 631 is used to control the display component 610 to display, and the memory 633 is used to store the program code required for the operation of the processor 631, the program code required for controlling the display component 610, the display content of the display component 610, and the like.
可选地,处理器631包括一个或者多个通用处理器631,其中,通用处理器631可以是能够处理电子指令的任何类型的设备,包括中央处理器(Central Processing Unit,CPU)、微处理器、微控制器、主处理器、控制器以及ASIC等等。处理器631用于执行各种类型的数字存储指令,例如存储在存储器633中的软件或者固件程序,它能使计算设备提供较宽的多种服务。Optionally, the processor 631 includes one or more general-purpose processors 631, wherein the general-purpose processor 631 may be any type of device capable of processing electronic instructions, including a central processing unit (Central Processing Unit, CPU), a microprocessor, a microcontroller, a main processor, a controller, and an ASIC or the like. The processor 631 is used to execute various types of digitally stored instructions, such as software or firmware programs stored in the memory 633, which enable the computing device to provide a wide variety of services.
可选地,存储器633可以包括易失性存储器(Volatile Memory),例如随机存取存储器(Random Access Memory,RAM);存储器633也可以包括非易失性存储器(Non-Volatile Memory,NVM),例如只读存储器(Read-Only Memory,ROM)、快闪存储器(Flash Memory,FM)、硬盘(Hard Disk Drive,HDD)或固态硬盘(Solid-State Drive,SSD)。存储器633还可以包括上述种类的存储器的组合。Optionally, the memory 633 can include a volatile memory (Volatile Memory), such as a random access memory (Random Access Memory, RAM); the memory 633 can also include a non-volatile memory (Non-Volatile Memory, NVM), such as a read-only memory (Read-Only Memory, ROM), a flash memory (Flash Memory, FM), a hard disk (Hard Disk Drive, HDD) or a solid-state disk (Solid-State Drive, SSD). The memory 633 may also include a combination of the above-mentioned kinds of memories.
请一并参见图20及图22,在一些实施例中,本申请实施例的电子设备600还包括中框620、壳体640及摄像头模组650,壳体640设置于显示组件610远离盖板100的一侧,所述中框620设置于所述显示组件610与壳体640之间,且所述中框620的侧面显露于所述壳体640与所述显示组件610。所述中框620与所述壳体640围合成容置空间,所述容置空间用于容置所述电路板组件630与所述摄像头模组650。所述摄像头模组650与所述处理器631电连接,用于在处理器631的控制下,进行拍摄。Please refer to FIG. 20 and FIG. 22 together. In some embodiments, the electronic device 600 of the embodiment of the present application further includes a middle frame 620 , a casing 640 and a camera module 650 . The casing 640 is disposed on a side of the display assembly 610 away from the cover 100 . The middle frame 620 and the casing 640 form an accommodating space, and the accommodating space is used for accommodating the circuit board assembly 630 and the camera module 650 . The camera module 650 is electrically connected to the processor 631 for taking pictures under the control of the processor 631 .
可选地,所述壳体640上具有透光部641,所述摄像头模组650可通过所述壳体640上的透光部641拍摄,即,本实施方式中的摄像头模组650为后置摄像头模组650。可以理解地,在其他实施方式中,所述透光部641可设置在所述显示组件610上,即,所述摄像头模组650为前置摄像头模组650。在本实施方式的示意图中,以所述透光部641为开口进行示意,在其他实施方式中,所述透光部641可不为开口,而是为透光的材质,比如,塑料、玻璃等。Optionally, the housing 640 has a light-transmitting portion 641 through which the camera module 650 can take pictures. That is, the camera module 650 in this embodiment is a rear camera module 650 . It can be understood that, in other implementation manners, the light-transmitting portion 641 may be disposed on the display assembly 610 , that is, the camera module 650 is a front-facing camera module 650 . In the schematic diagram of this embodiment, the light-transmitting portion 641 is used as an opening for illustration. In other embodiments, the light-transmitting portion 641 may not be an opening, but a light-transmitting material, such as plastic or glass.
