WO2023019522A1 - Mass transfer method for led chip, display panel, and display apparatus - Google Patents

Mass transfer method for led chip, display panel, and display apparatus Download PDF

Info

Publication number
WO2023019522A1
WO2023019522A1 PCT/CN2021/113592 CN2021113592W WO2023019522A1 WO 2023019522 A1 WO2023019522 A1 WO 2023019522A1 CN 2021113592 W CN2021113592 W CN 2021113592W WO 2023019522 A1 WO2023019522 A1 WO 2023019522A1
Authority
WO
WIPO (PCT)
Prior art keywords
growth substrate
led chip
conductive adhesive
adhesive layer
led chips
Prior art date
Application number
PCT/CN2021/113592
Other languages
French (fr)
Chinese (zh)
Inventor
翟峰
萧俊龙
蔡明达
Original Assignee
重庆康佳光电技术研究院有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 重庆康佳光电技术研究院有限公司 filed Critical 重庆康佳光电技术研究院有限公司
Priority to PCT/CN2021/113592 priority Critical patent/WO2023019522A1/en
Publication of WO2023019522A1 publication Critical patent/WO2023019522A1/en

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/77Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L25/00Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
    • H01L25/03Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
    • H01L25/04Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
    • H01L25/075Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L33/00
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/15Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components with at least one potential-jump barrier or surface barrier specially adapted for light emission
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof

Abstract

A mass transfer method for an LED chip, comprising: providing a display back plate (40), and providing a non-conductive adhesive layer (30) on one side of the display back plate (40); providing a first growth substrate (10), transferring a plurality of first LED chips (20) on the first growth substrate (10) to the non-conductive adhesive layer (30), and electrically connecting the first LED chips (20) to the display back plate (40); providing a second growth substrate (11), transferring a plurality of second LED chips (21) on the second growth substrate (11) to the non-conductive adhesive layer (30), and electrically connecting the second LED chips (21) to the display back plate (40); and providing a third growth substrate (12), transferring a plurality of third LED chips (22) on the third growth substrate (12) to the non-conductive adhesive layer (30), and electrically connecting the third LED chips (22) to the display back plate (40). The present application further provides a display panel and a display apparatus comprising the display panel.

