WO2023053724A1

WO2023053724A1 - Valve with orifice, and flow rate control device

Info

Publication number: WO2023053724A1
Application number: PCT/JP2022/030246
Authority: WO
Inventors: 耕平執行; 隆廣瀬; 隆博松田; 一誠渡辺
Original assignee: 株式会社フジキン
Priority date: 2021-09-30
Filing date: 2022-08-08
Publication date: 2023-04-06
Also published as: TW202323708A; TWI828342B

Abstract

[Problem] To provide a valve with an orifice that is miniaturized while ensuring a required flow rate, that has improved maintainability and sealing performance, and that is reduced in cost. [Solution] A valve with an orifice including a diaphragm 70 for opening and closing a flow path, an orifice plate 40 in which an orifice 40h is formed, a first orifice base 20 that supports the orifice plate 40 and has a through-hole 20a, a second orifice base 30 that has a valve seat 30b provided around a through-hole 30a and that together with the first orifice base 20 holds the orifice plate 40 therebetween, and an inner member 50 having a plurality of through-holes 50d into which flows a fluid that has passed between the valve seat 30b and the diaphragm 70, the second orifice base 30 and the inner member 50 having, in contact parts that come into contact with each other, a plurality of flow paths CH1 that guide the fluid from the plurality of through-holes 50d to a secondary flow path 15.

Description

Orifice built-in valves and flow controllers

The present invention relates to an orifice built-in valve and a flow control device using this orifice built-in valve as a flow control valve.

In the semiconductor manufacturing process, especially in fine processes such as ALD (Atomic Layer Deposition) and ALE (Atomic Layer Etching), fluid control devices are required to supply accurately metered processing gases to the processing chamber in a short time. Miniaturization is required. These fluid control devices include flow control devices and orifice built-in valves (see, for example, Patent Document 1).

JP-A-2000-213667

In addition to miniaturization, the valve with built-in orifice as described above is required to improve maintenance, reduce costs, and improve sealing performance while ensuring the necessary flow rate.

One of the objects of the present invention is to provide an orifice built-in valve and a flow rate control device using this orifice built-in valve, which is compact while ensuring a necessary flow rate, has improved maintainability and sealing performance, and is reduced in cost. to do.

The orifice built-in valve of the present invention is
a body defining a primary flow path, a secondary flow path, and an accommodating recess in which a valve element is incorporated and in which the primary flow path and the secondary flow path are connected;
The valve element is
a diaphragm that communicates or blocks the primary channel and the secondary channel;
an orifice plate having an orifice formed therein;
a first orifice base that supports the orifice plate and has a through hole that communicates with the primary channel;
a through hole communicating with the through hole of the first orifice base; and a valve seat portion provided around the through hole, and sandwiching the orifice plate in cooperation with the first orifice base. a second orifice base for
a support portion that supports the diaphragm; and the valve seat portion and the diaphragm from the primary flow path through the through hole of the first orifice base, the orifice, and the through hole of the second orifice base. an inner member having a plurality of through holes into which the fluid that has passed between
When the second orifice base and the inner member are engaged with each other, a plurality of flow passages for guiding fluid from the plurality of flow passages of the inner member to the secondary flow passage are formed at the abutment portion where the inner member abuts against each other. It is formed between the second orifice base and the inner member.

Preferably, the valve element further includes a fixing ring for pressing and fixing the inner member toward the body by being screwed onto a threaded portion formed on the inner peripheral surface of the housing recess,
The first orifice base and the second orifice base receive force from the inner member and are fixed to the body. A configuration can be employed in which the gap is sealed.

Preferably, the valve further comprises an actuator for opening and closing between the diaphragm and the valve seat portion by driving a diaphragm presser that presses the diaphragm,
The diaphragm may be fixed to the inner member by being pressed toward the inner member by a casing of the actuator screwed together with the threaded portion.

