WO2023071568A1

WO2023071568A1 - Electronic device, and manufacturing method for photoelectric conversion film

Info

Publication number: WO2023071568A1
Application number: PCT/CN2022/118521
Authority: WO
Inventors: 张玲; 吴英超
Original assignee: Oppo广东移动通信有限公司
Priority date: 2021-11-01
Filing date: 2022-09-13
Publication date: 2023-05-04
Also published as: CN116058819A

Abstract

The present application relates to the technical field of intelligent devices, and discloses an electronic device, and a manufacturing method for a photoelectric conversion film. In the electronic device, an accommodating space is formed in an electronic device body; an optical generator is provided in the accommodating space for emitting light towards a user body; the photoelectric conversion film is provided on the surface of the electronic device body away from the accommodating space; the photoelectric conversion film is used for receiving light reflected by the user body; the electronic device is configured to obtain vital sign information of the user body according to the optical generator and the photoelectric conversion film. In the present application, the photoelectric conversion film is used as a photoelectric sensor, and the photoelectric conversion film can be formed on the outer surface of the electronic device body, so that the accommodating space of the electronic device is not occupied; in addition, the loss during light being incident to the electronic device body is reduced, and the measurement precision of the photoelectric conversion film is improved; moreover, a light incident hole enabling light to be incident to the electronic device body is prevented from being formed in the electronic device body, so that the appearance expressive force of the electronic device is improved.

Description

Electronic device and method for producing photoelectric conversion film

【Technical field】

The application belongs to the technical field of smart devices, and relates to an electronic device and a method for making a photoelectric conversion film.

【Background technique】

PPG (Photo Plethysmo Graphy) is the light that shines on the skin and measures the amount of light scattered back by the blood flow through a photoelectric sensor. Electronic devices in the prior art, such as smart watches and wristbands, all have photoelectric sensors inside, and the electronic devices need to reserve a corresponding internal space for arranging the photoelectric sensors.

【Content of invention】

The application provides an electronic device, including:

a body, the body is formed with an accommodating space;

a light generator, arranged in the accommodating space, for emitting light to the user's body; and

A photoelectric conversion film, the photoelectric conversion film is arranged on the side of the body away from the accommodating space, the photoelectric conversion film is used to receive the light reflected by the user's body, and the electronic device is configured to The generator and the photoelectric conversion film acquire vital sign information of the user's body.

Another technical solution adopted in this application is: a method for manufacturing a photoelectric conversion film, the photoelectric conversion film is used to be arranged in the above-mentioned electronic device, and the method includes:

placing the substrate on the substrate support, the substrate support is provided with a bias voltage;

Under the coupling action of resonant magnetic field and microwave, the inert gas whirls and ionizes to form ECR plasma;

Under the control of the target power supply, the ECR plasma bombards the target to sputter carbon particles;

The carbon particles are ionized under the microwave irradiation to form a carbon plasma air mass, and transported to the substrate under the action of the resonant magnetic field and the bias voltage to form a film to form a photoelectric conversion film.

【Description of drawings】

In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings that need to be used in the description of the embodiments will be briefly introduced below. Obviously, the drawings in the following description are only some embodiments of the application. For those skilled in the art, other drawings can also be obtained based on these drawings without creative effort.

FIG. 1 is a schematic structural diagram of an electronic device in an embodiment of the present application;

Fig. 2 is a schematic diagram of a part of the structure of the electronic device shown in Fig. 1;

Fig. 3 is a schematic diagram of cooperation between the photoelectric conversion film shown in Fig. 2 and the processor;

Fig. 4 is an enlarged view of part IV shown in Fig. 2;

FIG. 5 is a schematic structural diagram of another embodiment of the electronic device shown in FIG. 1;

Fig. 6 is a front view of the electronic device shown in Fig. 1;

FIG. 7 is a schematic structural diagram of another embodiment of the electronic device shown in FIG. 6;

FIG. 8 is a schematic structural diagram of another embodiment of the electronic device shown in FIG. 1;

FIG. 9 is a schematic structural diagram of another embodiment of the electronic device shown in FIG. 1;

FIG. 10 is a schematic structural diagram of another embodiment of the electronic device shown in FIG. 1;

Fig. 11 is a schematic structural diagram of another embodiment of the electronic device shown in Fig. 1;

Fig. 12 is a schematic structural diagram of the electronic device shown in Fig. 1 in another embodiment;

13 is a schematic structural diagram of an ECR plasma sputtering device in an embodiment of the present application;

Fig. 14 is a schematic diagram of a photoelectric conversion film made by the ECR plasma sputtering device shown in Fig. 13 and a conventional photoelectric sensor;

FIG. 15 is a method for fabricating a photoelectric conversion film in an embodiment of the present application.

【Detailed ways】

The application will be described in further detail below in conjunction with the accompanying drawings and embodiments. In particular, the following examples are only used to illustrate the present application, but not to limit the scope of the present application. Likewise, the following embodiments are only some of the embodiments of the present application but not all of them, and all other embodiments obtained by persons of ordinary skill in the art without creative efforts fall within the protection scope of the present application.

Reference herein to an "embodiment" means that a particular feature, structure, or characteristic described in connection with the embodiment can be included in at least one embodiment of the present application. The occurrences of this phrase in various places in the specification are not necessarily all referring to the same embodiment, nor are separate or alternative embodiments mutually exclusive of other embodiments. It is understood explicitly and implicitly by those skilled in the art that the embodiments described herein can be combined with other embodiments.

The present application sets forth an electronic device that can optically measure a volume change of an external object. In medical applications of electronic devices, these changes in volume are typically changes in the amount of blood or air in an organ or other body part of the subject, and thus can be used to monitor vital sign information of the subject. The vital sign information of the subject includes, for example, information on a person's respiration rate, pulse rate, blood pressure, or blood oxygen saturation.

