WO2023124581A1

WO2023124581A1 - Cvd laser machining device and operation method

Info

Publication number: WO2023124581A1
Application number: PCT/CN2022/131440
Authority: WO
Inventors: 何良俊; 杨将; 张海
Original assignee: 武汉劲野科技有限公司
Priority date: 2021-12-31
Filing date: 2022-11-11
Publication date: 2023-07-06
Also published as: CN114346466A; CN114346466B

Abstract

Provided is a CVD laser machining device, comprising a machining table (1). Two symmetrically-arranged supporting legs (2) are fixed to the bottom of the machining table (1); a rack (3) is fixed to the upper end of the machining table (1); a laser head (8) is connected to the upper end of the rack (3) by means of a transfer mechanism; a positioning block (9) is in threaded connection with the upper end of the machining table (1); two symmetrically-arranged clamping grooves (10) are formed in the upper end of the machining table (1); pushing blocks (11) are slidably connected to the inner walls of the two clamping grooves (10); screw rods (12) are fixed to the bottoms of the two pushing blocks (11).

Description

A kind of CVD laser processing equipment and operation method

technical field

The invention relates to the technical field of laser processing, in particular to a CVD laser processing device and an operation method.

Background technique

CVD diamond is a mixture of carbon-containing gas and hydrogen that is excited and decomposed at high temperature and pressure below standard atmospheric pressure to form activated carbon diamond carbon atoms, which are precipitated and inter-growth into polycrystalline diamond on the substrate. It has a wide range of applications. The hardness can be used in the production of knives, or various biosensor devices can be made by utilizing the chemical stability of diamond.

technical problem

The CVD diamond processing process usually clamps the workpiece first, then cuts it, and then grinds it. The existing equipment has low adaptability defects in the clamping convenience, and it is difficult to meet the effective clamping of workpieces with different shapes, and the workpiece will be damaged after cutting. Dropping and separation, subsequent processing requires repositioning and clamping, which is extremely inconvenient. However, the flatness requirements are relatively high during grinding. The existing grinding device does not have the function of detecting its flatness, and cannot ensure the accuracy of the CVD diamond after grinding.

technical solution

The purpose of the present invention is to solve the problem of poor equipment adaptability in the prior art, and propose a CVD laser processing equipment and operation method.

In order to achieve the above object, the present invention adopts the following technical solutions: a CVD laser processing equipment, including a processing table, two symmetrically arranged legs are fixed on the bottom of the processing table, and a platform is fixed on the upper end of the processing table. frame, the upper end of the frame is connected with a laser head through a transfer mechanism, the upper end of the processing table is screwed with a positioning block, and the upper end of the processing table is provided with two symmetrically arranged clamping grooves, and the two clamps The inner wall of the holding groove is slidingly connected with a propulsion block, the bottoms of the two propulsion blocks are fixed with screw rods, the side walls of the two screw rods are screwed with driving blocks, and the bottom of the processing table is fixed with a clamping motor , the output shaft of the clamping motor and the side walls of the two drive blocks are fixed with shrinkage ropes, the inside of the push block is provided with a clamping mechanism, and the side wall of the stand is provided with a flatness measuring mechanism.

In the above-mentioned CVD laser processing equipment, the transfer mechanism includes a traversing motor fixed on the upper end of the platform, the output shaft of the traversing motor is fixed with a screw, and the side wall of the screw is screwed with a slider , the bottom of the slider is fixed with a lifting rod, the bottom of the lifting rod is connected with the laser head, the upper end of the stand is provided with a chute, and the lifting rod is slidably connected with the inner wall of the chute.

In the above-mentioned CVD laser processing equipment, the clamping mechanism includes a clamping block slidingly connected to the inner wall of the pushing block, a matching groove and a pushing groove are opened inside the clamping block, and the inner wall of the matching groove is fixed with A matching belt, the side wall of the matching groove is penetrated with a connection hole connected to the inside of the pushing groove, the inner wall of the pushing groove is connected with a pressing plate through a return spring, the side wall of the pressing plate is fixed with a pressing rod, and the pressing The rod penetrates the side wall of the propulsion groove and is fixed to the propulsion block, and the insides of the matching groove and the propulsion groove are filled with magnetorheological fluid.

In the above-mentioned CVD laser processing equipment, the side wall of the driving block is provided with a clamping groove, the inner wall of the clamping groove is adsorbed with a clamping plate, the clamping plate is an electromagnet, and the clamping plate and the clamping groove Sliding connections on the inner wall.