More preferably, the plurality of flow paths may include flow paths defined by a plurality of grooves formed in one of the second orifice base and the inner member.

More preferably, the second orifice base includes first to third outer peripheral surfaces having different outer diameters, and a first orifice base formed between the first outer peripheral surface and the second outer peripheral surface. and a second stepped surface formed between the second outer peripheral surface and the third outer peripheral surface,
The inner member is formed between first to third inner peripheral surfaces that engage with the first to third outer peripheral surfaces, respectively, and between the first inner peripheral surface and the second inner peripheral surface. and a fourth stepped surface formed between the second inner peripheral surface and the third inner peripheral surface,
The plurality of through holes are formed outside the first inner peripheral surface of the inner member,
a gap is formed between the first stepped surface and the third stepped surface;
the second stepped surface and the fourth stepped surface abut,
A configuration can be adopted in which the plurality of grooves are formed in the second inner peripheral surface, the second stepped surface, and the third inner peripheral surface.

Preferably, the first orifice base has a relationship in which a portion of the outer peripheral surface engages with a portion of the inner peripheral surface of the second orifice base,
A convex portion is formed in the circumferential direction on the outer peripheral surface of the first orifice base,
It is possible to employ a configuration in which a concave portion into which the convex portion is fitted is formed in the inner peripheral surface of the second orifice base in the circumferential direction.

The flow control device of the present invention includes the orifice built-in valve described above.

According to the present invention, there is provided an orifice built-in valve and a flow rate control device using the same, which are miniaturized while ensuring a required flow rate, and are capable of improving maintainability, reducing cost, and improving sealing performance. .

It includes a cross-section of a main part of a flow control device according to an embodiment of the present invention. FIG. 2 is an enlarged sectional view enlarging a main part of FIG. 1; FIG. 4 is a front view of the first orifice base; FIG. 3B is a longitudinal cross-sectional view of the first orifice base of FIG. 3A; FIG. 4 is an external perspective view of a second orifice base; FIG. 4B is a longitudinal cross-sectional view of the second orifice base of FIG. 4A; FIG. 3 is an external perspective view of an orifice plate; FIG. 4 is an external perspective view of the inner member from above. FIG. 6B is an external perspective view from below of the inner member of FIG. 6A. FIG. 6B is a vertical cross-sectional view of the inner member of FIG. 6A; FIG. 4 is an external perspective view of a fixing ring; Top view of the retaining ring. It is an enlarged cross-sectional view of a main part of a flow control device according to another embodiment of the present invention. 1 shows a distribution plate of the same embodiment, (a) is a plan view, (b) is a cross-sectional view taken along line XX of (a), and (c) is a perspective view.

BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the description, the same reference numerals are given to the same elements, and overlapping descriptions are omitted as appropriate.
FIG. 1 shows a flow control device 1 according to this embodiment.
1, 10 is a body, 20 is a first orifice base, 30 is a second orifice base, 40 is an orifice plate, 50 is an inner member, 60 is a fixing ring, 70 is a diaphragm, 80 is a pressing adapter, and 90 is Actuator, 110 is a flow control valve, 120 and 130 are pressure detectors.

The body 10 is made of a metal material such as stainless steel in a block shape and defines

flow paths

11 , 12 , 13 , 14 and 15 .
The flow control valve 110 is provided between the

flow paths

11 and 12 and is capable of controlling the flow rate of fluid flowing through the

flow paths

11 and 12 . In this embodiment, the flow path 13 on the upstream side of the orifice, which will be described later, is the primary side flow path, and the flow path 15 on the downstream side of the orifice, which will be described later, is the secondary side flow path. Fluid is supplied to the flow path 11 from the outside. The flow path 14 branches off from the flow path 15 and communicates with the pressure detector 130 .
The pressure detector 120 is provided between the

flow paths

12 and 13 and detects the pressure in the

flow paths

12 and 13, which are the primary flow paths.
The pressure detector 130 detects the pressure in the

channels

14 and 15, which are secondary channels.
The flow control device 1 is a so-called pressure-type flow control device, and includes a control circuit (not shown) composed of hardware such as a processor and memory and required software. And based on the pressure P2 detected by the pressure detector 130, the flow rate of the fluid flowing through the flow path 12 is measured, and the orifice built-in valve is driven and controlled so that the measured flow rate becomes the target flow rate.