As used herein, an "electronic device" (which may also be referred to as a "terminal" or "mobile terminal" or "electronic device") includes, but is not limited to, configured to ), digital subscriber line (DSL), digital cable, direct cable connection, and/or another data connection/network) and/or via (for example, for cellular networks, wireless local area networks (WLAN), digital A TV network, a satellite network, an AM-FM broadcast transmitter, and/or a device for receiving/transmitting communication signals via a wireless interface of another communication terminal. A communication terminal arranged to communicate over a wireless interface may be referred to as a "wireless communication terminal", "wireless terminal" or "mobile terminal". Examples of mobile terminals include, but are not limited to, satellite or cellular telephones; Personal Communications Systems (PCS) terminals that may combine cellular radiotelephones with data processing, facsimile, and data communication capabilities; may include radiotelephones, pagers, Internet/Intranet access , a PDA with a web browser, organizer, calendar, and/or Global Positioning System (GPS) receiver; and a conventional laptop and/or palm-type receiver or other electronic device including a radiotelephone transceiver.

In some embodiments, the electronic device can be a mobile phone, a tablet computer, a digital camera, a wearable device (such as a head-mounted/wristband display, a head-mounted/wristband light, a smart bracelet, a smart watch, etc.) , earphones and other common electronic equipment. In some embodiments, the electronic device may be a medical device such as a photoplethysmography device, a blood oxygen detector, and the like.

In some embodiments, an electronic device includes: a body formed with an accommodation space; a light generator disposed in the accommodation space for emitting light to a user's body; and a photoelectric conversion film The photoelectric conversion film is arranged on the side of the body away from the accommodation space, the photoelectric conversion film is used to receive the light reflected by the user's body, and the electronic device is configured to obtain light according to the light generator and the photoelectric conversion film The vital sign information of the user's body.

In some embodiments, the photoelectric conversion film includes a nanocrystalline carbon film, and the nanocrystalline carbon film is disposed on the body for photoelectric conversion of the light reflected by the user's body.

In some embodiments, the photoelectric conversion film further includes: an isolation layer, stacked with the nanocrystalline carbon film, and disposed on a side of the nanocrystalline carbon film facing the body.

In some embodiments, the body is provided with a light-transmitting area at a position opposite to the light generator to transmit the light emitted by the light generator.

In some embodiments, the body is provided with a light-transmitting member in the light-transmitting area to transmit the light emitted by the light generator.

In some embodiments, the photoelectric conversion film is disposed around the light-transmitting region.

In some embodiments, the photoelectric conversion film includes:

a first photoelectric conversion film surrounding the light-transmitting region; and

The second photoelectric conversion film surrounds the first photoelectric conversion film.

In some embodiments, there are multiple light-transmitting regions, and the photoelectric conversion film surrounds each light-transmitting region and is arranged between two adjacent light-transmitting regions.

In some embodiments, there are multiple photoelectric conversion films, and the multiple photoelectric conversion films are evenly distributed around the light-transmitting region.

In some embodiments, the photoelectric conversion film includes a first photoelectric conversion film and a second photoelectric conversion film that are spaced apart from each other, and the first photoelectric conversion film is disposed around the light-transmitting region.

In some embodiments, the photoelectric conversion film includes a first photoelectric conversion film and a second photoelectric conversion film, the light-transmitting region includes a first light-transmitting region and a second light-transmitting region, and the first photoelectric conversion film and The second photoelectric conversion film is arranged opposite, the first light transmission area is opposite to the second light transmission area, and the first photoelectric conversion film and the second photoelectric conversion film are respectively located in the first light transmission area. opposite sides of the line connecting the light zone and the second light-transmitting zone.

In some embodiments, a method for manufacturing a photoelectric conversion film, the photoelectric conversion film is used to be arranged in an electronic device, the electronic device includes a body and a light generator, the body is formed with an accommodation space, and the light generator is set In the accommodating space, it is used to emit light to the user's body, the photoelectric conversion film is arranged on the side of the body away from the accommodating space, and the photoelectric conversion film is used to receive the light reflected by the user's body, The electronic device is configured to obtain the vital sign information of the user's body according to the light generator and the photoelectric conversion film, and the method includes: placing the substrate on a substrate support, and a bias voltage is set on the substrate support ; The inert gas whirls and ionizes under the coupling of the resonant magnetic field and the microwave to form an ECR plasma; under the control of the target power supply, the ECR plasma bombards the target to sputter carbon particles; the carbon particles are The carbon plasma air mass is ionized under the microwave irradiation, and transported to the substrate under the action of the resonant magnetic field and the bias voltage for film formation to form a photoelectric conversion film.

In some embodiments, the placing the base on the base support includes: setting a shielding plate on the base, the shielding plate is provided with a preset pattern; placing the base on the base support; The carbon particles are ionized under the microwave irradiation to form a carbon plasma air mass, and transported to the substrate under the action of the resonant magnetic field and the bias voltage to form a film to form a photoelectric conversion film, including: The carbon particles are ionized under the microwave irradiation to form the carbon plasma air mass, and are transported to the substrate under the action of the resonant magnetic field and the bias voltage for film formation, so as to form a The nanocrystalline carbon film corresponding to the preset pattern.

In some embodiments, the power of the microwave is 300-700W, the voltage of the target power supply is -700--300V, the bias voltage is 10-150V, and the gas pressure of the inert gas is 0.5-1mTorr , the magnetic field strength of the resonant magnetic field is 414-850 Gauss.

In some embodiments, the substrate is the body.

Please refer to FIG. 1 and FIG. 2 , FIG. 1 is a schematic structural diagram of an electronic device in an embodiment of the present application, and FIG. 2 is a schematic structural diagram of a part of the electronic device shown in FIG. 1 . The electronic device 100 may include a body 10 provided with an accommodation space 101, a photoelectric conversion film 20 disposed on the outer surface of the body 10, a light generator 30 disposed in the accommodation space 101, and electrically connected to the photoelectric conversion film 20 and the light generator 30. processor 40 .

Wherein, the main body 10 is provided with the outer surface of the photoelectric conversion film 20 so as to be attached to the body of the subject such as the user, so that the photoelectric conversion film 20 directly contacts the body of the subject such as the user. The processor 40 controls the light generator 30 to emit light to the subject such as the user's body, the light is partially reflected after being absorbed by the subject such as the user's human blood and tissue, and the photoelectric conversion film 20 can receive the reflected light after passing through the user's body , and further, changes in the respiration rate, pulse rate, blood pressure or blood oxygen saturation of the subject such as the user can be determined according to the reflected light received by the photoelectric conversion film 20 .

