WO2023108546A1 - Groupe de motifs partiels prédéfinis, procédés de décomposition d'un motif de réseau de micro-del objectif et procédés de détection de défaut de pixel - Google Patents

Groupe de motifs partiels prédéfinis, procédés de décomposition d'un motif de réseau de micro-del objectif et procédés de détection de défaut de pixel Download PDF

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Publication number
WO2023108546A1
WO2023108546A1 PCT/CN2021/138834 CN2021138834W WO2023108546A1 WO 2023108546 A1 WO2023108546 A1 WO 2023108546A1 CN 2021138834 W CN2021138834 W CN 2021138834W WO 2023108546 A1 WO2023108546 A1 WO 2023108546A1
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WIPO (PCT)
Prior art keywords
pattern
pixel
preset part
decomposing
switched
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PCT/CN2021/138834
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English (en)
Inventor
Chenchao XU
Yang Yue
Qiming Li
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Jade Bird Display (Shanghai) Company
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Priority to PCT/CN2021/138834 priority Critical patent/WO2023108546A1/fr
Publication of WO2023108546A1 publication Critical patent/WO2023108546A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
    • G01M11/0278—Detecting defects of the object to be tested, e.g. scratches or dust
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G01M11/0207—Details of measuring devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
    • G01M11/0257—Testing optical properties by measuring geometrical properties or aberrations by analyzing the image formed by the object to be tested
    • G01M11/0264—Testing optical properties by measuring geometrical properties or aberrations by analyzing the image formed by the object to be tested by using targets or reference patterns

Definitions

  • the present disclosure generally relates to a micro light emitting diode (LED) technology field and, more particularly, to a preset part-patterns group, a method of decomposing an objective micro LED array pattern to form the preset part-patterns group, and a method for detecting pixel defect of a micro LED array panel by using the preset part-patterns group.
  • LED light emitting diode
  • micro LEDs with extra smaller area and higher resolution are increasingly popular in the world.
  • a micro LED array panel including a plurality of micro LEDs can be used to form various kinds of devices, such as camera module, projection modules, display modules, VR/AR optical modules etc.
  • the pattern defects of the micro LED array panel cannot be clearly displayed in the patterns via the conventional method. Due to the crosstalk between the adjacent LEDs, the actual image of all of the switched-on pixels cannot show the pixel defect clearly.
  • the present disclosure provides a method of decomposing an objective pixel array pattern for detecting pixel defect of a micro LED array panel to form a multiple preset part-pattern group, so as to improve the pixel detecting accuracy of the micro LED array panel.
  • the method of decomposing the objective pixel array pattern for detecting pixel defect in a micro LED array panel comprises:
  • N pieces of preset part-patterns wherein, pixels in each preset part-pattern are separated from each other by at least one pixel in a row direction and/or in a column direction; and, the N pieces of preset part-patterns are overlapped for forming the objective pixel array pattern; wherein, N is a positive integer.
  • the constructing N pieces of preset part-patterns comprises:
  • step 101 determining a decomposing matrix; the decomposing matrix including N pixels;
  • step 102 determining a first pixel that needs to be switched on in the decomposing matrix to form a first decomposing matrix, and repeating the first decomposing matrix along the row direction and the column direction to form a first preset part-pattern;
  • step 103 determining a second pixel that needs to be switched on in the decomposing matrix to form a second decomposing matrix, and repeating the second decomposing matrix along the row direction and the column direction to form a second preset part-pattern;
  • step 104 repeating steps 102 and 103until every pixel in the decomposing matrix is determined to be switched on, thereby acquiring the N pieces of preset part-pattern which are overlapped to form the objective pixel array patterns; wherein, N is an integer more than 4.
  • the decomposing matrix at least comprises two or more rows and two or more columns.
  • the pixels that need to be switched on in a preset part-pattern are separated from each other along the row direction by at least one pixel and along the column direction by at least one pixel.
  • the pixel that needs to be switched on in the decomposing matrix is determined one by one in a certain sequence.