The body 10, the first orifice base 20, the second orifice base 30, the orifice plate 40, the inner member 50, the fixing ring 60, the diaphragm 70, the pressing adapter 80 and the actuator 90 are the orifice built-in valve according to one embodiment of the present invention. This orifice built-in valve is an open/close valve. Also, the first orifice base 20, the second orifice base 30, the orifice plate 40, the inner member 50, the fixing ring 60, the diaphragm 70 and the pressing adapter 80 constitute a valve element according to one embodiment of the present invention. .

Next, the orifice built-in valve according to this embodiment will be described with reference to FIGS. 2 to 7B.
As shown in FIG. 2, the body 10 is formed with a housing recess 16 which is a hole with a circular cross section that opens at the upper surface of the body 10 . The housing recess 16 is a circular hole with a constant inner diameter from the opening to the bottom surface 16t, and a recess 17 having a circular cross section is further formed in the center of the bottom surface 16t. The channel 13 as the primary channel opens at the bottom surface of the recess 17 , and the channel 15 as the secondary channel opens at the bottom surface 16 t of the housing recess 16 . The accommodation recess 16 has a constant inner diameter from the opening of the upper surface of the body 10 to the bottom surface 16t, and a threaded portion 16a is formed on the inner peripheral surface from the upper surface to the middle of the depth direction. Around the opening of the recess 17 on the bottom surface 16t of the housing recess 16, an annular seat surface 16p is formed so as to protrude from the bottom surface 16t and is in close contact with the sealing surface 30p of the second orifice base 30, which will be described later.

The first orifice base 20 is made of a metal such as a stainless alloy. As shown in FIGS. 3A and 3B, a through hole 20a serving as a flow path is formed in the center, and an outer peripheral surface 20f1 having a different outer diameter is formed on the outer periphery. , 20f2, 20f3. The through hole 20a has a larger inner diameter on the lower end side and a smaller inner diameter on the upper end side. As shown in FIG. 2 , a portion of the outer peripheral surface 20 f 3 of the first orifice base 20 is accommodated within the recess 17 and the through hole 20 a communicates with the flow path 13 . An outer peripheral surface 20f2 of the first orifice base 20 is formed with a convex portion 20t in the circumferential direction. A support surface 20 s that supports the orifice plate 40 is provided around the through hole 20 a at the upper end of the first orifice base 20 .

The second orifice base 30 is made of a fluorine-based resin such as PCTFE, and as shown in FIGS. As shown, it communicates with the through hole 20a of the first orifice base 20 through the orifice plate 40. As shown in FIG. A valve seat portion 30b is formed around the upper end side of the through hole 30a, and an annular pressing surface 30s for pressing the orifice plate 40 is formed around the lower end side of the through hole 30a.
Inside the second orifice base 30, inner peripheral surfaces 30c1, 30c2, and 30c3 having different inner diameters are formed, and a concave portion 30t is formed in the inner peripheral surface 30c2 in the circumferential direction. As shown in FIG. 2, the outer peripheral surfaces 20f1, 20f2, 20f3 of the first orifice base 20 are engaged with the inner peripheral surfaces 30c1, 30c2, 30c3 of the second orifice base 30. The convex portion 20 t of the base 20 fits into the concave portion 30 t of the second orifice base 30 .