In this embodiment, by attaching the photoelectric conversion film 20 to the outer surface of the main body 10, compared with the traditional technical solution: placing the photoelectric conversion film 20 in the accommodation space 101 of the main body 10, it will have the following advantages:

First, reduce the propagation path of reflected light, reduce the loss in the propagation path, and improve the photoelectric conversion efficiency of the photoelectric conversion film 20, so as to obtain measurement signals such as blood oxygen and heart rate signals with a large signal-to-noise ratio.

Second, the photoelectric conversion film 20 is not provided in the accommodating space 101 , so that the redundant space in the accommodating space 101 can be saved, thereby reducing the space ratio of the accommodating space 101 in the main body 10 .

Thirdly, the photoelectric conversion film 20 is not limited by the containing space 101 , so it can be displayed by polymorphic structures of different shapes.

Please refer to FIG. 1 and FIG. 2 again, the body 10 may be in the shape of a shell, so in some embodiments, the body 10 may also be called a "shell" or a "shell assembly". Of course, in the case where the body 10 can accommodate the light generator 30 and the photoelectric conversion film 20 is disposed on the outer surface, the structure of the body 10 can also be other, without limitation.

The material of the body 10 can be one of sapphire, glass (such as strengthened glass, special glass), obsidian, ceramics, plastic, hard metal and other materials. Of course, in the case that the body 10 can accommodate the light generator 30 and the photoelectric conversion film 20 is disposed on the outer surface, the specific material of the body 10 is not limited, and can be other.

The main body 10 may be provided with other functional devices corresponding to different types of the electronic device 100 . For example, the electronic device 100 may be a smart watch or a bracelet, and the main body 10 may be provided with a dial or a display screen accordingly. For example, the electronic device 100 has the function of measuring heart rate, and an electrocardiographic device may also be provided on the main body 10 . For example, the electronic device 100 may be an earphone, and the main body 10 may be provided with a speaker module and/or a pickup accordingly. Of course, in some embodiments, the main body 10 can also be a measuring contact with only the photoelectric conversion film 20 and the light generator 30, so as to pass through the photoelectric conversion film 20 and the light generator 30 through contact with the body of the subject such as a user. 30 to obtain the vital sign information of the subject.

The accommodating space 101 inside the main body 10 may be an unsealed space or a closed space. The accommodating space 101 may also be a closed space formed by combining the main body 10 and other components in the electronic device 100 . The accommodation space 101 can be used to accommodate the light generator 30 and the processor 40 . Of course, it can also be used to accommodate other electronic devices in the electronic device 100 such as camera modules, batteries, and various types of sensors.

The main body 10 is provided with a light-transmitting area 102 at a position opposite to the light generator 30, so that the light emitted by the light generator 30 passes through the light-transmitting area 102 and shoots out of the accommodating space 101, and then can be irradiated to the subject such as the user's human body blood and tissue. Understandably, in the case that the body 10 is transparent, the light-transmitting region 102 may be a part of the body 10 . In one embodiment, the light-transmitting region 102 may be a light-transmitting hole.

The main body 10 is provided with a light-transmitting member 11 at the light-transmitting area 102, such as a light-transmitting hole, so as to block the light-transmitting area 102, such as a light-transmitting hole, to prevent the accommodating space 101 from communicating with the outside world through the light-transmitting area 102, such as a light-transmitting hole, and Make the light emitted by the light generator 30 pass through. In some embodiments, the setting of the light-transmitting member 11 can ensure that the environment in the accommodating space 101 is not disturbed, such as waterproof and dustproof.

In some embodiments, the light-transmitting member 11 can be made of transparent materials such as glass, sapphire, plastic, etc., and the material of the light-transmitting member 11 is not limited. In some embodiments, the transparent member 11 can be made of the same material as the body 10 . In some embodiments, the light-transmitting member 11 and the body 10 are integrally structured. In some embodiments, the light-transmitting member 11 may also include at least one special lens for processing light, such as a convex lens, a concave lens, a special-shaped lens, and the like.

The main body 10 is provided with installation holes such as the first installation hole 103 and the second installation hole 104, so that the circuit wiring connecting the photoelectric conversion film 20 and the processor 40 is arranged in the installation holes such as the first installation hole 103 and the second installation hole 104. .

The terms "first", "second", "third" and the like in the present application are used for descriptive purposes only, and cannot be interpreted as indicating or implying relative importance or implicitly specifying the quantity of indicated technical features. Thus, a feature defined as "first", "second", "third", etc. may expressly or implicitly include at least one of that feature.

In an embodiment, please refer to FIG. 2 and FIG. 3 together. FIG. 3 is a schematic diagram of cooperation between the photoelectric conversion film 20 shown in FIG. 2 and the processor 40 . The main body 10 installs a conductive post such as the first conductive post 12 in the installation hole such as the first installation hole 103 . The main body 10 installs a conductive post such as the second conductive post 13 in the installation hole such as the second installation hole 104 . One end of the conductive pillars such as the first conductive pillar 12 and the second conductive pillar 13 is electrically connected to the photoelectric conversion film 20 , and the other end is electrically connected to the processor 40 . Of course, in some embodiments, when the photoelectric conversion film 20 is electrically connected to the processor 40 through other forms of connection, the installation holes such as the first installation hole 103 and the second installation hole 104 can be omitted, and/or the conductive post For example, the first conductive pillar 12 and the second conductive pillar 13 can be omitted.

In some embodiments. When the processor 40 is outside the main body 10 , the main body 10 may also define other installation holes, so as to install conductive posts electrically connected to the light generator 30 and the processor 40 respectively in the installation holes.

Referring to Fig. 2, the photoelectric conversion film 20 is a nanocrystalline carbon film arranged on the outer surface of the main body 10 and used for photoelectric conversion, and can be provided on the outer surface of the main body 10 by means of coating such as sputtering coating, vacuum evaporation, etc. . Of course, other methods such as sticking, clipping, welding, bonding, etc. can also be used to arrange on the outer surface of the main body 10 , which will not be repeated here.

