TWI828342B - Valve and flow control device with orifice inside - Google Patents

Abstract

The present invention aims to provide a valve with an internal orifice, which can achieve miniaturization while ensuring necessary flow, improve maintainability and sealing performance, and reduce costs. As a solution, a valve with an orifice inside includes: a diaphragm 70 for opening and closing the flow path; an orifice plate 40 formed with an orifice 40h; and a first orifice base 20 that supports the orifice plate 40 and has a through-hole hole 20a; the second orifice base 30 has a valve seat 30b provided around the through hole 30a, and cooperates with the first orifice base 20 to clamp the orifice plate 40; and the inner core member 50 has a plurality of The through-hole 50d allows the fluid that has passed between the valve seat 30b and the diaphragm 70 to flow in; the second orifice base 30 and the core member 50 form a plurality of flow paths CH1 at the contact portions where they abut with each other. The fluid from the plurality of through holes 50d is guided to the secondary flow path 15.

Description

Valve and flow control device with orifice inside

The present invention relates to a valve with an internal orifice and a flow control device using the valve with an internal orifice as a flow control valve.

In the semiconductor manufacturing process, especially in fine processes such as ALD (Atomic Layer Deposition; Atomic Layer Deposition) or ALE (Atomic Layer Ethching; Atomic Layer Etching), in order to provide accurate metering to the processing chamber in a short time Process gases and pursue miniaturization of fluid control machines. Examples of these fluid control devices include a flow control device and a valve having an orifice inside (for example, see Patent Document 1). [Known technical documents] [Patent Document]

[Patent Document 1] Japanese Patent Application Publication No. 2000-213667

[Problem to be solved by the invention]

The above-mentioned valves with internal orifices are not only required to be miniaturized, but also to ensure the necessary flow rate, improve maintainability, reduce costs, and improve sealing performance.

One of the objects of the present invention is to provide a valve with an internal orifice and a flow control device using the valve with an internal orifice, so as to achieve miniaturization, improve maintainability and safety while ensuring the necessary flow rate. tightness and cost reduction. [Technical means to solve problems]

The present invention has a valve with an orifice inside, It has a main body that defines a primary flow path and a secondary flow path, and an accommodation recess in which a main part of the valve is built and connected to the primary flow path and the secondary flow path; The main parts of the valve include: A diaphragm connects or disconnects the primary side flow path and the secondary side flow path; Orifice plates, formed with orifices; A first orifice base supports the orifice plate and has a through hole communicating with the primary flow path; The second orifice base has a through hole communicating with the through hole of the first orifice base, and a valve seat portion provided around the through hole, and cooperates with the first orifice base to clamp the orifice plate; and The inner core member has a support portion that supports the diaphragm, and a plurality of through holes for allowing fluid to flow in. The fluid has passed from the primary flow path through the through hole of the first orifice base, the orifice, and the third 2. The through hole of the orifice base passes between the valve seat and the diaphragm; The second orifice base and the core member guide the fluid from the plurality of flow passages of the core member to the plurality of flow passages of the secondary side flow passage at the contact portions that are in contact with each other due to engagement. It is formed between the second orifice base and the core member.

Preferably, the following structure can be adopted: the main part of the valve further has a fixed ring. The fixed ring is screwed to the threaded portion formed on the inner peripheral surface of the receiving recess to push the core member toward the main body and fix it. ; The first orifice base and the second orifice base are fixed to the main body by the force of the core member, and the first orifice base and the second orifice base are in contact with the orifice. The plates will be sealed.

Preferably, the following structure can be adopted: it further has an actuator to drive a diaphragm pressing member that pushes the diaphragm to open and close the gap between the diaphragm and the valve seat; The diaphragm is pushed toward the core member by the outer shell of the actuator and is fixed to the inner core member. The outer shell of the actuator is screwed into a threaded portion common to the threaded portion.

More preferably, the following structure may be adopted: the plurality of flow paths include flow paths partitioned by a plurality of groove portions formed in one of the second orifice base and the core member.

