KR20220140821A - valve device - Google Patents

Abstract

The valve device 1 includes a body 6 having flow paths 18 , 20 , a recess 22 and a valve chamber 36 , an inner disk 24 having an inner periphery 32 and an outer periphery 34 ; The diaphragm (4), the first annular surface (44) formed on the side facing the valve chamber (36) of the inner periphery (32), is formed on the opposite side to the first annular surface (44) of the inner periphery (32) , the second annular surface 46 supported on the bottom surface 22a of the concave portion 22, the first sealing portion 48 to which the diaphragm 4 is contacted and separated while being held on the first annular surface 44 , a second sealing portion 50 is provided between the second annular surface 46 and the bottom surface 22a of the concave portion 22 .

Description

valve device

The present invention relates to a valve device, and more particularly, to a valve device having a diaphragm in a valve body.

Patent Document 1 discloses a body having an inlet passage, an outlet passage, and a concave portion of an upper opening of a fluid, a valve seat detachably disposed on the periphery of a flow passage formed on the body, and a seat holder detachably disposed on the body to hold the valve seat. Disclosed is a diaphragm valve having a diaphragm (also referred to as an inner disk) that blocks or communicates a flow path by contacting/separating a valve seat.

Patent Document 1: Japanese Patent Application Laid-Open No. 2015-36563

The valve seat described in Patent Document 1 is an annular valve seat body, is attached to the inner peripheral surface of the inner periphery of the inner disk, and is formed of, for example, a resin such as PCTFE (heat-resistant temperature: about 120°C). Therefore, when the temperature of the fluid flowing through the valve reaches a high temperature of, for example, 300°C or higher, it is necessary to ensure the same degree of heat resistance for the valve seat in contact with the high-temperature fluid.

In addition, when the valve seat contracts after thermal expansion in contact with a high-temperature fluid, stress concentration may occur in the awning-shaped mounting portion mounted on the inner periphery of the inner disk of the valve seat. This stress concentration causes a deformation in the valve seat and, depending on the material, cracks or breaks in the valve seat, which may impair the sealing properties of the valve.

In addition, the valve seat described in Patent Document 1 has a protruding valve seat portion to which the diaphragm is in contact when the valve is closed, a awning-shaped mounting portion mounted to the inner periphery of the inner disk, and the inner disk of the valve body is accommodated. It has an abutment part which abuts against the bottom surface of the recessed part. The valve seat provided with each of these parts cannot but be bulky. Therefore, when such a bulky valve seat is exposed to high temperature, the influence by thermal expansion becomes more remarkable, and there exists a possibility that it may become more difficult to ensure the sealing property of a valve.

The present invention has been made in view of such a subject, and an object of the present invention is to provide a valve device capable of securing sealing properties by suppressing the influence of thermal expansion even when a high-temperature fluid flows through a flow path.

In order to achieve the above object, the valve device of the present invention has a body having a flow path, a concave portion in which the flow path is opened, and a valve chamber through which the flow path communicates in the concave portion, accommodated in the concave portion, and formed by the inner periphery and the outer periphery. An inner disk that partitions the flow path to the valve chamber, a diaphragm that blocks or communicates with the flow path in the valve chamber, a first annular surface formed on the side facing the valve chamber at the inner periphery, and on the opposite side to the first annular surface of the inner periphery A second annular surface supported on the bottom surface of the concave portion while being formed, a first sealing portion maintained on the first annular surface, and a diaphragm contacted and separated according to blockage or communication of the flow path, the second annular surface and the concave portion A second sealing portion disposed between the bottom surfaces is provided.

ADVANTAGE OF THE INVENTION According to the valve apparatus of this invention, even when a high-temperature fluid flows in a flow path, sealing property can be ensured by suppressing the influence of thermal expansion.

1 is a partial longitudinal sectional view of a valve provided with a valve device according to a first embodiment of the present invention.
Fig. 2 is an enlarged longitudinal sectional view of the region A of Fig. 1 of the valve device;
3 is a longitudinal sectional view of the inner disk.
4 is a top view of the inner disk.
5 is a partial longitudinal sectional view of a valve provided with a valve device according to a second embodiment of the present invention.
Fig. 6 is an enlarged longitudinal sectional view of region B of Fig. 5 of the valve device;
7 is a longitudinal cross-sectional view of the first inner disk to which the second inner disk is assembled.
8 is a top view of the first inner disk to which the second inner disk is assembled.
9 is a top view of the first inner disk.
10 is a top view of the second inner disk.

EMBODIMENT OF THE INVENTION Hereinafter, the valve apparatus which concerns on each embodiment of this invention is demonstrated with reference to drawings. In addition, in the description of FIGS. 1 to 3 and FIGS. 5 to 7 , the upper side of each drawing is described as the upper side.

<First embodiment>

1 shows a partial longitudinal sectional view of a valve 2 provided with a valve arrangement 1 according to a first embodiment of the present invention. The valve 2 is a metal diaphragm valve of a direct touch type having a diaphragm 4 as a valve body and capable of precisely controlling a minute flow rate of a process fluid.

The valve 2 includes a body 6 , a valve body 8 , a bonnet 10 , a bonnet nut 12 , a stem 14 , an actuator 16 , and the like. The body 6 is made of a metal material such as stainless steel, and an inlet flow passage 18 and an outlet flow passage 20 and a concave portion 22 of the upper opening are formed. In the concave portion 22 , an inlet passage 18 and an outlet passage 20 are opened at the bottom surface 22a thereof, and the valve body 8 is accommodated. The valve device 1 is composed of a body 6 and a valve body 8 accommodated in a recess 22 of the body 6 .

FIG. 2 shows an enlarged longitudinal sectional view of the region A of FIG. 1 of the valve device 1 . The valve body 8 includes a diaphragm 4, an inner disk 24, a lower end 10a of the bonnet 10, a lower diameter portion 14a of the stem 14, and a spring 26 (Fig. 1). reference), a diaphragm pressing part 28, and a pressing adapter 30 and the like.

The diaphragm 4 is formed by laminating one sheet or a plurality of mutually separable thin plates, and these thin plates are formed in a plate shape in which the central portion 4a of the diaphragm 4 bulges upward. The thin plate has an ultra-thin thickness of, for example, about 0.1 mm to 0.2 mm, and is formed of a metal material such as stainless steel or other shape memory alloy.

The inner disk 24 is formed of a metal material such as stainless steel, has an inner periphery 32 and an outer periphery 34 , and is mounted on the bottom surface 22a of the concave portion 22 . On the outer periphery 34, the diaphragm 4 and the pressing adapter 30 are arranged in this order. The bonnet 10 has a cylindrical shape, and the lower end 10a of the bonnet 10 is pressed by the pressing adapter 30 by being inserted into the recess 22 and tightening the bonnet nut 12 . Thereby, the periphery 4b of the diaphragm 4 is pressed against the outer periphery 34 of the inner disk 24 by the pressing adapter 30 and held.

The stem 14 is inserted so as to be movable up and down in the bonnet 10, and a diaphragm pressing portion 28 formed of a resin material or the like is fitted to the lower diameter portion 14a thereof. The diaphragm pressing part 28 abuts against the upper surface of the radial central part 4a of the diaphragm 4, and in the valve open state of FIG. 1, presses the diaphragm 4 from above, and suppresses the excessive curvature. The upper portion of the stem 14 protrudes from the upper portion of the bonnet 10 and is inserted into the actuator 16 .

The actuator 16 is, for example, an air-operated drive mechanism, and the stem 14 is generated by the elastic force of the coil-shaped spring 26 disposed in the recess 22 and the pressure of the working air supplied to the actuator 16 . ) to move up and down. For example, when the supply of working air to the actuator 16 is cut off, the elastic force of the spring 26 acts on the lower diameter part 14a, and the stem 14 descends, and the lower diameter part 14a descends and the diaphragm ( The central portion 4a of 4) is pressed by the diaphragm pressing portion 28, and the diaphragm 4 closes the opening of the inlet flow passage 18 to enter the valve closed state.

On the other hand, by supplying operating air to the actuator 16 , the stem 14 rises, and the lower diameter portion 14a rises against the elastic force of the spring 26 . Thereby, as shown in FIG. 2, the diaphragm holding part 28 also raises, the diaphragm 4 returns to the natural state of an upward curve, the inlet flow path 18 is opened, and the valve 2 becomes a valve open state. .

The concave portion 22 is formed with a valve chamber 36 through which the inlet passage 18 and the outlet passage 20 communicate. The valve chamber 36 is surrounded by the pressing adapter 30 , the diaphragm pressing portion 28 , and the inner disk 24 , and is a region through which the fluid flows from the inlet flow passage 18 . The diaphragm 4 is curvedly deformed in the valve chamber 36 to block or communicate the inlet and outlet flow paths 18 and 20 .

3 shows a longitudinal sectional view of the inner disk 24, and FIG. 4 shows a top view of the inner disk 24. As shown in FIG. As shown in Fig. 2, the inner disk 24 is accommodated in the concave portion 22, and at the same time, the inlet and outlet flow paths 18 and 20 are connected to the valve chamber 36 by the inner periphery 32 and the outer periphery 34. ) up to the

In detail, as shown in FIG. 4 , a through hole 38 communicating with the inlet passage 18 is formed inside the inner periphery 32 of the inner disk 24, and the inner periphery 32 and the outer periphery are formed. An intermediate annular portion (40) is formed between (34). A plurality of through-holes 42 are formed in the intermediate annular portion 40 along the circumferential direction, and each through-hole 42 communicates with the outlet flow passage 20 . Thereby, the inlet and outlet flow paths 18 and 20 are partitioned by the inner disk 24 up to the valve chamber 36. As shown in FIG.

A first annular surface 44 is formed on the inner periphery 32 on the side facing the valve chamber 36 , that is, on the upper surface of the inner periphery 32 as seen in FIG. 3 . In addition, a second annular surface 46 is formed on the opposite side to the first annular surface 44 , that is, on the lower surface of the inner periphery 32 as viewed in FIG. 3 . As shown in FIG. 2, the 2nd annular surface 46 is supported by the bottom surface 22a of the recessed part 22 via the 2nd sealing part 50 mentioned later.

The first and second annular surfaces 44 and 46 are flat surfaces forming an annular shape, and a first sealing portion 48 is attached and held to the first annular surface 44 by bonding or the like. In the first sealing part 48, the diaphragm 4 is contacted and separated according to the blocking or communication of the inlet and outlet flow paths 18 and 20. Moreover, the 2nd sealing part 50 is arrange|positioned between the 2nd annular surface 46 and the bottom surface 22a of the recessed part 22. As shown in FIG. In addition, the second sealing portion 50 may be attached to the second annular surface 46 or the bottom surface 22a by adhesion or the like.

The first and second sealing portions 48 and 50 have an annular sheet shape, and both are formed of fluororubber. More preferably, the first and second sealing parts 48 and 50 are fluororubber ( For example, it is formed of a fluororubber material 'Kalrez (registered trademark)') manufactured by DuPont (DUPONT).

As shown in FIG. 3 , an annular protrusion 52 is formed on the outer periphery 34 to protrude toward the bottom surface 22a of the recess 22 , that is, toward the lower side in FIG. 3 . The protrusion 52 is formed to have a projecting height H in the thickness direction Y of the inner disk 24 . When the lower end 10a of the bonnet 10 is pressed by the pressing adapter 30 by tightening the bonnet nut 12, the tip of the protrusion 52 comes into contact with the bottom surface 22a of the opposite recessed portion 22.

By the abutment of the protrusion 52 , the outer periphery 34 is held on the bottom surface 22a of the concave portion 22 while sealing at the outer periphery 34 is achieved. Further, the second sealing portion 50 is appropriately pressed between the second annular surface 46 and the bottom surface 22a of the concave portion 22 .

As described above, in this embodiment, the diaphragm 4 is contacted and separated according to the blocking or communication of the inlet and outlet flow paths 18 and 20, and the first sealing portion 48 is used as a valve seat portion of a conventional valve seat. have a function On the other hand, the second sealing portion 50 has a function as an abutting portion that comes into contact with the bottom surface 22a of the concave portion 22 of the conventional valve seat.

As described above, in the present embodiment, the valve seat of the valve device 1 is called the first and second sealing portions 48 and 50 which are respectively arranged at separate portions called the first and second annular surfaces 44 and 46 . It is formed from two different members. Thereby, the conventional awning-shaped mounting part of a valve seat becomes unnecessary.

By the absence of the mounting portion of the valve seat, occurrence of deformation, cracking, breakage, or the like of the valve seat caused by stress concentration of the mounting portion is suppressed. Further, since the valve seat can be formed in a small volume without a mounting portion, the influence of thermal expansion can be suppressed even when a high-temperature fluid flows through the valve device 1 . Therefore, the sealing property of the valve device 1 can be ensured.

Further, by providing the second sealing portion 50 having a function as an abutment portion in contact with the bottom surface 22a of the concave portion 22, the inner disk 24 and the concave portion 22 of the body 6 are separated. The metal touch of the bottom surface 22a can be avoided. As a result, in the second annular surface 46 , generation of particles due to metal touch can be suppressed. For example, by applying the valve 2 to the semiconductor manufacturing apparatus, the defect rate of the semiconductor due to the mixing of particles. can be drastically reduced.

In addition, by forming the annular seat shape of the first and second sealing parts 48 and 50, the valve seat is removed within the range in which the above-described respective functions of the first and second sealing parts 48 and 50 can be exhibited. It becomes possible to form with the minimum required volume. Accordingly, even when a high-temperature fluid flows through the valve device 1 , the influence of thermal expansion can be more effectively suppressed, and the sealing property of the valve device 1 can be maintained more effectively.

In addition, since the first and second sealing parts 48 and 50 are formed of fluororubber, the heat resistance of the valve seat can be improved compared to the case of the resin material. Here, since the valve seat made of rubber generally has a higher coefficient of thermal expansion than that of resin, when it contracts after thermal expansion in contact with a high-temperature fluid, stress concentration tends to occur in the mounting portion of the valve seat relative to the inner periphery of the conventional inner disk.

However, in this embodiment, since such a mounting part does not exist, generation|occurrence|production of a stress concentration is suppressed. In particular, by forming the first and second sealing parts 48 and 50 with a fluororubber material such as the aforementioned 'Kalez (registered trademark)', a high-temperature fluid of 300° C. or higher is provided in the inlet and outlet passages 18 and 20. It is possible to realize the first and second sealing portions 48 and 50 that can withstand even when flowing. Accordingly, in this case, it is possible to realize the valve device 1, which ensures sealability and has heat resistance of 300°C or higher while suppressing the influence of thermal expansion.

Moreover, the protrusion part 52 formed in the outer peripheral part 34 has the protrusion height H in the thickness direction Y, and is formed. Thereby, when the bonnet nut 12 is tightened and the lower end 10a of the bonnet 10 is pressed by the pressing adapter 30, the tip of the protrusion 52 is in contact with the bottom surface 22a of the opposite recessed portion 22. .

By the abutment of the protrusion 52 , the outer periphery 34 is held on the bottom surface 22a of the concave portion 22 while sealing at the outer periphery 34 is achieved. At this time, by adjusting the protrusion height H in advance, the second sealing portion 50 is appropriately crushed between the bottom surface 22a of the concave portion 22 and the second sealing portion 50 in the second annular surface 46 . The sealing property between the 2 annular surface 46 and the bottom surface 22a of the recessed part 22 of the body 6 which opposes is ensured. In addition, generation of particles due to a metal touch between the second annular surface 46 and the bottom surface 22a of the concave portion 22 can be suppressed.

<Second embodiment>

5 shows a partial longitudinal sectional view of a valve 2 provided with a valve device 1 according to a second embodiment of the present invention. In addition, in the following description, the characteristic part of 2nd Embodiment is mainly demonstrated, and while attaching|subjecting the same code|symbol in drawing about the structure similar to 1st Embodiment, description may be abbreviate|omitted.

The valve (2) is a direct touch type metal having a diaphragm (4), a body (6), a valve body (8), a bonnet (10), a bonnet nut (12), a stem (14), an actuator (16), etc. It is a diaphragm valve. The body 6 has an inlet flow path 18 , an outlet flow path 20 , and a concave portion 22 formed thereon, and an inlet passage 18 and an outlet passage 20 are formed on the bottom surface 22a of the concave portion 22 . It is opened and the valve body 8 is accommodated. The valve device 1 is composed of a body 6 and a valve body 8 accommodated in a recess 22 of the body 6 .

6 shows an enlarged longitudinal sectional view of the region B of FIG. 5 of the valve device 1 . The valve body 8 includes a diaphragm 4, a first inner disk 60, a second inner disk 62, a lower end portion 10a of the bonnet 10, a lower diameter portion 14a of the stem 14, a spring ( 26) (refer to Fig. 5), a diaphragm pressing portion 28, and a pressing adapter 30 and the like. That is, the inner disk of this embodiment is comprised from the 2 member of the 1st inner disk 60 and the 2nd inner disk 62. As shown in FIG.

The first inner disk 60 is made of a metal material such as stainless steel, has an inner periphery 64 and an outer periphery 66 , and is mounted on the bottom surface 22a of the concave portion 22 . The second inner disk 62 is formed of the same metal material as the first inner disk 60 , is disposed radially inside the inner periphery 64 , and is placed on the outer periphery 66 of the first inner disk 60 in order The main diaphragm 4 and the pressing adapter 30 are arranged.

By inserting the bonnet 10 into the recess 22 and tightening the bonnet nut 12 , the lower end 10a of the bonnet 10 is pressed against the pressing adapter 30 . Thereby, the periphery 4b of the diaphragm 4 is pressed and held by the outer periphery 66 of the first inner disk 60 by the pressing adapter 30 .

7 is a longitudinal sectional view of the first inner disk 60 to which the second inner disk 62 is assembled, and FIG. 8 is a top view of the first inner disk 60 to which the second inner disk 62 is assembled. indicates. As shown in FIG. 6, the first inner disk 60 is accommodated in the concave portion 22, and at the same time, the inlet and outlet flow paths 18 and 20 are connected to the valve chamber by the inner periphery 64 and the outer periphery 66. Divide up to (36).

The second inner disk 62 has an annular shape in which the through hole 68 is formed, and the thickness of the first inner disk 60 is inside the inner periphery 64 of the first inner disk 60 in the radial direction X. It is arranged so as to be movable in the direction Y and detachably from the first inner disk 60 . On the inner circumferential surface of the inner peripheral portion 64 and the outer circumferential surface of the second inner disk 62, control portions 70 and 72 are respectively formed to protrude in the radial direction (X). When the pair of regulating portions 70 and 72 come into contact with each other, the movement of the second inner disk 62 to the valve chamber 36 side in the thickness direction Y is regulated.

9 shows a top view of the first inner disk 60 . A through hole 74 is formed inside the inner peripheral portion 64 of the first inner disk 60 . The through hole 74 communicates with the inlet passage 18 through the through hole 68 of the second inner disk 62 . Further, an intermediate annular portion 76 is formed between the inner periphery 64 and the outer periphery 66 . A plurality of through holes 78 are formed in the intermediate annular portion 76 along the circumferential direction thereof, and each of the through holes 78 communicates with the outlet flow passage 20 . Thereby, the inlet and outlet flow paths 18 and 20 are partitioned by the 1st inner disk 60 up to the valve chamber 36. As shown in FIG.

10 shows a top view of the second inner disk 62 . A first annular surface 80 is formed on the second inner disk 62 on the side facing the valve chamber 36 , that is, on the upper surface of the second inner disk 62 as seen in FIG. 7 . In addition, a second annular surface 82 is formed on the opposite side to the first annular surface 80 , that is, on the lower surface of the second inner disk 62 as seen in FIG. 7 . As shown in FIG. 6, the 2nd annular surface 82 is supported by the bottom surface 22a of the recessed part 22 via the 2nd sealing part 86 mentioned later.

The first and second annular surfaces 80 and 82 are flat surfaces forming an annular shape, and the first sealing portion 84 is attached to and held by the first annular surface 80 by bonding or the like. In the first sealing part 84, the diaphragm 4 is contacted and separated according to the blocking or communication of the inlet and outlet flow paths 18 and 20. Further, a second sealing portion 86 is disposed between the second annular surface 82 and the bottom surface 22a of the concave portion 22 . The second sealing portion 86 is held by being attached to the second annular surface 82 by bonding or the like.

The first and second sealing portions 84 and 86 each form an annular protrusion shape protruding from the first annular surface 80 and the second annular surface 82, that is, a protrusion, and both are fluorine It is made of rubber. More preferably, the first and second sealing parts 84 and 86 are fluororubber ( For example, it is formed of DuPont's fluororubber material "Kalez (registered trademark)").

In addition, the first inner disk 60 has a third annular surface 88 on the side facing the valve chamber 36 of the inner periphery 64 , that is, on the upper surface of the first inner disk 60 as seen in FIG. 7 . is formed In addition, a fourth annular surface 90 is formed on the opposite side to the third annular surface 88 , that is, on the lower surface of the first inner disk 60 as seen in FIG. 7 .

Further, as shown in Fig. 6, the third annular surface 88 is substantially in the radial direction X from the first annular surface 80 in a state in which the pair of regulating portions 70 and 72 are in contact with each other. is the same plane. Moreover, as shown in FIG. 7, the 2nd sealing part 86 is the same plane with the 4th annular surface 90 in the radial direction (X) in the state in which a pair of restrict|regulation parts 70 and 72 contact each other. It protrudes toward the bottom surface 22a of the recessed part 22 with the protrusion height H which becomes larger than this height. Accordingly, the fourth annular surface 90 is spaced apart from the bottom surface 22a of the concave portion 22 as shown in FIG. 6 .

Moreover, as shown in FIG. 7, the annular protrusion part 92 is formed in the outer peripheral part 66 to protrude toward the bottom surface 22a of the recessed part 22, ie, toward the lower side of FIG. This protrusion 92 is formed with the protrusion height H1 in the thickness direction Y. As shown in FIG. When the bonnet nut 12 is tightened and the lower end 10a of the bonnet 10 is pressed by the pressing adapter 30, the tip of the protrusion 92 comes into contact with the bottom surface 22a of the opposite recessed portion 22.

By the abutment of the protrusion 92 , the outer periphery 66 is held on the bottom surface 22a of the concave portion 22 while sealing at the outer periphery 66 is effected. Further, the second sealing portion 86 is appropriately pressed between the second annular surface 82 and the bottom surface 22a of the concave portion 22 .

As described above, in the valve device 1 of the present embodiment, in the thickness direction Y of the first inner disk 60 from the inside in the radial direction X of the inner peripheral portion 64 of the first inner disk 60 . A second inner disk 62 is provided so as to be movable. The first and second sealing portions 84 and 86 are respectively held on the first and second annular surfaces 80 and 82 of the second inner disk 62 .

The first sealing part 84 has a function as a valve seat part of a conventional valve seat by contacting/separating the diaphragm 4 according to the blocking or communication of the inlet and outlet flow paths 18 and 20 . On the other hand, the second sealing portion 86 has a function as an abutting portion in contact with the bottom surface 22a of the concave portion 22 of the conventional valve seat.

As described above, in the present embodiment, two valve seats in the valve device 1 are provided in separate portions called first and second annular surfaces 80 and 82 , respectively, called first and second sealing portions 84 and 86 . formed from different members. Thereby, the conventional awning-shaped mounting part of a valve seat becomes unnecessary.

By the absence of the mounting portion of the valve seat, occurrence of deformation, cracking, breakage, or the like of the valve seat caused by stress concentration of the mounting portion is suppressed. Further, since the valve seat can be formed in a small volume without a mounting portion, the influence of thermal expansion can be suppressed even when a high-temperature fluid flows through the valve device 1 . Therefore, the sealing property of the valve device 1 can be ensured.

Further, by providing the second sealing portion 86 having a function as an abutting portion to be in contact with the bottom surface 22a of the concave portion 22 , the second inner disk 62 and the concave portion 22 of the body 6 are provided. ) of the metal touch of the bottom surface 22a can be avoided. As a result, in the second annular surface 82 , generation of particles due to metal touch can be suppressed. For example, by applying the valve 2 to the semiconductor manufacturing apparatus, the semiconductor defect rate due to the mixing of particles. can be drastically reduced.

In addition, the second inner disk 62 is movable with respect to the first inner disk 60 in the thickness direction Y within a range regulated by the pair of regulating portions 70 and 72 . Accordingly, in the closed valve state where the diaphragm 4 is in contact with the first sealing portion 84 , the second sealing portion 86 is pressed against the bottom surface 22a of the concave portion 22 , and the second sealing portion 86 is ), it is possible to prevent the fluid from leaking into the outlet flow path 20 by being securely sealed.

In addition, the second inner disk 62 is detachable from the first inner disk 60 . Accordingly, when the first and second sealing parts 84 and 86 are deteriorated with aging, the second inner disk 62 provided with the new first and second sealing parts 84 and 86 can be replaced with new ones. can Accordingly, it is possible to provide the valve device 1 capable of maintaining sealing properties even after aging.

In addition, the first and second sealing portions 84 and 86 form protrusions protruding from the first annular surface 80 and the second annular surface 82, respectively, so that the first and second sealing portions 84 and 86 are formed. ), within the range in which each of the above-described functions can be exhibited, the valve seat can be formed with the minimum required volume. Accordingly, even when a high-temperature fluid flows through the valve device 1 , the influence of thermal expansion can be more effectively suppressed, and the sealing property of the valve device 1 can be maintained more effectively.

In particular, since the diaphragm 4 comes into contact easily at the time of valve closing by making the 1st sealing part 84 into a protrusion, the closing property of the valve 2 can be improved. In addition, since the first and second sealing portions 84 and 86 are formed of fluororubber, the heat resistance of the valve seat can be improved compared to the case of the resin material. Here, since the valve seat made of rubber generally has a higher coefficient of thermal expansion than that of resin, when it contracts after thermal expansion in contact with a high-temperature fluid, stress concentration tends to occur in the mounting portion of the valve seat relative to the inner periphery of the conventional inner disk.

However, in this embodiment, since such a mounting part does not exist, generation|occurrence|production of a stress concentration is suppressed. In particular, by forming the first and second sealing parts 84 and 86 with a fluororubber material such as 'Kalez (registered trademark)' described above, a high-temperature fluid of 300° C. or higher is applied to the inlet and outlet flow paths 18 and 20. It is possible to realize the first and second sealing portions 84 and 86 that can withstand even when flowing. Accordingly, in this case, it is possible to realize the valve device 1, which ensures sealability and has heat resistance of 300°C or higher while suppressing the influence of thermal expansion.

Further, the third annular surface 88 of the inner periphery 64 of the first inner disk 60 has a diameter with the first annular surface 80 in the state where the pair of regulating portions 70 and 72 are in contact with each other. substantially coplanar in direction (X). Thereby, excessive protrusion of the second inner disk 62 in the valve chamber 36 is prevented, the volume of the valve chamber 36 is secured, and the flow of the fluid in the valve chamber 36 is reduced by the second inner disk. (62) is not inhibited by

In addition, the second sealing portion 86 has a protrusion height greater than the height at which the pair of regulating portions 70 and 72 are in contact with each other and are flush with the fourth annular surface 90 in the radial direction (X). It protrudes toward the bottom surface 22a of the recessed part 22 by (H). Accordingly, since the fourth annular surface 90 is spaced apart from the bottom surface 22a of the concave portion 22 as shown in FIG. 6 , the fourth annular surface 90 and the bottom surface of the concave portion 22 . The generation of particles due to the metal touch in (22a) can be suppressed.

Moreover, the protrusion part 92 formed in the outer peripheral part 66 has the protrusion height H1 in the thickness direction Y, and is formed. Thereby, when the bonnet nut 12 is tightened and the lower end 10a of the bonnet 10 is pressed against the pressing adapter 30, the tip of the protrusion 92 hits the bottom surface 22a of the opposite recessed portion 22. touch

By the abutment of the protrusion 92 , the outer periphery 66 is held on the bottom surface 22a of the concave portion 22 while sealing at the outer periphery 66 is effected. At this time, by adjusting the protrusion height H1 in advance, the second sealing portion 86 is appropriately crushed between the bottom surface 22a of the concave portion 22 and the second sealing portion 86 in the second annular surface 82 . The sealing property between the two annular surface 82 and the bottom surface 22a of the recessed part 22 of the body 6 which opposes is ensured. Furthermore, generation of particles due to a metal touch between the second annular surface 82 and the bottom surface 22a of the concave portion 22 can be suppressed.

Although the description of each embodiment of this invention is complete|finished above, this invention is not limited to the said embodiment, Various changes can be made in the range which does not deviate from the meaning of this invention.

For example, in the first embodiment, if it is possible to ensure the flow rate of the fluid in the valve chamber 36 while giving the first and second sealing portions 48 and 50 the necessary functions in a relatively small volume, the first And the shape of the second sealing portion (48, 50) is not limited to the sheet shape. For example, at least the first sealing portion 48 may be formed as a protrusion protruding from the first annular surface 44 . Thereby, the diaphragm 4 can be reliably brought into contact only with the 1st sealing part 48 at the time of valve closing.

