WO2023130914A1 - Dispositif électronique et transducteur acoustique - Google Patents

Dispositif électronique et transducteur acoustique Download PDF

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Publication number
WO2023130914A1
WO2023130914A1 PCT/CN2022/138485 CN2022138485W WO2023130914A1 WO 2023130914 A1 WO2023130914 A1 WO 2023130914A1 CN 2022138485 W CN2022138485 W CN 2022138485W WO 2023130914 A1 WO2023130914 A1 WO 2023130914A1
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WO
WIPO (PCT)
Prior art keywords
elastic
gap
acoustic transducer
piezoelectric
piezoelectric cantilever
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Application number
PCT/CN2022/138485
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English (en)
Chinese (zh)
Inventor
潘春娇
王磊
赵文畅
何云乾
秦仁轩
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华为技术有限公司
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Publication of WO2023130914A1 publication Critical patent/WO2023130914A1/fr

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    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R9/00—Transducers of moving-coil, moving-strip, or moving-wire type
    • H04R9/02—Details
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R9/00—Transducers of moving-coil, moving-strip, or moving-wire type
    • H04R9/18—Resonant transducers, i.e. adapted to produce maximum output at a predetermined frequency

Definitions

  • the embodiments of the present application relate to the technical field of acoustic transducers, and in particular to an electronic device and an acoustic transducer.
  • MEMS Micro Electro Mechanical System
  • MEMS process has shown excellent potential and effect in the process of device miniaturization, which can effectively reduce the size of the device, and has great potential in the micro-speaker scene.
  • Significant advantages such as earphones, Bluetooth glasses, bracelet watches and other portable products.
  • the MEMS acoustic transducer is a micro-speaker that uses a piezoelectric cantilever to vibrate and sound under the action of an electric field, prepared by the MEMS process.
  • the acoustic transducer may include a housing, a piezoelectric cantilever and a support in a ring structure, the piezoelectric cantilever and the support are both located in the housing, and one end of the support is fixed on the inner wall of the housing, and the piezoelectric The cantilever is located at the other end of the support, so that the rear cavity of the acoustic transducer is formed between the piezoelectric cantilever, the inner wall of the support and part of the inner wall of the housing, and the piezoelectric cantilever, the outer wall of the support and other inner walls of the housing form Front cavity of the acoustic transducer.
  • one end of the piezoelectric cantilever is fixedly connected with the support, and there is a micro-slit between the other end of the piezoelectric cantilever and the support or adjacent piezoelectric cantilever, so as to ensure the vibration amplitude of the piezoelectric cantilever.
  • the sound short circuit between the front cavity and the rear cavity of the above structure is very easy to occur, thereby reducing the frequency response of the acoustic transducer.
  • the embodiment of the present application provides an electronic device and an acoustic transducer, which can improve the sound short circuit problem between the front cavity and the rear cavity, and improve the frequency response of the acoustic transducer.
  • an embodiment of the present application provides an acoustic transducer, including a vibrating element and an elastic seal, one side of the vibrating element has a rear cavity, one end of the vibrating element has a gap, and the elastic sealing is located at the gap and connected to the vibrating element connected, the elastic seal is at least partially blocked at the gap at one end of the vibrating element.
  • an elastic seal is connected to one end of the vibration element, and the gap at one end of the vibration element is blocked by the elastic seal.
  • the gap at one end of the vibration element is improved.
  • the sealing of the back cavity improves the sealing of the back cavity, thereby improving the sealing and isolation effect between the back cavity and other cavities such as the front cavity of the acoustic transducer, and improving the sound short circuit between the front cavity and the rear cavity.
  • the sensitivity of the acoustic transducer is improved, thereby improving the frequency response of the acoustic transducer, especially the low-frequency loudness is improved.
  • the elastic seal is used to seal the gap at one end of the vibration element, so that the elastic seal can produce elastic deformation during the vibration of the vibration element, so as to release the stress of the vibration element and ensure that the vibration element will not be restrained by other components.
  • the degree of freedom of the vibrating element will not be affected, thereby ensuring the vibration amplitude of the vibrating element and improving the frequency response of the acoustic transducer.
  • the acoustic transducer further includes a support, the vibrating element is located at one end of the support, and the vibrating element and the inner wall of the support serve as the top wall and the side wall of the rear chamber respectively.
  • the first end of the vibrating element is connected with one end of the supporting member, and the second end of the vibrating element is connected with the elastic seal, and the elastic seal is at least partially blocked at the second end of the vibrating element and communicated with the rear cavity place.
  • the support in the acoustic transducer By setting the support in the acoustic transducer, on the one hand, the structural stability of the vibrating element is improved; on the other hand, the support can be used together with the vibrating element to form a rear cavity, so as to simplify the structure of the loudspeaker and improve the performance of the loudspeaker. Assembling efficiency, in addition, by setting the elastic seal at the gap at the second end of the vibrating element to block the gap connected to the rear cavity, thereby improving the sealing of the rear cavity, making the rear cavity and other cavities such as acoustic transducers The sealing between the front chambers is improved, the sound short circuit problem between the front chamber and the rear chamber is improved, and the sensitivity of the acoustic transducer is improved.
  • the vibrating element includes at least one piezoelectric cantilever, the first end of the piezoelectric cantilever is connected to one end of the support member, and the second end of the piezoelectric cantilever is connected to the elastic sealing member.
  • the piezoelectric cantilever By setting the vibration element to include at least one piezoelectric cantilever, the piezoelectric cantilever can be warped and deformed under the action of an electric field, and can be used as a vibration element for pushing air, and the piezoelectric cantilever has a simple structure and is easy to operate, which improves the vibration of the vibration element.
  • the production efficiency simplifies the structure of the acoustic transducer.
  • the sealing and isolation effect between the rear cavity and other cavities such as the front cavity can be improved, and The vibration amplitude of the piezoelectric cantilever itself is also guaranteed.
  • the vibrating element includes two piezoelectric cantilevers, the first end of each piezoelectric cantilever is connected to one end of the support, there is a gap between the second ends of the two piezoelectric cantilevers, and the elastic
  • the sealing element is located at the gap and is sealingly connected with the second ends of the two piezoelectric cantilevers.
  • the vibrating element By setting the vibrating element to include two piezoelectric cantilevers, by applying a voltage to each piezoelectric cantilever, the two piezoelectric cantilevers are warped and deformed under the action of an electric field, so as to effectively push the air on both sides of the piezoelectric cantilever, In this way, the sound is emitted, and the structure of the acoustic transducer is simplified.
  • the gap between the second ends of the two piezoelectric cantilevers is connected by an elastic seal. On the one hand, the vibration amplitude of the two piezoelectric cantilevers is guaranteed.
  • the tightness of the connection between the second ends of the two piezoelectric cantilevers is also improved, thereby improving the tightness of the rear cavity and improving the low-frequency loudness of the acoustic transducer.
  • the vibrating element includes a plurality of piezoelectric cantilevers, the first ends of the plurality of piezoelectric cantilevers are connected to the support, and the first ends of the plurality of piezoelectric cantilevers are spaced along the circumference of the support set up;
  • the vibration element further includes: at least one diaphragm, and each diaphragm is connected to the piezoelectric cantilever.
  • the piezoelectric cantilever By connecting the diaphragm on the piezoelectric cantilever, the piezoelectric cantilever can be used as a driver to drive the diaphragm to vibrate when it is warped and deformed, so that the diaphragm and the piezoelectric cantilever jointly push the front cavity and the rear cavity of the acoustic transducer
  • the setting of the diaphragm improves the flexibility and elasticity of the entire vibrating element. On the one hand, it improves the vibration amplitude of the vibrating element, and on the other hand, it improves the structural stability of the vibrating element during the vibration process. , to prevent the vibration element from breaking due to excessive rigidity, thereby prolonging the service life of the vibration element.
  • the number of the diaphragm is one, at least one end of the diaphragm is close to the second end of at least one piezoelectric cantilever, and the diaphragm is provided with a gap near the second end of the piezoelectric cantilever, and the elastic seal The parts are located in the gap and are respectively connected with the second end of the piezoelectric cantilever and the vibrating film to improve the sealing of the connection between the vibrating film and the piezoelectric cantilever, thereby improving the sealing of the rear cavity.
  • the setting of the elastic sealing The diaphragm and the piezoelectric cantilever will not be restrained by each other during the vibration process, ensuring the vibration amplitude of the diaphragm and the piezoelectric cantilever, or the elastic seal is located at the gap and is sealed and connected with the diaphragm and the support respectively, so as to Improve the sealing between the diaphragm and the support, thereby improving the sealing of the rear cavity, so that the sealing and isolation effect between the rear cavity and other cavities such as the front cavity is improved.
  • the setting of the elastic seal also avoids vibration.
  • One end of the membrane is restrained by the support to affect its vibration amplitude, thereby ensuring the sensitivity of the acoustic transducer and improving the frequency response of the acoustic transducer.
  • the diaphragm is located on the side of the piezoelectric cantilever facing away from the rear cavity, or the diaphragm is located on the side of the piezoelectric cantilever facing the rear cavity;
  • the diaphragm and the second ends of all the piezoelectric cantilevers have a gap in the vertical direction, and the elastic seal is located in the gap in the vertical direction to block at least part of the vertical gap.
  • the diaphragm and the pressure The connection tightness between the second ends of the electric cantilever, on the other hand, the diaphragm is supported on one side of the piezoelectric cantilever by an elastic seal, so that at least part of the diaphragm is suspended on the piezoelectric cantilever, so that the diaphragm Both the piezoelectric cantilever and the piezoelectric cantilever can vibrate freely, and the vibration amplitude of the diaphragm and the piezoelectric cantilever is improved.
  • the diaphragm is located between the second ends of all piezoelectric cantilevers, and there are gaps between the diaphragm and the second ends of all piezoelectric cantilevers in the horizontal direction, and the elastic seal is located between the second ends of the piezoelectric cantilevers in the horizontal direction.
  • the gap is sealed to improve the sealing between one end of the diaphragm and the second end of the piezoelectric cantilever, thereby improving the sealing and isolation effect between the rear cavity and the front cavity.
  • each piezoelectric cantilever can drive the vibrating membrane, so as to improve the vibration reliability of the vibrating membrane.
  • the vibrating membrane and the piezoelectric cantilever can directly push the air in the front cavity and the rear cavity, which improves the sensitivity of the vibrating element, thereby improving the acoustic performance of the acoustic transducer.
  • each diaphragm is connected to a piezoelectric cantilever, and there is a gap between two adjacent diaphragms, and the elastic seal is located at the gap and connected to the corresponding The two adjacent diaphragms are sealed and connected.
  • each diaphragm By setting multiple diaphragms, and each diaphragm is connected to a piezoelectric cantilever, each diaphragm is driven by the piezoelectric cantilever, so that each diaphragm vibrates, and there is a gap between two adjacent diaphragms.
  • the gap is used to increase the vibration amplitude of each diaphragm, and the gap is sealed by an elastic seal to improve the sealing effect between two adjacent diaphragms, thereby improving the sealing effect of the rear cavity, making the rear cavity and other
  • the sealing and isolation effect between cavities such as the front cavity of the acoustic transducer is improved.
  • the elastic sealing member is an elastic block.
  • the elasticity of the elastic block can be improved by increasing the height or aspect ratio of the elastic block, so that it is easier to increase the vibration amplitude of the vibration element such as the piezoelectric cantilever or the diaphragm.
  • the arrangement of the elastic block can seal the gap at one end of the vibrating element, so as to improve the sealing between the front cavity and the rear cavity, thereby improving the frequency response of the acoustic transducer of the embodiment of the present application.
  • the height of the elastic block is 10um-50um, and/or the ratio of the width to the height of the elastic block is 0.1-100.
  • the elasticity of the elastic block is ensured, and the situation that the height of the elastic block is too small and the elasticity of the elastic block is too small to release the stress of the vibrating element is avoided occur, so as to ensure that the vibrating element can vibrate freely, ensure the vibration amplitude of the vibrating element, and avoid the high height of the elastic block from occupying the height space in the housing.
  • the elastic block is too high, which will also affect the structural stability of the elastic block. impact, so as to ensure that the elastic block will not collapse during the deformation process.
  • the elastic sealing member includes an elastic member and a sealing medium layer, the elastic member has a gap, and the sealing medium layer is used to seal the gap.
  • the gap at one end of the vibrating element can be connected to the elastic member, for example, the elastic member can be connected between the second ends of two adjacent piezoelectric cantilevers,
  • the elastic member is elastically deformed during the vibration of the vibrating element, such as two adjacent piezoelectric cantilevers, thereby releasing the stress on the ends of the vibrating element, such as the piezoelectric cantilever, so that the vibrating element, such as two adjacent piezoelectric cantilevers, does not vibrate during the vibration process. will be pinned by each other, thereby increasing the vibration amplitude of the vibrating element.
  • the sealing medium layer seals the gap on the elastic member to improve the sealing performance of the rear cavity, avoid sound short circuit between the front cavity and the rear cavity, and improve the frequency response of the acoustic transducer.
  • the sealing medium layer is an elastic film, and at least part of the elastic film covers at least one side of the elastic member along a direction perpendicular to the elastic direction.
  • the sealing medium layer as an elastic film, on the one hand, the sealing effect on the elastic member can be ensured; on the other hand, it is also convenient to manufacture the sealing medium layer on the elastic member, so that the manufacturing process of the elastic sealing member is simpler.
  • a part of the elastic film covers the surface of the vibrating element, and another part of the elastic mold covers the surface of the elastic member.
  • the elastic film can play the role of sealing the elastic member, and on the other hand
  • a part of the elastic membrane covers the surface of the vibrating element, which can improve the flexibility and elasticity of the vibrating element, so that the vibration amplitude of the vibrating element can be improved, and also improve the structural stability of the vibrating element during the vibration process, avoiding the The vibrating element is too rigid to cause fracture, etc., thereby prolonging the service life of the vibrating element.
  • the thickness of the elastic film is 1um-100um to ensure the elasticity and sealing of the elastic film, avoiding the reduction of the elasticity of the elastic film due to the excessive thickness of the elastic film, and in addition, the excessive thickness of the elastic film will also occupy
  • the back cavity or other cavities such as the front cavity have too much space, which affects the frequency response of the acoustic transducer.
  • the elastic seal includes a connecting portion and two opposite elastic blocks, and one end of the two elastic blocks is respectively connected with two adjacent piezoelectric cantilevers in the vibrating element, or the ends of the two elastic blocks One end is respectively connected to two adjacent diaphragms in the vibrating element, or one end of one of the two elastic blocks is connected to the piezoelectric cantilever, one end of the other of the two elastic blocks is connected to the diaphragm, and the connecting part is connected to the Between the other ends of the two elastic blocks along the height direction thereof, the gap between two adjacent piezoelectric cantilevers or the gap between the piezoelectric cantilever and the vibrating membrane can be sealed.
  • the vibrating element such as a piezoelectric cantilever can compress or stretch the elastic block during vibration, so that the elastic block undergoes elastic deformation, thereby releasing
  • the stress of the piezoelectric cantilever ensures that the vibration amplitude of the piezoelectric cantilever will not be affected.
  • the elasticity of the elastic block can be improved by increasing the height or aspect ratio of the elastic block, so that it is easier to increase the vibration amplitude of the vibrating element.
  • the arrangement of the elastic block can seal the gap at one end of the vibrating element to improve the sealing of the rear cavity, thereby improving the sealing between the rear cavity and the front cavity, thereby improving the acoustic transducer of the embodiment of the present application. frequency response such as low frequency loudness.
  • the acoustic transducer further includes a housing
  • the vibrating element, the elastic sealing element and the supporting element are all located in the casing, the first end of the supporting element is arranged on the inner wall of the casing, and the first end of the vibrating element is connected with the second end of the supporting element;
  • the vibrating element, the outer wall of the support and a part of the housing wall form a front cavity
  • the vibrating element, the inner wall of the support and another part of the housing wall form a rear cavity, so that the acoustic transducer of the embodiment of the present application
  • the setting of the shell also protects the internal structure of the acoustic transducer, preventing external water vapor and other sundries from entering the interior of the acoustic transducer and causing damage to the vibration element and other structures.
  • the acoustic transducer includes a housing, a vibrating element disposed in the housing, an elastic seal, a support and a sealing ring;
  • the outer edge of the vibrating element is sealed and connected with the inner side wall of the housing through a sealing ring, and one side of the vibrating element, a part of the housing wall of the housing, and one side of the sealing ring form a front cavity, and the other side of the vibrating element 1.
  • the other side of the sealing ring and another part of the shell wall form a rear cavity;
  • the support is located in the rear cavity and its two ends are respectively connected with the vibrating element and the inner bottom wall of the housing;
  • the sealing at the gap at one end of the vibrating element is improved, the sealing between the front cavity and the rear cavity on both sides of the vibrating element along the vibration direction is improved, and the The sound short-circuit problem between the front chamber and the rear chamber improves the sensitivity of the acoustic transducer, thereby improving the frequency response of the acoustic transducer, especially the low-frequency loudness.
  • the slit at one end of the vibrating element is sealed by the elastic seal, such as the first slit, so that the elastic seal can produce elastic deformation during the vibration of the vibrating element to release the stress of the vibrating element, which can ensure that the degree of freedom of the vibrating element does not change. will be affected, so as to ensure the vibration amplitude of the vibration element, so that the frequency response of the acoustic transducer can be improved.
  • the vibrating element includes at least one piezoelectric cantilever and at least two vibrating membranes, the first end of each vibrating membrane is connected to the sealing ring, and the second ends of the adjacent two vibrating membranes are There is a first gap between them, and there is an elastic seal at the first gap, and the elastic seal is respectively connected to the second ends of two adjacent vibrating membranes;
  • the piezoelectric cantilever is connected with the first ends of at least two diaphragms, and the top end of the support is connected with the piezoelectric cantilever.
  • the piezoelectric cantilever can be used as a driver to vibrate the vibrating membrane during warping deformation, so that the vibrating membrane and the piezoelectric cantilever work together Push the air in the front cavity and the rear cavity to make sound.
  • the setting of the diaphragm improves the flexibility and elasticity of the entire vibrating element. The structural stability in the process avoids the vibration element from being broken due to excessive rigidity, thereby prolonging the service life of the vibration element.