In the above-mentioned CVD laser processing equipment, the flatness measuring mechanism includes a display panel fixed on the upper end of the processing table, two sets of sensors are fixed on the two side walls of the display panel, and two sets of sensors are fixed on the side walls of the platform. two cloning push rods, the ends of the two cloning push rods are fixed with cloning sleeves, the inner walls of the two cloning sleeves are fixed with cloning belts, and the side walls of the stand are fixed with two symmetrically arranged shooters. lamp.

In the above-mentioned CVD laser processing equipment, the surface of the cloning tape is evenly coated with mirror paint, and the inside of the cloning sleeve is filled with electrorheological fluid.

A CVD laser processing equipment operating method, comprising the following processing steps:

Step 1: Adjust the height of the positioning block, and then place the workpiece to be processed on the positioning block so that the workpiece is basically in the middle of the matching belt;

Step 2: Start the clamping motor to make it retract the shrinking rope, and then make the two push blocks close to realize the clamping of the workpiece;

Step 3: Strengthen the magnetic field strength of the clamping plate, so that the magnetorheological fluid is solidified and shaped, thereby ensuring continuous and effective clamping after the workpiece is attached;

Step 4: Start the laser head for cutting processing, and start the traverse motor at the same time to drive the screw to rotate, so that the slider can drive the laser head to move and complete all cutting;

Step 5: Take out the clamping plate from the card slot and attach it to the pusher block, then turn the drive block to move the pusher block up, turn the pusher block so that the workpiece faces the cloning belt, and finally move the pusher block down to ensure the stability of the workpiece position;

Step 6: Start the cloning push rod, make it stretch and push the cloning sleeve to move, so that the cloning belt fits the surface of the workpiece, and then supply power to the electrorheological fluid to solidify and shape, obtain the clone shape of the workpiece processing surface, shrink the cloning push rod, Start the spotlight, obtain the flatness status through light reflection, so as to determine whether to carry out grinding treatment, and test again after polishing until the flatness reaches the standard.

Beneficial effect

Compared with the prior art, the present invention has the advantages of:

1. In the present invention, the positioning block can move up and down by turning, and its own thread setting has self-locking ability, which can ensure the height stability of the workpiece, so that the workpiece can be subsequently clamped by the center position of the matching belt, and the clamping of the workpiece can be improved. lasting effect;

2. In the present invention, the matching belt will also be shaped after the magnetorheological fluid is shaped, so that the shape of the clamping parts is stable, and the stability of the clamping state is guaranteed during the processing process, and the clamping of the wrapping type can greatly improve the clamping effect. At the same time, it can also adapt to workpieces with various surface shapes, especially for irregular workpieces, the advantages are more obvious;

3. In the present invention, the workpiece is divided into two parts after cutting, but each part of the workpiece is in the state of being wrapped and attached, so it will not be separated from the matching belt, but will be in the state of being picked up, thereby avoiding the falling of the workpiece after cutting Falling, and at the same time facilitate the subsequent processing of the workpiece;

4. In the present invention, the state of the propulsion block can be changed, the direction of the cutting surface of the workpiece can be changed by turning the propulsion block, or the grinding process can be carried out directly, or the test process can be carried out, and the position can be changed by turning, so that disassembly and secondary clamping are not required ;

5. In the present invention, the surface of the cloning belt has a mirror coating, so it can reflect light. If the surface is flat, the point of light reflection is determined and should fall within the range of the sensor. Irradiation can realize multi-point sampling on the surface of the workpiece, so as to ensure the accuracy of measurement and reduce errors.

Description of drawings

Fig. 1 is the structural representation of the laser processing equipment of a kind of CVD that the present invention proposes;

Fig. 2 is the semi-sectional view of the laser processing equipment of a kind of CVD that the present invention proposes;

Fig. 3 is the top sectional view of a kind of CVD laser processing equipment that the present invention proposes;

FIG. 4 is a schematic structural view of the propulsion block part of a CVD laser processing device proposed by the present invention.

In the figure: 1 processing table, 2 outriggers, 3 pedestals, 4 traverse motors, 5 screw rods, 6 sliders, 7 chutes, 8 laser heads, 9 positioning blocks, 10 clamping grooves, 11 push blocks, 12 Screw, 13 driving block, 14 card slot, 15 card plate, 16 clamping motor, 17 shrinkage rope, 18 clamping block, 19 matching groove, 20 matching belt, 21 pushing groove, 22 connecting hole, 23 return spring, 24 pressing plate , 25 pressure rods, 26 display boards, 27 sensors, 28 cloning push rods, 29 cloning sets, 30 cloning belts, 31 spotlights, 32 lifting rods.