In one embodiment, the thickness of the photoelectric conversion film 20 such as the nanocrystalline carbon film may be 20-50000 nm. In one embodiment, the thickness of the photoelectric conversion film 20 such as the nanocrystalline carbon film may be 50-300 nm. In some embodiments, the thickness of the photoelectric conversion film 20 such as the nanocrystalline carbon film can be 30nm, 60nm, 100nm, 150nm, 200nm, 220nm, 250nm, 400nm, 700nm, 1200nm, 20000nm, 28000nm, 32000nm, 37000nm, 48000nm, etc. one of the.

Please refer to Fig. 4, Fig. 4 is an enlarged view of part IV shown in Fig. 2 . Wherein, the photoelectric conversion film 20 may include an isolation layer 2001 and a nanocrystalline carbon film 2002 sequentially disposed on the outer surface of the body 10 . Wherein, the isolation layer 2001 can be used to isolate the direct contact between the nanocrystalline carbon film 2002 and the body 10 . In some embodiments, the isolation layer 2001 can keep the nanocrystalline carbon film 2002 and the body 10 in an insulated state, preventing the body 10 from being electrically connected to the nanocrystalline carbon film 2002 under the condition of being conductive and affecting the vital sign information of the subject. Obtain. Of course, when the body 10 is insulated, the isolation layer 2001 can be omitted. In some embodiments, the isolation layer 2001 can shield the space between the nanocrystalline carbon film 2002 and the body 10, preventing the light emitted by the light generator 30 from directly passing through the body 10 and irradiating the nanocrystalline carbon film 2002. The isolation between the light generator 30 and the photoelectric conversion film 20 is improved, the problem of light crossing between the light generator 30 and the photoelectric conversion film 20 is improved, the measurement accuracy of the photoelectric conversion film 20 is improved, and user experience is improved. Of course, when the body 10 is opaque, the isolation layer 2001 can be omitted.

In some embodiments, the isolation layer 2001 can be disposed on the outer surface of the main body 10 by means of coating such as sputtering coating, vacuum evaporation and the like. Of course, other methods such as pasting, clamping, welding, bonding, etc. can also be used to arrange on the outer surface of the main body 10, which will not be described in detail.

In some embodiments, the isolation layer 2001 can be a material such as metal or plastic. Of course, when the isolation layer 2001 can play an isolation effect, the material for making the isolation layer 2001 is not limited.

In some embodiments, the nanocrystalline carbon film 2002 can be deposited on the side of the isolation layer 2001 away from the body 10 by means of coating such as sputtering coating, vacuum evaporation and the like. Of course, other methods such as pasting, clamping, welding, bonding, etc. can also be used to arrange the isolation layer 2001 on the side away from the main body 10 , which will not be repeated here.

It can be understood that the thickness of the nanocrystalline carbon film 2002 makes the side of the nanocrystalline carbon film 2002 at the light-transmitting region 102 directly receive light from the light generator 30 at the light-transmitting region 102. The influence of precision is limited, even negligible, so there is no need to perform light-shielding treatment on the side of the nanocrystalline carbon film 2002 at the light-transmitting region 102 , which reduces the structural complexity of the electronic device 100 .

In order to keep the nanocrystalline carbon film 2002 from being worn out, a wear-resistant layer and/or a protective layer can also be arranged in the photoelectric conversion film 20, and the wear-resistant layer and/or protective layer are arranged on the nanocrystalline carbon film 2002 away from the isolation layer 2001. side. The specific stacked structure setting of the photoelectric conversion film 20 can be set according to actual needs, and will not be described in detail. Certainly, the wear-resistant layer and/or the protective layer may also be disposed on the nanocrystalline carbon film 2002 by means of coating such as sputtering coating, vacuum evaporation and the like. Of course, other methods such as sticking, clipping, welding, bonding, etc. can also be used to arrange on the nanocrystalline carbon film 2002 , which will not be repeated here.

Please refer to FIG. 2 again, the processor 40 can be disposed in the receiving space 101 of the main body 10 . Of course, in some embodiments, the processor 40 can be arranged outside the main body 10, and the specific arrangement of the processor 40 can be set according to actual needs. In some embodiments, the processor 40 can communicate with the photoelectric conversion film 20 and/or the light generator 30 through a wired electrical connection and/or communicate wirelessly.

Please refer to FIG. 1, FIG. 2, FIG. 3 and FIG. 4 again. The electronic device 100 arranges the photoelectric conversion film 20 on the outer surface of the main body 10, so that the accommodating space 101 inside the main body 10 can be partially vacant. The vacant space needs to be removed to make the body 10 smaller, and some electronic devices with other functions such as camera modules, batteries, and various types of sensors can also be installed in the vacant space.

Please refer to FIG. 5 , which is a schematic structural diagram of another embodiment of the electronic device 100 shown in FIG. 1 . Wherein, the electronic device 100 may further include a fixing part 50 fixedly connected with the main body 10 . The main body 10 can be fixed on the subject such as a user's body through the fixing part 50 . In some embodiments, the fixing portion 50 can be a tie, a watch strap, an elastic band, an adhesive tape, or the like. Of course, the fixing part 50 may also have other structures, which will not be described in detail.

Please refer to FIG. 6 , which is a front view of the electronic device 100 shown in FIG. 1 . The photoelectric conversion film 20 is disposed around the light-transmitting area 102 to better receive the light emitted by the light generator 30 through the light-transmitting area 102 and reflected by the sample such as human blood and tissue of the user. Of course, the photoelectric conversion film 20 may also be disposed on one side of the light-transmitting region 102 .

In one embodiment, the photoelectric conversion film 20 can surround the light-transmitting region 102 .