  • the first gap between the second ends of two adjacent diaphragms is sealed by an elastic seal, which ensures the vibration amplitude of the two diaphragms on the one hand, and improves the second
  • the tightness of the connection between the terminals improves the sealing and isolation effect of the front cavity and the rear cavity, which improves the low-frequency loudness of the acoustic transducer.
  • the number of piezoelectric cantilevers is multiple, the first end of each piezoelectric cantilever is connected to the first end of a diaphragm, and the second end of each piezoelectric cantilever is connected to the support .
  • each piezoelectric cantilever By setting two piezoelectric cantilevers, and one end of each piezoelectric cantilever is fixed on the support, on the one hand, the structural stability of each piezoelectric cantilever is improved, and on the other hand, each piezoelectric cantilever can be Vibrates independently under the action of the electric field, and can separately drive the corresponding diaphragm to vibrate, so that the vibration amplitude of each diaphragm can be improved.
  • an elastic seal is provided at the second gap, and the elastic seal is respectively connected to the diaphragm and the piezoelectric cantilever.
  • the corresponding piezoelectric cantilever is connected to block the vertical gap between the first end of the vibrating membrane and the piezoelectric cantilever, so that, on the one hand, the elastic seal can suspend at least part of the vibrating membrane on one side of the piezoelectric cantilever , to increase the vibration amplitude of the diaphragm and the piezoelectric cantilever.
  • the gap between the first end of the vibration and the piezoelectric cantilever is sealed by an elastic seal to further improve the vibration of the vibration element to the front cavity and the rear.
  • the sealing effect of the cavity for example, the elastic seal between the second ends of two adjacent diaphragms can be used as a primary seal, and the elastic seal between the first end of the diaphragm and the piezoelectric cantilever can be used as a secondary The seal, so that all the gaps of the vibrating element are effectively sealed.
  • the elastic sealing member at the second gap is an elastic block.
  • the sealing member By setting the sealing member as an elastic block, the two ends of the elastic block are respectively connected with the first end of the diaphragm and the piezoelectric cantilever, so that the piezoelectric cantilever or the diaphragm can compress or stretch the elastic block during vibration,
  • the elastic block is elastically deformed, thereby releasing the end stress of the piezoelectric cantilever and the vibrating membrane, so as to ensure that the vibration amplitude of the piezoelectric cantilever or the vibrating membrane will not be affected.
  • the elasticity of the elastic block can be improved by increasing the height or aspect ratio of the elastic block, so that it is easier to increase the vibration amplitude of the vibration element such as the piezoelectric cantilever and the diaphragm.
  • the arrangement of the elastic block can seal the second gap, so as to improve the sealing performance between the front cavity and the rear cavity, thereby improving the frequency response of the acoustic transducer of the embodiment of the present application.
  • the height of the elastic block is 10um-50um, and/or the ratio of the width to the height of the elastic block is 0.1-100.
  • the elasticity of the elastic block is ensured, and the situation that the height of the elastic block is too small and the elasticity of the elastic block is too small to release the stress of the vibrating element is avoided occur, so as to ensure that the vibrating element can vibrate freely, ensure the vibration amplitude of the vibrating element, and avoid the high height of the elastic block from occupying the height space in the housing.
  • the elastic block is too high, which will also affect the structural stability of the elastic block. impact, so as to ensure that the elastic block will not collapse during the deformation process.
  • narrow slits may be provided in the elastic sealing member to improve the deformation of the elastic sealing member.
  • the width of the narrow slits is less than 5 mm to avoid gas leakage.
  • the elastic seal at the first gap includes a connecting portion and two opposite elastic blocks, one end of the two elastic blocks is respectively connected to two adjacent diaphragms;
  • connection part is connected between the other ends of the two elastic blocks, so that the gap is sealed by the two elastic blocks and the connection part.
  • the vibrating element By setting the elastic seal to include an elastic block with a certain height in the vibration direction, the vibrating element, such as two adjacent diaphragms, can compress or stretch the elastic block during vibration, so that the elastic block undergoes elastic deformation , so as to release the stress of the diaphragm and ensure that the vibration amplitude of the diaphragm will not be affected by each other.
  • the elasticity of the elastic block can be improved by increasing the height or aspect ratio of the elastic block, so that it is easier to increase the vibration amplitude of the diaphragm.
  • the arrangement of the elastic block can seal the gap at one end of the vibrating element, so as to improve the sealing between the front cavity and the rear cavity, thereby improving the frequency response of the acoustic transducer of the embodiment of the present application, such as the low frequency loudness.
  • the elastic sealing member at the first gap includes an elastic member and a sealing medium layer, the elastic member has a gap, and the sealing medium layer is used to seal the gap.
  • the gap at one end of the vibrating element can be connected to the elastic member, for example, the elastic member can be connected between the second ends of two adjacent vibrating membranes, so that The elastic member is elastically deformed during the vibration process of the vibrating element, such as two adjacent diaphragms, so as to release the end stress of the vibrating element such as the diaphragm, so that the vibration process of the vibrating element such as the two adjacent diaphragms will not be affected by each other. pinning, thereby increasing the vibration amplitude of the vibrating element.
  • the sealing medium layer seals the gap on the elastic part to improve the sealing performance of the gap at one end of the vibrating element, improve the sealing performance of the front cavity and the rear cavity, and avoid the sound short circuit between the front cavity and the rear cavity, thereby Improve the frequency response of the acoustic transducer.
  • the sealing medium layer is an elastic film, and at least part of the elastic film covers at least one side of the elastic member along a direction perpendicular to the elastic direction.
  • the sealing medium layer as an elastic film, on the one hand, the sealing effect on the elastic member can be ensured; on the other hand, it is also convenient to manufacture the sealing medium layer on the elastic member, so that the manufacturing process of the elastic sealing member is simpler.
  • a part of the elastic film covers the surface of the vibrating element, and another part of the elastic mold covers the surface of the elastic member.
  • the elastic film can play the role of sealing the elastic member, and on the other hand
  • a part of the elastic membrane covers the surface of the vibrating element, which can improve the flexibility and elasticity of the vibrating element, so that the vibration amplitude of the vibrating element can be improved, and also improve the structural stability of the vibrating element during the vibration process, avoiding the The vibrating element is too rigid to cause fracture, etc., thereby prolonging the service life of the vibrating element.
  • the thickness of the elastic film is 1um-100um to ensure the elasticity and sealing of the elastic film, avoiding the reduction of the elasticity of the elastic film due to the excessive thickness of the elastic film, and in addition, the excessive thickness of the elastic film will also occupy The front cavity or the rear cavity is too large, which will affect the frequency response of the acoustic transducer.
  • an embodiment of the present application provides an electronic device, including the above acoustic transducer.
  • the electronic device provided in the embodiment of the present application improves the sealing and isolation effect of the front chamber and the rear chamber in the acoustic transducer by adopting the above-mentioned acoustic transducer, and improves or avoids the problem of sound short circuit in the acoustic transducer.
  • the frequency response of the acoustic transducer is improved, thereby improving the acoustic performance of electronic equipment.
  • Fig. 1 is a schematic structural diagram of an acoustic transducer provided by an embodiment of the present application
  • Fig. 2 is a sectional view of Fig. 1;
  • Fig. 3 is an internal schematic diagram of one structure of an acoustic transducer in the related art
  • Fig. 4 is a schematic diagram of the internal structure of another structure of the acoustic transducer in the related art
  • Fig. 5 is a schematic diagram of the internal structure of one of the acoustic transducers provided by an embodiment of the present application;
  • Figure 5a is an exploded view of Figure 5;
  • Fig. 6 is a longitudinal sectional view of the acoustic transducer corresponding to Fig. 5;
  • Fig. 7 is a partial enlarged view of place A in Fig. 6;
  • Fig. 7a is a partial schematic diagram of another acoustic transducer provided by an embodiment of the present application.
  • Fig. 7b is a partial schematic diagram of another acoustic transducer provided by an embodiment of the present application.
  • Fig. 8 is a schematic diagram of the internal structure of another acoustic transducer provided by an embodiment of the present application.
  • Fig. 9 is a longitudinal sectional view of the acoustic transducer corresponding to Fig. 8;
  • Fig. 10 is a partial enlarged view of place B in Fig. 9;
  • Fig. 11 is a schematic diagram of the internal structure of another acoustic transducer provided by an embodiment of the present application.
  • Fig. 12 is a partial enlarged view of place C in Fig. 11;
  • Fig. 13 is a partial structural schematic diagram of another acoustic transducer provided by an embodiment of the present application.
  • Figure 14 is a partial enlarged view at D in Figure 13;
  • Fig. 15 is a longitudinal schematic diagram of another acoustic transducer provided by an embodiment of the present application.
  • Fig. 16 is a schematic diagram of the internal structure of another acoustic transducer provided by an embodiment of the present application.
  • Fig. 17 is a longitudinal sectional view of the acoustic transducer corresponding to Fig. 16;
  • Fig. 18 is a schematic diagram of the internal structure of another acoustic transducer provided by an embodiment of the present application.
  • Fig. 19 is a sectional view along line A-A in Fig. 18;
  • Fig. 20 is a schematic diagram of the internal structure of another acoustic transducer provided by an embodiment of the present application.
  • Figure 21 is a partial enlarged view at F in Figure 20;
  • Fig. 22 is a longitudinal sectional view of another acoustic transducer provided by an embodiment of the present application.
  • Figure 23 is a partial enlarged view at G in Figure 22;
  • Fig. 24 is a diagram of the vibration displacement of the elastic block at different heights in the acoustic transducer corresponding to Fig. 22;
  • Fig. 25 is a displacement simulation diagram of the vibrating element in Fig. 22 when the frequency is 20 Hz;
  • Figure 25a is a partial enlarged view at H in Figure 25;
  • Fig. 25b is a schematic diagram of the vibration of the vibrating element corresponding to Fig. 25;
  • Fig. 25c is a schematic structural view of place I in Fig. 25b;
  • Fig. 26 is a simulation diagram of the displacement when the piezoelectric cantilever and the diaphragm are located on the whole film in the related art
  • Figure 26a is a partial enlarged view at J in Figure 26;
  • Fig. 27 is a frequency response curve diagram of the acoustic transducer corresponding to Fig. 22;
  • Fig. 28 is a schematic diagram of the internal structure of another acoustic transducer provided by an embodiment of the present application.
  • Fig. 30 is a displacement simulation diagram of the vibrating element in Fig. 28 when the frequency is 20 Hz;
  • Fig. 31 is a schematic diagram of the internal structure of another acoustic transducer provided by an embodiment of the present application.
  • Fig. 32 is a schematic diagram of the internal structure of another acoustic transducer provided by an embodiment of the present application.
  • Fig. 33 is a schematic structural diagram of a substrate and a vibrating film layer in one of the manufacturing methods of an acoustic transducer provided by an embodiment of the present application;
  • Fig. 34 is a schematic structural view of the vibrating film layer after etching in one of the manufacturing methods of the acoustic transducer provided by an embodiment of the present application;
  • Fig. 35 is a schematic structural diagram of a support member and a piezoelectric cantilever in one of the manufacturing methods of an acoustic transducer provided by an embodiment of the present application;
  • Fig. 36 is a schematic structural view of forming a first elastic film layer on a piezoelectric cantilever in one of the manufacturing methods of an acoustic transducer provided by an embodiment of the present application;
  • Fig. 37 is a schematic structural view after forming the first elastic block in one of the manufacturing methods of the acoustic transducer provided by an embodiment of the present application;
  • Fig. 38 is a schematic structural view after forming the first elastic sealing member in one of the manufacturing methods of the acoustic transducer provided by an embodiment of the present application;
  • Fig. 39 is a schematic structural view of forming a third elastic film layer on two opposite piezoelectric cantilevers in another manufacturing method of an acoustic transducer provided by an embodiment of the present application;
  • Fig. 40 is a schematic structural view of forming a third elastic block on two opposite piezoelectric cantilevers in another manufacturing method of an acoustic transducer provided by an embodiment of the present application;
  • Fig. 41 is a schematic structural view of forming a fourth elastic film layer on the surface of the third elastic block and the piezoelectric cantilever in another method of manufacturing an acoustic transducer provided by an embodiment of the present application;
  • Fig. 42 is a structural schematic diagram of forming a diaphragm between two adjacent third elastic blocks in another manufacturing method of an acoustic transducer provided by an embodiment of the present application;
  • Fig. 43 is a structural schematic diagram of forming a vibrating element on a substrate in another manufacturing method of an acoustic transducer provided by an embodiment of the present application;
  • Fig. 44 is a schematic structural view of forming an elastic member on a substrate in another manufacturing method of an acoustic transducer provided by an embodiment of the present application;
  • Fig. 45 is a schematic structural view of forming a support on a substrate in another manufacturing method of an acoustic transducer provided by an embodiment of the present application;
  • Fig. 46 is a structural schematic diagram of forming a sealing medium layer on the surface of the vibrating element and the elastic member in another manufacturing method of an acoustic transducer provided by an embodiment of the present application;
  • Fig. 47 is a structural schematic diagram of forming an elastic seal between two adjacent piezoelectric cantilevers in another manufacturing method of an acoustic transducer provided by an embodiment of the present application;
  • Fig. 48 is a schematic structural view of forming a fourth elastic film layer on the surface of each piezoelectric cantilever and the substrate in another method of manufacturing an acoustic transducer provided by an embodiment of the present application;
  • Fig. 49 is a structural schematic diagram of forming a diaphragm between two adjacent piezoelectric cantilevers in another method of manufacturing an acoustic transducer provided by an embodiment of the present application;
  • Fig. 50 is a schematic structural view of forming an elastic member on a substrate in another manufacturing method of an acoustic transducer provided by an embodiment of the present application;
  • Fig. 51 is a schematic structural view of forming a support on a substrate in another method of manufacturing an acoustic transducer provided by an embodiment of the present application;
  • Fig. 52 is a structural schematic diagram of forming a sealing medium layer on the surface of the vibrating element and the elastic member in another method of manufacturing an acoustic transducer provided by an embodiment of the present application;
  • Fig. 53 is a structural schematic diagram of forming an elastic seal between the piezoelectric cantilever and the diaphragm in another method of manufacturing an acoustic transducer provided by an embodiment of the present application;
  • Fig. 54 is a schematic structural diagram of another acoustic transducer provided by an embodiment of the present application.
  • Fig. 55 is a schematic structural diagram of another acoustic transducer provided by an embodiment of the present application.
  • An embodiment of the present application provides an electronic device, including an acoustic transducer.
  • the acoustic transducer refers to a device that converts electrical energy and acoustic energy into each other.
  • the transducer that converts electrical energy into acoustic energy is called a transmitting transducer
  • the transducer that converts acoustic energy into electrical energy is a receiving transducer.
  • Transmitting and receiving transducers can usually be used separately, or they can share a single acoustic transducer.
  • the embodiment of the present application is specifically described by taking a transmitting transducer such as a speaker as an example.
  • the electronic devices in the embodiments of the present application may include, but are not limited to, mobile phones, tablet computers, notebook computers, ultra-mobile personal computers (ultra-mobile personal computers, UMPCs), handheld computers, touch TVs, walkie-talkies, netbooks, POS (Point of sales) machines, personal digital assistants (personal digital assistant, PDA), wearable devices such as headsets, Bluetooth glasses, etc., virtual reality devices, etc., have acoustic transducers such as loudspeaker mobile or fixed terminals.
  • electronic equipment may also include but not limited to ultrasonic transducers such as ultrasonic emulsification homogenizers, nebulizers, ultrasonic engraving machines and other equipment, echo sounders and Doppler log meters and other equipment with acoustic transducers .
  • ultrasonic transducers such as ultrasonic emulsification homogenizers, nebulizers, ultrasonic engraving machines and other equipment, echo sounders and Doppler log meters and other equipment with acoustic transducers .
  • FIG. 1 is a schematic structural diagram of an acoustic transducer provided by an embodiment of the present application
  • FIG. 2 is a cross-sectional view of FIG. 1
  • the embodiment of the present application provides an acoustic transducer, including a vibrating element 300 , one side of the vibrating element 300 has a rear cavity 102 , and the other side of the vibrating element 300 has a front cavity 101 .
  • the vibrating element 300 can vibrate along its thickness direction (refer to the direction z shown in FIG. 2 ) to push the air in the front cavity 101 and the rear cavity 102 to vibrate, so that the acoustic transducer emits sound.
  • FIG. 3 is an internal schematic diagram of one structure of an acoustic transducer in the related art
  • FIG. 4 is a schematic internal structure diagram of another structure of the acoustic transducer in the related art.
  • the vibrating element 300 in the acoustic transducer may be a piezoelectric cantilever.
  • the acoustic transducer may also include a housing 10 and a support 20, the support 20 and the piezoelectric cantilever are located in the housing 10, wherein the first support 20
  • One end of the vibrating element 30 such as a piezoelectric cantilever is connected to the second end of the support 200 to ensure the stability of the vibrating element 30 on the support 20 .
  • one end of the vibrating element 30 used to connect to the support member 200 is used as the first end of the vibrating element 30 .
  • the support member 20 can be a cylindrical structure with a hollow structure inside, the vibrating element 30, the inner wall of the support member 20 and part of the housing wall of the housing 10 form a rear cavity, and the vibrating element 30, the outer wall of the support member 20 And another part of the housing wall of the housing 10 forms a front chamber.
  • the piezoelectric film in the vibrating element 30 can be warped and deformed under the action of an electric field, and can be used as a vibrating element to push the airflow in the front cavity and the rear cavity, thereby making the acoustic transducer emit sound.
  • the vibration direction of the vibration element 30 is its own thickness direction. Referring to FIG. 4 , the thickness direction of the vibrating element 30 is parallel to the height direction of the support member 200 (refer to the z direction in FIG. 2 ).
  • the number of vibrating elements 30 may be one or more.
  • the first end of vibrating element 30 is fixedly connected with support member 20, the second end of vibrating element 30 can have gap 31 between support member 20, like this, can guarantee The vibrating element 30 vibrates freely.
  • the structure of the gap 31 enables the thermal viscosity of the air to be used between the vibrating element 30 and the inner wall of the support member 20, so as to ensure the sealing effect between the front cavity and the rear cavity on both sides of the vibrating element 30 as much as possible. Avoid the sound short circuit between the front cavity and the rear cavity, so as to ensure the frequency response of the acoustic transducer.
  • the second end of the vibrating element 30 is the end of the vibrating element 30 facing away from the first end. It can be understood that the gap 31 between the second end of the vibrating element 30 and the support member 20 communicates with the front chamber and the rear chamber, in other words, the gap 31 makes the front chamber and the rear chamber communicate.
