WO2023058248A1 - Dispositif d'analyse de masse - Google Patents

Dispositif d'analyse de masse Download PDF

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Publication number
WO2023058248A1
WO2023058248A1 PCT/JP2021/037483 JP2021037483W WO2023058248A1 WO 2023058248 A1 WO2023058248 A1 WO 2023058248A1 JP 2021037483 W JP2021037483 W JP 2021037483W WO 2023058248 A1 WO2023058248 A1 WO 2023058248A1
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WO
WIPO (PCT)
Prior art keywords
cushioning material
pressing member
detector
vacuum vessel
mass spectrometer
Prior art date
Application number
PCT/JP2021/037483
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English (en)
Japanese (ja)
Inventor
祐介 坂越
Original Assignee
株式会社島津製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社島津製作所 filed Critical 株式会社島津製作所
Priority to JP2023552677A priority Critical patent/JPWO2023058248A1/ja
Priority to PCT/JP2021/037483 priority patent/WO2023058248A1/fr
Publication of WO2023058248A1 publication Critical patent/WO2023058248A1/fr

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/02Details

Definitions

  • the present invention relates to a mass spectrometer.
  • a mass spectrometer is known as an analyzer that analyzes the mass of components contained in a sample.
  • an ion source, an ion separator, and a detector are arranged in a vacuum chamber.
  • the vacuum chamber is evacuated by a vacuum pump.
  • Ions generated from a sample to be analyzed by an ion source are separated by mass by an ion separator.
  • the ions separated by the ion separator are sequentially detected by the detector with a time difference corresponding to the mass, and a detection signal indicating the detected intensity is output. Based on the detected signal, mass profile data is generated that indicates the relationship between ion mass and detected intensity.
  • a vacuum pump for evacuating the inside of the vacuum chamber is attached to the vacuum chamber.
  • a vacuum pump such as a turbomolecular pump vibrates at a frequency of about tens of thousands of times per minute. Therefore, vibrations of the vacuum pump are transmitted through the vacuum chamber to the detector or to a cable connected to the detector.
  • the S/N (signal/noise) ratio of the detection signal is lowered due to the electric noise caused by the vibration being mixed in the detection signal.
  • An object of the present invention is to provide a mass spectrometer in which the influence of vacuum pump vibration is reduced.
  • One aspect of the present invention includes a vacuum container used for mass spectrometry of a sample, a detector for detecting a sample to be analyzed, a buffer material for holding the detector, and a pressure for pressing the buffer material against the vacuum container.
  • the present invention relates to a mass spectrometer comprising a member and a crushing amount regulation mechanism that regulates the amount of crushing of the cushioning material by the pressing member.
  • the influence of vibration of the vacuum pump can be reduced.
  • FIG. 1 is a schematic diagram showing the configuration of a mass spectrometer according to one embodiment.
  • FIG. 2 is a schematic perspective view showing the configuration of the detector.
  • FIG. 3 is a partially enlarged view showing the internal structure at the downstream end of the vacuum vessel.
  • FIG. 4 is a diagram showing the configuration of the fixture.
  • FIG. 5 is a diagram for explaining a method of fixing the detector.
  • FIG. 6 is a diagram for explaining a method of fixing the detector in the first modified example.
  • FIG. 7 is a diagram for explaining a method of fixing the detector in the second modified example.
  • FIG. 1 is a schematic diagram showing the configuration of a mass spectrometer according to one embodiment.
  • the mass spectrometer 100 includes a vacuum vessel 110, a vacuum pump 120, an ion lens 130, a quadrupole mass filter 140, a detector 150, a power supply circuit 160 and a processing section 170.
  • the vacuum container 110 is made of metal, for example, and is maintained at ground potential. Also, the vacuum vessel 110 has a substantially rectangular parallelepiped shape extending in the direction in which ions fly. In the following description, a pair of side walls of the vacuum vessel 110 facing each other in the width direction are called side walls 111 and 112, respectively.
  • the vacuum pump 120 is, for example, a turbomolecular pump and is attached to the outer surface of the side wall 111 of the vacuum container 110 . Further, the direction in which ions fly in the vacuum vessel 110 is defined as downstream, and the opposite direction is defined as upstream.
  • the vacuum vessel 110 includes an ionization chamber 101 located upstream and an analysis chamber 102 located downstream.
  • a liquid chromatograph (not shown) is connected to the ionization chamber 101, and a liquid sample to be measured is supplied from the liquid chromatograph.