The number of photoelectric conversion films 20 may be plural. A plurality of photoelectric conversion films 20 may be disposed around the light-transmitting region 102 . Please refer to FIG. 7 , which is a schematic structural diagram of another embodiment of the electronic device 100 shown in FIG. 6 . In some embodiments, there may be three photoelectric conversion films 20 , such as a first photoelectric conversion film 21 , a second photoelectric conversion film 22 and a third photoelectric conversion film 23 . The first photoelectric conversion film 21 surrounds the light-transmitting region 102 . The second photoelectric conversion film 22 surrounds the first photoelectric conversion film 21 and is spaced apart from the first photoelectric conversion film 21 . The third photoelectric conversion film 23 surrounds the second photoelectric conversion film 22 and is spaced apart from the second photoelectric conversion film 22 . Different distances between the first photoelectric conversion film 21, the second photoelectric conversion film 22 and the third photoelectric conversion film 23 and the light-transmitting area 102 can be used to obtain different vital sign information of the subject, and then according to different subjects The vital sign information of the body is processed, and the signal-to-noise ratio of the measurement signal is improved, thereby improving the measurement accuracy of the photoelectric conversion film 20 . In an embodiment, other photoelectric conversion films such as a fourth photoelectric conversion film, a fifth photoelectric conversion film, and the like may also be included.

In some embodiments, at most two of the first photoelectric conversion film 21 , the second photoelectric conversion film 22 and the third photoelectric conversion film 23 may be omitted.

The number of light-transmitting regions 102 may be multiple. It can be understood that the number of light generators 30 corresponds to the number of light-transmitting regions 102 one-to-one. In the one-to-one correspondence between the light-transmitting regions 102 and light generators 30 , the light generators 30 can pass through the light-transmitting regions 102 to the outside of the main body 10 emit light. Of course, in some embodiments, the number of light generators 30 may be less than the number of light-transmitting regions 102 .

Please refer to FIG. 8 , which is a schematic structural diagram of another embodiment of the electronic device 100 shown in FIG. 1 . The number of light-transmitting regions 102 may be five, such as a first light-transmitting region 1021 , a second light-transmitting region 1022 , a third light-transmitting region 1023 , a fourth light-transmitting region 1024 and a fifth light-transmitting region 1025 . Wherein, the photoelectric conversion film 20 surrounds each light-transmitting region 102 such as the first light-transmitting region 1021, the second light-transmitting region 1022, the third light-transmitting region 1023, the fourth light-transmitting region 1024 and the fifth light-transmitting region 1025. surrounding, and arranged in two adjacent photoelectric conversion films 20 surrounding each light-transmitting region 102 such as the first light-transmitting region 1021, the second light-transmitting region 1022, the third light-transmitting region 1023, the fourth light-transmitting region 1024 and Between the fifth light-transmitting regions 1025 . Through the arrangement of multiple light-transmitting regions 102 , the photoelectric conversion film 20 can obtain relatively accurate vital sign information of the subject, improve the signal-to-noise ratio of the measurement signal, and further improve the measurement accuracy of the photoelectric conversion film 20 . In an embodiment, other light-transmitting regions 102 such as the sixth light-transmitting region and the seventh light-transmitting region may also be included.

In some embodiments, the first light transmission region 1021 , the second light transmission region 1022 , the third light transmission region 1023 , the fourth light transmission region 1024 and the fifth light transmission region 1025 are arranged in a matrix.

In some embodiments, the first light transmission area 1021 , the second light transmission area 1022 , the third light transmission area 1023 , the fourth light transmission area 1024 and the fifth light transmission area 1025 are distributed in a circle.

In some embodiments, the second light transmission area 1022 , the third light transmission area 1023 , the fourth light transmission area 1024 and the fifth light transmission area 1025 are circumferentially distributed around the first light transmission area 1021 .

In some embodiments, at most 4 or at most 3 of the first light-transmitting region 1021 , the second light-transmitting region 1022 , the third light-transmitting region 1023 , the fourth light-transmitting region 1024 and the fifth light-transmitting region 1025 may be omitted.

Please refer to FIG. 9 . FIG. 9 is a schematic structural diagram of another embodiment of the electronic device 100 shown in FIG. 1 . The number of photoelectric conversion films 20 may be four, for example, a first photoelectric conversion film 21 , a second photoelectric conversion film 22 , a third photoelectric conversion film 23 and a fourth photoelectric conversion film 24 . The first photoelectric conversion film 21 , the second photoelectric conversion film 22 , the third photoelectric conversion film 23 and the fourth photoelectric conversion film 24 are spaced apart from each other and are arranged around the light-transmitting region 102 . Through the first photoelectric conversion film 21, the second photoelectric conversion film 22, the third photoelectric conversion film 23 and the fourth photoelectric conversion film 24, different vital sign information of the subject can be obtained respectively, and then different vital sign information of the subject can be obtained. The information is processed to improve the signal-to-noise ratio of the measurement signal, thereby improving the measurement accuracy of the photoelectric conversion film 20 . In an embodiment, other photoelectric conversion films such as a fifth photoelectric conversion film and a sixth photoelectric conversion film may also be included.

In some embodiments, the first photoelectric conversion film 21 , the second photoelectric conversion film 22 , the third photoelectric conversion film 23 and the fourth photoelectric conversion film 24 are uniformly distributed around the light-transmitting region.

Please refer to FIG. 10 , which is a schematic structural diagram of another embodiment of the electronic device 100 shown in FIG. 1 . The number of photoelectric conversion films 20 may be four, for example, a first photoelectric conversion film 21 , a second photoelectric conversion film 22 , a third photoelectric conversion film 23 and a fourth photoelectric conversion film 24 . The photoelectric conversion films 20 such as the first photoelectric conversion film 21 , the second photoelectric conversion film 22 , the third photoelectric conversion film 23 and the fourth photoelectric conversion film 24 are arranged at intervals from each other. The number of light-transmitting regions 102 may be five, such as a first light-transmitting region 1021 , a second light-transmitting region 1022 , a third light-transmitting region 1023 , a fourth light-transmitting region 1024 and a fifth light-transmitting region 1025 . The transparent regions 102 such as the first transparent region 1021 , the second transparent region 1022 , the third transparent region 1023 , the fourth transparent region 1024 and the fifth transparent region 1025 are arranged at intervals from each other. Wherein, the first photoelectric conversion film 21 is surrounded by the first light transmission area 1021, the second photoelectric conversion film 22 is surrounded by the second light transmission area 1022, and the third photoelectric conversion film 23 is surrounded by the third light transmission area. Around 1023, the fourth photoelectric conversion film 24 is arranged around the fourth light-transmitting area 1024, which can obtain different vital sign information of the subject, and then perform data processing on different vital sign information of the subject to improve the signal of the measurement signal. noise ratio, thereby improving the measurement accuracy of the photoelectric conversion film 20 .