  • the sound short circuit means that during the vibration process of the vibrating element 30, in addition to the sound waves radiating to the front cavity, there are also sound waves radiating to the rear cavity.
  • the phases of the sound waves in these two directions are just opposite, that is, the difference is 180°.
  • the out-of-phase sound waves cause the sound waves to cancel each other out, making the acoustic transducer less sensitive and thus reducing the acoustic response.
  • a plurality of vibrating elements 30 can be around the axis of support member 20 (referring to Fig. 4) is arranged at intervals on the second end of the support member 20, in other words, a plurality of vibration elements 30 are arranged at intervals along the circumference of the support member 20, and the plurality of vibration elements 30 are warped and deformed under the action of an electric field , so that vibration occurs to push the airflow in the front cavity and the rear cavity, so that the acoustic transducer converts electrical energy into sound energy.
  • the two vibrating elements 30 are arranged at intervals along the circumference of the support member 20, and the first end of each vibrating element 30 is fixedly connected with the second end of the support member 20, The second end of each vibrating element 30 faces the axis 1 of the support member 20 , for example, the second ends of the two vibrating elements 30 are opposite to each other.
  • the gap 31 cannot achieve an effective seal between the front cavity and the rear cavity, for example, the gap 31 that exists between the second end of the vibrating element 30 and the support 20 makes the second end of the vibrating element 30 A good sealing connection cannot be achieved between the end and the support member 20.
  • the gap 31 that exists at the second ends of the two vibrating elements 30 also makes it impossible to achieve a good sealing connection between the second ends of the two vibrating elements 30, resulting in the front cavity and the rear cavity on both sides of the vibrating element 30.
  • the sound wave in the cavity will leak from the gap 31, thereby causing the sound short circuit problem between the front cavity and the rear cavity, affecting the sensitivity of the acoustic transducer, and reducing the frequency response of the acoustic transducer, for example, at low frequencies such as lower than 2kHz
  • the loudness in the frequency band is within 100dB, which affects the acoustic performance of the acoustic transducer.
  • the embodiment of the present application provides an acoustic transducer.
  • An elastic seal is provided at the gap at one end of the vibrating element to seal the gap connecting the back cavity, such as a micro-slit.
  • the sealing between the front cavity and the rear cavity on the side avoids the sound short circuit between the front cavity and the rear cavity, improves the sensitivity of the acoustic transducer, thereby improving the frequency response of the acoustic transducer, especially the low frequency loudness
  • it can ensure that the vibration element will not be restricted by other structures such as supports or other vibration elements, so that the degree of freedom of the vibration element will not be affected, thereby ensuring the vibration amplitude of the vibration element, so that the acoustic transducer frequency response is improved.
  • Fig. 5 is a partial structural schematic diagram of an acoustic transducer provided by an embodiment of the present application
  • Fig. 5a is an exploded view of Fig. 5
  • Fig. 6 is a longitudinal sectional view of the acoustic transducer corresponding to Fig. 5 . Referring to Fig. 1, Fig. 5 to Fig.
  • the elastic seal 400 is located at the gap 301 and connected to the vibration element 300, for example , the elastic seal 400 is connected to one end of the vibrating element 300 to seal part of the gap 301 at one end of the vibrating element 300 , thereby improving the sealing performance of the rear chamber 102 .
  • one end of the vibrating element 300 can be supported on a fixture (such as the support 200 mentioned below), and the other ends of the vibrating element 300 can be suspended on the fixture, to The vibration amplitude of the vibrating element 300 is guaranteed.
  • one end of the vibrating element 300 connected to the fixture can be used as the first end of the vibrating element 300 (shown in a with reference to FIG.
  • the second end of the vibrating element 300, the end of the vibrating element 300 between the first end a and the second end b is used as the side end of the vibrating element 300 (refer to c in FIG. 5 ).
  • one end of the vibrating element 300 has a gap 301, and the elastic seal 400 is located at the gap 301 to block the gap 301, and the airflow can pass through the gap 301.
  • the elastic sealing member 400 blocks, thereby improving the sealing performance at the gap 301 .
  • Other end portions of the vibrating element 300 can have micro-slits 302 (shown with reference to Fig. 5 and Fig. 5a), like this, the air-flow can utilize the thermal viscosity of the air in the micro-slits 302 of extremely small width to block, to improve the micro-slits 302 places.
  • the vibration amplitude of the entire vibrating element 300 is also ensured.
  • the widths of the slit 301 and the micro-slit 302 are basically the same, but in reality, 302 is a micro-slit, and its width can reach the micron level, which is much larger than the width of 301 .
  • the slit 301 may be located at the second end b of the vibrating element 300 , and the vibrating element 300 has a micro-slit 302 at the side end c. It can be understood that the vibration amplitude of the second end b of the vibrating element 300 is larger than that of other ends such as the side end c, that is, the elastic seal 400 can be arranged at the gap 301 of the end of the vibrating element 300 with a larger vibration amplitude.
  • the vibrating element 300 can be a piezoelectric cantilever 310. After a voltage is applied to the vibrating element 300 such as the piezoelectric cantilever 310, the second end b of the piezoelectric cantilever 310 can be warped and deformed under the action of an electric field.
  • the The second end of the piezoelectric cantilever 310 can warp and deform up and down along the z direction, so that the entire piezoelectric cantilever 310 vibrates up and down along the z direction, and the vibrating element 300 such as the second end b of the piezoelectric cantilever 310 is compared to the side end c , has a larger vibration amplitude, so that, compared with the slits 301 of other side ends c, the slit 301 at the second end b of the vibrating element 300 can become larger during the vibration process of the vibrating element 300, making the sound very easy to Leakage occurs at the gap 301 at the second end b of the vibrating element 300 .
  • the vibrating element 300 By setting the elastic sealing member 400 at the gap 301 at the second end b of the vibrating element 300 to block the gap 301 here, on the one hand, compared with the acoustic transducer in the related art, the vibrating element 300 is improved.
  • the sealing at the gap 301 at one end improves the sealing of the rear cavity 102, thereby improving the sealing and isolation effect between the rear cavity 102 and other cavities such as the front cavity 101 of the acoustic transducer, and reducing the sound at the gap 301.
  • the degree of leakage improves or avoids the sound short-circuit problem between the front chamber 101 and the rear chamber 102, improves the sensitivity of the acoustic transducer, thereby improving the frequency response of the acoustic transducer, especially the low-frequency loudness.
  • the slit 301 at one end of the vibration element 300 is blocked by the elastic seal 400, so that the elastic seal 400 can produce elastic deformation during the vibration of the vibration element 300, so as to release the stress of the vibration element 300 and ensure the vibration
  • the element 300 will not be restrained by other components, so that the degree of freedom of the vibrating element 300 will not be affected, thereby ensuring the vibration amplitude of the vibrating element 300 and improving the frequency response of the acoustic transducer.
  • the gap 301 at one end of the vibrating element 300 can be as wide as the gap 31 (shown in FIG. 4 ) in the related art, or can be wider than the gap 31. Width, the embodiment of the present application does not limit the width of the gap 301 with the elastic seal 400 .
  • the side end c of the vibrating element 300 has a micro-slit 302, the micro-slit 302 is not provided with the elastic seal 400, and the micro-slit of the elastic seal 400 is not provided 302 can utilize the thermal viscosity of air to block the airflow, to improve or avoid the sound short circuit problem between the front cavity 101 and the rear cavity 102, and improve the sensitivity of the acoustic transducer.
  • No elastic seal 400 is provided at the gap 301) at the side end c, which also ensures that the vibration amplitude of the vibrating element 300 will not be restricted.
  • the elastic sealing member 400 can completely seal the gap 301 , of course, it does not need to completely seal the gap 301 , as long as it can prevent the sound generated in the rear cavity 102 from leaking out.
  • the micro-slit 302 is not completely sealed, for example, the side end c of the vibrating element 300 and the fixing member (such as the support member 200) are not completely sealed, as long as it can prevent the sound generated in the rear cavity 102 from leaking outward. Can.
  • the sound transducer of the embodiment of the present application may also include a support member 200, which has an opposite first end along the axial direction (shown with reference to the extension direction of l in Fig. 2) and the second end, in other words, the first end and the second end of the support 200 are two ends of the support 200 along the height direction, wherein the vibrating element 300 can be located at one end of the support 200 such as the second end.
  • one end of the vibrating element 300 such as the first end may be connected to the second end of the support member 200 , and the other end of the vibrating element 300 such as the second end has a gap 301 .
  • the vibrating element 300 of the embodiment of the present application can vibrate along the height direction of the support 200 (shown in the z direction with reference to FIG.
  • the inner cavity produces sound, which is transmitted from the sound outlet 111 .
  • first end of the vibrating element 300 can be directly fixed on the second end of the support 200, for example, the first end of the vibrating element 300 can be fixed on the second end of the support 200 by bonding or high temperature pressing.
  • Two ends of course, in some examples, the first end of the vibrating element 300 can also be fixed to the second end of the support 200 through other structural members, the embodiment of the present application does not specifically relate the first end of the vibrating element 300 to the support 200 The connection mode between them is limited.
  • the supporting member 200 in the embodiment of the present application provides support for structures such as the vibrating element 300 , and the constituent materials of the supporting member 200 may include but not limited to materials such as silicon, germanium, silicon carbide, and aluminum oxide.
  • the support member 200 may be an annular structure with a hollow structure inside, for example, the support member 200 is a support column with a hollow structure, and both ends of the support member along the axial direction are open structures.
  • the radial cross-sectional shape of the support member 200 may include, but not limited to, any one of polygonal, circular, and elliptical shapes.
  • the radial cross-sectional shape of the support member 200 may be circular or rectangular.
  • the support member 200 may be a square ring frame or a circular frame.
  • the supporting member 200 may also be other ring-shaped frames other than a square ring-shaped frame or a circular frame, and the embodiment of the present application does not specifically limit the shape of the supporting member 200 .
  • the vibration element 300 is located at the second end of the support 200, so that the outer wall of the vibration element 300 and the support 200 can be used to form the front cavity 101 of the acoustic transducer, for example, one side surface of the vibration element 300 And the outer wall of the support member 200 can serve as a part of the cavity wall of the front cavity 101 .
  • the inner wall of the vibrating element 300 and the support 200 can be used to form the rear cavity 102, for example, the other side of the vibrating element 300 and the inner wall of the support 200 can be used as a part of the cavity wall of the rear cavity 102, wherein the other side of the vibrating element 300
  • the top wall of the rear cavity 102 can be used, and the inner wall of the support member 200 can be used as a side wall of the rear cavity 102 .
  • the first end of the vibration element 300 in the embodiment of the present application is fixedly connected to the second end of the support member 200 to ensure the structural stability of the vibration element 300 .
  • the second end of the vibrating element 300 refers to the end opposite to the first end of the vibrating element 300 .
  • the first end of the vibrating element 300 is a fixed end, and the second end of the vibrating element 300 can be understood as a free end.
  • the vibrating element 300 includes at least one piezoelectric cantilever 310 as an example.
  • the piezoelectric cantilever 310 can be warped and deformed under the action of an electric field, and by changing the strength of the electric field, the piezoelectric cantilever 310 can vibrate along the height direction of the support 200 to push the front chamber 101 and the rear chamber 102 at a certain frequency
  • the airflow inside makes the acoustic transducer produce sound.
  • the vibration direction of the vibration element 300 such as the piezoelectric cantilever 310 is the thickness direction of the vibration element 300 .
  • the piezoelectric cantilever 310 includes a piezoelectric layer (shown with reference to the piezoelectric layer 312 in FIG. 35 ), and the piezoelectric layer warps and deforms under the action of an electric field.
  • the ground frequency is warped toward the front chamber 101 and the rear chamber 102, so that the piezoelectric cantilever 310 vibrates along the thickness direction to realize the conversion of sound. It can be understood that the vibration amplitude of the piezoelectric cantilever 310 ie the degree of warping and the vibration frequency are related to the electric field strength.
  • the piezoelectric cantilever 310 may also include a bottom electrode layer and a top electrode layer (shown with reference to the bottom electrode layer 311 and the top electrode layer 313 in FIG. On both sides, in other words, the piezoelectric cantilever 310 may include a bottom electrode layer, a piezoelectric layer, and a top electrode layer arranged in sequence along its thickness direction. By applying a voltage to the bottom electrode layer and the top electrode layer, the bottom electrode layer and the top electrode layer An electric field is generated between the top electrode layers, causing the piezoelectric layer to warp and deform under the action of the electric field.
  • the strength of the electric field is determined according to the voltage generated by the driving signal.
  • the acoustic transducer converts the received driving signal into a driving voltage and applies it to the bottom electrode layer and the top electrode layer of the piezoelectric cantilever 310, thereby A corresponding electric field intensity is generated, so that the piezoelectric layer is warped and deformed accordingly, and the air in the front chamber 101 and the rear chamber 102 is pushed to generate sound.
  • the bottom electrode layer and the top electrode layer may include but not limited to a single element metal film such as a copper film or an aluminum film, and may also be a composite film such as a chromium-gold film or a titanium-palladium-gold film, and the composition material of the piezoelectric layer may include But not limited to inorganic piezoelectric materials such as barium titanate and other piezoelectric crystals or piezoelectric ceramic films, organic piezoelectric materials such as polyvinylidene fluoride (Poly vinylidene fluoride, PVDF for short) and other polymer films.
  • the piezoelectric ceramic film may be a lead zirconate-titanate piezoelectric ceramics (referred to as PZT) film.
  • the piezoelectric cantilever 310 may further include a substrate layer (shown with reference to the top layer silicon 230 in FIG. In 35 , the z-direction is sequentially stacked on the substrate layer such as the top layer silicon 230 .
  • the substrate layer plays a role of supporting the piezoelectric layer or the piezoelectric layer and the electrode layer, so that the structure of the entire piezoelectric cantilever 310 is more stable.
  • the substrate layer may be a silicon substrate, for example, the substrate layer may be the top layer silicon 230 in silicon on insulator (Silicon On Insulator, SOI for short) (refer to FIG. 35 ).
  • the substrate layer can also be heavily doped silicon such as p-type heavily doped silicon or n-type heavily doped silicon.
  • the substrate layer can be silicon nitride. Restrictions can be made according to actual needs.
  • the piezoelectric cantilever 310 may further include an elastic layer, and the elastic layer may be disposed on any layer of the piezoelectric cantilever 310, for example, the elastic layer may be disposed on any side of the piezoelectric layer, or the elastic layer may The layer is arranged on the side of the top electrode layer facing away from the piezoelectric layer, so as to improve the elasticity of the piezoelectric cantilever 310 and prevent the piezoelectric cantilever 310 from breaking due to excessive rigidity during vibration.
  • composition material of the elastic layer may include but not limited to silica gel, rubber, liquid crystal polymer (Liquid Crystal Polyester, referred to as LCP) and polyimide (Polyimide, referred to as PI), which can be selected according to actual needs. .
  • LCP liquid crystal polymer
  • PI polyimide
  • each layer in the piezoelectric cantilever 310 and the number of structural layers are not limited.
  • the piezoelectric layer in the piezoelectric cantilever 310 can be one layer or multiple layers.
  • the thickness of the piezoelectric cantilever 310 can be 2 um-100 um to ensure the vibration amplitude and structural stability of the piezoelectric cantilever 310 .
  • the thickness of the piezoelectric cantilever 310 can be a suitable value such as 2um, 10um, 50um, 70um or 100um, which can be selected according to actual needs.
  • conductive members such as wires for providing electrical energy to the piezoelectric cantilever 310 can be routed from the support 200 and electrically connected to the bottom electrode layer and the top electrode layer of the piezoelectric cantilever 310 to provide voltage for the piezoelectric cantilever 310 .
  • conductive parts such as wires can also be routed from the front cavity 101 or the rear cavity 102, and finally electrically connected to the bottom electrode layer and the top electrode layer of the piezoelectric cantilever 310, the embodiment of the present application does not specifically connect to the piezoelectric cantilever 310 The wiring path of the conductive parts is restricted.
  • the vibrating element 300 is provided with a piezoelectric cantilever 310, and by applying a voltage to the piezoelectric cantilever 310, the piezoelectric material in the piezoelectric cantilever 310 is warped and deformed under the action of an electric field, which can play the role of pushing air.
  • the piezoelectric material in the piezoelectric cantilever 310 is warped and deformed under the action of an electric field, which can play the role of pushing air.
  • it can achieve the purpose of converting electrical energy into acoustic energy, on the other hand, it simplifies the structure of the acoustic transducer.
  • FIG. 7 is a partial enlarged view of A in FIG. 6 .
  • the vibrating element 300 may include a piezoelectric cantilever 310, the first end of the piezoelectric cantilever 310 is fixedly connected to the second end of the support member 200, and the second end of the piezoelectric cantilever 310 It is connected with the elastic sealing member 400 , and the elastic sealing member 400 is at least blocked at the gap 301 at the second end of the vibrating element 300 such as the piezoelectric cantilever 310 .
  • the gap 301 at the second end of the vibration element 300 such as the piezoelectric cantilever 310 communicates with the front chamber 101 and the rear chamber 102 (as shown in FIG. 6 ), so that the elastic seal 400 seals the vibration element 300 such as the piezoelectric
  • the gap 301 at the second end of the cantilever 310 is sealed, so that the sealing performance between the front cavity 101 and the rear cavity 102 is improved.
  • the structure of the acoustic transducer will be described first by taking the vibrating element 300 as a piezoelectric cantilever 310 as an example.
  • the first end of the piezoelectric cantilever 310 (refer to FIG. It can be stably fixed on the second end of the support member 200 during vibration.
  • the second end (refer to b in FIG. 5 ) and the side end (refer to c in FIG. 5 ) of the piezoelectric cantilever 310 need to be suspended from the second end of the support 200.
  • both the second end b and the side end c of the piezoelectric cantilever 310 and the side wall of the support 200 have gaps 301 in a direction perpendicular to the height of the support 200 .
  • the side end c of the piezoelectric cantilever 310 is the end of the piezoelectric cantilever 310 other than the first end a and the second end b, for example, the second end b of the piezoelectric cantilever 310 and the side of the support member 200
  • the first end a and the second end b of the piezoelectric cantilever 310 can be respectively the two ends of the piezoelectric cantilever 310 along the length direction, Then the side ends of the piezoelectric cantilever 310 are two ends of the piezoelectric cantilever 310 along the width direction.