Description

LED芯片的巨量转移方法、显示面板和显示装置Mass transfer method of LED chip, display panel and display device 技术领域technical field
本申请涉及显示技术领域,特别涉及一种LED芯片的巨量转移方法、显示面板以及具有该显示面板的显示装置。The present application relates to the field of display technology, in particular to a mass transfer method of LED chips, a display panel and a display device having the display panel.
背景技术Background technique
微型发光二极管(Micro Light Emitting Diode,Micro LED)作为新一代的显示技术,与传统LED相比,其具有更高的光电效率、更高的亮度、更高的对比度以及更低的功耗,而且还能结合柔性面板实现柔性显示。随着制程的成熟和价格的下降,近年来基于Micro LED芯片的相关产品越来越多。目前,Micro LED显示面板上包括了多个像素区域亚像素渲染(Subpixel Rendering,SPR),每个像素区域SPR包括第一LED芯片、第二LED芯片以及第三LED芯片。Micro Light Emitting Diode (Micro Light Emitting Diode, Micro LED) is a new generation of display technology. Compared with traditional LEDs, it has higher photoelectric efficiency, higher brightness, higher contrast and lower power consumption, and it can also be combined with flexible panels to achieve flexibility. show. With the maturity of the manufacturing process and the decline of prices, there have been more and more related products based on Micro LED chips in recent years. At present, the Micro LED display panel includes sub-pixel rendering of multiple pixel areas (Subpixel Rendering, SPR), each pixel region SPR includes a first LED chip, a second LED chip and a third LED chip.
通常,显示面板在制作过程中,需要将第一LED芯片、第二LED芯片以及第三LED芯片从各自的生长基板上转移到显示背板上。然而,由于生长基板和显示背板之间必须保持一定的间距,这就会导致生长基板上的LED芯片在被激光剥离转移到显示背板的过程中出现偏移的问题。Usually, during the manufacturing process of the display panel, the first LED chip, the second LED chip and the third LED chip need to be transferred from their respective growth substrates to the display backplane. However, since a certain distance must be maintained between the growth substrate and the display backplane, this will lead to the problem that the LED chips on the growth substrate are shifted during the process of being lifted off by the laser and transferred to the display backplane.
技术问题technical problem
鉴于上述现有技术的不足,本申请的目的在于提供一种LED芯片的巨量转移方法、显示面板以及具有该显示面板的显示装置,其旨在解决现有技术中存在的由于显示面板的生长基板和显示背板之间必须保持一定的间距导致生长基板上的LED芯片在被激光剥离转移到显示背板的过程中出现偏移的问题。In view of the deficiencies in the prior art above, the purpose of this application is to provide a method for mass transfer of LED chips, a display panel and a display device with the display panel, which aims to solve the problems existing in the prior art due to the growth of the display panel. A certain distance must be kept between the substrate and the display backplane, which leads to the problem that the LED chips on the growth substrate are shifted during the process of being lifted off by the laser and transferred to the display backplane.
技术解决方案technical solution
一种LED芯片的巨量转移方法,其包括:提供显示背板,在所述显示背板的一侧设置非导电性胶层;提供第一生长基板,将所述第一生长基板上的多个第一LED芯片转移至所述非导电性胶层,将所述第一LED芯片与所述显示背板电连接;提供第二生长基板,将所述第二生长基板上的多个第二LED芯片转移至所述非导电性胶层,将所述第二LED芯片与所述显示背板电连接;提供第三生长基板,将所述第三生长基板上的多个第三LED芯片转移至所述非导电性胶层,将所述第三LED芯片与所述显示背板电连接。A method for mass transfer of LED chips, comprising: providing a display backplane, setting a non-conductive adhesive layer on one side of the display backplane; providing a first growth substrate, and placing multiple A first LED chip is transferred to the non-conductive adhesive layer, and the first LED chip is electrically connected to the display backplane; a second growth substrate is provided, and a plurality of second growth substrates on the second growth substrate are provided. Transfer the LED chip to the non-conductive adhesive layer, electrically connect the second LED chip to the display backplane; provide a third growth substrate, and transfer a plurality of third LED chips on the third growth substrate To the non-conductive adhesive layer, the third LED chip is electrically connected to the display backplane.
综上所述,本申请的LED芯片的巨量转移方法通过在显示背板上涂布非导电性胶层,解决了生长基板上的LED芯片在被激光剥离转移到显示背板的过程中LED芯片出现偏移的问题,因此不但提高了LED芯片的良率,并达到了提高LED芯片转移效率的效果。In summary, the mass transfer method of LED chips of the present application solves the problem of LED chips on the growth substrate being peeled off by laser and transferred to the display backplane by coating a non-conductive adhesive layer on the display backplane. The chip has the problem of offset, so not only the yield rate of the LED chip is improved, but also the effect of improving the transfer efficiency of the LED chip is achieved.
可选地,所述提供第一生长基板,将所述第一生长基板上的多个第一LED芯片转移至所述非导电性胶层,将所述第一LED芯片与所述显示背板电连接,包括:提供第一生长基板,在所述第一生长基板面对所述非导电性胶层的一侧设置多个第一LED芯片;将所述第一生长基板上预设位置的所述第一LED芯片剥离至所述非导电性胶层上,并移开所述第一生长基板;对位于所述非导电性胶层上的所述第一LED芯片进行压合,以使得所述第一LED芯片与所述显示背板上的焊料实现金属共晶键合;将所述第一LED芯片与所述显示背板上的焊料进行焊接以完成所述第一LED芯片的转移。Optionally, in providing a first growth substrate, transferring a plurality of first LED chips on the first growth substrate to the non-conductive adhesive layer, and bonding the first LED chips to the display backplane The electrical connection includes: providing a first growth substrate, setting a plurality of first LED chips on the side of the first growth substrate facing the non-conductive adhesive layer; peeling the first LED chip onto the non-conductive adhesive layer, and removing the first growth substrate; pressing the first LED chip on the non-conductive adhesive layer, so that The first LED chip and the solder on the display backplane realize metal eutectic bonding; welding the first LED chip and the solder on the display backplane to complete the transfer of the first LED chip .
可选地,所述提供第二生长基板,将所述第二生长基板上的多个第二LED芯片转移至所述非导电性胶层,将所述第二LED芯片与所述显示背板电连接,包括:提供第二生长基板,在所述第二生长基板面对所述非导电性胶层的一侧设置多个第二LED芯片;将所述第二生长基板上预设位置的所述第二LED芯片剥离至所述非导电性胶层上,并移开所述第二生长基板;对位于所述非导电性胶层上的所述第二LED芯片进行压合,以使得所述第二LED芯片与所述显示背板上的焊料实现金属共晶键合;将所述第二LED芯片与所述显示背板上的焊料进行焊接以完成所述第二LED芯片的转移。Optionally, providing a second growth substrate, transferring a plurality of second LED chips on the second growth substrate to the non-conductive adhesive layer, and bonding the second LED chips to the display backplane The electrical connection includes: providing a second growth substrate, setting a plurality of second LED chips on the side of the second growth substrate facing the non-conductive adhesive layer; The second LED chip is peeled off from the non-conductive adhesive layer, and the second growth substrate is removed; the second LED chip on the non-conductive adhesive layer is pressed, so that The second LED chip and the solder on the display backplane realize metal eutectic bonding; welding the second LED chip and the solder on the display backplane to complete the transfer of the second LED chip .
可选地,所述提供第三生长基板,将所述第三生长基板上的多个第三LED芯片转移至所述非导电性胶层,将所述第二LED芯片与所述显示背板电连接,包括:提供第三生长基板,在所述第三生长基板面对所述非导电性胶层的一侧粘附多个第三LED芯片;将所述第三生长基板上预设位置的所述第三LED芯片剥离至所述非导电性胶层上,并移开所述第三生长基板;对位于所述非导电性胶层上的所述第三LED芯片进行压合,以使得所述第三LED芯片与所述显示背板上的焊料实现金属共晶键合;将所述第三LED芯片与所述显示背板上的焊料进行焊接以完成所述第三LED芯片的转移。Optionally, providing a third growth substrate, transferring a plurality of third LED chips on the third growth substrate to the non-conductive adhesive layer, and bonding the second LED chips to the display backplane The electrical connection includes: providing a third growth substrate, adhering a plurality of third LED chips on the side of the third growth substrate facing the non-conductive adhesive layer; placing a preset position on the third growth substrate Peel off the third LED chip on the non-conductive adhesive layer, and remove the third growth substrate; press-bond the third LED chip on the non-conductive adhesive layer, to making the third LED chip and the solder on the display backplane achieve metal eutectic bonding; welding the third LED chip and the solder on the display backplane to complete the bonding of the third LED chip transfer.
可选地,所述将所述第一生长基板上预设位置的所述第一LED芯片剥离至所述非导电性胶层上,还包括:使用激光针将所述第一生长基板上所述预设位置的所述第一LED芯片从所述第一生长基板上激光剥离,其中,所述激光的波长为248nm或266nm。Optionally, the peeling off the first LED chip at the preset position on the first growth substrate to the non-conductive adhesive layer further includes: using a laser needle to peel off the first LED chip on the first growth substrate. The first LED chip at the preset position is laser lifted from the first growth substrate, wherein the wavelength of the laser is 248nm or 266nm.