可以理解地,本实施方式中所述的电子设备600仅仅为所述盖板100所应用的电子设备的一种形态,在其他实施例中,盖板100还可以作为电子设备的后盖(即壳体),不应当理解为对本申请提供的电子设备600的限定,也不应当理解为对本申请各个实施方式提供的盖板100的限定。It can be understood that the electronic device 600 described in this embodiment is only a form of the electronic device to which the cover 100 is applied. In other embodiments, the cover 100 can also be used as the back cover (that is, the housing) of the electronic device, which should not be construed as a limitation to the electronic device 600 provided in this application, nor should it be understood as a limitation to the cover 100 provided in various embodiments of the present application.
在本申请中提及“实施例”“实施方式”意味着,结合实施例描述的特定特征、结构或特性可以包含在本申请的至少一个实施例中。在说明书中的各个位置出现所述短语并不一定均是指相同的实施例,也不是与其它实施例互斥的独立的或备选的实施例。本领域技术人员显式地和隐式地理解的是,本申请所描述的实施例可以与其它实施例相结合。此外,还应该理解的是,本申请各实施例所描述的特征、结构或特性,在相互之间不存在矛盾的情况下,可以任意组合,形成又一未脱离本申请技术方案的精神和范围的实施例。References in this application to "an embodiment" and "an implementation" mean that a particular feature, structure, or characteristic described in connection with the embodiment can be included in at least one embodiment of the present application. The appearances of a phrase in various places in the specification are not necessarily all referring to the same embodiment, nor are separate or alternative embodiments mutually exclusive of other embodiments. It is understood explicitly and implicitly by those skilled in the art that the embodiments described in this application can be combined with other embodiments. In addition, it should also be understood that the features, structures or characteristics described in the various embodiments of the present application can be combined arbitrarily to form another embodiment without departing from the spirit and scope of the technical solution of the present application if there is no contradiction between them.
最后应说明的是,以上实施方式仅用以说明本申请的技术方案而非限制,尽管参照以上较佳实施方式对本申请进行了详细说明,本领域的普通技术人员应当理解,可以对本申请的技术方案进行修改或等同替换都不应脱离本申请技术方案的精神和范围。Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present application without limitation. Although the present application has been described in detail with reference to the above preferred embodiments, those of ordinary skill in the art should understand that the technical solutions of the present application can be modified or equivalently replaced without departing from the spirit and scope of the technical solutions of the present application.

Claims (20)

  1. 一种盖板,其特征在于,包括:A cover plate, characterized in that it comprises:
    盖板本体;以及the cover body; and
    防护层,所述防护层设置于所述盖板本体的表面,所述防护层为类金刚石膜层,所述防护层的水接触角θ1的范围为120°≤θ1≤130°。A protective layer, the protective layer is arranged on the surface of the cover body, the protective layer is a diamond-like film layer, and the range of the water contact angle θ1 of the protective layer is 120°≤θ1≤130°.
  2. 根据权利要求1所述的盖板,其特征在于,所述防护层具有多个凸起结构,所述多个凸起结构位于所述防护层远离所述盖板本体的表面,每个所述凸起结构具有位于所述凸起结构表面的多个子凸起。The cover plate according to claim 1, wherein the protection layer has a plurality of protrusion structures, the plurality of protrusion structures are located on the surface of the protection layer away from the cover body, and each of the protrusion structures has a plurality of sub-protrusions located on the surface of the protrusion structure.
  3. 根据权利要求1所述的盖板,其特征在于,所述防护层包括多个第一晶核、第一沉积层、多个第二晶核及第二沉积层,所述多个第一晶核间隔设置于所述盖板本体的表面,所述第一沉积层覆盖于所述多个第一晶核的表面,所述多个第二晶核设置于所述第一沉积层远离所述第一晶核的表面,所述第二沉积层覆盖于所述多个第二晶核的表面,其中,所述第一晶核与所述第一沉积层组成第一防护子层,所述第一防护子层为第一类金刚石子膜层,所述第二晶核与所述第二沉积层组成第二防护子层,所述第二防护子层为第二类金刚石子膜层。The cover plate according to claim 1, wherein the protection layer comprises a plurality of first crystal nuclei, a first deposition layer, a plurality of second crystal nuclei and a second deposition layer, the plurality of first crystal nuclei are arranged at intervals on the surface of the cover plate body, the first deposition layer covers the surface of the plurality of first crystal nuclei, the plurality of second crystal nuclei are arranged on the surface of the first deposition layer away from the first crystal nuclei, and the second deposition layer covers the surfaces of the plurality of second crystal nuclei, wherein the first crystal nuclei and the first deposition layer form a first protective sublayer, and the first protective sublayer is of the first type In the diamond sub-film layer, the second crystal nucleus and the second deposition layer form a second protective sub-layer, and the second protective sub-layer is a second diamond-like sub-film layer.