  • the vibrating element 300 such as the second end of the piezoelectric cantilever 310 is connected to the second end of the support member 200 through the elastic seal 400, in other words, one end of the elastic seal 400 is connected to the piezoelectric cantilever. 310 , and the other end of the elastic seal 400 is connected to the second end of the support 200 , so that the gap 301 between the second end of the piezoelectric cantilever 310 and the support 200 is elastically sealed by the elastic seal 400 .
  • the elastic seal 400 can elastically deform during the vibration of the vibrating element 300 such as the piezoelectric cantilever 310, thereby releasing the stress of the piezoelectric cantilever 310 and ensuring that the piezoelectric cantilever 310 will not be restrained by the support member 200, so that the piezoelectric cantilever 310
  • the degree of freedom of the piezoelectric cantilever 310 will not be affected, and the vibration displacement of the piezoelectric cantilever 310 along the z direction is improved, thereby increasing the vibration amplitude of the piezoelectric cantilever 310, so that the frequency response of the acoustic transducer can be improved.
  • the embodiment of the present application connects the second end of the vibrating element 300 such as the piezoelectric cantilever 310 with an elastic seal 400, to seal the gap 301 at the second end of the vibrating element 300, for example, realize the sealing connection between the second end of the vibrating element 300, such as the piezoelectric cantilever 310, and the support 200, and improve the vibrating element 300.
  • the tightness between the support member 200 thereby improving the tightness between the front cavity 101 and the rear cavity 102 on both sides of the vibrating element 300 along the vibration direction (shown in the z direction in FIG.
  • the sound short circuit problem between the cavity and the rear chamber 102 improves the sensitivity of the acoustic transducer, thereby improving the frequency response of the acoustic transducer, especially the low-frequency loudness is improved.
  • the inner wall of an electronic device such as an earphone can serve as part of the cavity walls of the front cavity 101 and the rear cavity 102 of the acoustic transducer.
  • the support 200 and the vibration element 300 of the acoustic transducer can be assembled in the earphone, and the first end of the support 200 is fixed on the inner wall of the earphone, so that the vibration element 300, the outer wall of the support 200 and the earphone A part of the housing wall can form the front chamber 101, and the vibrating element 300, the inner wall of the support member 200 and another part of the housing wall of the earphone form the rear chamber 102, that is to say, the front chamber 101 and the rear chamber 102 are parts of the earphone respectively. lumen.
  • the acoustic transducer may further include a housing 100 having an inner cavity, and both the vibrating element 300 and the support member 200 are located in the inner cavity of the housing 100 .
  • the housing 100 may include a base 120 and a shell 110 connected to the periphery of the base 120.
  • One side of the shell 110, such as the bottom, is an open structure, and the base 120 is arranged on the opening.
  • the base 120 and the shell 110 jointly enclose an acoustic The cavity of the transducer.
  • the base 120 provides support for main structures such as the support 200 and the vibrating element 300. Therefore, the base 120 can be made of high-strength hard materials.
  • the material of the base 120 can include but not limited to metal, hard resin, Hard materials such as ceramics and semiconductors are used to ensure the structural strength of the base 120 so as to stably support the supporting member 200 and the vibrating element.
  • the shell 110 can be made of plastic, rubber and other materials, and of course, it can also be made of the same material as the base 120 .
  • the base 120 and the shell 110 of the shell 100 can be integrally formed as one piece to improve the structural stability of the shell 100, and also avoid the connecting process between the base 120 and the shell 110, so that the shell 100
  • the housing 100 can be integrally cast.
  • the base 120 and the shell 110 can be formed by two-color injection molding.
  • the casing 100 can also be a separate piece, for example, the base 120 can be fixed on the casing 110 by bonding, screwing, or high-temperature pressing.
  • the embodiment of the present application does not limit the molding manner of the casing 100 .
  • the first end of the support 200 can be fixed on the inner wall of the housing 100, so that the vibrating element 300 can be suspended in the cavity of the housing 100 through the support 200 .
  • the first end of the support 200 can be fixed on the hard base 120 of the housing 100 , so as to ensure the structural stability of the support 200 and the vibrating elements on the support 200 such as the first vibrating element 300 .
  • the vibration element 300, the outer wall of the support member 200 and a part of the housing wall of the housing 100 can form the front chamber 101, and the vibration element 300, the inner wall of the support member 200 and another part of the housing wall of the housing 100 form the rear chamber 102, In other words, the inner wall of the support member 200 faces the rear chamber 102 , and the outer wall of the support member 200 faces the front chamber 101 .
  • the housing wall forming the rear cavity 102 in the housing 100 refers to the inner wall located inside the first end of the support member 200
  • the housing wall forming the front chamber 101 in the housing 100 refers to the inner wall located outside the support member 200.
  • inner wall of the housing For example, when the first end of the support 200 is fixed on the base 120, the inner wall of the vibrating element 300, the support 200 and the part of the base 120 located inside the support 200 form the rear cavity 102, and the vibrating element 300, the outer wall of the support 200
  • the front cavity 101 is formed by the shell 110 in the housing 100 and part of the base 120 outside the support 200 .
  • a sound outlet 111 is formed on the housing wall of the housing 100 located in the front chamber 101 to transmit the sound of the front chamber 101 , such as the front chamber.
  • one or more sound outlets 111 arranged at intervals may be formed on the casing wall of the casing 110 facing the vibrating element 300 .
  • a damping mesh (not shown) may be provided on the sound outlet 111 to improve the compliance of the air in the casing 100, thereby improving the acoustic performance of the acoustic transducer of the embodiment of the present application .
  • the shape of the end (eg, the first end, the second end or the side end) of the vibrating element 300 such as the piezoelectric cantilever 310 may match the radial cross-sectional shape of the support member 200 .
  • the vibrating element 300 such as the piezoelectric cantilever 310 has a rectangular cross-sectional shape along the direction perpendicular to the thickness, wherein the vibrating element 300 such as the piezoelectric cantilever 310
  • the first end, the side end and the second end of the support member 200 are planar structures matched with each side of the support member 200 .
  • Fig. 8 is a schematic diagram of the internal structure of another acoustic transducer provided by an embodiment of the present application
  • Fig. 9 is a longitudinal sectional view of the acoustic transducer corresponding to Fig. 8
  • Fig. 10 is a partial enlarged view at B in Fig. 9 . 8-10
  • the vibrating element 300 may include two piezoelectric cantilevers 310, the first ends of the two piezoelectric cantilevers 310 are fixedly connected to the first side of the second end of the support member 200, The second ends of the two piezoelectric cantilevers 310 are opposite and spaced apart. In other words, there is a gap 301 between the second ends of the two piezoelectric cantilevers 310 (refer to FIG. 8 and FIG. 10 ).
  • the radial cross-sectional shape of the support member 200 is a rectangle
  • the horizontal cross-sectional shape of the two piezoelectric cantilevers 310 can both be rectangular
  • the first ends of the two piezoelectric cantilevers 310 are respectively connected to the two long sides of the second end of the support member 200. They are fixedly connected, the second ends of the two piezoelectric cantilevers 310 are both facing the symmetrical line of the long side of the rectangle, and there is a gap 301 between the second ends of the two piezoelectric cantilevers 310 .
  • the elastic sealing member 400 is located at the gap 301 at the second ends of the two piezoelectric cantilevers 310, and the elastic sealing member 400 is sealingly connected with the second ends of the two piezoelectric cantilevers 310, in other words, the two The second end of the piezoelectric cantilever 310 is connected through an elastic seal 400 .
  • the elastic seal 400 will elastically deform during the vibration of the two piezoelectric cantilevers 310 , so as to release the stress of each piezoelectric cantilever 310 and prevent the two piezoelectric cantilevers 310 from being restrained by each other to affect the vibration amplitude.
  • FIG. 11 is a schematic diagram of the internal structure of another acoustic transducer provided by an embodiment of the present application
  • FIG. 12 is a partial enlarged view at point C in FIG. 11
  • the vibrating element 300 of the embodiment of the present application may include a plurality of piezoelectric cantilevers 310, and the plurality of piezoelectric cantilevers 310 may be arranged at intervals around the axis of the support 200 at the second end of the support 200, in other words , a plurality of piezoelectric cantilevers 310 are arranged at intervals along the circumferential direction of the support member 200 .
  • each piezoelectric cantilever 310 is fixedly connected with the second end of the support member 200, that is, the first ends of a plurality of piezoelectric cantilever 310 are arranged at intervals along the circumference of the support member 200, and each piezoelectric cantilever
  • the second ends of the electric cantilevers 310 all face the axis of the support 200 , in other words, the second ends of each piezoelectric cantilever 310 can all face the center of the second end of the support 200 .
  • the four piezoelectric cantilevers 310 are arranged at intervals around the axis of the support 200 at the second end of the support 200 , for example, the first four piezoelectric cantilevers 310
  • the ends are arranged at intervals along the circumference of the support member 200 , and the second ends of the four piezoelectric cantilevers 310 can all face the center of the second end of the support member 200 .
  • any two of the four piezoelectric cantilevers 310 can be two adjacent piezoelectric cantilevers 310 .
  • two adjacent piezoelectric cantilevers 310 may refer to two adjacent piezoelectric cantilevers 310 along the circumference of the support 200 , or may refer to two adjacent piezoelectric cantilevers 310 along the radial direction of the support 200 .
  • the gap 301 is located at the side end of the piezoelectric cantilever 310, for example, the gap 301 between two adjacent piezoelectric cantilevers 310 along the circumferential direction of the support 200 is located at the side end of two adjacent piezoelectric cantilevers. 310 between the side ends.
  • the gap 301 between two adjacent piezoelectric cantilevers 310 in the radial direction of the support member 200 is located between the second ends of the two adjacent piezoelectric cantilevers 310 .
  • each piezoelectric cantilever 310 can be fan-shaped, and the arc-shaped end of the piezoelectric cantilever 310 in a fan-shaped structure serves as the piezoelectric cantilever 310
  • the first end of the piezoelectric cantilever 310 is fixedly connected to the support 200 , and the center end of the fan-shaped piezoelectric cantilever 310 can be used as the second end of the piezoelectric cantilever 310 , and can be arranged towards the center of the support 200 .
  • gaps 301 there may be a gap 301 between the center ends of two adjacent piezoelectric cantilevers 310 in a fan-shaped structure along the radial direction of the support 200, such as the x direction, and the radial ends of two adjacent piezoelectric cantilevers 310 along the circumferential direction of the support 200 There may be gaps 301 therebetween.
  • an elastic sealing member 400 (shown in FIG. 12 ) at the gap between two adjacent piezoelectric cantilevers 310, and the elastic sealing member 400 is connected with two adjacent piezoelectric cantilevers, so that the adjacent The gap 301 between the two piezoelectric cantilevers 310 is sealed to improve the sealing effect of the front chamber 101 and the rear chamber 102 .
  • the second ends of two adjacent piezoelectric cantilevers 310 are also connected by an elastic seal 400 , for example, two adjacent piezoelectric cantilevers 310 can be connected through the elastic seal 400 and the vibrating membrane 320 mentioned below.
  • the connection between the second ends of the piezoelectric cantilever 310 (refer to FIG. 16 ) can improve the sealing and isolation effect between the front chamber 101 and the rear chamber 102 .
  • two adjacent piezoelectric cantilevers 310 are connected by an elastic seal 400 to block the gap 301 between two adjacent piezoelectric cantilevers 310, thereby improving the front cavity 101 and the rear cavity.
  • the sealing and isolation effect between 102 can improve or prevent the sound waves between the front cavity 101 and the rear cavity 102 from canceling each other, and ensure the frequency response of the acoustic transducer of the embodiment of the present application.
  • the elastic sealing member 400 will elastically deform during the vibration of two adjacent piezoelectric cantilevers 310, thereby releasing the stress of each piezoelectric cantilever 310 and preventing the two adjacent piezoelectric cantilevers 310 from being restrained by each other. affect the vibration amplitude.
  • the elastic seal 400 in the embodiment of the present application has multiple structural configurations.
  • the first structure of the elastic seal 400 can be regarded as the first elastic seal 410
  • the second structure of the elastic seal 400 can be regarded as The second elastic sealing member 420, and so on.
  • the elastic seal 400 may include a connecting portion 412 and two opposite elastic blocks (for example, The first elastic block 411 is used to distinguish it from the elastic blocks of other elastic seals 400 hereinafter).
  • one end of two elastic blocks such as a first elastic block 411 is connected to two adjacent piezoelectric cantilevers 310 respectively, in other words, one of the first elastic blocks 411 is connected to one of the piezoelectric cantilever 310
  • the other first elastic block 411 is connected to the other piezoelectric cantilever 310
  • the connecting part 412 is connected between the other ends of the two first elastic blocks 411, so that the second ends of the two adjacent piezoelectric cantilevers 310
  • the gap 301 between them is blocked by two elastic blocks and the connecting part 412 .
  • the two ends of the elastic block such as the first elastic block 411 refer to the two ends of the elastic block along the height direction (such as shown in the z direction in FIG. 10 ), for example, the two first elastic blocks 411 along the height direction.
  • One end is connected to two piezoelectric cantilevers 310 respectively, and the other ends of the two first elastic blocks 411 along the height direction are connected to the connecting part 412, so that two adjacent piezoelectric cantilevers 310 pass through the two first elastic blocks 411 and the connecting part 412 to achieve a sealed connection.
  • the first elastic blocks 411 on two adjacent piezoelectric cantilevers 310 are arranged on the same side of two adjacent piezoelectric cantilevers 310 , for example, one of the first elastic blocks 411 is arranged therein
  • One piezoelectric cantilever 310 faces to the side of the front chamber 101
  • the other first elastic block 411 is disposed on the side of the other piezoelectric cantilever 310 facing to the front chamber 101 .
  • one of the first elastic blocks 411 may be disposed on one side of one piezoelectric cantilever 310 facing the rear chamber 102
  • the other first elastic block 411 is disposed on the other piezoelectric cantilever 310 facing the rear chamber 102 side.
  • the connecting portion 412 is provided at one end of the two first elastic blocks 411 facing away from the piezoelectric cantilever 310, in other words, one end of the connecting portion 412 is connected to one of the first elastic blocks 411 facing away from the piezoelectric cantilever. 310, the other end of the connecting portion 412 is connected to another end of the first elastic block 411 facing away from the piezoelectric cantilever 310, so that the gap 301 between the two first elastic blocks 411 can be blocked by the connecting portion 412, The sealing performance at the gap 301 between two adjacent piezoelectric cantilevers 310 is improved, thereby improving the sealing and isolation effect between the front chamber 101 and the rear chamber 102 .
  • the first elastic block 411 can be elastically deformed during the vibration process of the corresponding piezoelectric cantilever 310, so that each piezoelectric cantilever 310 can pass through
  • the elastic deformation of the elastic block releases the stress, preventing two adjacent piezoelectric cantilevers 310 from pinning each other and affecting the vibration displacement of each piezoelectric cantilever 310 along the z direction, so that the vibration amplitude of each piezoelectric cantilever 310 will not be affected.
  • the vibrating element 300 includes a piezoelectric cantilever 310
  • one ends of the two first elastic blocks 411 can be respectively connected with the piezoelectric cantilever 310 and the support member 200 (not shown in the figure), in other words, One end of one of the first elastic blocks 411 is connected to the piezoelectric cantilever 310, and one end of the other first elastic block 411 is connected to the support member 200.
  • one end of the connecting portion 412 is connected to one end of one of the first elastic blocks 411 facing away from the piezoelectric cantilever 310 , and the other end of the connecting portion 412 is connected to one end of the other first elastic block 411 facing away from the support member 200 In this way, the gap 301 between the second end of the piezoelectric cantilever 310 and the support member 200 can be blocked by the connecting portion 412 , thereby improving the sealing and isolation effect between the front chamber 101 and the rear chamber 102 .
  • an elastic block such as the first elastic block 411 can be arranged on the side of the first vibrating element 300 facing the front cavity 101.
  • the elastic block such as the first elastic block 411 and the connecting part 412 may include but not limited to at least one of elastic polymers such as silica gel, rubber, polyethylene isobutyl ether, polyimide, and polyethyleneimide One, to ensure the tightness and elasticity of the elastic block and the connecting part 412.
  • the constituent materials of the elastic block as the above-mentioned materials, to ensure that the elastic modulus of the elastic block is 100MPa-3GPa, so that the elastic block can effectively perform elastic deformation during the vibration process of the first vibrating element 300, thereby releasing the first vibrating element 300 A stress on the vibrating element 300 increases the vibration amplitude of the vibrating element.
  • the elastic modulus of the elastic block can be a suitable value such as 100MPa, 500MPa, 1Gpa or 3Gpa, and the elastic modulus of the elastic block can be adjusted by selecting the constituent materials of the elastic block according to actual needs.
  • the height of the elastic block may be 10um-50um.
  • the height of the elastic block can be a suitable value such as 10um, 20um, 30um, 40um or 50um, which can be adjusted according to actual needs such as the stiffness of the first vibrating element 300, for example, the higher the stiffness of the first vibrating element 300, Then it is necessary to select a higher elastic block, for example, the height of the elastic block can be set to 50um to improve the elasticity of the elastic block and ensure the vibration amplitude of the first vibrating element 300 .
  • the elasticity of the elastic block is guaranteed, and the elasticity of the elastic block is too small to avoid the connection between two adjacent first vibrating elements 300.
  • the stress is released, thereby ensuring that each first vibrating element 300 can vibrate freely, ensuring the vibration amplitude of the first vibrating element 300, and avoiding the excessive height of the elastic block from occupying the height space in the housing 100.
  • the elastic block is too high, it will also affect the structural stability of the elastic block, so as to ensure that the elastic block will not collapse during the deformation process.
  • the ratio of the width to the height of the elastic block can be set to 0.1-100, so as to improve the elasticity of the elastic block, and also ensure the structural stability of the elastic block during the vibration of the first vibrating element 300 .
  • the ratio of the width to the height of the elastic block can be 0.1, 0.2, 0.5, 1, 10, 20, 50 or 100 and other suitable ratios, for example, when the height of the elastic block is 10um, the width of the elastic block can be 1um-1mm, for example, the width of the elastic block can be 1um, 2um, 5um, 10um, 100um, 200um, 500um or 1mm, which can be adjusted according to actual needs.