  • the pixel that needs to be switched on in the decomposing matrix are determined one by one in a sequence from left to right and from up to down.
  • the positions of the pixels that need to be switched on are different in different preset part-patterns.
  • the number of columns in the objective pixel array pattern is not an integral multiple of the number of columns in the decomposing matrix, the last decomposing matrix along the row direction is incomplete.
  • a method for detecting pixel defect in a micro LED array panel comprising:
  • the multiple exposure processes comprises:
  • the image collecting step further comprises: overlapping all of the part-pattern images together to form a whole micro LED array image.
  • a multiple preset part-pattern group for multi-exposure process includes multiple preset part-patterns. Pixels that need to be switched on in each of the multiple preset part-pattern are separated from each other by at least one pixel in a row direction and/or in a column direction; and, the multiple preset part-patterns are overlapped for forming an objective pixel array pattern.
  • each one of the multiple preset part-patterns comprises a decomposing matrix.
  • the matrix includes N pixels.
  • the multiple preset part-pattern group comprise:
  • the decomposing matrix at least comprises two or more rows and two or more columns.
  • the pixels that need to be switched on in the Nth preset part-pattern are separated from each other along the row direction by at least one pixel and along the column direction by at least one pixel.
  • the pixels that need to be switched on in the decomposing matrix are formed one by one in a certain sequence.
  • the pixels that need to be switched on in the decomposing matrix are formed one by one in a sequence from left to right and from up to down.
  • the pixels that need to be switched on in the same decomposing matrix among every preset part-patterns are at different pixel positions.
  • the number of columns in the objective pixel array pattern is not an integral multiple of the number of columns in the decomposing matrix, and the last decomposing matrix along the row direction does not include the entire decomposing matrix.
  • FIG. 1 is a flowchart of the method of detecting pixel defect in a micro LED array panel according to an embodiment of the present disclosure
  • FIG. 2 is a flowchart of the step 1 of FIG. 1;
  • FIG. 3 is a schematic diagram illustrating the multiple part-patterns of the micro LED array according to an embodiment of the present disclosure
  • FIG. 4 is a flowchart of the step 1 of FIG. 2;
  • FIG. 5 is a schematic diagram illustrating the multiple part-patterns of the micro LED array according to another embodiment of the present disclosure.
  • a method of decomposing objective pixel array pattern for detecting pixel defect in a micro LED array panel is provided by the present disclosure.
  • the micro LED array panel can be applied in the display field, the projector field, the scanning filed etc.
  • the micro LED herein can be in-organic LED or organic LED.
  • the dimension of the micro LED panel is about 5mm ⁇ 5mm.
  • the micro LED array panel comprises a micro LED array and an IC back plane formed on the back of the micro LED array. It is noted that, the “back” herein is opposite to the light emitting direction.
  • the micro LED array can be any matrix, such as, 1600 ⁇ 1200, 680 ⁇ 480, 1920 ⁇ 1080 etc.
  • the objective pixel array pattern is the pattern of the whole micro LED array in the micro LED array panel.
  • Multiple preset part-patterns can be obtained by dividing the objective pixel array pattern into N pieces, that is to say, the part-pattern is formed by the pixels that need to be switched on. The multiple part-patterns are used to decide which pixels need to be switched on in a following sequential imaging collecting step.
  • a method of detecting pixel defect in a micro LED array panel comprises:
  • step 1 a pattern decomposing step
  • step 2 an image collecting step with multiple exposure processes.
  • the pattern decomposing step of step 1 can be illustrated by a method of decomposing an objective pixel array pattern for detecting pixel defect in a micro LED array panel, which comprises the following steps:
  • N pieces of preset part-patterns wherein, pixels in each preset pattern are separated from each other by at least one pixel in a row direction and/or in a column direction; and, the N pieces of preset part-patterns are overlapped for forming the objective pixel array pattern;
  • N is a positive integer.