More preferably, the following structure can be adopted: the second orifice base is provided with: first to third outer peripheral surfaces having different outer diameters, and a first step difference surface formed between the first outer peripheral surface and the second outer peripheral surface. , and a second step surface formed between the second outer peripheral surface and the third outer peripheral surface; The core member includes: first to third inner circumferential surfaces respectively engaged with the first to third outer circumferential surfaces; and a third step surface formed between the first inner circumferential surface and the second inner circumferential surface. , and a fourth step surface formed between the second inner circumferential surface and the third inner circumferential surface; The plurality of through holes are formed outside the first inner peripheral surface of the core member; A gap is formed between the first-stage differential surface and the third-stage differential surface; The 2nd section difference surface is in contact with the 4th section difference surface; The plurality of groove portions are formed on the second inner peripheral surface, the second step surface, and the third inner peripheral surface.

Preferably, the following structure can be adopted: a part of the outer peripheral surface of the first orifice base is in an engaging relationship with a part of the inner peripheral surface of the second orifice base; A convex portion is formed in the circumferential direction on the outer peripheral surface of the first orifice base; A concave portion into which the convex portion is embedded is formed in the circumferential direction on the inner peripheral surface of the second port base.

The flow control device of the present invention includes the above-mentioned valve with an orifice inside. [Effects of the invention]

According to the present invention, a valve with an internal orifice and a flow control device using the valve with an internal orifice are provided, which can achieve miniaturization while ensuring the necessary flow rate, thereby improving maintainability and reducing costs. , Improve sealing performance.

Embodiments of the present invention will be described below with reference to the drawings. In the description, the same components will be given the same symbols, and repeated descriptions will be omitted as appropriate. FIG. 1 shows the flow control device 1 of this embodiment. In Figure 1, 10 is the main body, 20 is the first orifice base, 30 is the second orifice base, 40 is the orifice plate, 50 is the core member, 60 is the fixed ring, 70 is the diaphragm, and 80 is the pressing member. Connectors, 90 is an actuator, 110 is a flow control valve, 120 and 130 are pressure detectors.

The main body 10 is formed into a block shape from a metal material such as stainless steel, and defines flow paths 11, 12, 13, 14, and 15. The flow control valve 110 is provided between the flow path 11 and the flow path 12 and can control the flow rate of the fluid flowing through the flow paths 11 and 12 . In addition, in this embodiment, the flow path 13 on the upstream side of the orifice, which will be described later, is a primary side flow path, and the flow path 15 on the downstream side of the orifice, which will be described later, is a secondary side flow path. The flow path 11 is supplied with fluid from the outside. The flow path 14 branches from the flow path 15 and is connected to the pressure detector 130 . The pressure detector 120 is provided between the flow path 12 and the flow path 13, and detects the pressure of the primary side flow path, that is, the flow paths 12 and 13. The pressure detector 130 detects the pressure of the secondary side flow path, that is, the flow paths 14 and 15 . The flow control device 1 is a so-called pressure type flow control device, and is equipped with a control circuit (not shown) composed of hardware such as a processor and a memory, and required software. According to the pressure detected by the pressure detector 120 The pressure P2 detected by P1 and the pressure detector 130 measures the flow rate of the fluid flowing in the flow path 12 and drives and controls the above-mentioned valve with an internal orifice so that the measured flow rate reaches the target flow rate.

The main body 10, the first orifice base 20, the second orifice base 30, the orifice plate 40, the inner core member 50, the fixing ring 60, the diaphragm 70, the presser joint 80 and the actuator 90 constitute an embodiment of the present invention. A valve with an orifice inside the form is an on-off valve. Furthermore, the first orifice base 20, the second orifice base 30, the orifice plate 40, the inner core member 50, the retaining ring 60, the diaphragm 70 and the pressing member joint 80 constitute the main parts of the valve according to the embodiment of the present invention. .

Next, with reference to FIGS. 2 to 7B , a description will be given of the valve having an internal orifice in this embodiment. As shown in FIG. 2 , the main body 10 is formed with a receiving recess 16 , which is a hole with a circular cross-section that is opened on the top surface of the main body 10 . The accommodation recessed portion 16 is a circular hole with a fixed inner diameter from the opening to the bottom surface 16t. A recessed portion 17 with a circular cross-section is further formed in the center of the bottom surface 16t. The flow path 13 as the primary flow path has an opening in the bottom surface of the recess 17; the flow path 15 as the secondary flow path has an opening in the bottom surface 16t of the accommodation recess 16. The accommodation recess 16 has a fixed inner diameter from the opening on the top surface of the main body 10 to the bottom surface 16t, and a threaded portion 16a is formed on the inner peripheral surface from the top surface to halfway in the depth direction. Around the opening of the recess 17 on the bottom surface 16t of the accommodation recess 16, there is an annular seat surface 16p protruding from the bottom surface 16t for close contact with the sealing surface 30p of the second port base 30 to be described later.