  • the liquid sample is sprayed while being charged by, for example, an ESI probe (electrospray ionization probe) (not shown).
  • ESI probe electrospray ionization probe
  • components in the liquid sample are ionized within the ionization chamber 101 .
  • monovalent ions of each component are produced.
  • the analysis chamber 102 is maintained in a vacuum state of, for example, a degree of vacuum (10 ⁇ 2 to 10 ⁇ 3 Pa) by a vacuum pump 120 .
  • an ion lens 130, a quadrupole mass filter 140 and a detector 150 are arranged in this order from upstream to downstream. Ions generated within the ionization chamber 101 are guided to the ion lens 130 of the analysis chamber 102 .
  • the ions guided to the ion lens 130 pass through the ion lens 130 while being converged so as to fly parallel to the axis Ax.
  • the quadrupole mass filter 140 includes four rod electrodes 141-144.
  • the rod electrodes 141 and 142 are arranged symmetrically with respect to the axis Ax, and the rod electrodes 143 and 144 are arranged symmetrically with respect to the axis Ax.
  • the rod electrodes 141 to 144 are provided at equal angular intervals at positions separated by a distance r from the axis Ax. Thereby, a cylindrical space SP surrounded by the rod electrodes 141-144 is formed.
  • the space SP extends in the direction of the axis Ax.
  • the power supply circuit 160 applies the sum voltage +(U+Vcos ⁇ t) of the DC voltage +U and the high-frequency AC voltage +Vcos ⁇ t to the rod electrodes 141 and 142 .
  • the power supply circuit 160 applies to the rod electrodes 143 and 144 the sum voltage ⁇ (U+Vcos ⁇ t) of the DC voltage ⁇ U and the high-frequency AC voltage ⁇ Vcos ⁇ t.
  • U is the value of the DC voltage
  • V is the amplitude (maximum value) of the high-frequency AC voltage
  • is the angular frequency
  • t is the time.
  • the added voltage +(U+Vcos ⁇ t) and the added voltage ⁇ (U+Vcos ⁇ t) have phases shifted from each other by 180°.
  • the ions that have passed through the ion lens 130 are guided to the space SP and oscillate within the space SP according to Mathieu's equation due to the quadrupole electric field within the space SP. If the ions in the space SP oscillate unstably, the ions in the space SP cannot pass through the space SP of the quadrupole mass filter 140 . Ions having a specific mass-to-charge ratio can oscillate stably within the space SP and pass through the space SP.
  • the detector 150 is, for example, an electron multiplier.
  • the detector 150 detects ions that have passed through the space SP of the quadrupole mass filter 140 and outputs a detection signal indicating the detected intensity.
  • a ground electrode in the detector 150 is connected to the vacuum vessel 110 maintained at the ground potential by a single connection line.
  • the processing unit 170 includes, for example, a CPU (Central Processing Unit), and processes the detection signal output from the detector 150 to create a mass spectrum showing the relationship between the mass-to-charge ratio of ions and the detected intensity.
  • CPU Central Processing Unit
  • FIG. 2 is a schematic perspective view showing the configuration of detector 150.
  • detector 150 includes base 151 for securing to vacuum vessel 110 .
  • the base 151 has a flat plate shape and is arranged in a vertical posture.
  • Two cutouts 152 having a substantially semicircular shape are formed at a predetermined interval in the upper end of the base 151 .
  • Two cutouts 152 having a substantially semicircular shape are formed at a predetermined interval in the lower end of the base 151 .
  • FIG. 3 is a partially enlarged view showing the internal structure at the downstream end of the vacuum vessel 110.
  • the detector 150 is arranged at the downstream end of the vacuum vessel 110 (analysis chamber 102) such that the base 151 is along the axis Ax.
  • the detector 150 is fixed to the vacuum vessel 110 by attaching the base 151 to the vacuum vessel 110 .
  • the detector 150 is fixed to the vacuum vessel 110 via a fixture 10 that is part of the vacuum vessel 110 .
  • FIG. 4 is a diagram showing the configuration of the fixture 10.
  • the fixture 10 has a flat base 11 extending vertically. At each of the upper end and the lower end of the base 11, a substantially horizontally bent bent portion 12 is provided. Two attachment pieces 13 protruding downward are provided at the ends of the upper bent portion 12 at a predetermined interval. Two mounting pieces 13 protruding upward are provided at predetermined intervals at the ends of the bent portion 12 on the lower side. A threaded hole 14 is formed in each mounting piece 13 .
  • the four screw holes 14 correspond to four notches 152 (FIG. 2) formed in the base 151 of the detector 150, respectively.
  • the base 11 is attached to the vacuum container 110 with a plurality of (four in the example of FIG. 4) screws 15 .
  • the fixture 10 is fixed to the vacuum vessel 110 .
  • the detector 150 is fixed to the vacuum vessel 110 by attaching the detector 150 to the fixture 10 .