  • each elastic seal 400 such as the first elastic seal 410 can be a strip structure, for example, as shown in FIG. 8, the second ends of the two piezoelectric cantilevers 310 There is a first elastic seal 410 between them, and the extension direction of the first elastic seal 410 is consistent with the extension direction of the gap 301 between the two piezoelectric cantilevers 310 (refer to the y direction shown in FIG. 8 ), and the Both ends of the first elastic sealing member 410 extend to both ends of the gap 301 respectively.
  • both ends of the first elastic block 411 of the first elastic sealing member 410 extend to both ends of the gap 301 respectively.
  • Both ends of the connecting portion 412 of an elastic sealing member 410 extend to both ends of the gap 301 respectively, so that the gap 301 can be sealed by an elastic sealing member 410 .
  • the gap 301 between two adjacent piezoelectric cantilevers 310 can be sealed by a plurality of first elastic seals 410 .
  • a plurality of first elastic seals 410 may be provided along the extending direction of the gap 301, and the plurality of first elastic sealing members 410 may be arranged at intervals or in contact along the extending direction of the gap 301.
  • the quantity of the first elastic sealing member 410 on each slit 301 is not limited.
  • FIG. 13 is a partial structural schematic diagram of yet another acoustic transducer provided by an embodiment of the present application
  • FIG. 14 is a partial enlarged view at point D in FIG. 13 . 7 and 14, as another possible arrangement of the elastic seal 400
  • the elastic seal 400 (for example, the second elastic seal 420) of the embodiment of the present application may include an elastic member 421 and a sealing medium layer 422, wherein the elastic member 421 has a gap, and the sealing medium layer 422 is used to seal the gap.
  • the elastic member 421 can be a spring structure formed by etching or patterning on a silicon chip, polyimide, etc., that is, the elastic member 421 has a void pattern inside, so that the elastic member 421 can move in one direction, such as its own extension direction. (shown with reference to the x direction in Figure 7) has elasticity.
  • one end of the elastic member 421 is connected to the piezoelectric cantilever 310 , and the other end of the elastic member 421 is connected to the support member 200 or the adjacent piezoelectric cantilever 310 .
  • the other end of the elastic member 421 is connected to the support member 200 or the adjacent piezoelectric cantilever 310 .
  • the second end of the piezoelectric cantilever 310 is connected to the support member 200 through an elastic member 421, that is to say, the elastic member 421 One end is connected to the second end of the piezoelectric cantilever 310, and the other end of the elastic member 421 is connected to the support member 200, so that the elastic member 421 undergoes elastic deformation during the vibration of the piezoelectric cantilever 310, thereby releasing the stress of the piezoelectric cantilever 310 , so that the vibration process of the piezoelectric cantilever 310 will not be restrained by the support member 200 , thereby ensuring the vibration amplitude of the piezoelectric cantilever 310 .
  • two adjacent piezoelectric cantilevers 310 can be connected through the elastic member 421 , for example, two adjacent piezoelectric cantilevers 310 along the circumference of the support member 200 can be connected through an elastic member. 421, wherein one end of the elastic member 421 is connected to one of the two adjacent piezoelectric cantilevers 310, and the other end of the elastic member 421 is connected to the other of the two adjacent piezoelectric cantilevers 310, so that the adjacent two The piezoelectric cantilever 310 will not be restrained by each other during the vibration process, thereby increasing the vibration amplitude of the vibration element 300 .
  • the two ends of the elastic member 421 can be respectively connected to the side ends of two adjacent piezoelectric cantilevers 310 facing each other, that is, the elastic member 421 is located between two adjacent piezoelectric cantilevers. Between the cantilevers 310 .
  • the two ends of the elastic member 421 can be respectively connected to two adjacent piezoelectric cantilevers 310 on the side facing the front cavity 101 or on the side facing the rear cavity 102.
  • the connecting position of the elastic member 421 and the first vibrating element 300 is not limited.
  • the sealing medium layer 422 seals the gap on the elastic member 421, so as to improve the sealing performance between two adjacent piezoelectric cantilevers 310, or between the piezoelectric cantilever 310 and the support member 200, and improve the front cavity 101 and the rear cavity.
  • the tightness of the cavity 102 improves or avoids the sound short circuit between the front cavity 101 and the rear cavity 102, thereby improving the frequency response of the acoustic transducer.
  • the sealing medium layer 422 can be an elastic film, and at least part of the elastic film can cover at least one side of the elastic member 421 along the direction perpendicular to the elastic direction.
  • the elastic film covers the elastic The side of the member 421 facing the front chamber 101, or the elastic film covers the side of the elastic member 421 facing the rear cavity 102 to seal the elastic member 421, or the elastic film covers the two sides of the elastic member 421 along the elastic direction to improve This ensures the tightness of the connection between the piezoelectric cantilever 310 and the support member 200 , or between two adjacent piezoelectric cantilevers 310 , thereby improving the sealing effect between the front chamber 101 and the rear chamber 102 .
  • the elastic film can cover part of the surface on one side of the elastic member 421 , or cover the entire surface on one side of the elastic member 421 , so as to improve the sealing effect of the elastic film on the elastic member 421 .
  • the surface of the sealing medium layer 422, such as an elastic film, can protrude from the surface of the vibrating element 300, such as the piezoelectric cantilever 310, for example, as shown in FIG. 7, the sealing medium layer 422 Covering the surface of the elastic member 421 facing the front chamber 101, wherein the surface of the elastic member 421 facing the front chamber 101 is flush with the surface of the piezoelectric cantilever 310, and the sealing medium layer 422 covers the surface of the elastic member 421, then the sealing medium The layer 422 is higher than the surface of the piezoelectric cantilever 310 facing the front chamber 101 , for example, a part of the sealing medium layer 422 may extend to the surface of the piezoelectric cantilever 310 .
  • Fig. 7a is a partial schematic diagram of another acoustic transducer provided by an embodiment of the present application.
  • the sealing medium layer 422 can also be flush with the surface of the vibrating element 300 such as the piezoelectric cantilever 310. For example, as shown in FIG.
  • the thickness of the elastic member 421 is smaller than the thickness of the piezoelectric cantilever 310
  • the surface of the elastic member 421 facing the front chamber 101 is lower than the surface of the piezoelectric cantilever 310 facing the front chamber 101
  • the sealing medium layer 422 such as an elastic film
  • Fig. 7b is a partial schematic diagram of another acoustic transducer provided by an embodiment of the present application.
  • a part of the sealing medium layer 422 such as an elastic film can also cover the surface of the vibrating element 300, for example, a part of the elastic film covers the surface of the vibrating element 300 such as the piezoelectric cantilever 310, and the elastic Another part of the film covers the surface of the elastic member 421 .
  • a part of the sealing medium layer 422 such as an elastic film covers the surface of the piezoelectric cantilever 310 facing the front cavity 101
  • another part of the sealing medium layer 422 such as an elastic film covers the surface of the elastic member 421 facing the front cavity 101 s surface.
  • the elastic film can cover part of the surface of the piezoelectric cantilever 310 facing the front chamber 101, or cover the entire surface of the piezoelectric cantilever 310 facing the front chamber 101 (refer to FIG. 7b).
  • a part of the elastic film is covered on the surface of the elastic member 421, and another part is covered on the surface of the vibrating element 300 such as the piezoelectric cantilever 310.
  • the elastic film can play the role of sealing the elastic member, and on the other hand
  • the flexibility and elasticity of the vibrating element 300 can be improved, so that the vibration amplitude of the vibrating element 300 can be improved.
  • the structural stability of the vibrating element 300 during the vibration process can be improved, and the vibration element 300 can be prevented from being broken due to excessive rigidity. situation, thereby prolonging the service life of the vibrating element 300 .
  • the elastic modulus of the elastic film is 5Mpa-200Mpa, so as to ensure the elasticity of the elastic film.
  • the elastic modulus of the elastic film may be any value among 5Mpa, 20Mpa, 100Mpa, 150Mpa or 200Mpa.
  • the modulus of elasticity of the elastic film is related to the material of the elastic film. Therefore, in order to ensure that the modulus of elasticity of the elastic film is within the above range, the elastic film may include but not limited to polydimethylsiloxane (Polydimethylsiloxane, At least one polymer film such as PDMS) film, silica gel film, rubber film, polyethylene isobutyl ether film, polyimide film and polyethyleneimide film.
  • the elastic film can be a polydimethylsiloxane film or a silicone film, which can be selected according to actual needs. It can be understood that the material of the elastic membrane may be consistent with that of the vibrating membrane.
  • the sealing medium layer 422 As an elastic film, on the one hand, the sealing effect on the elastic member 421 can be ensured; Simple.
  • the thickness of the elastic film can be 1um-100um.
  • the thickness of the elastic film can be set to a suitable value such as 1um, 20um, 40um, 60um, 80um or 100um, so as to ensure the elasticity and sealing of the elastic film and avoid.
  • the elastic film is too thick, the elasticity of the elastic film will be reduced.
  • the elastic film is too thick, it will occupy too much space in the front cavity 101 or the rear cavity 102, which will affect the frequency response of the acoustic transducer.
  • the elastic film is too thin.
  • the sealing performance of the elastic film cannot be guaranteed, so the sealing effect on the elastic member 421 cannot be guaranteed.
  • it is not easy to make the elastic film which increases the difficulty of making the elastic film.
  • the elastic If the mold is too thin, its structural stability cannot be guaranteed.
  • Fig. 15 is a longitudinal schematic diagram of another acoustic transducer provided by an embodiment of the present application.
  • the vibration element of the acoustic transducer according to the embodiment of the present application may further include at least one diaphragm 320 , and each diaphragm 320 is connected to a piezoelectric cantilever 310 .
  • the number of diaphragm 320 may be one.
  • the vibrating element 300 includes a piezoelectric cantilever 310 and a diaphragm 320, and the diaphragm 320 is located on either side of the piezoelectric cantilever 310 along the vibration direction.
  • One side (as shown in FIG. 15 ), and one end of the diaphragm 320 is close to the second end of the piezoelectric cantilever 310, for example, one end of the diaphragm 320 is aligned with the second end of the piezoelectric cantilever 320 in the z direction flat.
  • the piezoelectric cantilever 310 can be used as a driver to drive the diaphragm 320 to vibrate.
  • the piezoelectric cantilever 310 can drive the diaphragm 320 to vibrate during the warping deformation process.
  • the piezoelectric cantilever 310 and the diaphragm 320 can push the air in the front cavity 101 and the rear cavity 102 simultaneously, which improves the reliability of the vibration element 300 pushing the air, thereby improving the sound performance of the acoustic transducer of the embodiment of the present application.
  • the setting of the diaphragm 320 improves the elasticity of the vibrating element 300, so that the structure of the vibrating element 300 can be more flexible during the vibration process, so as to avoid failure or even breakage of the vibrating element 300 due to excessive rigidity during the vibration process, thus prolonging the life of the vibrating element 300.
  • the service life of the vibrating element 300 improves the elasticity of the vibrating element 300, so that the structure of the vibrating element 300 can be more flexible during the vibration process, so as to avoid failure or even breakage of the vibrating element 300 due to excessive rigidity during the vibration process, thus prolonging the life of the vibrating element 300.
  • the service life of the vibrating element 300 improves the elasticity of the vibrating element 300, so that the structure of the vibrating element 300 can be more flexible during the vibration process, so as to avoid failure or even breakage of the vibrating element 300 due to excessive rigidity during the vibration process, thus prolonging the life of the vibrating element 300.
  • the service life of the vibrating element 300 improves the elasticity of
  • the thickness of the vibrating membrane 320 may be 10um-30um, for example, the thickness of the vibrating membrane 320 may be 10um, 20um, 30um and other appropriate values. If the diaphragm 320 is too thick or too thin, it will affect the structural elasticity. In addition, if the diaphragm 320 is too thin, its propulsion effect on the air will be weak. If the diaphragm 320 is too thick, it will not only reduce the elasticity of the diaphragm 320, but also occupy the Too much space within 100 will affect the frequency response of the acoustic transducer.
  • composition material of the diaphragm 320 may be the same as the elastic layer of the piezoelectric cantilever 310 described above, which will not be repeated here.
  • the elastic seal 400 is located at the gap 301 at the second end of the piezoelectric cantilever 1, and the elastic seal 400 can be connected with the diaphragm 320 and the support 200 respectively, so as to protect the piezoelectric
  • the gap 301 between the second end of the cantilever 1 and the support member 200 is sealed.
  • the second end of the piezoelectric cantilever 1 is connected to the second elastic sealing member 420, wherein one end of the elastic member 421 of the second elastic sealing member 420 is connected to the diaphragm 320, and the end of the elastic member 421 of the second elastic sealing member 420 The other end is connected to the second end of the support member 200 , and the sealing medium layer 422 covers one side of the elastic member 421 , for example, the side facing the front chamber 101 .
  • the part of the sealing medium layer 422 can be covered on the surface of the diaphragm 320 facing the front cavity 101, so as to improve the connection tightness between the sealing medium layer 422 and the diaphragm 320, thereby improving the elastic seal 400 to the gap 301. sealing effect.
  • FIG. 16 is a schematic diagram of the internal structure of another acoustic transducer provided by an embodiment of the present application
  • FIG. 17 is a longitudinal sectional view of the acoustic transducer corresponding to FIG. 16
  • the vibration element 300 may include two piezoelectric cantilevers 310 and a diaphragm 320 .
  • the two piezoelectric cantilevers 310 are oppositely arranged at the second end of the support 200, and the first end of each piezoelectric cantilever 310 is fixedly connected with the support 200, and the second end of each piezoelectric cantilever 310 faces the support
  • the axis of the member 200 (refer to 1 shown in FIG.
  • the diaphragm 320 is located between the second ends of the two piezoelectric cantilevers 310 . It can be understood that, in this example, the two piezoelectric cantilevers 310 and the diaphragm 320 jointly divide the inner chamber of the casing 100 into a front chamber 101 and a rear chamber 102 .
  • one end of the vibrating membrane 320 is close to the second end of one of the piezoelectric cantilever 310 on the left, for example, and the other end of the vibrating membrane 320 is close to the second end of the piezoelectric cantilever 310 on the right, for example.
  • the part between the two ends of the diaphragm 320 is located between the second ends of the two piezoelectric cantilevers 320 .
  • the diaphragm 320 has a gap 301 near the second end of the piezoelectric cantilever 310 on the left side, and an elastic seal 400 is provided at the gap 301, and the elastic seal 400 is connected to the diaphragm 320 respectively. It is connected with the piezoelectric cantilever 310 on the left, so that the connection sealing between the other end of the vibrating film 320 and the second end of the piezoelectric cantilever 310 on the left is improved.
  • the two piezoelectric cantilevers 310 can drive the diaphragm 320 to vibrate during the process of warping and deformation, so as to effectively push the air in the front chamber 101 and the rear chamber 102 .
  • the two ends of the vibrating membrane 320 are respectively connected to the second ends of the two piezoelectric cantilevers 320 through elastic seals 400. Therefore, the sealing effect between the front chamber 101 and the rear chamber 102 on both sides of the vibrating element 300 is improved, thereby improving the frequency response of the acoustic transducer of the embodiment of the present application.
  • the elastic seal 400 can be elastically deformed during the vibration of the piezoelectric cantilever 310 or the diaphragm 320, so as to release the end stress of the piezoelectric cantilever 310, so that the degree of freedom of the second end of the piezoelectric cantilever 310 will not Affected, compared with the rigid connection between the piezoelectric cantilever 310 and the diaphragm 320 , the vibration amplitude of the piezoelectric cantilever 310 is increased, and correspondingly, the vibration amplitude of the diaphragm 320 is also increased.
  • Fig. 18 is a schematic diagram of the internal structure of another acoustic transducer provided by an embodiment of the present application
  • Fig. 19 is a cross-sectional view along line A-A in Fig. 18 . Referring to FIG. 18 and FIG.
  • the vibrating element 300 includes a plurality of piezoelectric cantilevers 310
  • the plurality of piezoelectric cantilevers 310 are arranged at the second end of the support member 200 at intervals along the circumferential direction of the support member 200
  • the outer ends of the diaphragm 320 are close to the second end of the corresponding piezoelectric cantilever 310, in other words, in the projection along the vibration direction of the diaphragm 320, at least part of the diaphragm 320 is located at the end of all the piezoelectric cantilevers 310
  • the second end of each piezoelectric cantilever 310 is disposed close to the outer end of the diaphragm 320, and there is a gap between the second end of each piezoelectric cantilever 310 and the outer end of the diaphragm 320 301, and the gap 301 has an elastic seal 400, one end of the elastic seal 400 is connected to the pie
  • each piezoelectric cantilever 310 is connected with the vibrating membrane 320 to increase the vibration amplitude of the vibrating membrane 320 .
  • the diaphragm 320 is located on the side of the piezoelectric cantilever 310 facing the front cavity 101, or the diaphragm 320 is located on the side of the piezoelectric cantilever 310 facing the rear cavity 102.
  • the piezoelectric cantilever 310 and the vibrating membrane 320 may have an overlapping area (refer to the dotted line box in FIG. 17 ) in the vibration direction (refer to the z direction in FIG.
  • the second end of the electric cantilever 310 has a gap 301 in the vertical direction (shown in the z direction with reference to FIG. 17 and FIG. 19 ), and the elastic sealing member 400 is located in the vertical gap 301 .
  • the elastic seal 400 can adopt a third structural design, for example, the elastic seal 400 such as the third elastic seal 430 can be connected with elastic blocks (also known as second elastic blocks), and the elastic blocks are Both ends in the height direction are respectively connected in the vertical gap 301 between the piezoelectric cantilever 310 and the diaphragm 320 .
  • the elastic seal 400 such as the third elastic seal 430 can be connected with elastic blocks (also known as second elastic blocks), and the elastic blocks are Both ends in the height direction are respectively connected in the vertical gap 301 between the piezoelectric cantilever 310 and the diaphragm 320 .
  • the two piezoelectric cantilevers 310 facing each other are located on a first plane perpendicular to the vibration direction, and the diaphragm 320 is located on a second plane perpendicular to the vibration direction.
  • the first plane and the second plane are parallel and spaced apart.
  • one of the piezoelectric cantilever 310 such as the piezoelectric cantilever 310 on the left, and the diaphragm 320 have a gap 301 in the z direction, and one end of the elastic block, such as the second elastic block along the height direction, is connected to the left
  • the piezoelectric cantilever 310 is connected, and the other end of the second elastic block along the height direction is connected to the diaphragm 320 located on one side of the piezoelectric cantilever 310.