The first orifice base 20 is made of metal such as stainless steel alloy. As shown in FIGS. 3A and 3B , a through hole 20 a constituting a flow path is formed in the center and has an outer peripheral surface 20 f 1 with different outer diameters. ,20f2,20f3. The through hole 20a has a large inner diameter on the lower end side and a small inner diameter on the upper end side. As shown in FIG. 2 , a part of the outer peripheral surface 20f3 of the first orifice base 20 is accommodated in the recess 17, and the through hole 20a communicates with the flow path 13. On the outer peripheral surface 20f2 of the first port base 20, a convex portion 20t is formed in the circumferential direction. The periphery of the through hole 20a at the upper end of the first orifice base 20 is the supporting surface 20s that supports the orifice plate 40.

The second orifice base 30 is made of fluororesin such as PCTFE (polychlorotrifluoroethylene), as shown in Figures 4A and 4B, and has a through hole 30a forming a flow path in the center; this through hole 30a, as shown in Figure 2 As shown, it communicates with the through hole 20a of the first orifice base 20 through the orifice plate 40. A valve seat portion 30b is formed around the upper end side of the through hole 30a, and an annular pressing surface 30s for pressing the orifice plate 40 is formed around the lower end side of the through hole 30a. Inner peripheral surfaces 30c1, 30c2, and 30c3 having different inner diameters are formed inside the second port base 30, and a recess 30t is formed in the circumferential direction on the inner peripheral surface 30c2. The outer peripheral surfaces 20f1, 20f2, and 20f3 of the first orifice base 20 are engaged with the inner peripheral surfaces 30c1, 30c2, and 30c3 of the second orifice base 30 as shown in FIG. 2; and, the first orifice base The convex portion 20t of 20 is inserted into the concave portion 30t of the second port base 30.

As shown in FIG. 2 , the orifice plate 40 is sandwiched between the supporting surface 20 s of the first orifice base 20 and the pressing surface 30 s of the second orifice base 30 , and the first orifice plate 40 is fixed by a fixing ring 60 to be described later. The two orifice bases 30 push against the first orifice base 20 so that the first orifice base 20, the second orifice base 30 and the orifice plate 40 are sealed. Furthermore, by engaging the outer peripheral surfaces 20f1, 20f2, and 20f3 of the first orifice base 20 with the inner peripheral surfaces 30c1, 30c2, and 30c3 of the second orifice base 30, and making the first orifice base 20 The convex portion 20t is inserted into the recessed portion 30t of the second orifice base 30, so that fluid will not easily leak from between the first orifice base 20 and the second orifice base 30.

On the outside of the second port base 30, as shown in FIGS. 4A and 4B, outer peripheral surfaces 30d1, 30d2, and 30d3 having different outer diameters are formed; between the outer peripheral surface 30d1 and the outer peripheral surface 30d2, an annular The step surface 30f1 is formed; an annular step surface 30f2 is formed between the outer peripheral surface 30d2 and the outer peripheral surface 30d3. The lower end surface of the second orifice base 30 forms an annular sealing surface 30p. By pushing the step surface 30f2 toward the main body 10, as shown in FIG. 2, the sealing surface 30p will be in close contact with the seat surface 16p of the main body, so that the first orifice base 20 and the second orifice base 30 are evenly connected. If there is fluid leakage, it can also prevent the fluid from leaking to the outside.

The orifice plate 40 is made of metal such as stainless steel alloy. As shown in Fig. 5 , a plurality of (four) orifices 40h are formed in the center.