可选地,所述将所述第二生长基板上预设位置的所述第二LED芯片剥离至所述非导电性胶层上,还包括:使用激光针将所述第二生长基板上所述预设位置的所述第二LED芯片从所述第二生长基板上激光剥离,其中,所述激光的波长为248nm或266nm。Optionally, the peeling off the second LED chip at the preset position on the second growth substrate to the non-conductive adhesive layer further includes: using a laser needle to peel off the second LED chip on the second growth substrate. The second LED chip at the preset position is laser lifted off from the second growth substrate, wherein the wavelength of the laser is 248nm or 266nm.
可选地,所述将所述第三生长基板上预设位置的所述第三LED芯片剥离至所述非导电性胶层上,还包括:使用激光针将所述第三生长基板上所述预设位置的所述第三LED芯片从所述第三生长基板上激光剥离,其中,所述激光的波长为248nm或266nm。Optionally, the peeling off the third LED chip at the preset position on the third growth substrate to the non-conductive adhesive layer further includes: using a laser needle to peel off the third LED chip on the third growth substrate. The third LED chip at the preset position is laser lifted off from the third growth substrate, wherein the wavelength of the laser is 248nm or 266nm.
可选地,所述对位于所述非导电性胶层上的所述第一LED芯片进行压合,包括:在预设温度和预设重量下通过压合工具针对性地朝着所述显示背板的方向压合位于所述非导电性胶层上的所述第一LED芯片。Optionally, the pressing the first LED chip on the non-conductive adhesive layer includes: using a pressing tool at a preset temperature and a preset weight toward the display The direction of the back plate presses the first LED chip on the non-conductive adhesive layer.
可选地,所述对位于所述非导电性胶层上的所述第二LED芯片进行压合,包括:在所述预设温度和所述预设重量下通过压合工具针对性地朝着所述显示背板的方向压合位于所述非导电性胶层上的所述第二LED芯片。Optionally, the pressing of the second LED chip on the non-conductive adhesive layer includes: using a pressing tool to target the LED chip at the preset temperature and the preset weight Pressing the second LED chip on the non-conductive adhesive layer along the direction of the display backplane.
可选地,所述对位于所述非导电性胶层上的所述第三LED芯片进行压合,包括:在所述预设温度和所述预设重量下通过压合工具针对性地朝着所述显示背板的方向压合位于所述非导电性胶层上的所述第三LED芯片。Optionally, the pressing the third LED chip on the non-conductive adhesive layer includes: using a pressing tool to target the LED chip at the preset temperature and the preset weight. Pressing the third LED chip on the non-conductive adhesive layer along the direction of the display backplane.
可选地,所述压合工具为软压板。Optionally, the pressing tool is a soft pressing plate.
可选地,所述压合工具由聚二甲基硅氧烷或聚氨酯类材料制成。Optionally, the pressing tool is made of polydimethylsiloxane or polyurethane material.
可选地,所述预设温度为100°C-150°C,所述预设重量为2Kg-10kg。Optionally, the preset temperature is 100°C-150°C, and the preset weight is 2Kg-10kg.
可选地,所述显示背板为薄膜场效应管背板。Optionally, the display backplane is a thin film field effect transistor backplane.
可选地,所述非导电性胶层由非导电性胶制成。Optionally, the non-conductive adhesive layer is made of non-conductive adhesive.
可选地,在所述显示背板的一侧涂布所述非导电性胶层,固化去除溶剂。Optionally, the non-conductive adhesive layer is coated on one side of the display backplane, and cured to remove the solvent.
可选地,所述固化去除溶剂通过加热固化的方式。Optionally, the curing removes the solvent by heating and curing.
可选地,所述第一LED芯片、所述第二LED芯片和所述第三LED芯片分别为彼此不同的红光LED芯片、绿光LED芯片或蓝光LED芯片。Optionally, the first LED chip, the second LED chip and the third LED chip are respectively different red LED chips, green LED chips or blue LED chips.
综上所述,本申请的LED芯片的巨量转移方法通过在显示背板上涂布非导电性胶层,解决了生长基板上的LED芯片在被激光剥离转移到显示背板的过程中LED芯片出现偏移的问题,因此不但提高了LED芯片的良率,并达到了提高LED芯片转移效率的效果。In summary, the mass transfer method of LED chips of the present application solves the problem of LED chips on the growth substrate being peeled off by laser and transferred to the display backplane by coating a non-conductive adhesive layer on the display backplane. The chip has the problem of offset, so not only the yield rate of the LED chip is improved, but also the effect of improving the transfer efficiency of the LED chip is achieved.
基于同样的发明构思,本申请还提供一种显示面板,其包括上述的显示背板以及通过所述巨量转移方法转移至所述显示背板上的第一LED芯片、第二LED芯片和第三LED芯片。Based on the same inventive concept, the present application also provides a display panel, which includes the above-mentioned display backplane and the first LED chip, the second LED chip and the first LED chip transferred to the display backplane by the mass transfer method. Three LED chips.
综上所述,本申请的显示面板通过在显示背板上涂布非导电性胶层,解决了生长基板上的LED芯片在被激光剥离转移到显示背板的过程中LED芯片出现偏移的问题,因此不但提高了LED芯片的良率,并达到了提高LED芯片转移效率的效果。To sum up, the display panel of the present application solves the problem that the LED chips on the growth substrate are shifted during the process of laser lift-off and transfer to the display backplane by coating a non-conductive adhesive layer on the display backplane. Therefore, it not only improves the yield rate of LED chips, but also achieves the effect of improving the transfer efficiency of LED chips.
基于同样的发明构思,本申请还提供一种显示装置,其包括支撑框架和上述的显示面板,所述支撑框架用于支撑所述显示面板。Based on the same inventive concept, the present application also provides a display device, which includes a supporting frame and the above-mentioned display panel, and the supporting frame is used to support the display panel.
有益效果Beneficial effect
综上所述,本申请的显示装置通过在显示背板上涂布非导电性胶层,解决了生长基板上的LED芯片在被激光剥离转移到显示背板的过程中LED芯片出现偏移的问题,因此不但提高了LED芯片的良率,并达到了提高LED芯片转移效率的效果。To sum up, the display device of the present application solves the problem that the LED chips on the growth substrate are shifted during the process of laser lift-off and transfer to the display backplane by coating a non-conductive adhesive layer on the display backplane. Therefore, it not only improves the yield rate of LED chips, but also achieves the effect of improving the transfer efficiency of LED chips.
附图说明Description of drawings
为了更清楚地说明本申请实施例中的技术方案,下面将对实施例中所需要使用的附图作简单地介绍,显而易见地,下面描述中的附图是本申请的一些实施例,对于本领域普通技术人员来讲,在不付出创造性劳动的前提下,还可以根据这些附图获得其他的附图。In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings that need to be used in the embodiments will be briefly introduced below. Obviously, the drawings in the following description are some embodiments of the present application. Those of ordinary skill in the art can also obtain other drawings based on these drawings without any creative effort.
图1为本申请实施例公开的一种LED芯片的巨量转移方法的流程示意图;FIG. 1 is a schematic flow diagram of a method for mass transfer of LED chips disclosed in an embodiment of the present application;
图2为图1所示巨量转移方法中步骤S20的流程示意图;FIG. 2 is a schematic flow chart of step S20 in the mass transfer method shown in FIG. 1;
图3为图2所示的巨量转移方法中步骤S21形成的对应结构示意图;FIG. 3 is a schematic diagram of the corresponding structure formed in step S21 in the mass transfer method shown in FIG. 2;
图4为图2所示的巨量转移方法中步骤S22形成的对应结构示意图;FIG. 4 is a schematic diagram of the corresponding structure formed in step S22 in the mass transfer method shown in FIG. 2;
图5为图2所示的巨量转移方法中步骤S23形成的对应结构示意图;FIG. 5 is a schematic diagram of the corresponding structure formed in step S23 in the mass transfer method shown in FIG. 2;
图6为图2所示的巨量转移方法中步骤S24形成的对应结构示意图;FIG. 6 is a schematic diagram of the corresponding structure formed in step S24 in the mass transfer method shown in FIG. 2;
图7为图1所示巨量转移方法中步骤S30的流程示意图;FIG. 7 is a schematic flow chart of step S30 in the mass transfer method shown in FIG. 1;
图8为图7所示的巨量转移方法中步骤S31形成的对应结构示意图;FIG. 8 is a schematic diagram of the corresponding structure formed in step S31 in the mass transfer method shown in FIG. 7;
图9为图7所示的巨量转移方法中步骤S32形成的对应结构示意图;FIG. 9 is a schematic diagram of the corresponding structure formed in step S32 in the mass transfer method shown in FIG. 7;
图10为图7所示的巨量转移方法中步骤S33形成的对应结构示意图;FIG. 10 is a schematic diagram of the corresponding structure formed in step S33 in the mass transfer method shown in FIG. 7;
图11为图7所示的巨量转移方法中步骤S34形成的对应结构示意图;FIG. 11 is a schematic diagram of the corresponding structure formed in step S34 in the mass transfer method shown in FIG. 7;
图12为图1所示巨量转移方法中步骤S40的流程示意图;FIG. 12 is a schematic flow chart of step S40 in the mass transfer method shown in FIG. 1;
图13为图12所示的巨量转移方法中步骤S41形成的对应结构示意图;FIG. 13 is a schematic diagram of the corresponding structure formed in step S41 in the mass transfer method shown in FIG. 12;
图14为图12所示的巨量转移方法中步骤S42形成的对应结构示意图;FIG. 14 is a schematic diagram of the corresponding structure formed in step S42 in the mass transfer method shown in FIG. 12;
图15为图12所示的巨量转移方法中步骤S43形成的对应结构示意图;FIG. 15 is a schematic diagram of the corresponding structure formed in step S43 in the mass transfer method shown in FIG. 12;
图16为图12所示的巨量转移方法中步骤S44形成的对应结构示意图。FIG. 16 is a schematic diagram of the corresponding structure formed in step S44 in the mass transfer method shown in FIG. 12 .