  • the piezoelectric cantilever 310 on the left side and the diaphragm 320 pass through the second Two elastic blocks are connected, another piezoelectric cantilever 310 such as the piezoelectric cantilever 310 on the right side and the diaphragm 320 have a gap 301 in the z direction, and one end of the second elastic block along the height direction is connected to the piezoelectric cantilever 310 on the right side The other end of the second elastic block along the height direction is connected to the diaphragm 320 on one side of the piezoelectric cantilever 310, in other words, the piezoelectric cantilever 310 on the right is connected to the diaphragm 320 through an elastic block .
  • each piezoelectric cantilever 310 can compress or stretch the second elastic block at one end during the vibration process, so that the second elastic block undergoes elastic deformation, thereby releasing the end stress of each piezoelectric cantilever 310 and ensuring the compression Neither the vibration amplitude of the electric cantilever 310 nor the diaphragm 320 will be affected.
  • the elasticity of the second elastic block can be improved by increasing the height or aspect ratio of the second elastic block, so that the vibration amplitude of the piezoelectric cantilever 310 can be increased more easily.
  • the material, height and aspect ratio of the second elastic block may be consistent with that of the first elastic block 411 , for details, please refer to the related content of the first elastic block 411 above.
  • the diaphragm 320 is supported on one side of the piezoelectric cantilever 310 by an elastic seal 400 such as a third elastic block, so that at least part of the diaphragm 320 is suspended on the piezoelectric cantilever 320, so that the diaphragm 320 and the piezoelectric cantilever All 310 can vibrate freely, which increases the vibration amplitude of the diaphragm 320 and the piezoelectric cantilever 310 .
  • an elastic seal 400 such as a third elastic block
  • the third elastic seal 430 such as the second elastic block can be a bar-shaped structure, and the length direction of the second elastic block of the bar-shaped structure can be the same as
  • the extension direction of the second end of the piezoelectric cantilever 310 is consistent (refer to the y direction shown in FIG. 16 ).
  • the cross-sectional shape of the second elastic block perpendicular to the length direction may be any suitable shape such as quadrilateral, circular, and triangular, which is not limited in this embodiment of the present application.
  • the elastic sealing member 400 can be an integrally formed annular structure, and the elastic sealing member 400 in an annular structure can be arranged near the outer end of the diaphragm 320, and respectively connected to the The diaphragm 320 is connected to the second ends of all the piezoelectric cantilevers 310 to seal the gap 301 between the second ends of all the piezoelectric cantilevers 310 and the outer end of the diaphragm 320 .
  • the elastic seal 400 can also be a plurality of strip-shaped seals arranged at intervals along the outer end of the diaphragm 320, and each strip-shaped seal is respectively connected to the second end of the corresponding piezoelectric cantilever 310. end, and connected to the outer end of the vibrating membrane 320, so as to block the gap 301 between the second end of each piezoelectric cantilever 310 and the vibrating membrane 320.
  • Figure 20 is a schematic diagram of the internal structure of another acoustic transducer provided by an embodiment of the present application
  • Figure 21 is a partial enlarged view at F in Figure 20
  • Figure 22 is another acoustic transducer provided by an embodiment of the present application
  • Figure 23 is a partial enlarged view at G in Figure 22.
  • the diaphragm 320 is located between the second ends of all piezoelectric cantilevers 310, and the diaphragm 320 is connected to the second ends of all piezoelectric cantilevers 310. Both ends have a gap 301 (shown in Fig. 21 and Fig.
  • two piezoelectric cantilevers 310 and one diaphragm 320 are located on one of the xy planes, and the two piezoelectric cantilevers 310 and the diaphragm 320 are arranged at intervals along the x direction.
  • a diaphragm 320 is disposed between the second ends of the two piezoelectric cantilevers 310 , and there are gaps 301 between the two ends of the diaphragm 320 along the x direction and the second ends of the two piezoelectric cantilevers 310 .
  • the elastic seal 400 can also use a second elastic seal 420, that is, the second end of each piezoelectric cantilever 310 is connected to the diaphragm 320 through the second elastic seal 420.
  • a second elastic seal 420 that is, the second end of each piezoelectric cantilever 310 is connected to the diaphragm 320 through the second elastic seal 420.
  • one end of the elastic member 421 of the second elastic sealing member 420 along the elastic direction is connected to the piezoelectric cantilever 310
  • the other end of the elastic member 421 along the elastic direction is connected to the diaphragm 320 .
  • the second end of the piezoelectric cantilever 310 on the left is connected to one end of the diaphragm 320 through the elastic member 421, and the sealing medium layer 422 is blocked on the gap of the elastic member 421, for example
  • the sealing medium layer 422 covers the side of the elastic member 421 facing the rear cavity 102, so as to improve the sealing performance of the connection between the left piezoelectric cantilever 310 and the diaphragm 320.
  • the elastic member 421 can compress the left side
  • the electric cantilever 310 and the diaphragm 320 are deformed during the vibration process to produce elasticity, so as to release the stress of the piezoelectric cantilever 310 and increase the vibration amplitude of the piezoelectric cantilever 310 , thereby increasing the vibration amplitude of the diaphragm 320 .
  • the second end of the piezoelectric cantilever 310 on the right is connected to one end of the diaphragm 320 through the elastic member 421, and the sealing medium layer 422 is sealed on the gap of the elastic member 421, for example, the sealing medium layer 422 covers the
  • the elastic member 421 faces the side of the rear cavity 102 to improve the connection sealing between the right piezoelectric cantilever 310 and the vibrating membrane 320.
  • the elastic member 421 is on the right side of the piezoelectric cantilever 310 and the vibrating membrane 320 to vibrate During the process, deformation occurs to produce elasticity, so as to release the stress of the piezoelectric cantilever 310 , increase the vibration amplitude of the piezoelectric cantilever 310 , and further increase the vibration amplitude of the diaphragm 320 .
  • the diaphragm 320 and the piezoelectric cantilever 310 are arranged at intervals along the horizontal direction, so that the diaphragm 320 and the piezoelectric cantilever 310 can directly push the air in the front chamber 101 and the rear chamber 102, thereby improving the sensitivity of the vibration element 300 , thereby improving the acoustic performance of the acoustic transducer.
  • the elastic seal 400 may also employ a first elastomeric seal 410 .
  • first elastic seal 410 one ends of two first elastic blocks 411 are respectively connected to the piezoelectric cantilever 310 and the vibrating membrane 320, for example, one end of one of the first elastic blocks 411 is connected to the left side The second end of the piezoelectric cantilever 310 is connected, and one end of the other first elastic block 411 is connected to the diaphragm 320 in the middle.
  • One end to block the gap between the two first elastic blocks 411, so that the gap 301 between the second end of the piezoelectric cantilever 310 and the diaphragm 320 is blocked by the two first elastic blocks 411 and the connecting part 412 , improve the sealability of the vibration element 300 formed by the piezoelectric cantilever 310 and the diaphragm 320, thereby improving the sealing and isolation effect between the front cavity 101 and the rear cavity 102, improving or avoiding sound leakage at the gap 301, improving or avoiding The problem of acoustic short circuit between the front chamber 101 and the rear chamber 102 is solved, and the frequency response of the acoustic transducer such as the low frequency loudness is improved.
  • the piezoelectric cantilever 310 and the vibrating membrane 320 can release stress through the elastic deformation of the first elastic block 411 , so that the vibration amplitude of the piezoelectric cantilever 310 and the vibrating membrane 320 will not be affected.
  • Fig. 24 is a vibration displacement diagram of the elastic block in the acoustic transducer corresponding to Fig. 22 at different heights.
  • curve c1 is the vibration displacement curve of the diaphragm 320 along the z direction (shown in Figure 22) when the height of the elastic block such as the first elastic block 411 is 10um
  • curve c2 is the vibration displacement curve of the elastic block such as the first elastic block 411.
  • the vibration displacement curve of the diaphragm 320 along the z direction shown in FIG.
  • the curve c4 is the vibration displacement curve of the diaphragm 320 along the z direction (shown in Figure 22) when the height of the elastic block such as the first elastic block 411 is 25um
  • the curve c5 is the elastic displacement curve.
  • the vibration displacement curve of the diaphragm 320 along the z direction shown in FIG.
  • the vibration displacement is curve c5>curve c4>curve c3>curve c2>curve c1, that is, the height of the first elastic block 411 is at least between 10um-30um, as the height of the first elastic block 411 increases, the vibration of the diaphragm 320
  • the vibration displacement increases continuously, so that the vibration amplitude of the diaphragm 320 increases with the increase of the height of the first elastic block 411 .
  • Fig. 25 is a simulation diagram of the displacement of the vibrating element in Fig. 22 at a frequency of 20 Hz
  • Fig. 25a is a partially enlarged diagram at H in Fig. 25
  • the average vibration displacement of the diaphragm 320 can reach above 0.02 mm or below -0.02 mm, wherein the vibration displacement of the opposite ends of the diaphragm 320 along the x direction can reach above 0.03 mm or below -0.03 mm
  • the vibration displacements at opposite ends of the diaphragm 320 and the elastic seal 400 (for example, the first elastic seal 410 ) along the y direction are larger than those in the middle.
  • Fig. 25b is a schematic diagram of the vibration of the vibrating element corresponding to Fig. 25
  • Fig. 25c is a schematic diagram of the structure at position I in Fig. 25b.
  • the second ends of the two piezoelectric cantilever arms 310 are deformed after electrification, which drives the deformation of the elastic sealing member 400 to drive the vibration of the diaphragm 320 in the middle.
  • the vibration amplitude of the two ends of the diaphragm 320 connected to the elastic seal 400 is greater than the vibration amplitude of the middle region of the diaphragm 320 .
  • Fig. 26 is a simulation diagram of displacement when the piezoelectric cantilever and the vibrating membrane are located on the whole film in the related art
  • Fig. 26a is a partial enlarged diagram of J in Fig. 26 .
  • the piezoelectric cantilever and the vibrating membrane are arranged on the entire membrane at intervals to form a vibrating element.
  • the frequency is 20 Hz
  • the average vibration displacement of the vibrating membrane is about 0.01mm.
  • FIG. 27 is a graph of the frequency response of the acoustic transducer corresponding to FIG. 22 .
  • curve a is the frequency response curve of the acoustic transducer when the piezoelectric cantilever 310 and the vibrating membrane 320 are arranged on the whole film in the related art
  • curve b is the second end of the piezoelectric cantilever 310 and the vibrating membrane.
  • curve c is the frequency response of the acoustic transducer when the second end of the piezoelectric cantilever 310 is connected to the diaphragm 320 through the elastic seal 400 curve.
  • the frequency response of curve c is greater than that of curve b and curve a before the frequency is 2kHz and 2kHz. It can be seen that compared with the open structure of the vibration element, that is, between the piezoelectric cantilever 310 and the diaphragm 320 Micro-slits are formed.
  • the vibrating element of the embodiment of the present application is a sealed structure, that is, after the second end of the piezoelectric cantilever 310 and the diaphragm 320 are connected through the elastic seal 400, the low-frequency loudness of the acoustic transducer is significantly improved. (Before 2kHz) a loudness value of 117dB can be obtained.
  • FIG. 28 is a schematic diagram of the internal structure of another acoustic transducer provided by an embodiment of the present application
  • FIG. 29 is a longitudinal sectional view of the acoustic transducer corresponding to FIG. 28 .
  • the number of diaphragms 320 may also be multiple.
  • the diaphragm 320 may be disposed on one side of the piezoelectric cantilever 310 along the vibration direction (eg, the thickness direction of the piezoelectric cantilever 310 ).
  • the vibrating element 300 includes two piezoelectric cantilevers 310 and two vibrating membranes 320 that are opposite and spaced apart.
  • One of the diaphragms 320 can be attached to one side of the left piezoelectric cantilever 310 facing the front cavity 101, and the other diaphragm 320 can be attached to the other side, such as the right piezoelectric cantilever 310 facing the front cavity 101.
  • An elastic seal 400 is arranged at the gap 301, and the elastic seal Components 400 are respectively connected to the two diaphragms 320, for example, the elastic sealing member 400 is respectively connected to the surfaces of the two diaphragms 320 facing the front cavity 101, so as to block the gap 301 between the two diaphragms 320, thereby improving the front cavity 101 and back cavity 102 tightness.
  • each diaphragm 320 may cover the entire surface on one side of the corresponding piezoelectric cantilever 310, and of course, may also cover a part of the surface on one side of the corresponding piezoelectric cantilever 310. This is not limited.
  • the elastic seal 400 connecting the two diaphragms 320 may be a first elastic seal 410, for example, the two elastic blocks of the first elastic seal 410 are respectively connected to the two diaphragms.
  • the connecting portion 412 is connected between the ends of the two elastic blocks facing away from the diaphragm 320 , so as to seal the gap 301 between the two diaphragms 320 .
  • the elastic seal 400 connecting the two diaphragms 320 may also be the second elastic seal 420 , and the embodiment of the present application does not limit the structure of the elastic seal 400 connecting the two diaphragms 320 .
  • the piezoelectric cantilever 310 can be used as a driver to drive the diaphragm 320 to vibrate.
  • the piezoelectric cantilever 310 can drive the diaphragm 320 to vibrate during the warping deformation process.
  • the piezoelectric cantilever 310 and the diaphragm 320 can push the air in the front cavity 101 and the rear cavity 102 simultaneously, which improves the reliability of the vibration element 300 pushing the air, thereby improving the sound performance of the acoustic transducer of the embodiment of the present application.
  • the arrangement of the diaphragm 320 improves the elasticity of the vibrating element 300 , so that the structure of the vibrating element 300 can be more flexible during the vibration process, avoiding failure or even fracture due to excessive rigidity during the vibration process.
  • Fig. 30 is a simulation diagram of the displacement of the vibrating element in Fig. 28 when the frequency is 20 Hz. Referring to FIG. 30 , it can be seen that when the vibrating element 300 of the acoustic transducer receives a certain operating frequency, the amplitude of the second end of each piezoelectric cantilever 310 attached with the vibrating membrane 320 is compared with that of the first end. In addition, the vibration amplitude at the two ends of the elastic seal 400 along the y direction is larger than that in the middle, in other words, the second end of each piezoelectric cantilever 310 with the vibrating membrane 320 is The ends are larger than the middle.
  • the vibration displacement at both ends of the vibrating element 300 with the elastic seal 400 along the y direction can reach 10 3 levels.
  • Fig. 31 is a schematic diagram of the internal structure of another acoustic transducer provided by an embodiment of the present application
  • Fig. 32 is a schematic diagram of the internal structure of another acoustic transducer provided by an embodiment of the present application. Referring to FIGS.
  • the projections of at least part of all diaphragms 320 in the vibration direction of the diaphragms 320 are located between the second ends of all piezoelectric cantilevers 310 , and each diaphragm 320
  • One end of each piezoelectric cantilever 310 is connected to at least one piezoelectric cantilever 310 through an elastic seal 400
  • the projection of the other end of each diaphragm 320 along the vibration direction is located between the second ends of all piezoelectric cantilevers 310, and two adjacent diaphragms 320
  • two vibrating membranes 320 can be spaced apart along the x direction, wherein the left vibrating membrane One end of 320 and the second end of the left piezoelectric cantilever 310 can be elastically connected through the elastic seal 400, and one end of the right diaphragm 320 can be connected with the second end of the right piezoelectric cantilever 310 through the elastic seal 400. Elastically connected, in this way, the two diaphragms 320 can be respectively driven by the corresponding piezoelectric cantilever 310 to realize the vibration in the z direction.
  • the two diaphragms 320 are connected by an elastic seal 400.
  • the elastic seal 400 can produce elastic deformation during the vibration of each diaphragm 320, so that the end stress of each diaphragm 320 ensures that the two diaphragms The vibration displacement of 320 will not be restrained by each other, which ensures the vibration amplitude of each diaphragm 320 .
  • the vibrating membrane 320 and the piezoelectric cantilever 310 are arranged vertically (shown in the z direction with reference to FIG. 32 ), for example, refer to FIG.
  • all the diaphragms 320 are located on the side of the piezoelectric cantilever 310 facing the front cavity 101, wherein each diaphragm 320 and the second end of the piezoelectric cantilever 310 have a gap 301 along the z direction, and then the vibration diaphragm is connected
  • the elastic seal 400 between the membrane 320 and the second end of the piezoelectric cantilever 310 can be a third elastic seal 430 (that is, the second elastic block). The vertical connection method will not be repeated here.
  • all diaphragms 320 may also be located between the second ends of all piezoelectric cantilevers 310 , for example, one end of each diaphragm 320 is connected to the corresponding piezoelectric cantilever 310
  • the second end of the piezoelectric cantilever 310 has a gap 301 in the horizontal direction (for example, the x direction in FIG. shown), of course, it can also be the first elastic sealing member 410.
  • the specific connection method can directly refer to the above-mentioned connection method between the diaphragm 320 and the second end of the piezoelectric cantilever 310 in the horizontal direction, and will not be repeated here.
  • opposite ends of two adjacent vibrating membranes 320 may be connected through a first elastic seal 410 or a second elastic seal 420 .
  • the opposite ends of two adjacent vibrating membranes 320 can be connected through a first elastic seal 410 , wherein one end of one of the first elastic blocks 411 is connected to the left vibrating membrane 320 , One end of the other first elastic block 411 is connected to the diaphragm 320 on the right side, and the two ends of the connection part 412 are respectively connected to the ends of the two first elastic blocks 411 facing away from the diaphragm 320 to block the two diaphragms 320
  • the gap 301 between them improves the sealing performance between the two diaphragms 320 .
  • one side of the two vibrating membranes 320 along the vibration direction can also have a piezoelectric cantilever 320 , and one end of the two vibrating membranes 320 facing each other can also be connected to the piezoelectric cantilever through an elastic seal 400 .
  • Cantilever 320 is attached.
  • the vibrating element 300 includes three piezoelectric cantilevers 320 arranged at intervals in the horizontal direction (such as the x direction in FIG.
  • the opposite ends of the two diaphragms 320 are respectively connected to the second ends of the piezoelectric cantilevers 310 on both sides through the elastic seals 400, and the opposite ends of the two diaphragms 320 can be respectively connected to the middle piezoelectric cantilever 310 through the elastic seals 400. connected.
  • one end of the left diaphragm 320 facing away from the left piezoelectric cantilever 310 can be connected to the middle piezoelectric cantilever 310 through a third elastic seal 430 such as a second elastic block, and the right end One end of the diaphragm 320 facing away from the right side of the piezoelectric cantilever 310 can be connected to the middle piezoelectric cantilever 310 through a second elastic block.
  • a third elastic seal 430 such as a second elastic block
  • each diaphragm 320 on the side of the piezoelectric cantilever 310 is improved.
  • one ends of the two diaphragms 320 are respectively connected to the middle piezoelectric cantilever 310 through the third elastic seal 430, so that the middle piezoelectric cantilever 310 and the two third elastic seals 430 on it are, for example, the second elastic
  • the block realizes sealing the gap 301 between the two diaphragms 320 , thereby improving the sealing and isolation effect between the front cavity 101 and the rear cavity 102 .
  • the above-mentioned three piezoelectric cantilevers 310 can be understood as three of the plurality of piezoelectric cantilevers 310 arranged at intervals along the circumferential direction of the support 200 (as shown in FIG. There may be three piezoelectric cantilevers 310 on the left, lower and right sides in FIG. 18 .
  • the vibrating element 300 can also be only a vibrating membrane (not shown in the figure), and the vibrating membrane is driven by other non-piezoelectric cantilever 310 drivers, so that the vibrating membrane vibrates at a certain frequency, To push the air in the front cavity 101 and the rear cavity 102, thereby generating a sound of a certain frequency.
  • the driver can be an electromagnetic actuator such as a planar coil, wherein the electromagnetic actuator can actuate the diaphragm according to the received driving current and magnetic field, that is, the diaphragm can be driven by electromagnetic force.
  • the driving member includes an electrostatic actuator (such as a conductive plate) or a nano-electrostatically actuated actuator, wherein the electrostatic actuator or the nano-electrostatically actuated actuator The diaphragm can be actuated according to the received driving voltage and electric field, that is, the diaphragm can be actuated by electrostatic force).
  • Fig. 33 is a schematic diagram of the structure of the substrate and the vibrating film layer in one of the manufacturing methods of the acoustic transducer provided by one embodiment of the present application
  • Fig. 34 is the production of one of the acoustic transducers provided by one embodiment of the present application
  • Fig. 35 is a schematic diagram of the structure of the support and the piezoelectric cantilever in one of the manufacturing methods of the acoustic transducer provided by an embodiment of the present application
  • Fig. 33 is a schematic diagram of the structure of the substrate and the vibrating film layer in one of the manufacturing methods of the acoustic transducer provided by one embodiment of the present application
  • Fig. 34 is the production of one of the acoustic transducers provided by one embodiment of the present application
  • Fig. 35 is a schematic diagram of the structure of the
  • FIG. 36 is a schematic diagram of the structure of the acoustic transducer In one of the manufacturing methods of the acoustic transducer provided in the embodiment, it is a schematic structural diagram of forming the first elastic film layer on the piezoelectric cantilever.
  • FIG. 37 is one of the manufacturing methods of the acoustic transducer provided in an embodiment of the present application 38 is a schematic structural view after forming the first elastic sealing member in one of the manufacturing methods of the acoustic transducer provided by an embodiment of the present application.
  • the embodiment of the present application also provides a method for manufacturing an acoustic transducer.
  • the acoustic transducer of the embodiment of the present application is a micro-electro-mechanical system (Micro-Electro-Mechanical System, referred to as MEMS), that is, the acoustic transducer is a MEMS acoustic transducer, which is prepared by using a MEMS process and can realize acoustic Miniaturization and precision of transducers.
  • MEMS process originated from the semiconductor and microelectronics process, and is a micro-processing technology for manufacturing devices with lithography, epitaxy, film deposition, evaporation, etching and packaging as the basic process steps.
  • the manufacturing method of the acoustic transducer of the embodiment of the present application includes:
  • the vibrating element 300 is located at one end of the support 200 , and one end of the vibrating element 300 such as the first end is fixedly connected to the support 200 .
  • the manufacturing method will be described below by taking the vibrating element 300 including at least one piezoelectric cantilever 310 as an example.
  • S101 may specifically include:
  • the substrate 200a may be a silicon-on-insulator (Silicon On Insulator, SOI for short) wafer.
  • the substrate 200a may also be a silicon wafer, for example, the substrate 200a may be heavily doped silicon such as p-type heavily doped silicon or n-type heavily doped silicon.
  • the substrate 200 a includes a bottom layer of silicon 210 , a silicon oxide layer 220 and a top layer of silicon 230 which are sequentially stacked.
  • the bottom layer of silicon 210 is thicker than the top layer of silicon 230 to provide mechanical support for the upper two layers. Etching and the like are usually performed on the top layer of silicon 230 to form circuits, therefore, the top layer of silicon 230 may also be referred to as a silicon device layer.
  • a vibrating film layer 300a is grown on the surface of the top silicon layer 230 of the substrate 200a, for example, the vibrating film layer 300a is a bottom electrode layer 311 and a piezoelectric layer 312 that are sequentially grown on the substrate 200a along the z direction. and the top electrode layer 313 .
  • the bottom electrode layer 311 , the piezoelectric layer 312 and the top electrode layer 313 are a material layer of a vibrating element such as the first vibrating element 300 .
  • the bottom electrode layer 311 , the piezoelectric layer 312 and the top electrode layer 313 are thin films.
  • the bottom electrode layer 311 and the top electrode layer 313 may include but are not limited to a single element metal film such as a copper film or an aluminum film, or a composite film such as a chromium-gold film or a titanium-palladium-gold film.
  • the composition of the piezoelectric layer 312 Materials may include, but are not limited to, inorganic piezoelectric materials such as piezoelectric crystals or piezoelectric ceramic films, organic piezoelectric materials such as polyvinylidene fluoride (Poly vinylidene fluoride, PVDF for short) and other polymer films.
  • the piezoelectric ceramic film may be a lead zirconate-titanate piezoelectric ceramics (referred to as PZT) film.
  • the vibrating element 300 may be one piezoelectric cantilever 310 or multiple piezoelectric cantilevers 310 arranged at intervals.
  • the vibrating element 300 may include a plurality of piezoelectric cantilevers 310 arranged at intervals along the axis of the substrate 200a.
  • the top electrode layer 313, the piezoelectric layer 312, the bottom electrode layer 311 and the top layer of silicon 230 are sequentially etched in the opposite direction of z by an etching process until The silicon oxide layer 220 is exposed, so that a piezoelectric cantilever 310, or a plurality of piezoelectric cantilever 310 arranged at intervals is formed on the substrate 200a, and the plurality of piezoelectric cantilever 310 revolves around the axis of the substrate 200a (refer to 1 in FIG. 34 34 , for example, as shown in FIG. 34 , two piezoelectric cantilevers 310 are formed on the substrate 200 a and arranged at intervals along the x direction, and there is a gap 301 between the two piezoelectric cantilevers 310 .
  • the piezoelectric cantilever 310 further includes a top layer of silicon 230 at the bottom of the bottom electrode layer 311 .
  • the top layer of silicon 230 can play the role of supporting the three film layers in the piezoelectric cantilever 310.
  • wiring can also be formed in the top layer of silicon 230, and the wiring can be connected to the bottom electrode layer 311 and the bottom electrode layer 311 of the piezoelectric cantilever 310.
  • the top electrode layer 313 is electrically connected, so that the external circuit applies a voltage to the bottom electrode layer 311 and the top electrode layer 313 in the piezoelectric cantilever 310 through the wiring, so that an electric field is formed in the piezoelectric cantilever 310, so that the piezoelectric layer 312 Warping deformation, achieving vibration.
  • the piezoelectric cantilever 310 has a bottom electrode layer 311, a piezoelectric layer 312 and a top electrode layer 313.
  • the side of the substrate 200a facing away from the vibrating membrane layer 300a is etched inward, so that at least part of the substrate 200a forms the support member 200 of a hollow structure, and at least part of the vibrating element 300 such as the piezoelectric cantilever 310 is suspended in the air. on the support 200.
  • the underlying silicon 210 and the silicon oxide layer 220 of the substrate 200a can be sequentially etched along the z direction by an etching process until The top layer of silicon 230 is exposed, so that the substrate 200 a can be made into a ring-shaped support 200 , and the piezoelectric cantilever 310 is released so that the piezoelectric cantilever 310 is suspended on the support 200 .
  • the support 200 is formed by the underlying silicon 210 and the silicon oxide layer 220 of the substrate 200a, and the inner cavity of the support 200 can be used as the rear cavity 102 of the acoustic transducer.
  • the piezoelectric cantilever 310 is suspended on the silicon oxide layer 220 of the support member 200 .
  • the first end of the vibration element 300 such as the piezoelectric cantilever 310 is fixedly connected to the silicon oxide layer 220 of the support 200, the second end of the vibration element 300 such as the piezoelectric cantilever 310 is suspended at the second end of the support 200, and
  • the second end of the vibrating element 300 such as the piezoelectric cantilever 310 has a gap 301 communicating with the inner cavity of the support member 200 , and the gap 301 may be the gap 301 between two adjacent piezoelectric cantilevers 310 .
  • the support 200 and the vibrating elements 300 such as a plurality of piezoelectric cantilevers 310 disposed on the support 200 are produced.
  • an elastic seal 400 is formed at one end of the piezoelectric cantilever 310 , such as the gap 301 between two adjacent piezoelectric cantilevers 310 , so as to seal the gap 301 between two adjacent piezoelectric cantilevers 310 .
  • an elastic seal 400 can be formed on the surface of the vibrating element 300 such as multiple piezoelectric cantilevers 310 using processes such as pasting or embossing, etching or patterning, so as to realize sealing between two adjacent The sealing of the gap 301 between the piezoelectric cantilevers 310.
  • the specific steps of S102 may include:
  • the first elastic film layer 411a is formed on the surface of the top electrode layer 313 of the piezoelectric cantilever 310, for example, by sticking a film or pressing
  • the first elastic film layer 411a is formed on the surface of the top electrode layer 313 by a process such as film.
  • the first elastic film layer 411 a covers the entire surface of all the top electrode layers 313 .
  • the first elastic film layer 411a may include, but is not limited to, any one or several of silicone films, rubber films, polyethylene isobutyl ether films, and the like.
  • the first elastic film layer 411a can be patterned by a dry or wet process to form elastic blocks such as first elastic blocks on the surface of each piezoelectric cantilever 310. Block 411.
  • the material of the second elastic film layer 412a and the first elastic film layer 411a may be the same.
  • a layer of second elastic film layer 412a can be covered on the surface of the top electrode layer 313 and the first elastic block 411 by using a process such as film sticking or lamination, and then , the second elastic film layer 412a can be patterned by a dry or wet process, and the second elastic film layer 412a on the surface of the top electrode layer 313 is removed to ensure that the second elastic film layer 412a on the surface of two adjacent first elastic blocks 411 , so that a connecting portion 412 is formed at one end of two adjacent first elastic blocks 411 , and the connecting portion 412 and the two first elastic blocks 411 jointly form an elastic sealing member 400 .
  • etching, patterning, growth, film lamination or film sticking and other processes in the above process steps can adopt related process means in the MEMS process, which will not be repeated here.
  • the elastic sealing member 400 formed by the above process is the first elastic sealing member 400 .
  • steps S101 to S102 form the main structures in the housing 100 of the acoustic transducer of the embodiment of the present application, namely the support member 200 , the first vibrating element 300 and the elastic sealing member 400 .
  • the substrate 120 is provided, and the material of the substrate 120 may include but not limited to hard materials such as metal, hard resin, ceramics, and semiconductors, so as to play a good role in supporting and fixing the supporting member 200 .
  • the support 200 with a vibrating element at one end may be fixed on the base 120 , wherein one end of the underlying silicon 210 of the support 200 is fixed on the base 120 .
  • S103 can also be performed before S101, for example, the substrate 120 can be provided first, and then the substrate 200a, the structural layer of the piezoelectric cantilever 310, etc. are sequentially formed on the surface of the substrate 120, and finally the substrate Structures such as the support 200 and the piezoelectric cantilever 310 are formed on the 120, and the embodiment of the present application does not limit the order of the process steps in the manufacturing process.
  • the embodiment of the present application adopts the above manufacturing method to manufacture the acoustic transducer.
  • it can ensure that one end of the vibrating element 300 such as the piezoelectric cantilever 310 will not be restrained by the support 200 or the adjacent piezoelectric cantilever 310, so that the vibrating element 300
  • the degree of freedom of the vibration element 300 will not be affected, thereby ensuring the vibration amplitude of the vibration element 300, so that the frequency response of the acoustic transducer can be improved.
  • the tightness between them improves or avoids the sound short circuit between the front chamber 101 and the rear chamber 302, improves the sensitivity of the acoustic transducer, thereby improving the frequency response of the acoustic transducer, especially the low-frequency loudness.
  • the elastic seal 400 is provided at the gap 301 at one end of the vibration element 300 such as the piezoelectric cantilever 310 by using the above-mentioned manufacturing method such as MEMS technology.
  • the first elastic film The process of patterning the layer 411a and the second elastic film layer 412a is simple, and realizes the miniaturization and precision of the acoustic transducer.
  • FIG. 38 can be understood as a cross-sectional view of a part of the structure in FIG. 8 , in other words, the above-mentioned manufacturing method can finally produce an acoustic transducer corresponding to FIG. 8 .
  • Figure 39 is a schematic structural view of forming a third elastic film layer on two opposite piezoelectric cantilevers in another manufacturing method of an acoustic transducer provided by an embodiment of the present application
  • Figure 40 is a schematic view of the structure provided by an embodiment of the present application
  • Fig. 41 is another manufacturing method of an acoustic transducer provided by an embodiment of the present application Schematic diagram of the structure of the fourth elastic film layer formed on the surface of the third elastic block and the piezoelectric cantilever
  • Fig. 42 shows two adjacent third elastic blocks in another method of manufacturing an acoustic transducer provided by an embodiment of the present application Schematic diagram of the structure of the diaphragm formed between them.
  • another manufacturing method of the acoustic transducer of the embodiment of the present application may include:
  • S201 providing a support 200 and a plurality of piezoelectric cantilevers 310 formed at one end of the support 200 .
  • a plurality of piezoelectric cantilevers 310 are arranged at intervals along the circumferential direction of the support member 200 .
  • two piezoelectric cantilevers 310 are arranged at intervals along the x direction, and there is a gap 301 between the two piezoelectric cantilevers 310 .
  • S202 may specifically include the following steps:
  • the surface of the top electrode layer 313 of the piezoelectric cantilever 310 can be covered with a layer of third elastic film layer 430a by using a film-attaching or lamination process.
  • the third elastic film layer 430a may be made of the same material as the above-mentioned first elastic film layer 411a. It can be understood that the third elastic film layer 430 a covers all the piezoelectric cantilevers 310 and the gap 301 between two adjacent piezoelectric cantilevers 310 .
  • the third elastic film layer 430a can be patterned by a dry process or a wet process, and the third elastic film layer 430a on the gap 301 at one end of each piezoelectric cantilever 310 is removed, and each piezoelectric cantilever 310 is removed.
  • the third elastic film layer 430a on the surface of the part of the electric cantilever 310, the third elastic film layer 430a on the surface of each piezoelectric cantilever 310 close to the gap 301 is reserved, so that an elastic seal 400 is formed on two adjacent piezoelectric cantilevers 310
  • the third elastic seal 430 is an elastic block.
  • the top electrode layer 313 of the piezoelectric cantilever 310 and the surface of the third elastic sealing member 430 can be covered with a layer of fourth The elastic film layer 320a.
  • the fourth elastic film layer 320 a not only covers the surface of the top electrode layer 313 and the third elastic sealing member 430 , but also covers the gap 301 between two adjacent piezoelectric cantilevers 310 .
  • composition material of the fourth elastic film layer 320a may include but not limited to silica gel, rubber, liquid crystal polymer (Liquid Crystal Polyester, referred to as LCP) and polyimide (Polyimide, referred to as PI). A selection actually needs to be made.
  • the fourth elastic film layer 320a can be patterned by dry or wet process, the fourth elastic film layer 320a on the surface of the top electrode layer 313 is removed, and two adjacent third elastic film layers are reserved.
  • the fourth elastic film layer 320a on the surface of the block forms a vibrating film 320 between one ends of two adjacent third elastic blocks. It can be understood that the vibrating membrane 320 and the plurality of piezoelectric cantilevers 310 together form the vibrating element 300 of the acoustic transducer.
  • the acoustic transducer corresponding to FIG. 16 and FIG. 18 can be manufactured through the manufacturing method of the acoustic transducer.
  • Figure 43 is a structural schematic diagram of forming a vibrating element on a substrate in another manufacturing method of an acoustic transducer provided by an embodiment of the present application
  • Figure 44 is a schematic diagram of another acoustic transducer provided by an embodiment of the present application
  • FIG. 45 is a schematic structural diagram of the support member formed on the substrate in another method of manufacturing an acoustic transducer provided by an embodiment of the present application.
  • FIG. 46 is a schematic diagram of the structure of the elastic member formed on the substrate In another manufacturing method of an acoustic transducer provided by an embodiment of the application, it is a structural schematic diagram of forming a sealing medium layer on the surface of the vibrating element and the elastic member.
  • Figure 47 is another acoustic transducer provided by an embodiment of the application Schematic diagram of the structure of an elastic seal formed between two adjacent piezoelectric cantilevers in the fabrication method of .
  • another manufacturing method of the acoustic transducer of the embodiment of the present application includes:
  • the vibrating element 300 includes a plurality of piezoelectric cantilevers 310 arranged at intervals in the horizontal direction (for example, the x direction in FIG. 43 ).
  • S301 specifically includes:
  • the substrate 200a may be a Silicon On Insulator (Silicon On Insulator, SOI for short) wafer.
  • SOI Silicon On Insulator
  • the vibrating membrane layer 300a may be a structural layer of the piezoelectric cantilever 1 .
  • a bottom electrode layer 311 , a piezoelectric layer 312 and a top electrode layer 313 are sequentially grown on the surface of the top silicon layer 230 of the substrate 200 a along the z direction.
  • the specific process of S3012 can directly refer to the content of S1012 in the figure above, and will not be repeated here.
  • a plurality of piezoelectric cantilevers 310 can be arranged at intervals along the x direction, that is, there is a gap 301 between two adjacent piezoelectric cantilevers 310 .
  • the top electrode layer 313, piezoelectric layer 312 and The bottom electrode layer 311 is until the top layer of silicon 230 is exposed.