The core member 50 is made of metal such as stainless steel alloy; as shown in FIGS. 6A to 6C , inner peripheral surfaces 50a1, 50a2, and 50a3 having different inner diameters are formed on the inside; between the inner peripheral surface 50a1 and the inner peripheral surface 50a2, A stepped surface 50e1 is formed; a stepped surface 50e2 is formed between the inner peripheral surface 50a2 and the inner peripheral surface 50a3. An annular sealing surface 50p that is in contact with the main body 10 is formed on the lower end surface of the core member 50 . The annular protruding portion 50b that defines the inner circumferential surface 50a1 of the core member 50 has a supporting portion 50c formed on its top side to support the diaphragm 70, which is composed of annular protrusions. On the outside of the core member 50, outer peripheral surfaces 50h1 and 50h2 with different outer diameters are formed; an annular step surface 50f is formed between the outer peripheral surface 50h1 and the outer peripheral surface 50h2.

A plurality of through holes 50d constituting flow paths are formed in the protruding portion 50b of the core member 50 at equal intervals in the circumferential direction. The flow path is not particularly limited to a through hole as long as it serves as a flow path for fluid, and may be a groove-shaped flow path. On the inner peripheral surface 50a1 of the core member 50, a plurality of semicircular arc-shaped groove portions 50g1 are formed at equal intervals in the circumferential direction, and the plurality of groove portions 50g1 extend in the direction of the central axis; on the step surface 50e2, A plurality of groove portions 50g2 are formed, and the plurality of groove portions 50g2 extend in the radial direction in a manner connected to each of the plurality of groove portions 50g1; they are formed on the inner peripheral surface 50a3 at equal intervals in the circumferential direction. There are a plurality of semicircular arc-shaped groove portions 50g3, and the plurality of groove portions 50g3 extend in the central axis direction in such a manner that they are respectively connected to the plurality of groove portions 50g2. The outer peripheral surfaces 30d1, 30d2, and 30d3 of the second port base 30 are respectively engaged with the inner peripheral surfaces 50a1, 50a2, and 50a3 of the core member 50, so that the outer peripheral surfaces 30d1, 30d2, and 30d3 are in contact with the inner peripheral surfaces 50a1, 50a2, 50a3 are each sealed. The groove portions 50g1, 50g2, and 50g3 of the core member 50 cooperate with the outer peripheral surface 30d2, the step surface 30f2, and the outer peripheral surface 30d3 of the second orifice base 30 to form the flow path CH1 shown in FIG. 2 . That is, through the engagement of the second orifice base 30 and the core member 50, the outer peripheral surface 30d2, the step surface 30f2 and the outer peripheral surface 30d3 of the second orifice base 30 are in contact with the inner peripheral surface 50a2, 50a2 and 30d3 of the inner core member 50. The step surface 50e2 and the inner peripheral surface 50a3 constitute a contact portion that abuts against each other. In this contact portion, a plurality of flow paths CH1 are formed between the second port base 30 and the core member 50 . When the inner periphery of the core member 50 is engaged with the outer periphery of the second orifice base 30, the step surface 50e2 of the core member 50 is in contact with the step surface 30f2 of the second orifice base 30; however, in the core member A gap Gp shown in FIG. 2 is formed between the step surface 50e1 of 50 and the step surface 30f1 of the second orifice base 30, and this gap Gp forms a flow path.

The fixed ring 60 is made of a metal material such as stainless steel. As shown in FIGS. 7A and 7B , a threaded portion 60a is formed on the outer peripheral surface, and the inner peripheral surface 60b has a double hex structure for engaging the rotating tool. . As shown in FIG. 2 , the threaded portion 60 a of the fixing ring 60 is screwed into the threaded portion 16 a of the accommodation recess 16 , and the step surface 50 f of the core member 50 is pushed toward the main body 10 by the fixing ring 60 . The sealing surface 50p of the core member 50 is pushed against the bottom surface 16t of the accommodation recess 16, so that the sealing surface 50p and the bottom surface 16t are sealed. Thereby, a flow path CH2 composed of annular gaps is formed between the core member 50 and the main body 10 . The pushing force from the fixing ring 60 acting on the core member 50 acts as a force to push the step surface 30f2 of the second orifice base 30 toward the main body with the step surface 50e2 of the core member 50, so that the seat of the main body 10 The surface 16p and the sealing surface 30p of the second port base 30 are sealed. At the same time, by pressing the supporting surface 20s of the first orifice base 20 with the pressing surface 30s of the second orifice base 30, the orifice plate 40 and the supporting surface of the first orifice base 20 are The space between 20s and the pressing surface 30s of the second port base 30 is sealed.