  • detector 150 is fixed to the inner surface of side wall 112 opposite side wall 111 of vacuum vessel 110 to which vacuum pump 120 (FIG. 1) is attached.
  • FIG. 5 is a diagram for explaining the fixing method of the detector 150.
  • the detector 150 is attached to the fixture 10 using the cushioning material 20 , the spacer 30 and the pressing member 40 corresponding to each screw hole 14 of the fixture 10 . That is, in this example, the detector 150 is attached to the fixture 10 by four cushioning materials 20 , four spacers 30 and four pressing members 40 .
  • the cushioning material 20 is made of, for example, a rubber member.
  • the cushioning material 20 may be made of other material as long as it has elasticity and can withstand use in a vacuum environment.
  • the cushioning material 20 has a tubular shape.
  • Outer diameter r1 of cushioning material 20 is larger than radius r2 of notch 152 of detector 150 .
  • a groove portion 21 is formed in a substantially central portion in the axial direction of the outer peripheral surface of the cushioning material 20 .
  • the outer diameter of cushioning material 20 in groove 21 is slightly larger than the radius of notch 152 of detector 150 .
  • the spacer 30 is made of stainless steel or aluminum, for example.
  • the spacer 30 may be made of other materials as long as they are rigid and can withstand use in a vacuum environment.
  • the spacer 30 is an example of a tubular member and includes a tubular portion 31 and a flange portion 32 .
  • the cylindrical portion 31 has a cylindrical shape.
  • the outer diameter of the tubular portion 31 is slightly smaller than the inner diameter of the cushioning material 20 .
  • the length of the cylindrical portion 31 is slightly smaller than the length of the cushioning material 20 in the axial direction.
  • the flange portion 32 protrudes outward from the proximal end of the tubular portion 31 .
  • the outer diameter of the flange portion 32 is larger than the inner diameter of the cushioning material 20 .
  • the pressing member 40 is, for example, a male screw and includes a threaded portion 41 and a head portion 42 .
  • the outer diameter of threaded portion 41 is slightly smaller than the inner diameter of spacer 30 .
  • the length of the threaded portion 41 is greater than the length of the spacer 30 in the axial direction.
  • the head 42 is a substantially disk-shaped screw head and is provided at the proximal end of the threaded portion 41 .
  • the outer diameter of head 42 is greater than the inner diameter of spacer 30 .
  • the tubular portion 31 of the spacer 30 is inserted into the cushioning material 20 . Further, the threaded portion 41 of the pressing member 40 is inserted into the spacer 30 from the base end side of the spacer 30 . In this case, the tip of the threaded portion 41 of the pressing member 40 protrudes from the tip of the spacer 30 . In this state, the tip of the threaded portion 41 of the pressing member 40 is screwed into the corresponding threaded hole 14 of the fixture 10 .
  • the pressing member 40 is tightened so that the head portion 42 presses the flange portion 32 of the spacer 30 in the advancing direction of the pressing member 40 . Therefore, the cushioning material 20 is clamped in a crushed state by the attachment piece 13 and the flange portion 32 of the attachment 10 . In addition, since the tip of the cylindrical portion 31 of the spacer 30 abuts against the attachment piece 13, the crushing amount of the cushioning material 20 is regulated to a constant value. Thus, the spacer 30 functions as a crushing amount regulation mechanism that regulates the crushing amount of the cushioning material 20 by the pressing member 40 .
  • Each pressing member 40 through which the cushioning material 20 and the spacer 30 are inserted is screwed into the corresponding screw hole 14 of the fixture 10 .
  • the two cushioning materials 20 are attached to the upper two attachment pieces 13 of the attachment 10, respectively.
  • Two cushioning materials 20 are attached to the two mounting pieces 13 on the lower side of the mounting fixture 10, respectively.
  • the upper two cutouts 152 formed in the base 151 of the detector 150 are fitted into the grooves 21 of the upper two cushioning materials 20 respectively.
  • the two lower cutouts 152 formed in the base 151 of the detector 150 are fitted into the grooves 21 of the two lower buffers 20, respectively.
  • the base portion 151 is sandwiched between the two cushioning materials 20 on the upper side and the two cushioning materials 20 on the lower side. Thereby, the detector 150 is fixed to the vacuum vessel 110 .
  • the plurality of cushioning members 20 are pressed by the plurality of pressing members 40 against the vacuum vessel 110 used for mass spectrometry of the sample.
  • a detector 150 that detects a sample to be analyzed is held by a plurality of cushioning materials 20 . Therefore, even if the vibration of the vacuum pump 120 is transmitted to the vacuum container 110 , the vibration is damped by each cushioning material 20 . This prevents large vibrations from being transmitted to the detector 150 or a cable (not shown) connected to the detector 150 .
  • the amount of crushing of the cushioning material 20 by each pressing member 40 is regulated by the corresponding spacer 30 .
  • the magnitude of the vibration transmitted to the detector 150 or the cable connected to the detector 150 is uniform regardless of the operator who installs the vacuum pump 120 .
  • the influence of vibration of the vacuum pump 120 on mass spectrometry can be reduced.
  • the pressing member 40 is screwed into the screw hole 14 of the fixture 10 of the vacuum container 110 in a state in which the tubular spacer 30 and the tubular cushioning material 20 are inserted. Therefore, the amount of crushing of the cushioning material 20 by the pressing member 40 can be regulated with a simple configuration. Moreover, since the pressing member 40 is attached to the inner surface of the side wall 112 facing the side wall 111 to which the vacuum pump 120 is attached, the vibration transmitted from the vacuum pump 120 to the detector 150 can be further reduced.
  • the detector 150 is sandwiched between two cushioning materials 20 on the upper side and two cushioning materials 20 on the lower side. Therefore, the detector 150 can be held more reliably.
  • each notch portion 152 of the base portion 151 of the detector 150 and the corresponding groove portion 21 of the cushioning material 20 are in contact with each other. In this case, the detector 150 can be held more stably.
  • the detector 150 is attached to the inner surface of the side wall 112 of the vacuum vessel 110 via the fixture 10, the degree of freedom of arrangement of the detector 150 inside the vacuum vessel 110 is improved.
  • the spacer 30 is provided as a crushing amount regulation mechanism that regulates the crushing amount of the cushioning material 20 by the pressing member 40, but the embodiment is not limited to this.
  • the spacer 30 may not be provided when another crushing amount regulating mechanism is provided.
  • FIG. 6 is a diagram for explaining the fixing method of the detector 150 in the first modified example.
  • the threaded hole 14 corresponding to each pressing member 40 is not a through hole but a bottomed hole having a bottom portion 14a. Also, the spacer 30 is not provided.
  • the head portion 42 of the pressing member 40 presses the cushioning material 20 in the advancing direction of the pressing member 40 . Therefore, the cushioning material 20 is clamped in a crushed state by the attachment piece 13 and the head 42 of the attachment 10 . Further, the tip of the threaded portion 41 of the pressing member 40 abuts against the bottom portion 14a of the screw hole 14, so that the crushing amount of the cushioning material 20 is regulated to a constant value. Therefore, the bottom portion 14a of the screw hole 14 functions as a crushing amount regulation mechanism.
  • FIG. 7 is a diagram for explaining the fixing method of the detector 150 in the second modified example.
  • the pressing member 40 is a stepped screw and includes a columnar stepped portion 43 between a threaded portion 41 and a head portion 42 . Also, the spacer 30 is not provided.
  • the outer diameter of the stepped portion 43 is larger than the outer diameter of the threaded portion 41 and slightly smaller than the inner diameter of the cushioning material 20 .
  • the length of the stepped portion 43 is slightly smaller than the length of the cushioning material 20 in the axial direction.
  • the threaded portion 41 protrudes from the tip of the stepped portion 43 .
  • the head 42 is provided at the proximal end of the stepped portion 43 .
  • the projection length of the threaded portion 41 is smaller than the length of the stepped portion 43 in the axial direction.
  • Other dimensional features of the threaded portion 41 and the stepped portion 43 are the same as those of the threaded portion 41 and the stepped portion 43 in FIG.
  • the head portion 42 of the pressing member 40 presses the cushioning material 20 in the advancing direction of the pressing member 40 . Therefore, the cushioning material 20 is clamped in a crushed state by the attachment piece 13 and the head 42 of the attachment 10 .
  • the tip of the stepped portion 43 of the pressing member 40 abuts against the mounting piece 13, the crushing amount of the cushioning material 20 is regulated to a constant value. Therefore, the stepped portion 43 of the pressing member 40 functions as a crushing amount regulating mechanism.
  • the detector 150 is fixed to the side wall of the vacuum vessel 110 via the fixture 10, but the embodiment is not limited to this. If the side wall of the vacuum vessel 110 is provided with a threaded hole similar to the threaded hole 14 of the fitting 10 , the detector 150 may be fixed directly to the side wall of the vacuum vessel 110 without the fitting 10 .