附图标记说明:10-第一生长基板;11-第二生长基板;12-第三生长基板;20-第一LED芯片;21-第二LED芯片;22-第三LED芯片;30-非导电性胶层;40-显示背板;41-焊料;50-压合工具;S10-S40-LED芯片的巨量转移方法的步骤;S21-S24-LED芯片的巨量转移方法中步骤S20的步骤;S31-S34-LED芯片的巨量转移方法中步骤S30的步骤;S41-S44-LED芯片的巨量转移方法中步骤S40的步骤。Explanation of reference signs: 10-first growth substrate; 11-second growth substrate; 12-third growth substrate; 20-first LED chip; 21-second LED chip; 22-third LED chip; 30-non- Conductive adhesive layer; 40-display backplane; 41-solder; 50-pressing tool; S10-S40-steps in the mass transfer method of LED chips; S21-S24-step S20 in the mass transfer method of LED chips Steps: S31-S34-the steps of step S30 in the mass transfer method of LED chips; S41-S44-the steps of step S40 in the mass transfer method of LED chips.
本发明的实施方式Embodiments of the present invention
为了便于理解本申请,下面将参照相关附图对本申请进行更全面的描述。附图中给出了本申请的较佳实施方式。但是,本申请可以以许多不同的形式来实现,并不限于本文所描述的实施方式。相反地,提供这些实施方式的目的是使对本申请的公开内容理解的更加透彻全面。In order to facilitate the understanding of the present application, the present application will be described more fully below with reference to the relevant drawings. Preferred embodiments of the application are shown in the accompanying drawings. However, the present application can be embodied in many different forms and is not limited to the embodiments described herein. On the contrary, the purpose of providing these embodiments is to make the disclosure of the application more thorough and comprehensive.
除非另有定义,本文所使用的所有的技术和科学术语与属于本申请的技术领域的技术人员通常理解的含义相同。本文中在本申请的说明书中所使用的术语只是为了描述具体地实施方式的目的,不是旨在于限制本申请。Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the technical field to which this application belongs. The terminology used herein in the description of the application is only for the purpose of describing specific implementations, and is not intended to limit the application.
传统的LED显示屏像素采用红绿蓝(RGB)三基色的LED结合而成,由于封装体尺寸较大,使得像素间距达到20mm左右。随着芯片尺寸缩小和封装水平提高,Micro LED进一步把芯片尺寸缩减至50μm以下,在制备时,Micro-LED是将LED结构进行薄膜化、微小化、阵列化,尺寸缩小到1~10μm左右后定址巨量转移到电路基板上,形成超小间距LED,以实现高分辨率,然后再利用物理沉淀完成保护层和电极,之后进行封装完成Micro-LED的显示。而且,与传统LED相比,Micro LED具有更高的光电效率、更高的亮度、更高的对比度以及更低的功耗,而且还能结合柔性面板实现柔性显示。随着制程的成熟和价格的下降,近年来基于Micro LED芯片的相关产品越来越多。目前,Micro LED显示面板上包括了多个像素区域亚像素渲染(Subpixel Rendering,SPR),每个像素区域SPR包括第一LED芯片、第三LED芯片以及第二LED芯片。通常,显示面板在制作过程中,需要将第一LED芯片、第三LED芯片以及第二LED芯片从各自的生长基板上转移到显示背板上。然而,由于生长基板和显示背板之间必须保持一定的间距,这就会导致生长基板上的LED芯片在被激光剥离转移到显示背板的过程中出现偏移的问题。因此,如何解决生长基板上的LED芯片在被激光剥离转移到显示背板的过程中出现偏移是亟需解决的问题。The pixels of the traditional LED display are combined with red, green and blue (RGB) LEDs. Due to the large size of the package, the pixel pitch reaches about 20mm. With the reduction of chip size and the improvement of packaging level, Micro LED further reduces the chip size to less than 50 μm. During the preparation, Micro-LED is to thin the LED structure, miniaturize and array it, and reduce the size to about 1~10 μm. A large amount of addressing is transferred to the circuit substrate to form ultra-fine-pitch LEDs to achieve high resolution, and then physical deposition is used to complete the protective layer and electrodes, and then packaged to complete the display of Micro-LEDs. Moreover, compared with conventional LEDs, Micro LEDs have higher photoelectric efficiency, higher brightness, higher contrast and lower power consumption, and can also be combined with flexible panels to achieve flexible displays. With the maturity of the manufacturing process and the decline of prices, there have been more and more related products based on Micro LED chips in recent years. At present, the Micro LED display panel includes sub-pixel rendering of multiple pixel areas (Subpixel Rendering, SPR), each pixel region SPR includes a first LED chip, a third LED chip and a second LED chip. Usually, during the manufacturing process of the display panel, the first LED chip, the third LED chip and the second LED chip need to be transferred from their respective growth substrates to the display backplane. However, since a certain distance must be maintained between the growth substrate and the display backplane, this will lead to the problem that the LED chips on the growth substrate are shifted during the process of being lifted off by the laser and transferred to the display backplane. Therefore, how to solve the problem that the LED chips on the growth substrate are offset during the process of being lifted off by the laser and transferred to the display backplane is an urgent problem to be solved.
基于此,本申请希望提供一种能够解决上述技术问题的方案,其可以解决生长基板上的LED芯片在被激光剥离转移到显示背板的过程中LED芯片出现偏移的问题,其详细内容将在后续实施例中得以阐述。Based on this, the present application hopes to provide a solution that can solve the above technical problems, which can solve the problem that the LED chips on the growth substrate are shifted during the process of being lifted off by laser and transferred to the display backplane. The details will be It is illustrated in the subsequent examples.
本申请方案的详细阐述LED芯片的巨量转移方法、由所述巨量转移方法形成的显示面板以及具有所述显示面板的显示装置。Detailed description of the scheme of the present application The mass transfer method of LED chips, the display panel formed by the mass transfer method, and the display device with the display panel.
请参阅图1,其为本申请实施例公开的一种LED芯片的巨量转移方法的流程示意图,所述巨量转移方法用于对LED芯片进行巨量转移,以达到避免LED芯片在巨量转移时发生倾斜的效果。如图1所示,在本申请实施方式中,所述LED芯片的巨量转移方法至少包括以下步骤。Please refer to FIG. 1 , which is a schematic flow chart of a mass transfer method for LED chips disclosed in the embodiment of the present application. The mass transfer method is used to perform mass transfer of LED chips to prevent LED chips from Tilting effect occurs when shifting. As shown in FIG. 1 , in an embodiment of the present application, the method for mass transfer of LED chips at least includes the following steps.
S10、提供显示背板,在所述显示背板的一侧设置非导电性胶层;S10, providing a display backplane, and setting a non-conductive adhesive layer on one side of the display backplane;
S20、提供第一生长基板,将所述第一生长基板上的多个第一LED芯片转移至所述非导电性胶层,将所述第一LED芯片与所述显示背板电连接;S20, providing a first growth substrate, transferring a plurality of first LED chips on the first growth substrate to the non-conductive adhesive layer, and electrically connecting the first LED chips to the display backplane;
S30、提供第二生长基板,将所述第二生长基板上的多个第二LED芯片转移至所述非导电性胶层,将所述第二LED芯片与所述显示背板电连接;S30, providing a second growth substrate, transferring a plurality of second LED chips on the second growth substrate to the non-conductive adhesive layer, and electrically connecting the second LED chips to the display backplane;
S40、提供第三生长基板,将所述第三生长基板上的多个第三LED芯片转移至所述非导电性胶层,将所述第三LED芯片与所述显示背板电连接。S40, providing a third growth substrate, transferring a plurality of third LED chips on the third growth substrate to the non-conductive adhesive layer, and electrically connecting the third LED chips to the display backplane.
综上所述,本申请的LED芯片的巨量转移方法通过在显示背板40上涂布非导电性胶层30,解决了生长基板上的LED芯片在被激光剥离转移到显示背板的过程中LED芯片出现偏移的问题。其中,针对各个步骤的详细内容将在后续实施例中得以阐述和具体说明。In summary, the mass transfer method of LED chips of the present application solves the problem of the process of LED chips on the growth substrate being lifted off by laser and transferred to the display backplane by coating the non-conductive adhesive layer 30 on the display backplane 40. There is a problem with the offset of the LED chip in the middle. Wherein, the detailed content for each step will be set forth and specifically illustrated in the following embodiments.
请参阅图2,在本实施方式中,所述步骤S20至少包括以下步骤。Please refer to FIG. 2 , in this embodiment, the step S20 includes at least the following steps.
S21、提供第一生长基板10,在所述第一生长基板10面对所述非导电性胶层30的一侧设置多个第一LED芯片20。S21 , providing a first growth substrate 10 , and disposing a plurality of first LED chips 20 on a side of the first growth substrate 10 facing the non-conductive adhesive layer 30 .
具体地,在本申请实施方式中,以所述第一生长基板10为红光LED芯片生长基板,所述第一LED芯片20为红光LED芯片为例进行说明。如图3所示,在所述显示背板40的一侧涂布非导电性胶层30,固化去除溶剂。其中,所述固化去除溶剂可通过加热固化的方式,所述显示背板40为所述薄膜场效应管(Thin Film Transistor,TFT)背板。在本申请实施例中,所述非导电性胶层30可由非导电性胶(Non-Conductive Film,NCF)制成。提供一第一生长基板10,在所述第一生长基板10面对所述显示背板40的一侧通过Chip on Wafer(COW)临时粘附多个第一LED芯片20。Specifically, in the embodiments of the present application, the first growth substrate 10 is a red LED chip growth substrate, and the first LED chip 20 is a red LED chip as an example for description. As shown in FIG. 3 , a non-conductive adhesive layer 30 is coated on one side of the display backplane 40 and cured to remove the solvent. Wherein, the curing can remove the solvent by heating and curing, and the display backplane 40 is the thin film transistor (Thin Film Transistor, TFT) backplane. In the embodiment of the present application, the non-conductive adhesive layer 30 may be made of non-conductive film (Non-Conductive Film, NCF). A first growth substrate 10 is provided, and on the side of the first growth substrate 10 facing the display backplane 40, a Chip On Wafer (COW) temporarily adheres a plurality of first LED chips 20 .
