CN207155015U - A kind of equipment using cvd diamond is laser machined - Google Patents

A kind of equipment using cvd diamond is laser machined Download PDF

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Publication number
CN207155015U
CN207155015U CN201721069584.3U CN201721069584U CN207155015U CN 207155015 U CN207155015 U CN 207155015U CN 201721069584 U CN201721069584 U CN 201721069584U CN 207155015 U CN207155015 U CN 207155015U
Authority
CN
China
Prior art keywords
chute
gear
cvd diamond
turbine
bar
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201721069584.3U
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Chinese (zh)
Inventor
碳星
蔺钢
李升�
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Xi'an Carbon Star Semiconductor Technology Co Ltd
Original Assignee
Xi'an Carbon Star Semiconductor Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Xi'an Carbon Star Semiconductor Technology Co Ltd filed Critical Xi'an Carbon Star Semiconductor Technology Co Ltd
Priority to CN201721069584.3U priority Critical patent/CN207155015U/en
Application granted granted Critical
Publication of CN207155015U publication Critical patent/CN207155015U/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Abstract

The utility model discloses a kind of equipment using cvd diamond is laser machined, including base, base is provided with the first chute, the front end side wall of first chute is provided with the through hole of inside and outside connection, and run through in through hole and be provided with rotating bar, fixed cover is connected to the first turbine on one end that rotating bar is located in the first chute, the lower rotation of first chute is connected with the first worm screw, and first worm screw engaged with the first turbine, fixed cover is connected to first gear on first worm screw, and first gear is located at the lower section of the first turbine, the lower rotation of first chute is connected with two second worm screws, and two second worm screws are located on the first chute bottom of the first worm screw left and right ends respectively, fixed cover is connected to second gear on two second worm screws, and second gear engages with first gear, two the first sliding blocks are provided with first chute.The utility model can effectively detect the cvd diamond product flatness after polishing, it is ensured that the accuracy of cvd diamond product.