  • the pixels of the micro LED array panel are switched on according to each one of the preset part-patterns. Because the pixels in each preset pattern are separated from each other by at least one pixel in the row direction and/or in the column direction, the switched on pixels in the micro LED array panel are not adjacent to each other in the row direction or in the column direction. As a result, cross talk between the adjacent LEDs (i.e., adjacent pixels) is inhibited.
  • step 1 comprises:
  • step 101 determining a decomposing matrix
  • the decomposing matrix includes N pixels.
  • the decomposing matrix is the smallest forming unit of a preset part pattern. That is, a preset part pattern is formed by repeating the decomposing matrix along the row direction and the column direction.
  • the arrow directions represent the repeated directions of the decomposing matrix and the big boxes represent every preset part-pattern; the black rectangles surrounded by dashed lines represent the decomposing matrix; the white smaller box in each decomposing matrix represents the pixel that need to be switched on, and the dark smaller box in each decomposing matrix presents the pixel that do not need to be switched on, which are shown for best understanding of the present disclosure.
  • the decomposing matrix is repeated from left to right, from upper row to lower row.
  • the decomposing matrix at least comprises two or more rows and two or more columns, such as, 2 h2 array with 4 pixels.
  • the pixels that need to be switched on are separated from each other by at least one pixel along the row direction and by at least one pixel along the column direction.
  • FIG. 3 which illustrates four pieces of preset part-patterns from left to right as a first preset part-pattern, a second preset part-pattern, a third preset part-pattern, and a fourth preset part-pattern; in each of the four preset part-patterns, the pixels that need to be switched on are separated from each other by one pixel along the row direction and by at one pixel along the column direction.
  • step 102 determining a first pixel that needs to be switched on in the decomposing matrix to form a first decomposing matrix, and repeating the first decomposing matrix along the row direction and the column direction to form the first preset part-pattern;
  • step 103 determining a second pixel that needs to be switched on in the decomposing matrix to form a second decomposing matrix, and repeating the second decomposing matrix along the row direction and the column direction so as to form the second preset part-pattern;
  • step 104 repeating steps 102 and 103 until every pixel in the decomposing matrix is determined to be switched on, thereby acquiring N pieces of the preset part-pattern which can be overlapped to form the objective pixel array pattern; wherein, N is an integer and not less than 2;
  • the pixel that needs to be switched on in the decomposing matrix are determined one by one in a certain sequence. In some embodiments, the pixel that needs to be switched on in the decomposing matrix are determined one by one in a sequence that from left to right and from up row to lower row.
  • every 2 h2 decomposing matrix comprises four pixels as follows: a first pixel, a second pixel, a third pixel and a fourth pixel in an order from left to right and from up to down.
  • the first pixel is at the first position of the first row from left to right;
  • the second pixel is at the second position of the first row from left to right;
  • the third pixel is at the first position of the second row from left to right;
  • the fourth pixel is at the second position of the second row from left to right.
  • the first pixel in the first2 h 2 decomposing matrix needs to be switched on, and the first decomposing matrix is repeated from left to right and from up to down, to form the first preset part-pattern.
  • the second pixel in the second 2 h2 decomposing matrix needs to be switched on, and the second decomposing matrix is repeated from left to right and from up to down, to form the second part-pattern.
  • the third pixel in the third 2 h2 decomposing matrix needs to be switched on, and the third decomposing matrix is repeated from left to right and from up to down, to form the third preset part-pattern.
  • the fourth pixel in the fourth2h2 decomposing matrix needs to be switched on, and the fourth decomposing matrix is repeated from left to right and from up to down, to form the fourth preset part-pattern.
  • the pixels that need to be switched on among every preset part-pattern are at different pixel positions in the decomposing matrix.
  • the pixel that needs to be switched on in the first preset part-pattern is the first pixel in the first 2 h2 decomposing matrix
  • the pixel that needs to be switched on in the second preset part-pattern is the second pixel in the second 2 h2 decomposing matrix; the positions of the first pixel and the second pixel are not the same in the2 h2 decomposing matrix.