  • the detector 150 is fixed to the side wall 112 facing the side wall 111 to which the vacuum pump 120 is attached, but the embodiment is not limited to this. Detector 150 may be fixed to a side wall different from side wall 112 or may be fixed to side wall 111 to which vacuum pump 120 is attached.
  • the detector 150 is sandwiched between the upper two cushioning materials 20 and the lower two cushioning materials 20, but the embodiment is not limited to this. Detector 150 may be sandwiched between two buffers 20 .
  • the two cushioning materials 20 that guide the detector 150 may be arranged vertically or horizontally. Also, the detector 150 may be held by one cushioning material 20 .
  • the base 151 of the detector 150 is formed with the notch 152 for coming into contact with the cushioning material 20, but the embodiment is not limited to this.
  • the notch 152 may not be formed in the base 151 .
  • the cushioning material 20 is formed with the groove 21 for coming into contact with the base 151 of the detector 150, but the embodiment is not limited to this.
  • the grooves 21 may not be formed in the cushioning material 20 .
  • a mass spectrometer a vacuum vessel used for mass spectrometry of the sample; a detector for detecting a sample to be analyzed; a cushioning material holding the detector; a pressing member that presses the cushioning material against the vacuum vessel; A squeezing amount regulation mechanism may be provided for regulating the amount of squeezing of the cushioning material by the pressing member.
  • the cushioning material is pressed against the vacuum container used for mass spectrometry of the sample by the pressing member, and the detector for detecting the sample to be analyzed is held by the cushioning material. Therefore, even if vibrations from the vacuum pump are transmitted to the vacuum vessel, the vibrations are damped by the cushioning material. This prevents large vibrations from being transmitted to the detector or the cable connected to the detector.
  • the amount of squeezing of the cushioning material by the pressing member is regulated by the squeezing amount regulating mechanism, the magnitude of vibration transmitted to the detector or the cable connected to the detector varies depending on the operator who installs the vacuum pump. uniformity without As a result, the influence of vibration of the vacuum pump on mass spectrometry can be reduced.
  • the crushing amount regulation mechanism includes a tubular member,
  • the pressing member may include a screw, and may be screwed into the vacuum vessel in a state in which the cylindrical member and the cushioning material are inserted to press the cushioning material against the vacuum vessel.
  • the amount of crushing of the cushioning material by the pressing member can be regulated with a simple configuration.
  • the vacuum vessel includes a first sidewall and a second sidewall facing each other;
  • a vacuum pump for evacuating the interior of the vacuum vessel is attached to the outer surface of the first sidewall;
  • the pressing member may press the cushioning material by being attached to the inner surface of the second side wall.
  • the vibration transmitted from the vacuum pump to the detector can be made smaller.
  • the cushioning material includes a first cushioning material and a second cushioning material
  • the pressing member includes a first pressing member that presses the first cushioning material against the vacuum vessel and a second pressing member that presses the second cushioning material against the vacuum vessel
  • the crushing amount regulating mechanism includes a first crushing amount regulating mechanism that regulates an amount of crushing of the first cushioning material by the first pressing member, and a crushing amount of the second cushioning material by the second pressing member. and a second crushing amount regulation mechanism that regulates the crushing amount,
  • the detector may be sandwiched between the first cushioning material and the second cushioning material.
  • the detector can be held more reliably by the first cushioning material and the second cushioning material.
  • the first cushioning material and the second cushioning material may be arranged so as to line up in the vertical direction. In this case, the detector can be held more reliably.
  • the detector may include a base having a first notch and a second notch that contact the first cushioning material and the second cushioning material, respectively.
  • the detector can be held more stably.
  • the first cushioning material is formed with a first groove that abuts on the first notch,
  • a second groove may be formed in the second cushioning material so as to abut on the second notch.
  • the detector can be held more stably.
  • the vacuum container includes a fixture to which the pressing member is attached, The pressing member may press the cushioning material by being attached to the fixture.

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)

Abstract

L'invention concerne un dispositif d'analyse de masse comprenant : un récipient sous vide ; un détecteur ; un matériau tampon ; un élément de pression ; et un mécanisme de limitation de quantité de compression. Le récipient sous vide sert à l'analyse de masse d'un échantillon. Le détecteur, le matériau tampon, l'élément de pression et le mécanisme de limitation de quantité de compression sont logés à l'intérieur du récipient sous vide. Le détecteur détecte l'échantillon à analyser. Le matériau tampon maintient le détecteur. L'élément de pression presse le matériau tampon dans le récipient sous vide. Le mécanisme de restriction de quantité de compression limite à une certaine valeur la quantité de pression-compression du matériau tampon, lorsque le matériau tampon est pressé par l'élément de pression.
PCT/JP2021/037483 2021-10-08 2021-10-08 Dispositif d'analyse de masse WO2023058248A1 (fr)

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JP2023552677A JPWO2023058248A1 (fr) 2021-10-08 2021-10-08
PCT/JP2021/037483 WO2023058248A1 (fr) 2021-10-08 2021-10-08 Dispositif d'analyse de masse

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Application Number Priority Date Filing Date Title
PCT/JP2021/037483 WO2023058248A1 (fr) 2021-10-08 2021-10-08 Dispositif d'analyse de masse

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WO2023058248A1 true WO2023058248A1 (fr) 2023-04-13

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Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0877962A (ja) * 1994-08-31 1996-03-22 Shimadzu Corp 質量分析装置
JP2001344954A (ja) * 2000-05-31 2001-12-14 Matsushita Electric Ind Co Ltd ハードディスク記録再生装置の筐体及びハードディスク記録再生装置
JP2004022134A (ja) * 2002-06-19 2004-01-22 Shinano Kenshi Co Ltd 間隔調節ねじ及びそれを用いたディスクプレーヤにおける光ピックアップの光ディスクへのレーザ光線照射角度調節機構
JP2005124326A (ja) * 2003-10-17 2005-05-12 Shinano Kenshi Co Ltd アウターロータ型モータ
JP2012003946A (ja) * 2010-06-17 2012-01-05 Shimadzu Corp 飛行時間型質量分析装置
WO2013168220A1 (fr) * 2012-05-08 2013-11-14 株式会社島津製作所 Spectromètre de masse

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0877962A (ja) * 1994-08-31 1996-03-22 Shimadzu Corp 質量分析装置
JP2001344954A (ja) * 2000-05-31 2001-12-14 Matsushita Electric Ind Co Ltd ハードディスク記録再生装置の筐体及びハードディスク記録再生装置
JP2004022134A (ja) * 2002-06-19 2004-01-22 Shinano Kenshi Co Ltd 間隔調節ねじ及びそれを用いたディスクプレーヤにおける光ピックアップの光ディスクへのレーザ光線照射角度調節機構
JP2005124326A (ja) * 2003-10-17 2005-05-12 Shinano Kenshi Co Ltd アウターロータ型モータ
JP2012003946A (ja) * 2010-06-17 2012-01-05 Shimadzu Corp 飛行時間型質量分析装置
WO2013168220A1 (fr) * 2012-05-08 2013-11-14 株式会社島津製作所 Spectromètre de masse

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