In one embodiment, the first light transmission area 1021 , the second light transmission area 1022 , the third light transmission area 1023 and the fourth light transmission area 1024 are distributed around the fifth light transmission area 1025 . In one embodiment, the first light transmission area 1021 , the second light transmission area 1022 , the third light transmission area 1023 , and the fourth light transmission area 1024 are circumferentially distributed around the fifth light transmission area 1025 .

In some embodiments, at most 3 of the first light transmission region 1021 , the second light transmission region 1022 , the third light transmission region 1023 , the fourth light transmission region 1024 and the fifth light transmission region 1025 may be omitted. At most 3 of the first photoelectric conversion film 21 , the second photoelectric conversion film 22 , the third photoelectric conversion film 23 , and the fourth photoelectric conversion film 24 may be omitted.

Please refer to FIG. 11 . FIG. 11 is a schematic structural diagram of another embodiment of the electronic device 100 shown in FIG. 1 . The number of photoelectric conversion films 20 may be two, for example, a first photoelectric conversion film 21 and a second photoelectric conversion film 22 . The number of light-transmitting regions 102 may be two, for example, a first light-transmitting region 1021 and a second light-transmitting region 1022 . The first photoelectric conversion film 21 and the second photoelectric conversion film 22 are disposed opposite to each other. The first transparent region 1021 is opposite to the second transparent region 1022 . Furthermore, the photoelectric conversion film 20 can acquire different vital sign information of the subject, and then perform data processing on the different vital sign information of the subject, improve the signal-to-noise ratio of the measurement signal, and further improve the measurement accuracy of the photoelectric conversion film 20 .

In one embodiment, the first light-transmitting region 1021 and the second light-transmitting region 1022 are respectively located on opposite sides of the line connecting the first photoelectric conversion film 21 and the second photoelectric conversion film 22 .

In one embodiment, the first photoelectric conversion film 21 and the second photoelectric conversion film 22 are respectively located on opposite sides of the line connecting the first light transmission region 1021 and the second light transmission region 1022 .

In some embodiments, the first photoelectric conversion film 21 , the first light-transmitting region 1021 , the second photoelectric conversion film 22 , and the second light-transmitting region 1022 are arranged around a circle.

Please refer to FIG. 12 , which is a schematic structural diagram of another embodiment of the electronic device 100 shown in FIG. 1 . The electronic device 100 may be an earphone. The body 10 is adapted to be inserted into the ear canal. Wherein, the outer surface of the main body 10 provided with the photoelectric conversion film 20 can be attached to the subject such as the user's ear canal, so that the photoelectric conversion film 20 directly contacts the subject such as the user's ear canal. The processor 40 controls the light generator 30 to emit light to the subject such as the user's ear canal. The light is partially reflected after being absorbed by the subject such as the human body blood and tissue in the user's ear canal, and the photoelectric conversion film 20 can receive light passing through the user's ear canal. Then, according to the reflected light received by the photoelectric conversion film 20 , changes in the respiration rate, pulse rate, blood pressure or blood oxygen saturation of the subject such as the user can be determined.

Next, an electron cyclotron resonance (ECR) plasma sputtering device is described, and the ECR plasma sputtering device can be used to fabricate the photoelectric conversion film 20 on the body 10 in the above embodiment.

Please refer to FIG. 13 . FIG. 13 is a schematic structural diagram of an ECR plasma sputtering device in an embodiment of the present application. The ECR plasma sputtering device 200 may include a microwave generator 201 for generating microwaves, a first magnetic coil 202 for generating a resonant magnetic field, a device for providing coated carbon materials in the resonant magnetic field and grounded through a target power supply 203 The target 204, the infrared thermometer 205 used to measure the deposition temperature of the coating carbon material, the second magnetic coil 206 used to generate a resonant magnetic field together with the first magnetic coil 202 and arranged opposite to the first magnetic coil 202, used to The second magnetic coil 206 is away from the side of the first magnetic coil 202 to install the substrate 207 and the substrate support 209 grounded by the substrate power supply 208 and the deceleration field placed on the substrate support 209 and used to measure the microwave irradiation electron energy distribution on the surface of the substrate 207 Energy Analyzer (RFEA) 210 .

Wherein, the substrate 207 can be placed on the substrate support 209 . An inert gas such as argon or the like may be filled in the resonant magnetic field. In one embodiment, argon is used as the working gas. Regulate the voltage of the target power supply 203 . The bias voltage of the substrate power supply 208 is regulated. The inert gas such as argon undergoes cyclotron motion and ionization under the coupling action of the microwave and the resonant magnetic field to generate electron cyclotron resonance (ECR) plasma, and the ECR plasma bombards the target 204 to sputter carbon particles. The carbon particles are ionized under microwave irradiation to form a carbon plasma air mass, which is transported to the substrate 207 under the action of a resonant magnetic field and a bias voltage to form a film to form a nanocrystalline carbon film 211 . During this period, the electron energy distribution of the microwave irradiation on the surface of the substrate 207 can be diagnosed by the deceleration field energy analyzer 210 to adjust the power of the microwave generator 201 .

In one embodiment, the base body 207 can be the body 10 in the embodiment shown in FIG. 1 .

In one embodiment, the nanocrystalline carbon film 211 can be the photoelectric conversion film 20 in the above embodiments. It can be understood that the composition of the nanocrystalline carbon film 211 can be determined based on the function of the photoelectric conversion film 20 . For example, different target materials 204 can be used to dope the nanocrystalline carbon film 211 with a substance that improves the photosensitivity.

In one embodiment, the microwave power of the microwave generator 201 is 300-700W. In one embodiment, the microwave power of the microwave generator 201 may be one of 350W, 400W, 450W, 500W, 550W, 600W, and 650W.

In one embodiment, the voltage of the target power supply 203 is -700--300V. In one embodiment, the voltage of the target power supply 203 is one of -350V, -400V, -450V, -500V, -550V, -600V, -650V.