As shown in FIG. 2, the orifice plate 40 is sandwiched between the support surface 20s of the first orifice base 20, the second orifice base 30, and the pressing surface 30s. is pressed toward the first orifice base 20 , sealing is performed between the first orifice base 20 and the second orifice base 30 and the orifice plate 40 . Further, the outer peripheral surfaces 20f1, 20f2, 20f3 of the first orifice base 20 are engaged with the inner peripheral surfaces 30c1, 30c2, 30c3 of the second orifice base 30, and the convex portion 20t of the first orifice base 20 is The fluid is less likely to leak from between the first orifice base 20 and the second orifice base 30 by fitting into the recess 30t of the second orifice base 30 .

Outside the second orifice base 30, as shown in FIGS. 4A and 4B, outer peripheral surfaces 30d1, 30d2, and 30d3 having different outer diameters are formed. , and an annular stepped surface 30f2 is formed between the outer peripheral surface 30d2 and the outer peripheral surface 30d3.
An annular sealing surface 30p is formed on the lower end face of the second orifice base 30. As shown in FIG. When the stepped surface 30f2 is pressed toward the body 10, the sealing surface 30p is brought into close contact with the seating surface 16p of the body as shown in FIG. Even if the fluid leaks between , this fluid is prevented from leaking to the outside.

The orifice plate 40 is made of metal such as a stainless alloy, and as shown in FIG. 5, a plurality (four) of orifices 40h are formed in the center.

The inner member 50 is made of a metal such as a stainless alloy, and as shown in FIGS. A step surface 50e1 is formed between them, and a step surface 50e2 is formed between the inner peripheral surface 50a2 and the inner peripheral surface 50a3. An annular seal surface 50p that contacts the body 10 is formed on the lower end surface of the inner member 50 . A support portion 50c that supports the diaphragm 70, which is an annular protrusion, is formed on the upper surface side of the annular protrusion portion 50b that defines the inner peripheral surface 50a1 of the inner member 50. As shown in FIG. Outside the inner member 50, outer peripheral surfaces 50h1 and 50h2 having different outer diameters are formed, and an annular stepped surface 50f is formed between the outer peripheral surface 50h1 and the outer peripheral surface 50h2.

The projecting portion 50b of the inner member 50 is formed with a plurality of through holes 50d, which serve as flow paths, at regular intervals in the circumferential direction. The flow path is not particularly limited to a through hole, and may be a groove-shaped flow path as long as it serves as a fluid flow path.
A plurality of semicircular grooves 50g1 extending in the direction of the central axis are formed on the inner peripheral surface 50a1 of the inner member 50 at regular intervals in the circumferential direction, and the stepped surface 50e2 is formed so as to be connected to each of the plurality of grooves 50g1. A plurality of grooves 50g2 extending in the radial direction are formed, and a plurality of semi-circular grooves 50g3 extending in the direction of the central axis line and connected to the plurality of grooves 50g2 are formed in the inner peripheral surface 50a3 at regular intervals in the circumferential direction. there is
The outer peripheral surfaces 30d1, 30d2, 30d3 of the second orifice base 30 are engaged with the inner peripheral surfaces 50a1, 50a2, 50a3 of the inner member 50, respectively. are sealed respectively.
The grooves 50g1, 50g2, and 50g3 of the inner member 50 cooperate with the outer peripheral surface 30d2, the step surface 30f2, and the outer peripheral surface 30d3 of the second orifice base 30 to form the channel CH1 shown in FIG. That is, by engaging the second orifice base 30 and the inner member 50, the outer peripheral surface 30d2, the step surface 30f2 and the outer peripheral surface 30d3 of the second orifice base 30, the inner peripheral surface 50a2 and the step surface 50e2 of the inner member 50 and the inner peripheral surface 50a3 form contact portions that contact each other. A plurality of flow paths CH1 are formed between the second orifice base 30 and the inner member 50 at this contact portion.
When the inner circumference of the inner member 50 is engaged with the outer circumference of the second orifice base 30, the stepped surface 50e2 of the inner member 50 contacts the stepped surface 30f2 of the second orifice base 30. A gap Gp shown in FIG. 2 is formed between the step surface 50e1 and the step surface 30f1 of the second orifice base 30, and the gap Gp forms a flow path.