  4. 根据权利要求3所述的盖板,其特征在于,所述第一晶核为第一金刚石晶核,所述第二晶核为第二金刚石晶核;所述第一沉积层为类金刚石膜层,所述第二沉积层为类金刚石膜层。The cover plate according to claim 3, wherein the first crystal nucleus is a first diamond nucleus, and the second crystal nucleus is a second diamond nucleus; the first deposition layer is a diamond-like film layer, and the second deposition layer is a diamond-like film layer.
  5. 根据权利要求2所述的盖板,其特征在于,所述防护层的厚度h1的范围为5μm≤h1≤10μm;所述凸起结构在所述防护层的表面的正投影所围区域的最大距离d1的范围为3μm≤d1≤7μm;所述子凸起上相距最远的两点之间的距离d2的范围为40nm≤d2≤2μm。The cover plate according to claim 2, wherein the thickness h1 of the protective layer is in the range of 5 μm≤h1≤10 μm; the maximum distance d1 of the area surrounded by the orthographic projection of the raised structure on the surface of the protective layer is in the range of 3 μm≤d1≤7 μm; the distance d2 between the two furthest points on the sub-protrusions is in the range of 40nm≤d2≤2 μm.
  6. 根据权利要求1所述的盖板,其特征在于,所述盖板的可见光透过率大于或等于80%,所述盖板的红外光透过率大于或等于80%,所述盖板的紫外光透过率大于或等于80%。The cover plate according to claim 1, wherein the visible light transmittance of the cover plate is greater than or equal to 80%, the infrared light transmittance of the cover plate is greater than or equal to 80%, and the ultraviolet light transmittance of the cover plate is greater than or equal to 80%.
  7. 根据权利要求1-6任一项所述的盖板,其特征在于,所述盖板本体包括玻璃、陶瓷或蓝宝石中的至少一种。The cover plate according to any one of claims 1-6, wherein the cover plate body comprises at least one of glass, ceramics or sapphire.
  8. 一种盖板,其特征在于,包括:A cover plate, characterized in that it comprises:
    盖板本体;以及the cover body; and
    防护层,所述防护层设置于所述盖板本体的表面,所述防护层为类金刚石膜层,所述防护层具有多个凸起结构,所述多个凸起结构位于所述防护层远离所述盖板本体的表面,每个所述凸起结构具有位于所述凸起结构表面的多个子凸起。A protective layer, the protective layer is arranged on the surface of the cover body, the protective layer is a diamond-like film layer, the protective layer has a plurality of protrusion structures, the plurality of protrusion structures are located on the surface of the protective layer away from the cover body, and each of the protrusion structures has a plurality of sub-protrusions located on the surface of the protrusion structure.
  9. 根据权利要求8所述的盖板,其特征在于,所述防护层包括多个第一晶核、第一沉积层、多个第二晶核及第二沉积层,所述多个第一晶核间隔设置于所述盖板本体的表面,所述第一沉积层覆盖于所述多个第一晶核的表面,所述多个第二晶核设置于所述第一沉积层远离所述第一晶核的表面,所述第二沉积层覆盖于所述多个第二晶核的表面,其中,所述第一晶核与所述第一沉积层组成第一防护子层,所述第一防护子层为第一类金刚石子膜层,所述第二晶核与所述第二沉积层组成第二防护子层,所述第二防护子层为第二类金刚石子膜层。The cover plate according to claim 8, wherein the protection layer comprises a plurality of first crystal nuclei, a first deposition layer, a plurality of second crystal nuclei, and a second deposition layer, the plurality of first crystal nuclei are arranged at intervals on the surface of the cover plate body, the first deposition layer covers the surface of the plurality of first crystal nuclei, the plurality of second crystal nuclei are arranged on the surface of the first deposition layer away from the first crystal nuclei, and the second deposition layer covers the surfaces of the plurality of second crystal nuclei, wherein the first crystal nuclei and the first deposition layer form a first protective sublayer, and the first protective sublayer is of the first type In the diamond sub-film layer, the second crystal nucleus and the second deposition layer form a second protective sub-layer, and the second protective sub-layer is a second diamond-like sub-film layer.