The diaphragm 70 is made of a laminated metal thin plate such as special stainless steel or a nickel-cobalt alloy thin plate, and the central part thereof is bulged upward to form a spherical shell shape that is naturally upwardly convex in an arc shape. . As shown in FIG. 2 , the diaphragm 70 is supported by the supporting portion 50 c of the core member 50 , and is pushed toward the main body 10 by the annular end surface of the lower end 91 b of the housing 91 of the actuator 90 through the annular pressing member joint 80 . Press, thereby being fixed to the core member 50. The diaphragm 70 defines a part of the flow path and is pushed by the diaphragm pressing member 92 to elastically deform. When it comes into contact with the valve seat portion 30b of the second orifice base 30, the flow path is closed. When it is separated from the valve seat portion 30b The flow path will be open. Furthermore, in this embodiment, in order to prevent the diaphragm 70 from moving along with the housing 91, a metal presser joint 80 is used to fix the diaphragm 70 to the core member 50; however, the diaphragm 70 can also be fixed to the core member 50 by extending the housing 91 of the actuator 90. The lower end 91b directly fixes the diaphragm 70 without using the presser joint 80.

The actuator 90 may, for example, use a cylinder with a piston built into the housing 91 , but is not limited thereto. The actuator 90 holds the diaphragm pressing member 92 at a driving portion (not shown), and drives the diaphragm pressing member 92 in a direction toward and away from the valve seat portion 30b of the second orifice base 30 . The diaphragm pressing member 92 has an end portion made of synthetic resin such as polyimide and is bent in a convex shape, and is in contact with the top surface of the central portion of the diaphragm 70 . A threaded portion 91a is formed on the outer peripheral surface of the housing 91 of the actuator 90; by screwing this threaded portion 91a with the threaded portion 16a formed on the inner peripheral surface of the accommodation recess 16 of the main body 10, the housing 91 is The annular end surface of the lower end portion 91 b presses the outer peripheral portion of the diaphragm 70 through the presser joint 80 .

Here, the assembly procedure of the above-mentioned valve with an orifice inside is explained. First, the orifice plate 40 is installed on the supporting surface 20s of the first orifice base 20, and in this state, the inner periphery of the second orifice base 30 is placed on the outer periphery of the first orifice base 20. chimeric. Thereby, the convex portion 20t of the first orifice base 20 is inserted into the recessed portion 30t of the second orifice base 30, and the orifice plate 40 is sandwiched between the first orifice base 20 and the second orifice base 30. , and at the same time, the first orifice base 20 and the second orifice base 30 will be connected. Next, the outer peripheral surface 20f3 of the first port base 20 connected to the second port base 30 is inserted into the recessed portion 17. Next, the inner periphery of the core member 50 is fitted with the outer periphery of the second port base 30 , the fixing ring 60 is screwed into the threaded portion 16 a of the accommodation recess 16 , and the core member 50 and the first port base 20 are connected. and the second orifice base 30 is fixed to the main body 10 . Next, the diaphragm 70 is set on the supporting part 50c of the core member 50, the presser joint 80 is set on the diaphragm 70, and then the threaded part 91a of the housing 91 of the actuator 90 is screwed into the threaded part 16a of the receiving recess 16 of the main body 10 .

In the valve provided with an orifice inside the present embodiment, as shown in FIG. 2 , the fluid flowing from the flow path 13 into the through hole 20 a of the first orifice base 20 passes through the orifice 40 h formed in the orifice plate 40 , flows into a plurality of through holes 50d through the through hole 30a of the second orifice base 30, and through the gap between the valve seat portion 30b of the second orifice base 30 and the diaphragm 70. The fluid that has passed through the plurality of through holes 50d will flow into the annular gap Gp between the core member 50 and the second orifice base 30, and pass through the plurality of flows between the core member 50 and the second orifice base 30. Path CH1; after flowing into the annular flow path CH2 between the core member 50 and the bottom surface 16t of the accommodation recess 16 of the main body 10, it flows out into the flow path 15 connected to the flow path CH2.