The fixing ring 60 is made of a metal material such as stainless steel, and as shown in FIGS. 7A and 7B, has a threaded portion 60a formed on its outer peripheral surface and an inner peripheral surface 60b for engaging a rotating tool. It has a double hex structure. As shown in FIG. 2, by screwing the threaded portion 60a of the fixing ring 60 into the threaded portion 16a of the housing recess 16, the fixing ring 60 presses the stepped surface 50f of the inner member 50 toward the body 10 side. As a result, the sealing surface 50p of the inner member 50 is pressed against the bottom surface 16t of the housing recess 16, and the space between the sealing surface 50p and the bottom surface 16t is sealed. As a result, a channel CH2 is formed between the inner member 50 and the body 10 as an annular gap.
The pressing force from the fixing ring 60 acting on the inner member 50 acts as a force for the stepped surface 50e2 of the inner member 50 to press the stepped surface 30f2 of the second orifice base 30 toward the body. A seal is provided between 16p and the sealing surface 30p of the second orifice base 30 . At the same time, the pressing surface 30s of the second orifice base 30 presses the supporting surface 20s of the first orifice base 20, so that the orifice plate 40, the supporting surface 20s of the first orifice base 20, and the second orifice. A space between the base 30 and the pressing surface 30s is sealed.

The diaphragm 70 is formed by laminating metal thin plates such as special stainless steel and nickel-cobalt alloy thin plates, and by bulging the central portion upward, the upwardly convex arc shape is formed into a spherical shell shape in a natural state. . The diaphragm 70 is supported by the support portion 50c of the inner member 50 as shown in FIG. It is fixed to the inner member 50 by being pressed. The diaphragm 70 defines a part of the flow path, is elastically deformed by being pressed by the diaphragm presser 92, and when it comes into contact with the valve seat portion 30b of the second orifice base 30, the flow path is closed and the valve seat portion is closed. Moving away from 30b opens the channel.
In this embodiment, in order to prevent the diaphragm 70 from rotating together with the casing 91 , the diaphragm 70 is fixed to the inner member 50 using the metal pressing adapter 80 . It is also possible to directly fix the diaphragm 70 without using the presser adapter 80 by extending the .

The actuator 90 can be, for example, an air cylinder containing a piston inside a casing 91, but is not limited to this. The actuator 90 holds a diaphragm retainer 92 in a drive portion (not shown), and drives the diaphragm retainer 92 toward and away from the valve seat portion 30b of the second orifice base 30 .
The diaphragm retainer 92 is made of a synthetic resin such as polyimide, and has a convexly curved front end so as to come into contact with the upper surface of the central portion of the diaphragm 70 .
A threaded portion 91 a is formed on the outer peripheral surface of the casing 91 of the actuator 90 , and the threaded portion 91 a is screwed into the threaded portion 16 a formed on the inner peripheral surface of the housing recess 16 of the body 10 , whereby the casing 91 is The annular end surface of the lower end portion 91b presses the outer peripheral portion of the diaphragm 70 via the pressing adapter 80. As shown in FIG.

Here, the procedure for assembling the above-described orifice built-in valve will be described.
First, the orifice plate 40 is placed on the support surface 20s of the first orifice base 20, and in this state, the inner circumference of the second orifice base 30 is pushed into the outer circumference of the first orifice base 20 to fit them. As a result, the projections 20t of the first orifice base 20 are fitted into the recesses 30t of the second orifice base 30, and the orifice plate 40 is held between the first orifice base 20 and the second orifice base 30. A first orifice base 20 and a second orifice base 30 are connected.
Next, the outer peripheral surface 20 f 3 of the first orifice base 20 connected to the second orifice base 30 is inserted into the recess 17 .
Next, the inner periphery of the inner member 50 is fitted to the outer periphery of the second orifice base 30, and the fixing ring 60 is screwed onto the threaded portion 16a of the housing recess 16, so that the inner member 50, the first orifice base 20 and the second orifice base 20 are assembled. and an orifice base 30 are fixed to the body 10. - 特許庁
Next, the diaphragm 70 is installed on the support portion 50 c of the inner member 50 , the pressing adapter 80 is installed on the diaphragm 70 , and then the threaded portion 91 a of the casing 91 of the actuator 90 is threaded onto the threaded portion 16 a of the accommodation recess 16 of the body 10 . screw in.