  • the pixel that needs to be switched on in the third preset part-pattern is the third pixel
  • the pixel that needs to be switched on in the fourth preset part-pattern is the fourth pixel
  • the positions of the third pixel and the fourth pixel are not the same in the 2 h2 decomposing matrix. Therefore, the positions of the pixel that needs to be switched on in different preset part-patterns are different.
  • the last decomposing matrix along the row direction may be incomplete, and may not include the pixel that needs to be switched on.
  • the left dashed rectangle in each preset part-pattern represents the last decomposing matrix in the row direction; in the first preset part-pattern, the last decomposing matrix in the first row direction cannot include 2 h2 array, but only 2 h 1 array; and, the second pixel and the fourth pixel are not comprised in the last decomposing matrix.
  • the first pixel and the third pixel are repeated into the last decomposing matrix in the row direction, while the second pixel and the fourth pixel are not repeated into the last decomposing matrix in the row direction.
  • the last decomposing matrix along the column direction may be incomplete. For example, referring to FIG.
  • the arrow direction represent the repeated direction of the decomposing matrix
  • the dashed rectangle represents the decomposing matrix
  • the last dotted rectangle represents the last decomposing matrix at the column direction
  • the bottom decomposing matrix at the first column direction cannot includes 3 h 3 array but only 2 h 3 array
  • the seventh pixel, the eighth pixel and the ninth pixel are not comprised in the last decomposing matrix.
  • the first through sixth pixels are repeated into the last decomposing matrix in the column direction, while the seventh pixel, the eighth pixel and the ninth pixel are not repeatedinto the last decomposing matrix in the column direction.
  • the image collecting step with multiple exposure processes in step 2 further comprises the following steps:
  • step 201 switching on the pixels in the micro LED array panel according to a first preset part-pattern to form a first part-pattern of the micro LED array;
  • the pixels are switched on under the control of a control system such as an IC system according to the first preset part-pattern. It is noted that, the pixels can be switched on in a dark room or in any environment.
  • step 202 acquiring a first part-pattern image by imaging the micro LED array with the switched on pixels;
  • the micro LED array in which the pixels are switched on according to the first preset part-pattern is imaged by an optical module (e.g., a charge-coupled device (CCD) camera) to form a first part-pattern image.
  • an optical module e.g., a charge-coupled device (CCD) camera
  • CCD charge-coupled device
  • the optical module is imaging, there are some pixels with pixel defect in a non-working state, and these pixels cannot emit image light.
  • the brightness of a pixel with pixel defect is different from a theoretical brightness of a pixel without defect.
  • a binary pattern with a relatively single brightness is used to form the whole preset micro LED pattern, based on which the first present part-pattern image is formed.
  • the pixels in the binary pattern has only two kinds of brightness, and the brightness difference after imaging is more obvious, which is advantageous in detecting pixel defect according to pixel brightness.
  • the first part-pattern image may be a binary image.
  • the pixels in the binary image have only two kinds of brightness, e.g., black or white.
  • the first part-pattern image may be a grayscale image.
  • a grayscale camera can be directly used to collect the image obtained by switching on the pixels in the micro LED array according to the first present part-pattern, and then the grayscale image can be obtained; or after a color camera is used for shooting, the obtained image is subjected to graying, which is not limited in this embodiment.
  • the grayscale image includes black, white and multiple different gray levels between black and white.
  • the gray level can express the brightness of the first part-pattern image, for example, white means the brightest and black means the darkest. Therefore, based on the brightness of the pixels shown in the grayscale first part-pattern image, it can be determined which pixel in the micro LED array does not emit image light. It should be understood that the use of “first” to define the first part-pattern is only for the convenience of description and does not constitute any limitation to the present disclosure.
  • step 203 repeating the steps 201 and 202 to obtain the second part-pattern image; and so forth, to form N pieces of the part-pattern images;
  • N is four in this embodiment.
  • the method of detecting pixel defect further comprises step 205: overlapping all of the part-pattern images together to form a whole micro LED array image.