S22、将所述第一生长基板10上预设位置的所述第一LED芯片20剥离至所述非导电性胶层30上,并移开所述第一生长基板10。S22 , peel off the first LED chip 20 at a predetermined position on the first growth substrate 10 onto the non-conductive adhesive layer 30 , and remove the first growth substrate 10 .
具体地,在本申请实施方式中,如图4所示,可使用激光针将所述第一生长基板10上预设位置的所述第一LED芯片20从所述第一生长基板10上激光剥离,被剥离的所述第一LED芯片20转移至所述非导电性胶层30上的对应位置,并将所述第一生长基板10以及第一生长基板10上未剥离的第一LED芯片20一并从所述非导电性胶层30上移开。其中,所述激光为248nm或266nm波长的激光。Specifically, in the embodiment of the present application, as shown in FIG. 4 , the first LED chip 20 at a preset position on the first growth substrate 10 can be lasered from the first growth substrate 10 using a laser needle. Peeling, the peeled first LED chip 20 is transferred to the corresponding position on the non-conductive adhesive layer 30, and the first growth substrate 10 and the unpeeled first LED chip on the first growth substrate 10 are 20 are removed from the non-conductive adhesive layer 30 together. Wherein, the laser is a laser with a wavelength of 248nm or 266nm.
S23、对位于所述非导电性胶层30上的所述第一LED芯片20进行压合,以使得所述第一LED芯片20与所述显示背板40上的焊料41实现金属共晶键合。S23. Pressing the first LED chip 20 on the non-conductive adhesive layer 30, so that the first LED chip 20 and the solder 41 on the display backplane 40 realize a metal eutectic bond combine.
具体地,在本申请实施方式中,如图5所示,剥离后的所述第一LED芯片20临时粘附在所述显示背板40上的非导电性胶层30上,在预设温度和预设重量下通过压合工具50针对性地朝着所述显示背板40的方向压合位于所述非导电性胶层30上的所述第一LED芯片20,此时,所述第一LED芯片20挤压所述显示背板40上的非导电性胶层30,以使得所述第一LED芯片20与所述显示背板40上对应的焊料41实现金属共晶键合。在压合过程中,所述非导电性胶层30上未粘附剥离后的所述第一LED芯片20的位置不会受到压合影响。Specifically, in the embodiment of the present application, as shown in FIG. 5 , the stripped first LED chip 20 is temporarily adhered to the non-conductive adhesive layer 30 on the display backplane 40 , at a preset temperature The first LED chip 20 located on the non-conductive adhesive layer 30 is press-pressed in the direction of the display backplane 40 through the pressing tool 50 under the predetermined weight. At this time, the first LED chip 20 An LED chip 20 presses the non-conductive adhesive layer 30 on the display backplane 40 , so that the first LED chip 20 and the corresponding solder 41 on the display backplane 40 realize metal eutectic bonding. During the pressing process, the position of the first LED chip 20 that is not adhered and peeled off on the non-conductive adhesive layer 30 will not be affected by the pressing.
在本申请实施例中,所述压合工具50可为软压板,示例性地,所述压合工具50可由聚二甲基硅氧烷(Polydimethylsiloxane,PDMS)或聚氨酯类材料制成,所述预设温度为100°C-150°C,所述预设重量为2Kg-10kg。In the embodiment of the present application, the pressing tool 50 can be a soft pressing plate. Exemplarily, the pressing tool 50 can be made of polydimethylsiloxane (Polydimethylsiloxane, PDMS) or polyurethane materials. The preset temperature is 100°C-150°C, and the preset weight is 2Kg-10kg.
S24、将所述第一LED芯片20与所述显示背板40上的焊料41进行焊接以完成所述第一LED芯片20的转移。S24 , soldering the first LED chip 20 to the solder 41 on the display backplane 40 to complete the transfer of the first LED chip 20 .
具体地,在本申请实施方式中,如图6所示,在所述第一LED芯片20与所述显示背板40上的焊料41金属共晶键合之后,将所述第一LED芯片20与所述显示背板40上焊料41进行焊接,从而完成了所述第一LED芯片20的转移。Specifically, in the embodiment of the present application, as shown in FIG. 6 , after the metal eutectic bonding of the first LED chip 20 and the solder 41 on the display backplane 40 , the first LED chip 20 Soldering with the solder 41 on the display backplane 40 completes the transfer of the first LED chip 20 .
请参阅图7,在本实施方式中,所述步骤S30至少包括以下步骤。Please refer to FIG. 7 , in this implementation manner, the step S30 includes at least the following steps.
S31、提供第二生长基板11,在所述第二生长基板11面对所述非导电性胶层30的一侧设置多个第二LED芯片21。S31 , providing a second growth substrate 11 , and disposing a plurality of second LED chips 21 on a side of the second growth substrate 11 facing the non-conductive adhesive layer 30 .
具体地,在本申请实施方式中,以所述第二生长基板11为绿光LED芯片生长基板,所述第二LED芯片21为绿光LED芯片为例进行说明。如图8所示,提供一第二生长基板11,在所述第二生长基板11面对所述显示背板40的一侧通过Chip on Wafer(COW)临时粘附多个第二LED芯片21。Specifically, in the embodiment of the present application, the second growth substrate 11 is a green LED chip growth substrate, and the second LED chip 21 is a green LED chip as an example for description. As shown in FIG. 8 , a second growth substrate 11 is provided, and on the side of the second growth substrate 11 facing the display backplane 40 On Wafer (COW) temporarily adheres a plurality of second LED chips 21 .
S32、将所述第二生长基板11上预设位置的所述第二LED芯片21剥离至所述非导电性胶层30上,并移开所述第二生长基板11。S32 , peeling off the second LED chip 21 at a predetermined position on the second growth substrate 11 onto the non-conductive adhesive layer 30 , and removing the second growth substrate 11 .
具体地,在本申请实施方式中,如图9所示,可使用激光针将所述第二生长基板11上预设位置的所述第二LED芯片21从所述第二生长基板11上激光剥离,被剥离的所述第二LED芯片21转移至所述非导电性胶层30上的相应位置,并将所述第二生长基板11以及第二生长基板11上未剥离的第二LED芯片21从所述非导电性胶层30上一并移开。其中,所述激光为248nm或266nm波长的激光。Specifically, in the embodiment of the present application, as shown in FIG. 9 , the second LED chip 21 at a preset position on the second growth substrate 11 can be lasered from the second growth substrate 11 using a laser needle. peeling, the peeled second LED chip 21 is transferred to the corresponding position on the non-conductive adhesive layer 30, and the second growth substrate 11 and the unpeeled second LED chip on the second growth substrate 11 21 is removed from the non-conductive adhesive layer 30 together. Wherein, the laser is a laser with a wavelength of 248nm or 266nm.
S33、对位于所述非导电性胶层30上的所述第二LED芯片21进行压合,以使得所述第二LED芯片21与所述显示背板40上的焊料41实现金属共晶键合。S33. Pressing the second LED chip 21 on the non-conductive adhesive layer 30, so that the second LED chip 21 and the solder 41 on the display backplane 40 realize a metal eutectic bond combine.
具体地,在本申请实施方式中,如图10所示,剥离后的所述第二LED芯片21临时粘附在所述显示背板40上的非导电性胶层30上,在预设温度和预设重量下通过压合工具50针对性地朝着所述显示背板40的方向压合位于所述非导电性胶层30上的所述第二LED芯片21,此时,所述第二LED芯片21挤压所述显示背板40上的非导电性胶层30,以使得所述第二LED芯片21与所述显示背板40上对应的焊料41实现金属共晶键合。在压合过程中,所述非导电性胶层30上未粘附剥离后的所述第二LED芯片21的位置不会受到压合影响。Specifically, in the embodiment of the present application, as shown in FIG. 10 , the peeled second LED chip 21 is temporarily adhered to the non-conductive adhesive layer 30 on the display backplane 40 , at a preset temperature The second LED chip 21 located on the non-conductive adhesive layer 30 is press-pressed in the direction of the display backplane 40 by the pressing tool 50 under the predetermined weight. At this time, the second LED chip 21 The second LED chip 21 presses the non-conductive adhesive layer 30 on the display backplane 40 , so that the second LED chip 21 and the corresponding solder 41 on the display backplane 40 realize metal eutectic bonding. During the pressing process, the position of the second LED chip 21 that is not adhered and peeled off on the non-conductive adhesive layer 30 will not be affected by the pressing.
在本申请实施例中,所述预设温度为100°C-150°C,所述预设重量为2Kg-10kg。In the embodiment of the present application, the preset temperature is 100°C-150°C, and the preset weight is 2Kg-10kg.
S34、将所述第二LED芯片21与所述显示背板40上的焊料41进行焊接以完成所述第二LED芯片21的转移。S34 , welding the second LED chip 21 to the solder 41 on the display backplane 40 to complete the transfer of the second LED chip 21 .
具体地,在本申请实施方式中,如图11所示,在所述第二LED芯片21与所述显示背板40上的焊料41金属共晶键合之后,将所述第二LED芯片21与所述显示背板40上焊料41进行焊接,从而完成了所述第二LED芯片21的转移。Specifically, in the embodiment of the present application, as shown in FIG. 11 , after the second LED chip 21 and the solder 41 on the display backplane 40 are metal-eutectic bonded, the second LED chip 21 Soldering with the solder 41 on the display backplane 40 completes the transfer of the second LED chip 21 .
请参阅图12,在本实施方式中,所述步骤S40至少包括以下步骤。Please refer to FIG. 12 , in this implementation manner, the step S40 includes at least the following steps.
S41、提供第三生长基板12,在所述第三生长基板12面对所述非导电性胶层30的一侧粘附多个第三LED芯片22。S41 , providing a third growth substrate 12 , and adhering a plurality of third LED chips 22 on a side of the third growth substrate 12 facing the non-conductive adhesive layer 30 .