In this embodiment, with the above structure, the valve having the orifice inside can be miniaturized, and at the same time, by forming a plurality of flow paths CH1 between the core member 50 and the second orifice base 30, it can also ensure flow. According to this embodiment, the orifice plate 40 is fixed by using the fixing ring 60 screwed to the threaded portion 16a of the accommodation recess 16, and the housing 91 of the actuator 90 screwed to the common threaded portion 16a is used to fix the aperture plate 40. After the diaphragm 70 is fixed, the diaphragm 70 and the orifice plate 40 can be installed separately, so the sealing performance and maintainability can be improved. According to this embodiment, by forming a plurality of steps on the outer circumference and the inner circumference of the second orifice base 30 made of synthetic resin, the thickness of the second orifice base 30 can be ensured, and the pressure resistance can be ensured. .

FIG. 8 shows another embodiment of the present invention. In this embodiment, except for the fact that the annular flow plate 200 is disposed at the contact portion between the core member 50 and the second orifice base 30, the other configurations are the same as the above-described embodiment, and the description thereof is omitted.

The flow plate 200 is an annular member made of metal, for example, stainless steel. As shown in FIGS. 9(a) to (c) , a plurality of grooves 200a are radially formed on the surface to serve as flow paths for the fluid. It does not matter whether the groove 200a is formed on only one side or on both sides.

By arranging the flow plate 200 between the core member 50 and the second orifice base 30, the fixing ring 60 will not be over-tightened during assembly, causing the resin-made second orifice base 30 to deform or deform. The opening area of the flow path CH1 of the core member 50 is reduced, so that the fluid can flow smoothly.

The embodiments of the present invention have been described in detail. However, the present invention is not limited to the specific embodiments, and various modifications and changes can be made within the scope of the gist of the present invention described in the patent claims.

1: Flow control device 10:Subject 11,12,14:Flow path 13: Flow path (primary side flow path) 15: Flow path (secondary side flow path) 16:Accommodating recess 16a: Threaded part 16t: Bottom 16p: Seat surface 17: concave part 20: 1st orifice base 20a:Through hole 20f1~20f3: Outer peripheral surface 20t:convex part 20s: support surface 30: 2nd orifice base 30a:Through hole 30b: Valve seat part 30c1~30c3: Inner peripheral surface 30d1: Outer peripheral surface (1st outer peripheral surface) 30d2, 30d3: Outer peripheral surface (contact portion, second and third outer peripheral surface) 30f1: Step difference surface (the first step difference surface) 30f2: Step surface (contact part, second step surface) 30s: Pushing surface 30t: concave part 30p: sealing surface 40: Orifice plate 40h: Orifice 50: Kernel components 50a1: Inner peripheral surface (1st inner peripheral surface) 50a2, 50a3: Inner circumferential surface (contact portion, 2nd and 3rd inner circumferential surface) 50b:Protrusion 50c: Support Department 50d:Through hole 50e1: Step difference surface (3rd step difference surface) 50e2: Step surface (contact part, 4th step surface) 50f: step difference surface 50g1~50g3: Groove part 50h1, 50h2: outer surface 50p: sealing surface 60: Fixed ring 60a: Threaded part 60b: Inner peripheral surface 70: Diaphragm 80: Pressure piece connector 90: Actuator 91: Shell 91a: Threaded part 91b: Lower end 92: Diaphragm pressing piece 110:Flow control valve 120,130: Pressure detector 200:circulation plate 200a: Groove Gp: gap CH1, CH2: flow path P1,P2: pressure

[Fig. 1] A cross-section of main parts of a flow control device according to an embodiment of the present invention. [Fig. 2] An enlarged cross-sectional view showing the main parts of Fig. 1 in an enlarged manner. [Fig. 3A] Front view of the first orifice base. [Fig. 3B] A longitudinal sectional view of the first orifice base of Fig. 3A. [Fig. 4A] An external perspective view of the second orifice base. [Fig. 4B] A longitudinal sectional view of the second orifice base of Fig. 4A. [Figure 5] Appearance perspective view of the orifice plate. [Fig. 6A] An external perspective view viewed from above the core member. [Fig. 6B] An external perspective view viewed from below the core member of Fig. 6A. [Fig. 6C] A longitudinal sectional view of the core member of Fig. 6A. [Fig. 7A] An external perspective view of the fixing ring. [Fig. 7B] Top view of the fixing ring. [Fig. 8] An enlarged cross-sectional view of a main part of a flow control device according to another embodiment of the present invention. [Fig. 9] (a) to (c) show the flow plate of this embodiment, (a) is a plan view, (b) is a XX cross-sectional view of (a), and (c) is a perspective view.

10:Subject

13: Flow path (primary side flow path)

14: Flow path

15: Flow path (secondary side flow path)

16:Accommodating recess

16a: Threaded part

16t: Bottom

16p: Seat surface

17: concave part

20: 1st orifice base

20a:Through hole

20s: support surface

30: 2nd orifice base

30a:Through hole

30b: Valve seat part

30f2: Step surface (contact part, second step surface)

30s: Pushing surface

30p: sealing surface

40: Orifice plate

50: Kernel components

50c: Support Department

50d:Through hole

50e2: Step surface (contact part, 4th step surface)

50f: step difference surface

50p: sealing surface

60: Fixed ring

60a: Threaded part

70: Diaphragm

80: Pressure piece connector

90: Actuator

91: Shell

91a: Threaded part

91b: Lower end

92: Diaphragm pressing piece

Gp: gap

CH1, CH2: flow path

Claims (7)

A valve with an orifice inside, having a main body that defines a primary side flow path and a secondary side flow path, and an accommodating recess that accommodates a main part of the valve and is connected to the primary side flow path and the secondary side flow path. ; The main part of the valve includes: a diaphragm, which connects or disconnects the primary side flow path and the secondary side flow path; an orifice plate, which is formed with an orifice; a first orifice base, which supports the orifice plate, and has a through hole communicating with the primary flow path; the second orifice base has a through hole communicating with the through hole of the first orifice base, and a valve seat portion provided around the through hole, and cooperates with the first orifice base to hold the orifice plate; and the inner core component has: a support portion to support the diaphragm; and a flow path for passing from the primary side flow path through the first orifice base. The through-hole of the seat, the orifice, and the through-hole of the second orifice base allow the fluid passing between the valve seat and the diaphragm to flow in; guiding the fluid from the flow path of the core member to the two A plurality of secondary flow paths are formed between the second orifice base and the core member. For example, claim 1 is a valve with an orifice inside, wherein the main part of the valve further includes a fixing ring, and the fixing ring is screwed to a threaded portion formed on the inner circumferential surface of the receiving recess to secure the inner core. The member is pushed to the main body and fixed; the first orifice base and the second orifice base are fixed to the main body by bearing the force from the core member, and are sealed on the first orifice base. between the base and the second orifice base and the orifice plate. If the valve of claim 2 is provided with an orifice inside, it further includes: an actuator to drive a diaphragm pressing member that presses the diaphragm to open and close the gap between the diaphragm and the valve seat; the diaphragm is moved by the diaphragm. The outer shell of the actuator is pressed against the core member and fixed to the inner core member. The outer shell of the actuator is screwed into the threaded portion common to the threaded portion. As claimed in any one of claims 1 to 3, the valve is provided with an orifice inside, wherein the plurality of flow paths include contact through one of the second orifice base and the core member. A flow path defined by a plurality of grooves on the surface. The valve of claim 4 with an orifice inside, wherein the second orifice base is provided with: first to third outer circumferential surfaces with different outer diameters, formed on the first outer circumferential surface and the second outer circumference The first step difference surface between the surfaces, and the second step difference surface formed between the second outer peripheral surface and the third outer peripheral surface; the core member is provided with: respectively engaged with the first to third outer peripheral surfaces. first to third inner circumferential surfaces, a third step surface formed between the first inner circumferential surface and the second inner circumferential surface, and a third step surface formed between the second inner circumferential surface and the third inner circumferential surface The fourth differential surface; the plurality of flow paths are formed outside the first inner peripheral surface of the core member; a gap is formed between the first differential surface and the third differential surface; the second differential surface In contact with the fourth step surface, the plurality of groove portions are formed on the second inner peripheral surface, the second step surface, and the third inner peripheral surface. For example, any one of claims 1 to 3 is a valve with an orifice inside, wherein a part of the outer circumferential surface of the first orifice base is formed with a part of the inner circumferential surface of the second orifice base. The engagement relationship; a convex portion is formed in the circumferential direction on the outer peripheral surface of the first orifice base; and a recessed portion is formed in the circumferential direction on the inner peripheral surface of the second orifice base for the convex portion to be inserted. . A flow control device, including: a valve with an orifice inside according to any one of claims 1 to 6.