  • step 205 can comprise: acquiring a whole micro LED array image data by combining all of the part-pattern image data. For example, data of a pixel in the whole micro LED array image data is obtained by combining data of corresponding pixels of all of the part-pattern image data. Taken FIG.
  • a grayscale value of the left-most pixel in the top-most row of the whole micro LED array image data is obtained by summing a first grayscale value of the left-most pixel in the top-most row of the first part-pattern image data, a second grayscale value of the left-most pixel in the top-most row of the second part-pattern image data, and a third grayscale value of the left-most pixel in the top-most row of the third part-pattern image data.
  • the N can be any integer number more than 1.
  • the decomposing matrix is 3 h 3 array with 9 pixels.
  • nine pieces of preset part-patterns from left to right and up to down are shown as a first preset part-pattern, a second preset part-pattern, a third preset part-pattern, ... and a ninth preset part-pattern; in each of the nine part-patterns, the pixels that need to be switched on are separated from each other by two pixels along the row direction and by two pixels along the column direction.
  • the nine pieces of part-patterns can be overlapped to form the objective pixel array pattern.
  • the pixel that needs to be switched on in the 3 h 3 decomposing matrix are determined one by one in a certain sequence.
  • the pixel that needs to be switched on in the decomposing matrix are determined one by one in a sequence that from left to right and from up row to lower row.
  • every 3 h 3 decomposing matrix comprises nine pixels as follows: a first pixel, a second pixel, a third pixel, a fourth pixel, «, and a ninth pixel in order from left to right and from up to down.
  • the first pixel is at the first position of the first row from left to right
  • the second pixel is at the second position of the first row from left to right
  • the third pixel is at the third position of the first row from left to right
  • the fourth pixel is at the first position of the second row from left to right
  • the fifth pixel is at the second position of the second row from left to right
  • the sixth pixel is at the third position of the second row from left to right
  • the seventh pixel is at the first position of the third row from left to right
  • the eighth pixel is at the second position of the third row from left to right
  • the ninth pixel is at the third position of the third row from left to right.
  • the first pixel at the first row in every 3 h 3 decomposing matrix needs to be switched on; thus, the first pixel of every decomposing matrix are repeated from left to right and from up to down, to form the first preset part-pattern.
  • the second pixel at the first row in every 3 h 3 decomposing matrix needs to be switched on; thus, the second pixel of every decomposing matrix are repeated from left to right and from up to down, to form the second preset part-pattern.
  • the third pixel at the first row in every 3 h 3 decomposing matrix needs to be switched on; thus, the third pixel of every decomposing matrix are repeated from left to right and from up to down, to form the third preset part-pattern.
  • the fourth preset part-pattern the first pixel at the second row in every 3 h 3 decomposing matrix needs to be switched on; thus, the fourth pixel of every decomposing matrix are repeated from left to right and from up to down, to form the fourth preset part-pattern; and so forth, the nine preset part-patterns are formed.
  • the pixels that need to be switched on among every preset part-pattern are at different pixel positions in the decomposing matrix.
  • the pixel that needs to be repeated in the first preset part-pattern is the first pixel in the 3 h3 decomposing matrix
  • the pixel that needs to be repeated in the second preset part-pattern is the second pixel in the 3 h 3 decomposing matrix
  • the pixel that needs to be repeated in the third preset part-pattern is the third pixel in the 3 h 3 decomposing matrix
  • the first pixel, the second pixel and the third pixels are not at the same position in every 3 h 3 decomposing matrix.
  • the position of the pixel that needs to be repeated in every preset part-pattern is different from the position of the pixel that needs to be repeated in another preset part-pattern. Therefore, the positions of the pixel that needs to be repeated in different preset part-patterns are different.
  • the preset part-patterns together constitute a multiple preset part-pattern group for the multi-exposure process. Additionally, the preset part-patterns in the multi-exposure process can be exposed in any sequence.