BEST MODE FOR CARRYING OUT THE INVENTION

The following examples are for illustrative purposes only and are not intended to limit the scope of the invention.

Example

Referring to Figures 1-4, a CVD laser processing device includes a processing table 1, two symmetrically arranged legs 2 are fixed on the bottom of the processing table 1, and a platform 3 is fixed on the upper end of the processing table 1. The upper end is connected with the laser head 8 through the transfer mechanism, the upper end of the processing table 1 is threadedly connected with the positioning block 9, and the upper end of the processing table 1 is provided with two symmetrically arranged clamping grooves 10, and the inner walls of the two clamping grooves 10 are all slidably connected. Propelling block 11 is arranged, and the bottom of two propelling blocks 11 is all fixed with screw rod 12, and the side wall of two screw rods 12 is all screwed with driving block 13, and the bottom of processing table 1 is fixed with clamping motor 16, and the clamping motor 16 The output shaft and the side walls of the two driving blocks 13 are fixed with shrinkage ropes 17, the inside of the push block 11 is provided with a clamping mechanism, and the side wall of the stand 3 is provided with a flatness measuring mechanism.

The transfer mechanism includes a traversing motor 4 fixed on the upper end of the platform 3, the output shaft of the traversing motor 4 is fixed with a screw 5, the side wall of the screw 5 is screwed with a slider 6, and the bottom of the slider 6 is fixed with a lifting rod 32. The bottom of the lifting rod 32 is connected with the laser head 8, and the upper end of the stand 3 is provided with a chute 7, and the lifting rod 32 is slidably connected with the inner wall of the chute 7.

The clamping mechanism includes a clamping block 18 slidingly connected to the inner wall of the pushing block 11. The inside of the clamping block 18 is provided with a matching groove 19 and a pushing groove 21. The inner wall of the matching groove 19 is fixed with a matching belt 20, and the side wall of the matching groove 19 A connecting hole 22 connected to the inside of the push groove 21 is opened through, the inner wall of the push groove 21 is connected with a pressure plate 24 through a return spring 23, and a pressure rod 25 is fixed on the side wall of the pressure plate 24, and the pressure rod 25 runs through the side wall of the push groove 21 Fixed with the propulsion block 11, the interiors of the matching groove 19 and the propulsion groove 21 are both filled with magnetorheological fluid.

The side wall of driving block 13 is provided with draw-in groove 14, and the inner wall of draw-in groove 14 is adsorbed with clamp plate 15, and clamp plate 15 is an electromagnet, and clamp plate 15 is connected with the inner wall of clamping groove 10 slidingly, and clamp plate 15 plays a role in limiting driving. The block 13 is rotated, and the magnetic field strength of the clip 15 is weak at the initial stage. It is only necessary to ensure that the clip 15 can be installed, and the subsequent strengthening of the magnetic field can realize the solidification and setting of the magnetorheological fluid.

The flatness measuring mechanism includes a display board 26 fixed on the upper end of the processing table 1, two sets of sensors 27 are fixed on the two side walls of the display board 26, two cloning push rods 28 are fixed on the side wall of the stand 3, and two cloning push rods The ends of 28 are fixed with cloning sleeves 29, the inner walls of the two cloning sleeves 29 are fixed with cloning belts 30, and the side walls of the stand 3 are fixed with two symmetrically arranged spotlights 31, and each spotlight 31 can emit Two beams of parallel light rays enable multi-point sampling to reduce errors.

The surface of the cloning tape 30 is evenly coated with mirror paint, and the inside of the cloning sleeve 29 is filled with electrorheological fluid. The cloning tape 30 will be deformed under pressure, so that the surface state of the workpiece can be obtained smoothly, and the existence of the mirror paint can form a mirror surface. coating, so that the surface of the cloning belt 30 can reflect light smoothly, and the point of light reflection is accurate and controllable.

Step 1: Adjust the height of the positioning block 9, then place the workpiece to be processed on the positioning block 9, so that the workpiece is basically in the middle of the matching belt 20, the positioning block 9 can move up and down by turning, and its own thread setting has an automatic The locking ability can ensure the high stability of the workpiece, so that the workpiece can be clamped by the center position of the matching belt 20, and the clamping effect of the workpiece can be improved;

Step 2: Start the clamping motor 16 to make it retract the shrinking rope 17, and then make the two push blocks 11 approach to clamp the workpiece; the retracting rope 17 first makes the driving block 13 move, because the driving block 13 is affected by The limitation of the clamping plate 15 makes the drive block 13 cylindrical, but can only keep sliding in the clamping groove 10 and cannot rotate, so that the height of the push block 11 is guaranteed to be stable, and at the same time it drives the push block 11 to move, and the push block 11 will drive the clip. The holding block 18 moves, so that the matching belt 20 is finally attached to the workpiece, and then under the action of the thrust, it is tightly attached to the workpiece to complete the clamping. After the matching belt 20 is attached to the workpiece, the continuous movement of the pushing block 11 will push the pressure plate 24 to move , so that the magnetorheological fluid inside the propulsion groove 21 enters the matching groove 19 through the connecting hole 22, and then the matching belt 20 is further squeezed and deformed, so as to fully wrap the end of the workpiece and realize effective attachment to the workpiece clamping;

Step 3: Strengthen the magnetic field strength of the clamping plate 15, so that the magnetorheological fluid is solidified and shaped, thereby ensuring continuous and effective clamping after the workpiece is attached; Stable, to ensure the stability of the clamping state during processing, and the wrap-fit clamping can greatly improve the clamping effect, and can also adapt to workpieces with various surface shapes, especially for irregular workpieces, the advantages are more obvious;

Step 4: Start the laser head 8 for cutting processing, and start the traverse motor 4 at the same time to drive the screw rod 5 to rotate, so that the slider 6 can drive the laser head 8 to move and complete all cutting; after cutting, the workpiece is divided into two parts, However, each part of the workpiece is in the state of being wrapped and attached, so it will not be separated from the matching belt 20, but will be in the state of being picked up, thereby avoiding the falling of the workpiece after cutting, and at the same time facilitating the subsequent processing of the workpiece;

Step 5: Take the clamping plate 15 out of the slot 14 and attach it to the pusher block 11, then turn the drive block 13 to move the pusher block 11 upwards, turn the pusher block 11 so that the workpiece faces the cloning belt 30, and finally move down and advance The block 11 ensures that the position of the workpiece is stable; after the clamping plate 15 is taken out, the rotation of the drive block 13 will no longer be restricted, so that the drive block 13 can form relative rotation with the screw rod 12, and then the push block 11 is moved upwards, and then moved out of the clamping groove 10, The rotation of the propulsion block 11 is no longer restricted. At this time, the direction of the cutting surface of the workpiece can be changed by rotating the propulsion block 11, or the grinding process can be performed directly, or the test process can be carried out. clamping;

Step 6: Start the cloning push rod 28, make it extend and push the cloning sleeve 29 to move, so that the cloning belt 30 is attached to the surface of the workpiece, and then supply power to the electrorheological fluid to solidify and set the shape, obtain the clone shape of the workpiece processing surface, and shrink the clone The push rod 28 starts the spotlight 31, obtains the state of flatness through light reflection, and then determines whether to perform grinding treatment, and then tests again after grinding until the flatness reaches the standard; the cloning belt 30 is squeezed and deformed, so that it can be effectively attached to the workpiece for cutting surface, then the setting of the electrorheological fluid will make the shape of the cloning tape 30 determined, and then complete the cloning of the cutting surface by laminating. In this state, the surface state of the cloning tape 30 replaces the state of the cutting surface of the workpiece. The state of the workpiece can be obtained by testing the surface. Since the surface of the cloning belt 30 has a mirror coating, it can reflect light. If the surface is flat, the light reflection point is determined and should fall within the range of the sensor 27 and pass through two parallel light beams. The irradiation of two points can realize multi-point sampling on the surface of the workpiece, so as to ensure the accuracy of measurement and reduce errors.

The above descriptions are only preferred embodiments of the present invention, and are not intended to limit the present invention. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention shall be included in the protection of the present invention. within range.

Claims

A CVD laser processing equipment, comprising a processing table (1), characterized in that two symmetrically arranged legs (2) are fixed on the bottom of the processing table (1), and the upper end of the processing table (1) A platform (3) is fixed, the upper end of the platform (3) is connected with a laser head (8) through a transfer mechanism, and the upper end of the processing table (1) is threaded with a positioning block (9), and the processing table The upper end of (1) is provided with two symmetrically arranged clamping grooves (10), and the inner walls of the two clamping grooves (10) are slidingly connected with push blocks (11), and the two push blocks (11) Screw rods (12) are fixed on the bottom of the two screw rods (12), the side walls of the two screw rods (12) are threadedly connected with driving blocks (13), and the bottom of the processing table (1) is fixed with a clamping motor (16). The output shaft of the clamping motor (16) and the side walls of the two driving blocks (13) are fixed with shrinkage ropes (17), the inside of the push block (11) is provided with a clamping mechanism, and the stand ( 3) The side wall is equipped with a flatness measuring mechanism.
The CVD laser processing equipment according to claim 1, characterized in that the transfer mechanism includes a traverse motor (4) fixed on the upper end of the stand (3), and the output of the traverse motor (4) The shaft is fixed with a screw rod (5), the side wall of the screw rod (5) is threadedly connected with a slider (6), and the bottom of the slider (6) is fixed with a lifting rod (32), and the lifting rod ( The bottom of 32) is connected with the laser head (8), the upper end of the stand (3) is provided with a chute (7), and the lifting rod (32) is slidably connected with the inner wall of the chute (7).
The CVD laser processing equipment according to claim 1, characterized in that the clamping mechanism includes a clamping block (18) slidingly connected to the inner wall of the push block (11), and the clamping block (18) A matching groove (19) and a pushing groove (21) are opened inside the inside of the matching groove (19). The inner wall of the matching groove (19) is fixed with a matching belt (20), and the side wall of the matching groove (19) is penetrated with a pushing groove ( 21) The connection hole (22) connected inside, the inner wall of the push groove (21) is connected with the pressure plate (24) through the return spring (23), and the side wall of the pressure plate (24) is fixed with the pressure rod (25) , the pressing rod (25) penetrates the side wall of the propulsion groove (21) and is fixed to the propulsion block (11), and the insides of the matching groove (19) and the propulsion groove (21) are both filled with magnetorheological fluid.
The CVD laser processing equipment according to claim 1, characterized in that, the side wall of the driving block (13) is provided with a clamping groove (14), and the inner wall of the clamping groove (14) is adsorbed with a clamping plate (15), the clamping plate (15) is an electromagnet, and the clamping plate (15) is slidingly connected with the inner wall of the clamping groove (10).
The CVD laser processing equipment according to claim 1, characterized in that, the flatness measuring mechanism includes a display panel (26) fixed on the upper end of the processing table (1), and the two sides of the display panel (26) Two groups of sensors (27) are fixed on the side wall, two cloning push rods (28) are fixed on the side wall of the platform (3), and cloning sleeves are fixed at the ends of the two cloning push rods (28) (29), the inner walls of the two cloning sets (29) are fixed with cloning belts (30), and the side walls of the stand (3) are fixed with two symmetrically arranged spotlights (31).
A CVD laser processing device according to claim 5, characterized in that, the surface of the cloning belt (30) is evenly coated with mirror paint, and the inside of the cloning sleeve (29) is filled with electrorheological fluid .
A CVD laser processing equipment operation method, characterized in that it comprises the following processing steps:

Step 1: Adjust the height of the positioning block 9, and then place the workpiece to be processed on the positioning block 9, so that the workpiece is basically in the middle of the matching belt 20;

Step 2: start the clamping motor (16) to make it retract the shrinking rope (17), and then make the two push blocks (11) close to realize the clamping of the workpiece;

Step 3: Strengthen the magnetic field strength of the clamping plate (15), so that the magnetorheological fluid is solidified and shaped, thereby ensuring continuous and effective clamping after the workpiece is attached;

Step 4: Start the laser head (8) for cutting, and at the same time start the traverse motor (4) to drive the screw rod (5) to rotate, so that the slider (6) can drive the laser head (8) to move, and complete all cutting;

Step 5: Take the clamping plate (15) out of the slot (14) and attach it to the pusher block (11), then turn the driving block (13) to move the pusher block (11) upwards, and turn the pusher block (11) ) to make the workpiece face the cloning belt (30), and finally move the push block (11) down to ensure the stable position of the workpiece;

Step 6: Start the cloning push rod (28), extend it and push the cloning sleeve (29) to move, so that the cloning belt (30) fits the surface of the workpiece, and then supply power to the electrorheological fluid to solidify and set the shape, and obtain the processing surface of the workpiece In the clone shape, shrink the clone push rod (28), start the spotlight (31), and obtain the flatness status through light reflection, so as to determine whether to perform polishing treatment, and test again after polishing until the flatness reaches the standard.