具体地,在本申请实施方式中,以所述第三生长基板12为蓝光LED芯片生长基板,所述第三LED芯片22为蓝光LED芯片为例进行说明。如图13所示,提供第三生长基板12,在所述第三生长基板12面对所述显示背板40的一侧通过Chip on Wafer(COW)临时粘附多个第三LED芯片22。Specifically, in the embodiment of the present application, the third growth substrate 12 is a blue LED chip growth substrate, and the third LED chip 22 is a blue LED chip as an example for description. As shown in FIG. 13 , a third growth substrate 12 is provided, and a plurality of third LED chips 22 are temporarily adhered on the side of the third growth substrate 12 facing the display backplane 40 by Chip on Wafer (COW).
S42、将所述第三生长基板12上预设位置的所述第三LED芯片22剥离至所述非导电性胶层30上,并移开所述第三生长基板12。S42 , peel off the third LED chip 22 at a predetermined position on the third growth substrate 12 onto the non-conductive adhesive layer 30 , and remove the third growth substrate 12 .
具体地,在本申请实施方式中,如图14所示,可使用激光针将预设位置的所述第三LED芯片22从所述第三生长基板12上激光剥离,被剥离的所述第三LED芯片22转移至所述非导电性胶层30上的相应位置,并将所述第三生长基板12以及第三生长基板12上未剥离的第三LED芯片22从所述非导电性胶层30上一并移开。其中,所述激光为248nm或266nm波长的激光。Specifically, in the embodiment of the present application, as shown in FIG. 14 , laser needles can be used to lift off the third LED chip 22 at the preset position from the third growth substrate 12 , and the stripped first LED chip 22 The three LED chips 22 are transferred to corresponding positions on the non-conductive adhesive layer 30, and the third growth substrate 12 and the unpeeled third LED chip 22 on the third growth substrate 12 are removed from the non-conductive adhesive layer. Layer 30 is removed together. Wherein, the laser is a laser with a wavelength of 248nm or 266nm.
S43、对位于所述非导电性胶层30上的所述第三LED芯片22进行压合,以使得所述第三LED芯片22与所述显示背板40上的焊料41实现金属共晶键合。S43. Pressing the third LED chip 22 on the non-conductive adhesive layer 30, so that the third LED chip 22 and the solder 41 on the display backplane 40 realize a metal eutectic bond combine.
具体地,在本申请实施方式中,如图15所示,剥离后的所述第三LED芯片22临时粘附在所述显示背板40上的非导电性胶层30上,在预设温度和预设重量下通过压合工具50针对性地朝着所述显示背板40的方向压合位于所述非导电性胶层30上的所述第三LED芯片22,此时,所述第三LED芯片22挤压所述显示背板40上的非导电性胶层30,以使得所述第三LED芯片22与所述显示背板40上对应的焊料41实现金属共晶键合。在压合过程中,所述非导电性胶层30上未粘附剥离后的所述第二LED芯片21的位置不会受到压合影响。Specifically, in the embodiment of the present application, as shown in FIG. 15, the peeled third LED chip 22 is temporarily adhered to the non-conductive adhesive layer 30 on the display backplane 40. The third LED chip 22 located on the non-conductive adhesive layer 30 is press-pressed in the direction of the display backplane 40 through the pressing tool 50 under the predetermined weight. At this time, the first The three LED chips 22 press the non-conductive adhesive layer 30 on the display backplane 40 , so that the third LED chip 22 and the corresponding solder 41 on the display backplane 40 realize metal eutectic bonding. During the pressing process, the position of the second LED chip 21 that is not adhered and peeled off on the non-conductive adhesive layer 30 will not be affected by the pressing.
在本申请实施例中,所述预设温度为100°C-150°C,所述预设重量为2Kg-10kg。In the embodiment of the present application, the preset temperature is 100°C-150°C, and the preset weight is 2Kg-10kg.
S44、将所述第三LED芯片22与所述显示背板40上的焊料41进行焊接以完成所述第三LED芯片22的转移。S44 , welding the third LED chip 22 to the solder 41 on the display backplane 40 to complete the transfer of the third LED chip 22 .
具体地,在本申请实施方式中,如图16所示,在所述第三LED芯片22与所述显示背板40上的焊料41金属共晶键合之后,将所述第三LED芯片22与所述显示背板40上焊料41进行焊接,从而完成了所述第三LED芯片22的转移。Specifically, in the embodiment of the present application, as shown in FIG. 16 , after the third LED chip 22 is metal eutectically bonded to the solder 41 on the display backplane 40, the third LED chip 22 Soldering with the solder 41 on the display backplane 40 completes the transfer of the third LED chip 22 .
综上所述,本申请的LED芯片的巨量转移方法通过在显示背板40上涂布非导电性胶层30,解决了生长基板上的LED芯片在被激光剥离转移到显示背板的过程中LED芯片出现偏移的问题,因此不但提高了LED芯片的良率,并提高了LED芯片转移效率的效果。In summary, the mass transfer method of LED chips of the present application solves the problem of the process of LED chips on the growth substrate being lifted off by laser and transferred to the display backplane by coating the non-conductive adhesive layer 30 on the display backplane 40. There is a problem of offset in the LED chip, so not only the yield rate of the LED chip is improved, but also the effect of the transfer efficiency of the LED chip is improved.
本申请实施例还提供一种显示面板,其包括上述实施例中所示的显示背板40以及通过上述实施例所述巨量转移方法转移至所述显示背板40上的第一LED芯片20、第二LED芯片21和第三LED芯片22。其中,所述第一LED芯片20、所述第二LED芯片21和所述第三LED芯片22组成了多个像素区域。可以理解的是,所述第一LED芯片20、所述第二LED芯片21和所述第三LED芯片22可分别为彼此不同的红光LED芯片、绿光LED芯片或蓝光LED芯片。在其他实施例中,其中,所述显示面板还可以包括显示区以及非显示区,所述显示区用作图像显示,所述非显示区环绕设置于所述显示区周围,并不用作图像显示。所述显示面板可以以液晶材料作为显示介质,但本申请并不以此为限。The embodiment of the present application also provides a display panel, which includes the display backplane 40 shown in the above-mentioned embodiments and the first LED chips 20 transferred to the display backplane 40 by the mass transfer method described in the above-mentioned embodiments. , the second LED chip 21 and the third LED chip 22. Wherein, the first LED chip 20, the second LED chip 21 and the third LED chip 22 form a plurality of pixel regions. It can be understood that, the first LED chip 20 , the second LED chip 21 and the third LED chip 22 may be different red LED chips, green LED chips or blue LED chips respectively. In other embodiments, the display panel may further include a display area and a non-display area, the display area is used for image display, and the non-display area is arranged around the display area and is not used for image display . The display panel may use liquid crystal material as a display medium, but the present application is not limited thereto.
可以理解地,所述显示面板可用于包含诸如个人数字助理(Personal Digital Assistant,PDA)和/或音乐播放器功能的电子设备,诸如手机、平板电脑、具备无线通讯功能的可穿戴电子设备(如智能手表)等。上述电子设备也可以是其它电子装置,诸如具有触敏表面(例如触控面板)的膝上型计算机(Laptop)等。在一些实施例中,所述电子设备可以具有通信功能,即可以通过2G(第二代手机通信技术规格)、3G(第三代手机通信技术规格)、4G(第四代手机通信技术规格)、5G(第五代手机通信技术规格)或W-LAN(无线局域网)或今后可能出现的通信方式与网络建立通信。为简明起见,对此本申请实施例不做进一步限定。It can be understood that the display panel can be used in electronic devices including functions such as personal digital assistants (Personal Digital Assistant, PDA) and/or music players, such as mobile phones, tablet computers, wearable electronic devices with wireless communication functions (such as smart watch), etc. The aforementioned electronic device may also be other electronic devices, such as a laptop computer (Laptop) with a touch-sensitive surface (eg, a touch panel). In some embodiments, the electronic device can have a communication function, that is, it can communicate through 2G (second-generation mobile phone communication technical specification), 3G (third-generation mobile phone communication technical specification), 4G (fourth-generation mobile phone communication technical specification) , 5G (fifth-generation mobile phone communication technology specification) or W-LAN (wireless local area network) or communication methods that may appear in the future to establish communication with the network. For the sake of brevity, this embodiment of the present application does not make further limitations.
本申请实施例还提供一种显示装置,其包括支撑框架和上述实施例中的显示面板,所述支撑框架用于支撑所述显示面板。其中,所述显示装置包括但不局限于:Mini LED面板、Mirco LED面板、手机、平板电脑、导航仪、显示器等任何具有显示功能的电子设备或者部件,本申请对此不作具体限制。可以理解的,所述显示装置还可以包括:像素电路,设置于所述显示面板内的显示区域,用于显示图像;电路板组件,用于提供工作电压、驱动电流以及相应的功能信号。An embodiment of the present application further provides a display device, which includes a support frame and the display panel in the above embodiments, and the support frame is used to support the display panel. Wherein, the display device includes, but is not limited to: any electronic device or component with a display function such as Mini LED panel, Mirco LED panel, mobile phone, tablet computer, navigator, monitor, etc., and this application does not specifically limit it. It can be understood that the display device may further include: a pixel circuit disposed in the display area of the display panel for displaying images; a circuit board assembly for providing operating voltage, driving current and corresponding functional signals.
应当理解的是,本申请的应用不限于上述的举例,对本领域普通技术人员来说,可以根据上述说明加以改进或变换,所有这些改进和变换都应属于本申请所附权利要求的保护范围。It should be understood that the application of the present application is not limited to the above examples, and those skilled in the art can make improvements or changes based on the above descriptions, and all these improvements and changes should belong to the protection scope of the appended claims of the present application.