In one embodiment, the bias voltage of the substrate power supply 208 is 10-150V. In one embodiment, the bias voltage of the base power supply 208 can be one of 20V, 30V, 40V, 50V, 60V, 70V, 80V, 90V, 100V, 110V, 120V, 130V, 140V.

In one embodiment, the gas pressure of the inert gas such as argon is 0.5-1 mTorr. In an embodiment, the gas pressure of the inert gas such as argon may be one of 0.6 mTorr, 0.65 mTorr, 0.7 mTorr, 0.75 mTorr, 0.8 mTorr, 0.85 mTorr, 0.9 mTorr, and 0.95 mTorr.

In one embodiment, the magnetic field strength of the resonant magnetic field is 414-850 Gauss (G). In an embodiment, the magnetic field strength of the resonant magnetic field may be one of 450 Gauss, 500 Gauss, 550 Gauss, 600 Gauss, 650 Gauss, 700 Gauss, 750 Gauss, and 800 Gauss.

The ECR plasma sputtering device 200 in this application can adjust the microwave power, magnetic field strength, inert gas such as argon gas pressure, deceleration field energy analyzer by controlling the distance between the substrate 207 and the target 204 and the deposition temperature of the coated carbon material The energy and flux of the electrons diagnosed by 210 , and then adjust the density and size of the nanocrystalline carbon film 211 .

Please refer to FIG. 14 . FIG. 14 is a schematic diagram showing a comparison between the nanocrystalline carbon film 211 produced by the ECR plasma sputtering device 200 shown in FIG. 13 and a conventional photoelectric sensor. In the figure, curve A is the photoelectric conversion efficiency curve of the nanocrystalline carbon film 211 produced by the ECR plasma sputtering device 200 shown in FIG. 13 under the irradiation of different wavelengths of light. Wherein, as the wavelength increases, the photoelectric conversion efficiency of the nanocrystalline carbon film 211 can reach a maximum value, and then as the wavelength increases, the photoelectric conversion efficiency of the nanocrystalline carbon film 211 will gradually decrease. Curve B is the photoelectric conversion efficiency curve of the conventional photoelectric sensor under the irradiation of different wavelengths of light, wherein, as the wavelength increases, the photoelectric conversion efficiency of the conventional photoelectric sensor can reach the maximum value, and then as the wavelength increases, the photoelectric conversion efficiency of the conventional photoelectric sensor Conversion efficiency will decrease.

In FIG. 14 , under the irradiation of light of the same wavelength, the photoelectric conversion efficiency of the nanocrystalline carbon film 211 is significantly better than that of conventional photoelectric sensors.

Next, a method for fabricating a carbon film with a nanocrystalline structure is described, which can be used to control the ECR plasma sputtering device 200 in the above embodiment, and can also fabricate the photoelectric conversion film 20 on the body 10 in the above embodiment. Please refer to FIG. 15. FIG. 15 is a method for fabricating a nanocrystalline carbon film in an embodiment of the present application. The method may include:

Step S1501: placing the substrate on the substrate support.

Referring to FIG. 13 , the substrate 207 can be placed on a substrate holder 209 to perform sputter coating on the substrate 207 . The bias voltage of the substrate power supply 208 on the substrate support 209 can facilitate the carbon plasma air mass to form a film on the substrate 207, so the density and size of the nanocrystalline carbon film can be regulated by controlling the bias voltage.

In one embodiment, the bias voltage may be 10-150V. In one embodiment, the bias voltage can be one of 20V, 30V, 40V, 50V, 60V, 70V, 80V, 90V, 100V, 110V, 120V, 130V, 140V.

In some embodiments, in order to control the shape of the nanocrystalline carbon film, a shielding plate can be set on the substrate, and a preset pattern can be set on the shielding plate, so that a nanocrystalline carbon film corresponding to the preset pattern can be formed on the substrate . The step of arranging the shielding plate on the substrate can be performed before the substrate is placed on the substrate support, and can also be performed after the substrate is placed on the substrate support.

In one embodiment, the base body 207 can be the body 10 in FIG. 1 .

Step S1502: The inert gas is orbited and ionized under the coupling effect of the resonant magnetic field and the microwave to form an ECR plasma.

The inert gas such as argon revolves and ionizes to form ECR plasma under the coupling effect of the resonant magnetic field and the microwave. Referring to FIG. 13 , an inert gas such as argon can swirl and ionize under the coupling effect of the resonant magnetic field of the first magnetic coil 202 and the microwave of the microwave generator 201 . In one embodiment, the microwave power is 300-700W. In one embodiment, the microwave power can be one of 350W, 400W, 450W, 500W, 550W, 600W, 650W. In one embodiment, the magnetic field strength of the resonant magnetic field of the first magnetic coil 202 may be 414-850 Gauss (G). In one embodiment, the magnetic field strength of the resonant magnetic field of the first magnetic coil 202 may be one of 450 Gauss, 500 Gauss, 550 Gauss, 600 Gauss, 650 Gauss, 700 Gauss, 750 Gauss, and 800 Gauss. In one embodiment, the gas pressure of the inert gas such as argon is 0.5-1 mTorr. In an embodiment, the gas pressure of the inert gas such as argon may be one of 0.6 mTorr, 0.65 mTorr, 0.7 mTorr, 0.75 mTorr, 0.8 mTorr, 0.85 mTorr, 0.9 mTorr, and 0.95 mTorr.

Step S1503: Under the control of the target power supply, the ECR plasma bombards the target to sputter carbon particles.

The bombardment of the ECR plasma on the target can be adjusted by adjusting the power supply of the target, and then the sputtered carbon particles can be adjusted. In one embodiment, the voltage of the target power supply 203 is -700--300V. In an embodiment, the voltage of the target power supply 203 may be one of -350V, -400V, -450V, -500V, -550V, -600V, -650V.

Step S1504: The carbon particles are ionized under microwave irradiation to form carbon plasma air masses, and transported to the substrate under the action of the resonant magnetic field and the bias voltage for film formation, so as to form a nanocrystalline carbon film.