In the orifice built-in valve of this embodiment, as shown in FIG. 2, the fluid flowing from the flow path 13 into the through hole 20a of the first orifice base 20 passes through the orifice 40h formed in the orifice plate 40, 2 through the through hole 30a of the orifice base 30, through the gap between the valve seat portion 30b of the second orifice base 30 and the diaphragm 70, and into the plurality of through holes 50d. The fluid that has passed through the plurality of through holes 50d flows into the annular gap Gp between the inner member 50 and the second orifice base 30, and the plurality of flow paths between the inner member 50 and the second orifice base 30 After passing through the channel CH1 and flowing into the annular channel CH2 between the inner member 50 and the bottom surface 16t of the accommodation recess 16 of the body 10, it flows out to the channel 15 communicating with the channel CH2.

In this embodiment, by adopting the structure as described above, the orifice built-in valve can be miniaturized, and by forming a plurality of flow paths CH1 between the inner member 50 and the second orifice base 30, The flow rate can also be secured.
According to this embodiment, the orifice plate 40 is fixed using the fixing ring 60 screwed onto the threaded portion 16a of the housing recess 16, and the diaphragm 70 is fixed using the casing 91 of the actuator 90 screwed onto the common threaded portion 16a. By fixing them together, the diaphragm 70 and the orifice plate 40 can be assembled separately, which makes it possible to improve sealing performance and maintenance performance.
According to this embodiment, by forming a plurality of steps on the outer and inner circumferences of the second orifice base 30 made of synthetic resin, the thickness of the second orifice base 30 can be ensured, and pressure resistance can be ensured. be able to.

FIG. 8 shows another embodiment of the present invention. This embodiment and the above-described embodiment are the same except that an annular flow plate 200 is arranged at the contact portion between the inner member 50 and the second orifice base 30, and the other configurations are the same. omitted.

The circulation plate 200 is an annular member made of metal such as stainless steel, and as shown in FIGS. . The concave groove 200a may be formed only on one side or on both sides.

By arranging the flow plate 200 between the inner member 50 and the second orifice base 30, the fixing ring 60 is excessively tightened during assembly, deforming the resin-made second orifice base 30. The fluid can flow smoothly without reducing the opening area of the flow channel CH1 of the inner member 50 .

Although the embodiments of the present invention have been described in detail above, the present invention is not limited to such specific embodiments, and various modifications and variations can be made within the scope of the gist of the present invention described in the claims. Change is possible.

1 flow control device 10

body

11, 12, 14 channel 13 channel (primary side channel)
15 flow path (secondary side flow path)
16 Housing recess

16a Screw portion

16t Bottom surface

16p Seat surface 17 Recess 20 First orifice base 20a Through holes 20f1 to 20f3 Outer peripheral surface

20t Protruding portion

20s Support surface 30 Second orifice base 30a Through hole 30b Valve seat portion 30c1 to 30c3 Inside Peripheral surface 30d1 Peripheral surface (first outer peripheral surface)
30d2, 30d3 outer peripheral surface (contact portion, second and third outer peripheral surfaces)
30f1 step surface (first step surface)
30f2 (contact portion, second step surface)
30s pressing surface 30t recessed portion 30p sealing surface 40 orifice plate 40h orifice 50 inner member 50a1 inner peripheral surface (first inner peripheral surface)
50a2, 50a3 inner peripheral surfaces (contact portion, second and third inner peripheral surfaces)