Claims (20)

  1. 一种LED芯片的巨量转移方法,其特征在于,所述巨量转移方法包括:A mass transfer method for LED chips, characterized in that the mass transfer method comprises:
    提供显示背板,在所述显示背板的一侧设置非导电性胶层;A display backplane is provided, and a non-conductive adhesive layer is provided on one side of the display backplane;
    提供第一生长基板,将所述第一生长基板上的多个第一LED芯片转移至所述非导电性胶层,将所述第一LED芯片与所述显示背板电连接;providing a first growth substrate, transferring a plurality of first LED chips on the first growth substrate to the non-conductive adhesive layer, and electrically connecting the first LED chips to the display backplane;
    提供第二生长基板,将所述第二生长基板上的多个第二LED芯片转移至所述非导电性胶层,将所述第二LED芯片与所述显示背板电连接;providing a second growth substrate, transferring a plurality of second LED chips on the second growth substrate to the non-conductive adhesive layer, and electrically connecting the second LED chips to the display backplane;
    提供第三生长基板,将所述第三生长基板上的多个第三LED芯片转移至所述非导电性胶层,将所述第三LED芯片与所述显示背板电连接。A third growth substrate is provided, a plurality of third LED chips on the third growth substrate are transferred to the non-conductive adhesive layer, and the third LED chips are electrically connected to the display backplane.
  2. 如权利要求1所述的LED芯片的巨量转移方法,其特征在于,所述提供第一生长基板,将所述第一生长基板上的多个第一LED芯片转移至所述非导电性胶层,将所述第一LED芯片与所述显示背板电连接,包括:The mass transfer method of LED chips according to claim 1, wherein the first growth substrate is provided, and a plurality of first LED chips on the first growth substrate are transferred to the non-conductive adhesive layer, electrically connecting the first LED chip to the display backplane, comprising:
    提供第一生长基板,在所述第一生长基板面对所述非导电性胶层的一侧设置多个第一LED芯片;A first growth substrate is provided, and a plurality of first LED chips are arranged on a side of the first growth substrate facing the non-conductive adhesive layer;
    将所述第一生长基板上预设位置的所述第一LED芯片剥离至所述非导电性胶层上,并移开所述第一生长基板;peeling off the first LED chip at a predetermined position on the first growth substrate onto the non-conductive adhesive layer, and removing the first growth substrate;
    对位于所述非导电性胶层上的所述第一LED芯片进行压合,以使得所述第一LED芯片与所述显示背板上的焊料实现金属共晶键合;Pressing the first LED chip on the non-conductive adhesive layer, so that the first LED chip and the solder on the display backplane realize metal eutectic bonding;
    将所述第一LED芯片与所述显示背板上的焊料进行焊接以完成所述第一LED芯片的转移。Welding the first LED chip to the solder on the display backplane to complete the transfer of the first LED chip.
  3. 如权利要求1所述的LED芯片的巨量转移方法,其特征在于,所述提供第二生长基板,将所述第二生长基板上的多个第二LED芯片转移至所述非导电性胶层,将所述第二LED芯片与所述显示背板电连接,包括:The mass transfer method of LED chips according to claim 1, wherein the second growth substrate is provided, and a plurality of second LED chips on the second growth substrate are transferred to the non-conductive adhesive layer, electrically connecting the second LED chip with the display backplane, comprising:
    提供第二生长基板,在所述第二生长基板面对所述非导电性胶层的一侧设置多个第二LED芯片;A second growth substrate is provided, and a plurality of second LED chips are arranged on a side of the second growth substrate facing the non-conductive adhesive layer;
    将所述第二生长基板上预设位置的所述第二LED芯片剥离至所述非导电性胶层上,并移开所述第二生长基板;peeling off the second LED chip at a preset position on the second growth substrate onto the non-conductive adhesive layer, and removing the second growth substrate;
    对位于所述非导电性胶层上的所述第二LED芯片进行压合,以使得所述第二LED芯片与所述显示背板上的焊料实现金属共晶键合;Pressing the second LED chip on the non-conductive adhesive layer, so that the second LED chip and the solder on the display backplane realize metal eutectic bonding;
    将所述第二LED芯片与所述显示背板上的焊料进行焊接以完成所述第二LED芯片的转移。Welding the second LED chip to the solder on the display backplane to complete the transfer of the second LED chip.
  4. 如权利要求1所述的LED芯片的巨量转移方法,其特征在于,所述提供第三生长基板,将所述第三生长基板上的多个第三LED芯片转移至所述非导电性胶层,将所述第二LED芯片与所述显示背板电连接,包括:The mass transfer method of LED chips according to claim 1, wherein the third growth substrate is provided, and a plurality of third LED chips on the third growth substrate are transferred to the non-conductive adhesive layer, electrically connecting the second LED chip with the display backplane, comprising:
    提供第三生长基板,在所述第三生长基板面对所述非导电性胶层的一侧粘附多个第三LED芯片;providing a third growth substrate, adhering a plurality of third LED chips on the side of the third growth substrate facing the non-conductive adhesive layer;
    将所述第三生长基板上预设位置的所述第三LED芯片剥离至所述非导电性胶层上,并移开所述第三生长基板;peeling off the third LED chip at a preset position on the third growth substrate onto the non-conductive adhesive layer, and removing the third growth substrate;
    对位于所述非导电性胶层上的所述第三LED芯片进行压合,以使得所述第三LED芯片与所述显示背板上的焊料实现金属共晶键合;Pressing the third LED chip on the non-conductive adhesive layer, so that the third LED chip and the solder on the display backplane realize metal eutectic bonding;
    将所述第三LED芯片与所述显示背板上的焊料进行焊接以完成所述第三LED芯片的转移。Welding the third LED chip to the solder on the display backplane to complete the transfer of the third LED chip.
  5. 如权利要求2所述的LED芯片的巨量转移方法,其特征在于,所述将所述第一生长基板上预设位置的所述第一LED芯片剥离至所述非导电性胶层上,还包括:The method for mass transfer of LED chips according to claim 2, characterized in that, the first LED chip at a preset position on the first growth substrate is peeled off onto the non-conductive adhesive layer, Also includes:
    使用激光针将所述第一生长基板上所述预设位置的所述第一LED芯片从所述第一生长基板上激光剥离,其中,所述激光的波长为248nm或266nm。Using a laser needle to laser lift off the first LED chip at the preset position on the first growth substrate from the first growth substrate, wherein the wavelength of the laser light is 248nm or 266nm.
  6. 如权利要求3所述的LED芯片的巨量转移方法,其特征在于,所述将所述第二生长基板上预设位置的所述第二LED芯片剥离至所述非导电性胶层上,还包括:The method for mass transfer of LED chips according to claim 3, characterized in that, the second LED chip at a predetermined position on the second growth substrate is peeled off onto the non-conductive adhesive layer, Also includes:
    使用激光针将所述第二生长基板上所述预设位置的所述第二LED芯片从所述第二生长基板上激光剥离,其中,所述激光的波长为248nm或266nm。Using a laser needle to laser lift off the second LED chip at the preset position on the second growth substrate from the second growth substrate, wherein the wavelength of the laser light is 248nm or 266nm.
  7. 如权利要求4所述的LED芯片的巨量转移方法,其特征在于,所述将所述第三生长基板上预设位置的所述第三LED芯片剥离至所述非导电性胶层上,还包括:The method for mass transfer of LED chips according to claim 4, wherein the step of peeling off the third LED chip at a predetermined position on the third growth substrate onto the non-conductive adhesive layer, Also includes:
    使用激光针将所述第三生长基板上所述预设位置的所述第三LED芯片从所述第三生长基板上激光剥离,其中,所述激光的波长为248nm或266nm。Using a laser needle to laser lift off the third LED chip at the preset position on the third growth substrate from the third growth substrate, wherein the wavelength of the laser light is 248nm or 266nm.
  8. 如权利要求2所述的LED芯片的巨量转移方法,其特征在于,所述对位于所述非导电性胶层上的所述第一LED芯片进行压合,包括:The method for mass transfer of LED chips according to claim 2, wherein the pressing of the first LED chips on the non-conductive adhesive layer comprises:
    在预设温度和预设重量下通过压合工具针对性地朝着所述显示背板的方向压合位于所述非导电性胶层上的所述第一LED芯片。The first LED chip located on the non-conductive adhesive layer is purposely pressed toward the direction of the display backplane by a pressing tool at a preset temperature and a preset weight.
  9. 如权利要求3所述的LED芯片的巨量转移方法,其特征在于,所述对位于所述非导电性胶层上的所述第二LED芯片进行压合,包括:The method for mass transfer of LED chips according to claim 3, wherein the pressing of the second LED chips on the non-conductive adhesive layer comprises:
    在所述预设温度和所述预设重量下通过压合工具针对性地朝着所述显示背板的方向压合位于所述非导电性胶层上的所述第二LED芯片。Under the preset temperature and the preset weight, the second LED chip on the non-conductive adhesive layer is targetedly pressed toward the direction of the display backplane by a pressing tool.
  10. 如权利要求4所述的LED芯片的巨量转移方法,其特征在于,所述对位于所述非导电性胶层上的所述第三LED芯片进行压合,包括:The method for mass transfer of LED chips according to claim 4, wherein the pressing of the third LED chips on the non-conductive adhesive layer comprises:
    在所述预设温度和所述预设重量下通过压合工具针对性地朝着所述显示背板的方向压合位于所述非导电性胶层上的所述第三LED芯片。Under the preset temperature and the preset weight, the third LED chip on the non-conductive adhesive layer is purposely pressed toward the direction of the display backplane by a pressing tool.
  11. 如权利要求8-10任一项所述的LED芯片的巨量转移方法,其特征在于,所述压合工具为软压板。The mass transfer method of LED chips according to any one of claims 8-10, wherein the pressing tool is a soft pressing plate.
  12. 如权利要求11所述的LED芯片的巨量转移方法,其特征在于,所述压合工具由聚二甲基硅氧烷或聚氨酯类材料制成。The method for mass transfer of LED chips according to claim 11, wherein the pressing tool is made of polydimethylsiloxane or polyurethane materials.
  13. 如权利要求8-10所述的LED芯片的巨量转移方法,其特征在于,所述预设温度为100°C-150°C,所述预设重量为2Kg-10kg。The mass transfer method of LED chips according to claims 8-10, characterized in that, the preset temperature is 100°C-150°C, and the preset weight is 2Kg-10kg.
  14. 如权利要求1所述的LED芯片的巨量转移方法,其特征在于,所述显示背板为薄膜场效应管背板。The method for mass transfer of LED chips according to claim 1, wherein the display backplane is a thin film field effect transistor backplane.
  15. 如权利要求1所述的LED芯片的巨量转移方法,其特征在于,所述非导电性胶层由非导电性胶制成。The mass transfer method of LED chips according to claim 1, wherein the non-conductive adhesive layer is made of non-conductive adhesive.
  16. 如权利要求1所述的LED芯片的巨量转移方法,其特征在于,还包括:在所述显示背板的一侧涂布所述非导电性胶层,固化去除溶剂。The method for mass transfer of LED chips according to claim 1, further comprising: coating the non-conductive adhesive layer on one side of the display backplane, curing and removing the solvent.
  17. 如权利要求16所述的LED芯片的巨量转移方法,其特征在于,所述固化去除溶剂通过加热固化的方式。The method for mass transfer of LED chips according to claim 16, characterized in that the solvent is removed by curing by heating and curing.
  18. 如权利要求1所述的LED芯片的巨量转移方法,其特征在于,所述第一LED芯片、所述第二LED芯片和所述第三LED芯片分别为彼此不同的红光LED芯片、绿光LED芯片或蓝光LED芯片。The mass transfer method of LED chips according to claim 1, wherein the first LED chip, the second LED chip and the third LED chip are red LED chips, green LED chips, and green LED chips that are different from each other. Light LED chips or blue LED chips.
  19. 一种显示面板,其特征在于,包括如权利要求1-18任意一项所述的显示背板以及通过所述巨量转移方法转移至所述显示背板上的第一LED芯片、第二LED芯片和第三LED芯片。A display panel, characterized in that it comprises the display backplane according to any one of claims 1-18 and the first LED chip and the second LED chip transferred to the display backplane by the mass transfer method. chip and a third LED chip.
  20. 一种显示装置,其特征在于,包括支撑框架和如权利要求19所述的显示面板,所述支撑框架用于支撑所述显示面板。A display device, characterized by comprising a support frame and the display panel according to claim 19, the support frame being used to support the display panel.
PCT/CN2021/113592 2021-08-19 2021-08-19 Mass transfer method for led chip, display panel, and display apparatus WO2023019522A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PCT/CN2021/113592 WO2023019522A1 (en) 2021-08-19 2021-08-19 Mass transfer method for led chip, display panel, and display apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/CN2021/113592 WO2023019522A1 (en) 2021-08-19 2021-08-19 Mass transfer method for led chip, display panel, and display apparatus