Also in the second embodiment, if it is possible to ensure the flow rate of the fluid in the valve chamber 36 while providing the necessary functions to the first and second sealing portions 84 and 86 with a relatively small volume, the first and second sealing portions 84 and 86 are similarly used in the second embodiment. 2 The shape of the sealing parts 84 and 86 is not limited to a protrusion. For example, the first and second sealing parts 84 and 86 may have an annular sheet shape, or a shape in which protrusions having a semicircular cross-section are provided with a step difference on the annular sheet shape.

Moreover, in each embodiment, the member which comprises the valve apparatus 1 and the valve 2 by the inner disk 24, the 1st and 2nd inner disks 60 and 62, and the 1st sealing parts 48 and 84 ) and the second sealing parts 50 and 86, but not limited to the above-described materials. Further, the valve device 1 is driven by an actuator 16 which is an air-operated drive mechanism, but is not limited thereto, and the valve device 1 is applicable to the valve 2 of various drive mechanisms.

1: valve device
4: diaphragm
4b: perimeter
6: Body
18: Entrance Euro (Euro)
20: Exit Euro (Euro)
22: recess
22a: bottom surface
24: inner disk
32, 64: inner periphery
34, 66: outer periphery
36: valve chamber
44, 80: first annular surface
46, 82: second annular surface
48, 84: first sealing part
50, 86: second sealing part
52, 92: protrusion
60: first inner disk (inner disk)
62: second inner disk (inner disk)
70, 72: Regulatory Department
88: third annular surface
90: fourth annular surface

Claims (8)

a body having a flow path, a concave portion in which the flow path is opened, and a valve chamber through which the flow path communicates in the concave portion;
an inner disk accommodated in the concave portion and partitioning the flow path up to the valve chamber by an inner periphery and an outer periphery;
a diaphragm blocking or communicating with the flow path in the valve chamber;
a first annular surface formed on a side of the inner periphery facing the valve chamber;
a second annular surface formed on a side opposite to the first annular surface of the inner periphery and supported on the bottom surface of the concave portion;
A first sealing part maintained on the first annular surface and contacting/separating the diaphragm according to blocking or communication of the flow path;
A second sealing portion disposed between the second annular surface and the bottom surface of the concave portion
A valve device comprising a. According to claim 1,
The first sealing portion and the second sealing portion form an annular seat shape, the valve device. According to claim 1,
The inner disk is
a first inner disk accommodated in the concave portion and partitioning the flow path up to the valve chamber by the inner periphery and the outer periphery;
a second inner disk disposed so as to be movable in the thickness direction of the first inner disk from the inside of the inner periphery in the radial direction and to be detachable at the same time
is composed of
the first annular surface is formed on a side of the second inner disk facing the valve chamber;
The second annular surface is formed on a side opposite to the first annular surface of the second inner disk and is supported on a bottom surface of the concave portion;
and a pair of regulating portions formed on the inner peripheral surface of the inner peripheral portion and the outer peripheral surface of the second inner disk and regulating movement of the second inner disk toward the valve chamber in the thickness direction by contacting each other; Device. 4. The method of claim 3,
The first sealing portion and the second sealing portion form a protrusion protruding from the first annular surface and the second annular surface, respectively. 5. The method of claim 3 or 4,
the first inner disk has a third annular surface formed on a side of the inner periphery facing the valve chamber;
and the third annular surface is substantially flush with the first annular surface in a radial direction with the pair of regulating portions abutting against each other. 6. The method according to any one of claims 3 to 5,
the first inner disk has a fourth annular surface formed on a side opposite to the first annular surface of the inner periphery and opposite to a bottom surface of the concave portion;
The second sealing portion protrudes toward the bottom surface of the concave portion with a protrusion height greater than a height at which the pair of regulating portions are in contact with each other in a radial direction and coplanar with the fourth annular surface. 7. The method according to any one of claims 1 to 6,
The first sealing portion and the second sealing portion are made of fluororubber. 8. The method according to any one of claims 1 to 7,
and the outer periphery has a protrusion protruding toward the bottom surface of the concave portion in the thickness direction of the inner disk.

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