50b Projecting portion

50c Supporting portion 50d Through hole 50e1 Step surface (third step surface)
50e2 step surface (contact portion, fourth step surface)
50g1 to 50g3 Grooves 50h1, 50h2 Outer peripheral surface 50f Stepped surface 50p Sealing surface 60 Fixing ring 60a Threaded portion 60b Inner peripheral surface 70 Diaphragm 80 Presser adapter 90 Actuator 91 Casing 91a Threaded portion 91b Lower end 92 Diaphragm presser 110

Flow control valves

120, 130 Pressure detector 200 Distribution plate 200a Groove Gp Gap CH1, CH2 Channel P1, P2 Pressure

Claims

a body defining a primary flow path, a secondary flow path, and a receiving recess in which a valve element is housed and in which the primary flow path and the secondary flow path are connected;
The valve element is
a diaphragm that communicates or blocks the primary channel and the secondary channel;
an orifice plate having an orifice formed therein;
a first orifice base that supports the orifice plate and has a through hole that communicates with the primary channel;
a through hole communicating with the through hole of the first orifice base; and a valve seat portion provided around the through hole, and sandwiching the orifice plate in cooperation with the first orifice base. a second orifice base for
a support portion that supports the diaphragm; and the valve seat portion and the diaphragm from the primary flow path through the through hole of the first orifice base, the orifice, and the through hole of the second orifice base. an inner member having a flow path into which the fluid that has passed between
An orifice built-in valve, wherein a flow path for guiding fluid from the flow path of the inner member to the secondary side flow path is formed between the second orifice base and the inner member.
The valve element further includes a fixing ring that presses and fixes the inner member toward the body by being screwed into a threaded portion formed on the inner peripheral surface of the housing recess,
The first orifice base and the second orifice base receive force from the inner member and are fixed to the body. 2. The internal orifice valve of claim 1, wherein the inter-orifice valve is sealed.
further comprising an actuator for opening and closing between the diaphragm and the valve seat portion by driving a diaphragm presser that presses the diaphragm;
3. The orifice built-in valve according to claim 2, wherein the diaphragm is fixed to the inner member by being pressed toward the inner member by a casing of the actuator screwed together with the threaded portion.
4. The plurality of flow paths according to any one of claims 1 to 3, wherein the plurality of flow paths include flow paths defined by a plurality of grooves formed in a contact surface of one of the second orifice base and the inner member. Orifice built-in valve.
The second orifice base includes first to third outer peripheral surfaces having different outer diameters, a first step surface formed between the first outer peripheral surface and the second outer peripheral surface, a second step surface formed between the second outer peripheral surface and the third outer peripheral surface;
The inner member is formed between first to third inner peripheral surfaces that engage with the first to third outer peripheral surfaces, respectively, and between the first inner peripheral surface and the second inner peripheral surface. and a fourth stepped surface formed between the second inner peripheral surface and the third inner peripheral surface,
The plurality of flow passages are formed outside the first inner peripheral surface of the inner member,
a gap is formed between the first stepped surface and the third stepped surface;
the second stepped surface and the fourth stepped surface abut,
5. The orifice built-in valve according to claim 4, wherein said plurality of grooves are formed in said second inner peripheral surface, said second step surface and said third inner peripheral surface.
a portion of the outer peripheral surface of the first orifice base is engaged with a portion of the inner peripheral surface of the second orifice base;
A convex portion is formed in the circumferential direction on the outer peripheral surface of the first orifice base,
6. The orifice built-in valve according to any one of claims 1 to 5, wherein the inner peripheral surface of the second orifice base is formed with recesses in the circumferential direction in which the protrusions are fitted.
A flow control device comprising the orifice built-in valve according to any one of claims 1 to 6.