  • the two places along the x direction of the vibrating film layer 300a can be etched in the opposite direction of z by using an etching process, so that multiple electrodes along the x direction can be formed on the substrate 200a.
  • Piezoelectric cantilevers 310 arranged at intervals. Wherein, there is a gap 301 between two adjacent piezoelectric cantilevers 310 .
  • an etching process can be used to etch the top layer of silicon 230 between two adjacent piezoelectric cantilevers 310 along the opposite direction of z to obtain elastic members 421 .
  • both ends of the elastic member 421 are respectively connected to one ends of two adjacent piezoelectric cantilevers 310 , and the elastic member 421 has a spring structure, that is, there is a gap 421a inside the elastic member 421 .
  • an etching process can be used to etch from the surface of the underlying silicon 210 of the substrate 200a, and sequentially etch the underlying silicon 210 and the silicon oxide layer 220 to form the substrate 200a into a support 200.
  • the substrate 200a is etched to form a cavity, that is, the inner cavity of the support 200 can be used as the rear cavity 102 of the acoustic transducer, and the vibration element 300 is released, that is, each piezoelectric cantilever 310 is suspended on the support One end of 200, so that the vibration in the z direction can be realized.
  • a sealing medium layer 422 may be formed on the surface of the vibrating element 300 such as the plurality of piezoelectric cantilevers 310 and the elastic member 421 .
  • an elastic film can be formed on the surface of all the piezoelectric cantilever 310 and the elastic member 421 by using a process such as film sticking or pressing film, as the sealing medium layer 422 (refer to FIG. 46 ).
  • the sealing medium layer 422 can be patterned using a patterning process to remove the sealing medium layer 422 on the surface of the vibrating element 300 and retain the sealing medium layer 422 on the surface of the elastic member 421, so that the sealing medium layer 422 is resistant to elasticity.
  • the space 421a of the member 421 is sealed, so as to seal the gap 301 between two adjacent piezoelectric cantilevers 310 (refer to FIG. 47 ).
  • the elastic seal 400 used to connect two adjacent piezoelectric cantilevers 310 is the second elastic seal 420 .
  • S303 and S304 can directly refer to the contents of S103 and S104 above, which will not be repeated here.
  • Fig. 48 is a structural schematic diagram of forming a fourth elastic film layer on the surface of each piezoelectric cantilever and the substrate in another method of manufacturing an acoustic transducer provided by an embodiment of the present application.
  • Fig. 49 is a schematic diagram of an embodiment of the present application In yet another manufacturing method of an acoustic transducer provided in an example, it is a structural schematic diagram of forming a diaphragm between two adjacent piezoelectric cantilevers.
  • FIG. 50 is a manufacturing method of another acoustic transducer provided by an embodiment of the present application.
  • FIG. 53 is a manufacturing method of another acoustic transducer provided by an embodiment of the present application Schematic diagram of the structure of the elastic seal formed between the piezoelectric cantilever and the diaphragm in the method.
  • the piezoelectric cantilever 310 in the middle in Fig. 43-Fig. 320 for example, the diaphragm 320 is formed between two piezoelectric cantilevers 310 arranged at intervals along the x direction, that is, the manufacturing method of the acoustic transducer corresponding to FIG. 20 includes:
  • S401 providing a substrate 200a and a plurality of piezoelectric cantilevers 310 formed on the surface of the substrate 200a.
  • a plurality of piezoelectric cantilevers 310 are arranged at intervals on the surface of the substrate 200a.
  • two piezoelectric cantilevers 310 are arranged at intervals along the x direction on the surface of the substrate 200a.
  • S402 specifically includes the following steps:
  • a fourth elastic film layer 320a can be covered on the surface of the piezoelectric cantilever 310 and the substrate 200a by using a film-attaching or laminating process.
  • the fourth elastic film layer 320a can be patterned by dry or wet process, remove the fourth elastic film layer 320a on the surface of the top electrode layer 313 and part of the surface of the substrate 200a, and keep the lining Part of the fourth elastic film layer 320a on the bottom 200a is used to form a vibrating film 320 between two adjacent piezoelectric cantilevers 310 . It can be understood that there is a gap 301 between the diaphragm 320 and each piezoelectric cantilever 310 , and the diaphragm 320 and the plurality of piezoelectric cantilevers 310 together form the vibrating element 300 of the acoustic transducer.
  • the top silicon 230 between the piezoelectric cantilever 310 and the diaphragm 320 can be etched along the opposite direction of z by an etching process to obtain the elastic member 421 .
  • two ends of the elastic member 421 are respectively connected to adjacent ends of the piezoelectric cantilever 310 and the vibrating membrane 320 , and the elastic member 421 has a spring structure, that is, there is a gap 421a inside the elastic member 421 .
  • an etching process can be used to etch from the surface of the underlying silicon 210 of the substrate 200a, and sequentially etch the underlying silicon 210 and the silicon oxide layer 220 to form the substrate 200a into a support 200.
  • the substrate 200a is etched to form a cavity, that is, the inner cavity of the support 200 can be used as the rear cavity 102 of the acoustic transducer, and the vibration element 300 is released, that is, each piezoelectric cantilever 310 and diaphragm 320 are suspended It is arranged at one end of the support member 200 so as to realize vibration in the z direction.
  • a sealing medium layer 422 may be formed on the surface of the vibration element 300 such as the piezoelectric cantilever 310 , the diaphragm 320 and the elastic member 421 .
  • an elastic thin film can be formed on the surface of all the piezoelectric cantilever 310 , vibrating membrane 320 and elastic member 421 as a sealing medium layer 422 (shown in FIG. 52 ) by using a film sticking or pressing film process.
  • the sealing medium layer 422 can be patterned using a patterning process to remove the sealing medium layer 422 on the surface of the vibrating element 300, and retain the sealing medium layer 422 on the surface of the elastic member 421, so that the sealing medium layer 422 is opposite to the elastic member.
  • the gap 421a of the piezoelectric cantilever 310 and the vibrating membrane 320 are blocked by blocking the gap 421a of the piezoelectric cantilever 310 and the diaphragm 320 .
  • the elastic seal 400 used to connect the piezoelectric cantilever 310 and the diaphragm 320 is the second elastic seal 420 .
  • Fig. 54 is a schematic structural diagram of another acoustic transducer provided by an embodiment of the present application. 54, in some other examples, the second end of the support 200 of the acoustic transducer is connected to the area between the outer edges of the vibrating element 300, so that the vibrating element 300 is suspended in the housing 100. cavity.
  • the supporting member 200 may be a supporting block, the first end of which is disposed on the base 120 of the housing 100 , and the second end of which is fixedly connected to the area between the outer edges of the vibrating element 300 .
  • the acoustic transducer further includes a sealing collar 500 within the housing 100 .
  • the outer edge of the vibrating element 300 is sealingly connected with the inner sidewall of the casing 100 through the sealing ring 500 .
  • the sealing ring 500 is an annular structure, the inner edge of the sealing ring 500 is connected with the outer edge of the vibrating element 300, and the outer edge of the sealing ring 500 is connected with the inner wall of the housing 100 (for example, the shell 110
  • the inner side wall of the vibrating element 300 and the inner side wall of the housing 100 can be connected in a sealed manner.
  • the sealing ring 500 has elasticity in the horizontal direction, that is, the sealing ring 500 will elastically deform during the vibration of the vibrating element 300, thereby releasing the edge stress of the vibrating element 300, so that the vibrating element 300 can freely vibrate along the z direction , without being restrained by the casing 100 .
  • the structure of the sealing ring 500 can directly refer to the content of related technologies, and will not be repeated here.
  • one side of the vibrating element 300, a part of the housing wall of the housing 100, and one side of the sealing edge 500 form the front cavity 101
  • the other side of the housing 500 and another part of the housing wall of the housing 100 form the rear cavity 102 .
  • one side and the other side of the vibrating element 300 respectively refer to two sides of the vibrating element 300 disposed opposite to each other along the vibrating direction.
  • the vibration direction can refer to the z direction shown in FIG. 54 .
  • one side and the other side of the sealing ring 500 refer to opposite sides of the sealing ring 500 along the thickness direction.
  • the supporting member 200 such as a supporting block is located in the rear cavity 102 .
  • the gap at the end of the vibrating element 300 away from the sealing ring 500 there is a gap at the end of the vibrating element 300 away from the sealing ring 500 , and an elastic seal 400 is provided at the gap, and the elastic seal 400 is used to seal the gap.
  • the gap at the end of the vibrating element 300 away from the sealing ring 500 is taken as the first gap 301a.
  • the vibration element 300 includes at least one piezoelectric cantilever 310 and at least two diaphragms 320 .
  • the second end of the support member 200 is connected to the piezoelectric cantilever 310 , and all the diaphragms 320 are located on the side of the piezoelectric cantilever 310 facing the front cavity 101 .
  • the piezoelectric cantilever 310 is connected to the first ends of at least two diaphragms 320, so that the piezoelectric cantilever 310 drives each diaphragm 320 to vibrate during the warping deformation process, so that the piezoelectric cantilever 310 and the diaphragm 320
  • the common vibration realizes the effective pushing of the air in the front cavity 101 and the rear cavity 102, thereby generating sound.
  • each diaphragm 320 is connected to the sealing ring 500, and there is a first gap 301a between the second ends of two adjacent diaphragms 320, and an elastic sealing member 400 is provided at the first gap 301a.
  • the elastic sealing member 400 is respectively connected to the second ends of two adjacent vibrating membranes 320 to seal the first gap 301a between the two adjacent vibrating membranes 320, thereby improving the gap between the front cavity 101 and the rear cavity 102. Between the sealing isolation effect.
  • piezoelectric cantilever 310 taking a piezoelectric cantilever 310 and two diaphragms 320 as an example, wherein the piezoelectric cantilever 310 is fixed on the second end of the support 200 , and the outer edge of the piezoelectric cantilever 310 faces the housing 100
  • the inner side wall of the piezoelectric cantilever 310 has a certain distance from the inner side wall of the housing 100 to ensure that the outer edge of the piezoelectric cantilever 310 is warped and deformed.
  • the two diaphragms 320 are located on the side of the piezoelectric cantilever 310 facing the front cavity 101, and the first ends of the two diaphragms 320 are arranged opposite to each other, and can be respectively disposed opposite to the two edges of the piezoelectric cantilever 310 along the x direction.
  • the second ends of the two diaphragms 320 are oppositely arranged, and there is a first gap 301a between the second ends of the two diaphragms 320, and there is an elastic seal 400 at the first gap 301a, and the elastic seal 400
  • One end of the elastic seal 400 is connected to the second end of one of the diaphragms 320, and the other end of the elastic seal 400 is connected to the second end of the other diaphragm 320, so that the sealing between two adjacent diaphragms 320 is improved, Improve the sealing and isolation effect of the front cavity 101 and the rear cavity 102 on both sides of the diaphragm 320, thereby improving or avoiding the acoustic short circuit between the front cavity 101 and the rear cavity 102, and improving the sensitivity of the acoustic transducer.
  • the elastic sealing member 400 located at the first gap 301 a can elastically deform during the vibration of each diaphragm 320 , so as to prevent two adjacent diaphragms 320 from being restrained by each other during the vibration and affecting the vibration amplitude.
  • Three or more vibrating membranes 320 can be arranged in a ring structure at intervals on the side of the piezoelectric cantilever 310 facing the front cavity 101, and the first end of each vibrating membrane 320 can be connected to the outer edge of the piezoelectric cantilever 310, The first end of each diaphragm 320 is also connected to the inner edge of the sealing ring 500 to improve the sealing between the second end of each diaphragm 320 and the inner wall of the casing 100 .
  • the first gap 301 a ) between the second ends of two adjacent vibrating membranes 320 can be sealed by the elastic sealing member 400 .
  • two adjacent vibrating membranes 320 can be understood as two adjacent vibrating membranes along the circumferential direction of the ring structure.
  • 320 can also be understood as two diaphragms 320 that are radially adjacent along any one of the annular structures.
  • the second ends of any two adjacent vibrating membranes 320 along the circumferential direction of the ring structure can be sealed and connected by the elastic sealing member 400 .
  • Fig. 55 is a schematic structural diagram of another acoustic transducer provided by an embodiment of the present application.
  • there may be multiple piezoelectric cantilevers 320 and multiple piezoelectric cantilevers 320 may be arranged at intervals around the support 200 , wherein the first end of each piezoelectric cantilever 320 is connected to a diaphragm The first end of each piezoelectric cantilever 320 is connected to each other, and the second end of each piezoelectric cantilever 320 is connected to the support member 200 .
  • the piezoelectric cantilever 320 can be arranged in one-to-one correspondence with the vibrating membrane 320 .
  • there are two piezoelectric cantilevers 320 two piezoelectric cantilevers 310 are arranged sequentially along the x direction, each piezoelectric cantilever 310 is provided with a diaphragm 320 on the side facing the front cavity 101, and each piezoelectric cantilever 310
  • the first end of each piezoelectric cantilever 310 is connected to the first end of the corresponding diaphragm 320, and the second end of each piezoelectric cantilever 310 is fixed on the second end of the support 200, so that each piezoelectric cantilever 310 can
  • Each piezoelectric cantilever 310 and diaphragm 320 can drive the corresponding diaphragm 320 to vibrate along the z direction, so that each piezoelectric cantilever 310 and diaphragm 320 can jointly push the air in the front
  • the vibrating membrane 320 can be attached to one side of the piezoelectric cantilever 310 to simplify the manufacturing process of the vibrating element 300 .
  • the vibrating membrane 320 and the piezoelectric cantilever 310 can be spaced vertically (shown in the z direction with reference to FIG. 55 ), so that the first end of each vibrating membrane 320 and the first There is a gap 301 (such as the second gap 301b) between the ends, and the second gap 301b is provided with an elastic seal 400, and the elastic seal 400 is connected to the diaphragm 320 and the piezoelectric cantilever 310 respectively, so as to realize the sealing of the second gap. 301b blocking.
  • the elastic seal 400 used to connect the diaphragm 320 and the piezoelectric cantilever 310 is disposed near the first end of each diaphragm 320 to ensure that the vibration amplitude of each diaphragm 320 will not be supported by the elastic seal 400 And limited.
  • the setting of the elastic seal 400 at the second gap 301b makes the second gap 301b between the first end of the vibrating membrane 320 and the first end of the piezoelectric cantilever 310 realize sealing, thereby further improving the vibration element 300 to the front.
  • the sealing isolation effect of the cavity 101 and the rear cavity 102 for example, the elastic seal 400 at the first gap 301a can be used as a primary sealing element, and the elastic seal 400 at the second gap 301b can be used as a secondary sealing element, and the primary sealing
  • the arrangement of the element and the secondary sealing element makes the gap 301 communicating with the front cavity 101 and the rear cavity 102 in the vibration element 300 all be blocked, thereby improving the sealing and isolation effect of the vibration element 300 on the front cavity 101 and the rear cavity 102,
  • the acoustic short-circuit problem of the acoustic transducer is improved or avoided, thereby improving the frequency response of the acoustic transducer such as low-frequency loudness.
  • the elastic seal 400 at the second gap 301b that is, the elastic seal 400 used to connect the diaphragm 320 and the piezoelectric cantilever 310 may be the above-mentioned third elastic seal 430 such as a second elastic block, the second elastic block One end of the second elastic block is connected to the first end of the diaphragm 320, and the other end of the second elastic block is connected to the first end of the piezoelectric cantilever 310, so as to realize the sealing of the vertical gap 301 between the diaphragm 320 and the piezoelectric cantilever 310 .
  • the structure and material of the third elastic sealing member 430 can directly refer to the relevant content of the above example, and will not be repeated here.
  • the elastic seal 400 at the first gap 301a that is, the elastic seal 400 used to connect the gap 301 at the end of the vibrating element 300 away from the sealing ring 300, can use the first elastic seal 410 mentioned in the above examples
  • the two elastic blocks (such as the first elastic block 411) of the first elastic sealing member 410 can be respectively connected with two adjacent diaphragms 320, and the connecting part 412 is connected between the other ends of the two elastic blocks, so as to The first gap 301 a is blocked by the first elastic sealing member 410 .
  • the structure and materials of the first elastic sealing member 410 can be directly referred to the relevant content of the above example, and will not be repeated here.
  • the elastic sealing member 400 at the first gap 301 a may also be the second elastic sealing member 420 .
  • the two ends of the elastic member 421 are respectively connected to the second ends of two adjacent vibrating membranes 320, and the sealing medium layer 422 is used to block the gap in the elastic member 421, for example, the The sealing medium layer 422 may cover the side of the elastic member 421 facing the front cavity 101 , so as to seal the gap between two adjacent diaphragms 320 , such as the first gap 301 a.
  • electrically connected in this application can be understood as the physical contact and electrical conduction of components; it can also be understood as the connection between different components in the circuit structure through printed circuit board (printed circuit board, PCB) copper foil or wires It is a form of connection with physical lines that can transmit electrical signals.
  • Both "connected” and “connected” can refer to a mechanical connection or a physical connection, that is, the connection between A and B or the connection between A and B can mean that there are fastening components (such as screws, bolts, rivets, etc.) between A and B. etc.), or A and B are in contact with each other and A and B are difficult to be separated.
  • connection should be understood in a broad sense, for example, it can be fixed connection or An indirect connection through an intermediary may be an internal communication between two elements or an interaction relationship between two elements.

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Piezo-Electric Transducers For Audible Bands (AREA)

Abstract

Des modes de réalisation de la présente invention concernent un dispositif électronique et un transducteur acoustique. Le transducteur acoustique comprend un élément vibrant et un élément d'étanchéité élastique, un côté de l'élément vibrant est pourvu d'une cavité arrière, une extrémité de l'élément vibrant est pourvue d'un espace communiqué avec la cavité arrière, l'élément d'étanchéité élastique est fourni à l'espace, et l'élément d'étanchéité élastique est connecté à l'élément vibrant pour bloquer l'espace à l'extrémité de l'élément vibrant, La performance d'étanchéité de la cavité arrière est ainsi améliorée, l'effet d'isolation de l'étanchéité entre la cavité arrière et d'autres cavités telles que la cavité avant du transducteur acoustique est amélioré, et le problème du court-circuit sonore entre la cavité avant et la cavité arrière est atténué, ce qui améliore la réponse en fréquence du transducteur acoustique.
PCT/CN2022/138485 2022-01-07 2022-12-12 Dispositif électronique et transducteur acoustique WO2023130914A1 (fr)

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