WO2023035760A1 - 拉晶夹具、拉晶炉及拉晶方法 - Google Patents

拉晶夹具、拉晶炉及拉晶方法 Download PDF

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Publication number
WO2023035760A1
WO2023035760A1 PCT/CN2022/104708 CN2022104708W WO2023035760A1 WO 2023035760 A1 WO2023035760 A1 WO 2023035760A1 CN 2022104708 W CN2022104708 W CN 2022104708W WO 2023035760 A1 WO2023035760 A1 WO 2023035760A1
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WO
WIPO (PCT)
Prior art keywords
crystal pulling
connecting rod
crystal
mounting part
link
Prior art date
Application number
PCT/CN2022/104708
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English (en)
French (fr)
Inventor
朱永刚
李侨
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隆基绿能科技股份有限公司
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Publication of WO2023035760A1 publication Critical patent/WO2023035760A1/zh

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    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/30—Mechanisms for rotating or moving either the melt or the crystal
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02—Elements
    • C30B29/06—Silicon
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00—Technologies relating to the processing of minerals
    • Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57—Improving the yield, e-g- reduction of reject rates
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

Definitions

  • the present invention generally relates to the field of photovoltaic technology, and in particular to a crystal pulling fixture, a crystal pulling furnace and a crystal pulling method.
  • photovoltaic power generation technology as a green and environmental protection technology that can directly convert sunlight into electrical energy, has been more and more widely used.
  • Crystal pulling refers to adding bulk silicon material to the crucible of the crystal pulling furnace for melting, and then extending the seed crystal pulled by the tungsten wire rope into the melting In the liquid surface of the silicon material, the seeding, shouldering, and shouldering operations are carried out to pull out crystal rods with a certain thickness.
  • the production of ingots is developing in the direction of large heat field, large loading, and large size.
  • the safety of the crystal rod drawing process is an important problem to be solved urgently.
  • the Czochralski method is usually used to grow crystal rods, which only rely on the tungsten wire rope and the part of the diameter of the seed crystal seeding part to bear the load.
  • the tungsten wire rope can bear the load by increasing the diameter.
  • the present invention provides a crystal pulling fixture, which is applied to the secondary shoulder-turning crystal pulling process, including:
  • At least three claws are arranged around the axis of the through hole, and each claw has a clamping state and a releasing state in the horizontal direction;
  • a first link mechanism is connected between the second mounting part and each of the claws, and a second link mechanism is connected between the first mounting part and each of the first link mechanisms;
  • a link mechanism and the second link mechanism are at least used for positioning and matching the positioning part and the second mounting part upward, and the second mounting part moves upward with the crystal pulling rope for a predetermined distance , controlling each of the claws to switch synchronously from the releasing state to the clamping state.
  • the first link mechanism includes an adapter on which a first link and a second link are hinged, and the first link and the second link are vertical It is set that the ends of the first connecting rod and the second connecting rod away from the adapter are hingedly fitted with the same claw respectively, and the adapter is connected with the first connecting rod and the second
  • the hinge center of the connecting rod is located on a horizontal line, and the hinge centers of the claw and the first connecting rod and the second connecting rod are located on another horizontal line;
  • a third link is hinged on the adapter, and the hinge axis of the third link and the adapter is coaxial with the hinge axis of the second link and the adapter.
  • An end of the third connecting rod away from the adapter is hingedly fitted with the second mounting member, and a fourth connecting rod is hinged on the second connecting rod, and the fourth connecting rod is far away from the end of the second connecting rod.
  • One end is hingedly matched with the second mounting part, the third connecting rod and the fourth connecting rod are arranged horizontally, and the hinge center between the second mounting part and the third connecting rod and the fourth connecting rod Located on a vertical line, the hinge center of the third connecting rod and the adapter, and the hinge center of the second connecting rod and the fourth connecting rod are located on another vertical line;
  • the second link mechanism includes a fifth link, one end of the fifth link is hinged to the third link, and the other end is hinged to the first mounting member.
  • the adapter is provided with a first vertical guiding structure.
  • the adapter is provided with a protrusion perpendicular to the axis of the through hole, the protrusion extends away from the through hole, and the first vertical guide structure is arranged on the The end of the raised extension.
  • the first vertical guiding structure is a vertical guiding groove or a vertical guiding block.
  • a clamping holder is rotatably connected to the first installation part, and the clamping holder is used to position and cooperate with the second installation part in the vertical direction in the clamping state.
  • a positioning hook is provided at an end of the clip holder away from the first mounting part, a positioning surface is provided on the second mounting part, and the positioning hook is hooked to the positioning surface.
  • the second mounting part includes a first mounting plate and a second mounting plate arranged up and down, an intermediate connecting plate is fixedly connected between the first mounting plate and the second mounting plate, and the third One end of the connecting rod and the fourth connecting rod is hinged to the intermediate connecting plate;
  • the bottom surface of the first mounting plate is the positioning surface.
  • the side surface of the first installation plate is a first inclined surface inclined toward the center of the top surface of the first installation plate, and the positioning hook is provided with a second inclined surface that is in contact with the first inclined surface.
  • the present invention provides a crystal pulling furnace, comprising a furnace auxiliary chamber and the above-mentioned crystal pulling fixture;
  • a second vertical guiding structure is provided on the surface of the auxiliary chamber of the furnace body, a vertical positioning structure is provided below the second vertical guiding structure, and the first vertical guiding structure and the second vertical guiding structure The structure is vertically guided and matched, and the first vertical guiding structure is vertically positioned and matched with the vertical positioning structure.
  • the present invention provides a crystal pulling method using the above-mentioned crystal pulling furnace, comprising the following steps:
  • Seeding is carried out through the seed crystal connected with the pulling crystal rope, and the operations of putting shoulders and turning shoulders are carried out in sequence;
  • the shouldering operation is performed again to form a lower section under the necking section until the crystal pulling of the crystal ingot is completed, and the diameter reduction the diameter of the segment is smaller than the diameter of the following segment;
  • the positioning part of the crystal pulling rope is positioned upwardly to cooperate with the second mounting part, and the second mounting part moves upward with the crystal pulling rope for a predetermined time.
  • each of the jaws is switched from the release state to the clamping state synchronously, so as to be clamped on the necking section .
  • the above-mentioned solution provided by this application is applied to the secondary shoulder-turning crystal pulling process.
  • the top of the crystal rod pulled in the secondary shoulder-turning crystal pulling process has a necking structure, and the jaws of the crystal pulling fixture can be horizontally Clamping the small-diameter section of the necking structure, even if the seed crystal breaks during the crystal pulling process, since the jaws of the crystal pulling fixture are in a state of clamping the crystal ingot, at this time, the crystal pulling rope still holds the crystal rod through the jaws.
  • the ingot plays the role of pulling, so the ingot will not fall due to the fracture of the seed crystal. Therefore, it avoids the drop of the ingot due to the fracture of the seed crystal and damage to the quartz crucible, resulting in large economic losses, even The furnace platform exploded, causing safety accidents.
  • Fig. 1 is the schematic diagram of the ingot that the embodiment of the present invention provides
  • Fig. 2 is the front view of the crystal pulling jig provided by the embodiment of the present invention.
  • Fig. 3 is a perspective view of Fig. 2;
  • Fig. 4 is a perspective view of the first link mechanism provided by the embodiment of the present invention.
  • Fig. 5 is a perspective view of the part of the clamping holder provided by the embodiment of the present invention.
  • Fig. 6 is the front view of the pulling crystal rope provided by the embodiment of the present invention.
  • FIG. 7 is a schematic diagram of a crystal pulling furnace provided by another embodiment of the present invention.
  • Fig. 8 is a schematic structural view of the secondary chamber of the furnace body provided by the embodiment of the present invention.
  • Crystal pulling jig-3 the first mounting part-31, the second mounting part-32, the first mounting plate 321, the second slope 3211, the positioning surface-3212, the second mounting plate-322, the intermediate connecting plate-323, the second Two link mechanism-33, first link mechanism-34, second link-341, first link-342, connecting sleeve-3421, screw-3422, third link-343, fourth link- 344, the sixth connecting rod-345, the adapter-346, the first vertical guide structure-347, the claw-35, the clamping holder-36, the positioning hook-361, the first slope-362;
  • Ingot-6 upper section-61, necking section-62, lower section-63.
  • the embodiment of the present invention provides a crystal pulling fixture 3, which is applied to the secondary shoulder rotation crystal pulling process.
  • the secondary shoulder rotation crystal pulling process is Refers to, use the seed crystal 4 to seed the crystal, and then perform the operation of shouldering, turning the shoulder and equal diameter; then increase the rising speed of the seed crystal 4 to perform the necking operation, and then repeat the shoulder setting, turning the shoulder and equal diameter operation to complete the ingot 6 of drawing.
  • the crystal ingot 6 can be roughly divided into three sections, which are the upper section 61, the neck section 62 and the lower section 63, as shown in Figure 1.
  • the diameter of the necking section 62 is smaller than the upper section 61 and the lower section 63, so that it can be clamped in the necking section 62 by the crystal pulling fixture 3 provided by the present application to carry out the crystal pulling operation, preventing the crystal rod from being caused by the fracture of the seed crystal 4 6.
  • Dropping and smashing the quartz crucible will cause large economic losses, and even the furnace table will explode, causing safety accidents.
  • the crystal pulling fixture 3 includes:
  • the first mounting part 31 and the second mounting part 32 arranged at intervals up and down, the first mounting part 31 and the second mounting part 32 are coaxially provided with a through hole, and a hole for pulling upward is pierced in the through hole.
  • Crystal pulling rope 1, and said pulling rope 1 is provided with the positioning part 11 that can be positioned upwardly with the said second mounting part 32; It is limited, as long as it can be used to connect the first link mechanism 34 and the second link mechanism 33 described below.
  • the crystal pulling rope 1 is a tungsten wire rope.
  • the positioning part 11 is, for example but not limited to, a component whose diameter is larger than that of the crystal pulling rope 1. It can be in a spherical, ring-shaped or other structural form, as long as it is fixed on the crystal pulling rope 1, it is used to connect upward with the second mounting member 32. The positioning is coordinated so that during the upward pulling process of the crystal pulling rope 1 , the second mounting part 32 can be synchronously driven upward by the crystal pulling rope 1 .
  • the positioning part 11 is a spherical structure fixed on the crystal pulling rope 1 .
  • At least three claws 35 are arranged around the axis of the through hole, and each of the claws 35 has a clamping state and a release state in the horizontal direction; Four claws 35 are used to ensure the stability of clamping the ingot 6 .
  • other numbers of claws 35 can also be provided according to actual needs.
  • the claws 35 mentioned here have a clamping state and a release state in the horizontal direction, which means that in the horizontal direction, each claw 35 is in a clamping state when it moves toward a predetermined position.
  • each claw 35 is in a clamping state when it moves toward a predetermined position.
  • the back moves to a predetermined position, it is in a released state; in the clamped state, the necking section 62 of the ingot 6 can be clamped, and in the released state, the clamping of the ingot 6 can be released.
  • a first link mechanism 34 is connected between the second mounting part 32 and each of the claws 35 , and a first link mechanism 34 is connected between the first mounting part 31 and each of the first link mechanisms 34 .
  • a second link mechanism 33 is connected; the first link mechanism 34 and the second link mechanism 33 are at least used for upward positioning and cooperation between the positioning part 11 and the second mounting part 32 , and the After the second mounting part 32 moves upwards for a predetermined distance with the crystal pulling rope 1 , it controls each of the claws 35 to switch synchronously from the releasing state to the clamping state.
  • the above-mentioned solution provided by the present application is applied to the second shoulder-turning crystal-pulling process, and the top of the crystal rod 6 pulled in the second-round shoulder-turning crystal-pulling process has a necking structure, and the jaws 35 of the crystal pulling fixture 3 can be The small-diameter section of the necking structure is clamped in the horizontal direction.
  • the first link mechanism 34 includes an adapter 346, and the specific structure of the adapter 346 is not limited here, as long as it can be used to hinge the first link 342 and the second link 341 described below. and the third connecting rod 343.
  • a first connecting rod 342 and a second connecting rod 341 are hinged on the adapter 346, the first connecting rod 342 and the second connecting rod 341 are arranged vertically, and the first connecting rod 342 and the One end of the second connecting rod 341 away from the adapter 346 is hingedly fitted with the same claw 35 respectively, and the hinge center of the adapter 346 and the first connecting rod 342 and the second connecting rod 341 Located on a horizontal line, the hinge center of the claw 35 and the first connecting rod 342 and the second connecting rod 341 is located on another horizontal line, so that the adapter 346, the first connecting rod 342, the second connecting rod 341
  • the connecting rod 341 and the claw 35 form a first parallelogram bar mechanism, which enables the claw 35 to switch between the clamping state and the releasing state in the horizontal direction.
  • the length of the first connecting rod 342 or the second connecting rod 341 is adjustable.
  • the length of the first connecting rod 342 is adjustable, for example, the first connecting rod is adjusted by threaded connection.
  • the length of 342, such as the first connecting rod 342 includes connecting sleeves 3421 at both ends, at least one of the connecting sleeves 3421 is provided with internal threads, the screw rod 3422 is connected between the two connecting sleeves 3421, and the screw rod 3422 is screwed to the internal thread of the connecting sleeve 3421 , the length of the first connecting rod 342 can be adjusted by turning the screw rod 3422 .
  • the length of the first connecting rod 342 is adjustable, the dimensional accuracy requirements for the adapter 346, the first connecting rod 342, the second connecting rod 341 and the claw 35 can be reduced, and the processing cost can be reduced.
  • the length of the first connecting rod 342 so that the first parallelogram bar mechanism formed by the adapter 346, the first connecting rod 342, the second connecting rod 341 and the claw 35 is in a standard parallelogram state, to prevent movement There is a stuck problem in the process.
  • a third connecting rod 343 is hinged on the adapter 346, the hinge axis of the third connecting rod 343 and the adapter 346 is connected with the hinge of the second connecting rod 341 and the adapter 346.
  • the axes are coaxial, the end of the third connecting rod 343 away from the adapter 346 is hingedly fitted with the second mounting member 32, the second connecting rod 341 is hinged with a fourth connecting rod 344, the first The end of the four connecting rods 344 away from the second connecting rod 341 is hingedly fitted with the second mounting part 32, the third connecting rod 343 and the fourth connecting rod 344 are arranged horizontally, and the second mounting part 32
  • the hinge center of the third link 343 and the fourth link 344 is located on a vertical line, the hinge center of the third link 343 and the adapter 346, and the second link
  • the hinge center of the rod 341 and the fourth connecting rod 344 is located on another vertical line, so that the second connecting rod 341, the third connecting rod 343, the fourth connecting rod 3
  • the sixth connecting rod 345 can also be hinged between the adapter 346 and the second mounting part 32, and the sixth connecting rod 345 is used as a virtual constraint of the second parallelogram bar mechanism to improve the second The stability of parallelogram bar mechanism operation.
  • the second link mechanism 33 includes a fifth link 331 , one end of the fifth link 331 is hinged to the third link 343 , and the other end is hinged to the first mounting member 31 .
  • the first mounting part 31 After the crystal rope 1 pulls the second mounting part 32 and moves upward for a certain distance, the first mounting part 31, the first connecting rod 342, the second connecting rod 341, the third connecting rod 343, the fourth connecting rod 344, the first Under the action of gravity of the five connecting rods 331 and the adapter piece 346 , the claw 35 changes from the released state to the clamped state in the horizontal direction.
  • a counterweight 2 may be provided on the first mounting part 31 .
  • a first vertical guiding structure 347 is provided on the adapter piece 346 .
  • the first vertical guide structure 347 is used to vertically guide and cooperate with the second vertical guide structure 51 in the auxiliary chamber 5 of the crystal pulling furnace, so that the first vertical guide structure 347 and the second vertical guide
  • the adapter 346 is displaced vertically, but cannot be displaced in the horizontal direction, so that after the second mounting member 32 moves upward for a certain distance, the claw 35 changes from the released state In the clamping state, the necked section 62 of the ingot 6 is clamped.
  • the adapter 346 is provided with a protrusion perpendicular to the axis of the through hole, the protrusion extends away from the through hole, and the first vertical guide structure 347 is disposed on The end of the protrusion extension.
  • a first vertical guide structure 347 is set at the extension end of the protrusion, rather than a protrusion on the adapter 346, but a first vertical guide structure 347 is directly arranged on the side of the adapter 346, which can lower the adapter 346 overall dimensions.
  • the first vertical guide structure 347 is a vertical guide groove or a vertical guide block.
  • the cross-section of the vertical guide slot can be, for example, dovetail, T-shaped, right-angled trapezoid, etc.; the cross-section of the vertical guide block can also be, for example, dovetail, T-shaped, right-angled trapezoid, etc.
  • the first vertical guiding structure 347 is a T-shaped guiding block.
  • the first mounting part 31 is rotatably connected with a clamping holder 36, and the clamping holder 36 is used to vertically align with the second mounting part 32 in the clamping state. Positioning fit.
  • the five connecting rods 331 drive the first link mechanism 34 to change the position of the jaws 35, so that the jaws 35 can be kept clamping the necking section 62 of the crystal ingot 6, preventing the jaws 35 from accidentally disengaging and causing The problem of crystal ingot 6 falling occurs.
  • the clamping holder 36 is provided with a positioning hook 361 at one end away from the first mounting part 31, and the second mounting part 32 is provided with a positioning surface 3212, and the positioning hook 361 is hooked on The positioning surface 3212 . Under the action of gravity, the position between the first mounting part 31 and the second mounting part 32 is kept relatively fixed.
  • the second mounting part 32 includes a first mounting plate 321 and a second mounting plate 322 arranged up and down, and an intermediate connecting plate is fixedly connected between the first mounting plate 321 and the second mounting plate 322 323, one end of the third connecting rod 343 and the fourth connecting rod 344 is hinged to the intermediate connecting plate 323;
  • the bottom surface of the first mounting plate 321 is the positioning surface 3212 .
  • the side of the first mounting plate 321 is a first slope 362 inclined toward the center of the top surface of the first mounting plate 321, and the positioning hook 361 is provided with a contact fit with the first slope 362.
  • the second slope 3211 The first slant 362 and the second slant 3211 are in contact with each other to guide each other.
  • the first mounting part 31 moves downward under the action of gravity.
  • the positioning hook 361 slides downward along the second inclined surface 3211. At the same time, the positioning hook 361 rotates outward around its hinged position.
  • the locating hook 361 rotates inward, so that the locating hook 361 is hooked on the locating surface 3212, so as to realize locking of the clamping state.
  • the present invention provides a crystal pulling furnace, including a furnace auxiliary chamber 5 and the above-mentioned crystal pulling fixture 3;
  • a second vertical guide structure 51 is provided on the inner surface of the auxiliary chamber 5 of the furnace body, and a vertical positioning structure 52 is provided below the second vertical guide structure 51.
  • the first vertical guide structure 347 is connected to the The second vertical guide structure 51 is vertically guided and matched, and the first vertical guide structure 347 is vertically positioned and matched with the vertical positioning structure 52 .
  • the present invention provides a crystal pulling method using the above-mentioned crystal pulling furnace, comprising the following steps:
  • Seeding is carried out through the seed crystal connected with the pulling crystal rope, and the operations of putting shoulders and turning shoulders are carried out in sequence;
  • the waiting operation can be performed to form a cylindrical section in the upper section to ensure that the upper section has greater strength.
  • the shouldering operation is performed again to form a lower section under the necking section until the crystal pulling of the crystal ingot is completed, and the diameter reduction the diameter of the segment is smaller than the diameter of the following segment;
  • the positioning part of the crystal pulling rope is positioned upwardly to cooperate with the second mounting part, and the second mounting part moves upward with the crystal pulling rope for a predetermined time.
  • each of the jaws is switched from the release state to the clamping state synchronously, so as to be clamped on the necking section .
  • the crystal pulling furnace includes a furnace auxiliary chamber 5, which may be a cylindrical structure, and four second vertical shafts are uniformly arranged on the inner surface of the furnace body auxiliary chamber 5.
  • the second vertical guide structure 51 adopts a T-shaped slot, and a vertical positioning structure 52 is arranged below the second vertical guide structure 51.
  • the vertical positioning structure 52 can be located in the second vertical direction.
  • a circle of protrusions below the guiding structure 51 and the vertical positioning structure 52 are used to block the downward movement of the first vertical guiding structure 347 described below.
  • a crystal pulling jig 3 is arranged in the auxiliary chamber 5 of the furnace body.
  • the crystal pulling jig 3 includes a first mounting part 31 and a second mounting part 32 arranged at intervals up and down.
  • the first mounting part 31 may be a plate-shaped member, and the second mounting part
  • the component 32 includes a first mounting plate 321 and a second mounting plate 322 arranged up and down, and an intermediate connecting plate 323 is fixedly connected between the first mounting plate 321 and the second mounting plate 322 .
  • the first mounting part 31 and the second mounting part 32 are coaxially provided with a through hole, correspondingly, the through hole passes through the first mounting plate 321 and the second mounting plate 322;
  • the crystal pulling rope 1 can be a tungsten wire rope, and the lower end of the crystal pulling rope 1 is used to connect the seed crystal 4 with a weight for seeding.
  • each claw 35 is uniformly arranged around the axis of the through hole, and each claw 35 has a clamping state and a releasing state in the horizontal direction.
  • a first link mechanism 34 is connected between the second mounting part 32 and each claw 35
  • a second link mechanism 33 is connected between the first mounting part 31 and each first link mechanism 34 .
  • the first link mechanism 34 includes an adapter 346 on which a first link 342 and a second link 341 are hinged, and the first link 342 and the second link 341 are vertically connected to each other. It is provided that the ends of the first connecting rod 342 and the second connecting rod 341 away from the adapter 346 are hingedly fitted with the same claw 35 respectively, and the adapter 346 and the first connecting rod 342 and the hinge center of the second connecting rod 341 are located on a horizontal line, and the hinge centers of the claw 35 and the first connecting rod 342 and the second connecting rod 341 are located on another horizontal line;
  • the connector 346 , the first connecting rod 342 , the second connecting rod 341 and the claw 35 form a first parallelogram bar mechanism, which enables the claw 35 to switch between the clamping state and the releasing state in the horizontal direction.
  • the length of the first connecting rod 342 is adjustable.
  • the length of the first connecting rod 342 is adjusted by threaded connection.
  • the first connecting rod 342 includes connecting sleeves 3421 at both ends, at least one of which is Internal threads are arranged in the connecting sleeves 3421, and screw rods 3422 are connected between the two connecting sleeves 3421.
  • the screw rods 3422 are screwed to the internal threads of the connecting sleeves 3421, and the length of the first connecting rod 342 can be adjusted by rotating the screw rods 3422.
  • the length of the first connecting rod 342 is adjustable, the requirements on the dimensional accuracy of the adapter 346 , the first connecting rod 342 , the second connecting rod 341 and the claw 35 can be reduced, and the processing cost can be reduced.
  • a third link 343 is hinged on the adapter 346, and the hinge axis of the third link 343 and the adapter 346 is the same as the hinge axis of the second link 341 and the adapter 346.
  • shaft the end of the third connecting rod 343 away from the adapter 346 is hingedly matched with the middle connecting plate 323 of the second mounting member 32, and the second connecting rod 341 is hinged with a fourth connecting rod 344 , the end of the fourth connecting rod 344 away from the second connecting rod 341 is hingedly fitted with the middle connecting plate 323 of the second mounting member 32, and the third connecting rod 343 and the fourth connecting rod 344 are horizontal
  • the hinge centers of the middle connecting plate 323 of the second mounting member 32 and the third link 343 and the fourth link 344 are located on a vertical line, and the third link 343 and the fourth link 344 are located on a vertical line.
  • the hinge center of the adapter 346 and the hinge center of the second link 341 and the fourth link 344 are located on another vertical line, so that the second link 341, the third link 343, the second link 344
  • the four connecting rods 344 and the middle connecting plate 323 of the second mounting part 32 form a second parallelogram bar mechanism, and the second parallelogram bar mechanism is used to drive the first parallelogram bar mechanism to move, so that the claws 35 move in the horizontal direction Switch between clamped state and released state.
  • a sixth connecting rod 345 is hinged between the adapter 346 and the middle connecting plate 323 of the second mounting part 32, and the sixth connecting rod 345 serves as a virtual constraint of the second parallelogram bar mechanism to improve the The stability of the operation of the two-parallelogram bar mechanism.
  • the second link mechanism 33 includes a fifth link 331 , one end of the fifth link 331 is hinged to the third link 343 , and the other end is hinged to the first mounting member 31 .
  • a protrusion perpendicular to the axis of the through hole is provided on the adapter 346, the protrusion extends away from the through hole, and a first vertical guiding structure 347 is provided at the end of the extension of the protrusion.
  • the first vertical guiding structure 347 adopts a T-shaped guiding block, and the T-shaped guiding block is used for vertical guiding cooperation with the above-mentioned T-shaped slot.
  • a clamping holder 36 is rotatably connected to the first mounting member 31, and the end of the clamping holder 36 away from the first mounting member 31 is provided with a positioning hook 361.
  • the bottom surface of the first mounting plate 321 is a positioning surface 3212 for positioning.
  • the hook 361 can be hooked on the positioning surface 3212 .
  • the side of the first mounting plate 321 is a first inclined surface 362 inclined toward the center of the top surface of the first mounting plate 321, and the positioning hook 361 is provided with a second inclined surface 3211 that is in contact with the first inclined surface 362.
  • An inclined surface 362 contacts with the second inclined surface 3211 .
  • the crystal pulling jig 3 Before performing crystal pulling, the crystal pulling jig 3 is manually put into the auxiliary chamber 5 of the furnace body, and the T-shaped guide block on the adapter 346 as the first vertical guide structure 347 is inserted into the furnace body. In the T-shaped groove as the second vertical guide structure 51 in the auxiliary chamber 5 of the body, slide down onto the vertical positioning structure 52 to prevent the crystal pulling jig 3 from continuing to move downward. At this time, the claw 35 of the crystal pulling jig 3 is in a released state.
  • the crystal pulling furnace is heated to melt the silicon material in the crucible in the crystal pulling furnace, and the seed crystal 4 is released downward through the crystal pulling rope 1 to the molten silicon material for seeding, and then the shoulders, shoulders and shoulders are sequentially carried out.
  • Isometric operation after the isometric operation forms the upper section 61 of the first predetermined length of the crystal ingot 6, increase the speed of pulling the crystal pulling rope 1, that is, increase the rising speed of the seed crystal 4 to carry out the necking operation, so that A narrowing section 62 is formed under the upper section 61, and the diameter of the narrowing section 62 is smaller than the diameter of the upper section 61; according to actual needs, the equal-diameter operation may not be used here, and correspondingly, the first crystal ingot 6 is formed after the shoulder turning operation.
  • the necking operation is performed after the upper section 61 of a predetermined length. After the necking operation forms the necking section 62 of the second predetermined length of the crystal ingot 6, the shouldering operation is performed again to form the lower section 63 under the necking section 62 until the crystal pulling of the crystal ingot 6 is completed, And the diameter of the reduced diameter section 62 is smaller than the diameter of the lower section 63 .
  • the lower section 63 of the required ingot is substantially cylindrical, after the shouldering operation again, shoulder turning and equal-diameter operations are also required.
  • the Jingsheng motor pulls the crystal rod 6 through the crystal rope 1 and continues to rise.
  • the crystal rope 1 is drawn to the third predetermined length, that is, after the crystal rope 1 is pulled to the third predetermined length, the crystal rope 1 is used as the positioning part 11
  • the spherical part and the second mounting plate 322 of the second mounting part 32 are positioned and matched in the vertical direction, that is, after the spherical part contacts the second mounting plate 322, the second mounting part 32 will drive the first linkage mechanism 34 to follow The pulling crystal rope 1 moves upwards. After rising for a certain distance, the first vertical guiding structure 347 is separated from the second vertical guiding structure 51.
  • the structure of the first connecting rod 342 and the structure of the second connecting rod 341 cooperate As a function, the driving claw 35 has a clamping state and a releasing state in the horizontal direction, so as to clamp the constricted section 62 of the crystal ingot 6 .
  • the positioning hook 361 of the holding member 36 is hooked on the bottom surface of the first mounting plate 321 as the positioning surface 3212 to prevent the claw 35 from being accidentally released.
  • the specific values of the first predetermined length, the second predetermined length, and the third predetermined length can be determined according to actual needs, and are not limited here
  • the crystal rod 6 After the crystal rod 6 is drawn, the crystal rod 6 is lowered into the crystal extraction car, the crystal pulling rope 1 is loosened, the claws 35 and the clamping holder 36 are not stressed at this time, and the clamping holder 36 can be quickly opened. In order to separate it from the positioning surface 3212, the jaws 35 can change from a clamped state to a released state to separate from the ingot 6, so that personnel can cut off the seed crystal 4 and complete the transportation of the ingot 6.
  • first and second are used for descriptive purposes only, and cannot be interpreted as indicating or implying relative importance or implicitly specifying the quantity of indicated technical features. Thus, a feature defined as “first” and “second” may explicitly or implicitly include one or more of these features. In the description of the present invention, unless otherwise specified, "plurality" means two or more.
  • the device embodiments described above are only illustrative, and the units described as separate components may or may not be physically separated, and the components shown as units may or may not be physical units, that is, they may be located in One place, or it can be distributed to multiple network elements. Part or all of the modules can be selected according to actual needs to achieve the purpose of the solution of this embodiment. It can be understood and implemented by those skilled in the art without any creative effort.
  • references herein to "one embodiment,” “an embodiment,” or “one or more embodiments” means that a particular feature, structure, or characteristic described in connection with the embodiment is included in at least one embodiment of the present invention. Additionally, please note that examples of the word “in one embodiment” herein do not necessarily all refer to the same embodiment.
  • any reference signs placed between parentheses shall not be construed as limiting the claim.
  • the word “comprising” does not exclude the presence of elements or steps not listed in a claim.
  • the word “a” or “an” preceding an element does not exclude the presence of a plurality of such elements.
  • the invention can be implemented by means of hardware comprising several distinct elements, and by means of a suitably programmed computer. In a unit claim enumerating several means, several of these means can be embodied by one and the same item of hardware.
  • the use of the words first, second, and third, etc. does not indicate any order. These words can be interpreted as names.

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Abstract

一种拉晶夹具、拉晶炉及拉晶方法，其中，拉晶夹具应用于二次转肩拉晶工艺，包括上下间隔设置的第一安装件和第二安装件，第一安装件和第二安装件上同轴设置有通孔，通孔内穿设有用于向上拉晶的拉晶绳，且所述拉晶绳上设置有能与第二安装件向上定位配合的定位部；围绕通孔的轴线设置有至少三个卡爪，各卡爪在水平方向上具有夹持状态和释放状态；第一连杆机构和第二连杆机构，至少用于在定位部与第二安装件向上定位配合，且第二安装件随所述拉晶绳向上运动预定距离后，控制各卡爪由释放状态同步切换为夹持状态。上述方案用于在拉晶过程中对晶棒进行夹持，防止晶棒掉落，砸坏石英坩埚，造成较大的经济损失及引起安全事故的问题。

Description

拉晶夹具、拉晶炉及拉晶方法
本申请要求在2021年09月09日提交中国专利局、申请号为202111060051.X、发明名称为“拉晶夹具、拉晶炉及拉晶方法”的中国专利申请的优先权，其全部内容通过引用结合在本申请中。
技术领域
本发明一般涉及光伏技术领域，具体涉及一种拉晶夹具、拉晶炉及拉晶方法。
背景技术
随着化石能源的日益紧缺和环保意识的增强，光伏发电技术作为一种可以直接将太阳光转化为电能的绿色环保技术，得到了越来越广泛的应用。
在进行光伏电池板制作的工艺中，拉晶是首要的工艺，拉晶是指将块状硅料加入到拉晶炉的坩埚中进行融化，然后通过钨丝绳牵引的籽晶伸入到熔融的硅料液面中进行引晶，放肩，转肩作业，以拉取具有一定粗度的晶棒。
随着光伏行业竞争的日益加剧，晶棒的制作朝着大热场、大装料、大尺寸方向发展。随着晶棒尺寸的增大，晶棒拉制过程中的安全性是一个亟待解决的重要问题。目前，通常采用的直拉法生长晶棒，其仅仅靠钨丝绳以及籽晶引晶部位直径φ4mm-5mm的部分承重，当晶棒重量上升时，钨丝绳承重可通过增加直径的方式进行改善解决，但是，籽晶因工艺需求，暂时无法提升引晶位置的籽晶直径；特别是当晶棒重量上升到400kg以上，直径放大到300mm以上时，晶棒晶转时，偏摆放大，籽晶更容易扭曲，造成籽晶径向受力而断裂，引起晶棒掉落，砸坏石英坩埚，造成较大的经济损失，甚至是炉台爆炸，引起安全事故。
发明内容
鉴于现有技术中的上述缺陷或不足，期望提供一种拉晶夹具、拉晶炉及拉晶方法，用于在拉晶过程中对晶棒进行夹持，防止晶棒掉落，砸坏石英坩埚，造成较大的经济损失及引起安全事故的问题。
第一方面，本发明提供一种拉晶夹具，应用于二次转肩拉晶工艺，包括：
上下间隔设置的第一安装件和第二安装件，所述第一安装件和所述第二安装件上同轴设置有通孔，所述通孔内穿设有用于向上拉晶的拉晶绳，且所述拉晶绳上设置有能与所述第二安装件向上定位配合的定位部；
围绕所述通孔的轴线设置有至少三个卡爪，各所述卡爪在水平方向上具有夹持状态和释放状态；
所述第二安装件与各所述卡爪之间连接有第一连杆机构，所述第一安装件与各所述第一连杆机构之间连接有第二连杆机构；所述第一连杆机构和所述第二连杆机构，至少用于在所述定位部与所述第二安装件向上定位配合，且所述第二安装件随所述拉晶绳向上运动预定距离后，控制各所述卡爪由所述释放状态同步切换为所述夹持状态。
作为可实现方式，所述第一连杆机构包括转接件，所述转接件上铰接有第一连杆和第二连杆，所述第一连杆和所述第二连杆竖直设置，所述第一连杆和所述第二连杆远离所述转接件的一端分别与同一所述卡爪铰接配合，所述转接件与所述第一连杆和所述第二连杆的铰接中心位于一水平线上，所述卡爪与所述第一连杆和所述第二连杆的铰接中心位于另一水平线上；
所述转接件上铰接有第三连杆，所述第三连杆和所述转接件的铰接轴线，与所述第二连杆和所述转接件的铰接轴线同轴，所述第三连杆远离所述转接件的一端与所述第二安装件铰接配合，所述第二连杆上铰接有第四连杆，所述第四连杆远离所述第二连杆的一端与所述第二安装件铰接配合，所述第三连杆及所述第四连杆水平设置，所述第二安装件与所述第三连杆和所述第四连杆的铰接中心位于一竖直线上，所述第三连杆与所述转接件的铰接中心，和所述第二连杆与所述第四连杆的铰接中心位于另一竖直线上；
所述第二连杆机构包括第五连杆，所述第五连杆的一端与所述第三连杆铰接，另一端与所述第一安装件铰接。
作为可实现方式，所述转接件上设置有第一竖向引导结构。
作为可实现方式，所述转接件上设置有垂直于所述通孔轴线的凸起，所述凸起向远离所述通孔的方向延伸，所述第一竖向引导结构设置于所 述凸起延伸的末端。
作为可实现方式，所述第一竖向引导结构为竖向导向槽或竖向导向块。
作为可实现方式，所述第一安装件上转动连接有夹持保持件，所述夹持保持件用于在所述夹持状态，与所述第二安装件在竖直方向上定位配合。
作为可实现方式，所述夹持保持件远离所述第一安装件的一端设置有定位钩，所述第二安装件上设置有定位面，所述定位钩钩接在所述定位面。
作为可实现方式，所述第二安装件包括上下设置第一安装板和第二安装板，所述第一安装板和所述第二安装板之间固定连接有中间连接板，所述第三连杆及所述第四连杆的一端与所述中间连接板铰接；
所述第一安装板的底面为所述定位面。
作为可实现方式，所述第一安装板的侧面为朝向所述第一安装板顶面中心倾斜的第一斜面，所述定位钩上设置有与所述第一斜面接触配合的第二斜面。
第二方面，本发明提供一种拉晶炉，包括炉体副室以及上述的拉晶夹具；
所述炉体副室内表面上设置有第二竖向引导结构，所述第二竖向引导结构的下方设置有竖向定位结构，所述第一竖向引导结构与所述第二竖向引导结构竖向引导配合，且所述第一竖向引导结构与竖向定位结构竖向定位配合。
第三方面，本发明提供一种采用上述拉晶炉的拉晶方法，包括以下步骤：
通过与所述拉晶绳连接的籽晶进行引晶，并顺次进行放肩、转肩操作；
在转肩操作形成晶棒第一预定长度的上段后，提高所述拉晶绳的收绳速度进行缩颈操作，以在所述上段下形成缩颈段，缩径段的直径小于上段的直径；
在缩颈操作形成所述晶棒第二预定长度的缩颈段后，再次进行放肩操作，以在所述缩颈段下形成下段，直至所述晶棒拉晶结束，且所述缩径段的直径小于下段的直径；
其中，所述拉晶绳收绳第三预定长度后，所述拉晶绳的定位部与所述第二安装件向上定位配合，且所述第二安装件随所述拉晶绳向上运动预定距离，所述第一竖向引导结构与所述第二竖向引导结构分离后，各所述卡爪由所述释放状态同步切换为所述夹持状态，以夹持在所述缩颈段。
本申请提供的上述方案，应用于二次转肩拉晶工艺，二次转肩拉晶工艺中所拉取的晶棒，其顶部具有缩颈结构，拉晶夹具的卡爪可在水平方向上对缩颈结构的小径段进行夹持，即使在拉晶的过程中，籽晶发生断裂，由于拉晶夹具的卡爪对晶棒处于夹持状态，此时，拉晶绳通过卡爪仍对晶棒起到牵拉的作用，因此晶棒不会因籽晶的断裂而掉落，因此，避免了因籽晶断裂造成晶棒掉落砸坏石英坩埚，造成较大的经济损失，甚至是炉台爆炸，引起安全事故的问题发生。
上述说明仅是本发明技术方案的概述，为了能够更清楚了解本发明的技术手段，而可依照说明书的内容予以实施，并且为了让本发明的上述和其它目的、特征和优点能够更明显易懂，以下特举本发明的具体实施方式。
附图说明
为了更清楚地说明本发明实施例或现有技术中的技术方案，下面将对实施例或现有技术描述中所需要使用的附图作一简单地介绍，显而易见地，下面描述中的附图是本发明的一些实施例，对于本领域普通技术人员来讲，在不付出创造性劳动的前提下，还可以根据这些附图获得其他的附图。
通过阅读参照以下附图所作的对非限制性实施例所作的详细描述，本申请的其它特征、目的和优点将会变得更明显：
图1为本发明实施例提供的晶棒的示意图；
图2为本发明实施例提供的拉晶夹具的主视图；
图3为图2的立体图；
图4为本发明实施例提供的第一连杆机构部位的立体图；
图5为本发明实施例提供的夹持保持件部位的立体图；
图6为本发明实施例提供的拉晶绳的主视图；
图7为本发明另一实施例提供的拉晶炉的示意图；
图8为本发明实施例提供的炉体副室的结构示意图。
附图标记说明：
拉晶绳-1，定位部-11；
配重件-2；
拉晶夹具-3，第一安装件-31，第二安装件-32，第一安装板321，第二斜面3211，定位面-3212，第二安装板-322，中间连接板-323，第二连杆机构-33，第一连杆机构-34，第二连杆-341，第一连杆-342，连接套-3421，螺杆-3422，第三连杆-343，第四连杆-344，第六连杆-345，转接件-346，第一竖向引导结构-347，卡爪-35，夹持保持件-36，定位钩-361，第一斜面-362；
籽晶-4；
炉体副室-5，第二竖向引导结构-51，竖向定位结构-52；
晶棒-6，上段-61，缩颈段-62，下段-63。
具体实施例
下面结合附图和实施例对本申请作进一步的详细说明。可以理解的是，此处所描述的具体实施例仅仅用于解释相关发明，而非对该发明的限定。另外还需要说明的是，为了便于描述，附图中仅示出了与发明相关的部分。
需要说明的是，在不冲突的情况下，本申请中的实施例及实施例中的特征可以相互组合。下面将参考附图并结合实施例来详细说明本申请。
第一方面，如图1-图6所示，本发明实施例提供一种拉晶夹具3，应用于二次转肩拉晶工艺，本领域技术人员可以理解，二次转肩拉晶工艺是指，利用籽晶4进行引晶，然后进行放肩、转肩及等径操作；随后提高籽晶4上升速度进行缩颈操作，之后重复放肩、转肩及等径操作以完成晶棒6的拉制。采用二次转肩拉晶工艺，其可以在晶棒6的上端形成缩颈结构，也即晶棒6大体可以分为三段，依次为上段61、缩颈段62 及下段63，如图1所示；缩颈段62的直径小于上段61及下段63，这样可以通过本申请提供的拉晶夹具3夹持在缩颈段62，以进行拉晶作业，防止因籽晶4断裂造成晶棒6掉落砸坏石英坩埚，造成较大的经济损失，甚至是炉台爆炸，引起安全事故的问题发生。
具体地，另参见图2-图6所示，该拉晶夹具3包括：
上下间隔设置的第一安装件31和第二安装件32，所述第一安装件31和所述第二安装件32上同轴设置有通孔，所述通孔内穿设有用于向上拉晶的拉晶绳1，且所述拉晶绳1上设置有能与所述第二安装件32向上定位配合的定位部11；这里不对第一安装件31和第二安装件32的具体结构进行限定，其只要可以用于连接下述的第一连杆机构34和第二连杆机构33即可。
例如但不限于拉晶绳1为钨丝绳。
由于拉晶绳1上设置有能与所述第二安装件32向上定位配合的定位部11，那么在拉晶绳1向上拉动的过程中，可以同步的带动第二安装件32向上运动。定位部11例如但不限于为直径大于拉晶绳1直径的部件，其可以为球状、环状等结构形式，只要是固定在拉晶绳1上，用于与所述第二安装件32向上定位配合，以在拉晶绳1向上拉动的过程中，可以由拉晶绳1同步的带动第二安装件32向上运动即可。该示例中，定位部11为固定在拉晶绳1上的球状结构。
围绕所述通孔的轴线设置有至少三个卡爪35，各所述卡爪35在水平方向上具有夹持状态和释放状态；该示例中，围绕所述通孔的轴线设置有均匀设置了四个卡爪35，以保证对晶棒6夹持的稳定性。当然，根据实际的需要，还可以设置其它数量的卡爪35。
这里所述说的卡爪35在水平方向上具有夹持状态和释放状态，是指在水平方向上，各个卡爪35相向运动至预定位置则处于夹持状态，相反地，各个卡爪35相背运动至预定位置则处于释放状态；处于夹持状态时，可以对晶棒6的缩颈段62进行夹持，处于释放状态时，释放对晶棒6的夹持。
作为可实现的方式，所述第二安装件32与各所述卡爪35之间连接 有第一连杆机构34，所述第一安装件31与各所述第一连杆机构34之间连接有第二连杆机构33；所述第一连杆机构34和所述第二连杆机构33，至少用于在所述定位部11与所述第二安装件32向上定位配合，且所述第二安装件32随所述拉晶绳1向上运动预定距离后，控制各所述卡爪35由所述释放状态同步切换为所述夹持状态。
本申请提供的上述方案，应用于二次转肩拉晶工艺，二次转肩拉晶工艺中所拉取的晶棒6，其顶部具有缩颈结构，拉晶夹具3的卡爪35可在水平方向上对缩颈结构的小径段进行夹持，即使在拉晶的过程中，籽晶4发生断裂，由于拉晶夹具3的卡爪35对晶棒6处于夹持状态，此时，拉晶绳1通过卡爪35仍对晶棒6起到牵拉的作用，因此晶棒6不会因籽晶4的断裂而掉落，因此，避免了因籽晶4断裂造成晶棒6掉落砸坏石英坩埚，造成较大的经济损失，甚至是炉台爆炸，引起安全事故的问题发生。
作为可实现方式，所述第一连杆机构34包括转接件346，这里不对转接件346的具体结构进行限定，其只要可以用于铰接下述第一连杆342、第二连杆341及第三连杆343即可。所述转接件346上铰接有第一连杆342和第二连杆341，所述第一连杆342和所述第二连杆341竖直设置，所述第一连杆342和所述第二连杆341远离所述转接件346的一端分别与同一所述卡爪35铰接配合，所述转接件346与所述第一连杆342和所述第二连杆341的铰接中心位于一水平线上，所述卡爪35与所述第一连杆342和所述第二连杆341的铰接中心位于另一水平线上，这样，转接件346、第一连杆342、第二连杆341及卡爪35形成了第一平行四边形杆机构，可以使得卡爪35在水平方向上进行夹持状态和释放状态的切换。
为了在装配时，便于调整，第一连杆342或第二连杆341的长度可调，该示例中采用第一连杆342的长度可调，例如采用螺纹连接的方式来调节第一连杆342的长度，如第一连杆342包括两端的连接套3421，至少其中一个连接套3421内设置内螺纹，两个连接套3421之间连接螺杆3422，螺杆3422与连接套3421的内螺纹螺接，通过转动螺杆3422可以调节第一连杆342的长度。由于第一连杆342的长度可调，可以降低 对转接件346、第一连杆342、第二连杆341及卡爪35的尺寸精度要求，降低加工成本。通过调节第一连杆342的长度使得转接件346、第一连杆342、第二连杆341及卡爪35所形成的第一平行四边形杆机构处于标准的平行四边形状态，以防止在运动过程中出现卡滞的问题。
所述转接件346上铰接有第三连杆343，所述第三连杆343和所述转接件346的铰接轴线，与所述第二连杆341和所述转接件346的铰接轴线同轴，所述第三连杆343远离所述转接件346的一端与所述第二安装件32铰接配合，所述第二连杆341上铰接有第四连杆344，所述第四连杆344远离所述第二连杆341的一端与所述第二安装件32铰接配合，所述第三连杆343及所述第四连杆344水平设置，所述第二安装件32与所述第三连杆343和所述第四连杆344的铰接中心位于一竖直线上，所述第三连杆343与所述转接件346的铰接中心，和所述第二连杆341与所述第四连杆344的铰接中心位于另一竖直线上，这样，第二连杆341、第三连杆343、第四连杆344及第二安装件32形成了第二平行四边形杆机构，第二平行四边形杆机构用于驱动第一平行四边形杆机构运动，以使得卡爪35在水平方向上进行夹持状态和释放状态的切换。
当然，在其它的示例中，在转接件346与第二安装件32之间还可以铰接第六连杆345，第六连杆345作为第二平行四边形杆机构的虚约束，以提高第二平行四边形杆机构运行的稳定性。
所述第二连杆机构33包括第五连杆331，所述第五连杆331的一端与所述第三连杆343铰接，另一端与所述第一安装件31铰接。在拉晶绳1拉着第二安装件32向上运动一定距离后，在第一安装件31、第一连杆342、第二连杆341、第三连杆343、第四连杆344、第五连杆331及转接件346重力的作用下，卡爪35在水平方向上由释放状态转变为夹持状态。为了保证具有足够的重力来保证由释放状态向夹持状态转变的可靠性，可以在第一安装件31上设置配重件2。
作为可实现方式，所述转接件346上设置有第一竖向引导结构347。该第一竖向引导结构347用于与拉晶炉的炉体副室5内的第二竖向引导结构51进行竖向引导配合，使得在第一竖向引导结构347与第二竖向引 导结构51在竖向引导配合时，转接件346进行在竖向上发生位移，而不能在水平方向上发生位移，以实现在第二安装件32向上运动一定距离后，卡爪35由释放状态转变为夹持状态，对晶棒6的缩颈段62实施夹持。
作为可实现方式，所述转接件346上设置有垂直于所述通孔轴线的凸起，所述凸起向远离所述通孔的方向延伸，所述第一竖向引导结构347设置于所述凸起延伸的末端。在凸起的延伸末端设置第一竖向引导结构347，较不在转接件346上设置凸起，而是直接在转接件346的侧面设置第一竖向引导结构347，可以降低转接件346的整体尺寸。
作为可实现方式，所述第一竖向引导结构347为竖向导向槽或竖向导向块。竖向导向槽的截面例如可以是燕尾形、T形、直角梯形等；竖向导向块的截面例如亦可以是燕尾形、T形、直角梯形等。该示例中，第一竖向引导结构347为T形的导向块。
作为可实现方式，所述第一安装件31上转动连接有夹持保持件36，所述夹持保持件36用于在所述夹持状态，与所述第二安装件32在竖直方向上定位配合。通过夹持保持件36与第二安装件32在竖直方向上定位配合，使得第一安装件31与第二安装件32之间保持位置相对不动，这样第一安装件31就不能通过第五连杆331来驱动第一连杆机构34来改变卡爪35的位置，因此可以保持卡爪35一直处于对晶棒6的缩颈段62进行夹持，防止卡爪35意外脱开而造成晶棒6掉落的问题发生。
作为可实现方式，所述夹持保持件36远离所述第一安装件31的一端设置有定位钩361，所述第二安装件32上设置有定位面3212，所述定位钩361钩接在所述定位面3212。在重力的作用下，保持第一安装件31与第二安装件32之间位置相对不动。
作为可实现方式，所述第二安装件32包括上下设置第一安装板321和第二安装板322，所述第一安装板321和所述第二安装板322之间固定连接有中间连接板323，所述第三连杆343及所述第四连杆344的一端与所述中间连接板323铰接；
所述第一安装板321的底面为所述定位面3212。
作为可实现方式，所述第一安装板321的侧面为朝向所述第一安装 板321顶面中心倾斜的第一斜面362，所述定位钩361上设置有与所述第一斜面362接触配合的第二斜面3211。第一斜面362与第二斜面3211接触配合，相互之间起到引导的作用，在第二安装件32上升一定距离后，第一安装件31在重力的作用下向下运动，在第一安装件31向下运动的过程中，定位钩361沿着第二斜面3211向下滑动，同时，定位钩361绕其铰接位置向外转动，待定位钩361的顶部下落至定位面3212时，在重力的作用下，定位钩361向内转动，使定位钩361钩在定位面3212上，以实现对夹持状态的锁死。
第二方面，本发明提供一种拉晶炉，包括炉体副室5以及上述的拉晶夹具3；
所述炉体副室5内表面上设置有第二竖向引导结构51，所述第二竖向引导结构51的下方设置有竖向定位结构52，所述第一竖向引导结构347与所述第二竖向引导结构51竖向引导配合，且所述第一竖向引导结构347与竖向定位结构52竖向定位配合。
第三方面，本发明提供一种采用上述拉晶炉的拉晶方法，包括以下步骤：
通过与所述拉晶绳连接的籽晶进行引晶，并顺次进行放肩、转肩操作；
在转肩操作形成晶棒第一预定长度的上段后，提高所述拉晶绳的收绳速度进行缩颈操作，以在所述上段下形成缩颈段，缩径段的直径小于上段的直径；当然，根据实际的需要，在转肩操作后可以进行等经操作，以在上段中形成一段圆柱段，来保证上段具有较大的强度。
在缩颈操作形成所述晶棒第二预定长度的缩颈段后，再次进行放肩操作，以在所述缩颈段下形成下段，直至所述晶棒拉晶结束，且所述缩径段的直径小于下段的直径；
其中，所述拉晶绳收绳第三预定长度后，所述拉晶绳的定位部与所述第二安装件向上定位配合，且所述第二安装件随所述拉晶绳向上运动预定距离，所述第一竖向引导结构与所述第二竖向引导结构分离后，各所述卡爪由所述释放状态同步切换为所述夹持状态，以夹持在所述缩颈 段。
下面以拉晶炉的其中一个示例，对本申请技术方案的结构及采用该拉晶炉的拉晶方法予以示例性说明。
如图1-8所示，该拉晶炉包括炉体副室5，该炉体副室5可以为圆筒状结构，所述炉体副室5内表面上均匀设置有四个第二竖向引导结构51，第二竖向引导结构51采用的是T形槽，所述第二竖向引导结构51的下方设置有竖向定位结构52，竖向定位结构52可以是位于第二竖向引导结构51下方的一圈凸起，竖向定位结构52用于阻挡下述第一竖向引导结构347向下运动。
在炉体副室5内设置有拉晶夹具3，该拉晶夹具3包括上下间隔设置的第一安装件31和第二安装件32，第一安装件31可以为板状构件，第二安装件32包括上下设置第一安装板321和第二安装板322，所述第一安装板321和所述第二安装板322之间固定连接有中间连接板323。所述第一安装件31和所述第二安装件32上同轴设置有通孔，相应地，该通孔穿过第一安装板321和第二安装板322；所述通孔内穿设有用于向上拉晶的拉晶绳1，拉晶绳1可以为钨丝绳，拉晶绳1的下端用于连接具有重锤的籽晶4用于引晶。
围绕所述通孔的轴线均匀设置有四个卡爪35，各所述卡爪35在水平方向上具有夹持状态和释放状态。
第二安装件32与各所述卡爪35之间连接有第一连杆机构34，第一安装件31与各第一连杆机构34之间连接有第二连杆机构33。
第一连杆机构34包括转接件346，所述转接件346上铰接有第一连杆342和第二连杆341，所述第一连杆342和所述第二连杆341竖直设置，所述第一连杆342和所述第二连杆341远离所述转接件346的一端分别与同一所述卡爪35铰接配合，所述转接件346与所述第一连杆342和所述第二连杆341的铰接中心位于一水平线上，所述卡爪35与所述第一连杆342和所述第二连杆341的铰接中心位于另一水平线上；这样，转接件346、第一连杆342、第二连杆341及卡爪35形成了第一平行四边形杆机构，可以使得卡爪35在水平方向上进行夹持状态和释放状态的切换。
为了在装配时，便于调整，第一连杆342的长度可调，例如采用螺纹连接的方式来调节第一连杆342的长度，如第一连杆342包括两端的连接套3421，至少其中一个连接套3421内设置内螺纹，两个连接套3421之间连接螺杆3422，螺杆3422与连接套3421的内螺纹螺接，通过转动螺杆3422可以调节第一连杆342的长度。由于第一连杆342的长度可调，可以降低对转接件346、第一连杆342、第二连杆341及卡爪35的尺寸精度要求，降低加工成本。通过调节第一连杆342的长度使得转接件346、第一连杆342、第二连杆341及卡爪35所形成的第一平行四边形杆机构处于标准的平行四边形状态，以防止在运动过程中出现卡滞的问题。
转接件346上铰接有第三连杆343，所述第三连杆343和所述转接件346的铰接轴线，与所述第二连杆341和所述转接件346的铰接轴线同轴，所述第三连杆343远离所述转接件346的一端与所述第二安装件32的中间连接板323铰接铰接配合，所述第二连杆341上铰接有第四连杆344，所述第四连杆344远离所述第二连杆341的一端与所述第二安装件32的中间连接板323铰接配合，所述第三连杆343及所述第四连杆344水平设置，所述第二安装件32的中间连接板323与所述第三连杆343和所述第四连杆344的铰接中心位于一竖直线上，所述第三连杆343与所述转接件346的铰接中心，和所述第二连杆341与所述第四连杆344的铰接中心位于另一竖直线上，这样，第二连杆341、第三连杆343、第四连杆344及第二安装件32的中间连接板323形成了第二平行四边形杆机构，第二平行四边形杆机构用于驱动第一平行四边形杆机构运动，以使得卡爪35在水平方向上进行夹持状态和释放状态的切换。
在该示例中，在转接件346与第二安装件32的中间连接板323之间还铰接第六连杆345，第六连杆345作为第二平行四边形杆机构的虚约束，以提高第二平行四边形杆机构运行的稳定性。
第二连杆机构33包括第五连杆331，所述第五连杆331的一端与所述第三连杆343铰接，另一端与所述第一安装件31铰接。
转接件346上设置有垂直于所述通孔轴线的凸起，所述凸起向远离所述通孔的方向延伸，在所述凸起延伸的末端设置有第一竖向引导结构 347。该第一竖向引导结构347采用T形的导向块，该T形的导向块用于与上述T形槽进行竖向的导向配合。
在第一安装件31上转动连接有夹持保持件36，夹持保持件36远离所述第一安装件31的一端设置有定位钩361，第一安装板321的底面为定位面3212，定位钩361能够钩在该定位面3212上。第一安装板321的侧面为朝向所述第一安装板321顶面中心倾斜的第一斜面362，所述定位钩361上设置有与所述第一斜面362接触配合的第二斜面3211，第一斜面362与第二斜面3211接触配合。
在进行拉晶前，先人工手动的将拉晶夹具3放入到炉体副室5内，并使转接件346上作为第一竖向引导结构347的T形的导向块，插入到炉体副室5内中作为第二竖向引导结构51的T形槽内，并且向下滑动到竖向定位结构52上，以阻止拉晶夹具3继续向下运动。此时，拉晶夹具3的卡爪35处于释放状态。
对拉晶炉进行加热，使拉晶炉内坩埚中的硅料融化，通过拉晶绳1向下释放籽晶4至熔融的硅料中进行引晶，然后顺次进行放肩、转肩及等径操作；在等径操作形成晶棒6第一预定长度的上段61后，提高所述拉晶绳1的收绳速度，也即提高籽晶4的上升速度进行缩颈操作，以在所述上段61下形成缩颈段62，缩径段62的直径小于上段61的直径；根据实际的需要，这里也可以不采用等径操作，相应地，在转肩操作后形成晶棒6第一预定长度的上段61后进行缩颈操作。在缩颈操作形成所述晶棒6第二预定长度的缩颈段62后，再次进行放肩操作，以在所述缩颈段62下形成下段63，直至所述晶棒6拉晶结束，且所述缩径段62的直径小于下段63的直径。当然，根据产品的需要，若所需的晶棒的下段63大体呈圆柱形的话，在再次放肩操作后，还需要转肩及等径操作。晶升电机通过拉晶绳1拉取晶棒6持续上升，在拉晶绳1收绳第三预定长度后，也即拉晶绳1第三预定长度后，拉晶绳1上作为定位部11的球状部与第二安装件32的第二安装板322在竖直方向上定位配合，也即球状部与第二安装板322接触后，第二安装件32会带动第一连杆机构34随拉晶绳1向上运动，在上升一段距离，第一竖向引导结构347与第二竖向 引导结构51分离后，在重力的作用下，第一连杆342结构和第二连杆341结构共同作用，驱动卡爪35在水平方向上具有夹持状态和释放状态，以对晶棒6的缩颈段62进行夹持。同时，夹持保持件36的定位钩361，钩在第一安装板321作为定位面3212的底面上，以防止卡爪35意外释放。
其中，第一预定长度、第二预定长度、第三预定长度的具体数值可以根据实际需要确定，这里不进行限定
在晶棒6拉制完成后，晶棒6降落至取晶车内，拉晶绳1放松，卡爪35及夹持保持件36此时不受力，可快速的打开夹持保持件36，以使其与定位面3212分离，此时卡爪35可由夹持状态转变为释放状态，以与晶棒6脱离，便于人员剪断籽晶4，完成晶棒6运输。
需要理解的是，上文如有涉及术语“中心”、“纵向”、“横向”、“上”、“下”、“前”、“后”、“左”、“右”、“竖直”、“水平”、“顶”、“底”、“内”、“外”等指示的方位或位置关系为基于附图所示的方位或位置关系，仅是为了便于描述本发明和简化描述，而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作，因此不能理解为对本发明的限制。此外，术语“第一”、“第二”仅用于描述目的，而不能理解为指示或暗示相对重要性或者隐含指明所指示的技术特征的数量。由此，限定有“第一”、“第二”的特征可以明示或者隐含地包括一个或者更多个该特征。在本发明的描述中，除非另有说明，“多个”的含义是两个或两个以上。
以上描述仅为本申请的较佳实施例以及对所运用技术原理的说明。本领域技术人员应当理解，本申请中所涉及的发明范围，并不限于上述技术特征的特定组合而成的技术方案，同时也应涵盖在不脱离所述发明构思的情况下，由上述技术特征或其等同特征进行任意组合而形成的其它技术方案。例如上述特征与本申请中公开的(但不限于)具有类似功能的技术特征进行互相替换而形成的技术方案。
以上所描述的装置实施例仅仅是示意性的，其中所述作为分离部件说明的单元可以是或者也可以不是物理上分开的，作为单元显示的部件可以是或者也可以不是物理单元，即可以位于一个地方，或者也可以分 布到多个网络单元上。可以根据实际的需要选择其中的部分或者全部模块来实现本实施例方案的目的。本领域普通技术人员在不付出创造性的劳动的情况下，即可以理解并实施。
本文中所称的“一个实施例”、“实施例”或者“一个或者多个实施例”意味着，结合实施例描述的特定特征、结构或者特性包括在本发明的至少一个实施例中。此外，请注意，这里“在一个实施例中”的词语例子不一定全指同一个实施例。
在此处所提供的说明书中，说明了大量具体细节。然而，能够理解，本发明的实施例可以在没有这些具体细节的情况下被实践。在一些实例中，并未详细示出公知的方法、结构和技术，以便不模糊对本说明书的理解。
在权利要求中，不应将位于括号之间的任何参考符号构造成对权利要求的限制。单词“包含”不排除存在未列在权利要求中的元件或步骤。位于元件之前的单词“一”或“一个”不排除存在多个这样的元件。本发明可以借助于包括有若干不同元件的硬件以及借助于适当编程的计算机来实现。在列举了若干装置的单元权利要求中，这些装置中的若干个可以是通过同一个硬件项来具体体现。单词第一、第二、以及第三等的使用不表示任何顺序。可将这些单词解释为名称。
最后应说明的是：以上实施例仅用以说明本发明的技术方案，而非对其限制；尽管参照前述实施例对本发明进行了详细的说明，本领域的普通技术人员应当理解：其依然可以对前述各实施例所记载的技术方案进行修改，或者对其中部分技术特征进行等同替换；而这些修改或者替换，并不使相应技术方案的本质脱离本发明各实施例技术方案的精神和范围。

Claims (11)

  1. 一种拉晶夹具，应用于二次转肩拉晶工艺，其特征在于，包括：
    上下间隔设置的第一安装件和第二安装件，所述第一安装件和所述第二安装件上同轴设置有通孔，所述通孔内穿设有用于向上拉晶的拉晶绳，且所述拉晶绳上设置有能与所述第二安装件向上定位配合的定位部；
    围绕所述通孔的轴线设置有至少三个卡爪，各所述卡爪在水平方向上具有夹持状态和释放状态；
    所述第二安装件与各所述卡爪之间连接有第一连杆机构，所述第一安装件与各所述第一连杆机构之间连接有第二连杆机构；所述第一连杆机构和所述第二连杆机构，至少用于在所述定位部与所述第二安装件向上定位配合，且所述第二安装件随所述拉晶绳向上运动预定距离后，控制各所述卡爪由所述释放状态同步切换为所述夹持状态。
  2. 根据权利要求1所述的拉晶夹具，其特征在于，所述第一连杆机构包括转接件，所述转接件上铰接有第一连杆和第二连杆，所述第一连杆和所述第二连杆竖直设置，所述第一连杆和所述第二连杆远离所述转接件的一端分别与同一所述卡爪铰接配合，所述转接件与所述第一连杆和所述第二连杆的铰接中心位于一水平线上，所述卡爪与所述第一连杆和所述第二连杆的铰接中心位于另一水平线上；
    所述转接件上铰接有第三连杆，所述第三连杆和所述转接件的铰接轴线，与所述第二连杆和所述转接件的铰接轴线同轴，所述第三连杆远离所述转接件的一端与所述第二安装件铰接配合，所述第二连杆上铰接有第四连杆，所述第四连杆远离所述第二连杆的一端与所述第二安装件铰接配合，所述第三连杆及所述第四连杆水平设置，所述第二安装件与所述第三连杆和所述第四连杆的铰接中心位于一竖直线上，所述第三连杆与所述转接件的铰接中心，和所述第二连杆与所述第四连杆的铰接中心位于另一竖直线上；
    所述第二连杆机构包括第五连杆，所述第五连杆的一端与所述第三连杆铰接，另一端与所述第一安装件铰接。
  3. 根据权利要求2所述的拉晶夹具，其特征在于，所述转接件上设置有第一竖向引导结构。
  4. 根据权利要求3所述的拉晶夹具，其特征在于，所述转接件上设置有垂直于所述通孔轴线的凸起，所述凸起向远离所述通孔的方向延伸，所述第一竖向引导结构设置于所述凸起延伸的末端。
  5. 根据权利要求3或4所述的拉晶夹具，其特征在于，所述第一竖向引导结构为竖向导向槽或竖向导向块。
  6. 根据权利要求3或4所述的拉晶夹具，其特征在于，所述第一安装件上转动连接有夹持保持件，所述夹持保持件用于在所述夹持状态，与所述第二安装件在竖直方向上定位配合。
  7. 根据权利要求6所述的拉晶夹具，其特征在于，所述夹持保持件远离所述第一安装件的一端设置有定位钩，所述第二安装件上设置有定位面，所述定位钩钩接在所述定位面。
  8. 根据权利要求7所述的拉晶夹具，其特征在于，所述第二安装件包括上下设置第一安装板和第二安装板，所述第一安装板和所述第二安装板之间固定连接有中间连接板，所述第三连杆及所述第四连杆的一端与所述中间连接板铰接；
    所述第一安装板的底面为所述定位面。
  9. 根据权利要求8所述的拉晶夹具，其特征在于，所述第一安装板的侧面为朝向所述第一安装板顶面中心倾斜的第一斜面，所述定位钩上设置有与所述第一斜面接触配合的第二斜面。
  10. 一种拉晶炉，其特征在于，包括炉体副室以及权利要求3-9任一项所述的拉晶夹具；
    所述炉体副室内表面上设置有第二竖向引导结构，所述第二竖向引导结构的下方设置有竖向定位结构，所述第一竖向引导结构能够与所述第二竖向引导结构竖向引导配合，且所述第一竖向引导结构能够与所述竖向定位结构竖向定位配合。
  11. 一种采用权利要求10所述拉晶炉的拉晶方法，其特征在于，包括以下步骤：
    通过与所述拉晶绳连接的籽晶进行引晶，并顺次进行放肩、转肩操作；
    在转肩操作形成晶棒第一预定长度的上段后，提高所述拉晶绳的收绳速度进行缩颈操作，以在所述上段下形成缩颈段，缩径段的直径小于上段的直径；
    在缩颈操作形成所述晶棒第二预定长度的缩颈段后，再次进行放肩操作，以在所述缩颈段下形成下段，直至所述晶棒拉晶结束，且所述缩径段的直径小于下段的直径；
    其中，所述拉晶绳收绳第三预定长度后，所述拉晶绳的定位部与所述第二安装件向上定位配合，且所述第二安装件随所述拉晶绳向上运动预定距离，所述第一竖向引导结构与所述第二竖向引导结构分离后，各所述卡爪由所述释放状态同步切换为所述夹持状态，以夹持在所述缩颈段。
PCT/CN2022/104708 2021-09-09 2022-07-08 拉晶夹具、拉晶炉及拉晶方法 WO2023035760A1 (zh)

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1081581A (ja) * 1996-09-03 1998-03-31 Sumitomo Sitix Corp 単結晶引上装置
JPH11217292A (ja) * 1998-02-02 1999-08-10 Komatsu Electronic Metals Co Ltd 単結晶製造装置
JPH11228287A (ja) * 1998-02-10 1999-08-24 Komatsu Electronic Metals Co Ltd 単結晶保持装置
CN216156014U (zh) * 2021-09-09 2022-04-01 隆基绿能科技股份有限公司 拉晶夹具及拉晶炉

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1081581A (ja) * 1996-09-03 1998-03-31 Sumitomo Sitix Corp 単結晶引上装置
JPH11217292A (ja) * 1998-02-02 1999-08-10 Komatsu Electronic Metals Co Ltd 単結晶製造装置
JPH11228287A (ja) * 1998-02-10 1999-08-24 Komatsu Electronic Metals Co Ltd 単結晶保持装置
CN216156014U (zh) * 2021-09-09 2022-04-01 隆基绿能科技股份有限公司 拉晶夹具及拉晶炉

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