Description

A kind of equipment using cvd diamond is laser machined
Technical field
Diamond technical field of processing equipment is the utility model is related to, more particularly to a kind of utilize laser machines CVD Buddha's warrior attendants The equipment of stone.
Background technology
Cvd diamond is that the mixture of carbonaceous gas and hydrogen is excited under high temperature and pressure less than standard atmospheric pressure Decompose, form active diamond carbon atom, and compare into polycrystalline diamond, its use range in substrate deposit intergrowth Extensively, the making of cutter is can be used for using its hardness, or different kind organism sensor is made using the chemical stability of diamond Part, cvd diamond is higher to its flatness requirement in polishing, and existing sanding apparatus is without the work(for detecting its flatness Can, it is impossible to ensure the precision of cvd diamond after polishing.
The form of Laser Processing mainly cutting, polishing is another form of processing.The diamond table laser machined Face, general flatness are not high, it is necessary to flatness and surface smoothness are improved by other technique, so laser adds Work process is usually that need not measure its flatness.
Utility model content
The purpose of this utility model is to solve shortcoming present in prior art, and the one kind proposed is added using laser The equipment of work cvd diamond.
To achieve these goals, the utility model employs following technical scheme:
A kind of equipment using cvd diamond is laser machined, including base, the base is provided with the first chute, described The front end side wall of first chute is provided with the through hole of inside and outside connection, and through rotating bar is provided with through hole, the rotating bar is located at Fixed cover is connected to the first turbine on one end in first chute, and the lower rotation of first chute is connected with the first worm screw, and First worm screw engages with the first turbine, and fixed cover is connected to first gear on first worm screw, and first gear is located at the first whirlpool The lower section of wheel, the lower rotation of first chute is connected with two second worm screws, and two second worm screws are located at first respectively On first chute bottom of worm screw left and right ends, fixed cover is connected to second gear, and second gear on two second worm screws Engaged with first gear, be provided with two the first sliding blocks in first chute, be equipped with the side wall of two first sliding blocks First screwed hole of left and right connection, and the first screwed hole internal thread is connected with the first threaded rod, first threaded rod is close to the One end of one gear is connected with the second turbine, and the second turbine and the second worm engaging, and first threaded rod is away from the second whirlpool One end of wheel and the side wall of the first chute are rotatablely connected, and the upper end of two first sliding blocks is respectively connected with fix bar, two institutes State and fixed plate is respectively connected with the opposing sidewalls of fix bar, the upper end of the base is provided with gantry support, and gantry support is by one Root cross bar and two montant compositions, the lower end of the gantry support cross bar is connected with hydraulic cylinder, and the piston rod of hydraulic cylinder is vertical Set down, the piston-rod lower end of the hydraulic cylinder is connected with connecting plate, and the lower surface of the connecting plate is provided with the second chute, institute State in the first chute and be provided with two piece of second sliding block, the second screw thread of inside and outside connection is equipped with the front-rear side walls of second chute Hole, and the second screwed hole internal thread is connected with the second threaded rod, two second threaded rods are located at one end in the second chute The side wall with two piece of second sliding block is rotatablely connected respectively, and the lower end of one of them second sliding block is connected with sanding apparatus, separately The lower end of one second sliding block is connected with reference test bar, and the lower end of the reference test bar is connected with optical inductor, the reference test bar One end away from optical inductor is connected with generating laser.
Preferably, handle is connected with one end that the rotating bar is located at outside the first chute.
Preferably, the sanding apparatus is made up of rotary electric machine and polishing pad, and the upper end of the rotary electric machine is slided with second The lower end connection of block, and the drive shaft of rotary electric machine is set downwards, the lower end of the rotary electric machine drive shaft is fixedly connected Polishing pad.
Preferably, the laser that the generating laser is launched is in same level with optical inductor.
Preferably, the lower end of the base is connected with roller.
In the utility model, between cvd diamond is placed on into two fixed plates, swinging handle drives the first threaded rod to turn It is dynamic so that fixed plate moves, and two fixed plates fix to clamp cvd diamond, after polishing terminates, rotates wherein one second Threaded rod removes sanding apparatus above cvd diamond, and reference test bar is moved into CVD rotating another second threaded rod Top, be in same level by adjusting cvd diamond buffed surface and optical inductor, opening generating laser, if The optical inductor alarm surface smoothness that then cvd diamond is polished is higher, after cvd diamond polishing if optical inductor is not alarmed Surface smoothness it is relatively low, it is simple to operate, can effectively detect cvd diamond polishing after flatness, improve CVD Buddha's warrior attendants Quality, it is ensured that the precision of CVD Buddha's warrior attendants.
Brief description of the drawings
Fig. 1 be the utility model proposes it is a kind of using laser machine cvd diamond equipment perspective view;
Fig. 2 is Fig. 1 side structure schematic diagram.
In figure:1 base, 2 first chutes, 3 rotating bars, 4 first turbines, 5 first worm screws, 6 first gears, 7 second worm screws, 8 second gears, 9 first sliding blocks, 10 first threaded rods, 11 second turbines, 12 fix bars, 13 fixed plates, 14 gantry supports, 15 liquid Cylinder pressure, 16 connecting plates, 17 second chutes, 18 second sliding blocks, 19 second threaded rods, 20 sanding apparatus, 21 reference test bars, 22 photoinduction Device, 23 generating lasers, 24 rollers.
Embodiment
Below in conjunction with the accompanying drawing in the utility model embodiment, the technical scheme in the embodiment of the utility model is carried out Clearly and completely describing, it is clear that described embodiment is only the utility model part of the embodiment, rather than whole Embodiment.
Reference picture 1-2, a kind of equipment using cvd diamond is laser machined, including base 1, base 1 are provided with first and slided Groove 2, the front end side wall of the first chute 2 is provided with the through hole of inside and outside connection, and runs through in through hole and be provided with rotating bar 3, rotating bar 3 The first turbine 4 is connected in fixed cover on one end in the first chute 2, is connected with one end that rotating bar 3 is located at outside the first chute 2 Handle, it is easy to rotate rotating bar 3, the lower rotation of the first chute 2 is connected with the first worm screw 5, and the first worm screw 5 and the first turbine 4 engage, and fixed cover is connected to first gear 6 on the first worm screw 5, and first gear 6 is located at the lower section of the first turbine 4, the first chute 2 Lower rotation be connected with two second worm screws 7, and two second worm screws 7 are located at the first of the left and right ends of the first worm screw 5 respectively On the bottom of chute 2, fixed cover is connected to second gear 8 on two second worm screws 7, and second gear 8 engages with first gear 6, the Two the first sliding blocks 9 are provided with one chute 2, the first screwed hole of left and right connection is equipped with the side wall of two the first sliding blocks 9, and First screwed hole internal thread is connected with the first threaded rod 10, and the first threaded rod 10 is connected with second close to one end of first gear 6 Turbine 11, and the second turbine 11 engages with the second worm screw 7, the one end of the first threaded rod 10 away from the second turbine 11 and the first chute 2 side wall rotation connection, the upper ends of two the first sliding blocks 9 are respectively connected with fix bar 12, in the opposing sidewalls of two fix bars 12 Fixed plate 13 is respectively connected with, and rubber layer is equipped with the opposing sidewalls of two fixed plates 13 so that fixed plate 13 is fixing to clamp It will not be caused to damage during cvd diamond;
The upper end of base 1 is provided with gantry support 14, and gantry support 14 is made up of a cross bar and two montants, gantry branch The lower end of the cross bar of frame 14 is connected with hydraulic cylinder 15, and the piston rod of hydraulic cylinder 15 is set downwards, the piston rod of hydraulic cylinder 15 Lower end is connected with connecting plate 16, and the lower surface of connecting plate 16 is provided with the second chute 17, two piece of second cunning is provided with the first chute 17 Block 18, the second screwed hole of inside and outside connection is equipped with the front-rear side walls of the second chute 17, and the second screwed hole internal thread connects There is the second threaded rod 19, two second threaded rods 19 are located at one end in the second chute 17 side with two piece of second sliding block 18 respectively Wall is rotatablely connected, and the lower end of one of them the second sliding block 18 is connected with sanding apparatus 20, and sanding apparatus 20 is by rotary electric machine and beats Mill is formed, and the upper end of rotary electric machine is connected with the lower end of the second sliding block 18, and the drive shaft of rotary electric machine is set downwards, The lower end of rotary electric machine drive shaft is fixedly connected with polishing pad, and the lower end of another the second sliding block 18 is connected with reference test bar 21, test The lower end of bar 21 is connected with optical inductor 22, and is provided with alarm in optical inductor 22, and reference test bar 21 is away from optical inductor 22 One end is connected with generating laser 23, and the laser that generating laser 23 is launched is in same level with optical inductor 22, just Flatness after detection cvd diamond polishing, the lower end of base 1 is connected with roller 24, base 1 easy to remove.
In the utility model, between cvd diamond is placed on into two fixed plates 13, the first tooth is driven by swinging handle Wheel 6 rotates, because first gear 6 engages with second gear 8 so that and second gear 8 rotates two the first sliding blocks 9 of drive and moved, Two fixed plates 13 fix to clamp cvd diamond, after polishing terminates, rotate wherein second threaded rod 19 and fill polishing Put 20 to remove above cvd diamond, reference test bar 21 be moved to CVD top in another second threaded rod 19 of rotation, By adjusting cvd diamond buffed surface with optical inductor 22 in same level, generating laser 23 is opened, if light sensation Answer device 22 alarm the polishing of then cvd diamond surface smoothness it is higher, after cvd diamond polishing if optical inductor 22 is not alarmed Surface smoothness it is relatively low, it is simple to operate.
It is described above, the only preferable embodiment of the utility model, but the scope of protection of the utility model is not This is confined to, any one skilled in the art is in the technical scope that the utility model discloses, according to this practicality New technical scheme and its utility model design are subject to equivalent substitution or change, should all cover in protection model of the present utility model Within enclosing.

Claims (5)

1. a kind of equipment using cvd diamond is laser machined, including base (1), it is characterised in that set on the base (1) There is the first chute (2), the front end side wall of first chute (2) is provided with the through hole of inside and outside connection, and runs through in through hole and be provided with Rotating bar (3), fixed cover is connected to the first turbine (4) on one end that the rotating bar (3) is located in the first chute (2), and described The lower rotation of one chute (2) is connected with the first worm screw (5), and the first worm screw (5) engages with the first turbine (4), and described first Fixed cover is connected to first gear (6) on worm screw (5), and first gear (6) is located at the lower section of the first turbine (4), and described first slides The lower rotation of groove (2) is connected with two second worm screws (7), and two second worm screws (7) are respectively positioned at the first worm screw (5) left and right On first chute (2) bottom at both ends, fixed cover is connected to second gear (8), and second gear on two second worm screws (7) (8) engaged with first gear (6), two the first sliding blocks (9), two first sliding blocks (9) are provided with first chute (2) Side wall on be equipped with the first screwed hole of left and right connection, and the first screwed hole internal thread is connected with the first threaded rod (10), institute State the first threaded rod (10) and be connected with the second turbine (11), and the second turbine (11) and second close to one end of first gear (6) Worm screw (7) is engaged, and the side wall of the one end of first threaded rod (10) away from the second turbine (11) and the first chute (2), which rotates, to be connected Connect, the upper ends of two first sliding blocks (9) is respectively connected with fix bar (12), in the opposing sidewalls of two fix bars (12) Fixed plate (13) is respectively connected with, the upper end of the base (1) is provided with gantry support (14), and gantry support (14) is by a cross bar Formed with two montants, the lower end of gantry support (14) cross bar is connected with hydraulic cylinder (15), and the piston of hydraulic cylinder (15) Bar is set downwards, and the piston-rod lower end of the hydraulic cylinder (15) is connected with connecting plate (16), under the connecting plate (16) End face is provided with the second chute (17), and two piece of second sliding block (18), second chute (17) are provided with first chute (17) Front-rear side walls on be equipped with the second screwed hole of inside and outside connection, and the second screwed hole internal thread is connected with the second threaded rod (19), two second threaded rods (19) are located at one end in the second chute (17) side with two piece of second sliding block (18) respectively Wall is rotatablely connected, and the lower end of one of them second sliding block (18) is connected with sanding apparatus (20), another described second cunning The lower end of block (18) is connected with reference test bar (21), and the lower end of the reference test bar (21) is connected with optical inductor (22), the test The one end of bar (21) away from optical inductor (22) is connected with generating laser (23).
A kind of 2. equipment using cvd diamond is laser machined according to claim 1, it is characterised in that the rotation Bar (3), which is located on the one end of the first chute (2) outside, is connected with handle.
A kind of 3. equipment using cvd diamond is laser machined according to claim 1, it is characterised in that the polishing Device (20) is made up of rotary electric machine and polishing pad, and the upper end of the rotary electric machine is connected with the lower end of the second sliding block (18), and The drive shaft of rotary electric machine is set downwards, and the lower end of the rotary electric machine drive shaft is fixedly connected with polishing pad.
A kind of 4. equipment using cvd diamond is laser machined according to claim 1, it is characterised in that the laser The laser that transmitter (23) is launched is in same level with optical inductor (22).
A kind of 5. equipment using cvd diamond is laser machined according to claim 1, it is characterised in that the base (1) lower end is connected with roller (24).
CN201721069584.3U 2017-08-25 2017-08-25 A kind of equipment using cvd diamond is laser machined Expired - Fee Related CN207155015U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201721069584.3U CN207155015U (en) 2017-08-25 2017-08-25 A kind of equipment using cvd diamond is laser machined

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201721069584.3U CN207155015U (en) 2017-08-25 2017-08-25 A kind of equipment using cvd diamond is laser machined

Publications (1)

Publication Number Publication Date
CN207155015U true CN207155015U (en) 2018-03-30

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN201721069584.3U Expired - Fee Related CN207155015U (en) 2017-08-25 2017-08-25 A kind of equipment using cvd diamond is laser machined

Country Status (1)

Country Link
CN (1) CN207155015U (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110757016A (en) * 2019-12-03 2020-02-07 济南邦德激光股份有限公司 Laser cutting machine workstation auxiliary device
CN111360411A (en) * 2020-03-27 2020-07-03 湖州中芯半导体科技有限公司 Method for producing ultrathin CVD diamond
CN113059264A (en) * 2021-03-31 2021-07-02 深圳市鸿昇自动化设备有限公司 Laser flexible screen cutting device and cutting method
CN114346466A (en) * 2021-12-31 2022-04-15 武汉劲野科技有限公司 CVD laser processing equipment and operation method

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110757016A (en) * 2019-12-03 2020-02-07 济南邦德激光股份有限公司 Laser cutting machine workstation auxiliary device
CN110757016B (en) * 2019-12-03 2021-09-24 济南邦德激光股份有限公司 Laser cutting machine workstation auxiliary device
CN111360411A (en) * 2020-03-27 2020-07-03 湖州中芯半导体科技有限公司 Method for producing ultrathin CVD diamond
CN113059264A (en) * 2021-03-31 2021-07-02 深圳市鸿昇自动化设备有限公司 Laser flexible screen cutting device and cutting method
CN114346466A (en) * 2021-12-31 2022-04-15 武汉劲野科技有限公司 CVD laser processing equipment and operation method
CN114346466B (en) * 2021-12-31 2023-10-20 武汉劲野科技有限公司 Laser processing equipment for CVD and operation method

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GR01 Patent grant
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20180330

Termination date: 20210825