  • the pixels of the micro LED array panel are switched on according to each one of the preset part-patterns. Because the pixels in each preset pattern are separated from each other by at least one pixel in the row direction and/or in the column direction, the switched on pixels in the micro LED array panel are not adjacent to each other in the row direction or in the column direction. As a result, cross talk between the adjacent LEDs (i.e., adjacent pixels) is inhibited.
  • a preset part-pattern group for multi-exposure process is further disclosed herein in the present disclosure.
  • Each preset part-pattern comprises a decomposing matrix that includes N pixels.
  • the preset part-pattern group comprises: a first preset pattern formed by repeating a first decomposing matrix in the row direction and in the column direction, the first decomposing matrix comprises a first pixel that needs to be switched on; a second preset part-pattern formed by repeating a second decomposing matrix in the row direction and in the column direction, the second decomposing matrix comprises a second pixel that needs to be switched on; and an Nth preset part-pattern formed by repeating an Nth decomposing matrix in the row direction and in the column direction, the Nth decomposing matrix comprises a Nth pixel that needs to be switched on; wherein, the objective pixel array pattern is formed by overlapping N pieces of preset part-patterns; wherein, N is an integer not less than 2.
  • the decomposing matrix at least comprises two or more rows and two or more columns. Furthermore, the pixels that need to be switched on in the Nth preset part-pattern are separated from each other along the row direction by at least one pixel and along the column direction by at least one pixel. In another embodiment, the pixels that need to be switched on in the decomposing matrix are formed one by one in a certain sequence. Furthermore, the pixels that need to be switched on in the decomposing matrix are formed one by one in a sequence from left to right and from up to down. The positions of the pixels that need to be switched on are different in different preset part-patterns. The number of columns in the objective pixel array pattern is not an integral multiple of the number of columns in the decomposing matrix, and the last decomposing matrix along the row direction is incomplete.

Abstract

L'invention concerne un groupe de motifs partiels prédéfinis et un procédé de formation du groupe de motifs partiels prédéfinis. Des pixels qui doivent être commutés dans chacun de multiples motifs partiels prédéfinis compris dans le groupe de motifs partiels prédéfinis sont séparés les uns des autres par au moins un pixel dans une direction de rangée et/ou dans une direction de colonne. Les multiples motifs partiels prédéfinis se chevauchent pour former un motif de réseau de pixels objectif.
PCT/CN2021/138834 2021-12-16 2021-12-16 Groupe de motifs partiels prédéfinis, procédés de décomposition d'un motif de réseau de micro-del objectif et procédés de détection de défaut de pixel WO2023108546A1 (fr)

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PCT/CN2021/138834 WO2023108546A1 (fr) 2021-12-16 2021-12-16 Groupe de motifs partiels prédéfinis, procédés de décomposition d'un motif de réseau de micro-del objectif et procédés de détection de défaut de pixel

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CN110095704A (zh) * 2019-04-17 2019-08-06 深圳市华星光电半导体显示技术有限公司 检测阵列基板中电路缺陷的装置及方法

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0611679A (ja) * 1992-06-24 1994-01-21 Minato Electron Kk 表示素子検査読取方式
JPH08247962A (ja) * 1995-03-10 1996-09-27 Sumitomo Chem Co Ltd カラーフィルタの欠陥検出方法及び欠陥検出装置並びにパネルディスプレイの欠陥検出方法及び欠陥検出装置
CN102460106A (zh) * 2009-06-18 2012-05-16 夏普株式会社 显示面板的缺陷检查方法和缺陷检查装置
JP2011095041A (ja) * 2009-10-28 2011-05-12 Shimadzu Corp Ｔｆｔアレイの検査方法及びｔｆｔアレイ検査装置
CN105051506A (zh) * 2013-04-08 2015-11-11 宜客斯股份有限公司 亮度测量方法、亮度测量装置和使用它们的画质调整技术
CN110095704A (zh) * 2019-04-17 2019-08-06 深圳市华星光电半导体显示技术有限公司 检测阵列基板中电路缺陷的装置及方法

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