  10. 根据权利要求8所述的盖板,其特征在于,所述防护层的厚度h1的范围为5μm≤h1≤10μm; 所述凸起结构在所述防护层的表面的正投影所围区域的最大距离d1的范围为3μm≤d1≤7μm;所述子凸起上相距最远的两点之间的距离d2的范围为40nm≤d2≤2μm。The cover plate according to claim 8, wherein the thickness h1 of the protective layer is in the range of 5 μm≤h1≤10 μm; the maximum distance d1 of the area surrounded by the orthographic projection of the raised structure on the surface of the protective layer is in the range of 3 μm≤d1≤7 μm; the distance d2 between the two furthest points on the sub-protrusions is in the range of 40nm≤d2≤2 μm.
  11. 根据权利要求8所述的盖板,其特征在于,所述盖板的可见光透过率大于或等于80%,所述盖板的红外光透过率大于或等于80%,所述盖板的紫外光透过率大于或等于80%。The cover plate according to claim 8, wherein the visible light transmittance of the cover plate is greater than or equal to 80%, the infrared light transmittance of the cover plate is greater than or equal to 80%, and the ultraviolet light transmittance of the cover plate is greater than or equal to 80%.
  12. 根据权利要求8-11任一项所述的盖板,其特征在于,所述盖板本体包括玻璃、陶瓷或蓝宝石中的至少一种。The cover plate according to any one of claims 8-11, wherein the cover plate body comprises at least one of glass, ceramics or sapphire.
  13. 一种盖板的制备方法,其特征在于,包括:A method for preparing a cover plate, characterized in that it comprises:
    提供盖板本体;以及Provide the cover body; and
    在所述盖板本体的表面形成防护层,其中,所述防护层为类金刚石膜层,所述防护层的水接触角θ1的范围为120°≤θ1≤130°。A protective layer is formed on the surface of the cover body, wherein the protective layer is a diamond-like film layer, and the range of the water contact angle θ1 of the protective layer is 120°≤θ1≤130°.
  14. 根据权利要求13所述的盖板的制备方法,其特征在于,所述在所述盖板本体的表面形成防护层,包括:The preparation method of the cover plate according to claim 13, wherein the formation of a protective layer on the surface of the cover plate body comprises:
    将所述盖板本体于第一金刚石形核液中,进行第一静电沉积,以在所述盖板本体表面形成第一晶核,所述第一晶核为第一金刚石晶核;Carrying out the first electrostatic deposition of the cover plate body in the first diamond nucleation liquid to form a first crystal nucleus on the surface of the cover plate body, the first crystal nucleus being the first diamond crystal nucleus;
    在所述第一晶核表面沉积类金刚石,以得到第一类金刚石子膜层;Depositing diamond-like carbon on the surface of the first crystal nucleus to obtain a first diamond-like carbon sub-film layer;
    于第二金刚石形核液中,进行第二静电沉积,以在第一类金刚石子膜层的表面形成第二晶核,所述第二晶核为第二金刚石晶核;以及In the second diamond nucleation liquid, carry out the second electrostatic deposition, to form a second crystal nucleus on the surface of the first diamond-like sub-film layer, the second crystal nucleus is the second diamond crystal nucleus; and
    在第二晶核表面沉积类金刚石,以得到第二类金刚石子膜层,其中,所述防护层包括所述第一类金刚石子膜层及所述第二类金刚石子膜层,所述类金刚石膜层包括所述第一类金刚石子膜层及所述第二类金刚石子膜层。Deposit diamond-like carbon on the surface of the second crystal nucleus to obtain a second diamond-like sub-film layer, wherein the protective layer includes the first diamond-like sub-film layer and the second diamond-like sub-film layer, and the diamond-like film layer includes the first diamond-like sub-film layer and the second diamond-like sub-film layer.
  15. 根据权利要求14所述的盖板的制备方法,其特征在于,所述将所述盖板本体于第一金刚石形核液中,进行电沉积,以在所述盖板本体表面形成第一晶核,包括:The preparation method of the cover plate according to claim 14, wherein the electrodeposition of the cover plate body in the first diamond nucleation liquid to form a first crystal nucleus on the surface of the cover plate body comprises:
    将盖板本体置于金刚石平均粒径的范围为1μm至4μm、金刚石质量浓度的范围为0.02%至0.06%、PH值为4.5至5.5的第一金刚石形核液中,进行超声波;以及Place the cover plate body in the first diamond nucleation liquid with an average diamond particle size ranging from 1 μm to 4 μm, a diamond mass concentration ranging from 0.02% to 0.06%, and a pH value of 4.5 to 5.5, and perform ultrasonic waves; and
    于第一电压U1的范围为15V≤U1≤25V下进行第一静电沉积,第一静电沉积的时间范围为2min至4min,以在所述盖板本体表面形成第一晶核。The first electrostatic deposition is performed under the range of the first voltage U1 of 15V≤U1≤25V, and the time range of the first electrostatic deposition is 2min to 4min, so as to form a first crystal nucleus on the surface of the cover body.
  16. 根据权利要求14所述的盖板的制备方法,其特征在于,于第二金刚石形核液中,进行第二静电沉积,以在第一类金刚石子膜层的表面形成第二晶核,包括:The preparation method of the cover plate according to claim 14, characterized in that, in the second diamond nucleation liquid, the second electrostatic deposition is carried out to form a second crystal nucleus on the surface of the first diamond-like sub-film layer, comprising:
    于金刚石平均粒径的范围为30nm至1μm、金刚石质量浓度的范围为0.02%至0.06%、PH值为3至4的第二金刚石形核液中,进行超声波;以及Ultrasound is carried out in the second diamond nucleation liquid whose average diamond particle size ranges from 30nm to 1 μm, the diamond mass concentration ranges from 0.02% to 0.06%, and the pH value is 3 to 4; and
    于第二电压U2的范围为6V≤U2≤10V下进行第二静电沉积,第二静电沉积的时间范围为60s至90s,以在第一类金刚石子膜层的表面形成第二晶核。The second electrostatic deposition is carried out under the second voltage U2 in the range of 6V≤U2≤10V, and the time range of the second electrostatic deposition is in the range of 60s to 90s, so as to form the second crystal nuclei on the surface of the first DLC sub-film layer.
  17. 根据权利要求14所述的盖板的制备方法,其特征在于,所述在所述第一晶核表面沉积类金刚石,以得到第一类金刚石子膜层之后,所述于第二金刚石形核液中,进行第二静电沉积,以在第一类金刚石子膜层的表面形成第二晶核之前,所述方法还包括:The preparation method of the cover plate according to claim 14, characterized in that, after the deposition of diamond-like carbon on the surface of the first crystal nucleus to obtain the first diamond-like sub-film layer, the second electrostatic deposition is carried out in the second diamond nucleation liquid, so that before the second crystal nucleus is formed on the surface of the first diamond-like sub-film layer, the method also includes:
    于氧化溶液中进行氧化处理,其中,所述氧化溶液为包括双氧水及氨水的水溶液。The oxidation treatment is carried out in an oxidation solution, wherein the oxidation solution is an aqueous solution including hydrogen peroxide and ammonia water.
  18. 根据权利要求14至17任一项所述的盖板的制备方法,其特征在于,所述在所述第一晶核表面 沉积类金刚石,以得到第一类金刚石子膜层,包括:According to the preparation method of the cover plate according to any one of claims 14 to 17, it is characterized in that, the deposition of diamond-like carbon on the surface of the first crystal nucleus, to obtain the first diamond-like carbon sub-film layer, comprising:
    采用甲烷及氢气作为反应气体,在所述甲烷为第一流速,所述氢气为第二流速,所述反应气体的温度为第一温度,所述盖板本体的温度为第二温度,于第一压力下采用热丝化学气相沉积方法,在所述第一晶核表面沉积类金刚石,沉积第一时间,以得到第一类金刚石子膜层,其中,所述第一流速为30SCCM至50SCCM,所述第二流速为650SCCM至750SCCM,所述第一温度为2450℃至2650℃,所述第二温度为750℃至850℃,第一压力为1.8KPa至2.2KPa,第一时间为50min至80min。Using methane and hydrogen as the reaction gas, the methane is the first flow rate, the hydrogen is the second flow rate, the temperature of the reaction gas is the first temperature, the temperature of the cover body is the second temperature, and the hot wire chemical vapor deposition method is used under the first pressure to deposit diamond-like carbon on the surface of the first crystal nucleus for the first time to obtain the first diamond-like sub-film layer, wherein the first flow rate is 30SCCM to 50SCCM, the second flow rate is 650SCCM to 750SCCM, and the first temperature is 2450°C to 2650°C, the second temperature is 750°C to 850°C, the first pressure is 1.8KPa to 2.2KPa, and the first time is 50min to 80min.
  19. 根据权利要求14至17任一项所述的盖板的制备方法,其特征在于,所述在第二晶核表面沉积类金刚石,以得到第二类金刚石子膜层,包括:The preparation method of the cover plate according to any one of claims 14 to 17, wherein the deposition of diamond-like carbon on the surface of the second crystal nucleus to obtain the second diamond-like carbon sub-film layer comprises:
    采用甲烷及氢气作为反应气体,在所述甲烷为第三流速,所述氢气为第四流速,所述反应气体的温度为第三温度,所述盖板本体的温度为第四温度,于第二压力下采用热丝化学气相沉积方法,在所述第二晶核表面沉积类金刚石,沉积第二时间,以得到第二类金刚石子膜层,其中,所述第三流速为30SCCM至50SCCM,所述第四流速为650SCCM至750SCCM,所述第三温度为2450℃至2650℃,所述第四温度为750℃至850℃,第二压力为1.8KPa至2.2KPa,第二时间为50min至80min。Using methane and hydrogen as the reaction gas, the methane is the third flow rate, the hydrogen is the fourth flow rate, the temperature of the reaction gas is the third temperature, the temperature of the cover plate body is the fourth temperature, and the hot wire chemical vapor deposition method is used under the second pressure. The diamond-like carbon is deposited on the surface of the second crystal nucleus for a second time to obtain a second diamond-like sub-film layer, wherein the third flow rate is 30SCCM to 50SCCM, the fourth flow rate is 650SCCM to 750SCCM, and the third temperature is 2450°C to 2650°C, the fourth temperature is 750°C to 850°C, the second pressure is 1.8KPa to 2.2KPa, and the second time is 50min to 80min.
  20. 一种电子设备,其特征在于,包括:An electronic device, characterized in that it comprises:
    显示组件;display components;
    盖板,所述盖板设置于所述显示组件的一侧;盖板包括盖板本体以及防护层,所述防护层设置于所述盖板本体的表面,所述防护层为类金刚石膜层;所述防护层满足以下条件中的至少一个:所述防护层的水接触角θ1的范围为120°≤θ1≤130°;或者,所述防护层具有多个凸起结构,所述多个凸起结构位于所述防护层远离所述盖板本体的表面,每个所述凸起结构具有位于所述凸起结构表面的多个子凸起;以及Cover plate, the cover plate is arranged on one side of the display assembly; the cover plate includes a cover plate body and a protective layer, the protective layer is arranged on the surface of the cover plate body, and the protective layer is a diamond-like film layer; the protective layer satisfies at least one of the following conditions: the water contact angle θ1 of the protective layer is in the range of 120°≤θ1≤130°; Multiple sub-protrusions of the surface; and
    电路板组件,所述电路板组件与所述显示组件电连接,用于控制所述显示组件进行显示。A circuit board assembly, the circuit board assembly is electrically connected to the display assembly, and is used to control the display assembly to display.
PCT/CN2022/130898 2022-01-18 2022-11-09 Cover plates, manufacturing method therefor and electronic device WO2023138177A1 (en)

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