Please refer to FIG. 13 , carbon particles are ionized under the microwave irradiation of the microwave generator 201 to form carbon plasma air masses, and are transported to the substrate under the action of the resonant magnetic field and bias voltage of the second magnetic coil 206 for film formation , to form a nanocrystalline carbon film.

In one embodiment, the magnetic field strength of the resonant magnetic field of the second magnetic coil 206 may be 414-850 Gauss (G). In one embodiment, the magnetic field strength of the resonant magnetic field of the second magnetic coil 206 may be one of 450 Gauss, 500 Gauss, 550 Gauss, 600 Gauss, 650 Gauss, 700 Gauss, 750 Gauss, and 800 Gauss.

The above is only the implementation of the application, and does not limit the patent scope of the application. Any equivalent structure or equivalent process conversion made by using the specification and drawings of the application, or directly or indirectly used in other related technologies fields, are all included in the scope of patent protection of this application in the same way.

Claims

An electronic device, characterized in that it comprises:

a body, the body is formed with an accommodating space;

a light generator, arranged in the accommodating space, for emitting light to the user's body; and

A photoelectric conversion film, the photoelectric conversion film is arranged on the side of the body away from the accommodating space, the photoelectric conversion film is used to receive the light reflected by the user's body, and the electronic device is configured to The generator and the photoelectric conversion film acquire vital sign information of the user's body.
The electronic device according to claim 1, wherein the photoelectric conversion film comprises a nanocrystalline carbon film, and the nanocrystalline carbon film is arranged on the body to reflect the light reflected by the user's body. Light undergoes photoelectric conversion.
The electronic device according to claim 2, wherein the photoelectric conversion film further comprises:

The isolation layer is stacked with the nanocrystalline carbon film and is arranged on the side of the nanocrystalline carbon film facing the body.
The electronic device according to any one of claims 1-3, wherein the body is provided with a light-transmitting area at a position opposite to the light generator to transmit light emitted by the light generator.
The electronic device according to claim 4, wherein the main body is provided with a light-transmitting member in the light-transmitting area to transmit the light emitted by the light generator.
The electronic device according to claim 4, wherein the photoelectric conversion film is arranged around the light-transmitting region.
The electronic device according to claim 4, wherein the photoelectric conversion film comprises:

a first photoelectric conversion film surrounding the light-transmitting region; and

The second photoelectric conversion film surrounds the first photoelectric conversion film.
The electronic device according to claim 4, wherein there are a plurality of said light-transmitting regions, said photoelectric conversion film surrounds each of said light-transmitting regions, and is arranged between two adjacent said light-transmitting regions. between light zones.
The electronic device according to claim 4, wherein there are a plurality of photoelectric conversion films, and the plurality of photoelectric conversion films are evenly distributed around the light-transmitting region.
The electronic device according to claim 4, wherein the photoelectric conversion film comprises a first photoelectric conversion film and a second photoelectric conversion film arranged at intervals, and the first photoelectric conversion film is arranged around the light-transmitting film around the area.
The electronic device according to claim 4, wherein the photoelectric conversion film comprises a first photoelectric conversion film and a second photoelectric conversion film, and the light-transmitting region comprises a first light-transmitting region and a second light-transmitting region, The first photoelectric conversion film and the second photoelectric conversion film are arranged opposite to each other, the first light-transmitting region is arranged opposite to the second light-transmitting region, and the first photoelectric conversion film and the second photoelectric conversion film are arranged opposite to each other. The films are respectively located on opposite sides of a line connecting the first light-transmitting region and the second light-transmitting region.
A method for manufacturing a photoelectric conversion film, characterized in that the photoelectric conversion film is arranged in an electronic device, the electronic device includes a body and a light generator, the body is formed with an accommodation space, and the light generator is set in the In the accommodating space, it is used to emit light to the user's body. The photoelectric conversion film is arranged on the side of the body away from the accommodating space. The photoelectric conversion film is used to receive the light reflected by the user's body. The electronic device is configured to acquire vital sign information of the user's body according to the light generator and the photoelectric conversion film, and the method includes:

placing the substrate on the substrate support, the substrate support is provided with a bias voltage;

Under the coupling action of resonant magnetic field and microwave, the inert gas whirls and ionizes to form ECR plasma;

Under the control of the target power supply, the ECR plasma bombards the target to sputter carbon particles;

The carbon particles are ionized under the microwave irradiation to form a carbon plasma air mass, and transported to the substrate under the action of the resonant magnetic field and the bias voltage to form a film to form a photoelectric conversion film.
The method according to claim 12, wherein said placing the substrate on the substrate support comprises:

A shielding plate is provided on the base, and the shielding plate is provided with a preset pattern;

placing the substrate on the substrate support;

The carbon particles are ionized under the microwave irradiation to form a carbon plasma air mass, and transported to the substrate under the action of the resonant magnetic field and the bias voltage to form a film to form a photoelectric conversion film, including :

The carbon particles are ionized under the microwave irradiation to form the carbon plasma air mass, and are transported to the substrate under the action of the resonant magnetic field and the bias voltage for film formation, so as to form a The nanocrystalline carbon film corresponding to the preset pattern.
The method according to claim 12 or 13, wherein the microwave power is 300-700W, the target power supply voltage is -700--300V, the bias voltage is 10-150V, and the The gas pressure of the inert gas is 0.5-1 mTorr, and the magnetic field strength of the resonant magnetic field is 414-850 Gauss.
Method according to claim 12 or 13, characterized in that the substrate is the body.
The method according to claim 12, wherein the photoelectric conversion film comprises a nanocrystalline carbon film, and the nanocrystalline carbon film is arranged on the body for controlling the light reflected by the user's body. for photoelectric conversion.
The method according to claim 16, wherein the photoelectric conversion film further comprises:

The isolation layer is stacked with the nanocrystalline carbon film and is arranged on the side of the nanocrystalline carbon film facing the body.
The method according to any one of claims 12, 16-17, wherein the body is provided with a light-transmitting area at a position opposite to the light generator, so as to transmit the light emitted by the light generator .
The method according to claim 18, wherein the body is provided with a light-transmitting member in the light-transmitting area to transmit the light emitted by the light generator.
The method according to claim 18, wherein the photoelectric conversion film is arranged around the light-transmitting region.