Publications (1)

Publication Number Publication Date
WO2023019522A1 true WO2023019522A1 (en) 2023-02-23

Family

ID=85239370

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/CN2021/113592 WO2023019522A1 (en) 2021-08-19 2021-08-19 Mass transfer method for led chip, display panel, and display apparatus

Country Status (1)

Country Link
WO (1) WO2023019522A1 (en)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105493297A (en) * 2015-05-21 2016-04-13 歌尔声学股份有限公司 Transfer method and manufacturing method and apparatus of micro light emiting diode, and electronic equipment
CN106992230A (en) * 2017-04-28 2017-07-28 京东方科技集团股份有限公司 A kind of LED particulates printing transferring method
CN108538878A (en) * 2018-07-11 2018-09-14 大连德豪光电科技有限公司 Micro- light emitting diode base plate and preparation method thereof, display device
CN109661122A (en) * 2018-11-09 2019-04-19 华中科技大学 It is a kind of suitable for micro-led selective flood tide transfer method
CN109920812A (en) * 2017-12-13 2019-06-21 群创光电股份有限公司 Electronic device and its manufacturing method

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105493297A (en) * 2015-05-21 2016-04-13 歌尔声学股份有限公司 Transfer method and manufacturing method and apparatus of micro light emiting diode, and electronic equipment
CN106992230A (en) * 2017-04-28 2017-07-28 京东方科技集团股份有限公司 A kind of LED particulates printing transferring method
CN109920812A (en) * 2017-12-13 2019-06-21 群创光电股份有限公司 Electronic device and its manufacturing method
CN108538878A (en) * 2018-07-11 2018-09-14 大连德豪光电科技有限公司 Micro- light emitting diode base plate and preparation method thereof, display device
CN109661122A (en) * 2018-11-09 2019-04-19 华中科技大学 It is a kind of suitable for micro-led selective flood tide transfer method

Similar Documents

Publication Publication Date Title
CN100428010C (en) Fabricating method of flexible display
CN104465479B (en) Flexible display substrates motherboard and the preparation method of flexible display substrates
CN109638058A (en) The production method and flexible display apparatus of flexible display apparatus
CN106952583A (en) The preparation method of flexible array substrate
WO2021003849A1 (en) Display panel and manufacturing method therefor
JP2011227205A (en) Display device
US11215883B2 (en) Chip on film package and display apparatus having ihe same
US10674606B2 (en) Display panel and display device
CN106530972A (en) Fabrication method for flexible array substrate
CN110109297A (en) Display panel and its manufacturing method
CN110299377B (en) Display substrate, manufacturing method and display device
CN108962761A (en) A kind of COF preparation method
KR100447233B1 (en) A Liquid Crystal Display Device
WO2023019522A1 (en) Mass transfer method for led chip, display panel, and display apparatus
JPS59210419A (en) Liquid crystal display body device
US8330928B2 (en) Pad of liquid crystal display device and method for manufacturing the same
CN115708219A (en) Mass transfer method of LED chips, display panel and display device
JP2004145129A (en) Display device, method manufacturing the same, and apparatus for manufacture display device
WO2021134489A1 (en) Mass transfer apparatus, fabrication method therefor, and display device
WO2021051535A1 (en) Array substrate and preparation method therefor
WO2021051462A1 (en) Fabrication method for display device and display device
US20240038744A1 (en) Substrate encapsulating method, display panel, and display device
WO2023070369A1 (en) Micro light-emitting diode display and manufacturing method therefor
TWI817633B (en) Display panel
US20240030393A1 (en) Micro light emitting diode display panel, manufacturing method thereof and display device

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 21953766

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE